WO2014010046A1

WO2014010046A1 - Laser resonator control power supply, laser oscillator, and laser oscillation system

Info

Publication number: WO2014010046A1
Application number: PCT/JP2012/067704
Authority: WO
Inventors: 京藤　友博
Original assignee: 三菱電機株式会社
Priority date: 2012-07-11
Filing date: 2012-07-11
Publication date: 2014-01-16
Also published as: JPWO2014010046A1; TW201403980A

Abstract

Receiving a beam output command by which the output timing of pulse laser light is specified and a pulse width command by which the pulse width (W1) of the pulse laser light is specified, a laser resonator control power supply turns on, according to the beam output command, a pulse control power supply for outputting the pulse laser light to a laser resonator and turns off, according to the output timing of the pulse laser light actually output from the laser resonator and the pulse width command, the pulse control power supply for outputting the pulse laser light to the laser resonator.

Description

Laser resonator control power supply, laser oscillator and laser oscillation system

The present invention relates to a laser resonator control power source, a laser oscillator, and a laser oscillation system that control the pulse width of laser light output from a laser resonator.

There is a laser processing device as a device for drilling a workpiece such as a printed circuit board using a pulsed laser beam. This laser processing apparatus is an apparatus that outputs pulsed laser light from a laser oscillator by supplying pulse power from an inverter circuit to the laser oscillator.

The laser processing apparatus described in Patent Document 1 calculates the energy value of the detected pulse, and controls the pulse output after the detected pulse and the pulse energy input per hole based on the calculation result.

Further, the laser processing apparatus described in Patent Document 2 branches a part of the laser light irradiated to the workpiece from the laser oscillator, detects the energy, and controls the laser so that the energy becomes a predetermined value. Control the light.

JP 11-287707 A JP 2003-53564 A

However, in the former prior art, it is difficult to control the pulse output during irradiation in real time. In the latter prior art, the reliability of the system depends on the energy detection accuracy and the control responsiveness after energy detection. Even if a stable system can be constructed, it is necessary to use highly reliable parts, which results in a very expensive system.

The present invention has been made in view of the above, and provides a laser resonator control power source, a laser oscillator, and a laser oscillation system capable of outputting a pulse laser beam having a desired pulse width with an apparatus having a simple configuration. The purpose is to obtain.

In order to solve the above-described problems and achieve the object, the present invention receives an output command in which the output timing of the pulse laser beam is designated and a pulse width command in which the pulse width of the pulse laser beam is designated, Based on the output command, the control power source for outputting the pulse laser beam to the laser resonator is turned ON, and based on the output timing of the pulse laser beam actually output from the laser resonator and the pulse width command, The control power supply is turned off.

According to the present invention, it is possible to output a pulsed laser beam having a desired pulse width with an apparatus having a simple configuration.

FIG. 1 is a diagram illustrating a configuration of a laser processing apparatus according to the first embodiment. FIG. 2 is a diagram showing a configuration of the laser oscillator according to the first embodiment. FIG. 3 is a diagram for explaining the output timing of the laser light output from the laser oscillator according to the first embodiment. FIG. 4 is a diagram illustrating a configuration of the laser output detection unit. FIG. 5 is a diagram showing a configuration of the laser oscillator according to the second embodiment. FIG. 6 is a diagram illustrating a configuration of a laser oscillator according to the third embodiment. FIG. 7 is a diagram for explaining the output timing of the laser beam output from the laser oscillator according to the third embodiment. FIG. 8 is a diagram illustrating a configuration of a laser oscillator according to the fourth embodiment.

Hereinafter, a laser resonator control power source, a laser oscillator, and a laser oscillation system according to an embodiment of the present invention will be described in detail with reference to the drawings. Note that the present invention is not limited to these embodiments.

Embodiment 1 FIG.
FIG. 1 is a diagram illustrating a configuration of a laser processing apparatus according to the first embodiment. The laser processing apparatus 100 X is an apparatus that performs laser drilling on a substrate (work) 11 that is a substrate to be processed by irradiating the pulse laser beam 10. The laser processing apparatus 100X of the present embodiment includes a laser oscillator 1X that can control the pulse output in real time.

The laser processing apparatus 100X includes a laser oscillator 1X that oscillates the pulsed laser light 10, a laser processing unit 3 that performs laser processing of the substrate 11, and a laser processing control device 2. The laser oscillator 1 X oscillates the pulse laser beam 10 and sends it to the laser processing unit 3. The laser processing unit 3 includes

galvanometer mirrors

15X and 15Y,

galvanometer scanners

16X and 16Y, an fθ lens (condensing lens) 14, and an XY table (processing table) 12.

The

galvano scanners

16X and 16Y have a function of moving the irradiation position on the substrate 11 by changing the trajectory of the pulse laser beam 10, and each processing area (galvano area) set on the substrate 11 with the pulse laser beam 10 is set. ) In two dimensions. The

galvano scanners

16X and 16Y rotate the

galvanometer mirrors

15X and 15Y to a predetermined angle in order to scan the pulse laser beam 10 in the XY direction.

Galvano

mirrors

15X and 15Y reflect the pulsed laser beam 10 and deflect it at a predetermined angle. The galvanometer mirror 15X deflects the pulse laser beam 10 in the X direction, and the galvanometer mirror 15Y deflects the pulse laser beam 10 in the Y direction.

The fθ lens 14 is a lens having telecentricity. The fθ lens 14 deflects the pulsed laser light 10 in a direction perpendicular to the main surface of the substrate 11 and condenses (irradiates) the pulsed laser light 10 at a processing position (hole position 13) of the substrate 11.

The substrate 11 is an object to be processed such as a printed wiring board, and drilling is performed at a plurality of locations. The substrate 11 has, for example, a three-layer structure of copper foil (conductor layer), resin (insulating layer), and copper foil (conductor layer).

The XY table 12 places the substrate 11 and moves in the XY plane by driving a motor (not shown). As a result, the XY table 12 moves the substrate 11 in the in-plane direction.

The galvano area (scanning area) is a range (scannable area) in which laser processing can be performed by the operation of the galvano mechanism (

galvano scanners

16X and 16Y,

galvano mirrors

15X and 15Y) without moving the XY table 12. In the laser processing apparatus 100X, the XY table 12 is moved in the XY plane, and then the pulse laser beam 10 is two-dimensionally scanned by the

galvano scanners

16X and 16Y. The XY table 12 moves in order so that the center of each galvano area is directly below the center of the fθ lens 14 (galvano origin). The galvano mechanism operates so that each hole position 13 set in the galvano area becomes an irradiation position of the pulse laser beam 10 in order. The movement between the galvano areas by the XY table 12 and the two-dimensional scanning of the pulse laser beam 10 in the galvano area by the galvano mechanism are sequentially performed within the surface of the substrate 11. As a result, all hole positions 13 in the surface of the substrate 11 are laser processed.

The laser processing control device 2 is connected to the laser oscillator 1X and the laser processing unit 3 (not shown in FIG. 1), and controls the laser oscillator 1X and the laser processing unit 3. When laser processing the substrate 11, the laser processing control device 2 instructs the laser oscillator 1 X and the laser processing unit 3 on the laser processing conditions set in the processing program. The laser processing conditions here include the output timing of the pulse laser beam 10, the laser beam irradiation position (coordinate values on the substrate 11), and the like.

Next, the configuration of the laser oscillator 1X will be described. FIG. 2 is a diagram showing a configuration of the laser oscillator according to the first embodiment. Here, a configuration of a laser processing apparatus 100A that is an example of the laser processing apparatus 100X will be described. The laser processing apparatus 100A includes a laser oscillator 1A that is an example of a laser oscillator 1X.

The laser oscillator 1A has a resonator 4, a resonator control power source (laser resonator control power source) 5A, and a laser output detector 6. The resonator 4 outputs the pulse laser beam 10 to the laser processing unit 3 at a timing according to an instruction from the resonator control power source 5A.

The laser output detection unit 6 detects the pulse laser beam 10 actually output from the resonator 4 by using the leaked light of the pulse laser beam 10 that is actually output from the resonator 4 to the laser processing unit 3. The laser output detector 6 sends the detection result (laser output waveform) of the pulse laser beam 10 to the resonator control power source 5A.

The resonator control power source 5 A is configured using a computer or the like and controls the resonator 4. The resonator control power supply 5A may be a power supply device that controls pulse discharge or a power supply device that controls an excitation light source such as an LD (Laser Diode) bar.

The resonator control power source 5A is connected to the laser processing control device 2, and causes the resonator 4 to output the pulse laser beam 10 having a pulse width designated by the laser processing control device 2. The resonator control power source 5 A causes the resonator 4 to start pulse output at a timing based on an output command (a beam output command 32 described later) of the pulse laser beam 10 sent from the laser processing control device 2. Further, the resonator control power source 5A according to the present embodiment ends the pulse output being output to the resonator 4 at the timing based on the laser output waveform (laser output waveform 34 described later) sent from the laser output detector 6. Let

In other words, the resonator control power source 5A controls the rising timing of the output waveform of the pulse laser beam 10 according to the instruction sent from the laser processing control device 2, and the pulse laser according to the instruction sent from the laser output detector 6 The falling timing of the output waveform of the light 10 is controlled.

Next, the output timing of the pulse laser beam 10 output from the laser oscillator 1A will be described. FIG. 3 is a diagram for explaining the output timing of the laser light output from the laser oscillator according to the first embodiment.

When the laser processing apparatus 100A starts laser processing on the substrate 11, the laser processing control apparatus 2 instructs the laser processing unit 3 to irradiate the pulse laser light 10 to the laser light irradiation position set in the processing program. send. Further, the laser processing control device 2 sends the output timing of the pulsed laser light 10 set in the processing program to the resonator control power source 5A. For example, the laser processing control device 2 receives a pulse width command 31 that specifies the pulse width of the pulse laser beam 10 and a beam output command (trigger) 32 that specifies the output start timing of the pulse laser beam 10. Send to 5A.

The resonator control power source 5A includes a memory for storing the pulse width (set pulse width W1) specified by the pulse width command 31, and stores the set pulse width W1. The resonator control power supply 5A turns on the pulse control power supply (control power supply waveform 33) based on the output start timing of the pulse laser beam 10 specified by the beam output command 32 (S1). In other words, the resonator control power source 5A generates a pulse output command waveform having the output start timing specified by the beam output command 32 and sends it to the laser oscillator 1A. The control power supply waveform 33 is a power supply waveform for outputting the pulsed laser light 10 from the resonator 4. When the control power supply waveform 33 is turned on (when the control power supply waveform 33 rises), the pulsed laser light 10 is output from the resonator 4. Is output.

When the resonator 4 outputs the pulse laser beam 10, the laser output detector 6 detects the actual laser output (laser output waveform 34) (S2). The timing at which the beam output command 32 is turned on and the timing at which the control power waveform 33 is turned on are substantially the same. However, there may be variations between the timing when the control power supply waveform 33 is turned ON and the timing when the resonator 4 outputs the pulse laser beam 10 (the laser output waveform 34 rises). For this reason, the pulse laser beam 10 may be output with a delay with respect to the ON timing of the control power waveform 33.

The laser output detector 6 detects the actual laser output and notifies the resonator control power source 5A as a laser oscillation detection signal (laser output waveform 34). The resonator control power source 5A detects the rise of the laser output waveform 34 (output start timing of the pulse laser beam 10), and outputs a trigger 35 to the pulse width control board in the resonator control power source 5A at this rise timing ( S3). The trigger 35 is information indicating the output start timing of the actual laser output.

And the resonator control power source 5A treats the ON timing of the trigger 35 as the ON timing of the actual laser output. Thereby, the resonator control power supply 5A generates the pulse waveform 36 having the set pulse width W1 based on the ON timing of the trigger 35 and the stored set pulse width W1 (S4).

Then, the resonator control power source 5A sends a completion signal of the set pulse width W1 to the resonator 4 based on the timing when the pulse waveform 36 is turned off (S5). The completion signal of the set pulse width W1 is a control signal for turning off the pulse control power supply (instruction for lowering the control power supply waveform 33). Thereby, the resonator 4 turns off the output of the pulse laser beam 10. As a result, the laser output waveform 34 falls (S6).

When outputting the first pulsed light, the laser processing control device 2 sends the pulse width command 31 and the beam output command 32 to the resonator control power source 5A, and stores the set pulse width W1 in the resonator control power source 5A. Let me. The laser processing control device 2 sends a beam output command 32 to the resonator control power source 5A when outputting the second and subsequent pulse lights. Thereby, the resonator control power source 5A sends a completion signal of the set pulse width W1 to the resonator 4 based on the stored set pulse width W1.

In the present embodiment, the case where the resonator control power source 5A stores the set pulse width W1 has been described. However, every time each pulse light is output, the laser processing control device 2 supplies the resonator control power source 5A to the resonator control power source 5A. A pulse width command 31 and a beam output command 32 may be sent.

As described above, in the present embodiment, the laser output detection unit 6 notifies the actual laser output timing to the resonator control power supply 5A, and the resonator control power supply 5A has the set pulse width W1 based on the actual laser output timing. A completion signal is generated and sent to the resonator 4. In other words, in the laser oscillator 1A, a completion signal having a set pulse width W1 is sent to the resonator 4 based on the ON timing of the actual laser output. Thereby, the resonator 4 turns off the laser pulse output (power supply) based on the generated completion signal, so that the resonator 4 can output the pulse laser beam 10 having the set pulse width W1. .

Next, the configuration of the laser output detector 6 will be described. FIG. 4 is a diagram illustrating a configuration of the laser output detection unit. The laser output detection unit 6 includes a laser detection sensor 21, an amplification circuit 22, a differentiation circuit 23, a laser oscillation determination circuit 24, and a determination output unit 25.

The laser detection sensor 21 is a high-speed sensor (photodetection sensor) using a photodiode or the like, and detects the pulsed laser light 10 at high speed. The laser detection sensor 21 of the present embodiment detects the leaked light of the pulse laser beam 10. The laser detection sensor 21 sends a leaked light detection result (detection signal) to the amplifier circuit 22. The amplification circuit 22 amplifies the detection signal sent from the laser detection sensor 21 and sends it to the differentiation circuit 23.

The differentiation circuit 23 differentiates the detection signal amplified by the amplification circuit 22 and sends it to the laser oscillation determination circuit 24. The laser oscillation determination circuit 24 determines the rising timing of the detection signal based on the differentiated voltage value of the detection signal and a preset threshold value. Thereby, the laser oscillation determination circuit 24 determines whether or not laser output has been performed. When the laser oscillation determination circuit 24 determines that laser oscillation has occurred, the laser oscillation determination circuit 24 sends a detection signal to the determination output unit 25. The determination output unit 25 converts the detection signal into a digital signal and removes noise, and sends the detection signal after noise removal to the resonator control power supply 5A as a laser oscillation detection signal.

In the present embodiment, the laser oscillator 1A includes the laser output detection unit 6. However, the laser oscillator 1A and the laser output detection unit 6 may be configured separately. Further, it is desirable that the laser processing control device 2 and the resonator control power source 5X have a resolution that is less than the time variation from when the pulse control power source is turned on until the actual laser output is detected. Further, the laser output performed by the laser oscillator 1X is desirably controlled so that the peak output does not fluctuate greatly by using various methods such as current control or constant voltage control.

In the present embodiment, the case where the resonator control power supply 5A detects the rise of the laser output waveform 34 has been described. However, the rise of the laser output waveform 34 may be detected by the laser output detection unit 6.

Thus, according to the first embodiment, the pulse waveform 36 having the set pulse width W1 is generated based on the timing at which the actual laser output detected using the laser output detector 6 is turned on. The pulse width is controlled so that the actual laser output is turned off at the timing when the pulse waveform 36 is turned off. This makes it possible to control the pulse output in real time. Therefore, it is possible to output the pulse laser beam 10 having a desired pulse width (set pulse width W1) with an apparatus having a simple configuration. As a result, the pulse output can be stabilized, and the reliability of laser processing is improved.

Embodiment 2. FIG.
Next, a second embodiment of the present invention will be described with reference to FIG. In the second embodiment, the timing at which the actual laser output is turned ON is detected using the pulse laser beam 10 sent from the resonator 4 to the laser processing unit 3.

FIG. 5 is a diagram showing a configuration of the laser oscillator according to the second embodiment. Here, a configuration of a laser processing apparatus 100B which is an example of the laser processing apparatus 100X will be described. The laser processing apparatus 100B includes a laser oscillator 1B that is an example of a laser oscillator 1X. In addition, the same number is attached | subjected about the component which achieves the same function as the laser processing apparatus 100A of Embodiment 1 shown in FIG. 2 among each component of FIG. 5, and the overlapping description is abbreviate | omitted.

The laser oscillator 1B has a resonator 4, a resonator control power source 5A, a laser output detection unit 6, and a spectroscopic unit 7. In the laser oscillator 1B of the present embodiment, a spectroscopic unit 7 is disposed between the resonator 4 and the laser processing unit 3. The laser output detection unit 6 is connected to the spectroscopic unit 7 and the resonator control power source 5A.

The spectroscopic unit 7 splits the pulsed laser light 10 sent from the resonator 4 to the laser processing unit 3. Specifically, the spectroscopic unit 7 uses the pulse laser beam 10 output from the resonator 4 as a first laser beam used for laser processing and a second laser beam used for detecting the output waveform of the pulse laser beam 10. And then spectroscopically. The spectroscopic unit 7 sends one pulsed laser beam 10 (first laser beam) subjected to the spectroscopy to the laser processing unit 3 and the other pulsed laser beam 10 (second laser beam) subjected to the spectroscopy to the laser output detection unit 6. Send to. The spectroscopic unit 7 may send the partially transmitted light of the pulsed laser light 10 output from the resonator 4 to the laser output detecting unit 6, or laser the partially reflected light of the pulsed laser light 10 output from the resonator 4. You may send to the output detection part 6. FIG.

The laser output detection unit 6 of the present embodiment detects the ON timing (output) of the pulse laser beam 10 using the pulse laser beam 10 dispersed by the spectroscopic unit 7 and sends it to the resonator control power source 5A. As described above, the laser oscillator 1A according to the first embodiment detects the timing at which the actual laser output is turned on by using leakage light, whereas the laser oscillator 1B according to the second embodiment has a pulsed laser beam that is spectrally separated. 10 is used to detect the timing when the actual laser output is turned ON.

The resonator control power supply 5A generates a pulse waveform 36 having a set pulse width W1 based on the timing when the actual laser output detected using the laser output detector 6 is turned on, as in the first embodiment. . Then, the resonator control power source 5A controls the resonator 4 so that the actual laser output is turned OFF at the OFF timing of the pulse waveform 36.

In the present embodiment, the laser oscillator 1B includes the spectroscopic unit 7 and the laser output detection unit 6. However, at least one of the spectroscopic unit 7 and the laser output detection unit 6 is configured separately from the laser oscillator 1B. Also good.

Thus, according to the second embodiment, as in the first embodiment, the actual laser output with the set pulse width W1 is based on the timing at which the actual laser output detected using the laser output detector 6 is turned on. Since the resonator 4 is controlled so as to be turned off, the pulse output can be controlled in real time. Therefore, it is possible to output the pulse laser beam 10 having a desired pulse width with an apparatus having a simple configuration.

Embodiment 3 FIG.
Next, Embodiment 3 of the present invention will be described with reference to FIGS. In the third embodiment, the output timing of the pulsed laser light 10 is controlled with a high-speed shutter based on the timing at which the actual laser output detected using the laser output detector 6 is turned on.

FIG. 6 is a diagram illustrating a configuration of a laser oscillator according to the third embodiment. Here, a configuration of a laser processing apparatus 100C which is an example of the laser processing apparatus 100X will be described. The laser processing apparatus 100C includes a laser oscillator 1C that is an example of a laser oscillator 1X. 6 that are the same as those of the laser processing apparatus 100A of the first embodiment shown in FIG. 2 and the laser processing apparatus 100B of the second embodiment shown in FIG. The description which overlaps is abbreviate | omitted.

The laser oscillator 1C has a resonator 4, a resonator control power source 5B, a laser output detection unit 6, a spectroscopic unit 7, a high speed shutter 8, and a high speed shutter control power source 9. In the laser oscillator 1 C of the present embodiment, a high-speed shutter 8 and a spectroscopic unit 7 are disposed between the resonator 4 and the laser processing unit 3. The high-speed shutter 8 is disposed between the resonator 4 and the spectroscopic unit 7, and the spectroscopic unit 7 is disposed between the high-speed shutter 8 and the laser processing unit 3.

The laser output detection unit 6 is connected to the spectroscopic unit 7 and the high-speed shutter control power source 9, and the high-speed shutter control power source 9 is connected to the laser processing control device 2, the laser output detection unit 6 and the high-speed shutter 8.

The resonator control power source 5B is connected to the laser processing control device 2, and causes the resonator 4 to output a pulse laser beam 10 having a pulse width designated by the laser processing control device 2. The laser processing control device 2 according to the present embodiment provides a pulse width command for causing the resonator control power supply 5B to output a pulse laser beam 10 having a pulse width (pulse width W2 described later) wider than a desired set pulse width W1. send.

The resonator control power source 5B supplies the pulse laser beam 10 having the pulse width W2 to the resonator 4 at a timing based on an output command (a beam output command 42 described later) of the pulse laser beam 10 sent from the laser processing control device 2. Pulse output. In other words, the resonator control power source 5 B controls ON / OFF of the pulse laser beam 10 (start and end of pulse output) in accordance with a command from the laser processing control device 2.

The high-speed shutter 8 is configured using, for example, an optical switch element. The high-speed shutter 8 switches ON / OFF of the pulse laser beam 10 sent from the resonator 4 to the laser processing unit 3. In other words, the high-speed shutter 8 switches between transmission and blocking of the pulsed laser light 10 output from the resonator 4. In a state where the high-speed shutter 8 is open, the pulse laser beam 10 output from the resonator 4 is sent to the laser processing unit 3 via the spectroscopic unit 7. On the other hand, in a state where the high-speed shutter 8 is closed, the pulsed laser light 10 output from the resonator 4 is stopped by the high-speed shutter 8, so that the pulsed laser light 10 does not reach the spectroscopic unit 7 or the laser processing unit 3.

The spectroscopic unit 7 splits the pulsed laser light 10 sent from the resonator 4 to the laser processing unit 3 via the high-speed shutter 8. The spectroscopic unit 7 sends one pulsed laser beam 10 that has been split to the laser processing unit 3, and sends the other split pulsed laser beam 10 to the laser output detecting unit 6.

The laser output detection unit 6 of the present embodiment detects the ON timing (output) of the pulse laser beam 10 using the pulse laser beam 10 (second laser beam) split by the spectroscopic unit 7, and performs high-speed shutter control. Send to power source 9.

The high-speed shutter control power source 9 is configured using EO (electro-optical element), AO (acousto-optical element), or the like, and is a power source that controls the high-speed shutter 8. The high-speed shutter control power source 9 is connected to the laser processing control device 2 and causes the high-speed shutter 8 to output a pulse laser beam 10 having a pulse width (set pulse width W1) designated by the laser processing control device 2. The high-speed shutter control power source 9 causes the resonator 4 to start pulse output at a timing based on an output command (a beam output command 42 described later) of the pulse laser beam 10 sent from the laser processing control device 2. In addition, the high-speed shutter control power source 9 of the present embodiment ends the pulse output being output to the high-speed shutter 8 at a timing based on the laser output waveform (laser output waveform 45 described later) sent from the laser output detection unit 6. Let

In other words, the high-speed shutter control power source 9 controls the rising timing of the output waveform of the pulse laser beam 10 according to the instruction sent from the laser processing control device 2, and the pulse laser according to the instruction sent from the laser output detection unit 6. The falling timing of the output waveform of the light 10 is controlled.

Next, the output timing of the pulse laser beam 10 output from the laser oscillator 1C will be described. FIG. 7 is a diagram for explaining the output timing of the laser beam output from the laser oscillator according to the third embodiment.

When the laser processing apparatus 100C starts laser processing on the substrate 11, the laser processing control apparatus 2 instructs the laser processing unit 3 to irradiate the pulse laser light 10 to the laser light irradiation position set in the processing program. send. Further, the laser processing control device 2 sends the output timing of the pulsed laser light 10 set in the processing program to the resonator control power source 5B.

For example, the laser processing control device 2 receives a pulse width command (not shown) that specifies the pulse width of the pulse laser beam 10 and a beam output command (trigger) 42 that specifies the output start timing of the pulse laser beam 10. This is sent to the resonator control power source 5B. Further, the laser processing control device 2 outputs, for example, a pulse width command 41 specifying the pulse width of the pulsed laser light 10 and a beam output command (trigger) 42 specifying the output start timing of the pulsed laser light 10 at a high-speed shutter. Send to control power supply 9.

The beam output command 42 designating the same timing is sent to the resonator control power supply 5B and the high-speed shutter control power supply 9. The pulse width command 41 is a command for designating a set pulse width W1, which is a desired pulse width.

The pulse width command sent to the resonator control power source 5B is a command for designating a pulse width W2 wider than the set pulse width W1. The resonator control power source 5B stores the pulse width W2. Then, the resonator control power supply 5B turns on the pulse control power supply based on the output start timing and the pulse width W2 of the pulse laser beam 10 specified by the laser processing control device 2. In other words, the resonator control power source 5 B causes the resonator 4 to output the pulse laser beam 10 having a waveform based on the command specified by the laser processing control device 2. Thereby, the pulse laser beam 10 having the laser output waveform 43 (pulse width W2) having a pulse width wider than the set pulse width W1 is input to the high-speed shutter 8.

Further, the high-speed shutter control power supply 9 turns on the high-speed shutter 8 (control power supply waveform 44) based on the output start timing of the pulse laser beam 10 specified by the beam output command 42 (S11). In other words, the high-speed shutter control power supply 9 generates a pulse output command waveform having the output start timing specified by the beam output command 42 and sends it to the high-speed shutter 8. The control power supply waveform (switching control power supply) 44 is a power supply waveform for outputting the pulse laser beam 10 from the high-speed shutter 8. When the control power supply waveform 44 is turned on, the pulse laser beam 10 is output from the high-speed shutter 8.

When the high-speed shutter 8 outputs the pulse laser beam 10, the pulse laser beam 10 is sent to the spectroscopic unit 7. Thereby, the actual laser output (laser output waveform 45) is detected by the laser output detector 6 (S12). The timing at which the beam output command 42 is turned on and the timing at which the control power waveform 44 is turned on are substantially the same. However, there may be variations between the timing when the control power supply waveform 44 is turned ON and the timing when the high-speed shutter 8 outputs the pulse laser beam 10 (the laser output waveform 45 rises). For this reason, the pulse laser beam 10 may be output with a delay with respect to the ON timing of the control power waveform 44.

The laser output detector 6 detects the actual laser output and notifies the resonator control power supply 5B as a laser oscillation detection signal (laser output waveform 45). The resonator control power source 5B detects the rise of the laser output waveform 45 (output start timing of the pulse laser beam 10), and outputs the trigger 46 to the pulse width control board in the resonator control power source 5A at this rise timing ( S13). The trigger 46 is information indicating the output start timing of the actual laser output.

When the high-speed shutter control power supply 9 receives the trigger 46 from the laser output detector 6, the high-speed shutter control power supply 9 treats the ON timing of the trigger 46 as the ON timing of the actual laser output. Thereby, the high-speed shutter control power supply 9 generates a pulse waveform 47 having the set pulse width W1 based on the ON timing of the trigger 46 and the stored set pulse width W1 (S14).

Then, the high-speed shutter control power supply 9 sends a completion signal of the set pulse width W1 to the high-speed shutter 8 based on the timing when the pulse waveform 47 is turned off (S15). The completion signal of the set pulse width W1 is a control signal (instruction to lower the control power waveform 44) for turning off the switching control power to the high-speed shutter 8. Thereby, the high-speed shutter 8 turns off the output of the pulse laser beam 10. As a result, the laser output waveform 45 falls (S16).

As described above, in the present embodiment, the laser output detection unit 6 notifies the high-speed shutter control power supply 9 of the laser output ON timing, and the high-speed shutter control power supply 9 sets the set pulse width W1 based on the laser output ON timing. Is generated and sent to the high-speed shutter 8. In other words, in the laser oscillator 1 C, a completion signal having the set pulse width W 1 is sent to the high-speed shutter 8 based on the ON timing of the laser output waveform 45. As a result, the high-speed shutter 8 turns off the laser pulse output (power supply) based on the generated completion signal, so that the high-speed shutter 8 can output the pulse laser beam 10 having the set pulse width W1. .

In this embodiment, the laser oscillator 1C includes the spectroscopic unit 7 and the laser output detection unit 6. However, at least one of the spectroscopic unit 7, the laser output detection unit 6, the high-speed shutter 8, and the high-speed shutter control power source 9 is used. One may be configured separately from the laser oscillator 1C.

In the present embodiment, a case has been described in which a pulse width command specifying a pulse width W2 wider than the set pulse width W1 is sent from the laser processing control device 2 to the resonator control power supply 5B. A pulse width command specifying the set pulse width W1 may be sent to the resonator control power supply 5B. In this case, the resonator control power supply 5B sets the pulse width W2 using the set pulse width W1.

As described above, according to the third embodiment, based on the timing at which the actual laser output detected using the laser output detection unit 6 is turned on, the high-speed shutter 8 is set so that the actual laser output is turned off with the set pulse width W1. Since the control is performed, the pulse output can be controlled in real time. Therefore, it is possible to output the pulse laser beam 10 having a desired pulse width with an apparatus having a simple configuration.

Embodiment 4 FIG.
Next, a fourth embodiment of the present invention will be described with reference to FIG. In the fourth embodiment, a high-speed shutter 8, a high-speed shutter control power source 9, a spectroscopic unit 7, and a laser output detection unit 6 are configured separately from a laser oscillator (laser oscillator 1D described later). Then, a laser oscillation system is configured by using the laser oscillator 1D, the high-speed shutter 8, the high-speed shutter control power source 9, the spectroscopic unit 7, and the laser output detection unit 6.

FIG. 8 is a diagram showing a configuration of a laser oscillator according to the fourth embodiment. Here, a configuration of a laser processing apparatus 100D which is an example of the laser processing apparatus 100X will be described. The laser processing apparatus 100D includes a laser oscillator 1D that is an example of a laser oscillator 1X. Note that, among the components in FIG. 8, the components that achieve the same functions as those of the laser processing apparatuses 100A to 100C shown in FIGS. 2, 5, and 6 are given the same numbers, and redundant descriptions are omitted. .

The laser oscillator 1D has a resonator 4 and a resonator control power source 5B. In the laser processing apparatus 100D of the present embodiment, a high-speed shutter 8 and a spectroscopic unit 7 are disposed between the laser oscillator 1D and the laser processing unit 3. The high-speed shutter 8 is disposed between the resonator 4 and the spectroscopic unit 7, and the spectroscopic unit 7 is disposed between the high-speed shutter 8 and the laser processing unit 3.

Thus, in the present embodiment, the high-speed shutter 8, the high-speed shutter control power source 9, the spectroscopic unit 7, and the laser output detection unit 6 are configured separately from the laser oscillator 1D. The high-speed shutter 8 and the spectroscopic unit 7 are arranged in the optical path between the laser oscillator 1D and the laser processing unit 3.

As described above, according to the third embodiment, the actual laser output is set with the set pulse width W1 based on the timing at which the actual laser output detected using the laser output detector 6 is turned on, as in the second embodiment. Since the high-speed shutter 8 is controlled to be turned off, the pulse output can be controlled in real time. Therefore, it is possible to output the pulse laser beam 10 having a desired pulse width with an apparatus having a simple configuration.

As described above, the laser resonator control power source, the laser oscillator, and the laser oscillation system according to the present invention are suitable for the pulse width control of the laser beam output from the laser resonator.

DESCRIPTION OF SYMBOLS 1A-1D, 1X Laser oscillator 2 Laser processing control apparatus 3 Laser processing part 4

Resonator

5A, 5B, 5X Resonator control power supply 6 Laser output detection part 7 Spectrometer part 8 High speed shutter 9 High speed shutter control power supply 10 Pulse laser beam 100A- 100D, 100X laser processing equipment

Claims

While receiving the output command in which the output timing of the pulse laser beam is designated and the pulse width command in which the pulse width of the pulse laser beam is designated,
Based on the output command, the control power source for outputting the pulse laser beam to the laser resonator is turned ON,
A laser resonator control power source, wherein the control power source is turned off based on an output timing of pulse laser light actually output from the laser resonator and the pulse width command.
While receiving the output waveform of the pulse laser beam from the laser output detector that detects the output waveform of the pulse laser beam actually output from the laser resonator,
Based on the output waveform, detect the output timing of the pulse laser light actually output from the laser resonator,
The laser resonator control power supply according to claim 1, wherein the control power supply is turned off based on the detected output timing and the pulse width command.
A laser resonator that outputs pulsed laser light;
A laser resonator control power source for controlling ON and OFF of the pulsed laser light to be output to the laser resonator by a control power source;
A laser output detector for detecting an output waveform of pulse laser light actually output from the laser resonator;
With
The laser resonator control power supply is
While receiving the output command in which the output timing of the pulse laser beam is designated and the pulse width command in which the pulse width of the pulse laser beam is designated,
Based on the output command, the control power is turned on,
Based on the output waveform, detect the output timing of the pulse laser light actually output from the laser resonator,
A laser oscillator, wherein the control power supply is turned off based on the detected output timing and the pulse width command.
The laser output detector is
4. The laser oscillator according to claim 3, wherein an output waveform of the pulse laser beam is detected using leakage light of the pulse laser beam output from the laser resonator.
A spectroscopic unit that splits the pulse laser beam output from the laser resonator into a first pulse laser beam used for laser processing and a second pulse laser beam used to detect an output waveform of the pulse laser beam; In addition,
4. The laser oscillator according to claim 3, wherein the laser output detection unit detects an output waveform of the pulse laser beam using the second pulse laser beam. 5.
A laser resonator that outputs pulsed laser light;
A laser resonator control power source for controlling ON and OFF of the pulse laser beam to be output to the laser resonator by an output control power source;
A shutter that switches between transmission and blocking of the pulsed laser light output from the laser resonator;
The pulse laser beam output from the laser resonator via the shutter is converted into a first pulse laser beam used for laser processing and a second pulse laser beam used for detection of an output waveform of the pulse laser beam. A spectroscopic unit for spectroscopic analysis;
A laser output detector that detects an output waveform of the second pulse laser beam that is actually output;
Based on the output waveform of the second pulse laser beam, a shutter control power source that controls transmission and blocking by the shutter by a switching control power source;
With
The shutter control power supply is
While receiving the output command in which the output timing of the pulse laser beam is designated and the pulse width command in which the pulse width of the pulse laser beam is designated,
Based on the output command, turn on the switching control power supply,
Based on the output waveform, detect the output timing of the pulse laser light actually output from the shutter,
A laser oscillation system, wherein the switching control power supply is turned off based on the detected output timing and the pulse width command.