WO2014021212A1

WO2014021212A1 - Manufacturing method for actuator device, and actuator device

Info

Publication number: WO2014021212A1
Application number: PCT/JP2013/070304
Authority: WO
Inventors: 守伯尾崎; 井上　二郎
Original assignee: 株式会社村田製作所
Priority date: 2012-07-31
Filing date: 2013-07-26
Publication date: 2014-02-06
Also published as: JPWO2014021212A1

Abstract

Provided is a manufacturing method for an actuator device whereby different pitches of electrode patterns on external circuit boards of various kinds can be easily accommodated and the cost can be drastically reduced. This method is for manufacturing an actuator device (1) wherein a metal terminal (71) is electrically connected to a driving component (10) of an actuator (3). In the manufacturing method for the actuator device (1), connection sections (71a, 71d) of the metal terminal (71) are electrically connected to the driving component (10), and among multiple terminal sections (71g1, 71h1) of the metal terminal (71), at least one terminal section (71g1, 71h1) to be connected to an external circuit is left untouched, and the remaining terminal sections (71g1, 71h1) are cut off or bent in a direction different from the direction the at least one terminal section extends in order to make the remaining terminal sections shorter than the extending length of the at least one terminal section (71g1, 71h1).

Description

Actuator device manufacturing method and actuator device

The present invention relates to a method for manufacturing an actuator device having a metal terminal connected to an external circuit, and the actuator device.

Conventionally, an actuator using a piezoelectric element is known as a small actuator. An example of an actuator using a piezoelectric element is described in Patent Document 1 below. In the actuator described in Patent Document 1, when the electromechanical conversion element expands and contracts in the length direction, the drive friction member connected to the end portion in the length direction of the electromechanical conversion element vibrates in the length direction. The engagement member engaged with the drive friction member moves relative to the drive friction member in the length direction along with the vibration in the length direction of the drive friction member. Therefore, in the actuator described in Patent Document 1, the expansion / contraction direction of the electromechanical conversion element is parallel to the moving direction of the engagement member, that is, the driving force generation direction.

Further, Patent Document 2 below discloses an example of a VCM type driving device. The principal part of the drive device 101 described in Patent Document 2 is shown in an exploded perspective view in FIG. In the driving device 101, a VCM driving element 103 is mounted on the case substrate 102. The drive element 103 is electrically connected to

terminals

106 and 107 by

lead wires

104 and 105. The terminal 106 and the terminal 107 are portions that are electrically connected to the electrode pattern of the external circuit board. The

terminals

106 and 107 are disposed so as to extend below the case substrate 102 and in parallel with each other.

Japanese Patent No. 4154551 JP 2011-059274 A

In the actuator described in Patent Document 1, in order to increase the amount of displacement, the length in the vibration direction of the electromechanical transducer must be increased. Therefore, the dimension in the vibration direction cannot be reduced.

In the actuator described in Patent Document 1, a plurality of terminals are extended outside the actuator in order to electrically connect the electromechanical conversion element to the outside.

Similarly, in the driving device 101 described in Patent Document 2, the

terminals

106 and 107 described above are provided for electrical connection with the outside.

Incidentally, the

terminals

106 and 107 are connected to an electrode pattern of an external circuit board. Therefore, it is necessary to match the pitch between the

terminals

106 and 107 with the pitch between the electrode patterns on the circuit board.

However, there are various external circuit boards to which actuator devices such as the drive device 101 are connected. Therefore, in the conventional actuator device, the pitch of the plurality of terminals of the actuator device has to be changed in accordance with the pitch of the electrode pattern of the external circuit board to be connected. Therefore, in order to cope with various external circuit boards, various actuator devices in which a plurality of terminals are arranged at various pitches must be prepared. Therefore, in order to manufacture a conventional actuator device, various dies must be prepared according to the pitch of a plurality of terminals. Also, the production process tends to increase. Therefore, there is a problem that the cost becomes high.

In addition, it can be considered that a terminal made of a metal material having further excellent flexibility is used instead of the terminal made of a metal plate. For example, when a lead wire is used, the lead wire can be easily deformed. Therefore, it is easy to change the pitch between the lead wires. However, it is necessary to join the end portion of the lead wire to the drive element and adjust the position of the lead wire itself. Therefore, the positioning and joining processes tend to increase. Further, there is a possibility that the lead wire of the extra length portion contacts another member and is electrically short-circuited.

An object of the present invention is to provide a method of manufacturing an actuator device that can easily cope with the pitch between electrode patterns of various external circuit boards and can greatly reduce the cost, and the actuator device.

The actuator device manufacturing method according to the present invention includes a drive element that expands and contracts along a first direction, and is connected to the drive element. The expansion and contraction force along the first direction of the drive element is applied to the first direction. An actuator having a conversion member that converts a drive force along a second direction perpendicular to the actuator, a drive shaft fixed to the conversion member and extending in the second direction, and electrically connected to the drive element of the actuator And a metal terminal having a plurality of terminal portions connected to an external circuit for driving the drive element. In the present invention, the step of electrically connecting the connection portion of the metal terminal to the driving element, and at least one terminal portion connected to an external circuit among the plurality of terminal portions of the metal terminal is left, and the remaining terminals A step of cutting or bending the portion in a direction different from the direction in which at least one terminal portion extends to shorten the length of the remaining terminal portion beyond the length in the direction in which at least one terminal portion extends. Yes.

In a specific aspect of the method for manufacturing an actuator device according to the present invention, the metal terminal has a strip-shaped metal plate portion connected to the connection portion, and a plurality of the metal terminals extend in parallel with each other from the edge of the strip-shaped metal plate portion. Terminal portions are provided. In this case, since the plurality of terminal portions extend in parallel with each other from the edge of the strip-shaped metal plate portion, the remaining terminal portions excluding at least one terminal portion among the plurality of terminal portions are easily cut. be able to. Further, the remaining terminal portions can be easily bent in a direction different from the direction in which at least one terminal portion extends.

In another specific aspect of the method for manufacturing an actuator device according to the present invention, the connection portion is connected to the strip-shaped metal plate portion so as to be a spring terminal portion having spring properties with respect to the strip-shaped metal plate portion. In this case, the connection portion can be reliably electrically connected to the drive element. Moreover, the vibration transmitted by the connection part which consists of a spring terminal part can be suppressed by a strip | belt-shaped metal plate part. Therefore, transmission of vibration to other parts can be suppressed.

In yet another specific aspect of the method for manufacturing an actuator device according to the present invention, a step of fixing the actuator to the first substrate, a step of fixing the metal terminal to the second substrate, and a part of the metal terminal are A step of placing a second substrate having a metal terminal fixed thereon on a first substrate to which an actuator is fixed so as to be sandwiched between the first substrate and the second substrate. In this case, the metal terminal can be easily fixed so as to be sandwiched between the first substrate and the second substrate.

The actuator device according to the present invention includes an actuator and a metal terminal. The actuator has a drive element, a conversion member, and a drive shaft. The drive element expands and contracts along the first direction. The conversion member is connected to the drive element so as to convert the expansion / contraction force along the first direction of the drive element into a drive force along a second direction perpendicular to the first direction. The drive shaft is fixed to the conversion member and extends in the second direction. The metal terminal has a connection portion and a plurality of terminal portions. The connecting portion is electrically connected to the actuator drive element. The plurality of terminal portions are connected to the connection portion, and are connected to an external circuit for driving the drive element. Of the plurality of terminal portions, the length in the extending direction of at least one terminal portion connected to an external circuit is longer than the length of the remaining terminal portions.

In a specific aspect of the actuator device according to the present invention, the remaining terminal portion is bent so as to extend in a direction outside the direction in which at least one terminal portion extends.

In another specific aspect of the actuator device according to the present invention, the remaining terminal portion is cut so as to be shorter than at least one terminal portion.

In the method of manufacturing an actuator device according to the present invention, at least one terminal portion connected to an external circuit is left among a plurality of terminal portions of the metal terminal, and the remaining terminal portion is cut or at least one terminal portion The length of the remaining terminal portions is made shorter than the length of the at least one terminal portion in the third direction by bending it in a direction different from the extending direction. Therefore, it is possible to easily electrically connect to an electrode pattern on an external circuit board using the at least one terminal portion. In this case, since the remaining terminal portions are short in length, it is difficult to be electrically connected to the electrode pattern on the external circuit board. Therefore, by selecting at least one terminal portion from a plurality of terminal portions, the metal terminals of the actuator device can be easily and reliably electrically connected to the electrode patterns of the external circuit board arranged in various pitches and forms. Can be connected. In addition, since it is not necessary to prepare various metal terminals according to various electrode patterns, the manufacturing cost can be greatly reduced.

According to the actuator device of the present invention, the length in the extending direction of at least one terminal portion connected to an external circuit among the plurality of terminal portions is longer than the length of the remaining terminal portions. Therefore, at least one terminal portion can be easily electrically connected to the electrode pattern of the external circuit board.

FIG. 1 is a perspective view showing a first substrate used in the method for manufacturing an actuator device according to the first embodiment of the present invention. FIG. 2 is a perspective view showing a state in which the actuator is fixed on the first substrate shown in FIG. FIG. 3 is a perspective view showing an external appearance of a part of the actuator device manufactured by the method for manufacturing the actuator device according to the first embodiment of the present invention. FIG. 4 is a side view of a part of the actuator device shown in FIG. FIG. 5 is a side view for explaining a piezoelectric element and a conversion member used in the actuator device shown in FIG. FIG. 6 is a perspective view showing a second substrate used in the method for manufacturing the actuator device according to the first embodiment of the present invention. FIG. 7 is a perspective view showing a metal terminal used in the method for manufacturing the actuator device according to the first embodiment of the present invention. FIG. 8 is a perspective view showing a state where the metal terminal shown in FIG. 7 is combined with the second substrate shown in FIG. FIG. 9 is a perspective view showing a state in which the second substrate combined with the metal terminals is arranged on the first substrate on which the actuator is mounted. FIG. 10 is a partially cutaway perspective view showing the main part of the actuator device according to the first embodiment of the present invention. FIG. 11 is a perspective view showing a modification in a state where one terminal portion of the metal terminal is left and the remaining terminal portion is cut in the manufacturing method of the actuator device according to the first embodiment of the present invention. FIG. 12 is a perspective view schematically showing a cut portion of the first and second terminal plates in a modification of the method for manufacturing the actuator device of the present invention. FIG. 13 is an exploded perspective view showing an example of a conventional drive device.

Hereinafter, the present invention will be clarified by describing specific embodiments of the present invention with reference to the drawings.

FIG. 1 is a perspective view showing a first substrate 51 used in the method for manufacturing an actuator device according to the first embodiment of the present invention. The first substrate 51 is made of metal or synthetic resin. The first substrate 51 has an opening 51a in the center. The opening 51a is a portion into which a driven member driven by a driving shaft 6 described later is inserted.

On the first substrate 51, an actuator mounting portion 51b on which an actuator is mounted is provided. The 1st board | substrate 51 has the

notches

51c and 51c opened to the edge.

As shown in FIG. 2, the actuator 3 is fixed and mounted on the actuator mounting portion 51 b of the first substrate 51. The actuator 3 includes a piezoelectric element 10 as a drive element, a conversion member 4, and a drive shaft 6. Details of the actuator 3 will be described later. In the present embodiment, the actuator 3 is driven by applying a driving voltage from the outside to the piezoelectric element 10 as the driving element.

The actuator 3 can be fixed to the actuator mounting portion 51b by welding or using an appropriate adhesive.

FIG. 6 is a perspective view showing the second substrate 61 used in the manufacturing method of the actuator device according to the present embodiment. The second substrate 61 has an opening 61a. The opening 61a has the same diameter as the opening 51a of the first substrate 51 described above. The second substrate 61 has a rectangular outer shape in plan view, and columnar portions 61b are provided at four corners, respectively.

On one edge of the lower surface of the second substrate 61, recesses 61c and 61c are provided. The

recesses

61c and 61c are provided at positions overlapping the

notches

51c and 51c of the first substrate 51 described above.

The second substrate 61 can be formed by integral molding of synthetic resin. However, the material of the second substrate 61 is not particularly limited.

FIG. 7 is a perspective view showing a metal terminal 71 used in the method of manufacturing an actuator device according to this embodiment. The metal terminal 71 is formed by bending a metal plate. The metal terminal 71 includes a first connecting portion 71a, a connecting portion 71b, a strip-shaped metal plate portion 71c, a second connecting portion 71d, a connecting portion 71e, a strip-shaped metal plate portion 71f, and a first terminal plate. 71g, the 2nd terminal board 71h, the connection part 71i, and the connection part 71j.

The first connecting portion 71a is connected to the band-shaped metal plate portion 71c through the connecting portion 71b. In other words, the connecting portion 71b is formed by bending from one edge of the strip-shaped metal plate portion 71c in a direction crossing the strip-shaped metal plate portion 71c. A first connecting portion 71a extends from the tip of the connecting portion 71b in a direction away from the band-shaped metal plate portion 71c. The first connection portion 71a has a spring property with respect to the band-shaped metal plate portion 71c. That is, the first connection portion 71a functions as a spring terminal portion.

Similarly, the second connecting portion 71d is also connected to the band-shaped metal plate portion 71f through the connecting portion 71e. The second connection portion 71d has a spring property with respect to the band-shaped metal plate portion 71f, and the second connection portion 71d also functions as a spring terminal.

The first and

second terminal plates

71g and 71h are respectively extended through connecting

portions

71i and 71j extending downward from the end edges along the length direction of the first and second strip-shaped

metal plate portions

71c and 71f. ing. The first terminal board 71g has a structure in which a plurality of first terminal portions 71g1 extending in parallel with each other are connected at both ends. Similarly, the second terminal plate 71h also has a shape in which a plurality of second terminal portions 71h1 extending in parallel with each other are connected at both ends. The plurality of first terminal portions 71g1 extend in parallel with each other and are arranged at equal intervals. Similarly, the plurality of second terminal portions 71h1 are also extended in parallel to each other and arranged at equal intervals. The pitch of the plurality of first terminal portions 71g1 in the first terminal plate 71g and the pitch of the plurality of second terminal portions 71h1 in the second terminal plate 71h may be the same or different. .

In the method of manufacturing the actuator device according to the present embodiment, as shown in FIG. 8, the metal terminal 71 shown in FIG. 7 is fixed to the second substrate 61 shown in FIG. The fixing is performed by fitting the connecting

portions

71i and 71j of the metal terminal 71 into the

recesses

61c and 61c described above.

Thereafter, as shown in FIG. 9, the second substrate 61 on which the metal terminals 71 are fixed is disposed on the first substrate 51 on which the actuator 3 is fixed. As a result, the metal terminal 71 is sandwiched between the first substrate 51 and the second substrate 61 and the position thereof is securely fixed.

FIG. 10 is a partially cutaway perspective view showing an enlarged main part of the actuator device obtained as described above. In FIG. 10, only one first terminal portion 71g1 is left among the plurality of first terminal portions 71g1, and the remaining plurality of first terminal portions 71g1 are cut. Similarly, in the plurality of second terminal portions 71h1, only one second terminal portion 71h1 is left, and the remaining second terminal portions 71h1 are cut off. This point will be described later.

As shown in FIG. 10, the first and second connecting

portions

71a and 71d of the metal terminal 71 are in elastic contact with the side surfaces of the piezoelectric element 10, respectively. Therefore, the electrical connection between the piezoelectric element 10 and the first and

second connection portions

71a and 71d can be reliably achieved.

In the manufacturing method of the present embodiment, after the metal terminal 71 is sandwiched and fixed between the first substrate 51 and the second substrate 61 as described above, as shown in FIG. In each of the plate 71g and the second terminal plate 71h, only one first and second terminal portions 71g1 and 71h1 are left. That is, the other remaining first and second terminal portions 71g1 and 71h1 are cut. As a result, the length of the first terminal portion 71g1 in the extending direction of the one first terminal portion 71g1 shown in FIG. 10 is made longer than the length in the extending direction of the remaining cut terminal portions. ing. The same applies to the second terminal portion 71h1 side.

Therefore, when one first terminal portion 71g1 is electrically connected to the electrode pattern of the external circuit board, the length of the remaining cut first terminal portion 71g1 is short, so that it does not get in the way. The same applies to the second terminal portion 71h1.

Therefore, the first and second terminal portions 71g1 and 71h1 to be left without being cut are matched so as to match the pitch between electrode patterns of the external circuit board to be prepared. The second terminal portions 71g1 and 71h1 may be selected.

Therefore, according to the manufacturing method of the actuator device according to the present embodiment, even when the pitch between the electrode patterns of the external circuit board to which the actuator device is connected is different, it can be easily handled. That is, the pitch between the terminal portions remaining without being cut may be selected so as to match the pitch between the connection patterns.

Further, as shown in FIG. 11, the tips of the first and second terminal portions 71g1 and 71h1 may be further bent outward from the extending direction of the first and second terminal portions 71g1 and 71h1. In the modification shown in FIG. 11, the remaining terminal portions other than the remaining first and second terminal portions 71g1 and 71h1 are cut off. However, as shown by the alternate long and short dash line in FIG. 11, the remaining second terminal portion 71h1 may be bent. Even in this case, the length along the extending direction of one second terminal portion 71h1 used for connection in the bent second terminal portion 71h1 is one second terminal used for connection. The dimension is shorter than the dimension along the direction in which the portion 71h1 extends. Accordingly, the second terminal portion 71h1 indicated by the dashed dotted line is unlikely to hinder electrical connection.

In the embodiment, in the plurality of first terminal portions 71g1, the length of one first terminal portion 71g1 is longer than the length along the extending direction of the remaining first terminal portions 71g1. Although the remaining terminal portions are cut as described above, the remaining terminal portions may be cut or bent so that two or more terminal portions remain.

FIG. 12 is a perspective view schematically showing a portion S where the first and

second terminal plates

71g and 71h are removed by cutting in a modification of the method for manufacturing an actuator device of the present invention.

As described above, according to the manufacturing method of the actuator device according to the present embodiment, even when the pitch between the electrode patterns of the external circuit board is variously different, the plurality of first and second terminal portions 71g1. , 71h1 can be easily handled by cutting or bending. Therefore, the number of parts and the production cost can be greatly reduced.

The details of the actuator device will be described with reference to FIGS. FIG. 3 is a perspective view showing an external appearance of a part of the actuator device 1 manufactured by the method for manufacturing the actuator device according to the first embodiment of the present invention. 4 is a side view of a part of the actuator device 1 shown in FIG. FIG. 5 is a side view for explaining the piezoelectric element 10 and the conversion member 4 used in the actuator device 1 shown in FIG.

As shown in FIG. 3, the actuator device 1 includes a control unit 2 and an actuator 3. The control unit 2 is a part that controls the actuator 3. Specifically, the control unit 2 controls the voltage applied to the piezoelectric element 10 as a driving element of the actuator 3 described later.

The piezoelectric element 10 is preferably a laminated piezoelectric ceramic element having electrodes laminated inside through piezoelectric ceramics. This is because the voltage applied to the piezoelectric element 10 can be lowered and a large amount of displacement can be obtained. In addition, since the piezoelectric ceramic has a relatively high rigidity and can reduce attenuation in high-frequency vibrations, the resonance frequency of the displacement member can be increased by using a driving element using the piezoelectric ceramic.

In the present invention, the drive element is not limited to a piezoelectric element. In the present invention, the driving element may be an electrostrictive element, a magnetostrictive element, a thermal deformation element, or a linear motor using electromagnetic force or electrostatic force.

The actuator 3 has a drive shaft 6. A driven member 5 is connected to the drive shaft 6. Specifically, the drive shaft 6 moves the driven member 5 in the z direction. Here, the z direction is a displacement direction of the drive shaft 6, that is, a position conversion direction.

3 and 4, the driven member 5 is drawn in a rectangular plate shape, but the driven member is not limited to this. In the present invention, the driven member that is a driving object may be any member, for example, a single lens or a combination lens group, an image sensor, an aperture mechanism, an optical mirror, a laser light emitting element, a magnetic head, and various sensors. An element etc. may be sufficient.

The actuator 3 includes a drive shaft 6 extending along the z direction, a conversion member 4, and a piezoelectric element 10 as a drive element. The drive shaft 6 is inserted into a through hole 5 a formed in the driven member 5. The drive shaft 6 is preferably formed of a material having a small specific gravity such as carbon. Moreover, it is preferable that the driven member 5 and the drive shaft 6 have a small mutual friction. In order to make the engagement force between the through hole 5a and the drive shaft 6 appropriate, it is preferable to provide a pressurizing mechanism such as a spring.

The one end portion 6 a in the z direction of the drive shaft 6 is fixed to the conversion member 4. The conversion member 4 is a member for displacing the drive shaft 6 along the z direction.

In the present embodiment, as will be described later, the one end 6a of the drive shaft 6 is easily and accurately fixed to the conversion member 4 without impairing the displacement of the drive shaft 6. This will be clarified by detailing the fixing structure later.

In this embodiment, the direction in which the piezoelectric element 10 expands and contracts is the x direction perpendicular to the z direction. The piezoelectric element 10 is formed in a prismatic shape. Here, the “rectangular column shape” includes a shape in which at least a part of a corner portion or a ridge line portion is chamfered or R chamfered. In addition, the rectangular column shape includes a rectangular parallelepiped shape.

The piezoelectric element 10 has first and second end faces 10a and 10b, and first to fourth side faces 10c to 10f. Each of the first and second end faces 10a and 10b extends along the y direction and the z direction perpendicular to the z direction and the x direction, respectively. The first and second end faces 10a and 10b are opposed to each other in the x direction. Each of the first and second side faces 10c, 10d extends along the x direction and the y direction. The first and second side surfaces 10c and 10d are opposed to each other in the z direction. Each of the third and fourth side surfaces 10e and 10f extends along the x direction and the z direction. The third and fourth side surfaces 10e and 10f are opposed to each other in the y direction.

As shown in FIG. 5, the piezoelectric element 10 includes a plurality of pairs of first and

second electrodes

12 and 13 that face each other in the x direction via the piezoelectric layer 11. By applying a voltage between the first and

second electrodes

12 and 13, the piezoelectric element 10 can be expanded and contracted in the x direction.

Note that it is not always necessary to provide a plurality of pairs of the first and second electrodes. Only a pair of the first and second electrodes may be provided. Further, the opposing direction of the first and second electrodes is not limited to the x direction which is the expansion / contraction direction. Depending on the polarization direction of the piezoelectric body, the first and second electrodes may be provided so as to face each other in the z direction or the y direction.

The material of the piezoelectric layer 11 and the first and

second electrodes

12 and 13 is not particularly limited. The piezoelectric layer 11 is made of, for example, lead-free piezoelectric ceramics such as lead zirconate titanate ceramics (PZT), alkaline niobate ceramics such as potassium sodium niobate, or piezoelectric single crystals such as lithium tantalate. It can be formed of a piezoelectric body. The first and

second electrodes

12 and 13 can be formed of, for example, a metal such as Ag, Cu, or Pt, or an alloy such as an Ag—Pd alloy.

The conversion member 4 includes a metal such as iron, copper and nickel, and an elastic body represented by an alloy such as stainless steel, 42 nickel iron, beryllium copper, phosphor bronze and brass. The conversion member 4 converts the direction of the driving force so that the driving force due to the expansion and contraction along the x direction of the piezoelectric element 10 becomes the driving force along the z direction, and the driving shaft is converted by the converted driving force in the direction. 6 is an element that displaces along the z direction. Note that the driving direction of the piezoelectric element 10 and the direction in which the driving force of the piezoelectric element 10 is converted by the conversion member 4 are not necessarily perpendicular. In this embodiment, the x direction and the z direction are perpendicular to each other, but the x direction and the z direction are not necessarily perpendicular to each other.

The conversion member 4 has an annular shape having first to seventh portions 21 to 27. The piezoelectric element 10 is fitted with the annular conversion member 4. In the present embodiment, the first to seventh portions 21 to 27 are integrally formed. That is, the conversion member 4 is annular. By making the conversion member 4 annular, it is easy to increase the resonance frequency of the portion composed of the conversion member 4 and the piezoelectric element 10. For this reason, it becomes easy to obtain vibration having a higher frequency, that is, a higher driving speed. Further, the piezoelectric element 10 can be vibrated in the vicinity of the resonance frequency of the portion composed of the conversion member 4 and the piezoelectric element 10, so that it can be driven with less input energy. In addition, the conversion member 4 may be comprised by the single member, and may be comprised by joining a some member.

The first portion 21 is located on the first side surface 10c. That is, the first portion 21 is located on the z1 side in the z direction of the first side surface 10c. The first portion 21 has a convex portion 21a. In the present embodiment, the entire first portion 21 is constituted by the convex portion 21a. The convex portion 21a is separated from the first side surface 10c. The convex portion 21a protrudes from the first side surface 10c to the z1 side in the z direction. The drive shaft 6 is attached to the top of the convex portion 21a. A method for attaching the drive shaft 6 to the convex portion 21a is not particularly limited. For example, the drive shaft 6 may be attached to the convex portion 21 a using a resin adhesive, or may be integrally formed of the same material as the conversion member 4. The cross-sectional shape of the drive shaft 6 can be an appropriate shape such as a circle, various polygons, or various combinations. The cross-sectional shape and dimensions of the drive shaft 6 are preferably substantially the same along the z direction.

The second portion 22 has a flat plate shape. The second portion 22 is located on the first end face 10a. That is, the second portion 22 is located on the x1 side in the x direction of the first end face 10a. The end of the second portion 22 on the z-direction z2 side reaches the z2 side from the second side surface 10d. The second portion 22 is in contact with the first end face 10a. Specifically, in the present embodiment, substantially the entire first end surface 10 a is in contact with the second portion 22. Specifically, as shown in FIG. 3, the second portion 22 and the first end surface 10 a are bonded by the resin adhesive layer 31 and are in contact with each other via the resin adhesive layer 31. In FIGS. 3 and 4, drawing of the resin adhesive layer 31 and resin

adhesive layers

32 and 33 described later is omitted.

The third portion 23 has a flat plate shape. The third portion 23 is located on the second end face 10b. That is, the third portion 23 is located on the x2 side in the x direction of the second end face 10b. The end of the third portion 23 on the z-direction z2 side is closer to the z2 side than the second side surface 10d. The third portion 23 is in contact with the second end face 10b. Specifically, in the present embodiment, substantially the entire second end surface 10 b is in contact with the third portion 23. Specifically, as shown in FIG. 5, the third portion 23 and the second end surface 10 b are bonded by the resin adhesive layer 32 and are in contact with each other via the resin adhesive layer 32.

The fourth portion 24 is indirectly connected to the second portion 22. The fourth portion 24 is located on the second side surface 10d. That is, the fourth portion 24 is located on the z2 side in the z direction of the second side surface 10d.

On the other hand, the fifth portion 25 is indirectly connected to the third portion 23. The fifth portion 25 is located on the second side surface 10d. That is, the fifth portion 25 is located on the z2 side in the z direction of the second side surface 10d.

In the present embodiment, the fourth and

fifth portions

24 and 25 are integrally formed. The fourth and

fifth portions

24 and 25 are fixed by being bonded to the second side surface 10d by the resin adhesive layer 33. In the present embodiment, substantially the entire second side surface 10 d is fixed to the fourth and

fifth portions

24 and 25 by the resin adhesive layer 33.

The second part 22 and the fourth part 24 are connected by a sixth part 26. The sixth portion 26 is located on the end edge of the second side surface 10d on the first end surface 10a side. That is, the sixth portion 26 is located on the z-direction z2 side of the ridge line portion formed by the second side surface 10d and the first end surface 10a. The sixth portion 26 is provided apart from the second side surface 10d.

The third part 23 and the fifth part 25 are connected by a seventh part 27. The seventh portion 27 is located on the end edge of the second side surface 10d on the second end surface 10b side. That is, the seventh portion 27 is located on the z direction z2 side of the ridge line portion constituted by the second side surface 10d and the second end surface 10b. The seventh portion 27 is provided apart from the second side surface 10d.

In the present embodiment, the example in which the ridge line portion between the first or

second end face

10a, 10b and the first side face 10c is in contact with the conversion member 4 has been described. However, the present invention is not limited to this configuration. The conversion member may be provided such that the ridge line portion between the first or second end surface and the first side surface does not contact the conversion member. That is, the second and

third portions

22 and 23 may be provided so as not to contact the ridge line portion between the first or

second end face

10a or 10b and the first side face 10c.

When the conversion member 4 is formed in an annular structure closed by a plate-shaped member having a uniform width, the thickness t of the plate-shaped conversion member 4 when the yz section of the piezoelectric element 10 is about 1 mm is It is preferably about 0.1 mm to 0.25 mm. The Young's modulus of the conversion member 4 is preferably 100 GPa or more because the resonance frequency of the displacement member can be increased and the vibration attenuation can be reduced. The preferable upper limit of the Young's modulus of the conversion member 4 is not particularly limited. For example, when the Young's modulus is about 300 GPa or less, the conversion member 4 can be easily formed by bending a plate-like material. The angle θ formed by the planar first portion 21 and the planar first side surface 10c is about 15 ° to 45 °, because the driving force of the piezoelectric element 10 can be efficiently converted. preferable. The ratio (L2 / L1) of the length L2 along the x direction of the piezoelectric element 10 to the length L1 along the z direction of the piezoelectric element 10 is preferably about 0.8 to 2. The ratio (L3 / L2) of the length L3 along the x direction of the top of the first portion 21 to the length L2 along the x direction of the piezoelectric element 10 is about 0.3 to 0.7. preferable. The ratio (L4 / L2) of the length L4 along the x direction of each of the sixth and

seventh portions

26 and 27 to the length L2 along the x direction of the piezoelectric element 10 is 0.05 to 0.2. It is preferable that it is a grade. By doing so, the expansion and contraction deformation along the x direction of the piezoelectric element 10 is converted into the displacement along the z direction of the first portion 21, and the drive shaft 6 is displaced in the z direction, thereby driving the driven member 5. Can be moved along the z-direction.

In addition, in the manufacturing method of the actuator apparatus of this invention, not only the actuator 3 shown in FIG.4 and FIG.5 but various actuators can be used.

Further, although the piezoelectric element 10 is used as a driving element, various electromechanical conversion elements and electrostrictive elements that are connected to a metal terminal and expand and contract by applying an alternating electric field can be used as the driving element.

DESCRIPTION OF SYMBOLS 1 ... Actuator apparatus 2 ... Control part 3 ... Actuator 4 ... Conversion member 5 ... Driven member 5a ... Through-hole 6 ... Drive shaft 6a ... One side edge part 10 ... Piezoelectric element (drive element)
10a, 10b ... 1st and 2nd end face 10c-10f ... 1st-4th side surface 11 ...

Piezoelectric layer

12, 13 ... 1st, 2nd electrode 21-27 ... 1st-7th part 21a ... Projection 21b ... Flat plate part 21c ... Hole 31-33 ... Resin adhesive layer 51 ... First substrate 51a ... Opening 51b ... Actuator mounting part 51c ... Notch 61 ... Second substrate 61a ... Opening 61b ... Columnar part 61c ... Recessed portion 71 ...

Metal terminals

71a, 71d ... First and second connecting

portions

71b, 71e ... Connecting

portions

71c, 71f ... Strip-shaped

metal plate portions

71g, 71h ... Terminal plates 71g1, 71h1 ...

Terminal portions

71i, 71j ... Connecting portions

Claims

A driving element that expands and contracts along a first direction and a second driving element that is connected to the driving element and has a stretching force along the first direction of the driving element that is perpendicular to the first direction. An actuator having a conversion member that converts the driving force along a direction, and a drive shaft that is fixed to the conversion member and extends in the second direction;
A metal terminal having a connection part electrically connected to the drive element of the actuator, and a plurality of terminal parts connected to the connection part and connected to an external circuit for driving the drive element A method of manufacturing an actuator device comprising:
Electrically connecting the connecting portion of the metal terminal to the driving element;
Among the plurality of terminal portions of the metal terminal, at least one terminal portion connected to an external circuit is left, and the remaining terminal portion is cut or bent in a direction different from a direction in which at least one terminal portion extends. And a step of shortening the length of the remaining terminal portion beyond the length in the extending direction of the at least one terminal portion.
The metal terminal has a strip-shaped metal plate portion connected to the connection portion, and the plurality of terminal portions are provided so as to extend parallel to each other from an edge of the strip-shaped metal plate portion. A manufacturing method of the actuator device described.
The method for manufacturing an actuator device according to claim 1, wherein the connecting portion is connected to the band-shaped metal plate portion so as to be a spring terminal portion having a spring property with respect to the band-shaped metal plate portion.
Fixing the actuator to the first substrate;
Fixing the metal terminal to the second substrate;
A part of the metal terminal is sandwiched between the first board and the second board, and the second metal terminal is fixed on the first board to which the actuator is fixed. The method for manufacturing an actuator device according to any one of claims 1 to 3, further comprising a step of arranging the substrate.
A driving element that expands and contracts along a first direction, and an expansion and contraction force along the first direction of the driving element is converted into a driving force along a second direction perpendicular to the first direction. An actuator having a conversion member coupled to the drive element, and a drive shaft fixed to the conversion member and extending in the second direction;
A metal terminal having a connection part electrically connected to the drive element of the actuator, and a plurality of terminal parts connected to the connection part and connected to an external circuit for driving the drive element And
The actuator device in which at least one terminal portion connected to an external circuit among the plurality of terminal portions has a length in an extending direction longer than a length of the remaining terminal portions.
The actuator device according to claim 5, wherein the remaining terminal portion is bent so as to extend in a direction outside the extending direction of the at least one terminal portion.
The actuator device according to claim 5, wherein the remaining terminal portion is cut so as to be shorter than the at least one terminal portion.