WO2013149415A1

WO2013149415A1 - Substrate shield

Info

Publication number: WO2013149415A1
Application number: PCT/CN2012/074119
Authority: WO
Inventors: 郑文达
Original assignee: 深圳市华星光电技术有限公司
Priority date: 2012-04-01
Filing date: 2012-04-16
Publication date: 2013-10-10
Also published as: CN202634965U

Abstract

Disclosed is a substrate shield used to clamp a substrate. The substrate shield comprises a conductive sleeve body and an elastic sleeve body. The elastic sleeve body is provided with a first clamping groove in which the edge of the substrate is clamped. The conductive sleeve body is provided with a second clamping groove, and the outer surface of the elastic sleeve body is covered by the inner wall of the second clamping groove. Through clamping the substrate shield on the edge of the substrate and covering the conductive sleeve body on the outside of the elastic sleeve body, the elastic sleeve body buffers the impact when the substrate is impacted, and the conductive sleeve body can prevent the substrate from being damaged by static. Therefore, the conductive sleeve body and the elastic sleeve body can prevent the substrate from being damaged by impact or static in subsequent process or operation process.

Description

Substrate shield

Technical field

The present invention relates to a shield for a substrate, and more particularly to a shield for a substrate for manufacturing a liquid crystal panel.

Background technique

In the process of manufacturing a liquid crystal panel, due to the complexity of the process, the substrate for manufacturing the liquid crystal panel enters and exits a plurality of manufacturing equipment during the process, and the robot arm is disposed between the manufacturing equipment for transporting the substrate from a manufacturing equipment. In the manufacturing process of the next process. During the process of transporting the substrate, the robot arm used to carry the substrate and the static electricity carried by the manufacturing equipment may affect the substrate. In addition, during the process of transporting the substrate, the substrate is inevitably hit by external forces. It is well known that the substrate itself is relatively fragile, and the impact or static electricity of the external force may cause damage or even breakage of the substrate, resulting in the scrapping of the substrate, and the manufacturing cost is increased. Moreover, the substrate fragments in the manufacturing equipment are also difficult to completely remove, and the substrate fragments also have a huge impact on subsequent substrate yields. Therefore, how to reduce or even eliminate the influence of static electricity and external force impact on the substrate has become one of the problems to be solved in the industry.

Summary of the invention

SUMMARY OF THE INVENTION A primary object of the present invention is to provide a substrate guard that is intended to cushion the impact of the substrate and to protect the substrate from electrostatic shock.

The embodiment of the present invention provides a substrate guard for holding a substrate. The substrate guard includes a conductive sleeve and an elastic sleeve. The elastic sleeve is provided with a first card slot, and the edge clip of the substrate In the first card slot, the conductive sleeve is provided with a second card slot, and an inner wall of the second card slot is attached to an outer surface of the elastic sleeve.

Preferably, the height of the first card slot is greater than the thickness of the substrate by 0.1 mm to 0.3 mm.

Preferably, the thickness of the portion of the elastic sleeve that is held on the upper side of the substrate is different from the thickness of the portion corresponding to the portion that is held on the lower side of the substrate.

Preferably, the outer surface of the elastic sleeve is recessed inwardly to form a latching portion, and the conductive sleeve is provided with a protrusion adapted to the latching portion, and the elastic sleeve passes through the latching portion and the The protrusions are fitted to each other in the second card slot.

Preferably, the conductive sleeve is a thin metal layer, and the conductive sleeve is fixed on the outer surface of the elastic sleeve by screws or glue.

The embodiment of the present invention provides a substrate guard for holding a substrate, the substrate guard includes a conductive sleeve and an elastic sleeve, and the elastic sleeve is used for clamping on an edge of the substrate, and the conductive The sleeve is wrapped around the outer surface of the elastic sleeve.

Preferably, the elastic sleeve is provided with a first card slot, and an edge of the substrate is clamped in the first card slot.

Preferably, the height of the first card slot is 0.2 mm larger than the thickness of the substrate.

Preferably, the thickness of the portion of the elastic sleeve that is held on the upper side of the substrate is greater than the thickness of the portion of the elastic sleeve that is held on the lower side of the substrate.

Preferably, the elastic sleeve is made of a high temperature resistant rubber, sponge or other material having a cushioning function, and the conductive sleeve is made of a conductive material.

Preferably, the conductive sleeve is provided with a second card slot, and an inner wall of the second card slot is attached to an outer surface of the elastic sleeve.

Preferably, the outer surface of the elastic sleeve is recessed inwardly to form a retaining portion, and the conductive sleeve is provided with a protrusion adapted to the holding portion, and the elastic sleeve passes through the holding portion and the The protrusions are fitted to each other in the second card slot.

The embodiment of the present invention provides a substrate protection member. The substrate protection member includes a conductive sleeve body and an elastic sleeve body. The elastic sleeve body is provided with a first card slot, and the conductive sleeve body is wrapped around the elastic sleeve body. The outer surface.

Preferably, the thickness of the portions of the elastic sleeve on both sides of the first card slot are not equal.

Preferably, the conductive sleeve body is provided with a second card slot for holding the elastic sleeve body, and an inner wall of the second card slot is attached to an outer surface of the elastic sleeve body.

Preferably, the conductive sleeve is a thin metal layer, and the conductive sleeve is fixed on an outer surface of the elastic sleeve by screws or glue.

The invention holds the substrate guard on the substrate, that is, the edge of the substrate is clamped in the first card slot of the elastic sleeve, and the conductive sleeve is wrapped on the outer surface of the elastic sleeve, and the elastic sleeve is applied when the substrate is impacted. The body buffers the impact, and the conductive sleeve prevents the substrate from being subjected to electrostatic damage, so the elastic sleeve and the conductive sleeve can prevent the substrate from being damaged by impact or static electricity during subsequent processes or operations.

DRAWINGS

Figure 1 is a front elevational view showing the substrate guard of the present invention assembled around the substrate;

2 is a partial cross-sectional view showing the substrate guard member of the present invention when the substrate is held;

Figure 3 is a cross-sectional view of the elastic sleeve of the substrate guard of the present invention;

Figure 4 is a cross-sectional view of the conductive sleeve of the substrate guard of the present invention;

FIG. 5 is a partial cross-sectional view showing another embodiment of the substrate guard of the present invention when the substrate is held.

The implementation, functional features, and advantages of the present invention will be further described in conjunction with the embodiments.

detailed description

It is understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

1 and FIG. 2, FIG. 1 is a front view showing the substrate guard of the present invention assembled around the substrate, and FIG. 2 is a partial cross-sectional view showing the substrate guard of the present invention when the substrate is held. The substrate guard 1 of the present invention comprises an elastic sleeve 11 and a conductive sleeve 12, the edge of the substrate 2 is held in the elastic sleeve 11, and the conductive sleeve 12 is wrapped around the outer surface of the elastic sleeve 11. The substrate guard 1 is in the form of a strip, and the substrate guards 1 are connected end to end to hold the substrate 2 therein, that is, the edge of the substrate 2 is held in the elastic sleeve 11, and the plurality of elastic sleeves 11 are wrapped around the plurality of conductive sleeves 12. The two adjacent elastic sleeves 11 are connected end to end, and the two adjacent conductive sleeves 12 are connected end to end. The elastic sleeve 11 buffers the impact on the periphery of the substrate 2. The conductive sleeve 12 prevents the periphery of the substrate 2 from being electrostatically damaged. . Of course, in other embodiments, the substrate guard 1 may also be clamped only on three sides or both sides of the substrate.

Please refer to FIG. 3, which is a cross-sectional view of the elastic sleeve 11 of the substrate guard of the present invention. The elastic sleeve 11 includes a first card slot 111 and a latching portion 112. The first card slot 111 is for holding the substrate 2, and the shape of the first card slot 111 is adapted to the shape of the periphery of the substrate 2. As in the specific embodiment, the substrate 2 is a rectangular parallelepiped, and the first card slot 111 has a rectangular cross section. The latching portion 112 is formed by recessing an outer surface of the elastic sleeve, and the latching portion 112 is configured to be engaged with the conductive sleeve 12 .

Please refer to FIG. 4, which is a cross-sectional view of the conductive sleeve of the substrate guard of the present invention. The conductive sleeve 12 is made of a conductive material and includes a second card slot 121. The inner wall of the second card slot 121 is attached to the outer surface of the elastic sleeve. The lower side of the conductive sleeve 12 is provided with a protrusion 122 adapted to the latching portion 112, and the elastic sleeve 11 and the conductive sleeve 12 are coupled together by the engagement of the latching portion 112 and the protrusion portion 122. As in the embodiment, the shape of the protrusion 122 is a rectangular parallelepiped, the holding portion 112 is a rectangular parallelepiped groove that can accommodate the protrusion 122 having a rectangular parallelepiped shape; the conductive sleeve 12 is sleeved on the outer side of the elastic sleeve 11, and the rectangular body is The protruding portion 122 is engaged in the locking portion 112 of the rectangular parallelepiped to fix the elastic sleeve 11 in the second locking groove 121.

Since the impact on the upper surface and the lower surface of the substrate 2 may be different, in the specific embodiment, the thickness of the upper side of the elastic substrate 11 holding the substrate 2 and the thickness of the lower side of the holding substrate 2 are not equal. As the impact on the upper surface of the substrate 2 is greater than the impact on the lower surface of the substrate 2, the thickness of the upper portion of the elastic sleeve 11 on the upper side of the substrate 2 is greater than the corresponding position of the portion of the substrate 2 that is held on the lower side of the substrate. The thickness and vice versa.

In order to ensure that the substrate 2 can be easily loaded into the first card slot 111 of the elastic sleeve 11 and is not easily detached therefrom, the height of the first card slot 111 is preferably 0.1 mm to 0.3 mm larger than the thickness of the substrate 2. For example, the height of the first card slot 111 is 0.1 mm or 0.3 mm larger than the thickness of the substrate 2. Preferably, the height of the first card slot 111 is 0.2 mm larger than the thickness of the substrate 2.

It is known that the substrate 2 is placed in a high temperature environment due to the needs of the process. In order to protect the substrate 2 in a high temperature environment, the elastic cover 11 is preferably made of a high temperature resistant rubber material, sponge or other material having a buffering function. When the elastic sleeve 11 can withstand high temperature, it can enter the high temperature environment together with the substrate 2 and protect it without removing the elastic sleeve 11 from the substrate 2 to avoid damaging the elastic sleeve 11; when the elastic sleeve 11 is used When the substrate 2 cannot be subjected to high temperature, the elastic cover 11 needs to be removed when the substrate 2 enters a high temperature environment to avoid damage to the elastic cover 11. The elastic material as known to those skilled in the art may be a material such as a rubber material or a sponge.

In the present invention, the elastic sleeve 11 and the conductive sleeve 12 can have any shape. As shown in FIG. 3 and FIG. 4, the inner side of the elastic sleeve 11 is provided with a first slot 111, and the outer surface thereof is curved, and the conductive sleeve The body 12 is an arc-shaped conductive sheet covering the elastic sleeve 11.

As shown in FIG. 5, it is a partial cross-sectional view of another embodiment of the substrate guard of the present invention when the substrate is held. The difference between this embodiment and the above embodiment is that the inner side of the elastic sleeve 11' is opened with a first card slot, the outer surface is rectangular, and the conductive sleeve 12' is a rectangular sleeve enclosing the elastic sleeve 11'.

In other embodiments, the elastic sleeve is any shape of the first card slot having the holding substrate, and the conductive sleeve is a metal layer wrapped around the outer surface of the elastic sleeve, and is fixed on the outer surface of the elastic sleeve by screws or glue. At this time, it is not necessary to provide a retaining portion for the elastic sleeve, and the conductive sleeve does not need to be provided with a protrusion.

The present invention holds the substrate guard 1 on the substrate 2, that is, the edge of the substrate 2 is held in the first card slot 111 of the elastic sleeve 11, and the conductive sleeve 12 is wrapped around the outer surface of the elastic sleeve 11. When the substrate 2 is subjected to an impact, the elastic sleeve buffers the impact, and the conductive sleeve 12 can prevent the substrate 2 from being subjected to electrostatic damage. Therefore, the elastic sleeve 11 and the conductive sleeve 12 can prevent the substrate 2 from being subjected to subsequent processes or operations. Damaged by impact or static electricity.

The above is only the preferred embodiment of the present invention, and is not intended to limit the scope of the invention, and the equivalent structure or equivalent process transformations made by the description of the invention and the drawings are directly or indirectly applied to other related The technical field is equally included in the scope of patent protection of the present invention.

Claims

A substrate protection member for holding a substrate, wherein the substrate protection member comprises a conductive sleeve body and an elastic sleeve body, wherein the elastic sleeve body is provided with a first card slot, and the edge of the substrate is clamped In the first card slot, the conductive sleeve is provided with a second card slot, and an inner wall of the second card slot is attached to an outer surface of the elastic sleeve.
The substrate guard according to claim 1, wherein the height of the first card slot is greater than the thickness of the substrate by 0.1 mm to 0.3 mm.
The substrate guard according to claim 1, wherein a thickness of a portion of the elastic cover that is held on the upper side of the substrate is different from a thickness at a position corresponding to a portion that is held at a lower side of the substrate.
The substrate guard according to claim 1, wherein the outer surface of the elastic sleeve is recessed inwardly to form a latching portion, and the conductive sleeve is provided with a protrusion adapted to the latching portion, The elastic sleeve is fixedly fixed in the second card slot by the engaging portion and the protruding portion.
The substrate guard according to claim 1, wherein the conductive sleeve is a thin metal layer, and the conductive sleeve is fixed to an outer surface of the elastic sleeve by screws or glue.
A substrate guard for holding a substrate, wherein the substrate guard comprises a conductive sleeve and an elastic sleeve, and the elastic sleeve is for clamping on an edge of the substrate, A conductive sleeve is wrapped around the outer surface of the elastic sleeve.
The substrate guard according to claim 6, wherein the elastic sleeve is provided with a first card slot, and an edge of the substrate is clamped in the first card slot.
The substrate guard according to claim 7, wherein the height of the first card slot is greater than the thickness of the substrate by 0.1 mm to 0.3 mm.
The substrate guard according to claim 8, wherein the height of the first card slot is 0.2 mm larger than the thickness of the substrate.
The substrate guard according to claim 6, wherein a thickness of a portion of the elastic cover that is held on the upper side of the substrate is different from a thickness at a position corresponding to a portion that is held at a lower side of the substrate.
The substrate guard according to claim 10, wherein a thickness of a portion of the elastic sleeve that is held on the upper side of the substrate is greater than a thickness of a portion of the elastic holder that is held at a lower portion of the substrate.
The substrate guard according to claim 6, wherein the elastic sleeve is made of a high temperature resistant rubber, sponge or other material having a cushioning function, and the conductive sleeve is made of a conductive material.
The substrate protection member according to claim 6, wherein the conductive sleeve body is provided with a second card slot, and an inner wall of the second card slot is attached to an outer surface of the elastic sleeve body.
The substrate guard according to claim 13, wherein the outer surface of the elastic sleeve is recessed inwardly to form a latching portion, and the conductive sleeve is provided with a protrusion adapted to the latching portion, The elastic sleeve is fixedly fixed in the second card slot by the engaging portion and the protruding portion.
The substrate guard according to claim 13, wherein the conductive sleeve is a thin metal layer, and the conductive sleeve is fixed to an outer surface of the elastic sleeve by screws or glue.
A substrate protection member, comprising: a conductive sleeve body and an elastic sleeve body; the elastic sleeve body is provided with a first card slot, and the conductive sleeve body is wrapped around the elastic sleeve body The outer surface.
The substrate guard according to claim 16, wherein the thickness of the portion of the elastic sleeve on both sides of the first card slot is unequal.
The substrate guard according to claim 16, wherein the conductive sleeve is provided with a second card slot for holding the elastic sleeve, and an inner wall of the second card slot is attached to the elastic The outer surface of the casing.
The substrate guard according to claim 18, wherein the outer surface of the elastic sleeve is recessed inwardly to form a latching portion, and the conductive sleeve is provided with a protrusion adapted to the latching portion, The elastic sleeve is fixedly fixed in the second card slot by the engaging portion and the protruding portion.
A substrate guard according to claim 19, wherein said conductive sleeve is a thin metal layer, and said conductive sleeve is fixed to an outer surface of said elastic sleeve by screws or glue.