WO2013186912A1 - Substrate housing container minimizing intrusion of dust - Google Patents

Substrate housing container minimizing intrusion of dust Download PDF

Info

Publication number
WO2013186912A1
WO2013186912A1 PCT/JP2012/065355 JP2012065355W WO2013186912A1 WO 2013186912 A1 WO2013186912 A1 WO 2013186912A1 JP 2012065355 W JP2012065355 W JP 2012065355W WO 2013186912 A1 WO2013186912 A1 WO 2013186912A1
Authority
WO
WIPO (PCT)
Prior art keywords
opening
lid
peripheral edge
container
main body
Prior art date
Application number
PCT/JP2012/065355
Other languages
French (fr)
Japanese (ja)
Inventor
雄大 金森
Original Assignee
ミライアル株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ミライアル株式会社 filed Critical ミライアル株式会社
Priority to PCT/JP2012/065355 priority Critical patent/WO2013186912A1/en
Priority to JP2014521075A priority patent/JP5989110B2/en
Priority to TW102118933A priority patent/TW201402427A/en
Publication of WO2013186912A1 publication Critical patent/WO2013186912A1/en

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67376—Closed carriers characterised by sealing arrangements

Definitions

  • the present invention relates to a substrate storage container, and in particular, suppresses intrusion of dust and the like associated with an air flow that is about to flow from the outside of the container body at the moment when the lid that closes the container body opening is removed from the peripheral edge of the opening.
  • the present invention relates to a substrate storage container.
  • a container having a container body, a lid, and a seal member is known as a container for storing a substrate such as a semiconductor wafer.
  • the container main body has a substrate storage space in which a plurality of substrates can be stored therein, and has an opening peripheral edge portion in which one end of the container main body opening communicating with the substrate storage space is formed.
  • the lid can be attached to and detached from the peripheral edge of the opening, has a seal member attaching portion, and can close the container main body opening.
  • the seal member is attached to the seal member mounting portion of the lid, can contact the peripheral edge of the opening, is interposed between the peripheral edge of the opening and the lid, and is in close contact with the peripheral edge of the opening,
  • a container main body opening part is obstruct
  • the lid that closes the container main body opening is removed from the peripheral edge of the opening. If it does (it tries to open), the seal member which is in close contact with the peripheral edge of the opening becomes longer in the depth direction. Therefore, the volume of the internal space formed by the container main body and the lid is increased. Further, in the process of removing the lid from the peripheral edge of the opening, the inside of the container body temporarily becomes negative pressure. Then, at the moment when the lid is removed from the peripheral edge of the opening, the airflow flows from the outside to the inside of the container body. Along with this air flow, dust (including dust) may enter the inside of the container body from the outside. Then, there is a risk that intruding dust or the like adheres to a substrate such as a semiconductor wafer and the substrate is contaminated and becomes defective.
  • the present invention provides a substrate storage container that can suppress the intrusion of dust and the like due to an airflow that is about to flow in from the outside of the container body at the moment when the lid that closes the container body opening is removed from the periphery of the opening.
  • the purpose is to provide.
  • the present invention includes a container main body having an opening peripheral edge portion in which a substrate storage space capable of storing a plurality of substrates is formed, and an opening peripheral edge portion formed at one end portion and communicating with the substrate storage space.
  • a lid that can be attached to and detached from the container, has a seal member attachment portion, and can close the container body opening, and is attached to the seal member attachment portion of the lid, and abuts on the peripheral edge of the opening
  • a seal member that is interposed between the peripheral edge of the opening and the lid and is in close contact with the peripheral edge of the opening to close the container main body opening in an airtight state together with the lid;
  • the direction connecting the one end portion of the container body and the other end portion with respect to the one end portion is referred to as a near depth direction, and the direction perpendicular to the near depth direction is referred to as an orthogonal direction, Along the front depth direction From the inner surface of the first opening, the second opening inner surface along the orthogonal direction inside the orthogonal direction than the inner surface
  • the air flow baffle wall is mainly composed of a filter having air permeability.
  • the air flow baffle wall is elastically deformable, and is compressed between the opening peripheral portion and the inner surface of the lid in a state where the lid closes the container main body opening, When the lid is removed from the peripheral edge of the opening, it is preferable that the seal member is also in contact with the inner surface of the lid even when the seal member is separated from the peripheral edge of the opening.
  • the surface where the airflow collides with the airflow baffle wall on the path of the airflow is inclined toward the outside in the orthogonal direction with respect to the near depth direction.
  • the substrate storage that can suppress the intrusion of dust and the like due to the airflow that is about to flow in from the outside of the container body at the moment when the lid that closes the container body opening is removed from the peripheral edge of the opening.
  • a container can be provided.
  • FIG. 4 is a plan sectional view showing a state in which the cover body is started to be removed from the state shown in FIG. 3.
  • FIG. 5 is a plan sectional view showing a state where a lid is further removed from the state shown in FIG. 4. It is a plane sectional view expanding and showing the circumference of the air current baffle wall of the substrate storage container concerning a 2nd embodiment.
  • FIG. 1 is an exploded perspective view showing a substrate storage container according to the first embodiment of the present invention.
  • FIG. 2 is a plan sectional view of the substrate storage container according to the first embodiment.
  • FIG. 3 is an enlarged plan sectional view showing the periphery of the sealing member and the airflow baffle wall of the substrate storage container according to the first embodiment.
  • FIG. 4 is a plan sectional view showing a state in which the cover body is started to be removed from the state shown in FIG.
  • FIG. 5 is a plan sectional view showing a state in which the lid is further removed from the state shown in FIG.
  • a direction (right direction in FIG. 2) from the container body 2 described later to the lid body 3 is defined as the front direction D11, and the opposite direction is defined as the depth direction D12. This is defined as the front depth direction D1.
  • the near depth direction D1 can also be referred to as a direction connecting one end of the container body 2 and the other end with respect to the one end.
  • a direction from the lower wall 24 to the upper wall 23 to be described later is defined as an upward direction D21
  • the opposite direction is defined as a downward direction D22. Together, it is defined as the vertical direction D2.
  • the substrate W (see FIGS. 1 and 2) stored in the substrate storage container 1 is a disk-shaped silicon wafer, glass wafer, sapphire wafer, etc., and is a thin one used in the industry.
  • the substrate W in this embodiment is a silicon wafer having a diameter of 450 mm.
  • the substrate storage container 1 includes a container body 2, a lid 3, a seal member 4, a substrate support plate-like portion 5, and a front retainer (not shown). ing.
  • the container body 2 has an opening peripheral edge 28 in which a container body opening 21 is formed at one end, and a cylindrical wall portion 20 with the other end closed.
  • a substrate storage space 27 is formed in the container body 2.
  • the substrate storage space 27 is formed so as to be surrounded by the wall portion 20.
  • the substrate support plate-shaped portion 5 is disposed in a portion of the wall portion 20 that forms the substrate storage space 27.
  • a plurality of substrates W can be stored in the substrate storage space 27.
  • the substrate support plate-like portion 5 is provided on the wall portion 20 so as to form a pair in the left-right direction D3 in the substrate storage space 27.
  • the substrate support plate-like portion 5 is provided on the near side D11 side and constitutes a large part of the substrate support plate-like portion 5, and the back side substrate support provided on the end portion in the depth direction D12 side.
  • Unit 52. When the container body opening 21 is not closed by the lid 3, the plate-like body 51 has the edges of the plurality of substrates W in a state in which the adjacent substrates W are spaced apart and arranged in parallel. Can be supported.
  • the back substrate support portion 52 is disposed so as to make a pair with a later-described front retainer in the substrate storage space 27 and can support the edges of the plurality of substrates W.
  • the back side substrate support portion 52 cooperates with the front retainer when the container main body opening 21 is closed by the lid 3, and the edge portions of the plurality of substrates W are formed as plate-like portions of the substrate support plate-like portion 5.
  • the rear portions of the plurality of substrates W are supported while being separated from the main body 51 and arranged in parallel.
  • the lid 3 can be attached to and detached from the opening peripheral edge 28 (container main body opening 21), and the container main body opening 21 can be closed.
  • the front retainer is provided in a portion of the lid 3 that faces the substrate storage space 27 when the container main body opening 21 is closed by the lid 3.
  • the front retainer is disposed so as to make a pair with the back side substrate support portion 52 of the substrate support plate-like portion 5.
  • the front retainer can support the front portions of the edges of the plurality of substrates W when the container main body opening 21 is closed by the lid 3.
  • the front retainer cooperates with the back side substrate support portion 52 of the substrate support plate-like portion 5 to support the plurality of substrates W, thereby adjacent to the front retainer.
  • a plurality of substrates W are held in a state in which the substrates W to be separated are separated from each other at a predetermined interval and arranged in parallel.
  • the wall portion 20 of the container body 2 has a back wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26.
  • the back wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of a plastic material or the like. In the first embodiment, they are integrally formed of polycarbonate.
  • the first side wall 25 and the second side wall 26 face each other, and the upper wall 23 and the lower wall 24 face each other.
  • the rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the back wall 22.
  • the front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 form an opening peripheral portion 28 that forms a container body opening 21 having a positional relationship facing the back wall 22.
  • the opening peripheral edge 28 is provided at one end of the container main body 2, and the back wall 22 is located at the other end of the container main body 2.
  • the outer shape of the container body 2 formed by the outer surface of the wall portion 20 is box-shaped.
  • the inner surface of the wall portion 20, that is, the inner surface of the back wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26 are surrounded by these. 27 is formed.
  • the container main body opening 21 formed in the opening peripheral edge portion 28 is surrounded by the wall portion 20 and communicates with the substrate storage space 27 formed in the container main body 2.
  • the opening peripheral edge portion 28 includes a first opening inner surface 281 along the near depth direction D1, a second opening inner surface 282 along the orthogonal direction D2-D3, and an air flow baffle wall 283.
  • the second opening inner surface 282 is an inner surface along the orthogonal direction D2-D3 inside the orthogonal direction D2-D3 with respect to the first opening inner surface 281 in a state where the lid 3 closes the container main body opening 21.
  • the 1st opening inner surface 281 should just look along macroscopically along the near depth direction D1, and does not need to be parallel to the near depth direction D1.
  • the second opening inner surface 282 only needs to be along the orthogonal direction D2-D3 as viewed macroscopically, and may not be parallel to the orthogonal direction D2-D3.
  • the airflow baffle wall 283 extends from the inner surface 282 of the second opening inside the orthogonal direction D2-D3 from the seal member 4. As shown in FIG. 4, the airflow baffle wall 283 flows into the first opening inner surface by flowing from the outside of the container body 2 at the moment when the lid 3 closing the container body opening 21 is removed from the opening peripheral edge 28. 281 and the second opening inner surface 282 are provided on the path of the airflow A1 that flows along the inner surface 282.
  • the air flow baffle wall 283 may be configured such that the base end portion 283B of the airflow baffle wall 283 is airtightly insert-molded into the opening peripheral edge portion 28 of the container main body 2, or the fitting groove formed in the opening peripheral edge portion 28 of the container main body 2.
  • the base end portion 283B may be configured to be airtightly fitted.
  • the airflow baffle wall 283 is configured mainly with a filter having air permeability. A part of the airflow baffle wall 283 may be constituted by other than the filter.
  • the filter can pass through the air flow A1, but does not pass all or a part of dust or the like that tends to enter the inside of the container body 2 with the air flow A1.
  • the airflow baffle wall 283 can be elastically deformed. As shown in FIG. 3, the air flow baffle wall 283 is compressed between the opening peripheral portion 28 and the inner surface 32 of the lid 3 in a state where the lid 3 closes the container main body opening 21. Further, as shown in FIG. 4, the airflow baffle wall 283 has a lid body at the distal end portion 283 ⁇ / b> A even when the seal member 4 is separated from the opening peripheral edge portion 28 when the lid body 3 is removed from the opening peripheral edge portion 28. 3 is in contact with the inner surface 32 of the substrate.
  • the airflow baffle wall 283 along the near depth direction D1 is compressed so that a crushing margin of, for example, 1 to 3 mm is formed compared to a state where the airflow baffle wall 283 and the inner surface 32 of the lid 3 are in contact with each other without being compressed. .
  • the length of the airflow baffle wall 283 along the near depth direction D1 can be arbitrarily set. Further, the length of the air flow baffle wall 283 along the near depth direction D1 has a length equal to or longer than the crushing margin in the uncompressed state, and is, for example, 4 to 10 mm.
  • the lid 3 has a substantially rectangular shape that substantially matches the shape of the opening peripheral edge 28 of the container body 2.
  • the lid 3 is detachable from the opening peripheral edge 28 of the container body 2. By attaching the lid 3 to the opening peripheral edge 28, the lid 3 can close the container body opening 21.
  • a seal member fitting groove 31 is formed on the outer peripheral edge portion of the lid body 3 along the outer peripheral edge portion of the lid body 3 as a seal member mounting portion.
  • the base end portion 42 of the seal member 4 is fitted in the seal member fitting groove 31, whereby the seal member 4 is attached to the lid 3.
  • the seal member 4 is made of, for example, elastically deformable POE (polyoxyethylene), PEE, fluorine rubber, or silicon rubber.
  • the annular seal member 4 is arranged so as to go around the outer peripheral edge of the lid 3.
  • the seal member 4 can come into contact with the opening peripheral edge portion 28 at the distal end portion 41.
  • the seal member 4 is interposed between the opening peripheral portion 28 and the lid body 3 so as to be in close contact with the opening peripheral portion 28, thereby closing the container body opening portion 21 together with the lid body 3 in an airtight state.
  • the lid body 3 When the lid body 3 is attached to the opening peripheral edge portion 28, the outer peripheral edge portion of the lid body 3 comes into contact with the inner peripheral edge portion of the opening peripheral edge portion 28 of the container body 2 via the seal member 4. Thereby, the seal member 4 is sandwiched between the outer peripheral edge portion of the lid body 3 and the inner peripheral edge portion of the opening peripheral edge portion 28 and elastically deforms, and the lid body 3 closes the container body opening portion 21 in a sealed state.
  • the substrate W By removing the lid 3 from the opening peripheral edge 28, the substrate W can be taken into and out of the substrate storage space 27 in the container body 2.
  • the shapes (lengths) of the seal member 4 and the airflow baffle wall 283 are gradually restored in the near depth direction D1.
  • the seal member 4 is in close contact with the second opening inner surface 282 of the opening peripheral edge portion 28, the container body opening portion 21 is closed in an airtight state, so that the inside of the container body 2 is in a negative pressure state.
  • the shapes (lengths) of the seal member 4 and the airflow baffle wall 283 are further restored in the front depth direction D1. Then, first, the front end portion 41 of the seal member 4 is separated from the second opening inner surface 282. Note that the tip portion 283A of the airflow baffle wall 283 is in contact with the inner surface 32 of the lid 3.
  • the inside of the container main body 2 is in a negative pressure state and the container main body opening 21 is not blocked.
  • Air (outside air) becomes an air flow A1 and flows into the container body 2.
  • the airflow baffle wall 283 is mainly composed of a filter, the air pressure inside the container body 2 does not become the same as the external pressure from the negative pressure state, but gradually approaches the external pressure.
  • the air flow A ⁇ b> 1 flows along the first opening inner surface 281 and the second opening inner surface 282 of the opening peripheral edge portion 28 while avoiding the seal member 4. Further, dust or the like tends to enter the inside of the container body 2 along with the airflow A1.
  • the airflow A1 and dust collide with the airflow baffle wall 283 that is in contact with the inner surface 32 of the lid 3.
  • the collided airflow A1 passes through the airflow baffle wall 283 mainly composed of a filter.
  • all or a part of the bumped dust cannot pass through the airflow baffle wall 283. Accordingly, it is possible to suppress the amount of dust or the like that enters the inside of the container body 2 (on the downstream side of the airflow baffle wall 283).
  • the shape (length) of the air flow baffle wall 283 is further restored in the front depth direction D1. Then, the tip 283 ⁇ / b> A of the airflow baffle wall 283 is separated from the inner surface 32 of the lid 3. Thereby, the air pressure inside the container body 2 is completely the same as the pressure outside the container body 2.
  • the opening peripheral edge portion 28 is located inside the first opening inner surface 281 along the near depth direction D1 and inside the orthogonal direction D2-D3 with respect to the first opening inner surface 281 in a state where the lid 3 closes the container body opening portion 21.
  • a second opening inner surface 282 along the orthogonal direction D2-D3 and an air flow baffle wall 283 extending from the second opening inner surface 282 inside the orthogonal direction D2-D3 with respect to the seal member 4, and the container body opening 21 is At the moment when the closed lid 3 is removed from the opening peripheral portion 28, the lid 3 is provided on the path of the air flow A1 that flows from the outside of the container body 2 and flows along the first opening inner surface 281 and the second opening inner surface 282.
  • the lid 3 that closes the container main body opening 21 flows from the outside of the container main body 2 at the moment when the lid 3 is removed from the opening peripheral edge 28, and the first opening inner surface 281 and the first inner surface 281.
  • the airflow A1 flowing along the inner surface 282 of the two openings hits the airflow baffle wall 283. For this reason, dust or the like that tends to enter the inside of the container main body 2 along with the air flow A ⁇ b> 1 is less likely to enter the inside of the container main body 2.
  • the airflow baffle wall 283 is mainly composed of a filter having air permeability. Therefore, according to the first embodiment, it is possible to suppress dust and the like that is about to enter the inside of the container main body 2 along with the air flow A1, and about the air current A1, It can flow into the inside of the container body 2. Accordingly, dust or the like hardly diffuses after hitting the airflow baffle wall 283, and the speed of the airflow A1 decreases, so that the dust or the like is easily captured by the airflow baffle wall 283. In addition, dust or the like captured by the airflow baffle wall 283 is easily collected in a corner portion formed by the second opening inner surface 282 and the airflow baffle wall 283.
  • the airflow baffle wall 283 can be elastically deformed, and the opening peripheral portion 28 and the inner surface 32 of the lid 3 are in a state where the lid 3 closes the container body opening 21.
  • the seal member 4 is also in contact with the inner surface 32 of the lid 3 when it is separated from the opening peripheral edge 28. Therefore, according to the first embodiment, even if the seal member 4 is separated from the opening peripheral portion 28 and the container main body opening 21 is not blocked, the airflow A1 and dust from the outside of the container main body 2 are not covered by the lid. 3 hits against the air flow baffle wall 283 that is in contact with the inner surface 32 of the air.
  • FIG. 6 is an enlarged plan sectional view showing the periphery of the airflow baffle wall of the substrate storage container according to the second embodiment.
  • illustration of the lid 3 is omitted.
  • the surface 283C where the airflow collides with the airflow baffle wall 283 on the path of the airflow A1 is inclined outward in the orthogonal direction D2-D3 with respect to the near depth direction D1.
  • the angle ⁇ is inclined.
  • the inclination angle ⁇ is, for example, 45 degrees or more.
  • the airflow baffle wall 283 is made of a non-breathable member.
  • the airflow baffle wall 283 may be molded simultaneously with the opening peripheral edge 28 of the container body 2, or may be insert-molded into the opening peripheral edge 28 after being formed as a separate part.
  • the airflow baffle wall 283 may be attached to the opening peripheral edge 28 after being formed as a separate part.
  • the second embodiment is different from the first embodiment mainly in the configuration described above, but the other configurations are the same as those in the first embodiment. Therefore, in 2nd Embodiment, about the same member as 1st Embodiment, it shows with the same code
  • the substrate storage container according to the second embodiment having the above configuration having the above configuration, the following effects can be obtained.
  • the surface 283C where the airflow collides with the airflow baffle wall 283 on the path of the airflow A1 is inclined outward in the orthogonal direction D2-D3 with respect to the near depth direction D1. For this reason, dust or the like entering the container body 2 can be pushed back upstream by the airflow baffle wall 283.
  • This effect is particularly prominent when the airflow baffle wall 283 is made of a non-breathable member.
  • the seal member 4 may be in contact with the inner surface 32 of the lid 3 even when the airflow baffle wall 283 is separated from the opening peripheral portion 28. it can.
  • the airflow baffle wall 283 may be comprised from the member which does not have air permeability. Moreover, in 1st Embodiment and 2nd Embodiment, although the front-end
  • the seal member 4 may be in contact with the inner surface 281 of the first opening, as long as it can hold the substrate container 1 in an airtight state when the lid 3 is closed.
  • the shape of the container main body and the lid, the number of substrates that can be stored in the container main body, and the dimensions thereof are the shape of the container main body 2 and the lid 3 in this embodiment, and the number of substrates W that can be stored in the container main body 2.
  • the dimensions are not limited.
  • the substrate support plate-like portion is not limited to the configuration of the substrate support plate-like portion 5 of the present embodiment.

Abstract

A substrate housing container according to the present invention comprises: a container body (2) with a container body opening formed at one end to communicate with a substrate housing space, the container body having an opening periphery (28); a cover body (3) which is removably attachable to the opening periphery (28) and capable of closing a container body opening (21); and a seal member (4) which is mounted on the cover body (3) and is interposed between the opening periphery (28) and the cover body (3) to hermetically seal the container body opening (21) in cooperation with the cover body (3) by coming in close contact with the opening periphery (28). The opening periphery (28) comprises: a first opening inner surface (281) from front to back in the depth direction (D1); a second opening inner surface (282) in the orthogonal directions ((D2)-(D3)); and an airflow baffle wall (283) which is provided in the path of air (A1) flowing in from the outside of the container body (2) and flowing along the first opening inner surface (281) and the second opening inner surface (282) just when the cover body (3) closing the container body opening (21) is removed from the opening periphery (28).

Description

埃などの侵入を抑制する基板収納容器Substrate storage container that suppresses entry of dust, etc.
　本発明は、基板収納容器に関し、特に、容器本体開口部を閉塞している蓋体が開口周縁部から取り外された瞬間に容器本体の外部から流入しようとする気流に伴う埃などの侵入を抑制する基板収納容器に関する。 The present invention relates to a substrate storage container, and in particular, suppresses intrusion of dust and the like associated with an air flow that is about to flow from the outside of the container body at the moment when the lid that closes the container body opening is removed from the peripheral edge of the opening. The present invention relates to a substrate storage container.
　半導体ウェーハ等の基板を収納する容器としては、容器本体と、蓋体と、シール部材と、を備える構成のものが、従来より知られている。容器本体は、複数の基板を収納可能な基板収納空間が内部に形成され、一端部に基板収納空間に連通する容器本体開口部が形成された開口周縁部を有する。蓋体は、開口周縁部に対して着脱可能であり、シール部材取付部を有し、容器本体開口部を閉塞可能である。シール部材は、蓋体のシール部材取付部に取り付けられ、開口周縁部に当接可能であり、開口周縁部と蓋体との間に介在して開口周縁部に密着して当接することにより、蓋体と共に容器本体開口部を気密状態で閉塞する（例えば、下記特許文献１参照）。 2. Description of the Related Art Conventionally, a container having a container body, a lid, and a seal member is known as a container for storing a substrate such as a semiconductor wafer. The container main body has a substrate storage space in which a plurality of substrates can be stored therein, and has an opening peripheral edge portion in which one end of the container main body opening communicating with the substrate storage space is formed. The lid can be attached to and detached from the peripheral edge of the opening, has a seal member attaching portion, and can close the container main body opening. The seal member is attached to the seal member mounting portion of the lid, can contact the peripheral edge of the opening, is interposed between the peripheral edge of the opening and the lid, and is in close contact with the peripheral edge of the opening, A container main body opening part is obstruct | occluded in an airtight state with a cover body (for example, refer patent document 1 below).
特開２００３－１７０９６９号公報JP 2003-170969 A
　このようなシール部材を備えた基板収納容器においては、容器本体（基板収納空間）の内部から基板を取り出すために、容器本体開口部を閉塞している蓋体を開口周縁部から取り外そうとする（開こうとすると）と、開口周縁部に密着して当接しているシール部材は、奥行き方向に長くなる。そのため、容器本体と蓋体とによって形成される内部空間の容積は大きくなる。また、蓋体を開口周縁部から取り外す過程において、容器本体の内部は一時的に負圧になる。そして、蓋体が開口周縁部から取り外された瞬間に、容器本体の外部から内部に、気流が流入する。この気流に伴って、埃（塵を含む）なども容器本体の外部から内部に侵入する場合がある。そして、侵入した埃などが半導体ウェーハ等の基板に付着して、その基板が汚染されて不良となる虞がある。 In the substrate storage container provided with such a sealing member, in order to take out the substrate from the inside of the container main body (substrate storage space), the lid that closes the container main body opening is removed from the peripheral edge of the opening. If it does (it tries to open), the seal member which is in close contact with the peripheral edge of the opening becomes longer in the depth direction. Therefore, the volume of the internal space formed by the container main body and the lid is increased. Further, in the process of removing the lid from the peripheral edge of the opening, the inside of the container body temporarily becomes negative pressure. Then, at the moment when the lid is removed from the peripheral edge of the opening, the airflow flows from the outside to the inside of the container body. Along with this air flow, dust (including dust) may enter the inside of the container body from the outside. Then, there is a risk that intruding dust or the like adheres to a substrate such as a semiconductor wafer and the substrate is contaminated and becomes defective.
　気流の速度を遅くする手段として、例えば、蓋体を開く速度を遅くして、内部空間の内部の圧力の変化を緩やかにしたり、あるいは、シール部材の気密性を低下させて、内部空間の内部の圧力と外部の圧力との差を少なくすることが考えられる。しかし、前者では、基板収納容器からの基板の取り出し効率（所要時間）が低下し、後者では、シール部材の気密性の低下に起因する埃などの侵入が起こりやすい。 As a means of slowing down the speed of airflow, for example, slowing down the opening speed of the lid to moderate the change in pressure inside the internal space, or reducing the airtightness of the seal member, It is conceivable to reduce the difference between the external pressure and the external pressure. However, in the former, the efficiency of taking out the substrate from the substrate storage container (required time) is lowered, and in the latter, intrusion of dust or the like due to a decrease in the airtightness of the seal member is likely to occur.
　本発明は、容器本体開口部を閉塞している蓋体を開口周縁部から取り外した瞬間に容器本体の外部から流入しようとする気流に伴う埃などの侵入を抑制することができる基板収納容器を提供することを目的とする。 The present invention provides a substrate storage container that can suppress the intrusion of dust and the like due to an airflow that is about to flow in from the outside of the container body at the moment when the lid that closes the container body opening is removed from the periphery of the opening. The purpose is to provide.
　本発明は、複数の基板を収納可能な基板収納空間が内部に形成され、一端部に前記基板収納空間に連通する容器本体開口部が形成された開口周縁部を有する容器本体と、前記開口周縁部に対して着脱可能であり、シール部材取付部を有し、前記容器本体開口部を閉塞可能な蓋体と、前記蓋体の前記シール部材取付部に取り付けられ、前記開口周縁部に当接可能であり、前記開口周縁部と前記蓋体との間に介在して前記開口周縁部に密着して当接することにより、前記蓋体と共に前記容器本体開口部を気密状態で閉塞するシール部材と、を備え、前記容器本体の一端部と当該一端部に対する他端部と結ぶ方向を手前奥行き方向といい、前記手前奥行き方向に直交する方向を直交方向という場合に、前記開口周縁部は、前記手前奥行き方向に沿う第１開口内面と、前記蓋体が前記容器本体開口部を閉塞している状態において前記第１開口内面よりも前記直交方向の内側において前記直交方向に沿う第２開口内面と、前記シール部材よりも前記直交方向の内側において前記第２開口内面から延出する気流邪魔壁であって、前記容器本体開口部を閉塞している前記蓋体が前記開口周縁部から取り外された瞬間に前記容器本体の外部から流入して前記第１開口内面及び前記第２開口内面に沿って流れる気流の経路上に設けられる気流邪魔壁と、を備える基板収納容器に関する。 The present invention includes a container main body having an opening peripheral edge portion in which a substrate storage space capable of storing a plurality of substrates is formed, and an opening peripheral edge portion formed at one end portion and communicating with the substrate storage space. A lid that can be attached to and detached from the container, has a seal member attachment portion, and can close the container body opening, and is attached to the seal member attachment portion of the lid, and abuts on the peripheral edge of the opening A seal member that is interposed between the peripheral edge of the opening and the lid and is in close contact with the peripheral edge of the opening to close the container main body opening in an airtight state together with the lid; The direction connecting the one end portion of the container body and the other end portion with respect to the one end portion is referred to as a near depth direction, and the direction perpendicular to the near depth direction is referred to as an orthogonal direction, Along the front depth direction From the inner surface of the first opening, the second opening inner surface along the orthogonal direction inside the orthogonal direction than the inner surface of the first opening in a state where the lid closes the container main body opening, and the seal member Is an airflow baffle wall extending from the inner surface of the second opening on the inner side in the orthogonal direction, and the container body at the moment when the lid body closing the container body opening is removed from the peripheral edge of the opening And an airflow baffle wall provided on a path of an airflow that flows in from the outside and flows along the inner surface of the first opening and the inner surface of the second opening.
　また、前記気流邪魔壁は、通気性を有するフィルタを主体として構成されることが好ましい。 Further, it is preferable that the air flow baffle wall is mainly composed of a filter having air permeability.
　また、前記気流邪魔壁は、弾性変形可能であり、前記蓋体が前記容器本体開口部を閉塞している状態において前記開口周縁部と前記蓋体の内面との間で圧縮されていると共に、前記蓋体が前記開口周縁部から取り外された場合において前記シール部材が前記開口周縁部から離れたときにも、前記蓋体の内面に当接していることが好ましい。 Further, the air flow baffle wall is elastically deformable, and is compressed between the opening peripheral portion and the inner surface of the lid in a state where the lid closes the container main body opening, When the lid is removed from the peripheral edge of the opening, it is preferable that the seal member is also in contact with the inner surface of the lid even when the seal member is separated from the peripheral edge of the opening.
　また、気流の前記経路上において前記気流邪魔壁における気流がぶつかる面は、前記手前奥行き方向に対して、前記直交方向の外側に向けて傾いていることが好ましい。 In addition, it is preferable that the surface where the airflow collides with the airflow baffle wall on the path of the airflow is inclined toward the outside in the orthogonal direction with respect to the near depth direction.
　本発明によれば、容器本体開口部を閉塞している蓋体を開口周縁部から取り外した瞬間に容器本体の外部から流入しようとする気流に伴う埃などの侵入を抑制することができる基板収納容器を提供することができる。 According to the present invention, the substrate storage that can suppress the intrusion of dust and the like due to the airflow that is about to flow in from the outside of the container body at the moment when the lid that closes the container body opening is removed from the peripheral edge of the opening. A container can be provided.
本発明の第１実施形態に係る基板収納容器を示す分解斜視図である。It is a disassembled perspective view which shows the board | substrate storage container which concerns on 1st Embodiment of this invention. 第１実施形態に係る基板収納容器の平面断面図である。It is a plane sectional view of the substrate storage container concerning a 1st embodiment. 第１実施形態に係る基板収納容器のシール部材及び気流邪魔壁の周辺を拡大して示す平面断面図である。It is a plane sectional view expanding and showing the circumference of the seal member and air flow baffle wall of the substrate storage container concerning a 1st embodiment. 図３に示す状態から蓋体を取り外し始めた状態を示す平面断面図である。FIG. 4 is a plan sectional view showing a state in which the cover body is started to be removed from the state shown in FIG. 3. 図４に示す状態から更に蓋体を取り外した状態を示す平面断面図である。FIG. 5 is a plan sectional view showing a state where a lid is further removed from the state shown in FIG. 4. 第２実施形態に係る基板収納容器の気流邪魔壁の周辺を拡大して示す平面断面図である。It is a plane sectional view expanding and showing the circumference of the air current baffle wall of the substrate storage container concerning a 2nd embodiment.
　以下、本発明の第１実施形態による基板収納容器について、図面を参照しながら説明する。図１は、本発明の第１実施形態に係る基板収納容器を示す分解斜視図である。図２は、第１実施形態に係る基板収納容器の平面断面図である。図３は、第１実施形態に係る基板収納容器のシール部材及び気流邪魔壁の周辺を拡大して示す平面断面図である。図４は、図３に示す状態から蓋体を取り外し始めた状態を示す平面断面図である。図５は、図４に示す状態から更に蓋体を取り外した状態を示す平面断面図である。 Hereinafter, a substrate storage container according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is an exploded perspective view showing a substrate storage container according to the first embodiment of the present invention. FIG. 2 is a plan sectional view of the substrate storage container according to the first embodiment. FIG. 3 is an enlarged plan sectional view showing the periphery of the sealing member and the airflow baffle wall of the substrate storage container according to the first embodiment. FIG. 4 is a plan sectional view showing a state in which the cover body is started to be removed from the state shown in FIG. FIG. 5 is a plan sectional view showing a state in which the lid is further removed from the state shown in FIG.
　ここで、説明の便宜上、後述の容器本体２から蓋体３へ向かう方向（図２における右方向）を手前方向Ｄ１１と定義し、その反対の方向を奥行き方向Ｄ１２と定義し、これらを併せて手前奥行き方向Ｄ１と定義する。手前奥行き方向Ｄ１は、容器本体２の一端部と当該一端部に対する他端部と結ぶ方向ということもできる。また、後述の下壁２４から上壁２３へと向かう方向（図２における紙面の裏面から表面へと向かう方向）を上方向Ｄ２１と定義し、その反対の方向を下方向Ｄ２２と定義し、これら併せてを上下方向Ｄ２と定義する。また、後述する第２側壁２６から第１側壁２５へと向かう方向（図２における下方向）を左方向Ｄ３１と定義し、その反対の方向を右方向Ｄ３２と定義し、これらを併せて左右方向Ｄ３と定義する。手前奥行き方向Ｄ１に直交する方向であって面方向に拡がる方向を直交方向Ｄ２－Ｄ３と定義する。 Here, for convenience of explanation, a direction (right direction in FIG. 2) from the container body 2 described later to the lid body 3 is defined as the front direction D11, and the opposite direction is defined as the depth direction D12. This is defined as the front depth direction D1. The near depth direction D1 can also be referred to as a direction connecting one end of the container body 2 and the other end with respect to the one end. Further, a direction from the lower wall 24 to the upper wall 23 to be described later (a direction from the back surface to the front surface in FIG. 2) is defined as an upward direction D21, and the opposite direction is defined as a downward direction D22. Together, it is defined as the vertical direction D2. Further, a direction (downward direction in FIG. 2) from the second side wall 26 to be described later to the first side wall 25 is defined as the left direction D31, and the opposite direction is defined as the right direction D32. It is defined as D3. A direction orthogonal to the near depth direction D1 and extending in the plane direction is defined as an orthogonal direction D2-D3.
　また、基板収納容器１に収納される基板Ｗ（図１、図２等参照）は、円盤状のシリコンウェーハ、ガラスウェーハ、サファイアウェーハ等であり、産業に用いられる薄いものである。本実施形態における基板Ｗは、直径４５０ｍｍのシリコンウェーハである。 The substrate W (see FIGS. 1 and 2) stored in the substrate storage container 1 is a disk-shaped silicon wafer, glass wafer, sapphire wafer, etc., and is a thin one used in the industry. The substrate W in this embodiment is a silicon wafer having a diameter of 450 mm.
　図１～図３に示すように、基板収納容器１は、容器本体２と、蓋体３と、シール部材４と、基板支持板状部５と、フロントリテーナ（図示せず）とを有している。 As shown in FIGS. 1 to 3, the substrate storage container 1 includes a container body 2, a lid 3, a seal member 4, a substrate support plate-like portion 5, and a front retainer (not shown). ing.
　容器本体２は、一端部に容器本体開口部２１が形成された開口周縁部２８を有し、他端部が閉塞された筒状の壁部２０を有する。容器本体２内には基板収納空間２７が形成されている。基板収納空間２７は、壁部２０により取り囲まれて形成されている。壁部２０の部分であって基板収納空間２７を形成している部分には、基板支持板状部５が配置されている。基板収納空間２７には、複数の基板Ｗを収納可能である。 The container body 2 has an opening peripheral edge 28 in which a container body opening 21 is formed at one end, and a cylindrical wall portion 20 with the other end closed. A substrate storage space 27 is formed in the container body 2. The substrate storage space 27 is formed so as to be surrounded by the wall portion 20. The substrate support plate-shaped portion 5 is disposed in a portion of the wall portion 20 that forms the substrate storage space 27. A plurality of substrates W can be stored in the substrate storage space 27.
　基板支持板状部５は、基板収納空間２７内において左右方向Ｄ３に対をなすように壁部２０に設けられている。基板支持板状部５は、手前方向Ｄ１１側に設けられ且つ基板支持板状部５の大部分を構成する板状部本体５１と、奥行き方向Ｄ１２の側の端部に設けられる奥側基板支持部５２と、を備える。板状部本体５１は、蓋体３によって容器本体開口部２１が閉塞されていないときに、隣接する基板Ｗ同士を所定の間隔で離間させて並列させた状態で、複数の基板Ｗの縁部を支持可能である。 The substrate support plate-like portion 5 is provided on the wall portion 20 so as to form a pair in the left-right direction D3 in the substrate storage space 27. The substrate support plate-like portion 5 is provided on the near side D11 side and constitutes a large part of the substrate support plate-like portion 5, and the back side substrate support provided on the end portion in the depth direction D12 side. Unit 52. When the container body opening 21 is not closed by the lid 3, the plate-like body 51 has the edges of the plurality of substrates W in a state in which the adjacent substrates W are spaced apart and arranged in parallel. Can be supported.
　奥側基板支持部５２は、基板収納空間２７内において後述のフロントリテーナと対をなすように配置され、複数の基板Ｗの縁部を支持可能である。奥側基板支持部５２は、蓋体３によって容器本体開口部２１が閉塞されているときにフロントリテーナと協働して、複数の基板Ｗの縁部を基板支持板状部５の板状部本体５１から離間させて並列させた状態で、複数の基板Ｗの後部を支持する。 The back substrate support portion 52 is disposed so as to make a pair with a later-described front retainer in the substrate storage space 27 and can support the edges of the plurality of substrates W. The back side substrate support portion 52 cooperates with the front retainer when the container main body opening 21 is closed by the lid 3, and the edge portions of the plurality of substrates W are formed as plate-like portions of the substrate support plate-like portion 5. The rear portions of the plurality of substrates W are supported while being separated from the main body 51 and arranged in parallel.
　蓋体３は、開口周縁部２８（容器本体開口部２１）に対して着脱可能であり、容器本体開口部２１を閉塞可能である。フロントリテーナは、蓋体３の部分であって蓋体３によって容器本体開口部２１が閉塞されているときに基板収納空間２７に対向する部分に設けられている。フロントリテーナは、基板支持板状部５の奥側基板支持部５２と対をなすように配置されている。 The lid 3 can be attached to and detached from the opening peripheral edge 28 (container main body opening 21), and the container main body opening 21 can be closed. The front retainer is provided in a portion of the lid 3 that faces the substrate storage space 27 when the container main body opening 21 is closed by the lid 3. The front retainer is disposed so as to make a pair with the back side substrate support portion 52 of the substrate support plate-like portion 5.
　フロントリテーナは、蓋体３によって容器本体開口部２１が閉塞されているときに、複数の基板Ｗの縁部の前部を支持可能である。フロントリテーナは、蓋体３によって容器本体開口部２１が閉塞されているときに、基板支持板状部５の奥側基板支持部５２と協働して複数の基板Ｗを支持することにより、隣接する基板Ｗ同士を所定の間隔で離間させて並列させた状態で、複数の基板Ｗを保持する。以下、各部について、詳細に説明する。 The front retainer can support the front portions of the edges of the plurality of substrates W when the container main body opening 21 is closed by the lid 3. When the container main body opening 21 is closed by the lid 3, the front retainer cooperates with the back side substrate support portion 52 of the substrate support plate-like portion 5 to support the plurality of substrates W, thereby adjacent to the front retainer. A plurality of substrates W are held in a state in which the substrates W to be separated are separated from each other at a predetermined interval and arranged in parallel. Hereinafter, each part will be described in detail.
　容器本体２の壁部２０は、奥壁２２と上壁２３と下壁２４と第１側壁２５と第２側壁２６とを有する。奥壁２２、上壁２３、下壁２４、第１側壁２５、及び第２側壁２６は、プラスチック材等により構成されており、第１実施形態では、ポリカーボネートにより一体成形されて構成されている。 The wall portion 20 of the container body 2 has a back wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The back wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of a plastic material or the like. In the first embodiment, they are integrally formed of polycarbonate.
　図１～図３に示すように、第１側壁２５と第２側壁２６とは対向しており、上壁２３と下壁２４とは対向している。上壁２３の後端、下壁２４の後端、第１側壁２５の後端、及び第２側壁２６の後端は、全て奥壁２２に接続されている。上壁２３の前端、下壁２４の前端、第１側壁２５の前端、及び第２側壁２６の前端は、奥壁２２に対向する位置関係を有する容器本体開口部２１を形成する開口周縁部２８を構成する。 As shown in FIGS. 1 to 3, the first side wall 25 and the second side wall 26 face each other, and the upper wall 23 and the lower wall 24 face each other. The rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the back wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 form an opening peripheral portion 28 that forms a container body opening 21 having a positional relationship facing the back wall 22. Configure.
　開口周縁部２８は、容器本体２の一端部に設けられており、奥壁２２は、容器本体２の他端部に位置している。壁部２０の外面により形成される容器本体２の外形は箱状である。壁部２０の内面、即ち、奥壁２２の内面、上壁２３の内面、下壁２４の内面、第１側壁２５の内面、及び第２側壁２６の内面は、これらによって取り囲まれた基板収納空間２７を形成している。開口周縁部２８に形成された容器本体開口部２１は、壁部２０により取り囲まれて容器本体２の内部に形成された基板収納空間２７に連通している。 The opening peripheral edge 28 is provided at one end of the container main body 2, and the back wall 22 is located at the other end of the container main body 2. The outer shape of the container body 2 formed by the outer surface of the wall portion 20 is box-shaped. The inner surface of the wall portion 20, that is, the inner surface of the back wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26 are surrounded by these. 27 is formed. The container main body opening 21 formed in the opening peripheral edge portion 28 is surrounded by the wall portion 20 and communicates with the substrate storage space 27 formed in the container main body 2.
　開口周縁部２８は、手前奥行き方向Ｄ１に沿う第１開口内面２８１と、直交方向Ｄ２－Ｄ３に沿う第２開口内面２８２と、気流邪魔壁２８３と、を備える。
　第２開口内面２８２は、蓋体３が容器本体開口部２１を閉塞している状態において第１開口内面２８１よりも直交方向Ｄ２－Ｄ３の内側において直交方向Ｄ２－Ｄ３に沿う内面である。
　なお、第１開口内面２８１は、巨視的に視て手前奥行き方向Ｄ１に沿っていればよく、手前奥行き方向Ｄ１に平行でなくてもよい。同様に、第２開口内面２８２は、巨視的に視て直交方向Ｄ２－Ｄ３に沿っていればよく、直交方向Ｄ２－Ｄ３に平行でなくてもよい。 The opening peripheral edge portion 28 includes a first opening inner surface 281 along the near depth direction D1, a second opening inner surface 282 along the orthogonal direction D2-D3, and an air flow baffle wall 283.
The second opening inner surface 282 is an inner surface along the orthogonal direction D2-D3 inside the orthogonal direction D2-D3 with respect to the first opening inner surface 281 in a state where the lid 3 closes the container main body opening 21.
In addition, the 1st opening inner surface 281 should just look along macroscopically along the near depth direction D1, and does not need to be parallel to the near depth direction D1. Similarly, the second opening inner surface 282 only needs to be along the orthogonal direction D2-D3 as viewed macroscopically, and may not be parallel to the orthogonal direction D2-D3.
　気流邪魔壁２８３は、シール部材４よりも直交方向Ｄ２－Ｄ３の内側において第２開口内面２８２から延出する。図４に示すように、気流邪魔壁２８３は、容器本体開口部２１を閉塞している蓋体３が開口周縁部２８から取り外された瞬間に容器本体２の外部から流入して第１開口内面２８１及び第２開口内面２８２に沿って流れる気流Ａ１の経路上に設けられる。 The airflow baffle wall 283 extends from the inner surface 282 of the second opening inside the orthogonal direction D2-D3 from the seal member 4. As shown in FIG. 4, the airflow baffle wall 283 flows into the first opening inner surface by flowing from the outside of the container body 2 at the moment when the lid 3 closing the container body opening 21 is removed from the opening peripheral edge 28. 281 and the second opening inner surface 282 are provided on the path of the airflow A1 that flows along the inner surface 282.
　気流邪魔壁２８３は、その基端部２８３Ｂが容器本体２の開口周縁部２８に気密にインサート成形されて構成されていてもよく、あるいは、容器本体２の開口周縁部２８に形成された勘合溝に基端部２８３Ｂが気密に嵌合されて構成されていてもよい。
　第１実施形態においては、気流邪魔壁２８３は、通気性を有するフィルタを主体として構成される。気流邪魔壁２８３の一部は、フィルタ以外から構成してもよい。フィルタは、気流Ａ１を通過可能であるが、気流Ａ１に伴って容器本体２のの内部に侵入しようとする埃などの全部又は一部を通過させない。 The air flow baffle wall 283 may be configured such that the base end portion 283B of the airflow baffle wall 283 is airtightly insert-molded into the opening peripheral edge portion 28 of the container main body 2, or the fitting groove formed in the opening peripheral edge portion 28 of the container main body 2. The base end portion 283B may be configured to be airtightly fitted.
In the first embodiment, the airflow baffle wall 283 is configured mainly with a filter having air permeability. A part of the airflow baffle wall 283 may be constituted by other than the filter. The filter can pass through the air flow A1, but does not pass all or a part of dust or the like that tends to enter the inside of the container body 2 with the air flow A1.
　気流邪魔壁２８３は、弾性変形可能である。図３に示すように、気流邪魔壁２８３は、蓋体３が容器本体開口部２１を閉塞している状態において開口周縁部２８と蓋体３の内面３２との間で圧縮されている。また、図４に示すように、気流邪魔壁２８３は、蓋体３が開口周縁部２８から取り外された場合においてシール部材４が開口周縁部２８から離れたときにも、先端部２８３Ａにおいて蓋体３の内面３２に当接している。 The airflow baffle wall 283 can be elastically deformed. As shown in FIG. 3, the air flow baffle wall 283 is compressed between the opening peripheral portion 28 and the inner surface 32 of the lid 3 in a state where the lid 3 closes the container main body opening 21. Further, as shown in FIG. 4, the airflow baffle wall 283 has a lid body at the distal end portion 283 </ b> A even when the seal member 4 is separated from the opening peripheral edge portion 28 when the lid body 3 is removed from the opening peripheral edge portion 28. 3 is in contact with the inner surface 32 of the substrate.
　手前奥行き方向Ｄ１に沿う気流邪魔壁２８３は、気流邪魔壁２８３と蓋体３の内面３２とが未圧縮で接触した状態よりも例えば１～３ｍｍの潰し代が形成されるように、圧縮される。手前奥行き方向Ｄ１に沿う気流邪魔壁２８３の長さは、任意で設定可能である。また、手前奥行き方向Ｄ１に沿う気流邪魔壁２８３の長さは、圧縮されていない状態において、潰し代以上の長さを有しており、例えば、４～１０ｍｍである。 The airflow baffle wall 283 along the near depth direction D1 is compressed so that a crushing margin of, for example, 1 to 3 mm is formed compared to a state where the airflow baffle wall 283 and the inner surface 32 of the lid 3 are in contact with each other without being compressed. . The length of the airflow baffle wall 283 along the near depth direction D1 can be arbitrarily set. Further, the length of the air flow baffle wall 283 along the near depth direction D1 has a length equal to or longer than the crushing margin in the uncompressed state, and is, for example, 4 to 10 mm.
　蓋体３は、容器本体２の開口周縁部２８の形状と略一致する略長方形状を有している。蓋体３は、容器本体２の開口周縁部２８に対して着脱可能である。開口周縁部２８に蓋体３が装着されることにより、蓋体３は、容器本体開口部２１を閉塞可能である。蓋体３の外周縁部には、シール部材取付部としてシール部材嵌合溝３１が、蓋体３の外周縁部に沿って周状に形成されている。 The lid 3 has a substantially rectangular shape that substantially matches the shape of the opening peripheral edge 28 of the container body 2. The lid 3 is detachable from the opening peripheral edge 28 of the container body 2. By attaching the lid 3 to the opening peripheral edge 28, the lid 3 can close the container body opening 21. A seal member fitting groove 31 is formed on the outer peripheral edge portion of the lid body 3 along the outer peripheral edge portion of the lid body 3 as a seal member mounting portion.
　図３に示すように、シール部材嵌合溝３１には、シール部材４の基端部４２が嵌め込まれており、これにより、シール部材４は蓋体３に取り付けられている。シール部材４は、例えば、弾性変形可能なＰＯＥ（ポリオキシエチレン）、ＰＥＥ、フッ素ゴム、シリコンゴムからなる。環状のシール部材４は、蓋体３の外周縁部を一周するように配置されている。シール部材４は、先端部４１において開口周縁部２８に当接可能である。シール部材４は、開口周縁部２８と蓋体３との間に介在して開口周縁部２８に密着して当接することにより、蓋体３と共に容器本体開口部２１を気密状態で閉塞する。 As shown in FIG. 3, the base end portion 42 of the seal member 4 is fitted in the seal member fitting groove 31, whereby the seal member 4 is attached to the lid 3. The seal member 4 is made of, for example, elastically deformable POE (polyoxyethylene), PEE, fluorine rubber, or silicon rubber. The annular seal member 4 is arranged so as to go around the outer peripheral edge of the lid 3. The seal member 4 can come into contact with the opening peripheral edge portion 28 at the distal end portion 41. The seal member 4 is interposed between the opening peripheral portion 28 and the lid body 3 so as to be in close contact with the opening peripheral portion 28, thereby closing the container body opening portion 21 together with the lid body 3 in an airtight state.
　蓋体３が開口周縁部２８に装着されたときに、蓋体３の外周縁部は、シール部材４を介して容器本体２の開口周縁部２８の内周縁部に当接する。これにより、シール部材４は蓋体３の外周縁部と開口周縁部２８の内周縁部とにより挟まれて弾性変形し、蓋体３は、容器本体開口部２１を密閉した状態で閉塞する。開口周縁部２８から蓋体３が取り外されることにより、容器本体２内の基板収納空間２７に対して、基板Ｗを出し入れ可能となる。 When the lid body 3 is attached to the opening peripheral edge portion 28, the outer peripheral edge portion of the lid body 3 comes into contact with the inner peripheral edge portion of the opening peripheral edge portion 28 of the container body 2 via the seal member 4. Thereby, the seal member 4 is sandwiched between the outer peripheral edge portion of the lid body 3 and the inner peripheral edge portion of the opening peripheral edge portion 28 and elastically deforms, and the lid body 3 closes the container body opening portion 21 in a sealed state. By removing the lid 3 from the opening peripheral edge 28, the substrate W can be taken into and out of the substrate storage space 27 in the container body 2.
　次に、蓋体３を容器本体２の開口周縁部２８から取り外すときの動作・作用について説明する。図３に示すように、蓋体３が容器本体２の開口周縁部２８に装着され、容器本体開口部２１が気密状態で閉塞されている状態においては、シール部材４は、開口周縁部２８の第２開口内面２８２に密着している。また、気流邪魔壁２８３は、第２開口内面２８２と蓋体３の内面３２との間で圧縮されている。 Next, the operation and action when the lid 3 is removed from the opening peripheral edge 28 of the container body 2 will be described. As shown in FIG. 3, in a state where the lid 3 is attached to the opening peripheral portion 28 of the container main body 2 and the container main body opening 21 is closed in an airtight state, the seal member 4 It is in close contact with the inner surface 282 of the second opening. The airflow baffle wall 283 is compressed between the second opening inner surface 282 and the inner surface 32 of the lid 3.
　図３に示す状態から蓋体３を手前方向Ｄ１１へ徐々に移動させると、シール部材４及び気流邪魔壁２８３の形状（長さ）は、手前奥行き方向Ｄ１に徐々に復元する。シール部材４が開口周縁部２８の第２開口内面２８２に密着している状態では、容器本体開口部２１が気密状態で閉塞されているため、容器本体２の内部が負圧状態となる。 When the lid 3 is gradually moved in the near direction D11 from the state shown in FIG. 3, the shapes (lengths) of the seal member 4 and the airflow baffle wall 283 are gradually restored in the near depth direction D1. In a state where the seal member 4 is in close contact with the second opening inner surface 282 of the opening peripheral edge portion 28, the container body opening portion 21 is closed in an airtight state, so that the inside of the container body 2 is in a negative pressure state.
　更に蓋体３を手前方向Ｄ１１へ徐々に移動させると、図４に示すように、シール部材４及び気流邪魔壁２８３の形状（長さ）は、手前奥行き方向Ｄ１に更に復元する。すると先に、シール部材４の先端部４１が第２開口内面２８２から離れる。なお、気流邪魔壁２８３の先端部２８３Ａは、蓋体３の内面３２に当接している。シール部材４の先端部４１が第２開口内面２８２から離れると、容器本体２の内部が負圧状態であること及び容器本体開口部２１が閉塞されなくなることに伴って、容器本体２の外部の空気（外気）が気流Ａ１となり、容器本体２の内部に流入する。ここで、気流邪魔壁２８３がフィルタを主体として構成されているため、容器本体２の内部の気圧は、負圧状態から一気に外圧と同じにはならず、徐々に外圧に近づく。 Further, when the lid 3 is gradually moved in the front direction D11, as shown in FIG. 4, the shapes (lengths) of the seal member 4 and the airflow baffle wall 283 are further restored in the front depth direction D1. Then, first, the front end portion 41 of the seal member 4 is separated from the second opening inner surface 282. Note that the tip portion 283A of the airflow baffle wall 283 is in contact with the inner surface 32 of the lid 3. When the distal end portion 41 of the seal member 4 is separated from the second opening inner surface 282, the inside of the container main body 2 is in a negative pressure state and the container main body opening 21 is not blocked. Air (outside air) becomes an air flow A1 and flows into the container body 2. Here, since the airflow baffle wall 283 is mainly composed of a filter, the air pressure inside the container body 2 does not become the same as the external pressure from the negative pressure state, but gradually approaches the external pressure.
　図４に示すように、気流Ａ１は、開口周縁部２８の第１開口内面２８１及び第２開口内面２８２に沿ってシール部材４を避けながら、流れる。また、気流Ａ１に伴って、埃などが容器本体２の内部に侵入しようとする。気流Ａ１及び埃などは、蓋体３の内面３２に当接している気流邪魔壁２８３にぶつかることになる。ぶつかった気流Ａ１は、フィルタを主体とする気流邪魔壁２８３を通過する。一方、ぶつかった埃などの全部又は一部は、気流邪魔壁２８３を通過できない。従って、容器本体２の内部に（気流邪魔壁２８３よりも下流側に）侵入する埃などの量を抑制することができる。 As shown in FIG. 4, the air flow A <b> 1 flows along the first opening inner surface 281 and the second opening inner surface 282 of the opening peripheral edge portion 28 while avoiding the seal member 4. Further, dust or the like tends to enter the inside of the container body 2 along with the airflow A1. The airflow A1 and dust collide with the airflow baffle wall 283 that is in contact with the inner surface 32 of the lid 3. The collided airflow A1 passes through the airflow baffle wall 283 mainly composed of a filter. On the other hand, all or a part of the bumped dust cannot pass through the airflow baffle wall 283. Accordingly, it is possible to suppress the amount of dust or the like that enters the inside of the container body 2 (on the downstream side of the airflow baffle wall 283).
　更に蓋体３を手前方向Ｄ１１へ徐々に移動させると、図５に示すように、気流邪魔壁２８３の形状（長さ）は、手前奥行き方向Ｄ１に更に復元する。すると、気流邪魔壁２８３の先端部２８３Ａは蓋体３の内面３２から離れる。これにより、容器本体２の内部の気圧は、容器本体２の外部の圧力と完全に同じとなる。 Further, when the lid 3 is gradually moved in the front direction D11, as shown in FIG. 5, the shape (length) of the air flow baffle wall 283 is further restored in the front depth direction D1. Then, the tip 283 </ b> A of the airflow baffle wall 283 is separated from the inner surface 32 of the lid 3. Thereby, the air pressure inside the container body 2 is completely the same as the pressure outside the container body 2.
　上記構成の第１実施形態による基板収納容器１によれば、以下のような効果を得ることができる。
　開口周縁部２８は、手前奥行き方向Ｄ１に沿う第１開口内面２８１と、蓋体３が容器本体開口部２１を閉塞している状態において第１開口内面２８１よりも直交方向Ｄ２－Ｄ３の内側において直交方向Ｄ２－Ｄ３に沿う第２開口内面２８２と、シール部材４よりも直交方向Ｄ２－Ｄ３の内側において第２開口内面２８２から延出する気流邪魔壁２８３であって、容器本体開口部２１を閉塞している蓋体３が開口周縁部２８から取り外された瞬間に容器本体２の外部から流入して第１開口内面２８１及び第２開口内面２８２に沿って流れる気流Ａ１の経路上に設けられる気流邪魔壁２８３と、を備える。 According to the substrate storage container 1 according to the first embodiment having the above configuration, the following effects can be obtained.
The opening peripheral edge portion 28 is located inside the first opening inner surface 281 along the near depth direction D1 and inside the orthogonal direction D2-D3 with respect to the first opening inner surface 281 in a state where the lid 3 closes the container body opening portion 21. A second opening inner surface 282 along the orthogonal direction D2-D3 and an air flow baffle wall 283 extending from the second opening inner surface 282 inside the orthogonal direction D2-D3 with respect to the seal member 4, and the container body opening 21 is At the moment when the closed lid 3 is removed from the opening peripheral portion 28, the lid 3 is provided on the path of the air flow A1 that flows from the outside of the container body 2 and flows along the first opening inner surface 281 and the second opening inner surface 282. An air flow baffle wall 283.
　そのため、第１実施形態によれば、容器本体開口部２１を閉塞している蓋体３が開口周縁部２８から取り外された瞬間に容器本体２の外部から流入して第１開口内面２８１及び第２開口内面２８２に沿って流れる気流Ａ１は、気流邪魔壁２８３にぶつかることになる。そのため、気流Ａ１に伴って容器本体２の内部に侵入しようとする埃などは、容器本体２の内部に侵入し難くなる。 Therefore, according to the first embodiment, the lid 3 that closes the container main body opening 21 flows from the outside of the container main body 2 at the moment when the lid 3 is removed from the opening peripheral edge 28, and the first opening inner surface 281 and the first inner surface 281. The airflow A1 flowing along the inner surface 282 of the two openings hits the airflow baffle wall 283. For this reason, dust or the like that tends to enter the inside of the container main body 2 along with the air flow A <b> 1 is less likely to enter the inside of the container main body 2.
　また、第１実施形態においては、気流邪魔壁２８３は、通気性を有するフィルタを主体として構成される。そのため、第１実施形態によれば、気流Ａ１に伴って容器本体２の内部に侵入しようとする埃などが容器本体２の内部に侵入することを抑制することができると共に、気流Ａ１については、容器本体２の内部に流入させることができる。従って、埃などは気流邪魔壁２８３にぶつかった後拡散する等の現象が起こり難く、また、気流Ａ１の速度が低下するため、埃などは気流邪魔壁２８３によって捕捉され易くなる。また、気流邪魔壁２８３によって捕捉された埃などは、第２開口内面２８２と気流邪魔壁２８３とによって形成される角部に、容易に溜められる。 In the first embodiment, the airflow baffle wall 283 is mainly composed of a filter having air permeability. Therefore, according to the first embodiment, it is possible to suppress dust and the like that is about to enter the inside of the container main body 2 along with the air flow A1, and about the air current A1, It can flow into the inside of the container body 2. Accordingly, dust or the like hardly diffuses after hitting the airflow baffle wall 283, and the speed of the airflow A1 decreases, so that the dust or the like is easily captured by the airflow baffle wall 283. In addition, dust or the like captured by the airflow baffle wall 283 is easily collected in a corner portion formed by the second opening inner surface 282 and the airflow baffle wall 283.
　また、第１実施形態においては、気流邪魔壁２８３は、弾性変形可能であり、蓋体３が容器本体開口部２１を閉塞している状態において開口周縁部２８と蓋体３の内面３２との間で圧縮されていると共に、蓋体３が開口周縁部２８から取り外された場合においてシール部材４が開口周縁部２８から離れたときにも、蓋体３の内面３２に当接している。そのため、第１実施形態によれば、シール部材４が開口周縁部２８から離れて、容器本体開口部２１が閉塞されなくなっても、容器本体２の外部からの気流Ａ１及び埃などは、蓋体３の内面３２に当接している気流邪魔壁２８３にぶつかることになる。ぶつかった埃などの全部又は一部は、気流邪魔壁２８３を通過できない。従って、容器本体２の内部に（気流邪魔壁２８３よりも下流側に）侵入する埃などの量を抑制することができる。 In the first embodiment, the airflow baffle wall 283 can be elastically deformed, and the opening peripheral portion 28 and the inner surface 32 of the lid 3 are in a state where the lid 3 closes the container body opening 21. When the lid 3 is removed from the opening peripheral edge 28, the seal member 4 is also in contact with the inner surface 32 of the lid 3 when it is separated from the opening peripheral edge 28. Therefore, according to the first embodiment, even if the seal member 4 is separated from the opening peripheral portion 28 and the container main body opening 21 is not blocked, the airflow A1 and dust from the outside of the container main body 2 are not covered by the lid. 3 hits against the air flow baffle wall 283 that is in contact with the inner surface 32 of the air. All or a part of the bumped dust or the like cannot pass through the airflow baffle wall 283. Accordingly, it is possible to suppress the amount of dust or the like that enters the inside of the container body 2 (on the downstream side of the airflow baffle wall 283).
　以下、本発明の第２実施形態による基板収納容器について説明する。図６は、第２実施形態に係る基板収納容器の気流邪魔壁の周辺を拡大して示す平面断面図である。図６では、蓋体３の図示を省略している。 Hereinafter, a substrate storage container according to a second embodiment of the present invention will be described. FIG. 6 is an enlarged plan sectional view showing the periphery of the airflow baffle wall of the substrate storage container according to the second embodiment. In FIG. 6, illustration of the lid 3 is omitted.
　第２実施形態においては、図６に示すように、気流Ａ１の経路上において気流邪魔壁２８３における気流がぶつかる面２８３Ｃは、手前奥行き方向Ｄ１に対して、直交方向Ｄ２－Ｄ３外側に向けて傾斜角度θ傾いている。傾斜角度θは、例えば、４５度以上である。また、気流邪魔壁２８３は、通気性の無い部材から構成されている。ここで、気流邪魔壁２８３は、容器本体２の開口周縁部２８と同時に成形しても良いし、また、別部品として成形した後に開口周縁部２８にインサート成形してもよい。或いは、気流邪魔壁２８３は、別部品として成形した後に、開口周縁部２８に取り付けてもよい。
　第２実施形態については、第１実施形態と比べて主に前述した構成が異なるが、その他の構成は第１実施形態と同様である。そのため、第２実施形態において、第１実施形態と同一の部材については、同一の符号で図示し、説明を省略する。 In the second embodiment, as shown in FIG. 6, the surface 283C where the airflow collides with the airflow baffle wall 283 on the path of the airflow A1 is inclined outward in the orthogonal direction D2-D3 with respect to the near depth direction D1. The angle θ is inclined. The inclination angle θ is, for example, 45 degrees or more. The airflow baffle wall 283 is made of a non-breathable member. Here, the airflow baffle wall 283 may be molded simultaneously with the opening peripheral edge 28 of the container body 2, or may be insert-molded into the opening peripheral edge 28 after being formed as a separate part. Alternatively, the airflow baffle wall 283 may be attached to the opening peripheral edge 28 after being formed as a separate part.
The second embodiment is different from the first embodiment mainly in the configuration described above, but the other configurations are the same as those in the first embodiment. Therefore, in 2nd Embodiment, about the same member as 1st Embodiment, it shows with the same code | symbol and abbreviate | omits description.
　上記構成の第２実施形態による基板収納容器によれば、以下のような効果を得ることができる。
　第２実施形態においては、気流Ａ１の経路上において気流邪魔壁２８３における気流がぶつかる面２８３Ｃは、手前奥行き方向Ｄ１に対して、直交方向Ｄ２－Ｄ３外側に向けて傾いている。そのため、容器本体２の内部に侵入しようとする埃などを、気流邪魔壁２８３により上流側に押し返すことができる。この効果は、気流邪魔壁２８３が通気性の無い部材から構成されている場合に、特に顕著に奏される。 According to the substrate storage container according to the second embodiment having the above configuration, the following effects can be obtained.
In the second embodiment, the surface 283C where the airflow collides with the airflow baffle wall 283 on the path of the airflow A1 is inclined outward in the orthogonal direction D2-D3 with respect to the near depth direction D1. For this reason, dust or the like entering the container body 2 can be pushed back upstream by the airflow baffle wall 283. This effect is particularly prominent when the airflow baffle wall 283 is made of a non-breathable member.
　本発明は、上述した実施形態に限定されることはなく、特許請求の範囲に記載された技術的範囲において変形が可能である。例えば、蓋体３が開口周縁部２８から取り外された場合において気流邪魔壁２８３が開口周縁部２８から離れたときにも、シール部材４が蓋体３の内面３２に当接する構成を採ることもできる。 The present invention is not limited to the embodiment described above, and can be modified within the technical scope described in the claims. For example, when the lid 3 is removed from the opening peripheral portion 28, the seal member 4 may be in contact with the inner surface 32 of the lid 3 even when the airflow baffle wall 283 is separated from the opening peripheral portion 28. it can.
　第１実施形態において、気流邪魔壁２８３は通気性が無い部材から構成されていてもよい。
　また、第１実施形態および第２実施形態において、シール部材４の先端部４１は、第２開口内面２８２に当接する構成となっているが、これに制限されない。シール部材４は、蓋体３を閉じたときに基板収納容器１を気密に保持できればよいので、第１開口内面２８１に当接していても良い。 In 1st Embodiment, the airflow baffle wall 283 may be comprised from the member which does not have air permeability.
Moreover, in 1st Embodiment and 2nd Embodiment, although the front-end | tip part 41 of the sealing member 4 becomes a structure contact | abutted to the 2nd opening inner surface 282, it is not restrict | limited to this. The seal member 4 may be in contact with the inner surface 281 of the first opening, as long as it can hold the substrate container 1 in an airtight state when the lid 3 is closed.
　また、容器本体及び蓋体の形状や、容器本体に収納可能な基板の枚数、寸法は、本実施形態における容器本体２及び蓋体３の形状や、容器本体２に収納可能な基板Ｗの枚数、寸法に限定されない。例えば、基板支持板状部は、本実施形態の基板支持板状部５の構成に限定されない。 The shape of the container main body and the lid, the number of substrates that can be stored in the container main body, and the dimensions thereof are the shape of the container main body 2 and the lid 3 in this embodiment, and the number of substrates W that can be stored in the container main body 2. The dimensions are not limited. For example, the substrate support plate-like portion is not limited to the configuration of the substrate support plate-like portion 5 of the present embodiment.
１　基板収納容器
２　容器本体
３　蓋体
４　シール部材
２１　容器本体開口部
２７　基板収納空間
２８　開口周縁部
３１　シール部材嵌合溝（シール部材取付部）
３２　内面
２８１　第１開口内面
２８２　第２開口内面
２８３　気流邪魔壁
２８３Ｃ気流がぶつかる面
Ｄ１１　手前方向
Ｄ１２　奥行き方向
Ｄ２－Ｄ３直交方向
Ｗ　基板 DESCRIPTION OF SYMBOLS 1 Substrate storage container 2 Container main body 3 Lid 4 Seal member 21 Container main body opening 27 Substrate storage space 28 Opening peripheral edge 31 Seal member fitting groove (sealing member mounting portion)
32 Inner surface 281 First opening inner surface 282 Second opening inner surface 283 Air flow baffle wall 283C Air impinging surface D11 Front direction D12 Depth direction D2-D3 orthogonal direction W Substrate

Claims (4)

  1. 　複数の基板を収納可能な基板収納空間が内部に形成され、一端部に前記基板収納空間に連通する容器本体開口部が形成された開口周縁部を有する容器本体と、
    　前記開口周縁部に対して着脱可能であり、シール部材取付部を有し、前記容器本体開口部を閉塞可能な蓋体と、
    　前記蓋体の前記シール部材取付部に取り付けられ、前記開口周縁部に当接可能であり、前記開口周縁部と前記蓋体との間に介在して前記開口周縁部に密着して当接することにより、前記蓋体と共に前記容器本体開口部を気密状態で閉塞するシール部材と、を備え、
    　前記容器本体の一端部と当該一端部に対する他端部と結ぶ方向を手前奥行き方向といい、前記手前奥行き方向に直交する方向を直交方向という場合に、前記開口周縁部は、前記手前奥行き方向に沿う第１開口内面と、前記蓋体が前記容器本体開口部を閉塞している状態において前記第１開口内面よりも前記直交方向の内側において前記直交方向に沿う第２開口内面と、前記シール部材よりも前記直交方向の内側において前記第２開口内面から延出する気流邪魔壁であって、前記容器本体開口部を閉塞している前記蓋体が前記開口周縁部から取り外された瞬間に前記容器本体の外部から流入して前記第１開口内面及び前記第２開口内面に沿って流れる気流の経路上に設けられる気流邪魔壁と、
    を備える基板収納容器。     A container main body having an opening peripheral edge portion in which a substrate storage space capable of storing a plurality of substrates is formed, and a container main body opening portion communicating with the substrate storage space is formed at one end;
    A lid that can be attached to and detached from the peripheral edge of the opening, has a seal member attaching portion, and can close the opening of the container body;
    It is attached to the seal member mounting portion of the lid body, can be brought into contact with the peripheral edge portion of the opening, is interposed between the peripheral edge portion of the opening and the lid body, and is in close contact with the peripheral edge portion of the opening. And a sealing member that closes the container main body opening in an airtight state together with the lid,
    When the direction connecting the one end portion of the container main body and the other end portion with respect to the one end portion is referred to as a near depth direction, and when the direction orthogonal to the near depth direction is referred to as an orthogonal direction, the opening peripheral edge portion corresponds to the near depth direction. A first opening inner surface along the second opening inner surface along the orthogonal direction inside the orthogonal direction with respect to the first opening inner surface in a state where the lid closes the container main body opening, and the seal member The container is an airflow baffle wall extending from the inner surface of the second opening on the inner side in the orthogonal direction than when the lid body closing the container main body opening is removed from the peripheral edge of the opening. An airflow baffle wall provided on a path of an airflow flowing from the outside of the main body and flowing along the inner surface of the first opening and the inner surface of the second opening;
    A substrate storage container.
  2. 　前記気流邪魔壁は、通気性を有するフィルタを主体として構成される
    請求項１に記載の基板収納容器。     The substrate storage container according to claim 1, wherein the airflow baffle wall is configured mainly with a filter having air permeability.
  3. 　前記気流邪魔壁は、弾性変形可能であり、前記蓋体が前記容器本体開口部を閉塞している状態において前記開口周縁部と前記蓋体の内面との間で圧縮されていると共に、前記蓋体が前記開口周縁部から取り外された場合において前記シール部材が前記開口周縁部から離れたときにも、前記蓋体の内面に当接している
    請求項１又は２に記載の基板収納容器。     The air flow baffle wall is elastically deformable, and is compressed between the peripheral edge of the opening and the inner surface of the lid in a state where the lid closes the opening of the container body. 3. The substrate storage container according to claim 1, wherein when the body is removed from the peripheral edge of the opening, the sealing member is in contact with the inner surface of the lid even when the seal member is separated from the peripheral edge of the opening.
  4. 　気流の前記経路上において前記気流邪魔壁における気流がぶつかる面は、前記手前奥行き方向に対して、前記直交方向の外側に向けて傾いている
    請求項１～３のいずれかに記載の基板収納容器。     The substrate storage container according to any one of claims 1 to 3, wherein a surface of the airflow baffle wall where the airflow collides on the path of the airflow is inclined outward in the orthogonal direction with respect to the near depth direction. .
PCT/JP2012/065355 2012-06-15 2012-06-15 Substrate housing container minimizing intrusion of dust WO2013186912A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
PCT/JP2012/065355 WO2013186912A1 (en) 2012-06-15 2012-06-15 Substrate housing container minimizing intrusion of dust
JP2014521075A JP5989110B2 (en) 2012-06-15 2012-06-15 Substrate storage container that suppresses entry of dust, etc.
TW102118933A TW201402427A (en) 2012-06-15 2013-05-29 Substrate housing container minimizing intrusion of dust

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2012/065355 WO2013186912A1 (en) 2012-06-15 2012-06-15 Substrate housing container minimizing intrusion of dust

Publications (1)

Publication Number Publication Date
WO2013186912A1 true WO2013186912A1 (en) 2013-12-19

Family

ID=49757774

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2012/065355 WO2013186912A1 (en) 2012-06-15 2012-06-15 Substrate housing container minimizing intrusion of dust

Country Status (3)

Country Link
JP (1) JP5989110B2 (en)
TW (1) TW201402427A (en)
WO (1) WO2013186912A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016033984A (en) * 2014-07-31 2016-03-10 株式会社東芝 Substrate container and substrate container loading table
CN110870055A (en) * 2017-07-07 2020-03-06 信越聚合物股份有限公司 Substrate storage container

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102546444B1 (en) * 2021-06-25 2023-08-01 (주)이엠씨 Fixing Ribs of Wafer Carrier having a Filter Module with Antistatic Function
KR102546445B1 (en) * 2021-06-25 2023-08-01 (주)이엠씨 Fixing Ribs of Wafer Carrier having a Filter Module made of Antistatic Material
KR102546443B1 (en) * 2021-06-25 2023-06-23 (주)이엠씨 Fixing Ribs of Wafer Carrier having a Filter Module made of Antistatic Material
JP2023091432A (en) * 2021-12-20 2023-06-30 アクア株式会社 storage container

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS528003U (en) * 1975-07-04 1977-01-20
JPH10184924A (en) * 1996-12-27 1998-07-14 Komatsu Kasei Kk Gasket, and gasket-sealed structure of container
JPH11154699A (en) * 1997-11-21 1999-06-08 Shin Etsu Polymer Co Ltd Sealing structure for receptacle
JP2007308161A (en) * 2006-05-18 2007-11-29 Shin Etsu Polymer Co Ltd Storage case
JP2009141108A (en) * 2007-12-06 2009-06-25 Miraial Kk Storage vessel

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS528003U (en) * 1975-07-04 1977-01-20
JPH10184924A (en) * 1996-12-27 1998-07-14 Komatsu Kasei Kk Gasket, and gasket-sealed structure of container
JPH11154699A (en) * 1997-11-21 1999-06-08 Shin Etsu Polymer Co Ltd Sealing structure for receptacle
JP2007308161A (en) * 2006-05-18 2007-11-29 Shin Etsu Polymer Co Ltd Storage case
JP2009141108A (en) * 2007-12-06 2009-06-25 Miraial Kk Storage vessel

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016033984A (en) * 2014-07-31 2016-03-10 株式会社東芝 Substrate container and substrate container loading table
US9698034B2 (en) 2014-07-31 2017-07-04 Kabushiki Kaisha Toshiba Substrate storage container and substrate storage container mounting table
CN110870055A (en) * 2017-07-07 2020-03-06 信越聚合物股份有限公司 Substrate storage container
CN110870055B (en) * 2017-07-07 2023-09-08 信越聚合物股份有限公司 Substrate container

Also Published As

Publication number Publication date
TW201402427A (en) 2014-01-16
JP5989110B2 (en) 2016-09-07
JPWO2013186912A1 (en) 2016-02-01

Similar Documents

Publication Publication Date Title
JP5989110B2 (en) Substrate storage container that suppresses entry of dust, etc.
JP4482655B2 (en) Gasket for precision substrate storage container
JP2018505546A (en) Substrate container valve assembly
WO2008123392A3 (en) Air cleaner unit for internal combustion engine
JP2006207578A (en) Laterally blowing type blower
TWI596517B (en) Touch control device
JP6539355B2 (en) Substrate storage container
US20130142644A1 (en) Fan assembly
JP2004134181A (en) Fuel cell container structure
CN205350020U (en) Novel vacuum sucker
TW201829141A (en) Baffle plate
WO2015025410A1 (en) Substrate storing container
JP2012180976A (en) Ventilating opening cover
JP6502566B1 (en) Valve structure and suction device
KR20190003025U (en) Remove hazardous fine dust window screen
CN110116268A (en) Laser cutting device and sucking unit
JP2009236949A (en) Image forming apparatus
JP2019167742A (en) Protective member for vent valve, vent valve device and piping structure
JP6451527B2 (en) Mini-environment device
JP6208583B2 (en) Air cleaner
CN207548593U (en) Vacuum inhales part device
JP6813667B2 (en) Board storage container
TW201531216A (en) Electronic equipment unit and electronic equipment
KR20160051470A (en) Fume Removal Equipment
US20220125258A1 (en) Dust Removal Device and Method for Changing a Filter Element in a Dust Removal Device

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 12878864

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2014521075

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 12878864

Country of ref document: EP

Kind code of ref document: A1