WO2014005434A1 - Générateur nanométrique à friction commandé par champ magnétique - Google Patents

Générateur nanométrique à friction commandé par champ magnétique Download PDF

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Publication number
WO2014005434A1
WO2014005434A1 PCT/CN2013/072144 CN2013072144W WO2014005434A1 WO 2014005434 A1 WO2014005434 A1 WO 2014005434A1 CN 2013072144 W CN2013072144 W CN 2013072144W WO 2014005434 A1 WO2014005434 A1 WO 2014005434A1
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Prior art keywords
insulating layer
nano
electrode
film
polymer insulating
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PCT/CN2013/072144
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English (en)
Chinese (zh)
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WO2014005434A8 (fr
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范凤茹
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纳米新能源(唐山)有限责任公司
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Publication of WO2014005434A1 publication Critical patent/WO2014005434A1/fr
Publication of WO2014005434A8 publication Critical patent/WO2014005434A8/fr

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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/04Friction generators

Definitions

  • the invention relates to the field of nanotechnology, and in particular to a magnetic field driven nano friction generator.
  • Nanotechnology also known as nanotechnology, is a technique for studying the properties and applications of materials ranging in size from 0.1 to 100 nanometers.
  • the concept of nanoscience was put forward in the early 1980s.
  • nanotechnology has been widely used in materials, machinery, electronics, biology, medicine and many other fields.
  • nanotechnology energy harvesting and conversion devices due to their unique self-generating and self-driving properties, are likely to play a key role in the manufacture and driving of self-powered nanodevices and nanosystem devices, and have recently been studied by various countries. More and more people are paying attention.
  • Professor Wang Zhonglin of the Georgia Institute of Technology in the United States successfully realized the first piezoelectric nanogenerator that converts mechanical energy into electrical energy using oxidized nanowires.
  • nano-generators based on the piezoelectric effect, various nano-generators based on different materials and structures were successively developed. At present, the output power of nano-generators is sufficient to drive commercial light-emitting diodes (LEDs), small liquid crystal displays, and even self-powered wireless data transmission equipment. The power density has also reached l-10 mW/cm 3 .
  • the object of the present invention is to provide a magnetic field driven nano-friction generator that can generate electricity without directly acting on the generator device itself, in view of the deficiencies of the prior art.
  • the invention provides a magnetic field driven nano friction generator, comprising:
  • One side surface having a micro-nano concave-convex structure is bonded to the second side surface of the first polymer-polymer insulating layer, and one side surface of the intermediate film not provided with the micro-nano concave-convex structure is fixed at the second high a second side surface of the molecular polymer insulating layer; a magnetic material layer on the first electrode or the second electrode;
  • the first electrode and the second electrode are output electrodes of the magnetic field driven nano friction generator.
  • the material used for the magnetic material layer is specifically iron, cobalt or nickel, or specifically an oxide of iron, cobalt or nickel.
  • the magnetic material layer is a high molecular polymer insulating layer having magnetic particles.
  • the magnetic particles are iron, cobalt or nickel particles or oxide particles of iron, cobalt or nickel.
  • the magnetic particles are magnetic nanoparticles.
  • the magnetic material layer is a high molecular polymer insulating layer plated with a magnetic material.
  • the magnetic material is specifically iron, cobalt or nickel, or specifically an oxide of iron, cobalt or nickel.
  • the invention also provides a magnetic field driven nano friction generator, comprising:
  • a first electrode located on the first side surface of the first polymer insulating layer; a second polymer insulating layer; a second electrode, located on the first side of the second polymer insulating layer
  • An intermediate film having a micro-nano concave-convex structure on one surface thereof, wherein a side surface of the intermediate film provided with a micro-nano concave-convex structure is adhered to a second side surface of the first polymer-polymer insulating layer, The residence One side surface of the interlayer film not provided with the micro/nano uneven structure is fixed on the second side surface of the second polymer insulating layer; the first polymer insulating layer or the second polymer is polymerized
  • the insulating layer has a magnetic substance
  • the first electrode and the second electrode are output electrodes of the magnetic field driven nano friction generator.
  • the first polymer insulating layer or the second polymer insulating layer has magnetic particles therein.
  • the magnetic particles are iron, cobalt or nickel particles or oxide particles of iron, cobalt or nickel.
  • the magnetic particles are magnetic nanoparticles.
  • the magnetic field driven nano friction generator provided by the invention directly acts on the generator device itself without external force, but by coating a magnetic material layer on the electrode or using a first polymer polymer insulation layer containing a magnetic substance. Or the second polymer insulation layer, by using a magnetic field and a magnetic force to deform the corresponding polymer polymer insulation layer, thereby driving the whole of the nano-friction generator to bend, which in turn leads to the internal friction interface of the nano-friction generator Relative motion occurs, which in turn generates electrical energy.
  • FIG. 1 is a schematic cross-sectional view showing a first embodiment of a magnetic field driven nano-friction generator provided by the present invention
  • FIG. 2a is a schematic structural view of a patterned silicon template used to fabricate the intervening film of the present invention
  • FIG. 2b is a schematic view of the interposer film of the present invention coated on the silicon template of FIG. 2a
  • FIG. 2c to FIG. An exploded schematic view of a patterned silicon template and an intervening film having micro-nano-convex structures having different shapes produced therefrom;
  • FIG. 3a to 3c are schematic views of an intermediate film having a micro/nano concave-convex structure in a magnetic field driven nano-friction generator according to the present invention
  • 4 is a schematic cross-sectional view of a nano-friction generator when it is bent by an external magnetic field
  • FIG. 5 is a schematic cross-sectional view of a second embodiment of a magnetic field-driven nano-friction generator provided by the present invention
  • Figure 6 is a cross-sectional schematic view of a third embodiment of a magnetic field driven nano-friction generator provided by the present invention.
  • FIG. 1 is a schematic cross-sectional view showing a first embodiment of a magnetic field driven nano-friction generator according to the present invention.
  • the magnetic field driven nano friction generator includes: a first polymer insulating layer 11 , a first electrode 12 , a second polymer insulating layer 13 , a second electrode 14 , an intermediate film 15 , and Magnetic material layer 16.
  • the first electrode 12 is located on the first side surface 11a of the first polymer insulating layer 11
  • the second electrode 14 is located on the first side surface 13a of the second polymer insulating layer 13.
  • the intermediate film 15 is also a high molecular polymer insulating layer between the first high molecular polymer insulating layer 11 and the second high molecular polymer insulating layer 13.
  • One side surface of the intermediate film 15 has a quadrangular pyramid type micro/nano concave-convex structure.
  • the micro/nano concave-convex structure of the intermediate film 15 is not limited to the quadrangular pyramid type, and may be formed into other shapes, which may be striped, cubic or cylindrical, and the like.
  • the micro/nano-convex structure of the intermediate film 15 is usually a regular nano- to micro-scale concave-convex structure.
  • a side surface of the intermediate film 15 not provided with the micro-nano uneven structure is fixed on the second side surface 13b of the second polymer insulating layer 13, and the intermediate film 15 is provided with one side surface of the micro-nano concave-convex structure and the first surface
  • the second side surface l ib of the polymer polymer insulating layer 11 is fixedly bonded to the front surface to form a frictional interface therebetween.
  • the magnetic material layer 16 is located on the first electrode 12.
  • the first electrode 12 and the second electrode 14 are output electrodes of a magnetic field driven nano friction generator, and the first electrode 12 and the second electrode 14 may be externally connected with an ammeter or a voltmeter to form an external circuit.
  • the patterned silicon template can be formed first, and then the patterned silicon template is used as a mold to fabricate the intervening film 15. Method. This will be specifically described below in conjunction with Figures 2a-2e and 3a-3c.
  • Figure 2a shows a schematic view of the structure of a patterned silicon template for making the intervening film of the present invention
  • Figure 2b shows a schematic view of the intervening film of the present invention coated on the silicon template of Figure 2a
  • Figure 2c to Figure 2e shows an exploded schematic view of a different patterned silicon template and an intervening film having micro-nano-convex structures having different shapes fabricated therefrom.
  • the specific method for fabricating the patterned silicon template as shown in FIG. 2a is as follows: First, a regular pattern is formed on the surface of a 4 inch (100) crystal wafer by photolithography; and then a regular pattern is prepared. The silicon wafer is etched through the corresponding etching process to form an array structure corresponding to the micro/nano convex structure. For example, by anisotropic etching by a wet etching process, a concave quadrangular pyramid array structure can be etched, or an isotropic etching can be performed by a dry etching process, and a concave isopropyl alcohol can be etched out. After cleaning, the silicon wafer is subjected to surface silanization treatment in an atmosphere of trimethyl chlorosilane (for example, manufactured by Sigma Aldrich Co., Ltd.) to form a desired patterned silicon template for use in making an intermediate film for use.
  • trimethyl chlorosilane for example, manufactured by Sigma Aldrich Co., Ltd.
  • an intervening film is prepared by using a polydiphenylsiloxane (hereinafter referred to as PDMS).
  • PDMS polydiphenylsiloxane
  • a PDMS precursor and a curing agent for example, Sylgard 184, Tow Corning
  • a curing agent for example, Sylgard 184, Tow Corning
  • the mixture is then applied to, for example, the surface of the patterned silicon template as shown in Figure 2a, as shown in Figure 2b, after vacuum degassing, and applied to the surface of the silicon template by spin coating.
  • the excess mixture is applied to form a uniform thin film of PDMS liquid on the surface of the silicon template.
  • the entire silicon template coated with the PDMS liquid film is cured in an environment of 85 ° C for 1 hour, at which time a uniform layer of PDMS film (cured by a PDMS liquid film) having a specific micro-convex structure array can be obtained from
  • the silicon template is peeled off to form an intervening film of the present invention, that is, a PDMS film having a micro-nano-convex structure array of a specific shape.
  • FIG. 2c-2e respectively show a silicon template of a PDMS film of three different shapes of micro-nano-convex structure arrays fabricated by the above method, and an exploded view of the corresponding PDMS film produced, wherein FIG. 2c shows a PDMS film of a stripe-shaped micro/nano-convex structure array, FIG. 2d shows a PDMS film having a cubic micro-nano-convex structure array and FIG. 2e shows A PDMS film having a quadrangular pyramid type micro/nano bump structure array.
  • FIG. 3a-3c The surface microstructure of the three shapes of the micro/nano relief structure is shown in Figures 3a-3c, and the array unit (i.e., the protrusions in the figure) of each PDMS film is limited in size to about 10 ⁇ m.
  • a pattern array with smaller scale elements can also be prepared with dimensions as small as 5 ⁇ m and with the same high quality characteristics.
  • Figures 3a-3c show the array elements of the micro-nano-convex structure, the length of the same size as the black thick line (the ruler in the figure) in the figure means the length of the object ⁇ .
  • each figure also shows a high-magnification SEM photograph of the micro-nano-convex structure of the intermediate film taken at an angle of 45°, and the length of the same size as the black thick line (the ruler in the figure) indicates The length of the physical 5 ⁇ .
  • the micro/nano bump array structure of the intervening film is very uniform and regular. From this, it is understood that a large-scale uniform plastic microstructure can be prepared by the above method of the present invention.
  • the intervening film having a quadrangular pyramid type micro/nano-convex structure array as shown in Fig.
  • each quadrangular pyramid unit has a sharp tip of a complete quadrangular pyramid geometry, which is advantageous for power generation.
  • the friction area is increased during the process and the power output efficiency of the nanogenerator is increased.
  • the prepared PDMS film i.e., the intermediate film
  • the first electrode 12 is plated on the first side surface 11a of the first polymer insulating layer 11 by an evaporation method
  • the second electrode 14 is plated on the second polymer insulating layer 13 by an evaporation method. On the first side surface 13a.
  • Step 1) and step 2) can be performed simultaneously, and step 2) can also be performed before step 1).
  • a layer 16 of magnetic material is prepared on the first electrode 12 of the prepared friction generator.
  • the magnetic material may be directly plated on the first electrode 12 to form the magnetic material layer 16.
  • the magnetic material may be iron, cobalt or nickel, or may be an oxide of iron, cobalt or nickel.
  • the magnetic material layer 16 is a high molecular polymer insulating layer having magnetic particles. Taking a polymer polymer insulating layer as a PDMS film as an example, it will be synthesized or purchased directly. After the surface of the magnetic particles is modified, it is dissolved in a mixed solution containing a PDMS monomer and a crosslinking agent, and the mixed solution is coated on the first electrode 12 by spin coating to form a magnetic high polymer. The film is then dried.
  • the magnetic particles are specifically iron, cobalt or nickel particles, or oxide particles of iron, cobalt or nickel. Further, the magnetic particles are nano-sized, that is, magnetic nanoparticles.
  • the magnetic material layer 16 is specifically a polymer polymer insulating layer plated with a magnetic material.
  • a polymer polymer insulating layer as a PDMS film as an example, a mixed solution containing a PDMS monomer and a crosslinking agent is first coated on the first electrode 12 by spin coating, and then dried to form a PDMS film; A magnetic material is plated on the PDMS film by vapor deposition or vacuum sputtering.
  • the magnetic material is specifically iron, cobalt or nickel, or specifically an oxide of iron, cobalt or nickel.
  • the magnetic friction driven nano-friction generator is thus completed.
  • a layer of magnetic material 16 is added to the friction generator, and the magnetic material layer 16 has a magnetic substance such as magnetic particles or magnetic material.
  • first polymer insulating layer 11 and the second polymer insulating layer 13 are in direct contact with the intermediate film 15, as long as the first polymer insulating layer 11 and the second are secured Both of the polymer polymer insulating layers 13 may be different from the material of the intermediate film 15.
  • the first polymer insulating layer 11, the second polymer insulating layer 13, and the polymer insulating layer constituting the magnetic material layer 16 are respectively selected from the group consisting of polydecyl acrylate and polydiphenyl silicon.
  • the intermediate film 15 is selected from another one different from the first polymer insulating layer 11 and the second polymer insulating layer 13, and the intermediate film 15 is also selected from the first polymer insulating layer 11 or
  • the second high molecular polymer insulating layer 13 is a material within a range of materials that can be selected.
  • the first electrode 12 and the second electrode 14 in the above embodiment are all metal thin films, and the metal thin film may be selected from any one of gold, silver, platinum, aluminum, nickel, copper, titanium, iron, selenium and alloys thereof.
  • the first polymer polymer insulating layer 11 and the second polymer polymer insulating layer 13 have a thickness of 100 ⁇ m - 500 ⁇ m; the intermediate film 15 has a thickness of 50 ⁇ m - ⁇ ; the micro-nano structure has a protrusion height of less than or equal to 10 ⁇ .
  • the first polymer insulating layer 11, the first electrode 12, the second polymer insulating layer 13, the second electrode 14, the intermediate film 15, and the magnetic material layer 16 are all flexible flat structures, which are bent or deformed. Causes friction to electrify.
  • FIG. Figure 4 is a schematic cross-sectional view of a nano-friction generator driven by an external magnetic field.
  • the magnet in the external environment, the magnet generates a magnetic field, and under the action of the magnetic field, the magnetic material layer 16 in the nano-friction generator is deformed, thereby driving the nano-friction generator to be bent as a whole.
  • the surface of the intermediate film 15 having the micro-nano-convex structure rubs against the surface of the first polymer-polymer insulating layer 11 to generate an electrostatic charge, due to the internal first electrode of the entire nano-friction generator
  • the first polymer insulating layer 11 between the 12 and the intermediate film 15 and the second polymer insulating layer 13 between the second electrode 14 and the intermediate film 15 are both insulating structures, which can prevent free electrons.
  • the generation of the electrostatic charge changes the capacitance between the first electrode 12 and the second electrode 14, resulting in a potential difference between the first electrode 12 and the second electrode 14. Due to the existence of a potential difference between the first electrode 12 and the second electrode 14, the free electrons will flow from the one electrode having the lower potential, that is, the first electrode 12, to the second electrode 14 having the higher potential, through the external circuit, thereby being in the external circuit. Current is formed in the middle.
  • the external circuit refers to a circuit that communicates between the first electrode 12 and the second electrode 14. In the case where the first electrode 12 and the second electrode 14 are externally connected to the ammeter, current flows through the ammeter.
  • the magnetic field-driven nano-friction generator provided in this embodiment does not require an external force to directly act on the generator device itself, but forms a magnetic material layer on the first electrode, and deforms the magnetic material layer by using a magnetic field and a magnetic force. Thereby, the whole of the nano-friction generator is bent, and the bending causes the relative friction of the internal friction interface of the nano-friction generator to generate electricity.
  • Figure 5 is a cross-sectional schematic view of a second embodiment of a magnetic field driven nano-friction generator provided by the present invention. As shown in Fig. 5, this embodiment differs from the first embodiment described above in that the magnetic material layer 21 is located on the second electrode 22. Other structures are the same as those in the first embodiment, and are not described herein again.
  • FIG. 6 is a cross-sectional schematic view of a third embodiment of a magnetic field driven nano-friction generator provided by the present invention.
  • the magnetic field driven nano-friction generator comprises: a first polymer insulating layer 31, a first electrode 32, a second polymer insulating layer 33, a second electrode 34, and an intermediate film 35.
  • the first electrode 32 is located on the first side surface 31a of the first polymer insulating layer 31
  • the second electrode 34 is located on the first side surface 33a of the second polymer insulating layer 33.
  • the intermediate film 35 is also a high molecular polymer insulating layer between the first high molecular polymer insulating layer 31 and the second high molecular polymer insulating layer 33.
  • One side surface of the intermediate film 35 has a quadrangular pyramid type micro/nano concave-convex structure.
  • the micro/nano concave-convex structure of the intermediate film 35 is not limited to the quadrangular pyramid shape, and may be formed into other shapes, which may be striped, cubic or cylindrical, and the like.
  • the micro/nano-convex structure of the intermediate film 35 is generally a regular nano- to micro-scale concave-convex structure.
  • One side surface of the intermediate film 35 not provided with the micro/nano concave-convex structure is fixed on the second side surface 33b of the second polymer insulating layer 33, and the intermediate film 35 is provided with one side surface of the micro-nano concave-convex structure and the first surface
  • the second side surface 31b of the polymer polymer insulating layer 31 is positively bonded and fixedly connected to form a frictional interface therebetween.
  • the first polymer insulating layer 31 has a magnetic substance which is both a friction layer and a magnetic layer of this embodiment.
  • the first electrode 32 and the second electrode 34 are output electrodes of a magnetic field driven nano friction generator, and the first electrode 32 and the second electrode 34 may be externally connected to an ammeter or a voltmeter to form an external circuit.
  • the method for manufacturing the magnetic field driven nano friction generator provided by the embodiment includes the following steps: 1) First, an intermediate film 35 is prepared.
  • the manufacturing method of the intervening film of this embodiment is the same as that of the first embodiment, and details are not described herein again.
  • a first polymer insulating layer 31 containing magnetic particles is obtained. Specifically, after the surface of the magnetic particles synthesized or directly purchased is modified, it is dissolved in a mixed solution containing a polyethylene solution and a crosslinking agent, and a magnetic polymer film is formed by spin coating. Then dry it.
  • the magnetic particles are specifically iron, cobalt or nickel particles, or oxide particles of iron, cobalt or nickel in particular. Further, the magnetic particles may be nanoscale, that is, the magnetic particles are magnetic nanoparticles.
  • the first electrode 32 is plated on the first side surface 31a of the first polymer insulating layer 31 containing magnetic particles by vapor deposition, and the second electrode 34 is plated to the second highest by vapor deposition.
  • the first side surface 33a of the molecular polymer insulating layer 33 is on the surface.
  • the magnetic friction driven nano-friction generator is thus completed.
  • the first polymer insulating layer 31 used in the preparation of the friction generator of the present embodiment has a magnetic substance, which is specifically a magnetic particle.
  • first polymer insulating layer 31 and the second polymer insulating layer 33 are all in direct contact with the intermediate film 35, as long as the first polymer insulating layer 31 and the second are secured Both of the polymer polymer insulating layers 33 may be different from the material of the intermediate film 35.
  • the first polymer insulating layer 31 and the second polymer insulating layer 33 are respectively selected from the group consisting of polydecyl methacrylate, polydithiosiloxane, polyimide film, and aniline resin film. , polyacetal film, ethyl cellulose film, polyamide film, melamine furfural film, polyethylene glycol succinate film, cellulose film, cellulose acetate film, polyethylene adipate Film, diallyl phthalate film, fiber regenerated sponge film, polyurethane elastomer film, styrene propylene copolymer film, styrene butadiene copolymer film, rayon film, polyfluorene Film, methacrylate film, polyvinyl alcohol film, polyvinyl alcohol film, polyester film, polyisobutylene film, polyurethane flexible sponge film, polyethylene terephthalate film, polyvinyl butyral film, Formaldehyde phenol film, ne
  • the intermediate film 35 is selected from the other ones different from the first polymer insulating layer 31 and the second polymer insulating layer 33, and the intermediate film 35 is also selected from the first polymer insulating layer 31 or
  • the second polymer insulating layer 33 is a material within a range of materials that can be selected.
  • the first electrode 32 and the second electrode 34 in the above embodiment are all metal thin films, and the metal thin film may be selected from any one of gold, silver, platinum, aluminum, nickel, copper, titanium, iron, selenium and alloys thereof.
  • the first polymer polymer insulating layer 31 and the second polymer polymer insulating layer 33 have a thickness of 100 ⁇ m - 500 ⁇ m; the intermediate film 35 has a thickness of 50 ⁇ m - ⁇ ; and the micro-nano structure has a protrusion height of less than or equal to 10 ⁇ .
  • the first polymer insulating layer 31, the first electrode 32, the second polymer insulating layer 33, the second electrode 34, and the intermediate film 35 are all flexible flat structures, which cause triboelectric charging by bending or deformation.
  • the power generation principle of the magnetic field driven nano-friction generator provided in this embodiment is similar to that of the magnetic field-driven nano-friction generator provided in the first embodiment. The difference is that under the action of the magnetic field generated by the external environment, the nano-friction generator The first polymer polymer insulation layer is deformed to drive the nano-friction generator to bend as a whole, and the bending causes the relative friction of the internal friction interface of the nano-friction generator to generate electric energy.
  • the present invention also provides a fourth embodiment of a magnetic field driven nano-friction generator.
  • This embodiment differs from the third embodiment in that the second polymer insulating layer contains magnetic particles.
  • Other structures are the same as those in the third embodiment, and are not described herein again.

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Abstract

L'invention concerne un générateur nanométrique à friction commandé par champ magnétique, comprenant : une première couche d'isolation en polymère macromoléculaire (11) ; une première électrode (12) située sur la première surface latérale de la première couche d'isolation en polymère macromoléculaire ; une seconde couche d'isolation en polymère macromoléculaire (13) ; une seconde électrode (14) située sur la première surface latérale de la seconde couche d'isolation en polymère macromoléculaire ; un film intermédiaire (15) comprenant une structure irrégulière micro-nano sur une surface latérale de celui-ci ; la surface latérale du film intermédiaire comprenant la structure irrégulière micro-nano presse contre la seconde surface latérale (11b) de la première couche d'isolation en polymère macromoléculaire, et la surface latérale du film intermédiaire sans la structure irrégulière micro-nano est fixée sur la seconde surface latérale (13b) de la seconde couche d'isolation en polymère macromoléculaire ; et une couche de matériau magnétique située sur la première ou la seconde électrode. Le générateur peut utiliser la commande d'un champ magnétique pour générer de l'énergie.
PCT/CN2013/072144 2012-07-05 2013-03-04 Générateur nanométrique à friction commandé par champ magnétique WO2014005434A1 (fr)

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CN107196551B (zh) * 2017-07-20 2019-01-08 京东方科技集团股份有限公司 一种摩擦发电机、具有该摩擦发电机的装置及制作方法
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