WO2014119929A1 - Method for fabricating cell for fuel battery - Google Patents

Method for fabricating cell for fuel battery Download PDF

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Publication number
WO2014119929A1
WO2014119929A1 PCT/KR2014/000857 KR2014000857W WO2014119929A1 WO 2014119929 A1 WO2014119929 A1 WO 2014119929A1 KR 2014000857 W KR2014000857 W KR 2014000857W WO 2014119929 A1 WO2014119929 A1 WO 2014119929A1
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Prior art keywords
layer
electrolyte layer
electrolyte
forming
filling
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PCT/KR2014/000857
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French (fr)
Korean (ko)
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권오웅
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지브이퓨얼셀 주식회사
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Publication of WO2014119929A1 publication Critical patent/WO2014119929A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00Fuel cells; Manufacture thereof
    • H01M8/10Fuel cells with solid electrolytes
    • H01M8/12Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • H01M8/1286Fuel cells applied on a support, e.g. miniature fuel cells deposited on silica supports
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00Fuel cells; Manufacture thereof
    • H01M8/10Fuel cells with solid electrolytes
    • H01M8/12Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • H01M8/124Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the process of manufacturing or by the material of the electrolyte
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00Fuel cells; Manufacture thereof
    • H01M8/10Fuel cells with solid electrolytes
    • H01M8/12Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • H01M2008/1293Fuel cells with solid oxide electrolytes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30Hydrogen technology
    • Y02E60/50Fuel cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the present invention relates to a method for manufacturing a stack for a fuel cell, and more particularly, to a method for manufacturing a fuel cell for improving an electrolyte layer in which pinholes are generated in a solid oxide fuel cell.
  • Solid Oxide Fuel Cells operate at the highest temperatures (700–1000 ° C) of fuel cells, using solid oxides with oxygen or hydrogen ion conductivity as electrolytes.
  • solid oxide fuel cells have a simpler structure than other fuel cells because all components are solid, there is no problem of electrolyte loss, replenishment and corrosion, no precious metal catalyst, and fuel supply through direct internal reforming. This is easy.
  • it has the advantage that thermal combined cycle power generation using waste heat is possible because the high-temperature gas is discharged.
  • a typical solid oxide fuel cell is composed of a dense electrolyte layer of oxygen ion conductivity and a porous cathode and anode positioned on both sides thereof.
  • the operating principle is that oxygen permeates through the porous cathode and reaches the electrolyte surface. Oxygen ions generated by the oxygen reduction reaction move to the fuel electrode through the dense electrolyte and react with hydrogen supplied to the porous anode to generate water. At this time, since electrons are generated at the anode and electrons are consumed at the cathode, electricity flows when the two electrodes are connected to each other.
  • the solid oxide fuel cell generates electricity in one cell, but the amount of electricity is very small to be used in real life, so the cells are stacked and used as a large amount of electrical energy. The collection of several cells is called a stack.
  • Figure 1 is a photograph showing a cross-sectional view of a single cell of the anode-supported solid oxide fuel cell according to the prior art 1.
  • a unit cell includes a porous anode support, a cathode functional layer, an electrolyte layer, and a composite air electrode layer, and the composite air electrode layer is composed of a cathode functional layer, an air electrode, and a current collector layer.
  • the metal support-type metal oxide fuel cell of the related art 2 includes a metal support 101; A first electrode 103 formed on one surface of the metal support 101; An electrolyte 107 formed on one surface of the first electrode 103 and a second electrode 109 formed on one surface of the electrolyte 107 are formed in a stacked stack to supply and discharge fuel or air. It includes a manifold 110, the first electrode 103 and the second electrode 109 is composed of different electrodes of the air electrode or fuel electrode.
  • the electrolyte material flows through the pores in the process of forming the electrolyte on the porous support to form pinholes or the like.
  • a separate method is required.
  • the thin film fuel cell 100 based on the conventional porous substrate shown in FIG. 3 in common with the prior arts 1 and 2 has an electrolyte thin film under the influence of the rough electrode (mainly anode) surface during fabrication. Defects such as pinholes may occur in the 120, and these defects may cause problems such as shorting or leakage, which may adversely affect cell performance.
  • the rough electrode mainly anode
  • An object of the present invention is to solve the problems of the prior art as described above, to remove the top portion of the first electrolyte layer in which the pinhole is formed to planarize the surface, to a highly dense packed layer It is to provide a fuel cell cell manufacturing method that can prevent problems such as short (short) or leakage (leakage) through the improvement of the electrolyte layer by stacking the second electrolyte layer after filling the pin hole.
  • the present invention comprises the steps of forming a porous first electrode layer; Forming a first electrolyte layer on the first electrode layer; Removing the top of the first electrolyte layer to planarize the removal surface; Forming a filling layer on the planarized surface of the first electrolyte layer to fill pin holes formed in the first electrolyte layer; Removing the packed layer; Forming a second electrolyte layer on the first electrolyte layer from which the filling layer is removed; And forming a second electrode layer on the second electrolyte layer.
  • planarization of the first electrolyte layer and the formation of the packed layer may be performed in one step, or the planarization of the first electrolyte layer and the formation of the packed layer may be performed in several steps by dividing the entire height.
  • the second electrolyte layer in the present invention may be formed of the same material as the first electrolyte layer, or may be formed of a different material.
  • the second electrolyte layer in the present invention may be formed by the same process as the first electrolyte layer, or may be formed by a different process.
  • the filling layer in the filling layer forming step of the present invention may be formed in a highly dense structure.
  • the filling layer in the present invention may be formed of a non-conductive material including an electrolyte or aluminum oxide (Al 2 O 3 ).
  • the upper surface of the first electrolyte layer in which the pinholes are formed is partially removed to planarize the surface, and the pinholes are filled with a highly dense packed layer, followed by stacking the second electrolyte layer.
  • the improvement of the layer has an effect that can prevent problems such as short (short) or leakage (leakage).
  • FIG. 1 is a cross-sectional view of a single cell of a cathode support solid oxide fuel cell according to the related art.
  • FIG. 2 is a cross-sectional view showing an example of a metal support-type solid oxide fuel cell according to the prior art 2.
  • FIG 3 is a reference diagram showing a state in which a pin hole is formed in the electrolyte layer in the prior art.
  • FIG. 4 is a block diagram of a fuel cell manufacturing method according to a first embodiment of the present invention.
  • 5A to 5G are flowcharts of a fuel cell manufacturing method according to a first embodiment of the present invention.
  • the present invention comprises the steps of forming a porous first electrode layer; Forming a first electrolyte layer on the first electrode layer; Removing the top of the first electrolyte layer to planarize the removal surface; Forming a filling layer on the planarized surface of the first electrolyte layer to fill pin holes formed in the first electrolyte layer; Removing the packed layer; Forming a second electrolyte layer on the first electrolyte layer from which the filling layer is removed; And forming a second electrode layer on the second electrolyte layer.
  • planarization of the first electrolyte layer and the formation of the packed layer may be performed in one step, or the planarization of the first electrolyte layer and the formation of the packed layer may be performed in several steps by dividing the entire height.
  • the second electrolyte layer in the present invention may be formed of the same material as the first electrolyte layer, or may be formed of a different material.
  • the second electrolyte layer in the present invention may be formed by the same process as the first electrolyte layer, or may be formed by a different process.
  • the filling layer in the filling layer forming step of the present invention may be formed in a highly dense structure.
  • the filling layer in the present invention may be formed of a non-conductive material including an electrolyte or aluminum oxide (Al 2 O 3 ).
  • FIG. 4 is a block diagram showing a fuel cell manufacturing method according to a first embodiment of the present invention
  • Figure 5a to 5g is a flowchart showing a fuel cell manufacturing method according to a first embodiment of the present invention. .
  • the fuel cell manufacturing method is a porous first electrode layer forming step (S200), the first electrolyte layer forming step (S210), the first electrolyte layer surface planarization step (S220), A filling layer forming step (S230), a filling layer removing step (S240), a second electrolyte layer forming step (S250), and a second electrode layer forming step (S260) are included.
  • the porous first electrode layer forming step (S200) is a step of forming the first electrode layer 310 to have a porous (porous). [See Fig. 5 (a)]
  • the first electrode layer forming step (S200) is made of a material such as platinum (platinum, Pt), palladium (Pd), nickel (Ni), ruthenium (Ru), etc., which is a high-performance catalyst, sputtering, pulsed laser deposition Anodes are deposited by chemical vapor deposition (CVD), such as physical vapor deposition (PVD), atomic layer deposition (ALD), etc. (Pulsed Laser Deposition, PLD).
  • CVD chemical vapor deposition
  • PVD physical vapor deposition
  • ALD atomic layer deposition
  • PLD Pulsed Laser Deposition
  • the first electrolyte layer forming step (S210) is a step of depositing and forming the first electrolyte layer 320 on the first electrode layer 310. At this time, in the first electrolyte layer forming step (S210), the first electrode layer 310 is formed to have a porosity, so that small pin-holes are formed under the influence of the uneven electrode surface. [See Fig. 5 (b)]
  • the first electrolyte layer 320 may include zirconium oxide (Zr x O y ), cerium oxide (Ce x O y ), lanthanum galate, barium cerate, and barium zirconate ( Choose from a wide range of ionic conductors, such as Barium Zirconate, bismuth-based oxides or Oxygen ion conducting materials such as various doping phases of these materials, or Proton conducting materials have.
  • the first electrolyte layer 320 may be applied with an electrolyte material such as Gd-doped CeO 2 (GDC) or Yttria-stabilized zirconia (YSZ), and may be sputtered or pulsed laser deposition (PLD). It is deposited by a method such as chemical vapor deposition (CVD) such as physical vapor deposition (PVD), atomic layer deposition (ALD).
  • CVD chemical vapor deposition
  • PVD physical vapor deposition
  • ALD atomic layer deposition
  • the first electrolyte layer surface planarization step (S220) is a step of removing and planarizing an upper end of the first electrolyte layer 320 to finish the surface of the first electrolyte layer 320 with the second electrolyte layer 330.
  • the first electrolyte layer surface planarization step (S220) may be performed by reactive ion etching (RIE). [See Fig. 5 (c)]
  • the filling layer 330 may be atomized to fill pin-holes formed in the first electrolyte layer 320 on the planarized surface of the first electrolyte layer 320. It is a step of depositing and forming by a method such as Chemical Vapor Deposition (CVD), such as Atomic Layer Deposition (ALD). [See Fig. 5 (d)]
  • CVD Chemical Vapor Deposition
  • ALD Atomic Layer Deposition
  • the filling layer 330 in the filling layer forming step (S230) is formed to have a highly dense structure to fill a defect space such as a pin hole when forming.
  • the filling layer 330 has a small fin in the first electrolyte layer 320 under the influence of the rough surface of the uneven first electrode layer 310 in the process of forming the first electrolyte layer 320. As holes are generated, a short circuit or leakage occurs in the fuel cell. To solve this problem, the inside of the pin hole is filled with the filling of the filling layer 330.
  • the filling layer 330 may be formed of a non-conductive material such as aluminum oxide (Al 2 O 3 ) as well as an electrolyte.
  • a non-conductive material such as aluminum oxide (Al 2 O 3 ) as well as an electrolyte.
  • Removing the filling layer (S240) is a step of removing the filling layer 330 through a process such as reactive ion etching (RIE), so that the filling of the filling layer 330 to fill only the pin hole. 1 This is a step of removing a portion in contact with the surface of the electrolyte layer 320. [See Fig. 5 (e)]
  • the first electrolyte layer is filled with the pinholes filled with the filling of the filling layer 330 while removing the upper end of the filling layer 330 in contact with the surface of the first electrolyte layer 320.
  • a second electrolyte layer 340 having a dense structure is formed by depositing a thin film on the planarized surface of the 320. [See Fig. 5 (f)]
  • the second electrolyte layer 340 may include zirconium oxide (Zr x O y ), cerium oxide (Ce x O y ), lanthanum galate, barium cerate, and barium zirconate ( Choose from a wide range of ionic conductors, such as Barium Zirconate, bismuth-based oxides or Oxygen ion conducting materials such as various doping phases of these materials, or Proton conducting materials have.
  • an electrolyte material such as Gd-doped CeO 2 (GDC) or Yttria-stabilized zirconia (YSZ) may be applied to the second electrolyte layer 340. It is deposited by a method such as chemical vapor deposition (CVD) such as physical vapor deposition (PVD), atomic layer deposition (ALD).
  • CVD chemical vapor deposition
  • PVD physical vapor deposition
  • ALD atomic layer deposition
  • the second electrolyte layer forming step (S250) is to finish the upper surface of the first electrolyte layer 320 with the second electrolyte layer 330.
  • first electrolyte layer surface planarization step S220 and the filling layer forming step S230 may be performed at a time by a height corresponding to the removal height of the first electrolyte layer 320 and the formation height of the filling layer 330.
  • the total height corresponding to the removal height of the first electrolyte layer 320 and the formation height of the filling layer 330 may be divided into a plurality of steps by the divided heights, and the steps may be sequentially performed.
  • the electrolyte materials forming the first electrolyte layer 320 and the second electrolyte layer 340 are the same material. It may be formed of or made of different materials.
  • the process of forming the first electrolyte layer 320 and the second electrolyte layer 340 is the same. It may be carried out in a process or in a different process.
  • the first electrolyte layer 320 and the second electrolyte layer 340 are the same material (for example, YSZ), but may be an application using a different material (for example, GDC), the first electrolyte layer in the deposition process
  • the chemical vapor deposition method 320 may include chemical vapor deposition (CVD) such as physical vapor deposition (PVD), atomic layer deposition (ALD), and the like, such as sputtering and pulsed laser deposition (PLD). Chemical Vapor Deposition) and the second electrolyte layer 340 may be performed by a chemical vapor deposition (CVD) process, such as atomic layer deposition (ALD). Can be.
  • CVD chemical vapor deposition
  • ALD atomic layer deposition
  • the second electrode layer forming step S260 is a step of forming the second electrode layer 350 on the second electrolyte layer 340. (See Fig. 5 (g))
  • the second electrode layer forming step (S260) is made of a high performance catalyst such as platinum (platinum, Pt), palladium (Pd), nickel (Ni), ruthenium (Ru), sputtering, pulsed laser deposition method Cathode is deposited by a method such as chemical vapor deposition (CVD) such as physical vapor deposition (PVD), atomic layer deposition (ALD), etc. (Pulsed Laser Deposition, PLD), etc. In this step, the second electrode layer 350 is formed as an electrode.
  • CVD chemical vapor deposition
  • PVD physical vapor deposition
  • ALD atomic layer deposition
  • PLD Pulsed Laser Deposition
  • the fuel cell 300 manufactured by the fuel cell manufacturing method of the present invention includes a first electrode layer 310, a first electrolyte layer 320, a second electrolyte layer 340, and a second electrode layer 350. do.
  • first and second electrolyte layers 320 and 340 provide a passage for the movement of ions between the electrodes but block the movement of electrons and separate fuel and oxygen, and are formed by the catalyst.
  • the 310 and the second electrode layer 350 serve to provide a large surface area for the electrochemical reaction to occur and to provide a movement path for electrons generated at this time.
  • the first electrode layer 310 is an anode electrode and is made of a material such as platinum (platinum, Pt), palladium (Pd), nickel (Ni), ruthenium (Ru), etc., which is a high-performance catalyst, and is formed by sputtering and pulse laser deposition ( Physical vapor deposition (PVD) such as Pulsed Laser Deposition (PLD), etc., is deposited by chemical vapor deposition (CVD) such as Atomic Layer Deposition (ALD). .
  • PVD Physical vapor deposition
  • PLD Pulsed Laser Deposition
  • CVD chemical vapor deposition
  • ALD Atomic Layer Deposition
  • the first electrode layer 310 is formed to have a porous (porous) for gas infiltration and expansion of the reaction area.
  • the first electrolyte layer 320 is formed on the first electrode layer 310, and includes zirconium oxide (Zr x O y ), cerium oxide (Ce x O y ), lanthanum galate, and barium cerate.
  • Ion conductors such as oxygen ion conducting materials, such as Cerate, Barium Zirconate, bismuth-based oxides or various doping phases of these materials, or Proton conducting materials You can choose from a wide range of categories.
  • an electrolyte material such as Gd-doped CeO 2 (GDC) or Yttria-stabilized zirconia (YSZ) may be applied to the first electrolyte layer 320.
  • GDC Gd-doped CeO 2
  • YSZ Yttria-stabilized zirconia
  • the first electrolyte layer 320 is formed such that the first electrode layer 310 has a porosity, and small pin-holes are formed therein under the influence of the uneven surface of the first electrode layer 310. .
  • the pinhole formed in the first electrolyte layer 320 is filled with the filling layer 330.
  • the second electrolyte layer 340 is formed to have a dense structure on the first electrolyte layer 320 having a flat surface, so that the pin holes of the first electrolyte layer 320 are filled with the filling material of the filling layer 330. While filling, the upper surface of the first electrolyte layer 320 is closed to prevent cracks.
  • the second electrolyte layer 340 may be formed of the same material or different materials from the first electrolyte layer 320 and the electrolyte material.
  • the first electrolyte layer 320 and the second electrolyte layer 340 are the same material (for example, YSZ), an application using another material (for example, GDC) is possible.
  • the second electrode layer 350 is a cathode electrode formed on the second electrolyte layer 340, and is made of a high performance catalyst such as platinum (platinum, Pt), palladium (Pd), nickel (Ni), ruthenium (Ru), or the like.
  • Chemical vapor deposition Chemical Vapor
  • PVD physical vapor deposition
  • ALD atomic layer deposition
  • PLD pulsed laser deposition
  • It is formed by vapor deposition by a method such as Deposition).
  • the present invention relates to a fuel cell manufacturing method, the present invention comprises the steps of forming a porous first electrode layer; Forming a first electrolyte layer on the first electrode layer; Removing the top of the first electrolyte layer to planarize the removal surface; Forming a filling layer on the planarized surface of the first electrolyte layer to fill pin holes formed in the first electrolyte layer; Removing the packed layer; Forming a second electrolyte layer on the first electrolyte layer from which the filling layer is removed; And forming a second electrode layer on the second electrolyte layer.
  • the upper surface of the first electrolyte layer in which the pinholes are formed is partially removed to planarize the surface, and the pinholes are filled with a highly dense packed layer, followed by stacking the second electrolyte layer.
  • the improvement of the layer has an effect that can prevent problems such as short (short) or leakage (leakage).

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Abstract

The present invention relates to a method for fabricating a cell for a fuel battery. The method according to the present invention includes the steps of: forming a first porous electrode layer; forming a first electrolyte layer on the first electrode layer; planarizing the surface obtained by removing the upper end of the first electrolyte layer; forming a filler layer on the planarized surface of the first electrolyte layer so as to fill the pin holes existing in the first electrolyte layer; removing the filler layer; forming a second electrolyte layer on the first electrolyte layer from which the filler layer has been removed; and forming a second electrode layer on the second electrolyte layer. According to the present invention, the surface obtained by removing the upper end part of the first electrolyte layer having pin holes is planarized, applied with a filler layer of a high density so as to fill the pin holes, and then applied with the second electrolyte layer, so that the electrolyte layer is improved so as to prevent problems such as short circuit or leakage.

Description

연료전지용 셀 제조방법Fuel Cell Manufacturing Method
본 발명은 연료전지용 스택 제조방법에 관한 것으로, 더욱 상세하게는 고체 산화물 연료전지에서 핀 홀이 생성된 전해질층을 개선하는 연료전지용 셀 제조방법에 관한 것이다.The present invention relates to a method for manufacturing a stack for a fuel cell, and more particularly, to a method for manufacturing a fuel cell for improving an electrolyte layer in which pinholes are generated in a solid oxide fuel cell.
고체 산화물 연료전지(Solid Oxide Fuel Cell: SOFC)는 산소 또는 수소 이온전도성을 띄는 고체 산화물을 전해질로 사용하여 연료 전지 중 가장 높은 온도(700~1000℃)에서 작동한다.Solid Oxide Fuel Cells (SOFCs) operate at the highest temperatures (700–1000 ° C) of fuel cells, using solid oxides with oxygen or hydrogen ion conductivity as electrolytes.
특히, 고체 산화물 연료전지는 모든 구성 요소가 고체로 이루어져 있기 때문에 다른 연료 전지에 비해 구조가 간단하고, 전해질의 손실 및 보충과 부식의 문제가 없으며, 귀금속 촉매가 필요 없고 직접 내부 개질을 통한 연료 공급이 용이하다. 또한, 고온의 가스를 배출하기 때문에 폐열을 이용한 열 복합 발전이 가능하다는 장점도 지니고 있다.In particular, solid oxide fuel cells have a simpler structure than other fuel cells because all components are solid, there is no problem of electrolyte loss, replenishment and corrosion, no precious metal catalyst, and fuel supply through direct internal reforming. This is easy. In addition, it has the advantage that thermal combined cycle power generation using waste heat is possible because the high-temperature gas is discharged.
일반적인 고체 산화물 연료전지는 산소 이온전도성의 치밀한 전해질층과 그 양면에 위치한 다공성의 공기극(cathode) 및 연료극(anode)으로 이루어져 있다. 작동원리는 다공성의 공기극에서는 산소가 투과하여 전해질 면에 이르고 산소의 환원 반응에 의해 생성된 산소이온이 치밀한 전해질을 통해 연료극으로 이동하여 다시 다공성의 연료극에 공급된 수소와 반응함으로써 물을 생성하게 되고, 이때, 연료극에서는 전자가 생성되고 공기극에서는 전자가 소모되므로 두 전극을 서로 연결하면 전기가 흐르게 되는 것이다. 한편, 고체 산화물 연료전지는 한 개의 셀(cell)에서 전기가 발생하지만 이 전기의 양은 실생활에 사용하기에는 매우 적으므로 셀(cell)들을 여러 개 포개서 많은 양의 전기에너지로 사용하게 된다. 여러 개의 셀(cell)들을 모아 놓은 것을 스택(Stack)이라고 한다.A typical solid oxide fuel cell is composed of a dense electrolyte layer of oxygen ion conductivity and a porous cathode and anode positioned on both sides thereof. The operating principle is that oxygen permeates through the porous cathode and reaches the electrolyte surface. Oxygen ions generated by the oxygen reduction reaction move to the fuel electrode through the dense electrolyte and react with hydrogen supplied to the porous anode to generate water. At this time, since electrons are generated at the anode and electrons are consumed at the cathode, electricity flows when the two electrodes are connected to each other. On the other hand, the solid oxide fuel cell generates electricity in one cell, but the amount of electricity is very small to be used in real life, so the cells are stacked and used as a large amount of electrical energy. The collection of several cells is called a stack.
이러한 고체 산화물 연료전지와 관련된 기술이 특허등록 제0717130호와, 공개특허 제2012-0075242호에 제안된 바 있다.The technology related to such a solid oxide fuel cell has been proposed in Patent Registration No. 0717130 and Patent Publication No. 2012-0075242.
이하에서 종래기술로서 특허등록 제0717130호와, 공개특허 제2012-0075242호에 개시된 고체 산화물 연료전지를 간략히 설명한다.Hereinafter, a solid oxide fuel cell disclosed in Korean Patent No. 0817130 and Japanese Patent Laid-Open No. 2012-0075242 will be briefly described.
도 1에는 종래기술 1에 의한 연료극 지지형 고체산화물 연료전지의 단전지 단면을 보인 사진이 기재되어 있다. 도 1을 참조하면, 단전지는 다공성 연료극지지체, 연료극 기능성층, 전해질층, 복합공기극층으로 구성을 가지며, 복합공기극층은 다시 공기극 기능성층과 공기극 그리고 집전층으로 구성된다. Figure 1 is a photograph showing a cross-sectional view of a single cell of the anode-supported solid oxide fuel cell according to the prior art 1. Referring to FIG. 1, a unit cell includes a porous anode support, a cathode functional layer, an electrolyte layer, and a composite air electrode layer, and the composite air electrode layer is composed of a cathode functional layer, an air electrode, and a current collector layer.
도 2에는 종래기술 2에 의한 금속 지지체형 고체 산화물 연료전지의 일 예가 단면도로 도시되어 있다. 도 2를 참조하면, 종래 기술 2의 금속 지지체형 금속 산화물 연료전지는 금속 지지체(101); 상기 금속 지지체(101)의 일면에 형성된 제1 전극(103); 상기 제1 전극(103)의 일면에 형성되는 전해질(107) 및 상기 전해질(107)의 일면에 형성되는 제2 전극(109)이 적층된 적층체에 형성되어, 연료 또는 공기의 공급 및 배출을 위한 매니폴드(110)를 포함하고, 상기 제1 전극(103) 및 제2 전극(109)은 공기극 또는 연료극의 서로 다른 전극으로 구성된다.2 is a cross-sectional view of an example of a metal support-type solid oxide fuel cell according to the related art 2. Referring to FIG. 2, the metal support-type metal oxide fuel cell of the related art 2 includes a metal support 101; A first electrode 103 formed on one surface of the metal support 101; An electrolyte 107 formed on one surface of the first electrode 103 and a second electrode 109 formed on one surface of the electrolyte 107 are formed in a stacked stack to supply and discharge fuel or air. It includes a manifold 110, the first electrode 103 and the second electrode 109 is composed of different electrodes of the air electrode or fuel electrode.
그러나 종래기술 1에 의한 연료극 지지형 고체산화물 연료전지의 단전지와, 종래기술 2에 의한 고체 산화물 연료전지는 다공성 지지체 상에 전해질을 형성하는 과정에서 다공으로 전해질 물질이 흘러내려 핀 홀 등이 형성되며, 이를 해결하기 위한 별도의 방법이 요구되고 있다.However, in the unit cell of the anode-supported solid oxide fuel cell according to the prior art 1 and the solid oxide fuel cell according to the prior art 2, the electrolyte material flows through the pores in the process of forming the electrolyte on the porous support to form pinholes or the like. In order to solve this problem, a separate method is required.
결국, 종래기술 1, 2와 공통적으로 도 3에 도시된 종래의 다공성 기판을 기반으로 한 박막 연료전지(100)는 제작 시 거친(rough) 전극[(110)주로 애노드] 표면의 영향으로 전해질 박막(120)에 핀 홀 등의 결함이 발생할 수 있으며, 이러한 결함들은 단락(short)이나 누설(leakage) 등의 문제를 유발하여 셀 성능에 악영향을 미치게 되는 문제점이 있었다.As a result, the thin film fuel cell 100 based on the conventional porous substrate shown in FIG. 3 in common with the prior arts 1 and 2 has an electrolyte thin film under the influence of the rough electrode (mainly anode) surface during fabrication. Defects such as pinholes may occur in the 120, and these defects may cause problems such as shorting or leakage, which may adversely affect cell performance.
본 발명의 목적은 상기한 바와 같은 종래 기술의 문제점을 해결하기 위한 것으로, 핀 홀이 형성된 제1 전해질층의 상단을 일부 제거하여 표면을 평탄화하고, 고도 조밀(highly dense)한 구조의 충전층으로 상기 핀 홀을 메운 후 제2 전해질층을 적층하여 전해질층 개선을 통해 단락(short)이나 누설(leakage) 등의 문제를 방지할 수 있게 한 연료전지용 셀 제조방법을 제공하는 것이다.An object of the present invention is to solve the problems of the prior art as described above, to remove the top portion of the first electrolyte layer in which the pinhole is formed to planarize the surface, to a highly dense packed layer It is to provide a fuel cell cell manufacturing method that can prevent problems such as short (short) or leakage (leakage) through the improvement of the electrolyte layer by stacking the second electrolyte layer after filling the pin hole.
상기한 바와 같은 목적을 달성하기 위한 본 발명의 특징에 따르면, 본 발명은, 다공성 제1 전극층을 형성하는 단계; 상기 제1 전극층 상에 제1 전해질층을 형성하는 단계; 상기 제1 전해질층의 상단을 제거하여 제거 표면을 평탄화하는 단계; 상기 제1 전해질층의 평탄화된 표면에 상기 제1 전해질층의 내부에 형성된 핀 홀을 메울 수 있도록 충전층을 형성하는 단계; 상기 충전층을 제거하는 단계; 상기 충전층이 제거된 상기 제1 전해질층의 상에 제2 전해질층을 형성하는 단계; 및 상기 제2 전해질층 상에 제2 전극층을 형성하는 단계를 포함하는 연료전지용 셀 제조방법을 통해 달성된다.According to a feature of the present invention for achieving the above object, the present invention comprises the steps of forming a porous first electrode layer; Forming a first electrolyte layer on the first electrode layer; Removing the top of the first electrolyte layer to planarize the removal surface; Forming a filling layer on the planarized surface of the first electrolyte layer to fill pin holes formed in the first electrolyte layer; Removing the packed layer; Forming a second electrolyte layer on the first electrolyte layer from which the filling layer is removed; And forming a second electrode layer on the second electrolyte layer.
또한, 본 발명에서는 상기 제1 전해질층의 평탄화와 상기 충전층 형성이 한 단계로 진행되거나, 상기 제1 전해질층의 평탄화와 상기 충전층 형성이 전제 높이를 분할하여 여러 단계로 순차 진행될 수 있다.In addition, in the present invention, the planarization of the first electrolyte layer and the formation of the packed layer may be performed in one step, or the planarization of the first electrolyte layer and the formation of the packed layer may be performed in several steps by dividing the entire height.
또한, 본 발명에서의 상기 제2 전해질층은 상기 제1 전해질층과 동일한 재질로 형성되거나, 상이한 재질로 형성될 수 있다.In addition, the second electrolyte layer in the present invention may be formed of the same material as the first electrolyte layer, or may be formed of a different material.
또한, 본 발명에서의 상기 제2 전해질층은 상기 제1 전해질층과 동일한 공정으로 형성되거나, 상이한 공정으로 형성될 수 있다.In addition, the second electrolyte layer in the present invention may be formed by the same process as the first electrolyte layer, or may be formed by a different process.
또한, 본 발명에서의 상기 충전층 형성 단계에서의 충전층은 고도 조밀(highly dense)한 구조로 형성될 수 있다.In addition, the filling layer in the filling layer forming step of the present invention may be formed in a highly dense structure.
또한, 본 발명에서의 상기 충전층은 전해질 또는 산화 알루미늄(Al2O3)을 포함한 비전도성 재질로 형성될 수 있다.In addition, the filling layer in the present invention may be formed of a non-conductive material including an electrolyte or aluminum oxide (Al 2 O 3 ).
본 발명에 의하면, 핀 홀이 형성된 제1 전해질층의 상단을 일부 제거하여 표면을 평탄화하고, 고도 조밀(highly dense)한 구조의 충전층으로 상기 핀 홀을 메운 후 제2 전해질층을 적층하여 전해질층 개선을 통해 단락(short)이나 누설(leakage) 등의 문제를 방지할 수 있는 효과가 있다.According to the present invention, the upper surface of the first electrolyte layer in which the pinholes are formed is partially removed to planarize the surface, and the pinholes are filled with a highly dense packed layer, followed by stacking the second electrolyte layer. The improvement of the layer has an effect that can prevent problems such as short (short) or leakage (leakage).
도 1은 종래기술 1에 대한 연료극 지지형 고체산화물 연료전지의 단전지 단면을 보인 사진이다.1 is a cross-sectional view of a single cell of a cathode support solid oxide fuel cell according to the related art.
도 2는 종래기술 2에 대한 금속 지지체형 고체 산화물 연료전지의 일 예가 도시된 단면도이다.2 is a cross-sectional view showing an example of a metal support-type solid oxide fuel cell according to the prior art 2.
도 3은 종래기술에서의 전해질층에 핀 홀이 형성되는 상태를 도시한 참고도이다.3 is a reference diagram showing a state in which a pin hole is formed in the electrolyte layer in the prior art.
도 4는 본 발명의 제1 실시예에 의한 연료전지용 셀 제조방법의 블록도이다.4 is a block diagram of a fuel cell manufacturing method according to a first embodiment of the present invention.
도 5a 내지 도 5g는 본 발명의 제1 실시예에 의한 연료전지용 셀 제조방법의 공정도이다. 5A to 5G are flowcharts of a fuel cell manufacturing method according to a first embodiment of the present invention.
< 도면의 주요부분에 대한 부호의 설명 ><Description of Symbols for Major Parts of Drawings>
300: 연료전지용 셀 300: fuel cell
310: 제1 전극층310: first electrode layer
320: 제1 전해질층320: first electrolyte layer
330: 충전층330: packed bed
340: 제2 전해질층340: second electrolyte layer
350: 제2 전극층350: second electrode layer
상기한 바와 같은 목적을 달성하기 위한 본 발명의 특징에 따르면, 본 발명은, 다공성 제1 전극층을 형성하는 단계; 상기 제1 전극층 상에 제1 전해질층을 형성하는 단계; 상기 제1 전해질층의 상단을 제거하여 제거 표면을 평탄화하는 단계; 상기 제1 전해질층의 평탄화된 표면에 상기 제1 전해질층의 내부에 형성된 핀 홀을 메울 수 있도록 충전층을 형성하는 단계; 상기 충전층을 제거하는 단계; 상기 충전층이 제거된 상기 제1 전해질층의 상에 제2 전해질층을 형성하는 단계; 및 상기 제2 전해질층 상에 제2 전극층을 형성하는 단계를 포함하는 연료전지용 셀 제조방법을 통해 달성된다.According to a feature of the present invention for achieving the above object, the present invention comprises the steps of forming a porous first electrode layer; Forming a first electrolyte layer on the first electrode layer; Removing the top of the first electrolyte layer to planarize the removal surface; Forming a filling layer on the planarized surface of the first electrolyte layer to fill pin holes formed in the first electrolyte layer; Removing the packed layer; Forming a second electrolyte layer on the first electrolyte layer from which the filling layer is removed; And forming a second electrode layer on the second electrolyte layer.
또한, 본 발명에서는 상기 제1 전해질층의 평탄화와 상기 충전층 형성이 한 단계로 진행되거나, 상기 제1 전해질층의 평탄화와 상기 충전층 형성이 전제 높이를 분할하여 여러 단계로 순차 진행될 수 있다.In addition, in the present invention, the planarization of the first electrolyte layer and the formation of the packed layer may be performed in one step, or the planarization of the first electrolyte layer and the formation of the packed layer may be performed in several steps by dividing the entire height.
또한, 본 발명에서의 상기 제2 전해질층은 상기 제1 전해질층과 동일한 재질로 형성되거나, 상이한 재질로 형성될 수 있다.In addition, the second electrolyte layer in the present invention may be formed of the same material as the first electrolyte layer, or may be formed of a different material.
또한, 본 발명에서의 상기 제2 전해질층은 상기 제1 전해질층과 동일한 공정으로 형성되거나, 상이한 공정으로 형성될 수 있다.In addition, the second electrolyte layer in the present invention may be formed by the same process as the first electrolyte layer, or may be formed by a different process.
또한, 본 발명에서의 상기 충전층 형성 단계에서의 충전층은 고도 조밀(highly dense)한 구조로 형성될 수 있다.In addition, the filling layer in the filling layer forming step of the present invention may be formed in a highly dense structure.
또한, 본 발명에서의 상기 충전층은 전해질 또는 산화 알루미늄(Al2O3)을 포함한 비전도성 재질로 형성될 수 있다.In addition, the filling layer in the present invention may be formed of a non-conductive material including an electrolyte or aluminum oxide (Al 2 O 3 ).
본 명세서 및 청구범위에 사용된 용어나 단어는 발명자가 그 자신의 발명을 가장 최선의 방법으로 설명하기 위해 용어의 개념을 적절하게 정의할 수 있다는 원칙에 입각하여 본 발명의 기술적 사상에 부합하는 의미와 개념으로 해석되어야만 한다.The terms or words used in the present specification and claims are meant to be consistent with the technical spirit of the present invention on the basis of the principle that the inventor can appropriately define the concept of the term in order to best explain his invention. It must be interpreted as and concepts.
명세서 전체에서, 어떤 부분이 어떤 구성요소를 "포함" 한다고 할 때, 이는 특별히 반대되는 기재가 없는 한 다른 구성요소를 제외하는 것이 아니라 다른 구성요소를 더 포함할 수 있는 것을 의미한다. Throughout the specification, when a part is said to "include" a certain component, it means that it can further include other components, without excluding other components unless otherwise stated.
이하 도면을 참고하여 본 발명에 의한 연료전지용 셀 제조방법에 대한 실시 예의 구성단계를 상세하게 설명하기로 한다.Hereinafter, the configuration steps of the embodiment of the fuel cell manufacturing method according to the present invention with reference to the drawings will be described in detail.
도 4에는 본 발명의 제1 실시예에 의한 연료전지용 셀 제조방법이 블록도로 도시되어 있고, 도 5a 내지 도 5g에는 본 발명의 제1 실시예에 의한 연료전지용 셀 제조방법이 공정도로 도시되어 있다.4 is a block diagram showing a fuel cell manufacturing method according to a first embodiment of the present invention, Figure 5a to 5g is a flowchart showing a fuel cell manufacturing method according to a first embodiment of the present invention. .
이들 도면에 의하면, 본 발명의 일실시예에 의한 연료전지용 셀 제조방법은 다공성 제1 전극층 형성 단계(S200), 제1 전해질층 형성 단계(S210), 제1 전해질층 표면 평탄화 단계(S220), 충전층 형성 단계(S230), 충전층 제거 단계(S240), 제2 전해질층 형성 단계(S250) 및 제2 전극층 형성 단계(S260)를 포함한다.According to these drawings, the fuel cell manufacturing method according to an embodiment of the present invention is a porous first electrode layer forming step (S200), the first electrolyte layer forming step (S210), the first electrolyte layer surface planarization step (S220), A filling layer forming step (S230), a filling layer removing step (S240), a second electrolyte layer forming step (S250), and a second electrode layer forming step (S260) are included.
다공성 제1 전극층 형성 단계(S200)는 다공성(porous)을 가지도록 제1 전극층(310)을 형성하는 단계이다. [도 5(a) 참조]The porous first electrode layer forming step (S200) is a step of forming the first electrode layer 310 to have a porous (porous). [See Fig. 5 (a)]
이때, 상기 제1 전극층 형성 단계(S200)는 고성능 촉매인 플래티넘(백금, Pt), 팔라듐(Pd), 니켈(Ni), 루세늄(Ru) 등의 재질로, 스퍼터링(sputtering), 펄스 레이저 증착법(Pulsed Laser Deposition, PLD) 등과 같은 물리적 기상증착법(Physical vapor deposition, PVD), 원자층 증착(ALD: Atomic Layer Deposition) 등과 같은 화학 기상 증착법(CVD : Chemical Vapor Deposition) 등의 방법에 의해 증착하여 애노드 전극인 제1 전극층(310)을 형성하는 단계이다. At this time, the first electrode layer forming step (S200) is made of a material such as platinum (platinum, Pt), palladium (Pd), nickel (Ni), ruthenium (Ru), etc., which is a high-performance catalyst, sputtering, pulsed laser deposition Anodes are deposited by chemical vapor deposition (CVD), such as physical vapor deposition (PVD), atomic layer deposition (ALD), etc. (Pulsed Laser Deposition, PLD). In this step, the first electrode layer 310, which is an electrode, is formed.
제1 전해질층 형성 단계(S210)는 제1 전극층(310) 상에 제1 전해질층(320)을 증착하여 형성하는 단계이다. 이때, 상기 제1 전해질층 형성 단계(S210)에서는 상기 제1 전극층(310)이 다공성을 가지도록 형성되어 고르지 못한 전극 표면의 영향으로 작은 핀 홀(pin-hole)들이 형성하게 된다. [도 5(b) 참조]The first electrolyte layer forming step (S210) is a step of depositing and forming the first electrolyte layer 320 on the first electrode layer 310. At this time, in the first electrolyte layer forming step (S210), the first electrode layer 310 is formed to have a porosity, so that small pin-holes are formed under the influence of the uneven electrode surface. [See Fig. 5 (b)]
더욱이, 상기 제1 전해질층(320)은 지르코늄 산화물(ZrxOy), 세륨 산화물(CexOy), 란타늄 갈레이트(Lanthanum Gallate), 바륨 세레이트(Barium Cerate), 바륨 지르코네이트(Barium Zirconate), 비스무스 계열 산화물 또는 상기 재료들의 여러 도핑(doping)상과 같은 산소 이온 전도체(Oxygen ion conducting materials), 혹은 프로톤 전도체(Proton conducting materials) 등의 이온 전도체를 포괄하는 범주에서 선택하여 사용할 수 있다. 여기서, 제1 전해질층(320)은 GDC(Gd-doped CeO2) 또는 YSZ(Yttria-stabilized zirconia) 등의 전해질 물질이 적용될 수 있으며, 스퍼터링(sputtering), 펄스 레이저 증착법(Pulsed Laser Deposition, PLD) 등과 같은 물리적 기상증착법(Physical vapor deposition, PVD), 원자층 증착(ALD: Atomic Layer Deposition) 등과 같은 화학 기상 증착법(CVD : Chemical Vapor Deposition) 등의 방법에 의해 증착된다.In addition, the first electrolyte layer 320 may include zirconium oxide (Zr x O y ), cerium oxide (Ce x O y ), lanthanum galate, barium cerate, and barium zirconate ( Choose from a wide range of ionic conductors, such as Barium Zirconate, bismuth-based oxides or Oxygen ion conducting materials such as various doping phases of these materials, or Proton conducting materials have. Here, the first electrolyte layer 320 may be applied with an electrolyte material such as Gd-doped CeO 2 (GDC) or Yttria-stabilized zirconia (YSZ), and may be sputtered or pulsed laser deposition (PLD). It is deposited by a method such as chemical vapor deposition (CVD) such as physical vapor deposition (PVD), atomic layer deposition (ALD).
제1 전해질층 표면 평탄화 단계(S220)는 상기 제1 전해질층(320)의 표면을 제2 전해질층(330)으로 마감하기 위해 제1 전해질층(320)의 상단을 제거하여 평탄화하는 단계이다. 이때, 상기 제1 전해질층 표면 평탄화 단계(S220)는 반응성 이온 에칭(RIE, Reactive Ion Etching) 등으로 수행될 수 있다. [도 5(c) 참조]The first electrolyte layer surface planarization step (S220) is a step of removing and planarizing an upper end of the first electrolyte layer 320 to finish the surface of the first electrolyte layer 320 with the second electrolyte layer 330. In this case, the first electrolyte layer surface planarization step (S220) may be performed by reactive ion etching (RIE). [See Fig. 5 (c)]
충전층 형성 단계(S230)는 제1 전해질층(320)의 평탄화된 표면에 상기 제1 전해질층(320)의 내부에 형성된 핀 홀(pin-hole)을 메울 수 있도록 충전층(330)을 원자층 증착(ALD: Atomic Layer Deposition) 등과 같은 화학 기상 증착법(CVD : Chemical Vapor Deposition) 등의 방법에 의해 증착하여 형성하는 단계이다. [도 5(d) 참조]In the filling layer forming step S230, the filling layer 330 may be atomized to fill pin-holes formed in the first electrolyte layer 320 on the planarized surface of the first electrolyte layer 320. It is a step of depositing and forming by a method such as Chemical Vapor Deposition (CVD), such as Atomic Layer Deposition (ALD). [See Fig. 5 (d)]
여기서, 상기 충전층 형성 단계(S230)에서의 충전층(330)은 고도 조밀(highly dense)한 구조로 형성되어 형성 시 핀 홀(pin-hole) 같은 결함 공간을 견고하게 메우기 위하여 실시하는 것이다.In this case, the filling layer 330 in the filling layer forming step (S230) is formed to have a highly dense structure to fill a defect space such as a pin hole when forming.
즉, 상기 충전층(330)은 상기 제1 전해질층(320)을 형성하는 과정에서 고르지 못한 제1 전극층(310)의 거친(rough) 표면의 영향으로 상기 제1 전해질층(320) 내에 작은 핀 홀들이 발생하여 차후 연료전지에 단락(short)이나 누설(leakage) 현상이 발생하게 되는데 이를 해소하기 위해 핀 홀 등의 내부를 충전층(330)의 충전물로 메우는 것이다.That is, the filling layer 330 has a small fin in the first electrolyte layer 320 under the influence of the rough surface of the uneven first electrode layer 310 in the process of forming the first electrolyte layer 320. As holes are generated, a short circuit or leakage occurs in the fuel cell. To solve this problem, the inside of the pin hole is filled with the filling of the filling layer 330.
한편, 상기 충전층(330)은 전해질뿐만 아니라 산화 알루미늄(Al2O3) 등의 비전도성 재질로도 형성이 가능하다.Meanwhile, the filling layer 330 may be formed of a non-conductive material such as aluminum oxide (Al 2 O 3 ) as well as an electrolyte.
충전층 제거 단계(S240)는 반응성 이온 에칭(RIE, Reactive Ion Etching) 등의 공정을 통해 충전층(330)을 제거하는 단계로, 상기 충전층(330)의 충전물이 핀 홀 만을 메울 수 있도록 제1 전해질층(320)의 표면과 접하는 부위를 제거하는 단계이다. [도 5(e) 참조]Removing the filling layer (S240) is a step of removing the filling layer 330 through a process such as reactive ion etching (RIE), so that the filling of the filling layer 330 to fill only the pin hole. 1 This is a step of removing a portion in contact with the surface of the electrolyte layer 320. [See Fig. 5 (e)]
제2 전해질층 형성 단계(S250)는 제1 전해질층(320)의 표면과 접하는 충전층(330)의 상단은 제거하면서 핀 홀 등을 충전층(330)의 충전물로 메운 상태로 제1 전해질층(320)의 평탄화된 표면에 조밀(dense)한 구조의 제2 전해질층(340)을 박막 형태로 증착하여 형성하는 단계이다. [도 5(f) 참조]In the forming of the second electrolyte layer (S250), the first electrolyte layer is filled with the pinholes filled with the filling of the filling layer 330 while removing the upper end of the filling layer 330 in contact with the surface of the first electrolyte layer 320. A second electrolyte layer 340 having a dense structure is formed by depositing a thin film on the planarized surface of the 320. [See Fig. 5 (f)]
여기서, 상기 제2 전해질층(340)은 지르코늄 산화물(ZrxOy), 세륨 산화물(CexOy), 란타늄 갈레이트(Lanthanum Gallate), 바륨 세레이트(Barium Cerate), 바륨 지르코네이트(Barium Zirconate), 비스무스 계열 산화물 또는 상기 재료들의 여러 도핑(doping)상과 같은 산소 이온 전도체(Oxygen ion conducting materials), 혹은 프로톤 전도체(Proton conducting materials) 등의 이온 전도체를 포괄하는 범주에서 선택하여 사용할 수 있다. 여기서, 제2 전해질층(340)은 GDC(Gd-doped CeO2) 또는 YSZ(Yttria-stabilized zirconia) 등의 전해질 물질이 적용될 수 있으며, 스퍼터링(sputtering), 펄스 레이저 증착법(Pulsed Laser Deposition, PLD) 등과 같은 물리적 기상증착법(Physical vapor deposition, PVD), 원자층 증착(ALD: Atomic Layer Deposition) 등과 같은 화학 기상 증착법(CVD : Chemical Vapor Deposition) 등의 방법에 의해 증착된다.The second electrolyte layer 340 may include zirconium oxide (Zr x O y ), cerium oxide (Ce x O y ), lanthanum galate, barium cerate, and barium zirconate ( Choose from a wide range of ionic conductors, such as Barium Zirconate, bismuth-based oxides or Oxygen ion conducting materials such as various doping phases of these materials, or Proton conducting materials have. Here, an electrolyte material such as Gd-doped CeO 2 (GDC) or Yttria-stabilized zirconia (YSZ) may be applied to the second electrolyte layer 340. It is deposited by a method such as chemical vapor deposition (CVD) such as physical vapor deposition (PVD), atomic layer deposition (ALD).
한편, 상기 제2 전해질층 형성 단계(S250)는 제1 전해질층(320)의 상면을 제2 전해질층(330)으로 마감하는 것이다.On the other hand, the second electrolyte layer forming step (S250) is to finish the upper surface of the first electrolyte layer 320 with the second electrolyte layer 330.
더욱이, 제1 전해질층 표면 평탄화 단계(S220)와 충전층 형성 단계(S230)는 제1 전해질층(320)의 제거 높이와 충전층(330)의 형성 높이와 대응하는 높이만큼 한 번에 진행되거나, 상기 제1 전해질층(320)의 제거 높이와 상기 충전층(330)의 형성 높이와 대응하는 전체 높이를 다수 분할하여 분할한 높이만큼 여러 단계로 나눠 조금씩 순차 진행할 수 있다.In addition, the first electrolyte layer surface planarization step S220 and the filling layer forming step S230 may be performed at a time by a height corresponding to the removal height of the first electrolyte layer 320 and the formation height of the filling layer 330. In addition, the total height corresponding to the removal height of the first electrolyte layer 320 and the formation height of the filling layer 330 may be divided into a plurality of steps by the divided heights, and the steps may be sequentially performed.
그리고 상기 제1 전해질층 형성 단계(S210)와, 상기 제2 전해질층 형성 단계(S250)의 수행 시 상기 제1 전해질층(320)과 상기 제2 전해질층(340)을 이루는 전해질 물질이 동일한 재질로 형성되거나 상이한 재질로 형성될 수 있다.In addition, when the first electrolyte layer forming step S210 and the second electrolyte layer forming step S250 are performed, the electrolyte materials forming the first electrolyte layer 320 and the second electrolyte layer 340 are the same material. It may be formed of or made of different materials.
더욱이, 상기 제1 전해질층 형성 단계(S210)와, 상기 제2 전해질층 형성 단계(S250)의 수행 시 상기 제1 전해질층(320)과 상기 제2 전해질층(340)을 형성하는 공정이 동일한 공정으로 수행되거나 상이한 공정으로 수행될 수 있다.Further, when the first electrolyte layer forming step S210 and the second electrolyte layer forming step S250 are performed, the process of forming the first electrolyte layer 320 and the second electrolyte layer 340 is the same. It may be carried out in a process or in a different process.
예컨대, 상기 제1 전해질층(320)과 상기 제2 전해질층(340)은 같은 물질(예: YSZ)이지만 다른 물질(예: GDC)을 쓰는 응용도 가능하며, 증착 공정에서 상기 제1 전해질층(320)은 스퍼터링(sputtering), 펄스 레이저 증착법(Pulsed Laser Deposition, PLD) 등과 같은 물리적 기상증착법(Physical vapor deposition, PVD), 원자층 증착(ALD: Atomic Layer Deposition) 등과 같은 화학 기상 증착법(CVD : Chemical Vapor Deposition) 중 어느 하나의 공정으로 수행되고, 상기 제2 전해질층(340)은 원자층 증착(ALD: Atomic Layer Deposition) 등과 같은 화학 기상 증착법(CVD : Chemical Vapor Deposition) 등의 공정으로 수행될 수 있다.For example, the first electrolyte layer 320 and the second electrolyte layer 340 are the same material (for example, YSZ), but may be an application using a different material (for example, GDC), the first electrolyte layer in the deposition process The chemical vapor deposition method 320 may include chemical vapor deposition (CVD) such as physical vapor deposition (PVD), atomic layer deposition (ALD), and the like, such as sputtering and pulsed laser deposition (PLD). Chemical Vapor Deposition) and the second electrolyte layer 340 may be performed by a chemical vapor deposition (CVD) process, such as atomic layer deposition (ALD). Can be.
제2 전극층 형성 단계(S260)는 제2 전해질층(340) 상에 제2 전극층(350)을 형성하는 단계이다. [도 5(g) 참조]The second electrode layer forming step S260 is a step of forming the second electrode layer 350 on the second electrolyte layer 340. (See Fig. 5 (g))
이때, 상기 제2 전극층 형성 단계(S260)는 고성능 촉매인 플래티넘(백금, Pt), 팔라듐(Pd), 니켈(Ni), 루세늄(Ru) 등의 재질로, 스퍼터링(sputtering), 펄스 레이저 증착법(Pulsed Laser Deposition, PLD) 등과 같은 물리적 기상증착법(Physical vapor deposition, PVD), 원자층 증착(ALD: Atomic Layer Deposition) 등과 같은 화학 기상 증착법(CVD : Chemical Vapor Deposition) 등의 방법에 의해 증착하여 캐소드 전극인 제2 전극층(350)을 형성하는 단계이다.At this time, the second electrode layer forming step (S260) is made of a high performance catalyst such as platinum (platinum, Pt), palladium (Pd), nickel (Ni), ruthenium (Ru), sputtering, pulsed laser deposition method Cathode is deposited by a method such as chemical vapor deposition (CVD) such as physical vapor deposition (PVD), atomic layer deposition (ALD), etc. (Pulsed Laser Deposition, PLD), etc. In this step, the second electrode layer 350 is formed as an electrode.
본 발명의 연료전지용 셀 제조방법에 의해 제조되는 연료전지용 셀(300)은 제1 전극층(310), 제1 전해질층(320), 제2 전해질층(340) 및 제2 전극층(350)을 포함한다. The fuel cell 300 manufactured by the fuel cell manufacturing method of the present invention includes a first electrode layer 310, a first electrolyte layer 320, a second electrolyte layer 340, and a second electrode layer 350. do.
여기서, 상기 제1, 2 전해질층(320, 340)은 전극 사이에서 이온의 이동통로를 제공하지만 전자의 이동은 차단하고 연료와 산소를 분리하는 기능을 하며, 상기 촉매에 의해 형성되는 제1 전극층(310)과 제2 전극층(350)은 전기화학반응이 일어날 수 있도록 넓은 표면적을 제공하고 이때 발생하는 전자의 이동통로를 제공하는 기능을 한다.Here, the first and second electrolyte layers 320 and 340 provide a passage for the movement of ions between the electrodes but block the movement of electrons and separate fuel and oxygen, and are formed by the catalyst. The 310 and the second electrode layer 350 serve to provide a large surface area for the electrochemical reaction to occur and to provide a movement path for electrons generated at this time.
제1 전극층(310)은 애노드 전극으로, 고성능 촉매인 플래티넘(백금, Pt), 팔라듐(Pd), 니켈(Ni), 루세늄(Ru) 등의 재질로, 스퍼터링(sputtering), 펄스 레이저 증착법(Pulsed Laser Deposition, PLD) 등과 같은 물리적 기상증착법(Physical vapor deposition, PVD), 원자층 증착(ALD: Atomic Layer Deposition) 등과 같은 화학 기상 증착법(CVD : Chemical Vapor Deposition) 등의 방법에 의해 증착하여 형성된다.The first electrode layer 310 is an anode electrode and is made of a material such as platinum (platinum, Pt), palladium (Pd), nickel (Ni), ruthenium (Ru), etc., which is a high-performance catalyst, and is formed by sputtering and pulse laser deposition ( Physical vapor deposition (PVD) such as Pulsed Laser Deposition (PLD), etc., is deposited by chemical vapor deposition (CVD) such as Atomic Layer Deposition (ALD). .
한편, 상기 제1 전극층(310)은 기체의 침투 및 반응 면적 확대를 위해 다공성(porous)을 가지도록 형성된다.On the other hand, the first electrode layer 310 is formed to have a porous (porous) for gas infiltration and expansion of the reaction area.
제1 전해질층(320)은 제1 전극층(310) 상에 형성되되, 지르코늄 산화물(ZrxOy), 세륨 산화물(CexOy), 란타늄 갈레이트(Lanthanum Gallate), 바륨 세레이트(Barium Cerate), 바륨 지르코네이트(Barium Zirconate), 비스무스 계열 산화물 또는 상기 재료들의 여러 도핑(doping)상과 같은 산소 이온 전도체(Oxygen ion conducting materials), 혹은 프로톤 전도체(Proton conducting materials) 등의 이온 전도체를 포괄하는 범주에서 선택하여 사용할 수 있다. 여기서, 제1 전해질층(320)은 GDC(Gd-doped CeO2) 또는 YSZ(Yttria-stabilized zirconia) 등의 전해질 물질이 적용될 수 있다.The first electrolyte layer 320 is formed on the first electrode layer 310, and includes zirconium oxide (Zr x O y ), cerium oxide (Ce x O y ), lanthanum galate, and barium cerate. Ion conductors such as oxygen ion conducting materials, such as Cerate, Barium Zirconate, bismuth-based oxides or various doping phases of these materials, or Proton conducting materials You can choose from a wide range of categories. Here, an electrolyte material such as Gd-doped CeO 2 (GDC) or Yttria-stabilized zirconia (YSZ) may be applied to the first electrolyte layer 320.
여기서, 상기 제1 전해질층(320)은 제1 전극층(310)이 다공성을 가지도록 형성되어 고르지 못한 상기 제1 전극층(310) 표면의 영향으로 작은 핀 홀(pin-hole)들이 내부에 형성된다.Here, the first electrolyte layer 320 is formed such that the first electrode layer 310 has a porosity, and small pin-holes are formed therein under the influence of the uneven surface of the first electrode layer 310. .
한편, 상기 제1 전해질층(320)의 내부에 형성된 핀 홀은 충전층(330)을 통해 메워져 있는 상태이다.Meanwhile, the pinhole formed in the first electrolyte layer 320 is filled with the filling layer 330.
제2 전해질층(340)은 표면이 평탄화된 제1 전해질층(320) 상에 조밀(dense)한 구조로 형성되어 상기 제1 전해질층(320)의 핀 홀을 충전층(330)의 충전물로 메우면서 상기 제1 전해질층(320)의 상면을 마감하므로 크랙 발생을 방지하게 된다.The second electrolyte layer 340 is formed to have a dense structure on the first electrolyte layer 320 having a flat surface, so that the pin holes of the first electrolyte layer 320 are filled with the filling material of the filling layer 330. While filling, the upper surface of the first electrolyte layer 320 is closed to prevent cracks.
한편, 상기 제2 전해질층(340)은 제1 전해질층(320)과 전해질 물질이 동일한 재질로 형성되거나 상이한 재질로 형성될 수 있다. 예컨대, 상기 제1 전해질층(320)과 상기 제2 전해질층(340)은 같은 물질(예: YSZ)이지만 다른 물질(예: GDC)을 쓰는 응용도 가능하다.Meanwhile, the second electrolyte layer 340 may be formed of the same material or different materials from the first electrolyte layer 320 and the electrolyte material. For example, although the first electrolyte layer 320 and the second electrolyte layer 340 are the same material (for example, YSZ), an application using another material (for example, GDC) is possible.
제2 전극층(350)은 제2 전해질층(340) 상에 형성되는 캐소드 전극이며, 고성능 촉매인 플래티넘(백금, Pt), 팔라듐(Pd), 니켈(Ni), 루세늄(Ru) 등의 재질로, 스퍼터링(sputtering), 펄스 레이저 증착법(Pulsed Laser Deposition, PLD) 등과 같은 물리적 기상증착법(Physical vapor deposition, PVD), 원자층 증착(ALD: Atomic Layer Deposition) 등과 같은 화학 기상 증착법(CVD : Chemical Vapor Deposition) 등의 방법에 의해 증착하여 형성된다. The second electrode layer 350 is a cathode electrode formed on the second electrolyte layer 340, and is made of a high performance catalyst such as platinum (platinum, Pt), palladium (Pd), nickel (Ni), ruthenium (Ru), or the like. Chemical vapor deposition (CVD: Chemical Vapor) such as physical vapor deposition (PVD), atomic layer deposition (ALD), etc., such as sputtering, pulsed laser deposition (PLD), etc. It is formed by vapor deposition by a method such as Deposition).
이상과 같이 본 발명은 비록 한정된 실시예와 도면에 의해 설명되었으나, 본 발명은 상기의 실시예에 한정되는 것은 아니며, 본 발명이 속하는 분야에서 통상의 지식을 가진 자라면 이러한 기재로부터 다양한 수정 및 변형이 가능하다.As described above, the present invention has been described by way of limited embodiments and drawings, but the present invention is not limited to the above embodiments, and those skilled in the art to which the present invention pertains various modifications and variations from such descriptions. This is possible.
그러므로 본 발명의 범위는 설명된 실시예에 국한되어 정해져서는 아니 되며, 후술하는 특허청구범위뿐 아니라 이 특허청구범위와 균등한 것들에 의해 정해져야 한다.Therefore, the scope of the present invention should not be limited to the described embodiments, but should be defined not only by the claims below but also by the equivalents of the claims.
본 발명은 연료전지용 셀 제조방법에 관한 것으로, 본 발명은, 다공성 제1 전극층을 형성하는 단계; 상기 제1 전극층 상에 제1 전해질층을 형성하는 단계; 상기 제1 전해질층의 상단을 제거하여 제거 표면을 평탄화하는 단계; 상기 제1 전해질층의 평탄화된 표면에 상기 제1 전해질층의 내부에 형성된 핀 홀을 메울 수 있도록 충전층을 형성하는 단계; 상기 충전층을 제거하는 단계; 상기 충전층이 제거된 상기 제1 전해질층의 상에 제2 전해질층을 형성하는 단계; 및 상기 제2 전해질층 상에 제2 전극층을 형성하는 단계를 포함한다.The present invention relates to a fuel cell manufacturing method, the present invention comprises the steps of forming a porous first electrode layer; Forming a first electrolyte layer on the first electrode layer; Removing the top of the first electrolyte layer to planarize the removal surface; Forming a filling layer on the planarized surface of the first electrolyte layer to fill pin holes formed in the first electrolyte layer; Removing the packed layer; Forming a second electrolyte layer on the first electrolyte layer from which the filling layer is removed; And forming a second electrode layer on the second electrolyte layer.
본 발명에 의하면, 핀 홀이 형성된 제1 전해질층의 상단을 일부 제거하여 표면을 평탄화하고, 고도 조밀(highly dense)한 구조의 충전층으로 상기 핀 홀을 메운 후 제2 전해질층을 적층하여 전해질층 개선을 통해 단락(short)이나 누설(leakage) 등의 문제를 방지할 수 있는 효과가 있다.According to the present invention, the upper surface of the first electrolyte layer in which the pinholes are formed is partially removed to planarize the surface, and the pinholes are filled with a highly dense packed layer, followed by stacking the second electrolyte layer. The improvement of the layer has an effect that can prevent problems such as short (short) or leakage (leakage).

Claims (6)

  1. 다공성 제1 전극층을 형성하는 단계;Forming a porous first electrode layer;
    상기 제1 전극층 상에 제1 전해질층을 형성하는 단계; Forming a first electrolyte layer on the first electrode layer;
    상기 제1 전해질층의 상단을 제거하여 제거 표면을 평탄화하는 단계;Removing the top of the first electrolyte layer to planarize the removal surface;
    상기 제1 전해질층의 평탄화된 표면에 상기 제1 전해질층의 내부에 형성된 핀 홀을 메울 수 있도록 충전층을 형성하는 단계;Forming a filling layer on the planarized surface of the first electrolyte layer to fill pin holes formed in the first electrolyte layer;
    상기 충전층을 제거하는 단계; Removing the packed layer;
    상기 충전층이 제거된 상기 제1 전해질층의 상에 제2 전해질층을 형성하는 단계; 및Forming a second electrolyte layer on the first electrolyte layer from which the filling layer is removed; And
    상기 제2 전해질층 상에 제2 전극층을 형성하는 단계를 포함하는 연료전지용 셀 제조방법.And forming a second electrode layer on the second electrolyte layer.
  2. 제1항에 있어서,The method of claim 1,
    상기 제1 전해질층의 평탄화와 상기 충전층 형성이 한 단계로 진행되거나, 상기 제1 전해질층의 평탄화와 상기 충전층 형성이 전제 높이를 분할하여 여러 단계로 순차 진행되는 연료전지용 셀 제조방법.The planarization of the first electrolyte layer and the formation of the filling layer is carried out in one step, or the planarization of the first electrolyte layer and the formation of the filling layer is proceeded in several steps by dividing the entire height sequentially.
  3. 제1항 또는 제2항에 있어서,The method according to claim 1 or 2,
    상기 제2 전해질층은 상기 제1 전해질층과 동일한 재질로 형성되거나, 상이한 재질로 형성되는 연료전지용 셀 제조방법.The second electrolyte layer is formed of the same material as the first electrolyte layer, or a fuel cell cell manufacturing method is formed of a different material.
  4. 제1항 또는 제2항에 있어서,The method according to claim 1 or 2,
    상기 제2 전해질층은 상기 제1 전해질층과 동일한 공정으로 형성되거나, 상이한 공정으로 형성되는 연료전지용 셀 제조방법.The second electrolyte layer is formed in the same process as the first electrolyte layer, or a method for manufacturing a cell for a fuel cell is formed by a different process.
  5. 제1항에 있어서,The method of claim 1,
    상기 충전층 형성 단계에서의 충전층은 고도 조밀(highly dense)한 구조로 형성되는 연료전지용 셀 제조방법.The method of claim 1, wherein the filling layer in the filling layer forming step is formed in a highly dense structure.
  6. 제5항에 있어서,The method of claim 5,
    상기 충전층은 전해질 또는 산화 알루미늄(Al2O3)을 포함한 비전도성 재질로 형성되는 연료전지용 셀 제조방법. The filling layer is a fuel cell cell manufacturing method formed of a non-conductive material containing an electrolyte or aluminum oxide (Al 2 O 3 ).
PCT/KR2014/000857 2013-01-29 2014-01-29 Method for fabricating cell for fuel battery WO2014119929A1 (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040099149A (en) * 2003-05-16 2004-11-26 산요덴키가부시키가이샤 Fuel Cell
JP2007087747A (en) * 2005-09-21 2007-04-05 Dainippon Printing Co Ltd Solid oxide fuel cell
KR20100084322A (en) * 2009-01-16 2010-07-26 삼성전자주식회사 Fuel cell stack
KR20120008390A (en) * 2010-07-16 2012-01-30 한국과학기술연구원 Dense film and fuel cell using that film and the fabrication method therefor
KR20120031036A (en) * 2012-02-09 2012-03-29 한국과학기술원 Porous-metal supported sofc and methods for manufacturing the same

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040099149A (en) * 2003-05-16 2004-11-26 산요덴키가부시키가이샤 Fuel Cell
JP2007087747A (en) * 2005-09-21 2007-04-05 Dainippon Printing Co Ltd Solid oxide fuel cell
KR20100084322A (en) * 2009-01-16 2010-07-26 삼성전자주식회사 Fuel cell stack
KR20120008390A (en) * 2010-07-16 2012-01-30 한국과학기술연구원 Dense film and fuel cell using that film and the fabrication method therefor
KR20120031036A (en) * 2012-02-09 2012-03-29 한국과학기술원 Porous-metal supported sofc and methods for manufacturing the same

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