WO2014017163A1 - Dispositif de détection de position - Google Patents

Dispositif de détection de position Download PDF

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Publication number
WO2014017163A1
WO2014017163A1 PCT/JP2013/064756 JP2013064756W WO2014017163A1 WO 2014017163 A1 WO2014017163 A1 WO 2014017163A1 JP 2013064756 W JP2013064756 W JP 2013064756W WO 2014017163 A1 WO2014017163 A1 WO 2014017163A1
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WO
WIPO (PCT)
Prior art keywords
light
window
width
light receiving
receiving window
Prior art date
Application number
PCT/JP2013/064756
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English (en)
Japanese (ja)
Inventor
茂 川瀬
Original Assignee
アズビル株式会社
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Filing date
Publication date
Application filed by アズビル株式会社 filed Critical アズビル株式会社
Publication of WO2014017163A1 publication Critical patent/WO2014017163A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/342—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells the sensed object being the obturating part

Definitions

  • the present invention relates to a position detection device that detects the position of an actuator, for example.
  • linear actuators have been used in production sites depending on the application.
  • a linear actuator having a relatively high response speed is used in operations such as assembly and mounting of electronic parts and pick and place.
  • the movable range is about 1 cm to 10 cm, and high-speed and precise work is realized by performing position feedback control using a position detection device suitable for position accuracy and response speed required for work.
  • the position detection device is based on the analog type and digital encoder type from the system, the light, magnetism, eddy current, differential transformer, potentiometer type, etc. from the detection principle, and the contact type, transmission type, reflection type, etc. Each can be classified.
  • analog type position detection devices that use light include transmissive photointerrupters, reflective photoreflectors, and those that use magnetism as Hall elements and magnetoresistive elements (AMRs), giant magnetism.
  • AMRs magnetoresistive elements
  • GMR Giant Magneto Resistance
  • the analog type position detection device is more susceptible to noise generated when the actuator is driven with a large current than the digital type.
  • the method using light is relatively insensitive to current noise generated by passing a current through the coil of the actuator.
  • a fiber unit consisting of a projector and a receiver and an amplifier unit with a built-in light emitting unit and light intensity detector are separated, and an optical fiber type position detection device (hereinafter referred to as “fiber type optical sensor”) in which the fiber unit and amplifier unit are connected by an optical fiber.
  • fiber type optical sensor an optical fiber type position detection device
  • the fiber unit of the fiber type optical sensor has a transmission type and a reflection type.
  • the transmission type as shown in FIG. 1, the light from the optical fiber emitting end 14 installed inside is converted into a parallel light beam by the lens 13, There is a configuration in which the light is changed to the direction of the lens 23 through the mirror arrays 12 and 22 in which small mirrors are arranged, and the light receiver 2 that condenses the parallel light flux on the fiber incident end 24 by the lens 23.
  • a fiber unit of the type using the mirror arrays 12 and 22 can produce a parallel light beam having a constant width with a simple configuration including only the lenses 13 and 23 and the mirror arrays 12 and 22.
  • the light projector 1 and the light receiver 2 are opposed to each other, and the shielding plate 3 is moved in the longitudinal direction of the parallel light flux, whereby the light amount of the light amount detection unit changes in proportion to the position of the shielding plate 3.
  • the output of the amplifier unit can also be used as a position detection device by moving the shielding plate 3 to change the light quantity of the light quantity detection unit according to the position.
  • the light intensity distribution of the parallel light flux having a constant width produced by the projector 1 is not necessarily uniform.
  • the width of the parallel light beam produced by the projector 1 it is necessary to increase the width of the mirror array 12, and the aperture of the lens 13 inevitably increases, so that the amount of peripheral light further decreases.
  • the light intensity distribution of the parallel light beam produced by the projector 1 is maximized at the center in the longitudinal direction of the parallel light beam and decreases as the distance from both ends increases.
  • the light receiver 2 changes the direction of the parallel light beam produced by the projector 1 by the mirror array 22 to the direction of the lens 23, and the parallel light beam is condensed on the optical fiber incident end 24 by the lens 23, but around the lens of the light receiver 2.
  • the light intensity further decreases due to the influence of the decrease in the amount of ambient light. Accordingly, the amount of light received by the light quantity detector changes by moving the light projector 1 and the light receiver 2 facing each other and moving the shielding plate 3 in the longitudinal direction of the parallel light flux.
  • the light intensity distribution is not uniform.
  • the amount of light received by the light quantity detection unit is not proportional to the position of the shielding plate 3. Therefore, since the output of the amplifier unit does not change in proportion to the position of the shielding plate 3, the linearity of the position detection device is lowered, and there is a problem that accurate position detection cannot be performed.
  • the present invention has been made to solve the above-described problems, and provides a position detection device that can improve the linearity of the position detection device at low cost and detect an accurate position. Objective.
  • a position detection device has a projection window having a predetermined width and a predetermined length larger than the width, and projects a parallel luminous flux having a predetermined width from the projection window.
  • a light receiving window having a light receiving window having a predetermined width and a predetermined length, and receiving a parallel light beam by the light receiving window; and a light amount detecting means for outputting a position signal having a magnitude proportional to the amount of light received by the light receiving means.
  • a shielding means for shielding part or all of the parallel light flux that enters the light receiving window according to the position of the measurement object, and is held inside the light receiving window.
  • the width of the light receiving window which is thick near the center in the length direction of the light receiving window and thin near the end in the length direction, is long so that the received light intensity is constant regardless of the position in the length direction.
  • a mask portion that is changed according to the position in the vertical direction is provided.
  • the light intensity received is constant regardless of the position in the length direction of the light receiving window.
  • the position of the plate and the output of the optical sensor are proportional, and the linearity of the position detection device can be improved at low cost, thereby enabling accurate position detection.
  • it can be easily obtained by changing the light sensor output of the light amount detection unit when the shielding plate is moved in the length direction of the light receiving window without performing complicated calculations. Can do.
  • FIG. 1 It is a side view which shows schematic structure of the position detection apparatus which concerns on Embodiment 1 of this invention. It is explanatory drawing which shows schematic structure of the state by which the shielding board is arrange
  • FIG. 1 is a side view showing a schematic configuration of a position detection apparatus according to Embodiment 1 of the present invention.
  • 2 is an explanatory view showing a schematic configuration showing a state in which the shielding plate 3 is arranged between the projector 1 and the light receiver 2 shown in FIG. 1, and
  • FIG. 2 (a) is a side view similar to FIG.
  • FIG. 2 (b) is a partial top view of the light receiver 2 of FIG. 2 (a).
  • FIG. 3 is a block diagram showing the overall configuration of the position detection apparatus according to Embodiment 1 of the present invention.
  • This position detection device includes a fiber unit 41 including a light projector 1 and a light receiver 2, a light emitting unit 5, an amplifier unit 42 incorporating a light amount detection unit 6, and a shield that blocks light projected from the light projector 1 to the light receiver 2.
  • the plate 3 is provided, and the fiber unit 41 and the amplifier unit 42 are connected by the optical fiber 4.
  • the light projector 1 and the light receiver 2 have a light projection window 11 and a light reception window 21 having the same shape.
  • the light projection window 11 and the light reception window 21 have a predetermined width W and a predetermined width larger than the width W. It is the rectangular shape comprised by length L (refer FIG.2 (b)).
  • the light projection window 11 of these light projectors 1 and the light reception window 21 of the light receiver 2 are arrange
  • the projector 1 converts the light from the optical fiber output end 14 guided by the optical fiber 4 into a parallel light beam by the lens 13 and changes the direction of the parallel light beam to the direction of the light receiver 2 by a mirror array 12 in which small mirrors are arranged. Shine.
  • the light receiver 2 receives the parallel light beam from the projector 1, reflects the direction of the light toward the lens 23 by the mirror array 22 in which small mirrors are arranged, and the parallel light beam is transmitted to the optical fiber incident end 24 by the lens 23. Condensate.
  • the amplifier unit 42 receives light from a light source such as an LED, which is guided to the projector 1 by the optical fiber 4, and receives the light that is condensed and guided to the optical fiber 4 by the light receiver 2 by the optical sensor.
  • a light amount detector 6 for outputting a value proportional to.
  • the shielding plate 3 has a surface that is perpendicular to the parallel light flux and has a width direction of the light receiving window 21 larger than W, and is held so as to be horizontally movable in the length direction (x direction) of the light receiving window 21.
  • the light receiver is proportional to the amount of movement of the shielding plate 3.
  • the amount of received light 2 changes, and the amount of light detected by the light amount detector 6 has good linearity and can be used as a highly accurate position detection device.
  • the light intensity distribution of the constant-width parallel light beam produced by the projector 1 is not necessarily uniform due to the following factors. 1. 1. Lens aberration and decrease in peripheral light quantity 2. Uneven reflectance of mirror array Assembly accuracy of parts
  • Reflector unevenness of mirror array it is possible to make the reflectance uniform and improve by depositing aluminum on a resin that is less deformed by heat and has high molding accuracy.
  • Assembly accuracy of parts can be improved by managing the assembly accuracy.
  • FIG. 4 is an explanatory diagram showing the aberration of the lens and the decrease in the amount of peripheral light.
  • the amount of light at the end (periphery) portion of the lens 13 is lower than the light transmitted through the central portion of the lens 13.
  • the aperture of the lens 13 inevitably increases, so that the amount of peripheral light further decreases.
  • FIG. 5 is an explanatory diagram showing a decrease in light intensity due to a decrease in the amount of light around the lens.
  • the light receiver 2 changes the direction of the parallel light beam produced by the projector 1 by the mirror array 22 to the direction of the lens 23, and the parallel light beam is condensed on the optical fiber incident end 24 by the lens 23. The light intensity further decreases due to the influence of the decrease in the amount of light.
  • the amount of light received by the light quantity detector 6 is also changed by making the projector 1 and the light receiver 2 face each other and moving the shielding plate 3 in the longitudinal direction of the parallel light flux, but the light intensity distribution is the length of the light receiving window 21 as described above. Since each position in the vertical direction is not uniform, as shown in FIG. 6, the light sensor output e (x) of the light quantity detection unit 6 is not proportional to the position of the shielding plate 3, and the light intensity is uneven, so that the output is output. Also decreases.
  • the change of the light intensity p (x) can be obtained by differentiating the optical sensor output e (x) when the shielding plate 3 is at the displacement x of the light receiving window 21, and the displacement x and the light intensity p (x).
  • FIG. 5 shows the relationship. As shown in FIG.
  • the optical sensor output e (x) obtained by integrating the light intensity p (x) with the displacement x is proportional to the displacement x, so that the output value is slightly lowered as a whole, but the position detection device as shown in FIG. Can improve the linearity.
  • the mask portion 25 is provided inside the light receiving window 21 so that the window width at the displacement x becomes the calculated window width w (x) to be set.
  • the mask portion 25 may not be provided.
  • the light intensity received by the light amount detection unit 6 becomes constant regardless of the position in the length direction of the light receiving window 21 by adjusting so as to satisfy the above formula.
  • the optical fiber incident on the light beam passing through the displacement x of the light receiving window 21 by providing the mask portion 25 so that the width W of the light receiving window 21 is set to the window width w (x) to be set calculated by the expression (1), the optical fiber incident on the light beam passing through the displacement x of the light receiving window 21.
  • the light intensity p (x) at the end 24 can be set to a constant value Pmin regardless of the position of x, and the optical sensor output e (x) of the amplifier unit 42 obtained by integrating the light intensity p (x) with the displacement x. Since it changes in proportion to the displacement x, the linearity of the position detection device can be improved.
  • the light projection window 11 having the predetermined width and the predetermined length larger than the width and projecting the parallel light flux having a constant width from the light projection window 11 is provided.
  • a light receiving window 21 having a light receiving window 21 having a predetermined width and a predetermined length and receiving a parallel light beam by the light receiving window 21; and a position signal having a magnitude proportional to the amount of light received by the light receiving means 2.
  • a shielding means 3 that is held so as to be horizontally movable in the length direction of the light receiving window 21 and shields part or all of the parallel light flux that enters the light receiving window 21 according to the position of the measurement target.
  • the light receiving window 21 is thick inside the light receiving window 21 so that the intensity of light received is constant regardless of the position of the light receiving window 21 in the length direction.
  • the output of the sensor is proportional, the linearity of the position detection device can be improved at low cost, and accurate position detection is possible. Further, when the width of the light receiving window 21 is determined, it can be easily obtained by a change in the light sensor output of the light amount detection unit 6 when the shielding plate 3 is moved in the length direction without performing a complicated calculation. it can.
  • any component of the embodiment can be modified or any component of the embodiment can be omitted within the scope of the invention.
  • the position detection apparatus includes shielding means for shielding part or all of the parallel light flux entering the light receiving window according to the position of the measurement target, and is located inside the light receiving window at a position in the length direction of the light receiving window. Regardless of this, a mask part that changes the width of the light-receiving window according to the position in the length direction is provided so that the light intensity received is constant, and the linearity can be improved at low cost and the accurate position can be detected. Therefore, it is suitable for use in detecting the position of a linear actuator or the like.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)

Abstract

La présente invention concerne un dispositif de détection de position qui comprend : un moyen de projection de lumière qui possède une fenêtre de projection de lumière (11) ayant une largeur prédéterminée (W) et une longueur prédéterminée (L) supérieure à ladite largeur (W), et qui projette un faisceau de lumière parallèle possédant une largeur constante à partir de la fenêtre de projection de lumière (11) ; un moyen de réception de lumière qui possède une fenêtre de réception de lumière (21) ayant la largeur prédéterminée (W) et la longueur prédéterminée (L), et qui reçoit le faisceau de lumière parallèle avec la fenêtre de réception de lumière (21) ; un moyen de détection de quantité de lumière qui sort un signal de position ayant une amplitude proportionnelle à la quantité de lumière reçue par le moyen de réception de lumière ; et un moyen de masquage qui est maintenu de façon à pouvoir être déplacé horizontalement dans la direction de la longueur de la fenêtre de réception de lumière (21), et qui, conformément à la position de l'objet en cours de mesure, masque une partie ou la totalité du faisceau de lumière parallèle qui entre dans la fenêtre de réception de lumière (21). Une unité de masque est disposée sur le côté interne de la fenêtre de réception de lumière (21), l'unité de masque ayant une forme qui est épaisse au voisinage de la section centrale de la fenêtre de réception de lumière (21) dans la direction de la longueur et qui est mince au voisinage de chaque extrémité dans la direction de la longueur et modifiant la largeur de la fenêtre de réception de lumière en fonction de la position dans la direction de la longueur, de sorte que l'intensité de la lumière reçue prend une valeur constante quelle que soit la position dans la direction de la longueur de la fenêtre de réception de lumière (21).
PCT/JP2013/064756 2012-07-25 2013-05-28 Dispositif de détection de position WO2014017163A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012-164786 2012-07-25
JP2012164786A JP2014025756A (ja) 2012-07-25 2012-07-25 位置検出装置

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WO2014017163A1 true WO2014017163A1 (fr) 2014-01-30

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6061725B2 (ja) * 2013-02-26 2017-01-18 アズビル株式会社 位置検出器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01312403A (ja) * 1988-06-10 1989-12-18 Fuji Electric Co Ltd 光電スイッチ
JP2002198568A (ja) * 2000-12-27 2002-07-12 Sunx Ltd 投光ユニット及び光電センサ
JP2004301544A (ja) * 2003-03-28 2004-10-28 Sunx Ltd 寸法測定装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01312403A (ja) * 1988-06-10 1989-12-18 Fuji Electric Co Ltd 光電スイッチ
JP2002198568A (ja) * 2000-12-27 2002-07-12 Sunx Ltd 投光ユニット及び光電センサ
JP2004301544A (ja) * 2003-03-28 2004-10-28 Sunx Ltd 寸法測定装置

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