WO2014066905A3 - Reducing background fluorescence in mems materials by low energy ion beam treatment - Google Patents
Reducing background fluorescence in mems materials by low energy ion beam treatment Download PDFInfo
- Publication number
- WO2014066905A3 WO2014066905A3 PCT/US2013/067126 US2013067126W WO2014066905A3 WO 2014066905 A3 WO2014066905 A3 WO 2014066905A3 US 2013067126 W US2013067126 W US 2013067126W WO 2014066905 A3 WO2014066905 A3 WO 2014066905A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- ion beam
- low energy
- background fluorescence
- energy ion
- reducing background
- Prior art date
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00206—Processes for functionalising a surface, e.g. provide the surface with specific mechanical, chemical or biological properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/483—Physical analysis of biological material
- G01N33/487—Physical analysis of biological material of liquid biological material
- G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
- G01N33/48721—Investigating individual macromolecules, e.g. by translocation through nanopores
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- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biomedical Technology (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Molecular Biology (AREA)
- Manufacturing & Machinery (AREA)
- Biophysics (AREA)
- Medicinal Chemistry (AREA)
- Nanotechnology (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Hematology (AREA)
- Urology & Nephrology (AREA)
- Food Science & Technology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)
- Apparatus Associated With Microorganisms And Enzymes (AREA)
Abstract
Methods for fabricating materials useful for optical detection in microfluidic and nanofluidic devices, such as those used in nanopore-based nucleic acid sequencing are described herein. In certain variations, a method of reducing background fluorescence in a MEMS material may include the step of treating a surface of the MEMS material with a low energy ion beam.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/659,432 US9651539B2 (en) | 2012-10-28 | 2015-03-16 | Reducing background fluorescence in MEMS materials by low energy ion beam treatment |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/662,532 | 2012-10-28 | ||
US13/662,532 US20140335513A9 (en) | 2009-09-30 | 2012-10-28 | Hybrid nanopore device with optical detection and methods of using same |
US201361819606P | 2013-05-05 | 2013-05-05 | |
US61/819,606 | 2013-05-05 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/662,532 Continuation-In-Part US20140335513A9 (en) | 2009-09-30 | 2012-10-28 | Hybrid nanopore device with optical detection and methods of using same |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US14/659,432 Continuation US9651539B2 (en) | 2012-10-28 | 2015-03-16 | Reducing background fluorescence in MEMS materials by low energy ion beam treatment |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2014066905A2 WO2014066905A2 (en) | 2014-05-01 |
WO2014066905A3 true WO2014066905A3 (en) | 2015-07-16 |
Family
ID=50545510
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2013/067126 WO2014066905A2 (en) | 2012-10-28 | 2013-10-28 | Reducing background fluorescence in mems materials by low energy ion beam treatment |
Country Status (1)
Country | Link |
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WO (1) | WO2014066905A2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107109472B (en) * | 2014-10-10 | 2021-05-11 | 昆塔波尔公司 | Nanopore-based polymer analysis using mutually quenching fluorescent labels |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9121843B2 (en) | 2007-05-08 | 2015-09-01 | Trustees Of Boston University | Chemical functionalization of solid-state nanopores and nanopore arrays and applications thereof |
US9651539B2 (en) | 2012-10-28 | 2017-05-16 | Quantapore, Inc. | Reducing background fluorescence in MEMS materials by low energy ion beam treatment |
AU2014268322B2 (en) | 2013-05-24 | 2019-01-24 | Quantapore, Inc. | Nanopore-based nucleic acid analysis with mixed FRET detection |
AU2015335616B2 (en) | 2014-10-24 | 2019-09-12 | Quantapore, Inc. | Efficient optical analysis of polymers using arrays of nanostructures |
WO2017123647A1 (en) | 2016-01-15 | 2017-07-20 | Quantapore, Inc. | Optically-based nanopore analysis with reduced background |
JP2019513387A (en) * | 2016-04-14 | 2019-05-30 | クアンタポール, インコーポレイテッド | Mixed optical signals in polymer analysis using nanopores |
WO2018009346A1 (en) | 2016-07-05 | 2018-01-11 | Quantapore, Inc. | Optically based nanopore sequencing |
CN109811046A (en) * | 2019-01-18 | 2019-05-28 | 广东工业大学 | A kind of three layers of nano-pore structure and the preparation method and application thereof that size is controllable |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020025529A1 (en) * | 1999-06-28 | 2002-02-28 | Stephen Quake | Methods and apparatus for analyzing polynucleotide sequences |
US20020034762A1 (en) * | 1998-05-27 | 2002-03-21 | Vysis, Inc., A Delaware Corporation | Biological assays for analyte detection |
US20040002089A1 (en) * | 2000-08-29 | 2004-01-01 | Benoit Dubertret | Methods employing fluorescence quenching by metal surfaces |
US20040137158A1 (en) * | 2003-01-15 | 2004-07-15 | Kools Jacques Constant Stefan | Method for preparing a noble metal surface |
US20090148348A1 (en) * | 2005-08-11 | 2009-06-11 | Eksigent Technologies, Llc | Plastic surfaces and apparatuses for reduced adsorption of solutes and methods of preparing the same |
US20090314939A1 (en) * | 2008-06-20 | 2009-12-24 | Carl Zeiss Smt Inc. | Sample decontamination |
-
2013
- 2013-10-28 WO PCT/US2013/067126 patent/WO2014066905A2/en active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020034762A1 (en) * | 1998-05-27 | 2002-03-21 | Vysis, Inc., A Delaware Corporation | Biological assays for analyte detection |
US20020025529A1 (en) * | 1999-06-28 | 2002-02-28 | Stephen Quake | Methods and apparatus for analyzing polynucleotide sequences |
US20040002089A1 (en) * | 2000-08-29 | 2004-01-01 | Benoit Dubertret | Methods employing fluorescence quenching by metal surfaces |
US20040137158A1 (en) * | 2003-01-15 | 2004-07-15 | Kools Jacques Constant Stefan | Method for preparing a noble metal surface |
US20090148348A1 (en) * | 2005-08-11 | 2009-06-11 | Eksigent Technologies, Llc | Plastic surfaces and apparatuses for reduced adsorption of solutes and methods of preparing the same |
US20090314939A1 (en) * | 2008-06-20 | 2009-12-24 | Carl Zeiss Smt Inc. | Sample decontamination |
Non-Patent Citations (4)
Title |
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GALLA ET AL.: "Microfluidic carbon-blackened polydimethylsiloxane device with reduced ultra violet background fluorescence for simultaneous two-color ultra violet/visible- laser induced fluorescence detection in single cell analysis", BIOMICROFLUIDICS, vol. 6, 12 January 2012 (2012-01-12), pages 014104 * |
HSIEH ET AL.: "Effective Enhancement of Fluorescence Detection Efficiency in Protein Microarray Assays: Application of a Highly Fluorinated Organosilane as the Blocking Agent on the Background Surface by a Facile Vapor-Phase Deposition Process", ANAL. CHEM., vol. 81, 2009, pages 7908 - 7916 * |
LEE ET AL.: "High aspect ratio polymer microstructures and cantilevers for bioMEMS using low energy ion beam and photolithography", SENSORS AND ACTUATORS A, vol. 71, 1998, pages 144 - 149 * |
LU ET AL.: "PARYLENE BACKGROUND FLUORESCENCE STUDY FOR BIOMEMS APPLICATIONS", TRANSDUCERS, 21 June 2009 (2009-06-21), DENVER, CO, USA, pages 178 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107109472B (en) * | 2014-10-10 | 2021-05-11 | 昆塔波尔公司 | Nanopore-based polymer analysis using mutually quenching fluorescent labels |
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Publication number | Publication date |
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WO2014066905A2 (en) | 2014-05-01 |
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