WO2013133392A1 - Positive photosensitive resin composition, partition wall and optical element - Google Patents
Positive photosensitive resin composition, partition wall and optical element Download PDFInfo
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- WO2013133392A1 WO2013133392A1 PCT/JP2013/056368 JP2013056368W WO2013133392A1 WO 2013133392 A1 WO2013133392 A1 WO 2013133392A1 JP 2013056368 W JP2013056368 W JP 2013056368W WO 2013133392 A1 WO2013133392 A1 WO 2013133392A1
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- resin composition
- photosensitive resin
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- ink
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
- G03F7/0236—Condensation products of carbonyl compounds and phenolic compounds, e.g. novolak resins
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
Definitions
- the present invention relates to a positive photosensitive resin composition, a partition formed using the same, and an optical element having the partition.
- a partition used for a pixel portion of a color filter or an organic EL (Electro-Luminescence) element, which is an optical element, is known to be formed by applying a photosensitive resin composition to a substrate and using a photolithography technique.
- a cost reduction process using an inkjet method has been proposed as a method for manufacturing a pixel portion of a color filter or an organic EL element.
- R red
- G green
- B blue
- inks are applied to the openings (dots) surrounded by the partition walls by an inkjet method. Spray and apply to form pixels.
- the partition wall is required to have a property of repelling ink containing water or an organic solvent which is an inkjet discharge liquid, so-called ink repellency.
- the ink layer formed on the pixel by the inkjet method needs to have excellent film thickness uniformity. Therefore, the dots surrounded by the partition walls are required to have good wettability with respect to the discharge liquid, so-called ink affinity.
- Patent Document 1 describes a technique for imparting ink repellency to a partition wall surface using a positive photosensitive resin composition containing an ink repellent agent having a small surface free energy.
- the present invention has been made in view of the above circumstances, and can form a partition wall that is excellent in ink repellency, excellent in ink repellency even after being subjected to ultraviolet / ozone irradiation treatment, and having little residue on dots.
- An object of the present invention is to provide a positive photosensitive resin composition having excellent storage stability.
- Another object of the present invention is to provide an optical element having a partition wall that is excellent in ink repellency and excellent in ink repellency even after being subjected to ultraviolet / ozone irradiation treatment.
- the present invention provides a positive photosensitive resin composition, partition walls, and optical elements having the following configurations [1] to [15].
- a positive photosensitive resin composition comprising an alkali-soluble resin (A), a photosensitive agent (B) and an ink repellent agent (C), Partial hydrolysis of a mixture in which the ink repellent agent (C) includes a hydrolyzable silane compound represented by the following formula (c-1) and a hydrolyzable silane compound represented by the following formula (c-2)
- a positive photosensitive resin composition comprising a condensate and having a fluorine atom content of 10 to 55 mass% in the ink repellent agent (C).
- R f a perfluoroalkyl group having 1 to 6 carbon atoms, or a monovalent group having 2 to 40 carbon atoms represented by R f1 OR f2 — (R f1 is a perfluoroalkyl group having 1 to 6 carbon atoms) And R f2 is a perfluoroalkylene group which may have an etheric oxygen atom between carbon-carbon atoms).
- Q 1 a divalent organic group not containing a fluorine atom having 1 to 10 carbon atoms
- R H1 a hydrocarbon group having 1 to 6 carbon atoms
- X 1 and X 2 hydrolyzable groups
- p 0, 1 or 2.
- three X 1 s in the formula (c-1), (4-p) X 2 s in the formula (c-2), and p RH 1 s may be the same or different from each other. There may be. )
- the positive photosensitive resin composition of the present invention is excellent in ink repellency, can form a partition wall excellent in ink repellency even after being subjected to ultraviolet / ozone irradiation treatment, and is excellent in storage stability.
- the optical element of the present invention is excellent in ink repellency, and has a partition wall that is excellent in ink repellency even after being subjected to ultraviolet / ozone irradiation treatment.
- the compound represented by the formula (c-1) is referred to as “compound (c-1)”.
- the “total solid content” in this specification is a partition-forming component among the components contained in the positive photosensitive resin composition, and is a volatile material that volatilizes by heating or the like in the partition-forming process such as the solvent (D). All components other than components are shown. It is measured as a residue obtained by heating the positive photosensitive resin composition at 140 ° C. for 24 hours to remove the solvent. The total solid content can also be calculated from the amount of each component charged.
- a film coated with a positive photosensitive resin composition is referred to as a “coating film”, a dried state is referred to as a “film”, and a film obtained by curing the film is referred to as a “cured film”. .
- the “surface” of the partition wall is used as a term indicating only the upper surface of the partition wall. Therefore, the “surface” of the partition does not include the side surface of the partition.
- the “ink” in the present specification is a general term for, for example, liquids having optically and electrically functions after being dried and cured, and is not limited to conventionally used coloring materials.
- pixels formed by injecting the ink are also used to indicate sections having optical and electrical functions, which are partitioned by partition walls.
- “Ink repellency” in the present specification refers to a property having moderately both water repellency and oil repellency in order to repel the ink, and can be evaluated by, for example, a method described later. Embodiments of the present invention will be described below. In addition, unless otherwise indicated in this specification,% represents the mass%.
- alkali-soluble resin (A) As alkali-soluble resin (A) in the positive photosensitive resin composition of this invention, well-known alkali-soluble resin used for positive photosensitive resin composition is used.
- the alkali-soluble resin (A) functions as a positive photosensitive resin composition by being used together with a photosensitizer (B) described later. That is, in the positive photosensitive resin composition, upon exposure such as photolithography, the photosensitive agent (B) is activated in the exposed portion, and the solubility in the developer is increased. The exposed portion is removed by dissolving in a developer (usually an alkali developer) during development. A portion that is not irradiated with light (an unexposed portion) serves as a partition wall.
- the alkali-soluble resin (A) may be insolubilized in the developer by combining with the photosensitizer (B) before exposure.
- alkali-soluble resin (A) examples include phenols and aldehydes, unmodified or modified novolak type phenol resins, polyhydroxystyrene, polyhalogen produced by polycondensation by adding various modifiers as necessary. Hydroxystyrene, N- (4-hydroxyphenyl) methacrylamide copolymer, and hydroquinone monomethacrylate copolymer.
- various alkali-soluble polymer compounds such as sulfonylimide polymers, carboxyl group-containing polymers, acrylic resins containing phenolic hydroxyl groups, acrylic resins having sulfonamide groups, urethane resins, etc. may be used. it can.
- a novolac type phenol resin is preferable.
- phenols used for producing the novolak type phenol resin include cresols such as phenol, o-cresol, p-cresol, m-cresol; 3,5-xylenol, 2,5-xylenol, 2, Xylenols such as 3-xylenol and 3,4-xylenol; 2,3,4-trimethylphenol, 2,3,5-trimethylphenol, 2,4,5-trimethylphenol, 3,4,5-trimethylphenol, etc.
- Trimethylphenols such as 2-t-butylphenol, 3-t-butylphenol, 4-t-butylphenol; 2-methoxyphenol, 3-methoxyphenol, 4-methoxyphenol, 2,3-dimethoxyphenol 2,5-dimethoxyphenol, 3 Methoxyphenols such as 5-dimethoxyphenol; 2-ethylphenol, 3-ethylphenol, 4-ethylphenol, 2,3-diethylphenol, 3,5-diethylphenol, 2,3,5-triethylphenol, 3, Ethylphenols such as 4,5-triethylphenol; chlorophenols such as o-chlorophenol, m-chlorophenol, p-chlorophenol, 2,3-dichlorophenol; resorcinol, 2-methylresorcinol, 4-methylresorcinol Resorcinols such as 5-methylresorcinol; Catechols such as 5-methylcatechol; Pyrogallols such as 5-methylpyr
- aldehydes used for producing novolak type phenol resins include formaldehyde, paraformaldehyde, trioxane, acetaldehyde, propionaldehyde, polyoxymethylene, chloral, furfural, glyoxal, n-butyraldehyde, caproaldehyde, allylaldehyde, Examples thereof include benzaldehyde, crotonaldehyde, acrolein, tetraoxymethylene, phenylacetaldehyde, o-tolualdehyde, salicylaldehyde and the like. These may be used alone or in combination of two or more.
- novolak type phenol resins using cresols, xylenols and the like are preferable as phenols from the viewpoints of easy availability and few metal impurities, and novolak type using cresols.
- Phenol resin (hereinafter also referred to as “cresol novolac resin”) is particularly preferable.
- the mass average molecular weight (Mw) of the alkali-soluble resin (A) is preferably 0.5 ⁇ 10 3 to 20 ⁇ 10 3 , particularly preferably 2 ⁇ 10 3 to 15 ⁇ 10 3 .
- Mw mass average molecular weight
- a mass average molecular weight (Mw) means the mass average molecular weight converted on the basis of standard polystyrene, which is measured by gel permeation chromatography (GPC) using tetrahydrofuran as a mobile phase.
- GPC gel permeation chromatography
- Mn means the number average molecular weight measured by the same GPC.
- the alkali-soluble resin (A) preferably has excellent solubility in an alkali developer.
- a dissolution rate angstrom / second, hereinafter simply referred to as “dissolution rate” in a general 2.38 mass% TMAH (tetramethylammonium hydroxide) aqueous solution.
- TMAH tetramethylammonium hydroxide
- a commercially available product can be used as the alkali-soluble resin (A).
- Commercially available products are trade names manufactured by Asahi Organic Materials Co., Ltd., EP4020G (Mw: 9,000 to 14,000, dissolution rate: 160 to 250 angstrom / second), EPR5010G (Mw: 7,000 to 12) 500, dissolution rate: 50 to 150 angstroms / second) (both are cresol novolac resins).
- the alkali-soluble resin (A) in the positive photosensitive resin composition of the present invention may be used alone or in combination of two or more.
- the content of the alkali-soluble resin (A) in the total solid content in the positive photosensitive resin composition is preferably 10 to 90% by mass, particularly preferably 30 to 80% by mass. When the content is in the above range, the developability of the positive photosensitive resin composition is improved.
- Photosensitive agent (B) As the photosensitive agent (B) in the positive photosensitive resin composition of the present invention, a known photosensitive agent used for the positive photosensitive resin composition is used. As the photosensitive agent (B), a compound having a quinonediazide group is preferable. As the compound having a quinonediazide group, a known compound having a quinonediazide group used in combination with a novolak type phenol resin is used.
- Examples of the photosensitive agent (B) include a complete condensate and a partial condensate of a compound ⁇ and a compound ⁇ having a quinonediazide group, which will be described later, which can be condensed with each other.
- Compound ⁇ has a functional group capable of condensation reaction.
- the functional group capable of condensation reaction include a sulfo group and a chlorosulfo group.
- Examples of the compound ⁇ include sulfonic acids such as benzoquinone diazide sulfonic acid, naphthoquinone diazide sulfonic acid, and anthraquinone diazide sulfonic acid, and sulfonic acid chlorides thereof.
- sulfonic acid chloride examples include 1,2-naphthoquinonediazide-5-sulfonic acid chloride, 1,2-naphthoquinonediazide-4-sulfonic acid chloride, 1,2-benzoquinonediazide-4-sulfonic acid chloride, and the like. Is mentioned.
- the compound ⁇ has a functional group that can undergo a condensation reaction with the compound ⁇ .
- the functional group capable of the condensation reaction include a hydroxyl group and an amino group, and a hydroxyl group is preferred.
- a compound having an aromatic ring is preferable in that the obtained partition wall is excellent in heat resistance.
- the number of aromatic rings in the aromatic compound is preferably 1 to 6 and particularly preferably 2 to 4 in terms of heat resistance and the ability to introduce a large number of hydroxyl groups.
- an aromatic compound in which at least one hydrogen atom bonded to the aromatic ring is substituted with a hydroxyl group is particularly preferable.
- the number of hydroxyl groups in one molecule is preferably 1 to 10 and particularly preferably 2 to 4.
- Phenols such as phenol and 4-methylphenol
- Polyhydroxybenzophenones such as 2,3,4-trihydroxybenzophenone, 2,3,4,4'-tetrahydroxybenzophenone
- Tris (4-hydroxyphenyl) methane, 1,1,1-tris (4-hydroxyphenyl) ethane, 1,1-bis (4-hydroxyphenyl) -1- [ ⁇ , ⁇ -dimethyl- ⁇ - (4 '-Hydroxyphenyl) benzyl] ethane, bis (4-hydroxy-3-methylphenyl) -2-hydroxyphenylmethane, bis (4-hydroxy-2,3,5-trimethylphenyl) -2-hydroxyphenylmethane, bis (4-hydroxy-3,5-dimethylphenyl) -4-hydroxyphenylmethane, bis (4-hydroxy-3,5-dimethylphenyl) -3-hydroxyphenylmethane, bis (4-hydroxy-3,5-dimethyl) Pheny
- the photosensitizer (B) is more preferably a complete condensate or partial condensate of the following compound ⁇ and compound ⁇ .
- Compound ⁇ 1,2-naphthoquinonediazide-5-sulfonic acid chloride, 1,2-naphthoquinonediazide-4-sulfonic acid chloride, 1,2-benzoquinonediazide-4-sulfonic acid chloride, etc.
- Trisphenol type compounds include tris (4-hydroxyphenyl) methane, 1,1,1-tris (4-hydroxyphenyl) ethane, 1,1-bis (4-hydroxyphenyl) -1- [ ⁇ , ⁇ -dimethyl - ⁇ - (4'-hydroxyphenyl) benzyl] ethane, 1,3,5-tris (4-hydroxyphenyldimethylbenzyl) benzene;
- Bisphenol type compounds include 2,3,4-trihydroxyphenyl-4'-hydroxyphenylmethane, 2- (3,4-dihydroxyphenyl) -2- (3 ', 4'-dihydroxyphenyl) propane, 2- ( 2,4-dihydroxyphenyl) -2- (2 ', 4'-dihydroxyphenyl) propane, 2- (2,3,4-trihydroxyphenyl)
- D represents a hydrogen atom or a group represented by the following formula (b-2), provided that at least one of D is a group represented by the formula (b-2). .
- the photosensitive agent (B) in the positive photosensitive resin composition of the present invention may be a mixture of compounds having different numbers of quinonediazide groups in one molecule, and the quinonediazide group as an average value of the entire photosensitive agent (B), Compounds having 1 to 4 per molecule are preferred, and compounds having 2.5 to 3 are particularly preferred.
- the content of the photosensitive agent (B) in the total solid content in the positive photosensitive resin composition of the present invention is preferably 0.1 to 50% by mass, particularly preferably 1.0 to 30% by mass. Within the above range, the developability of the positive photosensitive resin composition is excellent. If it is less than the lower limit, sufficient sensitivity as a photosensitive tree composition may not be obtained, and if it exceeds the upper limit, components may be precipitated.
- the ink repellent agent (C) in the positive photosensitive resin composition of the present invention is a hydrolyzable silane compound (hereinafter also referred to as compound (c-1)) represented by the following formula (c-1), Partially hydrolyzed condensate of a mixture (hereinafter also referred to as “hydrolyzable silane compound mixture”) containing a hydrolyzable silane compound represented by (c-2) (hereinafter also referred to as compound (c-2))
- the fluorine atom content in the ink repellent agent (C) is 10 to 55% by mass.
- R f a perfluoroalkyl group having 1 to 6 carbon atoms, or a monovalent group having 2 to 40 carbon atoms represented by R f1 OR f2 — (R f1 is a perfluoroalkyl group having 1 to 6 carbon atoms) And R f2 is a perfluoroalkylene group which may have an etheric oxygen atom between carbon-carbon atoms).
- Q 1 a divalent organic group not containing a fluorine atom having 1 to 10 carbon atoms
- R H1 a hydrocarbon group having 1 to 6 carbon atoms
- X 1 and X 2 hydrolyzable groups
- p 0, 1 or 2.
- X 1 , X 2 and R H1 are present in the formula (c-1) or the formula (c-2), they may be different from each other or the same. )
- the ink repellent agent (C) can impart excellent ink repellency to the partition formed using the positive photosensitive resin composition.
- R f derived from the hydrolyzable silane compound (c-1) tends to stay on the side opposite to the substrate (that is, the air side). That is, the ink repellent agent (C) tends to stay on the side opposite to the substrate.
- the compound (c-1) has R f and a silicon atom, the partition wall is excellent in ink repellency and ultraviolet / ozone resistance.
- the ink repellent agent (C) contains a unit derived from the compound (c-2), so that the ink repellent agent (C) is excellent in solubility in a hydrocarbon solvent and film forming property. Further, the fluorine atom content of the ink repellent agent (C) can be adjusted.
- the fluorine atom content of the ink repellent agent (C) is from 10 to 55 mass%, preferably from 12 to 40 mass%, particularly preferably from 15 to 30 mass%.
- the fluorine atom content is in the above range, the ink repellency resistant to ultraviolet rays or ozone irradiation can be imparted to the partition formed using the positive photosensitive resin assembly.
- the ink repellent agent (C) preferably has a silanol group.
- the number of silanol groups is preferably 0.2 to 3.5, more preferably 0.2 to 2, and particularly preferably 0.5 to 1.5 per silicon atom.
- it is at least the lower limit of the above range it is possible to prevent detachment of the ink repellent agent (C) from the substrate surface when the partition is formed using the positive photosensitive resin composition.
- the ink repellent agent (C) is excellent in compatibility with the solvent and other components in the positive photosensitive resin composition.
- the number of silanol groups in the ink repellent agent (C) is calculated by the ratio of peak areas of Si groups having silanol groups and Si groups having no silanol groups, as measured by 29 Si-NMR.
- the hydrolyzable silane compound mixture of the present invention contains compound (c-1) and compound (c-2). Furthermore, one or more hydrolyzable silane compounds other than the compound (c-1) and the compound (c-2) may be contained.
- hydrolyzable silane compound other than the compound (c-1) and the compound (c-2) examples include a hydrolyzable silane compound having a phenyl group-containing organic group (the hydrolyzable silane compound (c-1), And (c-2) are excluded).
- the compound (c-3) described later is preferable.
- the hydrolyzable silane compound (c-1) is a silane compound represented by the above formula (c-1).
- R f is preferably a perfluoroalkyl group having 1 to 6 carbon atoms or a perfluoroalkyl group having 4 to 9 carbon atoms containing an etheric oxygen atom, and is a perfluoroalkyl group having 6 carbon atoms. The group is particularly preferred.
- the partition formed using the positive photosensitive resin composition has excellent ink repellency, particularly excellent UV / ozone ink repellency, and a general-purpose solvent. Excellent solubility in Examples of the structure of R f include a linear structure, a branched structure, a ring structure, or a structure having a partial ring, and a linear structure is preferable.
- R f include the following groups. F (CF 2 ) 4 —, F (CF 2 ) 6 —. CF 3 CF 2 OCF 2 CF 2 OCF 2 —, CF 3 CF 2 OCF 2 CF 2 OCF 2 CF 2 —, CF 3 CF 2 OCF 2 CF 2 OCF 2 CF 2 OCF 2 —, CF 3 CF 2 OCF 2 CF 2 OCF 2 CF 2 OCF 2 —, CF 3 CF 2 OCF 2 CF 2 OCF 2 CF 2 OCF 2 CF 2 OCF 2 CF 2 —.
- Q 1 is preferably a group represented by — (CH 2 ) i1 — (wherein i1 is the same as above).
- i1 is preferably an integer of 2 to 4, particularly preferably — (CH 2 ) 2 —.
- the above Q 1 includes — (CH 2 ) i1 —, —CH 2 O (CH 2 ) i2 —, —SO A group represented by 2 NR 1 — (CH 2 ) i3 —, — (C ⁇ O) —NR 1 — (CH 2 ) i4 — (i1 to i4 and R 1 are the same as above) is preferable. Also in this case, — (CH 2 ) 2 — is particularly preferable.
- examples of X 1 include an alkoxy group, a halogen atom, an acyl group, an isocyanate group, an amino group, or a group in which a hydrogen atom of an amino group is substituted with an alkyl group.
- an alkoxy group having 1 to 4 carbon atoms or a halogen atom is preferable, and a methoxy group, an ethoxy group, or a chlorine atom is particularly preferable.
- These groups are converted into hydroxyl groups (silanol groups) by a hydrolysis reaction, and further, a reaction for forming a Si—O—Si bond through a condensation reaction between molecules tends to proceed smoothly.
- the compound (c-1) include the following compounds. F (CF 2 ) 4 CH 2 CH 2 Si (OCH 3 ) 3 , F (CF 2 ) 4 CH 2 CH 2 Si (OCH 2 CH 3 ) 3 , F (CF 2 ) 4 CH 2 CH 2 SiCl 3 , F (CF 2) 6 CH 2 CH 2 Si (OCH 3) 3, F (CF 2) 6 CH 2 CH 2 Si (OCH 2 CH 3) 3, F (CF 2) 6 CH 2 CH 2 SiCl 3.
- Examples of the compound (c-1) include F (CF 2 ) 6 CH 2 CH 2 Si (OCH 3 ) 3 , F (CF 2 ) 6 CH 2 CH 2 Si (OCH 2 CH 3 ) 3 , F ( CF 2) 6 CH 2 CH 2 SiCl 3, F (CF 2) 3 OCF (CF 3) CF 2 O (CF 2) 2 CH 2 CH 2 Si (OCH 3) 3 are particularly preferred.
- the compound (c-1) contained in the hydrolyzable silane compound mixture may be used alone or in combination of two or more.
- the hydrolyzable silane compound (c-2) is a silane compound represented by the above formula (c-2).
- R H1 is preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group, and particularly preferably a methyl group.
- X 2 is a hydrolyzable group, and is the same as X 1 in the above formula (c-1), including preferred embodiments.
- p is 0, 1 or 2, but when p is 2, two R H1 and (4-p) X 2 may be different from each other or the same.
- p is preferably 0 or 1.
- ink repellent agent (C) water repellency is expressed by R f1 derived from the compound (c-1) and R H1 derived from the compound (c-2), and oil repellency is expressed mainly by R f .
- the ratio of R f is high with respect to the total of R f and R H1 in the ink repellent agent (C). preferable.
- p is 0, the ratio of R f in the ink repellent agent (C) is increased, the oil repellency is improved, and the film forming property is excellent.
- the presence of a certain amount of R H1 makes the ink repellent agent (C) easily dissolved in a hydrocarbon solvent, and a coating of a positive photosensitive resin composition is formed on the surface of the substrate.
- a relatively inexpensive solvent can be selected.
- the following compounds are preferred. If necessary, a partial hydrolysis-condensation product obtained by partial hydrolysis-condensation of a plurality of them may be used. The same applies to other hydrolyzable silane compounds. Si (OCH 3 ) 4 , Si (OCH 2 CH 3 ) 4 , CH 3 Si (OCH 3 ) 3 , CH 3 Si (OCH 2 CH 3 ) 3 , CH 3 CH 2 Si (OCH 3 ) 3 , CH 3 CH 2 Si (OCH 2 CH 3 ) 3 , (CH 3 ) 2 Si (OCH 3 ) 2 , (CH 3 ) 2 Si (OCH 2 CH 3 ) 2 , A compound obtained by hydrolytic condensation of Si (OCH 3 ) 4 (for example, methyl silicate 51 (trade name) manufactured by Colcoat Co.), Compounds obtained by hydrolytic condensation of Si (OCH 2 CH 3 ) 4 (for example, ethyl silicate 40 and ethyl silicate 48 (both trade names) manufactured
- the compound (c-2) contained in the hydrolyzable silane compound mixture of the present invention may be used alone or in combination of two or more. When using 2 or more types together, a bifunctional compound can also be used together with a tetrafunctional compound and / or a trifunctional compound.
- the content of the compound (c-2) in the hydrolyzable silane compound mixture is preferably 0.1 to 9 mol of the compound (c-2) with respect to 1 mol of the compound (c-1). ⁇ 9 mol is particularly preferred.
- hydrolyzable silane compound (c-3) is a hydrolyzable silane compound represented by the following formula (c-3) (hereinafter also referred to as “compound (c-3)”).
- X 3 representing a hydrolyzable group is the same as X 1 in the formula (c-1), including preferred embodiments.
- the R H2 is the same, including the preferred embodiments and R H1 in the formula (c-2).
- Y represents a phenyl group optionally substituted with a hydrogen atom, a halogen atom, an alkyl group having 1 to 3 carbon atoms, an alkenyl group having 2 to 3 carbon atoms, or a nitro group.
- Q 2 is a group linking a silicon atom and a phenyl group, and is a single bond or a divalent organic group.
- q is 1 or 2, r is 0 or 1, and q + r is 1 or 2.
- q is 2
- two Q 2 may be different or the same
- q + r is 1, three X 3 are different from each other. May be the same
- q + r is 2, two X 3 may be different or the same.
- q is preferably 1 and r is 1, or q is 1 and r is preferably 0.
- Y includes a phenyl group, a fluorophenyl group, a chlorophenyl group, a dichlorophenyl group, and the like, and a phenyl group is particularly preferable.
- a compound (c-3) it is possible to obtain a partition wall with high resolution and little residue in the dot portion. This is because the phenyl group derived from the compound (c-3) is transferred to the diazide group of the photosensitive agent (B) in the developer after the ink repellent agent (C) has moved to the film surface of the positive photosensitive resin composition.
- the ink repellent agent (C) is likely to stay on the film surface of the positive photosensitive resin composition by the azo coupling reaction. Thereby, even after developing, post-baking, etc., the surface of the obtained partition wall can be kept ink-repellent and the side surface can be kept ink-philic.
- Q 2 when Q 2 is a divalent organic group, — (CH 2 ) j — (j is an integer of 1 to 6), —NH—, —NH— (C k H 2k )-(k is an integer of 1 to 6) and -N (C g H 2g + 1 )-(g is an integer of 1 to 6) are electron donating groups, and are preferable from the viewpoint of availability.
- Q 2 is particularly preferably a single bond or —NH—.
- compound (c-3) include the following compounds. (C 6 H 5 ) Si (OC 2 H 5 ) 3 , (C 6 H 5) NH ( CH 2) 3 Si (OCH 3) 3.
- the compound (c-3) contained in the hydrolyzable silane compound mixture of the present invention may be used alone or in combination of two or more.
- the compounding amount of the compound (c-3) in the hydrolyzable silane compound mixture of the present invention is 5 mol or less with respect to 1 mol of the total amount of the hydrolyzable silane compounds (c-1) and (c-2). Is preferably 4 mol or less.
- the ink repellent agent (C) used in the positive photosensitive resin composition of the present invention is a partial hydrolysis condensate of the above-mentioned raw material hydrolyzable silane compound mixture, and usually a plurality of condensates having different degrees of polymerization. It is a composed composition. That is, when the ink repellent agent (C) is produced using the hydrolyzable silane compound (c-1) and the compound (c-2) as essential components and optionally using the compound (c-3), It has the structure of the average composition formula represented by the following formula (1). However, since it is actually a product (partially hydrolyzed condensate) in which a hydrolyzable group or silanol group remains, it is difficult to express this product by a chemical formula.
- the average composition formula represented by the formula (1) is that the hydrolyzable group or silanol group is completely hydrolyzed and condensed into a siloxane bond in the partially hydrolyzed condensate produced as described above. Is the
- R f , R H1 , R H2 , Y, Q 1 , Q 2 , p, q, and r are the same as those described above.
- s, t, and u are the average number of moles of each unit in a plurality of fluorine-containing silane compound mixtures having different degrees of polymerization.
- the units derived from the compound (c-1), the compound (c-2) and the compound (c-3) are Presumed to be randomly arranged.
- the s / t (molar ratio) in the following average composition formula (2) when using the compound (c-1) and the compound (c-2) is the average value of the entire ink repellent agent (C).
- the content of the compound (c-2) with respect to the compound (c-1) in the decomposable silane compound mixture is preferably in the above-mentioned range, that is, 10/1 to 90 (molar ratio), preferably 10/5 to 90 (molar ratio). Particularly preferred.
- R f , R H1 , Q 1 and p are the same as those described above.
- s and t are the average number of moles of each unit in a plurality of fluorine-containing silane compound mixtures having different degrees of polymerization.
- the formula ( 2) has an average composition formula structure in which the units derived from the compound (c-3) of the formula (1) are further co-condensed.
- u is preferably within the above-mentioned range, that is, 5 or less (molar ratio) with respect to 1 of (s + t), and 4 or less (molar ratio) Particularly preferred.
- the ink repellent agent (C) in the positive type photosensitive resin composition of the present invention has excellent ink repellency even when it is exposed to ultraviolet rays / ozone when the contained silanol groups are further condensed in the process of exposure and curing. It is considered to form a partition wall showing
- the number average molecular weight (Mn) of the ink repellent agent (C) in the positive photosensitive resin composition of the present invention is preferably 500 or more, preferably less than 1,000,000, and particularly preferably less than 10,000.
- the number average molecular weight (Mn) is not less than the lower limit of the above range, detachment from the substrate surface can be prevented when the partition is formed using the positive photosensitive resin composition.
- the number average molecular weight (Mn) is less than the upper limit of the above range, the solubility in a solvent is good and the workability is excellent.
- the number average molecular weight (Mn) of the ink repellent agent (C) can be adjusted by selecting reaction conditions and the like.
- the ink repellent agent (C) in the positive photosensitive resin composition of the present invention can be produced by hydrolyzing and partially condensing the hydrolyzable silane compound mixture described above (hereinafter also referred to as “reaction step”).
- hydrolysis and partial condensation are reactions in which a silanol group is generated by a hydrolysis reaction of a hydrolyzable group and a siloxane bond is generated by a dehydration condensation reaction between silanol groups.
- the reaction conditions usually used for the reaction of hydrolyzing and condensing a hydrolyzable silane compound can be applied without particular limitation, and for example, water, a catalyst, an organic solvent and the like can be used.
- the amount is preferably 25 to 9,900 parts by weight, particularly preferably 100 to 1,900 parts by weight, based on 100 parts by weight of the hydrolyzable silane compound mixture.
- the catalyst used in the reaction step it is preferable to use inorganic acids such as hydrochloric acid, sulfuric acid, nitric acid and phosphoric acid, and organic acids such as acetic acid, oxalic acid and maleic acid.
- the amount of the catalyst used is preferably 0.01 to 10 parts by weight, particularly preferably 0.1 to 1 part by weight, based on 100 parts by weight of the hydrolyzable silane compound mixture.
- the organic solvent is an organic solvent that is usually used when hydrolyzing and condensing the hydrolyzable silane compound, specifically, methanol, ethanol, 1-propanol, 2-propanol, 1-butanol, 2- Alcohols such as butanol, isobutanol, 2-methyl-2-propanol, ethylene glycol, glycerin and propylene glycol; Ketones such as acetone, methyl isobutyl ketone and cyclohexanone; Cellsolves such as 2-methoxyethanol and 2-ethoxyethanol Carbitols such as 2- (2-methoxyethoxy) ethanol, 2- (2-ethoxyethoxy) ethanol, 2- (2-butoxyethoxy) ethanol; methyl acetate, ethyl acetate, propylene glycol monomethyl ether acetate, -Esters such as butyrolactone, butyl acetate and 3-methoxybutyl
- an organic solvent may be used individually by 1 type, or may use 2 or more types together.
- the amount of the organic solvent is preferably 25 to 9,900 parts by weight, particularly preferably 100 to 1,900 parts by weight, based on 100 parts by weight of the hydrolyzable silane compound mixture.
- the resulting partially hydrolyzed condensate is blended into the positive photosensitive resin composition together with the solvent used in the reaction step. Therefore, it is preferable to use a solvent that stabilizes the silanol group in the ink repellent agent (C) as the solvent used in the reaction step.
- a solvent that stabilizes the silanol group include compounds having a hydroxyl group and a relative dielectric constant ( ⁇ ) at 25 ° C. of 5 to 20, preferably 8 to 15.
- glycol monoalkyl ether acetate solvents having 2 to 8 carbon atoms examples include glycol monoalkyl ether acetate solvents having 2 to 8 carbon atoms, glycol monoalkyl ether solvents, glyme solvents, hydrocarbon alcohols having 2 to 4 carbon atoms, and the like.
- propylene glycol monomethyl ether acetate ⁇ : 8.3 as a glycol-based monoalkyl ether acetate solvent
- propylene glycol monomethyl ether ( ⁇ : 12.3) as a glycol-based monoalkyl ether solvent
- hydrogen alcohol examples include 2-propanol ( ⁇ : 19.92).
- Propylene glycol monomethyl ether is particularly preferred because of its high silanol group stabilizing effect.
- the reaction step is preferably carried out at a temperature from room temperature to the boiling point of the solvent under suitable stirring conditions.
- the reaction time may be about 0.5 to 24 hours, preferably 1 to 10 hours, depending on the amount of raw material components used, reaction temperature, stirring conditions and the like.
- the obtained ink repellent agent (C) can be added to the positive photosensitive resin composition of the present invention without removing the organic solvent. After removing the organic solvent by a usual method, the ink repellent agent (C) may be isolated and then added to the positive photosensitive resin composition.
- the content of the ink repellent agent (C) in the total solid content in the positive photosensitive resin composition of the present invention is preferably 0.01 to 10% by mass, more preferably 0.1 to 6% by mass, and 2 to 3% by mass is particularly preferred.
- the content of the ink repellent agent (C) is in the above range, the storage stability of the positive photosensitive resin composition is excellent, and the partition walls of the optical element formed using the positive photosensitive resin composition are Excellent ink repellency and has a smooth surface.
- the positive photosensitive resin composition of the present invention may contain a solvent (D).
- a solvent (D) By containing a solvent (D), the coating property to the board
- ink repellent agent (C) can be made to exist stably in this composition by containing a solvent (D).
- the solvent (D) is an alkali-soluble resin (A), a photosensitive agent (B), an ink repellent agent (C), which is contained as an essential component in the positive photosensitive resin composition, and a thermosetting agent (E) which is contained as an optional component.
- the thermosetting accelerator (F) and other additives are not particularly limited as long as they are uniformly dissolved or dispersed and do not have reactivity with each component contained in the positive photosensitive resin composition.
- the solvent (D) include alcohols such as ethanol, 1-propanol, 2-propanol, 1-butanol and ethylene glycol; ketones such as acetone, methyl isobutyl ketone and cyclohexanone; 2-methoxyethanol, 2- Cellsorbs such as ethoxyethanol and 2-butoxyethanol; carbitols such as 2- (2-methoxyethoxy) ethanol, 2- (2-ethoxyethoxy) ethanol and 2- (2-butoxyethoxy) ethanol; methyl acetate; Ethyl acetate, n-butyl acetate, ethyl lactate, n-butyl lactate, ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, ethylene glycol monobutyl ether acetate, die Lenglycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, diethylene glycol monobutyl ether acetate
- chain hydrocarbons such as n-butane and n-hexane
- cyclic saturated hydrocarbons such as cyclohexane
- aromatic hydrocarbons such as toluene, xylene and benzyl alcohol
- the content of the solvent (D) in the positive photosensitive resin composition of the present invention is preferably from 5 to 2,000 mass%, preferably from 100 to 100 mass%, based on 100 mass% of the total solid content of the positive photosensitive resin composition. 500 mass% is more preferable.
- thermosetting agent (E) The positive photosensitive resin composition of the present invention may contain a thermosetting agent (E) as an optional component that promotes thermosetting.
- the thermosetting agent (E) is preferably at least one selected from the group consisting of amino resins, epoxy compounds, oxazoline compounds, polyisocyanate compounds, and polycarbodiimide compounds.
- a compound obtained by hydroxymethylating a part or all of an amino group such as a melamine compound, a guanamine compound or a urea compound, or a part or all of the hydroxyl group of the hydroxymethylated compound is methanol, ethanol , A compound etherified with n-butyl alcohol, 2-methyl-1-propanol and the like, for example, hexamethoxymethylmelamine and the like.
- epoxy compound examples include bisphenol A type epoxy resin, bisphenol F type epoxy resin, phenol / novolak type epoxy resin, cresol / novolac type epoxy resin, trisphenol methane type epoxy resin, brominated epoxy resin and the like glycidyl ethers; Cycloaliphatic epoxy resins such as 4-epoxycyclohexylmethyl-3,4-epoxycyclohexanecarboxylate, bis (2,3-epoxycyclopentyl) ether; glycidyl such as diglycidyl hexahydrophthalate, diglycidyl tetrahydrophthalate, diglycidyl phthalate Esters; Tetraglycidyldiaminodiphenylmethane, glycidylamines such as triglycidylparaaminophenol; Heterocyclic forms such as triglycidyl isocyanurate Epoxy resin; and the like.
- Cycloaliphatic epoxy resins such as 4-
- oxazoline compound examples include 2-vinyl-2-oxazoline, 2-vinyl-4-methyl-2-oxazoline, 2-vinyl-5-methyl-2-oxazoline, 2-isopropenyl-2-oxazoline, 2-isopropenyl And copolymers of polymerizable monomers such as -4-methyl-2-oxazoline. These compounds may be used individually by 1 type, or may use 2 or more types together.
- thermosetting agent (E) a compound having two or more epoxy groups in one molecule is particularly preferable.
- the thermosetting agent (E) in the positive photosensitive resin composition, the positive photosensitive resin composition is more excellent in curability at the time of exposure and forms a stable partition after thermosetting. Can do.
- the content of the thermosetting agent (E) in the total solid content in the positive photosensitive resin composition of the present invention is preferably 5 to 20% by mass, particularly preferably 10 to 15% by mass. Within the above range, when a cured film having partition walls is formed using the positive photosensitive resin composition, the wettability of ink other than the partition wall surface (dots) is more excellent.
- thermosetting accelerator (F) The positive photosensitive resin composition of the present invention may contain a thermosetting accelerator (F) as an optional component that accelerates thermosetting.
- thermosetting accelerator (F) is a compound which has the effect
- the thermosetting accelerator (F) for example, a compound that itself reacts with the thermosetting agent (E) and crosslinks to form a crosslinked structure, or the thermosetting agent (E) does not crosslink itself. Examples thereof include compounds having a catalytic action.
- examples of the thermosetting accelerator (F) that forms a crosslinked structure include polyamines, polythiols, and polycarboxylic acid anhydrides.
- polyamines ethylenediamine, triethylenediamine, triethylenetetramine, tetraethylenepentamine, hexamethylenediamine, polyoxyalkylenepolyamine, isophoronediamine, mensendiamine, 3,9-bis (3-aminopropyl) ) -2,4,8,10-tetraoxaspiro (5,5) undecane.
- polythiols include polyether polythiol and polycarboxylic acid anhydrides such as hydrosuccinic acid, methyltetrahydrophthalic anhydride, hexahydrophthalic anhydride, 4-methylhexahydrophthalic anhydride, and the like.
- thermosetting accelerator (F) may use these 1 type independently, or may use 2 or more types together.
- thermosetting agent (E) is a compound having two or more epoxy groups in one molecule
- the thermosetting accelerator (F) is particularly 2-methylimidazole or 4-methyl-2-phenylimidazole. preferable.
- the content of the thermosetting accelerator (F) in the total solid content in the photosensitive resin composition of the present invention is preferably from 0.1 to 10% by mass, particularly preferably from 0.5 to 3% by mass.
- Colorant (G) When the positive photosensitive resin composition of the present invention is used for forming a black matrix that is a grid-like black portion surrounding the three color pixels R, G, and B of a color filter of a liquid crystal display element, (G) is preferably included.
- the colorant (G) include carbon black, aniline black, anthraquinone black pigment, and perylene black pigment. I. Pigment black 1, 6, 7, 12, 20, 31 etc. are mentioned.
- As the colorant (G) a mixture of organic pigments such as red pigments, blue pigments, green pigments, and inorganic pigments can also be used.
- the positive photosensitive resin composition of the present invention contains the colorant (G) and is used for black matrix formation or the like
- the content of the colorant (G) in the total solid content in the positive photosensitive resin composition Is preferably 15 to 65% by mass, particularly preferably 20 to 50% by mass.
- the positive photosensitive resin composition has excellent sensitivity, and the formed partition wall has excellent light shielding properties.
- the positive photosensitive resin composition of the present invention contains a dispersible material such as the colorant (G), in order to improve the dispersibility, a polymer dispersant, a dispersion aid, etc. It may contain. These can be contained in the positive photosensitive resin composition in such a content that does not impair the effects of the present invention.
- the positive photosensitive resin composition of the present invention may contain a silane coupling agent (H) as necessary.
- a silane coupling agent (H) By containing a silane coupling agent (H), the board
- the silane coupling agent (H) include tetraethoxysilane, 3-glycidoxypropyltrimethoxysilane, methyltrimethoxysilane, vinyltrimethoxysilane, 3-methacryloyloxypropyltrimethoxysilane, and 3-chloropropyltrimethoxysilane.
- 3-mercaptopropyltrimethoxysilane 3-aminopropyltriethoxysilane, heptadecafluorooctylethyltrimethoxysilane, polyoxyalkylene chain-containing triethoxysilane, and the like. These may be used alone or in combination of two or more.
- the content of the silane coupling agent (H) in the total solid content in the positive photosensitive resin composition of the present invention is preferably 0.1 to 20% by mass, particularly preferably 1 to 10% by mass.
- the substrate adhesion of the cured film formed from the positive photosensitive resin composition is more excellent, and when it is at most the upper limit of the above range, the ink repellency of the cured film is good. is there.
- the positive photosensitive resin composition of the present invention may contain fine particles (I) as necessary. By containing the fine particles (I), the thermal sag of the partition formed using the positive photosensitive resin composition can be prevented.
- the fine particles (I) are not particularly limited, and inorganic fine particles such as silica, zirconia, magnesium fluoride, tin-doped indium oxide (ITO) and antimony-doped tin oxide (ATO); polyethylene, polymethyl methacrylate (PMMA) and the like Organic fine particles are exemplified. From the viewpoint of heat resistance, inorganic fine particles are preferable, and from the viewpoint of availability and dispersion stability, silica or zirconia is particularly preferable. Further, when the positive photosensitive resin composition contains the colorant (G) and the polymer dispersant, the fine particles (I) are negatively charged in consideration of the adsorption ability of the polymer dispersant. It is preferable.
- the fine particles (I) do not absorb the light irradiated at the time of exposure, i-line (365 nm) which is the main emission wavelength of the ultra-high pressure mercury lamp, It is particularly preferable not to absorb h-line (405 nm) and g-line (436 nm).
- the average particle diameter of the fine particles (I) is preferably 1 ⁇ m or less, and particularly preferably 200 nm or less, from the viewpoint that the surface smoothness of the partition wall is improved. Among these, the average particle diameter is most preferably 5 to 100 nm.
- the content of the fine particles (I) in the total solid content in the positive photosensitive resin composition of the present invention is preferably 5 to 35% by mass, particularly preferably 10 to 30% by mass. When the content is not less than the lower limit of the above range, there is an effect of suppressing the decrease in ink repellency, and when it is not more than the upper limit of the above range, the storage stability of the positive photosensitive resin composition is excellent.
- a thickener In the positive photosensitive resin composition of the present invention, as other additives, a thickener, a plasticizer, an antifoaming agent, a leveling agent, and a repellency inhibitor are added as necessary, as long as the effects of the present invention are not impaired. And one or more selected from the group consisting of ultraviolet absorbers.
- Method for producing positive photosensitive resin composition As a method for producing a positive photosensitive resin composition, an alkali-soluble resin (A), a photosensitive agent (B), an ink repellent agent (C), if necessary, a solvent (D), a thermosetting agent (E), A method of mixing with the thermosetting accelerator (F), the colorant (G), the silane coupling agent (H), the fine particles (I), and other additives is preferable. The mixing is performed using a stirrer at a temperature of 20 ° C. to 25 ° C. and for a time of 3 hr to 6 hr, and the obtained composition is used as it is.
- the positive photosensitive resin composition of the present invention is used as a material such as photolithography in the same manner as an ordinary positive photosensitive resin composition, and the obtained cured film is an ordinary positive photosensitive resin composition. It can be used as a member of an optical element in which a cured film is used.
- the partition of this invention is a partition formed in order to provide a division on a board
- the positive photosensitive resin composition of the said this invention is apply
- the partition of the present invention is suitably used for an optical element.
- the positive photosensitive resin composition contains a colorant (G)
- the resulting partition can be applied as a black matrix.
- the partition of the present invention is applied to a partition for an optical element having, for example, a plurality of pixels and a partition located between adjacent pixels on a substrate.
- Examples of a method for producing a partition for an optical element using the positive photosensitive resin composition of the present invention include the following methods.
- the positive photosensitive resin composition of the present invention is applied onto a substrate to form a coating film (coating film forming process), and then the coating film is dried to form a film (prebaking process). Only the part which does not become a partition is exposed (exposure process), and then the exposed part of the coating film is removed to form a partition consisting of an unexposed part of the coating film (development process).
- the partition walls for the optical element of the present invention can be manufactured by further thermally curing the formed partition walls and the like as necessary (post-baking step).
- the material of the substrate is not particularly limited, but various glass plates; polyester (polyethylene terephthalate, etc.), polyolefin (polyethylene, polypropylene, etc.), polycarbonate, polymethyl methacrylate, polysulfone, polyimide, polymethacrylic resin, acrylic resin, etc.
- Thermoplastic plastic sheet; Cured sheet of thermosetting resin such as epoxy resin and unsaturated polyester; etc. can be used.
- a heat resistant plastic such as a glass plate or polyimide is preferable from the viewpoint of heat resistance.
- the shape of the substrate and the surface on which the partition walls are formed are not particularly limited and are appropriately selected depending on the application.
- the substrate When the substrate is plate-shaped, it may be a flat plate, or the entire surface or a part thereof may have a curvature.
- the thickness of the substrate can be appropriately selected depending on the use of the partition wall, but is generally preferably 0.5 to 10 mm.
- the surface on which the positive photosensitive resin composition is applied is previously cleaned by alcohol cleaning, ultraviolet / ozone cleaning, or the like.
- FIG. 1 is a cross-sectional view schematically showing a production example of an optical element partition using the positive photosensitive resin composition of the present invention.
- FIG. 1I is a view showing a cross section in a state where a coating film 2 made of the positive photosensitive resin composition of the present invention is formed on a substrate 1.
- FIG. 1 (II) schematically shows the exposure process.
- FIG. 1 (III) is a cross-sectional view showing the substrate 1 after the development process and the partition wall 6 formed on the substrate.
- the positive photosensitive resin composition of the present invention is applied onto a substrate 1 to form a coating film 2 made of the positive photosensitive resin composition.
- the coating method of the positive photosensitive resin composition is not particularly limited as long as a coating film having a uniform film thickness is formed.
- Spin coating, spraying, slit coating, roll coating, spin coating The method used for normal coating-film formation, such as a method and a bar coating method, is mentioned.
- the film thickness of the coating film 2 is determined in consideration of the height of the partition wall finally obtained.
- the film thickness of the coating film 2 is preferably 100 to 200%, particularly preferably 100 to 130% of the height of the partition wall finally obtained.
- the thickness of the coating film 2 is preferably from 0.3 to 325 ⁇ m, particularly preferably from 1.3 to 65 ⁇ m.
- Pre-baking process The coating film 2 formed on the substrate 1 in the coating film forming step is heated to obtain the film 2.
- the volatile components including the solvent contained in the positive photosensitive resin composition constituting the coating film are volatilized and removed, and a non-sticky film is obtained.
- the ink repellent agent (C) moves to the vicinity of the film surface.
- the coating film 2 together with the substrate 1 is heated at 50 to 120 ° C., preferably 70 to 110 ° C. for 10 to 2,000 seconds, preferably about 30 to 180 seconds by a heating device such as a hot plate or oven. The method of heat-processing is mentioned.
- a drying process such as vacuum drying other than heating (drying) may be separately provided before the pre-baking process. Further, in order to efficiently dry the coating film without causing unevenness in the appearance of the coating film, it is more preferable to use heating combined with drying by the pre-baking step and vacuum drying in combination.
- the conditions for vacuum drying vary depending on the type of each component, the blending ratio, and the like, but can be performed at 500 to 10 Pa in a wide range of about 10 to 300 seconds.
- the film 2 is irradiated with light 5 through a mask 4 having a predetermined pattern. Only the predetermined pattern portion cut by the mask 4 transmits the light 5 and reaches the film 2 on the substrate 1. Since only the exposed portion is alkali-solubilized, the predetermined pattern is provided in a shape that matches the shape of the partition.
- the average width of the partition walls after the post-baking step is preferably 100 ⁇ m or less, and particularly preferably 20 ⁇ m or less. Moreover, it is preferable that the average of the distance between adjacent partition walls will be 300 micrometers or less, and 100 micrometers or less are especially preferable.
- the mask 4 it is preferable to use a mask in which a pattern is formed so as to be in this range.
- the exposed portion of the film irradiated with light becomes a solubilized portion of the positive photosensitive resin composition, while the unexposed portion 3 is the film 2 itself of the positive photosensitive resin composition. It is a state.
- the irradiation light 5 is visible light; ultraviolet light; far ultraviolet light; excimer laser such as KrF excimer laser, ArF excimer laser, F 2 excimer laser, Kr 2 excimer laser, KrAr excimer laser, Ar 2 excimer laser; X-ray; Examples include lines.
- the irradiation light 5 is preferably an electromagnetic wave having a wavelength of 100 to 600 nm, more preferably a light ray having a distribution in the range of 300 to 500 nm, particularly i-line (365 nm), h-line (405 nm) and g-line (436 nm). preferable.
- Exposure is preferably 5 ⁇ 1,000mJ / cm 2, particularly preferably 50 ⁇ 400mJ / cm 2.
- the exposure time depends on the exposure amount, the composition of the photosensitive composition, the thickness of the coating film, etc., but is preferably 1 to 60 seconds, and particularly preferably 5 to 20 seconds.
- an alkaline aqueous solution containing alkalis such as inorganic alkalis, amines, alcohol amines, and quaternary ammonium salts, preferably an alkaline aqueous solution containing alkalis such as tetramethylammonium hydroxide is used.
- alkalis such as inorganic alkalis, amines, alcohol amines, and quaternary ammonium salts
- an alkaline aqueous solution containing alkalis such as tetramethylammonium hydroxide
- an organic solvent such as a surfactant or alcohol can be added to the developer in order to improve solubility and remove residues.
- the development time (time for contact with the developer) is preferably 5 to 180 seconds, and more preferably 10 to 60 seconds.
- Examples of the developing method include a liquid piling method, a dipping method, and a shower method.
- water on the substrate 1 and the partition wall 6 can be removed by performing high-pressure water washing or running water washing and air-drying with compressed air or compressed nitrogen.
- the partition 6 on the substrate 1 is heated.
- the heating method include a method in which the partition wall 6 together with the substrate 1 is heated at 150 to 250 ° C. for 5 to 90 minutes by a heating device such as a hot plate or an oven.
- a heating device such as a hot plate or an oven.
- the heating temperature is particularly preferably 180 ° C. or higher. If the heating temperature is too low, the partition wall 6 is not sufficiently cured and sufficient chemical resistance cannot be obtained.
- the partition wall 6 When ink is injected into the dots 7 in an ink injection process described later, the partition wall 6 may swell or the ink may ooze depending on the solvent contained in the ink. On the other hand, if the heating temperature is too high, thermal decomposition of the partition wall 6 may occur.
- the average width of the partition walls to be formed is preferably 100 ⁇ m or less, particularly preferably 20 ⁇ m or less. Of these, 5 to 20 ⁇ m is most preferable.
- the average distance between adjacent barrier ribs is preferably 300 ⁇ m or less, and particularly preferably 100 ⁇ m or less. Of these, 30 to 80 ⁇ m is most preferable.
- the average height of the partition walls is preferably 0.05 to 50 ⁇ m, particularly preferably 0.2 to 10 ⁇ m.
- the exposed substrate surface in the region surrounded by the substrate and the partition wall is subjected to an ink affinity treatment (ink affinity treatment). Processing step), and then the ink is injected into the region by an ink jet method to form the pixel (ink injection step).
- ink affinity treatment ink affinity treatment
- Examples of the lyophilic process include a cleaning process using an alkaline aqueous solution, an ultraviolet cleaning process, an ultraviolet / ozone cleaning process, an excimer cleaning process, a corona discharge process, and an oxygen plasma process.
- the cleaning process with an alkaline aqueous solution is a wet process in which the substrate surface is cleaned with an alkaline aqueous solution (potassium hydroxide, tetramethyl ammonium hydroxide aqueous solution, or the like).
- the ultraviolet cleaning process is a dry process for cleaning the substrate surface using ultraviolet rays.
- the ultraviolet / ozone cleaning process is a dry process that cleans the substrate surface using a low-pressure mercury lamp that emits light of 185 nm and 254 nm.
- the excimer cleaning process is a dry process that cleans the substrate surface using a xenon excimer lamp that emits light of 172 nm.
- the corona discharge treatment is a dry treatment that uses a high-frequency high voltage to generate corona discharge in the air and cleans the substrate surface.
- the oxygen plasma treatment is a dry treatment in which the surface of the substrate is cleaned using a highly reactive “plasma state” in which oxygen is excited by using a high frequency power source or the like as a trigger in vacuum.
- a dry treatment method such as an ultraviolet / ozone cleaning treatment is preferable because it is simple.
- UV / ozone can be generated using commercially available equipment.
- the ink-repellent treatment is performed by installing a substrate with partition walls inside the ultraviolet / ozone device and performing treatment in air and at room temperature for about 1 to 10 minutes within a range that does not impair the oil repellency of the partition walls. Can do.
- what is necessary is just to adjust processing time so that it may become the range which does not impair the ink repellency of a partition according to each ultraviolet-ray / ozone apparatus.
- the partition formed using the positive photosensitive resin composition of the present invention it is possible to make the ink affinity by the ultraviolet cleaning treatment or the like without reducing the ink repellency of the partition. is there.
- the ink repellency (water / oil repellency) of the cured film formed from the positive photosensitive resin composition is water and PGMEA (propylene glycol monomethyl ether acetate: an organic solvent often used as a solvent for the ink. )
- the contact angle can be estimated.
- the partition walls are required to have sufficient ink repellency even after the above-mentioned ink-philic treatment. It is done.
- the water contact angle of the partition walls is preferably 90 ° or more, and particularly preferably 95 ° or more.
- the contact angle of PGMEA of the partition wall is preferably 30 degrees or more, and particularly preferably 35 degrees or more.
- the dots are required to be ink-philic, and contact with water.
- the angle is preferably 20 degrees or less, particularly preferably 10 degrees or less.
- This step can be performed in the same manner as a normal method using an ink jet apparatus generally used in the ink jet method.
- the ink jet device used for forming such pixels is not particularly limited, but a method in which charged ink is continuously ejected and controlled by a magnetic field, and ink is ejected intermittently using a piezoelectric element.
- An ink jet apparatus using various methods such as a method, a method of heating ink, and a method of intermittently ejecting the ink using the bubbling can be used.
- optical elements produced using the positive photosensitive resin composition of the present invention include color filters, organic EL elements, and organic TFT arrays.
- the shape of the pixel to be formed can be any known arrangement such as a stripe type, a mosaic type, a triangle type, or a four-pixel arrangement type.
- the ink used for forming the pixel mainly includes a coloring component, a binder resin component, and a solvent.
- a coloring component it is preferable to use pigments and dyes excellent in heat resistance, light resistance and the like.
- the binder resin component a resin that is transparent and excellent in heat resistance is preferable, and examples thereof include an acrylic resin, a melamine resin, and a urethane resin.
- the water-based ink contains water and optionally a water-soluble organic solvent as a solvent, contains a water-soluble resin or a water-dispersible resin as a binder resin component, and contains various auxiliary agents as necessary.
- the oil-based ink contains an organic solvent as a solvent, a resin soluble in an organic solvent as a binder resin component, and various auxiliary agents as necessary. After the ink is injected by the ink jet method, it is preferable to perform drying, heat curing, and / or ultraviolet curing as necessary.
- a protective film layer is formed using an overcoat coating solution as necessary.
- the protective film layer is preferably formed for the purpose of increasing the surface flatness and for blocking the eluate from the ink in the partition walls and the pixel portion from reaching the liquid crystal layer.
- a transparent electrode such as tin-doped indium oxide (ITO) is formed on a transparent substrate such as glass by a sputtering method or the like.
- the transparent electrode is etched into a desired pattern.
- a partition is formed using the positive photosensitive resin composition of the present invention, the ink is made into an ink, and then a hole transport material and a light emitting material solution are sequentially applied to the dots using an inkjet method. And dried to form a hole transport layer and a light emitting layer.
- the pixel of an organic EL element is obtained by forming electrodes, such as aluminum, by a vapor deposition method etc.
- An organic TFT array can be manufactured through the following steps (1) to (3).
- a partition wall is formed on a transparent substrate such as glass using the positive photosensitive resin composition of the present invention.
- a solution of a gate electrode material is applied to the dots using an inkjet method to form a gate electrode.
- a gate insulating film is formed thereon.
- a partition is formed on the gate insulating film using the positive photosensitive resin composition of the present invention, and after the dot is made to be an ink-inking solution, a solution of the source / drain electrode material is formed on the dot using an inkjet method.
- the partition using the positive photosensitive resin composition of the present invention may be formed and used in only one step, or in two or more steps. A partition using the positive photosensitive resin composition of the present invention may be formed and used.
- Examples 1 to 4 are examples, and example 5 is a comparative example.
- Photosensitive agent (B) 4NT-250 (trade name; 4NT-250, manufactured by Toyo Gosei Co., Ltd. (2,3,4,4′-tetrahydroxybenzophenone and 6-diazo-5,6-dihydro-5-oxo-naphthalene-1-sulfonic acid) (Mono-tetra) esters)).
- C6FMA: CH 2 C (CH 3) COOCH 2 CH 2 (CF 2) 6 F.
- MEK methyl ethyl ketone.
- MAA methacrylic acid.
- GMA glycidyl methacrylate.
- MMA methyl methacrylate.
- V-65 (trade name, manufactured by Wako Chemical Industries, Ltd. (2,2′-azobis (2.4dimethylvaleronitrile) (polymerization initiator)).
- PGMEA Propylene glycol monomethyl ether acetate.
- PGME Propylene glycol monomethyl ether (manufactured by Toho Chemical Co., Ltd.).
- Thermosetting agent (E) TEP-G (trade name; TEP-G, manufactured by Asahi Organic Materials Co., Ltd., epoxy resin).
- Table 1 shows the fluorine-containing content (mass% of fluorine atoms) and number average molecular weight (Mn) of (CA5).
- Table 1 shows the charged amount compositions (mol%) of the ink repellent agents (CA1) to (CA5).
- Example 1 Manufacture of positive photosensitive resin composition 1
- 1 g of (CA1-1) solution solid content is 0.1 g, the rest is PGME (solvent)
- 15.6 g of EP4020G, 5.4 g of 4NT-250, 3.1 g of TEP-G, 2-MI 0.8 g and 74.1 g of PGMEA were put in a 500 cm 3 stirring container and stirred for 30 minutes to prepare a positive photosensitive resin composition 1.
- UV / ozone cleaning A 10 cm square glass substrate was ultrasonically cleaned with ethanol for 30 seconds, and then subjected to ultraviolet / ozone cleaning for 5 minutes.
- UV / ozone cleaning PL7-200 (manufactured by Sen Engineering) was used as an UV / ozone generator.
- this apparatus was used as an ultraviolet / ozone generator for all the following ultraviolet / ozone treatments.
- the positive photosensitive resin composition 1 was applied to the cleaned glass substrate surface using a spinner and then dried on a hot plate at 100 ° C. for 2 minutes to form a film having a thickness of 1.3 ⁇ m.
- a gap of 50 ⁇ m is opened from the film side through a photomask having a hole pattern (2.5 cm ⁇ 5 cm) (a photomask in which light is irradiated to the area of the pattern portion), Ultraviolet light from a high-pressure mercury lamp was irradiated at 25 mW / cm 2 for 10 seconds.
- the exposed glass substrate was developed by immersing in a 2.38 mass% tetramethylammonium hydroxide aqueous solution for 40 seconds, and the exposed film was washed with water and dried. Next, this was heated on a hot plate at 230 ° C. for 20 minutes to obtain a glass substrate 1 in which a cured film of the positive photosensitive resin composition 1 was formed in a region excluding the hole pattern portion.
- the contact angle of water is 30 degrees or more. Thereafter, the entire surface of the glass substrate 1 on which the cured film was formed was irradiated with ultraviolet rays / ozone for 1 minute. The contact angle with PGMEA on the surface of the cured film after irradiation for 1 minute and the contact angle with water on the surface of the glass substrate were measured. The measurement method is as described above. The evaluation results are shown in Table 2.
- ⁇ Storage stability> The positive photosensitive composition was stored in a glass screw bottle at 23 ° C. (room temperature) for one month. After storage for one month, a positive photosensitive composition was applied to the surface of a 10 cm ⁇ 10 cm glass substrate washed in the same manner as in Example 1 using a spinner to form a coating film. Subsequently, it was dried on a hot plate at 100 ° C. for 2 minutes to form a film having a thickness of 1 ⁇ m. The appearance of the film was visually observed and evaluated as follows. ⁇ (good): The number of foreign matters on the film is 5 or less. X (defect): There were 6 or more foreign matters on the film, and radial streaks were observed from the center of the glass substrate.
- Examples 2 to 5 In the same manner as in Example 1 except that the (CA2-1) to (CA5-1) liquids shown in the table were used instead of the (CA1-1) liquid, positive type photosensitive resin compositions 2 to 5 and positive type were used. Glass substrates 2 to 5 on which cured films of the photosensitive resin compositions 2 to 5 were formed were prepared and evaluated in the same manner as in Example 1. The results are summarized in Table 2. The compositions of the compositions obtained in Examples 1 to 5 are also shown in Table 2.
- the positive photosensitive resin compositions obtained in Examples 1 to 4 are excellent in storage stability. By using the composition, it is possible to obtain a partition wall having no development residue.
- the cured films obtained in Examples 1 to 4 were excellent in ink repellency because of using the ink repellent agent of the present invention, excellent in ink repellency even after UV / ozone irradiation, and excellent in dot (glass substrate surface). It can be seen that it has ink affinity.
- the cured film obtained in Example 5 using an ink repellent agent not according to the present invention had insufficient ink repellency after ultraviolet / ozone irradiation.
- the positive photosensitive resin composition of the present invention is excellent in ink repellency, has excellent ink repellency even after being irradiated with ultraviolet rays / ozone, and can produce a partition wall with little residue in dots. It can be suitably used for the formation of partition walls in the production of color filters using the recording technique, the production of organic EL elements, and the production of organic TFT arrays, and is particularly suitable for the formation of partition walls on large-area substrates.
Abstract
Description
例えば、カラーフィルタの製造においては、隔壁をフォトリソグラフィにより形成した後に、隔壁で囲まれた開口部(ドット)にR(レッド)、G(グリーン)、及びB(ブルー)のインクをインクジェット法により噴射し、塗布して、画素を形成する。 In recent years, a cost reduction process using an inkjet method has been proposed as a method for manufacturing a pixel portion of a color filter or an organic EL element.
For example, in the manufacture of a color filter, after the partition walls are formed by photolithography, R (red), G (green), and B (blue) inks are applied to the openings (dots) surrounded by the partition walls by an inkjet method. Spray and apply to form pixels.
ポジ型感光性樹脂は、現像後の残渣(以下、「現像残渣」ともいう。)が少ない点で、ネガ型感光性樹脂より優れ、好ましく用いられることがある。例えば特許文献1には、表面自由エネルギーが小さい撥インク剤を含むポジ型感光性樹脂組成物を用いて、隔壁表面に撥インク性を付与する技術が記載されている。 In order to make the surface of the partition wall ink repellent, a technique for adding an ink repellent agent to the photosensitive resin composition used for forming the partition wall has been developed.
The positive photosensitive resin is superior to the negative photosensitive resin in that it has less residue after development (hereinafter also referred to as “development residue”) and may be preferably used. For example,
また、本発明は、撥インク性に優れ、紫外線/オゾン照射処理を経ても撥インク性に優れる隔壁を有する光学素子の提供を目的とする。 The present invention has been made in view of the above circumstances, and can form a partition wall that is excellent in ink repellency, excellent in ink repellency even after being subjected to ultraviolet / ozone irradiation treatment, and having little residue on dots. An object of the present invention is to provide a positive photosensitive resin composition having excellent storage stability.
Another object of the present invention is to provide an optical element having a partition wall that is excellent in ink repellency and excellent in ink repellency even after being subjected to ultraviolet / ozone irradiation treatment.
[1]アルカリ可溶性樹脂(A)、感光剤(B)及び撥インク剤(C)を含むポジ型感光性樹脂組成物であって、
前記撥インク剤(C)が下式(c-1)で表される加水分解性シラン化合物と、下式(c-2)で表される加水分解性シラン化合物とを含む混合物の部分加水分解縮合物からなり、前記撥インク剤(C)におけるフッ素原子含有率が10~55質量%であるポジ型感光性樹脂組成物。
(式(c-1)及び(c-2)中の記号は、以下の通りである。
Rf:炭素原子数1~6のペルフルオロアルキル基、又はRf1ORf2-で表される炭素原子数2~40の1価の基(Rf1は、炭素原子数1~6のペルフルオロアルキル基であり、Rf2は炭素-炭素原子間にエーテル性酸素原子を有してもよいペルフルオロアルキレン基である。)、
Q1:炭素原子数1~10のフッ素原子を含まない2価の有機基、
RH1:炭素原子数1~6の炭化水素基、
X1、及びX2:加水分解性基、
p:0、1又は2。
ただし、式(c-1)中の3個のX1、式(c-2)中の(4-p)個のX2、及びp個のRH1は、それぞれ互いに異なっていても同一であってもよい。) The present invention provides a positive photosensitive resin composition, partition walls, and optical elements having the following configurations [1] to [15].
[1] A positive photosensitive resin composition comprising an alkali-soluble resin (A), a photosensitive agent (B) and an ink repellent agent (C),
Partial hydrolysis of a mixture in which the ink repellent agent (C) includes a hydrolyzable silane compound represented by the following formula (c-1) and a hydrolyzable silane compound represented by the following formula (c-2) A positive photosensitive resin composition comprising a condensate and having a fluorine atom content of 10 to 55 mass% in the ink repellent agent (C).
(The symbols in formulas (c-1) and (c-2) are as follows.
R f : a perfluoroalkyl group having 1 to 6 carbon atoms, or a monovalent group having 2 to 40 carbon atoms represented by R f1 OR f2 — (R f1 is a perfluoroalkyl group having 1 to 6 carbon atoms) And R f2 is a perfluoroalkylene group which may have an etheric oxygen atom between carbon-carbon atoms).
Q 1 : a divalent organic group not containing a fluorine atom having 1 to 10 carbon atoms,
R H1 : a hydrocarbon group having 1 to 6 carbon atoms,
X 1 and X 2 : hydrolyzable groups,
p: 0, 1 or 2.
However, three X 1 s in the formula (c-1), (4-p) X 2 s in the formula (c-2), and p RH 1 s may be the same or different from each other. There may be. )
[3]ポジ型感光性樹脂組成物における全固形分中の前記感光剤(B)の含有量が、0.1~50質量%である上記[1]又は[2]に記載のポジ型感光性樹脂組成物。
[4]ポジ型感光性樹脂組成物における全固形分中の前記撥インク剤(C)の含有量が、0.01~10質量%である上記[1]~[3]のいずれかに記載のポジ型感光性樹脂組成物。
[5]前記撥インク剤(C)の数平均分子量(Mn)が、500以上1,000,000未満である上記[1]~[4]のいずれかに記載のポジ型感光性樹脂組成物。 [2] The positive photosensitive resin composition according to the above [1], wherein the content of the alkali-soluble resin (A) in the total solid content in the positive photosensitive resin composition is 10 to 90% by mass.
[3] The positive photosensitive resin as described in [1] or [2] above, wherein the content of the photosensitive agent (B) in the total solid content in the positive photosensitive resin composition is 0.1 to 50% by mass. Resin composition.
[4] The above-mentioned [1] to [3], wherein the content of the ink repellent agent (C) in the total solid content in the positive photosensitive resin composition is 0.01 to 10% by mass. A positive photosensitive resin composition.
[5] The positive photosensitive resin composition according to any one of [1] to [4], wherein the ink repellent agent (C) has a number average molecular weight (Mn) of 500 or more and less than 1,000,000. .
[7]前記感光剤(B)がキノンジアジド基を有する化合物である、上記[1]~[6]のいずれかに記載のポジ型感光性樹脂組成物。 [6] The positive photosensitive resin composition according to any one of the above [1] to [5], wherein the alkali-soluble resin (A) is a novolak type phenol resin.
[7] The positive photosensitive resin composition according to any one of [1] to [6] above, wherein the photosensitive agent (B) is a compound having a quinonediazide group.
(式(c-3)中の記号は、以下の通りである。
Y:水素原子が、ハロゲン原子、炭素原子数1~3のアルキル基、炭素原子数2~3のアルケニル基又はニトロ基で置換されていてもよいフェニル基、
Q2:単結合又は2価の有機基、
RH2:炭素原子数1~6の炭化水素基、
X3:加水分解性基、
q:1又は2、
r:0又は1であり、q+rが1又は2となる数。
ただし、q個のY、Q2、及びY-Q2、並びに(4-q-r)個のX3は、それぞれ互いに異なっていても同一であってもよい。) [8] The positive photosensitive resin composition according to any one of [1] to [7], wherein the mixture further contains a hydrolyzable silane compound represented by the following formula (c-3).
(The symbols in formula (c-3) are as follows.
Y: a hydrogen atom, a phenyl group optionally substituted by a halogen atom, an alkyl group having 1 to 3 carbon atoms, an alkenyl group having 2 to 3 carbon atoms, or a nitro group,
Q 2 : single bond or divalent organic group,
R H2 : a hydrocarbon group having 1 to 6 carbon atoms,
X 3 : hydrolyzable group,
q: 1 or 2,
r: a number that is 0 or 1 and q + r is 1 or 2.
However, q pieces of Y, Q 2, and Y-Q 2, and (4-q-r) pieces of X 3 may each be the same or different from each other. )
[10]熱硬化剤(E)をさらに含む、上記[1]~[9]のいずれかに記載のポジ型感光性樹脂組成物。
[11]熱硬化促進剤(F)をさらに含む、上記[10]に記載のポジ型感光性樹脂組成物。
[12]着色剤(G)をさらに含む、上記[1]~[11]のいずれかに記載のポジ型感光性樹脂組成物。 [9] The positive photosensitive resin composition according to any one of [1] to [8], further including a solvent (D).
[10] The positive photosensitive resin composition according to any one of [1] to [9], further including a thermosetting agent (E).
[11] The positive photosensitive resin composition according to [10], further including a thermosetting accelerator (F).
[12] The positive photosensitive resin composition according to any one of [1] to [11], further including a colorant (G).
[14]基板表面に複数の画素と隣接する画素間に位置する隔壁とを有する光学素子であって、前記隔壁が上記[13]に記載の隔壁で形成されている光学素子。
[15]前記光学素子がカラーフィルタ、TFT(Thin Film Transistor)アレイ又は有機EL素子である上記[14]に記載の光学素子。 [13] A partition formed in a shape that partitions the substrate surface into a plurality of compartments for pixel formation, the cured film of the positive photosensitive resin composition according to any one of [1] to [12] above Partition wall.
[14] An optical element having a plurality of pixels and a partition located between adjacent pixels on the surface of the substrate, wherein the partition is formed by the partition described in [13].
[15] The optical element according to the above [14], wherein the optical element is a color filter, a TFT (Thin Film Transistor) array, or an organic EL element.
本発明の光学素子は、撥インク性に優れ、紫外線/オゾン照射処理を経ても撥インク性に優れる隔壁を有することにより、白抜け現象等の発生が抑制され、外観が良好である。 The positive photosensitive resin composition of the present invention is excellent in ink repellency, can form a partition wall excellent in ink repellency even after being subjected to ultraviolet / ozone irradiation treatment, and is excellent in storage stability.
The optical element of the present invention is excellent in ink repellency, and has a partition wall that is excellent in ink repellency even after being subjected to ultraviolet / ozone irradiation treatment.
本明細書における「全固形分」とは、ポジ型感光性樹脂組成物が含有する成分のうち、隔壁形成成分であり、溶媒(D)等の隔壁形成過程における、加熱等により揮発する揮発性成分以外の全成分を示す。ポジ型感光性樹脂組成物を140℃で24時間加熱して溶媒を除去した、残存物として測定される。また、全固形分は各成分の仕込み量からも計算できる。
本明細書においては、ポジ型感光性樹脂組成物を塗布した膜を「塗膜」、それを乾燥させた状態を「膜」、さらに、それを硬化させて得られる膜を「硬化膜」という。 In the present specification, the compound represented by the formula (c-1) is referred to as “compound (c-1)”. The same applies to other compounds.
The “total solid content” in this specification is a partition-forming component among the components contained in the positive photosensitive resin composition, and is a volatile material that volatilizes by heating or the like in the partition-forming process such as the solvent (D). All components other than components are shown. It is measured as a residue obtained by heating the positive photosensitive resin composition at 140 ° C. for 24 hours to remove the solvent. The total solid content can also be calculated from the amount of each component charged.
In the present specification, a film coated with a positive photosensitive resin composition is referred to as a “coating film”, a dried state is referred to as a “film”, and a film obtained by curing the film is referred to as a “cured film”. .
本明細書における「インク」とは、乾燥硬化した後に、例えば光学的、電気的に機能を有する液体を総称するものであり、従来から用いられている着色材料に限定されるものではない。また、上記インクを注入して形成される「画素」についても同様に、隔壁で仕切られた、光学的、電気的な機能を有する区分を表すものとして用いられる。
本明細書における「撥インク性」とは、上記インクをはじくために、撥水性と撥油性の両方を適度に有する性質をいい、例えば、後述の方法で評価できる。
以下、本発明の実施の形態を説明する。なお、本明細書において特に説明のない場合、%は質量%を表す。 In this specification, the “surface” of the partition wall is used as a term indicating only the upper surface of the partition wall. Therefore, the “surface” of the partition does not include the side surface of the partition.
The “ink” in the present specification is a general term for, for example, liquids having optically and electrically functions after being dried and cured, and is not limited to conventionally used coloring materials. Similarly, “pixels” formed by injecting the ink are also used to indicate sections having optical and electrical functions, which are partitioned by partition walls.
“Ink repellency” in the present specification refers to a property having moderately both water repellency and oil repellency in order to repel the ink, and can be evaluated by, for example, a method described later.
Embodiments of the present invention will be described below. In addition, unless otherwise indicated in this specification,% represents the mass%.
本発明のポジ型感光性樹脂組成物におけるアルカリ可溶性樹脂(A)としては、ポジ型感光性樹脂組成物に用いる公知のアルカリ可溶性樹脂が用いられる。
アルカリ可溶性樹脂(A)は、後述の感光剤(B)と共に用いることで、ポジ型感光性樹脂組成物として機能する。すなわち、ポジ型感光性樹脂組成物においては、フォトリソグラフィ等の露光に際して、露光部では感光剤(B)が活性化し、現像液に対する溶解性を増大させる。該露光部は、現像時に現像液(通常はアルカリ現像液)に溶解して除去される。光照射がされない部分(未露光部分)は隔壁となる。なお、アルカリ可溶性樹脂(A)は、露光前に感光剤(B)と組み合わせることにより、現像液に対して不溶化する樹脂もある。 [Alkali-soluble resin (A)]
As alkali-soluble resin (A) in the positive photosensitive resin composition of this invention, well-known alkali-soluble resin used for positive photosensitive resin composition is used.
The alkali-soluble resin (A) functions as a positive photosensitive resin composition by being used together with a photosensitizer (B) described later. That is, in the positive photosensitive resin composition, upon exposure such as photolithography, the photosensitive agent (B) is activated in the exposed portion, and the solubility in the developer is increased. The exposed portion is removed by dissolving in a developer (usually an alkali developer) during development. A portion that is not irradiated with light (an unexposed portion) serves as a partition wall. The alkali-soluble resin (A) may be insolubilized in the developer by combining with the photosensitizer (B) before exposure.
本発明のポジ型感光性樹脂組成物におけるアルカリ可溶性樹脂(A)としては、ノボラック型フェノール樹脂が好ましい。 Examples of the alkali-soluble resin (A) include phenols and aldehydes, unmodified or modified novolak type phenol resins, polyhydroxystyrene, polyhalogen produced by polycondensation by adding various modifiers as necessary. Hydroxystyrene, N- (4-hydroxyphenyl) methacrylamide copolymer, and hydroquinone monomethacrylate copolymer. In addition, various alkali-soluble polymer compounds such as sulfonylimide polymers, carboxyl group-containing polymers, acrylic resins containing phenolic hydroxyl groups, acrylic resins having sulfonamide groups, urethane resins, etc. may be used. it can.
As the alkali-soluble resin (A) in the positive photosensitive resin composition of the present invention, a novolac type phenol resin is preferable.
なお、本明細書において質量平均分子量(Mw)とは、ゲルパーミエーションクロマトグラフィ(GPC)によりテトラヒドロフランを移動相として測定される、標準ポリスチレンを基準として換算した質量平均分子量を意味する。また、数平均分子量(Mn)とは、同様のGPCで測定した数平均分子量を意味する。 The mass average molecular weight (Mw) of the alkali-soluble resin (A) is preferably 0.5 × 10 3 to 20 × 10 3 , particularly preferably 2 × 10 3 to 15 × 10 3 . When the mass average molecular weight (Mw) is in the above range, the solubility in a developer after exposure is excellent.
In addition, in this specification, a mass average molecular weight (Mw) means the mass average molecular weight converted on the basis of standard polystyrene, which is measured by gel permeation chromatography (GPC) using tetrahydrofuran as a mobile phase. The number average molecular weight (Mn) means the number average molecular weight measured by the same GPC.
ポジ型感光性樹脂組成物における全固形分中のアルカリ可溶性樹脂(A)の含有量は、10~90質量%が好ましく、30~80質量%が特に好ましい。含有量が上記範囲であると、ポジ型感光性樹脂組成物の現像性が良好になる。 The alkali-soluble resin (A) in the positive photosensitive resin composition of the present invention may be used alone or in combination of two or more.
The content of the alkali-soluble resin (A) in the total solid content in the positive photosensitive resin composition is preferably 10 to 90% by mass, particularly preferably 30 to 80% by mass. When the content is in the above range, the developability of the positive photosensitive resin composition is improved.
本発明のポジ型感光性樹脂組成物における感光剤(B)としては、ポジ型感光性樹脂組成物に用いる公知の感光剤が用いられる。
感光剤(B)としては、キノンジアジド基を有する化合物が好ましい。キノンジアジド基を有する化合物としては、ノボラック型フェノール樹脂と組み合わせて用いられる、公知のキノンジアジド基を有する化合物が用いられる。 [Photosensitive agent (B)]
As the photosensitive agent (B) in the positive photosensitive resin composition of the present invention, a known photosensitive agent used for the positive photosensitive resin composition is used.
As the photosensitive agent (B), a compound having a quinonediazide group is preferable. As the compound having a quinonediazide group, a known compound having a quinonediazide group used in combination with a novolak type phenol resin is used.
化合物βとしては、得られる隔壁が耐熱性に優れる点で、芳香環を有する化合物が好ましい。該芳香族化合物における芳香環の数は、耐熱性及び水酸基を多く導入できる点で、1~6個が好ましく、2~4個が特に好ましい。
化合物βとしては、芳香環に結合する水素原子の少なくとも1個が水酸基に置換された芳香族化合物が特に好ましい。1分子中の水酸基の数は、1~10個が好ましく、2~4個が特に好ましい。 The compound β has a functional group that can undergo a condensation reaction with the compound α. Examples of the functional group capable of the condensation reaction include a hydroxyl group and an amino group, and a hydroxyl group is preferred.
As the compound β, a compound having an aromatic ring is preferable in that the obtained partition wall is excellent in heat resistance. The number of aromatic rings in the aromatic compound is preferably 1 to 6 and particularly preferably 2 to 4 in terms of heat resistance and the ability to introduce a large number of hydroxyl groups.
As the compound β, an aromatic compound in which at least one hydrogen atom bonded to the aromatic ring is substituted with a hydroxyl group is particularly preferable. The number of hydroxyl groups in one molecule is preferably 1 to 10 and particularly preferably 2 to 4.
フェノール、4‐メチルフェノール等のフェノール類;
2,3,4-トリヒドロキシベンゾフェノン、2,3,4,4′-テトラヒドロキシベンゾフェノン等のポリヒドロキシベンゾフェノン類;
トリス(4-ヒドロシキフェニル)メタン、1,1,1-トリス(4-ヒドロキシフェニル)エタン、1,1-ビス(4-ヒドロキシフェニル)-1-[α,α-ジメチル-α-(4′-ヒドロキシフェニル)ベンジル]エタン、ビス(4-ヒドロキシ-3-メチルフェニル)-2-ヒドロキシフェニルメタン、ビス(4-ヒドロキシ-2,3,5-トリメチルフェニル)-2-ヒドロキシフェニルメタン、ビス(4-ヒドロキシ-3,5-ジメチルフェニル)-4-ヒドロキシフェニルメタン、ビス(4-ヒドロキシ-3,5-ジメチルフェニル)-3-ヒドロキシフェニルメタン、ビス(4-ヒドロキシ-3,5-ジメチルフェニル)-2-ヒドロキシフェニルメタン、ビス(4-ヒドロキシ-2,5-ジメチルフェニル)-4-ヒドロキシフェニルメタン、ビス(4-ヒドロキシ-2,5-ジメチルフェニル)-3-ヒドロキシフェニルメタン、ビス(4-ヒドロキシ-2,5-ジメチルフェニル)-2-ヒドロキシフェニルメタン、ビス(4-ヒドロキシ-3,5-ジメチルフェニル)-3,4-ジヒドロキシフェニルメタン、ビス(4-ヒドロキシ-2,5-ジメチルフェニル)-3,4-ジヒドロキシフェニルメタン、ビス(4-ヒドロキシ-2,5-ジメチルフェニル)-2,4-ジヒドロキシフェニルメタン、ビス(4-ヒドロキシフェニル)-3-メトキシ-4-ヒドロキシフェニルメタン、ビス(5-シクロヘキシル-4-ヒドロキシ-2-メチルフェニル)-4-ヒドロキシフェニルメタン、ビス(5-シクロヘキシル-4-ヒドロキシ-2-メチルフェニル)-3-ヒドロキシフェニルメタン、ビス(5-シクロヘキシル-4-ヒドロキシ-2-メチルフェニル)-2-ヒドロキシフェニルメタン、ビス(5-シクロヘキシル-4-ヒドロキシ-2-メチルフェニル)-3,4-ジヒドロキシフェニルメタン、1,3,5-トリス(4-ヒドロキシフェニルジメチルベンジル)ベンゼン等のトリスフェノール型化合物;
2,4-ビス(3,5-ジメチル-4-ヒドロキシベンジル)-5-ヒドロキシフェノール、2,6-ビス(2,5-ジメチル-4-ヒドロキシベンジル)-4-メチルフェノール等のリニア型3核体フェノール化合物;
1,1-ビス〔3-(2-ヒドロキシ-5-メチルベンジル)-4-ヒドロキシ-5-シクロヘキシルフェニル〕イソプロパン、ビス[2,5-ジメチル-3-(4-ヒドロキシ-5-メチルベンジル)-4-ヒドロキシフェニル]メタン、ビス[2,5-ジメチル-3-(4-ヒドロキシベンジル)-4-ヒドロキシフェニル]メタン、ビス[3-(3,5-ジメチル-4-ヒドロキシベンジル)-4-ヒドロキシ-5-メチルフェニル]メタン、ビス[3-(3,5-ジメチル-4-ヒドロキシベンジル)-4-ヒドロキシ-5-エチルフェニル]メタン、ビス[3-(3,5-ジエチル-4-ヒドロキシベンジル)-4-ヒドロキシ-5-メチルフェニル]メタン、ビス[3-(3,5-ジエチル-4-ヒドロキシベンジル)-4-ヒドロキシ-5-エチルフェニル]メタン、ビス[2-ヒドロキシ-3-(3,5-ジメチル-4-ヒドロキシベンジル)-5-メチルフェニル]メタン、ビス[2-ヒドロキシ-3-(2-ヒドロキシ-5-メチルベンジル)-5-メチルフェニル]メタン、ビス[4-ヒドロキシ-3-(2-ヒドロキシ-5-メチルベンジル)-5-メチルフェニル]メタン、ビス[2,5-ジメチル-3-(2-ヒドロキシ-5-メチルベンジル)-4-ヒドロキシフェニル]メタン等のリニア型又は環状型4核体フェノール化合物;
2,4-ビス[2-ヒドロキシ-3-(4-ヒドロキシベンジル)-5-メチルベンジル]-6-シクロヘキシルフェノール、2,4-ビス[4-ヒドロキシ-3-(4-ヒドロキシベンジル)-5-メチルベンジル]-6-シクロヘキシルフェノール、2,6-ビス[2,5-ジメチル-3-(2-ヒドロキシ-5-メチルベンジル)-4-ヒドロキシベンジル]-4-メチルフェノール等のリニア型又は環状型5核体フェノール化合物等の、リニア型又は環状型ポリフェノール化合物;
ビス(2,3,4-トリヒドロキシフェニル)メタン、ビス(2,4-ジヒドロキシフェニル)メタン、2,3,4-トリヒドロキシフェニル-4′-ヒドロキシフェニルメタン、2-(2,3,4-トリヒドロキシフェニル)-2-(2′,3′,4′-トリヒドロキシフェニル)プロパン、2-(2,4-ジヒドロキシフェニル)-2-(2′,4′-ジヒドロキシフェニル)プロパン、2-(3,4-ジヒドロキシフェニル)-2-(3′,4′-ジヒドロキシフェニル)プロパン、2-(4-ヒドロキシフェニル)-2-(4′-ヒドロキシフェニル)プロパン、2-(3-フルオロ-4-ヒドロキシフェニル)-2-(3′-フルオロ-4′-ヒドロキシフェニル)プロパン、2-(2,4-ジヒドロキシフェニル)-2-(4′-ヒドロキシフェニル)プロパン、2-(2,3,4-トリヒドロキシフェニル)-2-(4′-ヒドロキシフェニル)プロパン、2-(2,3,4-トリヒドロキシフェニル)-2-(4′-ヒドロキシ-3′,5′-ジメチルフェニル)プロパン等のビスフェノール型化合物;
1-[1,1-ビス(4-ヒドロキシフェニル)エチル]-4-[1′,1′-ビス(4′-ヒドロキシフェニル)エチル]ベンゼン、1-[1-(4-ヒドロキシフェニル)イソプロピル]-4-[1,1-ビス(4-ヒドロキシフェニル)エチル]ベンゼン、1-[1-(3-メチル-4-ヒドロキシフェニル)イソプロピル]-4-[1,1-ビス(3-メチル-4-ヒドロキシフェニル)エチル]ベンゼン等の多核枝分かれ型化合物;
1,1-ビス(4-ヒドロキシフェニル)シクロヘキサン、2-ビス[1,1‐ビス(4‐ヒドロキシフェニルシクロヘキシル)]-2-ビス[1′,1′‐ビス(4′‐ヒドロキシフェニルシクロヘキシル)]プロパン等の縮合型フェノール化合物;
1,1′-スピロビ[1H-インデン]-5,5′,6,6′-テトラオール、2,4,4-トリメチル-2-(2,4-ジヒドロキシフェニル)-7-ヒドロキシクロマン、ペンタシクロ[19,3,1,13,7,19,13,115,19]オクタコサ-1,3,5,7,9,11,13,15,17,19,21,23-ドデカエン-4,6,10,12,16,18,22,24-オクタオール等が挙げられる。これらは1種を単独で用いても2種以上を併用してもよい。 As a specific example of the compound β,
Phenols such as phenol and 4-methylphenol;
Polyhydroxybenzophenones such as 2,3,4-trihydroxybenzophenone, 2,3,4,4'-tetrahydroxybenzophenone;
Tris (4-hydroxyphenyl) methane, 1,1,1-tris (4-hydroxyphenyl) ethane, 1,1-bis (4-hydroxyphenyl) -1- [α, α-dimethyl-α- (4 '-Hydroxyphenyl) benzyl] ethane, bis (4-hydroxy-3-methylphenyl) -2-hydroxyphenylmethane, bis (4-hydroxy-2,3,5-trimethylphenyl) -2-hydroxyphenylmethane, bis (4-hydroxy-3,5-dimethylphenyl) -4-hydroxyphenylmethane, bis (4-hydroxy-3,5-dimethylphenyl) -3-hydroxyphenylmethane, bis (4-hydroxy-3,5-dimethyl) Phenyl) -2-hydroxyphenylmethane, bis (4-hydroxy-2,5-dimethylphenyl) -4-hydroxy Phenylmethane, bis (4-hydroxy-2,5-dimethylphenyl) -3-hydroxyphenylmethane, bis (4-hydroxy-2,5-dimethylphenyl) -2-hydroxyphenylmethane, bis (4-hydroxy-3) , 5-Dimethylphenyl) -3,4-dihydroxyphenylmethane, bis (4-hydroxy-2,5-dimethylphenyl) -3,4-dihydroxyphenylmethane, bis (4-hydroxy-2,5-dimethylphenyl) -2,4-dihydroxyphenylmethane, bis (4-hydroxyphenyl) -3-methoxy-4-hydroxyphenylmethane, bis (5-cyclohexyl-4-hydroxy-2-methylphenyl) -4-hydroxyphenylmethane, bis (5-cyclohexyl-4-hydroxy-2-methylphenyl) 3-hydroxyphenylmethane, bis (5-cyclohexyl-4-hydroxy-2-methylphenyl) -2-hydroxyphenylmethane, bis (5-cyclohexyl-4-hydroxy-2-methylphenyl) -3,4-dihydroxyphenyl Trisphenol type compounds such as methane, 1,3,5-tris (4-hydroxyphenyldimethylbenzyl) benzene;
Linear type 3, such as 2,4-bis (3,5-dimethyl-4-hydroxybenzyl) -5-hydroxyphenol and 2,6-bis (2,5-dimethyl-4-hydroxybenzyl) -4-methylphenol Nuclear phenolic compounds;
1,1-bis [3- (2-hydroxy-5-methylbenzyl) -4-hydroxy-5-cyclohexylphenyl] isopropane, bis [2,5-dimethyl-3- (4-hydroxy-5-methylbenzyl) ) -4-hydroxyphenyl] methane, bis [2,5-dimethyl-3- (4-hydroxybenzyl) -4-hydroxyphenyl] methane, bis [3- (3,5-dimethyl-4-hydroxybenzyl)- 4-hydroxy-5-methylphenyl] methane, bis [3- (3,5-dimethyl-4-hydroxybenzyl) -4-hydroxy-5-ethylphenyl] methane, bis [3- (3,5-diethyl- 4-hydroxybenzyl) -4-hydroxy-5-methylphenyl] methane, bis [3- (3,5-diethyl-4-hydroxybenzyl) -4- Roxy-5-ethylphenyl] methane, bis [2-hydroxy-3- (3,5-dimethyl-4-hydroxybenzyl) -5-methylphenyl] methane, bis [2-hydroxy-3- (2-hydroxy- 5-methylbenzyl) -5-methylphenyl] methane, bis [4-hydroxy-3- (2-hydroxy-5-methylbenzyl) -5-methylphenyl] methane, bis [2,5-dimethyl-3- ( Linear or cyclic tetranuclear phenolic compounds such as 2-hydroxy-5-methylbenzyl) -4-hydroxyphenyl] methane;
2,4-bis [2-hydroxy-3- (4-hydroxybenzyl) -5-methylbenzyl] -6-cyclohexylphenol, 2,4-bis [4-hydroxy-3- (4-hydroxybenzyl) -5 Linear type such as -methylbenzyl] -6-cyclohexylphenol, 2,6-bis [2,5-dimethyl-3- (2-hydroxy-5-methylbenzyl) -4-hydroxybenzyl] -4-methylphenol or Linear or cyclic polyphenol compounds such as cyclic pentanuclear phenol compounds;
Bis (2,3,4-trihydroxyphenyl) methane, bis (2,4-dihydroxyphenyl) methane, 2,3,4-trihydroxyphenyl-4'-hydroxyphenylmethane, 2- (2,3,4) -Trihydroxyphenyl) -2- (2 ', 3', 4'-trihydroxyphenyl) propane, 2- (2,4-dihydroxyphenyl) -2- (2 ', 4'-dihydroxyphenyl) propane, 2 -(3,4-dihydroxyphenyl) -2- (3 ', 4'-dihydroxyphenyl) propane, 2- (4-hydroxyphenyl) -2- (4'-hydroxyphenyl) propane, 2- (3-fluoro -4-hydroxyphenyl) -2- (3'-fluoro-4'-hydroxyphenyl) propane, 2- (2,4-dihydroxyphenyl) -2- (4 ' Hydroxyphenyl) propane, 2- (2,3,4-trihydroxyphenyl) -2- (4'-hydroxyphenyl) propane, 2- (2,3,4-trihydroxyphenyl) -2- (4'- Bisphenol type compounds such as hydroxy-3 ', 5'-dimethylphenyl) propane;
1- [1,1-bis (4-hydroxyphenyl) ethyl] -4- [1 ', 1'-bis (4'-hydroxyphenyl) ethyl] benzene, 1- [1- (4-hydroxyphenyl) isopropyl ] -4- [1,1-bis (4-hydroxyphenyl) ethyl] benzene, 1- [1- (3-methyl-4-hydroxyphenyl) isopropyl] -4- [1,1-bis (3-methyl) Polyhydroxy branched compounds such as -4-hydroxyphenyl) ethyl] benzene;
1,1-bis (4-hydroxyphenyl) cyclohexane, 2-bis [1,1-bis (4-hydroxyphenylcyclohexyl)]-2-bis [1 ', 1'-bis (4'-hydroxyphenylcyclohexyl) ] Condensed phenolic compounds such as propane;
1,1'-spirobi [1H-indene] -5,5 ', 6,6'-tetraol, 2,4,4-trimethyl-2- (2,4-dihydroxyphenyl) -7-hydroxychroman,
化合物α:1,2-ナフトキノンジアジド-5-スルホン酸クロリド、1,2-ナフトキノンジアジド-4-スルホン酸クロリド、1,2‐ベンゾキノンジアジド-4‐スルホン酸クロリド等、
化合物β:フェノール類としてフェノール、4‐メチルフェノール;
ポリヒドロキシベンゾフェノン類として、2,3,4-トリヒドロキシベンゾフェノン、2,3,4,4′-テトラヒドロキシベンゾフェノン;
トリスフェノール型化合物として、トリス(4-ヒドロキシフェニル)メタン、1,1,1-トリス(4-ヒドロキシフェニル)エタン、1,1-ビス(4-ヒドロキシフェニル)-1-[α,α-ジメチル-α-(4′-ヒドロキシフェニル)ベンジル]エタン、1,3,5-トリス(4-ヒドロキシフェニルジメチルベンジル)ベンゼン;
ビスフェノール型化合物として、2,3,4-トリヒドロキシフェニル-4′-ヒドロキシフェニルメタン、2-(3,4-ジヒドロキシフェニル)-2-(3′,4′-ジヒドロキシフェニル)プロパン、2-(2,4-ジヒドロキシフェニル)-2-(2′,4′-ジヒドロキシフェニル)プロパン、2-(2,3,4-トリヒドロキシフェニル)-2-(4′-ヒドロキシフェニル)プロパン;
多核枝分かれ型化合物として、1-[1,1-ビス(4-ヒドロキシフェニル)エチル]-4-[1′,1′-ビス(4′-ヒドロキシフェニル)エチル]ベンゼン;
縮合型フェノール化合物として、2-ビス[1,1‐ビス(4‐ヒドロキシフェニルシクロヘキシル)]-2-ビス[1′,1′‐ビス(4′‐ヒドロキシフェニルシクロヘキシル)]プロパン;
1,1′-スピロビ[1H-インデン]-5,5′,6,6′-テトラオール、2,4,4-トリメチル-2-(2,4-ジヒドロキシフェニル)-7-ヒドロキシクロマン、ペンタシクロ[19,3,1,13,7,19,13,115,19]オクタコサ-1,3,5,7,9,11,13,15,17,19,21,23-ドデカエン-4,6,10,12,16,18,22,24-オクタオール。 The photosensitizer (B) is more preferably a complete condensate or partial condensate of the following compound α and compound β.
Compound α: 1,2-naphthoquinonediazide-5-sulfonic acid chloride, 1,2-naphthoquinonediazide-4-sulfonic acid chloride, 1,2-benzoquinonediazide-4-sulfonic acid chloride, etc.
Compound β: phenol as phenols, 4-methylphenol;
2,3,4-trihydroxybenzophenone, 2,3,4,4'-tetrahydroxybenzophenone as polyhydroxybenzophenones;
Trisphenol type compounds include tris (4-hydroxyphenyl) methane, 1,1,1-tris (4-hydroxyphenyl) ethane, 1,1-bis (4-hydroxyphenyl) -1- [α, α-dimethyl -Α- (4'-hydroxyphenyl) benzyl] ethane, 1,3,5-tris (4-hydroxyphenyldimethylbenzyl) benzene;
Bisphenol type compounds include 2,3,4-trihydroxyphenyl-4'-hydroxyphenylmethane, 2- (3,4-dihydroxyphenyl) -2- (3 ', 4'-dihydroxyphenyl) propane, 2- ( 2,4-dihydroxyphenyl) -2- (2 ', 4'-dihydroxyphenyl) propane, 2- (2,3,4-trihydroxyphenyl) -2- (4'-hydroxyphenyl) propane;
1- [1,1-bis (4-hydroxyphenyl) ethyl] -4- [1 ′, 1′-bis (4′-hydroxyphenyl) ethyl] benzene as the polynuclear branched compound;
2-bis [1,1-bis (4-hydroxyphenylcyclohexyl)]-2-bis [1 ′, 1′-bis (4′-hydroxyphenylcyclohexyl)] propane as the condensed phenol compound;
1,1'-spirobi [1H-indene] -5,5 ', 6,6'-tetraol, 2,4,4-trimethyl-2- (2,4-dihydroxyphenyl) -7-hydroxychroman,
(式(b-1)中、Dは水素原子又は下式(b-2)で表される基を示す。ただし、Dの少なくとも1個は式(b-2)で表される基である。)
(In the formula (b-1), D represents a hydrogen atom or a group represented by the following formula (b-2), provided that at least one of D is a group represented by the formula (b-2). .)
本発明のポジ型感光性樹脂組成物における撥インク剤(C)は、下式(c-1)で表される加水分解性シラン化合物(以下、化合物(c-1)ともいう)、下式(c-2)で表される加水分解性シラン化合物(以下、化合物(c-2)ともいう)を含む混合物(以下、「加水分解性シラン化合物混合物」ともいう。)の部分加水分解縮合物からなり、前記撥インク剤(C)におけるフッ素原子含有率は10~55質量%である。
(式(c-1)及び(c-2)中の記号は、以下の通りである。
Rf:炭素原子数1~6のペルフルオロアルキル基、又はRf1ORf2-で表される炭素原子数2~40の1価の基(Rf1は、炭素原子数1~6のペルフルオロアルキル基であり、Rf2は炭素-炭素原子間にエーテル性酸素原子を有してもよいペルフルオロアルキレン基である。)、
Q1:炭素原子数1~10のフッ素原子を含まない2価の有機基、
RH1:炭素原子数1~6の炭化水素基、
X1、及びX2:加水分解性基、
p:0、1又は2。
ただし、X1、X2、及びRH1が、式(c-1)又は式(c-2)内に複数個存在する場合は、これらは互いに異なっていても同一であってもよい。) [Ink repellent (C)]
The ink repellent agent (C) in the positive photosensitive resin composition of the present invention is a hydrolyzable silane compound (hereinafter also referred to as compound (c-1)) represented by the following formula (c-1), Partially hydrolyzed condensate of a mixture (hereinafter also referred to as “hydrolyzable silane compound mixture”) containing a hydrolyzable silane compound represented by (c-2) (hereinafter also referred to as compound (c-2)) The fluorine atom content in the ink repellent agent (C) is 10 to 55% by mass.
(The symbols in formulas (c-1) and (c-2) are as follows.
R f : a perfluoroalkyl group having 1 to 6 carbon atoms, or a monovalent group having 2 to 40 carbon atoms represented by R f1 OR f2 — (R f1 is a perfluoroalkyl group having 1 to 6 carbon atoms) And R f2 is a perfluoroalkylene group which may have an etheric oxygen atom between carbon-carbon atoms).
Q 1 : a divalent organic group not containing a fluorine atom having 1 to 10 carbon atoms,
R H1 : a hydrocarbon group having 1 to 6 carbon atoms,
X 1 and X 2 : hydrolyzable groups,
p: 0, 1 or 2.
However, when a plurality of X 1 , X 2 and R H1 are present in the formula (c-1) or the formula (c-2), they may be different from each other or the same. )
なお、撥インク剤(C)中のシラノール基数は、29Si-NMRにより測定されるシラノール基を有するSi基と、シラノール基を有しないSi基とのピーク面積の比により算出される。 The ink repellent agent (C) preferably has a silanol group. The number of silanol groups is preferably 0.2 to 3.5, more preferably 0.2 to 2, and particularly preferably 0.5 to 1.5 per silicon atom. When it is at least the lower limit of the above range, it is possible to prevent detachment of the ink repellent agent (C) from the substrate surface when the partition is formed using the positive photosensitive resin composition. When the amount is not more than the upper limit of the above range, the ink repellent agent (C) is excellent in compatibility with the solvent and other components in the positive photosensitive resin composition.
The number of silanol groups in the ink repellent agent (C) is calculated by the ratio of peak areas of Si groups having silanol groups and Si groups having no silanol groups, as measured by 29 Si-NMR.
加水分解性シラン化合物(c-1)は、上記式(c-1)で表されるシラン化合物である。
式(c-1)中、Rfは、炭素原子数1~6のペルフルオロアルキル基、又はエーテル性酸素原子を含む炭素原子数4~9のペルフルオロアルキル基が好ましく、炭素原子数6のペルフルオロアルキル基が特に好ましい。Rfが上記範囲であると、ポジ型感光性樹脂組成物を用いて形成される隔壁が、撥インク性に優れ、特に耐紫外線/オゾン性のある撥インク性に優れ、さらに、汎用の溶媒への溶解性に優れる。
Rfの構造は、直鎖構造、分岐構造、環構造、又は部分的に環を有する構造が挙げられるが、直鎖構造が好ましい。 (Hydrolyzable silane compound (c-1))
The hydrolyzable silane compound (c-1) is a silane compound represented by the above formula (c-1).
In formula (c-1), R f is preferably a perfluoroalkyl group having 1 to 6 carbon atoms or a perfluoroalkyl group having 4 to 9 carbon atoms containing an etheric oxygen atom, and is a perfluoroalkyl group having 6 carbon atoms. The group is particularly preferred. When R f is in the above range, the partition formed using the positive photosensitive resin composition has excellent ink repellency, particularly excellent UV / ozone ink repellency, and a general-purpose solvent. Excellent solubility in
Examples of the structure of R f include a linear structure, a branched structure, a ring structure, or a structure having a partial ring, and a linear structure is preferable.
F(CF2)4-、F(CF2)6-。
CF3CF2OCF2CF2OCF2-、CF3CF2OCF2CF2OCF2CF2-、CF3CF2OCF2CF2OCF2CF2OCF2CF2OCF2-、CF3CF2OCF2CF2OCF2CF2OCF2CF2OCF2CF2-。
CF3CF2CF2OCF2-、CF3CF2CF2OCF2CF2-、CF3CF2CF2OCF(CF3)-、CF3CF2CF2OCF(CF3)CF2-、CF3CF2CF2OCF(CF3)CF2OCF2CF2-、CF3CF2CF2OCF(CF3)CF2OCF(CF3)-、CF3CF2CF2OCF(CF3)CF2OCF(CF3)CF2-、CF3OCF(CF3)CF2OCF(CF3)-、CF3CF2OCF(CF3)CF2OCF(CF3)-。 Specific examples of R f include the following groups.
F (CF 2 ) 4 —, F (CF 2 ) 6 —.
CF 3 CF 2 OCF 2 CF 2 OCF 2 —, CF 3 CF 2 OCF 2 CF 2 OCF 2 CF 2 —, CF 3 CF 2 OCF 2 CF 2 OCF 2 CF 2 OCF 2 CF 2 OCF 2 —, CF 3 CF 2 OCF 2 CF 2 OCF 2 CF 2 OCF 2 CF 2 OCF 2 CF 2 —.
CF 3 CF 2 CF 2 OCF 2- , CF 3 CF 2 CF 2 OCF 2 CF 2- , CF 3 CF 2 CF 2 OCF (CF 3 )-, CF 3 CF 2 CF 2 OCF (CF 3 ) CF 2- , CF 3 CF 2 CF 2 OCF (CF 3 ) CF 2 OCF 2 CF 2- , CF 3 CF 2 CF 2 OCF (CF 3 ) CF 2 OCF (CF 3 )-, CF 3 CF 2 CF 2 OCF (CF 3 ) CF 2 OCF (CF 3 ) CF 2- , CF 3 OCF (CF 3 ) CF 2 OCF (CF 3 )-, CF 3 CF 2 OCF (CF 3 ) CF 2 OCF (CF 3 )-.
Rfがエーテル性酸素原子を含む炭素原子数4~9のペルフルオロアルキル基である場合、上記Q1としては、-(CH2)i1-、-CH2O(CH2)i2-、-SO2NR1-(CH2)i3-、-(C=O)-NR1-(CH2)i4-で表される基(i1~i4及びR1は上記と同様)が好ましい。この場合においても、-(CH2)2-が特に好ましい。 When R f is a perfluoroalkyl group having 1 to 6 carbon atoms, Q 1 is preferably a group represented by — (CH 2 ) i1 — (wherein i1 is the same as above). i1 is preferably an integer of 2 to 4, particularly preferably — (CH 2 ) 2 —.
In the case where R f is a C 4-9 perfluoroalkyl group containing an etheric oxygen atom, the above Q 1 includes — (CH 2 ) i1 —, —CH 2 O (CH 2 ) i2 —, —SO A group represented by 2 NR 1 — (CH 2 ) i3 —, — (C═O) —NR 1 — (CH 2 ) i4 — (i1 to i4 and R 1 are the same as above) is preferable. Also in this case, — (CH 2 ) 2 — is particularly preferable.
F(CF2)4CH2CH2Si(OCH3)3、F(CF2)4CH2CH2Si(OCH2CH3)3、F(CF2)4CH2CH2SiCl3、F(CF2)6CH2CH2Si(OCH3)3、F(CF2)6CH2CH2Si(OCH2CH3)3、F(CF2)6CH2CH2SiCl3。
CF3OCF3CF2CF2CH2CH2Si(OCH3)3、F(CF2)2OCF2CF2OCF2CF2OCF2CF2OCF2CH2CH2Si(OCH2CH3)3、CF3OCF(CF3)CF2CH2CH2CH2Si(OCH3)3。
F(CF2)2OCF2CF2OCF2CH2CH2CH2Si(OCH3)3、F(CF2)2O(CF2)2O(CF2)2CH2CH2Si(OCH3)3。
F(CF2)3OCF2CF2CH2CH2SiCl3、F(CF2)3OCF(CF3)CF2O(CF2)2CH2CH2Si(OCH3)3。 Specific examples of the compound (c-1) include the following compounds.
F (CF 2 ) 4 CH 2 CH 2 Si (OCH 3 ) 3 , F (CF 2 ) 4 CH 2 CH 2 Si (OCH 2 CH 3 ) 3 , F (CF 2 ) 4 CH 2 CH 2 SiCl 3 ,
CF 3 OCF 3 CF 2 CF 2 CH 2 CH 2 Si (OCH 3 ) 3 , F (CF 2 ) 2 OCF 2 CF 2 OCF 2 CF 2 OCF 2 CF 2 OCF 2 CH 2 CH 2 Si (OCH 2 CH 3 ) 3 , CF 3 OCF (CF 3 ) CF 2 CH 2 CH 2 CH 2 Si (OCH 3 ) 3 .
F (CF 2 ) 2 OCF 2 CF 2 OCF 2 CH 2 CH 2 CH 2 Si (OCH 3 ) 3 , F (CF 2 ) 2 O (CF 2 ) 2 O (CF 2 ) 2 CH 2 CH 2 Si (OCH 3 ) 3 .
F (CF 2) 3 OCF 2
加水分解性シラン化合物混合物中に含まれる化合物(c-1)は、1種を単独で用いても2種以上を併用してもよい。 Examples of the compound (c-1) include F (CF 2 ) 6 CH 2 CH 2 Si (OCH 3 ) 3 , F (CF 2 ) 6 CH 2 CH 2 Si (OCH 2 CH 3 ) 3 , F ( CF 2) 6 CH 2 CH 2 SiCl 3, F (CF 2) 3 OCF (CF 3) CF 2 O (CF 2) 2
The compound (c-1) contained in the hydrolyzable silane compound mixture may be used alone or in combination of two or more.
加水分解性シラン化合物(c-2)は、上記式(c-2)で表されるシラン化合物である。
式(c-2)中、RH1は炭素原子数1~4のアルキル基が好ましく、メチル基又はエチル基がより好ましく、メチル基が特に好ましい。
X2は加水分解性基であり、上式(c-1)中のX1と好ましい態様を含めて同様である。
pは0、1又は2であるが、pが2の場合は、2個のRH1、及び(4-p)個のX2は、それぞれ互いに異なっていても同一であってもよい。
pは0又は1が好ましい。 (Hydrolyzable silane compound (c-2))
The hydrolyzable silane compound (c-2) is a silane compound represented by the above formula (c-2).
In the formula (c-2), R H1 is preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group, and particularly preferably a methyl group.
X 2 is a hydrolyzable group, and is the same as X 1 in the above formula (c-1), including preferred embodiments.
p is 0, 1 or 2, but when p is 2, two R H1 and (4-p) X 2 may be different from each other or the same.
p is preferably 0 or 1.
Si(OCH3)4、Si(OCH2CH3)4、CH3Si(OCH3)3、
CH3Si(OCH2CH3)3、CH3CH2Si(OCH3)3、
CH3CH2Si(OCH2CH3)3、(CH3)2Si(OCH3)2、
(CH3)2Si(OCH2CH3)2、
Si(OCH3)4を加水分解縮合した化合物(例えば、コルコート社製のメチルシリケート51(商品名))、
Si(OCH2CH3)4を加水分解縮合した化合物(例えば、コルコート社製のエチルシリケート40、エチルシリケート48(いずれも商品名))。 As the compound (c-2), the following compounds are preferred. If necessary, a partial hydrolysis-condensation product obtained by partial hydrolysis-condensation of a plurality of them may be used. The same applies to other hydrolyzable silane compounds.
Si (OCH 3 ) 4 , Si (OCH 2 CH 3 ) 4 , CH 3 Si (OCH 3 ) 3 ,
CH 3 Si (OCH 2 CH 3 ) 3 , CH 3 CH 2 Si (OCH 3 ) 3 ,
CH 3 CH 2 Si (OCH 2 CH 3 ) 3 , (CH 3 ) 2 Si (OCH 3 ) 2 ,
(CH 3 ) 2 Si (OCH 2 CH 3 ) 2 ,
A compound obtained by hydrolytic condensation of Si (OCH 3 ) 4 (for example, methyl silicate 51 (trade name) manufactured by Colcoat Co.),
Compounds obtained by hydrolytic condensation of Si (OCH 2 CH 3 ) 4 (for example, ethyl silicate 40 and ethyl silicate 48 (both trade names) manufactured by Colcoat).
加水分解性シラン化合物混合物中の化合物(c-2)の含有量は、化合物(c-1)の1モルに対して化合物(c-2)の0.1~9モルが好ましく、0.5~9モルが特に好ましい。 The compound (c-2) contained in the hydrolyzable silane compound mixture of the present invention may be used alone or in combination of two or more. When using 2 or more types together, a bifunctional compound can also be used together with a tetrafunctional compound and / or a trifunctional compound.
The content of the compound (c-2) in the hydrolyzable silane compound mixture is preferably 0.1 to 9 mol of the compound (c-2) with respect to 1 mol of the compound (c-1). ˜9 mol is particularly preferred.
加水分解性シラン化合物(c-3)は、下式(c-3)で表される加水分解性シラン化合物である(以下、「化合物(c-3)」ともいう。)。 (Hydrolyzable silane compound (c-3))
The hydrolyzable silane compound (c-3) is a hydrolyzable silane compound represented by the following formula (c-3) (hereinafter also referred to as “compound (c-3)”).
式(c-3)において、加水分解性基を示すX3は、上記式(c-1)中のX1と好ましい態様を含めて同様である。
また、RH2は上記式(c-2)中のRH1と好ましい態様を含めて同様である。
式(c-3)中、Yは水素原子がハロゲン原子、炭素原子数1~3のアルキル基、炭素原子数2~3のアルケニル基又はニトロ基に置換されていてもよいフェニル基を表す。
Q2はケイ素原子とフェニル基を連結する基であり、単結合又は2価の有機基である。
In the formula (c-3), X 3 representing a hydrolyzable group is the same as X 1 in the formula (c-1), including preferred embodiments.
Further, the R H2 is the same, including the preferred embodiments and R H1 in the formula (c-2).
In formula (c-3), Y represents a phenyl group optionally substituted with a hydrogen atom, a halogen atom, an alkyl group having 1 to 3 carbon atoms, an alkenyl group having 2 to 3 carbon atoms, or a nitro group.
Q 2 is a group linking a silicon atom and a phenyl group, and is a single bond or a divalent organic group.
なお、式(c-3)において、qが2の場合、2個のQ2は互いに異なっていても同一であってもよく、q+rが1の場合、3個のX3は互いに異なっていても同一であってもよく、q+rが2の場合、2個のX3は互いに異なっていても同一であってもよい。
式(c-3)中、qが1で、rが1である、又はqが1で、rが0であることが好ましい。 q is 1 or 2, r is 0 or 1, and q + r is 1 or 2.
In the formula (c-3), when q is 2, two Q 2 may be different or the same, and when q + r is 1, three X 3 are different from each other. May be the same, and when q + r is 2, two X 3 may be different or the same.
In formula (c-3), q is preferably 1 and r is 1, or q is 1 and r is preferably 0.
(C6H5)Si(OC2H5)3、
(C6H5)NH(CH2)3Si(OCH3)3。
本発明の加水分解性シラン化合物混合物中に含まれる化合物(c-3)は、1種を単独で用いても2種以上を併用してもよい。
本発明の加水分解性シラン化合物混合物中の化合物(c-3)の配合量は、加水分解性シラン化合物(c-1)及び(c-2)の合計量の1モルに対して5モル以下が好ましく、4モル以下が特に好ましい。 Specific examples of compound (c-3) include the following compounds.
(C 6 H 5 ) Si (OC 2 H 5 ) 3 ,
(C 6 H 5) NH ( CH 2) 3 Si (OCH 3) 3.
The compound (c-3) contained in the hydrolyzable silane compound mixture of the present invention may be used alone or in combination of two or more.
The compounding amount of the compound (c-3) in the hydrolyzable silane compound mixture of the present invention is 5 mol or less with respect to 1 mol of the total amount of the hydrolyzable silane compounds (c-1) and (c-2). Is preferably 4 mol or less.
すなわち、撥インク剤(C)は、加水分解性シラン化合物(c-1)及び化合物(c-2)を必須成分として用い、任意に化合物(c-3)を用いて製造された場合は、下式(1)で表される平均組成式の構造を有するものとなる。ただし、実際は加水分解性基又はシラノール基が残存した生成物(部分加水分解縮合物)であるので、この生成物を化学式で表すことは困難である。
式(1)で表される平均組成式は、上記のように製造された部分加水分解縮合物において、加水分解性基又はシラノール基の全てが完全に加水分解し、縮合してシロキサン結合となった場合の化学式である。 The ink repellent agent (C) used in the positive photosensitive resin composition of the present invention is a partial hydrolysis condensate of the above-mentioned raw material hydrolyzable silane compound mixture, and usually a plurality of condensates having different degrees of polymerization. It is a composed composition.
That is, when the ink repellent agent (C) is produced using the hydrolyzable silane compound (c-1) and the compound (c-2) as essential components and optionally using the compound (c-3), It has the structure of the average composition formula represented by the following formula (1). However, since it is actually a product (partially hydrolyzed condensate) in which a hydrolyzable group or silanol group remains, it is difficult to express this product by a chemical formula.
The average composition formula represented by the formula (1) is that the hydrolyzable group or silanol group is completely hydrolyzed and condensed into a siloxane bond in the partially hydrolyzed condensate produced as described above. Is the chemical formula.
式(1)中、Rf、RH1、RH2、Y、Q1、Q2、p、q、及びrの好ましい範囲は、上述したものと同様である。s、t、及びuは、重合度の異なる複数の含フッ素シラン化合物混合物における各単位の平均存在モル数である。
In formula (1), the preferred ranges of R f , R H1 , R H2 , Y, Q 1 , Q 2 , p, q, and r are the same as those described above. s, t, and u are the average number of moles of each unit in a plurality of fluorine-containing silane compound mixtures having different degrees of polymerization.
なお、化合物(c-1)及び化合物(c-2)を用いた場合の下記平均組成式(2)におけるs/t(モル比)は、撥インク剤(C)全体の平均値として、加水分解性シラン化合物混合物における化合物(c-1)に対する化合物(c-2)の含有量として上述した範囲、すなわち10/1~90(モル比)が好ましく、10/5~90(モル比)が特に好ましい。
The s / t (molar ratio) in the following average composition formula (2) when using the compound (c-1) and the compound (c-2) is the average value of the entire ink repellent agent (C). The content of the compound (c-2) with respect to the compound (c-1) in the decomposable silane compound mixture is preferably in the above-mentioned range, that is, 10/1 to 90 (molar ratio), preferably 10/5 to 90 (molar ratio). Particularly preferred.
本発明のポジ型感光性樹脂組成物における撥インク剤(C)は、上述した加水分解性シラン化合物混合物を加水分解し、部分縮合させる(以下、「反応工程」ともいう。)ことで製造できる。加水分解及び部分縮合は、上述の通り、加水分解性基の加水分解反応によるシラノール基の生成と、シラノール基同士の脱水縮合反応によるシロキサン結合を生成する反応である。反応工程には、加水分解性シラン化合物を加水分解縮合させる反応に通常用いる反応条件を、特に制限なく適用することができ、例えば、水、触媒、有機溶媒等を用いることができる。 (Manufacture of ink repellent agent (C))
The ink repellent agent (C) in the positive photosensitive resin composition of the present invention can be produced by hydrolyzing and partially condensing the hydrolyzable silane compound mixture described above (hereinafter also referred to as “reaction step”). . As described above, hydrolysis and partial condensation are reactions in which a silanol group is generated by a hydrolysis reaction of a hydrolyzable group and a siloxane bond is generated by a dehydration condensation reaction between silanol groups. For the reaction step, the reaction conditions usually used for the reaction of hydrolyzing and condensing a hydrolyzable silane compound can be applied without particular limitation, and for example, water, a catalyst, an organic solvent and the like can be used.
反応工程において、有機溶媒の量は、加水分解性シラン化合物混合物の100質量部に対して、25~9,900質量部が好ましく、100~1,900質量部が特に好ましい。 An organic solvent may be used in the reaction step. The organic solvent is an organic solvent that is usually used when hydrolyzing and condensing the hydrolyzable silane compound, specifically, methanol, ethanol, 1-propanol, 2-propanol, 1-butanol, 2- Alcohols such as butanol, isobutanol, 2-methyl-2-propanol, ethylene glycol, glycerin and propylene glycol; Ketones such as acetone, methyl isobutyl ketone and cyclohexanone; Cellsolves such as 2-methoxyethanol and 2-ethoxyethanol Carbitols such as 2- (2-methoxyethoxy) ethanol, 2- (2-ethoxyethoxy) ethanol, 2- (2-butoxyethoxy) ethanol; methyl acetate, ethyl acetate, propylene glycol monomethyl ether acetate, -Esters such as butyrolactone, butyl acetate and 3-methoxybutyl acetate; monoalkyl ethers of glycols such as propylene glycol monomethyl ether, diethylene glycol monomethyl ether, diethylene glycol monobutyl ether and dipropylene glycol monomethyl ether, diethylene glycol dimethyl ether, diethylene glycol ethyl methyl ether And dialkyl ethers of glycols such as dipropylene glycol dimethyl ether. Other examples include benzyl alcohol, N, N-dimethylformamide, dimethyl sulfoxide, dimethylacetamide, N-methylpyrrolidone and the like. An organic solvent may be used individually by 1 type, or may use 2 or more types together.
In the reaction step, the amount of the organic solvent is preferably 25 to 9,900 parts by weight, particularly preferably 100 to 1,900 parts by weight, based on 100 parts by weight of the hydrolyzable silane compound mixture.
より具体的には、グリコール系のモノアルキルエーテルアセテート溶媒として、プロピレングリコールモノメチルエーテルアセテート(ε:8.3)、グリコール系のモノアルキルエーテル溶媒としてプロピレングリコールモノメチルエーテル(ε:12.3)、炭化水素系アルコールとして、2-プロパノール(ε:19.92)等が挙げられる。プロピレングリコールモノメチルエーテルは、シラノール基の安定化効果が高い点で特に好ましい。 Specific examples include glycol monoalkyl ether acetate solvents having 2 to 8 carbon atoms, glycol monoalkyl ether solvents, glyme solvents, hydrocarbon alcohols having 2 to 4 carbon atoms, and the like. .
More specifically, propylene glycol monomethyl ether acetate (ε: 8.3) as a glycol-based monoalkyl ether acetate solvent, propylene glycol monomethyl ether (ε: 12.3) as a glycol-based monoalkyl ether solvent, carbonization Examples of the hydrogen alcohol include 2-propanol (ε: 19.92). Propylene glycol monomethyl ether is particularly preferred because of its high silanol group stabilizing effect.
反応時間は、用いる原料成分の量、反応温度、撹拌条件等にもよるが、概ね0.5~24時間、好ましくは1~10時間を挙げることができる。
反応終了後、得られた撥インク剤(C)を、有機溶媒を除去することなく、本発明のポジ型感光性樹脂組成物中に添加することもできる。通常の方法により有機溶媒を除去してから撥インク剤(C)を単離した後、ポジ型感光性樹脂組成物中に添加してもよい。 The reaction step is preferably carried out at a temperature from room temperature to the boiling point of the solvent under suitable stirring conditions.
The reaction time may be about 0.5 to 24 hours, preferably 1 to 10 hours, depending on the amount of raw material components used, reaction temperature, stirring conditions and the like.
After completion of the reaction, the obtained ink repellent agent (C) can be added to the positive photosensitive resin composition of the present invention without removing the organic solvent. After removing the organic solvent by a usual method, the ink repellent agent (C) may be isolated and then added to the positive photosensitive resin composition.
本発明のポジ型感光性樹脂組成物は、溶媒(D)を含有してもよい。
溶媒(D)を含有することで、該組成物の基板への塗工性、基板表面との密着性がより優れる。また、溶媒(D)を含有することで、該組成物中で、撥インク剤(C)を安定して存在させることができる。
溶媒(D)は、ポジ型感光性樹脂組成物が必須成分として含有するアルカリ可溶性樹脂(A)、感光剤(B)、撥インク剤(C)、任意成分として含有する熱硬化剤(E)、熱硬化促進剤(F)及びその他の添加剤を、均一に溶解又は分散させ、ポジ型感光性樹脂組成物に含まれる各成分と反応性を有しないものであれば、特に制限されない。 [Solvent (D)]
The positive photosensitive resin composition of the present invention may contain a solvent (D).
By containing a solvent (D), the coating property to the board | substrate of this composition and the adhesiveness with the substrate surface are more excellent. Moreover, ink repellent agent (C) can be made to exist stably in this composition by containing a solvent (D).
The solvent (D) is an alkali-soluble resin (A), a photosensitive agent (B), an ink repellent agent (C), which is contained as an essential component in the positive photosensitive resin composition, and a thermosetting agent (E) which is contained as an optional component. The thermosetting accelerator (F) and other additives are not particularly limited as long as they are uniformly dissolved or dispersed and do not have reactivity with each component contained in the positive photosensitive resin composition.
本発明のポジ型感光性樹脂組成物は、熱硬化を促進する任意成分として、熱硬化剤(E)を含んでもよい。
熱硬化剤(E)としては、アミノ樹脂、エポキシ化合物、オキサゾリン化合物、ポリイソシアネート化合物、及びポリカルボジイミド化合物からなる群から選ばれる少なくとも1種が好ましい。
アミノ樹脂としては、メラミン系化合物、グアナミン系化合物、尿素系化合物等のアミノ基の一部又は全てをヒドロキシメチル化した化合物、又は該ヒドロキシメチル化した化合物の水酸基の一部又は全てをメタノール、エタノール、n-ブチルアルコール、2-メチル-1-プロパノール等でエーテル化した化合物、例えば、ヘキサメトキシメチルメラミン等が挙げられる。 [Thermosetting agent (E)]
The positive photosensitive resin composition of the present invention may contain a thermosetting agent (E) as an optional component that promotes thermosetting.
The thermosetting agent (E) is preferably at least one selected from the group consisting of amino resins, epoxy compounds, oxazoline compounds, polyisocyanate compounds, and polycarbodiimide compounds.
As the amino resin, a compound obtained by hydroxymethylating a part or all of an amino group such as a melamine compound, a guanamine compound or a urea compound, or a part or all of the hydroxyl group of the hydroxymethylated compound is methanol, ethanol , A compound etherified with n-butyl alcohol, 2-methyl-1-propanol and the like, for example, hexamethoxymethylmelamine and the like.
これらの化合物は1種を単独で用いても2種以上を併用してもよい。 Examples of the oxazoline compound include 2-vinyl-2-oxazoline, 2-vinyl-4-methyl-2-oxazoline, 2-vinyl-5-methyl-2-oxazoline, 2-isopropenyl-2-oxazoline, 2-isopropenyl And copolymers of polymerizable monomers such as -4-methyl-2-oxazoline.
These compounds may be used individually by 1 type, or may use 2 or more types together.
本発明のポジ型感光性樹脂組成物は、熱硬化を促進する任意成分として、熱硬化促進剤(F)を含んでもよい。 [Thermosetting accelerator (F)]
The positive photosensitive resin composition of the present invention may contain a thermosetting accelerator (F) as an optional component that accelerates thermosetting.
熱硬化促進剤(F)としては、例えば、それ自体が熱硬化剤(E)と反応し、架橋して架橋構造を形成する化合物や、それ自体は架橋せず、熱硬化剤(E)に対して触媒作用を有する化合物が挙げられる。
熱硬化剤(E)としてエポキシ化合物を用いる場合、架橋構造を形成する熱硬化促進剤(F)としては、ポリアミン類、ポリチオール類、ポリカルボン酸無水物が挙げられる。より具体的には、ポリアミン類として、エチレンジアミン、トリエチレンジアミン、トリエチレンテトラミン、テトラエチレンペンタミン、ヘキサメチレンジアミン、ポリオキシアルキレンポリアミン、イソホロンジアミン、メンセンジアミン、3,9-ビス(3-アミノプロピル)-2,4,8,10-テトラオキサスピロ(5,5)ウンデカンが挙げられる。ポリチオール類として、ポリエーテルポリチオール、ポリカルボン酸無水物として、水コハク酸、メチルテトラヒドロ無水フタル酸、ヘキサヒドロ無水フタル酸、4-メチルヘキサヒドロ無水フタル酸等が挙げられる。
触媒作用を有するものとしては、3級アミン類、イミダゾール類、ルイス酸類、オニウム塩類、ジシアンジアミド類、有機酸ジヒドラジド類、ホスフィン類等の硬化触媒が挙げられる。より具体的には、2-メチルイミダゾール、2-エチル-4-メチルイミダゾール、トリス(ジメチルアミノメチル)フェノール、三フッ化ホウ素-アミン錯体、ジシアンジアミド、ジフェニルヨードニウムヘキサフルオロホスフェート、トリフェニルスルホニウムヘキサフルオロホスフェート等が挙げられる。
熱硬化促進剤(F)は、これらの1種を単独で用いても2種以上を併用してもよい。 A thermosetting accelerator (F) is a compound which has the effect | action which forms a crosslinked structure in positive type photosensitive resin composition by heating.
As the thermosetting accelerator (F), for example, a compound that itself reacts with the thermosetting agent (E) and crosslinks to form a crosslinked structure, or the thermosetting agent (E) does not crosslink itself. Examples thereof include compounds having a catalytic action.
When using an epoxy compound as the thermosetting agent (E), examples of the thermosetting accelerator (F) that forms a crosslinked structure include polyamines, polythiols, and polycarboxylic acid anhydrides. More specifically, as polyamines, ethylenediamine, triethylenediamine, triethylenetetramine, tetraethylenepentamine, hexamethylenediamine, polyoxyalkylenepolyamine, isophoronediamine, mensendiamine, 3,9-bis (3-aminopropyl) ) -2,4,8,10-tetraoxaspiro (5,5) undecane. Examples of polythiols include polyether polythiol and polycarboxylic acid anhydrides such as hydrosuccinic acid, methyltetrahydrophthalic anhydride, hexahydrophthalic anhydride, 4-methylhexahydrophthalic anhydride, and the like.
Examples of those having a catalytic action include curing catalysts such as tertiary amines, imidazoles, Lewis acids, onium salts, dicyandiamides, organic acid dihydrazides, and phosphines. More specifically, 2-methylimidazole, 2-ethyl-4-methylimidazole, tris (dimethylaminomethyl) phenol, boron trifluoride-amine complex, dicyandiamide, diphenyliodonium hexafluorophosphate, triphenylsulfonium hexafluorophosphate Etc.
A thermosetting accelerator (F) may use these 1 type independently, or may use 2 or more types together.
本発明の感光性樹脂組成物における全固形分中の熱硬化促進剤(F)の含有量は、0.1~10質量%が好ましく、0.5~3質量%が特に好ましい。 When the thermosetting agent (E) is a compound having two or more epoxy groups in one molecule, the thermosetting accelerator (F) is particularly 2-methylimidazole or 4-methyl-2-phenylimidazole. preferable.
The content of the thermosetting accelerator (F) in the total solid content in the photosensitive resin composition of the present invention is preferably from 0.1 to 10% by mass, particularly preferably from 0.5 to 3% by mass.
本発明のポジ型感光性樹脂組成物を、液晶表示素子のカラーフィルタのR、G、及びBの三色の画素を囲む格子状の黒色部分であるブラックマトリックス形成のために用いる場合、着色剤(G)を含むことが好ましい。
着色剤(G)は、例えば、カーボンブラック、アニリンブラック、アントラキノン系黒色顔料、ペリレン系黒色顔料、具体的には、C.I.ピグメントブラック1、6、7、12、20、31等が挙げられる。着色剤(G)としては、赤色顔料、青色顔料、緑色顔料等の有機顔料や無機顔料の混合物を用いることもできる。 [Colorant (G)]
When the positive photosensitive resin composition of the present invention is used for forming a black matrix that is a grid-like black portion surrounding the three color pixels R, G, and B of a color filter of a liquid crystal display element, (G) is preferably included.
Examples of the colorant (G) include carbon black, aniline black, anthraquinone black pigment, and perylene black pigment. I. Pigment black 1, 6, 7, 12, 20, 31 etc. are mentioned. As the colorant (G), a mixture of organic pigments such as red pigments, blue pigments, green pigments, and inorganic pigments can also be used.
本発明のポジ型感光性樹脂組成物は、必要に応じて、シランカップリング剤(H)を含んでもよい。シランカップリング剤(H)を含有することにより、形成される硬化膜の基板密着性がより優れる。
シランカップリング剤(H)としては、テトラエトキシシラン、3-グリシドキシプロピルトリメトキシシラン、メチルトリメトキシシラン、ビニルトリメトキシシラン、3-メタクリロイルオキシプロピルトリメトキシシラン、3-クロロプロピルトリメトキシシラン、3-メルカプトプロピルトリメトキシシラン、3-アミノプロピルトリエトキシシラン、へプタデカフルオロオクチルエチルトリメトキシシラン、ポリオキシアルキレン鎖含有トリエトキシシラン等が挙げられる。これらは1種を単独で用いても2種以上を併用してもよい。 [Silane coupling agent (H)]
The positive photosensitive resin composition of the present invention may contain a silane coupling agent (H) as necessary. By containing a silane coupling agent (H), the board | substrate adhesiveness of the cured film formed is more excellent.
Examples of the silane coupling agent (H) include tetraethoxysilane, 3-glycidoxypropyltrimethoxysilane, methyltrimethoxysilane, vinyltrimethoxysilane, 3-methacryloyloxypropyltrimethoxysilane, and 3-chloropropyltrimethoxysilane. , 3-mercaptopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, heptadecafluorooctylethyltrimethoxysilane, polyoxyalkylene chain-containing triethoxysilane, and the like. These may be used alone or in combination of two or more.
本発明のポジ型感光性樹脂組成物は、必要に応じて、微粒子(I)を含んでもよい。微粒子(I)を含有することにより、ポジ型感光性樹脂組成物を用いて形成される隔壁の熱垂れを防止できる。 [Fine particles (I)]
The positive photosensitive resin composition of the present invention may contain fine particles (I) as necessary. By containing the fine particles (I), the thermal sag of the partition formed using the positive photosensitive resin composition can be prevented.
また、ポジ型感光性樹脂組成物が、着色剤(G)及び高分子分散剤を含有する場合には、該高分子分散剤の吸着能を考慮すれば、微粒子(I)は、負に帯電していることが好ましい。
さらに、ポジ型感光性樹脂組成物の露光感度を考慮すると、微粒子(I)は、露光時に照射される光を吸収しないことが好ましく、超高圧水銀灯の主発光波長であるi線(365nm)、h線(405nm)、及びg線(436nm)を吸収しないことが特に好ましい。 The fine particles (I) are not particularly limited, and inorganic fine particles such as silica, zirconia, magnesium fluoride, tin-doped indium oxide (ITO) and antimony-doped tin oxide (ATO); polyethylene, polymethyl methacrylate (PMMA) and the like Organic fine particles are exemplified. From the viewpoint of heat resistance, inorganic fine particles are preferable, and from the viewpoint of availability and dispersion stability, silica or zirconia is particularly preferable.
Further, when the positive photosensitive resin composition contains the colorant (G) and the polymer dispersant, the fine particles (I) are negatively charged in consideration of the adsorption ability of the polymer dispersant. It is preferable.
Furthermore, considering the exposure sensitivity of the positive photosensitive resin composition, it is preferable that the fine particles (I) do not absorb the light irradiated at the time of exposure, i-line (365 nm) which is the main emission wavelength of the ultra-high pressure mercury lamp, It is particularly preferable not to absorb h-line (405 nm) and g-line (436 nm).
本発明のポジ型感光性樹脂組成物における全固形分中の微粒子(I)の含有量は、5~35質量%が好ましく、10~30質量%が特に好ましい。含有量が上記範囲の下限値以上であると、撥インク性の低下抑制効果があり、上記範囲の上限値以下であると、ポジ型感光性樹脂組成物の貯蔵安定性に優れる。 The average particle diameter of the fine particles (I) is preferably 1 μm or less, and particularly preferably 200 nm or less, from the viewpoint that the surface smoothness of the partition wall is improved. Among these, the average particle diameter is most preferably 5 to 100 nm.
The content of the fine particles (I) in the total solid content in the positive photosensitive resin composition of the present invention is preferably 5 to 35% by mass, particularly preferably 10 to 30% by mass. When the content is not less than the lower limit of the above range, there is an effect of suppressing the decrease in ink repellency, and when it is not more than the upper limit of the above range, the storage stability of the positive photosensitive resin composition is excellent.
本発明のポジ型感光性樹脂組成物には、その他添加剤として、必要に応じて、本発明の効果を損なわない範囲で、増粘剤、可塑剤、消泡剤、レベリング剤、ハジキ防止剤及び紫外線吸収剤からなる群から選ばれる1種以上を配合してもよい。 [Other additives]
In the positive photosensitive resin composition of the present invention, as other additives, a thickener, a plasticizer, an antifoaming agent, a leveling agent, and a repellency inhibitor are added as necessary, as long as the effects of the present invention are not impaired. And one or more selected from the group consisting of ultraviolet absorbers.
ポジ型感光性樹脂組成物を製造する方法として、アルカリ可溶性樹脂(A)、感光剤(B)、撥インク剤(C)、必要に応じて、溶媒(D)、熱硬化剤(E)、熱硬化促進剤(F)、着色剤(G)、シランカップリング剤(H)、微粒子(I)、及びその他の添加剤と混合する方法が好ましい。
混合は、攪拌機を用いて、温度が20℃~25℃、時間を3hr~6hrで行われ、得られた組成物は、そのまま使用される。 [Method for producing positive photosensitive resin composition]
As a method for producing a positive photosensitive resin composition, an alkali-soluble resin (A), a photosensitive agent (B), an ink repellent agent (C), if necessary, a solvent (D), a thermosetting agent (E), A method of mixing with the thermosetting accelerator (F), the colorant (G), the silane coupling agent (H), the fine particles (I), and other additives is preferable.
The mixing is performed using a stirrer at a temperature of 20 ° C. to 25 ° C. and for a time of 3 hr to 6 hr, and the obtained composition is used as it is.
本発明の隔壁は、基板上に区画を設けるために形成される隔壁であって、上記本発明のポジ型感光性樹脂組成物を塗布し、乾燥して、硬化させてなる硬化膜からなる。
本発明の隔壁は、光学素子の用途に好適に用いられ、上記ポジ型感光性樹脂組成物が着色剤(G)を含有する場合には、得られる隔壁はブラックマトリックスとしての適用が可能である。
本発明の隔壁は、例えば、基板上に複数の画素と隣接する画素間に位置する隔壁とを有する光学素子用の隔壁に適用される。 [Partition and manufacturing method thereof]
The partition of this invention is a partition formed in order to provide a division on a board | substrate, Comprising: The positive photosensitive resin composition of the said this invention is apply | coated, and it consists of a cured film formed by drying and hardening.
The partition of the present invention is suitably used for an optical element. When the positive photosensitive resin composition contains a colorant (G), the resulting partition can be applied as a black matrix. .
The partition of the present invention is applied to a partition for an optical element having, for example, a plurality of pixels and a partition located between adjacent pixels on a substrate.
図1(I)は、基板1上に本発明のポジ型感光性樹脂組成物からなる塗膜2が形成された状態の断面を示す図である。
図1(II)は露光工程を模式的に示す図である。
図1(III)は、現像工程後の基板1と基板上に形成された隔壁6を示す断面図である。
以下、図1を用いて、本発明のポジ型感光性樹脂組成物を用いた光学素子用隔壁の製造方法を具体的に説明する。 FIG. 1 is a cross-sectional view schematically showing a production example of an optical element partition using the positive photosensitive resin composition of the present invention.
FIG. 1I is a view showing a cross section in a state where a
FIG. 1 (II) schematically shows the exposure process.
FIG. 1 (III) is a cross-sectional view showing the
Hereinafter, the manufacturing method of the partition for optical elements using the positive photosensitive resin composition of this invention is demonstrated concretely using FIG.
図1(I)に断面を示すように、基板1上に上記本発明のポジ型感光性樹脂組成物を塗布して、ポジ型感光性樹脂組成物からなる塗膜2を形成する。 (Coating film formation process)
As shown in FIG. 1 (I), the positive photosensitive resin composition of the present invention is applied onto a
塗膜2の膜厚は最終的に得られる隔壁の高さを勘案して決められる。塗膜2の膜厚は、最終的に得られる隔壁の高さの100~200%が好ましく、100~130%が特に好ましい。塗膜2の膜厚は0.3~325μmが好ましく、1.3~65μmが特に好ましい。 The coating method of the positive photosensitive resin composition is not particularly limited as long as a coating film having a uniform film thickness is formed. Spin coating, spraying, slit coating, roll coating, spin coating The method used for normal coating-film formation, such as a method and a bar coating method, is mentioned.
The film thickness of the
上記塗膜形成工程で基板1上に形成された塗膜2を加熱し、膜2を得る。加熱によって、塗膜を構成するポジ型感光性樹脂組成物に含まれる溶媒を含む揮発成分が揮発、除去され、粘着性のない膜が得られる。また、撥インク剤(C)が膜表面近傍に移行する。
加熱の方法としては、基板1と共に塗膜2をホットプレート、オーブン等の加熱装置により、50~120℃、好ましくは70~110℃で、10~2,000秒間、好ましくは30~180秒間程度加熱処理する方法が挙げられる。 (Pre-baking process)
The
As a heating method, the
図1(II)に示すように、膜2に所定パターンのマスク4を介して光5を照射する。上記マスク4に切られた所定パターン部分のみを光5が透過し、基板1上の膜2に到達する。露光部のみがアルカリ可溶化するため、上記所定パターンは隔壁の形状に適合する形に設けられる。ポストベーク工程後に隔壁の幅の平均が、100μm以下となることが好ましく、20μm以下が特に好ましい。また、隣接する隔壁間の距離の平均が、300μm以下となることが好ましく、100μm以下が特に好ましい。マスク4としては、該範囲となるようにパターンを形成したものを用いることが好ましい。 (Exposure process)
As shown in FIG. 1 (II), the
露光時間としては、露光量、感光組成物の組成、塗膜の厚さ等にもよるが、1~60秒間が好ましく、5~20秒間が特に好ましい。 As the irradiation device (not shown), a known ultra-high pressure mercury lamp, deep UV lamp, or the like can be used. Exposure is preferably 5 ~ 1,000mJ / cm 2, particularly preferably 50 ~ 400mJ / cm 2. When the exposure amount is at least the lower limit of the above range, the solubility of the solubilized portion of the positive photosensitive resin composition in the developer becomes sufficient, and development residues are eliminated. A high resolution is obtained when it is not more than the upper limit of the above range.
The exposure time depends on the exposure amount, the composition of the photosensitive composition, the thickness of the coating film, etc., but is preferably 1 to 60 seconds, and particularly preferably 5 to 20 seconds.
現像液を用いて現像を行い、図1(II)に示される基板1上の露光部分を除去する。これにより、図1(III)に断面図が示されるような、基板1と上記基板上にポジ型感光性樹脂組成物の膜により形成された隔壁6の構成が得られる。また、隔壁6と基板1で囲まれた部分は、インク注入等により画素が形成されるドット7と呼ばれる部分である。得られた基板10は、後述のポストベーク工程を経て、インクジェット方式での光学素子に用いることができる。 (Development process)
Development is performed using a developer, and the exposed portion on the
また現像液には、溶解性の向上や残渣除去のために、界面活性剤やアルコール等の有機溶媒を添加することができる。 As the developer, an alkaline aqueous solution containing alkalis such as inorganic alkalis, amines, alcohol amines, and quaternary ammonium salts, preferably an alkaline aqueous solution containing alkalis such as tetramethylammonium hydroxide is used. it can.
Further, an organic solvent such as a surfactant or alcohol can be added to the developer in order to improve solubility and remove residues.
現像方法は液盛り法、ディッピング法、シャワー法等が挙げられる。現像後、高圧水洗や流水洗浄を行い、圧縮空気や圧縮窒素で風乾させることによって、基板1及び隔壁6上の水分を除去できる。 The development time (time for contact with the developer) is preferably 5 to 180 seconds, and more preferably 10 to 60 seconds.
Examples of the developing method include a liquid piling method, a dipping method, and a shower method. After the development, water on the
ポストベーク工程として、基板1上の隔壁6を加熱する。加熱の方法としては、基板1と共に隔壁6をホットプレート、オーブン等の加熱装置により、150~250℃で、5~90分間加熱処理をする方法が挙げられる。
加熱により、基板1上のポジ型感光性樹脂組成物の硬化膜からなる隔壁6がさらに硬化し、隔壁6と基板1で囲まれるドット7の形状もより固定化される。なお、上記加熱温度は180℃以上であることが特に好ましい。加熱温度が低すぎると隔壁6の硬化が不充分で、充分な耐薬品性が得られない。ドット7に後述するインク注入工程にてインクを注入した場合に、該インクに含まれる溶媒によっては、隔壁6が膨潤したり、インクが滲むおそれがある。一方、加熱温度が高すぎると、隔壁6の熱分解が生じるおそれがある。 (Post bake process)
As a post-bake process, the
By heating, the
また、隣接する隔壁間の距離(ドットの幅)の平均は、300μm以下が好ましく、100μm以下が特に好ましい。なかでも、30~80μmが最も好ましい。
また、隔壁の高さの平均は、0.05~50μmが好ましく、0.2~10μmが特に好ましい。 The average width of the partition walls to be formed is preferably 100 μm or less, particularly preferably 20 μm or less. Of these, 5 to 20 μm is most preferable.
In addition, the average distance between adjacent barrier ribs (dot width) is preferably 300 μm or less, and particularly preferably 100 μm or less. Of these, 30 to 80 μm is most preferable.
Further, the average height of the partition walls is preferably 0.05 to 50 μm, particularly preferably 0.2 to 10 μm.
本発明の光学素子は、上記製造方法によって基板上に隔壁を形成した後、例えば、上記基板と上記隔壁で囲まれた領域内の露出した基板表面に、親インク化処理をし(親インク化処理工程)、次いで、上記領域にインクジェット法によりインクを注入して上記画素を形成する(インク注入工程)ことにより得られる。 [Method for Manufacturing Optical Element]
In the optical element of the present invention, after the partition wall is formed on the substrate by the above-described manufacturing method, for example, the exposed substrate surface in the region surrounded by the substrate and the partition wall is subjected to an ink affinity treatment (ink affinity treatment). Processing step), and then the ink is injected into the region by an ink jet method to form the pixel (ink injection step).
親インク化処理の方法としては、アルカリ水溶液による洗浄処理、紫外線洗浄処理、紫外線/オゾン洗浄処理、エキシマ洗浄処理、コロナ放電処理、酸素プラズマ処理等の方法が挙げられる。
アルカリ水溶液による洗浄処理は、アルカリ水溶液(水酸化カリウム、テトラメチル水酸化アンモニウム水溶液等)を用いて基板表面を洗浄する湿式処理である。
紫外線洗浄処理は、紫外線を用いて基板表面を洗浄する乾式処理である。
紫外線/オゾン洗浄処理は、185nmと254nmの光を発光する低圧水銀ランプを用いて、基板表面を洗浄する乾式処理である。
エキシマ洗浄処理は、172nmの光を発光するキセノンエキシマランプを用いて、基板表面を洗浄する乾式処理である。
コロナ放電処理は、高周波高電圧を利用し、空気中にコロナ放電を発生させ、基板表面を洗浄する乾式処理である。
酸素プラズマ処理は、主に真空中で、高周波電源等をトリガーとして酸素を励起させ、反応性の高い「プラズマ状態」にしたものを用いて、基板表面を洗浄する乾式処理である。 (Ink affinity process)
Examples of the lyophilic process include a cleaning process using an alkaline aqueous solution, an ultraviolet cleaning process, an ultraviolet / ozone cleaning process, an excimer cleaning process, a corona discharge process, and an oxygen plasma process.
The cleaning process with an alkaline aqueous solution is a wet process in which the substrate surface is cleaned with an alkaline aqueous solution (potassium hydroxide, tetramethyl ammonium hydroxide aqueous solution, or the like).
The ultraviolet cleaning process is a dry process for cleaning the substrate surface using ultraviolet rays.
The ultraviolet / ozone cleaning process is a dry process that cleans the substrate surface using a low-pressure mercury lamp that emits light of 185 nm and 254 nm.
The excimer cleaning process is a dry process that cleans the substrate surface using a xenon excimer lamp that emits light of 172 nm.
The corona discharge treatment is a dry treatment that uses a high-frequency high voltage to generate corona discharge in the air and cleans the substrate surface.
The oxygen plasma treatment is a dry treatment in which the surface of the substrate is cleaned using a highly reactive “plasma state” in which oxygen is excited by using a high frequency power source or the like as a trigger in vacuum.
紫外線/オゾン装置内部に隔壁が形成された基板を設置し、空気中、室温で、1~10分程度、隔壁の撥油性を損なわない範囲で処理を行うことにより、親インク化処理を行うことができる。なお、処理時間については、個々の紫外線/オゾン装置にあわせて、隔壁の撥インク性を損なわない範囲となるよう調整すればよい。 As a method for the ink-philic treatment, a dry treatment method such as an ultraviolet / ozone cleaning treatment is preferable because it is simple. UV / ozone can be generated using commercially available equipment.
The ink-repellent treatment is performed by installing a substrate with partition walls inside the ultraviolet / ozone device and performing treatment in air and at room temperature for about 1 to 10 minutes within a range that does not impair the oil repellency of the partition walls. Can do. In addition, what is necessary is just to adjust processing time so that it may become the range which does not impair the ink repellency of a partition according to each ultraviolet-ray / ozone apparatus.
本発明のポジ型感光性樹脂組成物を用いて形成された隔壁を有する基板を用いて光学素子を製造する場合、隔壁は上記親インク化処理後も、充分な撥インク性を有することが求められる。隔壁の水の接触角は90度以上が好ましく、95度以上が特に好ましい。また、隔壁のPGMEAの接触角は30度以上が好ましく、35度以上が特に好ましい。
一方、本発明のポジ型感光性樹脂組成物を用いて形成された隔壁を有する基板を用いて光学素子を製造する場合、ドットについては、親インク性であることが求められ、その水の接触角は20度以下が好ましく、10度以下が特に好ましい。 Here, the ink repellency (water / oil repellency) of the cured film formed from the positive photosensitive resin composition is water and PGMEA (propylene glycol monomethyl ether acetate: an organic solvent often used as a solvent for the ink. ) And the contact angle can be estimated.
When an optical element is produced using a substrate having partition walls formed using the positive photosensitive resin composition of the present invention, the partition walls are required to have sufficient ink repellency even after the above-mentioned ink-philic treatment. It is done. The water contact angle of the partition walls is preferably 90 ° or more, and particularly preferably 95 ° or more. Further, the contact angle of PGMEA of the partition wall is preferably 30 degrees or more, and particularly preferably 35 degrees or more.
On the other hand, when manufacturing an optical element using a substrate having a partition formed using the positive photosensitive resin composition of the present invention, the dots are required to be ink-philic, and contact with water. The angle is preferably 20 degrees or less, particularly preferably 10 degrees or less.
親インク化処理工程後のドットにインクジェット法によりインクを注入して画素を形成する工程である。
この工程は、インクジェット法において一般的に用いられるインクジェット装置を用いて、通常の方法と同様に行うことができる。このような画素の形成に用いられるインクジェット装置としては、特に限定されるものではないが、帯電したインクを連続的に噴射し磁場によって制御する方法、圧電素子を用いて間欠的にインクを噴射する方法、インクを加熱し、その発泡を利用して間欠的に噴射する方法等の、各種の方法を用いたインクジェット装置を用いることができる。 (Ink injection process)
This is a step of forming pixels by injecting ink into the dots after the ink-philic processing step by an ink jet method.
This step can be performed in the same manner as a normal method using an ink jet apparatus generally used in the ink jet method. The ink jet device used for forming such pixels is not particularly limited, but a method in which charged ink is continuously ejected and controlled by a magnetic field, and ink is ejected intermittently using a piezoelectric element. An ink jet apparatus using various methods such as a method, a method of heating ink, and a method of intermittently ejecting the ink using the bubbling can be used.
隔壁の形成、ドットの親インク化処理、インクジェット法によるインク注入は上述の通りである。
カラーフィルタにおいて、形成される画素の形状は、ストライプ型、モザイク型、トライアングル型、4画素配置型等の公知のいずれの配列とすることも可能である。 [Manufacture of color filters]
The formation of the partition walls, the process of making dots ink-philic, and the ink injection by the ink jet method are as described above.
In the color filter, the shape of the pixel to be formed can be any known arrangement such as a stripe type, a mosaic type, a triangle type, or a four-pixel arrangement type.
着色成分としては、耐熱性、耐光性等に優れた顔料及び染料を用いることが好ましい。
バインダー樹脂成分としては、透明で耐熱性に優れた樹脂が好ましく、アクリル樹脂、メラミン樹脂、ウレタン樹脂等が挙げられる。
水性のインクは、溶媒として水及び必要に応じて水溶性有機溶媒を含み、バインダー樹脂成分として水溶性樹脂又は水分散性樹脂を含み、必要に応じて各種助剤を含む。
また、油性のインクは、溶媒として有機溶媒を含み、バインダー樹脂成分として有機溶媒に可溶な樹脂を含み、必要に応じて各種助剤を含む。
インクジェット法によりインクを注入した後は、必要により、乾燥、加熱硬化、及び/又は紫外線硬化を行うことが好ましい。 The ink used for forming the pixel mainly includes a coloring component, a binder resin component, and a solvent.
As the coloring component, it is preferable to use pigments and dyes excellent in heat resistance, light resistance and the like.
As the binder resin component, a resin that is transparent and excellent in heat resistance is preferable, and examples thereof include an acrylic resin, a melamine resin, and a urethane resin.
The water-based ink contains water and optionally a water-soluble organic solvent as a solvent, contains a water-soluble resin or a water-dispersible resin as a binder resin component, and contains various auxiliary agents as necessary.
The oil-based ink contains an organic solvent as a solvent, a resin soluble in an organic solvent as a binder resin component, and various auxiliary agents as necessary.
After the ink is injected by the ink jet method, it is preferable to perform drying, heat curing, and / or ultraviolet curing as necessary.
保護膜層は表面平坦性を上げる目的と隔壁や画素部のインクからの溶出物が液晶層に到達するのを遮断する目的で形成することが好ましい。
保護膜層を形成する場合は、事前に隔壁の撥インク性を除去することが好ましい。撥インク性を除去しない場合、オーバーコート用塗布液をはじき、均一な膜厚が得られないため好ましくない。
隔壁の撥インク性を除去する方法としては、プラズマアッシング(Plasma Ashing)処理や光アッシング処理等が挙げられる。
さらに必要に応じて、カラーフィルタを用いて製造される液晶パネルの高品位化のために、フォトスペーサを隔壁で構成されるブラックマトリックス上に形成することが好ましい。 After the pixels are formed, a protective film layer is formed using an overcoat coating solution as necessary.
The protective film layer is preferably formed for the purpose of increasing the surface flatness and for blocking the eluate from the ink in the partition walls and the pixel portion from reaching the liquid crystal layer.
When forming the protective film layer, it is preferable to remove the ink repellency of the partition wall in advance. If the ink repellency is not removed, the overcoat coating solution is repelled, and a uniform film thickness cannot be obtained.
Examples of the method for removing the ink repellency of the partition include plasma ashing and light ashing.
Further, if necessary, it is preferable to form a photo spacer on a black matrix composed of partition walls in order to improve the quality of a liquid crystal panel manufactured using a color filter.
本発明のポジ型感光性樹脂組成物を用いて隔壁を形成する前に、ガラス等の透明基板にスズドープ酸化インジウム(ITO)等の透明電極をスパッタ法等によって製膜し、必要に応じて、所望のパターンに透明電極をエッチングする。次に、本発明のポジ型感光性樹脂組成物を用いて隔壁を形成し、ドットの親インク化処理をした後、インクジェット法を用いてドットに正孔輸送材料、発光材料の溶液を順次塗布し、乾燥して、正孔輸送層、及び発光層を形成する。その後、アルミニウム等の電極を蒸着法等によって形成することによって、有機EL素子の画素が得られる。 [Manufacture of organic EL elements]
Before forming the partition using the positive photosensitive resin composition of the present invention, a transparent electrode such as tin-doped indium oxide (ITO) is formed on a transparent substrate such as glass by a sputtering method or the like. The transparent electrode is etched into a desired pattern. Next, a partition is formed using the positive photosensitive resin composition of the present invention, the ink is made into an ink, and then a hole transport material and a light emitting material solution are sequentially applied to the dots using an inkjet method. And dried to form a hole transport layer and a light emitting layer. Then, the pixel of an organic EL element is obtained by forming electrodes, such as aluminum, by a vapor deposition method etc.
以下の(1)~(3)の工程を経て、有機TFTアレイを製造することができる。
(1)ガラス等の透明基板に本発明のポジ型感光性樹脂組成物を用いて隔壁を形成する。次いで、ドットの親インク化処理をした後、インクジェット法を用いて、ドットにゲート電極材料の溶液を塗布し、ゲート電極を形成する。
(2)ゲート電極を形成させた後、その上にゲート絶縁膜を形成させる。次いで、ゲート絶縁膜上に、本発明のポジ型感光性樹脂組成物を用いて隔壁を形成し、ドットの親インク化処理をした後、インクジェット法を用いてドットにソース・ドレイン電極材料の溶液を塗布し、ソース・ドレイン電極を形成する。
(3)ソース・ドレイン電極を形成させた後、一対のソース・ドレイン電極を含む領域を囲むように、本発明のポジ型感光性樹脂組成物を用いて隔壁を形成する。次いで、ドットの親インク化処理をした後、インクジェット法を用いて、ドットに有機半導体の溶液を塗布し、有機半導体層をソース・ドレイン電極間に形成させる。
なお、工程(1)~(3)は、それぞれの1工程のみにおいて、本発明のポジ型感光性樹脂組成物を用いた隔壁を形成し、利用してもよいし、2つ以上の工程において、本発明のポジ型感光性樹脂組成物を用いた隔壁を形成し、利用してもよい。 [Manufacture of organic TFT array]
An organic TFT array can be manufactured through the following steps (1) to (3).
(1) A partition wall is formed on a transparent substrate such as glass using the positive photosensitive resin composition of the present invention. Next, after the dot is made ink-insensitive, a solution of a gate electrode material is applied to the dots using an inkjet method to form a gate electrode.
(2) After forming the gate electrode, a gate insulating film is formed thereon. Next, a partition is formed on the gate insulating film using the positive photosensitive resin composition of the present invention, and after the dot is made to be an ink-inking solution, a solution of the source / drain electrode material is formed on the dot using an inkjet method. Is applied to form source / drain electrodes.
(3) After the source / drain electrodes are formed, partition walls are formed using the positive photosensitive resin composition of the present invention so as to surround a region including the pair of source / drain electrodes. Next, after the dot is made into an ink-inking process, an organic semiconductor solution is applied to the dots using an inkjet method, and an organic semiconductor layer is formed between the source and drain electrodes.
In the steps (1) to (3), the partition using the positive photosensitive resin composition of the present invention may be formed and used in only one step, or in two or more steps. A partition using the positive photosensitive resin composition of the present invention may be formed and used.
例1~4が実施例であり、例5が比較例である。 The present invention will be described in more detail with reference to the following examples, but the present invention should not be construed as being limited to these examples.
Examples 1 to 4 are examples, and example 5 is a comparative example.
[数平均分子量(Mn)]
分子量測定用の標準試料として市販されている重合度の異なる数種の単分散ポリスチレン重合体のゲルパーミエーションクロマトグラフィー(GPC)を、市販のGPC測定装置(東ソー社製、装置名:HLC-8320GPC)を用いて測定し、ポリスチレンの分子量と保持時間(リテンションタイム)との関係をもとに検量線を作成した。
試料をテトラヒドロフランで1.0質量%に希釈し、0.5μmのフィルターに通過させた後、該試料についてのGPCを、前記GPC測定装置を用いて測定した。
前記検量線を用いて、試料のGPCスペクトルをコンピュータ解析することにより、該試料の数平均分子量(Mn)を求めた。 Each measurement was performed by the following method.
[Number average molecular weight (Mn)]
Gel permeation chromatography (GPC) of several types of monodisperse polystyrene polymers with different degrees of polymerization, which are commercially available as standard samples for molecular weight measurement, were prepared using a commercially available GPC measuring device (manufactured by Tosoh Corporation, device name: HLC-8320GPC). ), And a calibration curve was created based on the relationship between the molecular weight of polystyrene and the retention time (retention time).
The sample was diluted to 1.0% by mass with tetrahydrofuran and passed through a 0.5 μm filter, and then GPC of the sample was measured using the GPC measurement apparatus.
The number average molecular weight (Mn) of the sample was determined by computer analysis of the GPC spectrum of the sample using the calibration curve.
静滴法により、JIS R3257「基板ガラス表面のぬれ性試験方法」に準拠して、基板上の測定表面の3ヶ所に水滴を載せ、各水滴について測定した。液滴は2μL/滴であり、測定は20℃で行った。接触角は、3測定値の平均値(n=3)で示す。 [Water contact angle]
In accordance with JIS R3257 “Testing method for wettability of substrate glass surface”, water droplets were placed on three measurement surfaces on the substrate by a sessile drop method, and each water droplet was measured. The droplet was 2 μL / droplet, and the measurement was performed at 20 ° C. The contact angle is indicated by an average value of three measured values (n = 3).
静滴法により、JIS R3257「基板ガラス表面のぬれ性試験方法」に準拠して、基板上の測定表面の3ヶ所にPGMEA滴を載せ、各PGMEA滴について測定した。液滴は2μL/滴であり、測定は20℃で行った。接触角は、3測定値の平均値(n=3)で示す。 [PGMEA contact angle]
According to JIS R3257 “Test method for wettability of substrate glass surface”, PGMEA droplets were placed at three locations on the measurement surface on the substrate, and each PGMEA droplet was measured. The droplet was 2 μL / droplet, and the measurement was performed at 20 ° C. The contact angle is indicated by an average value of three measured values (n = 3).
(アルカリ可溶性樹脂(A))
EP4020G(商品名;EP4020G、旭有機材工業社製、クレゾールノボラック樹脂 (質量平均分子量(Mw):11,600、溶解速度:164(オングストローム/秒))。 Abbreviations of the compounds used in Synthesis Examples 1 to 5 and Examples 1 to 5 are as follows.
(Alkali-soluble resin (A))
EP4020G (trade name; EP4020G, manufactured by Asahi Organic Materials Co., Ltd., cresol novolak resin (mass average molecular weight (Mw): 11,600, dissolution rate: 164 (angstrom / second)).
4NT-250(商品名;4NT-250、東洋合成社製(2,3,4,4’-テトラヒドロキシベンゾフェノンと6-ジアゾ-5,6-ジヒドロ-5-オキソ-ナフタレン-1-スルホン酸との(モノ~テトラ)エステル))。 (Photosensitive agent (B))
4NT-250 (trade name; 4NT-250, manufactured by Toyo Gosei Co., Ltd. (2,3,4,4′-tetrahydroxybenzophenone and 6-diazo-5,6-dihydro-5-oxo-naphthalene-1-sulfonic acid) (Mono-tetra) esters)).
加水分解性シラン化合物(c-1)に相当する、化合物(c-11):CF3(CF2)5CH2CH2Si(OCH3)3(旭硝子社製)。
加水分解性シラン化合物(c-2)に相当する、化合物(c-21):Si(OC2H5)4(コルコート社製)。
加水分解性シラン化合物(c-3)に相当する、化合物(c-31):C6H5Si(OC2H5)3(信越化学工業社製)。
加水分解性シラン化合物(c-3)に相当する、化合物(c-32):C6H5NH(CH2)3Si(OCH3)3(信越化学工業社製)。
C6FMA:CH2=C(CH3)COOCH2CH2(CF2)6F。
MEK:メチルエチルケトン。
MAA:メタクリル酸。
GMA:グリシジルメタクリレート。
MMA:メチルメタクリレート。
V-65:(商品名、和光化学工業社製(2,2’-アゾビス(2.4ジメチルバレロニトリル)(重合開始剤))。 (Hydrolyzable silane compound as a raw material for the ink repellent agent (C))
Compound (c-11) corresponding to the hydrolyzable silane compound (c-1): CF 3 (CF 2 ) 5 CH 2 CH 2 Si (OCH 3 ) 3 (manufactured by Asahi Glass Co., Ltd.).
Compound (c-21) corresponding to the hydrolyzable silane compound (c-2): Si (OC 2 H 5 ) 4 (manufactured by Colcoat).
Compound (c-31) corresponding to the hydrolyzable silane compound (c-3): C 6 H 5 Si (OC 2 H 5 ) 3 (manufactured by Shin-Etsu Chemical Co., Ltd.).
Compound (c-32) corresponding to the hydrolyzable silane compound (c-3): C 6 H 5 NH (CH 2 ) 3 Si (OCH 3 ) 3 (manufactured by Shin-Etsu Chemical Co., Ltd.).
C6FMA: CH 2 = C (CH 3)
MEK: methyl ethyl ketone.
MAA: methacrylic acid.
GMA: glycidyl methacrylate.
MMA: methyl methacrylate.
V-65: (trade name, manufactured by Wako Chemical Industries, Ltd. (2,2′-azobis (2.4dimethylvaleronitrile) (polymerization initiator)).
PGMEA:プロピレングリコールモノメチルエーテルアセテート。
PGME:プロピレングリコールモノメチルエーテル(東邦化学社製)。
(熱硬化剤(E))
TEP-G(商品名;TEP-G、旭有機材工業社製、エポキシ樹脂)。
(熱硬化促進剤(F))
2-MI(商品名、東京化成工業社製(2-メチルイミダゾール))。 (Solvent (D))
PGMEA: Propylene glycol monomethyl ether acetate.
PGME: Propylene glycol monomethyl ether (manufactured by Toho Chemical Co., Ltd.).
(Thermosetting agent (E))
TEP-G (trade name; TEP-G, manufactured by Asahi Organic Materials Co., Ltd., epoxy resin).
(Thermosetting accelerator (F))
2-MI (trade name, manufactured by Tokyo Chemical Industry Co., Ltd. (2-methylimidazole)).
撹拌機を備えた50cm3の三口フラスコに、上記化合物(c-11)の0.57g、上記化合物(c-21)の1.27g、及び上記化合物(c-31)の0.74gを入れて、撥インク剤(C1)の原料混合物を得た。次いで、該原料混合物にPGMEの9.85gを入れて、溶液(原料溶液)とした。
得られた原料溶液に、室温で、撹拌しながら、触媒として1.0質量%リン酸水溶液を1.33g滴下した。滴下終了後、さらに、5時間撹拌し、加水分解及び部分縮合反応を行い、撥インク剤(CA1)を10質量%で含有するPGME溶液である(CA1-1)液を得た。
触媒として1.0質量%リン酸水溶液の代わりに表1に示すものを1.33g使用する以外は、合成例1同様に実施し、撥インク剤(CA2)~(CA3)を10質量%で含有するPGME溶液である(CA2-1)~(CA3-1)液を得た。 [Synthesis Examples 1 to 3: Synthesis of ink repellent agents (CA1) to (CA3) and preparation of (CA1-1) to (CA3-1) solutions]
In a 50 cm 3 three-necked flask equipped with a stirrer, 0.57 g of the compound (c-11), 1.27 g of the compound (c-21), and 0.74 g of the compound (c-31) were placed. Thus, a raw material mixture of the ink repellent agent (C1) was obtained. Next, 9.85 g of PGME was added to the raw material mixture to prepare a solution (raw material solution).
To the obtained raw material solution, 1.33 g of 1.0 mass% phosphoric acid aqueous solution was dropped as a catalyst while stirring at room temperature. After completion of the dropwise addition, the mixture was further stirred for 5 hours to conduct hydrolysis and partial condensation reaction to obtain a (CA1-1) solution that was a PGME solution containing 10% by mass of the ink repellent agent (CA1).
The same procedure as in Synthesis Example 1 was performed except that 1.33 g of the catalyst shown in Table 1 was used instead of the 1.0 mass% phosphoric acid aqueous solution as the catalyst, and the ink repellent agents (CA2) to (CA3) were added at 10 mass%. The (CA2-1) to (CA3-1) solutions that are PGME solutions contained were obtained.
上記化合物(c-31)に代えて上記化合物(c-32)を用いる以外は、合成例1と同様に実施し、撥インク剤(CA4)の原料溶液を調製した。
得られた原料溶液に、室温で、撹拌しながら、1.0質量%硝酸水溶液を0.93g滴下した。滴下終了後、さらに、5時間撹拌し、加水分解及び部分縮合反応を行い、撥インク剤(CA4)を10質量%で含有するPGME溶液である(CA4-1)液を得た。 [Synthesis Example 4: Synthesis of ink repellent agent (CA4) and preparation of (CA4-1) solution]
A raw material solution of an ink repellent agent (CA4) was prepared in the same manner as in Synthesis Example 1 except that the compound (c-32) was used in place of the compound (c-31).
0.93g of 1.0 mass% nitric acid aqueous solution was dripped at the obtained raw material solution, stirring at room temperature. After completion of the dropwise addition, the mixture was further stirred for 5 hours to conduct hydrolysis and partial condensation reaction, thereby obtaining a (CA4-1) solution that was a PGME solution containing 10% by mass of the ink repellent agent (CA4).
撹拌機を備えた内容積1000cm3のオートクレーブに、MEKの420.0g、C6FMAの86.4g、MAAの18.0g、GMAの21.6g、MMAの54.0g及びV-65の0.8gを仕込み、窒素雰囲気下で撹拌しながら、50℃で24時間重合反応させ、粗共重合体を合成した。得られた粗共重合体の溶液に、ヘキサンを加えて再沈し、精製した後、真空乾燥した。得られた固形物にPGMEAの14,643gを加えて撹拌し、撥インク剤(CA5)を10質量%で含有するPGMEA溶液である(CA5-1)液を得た。 [Synthesis Example 5: Preparation of ink repellent (CA5) and (CA5-1) solutions]
In an autoclave with an internal volume of 1000 cm 3 equipped with a stirrer, 420.0 g of MEK, 86.4 g of C6FMA, 18.0 g of MAA, 21.6 g of GMA, 54.0 g of MMA and 0.8 g of V-65 And a polymerization reaction was carried out at 50 ° C. for 24 hours while stirring under a nitrogen atmosphere to synthesize a crude copolymer. Hexane was added to the resulting crude copolymer solution for reprecipitation, purification, and vacuum drying. To the obtained solid, 14,643 g of PGMEA was added and stirred to obtain a (CA5-1) solution that was a PGMEA solution containing 10% by mass of the ink repellent agent (CA5).
また撥インク剤 (CA1)~(CA5)の仕込み量組成(モル%)も表1に示す。 Compositions prepared by the synthesis examples 1 to 5 except for the solvents (CA1-1) to (CA5-1) containing the ink repellent agent at 10% by mass, that is, the ink repellent agent (CA1). Table 1 shows the fluorine-containing content (mass% of fluorine atoms) and number average molecular weight (Mn) of (CA5).
In addition, Table 1 shows the charged amount compositions (mol%) of the ink repellent agents (CA1) to (CA5).
(ポジ型感光性樹脂組成物1の製造)
(CA1-1)液の1g(固形分は0.1g、残りはPGME(溶媒))、EP4020Gの15.6g、4NT-250の5.4g、TEP-Gの3.1g、2-MIの0.8g、及びPGMEAの74.1gを500cm3の撹拌用容器に入れ、30分間撹拌して、ポジ型感光性樹脂組成物1を調製した。 [Example 1]
(Manufacture of positive photosensitive resin composition 1)
1 g of (CA1-1) solution (solid content is 0.1 g, the rest is PGME (solvent)), 15.6 g of EP4020G, 5.4 g of 4NT-250, 3.1 g of TEP-G, 2-MI 0.8 g and 74.1 g of PGMEA were put in a 500 cm 3 stirring container and stirred for 30 minutes to prepare a positive
10cm四方のガラス基板をエタノールで30秒間超音波洗浄し、次いで、5分間の紫外線/オゾン洗浄を行った。紫外線/オゾン洗浄には、紫外線/オゾン発生装置としてPL7-200(センエジニアリング社製)を使用した。なお、以下の全ての紫外線/オゾン処理についても、紫外線/オゾン発生装置として本装置を使用した。 (Manufacture of cured film)
A 10 cm square glass substrate was ultrasonically cleaned with ethanol for 30 seconds, and then subjected to ultraviolet / ozone cleaning for 5 minutes. For UV / ozone cleaning, PL7-200 (manufactured by Sen Engineering) was used as an UV / ozone generator. In addition, this apparatus was used as an ultraviolet / ozone generator for all the following ultraviolet / ozone treatments.
上記で得られたポジ型感光性樹脂組成物1及び硬化膜(隔壁)が形成されたガラス基板1について以下の評価を行った。
<撥インク性(隔壁)、親インク性(ドット)、及び現像残渣>
得られたガラス基板1の硬化膜、すなわち隔壁表面(未露光部分)のPGMEAに対する接触角と、現像により膜が除去された部分、すなわちドット部分(ガラス基板表面)の水に対する接触角を測定した。この時、ドット部分の水に対する接触角により現像残渣についての評価を行った。評価は以下のように行った。
○(良好):水の接触角が30度未満 。
×(不良):水の接触角が30度以上。
その後、ガラス基板1の硬化膜が形成された側の表面全体に、紫外線/オゾン照射を1分間行った。1分照射後の硬化膜表面のPGMEAに対する接触角及びガラス基板表面の水に対する接触角を測定した。測定方法は上述の通りである。評価結果を表2に示す。 (Evaluation)
The following evaluation was performed about the
<Ink repellency (partition wall), ink affinity (dot), and development residue>
The contact angle with respect to PGMEA of the cured film of the obtained
○ (Good): Water contact angle is less than 30 degrees.
X (defect): The contact angle of water is 30 degrees or more.
Thereafter, the entire surface of the
ポジ型用感光性組成物をガラス製スクリュー瓶にて23℃(室温)で一カ月保存した。一カ月保存後、例1と同様の方法で洗浄した10cm×10cmのガラス基板表面に、スピンナを用いて、ポジ型用感光性組成物を塗布し、塗膜を形成した。次いで、100℃で2分間ホットプレート上で乾燥させ、膜厚1μmの膜を形成した。膜の外観を目視にて観察し、以下のように評価した。
○(良好):膜上の異物が5個以下である。
×(不良):膜上の異物が6個以上で、ガラス基板の中心部から放射状の筋模様が観察された。 <Storage stability>
The positive photosensitive composition was stored in a glass screw bottle at 23 ° C. (room temperature) for one month. After storage for one month, a positive photosensitive composition was applied to the surface of a 10 cm × 10 cm glass substrate washed in the same manner as in Example 1 using a spinner to form a coating film. Subsequently, it was dried on a hot plate at 100 ° C. for 2 minutes to form a film having a thickness of 1 μm. The appearance of the film was visually observed and evaluated as follows.
○ (good): The number of foreign matters on the film is 5 or less.
X (defect): There were 6 or more foreign matters on the film, and radial streaks were observed from the center of the glass substrate.
(CA1-1)液に代えて、表に示す(CA2-1)~(CA5-1)液を用いた以外は、例1と同様にしてポジ型感光性樹脂組成物2~5及びポジ型感光性樹脂組成物2~5の硬化膜が形成されたガラス基板2~5を作製し、それらについて例1と同様にして評価した。
結果を、まとめて表2に示す。また、例1~5で得られた組成物の組成も合わせて表2に示す。 [Examples 2 to 5]
In the same manner as in Example 1 except that the (CA2-1) to (CA5-1) liquids shown in the table were used instead of the (CA1-1) liquid, positive type
The results are summarized in Table 2. The compositions of the compositions obtained in Examples 1 to 5 are also shown in Table 2.
一方、本発明によらない撥インク剤を用いた例5で得られた硬化膜は、紫外線/オゾン照射後の撥インク性が不充分であった。 As can be seen from Table 2, the positive photosensitive resin compositions obtained in Examples 1 to 4 are excellent in storage stability. By using the composition, it is possible to obtain a partition wall having no development residue. The cured films obtained in Examples 1 to 4 were excellent in ink repellency because of using the ink repellent agent of the present invention, excellent in ink repellency even after UV / ozone irradiation, and excellent in dot (glass substrate surface). It can be seen that it has ink affinity.
On the other hand, the cured film obtained in Example 5 using an ink repellent agent not according to the present invention had insufficient ink repellency after ultraviolet / ozone irradiation.
なお、2012年3月9日に出願された日本特許出願2012-053448号の明細書、特許請求の範囲、図面及び要約書の全内容をここに引用し、本発明の明細書の開示として、取り入れるものである。 The positive photosensitive resin composition of the present invention is excellent in ink repellency, has excellent ink repellency even after being irradiated with ultraviolet rays / ozone, and can produce a partition wall with little residue in dots. It can be suitably used for the formation of partition walls in the production of color filters using the recording technique, the production of organic EL elements, and the production of organic TFT arrays, and is particularly suitable for the formation of partition walls on large-area substrates.
The entire contents of the specification, claims, drawings, and abstract of Japanese Patent Application No. 2012-053448 filed on March 9, 2012 are cited herein as disclosure of the specification of the present invention. Incorporated.
Claims (15)
- アルカリ可溶性樹脂(A)、感光剤(B)及び撥インク剤(C)を含むポジ型感光性樹脂組成物であって、
前記撥インク剤(C)が下式(c-1)で表される加水分解性シラン化合物と、下式(c-2)で表される加水分解性シラン化合物とを含む混合物の部分加水分解縮合物からなり、前記撥インク剤(C)におけるフッ素原子含有率が10~55質量%であることを特徴とするポジ型感光性樹脂組成物。
(式(c-1)及び(c-2)中の記号は、以下の通りである。
Rf:炭素原子数1~6のペルフルオロアルキル基、又はRf1ORf2-で表される炭素原子数2~40の1価の基(なお、Rf1は、炭素原子数1~6のペルフルオロアルキル基であり、Rf2は炭素-炭素原子間にエーテル性酸素原子を有してもよいペルフルオロアルキレン基である。)、
Q1:炭素原子数1~10のフッ素原子を含まない2価の有機基、
RH1:炭素原子数1~6の1価の炭化水素基、
X1、及びX2:加水分解性基、
p:0、1又は2。
ただし、式(c-1)中の3個のX1、式(c-2)中の(4-p)個のX2、及びp個のRH1は、それぞれ互いに異なっていても同一であってもよい。) A positive photosensitive resin composition comprising an alkali-soluble resin (A), a photosensitive agent (B) and an ink repellent agent (C),
Partial hydrolysis of a mixture in which the ink repellent agent (C) includes a hydrolyzable silane compound represented by the following formula (c-1) and a hydrolyzable silane compound represented by the following formula (c-2) A positive photosensitive resin composition comprising a condensate and having a fluorine atom content of 10 to 55% by mass in the ink repellent agent (C).
(The symbols in formulas (c-1) and (c-2) are as follows.
R f : a perfluoroalkyl group having 1 to 6 carbon atoms, or a monovalent group having 2 to 40 carbon atoms represented by R f1 OR f2 — (wherein R f1 is a perfluorocarbon having 1 to 6 carbon atoms) An alkyl group, and R f2 is a perfluoroalkylene group which may have an etheric oxygen atom between carbon-carbon atoms).
Q 1 : a divalent organic group not containing a fluorine atom having 1 to 10 carbon atoms,
R H1 : a monovalent hydrocarbon group having 1 to 6 carbon atoms,
X 1 and X 2 : hydrolyzable groups,
p: 0, 1 or 2.
However, three X 1 s in the formula (c-1), (4-p) X 2 s in the formula (c-2), and p RH 1 s may be the same or different from each other. There may be. ) - ポジ型感光性樹脂組成物における全固形分中の前記アルカリ可溶性樹脂(A)の含有量が、10~90質量%である請求項1に記載のポジ型感光性樹脂組成物。 The positive photosensitive resin composition according to claim 1, wherein the content of the alkali-soluble resin (A) in the total solid content in the positive photosensitive resin composition is 10 to 90% by mass.
- ポジ型感光性樹脂組成物における全固形分中の前記感光剤(B)の含有量が、0.1~50質量%である請求項1又は2に記載のポジ型感光性樹脂組成物。 The positive photosensitive resin composition according to claim 1 or 2, wherein the content of the photosensitive agent (B) in the total solid content of the positive photosensitive resin composition is 0.1 to 50% by mass.
- ポジ型感光性樹脂組成物における全固形分中の前記撥インク剤(C)の含有量が、0.01~10質量%である請求項1~3のいずれか1項に記載のポジ型感光性樹脂組成物。 The positive photosensitive resin composition according to any one of claims 1 to 3, wherein the content of the ink repellent agent (C) in the total solid content of the positive photosensitive resin composition is 0.01 to 10% by mass. Resin composition.
- 前記撥インク剤(C)の数平均分子量(Mn)が、500以上1,000,000未満である請求項1~4のいずれか1項に記載のポジ型感光性樹脂組成物。 The positive photosensitive resin composition according to any one of claims 1 to 4, wherein the number average molecular weight (Mn) of the ink repellent agent (C) is 500 or more and less than 1,000,000.
- 前記アルカリ可溶性樹脂(A)がノボラック型フェノール樹脂である、請求項1~5のいずれか1項に記載のポジ型感光性樹脂組成物。 The positive photosensitive resin composition according to any one of claims 1 to 5, wherein the alkali-soluble resin (A) is a novolac type phenol resin.
- 前記感光剤(B)がキノンジアジド基を有する化合物である、請求項1~6のいずれか1項に記載のポジ型感光性樹脂組成物。 The positive photosensitive resin composition according to claim 1, wherein the photosensitive agent (B) is a compound having a quinonediazide group.
- 前記混合物が、さらに下式(c-3)で表される加水分解性シラン化合物を含む、請求項1~7のいずれか1項に記載のポジ型感光性樹脂組成物。
(式(c-3)中の記号は、以下の通りである。
Y:水素原子が、ハロゲン原子、炭素原子数1~3のアルキル基、炭素原子数2~3のアルケニル基又はニトロ基で置換されていてもよいフェニル基、
Q2:単結合又は2価の有機基、
RH2:炭素原子数1~6の1価の炭化水素基、
X3:加水分解性基、
q:1又は2、
r:0又は1であり、q+rが1又は2となる数。
ただし、q個のY、Q2、及びY-Q2、並びに(4-q-r)個のX3は、それぞれ互いに異なっていても同一であってもよい。) The positive photosensitive resin composition according to any one of claims 1 to 7, wherein the mixture further contains a hydrolyzable silane compound represented by the following formula (c-3).
(The symbols in formula (c-3) are as follows.
Y: a hydrogen atom, a phenyl group optionally substituted by a halogen atom, an alkyl group having 1 to 3 carbon atoms, an alkenyl group having 2 to 3 carbon atoms, or a nitro group,
Q 2 : single bond or divalent organic group,
R H2 : monovalent hydrocarbon group having 1 to 6 carbon atoms,
X 3 : hydrolyzable group,
q: 1 or 2,
r: a number that is 0 or 1 and q + r is 1 or 2.
However, q pieces of Y, Q 2, and Y-Q 2, and (4-q-r) pieces of X 3 may each be the same or different from each other. ) - 溶媒(D)をさらに含む、請求項1~8のいずれか1項に記載のポジ型感光性樹脂組成物。 The positive photosensitive resin composition according to any one of claims 1 to 8, further comprising a solvent (D).
- 熱硬化剤(E)をさらに含む、請求項1~9のいずれか1項に記載のポジ型感光性樹脂組成物。 The positive photosensitive resin composition according to any one of claims 1 to 9, further comprising a thermosetting agent (E).
- 熱硬化促進剤(F)をさらに含む、請求項10に記載のポジ型感光性樹脂組成物。 The positive photosensitive resin composition according to claim 10, further comprising a thermosetting accelerator (F).
- 着色剤(G)をさらに含む、請求項1~11のいずれか1項に記載のポジ型感光性樹脂組成物。 The positive photosensitive resin composition according to any one of claims 1 to 11, further comprising a colorant (G).
- 基板表面を画素形成用の複数の区画に仕切る形に形成された隔壁であって、
請求項1~12のいずれか1項に記載のポジ型感光性樹脂組成物の硬化膜からなる隔壁。 A partition formed in a shape that partitions the substrate surface into a plurality of sections for pixel formation,
A partition comprising a cured film of the positive photosensitive resin composition according to any one of claims 1 to 12. - 基板表面に複数の画素と隣接する画素間に位置する隔壁とを有する光学素子であって、前記隔壁が請求項13に記載の隔壁で形成されている光学素子。 An optical element having a plurality of pixels and a partition located between adjacent pixels on the substrate surface, wherein the partition is formed by the partition according to claim 13.
- 前記光学素子がカラーフィルタ、TFTアレイ又は有機EL素子である、請求項14に記載の光学素子。 The optical element according to claim 14, wherein the optical element is a color filter, a TFT array, or an organic EL element.
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WO2015163379A1 (en) * | 2014-04-25 | 2015-10-29 | 旭硝子株式会社 | Negative photosensitive resin composition, partition, and optical element |
JP2016040577A (en) * | 2014-08-12 | 2016-03-24 | 東京応化工業株式会社 | Positive photosensitive resin composition and cured film |
WO2018194170A1 (en) * | 2017-04-21 | 2018-10-25 | 日産化学株式会社 | Photosensitive resin composition |
JP2018533761A (en) * | 2015-11-06 | 2018-11-15 | ローム・アンド・ハース・エレクトロニック・マテリアルズ・コリア・リミテッド | Photosensitive resin composition and cured film prepared therefrom |
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WO2024038814A1 (en) * | 2022-08-19 | 2024-02-22 | Agc株式会社 | Positive-type photosensitive resin composition, partition wall, and optical element |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004004733A (en) * | 2002-04-15 | 2004-01-08 | Sharp Corp | Radiation sensitive resin composition, method for forming patterned insulative film, active matrix substrate and flat panel display device with active matrix substrate, and manufacturing method of flat panel display device |
WO2007132890A1 (en) * | 2006-05-16 | 2007-11-22 | Nissan Chemical Industries, Ltd. | Positive photosensitive resin composition and porous film obtained therefrom |
WO2010013816A1 (en) * | 2008-08-01 | 2010-02-04 | 旭硝子株式会社 | Negative working photosensitive composition, partition wall for optical element using the nagative working photosensitive composition, and optical element comprising the partition wall |
JP2010107693A (en) * | 2008-10-30 | 2010-05-13 | Chisso Corp | Positive photosensitive composition, cured film obtained from same, and display element having cured film |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007132892A1 (en) * | 2006-05-16 | 2007-11-22 | Nissan Chemical Industries, Ltd. | Positive photosensitive resin composition containing siloxane compound |
JP5173543B2 (en) | 2008-04-08 | 2013-04-03 | 東京応化工業株式会社 | Positive photosensitive resin composition |
JP5397152B2 (en) * | 2009-10-22 | 2014-01-22 | Jsr株式会社 | Positive radiation-sensitive composition, interlayer insulating film and method for forming the same |
-
2013
- 2013-03-07 WO PCT/JP2013/056368 patent/WO2013133392A1/en active Application Filing
- 2013-03-07 CN CN201380013041.8A patent/CN104160336B/en active Active
- 2013-03-07 KR KR1020147024842A patent/KR101998447B1/en active IP Right Grant
- 2013-03-07 JP JP2014503551A patent/JP6098635B2/en active Active
- 2013-03-08 TW TW102108258A patent/TWI575320B/en active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004004733A (en) * | 2002-04-15 | 2004-01-08 | Sharp Corp | Radiation sensitive resin composition, method for forming patterned insulative film, active matrix substrate and flat panel display device with active matrix substrate, and manufacturing method of flat panel display device |
WO2007132890A1 (en) * | 2006-05-16 | 2007-11-22 | Nissan Chemical Industries, Ltd. | Positive photosensitive resin composition and porous film obtained therefrom |
WO2010013816A1 (en) * | 2008-08-01 | 2010-02-04 | 旭硝子株式会社 | Negative working photosensitive composition, partition wall for optical element using the nagative working photosensitive composition, and optical element comprising the partition wall |
JP2010107693A (en) * | 2008-10-30 | 2010-05-13 | Chisso Corp | Positive photosensitive composition, cured film obtained from same, and display element having cured film |
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---|---|---|---|---|
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CN106462069A (en) * | 2014-04-25 | 2017-02-22 | 旭硝子株式会社 | Negative photosensitive resin composition, partition, and optical element |
JPWO2015163379A1 (en) * | 2014-04-25 | 2017-04-20 | 旭硝子株式会社 | Negative photosensitive resin composition, partition and optical element |
WO2015163379A1 (en) * | 2014-04-25 | 2015-10-29 | 旭硝子株式会社 | Negative photosensitive resin composition, partition, and optical element |
JP2016040577A (en) * | 2014-08-12 | 2016-03-24 | 東京応化工業株式会社 | Positive photosensitive resin composition and cured film |
JP2018533761A (en) * | 2015-11-06 | 2018-11-15 | ローム・アンド・ハース・エレクトロニック・マテリアルズ・コリア・リミテッド | Photosensitive resin composition and cured film prepared therefrom |
WO2018194170A1 (en) * | 2017-04-21 | 2018-10-25 | 日産化学株式会社 | Photosensitive resin composition |
JPWO2018194170A1 (en) * | 2017-04-21 | 2020-05-14 | 日産化学株式会社 | Photosensitive resin composition |
JP7041402B2 (en) | 2017-04-21 | 2022-03-24 | 日産化学株式会社 | Photosensitive resin composition |
WO2021177252A1 (en) * | 2020-03-04 | 2021-09-10 | Agc株式会社 | Positive-type photosensitive resin composition |
KR20220150301A (en) | 2020-03-04 | 2022-11-10 | 에이지씨 가부시키가이샤 | Positive photosensitive resin composition |
WO2022168732A1 (en) * | 2021-02-03 | 2022-08-11 | 日産化学株式会社 | Positive-acting photosensitive resin composition |
WO2022181351A1 (en) * | 2021-02-24 | 2022-09-01 | 東レ株式会社 | Multilayer body, display device and method for producing display device |
WO2024038814A1 (en) * | 2022-08-19 | 2024-02-22 | Agc株式会社 | Positive-type photosensitive resin composition, partition wall, and optical element |
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