WO2013139125A1

WO2013139125A1 - Z-axis servo motor integrated with power-off braking device

Info

Publication number: WO2013139125A1
Application number: PCT/CN2012/083822
Authority: WO
Inventors: 刘延杰; 吴明月; 荣伟彬; 孙立宁
Original assignee: 哈尔滨工业大学
Priority date: 2012-03-23
Filing date: 2012-10-31
Publication date: 2013-09-26
Also published as: CN102594015A; CN102594015B

Abstract

Disclosed is a Z-axis servo motor integrated with a power-off braking device, for solving the problems of existing braking devices for Z-axis servo motors having insufficiently rapid response and insufficiently large braking torque. The invention is composed of a Z-axis servo motor (12) and a power-off braking device. The power-off braking device comprises an annular sidewall (11), a fixed friction plate (2), a spacer sleeve (3), a clutch gear (4), a clutch friction plate (5), a movable friction plate (6), an elastic device (7) and an electromagnet winding (8). The annular sidewall (11) is fixed to an end cover of the Z-axis servo motor (12); the electromagnet winding (8) encases a Z-axis motor shaft (10) of the Z-axis servo motor (12); the elastic device (7) is arranged between the movable friction plate (6) and the end cover of the Z-axis servo motor (12); the clutch friction plate (5) encases the Z-axis motor shaft (10); the clutch gear (4) is located between the Z-axis motor shaft (10) and the clutch friction plate (5) and is in a slidable meshed connection with the clutch friction plate (5); and the fixed friction plate (2) encases the Z-axis motor shaft (10) and the spacer sleeve (3) is provided between the fixed friction plate and an end face of the Z-axis servo motor (12).

Description

Z-axis servo motor with integrated power-off braking device

Technical field

The invention belongs to the field of semiconductor chip device manufacturing, relates to a Z-axis driving device of a silicon wafer transmission robot, and particularly relates to a Z-axis servo motor with an integrated power-off braking device.

Background technique

The Z-axis mechanism of the silicon transfer robot is equipped with a Z-axis servo motor as a power source, and the rotary motion of the servo motor is converted into a linear motion along the Z-axis by the lead screw mechanism. Since the Z-axis is defined in a direction perpendicular to the horizontal plane and the same as the gravity direction of the Earth, the equipment suddenly encounters a power outage during operation, and loses the power support of the motor. Under the gravity of the upper mechanism of the Z-axis load, it will follow the Z-axis. The screw guide mechanism slides down by itself, which is likely to cause damage to the equipment and the transmission silicon. Therefore, the Z-axis mechanism of the silicon transfer robot is usually equipped with a special brake device to quickly brake the motor shaft or the drive screw during an unexpected power failure to prevent equipment accidents. The traditional brake device does not respond quickly enough, the braking torque is not large enough, and the reliability is not high enough.

technical problem

The invention is to solve the problem that the braking device of the existing Z-axis servo motor has insufficient response and the braking torque is not large enough, and the Z-axis servo motor with integrated power-off braking device is proposed.

Technical solution

The Z-axis servo motor of the integrated power-off braking device of the present invention is composed of a Z-axis servo motor and a power-off braking device, and the power-off braking device is fixed on the output shaft side of the Z-axis servo motor. In the end face, the power-off braking device comprises an annular side wall, a fixed friction plate, a spacing positioning sleeve, a tooth cog, a frictional friction piece, a movable friction piece, an elastic device and an electromagnet coil, wherein the annular side wall is fixed at The end cover of the Z-axis servo motor, and the annular side wall is coaxial with the output shaft of the Z-axis servo motor; the electromagnet coil is sleeved on the outer side of the Z-axis motor shaft of the Z-axis servo motor, and the end cover of the Z-axis servo motor Fixed connection, there is a gap between the inner wall of the electromagnet coil and the Z-axis motor shaft; the movable friction piece is circular, the movable friction piece is sleeved on the outer side of the Z-axis motor shaft, and there is a gap between the Z-axis motor shaft and the Z-axis motor shaft And located on the electromagnet coil, an elastic device is arranged between the movable friction piece and the end cover of the Z-axis servo motor; the tooth-inserted friction piece is a circular ring with teeth on the inner side wall, and the tooth-mounted friction piece is sleeved on the Z-axis motor The outer side of the shaft, the frictional friction piece and the activity The wiper blade is fixedly connected; the cog gear is a circular ring with teeth on the outer side wall, and the cogwheel gear is located between the Z-axis motor shaft and the tooth-mounted friction plate, and the inner wall thereof is fixedly connected with the Z-axis motor shaft, the pinion gear and The frictional friction plate is slidingly engaged; the fixed friction plate is circular, the fixed friction plate is sleeved outside the shaft of the Z-axis motor, and a gap is left between the shaft of the Z-axis motor, and the outer side wall and the annular side wall of the friction plate are fixed. The inner side wall is matched with a gap, and a fixed positioning piece is arranged between the fixed friction piece and the end surface of the Z-axis servo motor, and the fixed friction piece is fixedly connected with the end surface of the Z-axis servo motor, and the movable friction piece can move in the axial direction and is elastic. Under the elasticity of the device, it can be in close contact with the fixed friction plate.

Beneficial effect

The Z-axis servo motor with integrated power-off braking device proposed by the invention can effectively brake the rotating Z-axis motor to prevent accidents when the equipment suddenly encounters an unexpected power failure, and has the following advantages. :

1. Rapid response: The invention has undergone rigorous calculation, scientific material selection and reasonable manufacturing process in the design process, which reduces the self-induced electromotive force of the electromagnet coil, reduces the hysteresis performance, and greatly shortens the response time.

2. Large braking torque: The invention integrates the power-off braking device by using the inner cavity of the upper cover of the servo motor, and can install a larger-sized electromagnet coil and a larger area of the friction plate to transmit torque, and the braking torque is relatively Big.

3. Reliable function: The invention has a simple structure and is a pure mechanical electrical structure, and does not require electronic parts and program software, so the function reliability is high.

4. No adjustment required: The design and manufacture of the parts determine the assembly performance of the present invention, so that no adjustment is required during the assembly process, which simplifies the assembly process.

DRAWINGS

1 is a three-dimensional installation schematic view of the present invention, and FIG. 2 is a three-dimensional exploded view of the present invention.

Embodiments of the invention

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS 1. A Z-axis servo motor with integrated power-off braking device, which is composed of a Z-axis servo motor 12 and a power-off braking device, and the power-off braking device is fixed to the output of the Z-axis servo motor 12. On the end face on one side of the shaft, the power-off braking device comprises an annular side wall 11, a fixed friction plate 2, a spacing positioning sleeve 3, a cog wheel 4, a frictional friction piece 5, a movable friction piece 6, an elastic device 7, and Electromagnet coil 8,

The annular side wall 11 is fixed on the end cover of the Z-axis servo motor 12, and the annular side wall 11 is coaxial with the output shaft of the Z-axis servo motor 12.

The electromagnet coil 8 is sleeved outside the Z-axis motor shaft 10 of the Z-axis servo motor 12, and is fixedly connected to the end cover of the Z-axis servo motor 12, leaving a gap between the inner wall of the electromagnet coil 8 and the Z-axis motor shaft 10. ;

The movable friction plate 6 is a circular ring, and the movable friction plate 6 is sleeved on the outer side of the Z-axis motor shaft 10, and has a gap with the Z-axis motor shaft 10, and is located on the electromagnet coil 8, the movable friction plate 6 and the Z The elastic cover 7 is disposed between the end covers of the shaft servo motor 12;

The dental friction plate 5 is a circular ring with teeth on the inner side wall, and the dental friction plate 5 is sleeved on the outer side of the Z-axis motor shaft 10, and the dental friction plate 5 is fixedly connected with the movable friction plate 6;

The cogwheel 4 is a circular ring with teeth on the outer side wall, and the cogwheel 4 is located between the Z-axis motor shaft 10 and the tooth-mounted friction plate 5, and the inner wall thereof is fixedly connected with the Z-axis motor shaft 10, and the pinion gear 4 Sliding engagement with the friction-inserted blade 5;

The fixed friction plate 2 is a circular ring, and the fixed friction plate 2 is sleeved outside the Z-axis motor shaft 10, and a gap is left between the Z-axis motor shaft 10, and the outer side wall and the annular side wall 11 of the fixed friction plate 2 are fixed. The inner side wall clearance fits, the fixed friction plate 2 and the end surface of the Z-axis servo motor 12 are provided with a spacing positioning sleeve 3, and the fixed friction piece 2 is fixedly connected with the end surface of the Z-axis servo motor 12,

The movable friction sheet 6 is movable in the axial direction and is in close contact with the fixed friction sheet 2 under the elasticity of the elastic means 7.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The second embodiment differs from the first embodiment in that the present embodiment is further limited to the first embodiment, and the elastic device 7 is implemented by a spring.

The third embodiment differs from the first embodiment in that the elastic device 7 is realized by a spring and is sleeved on the Z-axis motor shaft 10.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The difference between this embodiment and the first embodiment is that the present embodiment is further limited to the specific embodiment 1. The elastic device 7 is implemented by using a plurality of springs, and the plurality of springs are driven by the Z-axis motor shaft 10 . For the shaft to be evenly distributed in the circumferential direction, the position of the Z-axis motor shaft 10 in contact with the end surface of the Z-axis servo motor 12 is set to a limit structure.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS V. The difference between the embodiment and the specific embodiment 1 is that the present embodiment is further defined by the specific embodiment 1. The power-off braking device further includes a flat key 9 , and the claw gear 4 passes The flat key 9 is fixedly coupled to the Z-axis motor shaft 10.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS VI. The difference between the present embodiment and the first embodiment is that the present embodiment is further limited to the specific embodiment 1. The movable friction plate 6 can move in the axial direction at a distance of 0.2 to 0.3 mm.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The difference between the present embodiment and the specific embodiment 1 is that the present embodiment is further defined by the first embodiment. The pitch positioning sleeve 3 is implemented by using a plurality of cylinders, and the plurality of cylinders are Z-axis motor shafts. 10 is an even distribution of the axis, and the movable friction piece 6 is provided with a pit at a position corresponding to each of the cylinders, and a gap is left between the pit and the cylinder.

EMBODIMENT OF THE INVENTION The difference between this embodiment and the first embodiment is that the power supply braking device further includes a brake fastening screw 1 and the fixed friction plate 2 passes through the second embodiment. The brake fastening screw 1 is fixedly connected to the end cover of the Z-axis servo motor 12.

The embodiment is different from the specific embodiment 1. The embodiment is further defined by the specific embodiment 1. The inner diameters of the fixed friction piece 2 and the movable friction piece 6 are larger than that of the cog wheel 4 . Outer diameter.

The working principle is: when the Z-axis servo motor works normally, the electromagnet coil 8 fixed in the inner cavity of the annular sidewall 11 is in an energized state, and the generated electromagnetic force attracts the movable friction plate 6 to the electromagnet coil 8 to make the activity The friction plate 6 is separated from the dental friction plate 5, and the dental friction plate 5 is separated from the fixed friction plate 2, so that the cog wheel 4 that runs synchronously with the servo motor shaft drives the dental friction plate 5 to idle between the friction plates. The torque is transmitted; when a power failure accident occurs suddenly, the electromagnet coil 8 fixed in the inner cavity of the annular side wall 11 is synchronously powered off, no electromagnetic force is generated, and the elastic force of the elastic device 7 on which the movable friction plate 6 is mounted on the lower end surface thereof Under the action, it moves upward in the direction of the axis of the servo motor; the movable friction piece 6 is closely adhered to the dental friction plate 5, and the dental friction plate 5 is closely adhered to the fixed friction piece 2, namely: the movable friction piece 6 and the fixed friction piece. 2 clamping the dental friction plate 5, and the dental friction plate 5 meshes with the cog wheel 4, the cog gear 4 runs synchronously with the servo motor shaft, and the toothed gear 4 drives the dental friction plate 5 through each friction The piece transmits torque and will eventually twist Transferred to the fixing of the cabinet on the annular side wall 11, thereby completing the braking Z-axis of the motor shaft 10 for rotation.

Claims

A Z-axis servo motor with integrated power-off braking device, which is composed of a Z-axis servo motor (12) and a power-off braking device, and the power-off braking device is fixed on an output shaft of a Z-axis servo motor (12) The end surface of one side is characterized in that: the power-off braking device comprises an annular side wall (11), a fixed friction plate (2), a spacing positioning sleeve (3), a toothed gear (4), and a frictional friction piece. (5), movable friction plate (6), elastic device (7) and electromagnet coil (8), The annular side wall (11) is fixed on an end cover of the Z-axis servo motor (12), and the annular side wall (11) is coaxial with the output shaft of the Z-axis servo motor (12); The electromagnet coil (8) is sleeved on the outer side of the Z-axis motor shaft (10) of the Z-axis servo motor (12), and is fixedly connected to the end cover of the Z-axis servo motor (12), and the inner wall of the electromagnet coil (8) is There is a gap between the Z-axis motor shafts (10); The movable friction plate (6) is a circular ring, and the movable friction plate (6) is sleeved on the outer side of the Z-axis motor shaft (10), and has a gap with the Z-axis motor shaft (10), and is located at the electromagnet coil ( 8) upper, between the movable friction plate (6) and the end cover of the Z-axis servo motor (12) is provided with elastic means (7); The tooth-inserted friction piece (5) is a circular ring with teeth on the inner side wall, and the friction-inserted piece (5) is sleeved on the outer side of the Z-axis motor shaft (10), and the friction-inserted piece (5) and the movable friction piece (6) Fixed connection; The cogwheel (4) is a circular ring with teeth on the outer side wall, and the cogwheel gear (4) is located between the Z-axis motor shaft (10) and the tooth-mounted friction plate (5), and the inner wall and the Z-axis motor shaft (10) fixed connection, the toothed gear (4) and the frictional friction piece (5) are slidingly engaged; The fixed friction plate (2) is a circular ring, and the fixed friction plate (2) is sleeved outside the Z-axis motor shaft (10), and a gap is left between the Z-axis motor shaft (10) and the fixed friction plate (2). Outer side wall and annular side wall (11) The inner side wall clearance fit, the fixed friction plate (2) and the end face of the Z-axis servo motor (12) are provided with a spacing positioning sleeve (3), and the end faces of the fixed friction piece (2) and the Z-axis servo motor (12) Fixed connection, The movable friction sheet (6) is movable in the axial direction and is in close contact with the fixed friction sheet (2) under the elasticity of the elastic means (7).
A Z-axis servo motor with an integrated power-off braking device according to claim 1, characterized in that the elastic means (7) are realized by springs.
The Z-axis servo motor of an integrated power-off braking device according to claim 1, characterized in that the elastic device (7) is realized by a spring and is sleeved on the Z-axis motor shaft (10).
The Z-axis servo motor of an integrated power-off braking device according to claim 1, wherein the elastic device (7) is realized by a plurality of springs, and the plurality of springs are axially aligned with the Z-axis motor shaft (10). The circumferential direction is evenly distributed, and the position of the Z-axis motor shaft (10) in contact with the end surface of the Z-axis servo motor (12) is set to a finite-position structure.
The Z-axis servo motor of an integrated power-off braking device according to claim 1, wherein the power-off braking device further comprises a flat key (9), and the claw gear (4) passes the flat key ( 9) Fixed connection to the Z-axis motor shaft (10).
The Z-axis servo motor of an integrated power-off brake device according to claim 1, wherein the movable friction plate (6) is movable in the axial direction by a distance of 0.2 to 0.3 mm.
The Z-axis servo motor of an integrated power-off braking device according to claim 1, wherein the spacing positioning sleeve (3) is realized by a plurality of cylinders, and the plurality of cylinders are oriented by the Z-axis motor shaft (10) The heart is evenly distributed, and the movable friction piece (6) is provided with a pit at a position corresponding to each cylinder, and a gap is left between the pit and the cylinder.
A Z-axis servo motor for an integrated power-off braking device according to claim 1, wherein said power-off braking device further comprises a brake fastening screw (1) for fixing the friction plate (2) through the brake The fastening screw (1) is fixedly connected to the end cover of the Z-axis servo motor (12).
The Z-axis servo motor of the integrated power-off braking device according to claim 1, wherein the inner diameter of the fixed friction piece (2) and the movable friction piece (6) are larger than the toothed gear (4) The outer diameter.