WO2014082515A1 - Filtre à résonance de plasmon de surface et procédé de préparation de ce dernier - Google Patents

Filtre à résonance de plasmon de surface et procédé de préparation de ce dernier Download PDF

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Publication number
WO2014082515A1
WO2014082515A1 PCT/CN2013/086045 CN2013086045W WO2014082515A1 WO 2014082515 A1 WO2014082515 A1 WO 2014082515A1 CN 2013086045 W CN2013086045 W CN 2013086045W WO 2014082515 A1 WO2014082515 A1 WO 2014082515A1
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WIPO (PCT)
Prior art keywords
surface plasmon
plasmon filter
annular hollow
metal film
hollow structures
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PCT/CN2013/086045
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English (en)
Chinese (zh)
Inventor
司光远
姜潇潇
谷琼婵
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东北大学
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Publication of WO2014082515A1 publication Critical patent/WO2014082515A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/008—Surface plasmon devices

Definitions

  • the present invention relates to the field of optical functional devices, and in particular to a surface plasmon filter and a method of fabricating the surface plasmon filter. Background technique
  • FIG. 1a The structure of the surface plasmon filter designed by Ebbesen et al. is shown in FIG. 1a: in a 300 nm thick silver film, a slit having a width of 170 nm (ie, a nano slit) is formed, and at the upper end of the nano slit 22, Four slots having different depths are respectively etched on both sides; the four slots on both sides of the nano slit can function as an antenna (ie, a groove antenna) for collecting the light signal transmitted through the nano slit 22, and transmitting the light
  • the peak position of the signal is closely related to the period size of the groove antenna 23. Therefore, by using the groove antennas 23 of different periods, the wavelength of light transmitted through the nano slits 22 can be precisely controlled, thereby achieving the effect of splitting.
  • MIM Metal-Insulator-Metal, abbreviated as MIM
  • MIM Metal-Insulator-Metal, abbreviated as MIM
  • the splitting is performed; the structure is as shown in FIG. 1b, wherein the one-dimensional periodic stack linear grating structure 24 is also wavelength selective for the white light source, and the position of the peak can be precisely controlled by the period of the modulation grating.
  • the researchers in the same research group embedded a similar filter structure into the organic solar cell, and obtained a very good energy capture effect.
  • photonic crystal filters, silicon nanowire filters, and "cross-shaped" filters have been reported, making similar devices fully researched and attracted widespread attention in the scientific community.
  • An object of the present invention is to provide a surface plasmon filter that has a wider range of applications and is more adaptable to non-polarized natural light and a method of fabricating the surface plasmon filter, in view of some or all of the problems in the background art.
  • a surface plasmon filter comprising: a base material and a metal film attached to the base material; and the metal film is provided with a plurality of annular hollow structures.
  • the number of the annular hollow structures is one.
  • the number of the annular hollow structures is plural, and the plurality of annular hollow structures are arranged in an array.
  • the difference between the outer diameter and the inner diameter of each of the annular hollow structures is related to the wavelength of the monochromatic light selectively transmitted by the surface plasmon filter.
  • the difference between the outer diameter and the inner diameter of each of the annular hollow structures is not less than 10 nm and not more than 160 nm.
  • the planar formant of the surface plasmon filter is located in the near infrared band.
  • the metal film is made of gold, silver, a platinum group metal or an aluminum group metal.
  • the base material is quartz or glass.
  • the invention also provides a method for preparing any of the above surface plasmon filters:
  • Step 1 forming a metal film on the base material
  • Step 2 forming a plurality of annular hollow structures on the metal film.
  • the step 2 further includes:
  • a plurality of annular hollow structures are formed on the metal film using a focused ion etching method.
  • the surface plasmon filter provided by the embodiment of the invention solves, for example, a four-slot antenna and a layer stack linear grating by opening a plurality of annular hollow structures on the metal film and utilizing the highly symmetrical characteristics of the annular hollow structure.
  • the polarization sensitivity problem that is common in filters makes the application of filter-like devices wider and more suitable for non-polarized natural light.
  • Figure la is a schematic structural view of a groove antenna type filter in the prior art
  • Figure lb is a schematic structural view of a layer stack linear grating filter in the prior art
  • FIG. 2a is a schematic structural view of a surface plasmon filter according to an embodiment of the present invention
  • FIG. 2b is a plan view of a single nano ring structure of FIG. 2;
  • Figure 2c is a cross-sectional view of the single nanoring structure of Figure 2;
  • FIG. 3a is a schematic view showing a transmission state of a surface plasmon filter according to an embodiment of the present invention
  • FIG. 3b is a scanning electron micrograph of a single nanoring structure in an embodiment of the present invention
  • FIG. 4 is a surface plasmon filter according to an embodiment of the present invention.
  • Schematic diagram of the working principle of the optical device
  • Figure 5a is a schematic view of a nano-ring structure array having different outer diameter and inner diameter difference, dividing a white light into monochromatic light;
  • Figure 5b is an electric field intensity distribution diagram of the surface (upper row) and inner (lower row) of the nanoring structure obtained by simulation of the finite time domain difference method;
  • Figure 6a is an atomic force micrograph of an array of nanoring structures in an embodiment of the present invention.
  • FIG. 6b is a perspective view of a scanning electron microscope of an array of nano-rings in an embodiment of the present invention
  • FIG. 7 is a difference in the composition of the "NEU” using a nano-ring structure, which is different under the illumination of white light.
  • FIG. 8 is a nano-circle in the embodiment of the present invention.
  • the ring structure array filters a bundle of broadband white light sources into monochromatic light.
  • the surface plasmon filter mainly includes a base material 11 and a metal film 21 attached to the base material 11; the metal film 21 is provided with a plurality of annular hollow structures 31 (ie, a nano ring structure)
  • the difference between the outer diameter and the inner diameter of each of the annular hollow structures 31 is related to the wavelength of the monochromatic light selectively transmitted by the surface plasmon filter; since the annular hollow structure 31 is highly symmetrical, the circle
  • the annular hollow structure 31 is still applicable to unpolarized light (such as natural light), thereby solving the polarization sensitivity problem common to both four-slot antennas and layer-stack linear grating filters, making the application of filter-like devices wider.
  • the base material 11 in this embodiment may be quartz, glass or other transparent material;
  • the metal film 21 may be made of any one of metals such as gold, silver, a platinum group metal or an aluminum group metal; in actual production, aluminum or gold is preferred.
  • the above nano ring structure also has another outstanding advantage, that is, a single nano ring structure also has a light splitting function; that is, only one nano ring structure can be used, by controlling the outer diameter and the inner diameter of the nano ring structure.
  • a white light can be divided into monochromatic light; this is because the position of the plasmon resonance peak of the transmission type surface is modulated by controlling the difference between the outer diameter and the inner diameter of the nanoring structure. Rather than adjusting the period of the array of nanoring structures.
  • a plurality of nano ring structures are preferably disposed, and the plurality of nano ring structure arrays are arranged, because when only a single nano ring structure is provided, the transmission area is too small may cause relatively low.
  • the transmission energy; and the plurality of nano-ring structures arranged in the array can enhance the overall transmission effect of the surface plasmon filter, and the light intensity distribution of the emitted light is relatively uniform.
  • the surface plasmon filter provided by the present invention can be used for various purposes; for example, when the nano ring structure in the filter is embedded in a surface plasmon type solar cell, the polarization state of the nano ring structure to the incident light Insensitivity can allow more energy to be captured during the photoelectric conversion process, thereby greatly increasing the photoelectric conversion efficiency of the solar cell.
  • the spectroscopic mechanism of the nano-ring structure is different from the groove antenna of the periodic structure and the layered linear grating, a single nano-ring structure can have a filtering effect, so the filter can realize ultra-small pixels (less than 1). Micron), therefore, provides powerful technical support for maximizing resolution in displays of the same shape and size.
  • the invention also provides a method for preparing any of the above surface plasmon filters; the preparation method of the surface plasmon filter mainly comprises the following steps:
  • Step 1 forming a metal film on the base material;
  • the base material in this embodiment may be quartz, glass or other transparent material;
  • the metal film may be made of any one of metal such as gold, silver or aluminum;
  • Step 2 forming a plurality of annular hollow structures on the metal film; for example:
  • a focused ion etching method Using a focused ion etching method, a plurality of annular hollow structures are formed on the metal film; the focused ion beam etching method is irreplaceable compared to other methods of forming an annular hollow structure.
  • the advantages For example, compared to electrons and solids, ions have less scattering effect in solids and can etch at less than 50 nanometers at faster write speeds. Therefore, focused ion beam etching is an ideal for nanofabrication. method.
  • another advantage of the focused ion beam etching method is that maskless implantation can be performed under the control of a computer, or even a development-free etching can be performed, thereby directly fabricating various nano device structures.
  • the sidewall of the surface plasmon filter can be perpendicularized by rotating the etching table to a certain angle.
  • the oblique view of the scanning electron microscope shown in Fig. 6b shows that the nanoring structure prepared in this embodiment has a relatively uniform sidewall and a relatively smooth device surface, and the atomic force micrograph shown in Fig. 6a.
  • the surface of the nanoring structure shown is consistent.
  • the focused ion beam etching method has great freedom to fabricate nanodevices of almost any shape and type. As shown in FIG. 7 , the word “NEU" (Northeastern University) composed of a nano ring structure is used; FIG.
  • the nano ring structure array in the embodiment of the present invention filters a bundle of broadband white light sources into monochromatic light.
  • focused ion beam etching can also be used to fabricate a variety of devices such as nanopillars, nanotips, and nanoarms, making it possible to produce more nanometer-scale optical and electronic devices.
  • the theoretical simulation and calculation are firstly taken by the finite-time difference method to specify the direction for the preparation and testing of the experimental surface plasmon filter, and the optimal parameter design is realized. Then, the designed surface plasmon filter is prepared experimentally, and the surface plasmon filter is tested and analyzed.
  • the research process in this embodiment is complete and sufficient, and the prepared preparation method is easy to implement. The cost is very low, and the test method is perfect, which can complete the comprehensive analysis and evaluation of the surface plasmon filter.
  • the surface plasmon filter operates in a transmissive state, and when a ray emitted from the illuminating light source 41 is incident from the substrate direction to the surface of the device, the other side of the device is realized.
  • the light is split, and a collection and analysis device 42 is provided on the side to collect and analyze the transmitted optical signal.
  • the surface plasmon filter in this embodiment can realize ultra-small pixels; specifically, the nanometer in FIG. 3b
  • the outer diameter of the ring structure is 450 nanometers and the inner diameter is 400 nanometers, which enables splitting in a size range of less than 1 micron (at the same time, Apple's iPhone4 has a pixel size of only 78 microns).
  • the working principle of the surface plasmon filter in this embodiment is shown in FIG. 4: that is, using a fixed nano-ring structure array period, and only changing the difference between the outer diameter and the inner diameter of the nano-ring structure to adjust the transmission type resonance and At the same time, by controlling the period of the nano-ring structure array, it is large enough to make the planar formant in the near-infrared band to avoid interference with the transmission-type resonance mode in the visible light band, and finally prepare A surface plasmon filter is emitted.
  • a coaxial nano-ring structure with a fixed period of 1200 nm and a difference between the outer diameter and the inner diameter in the range of 10 nm to 160 nm can be used to divide a broadband white light source into different Monochromatic light of color; It is apparent from Fig. 4 that the nanoring structure has a significant enhancement in the electric field distribution at the surface when resonance occurs (760 nm) compared to when resonance does not occur (640 nm).
  • a broadband white light source can be filtered into a monochromatic light. , as shown in Figure 5a.
  • the field strength distribution map of the ring surface and its internal space can be simulated and simulated in the case of resonance occurrence and non-occurrence; as shown in Figure 5b, it can be seen that When the resonance occurs (the left column), the maximum field strength is effectively increased by about 50 times than when the resonance does not occur (the right column); at the same time, it can be seen from the top view (upper row) or the cross-sectional view (lower row).
  • the energy of the light can be well confined in the nano-ring structure region, that is to say, the surface plasmon filter provided by the embodiment has little loss and relatively high transmission efficiency.
  • the present invention can improve the spectroscopic effect of the surface plasmon filter and maximize the performance and transmission efficiency of the surface plasmon filter; and solve the existence of other types of existing filter devices in the prior art. Polarization sensitivity issues and the inability to maximize transmission Problem.
  • the surface plasmon filter provided by the invention can be widely applied in the fields of imaging, display and filtering, and has great advantages such as good compatibility and high resolution of the surface plasmon filter, so it has a very broad development. Space and great development potential.
  • the surface plasmon filter uses precious metals as a raw material, the final structure is very stable and has an extremely long service life; especially when gold (Au) is used as a very stable and non-oxidizable material.
  • the surface plasmon filter will always work as long as there is no artificial damage.
  • the surface plasmon filter provided by the present invention mainly works in the visible light band; but only by changing the structural parameters of the surface plasmon filter (such as the outer diameter and the inner diameter difference of the nano ring structure, The array period and shape, etc. can be moved to the near-infrared band to prepare a near-infrared spectrum analyzer.
  • a near-infrared spectrum analyzer has good performance and can accurately reproduce various saved data. advantage.
  • the surface plasmon filter of the present invention is compatible with the working principle of the existing liquid crystal display panel, Therefore, the surface plasmon filter is very useful in the field of display technology; for example, taking the iPhone 4 product of Apple Inc. as an example, the retina imaging technology (Retina) used is compared with the conventional display technology used in its early products.
  • Retina retina imaging technology
  • the entire screen has a very high pixel density (Pixels Per Inch, abbreviated as PPI), which compresses the resolution of 960 640 into a 3.5-inch display; for the nano-rings of the present invention
  • PPI Pixel Per Inch
  • the minimum pixel can reach less than 1 micron, so the pixel density can be further significantly increased for the same size screen, so it can provide powerful technical support for maximizing resolution in the same shape and size of the display.
  • the surface plasmon filter provided by the embodiment of the invention is provided on the metal film.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
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  • Nanotechnology (AREA)
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Abstract

La présente invention se rapporte au domaine technique des dispositifs optiques. L'invention porte sur un filtre à résonance de plasmon de surface et sur un procédé de préparation de ce dernier. Le filtre à résonance de plasmon de surface comprend : un matériau de base (11) ; un film métallique (21) fixé au matériau de base ; le film de métallique comprend une pluralité de structures creuses annulaires (31). Le fait d'agencer une pluralité de structures creuses annulaires sur le film métallique et d'utiliser le degré de symétrie élevé de ladite structure permet au filtre à résonance de plasmon de surface de résoudre le problème de la sensibilité de polarisation des filtres qui comportent des antennes à fente (23) et des réseaux linéaires empilés par couches (24) et, de ce fait, donne à de tels filtres une portée plus importante de l'application et leur permet de mieux s'adapter à la lumière naturelle non polarisée.
PCT/CN2013/086045 2012-11-13 2013-10-28 Filtre à résonance de plasmon de surface et procédé de préparation de ce dernier WO2014082515A1 (fr)

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CN103064147B (zh) * 2013-01-31 2015-12-09 东北大学秦皇岛分校 基于聚焦离子束刻蚀光波导的方法
CN103454710A (zh) * 2013-09-02 2013-12-18 东北大学 一种纳米滤光方法
US10537269B2 (en) 2014-07-15 2020-01-21 Senseonics, Incorporated Integrated optical filter system with low sensitivity to high angle of incidence light for an analyte sensor
FR3030041B1 (fr) 2014-12-12 2017-12-22 Bertin Technologies Sa Dispositif de filtrage optique pour la detection de gaz
CN105552096A (zh) * 2015-12-30 2016-05-04 东南大学—无锡集成电路技术研究所 一种像素内部金属层实施等离子体滤色的图像传感器芯片
CN106125196B (zh) * 2016-08-12 2019-04-09 中国空间技术研究院 一种芯片上可集成的多通道滤波分波器
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CN110702642B (zh) * 2019-10-29 2022-03-18 西南大学 一种微井结构SPRi芯片的制备方法及其产品和应用
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