WO2014115983A1 - Light dividing apparatus - Google Patents

Light dividing apparatus Download PDF

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Publication number
WO2014115983A1
WO2014115983A1 PCT/KR2014/000198 KR2014000198W WO2014115983A1 WO 2014115983 A1 WO2014115983 A1 WO 2014115983A1 KR 2014000198 W KR2014000198 W KR 2014000198W WO 2014115983 A1 WO2014115983 A1 WO 2014115983A1
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Prior art keywords
laser beam
light
laser
split
prism
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PCT/KR2014/000198
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French (fr)
Korean (ko)
Inventor
발렌틴차딘
알렉퍼알리에프
박상배
김성철
세르게이폴루쉬킨
이해동
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에이엠테크놀로지 주식회사
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Publication of WO2014115983A1 publication Critical patent/WO2014115983A1/en

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10Beam splitting or combining systems
    • G02B27/12Beam splitting or combining systems operating by refraction only
    • G02B27/126The splitting element being a prism or prismatic array, including systems based on total internal reflection
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/101Lasers provided with means to change the location from which, or the direction in which, laser radiation is emitted
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10Beam splitting or combining systems
    • G02B27/108Beam splitting or combining systems for sampling a portion of a beam or combining a small beam in a larger one, e.g. wherein the area ratio or power ratio of the divided beams significantly differs from unity, without spectral selectivity

Definitions

  • the present invention relates to a light splitting apparatus, and more particularly, to a light splitting apparatus for dividing a single laser beam into a plurality of beams.
  • LASER Light Amplification by Stimulated Emission of Radiation
  • induced emission the intensity is very strong and does not spread far.
  • Lasers are used in various fields such as processing and communication.
  • Prior Art 1 a technique that uses a laser for cutting the glass is disclosed.
  • a first laser beam for cutting along a cutting line on a glass substrate that is a cutting operation object for example, a second laser beam and a third laser beam is generated and irradiated at each laser generator.
  • Prior Art 2 looking at the Republic of Korea Patent No. 10-0320756 (hereinafter referred to as Prior Art 2), it can be seen that a technique for measuring the thickness of the plate used in a non-contact type using a laser thickness of the plate used in the production site is disclosed.
  • the laser is irradiated on both sides of the plate, respectively, in this case, it can be seen that each laser is generated in a separate laser beam irradiation apparatus.
  • each laser beam is generated in a laser beam generator that is disposed separately.
  • the present invention has been made to solve the above problems, and an object of the present invention is to provide an optical splitting apparatus for dividing a laser beam generated by a single laser beam generating unit into a plurality of laser beams.
  • the present invention provides a device for dividing a plurality of laser beams generated by a laser beam generator, comprising: a light splitter for dividing a laser beam generated by the laser beam generator into a main beam and an auxiliary beam;
  • the light splitting unit includes a splitting prism disposed on one side of the laser beam and disposed to intersect a portion of the laser beam luminous flux.
  • the apparatus may further include a light beam converter configured to convert the light beam of the laser beam into an elliptical shape.
  • the luminous flux converter may include a mask disposed in front of the light splitter.
  • the split prism may be disposed at one or more around the central axis of the laser beam.
  • the split prism may include an incident surface inclined toward the laser beam generator and an incident surface to which the laser beam is incident, and an exit surface parallel to the incident surface and outputting the laser beam.
  • the present invention may divide a laser beam generated by a single laser beam generator into a plurality of laser beams.
  • the present invention can divide a single laser beam into a main beam and an auxiliary beam.
  • FIG. 1 is a view conceptually showing a configuration of an optical splitting apparatus according to an embodiment of the present invention.
  • FIG. 2 is a diagram illustrating the configuration of the optical splitter shown in FIG. 1 viewed from another direction.
  • FIG. 3 is a diagram conceptually illustrating a configuration of an optical splitting apparatus according to another exemplary embodiment of the present invention.
  • FIG. 5 is a diagram illustrating the division of the laser beam by the split prism shown in FIGS. 1 and 2.
  • FIG. 6 is a diagram illustrating an example of an irradiation state of a main beam and an auxiliary beam divided and radiated by the split prism illustrated in FIG. 1.
  • FIG. 1 is a diagram conceptually illustrating a configuration of an optical splitting apparatus according to an exemplary embodiment of the present invention
  • FIG. 2 is a diagram illustrating a configuration of the optical splitting apparatus illustrated in FIG. 1 as viewed from another direction.
  • the light splitting apparatus 100 may include a light splitting unit 120 for splitting a ray point beam.
  • the light splitter 120 includes a pair of split prisms 122.
  • the light splitter 120 including a pair of split prisms 122 is used for preheating and a single main beam used for cutting a single laser beam so that it can be applied to the prior art 1. It can be split into a pair of auxiliary beams used.
  • the split prisms are included as a pair, but the number of split prisms can be increased or decreased corresponding to the number of split laser beams required by the user.
  • the light splitter 120 may include a single split prism 122.
  • the number of split prisms included in the light splitter 120 may vary according to the required number of laser beams.
  • the wavelength of the laser beam split by the light splitter 120 may be set according to the needs of the user. However, in order to make the degree of dispersion and the degree of refraction of the laser beam uniform by the optical elements described below, the laser beam is preferably a single wavelength. It is preferable that the wavelength of the laser beam used in the apparatus to which the present embodiment is applied is 1.064 ⁇ m.
  • the laser beam generator 110 may be a YAG laser, CO2 laser, fiber laser and the like.
  • the luminous flux of the laser beam generated by the laser beam generator 110 is circular, it is preferable to convert the luminous flux according to the needs of the user. That is, in the present embodiment, since the split prism 122 is used as a pair, the luminous flux of the laser beam generated by the laser beam generator 110 is elliptical having a predetermined short axis and long axis diameter so that the laser beam is easily divided. It is desirable to convert.
  • the luminous flux converting unit 130 may be disposed between the laser beam generator 110 and the light splitter 120.
  • the luminous flux converter 130 is a mask in which an elliptical luminous flux conversion hole 132 is formed in the center.
  • the hole 132 is formed in an elliptical shape. Therefore, the laser beam generated by the laser beam generator 110 passes through the hole 132 and has a light beam corresponding to the shape of the hole 132, that is, an elliptical light beam.
  • the length of the long axis and short axis of the luminous flux of the laser beam may be variously set according to the needs of the user.
  • FIG. 3 is a diagram conceptually illustrating a configuration of an optical splitting apparatus according to another exemplary embodiment of the present invention.
  • the beam converting unit 130 may include a single beam expander 132 and a beam shaping 134 (which may be referred to as a beam shaper or a beam homogenizer). It can be included as a pair.
  • the beam expander is a component that enlarges the cross-sectional area of the beam
  • the beam shaper is a component that converts the shape of the beam as needed.
  • the laser beam generator 110 is generally installed to be movable in the X, Y, and Z axis directions according to a user's needs, the light splitter 120 moves in correspondence with the laser beam generator 110. It is preferable to be installed as possible.
  • the light splitter 120 divides the laser beam generated by the laser beam generator 110 into a main beam and an auxiliary beam, and focuses the luminous fluxes of the divided main beam 3 and the auxiliary beam 4, respectively.
  • the main beam can be used for cutting the glass 1
  • the auxiliary beam can be used for preheating to facilitate the cutting of the glass.
  • the light splitter 120 includes a pair of split prisms 122 for splitting the laser beam.
  • the pair of split prisms 122 divides the laser beam irradiated for cutting the glass into the main beam for cutting and the auxiliary beam for preheating.
  • the split prisms 122 are prepared in pairs, and are preferably disposed at both sides with respect to the optical axis of the laser beam.
  • the split prism 122 is preferably arranged around the central axis of the ray point beam.
  • the pair of split prisms 122 are arranged in the long axis direction of the laser beam 2, and each of the split prisms 122 has the same distance (d) from the optical axis of the laser beam.
  • the laser beam 2 passing through the separation space of the split prism 122 continues straight as the main beam 3, and the laser beam passing through the split prism 122 is refracted in the predetermined direction as the auxiliary beam 4.
  • the separation distance d of the split prism 122 is smaller than the major axis diameter of the laser beam.
  • the separation distance of the split prism 122 may be changed at specific intervals when the energy density of the beam is to be changed according to the cutting object. In this case, the separation distance of the split prism 122 may start at least zero.
  • split prism 122 For refraction of the auxiliary beam, split prism 122 is made as follows.
  • FIG. 4 is a diagram showing the configuration of the split prism shown in FIGS. 1 and 2, in which a right side view (a), a left side view (b), and a plan view (c) of the split prism are shown.
  • the split prism 122 may have a hexahedron shape having a predetermined height, width, and thickness. However, a predetermined chamfering process may be performed on the rear surface of the split prism 122 on both side edge portions.
  • the surface facing the laser beam generator 110 is set as the incident surface 123a through which the laser beam is incident, and the opposite side is the exit surface 123b through which the laser beam is emitted. Can be set.
  • the incident surface 123a and the emission surface 123b are parallel to each other, but are inclined toward the laser beam generator 110.
  • the inclination is preferably set according to the needs of the user Do.
  • FIG. 5 is a diagram illustrating the division of the laser beam by the split prism shown in FIGS. 1 and 2.
  • the auxiliary beam 4 is emitted in parallel with the main beam 3 by the inclined entrance surface 123a and the emission surface 123b, but is spaced apart from the main beam 3 by a predetermined distance. It is emitted.
  • the main beam 3 and the auxiliary beam 4, which are divided through the split prism 122, may be focused by a separate focusing lens 140 to be irradiated onto the glass to be cut.
  • the focusing lens 140 focuses the main beam 3 and the auxiliary beam 4 on the glass, which is a cutting target, to form a focal point.
  • the focusing lens 140 is preferably arranged to be movable along the optical axis.
  • the light splitting apparatus 100 is disposed between the laser beam generator 110 and the glass to be cut.
  • the optical splitting apparatus 100 may be integrally connected with the laser beam generator 110. At this time, if the light splitting apparatus 100 can move in response to the movement of the laser beam generator 110, they may be arranged separately from each other.
  • the laser beam generated by the laser beam generator 110 may be converted into a light beam in a form required by the user by the light beam converter 130.
  • the light beam converter 130 may not be used according to a user's needs.
  • the laser beam passes through a pair of split prisms 122.
  • the laser beam passing through the spaced space of the pair of split prisms 122 can be used for cutting the glass as the main beam 3.
  • the laser beam incident on the incident surface 123a of the pair of divided prisms 122 is refracted at a predetermined angle and then emitted through the emission surface 123b, and then the main beam 3 as the auxiliary beam 4. Preheat both sides.
  • FIG. 6 is a diagram illustrating an example in which a main beam and an auxiliary beam are incident on a glass that is a cutting target.
  • the laser beam is divided into the main beam 3 and the auxiliary beam 4 by the splitting prism, and then irradiated along the cutting line 1a of the glass 1.
  • an additional optical element may be added to change the irradiation direction of the main beam 3 and the auxiliary beam 4.
  • the main beam 3 is focused along the cutting line and the glass is cut by the energy.
  • the main beam 3 and the auxiliary beam 4 divided by the split prism 122 may be focused by the focusing lens 140 to improve cutting and preheating efficiency.
  • the main beam 3 is irradiated along the cutting line 1a, the glass is cut, and the auxiliary beam 4 is irradiated to both sides of the cutting line, and preheated, so that the cutting can be easily made. have.
  • a laser beam generated by a single laser beam generator may be divided into a number required by a user.
  • a single laser beam is divided into a main beam irradiated to the glass cutting line and an auxiliary beam which simultaneously preheats both sides of the cutting line at the same time, and uses a single laser beam. Cutting and preheating can be done simultaneously.

Abstract

The present invention provides an apparatus for dividing a laser beam, which is generated from a laser beam generating unit, into a plurality of beams, the light dividing apparatus comprising a light dividing unit for dividing the laser beam generated from the laser beam generating unit into a main beam and an auxiliary beam, wherein the light dividing unit comprises a dividing prism which is disposed at one side of the laser beam so as to intersect a part of the luminous flux of the laser beam. The present invention can divide a laser beam, which is generated from a single laser beam generating unit, into a number required by a user.

Description

광 분할 장치Optical splitter
본 발명은 광 분할 장치에 관한 것으로서, 보다 상세하게는 단일 레이저빔을 복수개의 빔으로 분할하는 광 분할 장치에 관한 것이다.The present invention relates to a light splitting apparatus, and more particularly, to a light splitting apparatus for dividing a single laser beam into a plurality of beams.
레이저(LASER; Light Amplification by Stimulated Emission of Radiation) 는 유도방출에 의해 증폭된 빛으로서, 세기가 아주 강하고 멀리까지 퍼지지 않고 전달되는 특성을 갖는다. LASER (Light Amplification by Stimulated Emission of Radiation) is a light amplified by induced emission, the intensity is very strong and does not spread far.
레이저는 가공, 통신 등 다양한 분야에서 사용된다. Lasers are used in various fields such as processing and communication.
대한민국 등록특허 10-0631304호(이하 선행기술1)를 살펴보면, 유리의 절단을 위해 레이저가 사용되는 기술이 개시되어 있음을 알 수 있다. 여기서, 선행기술은 절단 작업 대상인 유리기판 상의 절단선을 따라 절단을 위한 제1 레이저빔, 예을을 제2 및 제3 레이저빔이 각각의 레이저 발생부에서 발생되어 조사됨을 알 수 있다. Looking at the Republic of Korea Patent No. 10-0631304 (hereinafter referred to as Prior Art 1), it can be seen that a technique that uses a laser for cutting the glass is disclosed. Here, in the prior art, it can be seen that a first laser beam for cutting along a cutting line on a glass substrate that is a cutting operation object, for example, a second laser beam and a third laser beam is generated and irradiated at each laser generator.
또한, 대한민국 등록특허 10-0320756호(이하 선행기술2)를 살펴보면, 생산 현장에서 사용되는 판재의 두께를 레이저를 이용하여 비접촉식으로 사용되는 판재의 두께를 측정하는 기술이 개시되어 있음을 알 수 있다. 여기서, 판재의 양측면에 각각 레이저가 조사됨을 알 수 있고, 이때, 각각의 레이저는 별도의 레이저 빔 조사 장치에서 발생됨을 알 수 있다. In addition, looking at the Republic of Korea Patent No. 10-0320756 (hereinafter referred to as Prior Art 2), it can be seen that a technique for measuring the thickness of the plate used in a non-contact type using a laser thickness of the plate used in the production site is disclosed. . Here, it can be seen that the laser is irradiated on both sides of the plate, respectively, in this case, it can be seen that each laser is generated in a separate laser beam irradiation apparatus.
상기한 선행기술에 기재되어 있는 바와 같이, 레이저빔을 이용하는 장치의 경우, 동일한 장치 내에서 복수의 레이저빔이 사용되는 경우가 많다. 상기한 선행기술과 같이, 복수의 레이저빔이 사용되는 경우, 각각의 레이저빔은 각각 별도로 배치되는 레이저빔 발생부에서 발생된다. As described in the above prior art, in the case of an apparatus using a laser beam, a plurality of laser beams are often used in the same apparatus. As described above, when a plurality of laser beams are used, each laser beam is generated in a laser beam generator that is disposed separately.
그러나, 레이저빔 발생부가 복수로 배치되면, 장치의 구조가 복잡해지고, 전체적인 설치비용이 증가하는 문제점이 있다.However, when a plurality of laser beam generators are arranged, there is a problem that the structure of the apparatus becomes complicated and the overall installation cost increases.
또한, 레이저빔 발생부가 복수로 배치되며 각각의 레이저빔 발생부를 동시에 동일하게 제어하기 어려운 문제점이 있다.In addition, there is a problem in that a plurality of laser beam generators are disposed and it is difficult to control the same laser beam generators at the same time.
본 발명은 상기한 문제점을 해결하기 위한 것으로서, 단일의 레이저 빔 발생부에서 발생된 레이저 빔을 복수개의 레이저빔으로 분할하는 광 분할 장치를 제공하는 목적으로 한다. The present invention has been made to solve the above problems, and an object of the present invention is to provide an optical splitting apparatus for dividing a laser beam generated by a single laser beam generating unit into a plurality of laser beams.
또한, 본 발명은 단일의 레이저 빔을 메인빔과 보조빔으로 분할하는 광 분할 장치를 제공하는 것을 목적으로 한다. It is also an object of the present invention to provide an optical splitting apparatus for dividing a single laser beam into a main beam and an auxiliary beam.
상기한 목적을 달성하기 위해 본 발명은, 레이저빔 발생부에서 발생되는 레이저빔을 복수개로 분할하는 장치로서, 상기 레이저빔 발생부에서 발생되는 레이저빔을 메인빔과 보조빔으로 분할하는 광분할부를 포함하고, 상기 광분할부는 상기 레이저빔의 일측으로 배치되되 상기 레이저빔 광속의 일부와 교차하도록 배치되는 분할 프리즘을 포함하는 광 분할 장치를 제공한다.In order to achieve the above object, the present invention provides a device for dividing a plurality of laser beams generated by a laser beam generator, comprising: a light splitter for dividing a laser beam generated by the laser beam generator into a main beam and an auxiliary beam; The light splitting unit includes a splitting prism disposed on one side of the laser beam and disposed to intersect a portion of the laser beam luminous flux.
상기 레이저빔의 광속을 타원형으로 변환하는 광속 변환부를 더 포함할 수 있다.The apparatus may further include a light beam converter configured to convert the light beam of the laser beam into an elliptical shape.
상기 광속 변환부는, 상기 광분할부의 전방에 배치되는 마스크를 포함할 수 있다.The luminous flux converter may include a mask disposed in front of the light splitter.
상기 분할 프리즘은 상기 레이저빔의 중심축의 주위에 하나 이상으로 배치될 수 있다.The split prism may be disposed at one or more around the central axis of the laser beam.
상기 분할 프리즘은, 상기 레이저빔 발생부를 향하여 경사지고 상기 레이저빔이 입사되는 입사면과, 상기 입사면에 대하여 평행하고 상기 레이저빔이 출사되는 출사면을 포함할 수 있다.The split prism may include an incident surface inclined toward the laser beam generator and an incident surface to which the laser beam is incident, and an exit surface parallel to the incident surface and outputting the laser beam.
상기와 같은 본 발명은, 단일의 레이저 빔 발생부에서 발생된 레이저 빔을 복수개의 레이저빔으로 분할할 수 있다. As described above, the present invention may divide a laser beam generated by a single laser beam generator into a plurality of laser beams.
또한, 본 발명은 단일의 레이저 빔을 메인빔과 보조빔으로 분할할 수 있다. In addition, the present invention can divide a single laser beam into a main beam and an auxiliary beam.
도 1은 본 발명의 일 실시예에 따른 광 분할 장치의 구성을 개념적으로 나타내는 도면이다.1 is a view conceptually showing a configuration of an optical splitting apparatus according to an embodiment of the present invention.
도 2는 도 1에 도시된 광 분할 장치를 다른 방향에서 본 구성을 나타내는 도면이다. FIG. 2 is a diagram illustrating the configuration of the optical splitter shown in FIG. 1 viewed from another direction.
도 3은 본 발명의 다른 실시예에 따른 광 분할 장치의 구성을 개념적으로 나타내는 도면이다. 3 is a diagram conceptually illustrating a configuration of an optical splitting apparatus according to another exemplary embodiment of the present invention.
도 4은 도 1과 도 2에 도시된 분할 프리즘의 구성을 나타내는 도면이다.4 is a diagram illustrating a configuration of the split prism shown in FIGS. 1 and 2.
도 5는 도 1과 도 2에 도시된 분할 프리즘에 의한 레이저빔의 분할을 나타내는 도면이다. FIG. 5 is a diagram illustrating the division of the laser beam by the split prism shown in FIGS. 1 and 2.
도 6는 도 1에 도시된 분할 프리즘에 의해 분할되어 조사된 메인 빔과 보조 빔의 조사 상태의 일 예를 나타내는 도면이다. FIG. 6 is a diagram illustrating an example of an irradiation state of a main beam and an auxiliary beam divided and radiated by the split prism illustrated in FIG. 1.
이하 첨부된 도면을 참조하면서 본 발명에 따른 바람직한 실시예를 상세히 설명하기로 한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.
도 1은 본 발명의 일 실시예에 따른 광 분할 장치의 구성을 개념적으로 나타내는 도면이고, 도 2는 도 1에 도시된 광 분할 장치를 다른 방향에서 본 구성을 나타내는 도면이다. FIG. 1 is a diagram conceptually illustrating a configuration of an optical splitting apparatus according to an exemplary embodiment of the present invention, and FIG. 2 is a diagram illustrating a configuration of the optical splitting apparatus illustrated in FIG. 1 as viewed from another direction.
도 1 과 도 2를 참조하면, 본 발명의 일 실시예에 따른 광 분할 장치(100)는 레이점 빔을 분할하는 광 분할부(120)를 포함할 수 있다. 1 and 2, the light splitting apparatus 100 according to an exemplary embodiment may include a light splitting unit 120 for splitting a ray point beam.
광 분할부(120)는 한 쌍의 분할 프리즘(122)을 포함한다. The light splitter 120 includes a pair of split prisms 122.
본 실시예는 한 쌍의 분할 프리즘(122)을 포함하는 광 분할부(120)는, 선행기술 1에 적용할 수 있도록, 단일의 레이저빔을 절단용으로서 사용되는 단일의 메인빔과 예열용으로서 사용되는 한 쌍의 보조빔으로 분할 할 수 있다. 본 실시예에서는, 분할 프리즘은 한 쌍으로 포함되지만, 사용자가 필요로 하는 레이저빔의 분할 개수에 대응하여, 분할 프리즘의 개수는 증감할 수 있다. In the present embodiment, the light splitter 120 including a pair of split prisms 122 is used for preheating and a single main beam used for cutting a single laser beam so that it can be applied to the prior art 1. It can be split into a pair of auxiliary beams used. In the present embodiment, the split prisms are included as a pair, but the number of split prisms can be increased or decreased corresponding to the number of split laser beams required by the user.
본 발명을 선행기술 2에 적용하는 경우에는, 광 분할부(120)는 분할 프리즘(122)을 단일개로 포함할 수 있다. When the present invention is applied to the prior art 2, the light splitter 120 may include a single split prism 122.
상기와 같이, 본 발명은 레이저빔의 필요 개수에 따라 광 분할부(120)가 포함하는 분할 프리즘의 개수는 변화될 수 있다. As described above, according to the present invention, the number of split prisms included in the light splitter 120 may vary according to the required number of laser beams.
여기서, 광 분할부(120)가 분할하는 레이저빔의 파장은 사용자의 필요에 따라 설정될 수 있다. 다만, 후술하는 광학 요소들에 의한 레이저 빔의 분산 정도와 굴절 정도가 균일하게 하기 위해 레이저빔은 단일 파장인 것이 바람직하다. 본 실시예가 적용되는 기기에서 사용하는 레이저빔은 그 파장이 1.064μm 인 것이 바람직하다. 또한, 레이저빔 발생부(110)는 YAG 레이저, CO2 레이저, 파이버 레이저 등이 사용될 수 있다.Here, the wavelength of the laser beam split by the light splitter 120 may be set according to the needs of the user. However, in order to make the degree of dispersion and the degree of refraction of the laser beam uniform by the optical elements described below, the laser beam is preferably a single wavelength. It is preferable that the wavelength of the laser beam used in the apparatus to which the present embodiment is applied is 1.064 µm. In addition, the laser beam generator 110 may be a YAG laser, CO2 laser, fiber laser and the like.
레이저빔 발생부(110)에서 발생되는 레이저빔은 그 광속이 원형이지만, 사용자의 필요에 따라 그 광속을 변환하는 것이 바람직하다. 즉, 본 실시예에서, 분할 프리즘(122)은 한 쌍으로서 사용되므로 레이저빔의 분할이 용이하도록 레이저빔 발생부(110)에서 발생된 레이저빔의 광속을 소정의 단축과 장축 직경을 갖는 타원형으로 변환하는 것이 바람직하다.Although the luminous flux of the laser beam generated by the laser beam generator 110 is circular, it is preferable to convert the luminous flux according to the needs of the user. That is, in the present embodiment, since the split prism 122 is used as a pair, the luminous flux of the laser beam generated by the laser beam generator 110 is elliptical having a predetermined short axis and long axis diameter so that the laser beam is easily divided. It is desirable to convert.
타원형의 레이저 빔 광속을 형성하기 위해, 레이저빔 발생부(110)과 광분할부(120) 사이에는 광속 변환부(130)가 배치될 수 있다. In order to form the elliptical laser beam luminous flux, the luminous flux converting unit 130 may be disposed between the laser beam generator 110 and the light splitter 120.
광속 변환부(130)는 중앙에 타원형의 광속 변환용 홀(132)이 형성되어 있는 마스크이다. 여기서, 홀(132)은 타원형으로 형성된다. 따라서, 레이저빔 발생부(110)에서 발생된 레이저빔은 홀(132)을 지나며, 홀(132)의 형상에 대응하는 광속 즉, 타원형의 광속을 갖는다. The luminous flux converter 130 is a mask in which an elliptical luminous flux conversion hole 132 is formed in the center. Here, the hole 132 is formed in an elliptical shape. Therefore, the laser beam generated by the laser beam generator 110 passes through the hole 132 and has a light beam corresponding to the shape of the hole 132, that is, an elliptical light beam.
여기서, 레이저빔의 광속의 장축과 단축의 길이는 사용자의 필요에 따라 다양하게 설정될 수 있다. Here, the length of the long axis and short axis of the luminous flux of the laser beam may be variously set according to the needs of the user.
한편, 도 3은 본 발명의 다른 실시예에 따른 광 분할 장치의 구성을 개념적으로 나타내는 도면이다. 3 is a diagram conceptually illustrating a configuration of an optical splitting apparatus according to another exemplary embodiment of the present invention.
도 3을 참조하면, 광속 변환부(130)는 빔 확대기(beam expander)(132)와 빔 쉐이핑기(beam shaping)(134)(beam shaper 또는 beam homogenizer로 호칭할 수 있음)를 각각 단일개 또는 한 쌍으로 포함할 수 있다. 빔 확대기는 빔의 단면적을 확대하는 구성 요소이고, 빔 쉐이핑기는 빔의 형태를 필요에 따라 변환하는 구성 요소이다. Referring to FIG. 3, the beam converting unit 130 may include a single beam expander 132 and a beam shaping 134 (which may be referred to as a beam shaper or a beam homogenizer). It can be included as a pair. The beam expander is a component that enlarges the cross-sectional area of the beam, and the beam shaper is a component that converts the shape of the beam as needed.
도 3에 도시된 실시예는 이전의 실시예와는 광속 변환부의 구성에 차이가 있으나, 다른 구성요소는 동일하므로, 다음에서는 함께 설명하기로 한다. 3 is different from the previous embodiment in the configuration of the luminous flux converter, but other components are the same, which will be described below.
또한, 레이저빔 발생부(110)는 사용자의 필요에 따라 X, Y, Z 축 방향으로 이동가능하게 설치되는 것이 일반적이므로, 광 분할부(120)는 레이저빔 발생부(110)에 대응하여 이동가능하게 설치되는 것이 바람직하다. In addition, since the laser beam generator 110 is generally installed to be movable in the X, Y, and Z axis directions according to a user's needs, the light splitter 120 moves in correspondence with the laser beam generator 110. It is preferable to be installed as possible.
광분할부(120)는 레이저빔 발생부(110)에서 발생된 레이저빔을 메인 빔과 보조 빔으로 분할하고, 분할된 메인 빔(3)과 보조 빔(4)의 광속을 각각 집속한다. 여기서, 메인 빔은 유리(1)의 절단에 사용되고, 보조 빔은 유리 절단을 용이하게 하기 위한 예열에 사용될 수 있다. The light splitter 120 divides the laser beam generated by the laser beam generator 110 into a main beam and an auxiliary beam, and focuses the luminous fluxes of the divided main beam 3 and the auxiliary beam 4, respectively. Here, the main beam can be used for cutting the glass 1, and the auxiliary beam can be used for preheating to facilitate the cutting of the glass.
레이저 빔의 분할을 위해 광분할부(120)는 한 쌍의 분할 프리즘(122)을 포함한다. The light splitter 120 includes a pair of split prisms 122 for splitting the laser beam.
한 쌍의 분할 프리즘(122)은 레이저빔 발생부(110)에서 유리 절단을 위한 조사하는 레이저빔을 절단용의 메인 빔과 예열용의 보조 빔으로 분할한다. 여기서, 메인 빔이 조사되는 절단선 양측에 대한 예열을 용이하게 하기 위해, 분할 프리즘(122)은 한 쌍으로 준비되고, 레이저빔의 광축을 기준으로 양측에 각각 배치되는 것이 바람직하다. The pair of split prisms 122 divides the laser beam irradiated for cutting the glass into the main beam for cutting and the auxiliary beam for preheating. Here, in order to facilitate preheating on both sides of the cutting line to which the main beam is irradiated, the split prisms 122 are prepared in pairs, and are preferably disposed at both sides with respect to the optical axis of the laser beam.
분할 프리즘(122)의 배치 시, 분할 프리즘(122)은 레이점 빔의 중심축의 주위로 배치되는 것이 바람직하다. In the arrangement of the split prism 122, the split prism 122 is preferably arranged around the central axis of the ray point beam.
한 쌍의 분할 프리즘(122)은 레이저빔(2)의 장축 방향으로 배치되고, 분할 프리즘(122) 각각은 레이저빔의 광축과의 이격 거리(d)가 서로 동일하다. The pair of split prisms 122 are arranged in the long axis direction of the laser beam 2, and each of the split prisms 122 has the same distance (d) from the optical axis of the laser beam.
분할 프리즘(122)의 이격 공간을 통과하는 레이저 빔(2)은 메인 빔(3)으로서 계속 직진하고, 분할 프리즘(122)을 통과하는 레이저 빔은 보조 빔(4)으로서 소정 방향으로 굴절된다. 이를 위해, 분할 프리즘(122)의 이격 거리(d)는 레이저 빔의 장축 방향 직경보다 작은 것이 바람직하다. 또한, 분할 프리즘(122)의 이격거리는 절단 대상 물체에 따라서 빔의 에너지 밀도를 달리 하고자 할 때 특정한 간격으로 변경할 수 있다. 이때, 분할 프리즘(122)의 이격거리는 최소 0부터 시작될 수 있다. The laser beam 2 passing through the separation space of the split prism 122 continues straight as the main beam 3, and the laser beam passing through the split prism 122 is refracted in the predetermined direction as the auxiliary beam 4. For this purpose, it is preferable that the separation distance d of the split prism 122 is smaller than the major axis diameter of the laser beam. In addition, the separation distance of the split prism 122 may be changed at specific intervals when the energy density of the beam is to be changed according to the cutting object. In this case, the separation distance of the split prism 122 may start at least zero.
보조 빔의 굴절을 위해, 분할 프리즘(122)은 다음과 같이 이루어진다. For refraction of the auxiliary beam, split prism 122 is made as follows.
도 4은 도 1과 도 2에 도시된 분할 프리즘의 구성을 나타내는 도면으로서, 분할 프리즘의 우측면도(a), 좌측면도(b) 및 평면도(c)가 도시되어 있다. FIG. 4 is a diagram showing the configuration of the split prism shown in FIGS. 1 and 2, in which a right side view (a), a left side view (b), and a plan view (c) of the split prism are shown.
도 4을 참조하면, 분할 프리즘(122)은 소정의 높이와 폭 그리고 두께를 갖는 육면체 형상으로 이루어질 수 있다. 다만, 분할 프리즘(122)의 배면은 양측 모서리부위에 대하여 소정의 면취 공정이 수행될 수 있다. Referring to FIG. 4, the split prism 122 may have a hexahedron shape having a predetermined height, width, and thickness. However, a predetermined chamfering process may be performed on the rear surface of the split prism 122 on both side edge portions.
이때, 분할 프리즘(122)의 표면 중, 레이저빔 발생부(110)를 향하는 면은 레이저빔이 입사되는 입사면(123a)으로 설정되고, 반대측면은 레이저빔이 출사되는 출사면(123b)으로 설정될 수 있다. 이때, 입사면(123a)과 출사면(123b)은 서로 평행하지만, 레이저빔 발생부(110)를 향하여 경사지게 형성된다. 이때, 입사면(123a)과 출사면(123b)의 경사도에 따라, 후술하는 메인 빔(3)과 보조 빔(4)의 이격 정도가 설정되므로, 그 경사도는 사용자의 필요에 따라 설정되는 것이 바람직하다. At this time, the surface facing the laser beam generator 110 is set as the incident surface 123a through which the laser beam is incident, and the opposite side is the exit surface 123b through which the laser beam is emitted. Can be set. At this time, the incident surface 123a and the emission surface 123b are parallel to each other, but are inclined toward the laser beam generator 110. At this time, according to the inclination of the incident surface 123a and the exit surface 123b, the separation degree of the main beam 3 and the auxiliary beam 4 to be described later is set, the inclination is preferably set according to the needs of the user Do.
도 5는 도 1과 도 2에 도시된 분할 프리즘에 의한 레이저빔의 분할을 나타내는 도면이다. 도 5를 참조하면, 경사진 입사면(123a)과 출사면(123b)에 의해 보조 빔(4)은 메인 빔(3)과 평행하게 출사되지만, 메인 빔(3)과는 소정 거리만큼 이격되어 출사된다. FIG. 5 is a diagram illustrating the division of the laser beam by the split prism shown in FIGS. 1 and 2. Referring to FIG. 5, the auxiliary beam 4 is emitted in parallel with the main beam 3 by the inclined entrance surface 123a and the emission surface 123b, but is spaced apart from the main beam 3 by a predetermined distance. It is emitted.
분할 프리즘(122)을 통과하며 분할된 메인 빔(3)과 보조 빔(4)은 별도의 집속 렌즈(140)에 의해 집속되어 절단 작업 대상인 유리에 대하여 조사될 수 있다. 이때, 집속 렌즈(140)는 절단 작업 대상인 유리에 메인 빔(3)과 보조 빔(4)을 집속하여 그 초점이 형성될 수 있도록 배치된다. 이를 위해, 집속 렌즈(140)는 광축을 따라 이동가능하게 배치되는 것이 바람직하다. The main beam 3 and the auxiliary beam 4, which are divided through the split prism 122, may be focused by a separate focusing lens 140 to be irradiated onto the glass to be cut. At this time, the focusing lens 140 focuses the main beam 3 and the auxiliary beam 4 on the glass, which is a cutting target, to form a focal point. For this purpose, the focusing lens 140 is preferably arranged to be movable along the optical axis.
상기와 같이 구성된 광 분할 장치의 사용에 대해 살펴보기로 한다. The use of the optical splitting apparatus configured as described above will be described.
우선 광 분할 장치(100)는 레이저 빔 발생부(110)와 절단 작업 대상인 유리의 사이에 배치된다. 광 분할 장치(100)는 레이저 빔 발생부(110)와 일체로 연결될 수 있다. 이때, 광 분할 장치(100)가 레이저 빔 발생부(110)의 이동에 대응하여 이동할 수 있다면, 서로 별개로 배치될 수도 있다. First, the light splitting apparatus 100 is disposed between the laser beam generator 110 and the glass to be cut. The optical splitting apparatus 100 may be integrally connected with the laser beam generator 110. At this time, if the light splitting apparatus 100 can move in response to the movement of the laser beam generator 110, they may be arranged separately from each other.
레이저 빔 발생부(110)에서 발생된 레이저 빔은 광속 변환부(130)에 의해 사용자가 필요로 하는 형태의 광속으로 변환될 수 있다. The laser beam generated by the laser beam generator 110 may be converted into a light beam in a form required by the user by the light beam converter 130.
도면에서는 광속 변환부(130)가 사용되는 것으로 도시되어 있으나, 광속 변환부(130)는 사용자의 필요에 따라 사용하지 않을 수도 있다. Although the light beam converter 130 is illustrated in the drawing, the light beam converter 130 may not be used according to a user's needs.
레이저 빔은 한 쌍의 분할 프리즘(122)을 통과한다. 여기서, 한 쌍의 분할 프리즘(122)의 이격 공간을 통과하는 레이저 빔은 메인 빔(3)으로서 유리의 절단에 사용될 수 있다. 또한, 한 쌍의 분할 프리즘(122)의 입사면(123a)으로 입사되는 레이저빔은 소정 각도로 굴절된 후, 출사면(123b)을 통해 출사된 후, 보조 빔(4)으로서 메인 빔(3)의 양측을 예열한다. The laser beam passes through a pair of split prisms 122. Here, the laser beam passing through the spaced space of the pair of split prisms 122 can be used for cutting the glass as the main beam 3. In addition, the laser beam incident on the incident surface 123a of the pair of divided prisms 122 is refracted at a predetermined angle and then emitted through the emission surface 123b, and then the main beam 3 as the auxiliary beam 4. Preheat both sides.
도 6는 절단 작업 대상에 메인 빔과 보조 빔이 절단 작업 대상인 유리에 입사되는 일 예를 나타내는 도면이다. 6 is a diagram illustrating an example in which a main beam and an auxiliary beam are incident on a glass that is a cutting target.
도 6를 참조하면, 레이저 빔이 분할 프리즘에 의해 메인 빔(3)과 보조 빔(4)으로 분할된 후, 유리(1)의 절단선(1a)을 따라 조사됨을 알 수 있다. 여기서, 사용자의 필요에 따라서는 별도의 광학 요소를 추가하여 메인 빔(3)과 보조 빔(4)의 조사 방향을 변화시킬 수 있다. Referring to FIG. 6, it can be seen that the laser beam is divided into the main beam 3 and the auxiliary beam 4 by the splitting prism, and then irradiated along the cutting line 1a of the glass 1. Here, according to the needs of the user, an additional optical element may be added to change the irradiation direction of the main beam 3 and the auxiliary beam 4.
레이저 빔 발생부(110)와 광 분할부(120)를 절단선(1a)을 따라 이동시키면, 메인 빔(3)이 절단선을 따라 집속되고 그 에너지에 의해 유리가 절단된다. When the laser beam generator 110 and the light splitter 120 are moved along the cutting line 1a, the main beam 3 is focused along the cutting line and the glass is cut by the energy.
분할 프리즘(122)에 의해 분할된 메인 빔(3)과 보조 빔(4)은 집속 렌즈(140)에 의해 집속되어, 절단과 예열 효율이 향상되도록 할 수 있다. The main beam 3 and the auxiliary beam 4 divided by the split prism 122 may be focused by the focusing lens 140 to improve cutting and preheating efficiency.
메인 빔(3)은 절단선(1a)을 따라 조사되고, 유리의 절단이 이루어지도록 하고, 보조 빔(4)은 절단선의 양측으로 조사되며 예열이 이루어지도록 하여, 절단이 용이하게 이루어지도록 할 수 있다. The main beam 3 is irradiated along the cutting line 1a, the glass is cut, and the auxiliary beam 4 is irradiated to both sides of the cutting line, and preheated, so that the cutting can be easily made. have.
본 발명은, 단일의 레이저 빔 발생부에서 발생된 레이저 빔을 사용자가 필요로 하는 개수로 분할할 수 있다. According to the present invention, a laser beam generated by a single laser beam generator may be divided into a number required by a user.
상기와 같이, 레이저 빔을 유리 절단에 사용하는 경우, 단일의 레이저 빔을 유리 절단선에 조사되는 메인빔과 절단선 양측을 동시에 동일하게 예열하는 보조 빔으로 분할하여, 단일의 레이저 빔을 이용하여 절단과 예열을 동시에 수행할 수 있다. As described above, when the laser beam is used for glass cutting, a single laser beam is divided into a main beam irradiated to the glass cutting line and an auxiliary beam which simultaneously preheats both sides of the cutting line at the same time, and uses a single laser beam. Cutting and preheating can be done simultaneously.
본 발명은 도면에 도시된 실시예를 참고로 설명되었으나 이는 예시적인 것에 불과하며, 본 기술 분야의 통상의 지식을 가진 자라면 이로부터 다양한 변형 및 균등한 다른 실시예가 가능하다는 점을 이해할 것이다. 따라서, 본 발명의 진정한 기술적 보호 범위는 첨부된 특허청구범위의 기술적 사상에 의하여 정해져야 할 것이다.Although the present invention has been described with reference to the embodiments shown in the drawings, this is merely exemplary, and it will be understood by those skilled in the art that various modifications and equivalent other embodiments are possible. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

Claims (5)

  1. 레이저빔 발생부에서 발생되는 레이저빔을 분할하는 장치로서, An apparatus for dividing a laser beam generated by a laser beam generator,
    상기 레이저빔 발생부에서 발생되는 레이저빔을 메인빔과 보조빔으로 분할하는 광분할부를 포함하고, And a light splitter configured to split the laser beam generated by the laser beam generator into a main beam and an auxiliary beam.
    상기 광분할부는 상기 레이저빔의 일측으로 배치되되 상기 레이저빔 광속의 일부와 교차하도록 배치되는 분할 프리즘을 포함하는 광 분할 장치.The light splitter includes a splitting prism disposed on one side of the laser beam and disposed to intersect a portion of the laser beam luminous flux.
  2. 제1항에 있어서, The method of claim 1,
    상기 레이저빔의 광속을 타원형으로 변환하는 광속 변환부를 더 포함하는 광 분할 장치.And a light beam converting unit converting the light beam of the laser beam into an elliptical shape.
  3. 제2항에 있어서, The method of claim 2,
    상기 광속 변환부는,The luminous flux converter,
    상기 광분할부의 전방에 배치되는 마스크를 포함하는 광 분할 장치.And a mask disposed in front of the light splitter.
  4. 제1항에 있어서, The method of claim 1,
    상기 분할 프리즘은 상기 레이저빔의 중심축의 주위에 하나 이상으로 배치되는 광 분할 장치.And at least one divisional prism is arranged around a central axis of the laser beam.
  5. 제4항에 있어서, The method of claim 4, wherein
    상기 분할 프리즘은,The split prism is,
    상기 레이저빔 발생부를 향하여 경사지고 상기 레이저빔이 입사되는 입사면과, An incidence surface inclined toward the laser beam generating unit and to which the laser beam is incident;
    상기 입사면에 대하여 평행하고 상기 레이저빔이 출사되는 출사면을 포함하는 광 분할 장치.And an emission surface parallel to the entrance surface and to which the laser beam is emitted.
PCT/KR2014/000198 2013-01-25 2014-01-08 Light dividing apparatus WO2014115983A1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08201753A (en) * 1995-01-23 1996-08-09 Nec Corp Projection type liquid crystal display device
JPH08257050A (en) * 1995-01-04 1996-10-08 Visx Inc Device and method to integrate beam time-wise and space-wise
JPH09120047A (en) * 1995-10-25 1997-05-06 Nec Corp Video projector
KR100789277B1 (en) * 2006-11-17 2008-01-02 주식회사 이오테크닉스 Etching method of transparent conductive film

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08257050A (en) * 1995-01-04 1996-10-08 Visx Inc Device and method to integrate beam time-wise and space-wise
JPH08201753A (en) * 1995-01-23 1996-08-09 Nec Corp Projection type liquid crystal display device
JPH09120047A (en) * 1995-10-25 1997-05-06 Nec Corp Video projector
KR100789277B1 (en) * 2006-11-17 2008-01-02 주식회사 이오테크닉스 Etching method of transparent conductive film

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