WO2014064492A1 - Change-over device for adjustable optical mounts and a system comprising such devices - Google Patents

Change-over device for adjustable optical mounts and a system comprising such devices Download PDF

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Publication number
WO2014064492A1
WO2014064492A1 PCT/IB2012/057373 IB2012057373W WO2014064492A1 WO 2014064492 A1 WO2014064492 A1 WO 2014064492A1 IB 2012057373 W IB2012057373 W IB 2012057373W WO 2014064492 A1 WO2014064492 A1 WO 2014064492A1
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WO
WIPO (PCT)
Prior art keywords
change
over device
optical
rotor
mounts
Prior art date
Application number
PCT/IB2012/057373
Other languages
French (fr)
Inventor
Andrius Melninkaitis
Mindaugas SCIUKA
Original Assignee
Lidaris, Uab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Lidaris, Uab filed Critical Lidaris, Uab
Publication of WO2014064492A1 publication Critical patent/WO2014064492A1/en

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003Alignment of optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/14Mountings, adjusting means, or light-tight connections, for optical elements for lenses adapted to interchange lenses
    • G02B7/16Rotatable turrets
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1822Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis

Definitions

  • the invention relates to opto-mechanical devices or arrangements using movable adjustable optical elements for controlling optical parameters, such as the reflection, transmission, intensity or fluence, color or spectrum, phase, polarization or light propagation direction. More specifically it relates to universal control of laser source radiation by means of easily interchangeable and adjustable optical elements of any type.
  • Laser based irradiation sources are often used for research and industrial applications.
  • a number of various optical devices or elements e.g. lenses, mirrors, polarizers
  • Such devices and elements are placed and aligned precisely within a beam-line, with respect to the incident beam of laser radiation otherwise it might have negative influence on optical alignment of the optical system, process repeatability or cause damage.
  • Holders that are capable of holding multiple optical elements and arranged for swift changing between them, are used in order to simplify the reconfiguration an optical system.
  • the PCT patent application JP11194259 (A) published on 21 -07-1999 describes a technique to incline an arbitrary optical element at an arbitrary angle by providing an inclination mechanism inclining the optical element which is selected and inserted onto an optical axis based on the optical axis.
  • a plurality of filters as optical elements are arranged on a turret member on an almost same circumference with a turret rotary axis as a center.
  • the filter which is selected and inserted onto the optical axis among the filters is provided so that it can incline based on the optical axis by the inclination mechanism. Namely, the filter is held by a body.
  • a pair of supporting axes are protrusively provided for the frame body and supporting axes support the filter so that it can freely turn.
  • the supporting axes follow the tangent direction of a circle with the turret rotary axis as the center and the filter turns with the supporting axes following the tangent direction as the center. Thus, it inclines based on the optical axis.
  • a turn mechanism turning the filter to a prescribed angle with the supporting axes as the center is provided for the inclination mechanism.
  • Prior art inventions describe solutions, where revolving turrets are used as change-over devices for specific optical elements to increase the flexibility and functionality of a given optical system.
  • the described solutions are limited to a single type and size of an optical element.
  • the planes of the optical elements are not adjustable with precision and sufficient travel range in order to meet requirements of reconfigurable optical paths, such as multiple wavelength radiation of single or several radiation sources, as well as imaging systems.
  • they are designed to be arranged only in specific devices, such as microscopes. This greatly limits the range of available applications, for example, could not be adapted to make a reconfigurable optical path for complex laser systems having several different wavelength radiation sources.
  • this invention provides a universal change-over device capable of holding, precisely adjusting and bringing one or more optical elements or their adjustable combinations into an optical path used for one or more different wavelength or polarization laser beams or radiation of other light sources.
  • Said optical elements are mounted on optical mounts with at least two degrees of freedom, i.e. two adjustable directions, and are tunable, based on radiation parameters of multiple light radiation sources, such as beam direction, spectra, beam structure and shape and many others. Later the optical path can be swiftly modified for desired wavelength or other radiation parameters by changing element positions by means of rotation or linear translation.
  • Such method and apparatus reduce the time required for repeatedly readjusting an optical system.
  • the device consist of a rotor part (1 ) and multiple adjustable optical mounts (2) designed to hold individual optical elements.
  • the rotor part (1 ) has multiple slots that are designed for attaching the mounts (2).
  • Each mount's tilt is precisely adjusted at least in two spatial directions by two fine adjustment screws (4) or micro actuators arranged on the rotor (1 ).
  • the rotor (1 ) is placed on an axis (9), which enables rotation in two directions so that switching between optical elements could be performed, either trough indexed positions having position fixing element (stopping means) or arbitrary positions controlled manually or in a motorized way.
  • the axis can be mounted on post (10) unit. Rotation of the rotor is performed by hand or by connecting the rotor's axis to a motor or another kind of actuator.
  • a number of such change-over devices can be combined in various configurations in order to build more complex optical devices, such as beam attenuators, splitters, guiding systems, etc.
  • a linear translation action is used to bring the optical element onto the optical axis during switching.
  • This is achieved by using a linear translation stage (15) with a platform(16) designed for mounting one or more manually or machine-driven adjustable mounts (2).
  • the optical mounts (2) require a supporting part (17), which is directly attached to the platform (16).
  • the translation stage can be optionally fitted with a motor (18).
  • Both rotor unit (1 ) or linear translation platform (16) feature stopping means, arranged to lock said movable parts (1 , 12, 16) in stable and repeatable positions.
  • stopping means arranged to lock said movable parts (1 , 12, 16) in stable and repeatable positions.
  • the same principle can be applied also in the configuration were no indexed fixing is used.
  • Figure 1 illustrates an isometric view of the rotating change-over device.
  • Figure 2. illustrates a side view of the rotating change-over device.
  • Figure 3 illustrates an isometric front view of the two-rotor system.
  • Figure 4. illustrates an isometric rear/back view of the two-rotor system.
  • Figure 5 illustrates a front view of the two-rotor system.
  • Figure 6. illustrates a rear view of the two-rotor system.
  • Figure 7. illustrates the translation stage based change-over device.
  • the most preferred embodiment of the present invention is a universal change-over device capable of bringing one ar more optical elements into an optical path used for one or more different wavelength laser beams.
  • the device consists of a moving part, such as a rotor (1 ) or a linear translation platform (16), and individual mounts (2) designed to hold individual optical elements, such as mirrors, polarizers and/or elements that principally do not require precise positioning, such as filters, but their placement requires avoiding of surface reflections.
  • the rotor part (1 ) has more than one slot, designed to hold said mounts (2).
  • Each mount's tilt is precisely adjusted in two spatial directions by two fine adjustment screws (4) arranged on the rotor (1 ) or intermediate supporting parts (17).
  • the mount (2) is arranged in such a way that it rests on three support points (5, 6), two of which are tips (5) of said fine adjustment screws (4), the third being preferably a stationary bolt (6).
  • the rotor (1 ) is mounted on an axis (9), which, optionally, can be mounted on a pivot unit (not indicated in the drawings).
  • the rotor (1 ) is rotated manually by hand or by means of a stepping motor.
  • translation is performed manually or by means of a stepping motor.
  • the rotor unit (1 ) or the linear translation platform (16) preferably feature stopping means, arranged to lock said movable parts (1 , 16) in stable and repeatable positions.
  • position feedback systems are provided for repeatable positioning in predetermined positions.
  • the optical mounts (2) are held close to the rotor (1 , 12) by means of springs (7) or magnets (not indicated in the drawings).
  • springs (7) or magnets (not indicated in the drawings).
  • the tips (5) of fine adjustment screws and stationary bolts (6) can be magnetic.
  • springs (7) both ends of a spring are provided with stopping means (14), which rest to the edges of holes inside the rotor (1 , 12).
  • the whole rotor assembly is attached to a height- adjustable post (10), which is further fastened to a base plate (11 ).
  • the adjustable mounts (2) rest on micro actuators, such as piezo stages, microstep motors, pneumatic or hydraulic stages or similar. Such fastening allows remote angular adjustment of said mounts (2).
  • the change-over device comprises multiple turretlike rotor units (1 , 12) in order to make a system, where several optical elements are placed in the optical path, one after another.
  • An example of such embodiment could be a laser beam power attenuator.
  • Such device is fitted with two rotor parts (1 , 12), whereas the optical mounts (2) are used for holding thin film, Brewster type, birefringent prism or other types of polarizers.
  • the second rotor (12) has a central cut (19) to allow passing of the laser beam in order to access the optical elements mounted on the first rotor (1 ).
  • the second rotor (12) is firmly connected with the first rotor (1 ) by multiple cylindrical supports (13) or fixed to the same central shaft (9).
  • One or more polarizers and/or a waveplate are arranged on the optical mounts (2) in configurations corresponding to different wavelengths and power attenuation levels, so that the incident laser beam is attenuated and redirected to a desired direction. Precise placement and adjustment of polarizers is a time-consuming task, therefore this invention allows avoiding routine adjustment work and significantly reduces the volume of the arrangement, as compared to systems of several separate attenuators for different wavelength radiation.
  • the attenuator comprises two two adjustible combined reflective polarizers for every position and a half-wave plate. Pairs of polarizers and waveplates form a set of optical components for a high contrast power attenuator. Each set is designed for certain wavelength and work by spatially separating different polarizations of light at the output, this requires precise angular placement with respect to the incident light. For applications, such as processing of materials, optical breakdown tests, pump probe spectroscopy, require use of different wavelengths in the same optical path and will benefit from this invention.
  • the shifting mechanism is replaced with a linear translation stage (15).
  • the linear translation stage (15) comprises a movable platform (16) with optical mounts (2) attached thereto via a supporting unit (17).
  • a step motor (18) is provided for automation of said change-over device. This arrangement may be used in all the applications mentioned above and further.
  • the linear translation stage-type changeover device is supplemented with at least one additional linear or rotary translation stage (not shown in Figures).
  • Said second translation stage enables switching of another set of optical components, thus complex systems could be arranged. It should be apparent for a person skilled in the art that any combinations of change-over devices, capable of holding tunable optical mounts, can be used to implement sophisticated optical path layouts.
  • said rotating change-over device is arranged for holding multiple non-linear crystals, which are used to modify the wavelength of the incident laser radiation.
  • the crystals are fitted on the optical mounts (2) and adjusted with two fine adjustment screws (4) to match the axis of said non-linear crystals with the direction of the incident one or more beams or otherwise achieve phase matching conditions.
  • the angle of placement of the non-linear crystal is of extreme importance in the wave mixing or parametric amplification processes.
  • the change-over device is arranged to hold a number of mirrors designed to redirect light of different wavelengths to a single working area or to redirect light incoming on a single optical path to different working areas. This enables the use of a single optical path, thus saving space and increasing up-time.
  • one or more change-over devices are fitted with a system of lenses and/or apertures and/or retarders and/or phase plates and/or axicons, designed for spatial light filtering, beam shaping or similar applications. This is relevant for modern research applications, where different and complex kinds of beam profiles are required. Examples include generation of optical vortices, which are used for optical tweezing, generation of Bessel beams, Airy beams, multi-focus beams and many others.
  • the shape of the adjustable mounts (2) corresponds to the circumference shape of an optical component.
  • the number of mounts (2) is not limited as far as those mounts can fit on the movable part, i.e. the rotor (1 , 12) or the platform (16).

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)

Abstract

A change-over opto-mechanical device, which comprises a movable part having plurality of adjustable optical mounts (2) attached thereto. Optical element tilt can be precisely adjusted in at least two spatial directions. The said device can be easily rotated or linearly translated in order to bring the pre-adjusted optical elements in the optical path of a laser beam, thus enabling rapid switching between different optical components, without the need of constant fine realignment. The invention is especially suitable for use in multiple wavelength radiation laser systems using the same optical path or beam line. The movable part can be formed of a turret-like rotating device (1, 12) or a linear translation stage (15).

Description

CHANGE-OVER DEVICE FOR ADJUSTABLE OPTICAL MOUNTS AND A SYSTEM COMPRISING SUCH DEVICES
FIELD OF INVENTION
The invention relates to opto-mechanical devices or arrangements using movable adjustable optical elements for controlling optical parameters, such as the reflection, transmission, intensity or fluence, color or spectrum, phase, polarization or light propagation direction. More specifically it relates to universal control of laser source radiation by means of easily interchangeable and adjustable optical elements of any type.
BACKGROUND OF INVENTION
Laser based irradiation sources are often used for research and industrial applications. In order to achieve precise control of laser radiation parameters, a number of various optical devices or elements (e.g. lenses, mirrors, polarizers) must be used and replaced. Typically such devices and elements are placed and aligned precisely within a beam-line, with respect to the incident beam of laser radiation otherwise it might have negative influence on optical alignment of the optical system, process repeatability or cause damage.
Because of high requirements in precision, the process of optical adjustment tends to be time consuming. Therefore the periodical reconfiguration of the optical path, by replacing or readjusting its components, reduces the up-time of a laser system.
Special holders are required to hold the optical elements in place and adjust their position. Not all holders are easy to place and adjust, thus complicating the process even further.
Holders, that are capable of holding multiple optical elements and arranged for swift changing between them, are used in order to simplify the reconfiguration an optical system.
The PCT patent application JP11194259 (A) published on 21 -07-1999 describes a technique to incline an arbitrary optical element at an arbitrary angle by providing an inclination mechanism inclining the optical element which is selected and inserted onto an optical axis based on the optical axis. A plurality of filters as optical elements are arranged on a turret member on an almost same circumference with a turret rotary axis as a center. The filter which is selected and inserted onto the optical axis among the filters is provided so that it can incline based on the optical axis by the inclination mechanism. Namely, the filter is held by a body. A pair of supporting axes are protrusively provided for the frame body and supporting axes support the filter so that it can freely turn. The supporting axes follow the tangent direction of a circle with the turret rotary axis as the center and the filter turns with the supporting axes following the tangent direction as the center. Thus, it inclines based on the optical axis. A turn mechanism turning the filter to a prescribed angle with the supporting axes as the center is provided for the inclination mechanism.
The PCT patent application US5684624 (A) published on 04-11 -1997 describes a change-over device that has a plurality of centerable reception rings, inserted into a sliding bearing, for optical components. A spring element having a plurality of tongues split in the longitudinal direction is provided in such a way that in each case successive halves of adjacent tongues rest against the rim of a reception ring under spring pressure.
Prior art inventions describe solutions, where revolving turrets are used as change-over devices for specific optical elements to increase the flexibility and functionality of a given optical system. However, the described solutions are limited to a single type and size of an optical element. In addition, the planes of the optical elements are not adjustable with precision and sufficient travel range in order to meet requirements of reconfigurable optical paths, such as multiple wavelength radiation of single or several radiation sources, as well as imaging systems. Also, they are designed to be arranged only in specific devices, such as microscopes. This greatly limits the range of available applications, for example, could not be adapted to make a reconfigurable optical path for complex laser systems having several different wavelength radiation sources.
SUMMARY
In order to eliminate the drawbacks indicated above, this invention provides a universal change-over device capable of holding, precisely adjusting and bringing one or more optical elements or their adjustable combinations into an optical path used for one or more different wavelength or polarization laser beams or radiation of other light sources. Said optical elements are mounted on optical mounts with at least two degrees of freedom, i.e. two adjustable directions, and are tunable, based on radiation parameters of multiple light radiation sources, such as beam direction, spectra, beam structure and shape and many others. Later the optical path can be swiftly modified for desired wavelength or other radiation parameters by changing element positions by means of rotation or linear translation. Such method and apparatus reduce the time required for repeatedly readjusting an optical system.
In the most preferred embodiment the device consist of a rotor part (1 ) and multiple adjustable optical mounts (2) designed to hold individual optical elements. The rotor part (1 ) has multiple slots that are designed for attaching the mounts (2). Each mount's tilt is precisely adjusted at least in two spatial directions by two fine adjustment screws (4) or micro actuators arranged on the rotor (1 ).
The rotor (1 ) is placed on an axis (9), which enables rotation in two directions so that switching between optical elements could be performed, either trough indexed positions having position fixing element (stopping means) or arbitrary positions controlled manually or in a motorized way. The axis can be mounted on post (10) unit. Rotation of the rotor is performed by hand or by connecting the rotor's axis to a motor or another kind of actuator.
A number of such change-over devices can be combined in various configurations in order to build more complex optical devices, such as beam attenuators, splitters, guiding systems, etc.
Yet in another preferred embodiment, a linear translation action is used to bring the optical element onto the optical axis during switching. This is achieved by using a linear translation stage (15) with a platform(16) designed for mounting one or more manually or machine-driven adjustable mounts (2). The optical mounts (2) require a supporting part (17), which is directly attached to the platform (16). The translation stage can be optionally fitted with a motor (18).
Both rotor unit (1 ) or linear translation platform (16) feature stopping means, arranged to lock said movable parts (1 , 12, 16) in stable and repeatable positions. However, the same principle can be applied also in the configuration were no indexed fixing is used.
DESCRIPTION OF DRAWINGS
In order to understand the invention better, and appreciate its practical applications, the following pictures are provided and referenced hereafter. Figures are given as examples only and in no way shall limit the scope of the invention. Figure 1. illustrates an isometric view of the rotating change-over device.
Figure 2. illustrates a side view of the rotating change-over device.
Figure 3. illustrates an isometric front view of the two-rotor system.
Figure 4. illustrates an isometric rear/back view of the two-rotor system.
Figure 5. illustrates a front view of the two-rotor system.
Figure 6. illustrates a rear view of the two-rotor system.
Figure 7. illustrates the translation stage based change-over device.
DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS
The most preferred embodiment of the present invention is a universal change-over device capable of bringing one ar more optical elements into an optical path used for one or more different wavelength laser beams. The device consists of a moving part, such as a rotor (1 ) or a linear translation platform (16), and individual mounts (2) designed to hold individual optical elements, such as mirrors, polarizers and/or elements that principally do not require precise positioning, such as filters, but their placement requires avoiding of surface reflections. The rotor part (1 ) has more than one slot, designed to hold said mounts (2). Each mount's tilt is precisely adjusted in two spatial directions by two fine adjustment screws (4) arranged on the rotor (1 ) or intermediate supporting parts (17). The mount (2) is arranged in such a way that it rests on three support points (5, 6), two of which are tips (5) of said fine adjustment screws (4), the third being preferably a stationary bolt (6). The rotor (1 ) is mounted on an axis (9), which, optionally, can be mounted on a pivot unit (not indicated in the drawings). The rotor (1 ) is rotated manually by hand or by means of a stepping motor. Correspondingly, in case of the linear translation platform (16), translation is performed manually or by means of a stepping motor. If used without the step motor (18), both, the rotor unit (1 ) or the linear translation platform (16) preferably feature stopping means, arranged to lock said movable parts (1 , 16) in stable and repeatable positions. In case a step motor (18) is arranged, position feedback systems are provided for repeatable positioning in predetermined positions.
Yet in another embodiment, the optical mounts (2) are held close to the rotor (1 , 12) by means of springs (7) or magnets (not indicated in the drawings). In case of magnets, the tips (5) of fine adjustment screws and stationary bolts (6) can be magnetic. In case of springs (7), both ends of a spring are provided with stopping means (14), which rest to the edges of holes inside the rotor (1 , 12).
Yet in another embodiment, the whole rotor assembly is attached to a height- adjustable post (10), which is further fastened to a base plate (11 ).
Yet in another embodiment, the adjustable mounts (2) rest on micro actuators, such as piezo stages, microstep motors, pneumatic or hydraulic stages or similar. Such fastening allows remote angular adjustment of said mounts (2).
Yet in another embodiment, the change-over device comprises multiple turretlike rotor units (1 , 12) in order to make a system, where several optical elements are placed in the optical path, one after another. An example of such embodiment could be a laser beam power attenuator. Such device is fitted with two rotor parts (1 , 12), whereas the optical mounts (2) are used for holding thin film, Brewster type, birefringent prism or other types of polarizers. The second rotor (12) has a central cut (19) to allow passing of the laser beam in order to access the optical elements mounted on the first rotor (1 ). The second rotor (12) is firmly connected with the first rotor (1 ) by multiple cylindrical supports (13) or fixed to the same central shaft (9). One or more polarizers and/or a waveplate, are arranged on the optical mounts (2) in configurations corresponding to different wavelengths and power attenuation levels, so that the incident laser beam is attenuated and redirected to a desired direction. Precise placement and adjustment of polarizers is a time-consuming task, therefore this invention allows avoiding routine adjustment work and significantly reduces the volume of the arrangement, as compared to systems of several separate attenuators for different wavelength radiation.
Yet in another embodiment, the attenuator comprises two two adjustible combined reflective polarizers for every position and a half-wave plate. Pairs of polarizers and waveplates form a set of optical components for a high contrast power attenuator. Each set is designed for certain wavelength and work by spatially separating different polarizations of light at the output, this requires precise angular placement with respect to the incident light. For applications, such as processing of materials, optical breakdown tests, pump probe spectroscopy, require use of different wavelengths in the same optical path and will benefit from this invention.
Yet in another preferred embodiment, the shifting mechanism is replaced with a linear translation stage (15). The linear translation stage (15) comprises a movable platform (16) with optical mounts (2) attached thereto via a supporting unit (17). Optionally, a step motor (18) is provided for automation of said change-over device. This arrangement may be used in all the applications mentioned above and further.
Yet in another preferred embodiment, the linear translation stage-type changeover device is supplemented with at least one additional linear or rotary translation stage (not shown in Figures). Said second translation stage enables switching of another set of optical components, thus complex systems could be arranged. It should be apparent for a person skilled in the art that any combinations of change-over devices, capable of holding tunable optical mounts, can be used to implement sophisticated optical path layouts.
Yet in another embodiment, said rotating change-over device is arranged for holding multiple non-linear crystals, which are used to modify the wavelength of the incident laser radiation. The crystals are fitted on the optical mounts (2) and adjusted with two fine adjustment screws (4) to match the axis of said non-linear crystals with the direction of the incident one or more beams or otherwise achieve phase matching conditions. The angle of placement of the non-linear crystal is of extreme importance in the wave mixing or parametric amplification processes.
Yet in another embodiment, the change-over device is arranged to hold a number of mirrors designed to redirect light of different wavelengths to a single working area or to redirect light incoming on a single optical path to different working areas. This enables the use of a single optical path, thus saving space and increasing up-time.
Yet in another embodiment, one or more change-over devices are fitted with a system of lenses and/or apertures and/or retarders and/or phase plates and/or axicons, designed for spatial light filtering, beam shaping or similar applications. This is relevant for modern research applications, where different and complex kinds of beam profiles are required. Examples include generation of optical vortices, which are used for optical tweezing, generation of Bessel beams, Airy beams, multi-focus beams and many others.
The shape of the adjustable mounts (2) corresponds to the circumference shape of an optical component. The number of mounts (2) is not limited as far as those mounts can fit on the movable part, i.e. the rotor (1 , 12) or the platform (16).
There are more applications that require precise placement and frequent replacement of optical elements and this invention can be used separately or in combination with other optical devices.

Claims

1. A change-over device for switching between optical components, c h a r a c t e r i z e d in that said change-over device comprises two or more tunable optical mounts attached to at least one moving part (1, 12, 16), said optical mounts can be tuned in at least two directions.
2. The change-over device according to claim 1, c h a r a c t e r i z e d in that said at least one moving part is arranged as a rotating member (1, 12).
3. The change-over device according to claim 1, c h a r a c t e r i z e d in that said at least one moving part is arranged as a linear translation member (16).
4. The change-over device according to one of the claims 1 to 2, c h a r a c t e r i z e d in that said at least one rotating member (1, 12) is a turret-like device comprising a rotor (1, 12) and an axial shaft (9).
5. The change-over device according to claim 4, c h a r a c t e r i z e d in that the rotor (1 , 12) is arranged to be rotated by means of an electric motor.
6. The change-over device according to claim 4, c h a r a c t e r i z e d in that the rotor (1, 12) is arranged to be rotated by hand and further comprises stopping means for locking the rotor in predetermined positions.
7. The change-over device according to one of the claims 1 to 6, c h a r a c t e r i z e d in that the adjustable mounts (2) are supported against the moving part (1, 12) or an adapter (17) attached thereto by at least three supporting units.
8. The change-over device according to one of the claims 1 to 7, c h a r a c t e r i z e d in that said supporting units comprise at least two fine adjustment screws (4) and/or a stationary bolt (6).
9. The change-over device according to one of the claims 1 to 7, c h a r a c t e r i z e d in that said supporting units comprise at least two micro actuators.
10. The change-over device according to claim 3, c h a r a c t e r i z e d in that the linear translation member is a platform (16) arranged on a linear translation stage (15).
11. The change-over device according to one of the claims 1, 3 or 10, c h a r a c t e r i z e d in that said linear translation stage (15) is a motorized translation stage.
12. A system comprising a single optical path for delivery of multiple wavelength radiation to a working area, c h a r a c t e r i z e d in that one or more change-over devices according to one of the claims 1 to 11 are arranged in said optical path.
13. The system according to the claim 12, c h a r a c t e r i z e d in that said system is arranged as a optical power attenuator or a laser material processing system, or a beam shaping system, or a spectroscopy system, or a light induced damage threshold testing system, or a beam steering system, or a beam splitting system.
PCT/IB2012/057373 2012-10-22 2012-12-17 Change-over device for adjustable optical mounts and a system comprising such devices WO2014064492A1 (en)

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LT2012095A LT6046B (en) 2012-10-22 2012-10-22 Change-over device for adjustable optical mounts and a system comprising such devices

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US11130701B2 (en) 2016-09-30 2021-09-28 Corning Incorporated Apparatuses and methods for laser processing transparent workpieces using non-axisymmetric beam spots
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US11542190B2 (en) 2016-10-24 2023-01-03 Corning Incorporated Substrate processing station for laser-based machining of sheet-like glass substrates
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US10688599B2 (en) 2017-02-09 2020-06-23 Corning Incorporated Apparatus and methods for laser processing transparent workpieces using phase shifted focal lines
US11078112B2 (en) 2017-05-25 2021-08-03 Corning Incorporated Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same
US11062986B2 (en) 2017-05-25 2021-07-13 Corning Incorporated Articles having vias with geometry attributes and methods for fabricating the same
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US10626040B2 (en) 2017-06-15 2020-04-21 Corning Incorporated Articles capable of individual singulation
US11554984B2 (en) 2018-02-22 2023-01-17 Corning Incorporated Alkali-free borosilicate glasses with low post-HF etch roughness
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