WO2013130064A1 - Memristor with channel region in thermal equilibrium with containing region - Google Patents
Memristor with channel region in thermal equilibrium with containing region Download PDFInfo
- Publication number
- WO2013130064A1 WO2013130064A1 PCT/US2012/027101 US2012027101W WO2013130064A1 WO 2013130064 A1 WO2013130064 A1 WO 2013130064A1 US 2012027101 W US2012027101 W US 2012027101W WO 2013130064 A1 WO2013130064 A1 WO 2013130064A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- region
- memristor
- channel region
- contact
- channel
- Prior art date
Links
- 150000002500 ions Chemical class 0.000 claims abstract description 4
- 239000002178 crystalline material Substances 0.000 claims abstract description 3
- 238000000034 method Methods 0.000 claims description 7
- 238000000151 deposition Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 5
- 229910044991 metal oxide Inorganic materials 0.000 claims description 4
- 150000004706 metal oxides Chemical class 0.000 claims description 4
- 239000006104 solid solution Substances 0.000 claims description 4
- 230000005684 electric field Effects 0.000 claims description 3
- 238000000137 annealing Methods 0.000 claims description 2
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 description 5
- 230000015654 memory Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/24—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies
- H10N70/245—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies the species being metal cations, e.g. programmable metallization cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/24—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/20—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels
- H10B43/23—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B43/27—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/041—Modification of switching materials after formation, e.g. doping
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/041—Modification of switching materials after formation, e.g. doping
- H10N70/043—Modification of switching materials after formation, e.g. doping by implantation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/828—Current flow limiting means within the switching material region, e.g. constrictions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/883—Oxides or nitrides
- H10N70/8833—Binary metal oxides, e.g. TaOx
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/80—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
Definitions
- a memristor comprises a conducting channel disposed between two contacts.
- a large number of memristors may be fabricated in a crossbar configuration.
- Memristors offer non-volatile and multiple-state data storage. They are stackabie in three dimensions and compatible with CMOS technology.
- Memristors fabricated of materials such as oxides of tantalum have shown high endurance, in some cases exceeding 10 " on-off cycles.
- Fig. ⁇ is a perspective view of an example of a memristor with, a channel, regio in. thermal equilibrium with a containing region,
- Fig. 2 is a sectional view along the line 2-2 of Fig. ⁇ .
- Fig. 3 is a sectional, view of another example of a memristor with a channel .region in thermal, equilibrium with a containing region.
- Fig. 4 is a current-voltage (1-V) curve of a memristor with a channel region in thermal equilibrium with a containing region.
- Fig. 5 is a perspective view of a crossbar configuration of memristors each having a channel region in thermal equilibrium with a containing region
- FIG. 6 is a perspective view of an example of a memristor with a cylindrical channel region in thermal equilibrium with a containing region.
- Fig. 7 is a flowchart showing an example of a method of fabricating a memristor wi th a channel region in thermal eqailibrium with a containing region.
- figs. 1 and 2 show a memristor that includes a channel region 101. having a variable concentration of mobile ions and a containing region of stoichiometric crystalline material 103, containing and in thermal equilibrium with the channel region.
- the channel region 101 is shown as generally cylindrical in shape, and the containing region 103 is shown as generally rectangular.
- these shapes are not critical as will he discussed presently.
- thermodynaraicaily stable means the channel, region and the containing .region -are thermodynaraicaily stable with respect to each other. In other words, they do not react with each other chemically even at elevated temperatures.
- the channel region may be fon.ned of an material that works as a conducting channel in a memristor system.
- the channel region may comprise a core and a gradient region.
- the channel region comprises a bistable metal-oxide solid solution and an amorphous oxide phase.
- the containing region may consist of any insulating phase that is in thermal equilibrium with the channel region.
- the channel region 101 comprises a metal-oxide s l d solution of Ta(O) and an amorphous oxide TaO s
- the containing region comprises stoichiometric crystalline ⁇ 1 ⁇ 2 ⁇ 5.
- Other material systems may be used.
- An example of a memristor fabricated, of hafnium includes a channel region of a metai-oxide solid solution of Hf(0) and an amorphous oxide MK) K , and, in thermal equilibrium with the channel region, a containing region of stoichiometric crystalline Kh.
- Fig. 3 shows another example of a memristor with a. conducting region 301 and a containing region 303 surrounding and in thermal equilibrium with the channel region.
- the memristor is fabricated on a substrate 305.
- An insulating layer 307 is adjacent the substrate and a first contact 309 is adjacent the insulating layer.
- a second contact 31 1 is spaced apart from the first contact 309, and the containing region 303 is disposed between the contacts, in some examples an. adhesion layer 1 , which may be thinner than the other components, is disposed between the insulating layer 307 and the first contact 309.
- the substrate 305 comprises silicon and the insulating layer 30? comprises silicon dioxide.
- the first contact 309 ma comprise platinum and the second contact 31 i ma comprise tantalum. If a adhesion Saver 313 is used, it may comprise titanium.
- the memristor is about 1.00 micrometers across.
- the contacts are each about 100 to 400 nanometers thick, the containing region and channel region are between less than 7 up to about 1.8 nanometers thick, the insulating layer is about 200 nanometers thick, and the adhesion layer (if used) Is about one nanometer thick.
- Fig. 4 shows a plot of current VS voltage illustrating memristor action, for example action of a memristor with a channel region and a containing region in thermal equilibrium with the channel region.
- Fig. 5 shows an example of a crossbar ernristor structure in. which, a plurality of first contacts 501 are spaced apart from and generally parallel with each other, and a plurality of second contacts 503 are spaced apart from and generally parallel with each other, The second contacts overly the first contacts, generally at right angles.
- Memristors with containing regions 505 -surrounding channel regions 50? are formed at intersections between the first and second contacts - that is, at points where one of the second contacts crosses over one of the first contacts.
- An individual menmstor located at such an intersection may be accessed by applying appropriate control voltages or currents to those contacts that define the intersection.
- Fig. 6 shows an. example having a containing region 601 surrounding a cylindrical channel region 603.
- the cylindrical channel region 603 has a hollow interior 605 , Other shapes of the containing region, the channel, region, or both, may be used a convenient,
- FIG. 7 A example of a method of fabricating a memristor having a channel region in thermal equilibrium with a containing region is shown in Fig. 7.
- the method includes depositing ⁇ 701 ⁇ a first contact on a support structure, depositing (703) a. containing region on the first contact, depositing (705) a second contact on the containing region, and forming (707) a channel region between the contacts and in thermal equilibrium with the containing region.
- forming the channel region comprises impressing an electric potential across the contacts to create an electric field through the containing region.
- forming the channel region comprises exposing the containing region to an electron beam or an ionized beam, or vacuum annealing the containing region, or subtract roughness engineering.
- forming the channel region comprises implanting an impurity (a channel seed) in the containing region,
- Memristors with channel regions protected by containing regions with which they are in thermal equilibrium offer improved scalability, endurance, and controllability. Such memristors will better realize the potential of vastly improved memory systems compared with existing memories fabricated with other technologies.
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Thyristors (AREA)
- Micromachines (AREA)
- Semiconductor Memories (AREA)
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2012/027101 WO2013130064A1 (en) | 2012-02-29 | 2012-02-29 | Memristor with channel region in thermal equilibrium with containing region |
CN201280065140.6A CN104011863A (en) | 2012-02-29 | 2012-02-29 | Memristor With Channel Region In Thermal Equilibrium With Containing Region |
KR1020147021056A KR20140141574A (en) | 2012-02-29 | 2012-02-29 | Memristor with channel region in thermal equilibrium with containing region |
US14/371,492 US9276204B2 (en) | 2012-02-29 | 2012-02-29 | Memristor with channel region in thermal equilibrium with containing region |
EP12869691.1A EP2820677B1 (en) | 2012-02-29 | 2012-02-29 | Memristor with channel region in thermal equilibrium with containing region |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2012/027101 WO2013130064A1 (en) | 2012-02-29 | 2012-02-29 | Memristor with channel region in thermal equilibrium with containing region |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2013130064A1 true WO2013130064A1 (en) | 2013-09-06 |
Family
ID=49083102
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2012/027101 WO2013130064A1 (en) | 2012-02-29 | 2012-02-29 | Memristor with channel region in thermal equilibrium with containing region |
Country Status (5)
Country | Link |
---|---|
US (1) | US9276204B2 (en) |
EP (1) | EP2820677B1 (en) |
KR (1) | KR20140141574A (en) |
CN (1) | CN104011863A (en) |
WO (1) | WO2013130064A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160130468A (en) * | 2014-03-07 | 2016-11-11 | 휴렛 팩커드 엔터프라이즈 디벨롭먼트 엘피 | Memristor devices with a thermally-insulating cladding |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100243983A1 (en) * | 2009-03-31 | 2010-09-30 | Tony Chiang | Controlled localized defect paths for resistive memories |
US20110017977A1 (en) * | 2009-07-24 | 2011-01-27 | Bratkovski Alexandre M | Memristors with insulation elements and methods for fabricating the same |
WO2011016794A2 (en) * | 2009-07-28 | 2011-02-10 | Hewlett-Packard Development Company, L.P. | Memristors with asymmetric electrodes |
US20110227022A1 (en) * | 2009-01-15 | 2011-09-22 | Cho Hans S | Memristor Having a Nanostructure Forming An Active Region |
US20110309321A1 (en) | 2010-06-21 | 2011-12-22 | Jianhua Yang | Memristors with a switching layer comprising a composite of multiple phases |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008515181A (en) | 2004-09-27 | 2008-05-08 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | Electrical device having nanowires with phase change material |
US7791059B2 (en) | 2006-03-24 | 2010-09-07 | Nxp B.V. | Electric device with phase change resistor |
US7932548B2 (en) * | 2006-07-14 | 2011-04-26 | 4D-S Pty Ltd. | Systems and methods for fabricating self-aligned memory cell |
JP5050813B2 (en) * | 2007-11-29 | 2012-10-17 | ソニー株式会社 | Memory cell |
US7812335B2 (en) | 2008-04-11 | 2010-10-12 | Sandisk 3D Llc | Sidewall structured switchable resistor cell |
KR20100032572A (en) | 2008-09-18 | 2010-03-26 | 주식회사 하이닉스반도체 | Resistive memory device and method for manufacturing the same |
WO2010064444A1 (en) * | 2008-12-05 | 2010-06-10 | パナソニック株式会社 | Nonvolatile memory element and manufacturing method therefor |
CN102648528B (en) * | 2009-06-25 | 2016-02-17 | 惠普开发有限公司 | Have with different switching threshold intrinsic diode can switch junctions |
JP4688979B2 (en) * | 2009-07-13 | 2011-05-25 | パナソニック株式会社 | Resistance change element and resistance change memory device |
US8581225B2 (en) * | 2010-04-28 | 2013-11-12 | Panasonic Corporation | Variable resistance nonvolatile memory device and method of manufacturing the same |
CN103733338B (en) * | 2011-06-24 | 2016-10-26 | 慧与发展有限责任合伙企业 | High reliability high speed memristor |
-
2012
- 2012-02-29 CN CN201280065140.6A patent/CN104011863A/en active Pending
- 2012-02-29 KR KR1020147021056A patent/KR20140141574A/en not_active Application Discontinuation
- 2012-02-29 EP EP12869691.1A patent/EP2820677B1/en not_active Not-in-force
- 2012-02-29 WO PCT/US2012/027101 patent/WO2013130064A1/en active Application Filing
- 2012-02-29 US US14/371,492 patent/US9276204B2/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110227022A1 (en) * | 2009-01-15 | 2011-09-22 | Cho Hans S | Memristor Having a Nanostructure Forming An Active Region |
US20100243983A1 (en) * | 2009-03-31 | 2010-09-30 | Tony Chiang | Controlled localized defect paths for resistive memories |
US20110017977A1 (en) * | 2009-07-24 | 2011-01-27 | Bratkovski Alexandre M | Memristors with insulation elements and methods for fabricating the same |
WO2011016794A2 (en) * | 2009-07-28 | 2011-02-10 | Hewlett-Packard Development Company, L.P. | Memristors with asymmetric electrodes |
US20110309321A1 (en) | 2010-06-21 | 2011-12-22 | Jianhua Yang | Memristors with a switching layer comprising a composite of multiple phases |
Non-Patent Citations (2)
Title |
---|
ONKARAIAH S. ET AL.: "Using OxRRAM memories for improving communications of reconfigurable FPGA architectures", NANOSCALE ARCHITECTURES (NANOARCH), 2011 IE EE/ACM INTERNATIONAL SYMPOSIUM, 8 June 2011 (2011-06-08), pages 65 - 69, XP032031366 * |
See also references of EP2820677A4 |
Also Published As
Publication number | Publication date |
---|---|
KR20140141574A (en) | 2014-12-10 |
EP2820677A1 (en) | 2015-01-07 |
EP2820677B1 (en) | 2017-04-05 |
US20140346426A1 (en) | 2014-11-27 |
EP2820677A4 (en) | 2015-09-30 |
US9276204B2 (en) | 2016-03-01 |
CN104011863A (en) | 2014-08-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7080968B2 (en) | Semiconductor devices, hybrid transistors and related methods | |
Müller et al. | Ferroelectric hafnium oxide based materials and devices: Assessment of current status and future prospects | |
US9437658B2 (en) | Fully isolated selector for memory device | |
CN103238215B (en) | Arrays of nonvolatile memory cells | |
Ielmini et al. | Nanowire-based resistive switching memories: devices, operation and scaling | |
EP2608210B1 (en) | Stacked RRAM array with integrated transistor selector | |
JP2022515133A (en) | 3D memory array | |
US10741760B2 (en) | Resistive random access memory device for 3D stack and memory array using the same and fabrication method thereof | |
TWI511280B (en) | Memcapacitor | |
JPWO2007138646A1 (en) | NONVOLATILE MEMORY ELEMENT, MANUFACTURING METHOD THEREOF, AND SEMICONDUCTOR DEVICE USING NONVOLATILE MEMORY ELEMENT | |
KR101593509B1 (en) | Memristive element based on hetero-junction oxide | |
KR101448412B1 (en) | Multilayer memory array | |
US7935952B2 (en) | Non-volatile memory device having threshold switching resistor, memory array including the non-volatile memory device and methods of manufacturing the same | |
KR101907274B1 (en) | Phase change random access memory having high density three-dimensional architecture and method for fabrication of the same | |
US9379165B2 (en) | Semiconductor memory device | |
US8106394B2 (en) | Multi-layer storage node, resistive random access memory device including a multi-layer storage node and methods of manufacturing the same | |
EP2997597A1 (en) | Nanochannel array of nanowires for resistive memory devices | |
KR101484870B1 (en) | Integrated circuitry comprising nonvolatile memory cells and methods of forming a nonvolatile memory cell | |
US9276204B2 (en) | Memristor with channel region in thermal equilibrium with containing region | |
Chen et al. | The mechanism underlying silicon oxide based resistive random-access memory (ReRAM) | |
Wylezich et al. | Integration of niobium oxide-based resistive switching cells with different select properties into nanostructured cross-bar arrays | |
KR101460100B1 (en) | Non-volatile memory device and manufacturing method of the same | |
KR102662869B1 (en) | Variable low resistance line non-volatile memory device and operating method thereof | |
US20160086660A1 (en) | Electromechanical nonvolatile memory | |
US20170372958A1 (en) | Film-edge top electrode |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 12869691 Country of ref document: EP Kind code of ref document: A1 |
|
REEP | Request for entry into the european phase |
Ref document number: 2012869691 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2012869691 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 14371492 Country of ref document: US |
|
ENP | Entry into the national phase |
Ref document number: 20147021056 Country of ref document: KR Kind code of ref document: A |
|
NENP | Non-entry into the national phase |
Ref country code: DE |