WO2014103929A1 - Heat treatment apparatus - Google Patents

Heat treatment apparatus Download PDF

Info

Publication number
WO2014103929A1
WO2014103929A1 PCT/JP2013/084243 JP2013084243W WO2014103929A1 WO 2014103929 A1 WO2014103929 A1 WO 2014103929A1 JP 2013084243 W JP2013084243 W JP 2013084243W WO 2014103929 A1 WO2014103929 A1 WO 2014103929A1
Authority
WO
WIPO (PCT)
Prior art keywords
heat treatment
furnace body
bowl
heat
rod
Prior art date
Application number
PCT/JP2013/084243
Other languages
French (fr)
Japanese (ja)
Inventor
南大介
Original Assignee
株式会社村田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Priority to JP2014554411A priority Critical patent/JP6024763B2/en
Publication of WO2014103929A1 publication Critical patent/WO2014103929A1/en

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B9/40—Arrangements of controlling or monitoring devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any preceding group
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
    • F27B9/142—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving along a vertical axis
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B9/38—Arrangements of devices for charging
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B9/39—Arrangements of devices for discharging
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D3/00—Charging; Discharging; Manipulation of charge
    • F27D2003/0001—Positioning the charge
    • F27D2003/0012—Working with piles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D3/00—Charging; Discharging; Manipulation of charge
    • F27D2003/0001—Positioning the charge
    • F27D2003/0014—Positioning the charge involving the use of magazines
    • F27D2003/0015—Positioning the charge involving the use of magazines the magazine being vertical
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D3/00—Charging; Discharging; Manipulation of charge
    • F27D2003/0085—Movement of the container or support of the charge in the furnace or in the charging facilities
    • F27D2003/0086—Up or down
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/60—Production of ceramic materials or ceramic elements, e.g. substitution of clay or shale by alternative raw materials, e.g. ashes

Definitions

  • the present invention relates to a heat treatment apparatus for performing heat treatment by passing an object to be heat treated, such as an unfired ceramic laminate, through a furnace, and more specifically, a heat treatment rod containing the object to be heat treated is disposed inside a vertical furnace body. It is related with the heat processing apparatus which passes through and heat-processes a to-be-processed object continuously.
  • a ceramic electronic component such as a multilayer ceramic capacitor is usually manufactured through a process of heat-treating (firing) an unfired ceramic laminate (heat-treated material).
  • the heat treatment furnace includes a furnace core tube 102 provided vertically, and heating means (heaters) 103 a and 103 b provided around the furnace core tube 102.
  • the heat treatment furnace 100 includes a conveying means 105 that allows a plurality of rods 104a stacked from the rod charging unit 108a to be stacked along the longitudinal direction inside the furnace core tube 102, and a heat treatment line. There is provided a hook taking-out means 109 for taking out the broken hook 104a out of the system.
  • the heel group holding claw 109a 1 is for supporting the heel just above the heel (bottom heel) 104a to be taken out from the heel take-out portion 108b, that is, the heel group 104 from the second heel up. It is configured to slide below the supporting ridges and support the ridge group 104.
  • Napishtim located at the bottom of Napishtim- group 104 (the bottom of Napishtim-) becomes to be taken out of the system by being pushed laterally by pusher 109b 1.
  • the heat treatment furnace 100 holds the Napishtim group 104 Slide by holding claws driving mechanism 109a 2 a Napishtim group holding claws 109a 1, in that state, the Napishtim at the bottom, by the pusher 109b 1 Since extrusion is performed from the direction, it takes time to take out the bag and there is a problem that productivity is low. Also, since to hold the Napishtim 104 by Napishtim group holding claws 109a 1, there is a problem of low flexibility in shape of Napishtim 104a.
  • the present invention solves the above-described problem, and is a vertical heat treatment apparatus that can efficiently carry out the heat-treated material that has passed through the furnace body from the lower part of the furnace body, and is excellent in productivity.
  • An object of the present invention is to provide a heat treatment apparatus.
  • the heat treatment apparatus of the present invention comprises: From the top of the furnace body, the heat treatment bowl containing the material to be heat treated is sequentially introduced into the furnace body, and the introduced and stacked heat treatment bowls are sequentially conveyed from above to below the furnace body, In the heat treatment apparatus for continuously heat-treating the heat-treated material accommodated in the heat treatment bowl by carrying out the heat treatment bowl that has passed through the furnace body sequentially from the lower part of the furnace body, (A) an unloading mechanism for sequentially unloading the heat treatment rod from the lower part of the furnace body, By holding and rotating the heat treatment rods configured to be rotatable, the heat treatment rods can be rotated in a predetermined direction, and the heat treatment rods are in a state where the heat treatment rods are floating.
  • a rotary table provided with a spear passing port through which the heat-treated scissors are passed only when in a predetermined phase in plan view
  • a support part capable of moving up and down is provided to support the heat treatment bowl from below through the bowl passage opening of the rotary table, and the support part lifts the heat treatment bowl held in the rotary table
  • a lifter configured to be able to be held in a floating state from the rotary table, The heat treatment bowl held by the rotary table is lifted by the lifter and floated on the rotary table, and in this state, the heat treatment bowl to be carried out can pass through the bowl passage opening.
  • the heat treatment soot to be carried out is discharged through the soot passage port, and
  • the rotary table rotates in a predetermined direction while holding the stacked heat treatment rods, and the heat treatment rods introduced into the furnace body from the top of the furnace body and the top of the stacked heat treatment rods.
  • the phase relationship with the heat treatment soot introduced into the furnace body just before being located in the upper stage is as follows when the heat treatment soot introduced just before passes through the soot passage opening of the rotary table.
  • An unloading mechanism configured so that the heat treatment slag introduced into the container does not pass through;
  • An introduction mechanism for sequentially introducing the heat treatment soot from above the furnace body into the furnace body, and in a series of steps when the heat treatment soot is discharged by the carry-out mechanism, At a predetermined timing corresponding to the timing of rotating the heat treatment rod, the heat treatment rod is introduced into the furnace body, and is introduced immediately before and positioned at the uppermost stage of the heat treatment bowls stacked in the furnace body.
  • An introduction mechanism configured to be able to place the heat treatment rod to be introduced next on the heat treatment rod in the uppermost stage in such a manner that a phase shift occurs with the heat treatment rod. It is characterized by having.
  • the stacked heat treatment rods are stacked in such a manner that the phases are alternately different by 45 ° in the stacking direction.
  • the heat treatment bowls are stacked in such a manner that the phases are alternately different by 45 ° in the stacking direction, the stacked state of the heat treatment bowls is stabilized, and it is possible to suppress the occurrence of dropping due to misalignment, It becomes possible to supply a fresh gas into the heat treatment tank, and it becomes possible to stably perform a good heat treatment.
  • the upper surface of the rotary table is provided with a fitting recess for fitting and holding the heat-treated bowl in a phase that does not pass through the bowl passage opening.
  • the lowermost heat treatment bowl in a phase that does not pass through the bowl passage opening is fitted into the fitting depression, and the top It becomes possible to stably hold the stacked heat treatment rods, and the reliability can be improved.
  • the introduction mechanism is The first and second rotating shafts that are parallel to each other and that rotate about the axis, and the first rotating shaft that is disposed so as to protrude from the outer peripheral surface of the first rotating shaft and holds the heat treatment rod A holding portion, a second holding portion that is disposed so as to protrude from an outer peripheral surface of the second rotation shaft, and holds the heat treatment rod in cooperation with the first holding portion; and the rotation Drive means for rotating the shaft, A state in which the first rotation shaft and the second rotation shaft are rotated until the first holding portion and the second holding portion reach a position where the heat treatment rod can be held.
  • the heat treatment trough is held by the first holding part and the second holding part, Rotating the first rotation shaft and the second rotation shaft until the first holding portion and the second holding portion reach a position where the heat treatment rod cannot be held. Accordingly, it is preferable that the heat treatment rods held by the first holding unit and the second holding unit are introduced into the furnace body from the upper part of the furnace body.
  • the introduction mechanism having the above-described configuration it is possible to efficiently introduce the heat treatment soot without requiring an introduction mechanism having a complicated structure. That is, the first and second rotation shafts having the holding portions (first and second holding portions) for holding the heat treatment rod are configured to be able to perform an operation of rotating about the axis. Therefore, it is possible to quickly receive and hold the heat treatment rod only by rotating the pivot shaft about the axis, and to quickly release the held heat treatment rod.
  • the introduction speed of soot can be improved.
  • the rotating shaft and the first and second holding portions with a heat-resistant material such as a ceramic material, for example, it becomes possible to handle a heat treatment bowl having a high temperature exceeding 1000 ° C., for example.
  • the operating range is expanded and the introduction operation of the heat treatment rod is more efficiently performed. Is possible.
  • the heat treatment apparatus of the present invention is configured as described above, it is possible to reliably carry out the heat treatment soot from the lower part of the furnace body, and to perform good heat treatment efficiently.
  • the heat treatment apparatus of the present invention it is possible to carry out the heat treatment soot only by performing the rotation of the rotary table having the spear passage opening and the up and down movement of the lifter at a predetermined timing. Therefore, the processing speed can be improved without requiring a complicated mechanism.
  • the heat treatment apparatus of the present invention rotates in a series of steps when the heat treatment soot is discharged by the carry-out mechanism as an introduction mechanism for sequentially introducing the heat treatment soot from the upper part of the furnace body into the furnace body.
  • the heat treatment rod is introduced into the furnace body at a predetermined timing corresponding to the timing at which the heat treatment rod is rotated by the table, and is positioned at the uppermost stage of the heat treatment rods introduced immediately before and stacked in the furnace body.
  • the phase relationship between the heat treatment rod introduced immediately before and the heat treatment rod introduced thereafter is introduced next to the heat treatment rod when the heat treatment rod introduced immediately before passes from the pass hole of the rotary table.
  • the heat treatment Napishtim is set to be a relationship as do not pass, and introducing efficient heat treatment Napishtim-, it is possible to reliably perform discharge.
  • FIG. 1 It is front sectional drawing which shows the structure of the heat processing apparatus concerning one Embodiment (embodiment) of this invention. It is a perspective view which shows the structure of the carrying-out mechanism of the heat processing apparatus concerning embodiment of this invention. It is a perspective view which shows the structure of the introduction mechanism of the heat processing apparatus concerning embodiment of this invention.
  • movement at the time of carrying out the heat processing trough by a carrying-out mechanism (a) is a top view, (b) is front sectional drawing.
  • FIG. 1 is a front sectional view schematically showing a configuration of a heat treatment apparatus 10 provided with a transfer mechanism according to an embodiment of the present invention
  • FIG. 2 is an unloading mechanism used in the heat treatment apparatus according to an embodiment of the present invention
  • FIG. 3 is a perspective view showing an introduction mechanism used in the heat treatment apparatus.
  • the heat treatment apparatus 10 includes a furnace body (housing) 1 made of a heat insulating material and the like, and a furnace core tube 2 disposed inside the furnace body 1 so that the axis is in the vertical direction. And a heating means (heater) 3 for heating the inside of the furnace core tube 2 (inside the furnace body), and a material to be heat-treated that has passed through the inside of the furnace core tube 2 (inside the furnace body) from above to below.
  • the unloading mechanism 6 for sequentially carrying out the heat treatment rod 5 that has been carried out from the lower part (furnace body lower part) of the furnace core tube 2 and the inside of the furnace core tube 2 (furnace body) from the upper part (furnace body upper part) of the furnace core tube 2
  • an introduction mechanism 7 for sequentially introducing the heat treatment basket 5 in which the object to be treated is accommodated.
  • the heating means 3 it is possible to use a module heater in which a heat insulating material and a heater are integrally formed.
  • the unloading mechanism 6 for sequentially unloading the heat treatment rod 5 from the lower part of the furnace body is configured to be rotatable, holds the stacked heat treatment rods 5 and rotates the heat treatment rod 5 in a predetermined direction.
  • the rotary table 8 is configured to be able to rotate independently of the heat treatment bowl 5 while the heat treatment bowl 5 is floating.
  • the rotary table 8 includes a bowl passage port 4 through which the heat treatment bowl 5 passes only when it is in a predetermined phase (rotation angle or rotation position) in plan view.
  • the rotary table 8 is configured to be rotated in a clockwise direction and a counterclockwise direction by a servo motor 18 via a belt 19.
  • the carry-out mechanism 6 includes a lifter 9.
  • the lifter 9 has a support portion 9a that can be moved up and down through the spear passage 4 of the rotary table 8 to support the heat treatment sputum 5 from below, and is held on the rotary table 8 by the support portion 9a.
  • the heat treatment bowl 5 in the state of being lifted is configured to be able to be lifted and held in a state of floating from the rotary table 8.
  • a heat treatment bowl 5 in a phase not passing through the bowl passage opening 4 (in this embodiment, a heat treatment bowl in a state rotated by 45 ° from a phase passing through the bowl passage opening 4) 5 is provided.
  • a fitting recess 8a for fitting and holding is provided.
  • the to-be-heated material 5 carried out by the carrying-out mechanism 6 from the lower part of the furnace core tube 2 is transferred to the belt conveyor 20, and is then conveyed to the next process (FIG. 8B). reference).
  • the introduction mechanisms 7 for sequentially introducing the heat treatment rods 5 containing the heat treatment objects from the upper part of the furnace core tube 2 (the upper part of the furnace body) into the furnace core tube 2 (inside the furnace body) are parallel to each other.
  • maintaining the heat processing rod 5 is provided in the 1st rotating shaft 11a so that it may protrude from the outer peripheral surface
  • the 2nd rotating shaft 11b has A second holding portion 12b for holding the heat treatment rod 5 is disposed so as to protrude from the outer peripheral surface.
  • the introduction mechanism 7 is a drive for causing the first and second rotating shafts 11a and 11b to move forward and backward in the axial direction and to rotate the rotating shaft about the axis. Means (not shown).
  • the first and second rotating shafts 11a and 11b and the first and second holding portions 12a and 12b constituting the introduction mechanism 7 are made of a ceramic material such as alumina having excellent heat resistance. Is formed.
  • FIGS. 4 (a), 5 (a), 6 (a), 7 (a), and 8 (a) a plurality of heat treatment rods 5 are stacked and supported on the rotary table 8. Only the lowermost heat treatment rod 5 is shown. 4B, FIG. 5B, FIG. 6B, FIG. 7B, and FIG. 8B, the lower three of the poles positioned on the rotary table 8 are used. Only the step (three layers) heat treatment bowl 5 is shown.
  • the heat treatment rod next to the heat treatment rod 5 (5a) to be carried out (the lowermost heat treatment rod) 5 (5a) (the heat treatment rod immediately above the heat treatment rod 5 (5a) to be carried out).
  • 5 (5b) is 45 ° out of phase, so that the corner portion fits into the fitting recess 8a of the turntable 8 without passing through the trough passage port 4, so that the heat treatment trough 5 (5b)
  • the upper heat treatment basket 5 is stably held on the rotary table 8 in a stacked state.
  • the heat treatment rod 5 is introduced from the introduction mechanism 7 into the furnace core tube 2 (inside the furnace body) (that is, the heat treatment rod 5 is stacked inside the furnace core tube 1 (inside the furnace body). To be transferred onto the heat-treated bowl (pillar).
  • the operation when the heat treatment rod 5 is introduced into the furnace body by the introduction mechanism 7 is as follows, for example.
  • the first rotation shaft 11a constituting the introduction mechanism 7 is rotated in the counterclockwise direction, and the second rotation shaft 11b is rotated in the clockwise direction, so that the first and second holding portions 12a are rotated.
  • 12b are opposed to each other and are substantially horizontal (see FIG. 3), the first and second rotating shafts 11a, 11b are advanced in the direction of the heat treatment bowl conveying mechanism 21 (direction indicated by arrow C). Then, the heat treatment basket is received and held on the first and second holding portions 12a and 12b.
  • the first and second rotating shafts 11a and 11b (FIG. 3) of the introduction mechanism 7 are retracted (that is, held by the first and second holding portions 12a and 12b, and then inside the furnace body.
  • the heat treatment rod to be introduced is moved in the direction indicated by the arrow D and positioned above the furnace core tube 2).
  • the 1st and 2nd holding part 12a is the timing. , 12b, and the heat treatment rod 5 located above the furnace core tube 2 is released and moved to the inside of the furnace core tube 2 (inside the furnace body) (that is, the heat treatment stacked inside the furnace body 2). (Move to the top of the pole).
  • the first and second holding portions 12a and 12b constituting the introduction mechanism 7 are used. Among them, the first rotation shaft 11a is rotated in the clockwise direction, the second rotation shaft 11b is rotated in the counterclockwise direction, and the first and second holding portions 12a and 12b are gradually moved forward. Inclined so as to be in a lowered state, and the interval between them is increased. As a result, the heat treatment rod 5 slides down from the first and second holding portions 12a and 12b and moves onto the stacked heat treatment rods (rod pillars) inside the furnace core tube 2 (inside the furnace body).
  • the phase of the heat treatment rod 5 (5x) introduced immediately before the inside of the furnace body and the phase of the heat treatment rod 5 (5y) newly introduced into the furnace body are
  • the heat treatment vessel 5 is introduced into the furnace body in such a manner that it deviates by 45 °.
  • the phase of the heat treatment rod 5 (5x) introduced immediately before into the furnace body and the phase of the heat treatment rod 5 (5y) newly introduced into the furnace body are shifted by 45 °.
  • the first and second rotating shafts 11a and 11b are moved forward and backward, and at the timing of rotation.
  • the heat treatment soot since the heat treatment soot is introduced and carried out by the method as described above, the heat treatment soot can be discharged and introduced in a short tact time, thereby improving productivity. Can do.
  • the carry-out mechanism 6 includes only the rotary table 8 having the spear passage 4 and the lifter 9 without requiring a particularly complicated mechanism. Then, it becomes possible to quickly and quickly carry out the heat treatment furnace 5 from the lower part of the furnace body.
  • the rotation of the turntable 8 can hold and rotate the stacked heat treatment baskets, so that it is possible to improve the processing speed such as unloading. .
  • the heat treatment baskets 5 are stacked in such a manner that the phases are alternately different by 45 ° in the stacking direction, so that the stacked state of the heat treatment baskets is stable.
  • the phase difference between the heat treatment bars 5 adjacent to each other in the stacking direction is set to 45 °, which is the most stable.
  • the phase difference between the heat treatment bars 5 adjacent to the stacking direction is set to 45 °. It is possible to make it larger or smaller than 45 °.
  • the heating means (heater) 3 which heats the inside (furnace body inside) of the furnace core tube 2 around the furnace core tube 2
  • a furnace A heating unit is disposed around a predetermined region from the upper part of the core tube to the center, and a cooling unit (for example, an air cooling tube) is disposed around the predetermined region of the furnace core tube 2 from the upper part to the lower part. ) May be provided so that the intended temperature profile is realized in the heat treatment step.
  • the present invention is not limited to the above-described embodiment in other respects, and various configurations within the scope of the invention relate to the specific configuration of the carry-out mechanism and the introduction mechanism, the structure inside the furnace body, and the like. Applications and modifications can be added.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Tunnel Furnaces (AREA)
  • Furnace Charging Or Discharging (AREA)
  • Ceramic Capacitors (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

Provided is a heat treatment apparatus that enables heat treatment cases to be efficiently unloaded from the bottom of a furnace, enabling productivity to improve. The heat treatment apparatus (10) continuously heats articles to be treated with heat, which are accommodated in heat treatment cases (5), by loading the heat treatment cases (5) inside of the furnace from the top of the furnace, conveying the inside of the furnace from top to bottom, and unloading the heat treatment cases from the bottom of the furnace. Only when in a prescribed phase are the heat treatment cases (5) placed on a rotating table (8) provided with a case passage opening (4) through which the heat treatment cases (5) pass, and held by a lifter (9) in a state in which the heat treatment cases (5), which are held by the rotating table (8), have risen up from the rotating table (8). In said state, after the rotating table (8) has been rotated in such a manner that the heat treatment cases (5) to be unloaded have reached a phase that allows the heat treatment cases (5) to pass through the case passage opening (4), the heat treatment cases (5) to be unloaded are unloaded after passing through the case passage opening (4) by lowering the lifter (9).

Description

熱処理装置Heat treatment equipment
　本発明は、未焼成のセラミック積層体などの被熱処理物を、炉内を通過させて熱処理を行う熱処理装置に関し、詳しくは、被熱処理物が収容された熱処理匣を、縦型の炉体内部を通過させて、被熱処理物を連続的に熱処理する熱処理装置に関する。 The present invention relates to a heat treatment apparatus for performing heat treatment by passing an object to be heat treated, such as an unfired ceramic laminate, through a furnace, and more specifically, a heat treatment rod containing the object to be heat treated is disposed inside a vertical furnace body. It is related with the heat processing apparatus which passes through and heat-processes a to-be-processed object continuously.
　例えば、積層セラミックコンデンサなどのセラミック電子部品は、通常、未焼成のセラミック積層体（被熱処理物）を熱処理（焼成）する工程を経て製造されている。 For example, a ceramic electronic component such as a multilayer ceramic capacitor is usually manufactured through a process of heat-treating (firing) an unfired ceramic laminate (heat-treated material).
　そして、そのような工程で用いられる熱処理炉の１つに、例えば、図１０に示すような縦型の熱処理炉がある。この熱処理炉は、垂直に設けられた炉芯管１０２、炉芯管１０２の周囲に設けられた加熱手段（ヒータ）１０３ａ、１０３ｂを備えている。 One of the heat treatment furnaces used in such a process is, for example, a vertical heat treatment furnace as shown in FIG. The heat treatment furnace includes a furnace core tube 102 provided vertically, and heating means (heaters) 103 a and 103 b provided around the furnace core tube 102.
　また、この熱処理炉１００は、匣投入部１０８ａから投入された複数の匣１０４ａが積み重ねられた匣群１０４を、炉芯管１０２の内部の長手方向に沿って通過させる搬送手段１０５、熱処理の行われた匣１０４ａを系外に取り出すための匣取り出し手段１０９を備えている。 In addition, the heat treatment furnace 100 includes a conveying means 105 that allows a plurality of rods 104a stacked from the rod charging unit 108a to be stacked along the longitudinal direction inside the furnace core tube 102, and a heat treatment line. There is provided a hook taking-out means 109 for taking out the broken hook 104a out of the system.
　そして、匣取り出し手段１０９は、匣群保持爪１０９ａ1と、匣群保持爪１０９ａ1をスライドさせる保持爪駆動機構１０９ａ2と、匣１０４ａを匣取り出し部１０８ｂから取り出すためのプッシャ１０９ｂ1と、プッシャ１０９ｂ1をスライドさせるプッシャ駆動機構１０９ｂ2とを備えている。 Then, Napishtim extraction unit 109, a Napishtim group holding claws 109a 1, and the holding claws driving mechanism 109a 2 for sliding the Napishtim group holding claws 109a 1, and the pusher 109b 1 for taking out Napishtim 104a from Napishtim extraction unit 108b, pusher And a pusher drive mechanism 109b 2 for sliding 109b 1 .
　匣群保持爪１０９ａ1は、匣取り出し部１０８ｂから取り出されるべき匣（最下段の匣）１０４ａのすぐ上の匣、すなわち下から２番目の匣から上の匣群１０４を支持するためのもので、支持する匣の下方にスライドし、匣群１０４を支持するように構成されている。 The heel group holding claw 109a 1 is for supporting the heel just above the heel (bottom heel) 104a to be taken out from the heel take-out portion 108b, that is, the heel group 104 from the second heel up. It is configured to slide below the supporting ridges and support the ridge group 104.
　そして、この熱処理炉１００においては、匣群１０４の一番下に位置する匣（最下段の匣）が、プッシャ１０９ｂ1により横方向から押し出されることで系外に取り出されることになる。 Then, in the heat treatment furnace 100, Napishtim located at the bottom of Napishtim- group 104 (the bottom of Napishtim-) becomes to be taken out of the system by being pushed laterally by pusher 109b 1.
　しかしながら、この熱処理炉１００においては、匣群保持爪１０９ａ1を保持爪駆動機構１０９ａ2によりスライドさせて匣群１０４を保持し、その状態で、一番下にある匣を、プッシャ１０９ｂ1により横方向から押し出すようにしているため、匣の取り出しに時間がかかり、生産性が低いという問題点がある。
　また、匣１０４を匣群保持爪１０９ａ1により保持するようにしているので、匣１０４ａの形状の自由度が低いという問題点がある。 However, the side, the heat treatment furnace 100 holds the Napishtim group 104 Slide by holding claws driving mechanism 109a 2 a Napishtim group holding claws 109a 1, in that state, the Napishtim at the bottom, by the pusher 109b 1 Since extrusion is performed from the direction, it takes time to take out the bag and there is a problem that productivity is low.
Also, since to hold the Napishtim 104 by Napishtim group holding claws 109a 1, there is a problem of low flexibility in shape of Napishtim 104a.
特開平１０－８９８４８号公報Japanese Patent Laid-Open No. 10-89848
　本発明は、上記課題を解決するものであり、縦型の熱処理装置であって、炉体内部を通過した被熱処理物を、炉体下部から効率よく搬出することが可能で、生産性に優れた熱処理装置を提供することを目的とする。 The present invention solves the above-described problem, and is a vertical heat treatment apparatus that can efficiently carry out the heat-treated material that has passed through the furnace body from the lower part of the furnace body, and is excellent in productivity. An object of the present invention is to provide a heat treatment apparatus.
　上記課題を解決するために、本発明の熱処理装置は、
　炉体上部から、被熱処理物を収容した熱処理匣を炉体内部に順次導入するとともに、導入され、積み重ねられた前記熱処理匣を、前記炉体内部を上方から下方に向かって順次搬送し、前記炉体内部を通過した前記熱処理匣を、炉体下部から順次搬出することにより、前記熱処理匣内に収容された被熱処理物を連続的に熱処理する熱処理装置において、
　（ａ）前記熱処理匣を前記炉体下部から順次搬出するための搬出機構であって、
　回転可能に構成され、積み重ねられた前記熱処理匣を保持し、回転することにより、前記熱処理匣を所定の方向に回転させることができるとともに、前記熱処理匣が浮上している状態で、前記熱処理匣とは独立して回転させることができるように構成され、平面視して、所定の位相にある場合にのみ、前記熱処理匣を通過させる匣通過口を備えた回転テーブルと、
　前記回転テーブルの前記匣通過口を経て、前記熱処理匣を下側から支持する上下動可能な支持部を備え、前記支持部により、前記回転テーブルに保持された状態の前記熱処理匣を持ち上げ、前記回転テーブルから浮上した状態で保持することができるように構成されたリフターと
　を備え、
　前記回転テーブルにより保持された状態の前記熱処理匣を、前記リフターにより持ち上げて、前記回転テーブル上から浮上させ、その状態で、搬出すべき前記熱処理匣が前記匣通過口を通過することが可能な位相となるように前記回転テーブルを回転させた後、前記リフターの前記支持部を降下させることにより、搬出すべき前記熱処理匣を、前記匣通過口を通過させて排出し、また、
　前記回転テーブルが、積み重ねられた前記熱処理匣を保持した状態で所定の方向に回転して、前記炉体上部から前記炉体内部に導入される前記熱処理匣と、積み重ねられた前記熱処理匣の最上段に位置する、直前に前記炉体内部に導入された前記熱処理匣との位相の関係が、前記直前に導入された前記熱処理匣が前記回転テーブルの前記匣通過口から通過する際に、次に導入される前記熱処理匣が通過しないような関係とすること
　ができるように構成された搬出機構と、
　（ｂ）前記炉体上部から前記熱処理匣を前記炉体内部に順次導入するための導入機構であって、前記搬出機構により前記熱処理匣を排出する際の一連の工程において、前記回転テーブルにより前記熱処理匣を回転させるタイミングに対応する所定のタイミングで、前記熱処理匣を前記炉体内部に導入して、直前に導入され、前記炉体内部に積み重ねられた前記熱処理匣のうちの最上段に位置する前記熱処理匣とは位相にずれが生じるような態様で、前記最上段の前記熱処理匣上に、次に導入される前記熱処理匣を載置することができるように構成された導入機構と
　を具備していることを特徴としている。 In order to solve the above problems, the heat treatment apparatus of the present invention comprises:
From the top of the furnace body, the heat treatment bowl containing the material to be heat treated is sequentially introduced into the furnace body, and the introduced and stacked heat treatment bowls are sequentially conveyed from above to below the furnace body, In the heat treatment apparatus for continuously heat-treating the heat-treated material accommodated in the heat treatment bowl by carrying out the heat treatment bowl that has passed through the furnace body sequentially from the lower part of the furnace body,
(A) an unloading mechanism for sequentially unloading the heat treatment rod from the lower part of the furnace body,
By holding and rotating the heat treatment rods configured to be rotatable, the heat treatment rods can be rotated in a predetermined direction, and the heat treatment rods are in a state where the heat treatment rods are floating. And a rotary table provided with a spear passing port through which the heat-treated scissors are passed only when in a predetermined phase in plan view,
A support part capable of moving up and down is provided to support the heat treatment bowl from below through the bowl passage opening of the rotary table, and the support part lifts the heat treatment bowl held in the rotary table, A lifter configured to be able to be held in a floating state from the rotary table,
The heat treatment bowl held by the rotary table is lifted by the lifter and floated on the rotary table, and in this state, the heat treatment bowl to be carried out can pass through the bowl passage opening. After rotating the rotary table so as to be in phase, by lowering the support portion of the lifter, the heat treatment soot to be carried out is discharged through the soot passage port, and
The rotary table rotates in a predetermined direction while holding the stacked heat treatment rods, and the heat treatment rods introduced into the furnace body from the top of the furnace body and the top of the stacked heat treatment rods. The phase relationship with the heat treatment soot introduced into the furnace body just before being located in the upper stage is as follows when the heat treatment soot introduced just before passes through the soot passage opening of the rotary table. An unloading mechanism configured so that the heat treatment slag introduced into the container does not pass through;
(B) An introduction mechanism for sequentially introducing the heat treatment soot from above the furnace body into the furnace body, and in a series of steps when the heat treatment soot is discharged by the carry-out mechanism, At a predetermined timing corresponding to the timing of rotating the heat treatment rod, the heat treatment rod is introduced into the furnace body, and is introduced immediately before and positioned at the uppermost stage of the heat treatment bowls stacked in the furnace body. An introduction mechanism configured to be able to place the heat treatment rod to be introduced next on the heat treatment rod in the uppermost stage in such a manner that a phase shift occurs with the heat treatment rod. It is characterized by having.
　また、本発明の熱処理装置においては、積み重ねられた前記熱処理匣は、積層方向に交互に位相が４５゜異なるような態様で積み重ねられていることが好ましい。 Moreover, in the heat treatment apparatus of the present invention, it is preferable that the stacked heat treatment rods are stacked in such a manner that the phases are alternately different by 45 ° in the stacking direction.
　熱処理匣は、積層方向に交互に位相が４５゜異なるような態様で積み重ねられている場合、熱処理匣の積み重ね状態が安定し、積みずれによる脱落などの発生を抑制することが可能になるとともに、熱処理匣内に新鮮なガスを供給することが可能になり、安定して良好な熱処理を行うことが可能になる。 When the heat treatment bowls are stacked in such a manner that the phases are alternately different by 45 ° in the stacking direction, the stacked state of the heat treatment bowls is stabilized, and it is possible to suppress the occurrence of dropping due to misalignment, It becomes possible to supply a fresh gas into the heat treatment tank, and it becomes possible to stably perform a good heat treatment.
　また、前記回転テーブルの上面に、前記匣通過口を通過しない位相にある前記熱処理匣を嵌り込ませて保持するための嵌合凹部を備えていることが好ましい。 Moreover, it is preferable that the upper surface of the rotary table is provided with a fitting recess for fitting and holding the heat-treated bowl in a phase that does not pass through the bowl passage opening.
　回転テーブルの上面に、上述のような嵌合凹部を備えた構成とすることにより、匣通過口を通過しない位相にある最下段の熱処理匣を当該嵌合凹部に嵌り込ませて、その上に積み重ねられた熱処理匣を、安定して保持することが可能になり、信頼性を向上させることができる。 By having the above-described fitting recess on the upper surface of the turntable, the lowermost heat treatment bowl in a phase that does not pass through the bowl passage opening is fitted into the fitting depression, and the top It becomes possible to stably hold the stacked heat treatment rods, and the reliability can be improved.
　また、本発明の熱処理装置において、
　前記導入機構は、
　互いに平行で、軸心回りに回動する第１および第２の回動軸と、前記第１の回動軸の外周面から突出するように配設され、前記熱処理匣を保持する第１の保持部と、前記第２の回動軸の外周面から突出するように配設され、前記第１の保持部と協働して前記熱処理匣を保持する第２の保持部と、前記回動軸を回動させる駆動手段とを備え、
　前記第１の保持部と前記第２の保持部とが、前記熱処理匣を保持することができる位置に達するまで前記第１の回動軸および前記第２の回動軸を回動させた状態で、前記熱処理匣が前記第１の保持部と前記第２の保持部により保持され、
　前記第１の保持部と前記第２の保持部とが、前記熱処理匣を保持することができなくなる位置に達するまで前記第１の回動軸および前記第２の回動軸を回動させることにより、前記第１の保持部と前記第２の保持部により保持されていた前記熱処理匣が、前記炉体上部から前記炉体内部に導入されるように構成されていること
　が好ましい。 In the heat treatment apparatus of the present invention,
The introduction mechanism is
The first and second rotating shafts that are parallel to each other and that rotate about the axis, and the first rotating shaft that is disposed so as to protrude from the outer peripheral surface of the first rotating shaft and holds the heat treatment rod A holding portion, a second holding portion that is disposed so as to protrude from an outer peripheral surface of the second rotation shaft, and holds the heat treatment rod in cooperation with the first holding portion; and the rotation Drive means for rotating the shaft,
A state in which the first rotation shaft and the second rotation shaft are rotated until the first holding portion and the second holding portion reach a position where the heat treatment rod can be held. And the heat treatment trough is held by the first holding part and the second holding part,
Rotating the first rotation shaft and the second rotation shaft until the first holding portion and the second holding portion reach a position where the heat treatment rod cannot be held. Accordingly, it is preferable that the heat treatment rods held by the first holding unit and the second holding unit are introduced into the furnace body from the upper part of the furnace body.
　上記構成を備えた導入機構を用いることにより、複雑な構造を有する導入機構を必要とせずに、効率よく熱処理匣を導入することが可能になる。
　すなわち、熱処理匣を保持する保持部（第１および第２の保持部）を備えた第１および第２の回動軸が軸心回りに回動する動作を行うことができるように構成されているため、回動軸を軸心回りに回動させるだけで、熱処理匣を迅速に受け取って保持するとともに、保持している熱処理匣を速やかに解放することが可能になるため、処理速度（熱処理匣の導入速度）を向上させることができる。 By using the introduction mechanism having the above-described configuration, it is possible to efficiently introduce the heat treatment soot without requiring an introduction mechanism having a complicated structure.
That is, the first and second rotation shafts having the holding portions (first and second holding portions) for holding the heat treatment rod are configured to be able to perform an operation of rotating about the axis. Therefore, it is possible to quickly receive and hold the heat treatment rod only by rotating the pivot shaft about the axis, and to quickly release the held heat treatment rod. The introduction speed of soot can be improved.
　また、回動軸および第１および第２の保持部を、例えばセラミック材料などの耐熱性材料で構成することにより、例えば、１０００℃を超える高温の熱処理匣を取り扱うことも可能になる。 Further, by configuring the rotating shaft and the first and second holding portions with a heat-resistant material such as a ceramic material, for example, it becomes possible to handle a heat treatment bowl having a high temperature exceeding 1000 ° C., for example.
　なお、第１および第２の回動軸が、軸心方向に沿って進出・後退する動作を行うことができるように構成することにより、動作範囲を広げ、熱処理匣の導入操作をより効率よく行うことが可能である。 In addition, by configuring the first and second rotating shafts to be able to move forward and backward along the axial direction, the operating range is expanded and the introduction operation of the heat treatment rod is more efficiently performed. Is possible.
　本発明の熱処理装置は、上述のように構成されているので、炉体下部から確実に熱処理匣を搬出することが可能になり、効率よく良好な熱処理を行うことができる。 Since the heat treatment apparatus of the present invention is configured as described above, it is possible to reliably carry out the heat treatment soot from the lower part of the furnace body, and to perform good heat treatment efficiently.
　すなわち、本発明の熱処理装置においては、搬出機構を構成する、匣通過口を備えた回転テーブルの回転と、リフターの上下の動作を所定のタイミングで行うだけで、熱処理匣の搬出が可能になるため、複雑な機構を必要とすることなく、処理速度を向上させることが可能になる。 That is, in the heat treatment apparatus of the present invention, it is possible to carry out the heat treatment soot only by performing the rotation of the rotary table having the spear passage opening and the up and down movement of the lifter at a predetermined timing. Therefore, the processing speed can be improved without requiring a complicated mechanism.
　また、従来の熱処理炉のように、熱処理匣を保持爪などでチャックする必要がないため、熱処理匣の形状の自由度を向上させることができる。 Also, unlike the conventional heat treatment furnace, it is not necessary to chuck the heat treatment bowl with a holding claw, so that the degree of freedom of the shape of the heat treatment bowl can be improved.
　また、本発明の熱処理装置は、上述のように、炉体上部から熱処理匣を炉体内部に順次導入するための導入機構として、搬出機構により熱処理匣を排出する際の一連の工程において、回転テーブルにより熱処理匣を回転させるタイミングに対応する所定のタイミングで熱処理匣を前記炉体内部に導入して、直前に導入され、炉体内部に積み重ねられた前記熱処理匣のうちの最上段に位置する熱処理匣とは位相にずれが生じるような態様で、最上段の熱処理匣上に、次に導入される熱処理匣を載置することができるように構成された導入機構を備えていることから、直前に導入された熱処理匣と、その後に導入される熱処理匣の位相の関係が、直前に導入された熱処理匣が回転テーブルの匣通過口から通過する際に、当該熱処理匣の次に導入された熱処理匣は通過しないような関係となるようにして、熱処理匣の効率のよい導入と、搬出を確実に行うことが可能になる。 Further, as described above, the heat treatment apparatus of the present invention rotates in a series of steps when the heat treatment soot is discharged by the carry-out mechanism as an introduction mechanism for sequentially introducing the heat treatment soot from the upper part of the furnace body into the furnace body. The heat treatment rod is introduced into the furnace body at a predetermined timing corresponding to the timing at which the heat treatment rod is rotated by the table, and is positioned at the uppermost stage of the heat treatment rods introduced immediately before and stacked in the furnace body. Since it has an introduction mechanism configured to be able to place the heat treatment rod to be introduced next on the uppermost heat treatment rod in such a manner that a phase shift occurs with the heat treatment rod, The phase relationship between the heat treatment rod introduced immediately before and the heat treatment rod introduced thereafter is introduced next to the heat treatment rod when the heat treatment rod introduced immediately before passes from the pass hole of the rotary table. The heat treatment Napishtim is set to be a relationship as do not pass, and introducing efficient heat treatment Napishtim-, it is possible to reliably perform discharge.
本発明の一実施形態（実施形態）にかかる熱処理装置の構成を示す正面断面図である。It is front sectional drawing which shows the structure of the heat processing apparatus concerning one Embodiment (embodiment) of this invention. 本発明の実施形態にかかる熱処理装置の搬出機構の構成を示す斜視図である。It is a perspective view which shows the structure of the carrying-out mechanism of the heat processing apparatus concerning embodiment of this invention. 本発明の実施形態にかかる熱処理装置の導入機構の構成を示す斜視図である。It is a perspective view which shows the structure of the introduction mechanism of the heat processing apparatus concerning embodiment of this invention. 本発明の実施形態にかかる熱処理装置において、搬出機構により熱処理匣を搬出する際の動作を説明する図であり、（ａ）は平面図、（ｂ）は正面断面図である。In the heat processing apparatus concerning embodiment of this invention, it is a figure explaining the operation | movement at the time of carrying out the heat processing trough by a carrying-out mechanism, (a) is a top view, (b) is front sectional drawing. 本発明の実施形態にかかる熱処理装置において、搬出機構により熱処理匣を搬出する際の動作を説明する図であり、（ａ）は平面図、（ｂ）は正面断面図である。In the heat processing apparatus concerning embodiment of this invention, it is a figure explaining the operation | movement at the time of carrying out the heat processing trough by a carrying-out mechanism, (a) is a top view, (b) is front sectional drawing. 本発明の実施形態にかかる熱処理装置において、搬出機構により熱処理匣を搬出する際の動作を説明する図であり、（ａ）は平面図、（ｂ）は正面断面図である。In the heat processing apparatus concerning embodiment of this invention, it is a figure explaining the operation | movement at the time of carrying out the heat processing trough by a carrying-out mechanism, (a) is a top view, (b) is front sectional drawing. 本発明の実施形態にかかる熱処理装置において、搬出機構により熱処理匣を搬出する際の動作を説明する図であり、（ａ）は平面図、（ｂ）は正面断面図である。In the heat processing apparatus concerning embodiment of this invention, it is a figure explaining the operation | movement at the time of carrying out the heat processing trough by a carrying-out mechanism, (a) is a top view, (b) is front sectional drawing. 本発明の実施形態にかかる熱処理装置において、搬出機構により熱処理匣を搬出する際の動作を説明する図であり、（ａ）は平面図、（ｂ）は正面断面図である。In the heat processing apparatus concerning embodiment of this invention, it is a figure explaining the operation | movement at the time of carrying out the heat processing trough by a carrying-out mechanism, (a) is a top view, (b) is front sectional drawing. 本発明の実施形態にかかる熱処理匣における、熱処理匣の積み重ね状態を示す斜視図である。It is a perspective view which shows the stacking state of the heat processing bowl in the heat processing bowl concerning embodiment of this invention. 従来の熱処理炉の構成を示す断面図である。It is sectional drawing which shows the structure of the conventional heat processing furnace.
　以下、本発明の実施形態を示して、本発明をさらに詳しく説明する。
　なお、以下の各実施形態では、積層セラミックコンデンサなどのセラミック電子部品を製造する工程で、未焼成のセラミック積層体（被熱処理物）を熱処理する場合に用いられる熱処理装置を例にとって説明する。 Hereinafter, the present invention will be described in more detail with reference to embodiments of the present invention.
In each of the following embodiments, a heat treatment apparatus used when heat-treating an unfired ceramic laminate (a material to be heat treated) in a process of manufacturing a ceramic electronic component such as a multilayer ceramic capacitor will be described as an example.
　［実施形態］
　図１は、本発明の実施形態にかかる搬送機構を備えた熱処理装置１０の構成を示す模式的に示す正面断面図、図２は本発明の実施形態にかかる熱処理装置において用いられている搬出機構を示す斜視図、図３は熱処理装置において用いられている導入機構を示す斜視図である。 [Embodiment]
FIG. 1 is a front sectional view schematically showing a configuration of a heat treatment apparatus 10 provided with a transfer mechanism according to an embodiment of the present invention, and FIG. 2 is an unloading mechanism used in the heat treatment apparatus according to an embodiment of the present invention. FIG. 3 is a perspective view showing an introduction mechanism used in the heat treatment apparatus.
　この熱処理装置１０は、図１に示すように、断熱材などからなる炉体（筐体）１と、炉体１の内部に軸心が縦方向となるように配設された炉芯管２と、炉芯管２の内部（炉体内部）を加熱する加熱手段（ヒータ）３と、炉芯管２の内部（炉体内部）を上方から下方に向かって通過した、被熱処理物が収容された熱処理匣５を、炉芯管２の下部（炉体下部）から順次搬出するための搬出機構６と、炉芯管２の上部（炉体上部）から炉芯管２の内部（炉体内部）に、被熱処理物が収容された熱処理匣５を順次導入するための導入機構７とを備えている。
　なお、加熱手段３としては、断熱材とヒータとが一体に形成されたモジュールヒータなどを用いることが可能である。 As shown in FIG. 1, the heat treatment apparatus 10 includes a furnace body (housing) 1 made of a heat insulating material and the like, and a furnace core tube 2 disposed inside the furnace body 1 so that the axis is in the vertical direction. And a heating means (heater) 3 for heating the inside of the furnace core tube 2 (inside the furnace body), and a material to be heat-treated that has passed through the inside of the furnace core tube 2 (inside the furnace body) from above to below. The unloading mechanism 6 for sequentially carrying out the heat treatment rod 5 that has been carried out from the lower part (furnace body lower part) of the furnace core tube 2 and the inside of the furnace core tube 2 (furnace body) from the upper part (furnace body upper part) of the furnace core tube 2 And an introduction mechanism 7 for sequentially introducing the heat treatment basket 5 in which the object to be treated is accommodated.
As the heating means 3, it is possible to use a module heater in which a heat insulating material and a heater are integrally formed.
　そして、熱処理匣５を炉体下部から順次搬出するための搬出機構６は、回転可能に構成され、積み重ねられた熱処理匣５を保持し、回転することにより、熱処理匣５を所定の方向に回転させることができるとともに、熱処理匣５が浮上している状態で、熱処理匣５とは独立して回転させることができるように構成された回転テーブル８を備えている。 The unloading mechanism 6 for sequentially unloading the heat treatment rod 5 from the lower part of the furnace body is configured to be rotatable, holds the stacked heat treatment rods 5 and rotates the heat treatment rod 5 in a predetermined direction. The rotary table 8 is configured to be able to rotate independently of the heat treatment bowl 5 while the heat treatment bowl 5 is floating.
　そして、回転テーブル８は、平面視して、所定の位相（回転角度あるいは回転位置）にある場合にのみ、熱処理匣５を通過させる匣通過口４を備えている。 Then, the rotary table 8 includes a bowl passage port 4 through which the heat treatment bowl 5 passes only when it is in a predetermined phase (rotation angle or rotation position) in plan view.
　また、図２に示すように、回転テーブル８は、サーボモータ１８によりベルト１９を介して、時計回りの方向、および、反時計回りの方向に回転させることができるように構成されている。 Further, as shown in FIG. 2, the rotary table 8 is configured to be rotated in a clockwise direction and a counterclockwise direction by a servo motor 18 via a belt 19.
　また、搬出機構６は、リフター９を備えている。このリフター９は、上述の回転テーブル８の匣通過口４を経て、熱処理匣５を下側から支持する上下動可能な支持部９ａを有しており、支持部９ａにより、回転テーブル８に保持された状態の熱処理匣５を持ち上げ、回転テーブル８から浮上した状態で保持することができるように構成されている。 Further, the carry-out mechanism 6 includes a lifter 9. The lifter 9 has a support portion 9a that can be moved up and down through the spear passage 4 of the rotary table 8 to support the heat treatment sputum 5 from below, and is held on the rotary table 8 by the support portion 9a. The heat treatment bowl 5 in the state of being lifted is configured to be able to be lifted and held in a state of floating from the rotary table 8.
　さらに、回転テーブル８の上面には、匣通過口４を通過しない位相にある熱処理匣（この実施形態では、匣通過口４を通過する位相から４５゜回転させた状態にある熱処理匣）５を嵌り込ませて保持するための嵌合凹部８ａが設けられている。 Further, on the upper surface of the rotary table 8, a heat treatment bowl 5 in a phase not passing through the bowl passage opening 4 (in this embodiment, a heat treatment bowl in a state rotated by 45 ° from a phase passing through the bowl passage opening 4) 5 is provided. A fitting recess 8a for fitting and holding is provided.
　また、炉芯管２の下部から搬出機構６により搬出された被熱処理物５は、ベルトコンベアー２０に移載された後、次工程に搬送されるように構成されている（図８（ｂ）参照）。 Moreover, the to-be-heated material 5 carried out by the carrying-out mechanism 6 from the lower part of the furnace core tube 2 is transferred to the belt conveyor 20, and is then conveyed to the next process (FIG. 8B). reference).
　また、炉芯管２の上部（炉体上部）から炉芯管２の内部（炉体内部）に、被熱処理物が収容された熱処理匣５を順次導入するための導入機構７は、互いに平行で、軸心方向に進出・後退する動作を行うことが可能で、かつ、軸心回りに回動する２本の回動軸すなわち、第１の回動軸１１ａ、第２の回動軸１１ｂを備えている（図３参照）。 In addition, the introduction mechanisms 7 for sequentially introducing the heat treatment rods 5 containing the heat treatment objects from the upper part of the furnace core tube 2 (the upper part of the furnace body) into the furnace core tube 2 (inside the furnace body) are parallel to each other. Thus, it is possible to perform an operation of moving forward and backward in the axial direction, and two rotating shafts that rotate around the axial center, that is, the first rotating shaft 11a and the second rotating shaft 11b. (Refer to FIG. 3).
　また、第１の回動軸１１ａには、その外周面から突出するように、熱処理匣５を保持するための第１の保持部１２ａが設けられており、第２の回動軸１１ｂには、その外周面から突出するように、熱処理匣５を保持するための第２の保持部１２ｂが配設されている。 Moreover, the 1st holding | maintenance part 12a for hold | maintaining the heat processing rod 5 is provided in the 1st rotating shaft 11a so that it may protrude from the outer peripheral surface, The 2nd rotating shaft 11b has A second holding portion 12b for holding the heat treatment rod 5 is disposed so as to protrude from the outer peripheral surface.
　なお、導入機構７は、第１および第２の回動軸１１ａ，１１ｂを、軸心方向に進出・後退させる動作や、回動軸が軸心回りに回動する動作を行わせるための駆動手段（図示せず）とを備えている。 The introduction mechanism 7 is a drive for causing the first and second rotating shafts 11a and 11b to move forward and backward in the axial direction and to rotate the rotating shaft about the axis. Means (not shown).
　なお、この実施形態では、導入機構７を構成する第１、第２の回動軸１１ａ，１１ｂおよび第１、第２の保持部１２ａ，１２ｂは、耐熱性に優れたアルミナなどのセラミック材料から形成されている。 In this embodiment, the first and second rotating shafts 11a and 11b and the first and second holding portions 12a and 12b constituting the introduction mechanism 7 are made of a ceramic material such as alumina having excellent heat resistance. Is formed.
　次に、上述のように構成された熱処理装置１０における、炉体内部を通過した熱処理匣５の搬出および、炉体内部への熱処理匣５の導入の動作について説明する。 Next, operations of carrying out the heat treatment basket 5 that has passed through the furnace body and introducing the heat treatment bowl 5 into the furnace body in the heat treatment apparatus 10 configured as described above will be described.
　まず、炉体内部を通過することにより内部に収容された熱処理匣の熱処理が行われた後の熱処理匣５を搬出する際の動作について、図１～９を参照しつつ説明する。
　なお、図４（ａ）、図５（ａ）、図６（ａ）、図７（ａ）、図８（ａ）においては、複数の熱処理匣５が積み重ねられて回転テーブル８上に支持されている匣柱のうち、最下段の熱処理匣５のみを示す。また、図４（ｂ）、図５（ｂ）、図６（ｂ）、図７（ｂ）、図８（ｂ）においては、回転テーブル８上に位置する匣柱のうち、下側の三段（三層）の熱処理匣５のみを示している。 First, the operation when carrying out the heat treatment rod 5 after the heat treatment of the heat treatment rod accommodated by passing through the inside of the furnace body will be described with reference to FIGS.
4 (a), 5 (a), 6 (a), 7 (a), and 8 (a), a plurality of heat treatment rods 5 are stacked and supported on the rotary table 8. Only the lowermost heat treatment rod 5 is shown. 4B, FIG. 5B, FIG. 6B, FIG. 7B, and FIG. 8B, the lower three of the poles positioned on the rotary table 8 are used. Only the step (three layers) heat treatment bowl 5 is shown.
　（１）熱処理匣５を炉芯管２の下部（炉体下部）から搬出するにあたっては、まず、図４（ａ），（ｂ）に示すように、最下段の熱処理匣５の回転角度あるいは回転位置（位相）が、匣通過口４を通過することができる位相から４５゜ずれた状態にあって、熱処理匣５のコーナ部が、回転テーブル８の嵌合凹部８ａに嵌り込んで回転テーブル８上に保持された状態から、図５（ａ），（ｂ）に示すように、リフター９の支持部９ａを上昇させることにより、積み重ねられた状態で回転テーブル８により保持された熱処理匣（匣柱）５を持ち上げ、回転テーブル８上から浮上させる。 (1) In unloading the heat treatment bowl 5 from the lower part of the furnace core tube 2 (lower part of the furnace body), first, as shown in FIGS. 4 (a) and 4 (b), the rotation angle of the lowermost heat treatment bowl 5 or When the rotational position (phase) is shifted by 45 ° from the phase that can pass through the spear passage 4, the corner portion of the heat treatment trough 5 fits into the fitting recess 8 a of the turntable 8 and turns. As shown in FIGS. 5 (a) and 5 (b), by raising the support portion 9a of the lifter 9 from the state held on the heat treatment plate 8, the heat treatment rods held by the turntable 8 in the stacked state ( Lift the column 5) and lift it from the rotary table 8.
　（２）そして、リフター９により、熱処理匣（匣柱）５を回転テーブル８から浮上させた状態で、図６（ａ），（ｂ）に示すように、搬出すべき熱処理匣（最下段の熱処理匣）５が匣通過口４を通過することができる位相となるように回転テーブル８を矢印Ａの方向に４５゜回転させた後、図７（ｂ）に示すように、リフター９の支持部９ａを降下させることにより、搬出すべき熱処理匣（最下段の熱処理匣）５（５ａ）を、匣通過口４を通過させて排出し、ベルトコンベアー２０上に移行させる。 (2) Then, with the lifter 9, the heat treatment basket (pillar column) 5 is levitated from the rotary table 8, and as shown in FIGS. After the rotary table 8 is rotated by 45 ° in the direction of arrow A so that the heat treatment 匣) 5 can pass through the heel passage 4, the lifter 9 is supported as shown in FIG. By lowering the portion 9 a, the heat treatment basket (lowermost heat treatment basket) 5 (5 a) to be carried out is discharged through the basket passage port 4 and transferred onto the belt conveyor 20.
　このとき、図７（ａ）に示すように、搬出すべき熱処理匣（最下段の熱処理匣）５（５ａ）の次の熱処理匣（搬出すべき熱処理匣５（５ａ）のすぐ上の熱処理匣）５（５ｂ）は、位相が４５゜ずれているので、匣通過口４を通過することなく、コーナ部が回転テーブル８の嵌合凹部８ａに嵌り込むことにより、当該熱処理匣５（５ｂ）より上の熱処理匣５は、積み重ねられた状態で安定して回転テーブル８上に保持される。 At this time, as shown in FIG. 7 (a), the heat treatment rod next to the heat treatment rod 5 (5a) to be carried out (the lowermost heat treatment rod) 5 (5a) (the heat treatment rod immediately above the heat treatment rod 5 (5a) to be carried out). ) 5 (5b) is 45 ° out of phase, so that the corner portion fits into the fitting recess 8a of the turntable 8 without passing through the trough passage port 4, so that the heat treatment trough 5 (5b) The upper heat treatment basket 5 is stably held on the rotary table 8 in a stacked state.
　（３）その後、図８（ａ），（ｂ）に示すように、ベルトコンベアー２０上に移行させた熱処理匣５を次工程に搬送するとともに、回転テーブル８を矢印Ｂの方向に回転させる。 (3) Thereafter, as shown in FIGS. 8A and 8B, the heat treatment bowl 5 transferred onto the belt conveyor 20 is conveyed to the next process, and the turntable 8 is rotated in the direction of arrow B.
　そして、その状態で導入機構７から、熱処理匣５を、炉芯管２の内部（炉体内部）に導入する（すなわち、熱処理匣５を炉芯管１の内部（炉体内部）の、積み重ねられた熱処理匣（匣柱）上に移行させる）。
　なお、導入機構７により熱処理匣５を炉体内部に導入する際の動作は、例えば次のようになる。 In this state, the heat treatment rod 5 is introduced from the introduction mechanism 7 into the furnace core tube 2 (inside the furnace body) (that is, the heat treatment rod 5 is stacked inside the furnace core tube 1 (inside the furnace body). To be transferred onto the heat-treated bowl (pillar).
The operation when the heat treatment rod 5 is introduced into the furnace body by the introduction mechanism 7 is as follows, for example.
　まず、導入機構７を構成する第１の回動軸１１ａが反時計回りの方向に、第２の回動軸１１ｂが時計回りの方向に回動して、第１および第２の保持部１２ａ，１２ｂが互いに対向し、ほぼ水平になった状態（図３参照）で、第１および第２の回動軸１１ａ，１１ｂを、熱処理匣搬送機構２１の方向（矢印Ｃで示す方向）に進出させて、熱処理匣を、第１および第２の保持部１２ａ，１２ｂ上に受け取って保持する。 First, the first rotation shaft 11a constituting the introduction mechanism 7 is rotated in the counterclockwise direction, and the second rotation shaft 11b is rotated in the clockwise direction, so that the first and second holding portions 12a are rotated. , 12b are opposed to each other and are substantially horizontal (see FIG. 3), the first and second rotating shafts 11a, 11b are advanced in the direction of the heat treatment bowl conveying mechanism 21 (direction indicated by arrow C). Then, the heat treatment basket is received and held on the first and second holding portions 12a and 12b.
　その後、導入機構７の第１および第２の回動軸１１ａ，１１ｂ（図３）を後退させる（すなわち、第１および第２の保持部１２ａ，１２ｂにより保持された、次に炉体内部に導入すべき熱処理匣を、矢印Ｄで示す方向に移動させて、炉芯管２の上方に位置させる）。 Thereafter, the first and second rotating shafts 11a and 11b (FIG. 3) of the introduction mechanism 7 are retracted (that is, held by the first and second holding portions 12a and 12b, and then inside the furnace body. The heat treatment rod to be introduced is moved in the direction indicated by the arrow D and positioned above the furnace core tube 2).
　そして、上記搬出機構６を構成するリフター９の支持部９ａを上昇させ、回転テーブル８を矢印Ａの方向に回転させて元の位置に戻し、そのタイミングで、第１および第２の保持部１２ａ，１２ｂにより保持され、炉芯管２の上方に位置している熱処理匣５を解放して、炉芯管２の内部（炉体内部）に移行させる（すなわち、炉体内部の積み重ねられた熱処理匣（匣柱）上に移行させる）。 And the support part 9a of the lifter 9 which comprises the said carrying-out mechanism 6 is raised, the rotation table 8 is rotated in the direction of arrow A, and it returns to the original position, The 1st and 2nd holding part 12a is the timing. , 12b, and the heat treatment rod 5 located above the furnace core tube 2 is released and moved to the inside of the furnace core tube 2 (inside the furnace body) (that is, the heat treatment stacked inside the furnace body 2). (Move to the top of the pole).
　なお、第１および第２の保持部１２ａ，１２ｂにより保持され熱処理匣５を解放して、炉体内部に移行させるにあたっては、導入機構７を構成する第１および第２の保持部１２ａ，１２ｂのうち、第１の回動軸１１ａを時計回りの方向に、第２の回動軸１１ｂを反時計回りの方向に回動させ、第１および第２の保持部１２ａ，１２ｂを徐々に前下がりの状態となるように傾斜させるとともに両者の間隔を大きくする。これにより、熱処理匣５が第１および第２の保持部１２ａ，１２ｂから滑り落ちて、炉芯管２の内部（炉体内部）の積み重ねられた熱処理匣（匣柱）上に移行する。 Note that when the heat treatment rod 5 held by the first and second holding portions 12a and 12b is released and moved into the furnace body, the first and second holding portions 12a and 12b constituting the introduction mechanism 7 are used. Among them, the first rotation shaft 11a is rotated in the clockwise direction, the second rotation shaft 11b is rotated in the counterclockwise direction, and the first and second holding portions 12a and 12b are gradually moved forward. Inclined so as to be in a lowered state, and the interval between them is increased. As a result, the heat treatment rod 5 slides down from the first and second holding portions 12a and 12b and moves onto the stacked heat treatment rods (rod pillars) inside the furnace core tube 2 (inside the furnace body).
　こうして、図９に模式的に示すように、炉体内部に直前に導入された熱処理匣５（５ｘ）の位相と、新たに炉体内部に導入される熱処理匣５（５ｙ）の位相が、４５゜ずれるような態様で、熱処理匣５の炉体内部への導入が行われる。 Thus, as schematically shown in FIG. 9, the phase of the heat treatment rod 5 (5x) introduced immediately before the inside of the furnace body and the phase of the heat treatment rod 5 (5y) newly introduced into the furnace body are The heat treatment vessel 5 is introduced into the furnace body in such a manner that it deviates by 45 °.
　なお、導入機構７の動作としては、炉体内部に直前に導入された熱処理匣５（５ｘ）の位相と、新たに炉体内部に導入される熱処理匣５（５ｙ）の位相が４５゜ずれるような態様で、熱処理匣が導入されることが重要なのであって、それが確実に行われる限りにおいて、第１および第２の回動軸１１ａ，１１ｂを進出・後退や、回動のタイミングに特に制約はなく、実際の工程を考慮して、種々の変形を加えることが可能である。 As the operation of the introduction mechanism 7, the phase of the heat treatment rod 5 (5x) introduced immediately before into the furnace body and the phase of the heat treatment rod 5 (5y) newly introduced into the furnace body are shifted by 45 °. In such a manner, it is important to introduce the heat treatment soot, and as long as it is surely performed, the first and second rotating shafts 11a and 11b are moved forward and backward, and at the timing of rotation. There is no particular limitation, and various modifications can be made in consideration of an actual process.
　この実施形態では、上述のような方法で、熱処理匣の導入と搬出を行うようにしているので、短いタクトタイムで、熱処理匣の排出導入を行うことが可能になり、生産性を向上させることができる。 In this embodiment, since the heat treatment soot is introduced and carried out by the method as described above, the heat treatment soot can be discharged and introduced in a short tact time, thereby improving productivity. Can do.
　また、上述のように構成された熱処理装置１０の場合、搬出機構６は、匣通過口４を有する回転テーブル８と、リフター９とを備えているだけで、特に複雑な機構を必要とせずに、炉体下部から熱処理匣５を順次、迅速に搬出することが可能になる。 Further, in the case of the heat treatment apparatus 10 configured as described above, the carry-out mechanism 6 includes only the rotary table 8 having the spear passage 4 and the lifter 9 without requiring a particularly complicated mechanism. Then, it becomes possible to quickly and quickly carry out the heat treatment furnace 5 from the lower part of the furnace body.
　また、この実施形態にかかる熱処理装置１０においては、回転テーブル８の回転により、積み重ねられた熱処理匣を保持することと回転させることができるため、搬出などの処理速度を向上させることが可能になる。 Further, in the heat treatment apparatus 10 according to this embodiment, the rotation of the turntable 8 can hold and rotate the stacked heat treatment baskets, so that it is possible to improve the processing speed such as unloading. .
　また、従来の熱処理炉のように、熱処理匣をチャック用の爪などによりチャックする必要がないため、熱処理匣の形状への制約が少なくなり、熱処理匣の構造などの選択の自由度を向上させることができる。 Further, unlike the conventional heat treatment furnace, it is not necessary to chuck the heat treatment rod with a chucking nail, etc., so that there are fewer restrictions on the shape of the heat treatment rod and the degree of freedom in selecting the structure of the heat treatment rod is improved. be able to.
　したがって、本発明によれば、複雑な構成を必要とせずに、熱処理匣５を効率よく導入し、搬出することが可能な熱処理装置を得ることができる。 Therefore, according to the present invention, it is possible to obtain a heat treatment apparatus that can efficiently introduce and carry out the heat treatment vessel 5 without requiring a complicated configuration.
　また、この実施形態の熱処理装置１０においては、上述のように、熱処理匣５を、積層方向に交互に位相が４５゜異なるような態様で積み重ねるようにしているので、熱処理匣の積み重ね状態が安定し、積みずれによる脱落などの発生を抑制することが可能になるとともに、熱処理匣内に新鮮なガスを供給することが可能になり、安定して良好な熱処理を行うことが可能になる。 Further, in the heat treatment apparatus 10 of this embodiment, as described above, the heat treatment baskets 5 are stacked in such a manner that the phases are alternately different by 45 ° in the stacking direction, so that the stacked state of the heat treatment baskets is stable. In addition, it is possible to suppress the occurrence of dropout due to misloading and the like, and it becomes possible to supply fresh gas into the heat treatment tank, and it is possible to perform stable and favorable heat treatment.
　なお、この実施形態では、積層方向に隣り合う熱処理匣５の位相差を最も安定性に優れた４５゜としているが、本発明においては、積層方向に隣り合う熱処理匣５の位相差を４５゜より大きくしたり、あるいは４５゜より小さくしたりすることも可能である。 In this embodiment, the phase difference between the heat treatment bars 5 adjacent to each other in the stacking direction is set to 45 °, which is the most stable. However, in the present invention, the phase difference between the heat treatment bars 5 adjacent to the stacking direction is set to 45 °. It is possible to make it larger or smaller than 45 °.
　また、上記実施形態では、炉芯管２の周囲に、炉芯管２の内部（炉体内部）を加熱する加熱手段（ヒータ）３を備えた構成としているが、場合によっては、例えば、炉芯管の上部から中央部に至る所定の領域の周囲には加熱手段を配設し、炉芯管２の中央部上部から下部に至る所定の領域の周囲には、冷却手段（例えば、空冷管）を配設して、熱処理の工程で、意図するような温度プロファイルが実現されるように構成することも可能である。 Moreover, in the said embodiment, although it is set as the structure provided with the heating means (heater) 3 which heats the inside (furnace body inside) of the furnace core tube 2 around the furnace core tube 2, depending on the case, for example, a furnace A heating unit is disposed around a predetermined region from the upper part of the core tube to the center, and a cooling unit (for example, an air cooling tube) is disposed around the predetermined region of the furnace core tube 2 from the upper part to the lower part. ) May be provided so that the intended temperature profile is realized in the heat treatment step.
　なお、本発明はさらにその他の点においても、上記実施形態に限定されるものではなく、搬出機構や導入機構の具体的な構成、炉体内部の構造などに関し、発明の範囲内において、種々の応用、変形を加えることが可能である。 In addition, the present invention is not limited to the above-described embodiment in other respects, and various configurations within the scope of the invention relate to the specific configuration of the carry-out mechanism and the introduction mechanism, the structure inside the furnace body, and the like. Applications and modifications can be added.
　１　　　　炉体（筐体）
　２　　　　炉芯管
　３　　　　加熱手段（ヒータ）
　４　　　　回転テーブルに設けられた匣通過口
　５　　　　熱処理匣
　５ａ　　　搬出すべき熱処理匣
　５ｂ　　　搬出すべき熱処理匣の次の熱処理匣
　５ｘ　　　炉内に直前に導入された熱処理匣
　５ｙ　　　新たに炉体内部に導入される熱処理匣
　６　　　　搬出機構
　７　　　　導入機構
　８　　　　回転テーブル
　８ａ　　　嵌合凹部
　９　　　　リフター
　９ａ　　　リフターを構成する支持部
　１０　　　熱処理装置
　１１ａ　　第１の回動軸
　１１ｂ　　第２の回動軸
　１２ａ　　第１の保持部
　１２ｂ　　第２の保持部
　１８　　　サーボモータ
　１９　　　ベルト
　２０　　　ベルトコンベアー
　２１　　　熱処理匣搬送機構 1 Furnace (housing)
2 Furnace core tube 3 Heating means (heater)
4 Passage port provided on the rotary table 5 Heat treatment bowl 5a Heat treatment bowl to be carried out 5b Heat treatment bowl next to the heat treatment bowl to be carried out 5x Heat treatment bowl introduced immediately before in the furnace 5y Newly introduced into the furnace body Heat-treating bowl 6 Unloading mechanism 7 Introduction mechanism 8 Rotary table 8a Fitting recess 9 Lifter 9a Supporting portion constituting the lifter 10 Heat treatment apparatus 11a First rotating shaft 11b Second rotating shaft 12a First holding portion 12b First holding portion 12b 2 holding section 18 servo motor 19 belt 20 belt conveyor 21 heat treatment paddle transport mechanism

Claims (4)

  1. 　炉体上部から、被熱処理物を収容した熱処理匣を炉体内部に順次導入するとともに、導入され、積み重ねられた前記熱処理匣を、前記炉体内部を上方から下方に向かって順次搬送し、前記炉体内部を通過した前記熱処理匣を、炉体下部から順次搬出することにより、前記熱処理匣内に収容された被熱処理物を連続的に熱処理する熱処理装置において、
    　（ａ）前記熱処理匣を前記炉体下部から順次搬出するための搬出機構であって、
    　回転可能に構成され、積み重ねられた前記熱処理匣を保持し、回転することにより、前記熱処理匣を所定の方向に回転させることができるとともに、前記熱処理匣が浮上している状態で、前記熱処理匣とは独立して回転させることができるように構成され、平面視して、所定の位相にある場合にのみ、前記熱処理匣を通過させる匣通過口を備えた回転テーブルと、
    　前記回転テーブルの前記匣通過口を経て、前記熱処理匣を下側から支持する上下動可能な支持部を備え、前記支持部により、前記回転テーブルに保持された状態の前記熱処理匣を持ち上げ、前記回転テーブルから浮上した状態で保持することができるように構成されたリフターと
    　を備え、
    　前記回転テーブルにより保持された状態の前記熱処理匣を、前記リフターにより持ち上げて、前記回転テーブル上から浮上させ、その状態で、搬出すべき前記熱処理匣が前記匣通過口を通過することが可能な位相となるように前記回転テーブルを回転させた後、前記リフターの前記支持部を降下させることにより、搬出すべき前記熱処理匣を、前記匣通過口を通過させて排出し、また、
    　前記回転テーブルが、積み重ねられた前記熱処理匣を保持した状態で所定の方向に回転して、前記炉体上部から前記炉体内部に導入される前記熱処理匣と、積み重ねられた前記熱処理匣の最上段に位置する、直前に前記炉体内部に導入された前記熱処理匣との位相の関係が、前記直前に導入された前記熱処理匣が前記回転テーブルの前記匣通過口から通過する際に、次に導入される前記熱処理匣が通過しないような関係とすること
    　ができるように構成された搬出機構と、
    　（ｂ）前記炉体上部から前記熱処理匣を前記炉体内部に順次導入するための導入機構であって、前記搬出機構により前記熱処理匣を排出する際の一連の工程において、前記回転テーブルにより前記熱処理匣を回転させるタイミングに対応する所定のタイミングで、前記熱処理匣を前記炉体内部に導入して、直前に導入され、前記炉体内部に積み重ねられた前記熱処理匣のうちの最上段に位置する前記熱処理匣とは位相にずれが生じるような態様で、前記最上段の前記熱処理匣上に、次に導入される前記熱処理匣を載置することができるように構成された導入機構と
    　を具備していることを特徴とする熱処理装置。     From the top of the furnace body, the heat treatment bowl containing the material to be heat treated is sequentially introduced into the furnace body, and the introduced and stacked heat treatment bowls are sequentially conveyed from above to below the furnace body, In the heat treatment apparatus for continuously heat-treating the heat-treated material accommodated in the heat treatment bowl by carrying out the heat treatment bowl that has passed through the furnace body sequentially from the lower part of the furnace body,
    (A) an unloading mechanism for sequentially unloading the heat treatment rod from the lower part of the furnace body,
    By holding and rotating the heat treatment rods configured to be rotatable, the heat treatment rods can be rotated in a predetermined direction, and the heat treatment rods are in a state where the heat treatment rods are floating. And a rotary table provided with a spear passing port through which the heat-treated scissors are passed only when in a predetermined phase in plan view,
    A support part capable of moving up and down is provided to support the heat treatment bowl from below through the bowl passage opening of the rotary table, and the support part lifts the heat treatment bowl held in the rotary table, A lifter configured to be able to be held in a floating state from the rotary table,
    The heat treatment bowl held by the rotary table is lifted by the lifter and floated on the rotary table, and in this state, the heat treatment bowl to be carried out can pass through the bowl passage opening. After rotating the rotary table so as to be in phase, by lowering the support portion of the lifter, the heat treatment soot to be carried out is discharged through the soot passage port, and
    The rotary table rotates in a predetermined direction while holding the stacked heat treatment rods, and the heat treatment rods introduced into the furnace body from the top of the furnace body and the top of the stacked heat treatment rods. The phase relationship with the heat treatment soot introduced into the furnace body just before being located in the upper stage is as follows when the heat treatment soot introduced just before passes through the soot passage opening of the rotary table. An unloading mechanism configured so that the heat treatment slag introduced into the container does not pass through;
    (B) An introduction mechanism for sequentially introducing the heat treatment soot from above the furnace body into the furnace body, and in a series of steps when the heat treatment soot is discharged by the carry-out mechanism, At a predetermined timing corresponding to the timing of rotating the heat treatment rod, the heat treatment rod is introduced into the furnace body, and is introduced immediately before and positioned at the uppermost stage of the heat treatment bowls stacked in the furnace body. An introduction mechanism configured to be able to place the heat treatment rod to be introduced next on the heat treatment rod in the uppermost stage in such a manner that a phase shift occurs with the heat treatment rod. A heat treatment apparatus comprising the heat treatment apparatus.
  2. 　積み重ねられた前記熱処理匣は、積層方向に交互に位相が４５゜異なるような態様で積み重ねられていることを特徴とする請求項１記載の熱処理匣。 The heat-treated steel sheets according to claim 1, wherein the heat-treated steel sheets stacked are stacked in such a manner that the phases are alternately different by 45 ° in the stacking direction.
  3. 　前記回転テーブルの上面に、前記匣通過口を通過しない位相にある前記熱処理匣を嵌り込ませて保持するための嵌合凹部を備えていることを特徴とする請求項１または２記載の熱処理装置。 The heat treatment apparatus according to claim 1, further comprising a fitting recess for fitting and holding the heat treatment bowl in a phase that does not pass through the bowl passage opening on an upper surface of the rotary table. .
  4. 　前記導入機構は、
    　互いに平行で、軸心回りに回動する第１および第２の回動軸と、前記第１の回動軸の外周面から突出するように配設され、前記熱処理匣を保持する第１の保持部と、前記第２の回動軸の外周面から突出するように配設され、前記第１の保持部と協働して前記熱処理匣を保持する第２の保持部と、前記回動軸を回動させる駆動手段とを備え、
    　前記第１の保持部と前記第２の保持部とが、前記熱処理匣を保持することができる位置に達するまで前記第１の回動軸および前記第２の回動軸を回動させた状態で、前記熱処理匣が前記第１の保持部と前記第２の保持部により保持され、
    　前記第１の保持部と前記第２の保持部とが、前記熱処理匣を保持することができなくなる位置に達するまで前記第１の回動軸および前記第２の回動軸を回動させることにより、前記第１の保持部と前記第２の保持部により保持されていた前記熱処理匣が、前記炉体上部から前記炉体内部に導入されるように構成されていることを
    　を特徴とする請求項１～３のいずれかに記載の熱処理装置。     The introduction mechanism is
    The first and second rotating shafts that are parallel to each other and that rotate about the axis, and the first rotating shaft that is disposed so as to protrude from the outer peripheral surface of the first rotating shaft and holds the heat treatment rod A holding portion, a second holding portion that is disposed so as to protrude from an outer peripheral surface of the second rotation shaft, and holds the heat treatment rod in cooperation with the first holding portion; and the rotation Drive means for rotating the shaft,
    A state in which the first rotation shaft and the second rotation shaft are rotated until the first holding portion and the second holding portion reach a position where the heat treatment rod can be held. And the heat treatment trough is held by the first holding part and the second holding part,
    Rotating the first rotation shaft and the second rotation shaft until the first holding portion and the second holding portion reach a position where the heat treatment rod cannot be held. Thus, the heat treatment rod held by the first holding part and the second holding part is configured to be introduced into the furnace body from the upper part of the furnace body. The heat treatment apparatus according to any one of claims 1 to 3.
PCT/JP2013/084243 2012-12-28 2013-12-20 Heat treatment apparatus WO2014103929A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014554411A JP6024763B2 (en) 2012-12-28 2013-12-20 Heat treatment equipment

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012-286862 2012-12-28
JP2012286862 2012-12-28

Publications (1)

Publication Number Publication Date
WO2014103929A1 true WO2014103929A1 (en) 2014-07-03

Family

ID=51021013

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2013/084243 WO2014103929A1 (en) 2012-12-28 2013-12-20 Heat treatment apparatus

Country Status (2)

Country Link
JP (1) JP6024763B2 (en)
WO (1) WO2014103929A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108790092A (en) * 2018-05-15 2018-11-13 河北工业职业技术学院 The preparation method of wall wear-resistant coating in a kind of twin screw extruder barrel body
CN112915965A (en) * 2021-01-26 2021-06-08 唐茂卡 Composite water purification material for sewage treatment and preparation method thereof

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01174889A (en) * 1987-08-31 1989-07-11 Taiyo Yuden Co Ltd Method and apparatus for sintering ceramics
JPH0979762A (en) * 1995-09-14 1997-03-28 Murata Mfg Co Ltd Vertical baking furnace
JPH1089848A (en) * 1996-09-11 1998-04-10 Murata Mfg Co Ltd Heat treatment furnace
JP2010121856A (en) * 2008-11-20 2010-06-03 Ngk Insulators Ltd Vertical burning furnace for burning powder

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01174889A (en) * 1987-08-31 1989-07-11 Taiyo Yuden Co Ltd Method and apparatus for sintering ceramics
JPH0979762A (en) * 1995-09-14 1997-03-28 Murata Mfg Co Ltd Vertical baking furnace
JPH1089848A (en) * 1996-09-11 1998-04-10 Murata Mfg Co Ltd Heat treatment furnace
JP2010121856A (en) * 2008-11-20 2010-06-03 Ngk Insulators Ltd Vertical burning furnace for burning powder

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108790092A (en) * 2018-05-15 2018-11-13 河北工业职业技术学院 The preparation method of wall wear-resistant coating in a kind of twin screw extruder barrel body
CN112915965A (en) * 2021-01-26 2021-06-08 唐茂卡 Composite water purification material for sewage treatment and preparation method thereof

Also Published As

Publication number Publication date
JPWO2014103929A1 (en) 2017-01-12
JP6024763B2 (en) 2016-11-16

Similar Documents

Publication Publication Date Title
CN1702023B (en) Base plate carrying device and base plate processing device therewith
JP4955337B2 (en) Semiconductor workpiece loading and unloading method, and semiconductor workpiece replacement method using the same
US8133002B2 (en) Method for forming a back-to-back wafer batch to be positioned in a process boot, and handling system for forming the BTB wafer batch
US8181769B2 (en) Workpiece transfer mechanism, workpiece transfer method and workpiece processing system
JP2007242648A (en) Substrate processing apparatus
JP2009081258A (en) Method and device for heat-treating
US20150243490A1 (en) Substrate processing apparatus and substrate processing method
CN102254848A (en) Substrate processing apparatus and substrate processing method
JP5024179B2 (en) Operation method of vacuum equipment
TWI331372B (en) Substrate processing apparatus
CN108692568B (en) Heat treatment furnace
JP6024763B2 (en) Heat treatment equipment
KR100729490B1 (en) Wafer Processing Method and Apparatus thereof
WO2010038272A1 (en) Substrate holder holding apparatus and substrate holder storing chamber
KR101883804B1 (en) Substrate angling device, substrate angling method, and substrate conveying method
JP5280901B2 (en) Substrate processing system and substrate processing method
JP2002231787A (en) Transfer device and transfer method of workpiece
JP5355808B2 (en) Substrate processing system
JP2005021022A (en) Transportation system of bread dough fermentation line
JP5454935B2 (en) Continuous heat treatment furnace
JP2003221616A (en) In-furnace transportation method for aluminum wheel, and solution heat treatment facility for aluminum wheel
JP6305222B2 (en) Rice cooker
JP2024046084A (en) Heat Treatment System
JP2010092925A (en) Substrate treatment device and substrate delivering method
JPS6352307B2 (en)

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 13866590

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2014554411

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 13866590

Country of ref document: EP

Kind code of ref document: A1