WO2013131508A1 - Dispositif et procédé de revêtement par plasma d'éléments structuraux cylindriques de forme allongée - Google Patents

Dispositif et procédé de revêtement par plasma d'éléments structuraux cylindriques de forme allongée Download PDF

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Publication number
WO2013131508A1
WO2013131508A1 PCT/DE2013/000113 DE2013000113W WO2013131508A1 WO 2013131508 A1 WO2013131508 A1 WO 2013131508A1 DE 2013000113 W DE2013000113 W DE 2013000113W WO 2013131508 A1 WO2013131508 A1 WO 2013131508A1
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WO
WIPO (PCT)
Prior art keywords
chamber
components
transfer chamber
shut
transfer
Prior art date
Application number
PCT/DE2013/000113
Other languages
German (de)
English (en)
Inventor
Stefan Laure
Original Assignee
Dr. Laure Plasmatechnologie Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr. Laure Plasmatechnologie Gmbh filed Critical Dr. Laure Plasmatechnologie Gmbh
Priority to DE112013001298.7T priority Critical patent/DE112013001298A5/de
Priority to CN201380021587.8A priority patent/CN104254639A/zh
Publication of WO2013131508A1 publication Critical patent/WO2013131508A1/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C03B19/1423—Reactant deposition burners
    • C03B19/143—Plasma vapour deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32394—Treating interior parts of workpieces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32743—Means for moving the material to be treated for introducing the material into processing chamber

Definitions

  • the invention relates to a device and a method for plasma coating of elongated, cylindrical components, in particular of tubular components.
  • the functionality and the properties of the surface can be selectively influenced and changed with an appropriate choice of the plasma parameters such as pressure, temperature and plasma composition.
  • Methods are known in the art for treating, modifying or coating a surface of any material that uses particle or energy streams from a plasma. These include, but are not limited to, plasma spraying, arc plasma melting, plasma heat treatment, plasma CVD, and plasma cleaning.
  • the modification of the functionality of workpiece surfaces takes place by targeted attack of plasma particles. This can be done by interaction with particles having certain chemical properties or by the action of radiation emitted by the plasma.
  • the coating material is added by supplying energy in the vapor or gaseous state and deposited from the vapor or gas phase on the component.
  • a plasma torch is used to generate a plasma.
  • a flowing gas is ionized by an arc and heated to temperatures of 10,000 to 20,000 K.
  • the flowing gas is ionized by applying a high frequency electromagnetic field to a cylindrical coil.
  • a cylindrical discharge vessel which consists of a
  • Bestness whyskopiel Dielectric material is made, creates a relatively dense plasma with high energy density.
  • plasma temperatures of up to 20,000 K can be achieved.
  • the arc plasma torch and the radiofrequency plasma torch are plasma generating devices that produce a directional free jet.
  • methods and process variants such as PVD Physical Vapor Deposition and CVD Chemical Vapor Deposition, which deposit a coating from the gas phase on a workpiece.
  • the coating material is added to the coating space in the form of a source.
  • components or workpieces can be coated with certain materials, cleaned on their surface, activated or processed.
  • the processing takes place in a vacuum.
  • the component is introduced into a process chamber. This is locked against the atmosphere and under
  • the plasma occurs only in a narrow range and does not form on elongated, cylindrical components over the entire component.
  • the plasma jet must either be passed over the component, or the component must be moved relative to the plasma jet. In both cases, expensive devices are necessary to move the component and the plasma jet during the plasma treatment relative to each other.
  • the invention has for its object to provide an apparatus and a method for plasma coating of elongated cylindrical components available, with which a uniform coating over the entire length and the entire circumference can be applied to the component, with a little effort Time and energy can be operated, which has short cycle times and allows the simultaneous coating of multiple components.
  • This object is achieved by a device having the features of the claim
  • the device is characterized in that a first and a second storage chamber are provided.
  • the first storage chamber is arranged between the process chamber and a first transfer chamber.
  • the second storage chamber is between the process chamber and a second
  • the device is characterized in that in the first and second transfer chamber and in the first and second storage chamber, a transport device is provided which at least two components at the same time and parallel to each other feeds the process chamber and discharges from the process chamber.
  • the plasma torch provides a plasma jet that allows simultaneous coating of the supplied components.
  • the components are replaced by the transport direction in the two storage chambers conveyed in the transport direction and rotated about its own axis. In this way, a coating of the supplied components takes place on its entire surface. It can thus be coated at the same time several components.
  • the first and second transfer chambers and the first and second storage chambers are elongate. They are all aligned with their longitudinal direction in the transport direction of the transport device.
  • new components can already be conveyed into the first transfer chamber during the coating of components in the process chamber.
  • several batches of components may be present in the apparatus simultaneously, for example, a first batch in the second transfer chamber, a second batch in the process chamber and the first and second storage chambers, and a third batch in the first transfer chamber.
  • the batch is the entirety of the components conveyed at one time into the device.
  • the components of a batch are all at the same time at a position in the device relative to the transport direction of the transport device.
  • the transport device and the structure of the device with several transfer chambers and multiple storage chambers several components can be coated at the same time. It is achieved a high throughput. The number of components coated with the device per unit time is increased. This ensures short cycle times.
  • no transport device is arranged in the process chamber.
  • the process chamber is in
  • Transport direction shorter than the elongated components to be coated. Preferably, it is less than half as long in the transport direction as the to coating components.
  • the storage chambers adjacent to the process chamber are equipped with a transport device. These transport devices ensure the transport of the components through the process chamber. If the transport device is arranged exclusively outside the process chamber, contamination of the transport device with the
  • the transitions from the first storage chamber to the process chamber and from the process chamber to the second storage chamber are free from a shut-off device.
  • the evacuation of the three chambers takes place with a pump system which is connected, for example, to the process chamber.
  • shut-off devices are arranged.
  • shut-off devices at the ends of the first and second transfer chambers facing away from the process chamber are also referred to as outer shut-off devices. They close the device on the atmosphere side.
  • the shut-off devices at the ends of the first and second transfer chambers facing the process chamber are referred to as inner shut-off devices.
  • the two transfer chambers are evacuated by an additional pump system or by the same pump system as the process chamber, the first and second storage chambers. If two pump systems are provided, then the pump system, which evacuates the process chamber and the first and second storage chambers, can be the first
  • Pump system and the pump system, which evacuates the two transfer chambers are referred to as the second pump system.
  • the two transfer chambers with shut-off devices at their ends form a vacuum lock for introducing and removing components in the
  • shutters are arranged on the shut-off devices at the ends of the first and second transfer chamber.
  • the diaphragms may be arranged in the first and second transfer chambers and / or in the first and second storage chambers.
  • the apertures are adapted to the components. Its opening cross section is only slightly larger than the cross section of the conveyed through them components, for example, 5 to 20% larger.
  • the orifices counteract pressure equalization between areas of different pressure as long as the shut-off devices are in the open position.
  • the shut-off devices are in the open position when a component is conveyed into or out of the first or second transfer chamber. Since the opening cross section of the panels is only slightly larger than the cross section of the components, can be carried out during transport of the components in the first or second transfer chamber into or out of this pressure equalization only over the slot between components and panels.
  • the capacity of the device of DE 10 2007 035 518 A1 can be increased by at least a factor of three and the economy can be increased by a factor of 5 to 10.
  • the capacity and economy of the device can also be increased by optimizing the film growth rate. This is done by a modification of the flow field, which by the incorporation of additional components in the plasma torch or the
  • Process chamber can be effected.
  • the process chamber in the transport direction is shorter than the components to be coated.
  • the first and second transfer chambers are longer in the transport direction than the components to be coated.
  • the first and second storage chambers may be longer than the components.
  • the transport device is equipped with a plurality of roller units.
  • Each roller unit has a roller bearing with at least three rollers arranged side by side on the roller bearing. The axes of rotation of the three rollers of a roller unit are parallel and offset from one another.
  • the angle between the axes of rotation of the rollers and the transport direction of the components is greater than 0 ° and smaller than 90 °. Because of this angle, the rollers practice on the
  • Components to a force that is composed of a first component in the longitudinal direction of the components and a second component perpendicular to the longitudinal direction of the components.
  • the first component ensures an acceleration of the components in their longitudinal direction and thus in the transport direction.
  • the second component ensures rotation of the components about their longitudinal axis. Is the
  • Reel unit rotatably mounted on a holder.
  • the angle between the axes of rotation of the rollers and the transport direction of the components is adjustable.
  • the transport device is equipped with a drive and a gear that drive all the rollers of the roller units at the same rotational speed.
  • an individual drive for example a stepper motor, can also be provided for each roller unit.
  • the device is equipped with a pre-module upstream of the first transfer chamber.
  • the pre-module is equipped with a transport device which transports at least two components at the same time into the first transfer chamber.
  • the pre-module is equipped with at least two raisable and lowerable supports for at least two components.
  • the components can be stored on the supports. By lowering the supports, the components are placed on the transport system.
  • the transport system According to a further advantageous embodiment of the invention is the
  • the post-module is equipped with a transport device which transports at least two components out of the second transfer chamber at the same time.
  • the post-module is equipped with liftable and lowerable supports for at least two components.
  • the components can be lifted by the transport device and fed to a further processing.
  • it is equipped on the first transfer chamber or on the first storage chamber with a first measuring device, which detects at least one physical property of the components during transport. For example, deviations from a given geometry or the reflection of the
  • the device is equipped on the second transfer chamber or on the second storage chamber with a second measuring device, which preferably detects the same physical properties of the components as the first measuring device.
  • a second measuring device which preferably detects the same physical properties of the components as the first measuring device.
  • the acquisition of measured values serves for quality assurance and quality control.
  • information about the coating quality can be obtained. The measurement takes place during the transport of the components, so that over the entire
  • the first and the second measuring device are each equipped with at least one light source and in each case with at least one light sensor which detects the light of the light source reflected by a component. That's how it works
  • Reflection behavior of the components detected Used in plasma coating in the process chamber applied an anti-reflective layer, the quality of the layer can be determined based on the reflection measurement.
  • the process chamber is equipped with a mixing chamber in which a in the
  • the mixing chamber is equipped with a curved tube through which a
  • Coating material is supplied.
  • the coating material is preferably introduced outside the plasma jet and at the edge of the plasma jet.
  • the coating material introduced at the edge of the plasma is swirled by the plasma jet and thereby mixed into the plasma jet.
  • At least one bluff body is arranged in the process chamber.
  • Plasma jet plasma torch is directed on a surface of a bluff body.
  • the flow field can be influenced and optimized.
  • the bluff body consists of a material which is inert to the plasma jet.
  • Evacuating the first transfer chamber to a pressure corresponding to that of a subsequent to the first transfer chamber first storage chamber and a at the storage chamber arranged process chamber is substantially identical
  • Opening internal shut-off devices which are arranged between the first transfer chamber and a first storage chamber,
  • the method thus offers not only the advantage that at least two components are coated simultaneously, but also that during the coating of the component preceding components can be discharged from the device and subsequent components can be introduced into the device. It Thus, three groups or batches of components can be located in the device simultaneously.
  • a third component and a fourth component are transported into the first transfer chamber after the first transfer chamber has been ventilated.
  • the first transfer chamber is thus immediately re-equipped with components after the preceding components were conveyed into the first storage chamber and the shut-off device between the first transfer chamber and the first storage chamber is again in the closed position.
  • the evacuation of the components equipped with the first transfer chamber and the coating of the previous components in the process chamber can thus take place at the same time.
  • At least one physical property of the components is detected before the plasma coating.
  • the same physical property of the components is detected a second time after the plasma coating.
  • the measured values are compared with each other to evaluate the quality of the plasma coating.
  • Information about the coating can be obtained from the measured values. In this way, a quality control takes place.
  • the reflection behavior is detected.
  • the components are irradiated with light.
  • the reflected light from the components is detected and evaluated.
  • the quantity of the reflected light is detected.
  • the wavelength of the reflected light can also be detected.
  • the irradiation of the components can be done with white light or with monochromatic light of different wavelengths or wavelength ranges.
  • Figure 2 device according to Figure 1 in a view from the front in
  • FIG. 3 detail from FIG. 3,
  • FIG. 4 shows a device according to FIG. 1 in a view from the side
  • FIG. 5 device according to FIG. 1 in a view from above
  • Figure 6 process chamber, first and second storage chamber and
  • FIG. 7 shows the first transfer chamber of the device according to FIG. 1,
  • FIG. 8 second transfer chamber of the device according to FIG. 1,
  • FIG. 9 pre-module of the device according to FIG. 1,
  • FIG. 10 postmodulation of the device according to FIG. 1,
  • FIG. 11 process chamber with plasma generator
  • FIG. 12 shows a transport device of the device according to FIG. 1 in a perspective view from above, Figure 14 Transport device of the device according to Figure 1 in a perspective view from below, Figure 15 transport carriage.
  • a device for plasma coating of elongated cylindrical components is shown in various views.
  • the device has a process chamber 1, a first storage chamber 2, a second storage chamber 3, a first transfer chamber 4, a second transfer chamber 5, a first pump system 6, a pre-module 7 and a post-module 8 and a second pump system 36.
  • the first transfer chamber 4 On the side facing the pre-module 7, the first transfer chamber 4 is equipped with a first shut-off device 9.
  • the first transfer chamber 4 is equipped with a second shut-off device 10.
  • At the second storage chamber 3 side facing the second transfer chamber 5 is equipped with a third shut-off device 11.
  • the second transfer chamber 5 is equipped with a fourth shut-off device 12.
  • the first shut-off device and the fourth shut-off device seal the device against the atmosphere.
  • the shut-off devices 9, 10, 11, 12 are slides for the vacuum technology.
  • Between the first storage chamber 2 and the process chamber 1 no shut-off device is provided.
  • Between the process chamber 1 and the second storage chamber 3 also no shut-off device is provided.
  • the process chamber 1 and the first and second storage chambers 2, 3 are evacuated by the first pump system 6 and adjusted to a predetermined pressure. If the pressure in the process chamber 1 and the first and second storage chamber 2, 3 set once, it changes during the insertion and removal of components and the coating of the components only to a small extent.
  • the first and second transfer chambers 4, 5 are evacuated by a second pumping system 36.
  • the second pump system is connected via a connection 23 to the first transfer chamber 4 and via a connection 24 to the second transfer chamber 5.
  • the two connections are connected via pipes or hoses to the second pump system 36.
  • a plasma burner is placed on the process chamber 1 from above. It is flanged to the upwardly facing opening.
  • the plasma torch is shown in FIG. He can be lifted for maintenance of the process chamber 1.
  • Figures 2 and 3 show the device in a view corresponding to the viewing direction of the transport direction of the components.
  • the components 13, 14 are tubular components or tubular components with a circular cross-section.
  • the device is shown in a side and top view. For better clarity, the pump system 6 is not shown.
  • the table 16 for the process chamber the table 17 for the first storage chamber 2, the table 18 for the second storage chamber 3, the table 19 for the first transfer chamber 4, the table 20 for the second transfer chamber 5, the table 21 for the pre-module 7 and the table 22 for the post-module 8 shown.
  • the tables 16, 17, 18, 19, 20, 21, 22 individual components of the device are arranged.
  • the tables are movable. This facilitates the maintenance and repair of the device and simplifies the removal of individual components and replacement by other components.
  • FIG. 4 also shows the first measuring device 49 and the second measuring device 50.
  • the first measuring device 49 is arranged on the first transfer chamber 4. With it, the components are irradiated with white light. The reflected light from the components is detected and evaluated.
  • the second measuring device 50 is arranged. The second measuring device also irradiates the components with white light and detects the light reflected by the components. With the first measuring device 49, the components are measured before the plasma coating. With the second measuring device 50, the components are measured after the plasma coating.
  • FIG. 6 shows the process chamber 1 with the first and second storage chambers 2, 3, the associated tables 16, 17, 18 and the first pump system 6 and the second pump system 36. Visible are also the second and third shut-off device 10, 11.
  • the second and third shut-off device 10 11
  • Process chamber cooled on its outside, for example with water. In this way it is prevented that the process chamber and the to the Process chamber connected transfer chambers 4, 5 to heat too much.
  • the cooling is not visible in the drawing. It can also be provided an internal cooling, which is part of the flow guide. It causes a deflection of the plasma jet on the components to be coated.
  • FIG. 7 shows the first transfer chamber 4 with its table 18 and the first shut-off device 9. Visible in this illustration is also the port 23, via which the first transfer chamber 4 is connected to the second pump system 36.
  • FIG. 8 shows the second transfer chamber 5 with the associated table 20, the fourth shut-off device 12 and a connection 24, via which the second transfer chamber 5 is connected to the second pump system 36.
  • FIG. 9 shows the pre-module 7 with the associated table 21.
  • the pre-module 7 is equipped with a transport device and with raisable and lowerable supports 25.
  • the transport device has five roller units 26 with a roller bearing for each of three rollers 27, 28, 29.
  • the roller units 26 are movably arranged on a bracket 30 formed as a plate. A more detailed representation of the roll units is in
  • FIG. 10 shows the postmodule 8 with the associated table 22.
  • the Nachmodul 8 is just like the pre-module 7 equipped with a transport device.
  • the transport device essentially corresponds to the transport device of the premodule shown in FIG.
  • the post-module 8, just like the pre-module 7, can be equipped with liftable and lowerable supports. These requirements are not shown in FIG. The subsidized with the transport device from the second transfer chamber
  • Components 13, 14 can be lifted with the movable supports of the rollers of the transport device.
  • FIG. 11 shows the process chamber 1 with a plasma burner 37, a tubular bluff body 38 and the two components 13, 14.
  • the bluff body 38 is arranged stationarily in the process chamber 1.
  • the components 13, 14 are transported by the transport means of the first and second storage chambers.
  • the plasma jet 39 of the plasma torch 37 generates a plasma cloud 40 when it strikes the bluff body 38, which has a positive effect on the coating.
  • the plasma torch may be, for example, a coaxial plasma torch with tungsten cathode and water-cooled copper anode, which is provided with a tantalum oxide inner layer in the current-carrying region. It can be designed for the production of an excited oxygen / argon mixture. Oxygen is supplied in the hot region of the plasma jet. The special flow guidance of the plasma jet prevents contact between oxygen and the hot tungsten cathode.
  • a coating material for example hexamethyldisiloxane HMDSO, is introduced into the process chamber through a curved tube and fed to the plasma jet.
  • a feed device for the coating material further comprises a dosing unit and an evaporator unit. If the coating material is fed into the plasma torch, compact layers can be produced. If the coating material is supplied outside the plasma torch, porous layers are produced.
  • An inductive plasma torch with a water-cooled discharge tube of dielectric material enclosed by an induction coil can also be used to produce a pure highly excited oxygen plasma.
  • the oxygen supply takes place azimuthally along the discharge tube wall.
  • the coating material is fed axially into the plasma torch, directly into the discharge zone. In this case, a compact layer is created. If the coating material is fed outside the plasma torch into the plasma jet, a porous layer is formed.
  • the transport device is shown in perspective, which transports the tubular components. It is the transport device that is part of the pre-module 7 shown in FIG.
  • a corresponding transport device is arranged in the first and second transfer chamber and the first and second storage chamber.
  • the transport device has a plurality of roller units 26.
  • Each roller unit is provided with a roller bearing 33 in which three rollers 27, 28, 29 are rotatably arranged.
  • the rollers 27, 28, 29 at least partially over above the roller bearing 33, so that cylindrical components 13, 14 can rest on the rollers 27, 28, 29.
  • On the two outer rollers 27 and 29 are each only one component 13, 14.
  • roller bearing 33 is arranged on a bracket 30 formed as a plate.
  • a drive motor 34 and a drive shaft 35 are arranged on the side facing away from the rollers of the holder 30, a drive motor 34 and a drive shaft 35 are arranged. Via a gear 36, the torque of the drive motor is transmitted from the drive shaft 35 to the rollers 27, 28, 29. If more than two components are to be transported side by side at the same time, the roller units must be extended accordingly with additional rollers.
  • All roller units 26 are rotatable about an axis perpendicular to the plate 30 extending axis, so that the angle at which the axis of rotation of the rollers 27, 28,
  • the angle is greater than 0 ° and less than 90 °. Thanks to this angle, the component during transport describes a helical movement resulting from a translational movement in the direction of the longitudinal axis of the component and a rotational movement about the component
  • the process chamber 1 is evacuated.
  • the first, second, third and fourth shut-off device are closed.
  • the necessary for the plasma coating pressure for example, 10 to 5,000 Pa is quickly adjusted due to the small volume of the process chamber 1.
  • the plasma torch is activated and ignited the plasma in the process chamber 1.
  • the plasma composition necessary for the coating is set.
  • the supports 25 are simultaneously lowered, so that the components 13, 14 lie on the rollers 27, 28, 29 of the transport device.
  • the first shut-off device 9 is open.
  • the pump system 36 of the transfer chambers 4, 5 is separated by a respective valve from the first and the second transfer chamber.
  • the components 13, 14 are conveyed by the transport device into the first transfer chamber 4. This is done by means of Transport device of the premodule 7 and the transport device of the first transfer chamber 4.
  • When retracting the components in the first transfer chamber at least one physical property of the components is determined. This is done with the first measuring device 49.
  • the first shut-off device When the components 13, 14 are completely received in the first transfer chamber 4, the first shut-off device is closed and the transfer chamber 4 evacuated until at least almost the same pressure in the transfer chamber as in the first and second storage chamber 2, 3 and the process chamber. 1 has set. As soon as this pressure is reached, the second shut-off device 10 is opened. The components 13, 14 are transported into the first storage chamber 2. As soon as the components 13, 14 have completely left the first transfer chamber 4, the second shut-off device 10 is closed again. Subsequently, the first transfer chamber 4 can be ventilated and the first shut-off device 9 can be opened. Other components can be accommodated in the first transfer chamber 4.
  • the components 13, 14 are transported from the first storage chamber 2 into the process chamber 1 and into the second storage chamber 3. In the process chamber 1, they are subjected to a plasma coating.
  • the fourth shut-off device 12 is closed and the second transfer chamber 5 is evacuated until at least almost the same pressure as in the first and second storage chambers 2, 3 and the process chamber 1 has set in the second transfer chamber 5. Then, the third shut-off device 11 is opened. The coated components 13, 14 are transported into the second transfer chamber 5. As soon as the components 13, 14 are completely accommodated in the second transfer chamber, the third shut-off device 11 is closed again. The process chamber 1 is now ready for the plasma coating of the following components.
  • the fourth transfer chamber 5 is ventilated.
  • the fourth shut-off device 12 is opened and the components 13, 14 are conveyed with the transport device from the second transfer chamber 5 to the post-module 8. During transport from the second transfer chamber 5 to the post module 8, the same physical property is detected by the components 13, 14 as during transport from
  • FIG. 14 shows a transport slide 41 with which, for example, flat components, in particular plates, can be transported through the device according to FIGS.
  • the transport carriage has two rollers 46, 47 rotatably mounted in bearing blocks 42, 43, 44. Each roller 46, 47 are associated with two bearing blocks. Of the four bearing blocks only three bearing blocks 42, 43, 44 can be seen in the drawing. The fourth bearing block is hidden.
  • the rollers 46, 47 are freely rotatable about their longitudinal axes.
  • the bearing blocks are arranged on a plate 48.
  • the rollers can be placed on the rollers 27, 28, 29 of the transport device according to FIGS. 12 and 13. By a rotation of the rollers 27, 28, 29, the rollers are driven for rotation. Furthermore, the transport carriage is driven to a translational movement in the transport direction of the transport device. there On the plate 48 arranged components can be transported through the device.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Analytical Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Vapour Deposition (AREA)
  • Plasma Technology (AREA)

Abstract

L'invention concerne un dispositif et un procédé de revêtement par plasma d'éléments structuraux cylindriques de forme allongée. Le dispositif comporte : au moins une chambre de traitement (1) ; une première chambre de stockage (2) de forme allongée et une deuxième chambre de stockage (3) de forme allongée, lesquelles sont reliées à la chambre de traitement (1) sans dispositifs de blocage ; une première chambre de transfert (4) de forme allongée, laquelle est reliée à la première chambre de stockage (2), et une deuxième chambre de transfert (5), laquelle est reliée à la deuxième chambre de stockage (3) ; des dispositifs de blocage (9, 10, 11, 12) aux deux extrémités des première et deuxième chambres de transfert (4, 5) ; au moins un système de pompage (6, 36) ; un dispositif de transport dans les première et deuxième chambres de transfert (4, 5) et dans les première et deuxième chambres de stockage (2, 3), laquelle amène au moins deux éléments structuraux (13, 14) en même temps et parallèlement l'un à l'autre à la chambre de traitement (1) et les évacue de la chambre de traitement (1) ; et au moins un chalumeau au plasma dans ou au niveau de la chambre de traitement (1).
PCT/DE2013/000113 2012-03-05 2013-03-05 Dispositif et procédé de revêtement par plasma d'éléments structuraux cylindriques de forme allongée WO2013131508A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE112013001298.7T DE112013001298A5 (de) 2012-03-05 2013-03-05 Vorrichtung und Verfahren zur Plasmabeschichtung von länglichen zylindrischen Bauteilen
CN201380021587.8A CN104254639A (zh) 2012-03-05 2013-03-05 用于对细长的、圆柱形的构件进行等离子涂覆的装置和方法

Applications Claiming Priority (2)

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DE102012004155.1 2012-03-05
DE102012004155 2012-03-05

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WO2013131508A1 true WO2013131508A1 (fr) 2013-09-12

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016156728A1 (fr) * 2015-03-31 2016-10-06 Coating Plasma Industrie Installation pour le traitement d'objets par plasma, utilisation de cette installation et procédé de mise en oeuvre de cette installation

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007035518A1 (de) 2006-07-26 2008-01-31 Dr. Laure Plasmatechnologie Gmbh Vorrichtung zur Plasmabeschichtung von länglichen, zylindrischen Bauteilen

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3904503A (en) * 1974-05-31 1975-09-09 Western Electric Co Depositing material on a substrate using a shield
US4814056A (en) * 1987-06-23 1989-03-21 Vac-Tec Systems, Inc. Apparatus for producing graded-composition coatings

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007035518A1 (de) 2006-07-26 2008-01-31 Dr. Laure Plasmatechnologie Gmbh Vorrichtung zur Plasmabeschichtung von länglichen, zylindrischen Bauteilen

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016156728A1 (fr) * 2015-03-31 2016-10-06 Coating Plasma Industrie Installation pour le traitement d'objets par plasma, utilisation de cette installation et procédé de mise en oeuvre de cette installation
US10903058B2 (en) 2015-03-31 2021-01-26 Coating Plasma Industrie Apparatus for treating objects with plasma, use of this apparatus and method of using this apparatus

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DE112013001298A5 (de) 2014-12-31
CN104254639A (zh) 2014-12-31

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