WO2014097639A1 - Gold nanoparticle dispersion liquid for forming conductive coating film, method for producing same, and conductive coating material composition containing same - Google Patents

Gold nanoparticle dispersion liquid for forming conductive coating film, method for producing same, and conductive coating material composition containing same Download PDF

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WO2014097639A1
WO2014097639A1 PCT/JP2013/007495 JP2013007495W WO2014097639A1 WO 2014097639 A1 WO2014097639 A1 WO 2014097639A1 JP 2013007495 W JP2013007495 W JP 2013007495W WO 2014097639 A1 WO2014097639 A1 WO 2014097639A1
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gold nanoparticles
dispersion
gold
particle size
average particle
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PCT/JP2013/007495
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French (fr)
Japanese (ja)
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山田 健太郎
良平 小川
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日本板硝子株式会社
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Priority to JP2014552946A priority Critical patent/JP5945608B2/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/20Conductive material dispersed in non-conductive organic material
    • H01B1/22Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/05Metallic powder characterised by the size or surface area of the particles
    • B22F1/054Nanosized particles
    • B22F1/0545Dispersions or suspensions of nanosized particles
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D5/00Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
    • C09D5/24Electrically-conducting paints
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D7/00Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
    • C09D7/40Additives
    • C09D7/66Additives characterised by particle size
    • C09D7/67Particle size smaller than 100 nm
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00Coating starting from inorganic powder
    • C23C24/08Coating starting from inorganic powder by application of heat or pressure and heat
    • C23C24/082Coating starting from inorganic powder by application of heat or pressure and heat without intermediate formation of a liquid in the layer
    • C23C24/085Coating with metallic material, i.e. metals or metal alloys, optionally comprising hard particles, e.g. oxides, carbides or nitrides
    • C23C24/087Coating with metal alloys or metal elements only
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/02Elements
    • C08K3/08Metals
    • C08K2003/0831Gold

Definitions

  • the present invention relates to a conductive gold nanoparticle dispersion, a method for producing the same, and a conductive coating composition containing the dispersion.
  • Advanced micro wiring and connection technology is indispensable for the development of highly integrated, highly functional, small and thin devices.
  • attention is focused on a combination of precious metal fine particle manufacturing technology and pasting technology thereof, and further printing technology such as inkjet.
  • the noble metal nanoparticles whose particle size is reduced to nano-size may cause a melting point drop on the particle surface due to increased surface energy, and the metal nanoparticles may be easily fused.
  • the conventional micron-sized noble metal particles can be melted at a low temperature that cannot be melted, wiring can be easily formed.
  • nano-level noble metal fine particles finer wiring can be formed, so that high integration of devices can be achieved.
  • the surface energy is increased, the fine particles are likely to be aggregated, resulting in a disadvantage that it is difficult to increase the noble metal concentration.
  • a treatment is generally performed in which a protective agent is adsorbed on the surface of fine particles to maintain a dispersed state.
  • a technology for controlling the particle size to the nano level and a dispersion technology by adsorption of a protective agent are necessary.
  • the solution synthesis method is a method of precipitating fine particles such as metal by reducing metal ions dispersed in a dispersion. By adding a substance that serves as a protective agent to the dispersion, it is possible to prepare a dispersion in which nano-level metal fine particles are dispersed at a high concentration.
  • Patent Document 1 discloses a compound having a group containing nitrogen, oxygen, or sulfur atoms, having a boiling point in the range of 150 ° C. to 300 ° C. and a melting point of 20 ° C. or less (monoalkylamine etc. ) Is a coating layer molecule, and metal nanoparticles such as gold having a mean particle diameter of 2 to 10 nm and conductive nanoparticle pastes comprising the same are disclosed.
  • This conductive nanoparticle paste is described to form a conductor layer having a volume resistivity of 10 ⁇ 10 ⁇ 6 ⁇ ⁇ cm or less by, for example, a heat treatment at 250 ° C. or less.
  • Patent Document 2 includes a metal fine particle having an average particle diameter of 20 nm or less and a dispersion of the average particle diameter smaller than 1/3 of the average particle diameter, a protective agent made of a protein covering the metal fine particle, and a proteolytic enzyme.
  • Metallic inks are disclosed. Then, this metal ink is held at a temperature of, for example, about 40 ° C. to 60 ° C. for a certain period of time to decompose the protective agent made of protein by proteolytic enzyme to expose the metal fine particles, and then, for example, at a higher temperature (100 to 200 It is described that a conductive film having a low resistance of 1 ⁇ / ⁇ or less can be obtained by sintering at 0 ° C.).
  • Patent Document 3 silver nitrate, isopropyl alcohol, and (1-vinylpyrrolidone) -acrylic acid copolymer are dissolved in water, and the container is purged with nitrogen. A method for producing a colloidal solution containing uniform silver nanoparticles is disclosed. And it is described that the particle diameter of the silver nanoparticles contained in this colloidal solution was 3.0 ⁇ 0.9 nm on average as a result of observation with a transmission electron microscope.
  • Patent Document 4 discloses a conductive fine particle such as a noble metal having an average particle diameter in the range of 0.1 to 0.6 ⁇ m and a conductive fine particle such as a noble metal having an average particle diameter in the range of 0.5 to 1.0 ⁇ m.
  • a conductive paste containing a conductive particle mixture obtained by mixing fine particles with a mass ratio of particles in a range of 20:80 to 80:20 is disclosed.
  • Example 1 conductive fine particles having a particle size of 0.4 ⁇ m formed by coating platinum on palladium / silver double layer particles, and particles having a particle size of 0.6 ⁇ m formed by coating platinum on palladium / silver double layer particles.
  • a conductive coating formed using a conductive paste containing a conductive particle mixture obtained by mixing conductive fine particles at a particle mass ratio of 7: 3 may exhibit a specific resistance value of 21.63 ⁇ / cm.
  • This value is a specific resistance value (24.58 ⁇ / cm) of a conductive film formed using a conductive paste containing only conductive particles obtained by coating platinum on palladium / silver double layer particles having an average particle diameter of 0.4 ⁇ m.
  • an alloy of nickel and a noble metal is used as a main component, an average particle size of the first conductive particles having an average particle size of 200 nm or more and 400 nm or less, and an alloy of nickel and a noble metal as a main component.
  • An electrically conductive paste characterized by being 3.3 mol% or more and 10 mol% or less is disclosed.
  • the average particle diameter of the first conductive particles made of Ni—Re alloy obtained by the CVD method is 300 nm
  • the average particle diameter of the second conductive particles similarly made of Ni—Re alloy is 60 nm.
  • Each CV value standard deviation of particle size / logarithmized average particle size
  • the weight ratio of the first conductive particles to the second conductive particles is 85.
  • the conductive paste containing the electroconductive particle mixed by 15 is described.
  • JP 2004-273205 A Japanese Patent Laying-Open No. 2005-089597 JP-T-2004-533540 JP 2007-134291 A JP 2008-053488 A
  • gold nanoparticles having a particle size of less than about 5 nm are advantageous in forming a conductive film having a low specific resistance value at a low firing temperature.
  • gold nanoparticles having such a small particle size have a strong tendency to aggregate and have a strong catalytic action for decomposing the protective agent.
  • the ratio of the gold nanoparticles having a particle size of less than 5 nm is about 90% or more on the basis of the number, the practicality of the dispersion liquid containing the gold nanoparticles is significantly lowered.
  • the present invention can form a conductive film having a small specific resistance value by a firing process at a low firing temperature while the ratio of gold nanoparticles having a particle size of less than 5 nm is suppressed to less than 90% on the basis of the number.
  • An object of the present invention is to provide a gold nanoparticle dispersion for forming a conductive film.
  • a conductive film having a specific resistance value lower than that of the prior art can be formed by a baking process at a low baking temperature, specifically, a baking process at about 120 ° C.
  • An object of the present invention is to provide a gold nanoparticle dispersion for forming a conductive film.
  • the present invention includes gold nanoparticles having a number average particle diameter in the range of 3.98 to 5.24 nm and a ratio of the number of particles having a particle diameter of less than 5 nm to the total number in the range of 64 to 83%.
  • a gold nanoparticle dispersion for forming a conductive film is provided.
  • the ratio of the number of particles having a particle size of 5 nm or more and less than 13 nm to the total number of the gold nanoparticles is preferably in the range of 16 to 32%, more preferably in the range of 21 to 30%. .
  • the number average particle diameter is preferably in the range of 4.41 to 5.10 nm, and the ratio of the numbers is preferably in the range of 67 to 77%.
  • the specific resistance value is lower than when a conventional gold nanoparticle dispersion liquid in which the number average particle diameter of the gold nanoparticles is smaller is used.
  • a conductive film can be formed.
  • the present invention is a method for producing a gold nanoparticle dispersion for forming a conductive film, (I) adjusting each of a first dispersion containing gold nanoparticles having a number average particle size of 5 nm or less and a second dispersion containing gold nanoparticles having a number average particle size of 9 to 20 nm; , (ii) Gold nanoparticles including gold nanoparticles having a number average particle size in the range of 3.98 to 5.24 nm and a ratio of the number of particles having a particle size of less than 5 nm to the total number in the range of 64 to 83%. Mixing the first dispersion and the second dispersion such that a dispersion is obtained; The manufacturing method of the gold nanoparticle dispersion liquid for conductive film formation containing this.
  • the present invention includes gold nanoparticles having a number average particle size in the range of 3.98 to 5.24 nm, and the ratio of the number of particles having a particle size of less than 5 nm to the total number in the range of 64 to 83%.
  • An electrically conductive coating composition is provided.
  • the gold nanoparticle dispersion for forming a conductive film of the present invention forms a conductive film having a small specific resistance value while the ratio of gold nanoparticles having a particle diameter of less than 5 nm is suppressed to less than 90% on a number basis. it can.
  • the gold nanoparticle dispersion liquid for forming a conductive film of the present invention is a conductive material having a particularly low specific resistance value, at least in a preferred embodiment thereof, by a baking treatment at a low baking temperature, specifically a baking treatment of about 120 ° C. A film can be formed.
  • FIG. 1 shows a coating film of a gold nanoparticle dispersion liquid containing a first gold nanoparticle having an average particle diameter of 3.2 nm and a second gold nanoparticle having an average particle diameter of 9.5 nm in a predetermined ratio, which is fired at 120 ° C. It is the figure which showed the specific resistance in the case.
  • FIG. 2 shows a coating film of a gold nanoparticle dispersion liquid containing a first gold nanoparticle having an average particle diameter of 3.2 nm and a second gold nanoparticle having an average particle diameter of 9.5 nm in a predetermined ratio, which is fired at 190 ° C. It is the figure which showed the specific resistance in the case.
  • FIG. 1 shows a coating film of a gold nanoparticle dispersion liquid containing a first gold nanoparticle having an average particle diameter of 3.2 nm and a second gold nanoparticle having an average particle diameter of 9.5 nm in a predetermined ratio, which is fired at 190 ° C.
  • FIG. 3 shows a coating film of a gold nanoparticle dispersion liquid containing a first gold nanoparticle having an average particle diameter of 3.2 nm and a second gold nanoparticle having an average particle diameter of 9.5 nm in a predetermined ratio, which is fired at 240 ° C. It is the figure which showed the specific resistance in the case.
  • the gold nanoparticle dispersion for forming a conductive film of the present invention has a number average particle size in the range of 3.98 to 5.24 nm, preferably in the range of 4.41 to 5.10 nm, more preferably 4 It is in the range of .60 to 4.94m.
  • the particle diameter and number of gold nanoparticles, and the ratio of particles having a predetermined range of particle diameters can be measured using a transmission electron microscope as described in the examples described later.
  • the number average particle size of the gold nanoparticles can be calculated based on the particle size of the gold nanoparticles and the number of gold nanoparticles.
  • the ratio of the number of particles having a particle size of less than 5 nm to the number of all gold nanoparticles contained in the gold nanoparticle dispersion for forming a conductive film is in the range of 64 to 83%, preferably in the range of 67 to 77%. More preferably, it is in the range of 69 to 74%.
  • the ratio of the number of particles having a particle size of 5 nm or more and less than 13 nm to the number of all gold nanoparticles contained in the gold nanoparticle dispersion for forming a conductive film is preferably in the range of 16 to 32%, more preferably 21. It is in the range of ⁇ 30%, more preferably in the range of 24 to 28%.
  • the gold nanoparticle dispersion for forming a conductive film of the present embodiment has a gold nanoparticle having an average particle size of 5 nm or less (hereinafter sometimes referred to as a first gold nanoparticle) and an average particle size of 9 nm to It can be obtained by mixing gold nanoparticles in the range of 20 nm (hereinafter sometimes referred to as second gold nanoparticles).
  • the gold nanoparticle dispersion for forming a conductive film of the present embodiment includes a first dispersion in which gold nanoparticles having an average particle diameter of 5 nm or less are dispersed using a known gas phase synthesis method or solution synthesis method, and A gold nanoparticle dispersion liquid for forming a conductive coating film prepared by preparing a second dispersion liquid in which gold nanoparticles having an average particle diameter of 9 nm to 20 nm are dispersed and mixing them at a predetermined ratio It may be.
  • the predetermined ratio is determined so that the gold nanoparticle dispersion of the present invention can be obtained.
  • a low molecular weight thiol such as 1-butanethiol is used as a protective agent, a first dispersion in which first gold nanoparticles having an average particle size of 5 nm or less are dispersed, and an average particle size of 9 nm to 20 nm.
  • a method of preparing a second dispersion liquid in which the second gold nanoparticles in the range are dispersed, and mixing these dispersion liquids at a predetermined ratio can be mentioned. According to this method, the particle size distribution of the gold nanoparticles contained in the first dispersion and the second dispersion is relatively narrow, which is preferable because the particle size distribution can be easily controlled.
  • the conductive film is obtained by applying the gold nanoparticle dispersion liquid of the present embodiment to a predetermined film thickness to form a coating film and firing the coating film.
  • a conductive film having a small resistance value can be obtained even when the firing temperature is low is not clear, but the first gold nanoparticles having a small average particle diameter are the second gold nanoparticles having a large average particle diameter. It is thought that this is because a denser internal structure is formed by intervening between the two. It is considered that the dense arrangement of the gold nanoparticles inside the coating film, combined with the low fusion temperature of the gold nanoparticles, results in the formation of a dense conductive film even at a baking treatment at a low baking temperature.
  • a low molecular weight thiol such as 1-butanethiol, which is a preferred protective agent, is easily removed during firing, so that there are fewer voids in the conductive film and there are fewer impurities remaining in the film.
  • the average particle size of the gold nanoparticles (first gold nanoparticles) contained in the first dispersion is preferably 5 nm or less. If the average particle size of the first gold nanoparticles becomes too large, it may be necessary to increase the firing temperature when forming the conductive coating. A more preferable average particle diameter is considered to be 4 nm or less. On the other hand, if the average particle size of the first gold nanoparticles is less than 1 nm, the surface area of the first gold nanoparticles increases, and the amount of the protective agent contained in the conductive coating before firing increases. The firing temperature may not be lowered. In addition, when the first gold nanoparticles are too small, a dense conductive film may not be obtained.
  • the average particle size of the gold nanoparticles (second gold nanoparticles) contained in the second dispersion is preferably 20 nm or less. If the average particle size of the second gold nanoparticles becomes too large, it may be necessary to increase the firing temperature when forming the conductive coating. In addition, in order for the first gold nanoparticles to intervene between the second gold nanoparticles in the conductive film before firing, the average particle diameter of the second gold nanoparticles is the average of the first gold nanoparticles. It must be somewhat larger than the particle size. On the other hand, if the average particle size of the second gold nanoparticles becomes too large, the gap between the second gold nanoparticles becomes large and it becomes difficult to obtain a dense coating. Therefore, the average particle diameter of the second gold nanoparticles is preferably 9 to 20 nm.
  • the protective agent is preferably a low molecular weight thiol such as 1-butanethiol.
  • the low molecular weight thiol means a thiol compound having a molecular weight of 146 or less. Since these thiols have a low molecular weight, they are easily removed during firing. Furthermore, since the sulfur atom contained in the thiol group specifically binds to the gold particles in the dispersion, it becomes easy to obtain gold nanoparticles having a narrow particle size distribution.
  • 1-butanethiol, 1-propanethiol, 1-ethanethiol, and the like can be preferably used as a protective agent.
  • the gold nanoparticle dispersion for forming a conductive film of the present embodiment comprises a first gold nanoparticle and a second gold nanoparticle in a ratio of 1: 9 to 1: 4 in the weight ratio of these particles. It is preferably obtained by mixing, and more preferably obtained by mixing at a ratio of 1: 9 to 1: 5.
  • a coating film is formed using such a gold nanoparticle dispersion, the denseness of the entire coating film can be kept high.
  • the first gold nanoparticles and the second gold nanoparticles can be obtained using a solution synthesis method, preferably a method of reducing gold ions in the presence of a protective agent.
  • a solution synthesis method preferably a method of reducing gold ions in the presence of a protective agent.
  • the solution synthesis method of gold nanoparticles will be described.
  • the method applied in the examples described later can be used.
  • the overlapping description may be abbreviate
  • the solvent used for the first dispersion and the second dispersion is not particularly limited as long as it can dissolve a gold salt, a reducing agent, and a reaction accelerator, particularly when a solution synthesis method is used.
  • a solution synthesis method for example, water, alcohols, ketones and ethers can be used as the solvent. From the viewpoint of dissolving the gold salt, water and alcohol are particularly preferably used.
  • the reducing agent is not particularly limited as long as it is dissolved in a solvent and reduces the gold salt.
  • sodium borohydride, dimethylamine borane, citric acids, alcohols, carboxylic acids, ketones, ethers, aldehydes and esters can be used as the reducing agent. Two or more of these may be used in combination.
  • citric acids include citric acid and citrates such as sodium citrate, potassium citrate and ammonium citrate.
  • alcohols include methanol, ethanol, 1-propanol, 2-propanol, ethylene glycol, glycerin and the like.
  • carboxylic acids include formic acid, acetic acid, fumaric acid, malic acid, succinic acid, aspartic acid, gallic acid, ascorbic acid, and their carboxylates. Tannic acid, which is a dehydrated form of gallic acid and sugar, is also preferably used. Examples of ketones include acetone and methyl ethyl ketone. Examples of ethers include diethyl ether. Examples of aldehydes include formaldehyde and acetaldehyde. Examples of esters include methyl formate, methyl acetate, and ethyl acetate. Of these, sodium borohydride, dimethylamine borane, sodium citrate, tannic acid, gallic acid, ascorbic acid and salts thereof are particularly preferable because of their high reducibility and easy handling.
  • a reaction accelerator may be added to the solvent.
  • alkali metal carbonates such as potassium carbonate
  • alkali metal hydrogen carbonates such as sodium hydrogen carbonate
  • alkali metal hydroxides such as lithium hydroxide may be used.
  • the dispersion liquid in which the first gold nanoparticles and the second gold nanoparticles are dispersed is adjusted, and then each dispersion liquid is weighed so that the gold has a predetermined weight ratio. If mixed, the gold nanoparticle dispersion for forming a conductive film of the present embodiment can be obtained.
  • the conductive coating composition according to the present invention is not particularly limited in its form as long as it is suitable for use as a coating, and may be, for example, a paste-like or liquid composition. Specifically, this composition can be used as a conductive ink, a conductive adhesive, and the like.
  • Example 1 Preparation of dispersion liquid in which first gold nanoparticles are dispersed 0.4M tetrachlorogold (III) hydrogen hydride tetrahydrate aqueous solution (manufactured by Mitsuwa Chemicals Co., Ltd.) 0.96 mL and ultrapure water 10 mL And stirred at room temperature for 5 minutes. Thereto, 24 mL of toluene (manufactured by Wako Pure Chemical Industries, Ltd.) was added and stirred for 10 minutes.
  • tetrachlorogold (III) hydrogen hydride tetrahydrate aqueous solution manufactured by Mitsuwa Chemicals Co., Ltd.
  • toluene manufactured by Wako Pure Chemical Industries, Ltd.
  • the cross section of this film was observed using Keyence simple SEM, and the film thickness was determined.
  • the value of specific resistance (volume resistivity) derived using these numerical values was 11.7 ⁇ ⁇ cm.
  • the specific resistance values at the firing temperatures of 190 ° C. and 240 ° C. are 10.1 ⁇ ⁇ cm and 9.1 ⁇ ⁇ cm, respectively. Met.
  • Example 2 The first dispersion and the second dispersion were mixed in the same manner as in Example 1 except that the weight ratio of the first gold nanoparticles to the second gold nanoparticles was 1: 9. Then, a gold nanoparticle dispersion for forming a conductive film was prepared, and the specific resistance of the film was evaluated. For the firing temperatures of 120 ° C., 190 ° C., and 240 ° C., the specific resistance values were 8.8 ⁇ ⁇ cm, 8.0 ⁇ ⁇ cm, and 7.1 ⁇ ⁇ cm, respectively.
  • Example 3 The first dispersion and the second dispersion were mixed in the same manner as in Example 1 except that the weight ratio of the first gold nanoparticles to the second gold nanoparticles was 1: 8. Then, a gold nanoparticle dispersion for forming a conductive film was prepared, and the specific resistance of the film was evaluated. For the firing temperatures of 120 ° C., 190 ° C., and 240 ° C., the specific resistance values were 7.3 ⁇ ⁇ cm, 6.7 ⁇ ⁇ cm, and 6.1 ⁇ ⁇ cm, respectively.
  • Example 4 The first dispersion and the second dispersion were mixed in the same manner as in Example 1 except that the weight ratio of the first gold nanoparticles and the second gold nanoparticles was 1: 7. Then, a gold nanoparticle dispersion for forming a conductive film was prepared, and the specific resistance of the film was evaluated. For the firing temperatures of 120 ° C., 190 ° C., and 240 ° C., the specific resistance values were 8.2 ⁇ ⁇ cm, 7.5 ⁇ ⁇ cm, and 6.7 ⁇ ⁇ cm, respectively.
  • Example 5 The first dispersion and the second dispersion were mixed in the same manner as in Example 1 except that the weight ratio of the first gold nanoparticles to the second gold nanoparticles was 1: 6. Then, a gold nanoparticle dispersion for forming a conductive film was prepared, and the specific resistance of the film was evaluated. For the firing temperatures of 120 ° C., 190 ° C., and 240 ° C., the specific resistance values were 8.5 ⁇ ⁇ cm, 7.8 ⁇ ⁇ cm, and 6.7 ⁇ ⁇ cm, respectively.
  • Example 6 The first dispersion and the second dispersion were mixed in the same manner as in Example 1 except that the weight ratio of the first gold nanoparticles to the second gold nanoparticles was 1: 5. Then, a gold nanoparticle dispersion for forming a conductive film was prepared, and the specific resistance of the film was evaluated. For the firing temperatures of 120 ° C., 190 ° C., and 240 ° C., the specific resistance values were 8.7 ⁇ ⁇ cm, 8.1 ⁇ ⁇ cm, and 7.2 ⁇ ⁇ cm, respectively.
  • Example 7 The first dispersion and the second dispersion were mixed in the same manner as in Example 1 except that the weight ratio of the first gold nanoparticles to the second gold nanoparticles was 1: 4. Then, a gold nanoparticle dispersion for forming a conductive film was prepared, and the specific resistance of the film was evaluated. For the firing temperatures of 120 ° C., 190 ° C., and 240 ° C., the specific resistance values were 9.4 ⁇ ⁇ cm, 8.7 ⁇ ⁇ cm, and 7.8 ⁇ ⁇ cm, respectively.
  • Example 8 The first dispersion and the second dispersion were mixed in the same manner as in Example 1 except that the weight ratio of the first gold nanoparticles to the second gold nanoparticles was 1: 3. Then, a gold nanoparticle dispersion for forming a conductive film was prepared, and the specific resistance of the film was evaluated. For the firing temperatures of 120 ° C., 190 ° C., and 240 ° C., the specific resistance values were 12.6 ⁇ ⁇ cm, 11.3 ⁇ ⁇ cm, and 9.9 ⁇ ⁇ cm, respectively.
  • Example 1 (Comparative Example 1) Using the dispersion liquid in which the first gold nanoparticles used in Example 1 are dispersed and the dispersion liquid in which the third gold nanoparticles prepared in the following procedure are dispersed, the same conductivity as in Example 1 is used. A gold nanoparticle dispersion for film formation was prepared. 10 mL of ultrapure water was added to 0.96 mL of 0.4 M tetrachloroauric (III) hydrogen hydride tetrahydrate aqueous solution (manufactured by Mitsuwa Chemicals Co., Ltd.), and stirred at room temperature for 5 minutes.
  • III tetrachloroauric
  • a dispersion liquid (first dispersion liquid) in which the first gold nanoparticles are dispersed and a dispersion liquid (second dispersion liquid) in which the third gold nanoparticles are dispersed are referred to as the first gold nanoparticles and the third dispersion liquid.
  • Each of these was weighed so that the weight ratio to the gold nanoparticles was 1: 5, and mixed to prepare a gold nanoparticle dispersion for forming a conductive film.
  • a film was prepared in the same manner as in Example 1, and the specific resistance at a baking temperature of 120 ° C. was evaluated. The specific resistance value at a firing temperature of 120 ° C. was 16.4 ⁇ ⁇ cm.
  • Comparative Example 2 The first dispersion and the second dispersion were the same as in Comparative Example 1 except that the weight ratio of the first gold nanoparticles to the third gold nanoparticles was 1: 4. Thus, a gold nanoparticle dispersion for forming a conductive film was prepared. A film was prepared in the same manner as in Comparative Example 1, and the specific resistance at a baking temperature of 120 ° C. was evaluated. The specific resistance value at a firing temperature of 120 ° C. was 17.1 ⁇ ⁇ cm.
  • Comparative Example 3 The first dispersion and the second dispersion were the same as in Comparative Example 1 except that the weight ratio of the first gold nanoparticles and the third gold nanoparticles was 1: 3. Thus, a gold nanoparticle dispersion for forming a conductive film was prepared. A film was prepared in the same manner as in Comparative Example 1, and the specific resistance at a baking temperature of 120 ° C. was evaluated. The specific resistance value at a firing temperature of 120 ° C. was 18.4 ⁇ ⁇ cm.
  • Table 4 summarizes the resistivity evaluation results of Examples 1 to 8, and Table 5 summarizes the resistivity evaluation results of Comparative Examples 1 to 3.
  • Example 4 Using the dispersion liquid in which the first gold nanoparticles prepared in Example 1 were dispersed, a film was prepared in the same manner as in Example 1 and the specific resistance was evaluated.
  • the specific resistance values were 9.4 ⁇ ⁇ cm, 7.3 ⁇ ⁇ cm, and 6.5 ⁇ ⁇ cm, respectively.
  • Example 5 Using the dispersion liquid in which the second gold nanoparticles prepared in Example 1 were dispersed, a film was prepared in the same manner as in Example 1 and the specific resistance was evaluated.
  • the specific resistance values were 14.9 ⁇ ⁇ cm, 11.8 ⁇ ⁇ cm, and 10.3 ⁇ ⁇ cm, respectively.
  • Comparative Example 6 Using the dispersion liquid in which the third gold nanoparticles prepared in Comparative Example 1 were dispersed, a film was prepared in the same manner as in Comparative Example 1, and the specific resistance was evaluated.
  • the specific resistance values were 20.2 ⁇ ⁇ cm, 16.4 ⁇ ⁇ cm, and 15.2 ⁇ ⁇ cm, respectively.
  • Table 6 shows the results of Comparative Examples 4 to 6.
  • the dispersion obtained in Comparative Example 4 is a conventional gold nanoparticle dispersion in which the ratio of gold nanoparticles of less than 5 nm contained is 95% on a number basis and the ratio of gold nanoparticles of less than 5 nm is extremely high. is there. As shown in Table 6, the resistance value of the film produced using this dispersion was small. However, as in Comparative Example 4, a dispersion having a very high ratio of gold nanoparticles of less than 5 nm is prone to agglomeration of gold nanoparticles, which is problematic from the viewpoint of practicality. On the other hand, when the dispersion liquid having a large average particle diameter obtained in Comparative Examples 5 and 6 is used, only a film having a large specific resistance value can be formed.
  • Films prepared using a gold nanoparticle dispersion for conductive film containing first gold nanoparticles having an average particle diameter of 3.2 nm and second gold nanoparticles having an average particle diameter of 9.5 nm were smaller than the specific resistance value of the film prepared using the dispersion liquid of Comparative Example 5 having an average particle diameter of 9.5 nm. It can be seen that the effect of mixing large and small conductive particles appears regardless of the mixing ratio of the first and second gold nanoparticles.
  • the ratio of particles having a particle size of less than 5 nm in the dispersions obtained in Examples 2 to 6 is 67 to 77% on the basis of the number, and when these dispersions are baked at 120 ° C., a film having a low specific resistance value is obtained. Formed. Although the average particle diameter of the gold nanoparticles of Examples 2 to 6 was larger than the average particle diameter of Comparative Example 4, a coating having a specific resistance value smaller than that of Comparative Example 4 was obtained. This effect cannot be imagined from the general tendency that the specific resistance value decreases as the diameter decreases.
  • Example 3 not only the baking treatment at a low baking temperature (120 ° C.) but also the baking treatment at a higher temperature (190 ° C., 240 ° C.) gave a film having a smaller specific resistance value than Comparative Example 4. It was.
  • the gold nanoparticle dispersion liquid for forming a conductive film of the present invention can be preferably used for forming a conductive film having a small specific resistance by a baking treatment at a low baking temperature.

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Abstract

The present invention provides: a gold nanoparticle dispersion liquid for forming a conductive coating film, which is capable of forming a conductive coating film having a low specific resistance by firing at low firing temperatures even in cases where the ratio of gold nanoparticles having a particle diameter of less than 5 nm is suppressed to less than 90% on a number basis; and a method for producing the gold nanoparticle dispersion liquid for forming a conductive coating film. The present invention provides a gold nanoparticle dispersion liquid for forming a conductive coating film, which contains gold nanoparticles that have a number average particle diameter within the range of 3.98-5.24 nm and a ratio of the number of particles having a particle diameter of less than 5 nm relative to the total number of particles within the range of 64-83%.

Description

導電性被膜形成用金ナノ粒子分散液およびその製造方法、およびその分散液を含む導電性塗料組成物Gold nanoparticle dispersion for forming conductive film, method for producing the same, and conductive coating composition containing the dispersion
 本発明は、導電性金ナノ粒子分散液およびその製造方法、およびその分散液を含む導電性塗料組成物に関する。 The present invention relates to a conductive gold nanoparticle dispersion, a method for producing the same, and a conductive coating composition containing the dispersion.
 高集積化された高機能で小型・薄型のデバイス開発には、高度な微細配線・接続技術が不可欠である。その要素技術として、貴金属微粒子の製造技術とそれらのペースト化技術、さらに、インクジェット等の印刷技術との組み合わせが注目されている。 Advanced micro wiring and connection technology is indispensable for the development of highly integrated, highly functional, small and thin devices. As its elemental technology, attention is focused on a combination of precious metal fine particle manufacturing technology and pasting technology thereof, and further printing technology such as inkjet.
 貴金属微粒子を用いたペーストにおいて、粒子径がナノサイズまで小さくなった貴金属ナノ粒子は、表面エネルギーが増大するため粒子表面での融点降下が生じ、金属ナノ粒子同士の融着が起こりやすくなることが知られている。そのため、従来のミクロンサイズの貴金属粒子では溶融できない低温で溶融が可能であるため、配線を容易に形成することが可能となる。また、ナノレベルの貴金属微粒子を用いることによって、より微細な配線を形成することができるため、デバイスの高集積化が可能である。しかし、逆に、表面エネルギーが増大するため、微粒子同士の凝集が発生しやすく、貴金属濃度を増加させにくいという欠点が生じる。それを解消するため、微粒子の表面に保護剤を吸着させ、分散状態を維持させる処理が一般的に行われている。貴金属微粒子のナノペーストを製造するためには、ナノレベルに粒子径を制御する技術と、保護剤吸着による分散技術が必要である。 In the paste using noble metal fine particles, the noble metal nanoparticles whose particle size is reduced to nano-size may cause a melting point drop on the particle surface due to increased surface energy, and the metal nanoparticles may be easily fused. Are known. For this reason, since the conventional micron-sized noble metal particles can be melted at a low temperature that cannot be melted, wiring can be easily formed. Further, by using nano-level noble metal fine particles, finer wiring can be formed, so that high integration of devices can be achieved. However, conversely, since the surface energy is increased, the fine particles are likely to be aggregated, resulting in a disadvantage that it is difficult to increase the noble metal concentration. In order to solve this problem, a treatment is generally performed in which a protective agent is adsorbed on the surface of fine particles to maintain a dispersed state. In order to produce nanopastes of noble metal fine particles, a technology for controlling the particle size to the nano level and a dispersion technology by adsorption of a protective agent are necessary.
 このようなナノサイズの金属微粒子を製造する方法としては、大きく気相合成法と溶液合成法の2種類の製法が知られているが、一般的には、溶液合成法が利用されている。溶液合成法とは、分散液中に分散させた金属イオンを還元することにより金属等の微粒子を析出させる方法である。分散液中に保護剤となる物質を添加することで、ナノレベルの金属微粒子が高濃度で分散した分散液を調製することが可能となる。 As a method for producing such nano-sized metal fine particles, two types of production methods, a gas phase synthesis method and a solution synthesis method, are generally known, but a solution synthesis method is generally used. The solution synthesis method is a method of precipitating fine particles such as metal by reducing metal ions dispersed in a dispersion. By adding a substance that serves as a protective agent to the dispersion, it is possible to prepare a dispersion in which nano-level metal fine particles are dispersed at a high concentration.
 例えば、特許文献1には窒素、酸素、またはイオウ原子を含む基を有する化合物であって、150℃~300℃の範囲に沸点を有し、20℃以下の融点を有する化合物(モノアルキルアミン等)を被覆層分子とし、金属ナノ粒子の平均粒径が2~10nmである、金等の金属ナノ粒子およびそれを含んでなる導電性ナノ粒子ペーストが開示されている。そしてこの導電性ナノ粒子ペーストは、例えば、250℃以下の加熱処理によって、体積固有抵抗率が10×10-6Ω・cm以下の導電体層を形成することが記載されている。 For example, Patent Document 1 discloses a compound having a group containing nitrogen, oxygen, or sulfur atoms, having a boiling point in the range of 150 ° C. to 300 ° C. and a melting point of 20 ° C. or less (monoalkylamine etc. ) Is a coating layer molecule, and metal nanoparticles such as gold having a mean particle diameter of 2 to 10 nm and conductive nanoparticle pastes comprising the same are disclosed. This conductive nanoparticle paste is described to form a conductor layer having a volume resistivity of 10 × 10 −6 Ω · cm or less by, for example, a heat treatment at 250 ° C. or less.
 また特許文献2には、平均粒径が20nm以下かつ平均粒径の分散が平均粒径の1/3より小さい金属微粒子と、その金属微粒子を被覆するタンパク質よりなる保護剤とタンパク質分解酵素を含む金属インクとが開示されている。そして、この金属インクを、例えば40℃から60℃程度で一定時間保持して、タンパク質分解酵素によりタンパク質よりなる保護剤を分解して金属微粒子を露出させた後に、例えばより高い温度(100~200℃)で焼結させることにより、1Ω/□以下の低抵抗の導電性被膜が得られることが記載されている。 Patent Document 2 includes a metal fine particle having an average particle diameter of 20 nm or less and a dispersion of the average particle diameter smaller than 1/3 of the average particle diameter, a protective agent made of a protein covering the metal fine particle, and a proteolytic enzyme. Metallic inks are disclosed. Then, this metal ink is held at a temperature of, for example, about 40 ° C. to 60 ° C. for a certain period of time to decompose the protective agent made of protein by proteolytic enzyme to expose the metal fine particles, and then, for example, at a higher temperature (100 to 200 It is described that a conductive film having a low resistance of 1 Ω / □ or less can be obtained by sintering at 0 ° C.).
 また特許文献3には、硝酸銀とイソプロピルアルコールおよび(1-ビニルピロリドン)-アクリル酸共重合体を水に溶解し、容器を窒素パージした後に30KGyの線量のガンマ線を放射して、粒径が微細かつ均一な銀ナノ粒子を含むコロイド溶液を製造する方法が開示されている。そしてこのコロイド溶液に含まれる銀ナノ粒子の粒径は、透過電子顕微鏡観察の結果、平均で3.0±0.9nmであったことが記載されている。 In Patent Document 3, silver nitrate, isopropyl alcohol, and (1-vinylpyrrolidone) -acrylic acid copolymer are dissolved in water, and the container is purged with nitrogen. A method for producing a colloidal solution containing uniform silver nanoparticles is disclosed. And it is described that the particle diameter of the silver nanoparticles contained in this colloidal solution was 3.0 ± 0.9 nm on average as a result of observation with a transmission electron microscope.
 一方、より大きな範囲の粒径において、導電性ペーストを塗布等したときに導電性微粒子をより稠密に配列させ、焼成後に空隙がなるべく残らない導電被膜を形成することを目的として、大小の平均粒径を有する導電性微粒子を含む導電性ペーストが提案されている。 On the other hand, in a larger range of particle diameters, large and small average grains are formed for the purpose of forming a conductive film in which voids remain as much as possible after firing, by arranging conductive fine particles more densely when a conductive paste is applied. A conductive paste containing conductive fine particles having a diameter has been proposed.
 例えば、特許文献4には、平均粒子径が0.1~0.6μmの範囲にある貴金属等の導電性微粒子と平均粒子径が0.5~1.0μmの範囲にある貴金属等の導電性微粒子とを、粒子の質量比で20:80乃至80:20の範囲の比にて混合してなる導電性粒子混合物を含有する導電ペーストが開示されている。そして実施例1として、パラジウム/銀二重層粒子に白金を被覆してなる粒径が0.4μmの導電性微粒子と、同じくパラジウム/銀二重層粒子に白金を被覆してなる粒径が0.6μmの導電性微粒子とを、粒子の質量比7:3で混合してなる導電性粒子混合物を含有する導電ペーストを用いて形成した導電性被膜は、21.63μΩ/cmの比抵抗値を示すことが記載されている。この値は、平均粒径0.4μmのパラジウム/銀二重層粒子に白金を被覆してなる導電性粒子のみを含む導電性ペーストを用いて形成した導電性被膜の比抵抗値(24.58μΩ/cm)や平均粒径0.6μmのパラジウム/銀二重層粒子に白金を被覆してなる導電性粒子のみを含む導電性ペーストを用いて形成した導電性被膜の比抵抗値(33.59μΩ/cm)より低い値であったことが記載されている。 For example, Patent Document 4 discloses a conductive fine particle such as a noble metal having an average particle diameter in the range of 0.1 to 0.6 μm and a conductive fine particle such as a noble metal having an average particle diameter in the range of 0.5 to 1.0 μm. A conductive paste containing a conductive particle mixture obtained by mixing fine particles with a mass ratio of particles in a range of 20:80 to 80:20 is disclosed. As Example 1, conductive fine particles having a particle size of 0.4 μm formed by coating platinum on palladium / silver double layer particles, and particles having a particle size of 0.6 μm formed by coating platinum on palladium / silver double layer particles. A conductive coating formed using a conductive paste containing a conductive particle mixture obtained by mixing conductive fine particles at a particle mass ratio of 7: 3 may exhibit a specific resistance value of 21.63 μΩ / cm. Are listed. This value is a specific resistance value (24.58 μΩ / cm) of a conductive film formed using a conductive paste containing only conductive particles obtained by coating platinum on palladium / silver double layer particles having an average particle diameter of 0.4 μm. ) And a specific resistance value (33.59 μΩ / cm) of a conductive film formed using a conductive paste containing only conductive particles obtained by coating palladium on a palladium / silver double layer particle having an average particle diameter of 0.6 μm. It is described that it was a low value.
 また特許文献5には、ニッケルと貴金属との合金を主成分とし、平均粒子径が200nm以上、400nm以下である第1導電性粒子と、ニッケルと貴金属との合金を主成分とし、平均粒子径が40nm以上、80nm以下である第2導電性粒子と、を含有する導電性ペーストであって、前記導電性ペースト中の全導電性成分に対する前記貴金属の含有量が、0.3モル%超、13モル%以下であり、前記第1導電性粒子における前記貴金属の含有割合が、0.3モル%以上、1.5モル%以下であり、前記第2導電性粒子における前記貴金属の含有割合が、3.3モル%以上、10モル%以下であることを特徴とする導電性ペーストが開示されている。そして実施例1として、それぞれCVD法により得られたNi-Re合金からなる第1導電性粒子の平均粒径が300nm、同じくNi-Re合金からなる第2導電性粒子の平均粒径が60nmであり、それぞれのCV値(粒径の標準偏差/対数化した平均粒径)は0.3と狭小な粒径分布を示すこと、および第1導電性粒子と第2導電性粒子を重量比85:15で混合してなる導電性粒子を含む導電性ペーストが記載されている。 In Patent Document 5, an alloy of nickel and a noble metal is used as a main component, an average particle size of the first conductive particles having an average particle size of 200 nm or more and 400 nm or less, and an alloy of nickel and a noble metal as a main component. A conductive paste containing second conductive particles having a particle size of 40 nm or more and 80 nm or less, wherein the content of the noble metal with respect to all the conductive components in the conductive paste is more than 0.3 mol%, 13 mol% or less, the content ratio of the noble metal in the first conductive particles is 0.3 mol% or more and 1.5 mol% or less, and the content ratio of the noble metal in the second conductive particles is An electrically conductive paste characterized by being 3.3 mol% or more and 10 mol% or less is disclosed. As Example 1, the average particle diameter of the first conductive particles made of Ni—Re alloy obtained by the CVD method is 300 nm, and the average particle diameter of the second conductive particles similarly made of Ni—Re alloy is 60 nm. Each CV value (standard deviation of particle size / logarithmized average particle size) is 0.3, showing a narrow particle size distribution, and the weight ratio of the first conductive particles to the second conductive particles is 85. : The conductive paste containing the electroconductive particle mixed by 15 is described.
特開2004-273205号公報JP 2004-273205 A 特開2005-089597号公報Japanese Patent Laying-Open No. 2005-089597 特表2004-533540号公報JP-T-2004-533540 特開2007-134291号公報JP 2007-134291 A 特開2008-053488号公報JP 2008-053488 A
 粒径が5nm程度未満のごく微小な金ナノ粒子の使用は、低い焼成温度で低い比抵抗値を有する導電性被膜を形成する上で有利である。ところが、この程度に粒径が小さい金ナノ粒子は、凝集する傾向が強く、保護剤を分解する触媒作用も強い。粒径が5nm未満の金ナノ粒子の比率が個数基準で90%程度以上になると、その金ナノ粒子を含む分散液の実用性は著しく低下する。 Use of very fine gold nanoparticles having a particle size of less than about 5 nm is advantageous in forming a conductive film having a low specific resistance value at a low firing temperature. However, gold nanoparticles having such a small particle size have a strong tendency to aggregate and have a strong catalytic action for decomposing the protective agent. When the ratio of the gold nanoparticles having a particle size of less than 5 nm is about 90% or more on the basis of the number, the practicality of the dispersion liquid containing the gold nanoparticles is significantly lowered.
 そこで、本発明は、粒径が5nm未満の金ナノ粒子の比率が個数基準で90%未満に抑えられていながらも、低い焼成温度における焼成処理によって比抵抗値の小さな導電性被膜の形成が可能である、導電性被膜形成用金ナノ粒子分散液を提供することを目的とする。また、本発明は、少なくともその好ましい実施形態において、低い焼成温度における焼成処理、具体的には120℃程度の焼成処理によって、従来よりも低い比抵抗値を有する導電性被膜を形成することができる、導電性被膜形成用金ナノ粒子分散液を提供することを目的とする。 Therefore, the present invention can form a conductive film having a small specific resistance value by a firing process at a low firing temperature while the ratio of gold nanoparticles having a particle size of less than 5 nm is suppressed to less than 90% on the basis of the number. An object of the present invention is to provide a gold nanoparticle dispersion for forming a conductive film. In the present invention, at least in a preferred embodiment thereof, a conductive film having a specific resistance value lower than that of the prior art can be formed by a baking process at a low baking temperature, specifically, a baking process at about 120 ° C. An object of the present invention is to provide a gold nanoparticle dispersion for forming a conductive film.
 すなわち、本発明は、個数平均粒径が3.98~5.24nmの範囲にあり、全個数に対する粒径5nm未満の粒子の個数の比が64~83%の範囲にある金ナノ粒子を含む、導電性被膜形成用金ナノ粒子分散液を提供する。 That is, the present invention includes gold nanoparticles having a number average particle diameter in the range of 3.98 to 5.24 nm and a ratio of the number of particles having a particle diameter of less than 5 nm to the total number in the range of 64 to 83%. A gold nanoparticle dispersion for forming a conductive film is provided.
 本発明においては、前記金ナノ粒子における全個数に対する粒径5nm以上13nm未満の粒子の個数の比が16~32%の範囲にあることが好ましく、21~30%の範囲にあることがより好ましい。 In the present invention, the ratio of the number of particles having a particle size of 5 nm or more and less than 13 nm to the total number of the gold nanoparticles is preferably in the range of 16 to 32%, more preferably in the range of 21 to 30%. .
 本発明においては、前記個数平均粒径が4.41~5.10nmの範囲にあり、前記個数の比が67~77%の範囲にあることが好ましい。この好ましい形態によれば、120℃程度の低温焼成を適用した場合に、金ナノ粒子の個数平均粒径がより小さい従来型の金ナノ粒子の分散液を用いた時よりも比抵抗値が低い導電性被膜を形成することが可能となる。 In the present invention, the number average particle diameter is preferably in the range of 4.41 to 5.10 nm, and the ratio of the numbers is preferably in the range of 67 to 77%. According to this preferred embodiment, when low-temperature firing at about 120 ° C. is applied, the specific resistance value is lower than when a conventional gold nanoparticle dispersion liquid in which the number average particle diameter of the gold nanoparticles is smaller is used. A conductive film can be formed.
 また、本発明は、導電性被膜形成用金ナノ粒子分散液の製造方法であって、
(i)個数平均粒径が5nm以下の金ナノ粒子を含む第1の分散液と、個数平均粒径が9~20nmの金ナノ粒子を含む第2の分散液と、をそれぞれ調整する工程と、
(ii)個数平均粒径が3.98~5.24nmの範囲にあり、全個数に対する粒径5nm未満の粒子の個数の比が64~83%の範囲にある金ナノ粒子を含む金ナノ粒子分散液が得られるように、前記第1の分散液と前記第2の分散液とを混合する工程と、
を含む、導電性被膜形成用金ナノ粒子分散液の製造方法、である。
Further, the present invention is a method for producing a gold nanoparticle dispersion for forming a conductive film,
(I) adjusting each of a first dispersion containing gold nanoparticles having a number average particle size of 5 nm or less and a second dispersion containing gold nanoparticles having a number average particle size of 9 to 20 nm; ,
(ii) Gold nanoparticles including gold nanoparticles having a number average particle size in the range of 3.98 to 5.24 nm and a ratio of the number of particles having a particle size of less than 5 nm to the total number in the range of 64 to 83%. Mixing the first dispersion and the second dispersion such that a dispersion is obtained;
The manufacturing method of the gold nanoparticle dispersion liquid for conductive film formation containing this.
 さらに本発明は、個数平均粒径が3.98~5.24nmの範囲にあり、全個数に対する粒径5nm未満の粒子の個数の比が64~83%の範囲にある金ナノ粒子を含む、導電性塗料組成物を提供する。 Furthermore, the present invention includes gold nanoparticles having a number average particle size in the range of 3.98 to 5.24 nm, and the ratio of the number of particles having a particle size of less than 5 nm to the total number in the range of 64 to 83%. An electrically conductive coating composition is provided.
 本発明の導電性被膜形成用金ナノ粒子分散液は、粒径が5nm未満の金ナノ粒子の比率が個数基準で90%未満に抑えられていながらも、比抵抗値の小さな導電性被膜を形成できる。本発明の導電性被膜形成用金ナノ粒子分散液は、少なくともその好ましい実施形態において、低い焼成温度における焼成処理、具体的には120℃程度の焼成処理によって、特に低い比抵抗値を有する導電性被膜を形成することができる。 The gold nanoparticle dispersion for forming a conductive film of the present invention forms a conductive film having a small specific resistance value while the ratio of gold nanoparticles having a particle diameter of less than 5 nm is suppressed to less than 90% on a number basis. it can. The gold nanoparticle dispersion liquid for forming a conductive film of the present invention is a conductive material having a particularly low specific resistance value, at least in a preferred embodiment thereof, by a baking treatment at a low baking temperature, specifically a baking treatment of about 120 ° C. A film can be formed.
図1は平均粒径3.2nmの第1の金ナノ粒子と平均粒径9.5nmの第2の金ナノ粒子とを所定比率で含む金ナノ粒子分散液の塗布膜を120℃で焼成した場合の比抵抗を示した図である。FIG. 1 shows a coating film of a gold nanoparticle dispersion liquid containing a first gold nanoparticle having an average particle diameter of 3.2 nm and a second gold nanoparticle having an average particle diameter of 9.5 nm in a predetermined ratio, which is fired at 120 ° C. It is the figure which showed the specific resistance in the case. 図2は平均粒径3.2nmの第1の金ナノ粒子と平均粒径9.5nmの第2の金ナノ粒子とを所定比率で含む金ナノ粒子分散液の塗布膜を190℃で焼成した場合の比抵抗を示した図である。FIG. 2 shows a coating film of a gold nanoparticle dispersion liquid containing a first gold nanoparticle having an average particle diameter of 3.2 nm and a second gold nanoparticle having an average particle diameter of 9.5 nm in a predetermined ratio, which is fired at 190 ° C. It is the figure which showed the specific resistance in the case. 図3は平均粒径3.2nmの第1の金ナノ粒子と平均粒径9.5nmの第2の金ナノ粒子とを所定比率で含む金ナノ粒子分散液の塗布膜を240℃で焼成した場合の比抵抗を示した図である。FIG. 3 shows a coating film of a gold nanoparticle dispersion liquid containing a first gold nanoparticle having an average particle diameter of 3.2 nm and a second gold nanoparticle having an average particle diameter of 9.5 nm in a predetermined ratio, which is fired at 240 ° C. It is the figure which showed the specific resistance in the case.
 本発明の導電性被膜形成用金ナノ粒子分散液は、個数平均粒径が3.98~5.24nmの範囲にあり、好ましくは4.41~5.10nmの範囲にあり、より好ましくは4.60~4.94mの範囲にある。金ナノ粒子の粒径および個数、さらに所定範囲の粒径を有する粒子の比率は、後述する実施例において記載しているように、透過型電子顕微鏡を用いて測定することができる。金ナノ粒子の個数平均粒径は、金ナノ粒子の粒径と金ナノ粒子の個数に基づいて算出することができる。 The gold nanoparticle dispersion for forming a conductive film of the present invention has a number average particle size in the range of 3.98 to 5.24 nm, preferably in the range of 4.41 to 5.10 nm, more preferably 4 It is in the range of .60 to 4.94m. The particle diameter and number of gold nanoparticles, and the ratio of particles having a predetermined range of particle diameters can be measured using a transmission electron microscope as described in the examples described later. The number average particle size of the gold nanoparticles can be calculated based on the particle size of the gold nanoparticles and the number of gold nanoparticles.
 導電性被膜形成用金ナノ粒子分散液中に含まれる全金ナノ粒子の個数に対する粒径5nm未満の粒子の個数の比は、64~83%の範囲にあり、好ましくは67~77%の範囲にあり、より好ましくは69~74%の範囲にある。 The ratio of the number of particles having a particle size of less than 5 nm to the number of all gold nanoparticles contained in the gold nanoparticle dispersion for forming a conductive film is in the range of 64 to 83%, preferably in the range of 67 to 77%. More preferably, it is in the range of 69 to 74%.
 導電性被膜形成用金ナノ粒子分散液中に含まれる全金ナノ粒子の個数に対する粒径5nm以上13nm未満の粒子の個数の比は、好ましくは16~32%の範囲にあり、より好ましくは21~30%の範囲にあり、さらに好ましくは24~28%の範囲にある。 The ratio of the number of particles having a particle size of 5 nm or more and less than 13 nm to the number of all gold nanoparticles contained in the gold nanoparticle dispersion for forming a conductive film is preferably in the range of 16 to 32%, more preferably 21. It is in the range of ˜30%, more preferably in the range of 24 to 28%.
 本実施形態の導電性被膜形成用金ナノ粒子分散液は、平均粒径が5nm以下である金ナノ粒子(以下、第1の金ナノ粒子と言うことがある)と、平均粒径が9nm~20nmの範囲にある金ナノ粒子(以下、第2の金ナノ粒子と言うことがある)とを混合することにより得ることができる。 The gold nanoparticle dispersion for forming a conductive film of the present embodiment has a gold nanoparticle having an average particle size of 5 nm or less (hereinafter sometimes referred to as a first gold nanoparticle) and an average particle size of 9 nm to It can be obtained by mixing gold nanoparticles in the range of 20 nm (hereinafter sometimes referred to as second gold nanoparticles).
 本実施形態の導電性被膜形成用金ナノ粒子分散液は、公知の気相合成法や溶液合成法を用いて、平均粒径が5nm以下である金ナノ粒子が分散した第1の分散液および平均粒径が9nm~20nmの範囲にある金ナノ粒子が分散した第2の分散液を作製して、それらを所定の比率で混合することにより作製した、導電性被膜形成用金ナノ粒子分散液であってもよい。所定の比率は、本発明の金ナノ粒子分散液が得られるように定める。 The gold nanoparticle dispersion for forming a conductive film of the present embodiment includes a first dispersion in which gold nanoparticles having an average particle diameter of 5 nm or less are dispersed using a known gas phase synthesis method or solution synthesis method, and A gold nanoparticle dispersion liquid for forming a conductive coating film prepared by preparing a second dispersion liquid in which gold nanoparticles having an average particle diameter of 9 nm to 20 nm are dispersed and mixing them at a predetermined ratio It may be. The predetermined ratio is determined so that the gold nanoparticle dispersion of the present invention can be obtained.
 具体的には、1-ブタンチオール等の低分子量チオールを保護剤として用い、平均粒径が5nm以下である第1の金ナノ粒子が分散した第1の分散液および平均粒径が9nm~20nmの範囲にある第2の金ナノ粒子が分散した第2の分散液を作製し、これらの分散液を所定の比率で混合する方法が挙げられる。この方法によれば、第1の分散液および第2の分散液に含まれる金ナノ粒子の粒径分布が比較的狭小なものとなるので、粒径分布の制御が容易になって好ましい。 Specifically, a low molecular weight thiol such as 1-butanethiol is used as a protective agent, a first dispersion in which first gold nanoparticles having an average particle size of 5 nm or less are dispersed, and an average particle size of 9 nm to 20 nm. A method of preparing a second dispersion liquid in which the second gold nanoparticles in the range are dispersed, and mixing these dispersion liquids at a predetermined ratio can be mentioned. According to this method, the particle size distribution of the gold nanoparticles contained in the first dispersion and the second dispersion is relatively narrow, which is preferable because the particle size distribution can be easily controlled.
 本実施形態の金ナノ粒子分散液を、所定の膜厚で塗布等して塗布膜を形成し、この塗布膜を焼成することにより導電性被膜が得られる。焼成温度が低い場合であっても、抵抗値の小さい導電性被膜が得られる理由は明らかではないが、平均粒径の小さい第1の金ナノ粒子が平均粒径の大きい第2の金ナノ粒子の間に介在する形になって、より稠密な内部構造が形成されるためではないかと考えられる。塗布膜の内部で金ナノ粒子が稠密に配列することにより、金ナノ粒子の融着温度が低いことと相まって、低い焼成温度における焼成処理でも稠密な導電性被膜が形成されると考えられる。 The conductive film is obtained by applying the gold nanoparticle dispersion liquid of the present embodiment to a predetermined film thickness to form a coating film and firing the coating film. The reason why a conductive film having a small resistance value can be obtained even when the firing temperature is low is not clear, but the first gold nanoparticles having a small average particle diameter are the second gold nanoparticles having a large average particle diameter. It is thought that this is because a denser internal structure is formed by intervening between the two. It is considered that the dense arrangement of the gold nanoparticles inside the coating film, combined with the low fusion temperature of the gold nanoparticles, results in the formation of a dense conductive film even at a baking treatment at a low baking temperature.
 好ましい保護剤である1-ブタンチオール等の低分子量チオールは焼成の際に容易に除去されるため、導電性被膜の空隙が少なくなり、さらに被膜に残留する不純物が少なくなると考えられる。 It is considered that a low molecular weight thiol such as 1-butanethiol, which is a preferred protective agent, is easily removed during firing, so that there are fewer voids in the conductive film and there are fewer impurities remaining in the film.
 第1の分散液に含まれる金ナノ粒子(第1の金ナノ粒子)の平均粒径は5nm以下であることが好ましい。第1の金ナノ粒子の平均粒径が大きくなりすぎると、導電性被膜の形成時の焼成温度を高くすることが必要となることがある。より好ましい平均粒径は4nm以下であると考えられる。一方、第1の金ナノ粒子の平均粒径が1nm未満であると、第1の金ナノ粒子の表面積が増大して、焼成前の導電性被膜に含まれる保護剤の量が多くなるため、焼成温度を低下できなくなることがある。また、第1の金ナノ粒子が小さくなりすぎると稠密な導電性被膜が得られないことがある。 The average particle size of the gold nanoparticles (first gold nanoparticles) contained in the first dispersion is preferably 5 nm or less. If the average particle size of the first gold nanoparticles becomes too large, it may be necessary to increase the firing temperature when forming the conductive coating. A more preferable average particle diameter is considered to be 4 nm or less. On the other hand, if the average particle size of the first gold nanoparticles is less than 1 nm, the surface area of the first gold nanoparticles increases, and the amount of the protective agent contained in the conductive coating before firing increases. The firing temperature may not be lowered. In addition, when the first gold nanoparticles are too small, a dense conductive film may not be obtained.
 第2の分散液に含まれる金ナノ粒子(第2の金ナノ粒子)の平均粒径は、20nm以下であることが好ましい。第2の金ナノ粒子の平均粒径が大きくなりすぎると、導電性被膜の形成時の焼成温度を高くすることが必要になることがある。また、焼成前の導電性被膜において第1の金ナノ粒子が第2の金ナノ粒子の間に介在するためには、第2の金ナノ粒子の平均粒径は第1の金ナノ粒子の平均粒径よりある程度大きいことが必要である。一方で、第2の金ナノ粒子の平均粒径が大きくなりすぎると、第2の金ナノ粒子間の空隙が大きくなり稠密な被膜を得ることが困難になる。したがって、第2の金ナノ粒子の平均粒径は、9~20nmであることが好ましい。 The average particle size of the gold nanoparticles (second gold nanoparticles) contained in the second dispersion is preferably 20 nm or less. If the average particle size of the second gold nanoparticles becomes too large, it may be necessary to increase the firing temperature when forming the conductive coating. In addition, in order for the first gold nanoparticles to intervene between the second gold nanoparticles in the conductive film before firing, the average particle diameter of the second gold nanoparticles is the average of the first gold nanoparticles. It must be somewhat larger than the particle size. On the other hand, if the average particle size of the second gold nanoparticles becomes too large, the gap between the second gold nanoparticles becomes large and it becomes difficult to obtain a dense coating. Therefore, the average particle diameter of the second gold nanoparticles is preferably 9 to 20 nm.
 保護剤としては、1-ブタンチオール等の低分子量チオールが好ましい。ここで、低分子量チオールとは、分子量が146以下のチオール化合物を意味する。これらのチオールは、低分子量であるため焼成時に容易に除去される。さらに、分散液中でチオール基に含まれる硫黄原子が特異的に金粒子と結合するため、粒径分布が狭小な金ナノ粒子を得ることが容易になる。1-ブタンチオール以外に、1-プロパンチオール、1-エタンチオール等も保護剤として好ましく用いることができる。 The protective agent is preferably a low molecular weight thiol such as 1-butanethiol. Here, the low molecular weight thiol means a thiol compound having a molecular weight of 146 or less. Since these thiols have a low molecular weight, they are easily removed during firing. Furthermore, since the sulfur atom contained in the thiol group specifically binds to the gold particles in the dispersion, it becomes easy to obtain gold nanoparticles having a narrow particle size distribution. In addition to 1-butanethiol, 1-propanethiol, 1-ethanethiol, and the like can be preferably used as a protective agent.
 本実施形態の導電性被膜形成用金ナノ粒子分散液は、第1の金ナノ粒子と第2の金ナノ粒子とを、これらの粒子の重量の比において1:9~1:4の割合で混合して得られることが好ましく、1:9~1:5の割合で混合して得られることがより好ましい。このような金ナノ粒子分散液を用いて塗布膜を形成すると、塗布膜全体での稠密性を高く保つことができる。 The gold nanoparticle dispersion for forming a conductive film of the present embodiment comprises a first gold nanoparticle and a second gold nanoparticle in a ratio of 1: 9 to 1: 4 in the weight ratio of these particles. It is preferably obtained by mixing, and more preferably obtained by mixing at a ratio of 1: 9 to 1: 5. When a coating film is formed using such a gold nanoparticle dispersion, the denseness of the entire coating film can be kept high.
 第1の金ナノ粒子および第2の金ナノ粒子は、溶液合成法、好ましくは保護剤の存在下で金イオンを還元する方法、を用いて得ることができる。以下、金ナノ粒子の溶液合成法に関して説明する。具体的な方法としては、後述する実施例で適用した方法を用いることができる。なお、導電性被膜形成用金ナノ粒子分散液について説明した事項は以下の製造方法に適用できるため、重複する説明を省略する場合がある。 The first gold nanoparticles and the second gold nanoparticles can be obtained using a solution synthesis method, preferably a method of reducing gold ions in the presence of a protective agent. Hereinafter, the solution synthesis method of gold nanoparticles will be described. As a specific method, the method applied in the examples described later can be used. In addition, since the matter demonstrated about the gold nanoparticle dispersion liquid for electroconductive film formation is applicable to the following manufacturing methods, the overlapping description may be abbreviate | omitted.
 第1の分散液および第2の分散液に用いる溶媒は、特に溶液合成法を用いる場合には、金塩、還元剤および反応促進剤を溶解できるものであれば、特には限定されない。例えば、水、アルコール類、ケトン類およびエーテル類を溶媒として用いることができる。金塩を溶解するという観点から、水およびアルコールが特に好ましく用いられる。なお、還元剤を加える前に、溶媒を煮沸する、溶媒に窒素等の不活性ガスを吹き込む等して、溶媒中に存在する酸素を除去しておくことが望ましい。酸素が存在している溶媒を用いると、金イオンの還元反応が進みにくく、金ナノ粒子が形成されにくい。 The solvent used for the first dispersion and the second dispersion is not particularly limited as long as it can dissolve a gold salt, a reducing agent, and a reaction accelerator, particularly when a solution synthesis method is used. For example, water, alcohols, ketones and ethers can be used as the solvent. From the viewpoint of dissolving the gold salt, water and alcohol are particularly preferably used. Before adding the reducing agent, it is desirable to remove oxygen present in the solvent by boiling the solvent or blowing an inert gas such as nitrogen into the solvent. When a solvent in which oxygen is present is used, the reduction reaction of gold ions hardly proceeds and gold nanoparticles are not easily formed.
 還元剤は、溶媒に溶解し、金塩を還元するものであればよく、特には限定されない。例えば、水素化ホウ素ナトリウム、ジメチルアミンボラン、クエン酸類、アルコール類、カルボン酸類、ケトン類、エーテル類、アルデヒド類およびエステル類等を還元剤として用いることができる。これらを二種類以上組み合わせて用いてもよい。クエン酸類としては、クエン酸や、クエン酸ナトリウム、クエン酸カリウムおよびクエン酸アンモニウム等のクエン酸塩が例示される。アルコール類としては、メタノール、エタノール、1-プロパノール、2-プロパノール、エチレングリコール、グリセリン等が例示される。カルボン酸類としては、ぎ酸、酢酸、フマル酸、リンゴ酸、コハク酸、アスパラギン酸、没食子酸、アスコルビン酸およびそれらのカルボン酸塩等が例示される。また、没食子酸と糖の脱水体であるタンニン酸も好適に用いられる。ケトン類としては、アセトン、メチルエチルケトン等が例示される。エーテル類としては、ジエチルエーテル等が例示される。アルデヒド類としては、ホルムアルデヒド、アセトアルデヒド等が例示される。エステル類としては、ぎ酸メチル、酢酸メチル、酢酸エチル等が例示される。これらの中でも、還元性が高く、取り扱いも容易な、水素化ホウ素ナトリウム、ジメチルアミンボラン、クエン酸ナトリウム、タンニン酸、没食子酸、アスコルビン酸およびその塩が特に好ましい。 The reducing agent is not particularly limited as long as it is dissolved in a solvent and reduces the gold salt. For example, sodium borohydride, dimethylamine borane, citric acids, alcohols, carboxylic acids, ketones, ethers, aldehydes and esters can be used as the reducing agent. Two or more of these may be used in combination. Examples of citric acids include citric acid and citrates such as sodium citrate, potassium citrate and ammonium citrate. Examples of alcohols include methanol, ethanol, 1-propanol, 2-propanol, ethylene glycol, glycerin and the like. Examples of carboxylic acids include formic acid, acetic acid, fumaric acid, malic acid, succinic acid, aspartic acid, gallic acid, ascorbic acid, and their carboxylates. Tannic acid, which is a dehydrated form of gallic acid and sugar, is also preferably used. Examples of ketones include acetone and methyl ethyl ketone. Examples of ethers include diethyl ether. Examples of aldehydes include formaldehyde and acetaldehyde. Examples of esters include methyl formate, methyl acetate, and ethyl acetate. Of these, sodium borohydride, dimethylamine borane, sodium citrate, tannic acid, gallic acid, ascorbic acid and salts thereof are particularly preferable because of their high reducibility and easy handling.
 必要に応じて、反応促進剤を溶媒に加えてもよい。例えば、炭酸カリウム等のアルカリ金属の炭酸塩類、炭酸水素ナトリウム等のアルカリ金属の炭酸水素塩類、水酸化リチウム等のアルカリ金属の水酸化塩類を用いてもよい。 If necessary, a reaction accelerator may be added to the solvent. For example, alkali metal carbonates such as potassium carbonate, alkali metal hydrogen carbonates such as sodium hydrogen carbonate, and alkali metal hydroxides such as lithium hydroxide may be used.
 以上のような方法によって、第1の金ナノ粒子および第2の金ナノ粒子がそれぞれ分散した分散液を調整し、その後、金が所定の重量比となるようにそれぞれの分散液を秤量して混合すれば、本実施形態の導電性被膜形成用金ナノ粒子分散液を得ることができる。 By the method as described above, the dispersion liquid in which the first gold nanoparticles and the second gold nanoparticles are dispersed is adjusted, and then each dispersion liquid is weighed so that the gold has a predetermined weight ratio. If mixed, the gold nanoparticle dispersion for forming a conductive film of the present embodiment can be obtained.
 本発明による導電性塗料組成物は、塗料としての使用に適している限りその形態に特に制限はなく、例えばペースト状、液状の組成物とするとよい。この組成物は、具体的には、導電性インク、導電性接着剤、等として使用できる。 The conductive coating composition according to the present invention is not particularly limited in its form as long as it is suitable for use as a coating, and may be, for example, a paste-like or liquid composition. Specifically, this composition can be used as a conductive ink, a conductive adhesive, and the like.
 以下、実施例により本発明をさらに詳しく説明する。なお以降の記載においては、体積の単位「リットル」を記号「L」で表すこととする。 Hereinafter, the present invention will be described in more detail with reference to examples. In the following description, the unit of volume “liter” is represented by the symbol “L”.
(実施例1)
(1)第1の金ナノ粒子が分散した分散液の調製
 0.4Mのテトラクロロ金(III)酸水素四水和物水溶液(三津和化学薬品株式会社製)0.96mLに超純水10mLを加え、室温で5分間撹拌した。そこに、トルエン(和光純薬工業株式会社製)24mLを加え10分間撹拌した。次に1-ブタンチオール(東京化成工業株式会社製)360mgとトルエン18mLの混合溶液を2.44mL加え10分間撹拌した。そこに、水素化ホウ素ナトリウム(キシダ化学株式会社製)0.1gと超純水14mLを混合した還元剤溶液を添加し、10分間撹拌した。最後に1-ブタンチオール360mgとトルエン18mLを混合した溶液を4.88mL加え30分間撹拌し、反応系上部の金ナノ粒子分散液のみを採取した。得られた金ナノ粒子分散液31mLにソルミックスAP7(日本アルコール販売株式会社製)79mLを添加した後、12時間保管して凝集させた。その後、凝集物を回収し、ソルミックスAP7で洗浄し、トルエン4mLを添加して、精製した金ナノ粒子分散液を得た。
(Example 1)
(1) Preparation of dispersion liquid in which first gold nanoparticles are dispersed 0.4M tetrachlorogold (III) hydrogen hydride tetrahydrate aqueous solution (manufactured by Mitsuwa Chemicals Co., Ltd.) 0.96 mL and ultrapure water 10 mL And stirred at room temperature for 5 minutes. Thereto, 24 mL of toluene (manufactured by Wako Pure Chemical Industries, Ltd.) was added and stirred for 10 minutes. Next, 2.44 mL of a mixed solution of 360 mg of 1-butanethiol (manufactured by Tokyo Chemical Industry Co., Ltd.) and 18 mL of toluene was added and stirred for 10 minutes. A reducing agent solution in which 0.1 g of sodium borohydride (manufactured by Kishida Chemical Co., Ltd.) and 14 mL of ultrapure water were mixed was added and stirred for 10 minutes. Finally, 4.88 mL of a solution obtained by mixing 360 mg of 1-butanethiol and 18 mL of toluene was added and stirred for 30 minutes, and only the gold nanoparticle dispersion at the top of the reaction system was collected. After adding 79 mL of Solmix AP7 (manufactured by Nippon Alcohol Sales Co., Ltd.) to 31 mL of the obtained gold nanoparticle dispersion, the mixture was stored and aggregated for 12 hours. Thereafter, the aggregate was collected, washed with Solmix AP7, and 4 mL of toluene was added to obtain a purified gold nanoparticle dispersion.
(2)第2の金ナノ粒子が分散した分散液の調製
 0.4Mのテトラクロロ金(III)酸水素四水和物水溶液(三津和化学薬品株式会社製)0.96mLに超純水10mLを加え、室温で5分間撹拌した。そこに、トルエン(和光純薬工業株式会社製)24mLを加え10分間撹拌した。次に1-ブタンチオール(東京化成工業株式会社製)360mgとトルエン18mLの混合溶液を2.44mL加え10分間撹拌した。撹拌後、トルエン相のみを回収し、水素化ホウ素ナトリウム(キシダ化学株式会社製)0.1gを還元剤として添加し10分間撹拌した。最後に1-ブタンチオール360mgとトルエン18mLの混合溶液を4.88mL加え30分間撹拌し、反応系上部の金ナノ粒子分散液のみを採取した。
 得られた金ナノ粒子分散液31mLにソルミックスAP7(日本アルコール販売株式会社製)79mLを添加した後、12時間保管して凝集させた。その後、凝集物を回収し、ソルミックスAP7で洗浄し、トルエン4mLを添加して、精製した金ナノ粒子分散液を得た。
(2) Preparation of dispersion liquid in which second gold nanoparticles are dispersed 0.4M tetrachlorogold (III) hydrogen hydride tetrahydrate aqueous solution (manufactured by Mitsuwa Chemical Co., Ltd.) 0.96 mL and ultrapure water 10 mL And stirred at room temperature for 5 minutes. Thereto, 24 mL of toluene (manufactured by Wako Pure Chemical Industries, Ltd.) was added and stirred for 10 minutes. Next, 2.44 mL of a mixed solution of 360 mg of 1-butanethiol (manufactured by Tokyo Chemical Industry Co., Ltd.) and 18 mL of toluene was added and stirred for 10 minutes. After stirring, only the toluene phase was recovered, and 0.1 g of sodium borohydride (Kishida Chemical Co., Ltd.) was added as a reducing agent and stirred for 10 minutes. Finally, 4.88 mL of a mixed solution of 360 mg of 1-butanethiol and 18 mL of toluene was added and stirred for 30 minutes, and only the gold nanoparticle dispersion at the top of the reaction system was collected.
After adding 79 mL of Solmix AP7 (manufactured by Nippon Alcohol Sales Co., Ltd.) to 31 mL of the obtained gold nanoparticle dispersion, the mixture was stored and aggregated for 12 hours. Thereafter, the aggregate was collected, washed with Solmix AP7, and 4 mL of toluene was added to obtain a purified gold nanoparticle dispersion.
(3)金ナノ粒子の粒径評価
 透過型電子顕微鏡によって金ナノ粒子の粒径および個数を評価した。第1の金ナノ粒子の平均粒径が3.2nm、第2の金ナノ粒子の平均粒径が9.5nmであるという結果を得た。本実施例の第1の金ナノ粒子および第2の金ナノ粒子の粒径分布を表1および表2に示す。
(3) Particle size evaluation of gold nanoparticles The particle size and number of gold nanoparticles were evaluated by a transmission electron microscope. As a result, the average particle diameter of the first gold nanoparticles was 3.2 nm, and the average particle diameter of the second gold nanoparticles was 9.5 nm. Tables 1 and 2 show the particle size distributions of the first gold nanoparticles and the second gold nanoparticles of this example.
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000002
(4)導電性被膜の作製と比抵抗の評価
 第1の金ナノ粒子が分散した分散液(第1の分散液)と、第2の金ナノ粒子が分散した分散液(第2の分散液)とを、第1の金ナノ粒子と第2の金ナノ粒子との重量の比が1:10になるようにそれぞれ秤量し、混合して導電性被膜形成用金ナノ粒子分散液を得た。これをガラスプレートの上に滴下し、室温で乾燥した後に焼成温度120℃、焼成時間1時間の条件で焼成して金の被膜を得た。三菱化学製ロレスタ抵抗率計を用いてこの被膜の面抵抗を測定した。また、キーエンス製簡易SEMを用いてこの被膜の断面を観察して膜厚を求めた。これらの数値を用いて導出した比抵抗(体積抵抗率)の値は11.7μΩ・cmであった。同様にして焼成温度190℃、240℃の場合の被膜についても比抵抗を評価した結果、焼成温度190℃、240℃の場合の比抵抗の値はそれぞれ10.1μΩ・cm、9.1μΩ・cmであった。
(4) Preparation of conductive film and evaluation of specific resistance Dispersion in which first gold nanoparticles are dispersed (first dispersion) and dispersion in which second gold nanoparticles are dispersed (second dispersion) ) Are weighed so that the weight ratio of the first gold nanoparticles to the second gold nanoparticles is 1:10, and mixed to obtain a gold nanoparticle dispersion for forming a conductive film. . This was dropped on a glass plate, dried at room temperature, and then fired under conditions of a firing temperature of 120 ° C. and a firing time of 1 hour to obtain a gold film. The sheet resistance of this film was measured using a Mitsubishi Chemical Loresta resistivity meter. Moreover, the cross section of this film was observed using Keyence simple SEM, and the film thickness was determined. The value of specific resistance (volume resistivity) derived using these numerical values was 11.7 μΩ · cm. Similarly, as a result of evaluating the specific resistance of the coating films at the firing temperatures of 190 ° C. and 240 ° C., the specific resistance values at the firing temperatures of 190 ° C. and 240 ° C. are 10.1 μΩ · cm and 9.1 μΩ · cm, respectively. Met.
(実施例2)
 第1の分散液と第2の分散液とを、第1の金ナノ粒子と第2の金ナノ粒子との重量の比が1:9となるように混合した以外は実施例1と同様にして、導電性被膜形成用金ナノ粒子分散液を作製し、被膜の比抵抗を評価した。焼成温度120℃、190℃、240℃の場合について、比抵抗の値はそれぞれ8.8μΩ・cm、8.0μΩ・cm、7.1μΩ・cmであった。
(Example 2)
The first dispersion and the second dispersion were mixed in the same manner as in Example 1 except that the weight ratio of the first gold nanoparticles to the second gold nanoparticles was 1: 9. Then, a gold nanoparticle dispersion for forming a conductive film was prepared, and the specific resistance of the film was evaluated. For the firing temperatures of 120 ° C., 190 ° C., and 240 ° C., the specific resistance values were 8.8 μΩ · cm, 8.0 μΩ · cm, and 7.1 μΩ · cm, respectively.
(実施例3)
 第1の分散液と第2の分散液とを、第1の金ナノ粒子と第2の金ナノ粒子との重量の比が1:8となるように混合した以外は実施例1と同様にして、導電性被膜形成用金ナノ粒子分散液を作製し、被膜の比抵抗を評価した。焼成温度120℃、190℃、240℃の場合について、比抵抗の値はそれぞれ7.3μΩ・cm、6.7μΩ・cm、6.1μΩ・cmであった。
(Example 3)
The first dispersion and the second dispersion were mixed in the same manner as in Example 1 except that the weight ratio of the first gold nanoparticles to the second gold nanoparticles was 1: 8. Then, a gold nanoparticle dispersion for forming a conductive film was prepared, and the specific resistance of the film was evaluated. For the firing temperatures of 120 ° C., 190 ° C., and 240 ° C., the specific resistance values were 7.3 μΩ · cm, 6.7 μΩ · cm, and 6.1 μΩ · cm, respectively.
(実施例4)
 第1の分散液と第2の分散液とを、第1の金ナノ粒子と第2の金ナノ粒子との重量の比が1:7となるように混合した以外は実施例1と同様にして、導電性被膜形成用金ナノ粒子分散液を作製し、被膜の比抵抗を評価した。焼成温度120℃、190℃、240℃の場合について、比抵抗の値はそれぞれ8.2μΩ・cm、7.5μΩ・cm、6.7μΩ・cmであった。
Example 4
The first dispersion and the second dispersion were mixed in the same manner as in Example 1 except that the weight ratio of the first gold nanoparticles and the second gold nanoparticles was 1: 7. Then, a gold nanoparticle dispersion for forming a conductive film was prepared, and the specific resistance of the film was evaluated. For the firing temperatures of 120 ° C., 190 ° C., and 240 ° C., the specific resistance values were 8.2 μΩ · cm, 7.5 μΩ · cm, and 6.7 μΩ · cm, respectively.
(実施例5)
 第1の分散液と第2の分散液とを、第1の金ナノ粒子と第2の金ナノ粒子との重量の比が1:6となるように混合した以外は実施例1と同様にして、導電性被膜形成用金ナノ粒子分散液を作製し、被膜の比抵抗を評価した。焼成温度120℃、190℃、240℃の場合について、比抵抗の値はそれぞれ8.5μΩ・cm、7.8μΩ・cm、6.7μΩ・cmであった。
(Example 5)
The first dispersion and the second dispersion were mixed in the same manner as in Example 1 except that the weight ratio of the first gold nanoparticles to the second gold nanoparticles was 1: 6. Then, a gold nanoparticle dispersion for forming a conductive film was prepared, and the specific resistance of the film was evaluated. For the firing temperatures of 120 ° C., 190 ° C., and 240 ° C., the specific resistance values were 8.5 μΩ · cm, 7.8 μΩ · cm, and 6.7 μΩ · cm, respectively.
(実施例6)
 第1の分散液と第2の分散液とを、第1の金ナノ粒子と第2の金ナノ粒子との重量の比が1:5となるように混合した以外は実施例1と同様にして、導電性被膜形成用金ナノ粒子分散液を作製し、被膜の比抵抗を評価した。焼成温度120℃、190℃、240℃の場合について、比抵抗の値はそれぞれ8.7μΩ・cm、8.1μΩ・cm、7.2μΩ・cmであった。
(Example 6)
The first dispersion and the second dispersion were mixed in the same manner as in Example 1 except that the weight ratio of the first gold nanoparticles to the second gold nanoparticles was 1: 5. Then, a gold nanoparticle dispersion for forming a conductive film was prepared, and the specific resistance of the film was evaluated. For the firing temperatures of 120 ° C., 190 ° C., and 240 ° C., the specific resistance values were 8.7 μΩ · cm, 8.1 μΩ · cm, and 7.2 μΩ · cm, respectively.
(実施例7)
 第1の分散液と第2の分散液とを、第1の金ナノ粒子と第2の金ナノ粒子との重量の比が1:4となるように混合した以外は実施例1と同様にして、導電性被膜形成用金ナノ粒子分散液を作製し、被膜の比抵抗を評価した。焼成温度120℃、190℃、240℃の場合について、比抵抗の値はそれぞれ9.4μΩ・cm、8.7μΩ・cm、7.8μΩ・cmであった。
(Example 7)
The first dispersion and the second dispersion were mixed in the same manner as in Example 1 except that the weight ratio of the first gold nanoparticles to the second gold nanoparticles was 1: 4. Then, a gold nanoparticle dispersion for forming a conductive film was prepared, and the specific resistance of the film was evaluated. For the firing temperatures of 120 ° C., 190 ° C., and 240 ° C., the specific resistance values were 9.4 μΩ · cm, 8.7 μΩ · cm, and 7.8 μΩ · cm, respectively.
(実施例8)
 第1の分散液と第2の分散液とを、第1の金ナノ粒子と第2の金ナノ粒子との重量の比が1:3となるように混合した以外は実施例1と同様にして、導電性被膜形成用金ナノ粒子分散液を作製し、被膜の比抵抗を評価した。焼成温度120℃、190℃、240℃の場合について、比抵抗の値はそれぞれ12.6μΩ・cm、11.3μΩ・cm、9.9μΩ・cmであった。
(Example 8)
The first dispersion and the second dispersion were mixed in the same manner as in Example 1 except that the weight ratio of the first gold nanoparticles to the second gold nanoparticles was 1: 3. Then, a gold nanoparticle dispersion for forming a conductive film was prepared, and the specific resistance of the film was evaluated. For the firing temperatures of 120 ° C., 190 ° C., and 240 ° C., the specific resistance values were 12.6 μΩ · cm, 11.3 μΩ · cm, and 9.9 μΩ · cm, respectively.
(比較例1)
 実施例1で用いた第1の金のナノ粒子が分散した分散液と、次に述べる手順で作製した第3の金ナノ粒子が分散した分散液とを用い、実施例1と同様に導電性被膜形成用金ナノ粒子分散液を作製した。
 0.4Mのテトラクロロ金(III)酸水素四水和物水溶液(三津和化学薬品株式会社製)0.96mLに超純水10mLを加え、室温で5分間撹拌した。そこに、トルエン(和光純薬工業株式会社製)24mLを加え10分間撹拌した。次に1-ブタンチオール(東京化成工業株式会社製)360mgとトルエン18mLを混合した溶液を2.44mL加え10分間撹拌した。撹拌後、トルエン相のみを回収し、水素化ホウ素ナトリウム(キシダ化学株式会社製)0.1gを還元剤として添加して10分間撹拌した。最後に1-ブタンチオール360mgとトルエン18mLを混合した溶液を4.88mL加えて30分間撹拌し、反応系上部の金ナノ粒子分散液のみを採取した。
 得られた金ナノ粒子分散液31mLにソルミックスAP7(日本アルコール販売株式会社製)79mLを添加した後、12時間保管し凝集させる。その後、凝集物を回収し、ソルミックスAP7で洗浄し、トルエン4mLを添加して精製した金ナノ粒子分散液を作製した。この分散液を第3の金ナノ粒子が分散した分散液とした。
(Comparative Example 1)
Using the dispersion liquid in which the first gold nanoparticles used in Example 1 are dispersed and the dispersion liquid in which the third gold nanoparticles prepared in the following procedure are dispersed, the same conductivity as in Example 1 is used. A gold nanoparticle dispersion for film formation was prepared.
10 mL of ultrapure water was added to 0.96 mL of 0.4 M tetrachloroauric (III) hydrogen hydride tetrahydrate aqueous solution (manufactured by Mitsuwa Chemicals Co., Ltd.), and stirred at room temperature for 5 minutes. Thereto, 24 mL of toluene (manufactured by Wako Pure Chemical Industries, Ltd.) was added and stirred for 10 minutes. Next, 2.44 mL of a solution obtained by mixing 360 mg of 1-butanethiol (manufactured by Tokyo Chemical Industry Co., Ltd.) and 18 mL of toluene was added and stirred for 10 minutes. After stirring, only the toluene phase was recovered, and 0.1 g of sodium borohydride (Kishida Chemical Co., Ltd.) was added as a reducing agent and stirred for 10 minutes. Finally, 4.88 mL of a solution obtained by mixing 360 mg of 1-butanethiol and 18 mL of toluene was added and stirred for 30 minutes, and only the gold nanoparticle dispersion at the top of the reaction system was collected.
After adding 79 mL of Solmix AP7 (manufactured by Nippon Alcohol Sales Co., Ltd.) to 31 mL of the obtained gold nanoparticle dispersion, the mixture is stored and aggregated for 12 hours. Thereafter, the aggregate was recovered, washed with Solmix AP7, and purified by adding 4 mL of toluene to produce a gold nanoparticle dispersion. This dispersion was used as a dispersion in which the third gold nanoparticles were dispersed.
 (粒径の評価)
 実施例1と同様に金ナノ粒子の粒径を評価したところ、第3の金ナノ粒子は粒径範囲が7.5nm~42.5nmで平均粒径19.5nmであるという結果を得た。この第3の金ナノ粒子の粒径分布を表3に示す。
(Evaluation of particle size)
When the particle size of the gold nanoparticles was evaluated in the same manner as in Example 1, the third gold nanoparticles had a particle size range of 7.5 nm to 42.5 nm and an average particle size of 19.5 nm. Table 3 shows the particle size distribution of the third gold nanoparticles.
Figure JPOXMLDOC01-appb-T000003
Figure JPOXMLDOC01-appb-T000003
 (比抵抗の評価)
 第1の金ナノ粒子が分散した分散液(第1の分散液)と、第3の金ナノ粒子が分散した分散液(第2の分散液)とを、第1の金ナノ粒子と第3の金ナノ粒子との重量の比が1:5になるようにそれぞれ秤量し、混合して導電性被膜形成用金ナノ粒子分散液を作製した。実施例1と同様にして被膜を作製し、焼成温度120℃の場合の比抵抗を評価した。焼成温度120℃の場合の比抵抗の値は16.4μΩ・cmであった。
(Evaluation of resistivity)
A dispersion liquid (first dispersion liquid) in which the first gold nanoparticles are dispersed and a dispersion liquid (second dispersion liquid) in which the third gold nanoparticles are dispersed are referred to as the first gold nanoparticles and the third dispersion liquid. Each of these was weighed so that the weight ratio to the gold nanoparticles was 1: 5, and mixed to prepare a gold nanoparticle dispersion for forming a conductive film. A film was prepared in the same manner as in Example 1, and the specific resistance at a baking temperature of 120 ° C. was evaluated. The specific resistance value at a firing temperature of 120 ° C. was 16.4 μΩ · cm.
(比較例2)
 第1の分散液と第2の分散液とを、第1の金ナノ粒子と第3の金ナノ粒子との重量の比が1:4となるように混合した以外は比較例1と同様にして、導電性被膜形成用金ナノ粒子分散液を作製した。比較例1と同様にして被膜を作製し、焼成温度120℃の場合の比抵抗を評価した。焼成温度120℃の場合の比抵抗の値は17.1μΩ・cmであった。
(Comparative Example 2)
The first dispersion and the second dispersion were the same as in Comparative Example 1 except that the weight ratio of the first gold nanoparticles to the third gold nanoparticles was 1: 4. Thus, a gold nanoparticle dispersion for forming a conductive film was prepared. A film was prepared in the same manner as in Comparative Example 1, and the specific resistance at a baking temperature of 120 ° C. was evaluated. The specific resistance value at a firing temperature of 120 ° C. was 17.1 μΩ · cm.
(比較例3)
 第1の分散液と第2の分散液とを、第1の金ナノ粒子と第3の金ナノ粒子との重量の比が1:3となるように混合した以外は比較例1と同様にして、導電性被膜形成用金ナノ粒子分散液を作製した。比較例1と同様にして被膜を作製し、焼成温度120℃の場合の比抵抗を評価した。焼成温度120℃の場合の比抵抗の値は18.4μΩ・cmであった。
(Comparative Example 3)
The first dispersion and the second dispersion were the same as in Comparative Example 1 except that the weight ratio of the first gold nanoparticles and the third gold nanoparticles was 1: 3. Thus, a gold nanoparticle dispersion for forming a conductive film was prepared. A film was prepared in the same manner as in Comparative Example 1, and the specific resistance at a baking temperature of 120 ° C. was evaluated. The specific resistance value at a firing temperature of 120 ° C. was 18.4 μΩ · cm.
 実施例1~実施例8の比抵抗評価結果を表4に、比較例1~3の比抵抗評価結果を表5にそれぞれまとめて示す。 Table 4 summarizes the resistivity evaluation results of Examples 1 to 8, and Table 5 summarizes the resistivity evaluation results of Comparative Examples 1 to 3.
Figure JPOXMLDOC01-appb-T000004
Figure JPOXMLDOC01-appb-T000004
Figure JPOXMLDOC01-appb-T000005
Figure JPOXMLDOC01-appb-T000005
(比較例4)
 実施例1で作製した第1の金ナノ粒子が分散した分散液を用いて、実施例1と同様に被膜を作製して比抵抗を評価した。焼成温度120℃、190℃、240℃の場合について、比抵抗の値はそれぞれ9.4μΩ・cm、7.3μΩ・cm、6.5μΩ・cmであった。
(Comparative Example 4)
Using the dispersion liquid in which the first gold nanoparticles prepared in Example 1 were dispersed, a film was prepared in the same manner as in Example 1 and the specific resistance was evaluated. For the firing temperatures of 120 ° C., 190 ° C., and 240 ° C., the specific resistance values were 9.4 μΩ · cm, 7.3 μΩ · cm, and 6.5 μΩ · cm, respectively.
(比較例5)
 実施例1で作製した第2の金ナノ粒子が分散した分散液を用いて、実施例1と同様に被膜を作製して比抵抗を評価した。焼成温度120℃、190℃、240℃の場合について、比抵抗の値はそれぞれ14.9μΩ・cm、11.8μΩ・cm、10.3μΩ・cmであった。
(Comparative Example 5)
Using the dispersion liquid in which the second gold nanoparticles prepared in Example 1 were dispersed, a film was prepared in the same manner as in Example 1 and the specific resistance was evaluated. For the firing temperatures of 120 ° C., 190 ° C., and 240 ° C., the specific resistance values were 14.9 μΩ · cm, 11.8 μΩ · cm, and 10.3 μΩ · cm, respectively.
(比較例6)
 比較例1で作製した第3の金ナノ粒子が分散した分散液を用いて、比較例1と同様に被膜を作製して比抵抗を評価した。焼成温度120℃、190℃、240℃の場合について、比抵抗の値はそれぞれ20.2μΩ・cm、16.4μΩ・cm、15.2μΩ・cmであった。
(Comparative Example 6)
Using the dispersion liquid in which the third gold nanoparticles prepared in Comparative Example 1 were dispersed, a film was prepared in the same manner as in Comparative Example 1, and the specific resistance was evaluated. For the firing temperatures of 120 ° C., 190 ° C., and 240 ° C., the specific resistance values were 20.2 μΩ · cm, 16.4 μΩ · cm, and 15.2 μΩ · cm, respectively.
 比較例4~6の結果を、表6に示す。 Table 6 shows the results of Comparative Examples 4 to 6.
Figure JPOXMLDOC01-appb-T000006
Figure JPOXMLDOC01-appb-T000006
 比較例4で得られた分散液は、含まれる5nm未満の金ナノ粒子の比率は個数基準で95%と5nm未満の金ナノ粒子の比率が極めて高い、従来型の金ナノ粒子の分散液である。表6に示すように、この分散液を用いて作製した被膜の抵抗値は小さな値となった。しかし、比較例4のように、5nm未満の金ナノ粒子の比率が極めて高い分散液は、金ナノ粒子が凝集しやすく、実用性の観点からは問題がある。一方で、比較例5および6で得られた平均粒径の大きな分散液を用いると、比抵抗値の大きな被膜しか形成できない。 The dispersion obtained in Comparative Example 4 is a conventional gold nanoparticle dispersion in which the ratio of gold nanoparticles of less than 5 nm contained is 95% on a number basis and the ratio of gold nanoparticles of less than 5 nm is extremely high. is there. As shown in Table 6, the resistance value of the film produced using this dispersion was small. However, as in Comparative Example 4, a dispersion having a very high ratio of gold nanoparticles of less than 5 nm is prone to agglomeration of gold nanoparticles, which is problematic from the viewpoint of practicality. On the other hand, when the dispersion liquid having a large average particle diameter obtained in Comparative Examples 5 and 6 is used, only a film having a large specific resistance value can be formed.
 平均粒径3.2nmの第1の金ナノ粒子と平均粒径9.5nmの第2の金ナノ粒子とを含む導電性被膜用金ナノ粒子分散液を用いて作製した被膜(実施例1~8)の比抵抗値は、比較例5の平均粒径9.5nmの分散液を用いて作製した被膜の比抵抗値より小さくなった。第1および第2の金ナノ粒子の混合比率によらずに、大小導電性粒子の混合の効果が表れたことが見て取れる。 Films prepared using a gold nanoparticle dispersion for conductive film containing first gold nanoparticles having an average particle diameter of 3.2 nm and second gold nanoparticles having an average particle diameter of 9.5 nm (Examples 1 to The specific resistance value of 8) was smaller than the specific resistance value of the film prepared using the dispersion liquid of Comparative Example 5 having an average particle diameter of 9.5 nm. It can be seen that the effect of mixing large and small conductive particles appears regardless of the mixing ratio of the first and second gold nanoparticles.
 実施例2~6で得られた分散液中の粒径5nm未満の粒子の比率は個数基準で67~77%であり、これらの分散液を120℃で焼成処理すると、比抵抗値の低い被膜が形成された。実施例2~6の金ナノ粒子の平均粒径は、比較例4の平均粒径よりも大きいにもかかわらず、比較例4よりも小さな比抵抗値の被膜が得られたが、これは粒径が小さくなると比抵抗値が小さくなるという一般的な傾向からは想像できない効果である。さらに、実施例3では、低い焼成温度(120℃)における焼成処理のみならず、より高い温度(190℃、240℃)での焼成処理によっても、比較例4より比抵抗値の小さな被膜が得られた。 The ratio of particles having a particle size of less than 5 nm in the dispersions obtained in Examples 2 to 6 is 67 to 77% on the basis of the number, and when these dispersions are baked at 120 ° C., a film having a low specific resistance value is obtained. Formed. Although the average particle diameter of the gold nanoparticles of Examples 2 to 6 was larger than the average particle diameter of Comparative Example 4, a coating having a specific resistance value smaller than that of Comparative Example 4 was obtained. This effect cannot be imagined from the general tendency that the specific resistance value decreases as the diameter decreases. Furthermore, in Example 3, not only the baking treatment at a low baking temperature (120 ° C.) but also the baking treatment at a higher temperature (190 ° C., 240 ° C.) gave a film having a smaller specific resistance value than Comparative Example 4. It was.
 比較例1~3において得られた分散液からは、比抵抗が小さい被膜が得られなかった。 From the dispersions obtained in Comparative Examples 1 to 3, a film having a small specific resistance could not be obtained.
 本発明の導電性被膜形成用金ナノ粒子分散液は、低い焼成温度における焼成処理によって比抵抗の小さい導電性被膜を形成するために好ましく使用することができる。 The gold nanoparticle dispersion liquid for forming a conductive film of the present invention can be preferably used for forming a conductive film having a small specific resistance by a baking treatment at a low baking temperature.

Claims (6)

  1.  個数平均粒径が3.98~5.24nmの範囲にあり、全個数に対する粒径5nm未満の粒子の個数の比が64~83%の範囲にある金ナノ粒子を含む、導電性被膜形成用金ナノ粒子分散液。 For forming a conductive coating, comprising gold nanoparticles having a number average particle size in the range of 3.98 to 5.24 nm and a ratio of the number of particles having a particle size of less than 5 nm to the total number in the range of 64 to 83%. Gold nanoparticle dispersion.
  2.  前記金ナノ粒子における全個数に対する粒径5nm以上13nm未満の粒子の個数の比が16~32%の範囲にある、請求項1に記載の導電性被膜形成用金ナノ粒子分散液。 The gold nanoparticle dispersion for forming a conductive film according to claim 1, wherein the ratio of the number of particles having a particle size of 5 nm or more and less than 13 nm to the total number of the gold nanoparticles is in the range of 16 to 32%.
  3.  前記個数平均粒径が4.41~5.10nmの範囲にあり、前記金ナノ粒子における全個数に対する粒径5nm未満の粒子の個数の比が67~77%の範囲にあり、前記全個数に対する粒径5nm以上13nm未満の粒子の個数の比が21~30%の範囲にある、請求項2に記載の導電性被膜形成用金ナノ粒子分散液。 The number average particle diameter is in the range of 4.41 to 5.10 nm, and the ratio of the number of particles having a particle diameter of less than 5 nm to the total number in the gold nanoparticles is in the range of 67 to 77%, The gold nanoparticle dispersion for forming a conductive film according to claim 2, wherein the ratio of the number of particles having a particle size of 5 nm or more and less than 13 nm is in the range of 21 to 30%.
  4.  前記個数平均粒径が4.41~5.10nmの範囲にあり、前記個数の比が67~77%の範囲にある、請求項1に記載の導電性被膜形成用金ナノ粒子分散液。 The gold nanoparticle dispersion liquid for forming a conductive film according to claim 1, wherein the number average particle diameter is in the range of 4.41 to 5.10 nm and the ratio of the numbers is in the range of 67 to 77%.
  5.  導電性被膜形成用金ナノ粒子分散液の製造方法であって、
    (i)個数平均粒径が5nm以下の金ナノ粒子を含む第1の分散液と、個数平均粒径が9~20nmの金ナノ粒子を含む第2の分散液と、をそれぞれ調整する工程と、
    (ii)個数平均粒径が3.98~5.24nmの範囲にあり、全個数に対する粒径5nm未満の粒子の個数の比が64~83%の範囲にある金ナノ粒子を含む金ナノ粒子分散液が得られるように、前記第1の分散液と前記第2の分散液とを混合する工程と、
     を含む、導電性被膜形成用金ナノ粒子分散液の製造方法。
    A method for producing a gold nanoparticle dispersion for forming a conductive film,
    (I) adjusting each of a first dispersion containing gold nanoparticles having a number average particle size of 5 nm or less and a second dispersion containing gold nanoparticles having a number average particle size of 9 to 20 nm; ,
    (ii) Gold nanoparticles including gold nanoparticles having a number average particle size in the range of 3.98 to 5.24 nm and a ratio of the number of particles having a particle size of less than 5 nm to the total number in the range of 64 to 83%. Mixing the first dispersion and the second dispersion such that a dispersion is obtained;
    The manufacturing method of the gold nanoparticle dispersion liquid for conductive film formation containing this.
  6.  個数平均粒径が3.98~5.24nmの範囲にあり、全個数に対する粒径5nm未満の粒子の個数の比が64~83%の範囲にある金ナノ粒子を含む、導電性塗料組成物。 A conductive coating composition comprising gold nanoparticles having a number average particle size in the range of 3.98 to 5.24 nm and a ratio of the number of particles having a particle size of less than 5 nm to the total number in the range of 64 to 83%. .
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JP2003253310A (en) * 2001-12-28 2003-09-10 Mitsuboshi Belting Ltd Method for manufacturing metallic fine particle
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