WO2013165325A1 - Capteur micro-électrochimique - Google Patents

Capteur micro-électrochimique Download PDF

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Publication number
WO2013165325A1
WO2013165325A1 PCT/TR2012/000068 TR2012000068W WO2013165325A1 WO 2013165325 A1 WO2013165325 A1 WO 2013165325A1 TR 2012000068 W TR2012000068 W TR 2012000068W WO 2013165325 A1 WO2013165325 A1 WO 2013165325A1
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Prior art keywords
micro
sensor
accordance
electrode
preceeding
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PCT/TR2012/000068
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English (en)
Inventor
Haluk Kulah
Hatice Ceylan KOYDEMIR
Canan OZGEN
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Haluk Kulah
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Priority to PCT/TR2012/000068 priority Critical patent/WO2013165325A1/fr
Publication of WO2013165325A1 publication Critical patent/WO2013165325A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28—Electrolytic cell components
    • G01N27/30—Electrodes, e.g. test electrodes; Half-cells
    • G01N27/327—Biochemical electrodes, e.g. electrical or mechanical details for in vitro measurements
    • G01N27/3271—Amperometric enzyme electrodes for analytes in body fluids, e.g. glucose in blood
    • G01N27/3272—Test elements therefor, i.e. disposable laminated substrates with electrodes, reagent and channels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/06—Auxiliary integrated devices, integrated components
    • B01L2300/0627—Sensor or part of a sensor is integrated
    • B01L2300/0645—Electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0809—Geometry, shape and general structure rectangular shaped
    • B01L2300/0816—Cards, e.g. flat sample carriers usually with flow in two horizontal directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/12—Specific details about materials

Definitions

  • This invention relates to a sensor for detecting a variety of target analytes, including cells, viruses, macromolecules and ionic molecules and relates to the methods of making the sensors.
  • micro-electro-mechanical systems offer tremendous promise due to their ability to integration with electronics and its suitability to mass production in batches.
  • MEMS micro-electro-mechanical systems
  • the fabrication of microelectrodes and/or ultra microelectrodes by MEMS fabrication processes enables miniaturization of the electrochemical sensors for detection of biological analytes or materials.
  • These devices can be combined with microfluidics to increase probability of adsorption of biological analytes or materials on sensor surfaces and with integrated circuit (IC) to miniaturize potentiostat, which is an electronic hardware required to control potentials during the measurements to develop hand held systems for point of care diagnosis.
  • IC integrated circuit
  • the introduction of reagents and/or solutions containing biological analytes or materials over the electrodes is necessary for surface activation, rinsing, and measurement steps.
  • immersing the electrodes into the reagent and/or solution containing biological analytes or materials can be used in the macro-scale electrochemical sensors, it is not practical in the miniaturized electrochemical sensors due to their small size.
  • the preferred method to introduce the reagent and/or solution containing biological analytes or materials is to make a droplet of the related reagent over the electrodes (A.S. Blawas and W.M.Reichert, Biomaterials, 1998, 19, 595-609).
  • silanization an exact reaction scheme including the parameters like humidity, solvent type, reaction time, and temperature is necessary to have reproducible homogeneous silane-monolayers.
  • stability of silane-monolayers is limited and they tend to form multilayer coverage or incomplete surface coverage, which can result in an increase in nonspecific binding (A.S. Blawas and W.M.Reichert, Biomaterials, 1998, 19, 595-609; F. Luderer and U.
  • Parylene C which reduces nonspecific binding to the surface of substrate, is preferred due to its inertness and compatibility with MEMS fabrication processes. Parylene C is also used in the formation of channels and reservoirs to have uniform surface properties on each surface of channels, reservoirs, and a detection chamber except the electrodes because of its low water permeability that limits the evaporation of reagent and/or solution containing biological analytes or materials (W. Ehrfeld, et al., Ullmann's Encyclopedia of Industrial Chemistry, 2000, Wiley-VCH).
  • the other issue is to enhance binding of biological analytes or materials on the working electrode to increase specificity and sensitivity when the small amounts of reagent and/or solution containing biological analytes or materials are used.
  • two methods are used in the proposed sensor: (1) The area of working electrode is increased by growing conductive micro pillars on the electrode, (2) The use of micro-channels and micro-reservoirs with height smaller than 50 pm can make the mass transport diffusion dominant with short diffusion paths since surface area to volume ratio (volume of reagent and/or solution containing biological analyte or material) is high (W. Ehrfeld, et al., Ullmann's Encyclopedia of Industrial Chemistry, 2000, Wiley-VCH).
  • the objective of the present invention is to provide a sensor, which combines microfluidics with a three-electrode electrochemical sensor for the detection of biological entities and ionic molecules.
  • the present invention comprises micro-reservoirs, micro-channels, and a detection chamber, which have at least one electrochemical sensor with a working electrode, an auxiliary (counter) electrode, and a reference electrode.
  • the first aspect of the present invention is to provide a sensor incorporated on a single substrate (e.g. silicon, glass, Pyrex, or quartz) by using surface micromachining processes.
  • the electrodes are produced from pure metals while the micro-reservoirs and the micro-channels are made out of Parylene C whose unique properties such as biocompatibility, conformal coating, pinhole-free, and moisture barrier are advantageously used.
  • An advantageous embodiment of the device is that the whole system is compatible with IC and MEMS fabrication processes. The embodiment makes the present invention suitable for portable and hand-held systems at point of care diagnosis.
  • reagent and/or solution containing biological analytes or materials are directed to the detection chamber by using micro-channels and are enclosed in detection chamber and in the micro-channels during adsorption of target analytes on the working electrode. It is especially advantageous to limit the evaporation of the reagent and/or solution when small amounts of reagent and/or solution containing biological analytes or materials are used.
  • a fixed potential difference is applied between the reference electrode and the working electrode.
  • the potential triggers the electrochemical reaction, which occurs on the surface of the working electrode.
  • the reaction results to a change in current, which is opposite to the direction of current at the auxiliary (counter) electrode.
  • the potential applied to the working electrode is measured against to the reference electrode.
  • Various electrode materials can be used for embodying the working, reference, and auxiliary (counter) electrodes. However, it is important to select the materials so that they fulfill the requirements of design criteria so that fabricated device can have the same performance as the electrochemical sensors at macro scale.
  • platinum (Pt) is used as auxiliary (counter) electrode due to its stability and inertness
  • silver (Ag) is used as reference electrode due to its high sheet resistance, stable electrode potential
  • gold (Au) is used as working electrode due to its high electrical conductivity, long- term stability, and biocompatibility.
  • the surface of the working electrode is the place where reactions occur. Therefore, it plays an important role in the detection of target analyte. It is important to have specific binding mostly on the working electrode.
  • the materials, that reagent/solution encounters are Parylene C, Au, Ag, and Pt, not silicon which has affinity to biological materials. Since Parylene C is hydrophobic and chemically inert (CP.
  • the height of channels and the detection chamber is less than 50 pm so that the analytes are very close to the electrodes. Therefore, there is no need of mixing for enhancing adsorption, and diffusion of analytes can only be used.
  • the area of working electrode is increased by growing micro pillars with 10 pm in height on the working electrode (Table 1). The increase in the area of working electrode increases the adsorption sites; this also increases the sensitivity of the sensor.
  • FIG. 1. is a schematic view of an electrochemical sensor on a substrate according to the present invention.
  • FIG. 2. is a schematic sectional view of detection chamber
  • FIG. 3. is a diagram showing the first step of how the micro electrochemical sensor can be fabricated
  • FIG. 4. is a diagram showing the second step of how the micro electrochemical sensor can be fabricated
  • FIG. 5. is a diagram showing the third step of how the micro electrochemical sensor can be fabricated.
  • FIG. 6. is a diagram showing the fourth step of how the micro electrochemical sensor can be fabricated.
  • FIG. 7. is a diagram showing the fifth step of how the micro electrochemical sensor can be fabricated.
  • FIG. 8. is a diagram showing the sixth step of how the micro electrochemical sensor can be fabricated.
  • FIG. 9. is a diagram showing the seventh step of how the micro electrochemical sensor can be fabricated.
  • FIG. 10. is a diagram showing the eighth step of how the micro electrochemical sensor can be fabricated.
  • FIG. 11. is a diagram showing the ninth step of how the micro electrochemical sensor can be fabricated.
  • FIG. 12. is a diagram showing the first step of how the micro pillars can be fabricated on the working electrode
  • FIG. 13 is a diagram showing the second step of how the micro pillars can be fabricated on the working electrode
  • FIG. 1 is a sensor, which combines micro-flu id ics with a three-electrode electrochemical sensor according to the present invention comprising micro-reservoirs (1) as inlet and outlet, micro-channels (2), bonding pads (3) and a detection chamber (4), on a substrate (6).
  • FIG. 2 shows a sectional view of the detection chamber (4) with its wall structure (5), in which a reference electrode (7), an auxiliary (counter) electrode (8), and a working electrode (9) are located.
  • the reference electrode (7), the auxiliary (counter) electrode (8), and the working electrode (9) are made out of silver, platinum, and gold, respectively.
  • the reference electrode (7) and the auxiliary (counter) electrode (8) are symmetric and in the shape of block arc. Their width size is 150 pm. A symmetrical geometry is used for counter electrode (8) and reference electrode (7) to have a valid assumption of equivalent current paths on the working electrode (9), which minimizes the potential drop due to cell resistance (Wang, Analytical Electrochemistry, 2006, Wiley-VCH).
  • the working electrode (9) is in disc -shaped and its size changes from 100 pm up to 500 ⁇ radius.
  • the disk- shaped working electrode (9) is used to decrease the background current induced by isotropic diffusion and increase signal to noise ratio (Lorenz and Plieth, Electrochemical Nanotechnology: In Situ Local Probe Techniques at Electrochemical Interfaces, 1998, Wiley-VCH).
  • the remaining parts of the detection chamber (4) are made out of Parylene C.
  • FIG. 3 shows the first step of fabrication of the present invention.
  • a layer of silicon nitride (Si 3 N 4 , 2000A) (110) is deposited on a bare wafer (100) (e.g., silicon, glass, Pyrex, or quartz) used as substrate (6).
  • substrate (6) e.g., silicon, glass, Pyrex, or quartz
  • materials for the substrate (6) are not limited to these materials.
  • the silicon nitride (110) is used as insulation layer between the electrodes (7, 8, and 9) and the substrate (6).
  • titanium (120) Ti, 250 A
  • silicon nitride (110) layer to enhance adhesion between platinum (130) and silicon nitride (110) layers as shown in FIG. 4.
  • platinum (130) Pt, 2000A
  • gold (140) Au, 1800A
  • photo resist layer (150-1) which is durable to wet chemical etch processes, is spin coated and patterned by mask (160-1).
  • the gold layer (140) is etched by using a gold etchant based on potassium iodide and iodine chemistry. Referring to FIG. 6, the photo resist (150-1) is stripped.
  • the platinum layer (130) is etched by using chlorine-based gases in an inductively coupled plasma. Referring to FIG. 7, the photo resist (150-2) is stripped by using oxygen plasma process.
  • the titanium layer (120) is etched in HBr/Ar based plasma. As shown in FIG. 8, the photo resist (150-3) is stripped by using oxygen plasma.
  • Parylene C (170-1) is deposited for a thickness of one pm by using A-174 Silane (>98% Gamma-Methacryloxypropltrimethoxysilane) as adhesion promoter.
  • Negative resist (150-4) which is durable to plasma etch processes, is spin coated and patterned with mask (160-3) by using reverse image process since mask (160-3) has the patterns for all metal layers.
  • the Parylene C (170-1) layer is etched by using O2/CF4 inductively coupled plasma. Referring to FIG. 9, the photo resist (150-4) is stripped by dissolving in acetone.
  • Silver (180) (Ag, 3200A) is sputtered.
  • Photo resist (150-5) which is durable to wet chemical etch processes, is spin coated and patterned by mask (160-4).
  • the silver layer (180) is etched in aqueous nitric acid solution. Referring to FIG. 10, the photo resist (150-5) is stripped.
  • photo resist (150-6) is spin coated and patterned by mask (160-5) to form the micro-channels (2), micro-reservoirs (1), and the detection chamber (4) with a height of 15 pm.
  • Parylene C (170-2) is deposited for a thickness of 15 pm.
  • Photo resist (150-7) which is durable to plasma etch processes, is spin coated and patterned by mask (160-6).
  • the Parylene C (170-2) layer is etched by using O2/CF4 inductively coupled plasma (FIG. 11).
  • the processed wafer is diced and individual dies are immersed into acetone to dissolve the photo resist (150-6) and the photo resist (150-7).
  • the fabrication of the sensor with micro pillars has a difference with one-step when it is compared with the process flow of the sensor without micro pillars.
  • the process flow is same up to the gold etch process.
  • a photo resist (150-8) which is durable to electroplating processes, is spin coated and patterned by mask (160-6) to form openings for growing micro pillars (190).
  • Micro pillars (190) are grown on the working electrode (9) by electroplating.
  • the photo resist (150-8) is stripped by dissolving in acetone.
  • the remaining processes are same with the process flow of the sensor without micro pillars from the FIG. 5.
  • the introduction of the reagent and/or solution containing biological analytes or materials can be performed in three ways: (1) immersing the electrode to the reagent and/or solution containing biological analytes or materials, (2) leaving a droplet of the reagent and/or solution containing biological analytes or materials over the electrodes (US 8,062,491 Bl), (3) directing the flow of the reagent and/or solution containing biological analytes or materials over the electrodes. All of the methods necessitate an enough time for adsorption of biological analytes or materials to the working (measuring) electrodes.
  • Evaporation of reagent/solution containing biological analytes or materials is ignored in the use of open to air macro scale electrochemical sensors.
  • the evaporation of reagent and/or solution containing biological analytes or materials is important in micro scale electrochemical sensors since it can change the concentration of reagent and/or solution containing biological analytes or materials. Therefore, third method can be a useful solution to limit the evaporation of the reagent and/or solution containing biological analytes or materials.
  • the material that is used in the fabrication of channels for directing flow has to limit the evaporation of the reagent and/or solution containing biological analytes or materials.
  • micro-channels (2), detection chamber (4) and micro-reservoirs (1) which are made out of Parylene C, are used to enclose the flow over the electrodes (7, 8, and 9) (FIG. 11).
  • Parylene C has low permeability to water and gases and it is possible to form highly conformal pinhole free coatings.
  • the height of micro-channels (2) and the detection chamber (4) is less than 50 m so that the analytes are very close to the electrodes (7, 8, and 9). Therefore, there is no need of mixing for enhancing adsorption, and diffusion of analytes can only be used.
  • Ag reference electrode (7), Pt auxiliary (counter) electrode (8), and Au working electrode (9) are preferred in the selection of electrically conductive layers for the electrodes of the sensor.
  • Ag is preferred for the fabrication of reference electrode (7) to apply a stable electrode potential.
  • the use of Ag as working electrode (9) has led to some problems such as silver oxidation and desorption of biological analytes from surface, which results in a decrease for the sensitivity of the sensor (Cataldi et al., 2005, 827 (2), 224-231).
  • Pt is preferred for the fabrication of auxiliary (counter) electrode (8) due to its stability and high sheet resistance, which provides better current signal in the measurements.
  • Au is preferred for the fabrication of working electrode (9) due to its compatibility with biological materials.
  • Another embodiment of the present invention is the elimination of nonspecific adsorption of biological analytes or materials on the substrate (6) by depositing a polymer such as Parylene C.
  • a polymer such as Parylene C.
  • the biological analytes or materials on the surface of Parylene C can be physisorbed when the reagent containing biological analytes or materials are introduced to the sensor. However, these materials are removed at washing steps since Parylene C does not have active surface chemistry for the chemisorption of biological analytes or materials.
  • the multiplex detection can be performed at the same time.
  • At least two sensors which comprises micro-reservoirs (1), micro-channels (2), bonding pads (3), and a detection chamber (4), in which at least two electrochemical sensor units which comprises a reference electrode (7), an auxiliary (counter) electrode (8), and a working electrode (9), are placed, are combined with a major inlet and a major outlet reservoirs.
  • micro pillars to increase the area of working electrode, which increases the sensitivity of the sensor.
  • the micro pillars (190) on the working electrode (9) are 10 pm in height, and with 8-10 pm intervals.
  • the area of adsorption increases about 94% compared to flat working electrode area while for a working electrode (9) with 100 pm radius and with micro pillars (190) on it, the area of adsorption increases about 110% compared to flat working electrode area (Table 1).
  • Electrochemical Nanotechnology In Situ Local Probe Techniques at Electrochemical Interfaces, 1998, Wiley-VCH, W. J. Lorenz and W. Plieth, "Beyond the Landscapes: Imaging the Invisible”.

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  • Health & Medical Sciences (AREA)
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  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Electrochemistry (AREA)
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Abstract

Cette invention concerne un capteur micro-électrochimique pour détecter la présence ou mesurer la quantité d'un analyte cible dans un échantillon, ledit capteur comprenant un substrat, une chambre de détection, des micro-réservoirs, et des micro-canaux. La chambre de détection comprend un capteur électrochimique miniaturisé comprenant des électrodes dont une électrode de travail, une électrode de référence, et une (contre-)électrode auxiliaire, sur un substrat par combinaison de techniques microfluidiques. Cette invention est compatible avec les systèmes micro-électromécaniques (MEMS) et la technologie des circuits intégrés (CI). Le capteur utilise un procédé pour améliorer l'adsorption à l'aide de micro-piliers et de la diffusion seule par guidage du réactif et/ou de la solution contenant l'analyte ou la substance biologique à l'aide de micro-canaux.
PCT/TR2012/000068 2012-05-04 2012-05-04 Capteur micro-électrochimique WO2013165325A1 (fr)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112557477A (zh) * 2020-11-26 2021-03-26 天津大学 原位微型去污平台及其在电化学传感器芯片表面清洁中的应用
CN114839241A (zh) * 2022-02-28 2022-08-02 京东方科技集团股份有限公司 检测基板及其检测方法、检测装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001087768A2 (fr) * 2000-05-15 2001-11-22 Tecan Trading Ag Utilisation de revetements conformes dans des structures microfluidiques
EP1593339A1 (fr) * 2004-05-06 2005-11-09 SensLab - Gesellschaft zur Entwicklung und Herstellung bioelektrochemischer Sensoren mbH Capteur microfluidique voltametrique et procédé pour la détermination directe ou indirecte de hémoglobine glycosylee
US20060154361A1 (en) * 2002-08-27 2006-07-13 Wikswo John P Bioreactors with substance injection capacity
US20090018032A1 (en) 2003-01-28 2009-01-15 Samsung Electronics Co., Ltd. Method of treating surface of substrate used in biological reaction system
US20110155587A1 (en) * 2009-12-31 2011-06-30 Ramot At Tel-Aviv University Ltd. System and method for detecting a substance in liquid
US8062491B1 (en) 2000-05-03 2011-11-22 The United States Of America As Represented By The Department Of The Navy Biological identification system with integrated sensor chip

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8062491B1 (en) 2000-05-03 2011-11-22 The United States Of America As Represented By The Department Of The Navy Biological identification system with integrated sensor chip
WO2001087768A2 (fr) * 2000-05-15 2001-11-22 Tecan Trading Ag Utilisation de revetements conformes dans des structures microfluidiques
US20060154361A1 (en) * 2002-08-27 2006-07-13 Wikswo John P Bioreactors with substance injection capacity
US20090018032A1 (en) 2003-01-28 2009-01-15 Samsung Electronics Co., Ltd. Method of treating surface of substrate used in biological reaction system
EP1593339A1 (fr) * 2004-05-06 2005-11-09 SensLab - Gesellschaft zur Entwicklung und Herstellung bioelektrochemischer Sensoren mbH Capteur microfluidique voltametrique et procédé pour la détermination directe ou indirecte de hémoglobine glycosylee
US20110155587A1 (en) * 2009-12-31 2011-06-30 Ramot At Tel-Aviv University Ltd. System and method for detecting a substance in liquid

Non-Patent Citations (21)

* Cited by examiner, † Cited by third party
Title
A. S. BLAWAS; W. M. REICHERT: "Protein patterning", BIOMATERIALS, vol. 19, 1998, pages 595 - 609, XP004120826, DOI: doi:10.1016/S0142-9612(97)00218-4
A.S. BLAWAS; W.M.REICHERT, BIOMABERIALS, vol. 19, 1998, pages 595 - 609
A.S. BLAWAS; W.M.REICHERT, BIOMATERIALS, vol. 19, 1998, pages 595 - 609
C. P. TAN; H.G. CRAIGHEAD: "Surface Engineering and Patterning Using Parylene for Biological Applications", MATER., vol. 3, 2010, pages 1803 - 1832, XP055126906, DOI: doi:10.3390/ma3031803
C.P. TAN; H. G. CRAIGHEAD, MATER, vol. 3, 2010, pages 1803 - 1832
DANIELA HOEGGER ET AL: "Disposable microfluidic ELISA for the rapid determination of folic acid content in food products", ANALYTICAL AND BIOANALYTICAL CHEMISTRY, SPRINGER, BERLIN, DE, vol. 387, no. 1, 29 November 2006 (2006-11-29), pages 267 - 275, XP019472042, ISSN: 1618-2650, DOI: 10.1007/S00216-006-0948-6 *
F. LUDERER; U. WALSCHUS, IMMOBILISATION OF DNA ON CHIPS 1., vol. 260, 2005, pages 37 - 56
F. LUDERER; U. WALSCHUS: "Immobilization of oligonucleotides for biochemical sensing by self-assembled monolayers: Thiol-organic bonding on gold and silanization on silica surfaces", IMMOBILISATION OF DNA ON CHIPS 1., vol. 260, 2005, pages 37 - 56
J. WANG, TRAC-TRENDS IN ANALYTICAL CHEMISTRY, vol. 21, 2002, pages 226 - 232
J. WANG: "Analytical Electrochemistry", 2006, WILEY-VCH
J. WANG: "Portable electrochemical systems", TRAC-TRENDS IN ANALYTICAL CHEMISTRY, vol. 21, 2002, pages 226 - 232, XP004371240, DOI: doi:10.1016/S0165-9936(02)00402-8
JANG Y ET AL: "In situ electrochemical enzyme immunoassay on a microchip with surface-functionalized poly(dimethylsiloxane) channel", ENZYME AND MICROBIAL TECHNOLOGY, STONEHAM, MA, US, vol. 39, no. 5, 4 September 2006 (2006-09-04), pages 1122 - 1127, XP027948942, ISSN: 0141-0229, [retrieved on 20060904] *
LORENZ; PLIETH: "Electrochemical Nanotechnology: In Situ Local Probe Techniques at Electrochemical Interfaces", 1998, WILEY-VCH
T. LAIHO ET AL., SURFACE SCIENCE, vol. 584, 2005, pages 83 - 89
T. LAIHO ET AL.: "Chemisorption of alkyl thiols and S-alkyl thiosulfates on Pt and polycrsytaline platinum surfaces", SURFACE SCIENCE, vol. 584, 2005, pages 83 - 89
T. R.I. CATALDI; A. RUBINO; M. CARMELA LAVIOLA; R. CIRIELLO: "Comparison of silver, gold and modified platinum electrodes for the electrochemical detection of iodide in urine samples following ion chromatography", JOUMAL OF CHROMATOGRAPHY B, vol. 827, no. 2, 2005, pages 224 - 231, XP005148813, DOI: doi:10.1016/j.jchromb.2005.09.017
W. EHRFELD ET AL.: "Ullmann's Encyclopedia of Industrial Chemistry", 2000, WILEY-VCH
W. EHRFELD ET AL.: "Ullmann's Encyclopedia of Industrial Chemistry", 2000, WILEY-VCH, article "Microreactors"
W. J. LORENZ; W. PLIETH: "Electrochemical Nanotechnology: In Situ Local Probe Techniques at Electrochemical Interfaces", 1998, WILEY-VCH, article "Beyond the Landscapes: Imaging the Invisible"
WANG: "Analytical Electrochemistry", 2006, WILEY-VCH
YOO SUNG JU ET AL: "Microfluidic chip-based electrochemical immunoassay for hippuric acid", ANALYST, ROYAL SOCIETY OF CHEMISTRY, GB, vol. 134, no. 12, 1 December 2009 (2009-12-01), pages 2462 - 2467, XP008124808, ISSN: 0003-2654, [retrieved on 20091029], DOI: 10.1039/B915356J *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112557477A (zh) * 2020-11-26 2021-03-26 天津大学 原位微型去污平台及其在电化学传感器芯片表面清洁中的应用
CN114839241A (zh) * 2022-02-28 2022-08-02 京东方科技集团股份有限公司 检测基板及其检测方法、检测装置
WO2023160267A1 (fr) * 2022-02-28 2023-08-31 京东方科技集团股份有限公司 Substrat de test, procédé de test associé et dispositif de test

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