WO2013118393A1 - Electron beam radiation apparatus and electron beam transmission unit - Google Patents

Electron beam radiation apparatus and electron beam transmission unit Download PDF

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Publication number
WO2013118393A1
WO2013118393A1 PCT/JP2012/082827 JP2012082827W WO2013118393A1 WO 2013118393 A1 WO2013118393 A1 WO 2013118393A1 JP 2012082827 W JP2012082827 W JP 2012082827W WO 2013118393 A1 WO2013118393 A1 WO 2013118393A1
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WO
WIPO (PCT)
Prior art keywords
electron beam
window
heat transfer
metal mesh
transmission unit
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PCT/JP2012/082827
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French (fr)
Japanese (ja)
Inventor
剛明 服部
圭吾 内山
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浜松ホトニクス株式会社
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Publication of WO2013118393A1 publication Critical patent/WO2013118393A1/en

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    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K5/00—Irradiation devices
    • G21K5/10—Irradiation devices with provision for relative movement of beam source and object to be irradiated
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K5/00—Irradiation devices
    • G21K5/04—Irradiation devices with beam-forming means

Definitions

  • the present invention relates to an electron beam irradiation apparatus and an electron beam transmission unit used therefor.
  • a device including a vacuumed chamber, an electron gun disposed in the chamber, and an electron beam transmission unit attached to the chamber is known.
  • the electron beam generated by the electron gun passes through the window member of the electron beam transmission unit and exits from the chamber. Therefore, the electron beam transmission unit needs to be configured so that the window member can maintain strength (pressure resistance strength) for withstanding the pressure difference between the vacuum in the chamber and the outside.
  • the window member is likely to deteriorate and have a short life.
  • each of the above examples has the following problems. That is, although the window member made of diamond described in Patent Document 1 has good heat dissipation of the window member itself, due to contact with the external atmosphere, the pressure resistance strength decreases because it reacts with oxygen at the time of electron emission and becomes thin, It may be damaged.
  • a titanium window member is supported by a support lattice made of a carbon fiber bundle that is a heat-dissipating material.
  • the lattice structure using the carbon fiber bundle has low design freedom, and the heat of the carbon fiber bundle is low. Since conductivity is relatively inferior, it is difficult to achieve both pressure strength and heat dissipation.
  • the window member made of the graphite sheet described in Patent Document 3 has good heat dissipation, but the side end face is not provided with an antioxidant film, and there is a possibility that a pinhole exists in the antioxidant film. Therefore, there is a possibility that it will react with oxygen at the time of electron emission to form a thin film, resulting in a decrease in pressure resistance. In addition, since there is no support member for supporting the graphite sheet, the pressure strength is low in the first place.
  • the window member in order to suppress the deterioration of the window member, in order to improve the heat dissipation (thermal conductivity) in the window member, it is necessary to form the window member with a film material mainly composed of carbon having good heat conductivity.
  • a film material mainly composed of carbon when the film material mainly composed of carbon is exposed to an external atmosphere containing oxygen in a state where electrons are emitted (heated state) as described above, the film material gradually becomes thin, and the pressure resistance strength is lowered to be finally obtained. May be damaged.
  • a metal film is used as the material of the window member, the stability to the external atmosphere is high, but the heat dissipation is usually poor as compared with the film material mainly composed of carbon.
  • the window member In order to suppress the deterioration of the window member, it is also conceivable to suppress the heat generation itself in the window member. In order to suppress the heat generation itself in the window member, it is preferable to increase the electron permeability in the window member. However, since the window member also requires pressure resistance, if the window member is simply made thin, it cannot withstand the pressure and may be broken.
  • An object of the present invention is to provide an electron beam irradiation apparatus and an electron beam transmission unit capable of suppressing deterioration of a window member while ensuring the pressure resistance of the window member.
  • An electron beam irradiation apparatus includes an electron gun that generates an electron beam, a housing provided with an electron beam passage hole through which the electron beam generated by the electron gun passes, and an emission side opening of the electron beam passage hole.
  • An electron beam transmission unit comprising: a window frame attached to the emission side opening; a support member having a metal mesh portion arranged inside the window frame; and a metal A window member, which is a metal film that is supported on the mesh portion and transmits the electron beam that has passed through the electron beam passage hole, and a heat transfer member that is disposed between the metal mesh portion and the window member.
  • the thermal member is a film made of a material containing carbon and has a vent hole.
  • An electron beam transmission unit is an electron beam irradiation apparatus comprising: an electron gun that generates an electron beam; and a housing provided with an electron beam passage hole through which the electron beam generated by the electron gun passes.
  • An electron beam transmission unit that is disposed in an emission side opening of a line passage hole and transmits an electron beam that has passed through the electron beam passage hole, and a window frame body that is attached to the emission side opening, and a window
  • a support member having a metal mesh portion disposed inside the frame, a window member that is supported on the metal mesh portion and is a metal film that transmits an electron beam that has passed through an electron beam passage hole, a metal mesh portion, and a window;
  • the heat transfer member is a film made of a material containing carbon and has a vent hole.
  • the window member is supported by the support member having the metal mesh portion, it is possible to obtain a sufficient pressure resistance and to reduce the thickness of the window member. Heat generation at the window member can be suppressed. Furthermore, since the heat transfer member disposed between the metal mesh portion and the window member is a film made of a material containing carbon, the thermal conductivity can be increased without being thinned by contact with the external atmosphere. In addition, since the heat transfer member has a vent hole, the window member is drawn toward the metal mesh portion in a state where the inside of the housing is evacuated at the time of electron beam irradiation, and the window member and the heat transfer member are formed on the metal mesh portion. It will be in close contact.
  • the window member comes into close contact with the heat transfer member having a high thermal conductivity during electron beam irradiation, the heat generated in the window member can be easily released. Moreover, since the window member is a metal film, the stability to the external atmosphere can be improved. Therefore, according to the electron beam irradiation apparatus and the electron beam transmission unit, it is possible to prevent the window member from deteriorating while ensuring the pressure resistance of the window member.
  • the window frame may be made of a metal material. According to this structure, the heat generated in the window member can be released more easily.
  • the heat transfer member may have a plurality of ventilation holes. According to this configuration, since the exhaust of the space between the window member and the heat transfer member is ensured at the time of evacuation in the housing at the time of electron beam irradiation, the adhesion between the window member and the heat transfer member is ensured. Can be further improved.
  • a plurality of ventilation holes may face one opening of the metal mesh part. According to this configuration, exhaust of the space between the window member and the heat transfer member can be further ensured, and the electron beam transmission efficiency in the electron beam transmission unit can be improved.
  • the film thickness of the heat transfer member may be 500 ⁇ m or less. According to this configuration, heat generated in the window member can be released more easily while maintaining the electron beam transmission efficiency in the electron beam transmission unit.
  • the window frame includes a frame-shaped fixing member fixed to the exit side opening of the electron beam passage hole, and a frame-shaped pressing member fixed to the fixing member in a state where at least the window member is pressed against the fixing member.
  • the support member may further include a flat frame portion with a metal mesh portion stretched inside, and the fixing member and the pressing member may sandwich at least the window member in the frame portion.
  • an electron beam irradiation apparatus and an electron beam transmission unit that can suppress deterioration of the window member while ensuring the pressure resistance of the window member.
  • FIG. 2 is an exploded cross-sectional view of an electron beam transmission unit of the electron beam irradiation apparatus of FIG. 1. It is a disassembled perspective view of the electron beam transmission unit of the electron beam irradiation apparatus of FIG. It is an exploded sectional view of the electron beam transmission unit of other embodiments of the present invention.
  • the electron beam irradiation apparatus 1 is hermetically attached to the chamber 30 so as to close the chamber (housing) 30 that forms the electron beam passage hole 20 and the rear end 20 a of the electron beam passage hole 20. And an electron beam transmission unit 50 that is airtightly attached to the chamber 30 so as to close the front end 20b of the electron beam passage hole 20.
  • the electron beam EB generated by the electron gun 40 travels forward in the Z-axis direction through the electron beam passage hole 20, passes through the electron beam transmission unit 50, and exits to the outside.
  • Such an electron beam irradiation apparatus 1 is used for performing drying, sterilization, surface modification, etc.
  • the side irradiated with the electron beam EB by the electron beam irradiation apparatus 1 is a front side, and the opposite side is a rear side.
  • the chamber 30 has a housing 31 to which an electron gun 40 that generates an electron beam EB is attached.
  • the housing 31 is formed in a cylindrical shape from metal.
  • the cross section of the electron beam passage hole 21 which is a portion formed by the casing 31 in the electron beam passage hole 20 has a circular shape, and the electron beam passage hole 21 has a small diameter portion on the front side and a large diameter on the rear side. The part is connected to the shape.
  • the electron gun 40 has a case 41 formed of metal in a rectangular parallelepiped shape.
  • the case 41 is airtightly fixed to the rear end portion of the housing 31.
  • the front wall of the case 41 is provided with an opening 41 a that allows the inside of the case 41 and the inside of the housing 31 to communicate with each other.
  • An opening 41 b for attaching the connector 43 is provided on the side wall of the case 41.
  • an insulating block 42 made of an insulating material (for example, epoxy resin) is disposed.
  • the insulating block 42 has a base portion 42a accommodated in the case 41, and a protruding portion 42b protruding from the base portion 42a to the front side in the Z-axis direction.
  • the protruding part 42b protrudes from the base part 42a through the opening 41a into the large diameter part of the electron beam passage hole 21, and the front end part of the protruding part 42b is the rear end of the small diameter part of the electron beam passage hole 21 in the Z-axis direction.
  • the base 42 a is in contact with the inner surface of the case 41 on the opening 41 a side and the opening 41 b side.
  • a film 45 made of a conductive material is attached to a portion of the base 42 a that does not contact the inner surface of the case 41, and the film 45 is electrically connected to the case 41.
  • the surface potential of the insulating block 42 can be set to the ground potential, and the operation stability of the electron gun 40 can be improved.
  • the connector 43 is for supplying a high voltage to the filament 44 which is a cathode from an external power supply device.
  • the base end portion of the connector 43 protrudes to the outside through the opening 41 b on the side wall of the case 41, and the tip end portion of the connector 43 is embedded in the insulating block 42.
  • a pair of internal wirings 46, 46 are connected to the tip of the connector 43.
  • the pair of internal wirings 46, 46 extends to the front end portion of the protruding portion 42b, and is connected to the pair of power supply pins 47, 47, respectively.
  • a filament 44 is stretched around the tip portions of the pair of power supply pins 47, 47.
  • a grid electrode 48 is fixed to the protruding portion 42 b so as to surround the power supply pin 47 and the filament 44.
  • the casing 31 is provided with an alignment coil 2 and a focusing coil 3 so as to be paired with a small diameter portion of the electron beam passage hole 21 interposed therebetween.
  • the electron beam EB emitted from the electron gun 40 and passing through the electron beam passage hole 21 is adjusted by the alignment coil 2 so that the center line of the electron beam EB coincides with the center line CL of the electron beam passage hole 20.
  • the beam is focused on the electron beam transmission unit 50 by the focusing coil 3.
  • the casing 31 is provided with the exhaust pipe 4 for connecting the electron beam passage hole 21 and the vacuum pump, and thereby the inside of the chamber 30 (that is, the electron beam passage hole 20) is evacuated.
  • the chamber 30 has a deflection tube (housing) 32 fixed to the front end surface of the housing 31.
  • the deflection tube 32 is made of austenitic stainless steel (an alloy containing Fe / Ni / Cr) and has a quadrangular prism shape.
  • the deflection tube 32 is provided with an incident side opening 32a for allowing the electron beam EB generated by the electron gun 40 to enter and an emission side opening 32b for emitting the electron beam EB.
  • the cross section of the electron beam passage hole 22 which is a portion formed by the deflection tube 32 in the electron beam passage hole 20 has a rectangular shape whose longitudinal direction is the Y-axis direction.
  • a deflection coil 5 that deflects the electron beam EB passing through the inside of the deflection tube 32 is attached to the outside of the deflection tube 32.
  • the electron beam EB that is focused by the focusing coil 3 and passes through the electron beam passage hole 22 is deflected in the Y-axis direction by the deflection coil 5.
  • the chamber 30 has a scanning tube (housing) 33 fixed to the front end face of the deflection tube 32.
  • the scanning tube 33 is made of an aluminum alloy (a material containing aluminum), for example, an Al—Mg-based aluminum alloy, and has a quadrangular prism-shaped outer shape that widens toward the front side.
  • the scanning tube 33 is provided with an incident side opening 33a for allowing the electron beam EB generated by the electron gun 40 to enter, and an emission side opening 33b for emitting the electron beam EB (the emission side opening of the electron beam passage hole 20). It has been.
  • the cross section of the electron beam passage hole 23, which is a portion formed by the scanning tube 33 in the electron beam passage hole 20, has a rectangular shape whose longitudinal direction is the Y-axis direction.
  • a heat radiation film 34 having a higher heat emissivity than that of the inside of the scanning tube 33 is provided from the viewpoint of improving heat dissipation to the outside.
  • the heat dissipation film 34 is an alumite layer formed by subjecting the outer surface of the scanning tube 33 to an alumite treatment.
  • a flange 35 is provided at the rear end of the deflection tube 32, and a flange 36 is provided at the front end of the deflection tube 32.
  • a flange 37 is provided at the rear end of the scanning tube 33, and a flange 38 is provided at the front end of the scanning tube 33.
  • the deflection tube 32 and the scanning tube 33 are hermetically fixed by a plurality of bolts 7 in a state where the flange 36 and the flange 37 are in contact with each other via the O-ring 6. Thereby, the deflection tube 32 is connected to the incident side opening 33a of the scanning tube 33 so that the electron beam EB generated by the electron gun 40 passes inside.
  • the electron beam irradiation apparatus 1 is attached to a predetermined location of the equipment to which it is applied via a flange 35 provided at the rear end of the deflection tube 32.
  • the electron beam transmission unit 50 is disposed in the emission side opening 33 b of the scanning tube 33.
  • the scanning tube 33 and the electron beam transmission unit 50 are hermetically fixed by a plurality of bolts 7 in a state where the flange 38 and the window frame 50 ⁇ / b> A are in contact via the O-ring 6.
  • the electron beam transmission unit 50 has a window frame 50 ⁇ / b> A attached to the emission side opening 33 b of the scanning tube 33.
  • a support member 52, a heat transfer member 59, and a window member 55 are disposed inside the window frame 50A (that is, within the window frame 50A when the window frame 50A is viewed from the front side). .
  • the window frame 50 ⁇ / b> A includes a fixing member 51 fixed to the emission side opening 33 b of the scanning tube 33, and a fixing member using a plurality of bolts while pressing the window member 55 and the heat transfer member 59 against the fixing member 51. And a pressing member 57 fixed to 51.
  • the fixing member 51 and the pressing member 57 are made of oxygen-free copper (a material containing copper) and have a rectangular frame-shaped outer shape with the Y-axis direction as the longitudinal direction.
  • the fixing member 51 has an incident side opening 51a, and the pressing member 57 has an emission side opening 57a facing the incident side opening 51a in the Z-axis direction.
  • a heat radiation film 58 having a higher heat emissivity than the inside of the fixing member 51 and the pressing member 57 is provided from the viewpoint of improving heat dissipation to the outside. Is provided.
  • the heat dissipation film 58 is a nickel layer formed by performing nickel plating on the fixing member 51 and the pressing member 57.
  • the support member 52 includes a flat frame portion 52a and a metal mesh portion 52b formed to be stretched inside the frame portion 52a.
  • the metal mesh portion 52b is not limited to a polygonal net shape, and may be a bar shape.
  • the arrangement of the openings in the metal mesh portion 52b does not matter whether it is regular or not, but when the support member 52 is viewed in plan, the area occupied by the entire opening constitutes a mesh portion (divides the openings). It is important for improving the electron permeability that the area occupied by the metal portion is sufficiently larger, in other words, the width of the metal portion constituting the mesh portion is sufficiently smaller than the width of the opening.
  • the support member 52 is made of austenitic stainless steel (a material containing iron).
  • the frame portion 52a is fixed to the front surface of the fixing member 51 by brazing or the like with the metal mesh portion 52b facing the incident side opening 51a of the fixing member 51.
  • a groove 51b extending so as to surround the incident side opening 51a is provided outside the region where the frame portion 52a is fixed on the front surface of the fixing member 51, and the groove 51b is hermetically sealed.
  • An O-ring 53 as a member is arranged.
  • the heat transfer member 59 is disposed between the metal mesh portion 52 b and the window member 55. More specifically, the heat transfer member 59 covers substantially the entire front surface of the metal mesh portion 52b, and is included in the region surrounded by the O-ring 53 that is an airtight sealing member, and the window portion and the metal mesh portion 52b. It arrange
  • the heat transfer member 59 is a film made of a material containing carbon and having a film thickness of 500 ⁇ m or less, and here, a graphite mesh having a film thickness of 7 ⁇ m is used.
  • the thermal conductivity of the heat transfer member 59 is higher than the thermal conductivity of the window member 55 which is a metal film, which will be described later.
  • a graphite mesh is made of 2 to 2 of copper, which is a metal with high thermal conductivity. It has four times the thermal conductivity.
  • the heat transfer member 59 has a plurality of minute through holes (not shown) whose arrangement is random over the entire surface when viewed from the thickness direction (front side and rear side). Functions as a pore. Thereby, the several ventilation hole of the heat-transfer member 59 will face one opening of the metal mesh part 52b. That is, one opening of the metal mesh portion 52 b and the plurality of vent holes of the heat transfer member 59 face each other when viewed from the thickness direction of the heat transfer member 59.
  • the window member 55 is a metal film that transmits the electron beam EB, and is a sheet-like metal material made of, for example, titanium and having a thickness of about 1 to 10 ⁇ m.
  • the window member 55 is disposed on the front surface of the fixing member 51 so as to cover the support member 52 and the O-ring 53. As a result, the window member 55 is supported on the metal mesh portion 52 b and transmits the electron beam EB that has passed through the inside of the scanning tube 33.
  • a protective sheet 54 formed in a frame shape so as to surround the incident side opening 51a when viewed from the Z-axis direction is disposed.
  • the protective sheet 56 formed in the shape substantially equivalent to the protective sheet 54 is arrange
  • the protective sheets 54 and 56 are thin-film members made of the same material (graphite) as the heat transfer member 59, and the frame member 52a and the pressing member 57 are in direct contact with the window member 55 and the heat transfer member 59 so as to be a window member. 55 and the heat transfer member 59 are prevented from being damaged. Moreover, since it consists of graphite with high heat conductivity, heat dissipation of the window member 55 is suppressed by suppressing heat accumulation in the protective sheets 54 and 56 or by transferring the heat of the window member 55 to the pressing member 57. Can also be improved.
  • the pressing member 57 presses the window member 55 against the fixing member 51 via the frame portion 52a of the support member 52 and the O-ring 53.
  • the fixing member 51 and the pressing member 57 are inserted into a plurality of bolts (a plurality of through holes 57b provided in the pressing member 57 and into a plurality of screw holes 51d provided in the fixing member 51. It is airtightly fixed by bolts to be screwed together. Accordingly, the fixing member 51 and the pressing member 57 sandwich the window member 55 in the frame portion 52a of the support member 52.
  • the fixing member 51 is provided with a plurality of through holes 51c through which the bolts 7 for fixing the electron beam transmission unit 50 to the flange 38 of the scanning tube 33 are inserted.
  • the electron beam irradiation apparatus 1 configured as described above will be described.
  • the inside of the chamber 30 that is, the electron beam passage hole 20
  • a high voltage is applied to the filament 44
  • electrons are emitted from the filament 44.
  • the electrons emitted from the filament 44 are accelerated and focused by the electric field formed by the grid electrode 48, whereby the electron beam EB is emitted forward in the Z-axis direction.
  • the electron beam EB emitted from the electron gun 40 and passing through the electron beam passage hole 21 is adjusted by the alignment coil 2 so that the center line of the electron beam EB coincides with the center line CL of the electron beam passage hole 20.
  • the beam is focused on the electron beam transmission unit 50 by the focusing coil 3.
  • the electron beam EB that is focused by the focusing coil 3 and passes through the electron beam passage hole 22 is deflected in the Y-axis direction by the deflection coil 5. That is, the center line of the electron beam EB passing through the electron beam passage hole 23 is repeatedly oscillated linearly along the Y-axis direction.
  • the electron beam EB deflected in the Y-axis direction by the deflection coil 5 passes through the window member 55 of the electron beam transmission unit 50 and exits to the outside.
  • the electron beam EB emitted to the outside is irradiated to the irradiation object conveyed on the line for drying, sterilization, surface modification, and the like of the irradiation object.
  • the window member 55 is supported by the support member 52 having the metal mesh portion 52b, sufficient pressure resistance can be obtained. And since the thickness of the window member 55 can be made thin, the heat_generation
  • the window member 55 is drawn toward the metal mesh portion 52b in a state where the inside of the casing is evacuated during the electron beam irradiation, and the window member 55 and the metal mesh portion 52b Since the heat transfer member 59 is in close contact, the heat generated in the window member 55 can be easily released while the window member 55 and the heat transfer member 59 are reliably supported by the support member 52. Further, since the window member 55 is made of a metal film, the stability to the external atmosphere can be improved. Therefore, according to the electron beam irradiation apparatus 1 and the electron beam transmission unit 50, it is possible to prevent the window member 55 from deteriorating while securing the pressure resistance strength of the window member 55.
  • the metal mesh portion 52b of the support member 52 is made of austenitic stainless steel. Thereby, the strength, workability, and heat resistance of the metal mesh portion 52b can be improved. As a result, the diameter of the wire constituting the metal mesh portion 52b can be reduced, and the electron beam EB can be easily passed. .
  • the window member 55 In order to further improve the adhesion between the window member 55 and the heat transfer member 59, it may be possible to directly form a metal film made of the material of the window member 55 on the heat transfer member 59, but on the surface of the graphite. Since there are fine irregularities, it is difficult to form a metal film without pinholes with a thickness with good electron permeability. In addition, the metal film may peel off due to the difference in thermal expansion coefficient between the metal material and graphite.
  • the window member 55 is made of a sheet-like metal material, and the heat transfer member 59 is provided with a ventilation hole, thereby improving the vacuum holding ability of the window member 55 and the adhesion to the heat transfer member 59, that is, the window. Deterioration of the window member 55 can be suppressed while ensuring the pressure resistance of the member 55.
  • the film thickness of the heat transfer member 59 is 500 ⁇ m or less, preferably 1 to 500 ⁇ m. More preferably, it is 3 to 100 ⁇ m, and further preferably 5 to 20 ⁇ m. According to such a film thickness, for example, in the electron beam irradiation apparatus 1 operating at a relatively low tube voltage up to about 200 kV, the electron transmission ability and thermal conductivity of the carbon material can be effectively utilized. While maintaining the transmission efficiency of the electron beam EB in the transmission unit 50, the heat generated in the window member 55 can be released more easily.
  • the window frame 50A is made of oxygen-free copper which is a metal material, heat generated in the window member 55 can be released more easily.
  • the heat transfer member 59 has a plurality of vent holes, the window member 55, the heat transfer member 59, and the Since the exhaust of the space between them is ensured, the adhesion between the window member 55 and the heat transfer member 59 is further improved.
  • a plurality of ventilation holes face one opening of the metal mesh portion 52b, the exhaust of the space between the support member 52 and the window member 55 can be further ensured, and the electron beam The transmission efficiency of the electron beam EB in the transmission unit can be improved.
  • the fixing member 51 and the pressing member 57 sandwich the window member 55 in the frame portion 52 a of the support member 52. Thereby, sealing of the clamping part by the fixing member 51 and the pressing member 57 can be ensured.
  • this invention is not limited to the said embodiment.
  • the material of the heat transfer member in the above-described embodiment, an aspect in which a graphite mesh is applied as a film made of a material containing carbon is shown, but carbon nanotubes, graphene, diamond, or the like can also be applied.
  • vent holes of the heat transfer member the embodiment described the mode in which the plurality of vent holes are randomly arranged, but the plurality of vent holes may be periodically arranged. Further, there may be one vent hole. Furthermore, the shape of the air holes may be various shapes such as a circle and a rectangle. That is, in the heat transfer member, it is only necessary to have a breathable hole in at least one place when viewed from the thickness direction.
  • the protective sheets 54 and 56 may be made of a carbon material other than graphite, or may be made of a material other than the carbon material, or the protective sheet may not be provided if the sandwiched structure has sufficient strength.
  • the support member 52 may be a single member (single layer), and a plurality of members may be laminated.
  • the plurality of support members may be formed of different metal materials, for example, two layers in which a first support member on the fixing member 51 side and a second support member on the heat transfer member 59 side are stacked. It is good also as a structure.
  • the first support member that requires higher pressure strength is made of a metal material having a higher rigidity than the second support member, and the second support member is considered to be an auxiliary role.
  • strength and heat dissipation can be improved.
  • the material of the first support member is austenitic stainless steel
  • the material of the second support member is a combination of copper.
  • the sheet-like sealing material 61 is disposed between the fixing member 51 and the pressing member 57, and the sealing member 61 and the pressing member 57 are sandwiched between the window member 55 and the sealing member 61.
  • the fixing member 51 and the pressing member 57 may be airtightly fixed by melting and resolidifying the material 61.
  • the O-ring 53 and the bolt for fixing the pressing member 57 to the fixing member 51 are not necessary. Further, the processing of the through hole 57b for inserting the bolt and the processing of the screw hole 51d for screwing the bolt become unnecessary.
  • the shapes of the constituent members of the electron beam irradiation apparatus and the electron beam transmission unit in the above embodiment, the shape of providing the line irradiation type electron beam irradiation apparatus and the electron beam transmission unit is shown. It is good also as a shape which provides an electron beam irradiation apparatus and an electron beam transmission unit.
  • Electron beam irradiation apparatus 20, 21, 22, 23 ... Electron beam passage hole, 30 ... Chamber (housing), 31 ... Housing, 32 ... Deflection tube (housing), 33 ... Scanning tube (housing) 33b: Emission side opening, 40 ... Electron gun, 50 ... Electron beam transmission unit, 50A ... Window frame, 51 ... Fixing member, 52 ... Supporting member, 52a ... Frame, 52b ... Metal mesh part, 55 ... Window Member 57 ... Pressing member 59 ... Heat transfer member EB ... Electron beam.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
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Abstract

An electron beam radiation apparatus is provided with: an electron gun that generates an electron beam; and a housing in which an electron beam passing hole through which the electron beam generated by the electron gun passes is provided. In this electron beam radiation apparatus, an electron beam transmission unit (50) is disposed at a radiating-side opening section of the electron beam passing hole, and is for letting an electron beam that has passed through the electron beam passing hole transmit therethrough. The electron beam transmission unit (50) is provided with: a window frame (50A) that is attached to the radiating-side opening section; a support member (52) comprising a metal mesh section (52b) disposed inside the window frame (50A); a window member (55) that is supported above the metal mesh section (52b), and that is a metal film that lets an electron beam that has passed through the electron beam passing hole transmit therethrough; and a heat transfer member (59) that is disposed between the metal mesh section (52b) and the window member (55). The heat transfer member (59) is a film made from a material comprising carbon, and has ventilation holes.

Description

電子線照射装置及び電子線透過ユニットElectron beam irradiation apparatus and electron beam transmission unit
　本発明は、電子線照射装置、及びそれに用いられる電子線透過ユニットに関する。 The present invention relates to an electron beam irradiation apparatus and an electron beam transmission unit used therefor.
　従来の電子線照射装置として、真空引きされるチャンバと、チャンバ内に配置された電子銃と、チャンバに取り付けられた電子線透過ユニットと、を備えるものが知られている。このような電子線照射装置では、電子銃が発生した電子線がチャンバ内から電子線透過ユニットの窓部材を透過して外部に出射する。そのため、電子線透過ユニットは、その窓部材が、チャンバ内の真空と外部との圧力差に耐えるための強度（耐圧強度）を保持できるように構成されている必要がある。 As a conventional electron beam irradiation apparatus, a device including a vacuumed chamber, an electron gun disposed in the chamber, and an electron beam transmission unit attached to the chamber is known. In such an electron beam irradiation apparatus, the electron beam generated by the electron gun passes through the window member of the electron beam transmission unit and exits from the chamber. Therefore, the electron beam transmission unit needs to be configured so that the window member can maintain strength (pressure resistance strength) for withstanding the pressure difference between the vacuum in the chamber and the outside.
　一方、上述したような電子線透過ユニットにおいては、窓部材に入射した電子の持つエネルギーの一部が熱エネルギーとなって発熱する。このため、窓部材は、劣化しやすく短寿命となりやすい。 On the other hand, in the electron beam transmission unit as described above, a part of the energy of the electrons incident on the window member becomes heat energy and generates heat. For this reason, the window member is likely to deteriorate and have a short life.
　そこで、窓部材に関しては、その構成材料や窓部材を支持する支持部材等と併せて種々の検討が行われている。例えば、ダイヤモンド製の窓部材と支持部材との間に、高熱伝導率を有する構造箔を備える例（特許文献１参照）、チタン製の窓部材をカーボン繊維束からなる支持部材で支持する例（特許文献２参照）、酸化防止膜が設けられたグラファイトシートを窓部材として使用した例（特許文献３参照）が知られている。 Therefore, various investigations have been made on the window member together with its constituent materials and support members for supporting the window member. For example, an example in which a structural foil having high thermal conductivity is provided between a diamond window member and a support member (see Patent Document 1), and an example in which a titanium window member is supported by a support member made of a carbon fiber bundle ( An example using a graphite sheet provided with an antioxidant film as a window member (see Patent Document 2) is known (see Patent Document 3).
特許第４５５７２７９号公報Japanese Patent No. 4557279 特表平８－５０１６５１号公報Japanese National Patent Publication No. 8-501651 特開２００８－７９８９１号公報JP 2008-78991 A
　しかしながら、上記各例では次のような問題点がある。すなわち、特許文献１記載のダイヤモンド製の窓部材は、窓部材自体の放熱性はよいものの、外部雰囲気との接触により、電子出射時に酸素と反応して薄膜化するために耐圧強度が低下し、破損してしまう可能性がある。また、特許文献２では、チタン製の窓部材を放熱性材料であるカーボン繊維束からなる支持格子で支持しているが、カーボン繊維束による格子構造では設計自由度も低く、カーボン繊維束の熱伝導性が比較的劣ることもあり、耐圧強度と放熱性の両立は困難である。更に、特許文献３記載のグラファイトシートからなる窓部材は、窓部材自体の放熱性はよいものの、側端面に酸化防止膜が設けられておらず、また、酸化防止膜にピンホールが存在する可能性もあるため、電子出射時に酸素と反応して薄膜化し、耐圧強度が低下する可能性がある。また、グラファイトシートを支持する支持部材がないので、そもそも耐圧強度が低い。 However, each of the above examples has the following problems. That is, although the window member made of diamond described in Patent Document 1 has good heat dissipation of the window member itself, due to contact with the external atmosphere, the pressure resistance strength decreases because it reacts with oxygen at the time of electron emission and becomes thin, It may be damaged. In Patent Document 2, a titanium window member is supported by a support lattice made of a carbon fiber bundle that is a heat-dissipating material. However, the lattice structure using the carbon fiber bundle has low design freedom, and the heat of the carbon fiber bundle is low. Since conductivity is relatively inferior, it is difficult to achieve both pressure strength and heat dissipation. Furthermore, the window member made of the graphite sheet described in Patent Document 3 has good heat dissipation, but the side end face is not provided with an antioxidant film, and there is a possibility that a pinhole exists in the antioxidant film. Therefore, there is a possibility that it will react with oxygen at the time of electron emission to form a thin film, resulting in a decrease in pressure resistance. In addition, since there is no support member for supporting the graphite sheet, the pressure strength is low in the first place.
　このように、窓部材の劣化を抑制するために、窓部材での放熱性（熱伝導性）を高めるには、伝熱性のよい炭素を主成分とする膜材で窓部材を形成することが考えられるが、炭素を主成分とする膜材は、上述したように電子を出射した状態（加熱状態）で酸素を含む外部雰囲気に晒されると、次第に薄膜化し、耐圧強度が低下して最終的には破損してしまう可能性がある。一方、窓部材の材料として金属膜を用いた場合、外部雰囲気に対する安定性は高いが、炭素を主成分とする膜材と比べて放熱性が悪いのが通常である。 As described above, in order to suppress the deterioration of the window member, in order to improve the heat dissipation (thermal conductivity) in the window member, it is necessary to form the window member with a film material mainly composed of carbon having good heat conductivity. Although it is conceivable, when the film material mainly composed of carbon is exposed to an external atmosphere containing oxygen in a state where electrons are emitted (heated state) as described above, the film material gradually becomes thin, and the pressure resistance strength is lowered to be finally obtained. May be damaged. On the other hand, when a metal film is used as the material of the window member, the stability to the external atmosphere is high, but the heat dissipation is usually poor as compared with the film material mainly composed of carbon.
　また、窓部材の劣化を抑制するには、窓部材での発熱自体を抑制することも考えられる。窓部材での発熱自体を抑制するには、窓部材における電子の透過性を高めることが好ましいため、窓部材は薄いほうがよい。しかしながら、窓部材は耐圧強度をも要するため、単に窓部材を薄くした場合、圧力に耐えることができず、破れるおそれがある。 In order to suppress the deterioration of the window member, it is also conceivable to suppress the heat generation itself in the window member. In order to suppress the heat generation itself in the window member, it is preferable to increase the electron permeability in the window member. However, since the window member also requires pressure resistance, if the window member is simply made thin, it cannot withstand the pressure and may be broken.
　本発明は、窓部材の耐圧強度を確保しながら、窓部材が劣化するのを抑制することができる電子線照射装置及び電子線透過ユニットを提供することを目的とする。 An object of the present invention is to provide an electron beam irradiation apparatus and an electron beam transmission unit capable of suppressing deterioration of a window member while ensuring the pressure resistance of the window member.
　本発明の電子線照射装置は、電子線を発生する電子銃と、電子銃が発生した電子線を通過させる電子線通過孔が設けられた筐体と、電子線通過孔の出射側開口部に配置された電子線透過ユニットと、を備え、電子線透過ユニットは、出射側開口部に取り付けられた窓枠体と、窓枠体の内側に配置された金属メッシュ部を有する支持部材と、金属メッシュ部上に支持され、電子線通過孔を通過した電子線を透過させる金属膜である窓部材と、金属メッシュ部と窓部材との間に配置された伝熱部材と、を有し、伝熱部材は、炭素を含む材料からなる膜であり、通気孔を有する。 An electron beam irradiation apparatus according to the present invention includes an electron gun that generates an electron beam, a housing provided with an electron beam passage hole through which the electron beam generated by the electron gun passes, and an emission side opening of the electron beam passage hole. An electron beam transmission unit, the electron beam transmission unit comprising: a window frame attached to the emission side opening; a support member having a metal mesh portion arranged inside the window frame; and a metal A window member, which is a metal film that is supported on the mesh portion and transmits the electron beam that has passed through the electron beam passage hole, and a heat transfer member that is disposed between the metal mesh portion and the window member. The thermal member is a film made of a material containing carbon and has a vent hole.
　本発明の電子線透過ユニットは、電子線を発生する電子銃と、電子銃が発生した電子線を通過させる電子線通過孔が設けられた筐体と、を具備する電子線照射装置において、電子線通過孔の出射側開口部に配置されて、電子線通過孔を通過した電子線を透過させるための電子線透過ユニットであって、出射側開口部に取り付けられるための窓枠体と、窓枠体の内側に配置された金属メッシュ部を有する支持部材と、金属メッシュ部上に支持され、電子線通過孔を通過した電子線を透過させる金属膜である窓部材と、金属メッシュ部と窓部材との間に配置された伝熱部材と、を備え、伝熱部材は、炭素を含む材料からなる膜であり、通気孔を有する。 An electron beam transmission unit according to the present invention is an electron beam irradiation apparatus comprising: an electron gun that generates an electron beam; and a housing provided with an electron beam passage hole through which the electron beam generated by the electron gun passes. An electron beam transmission unit that is disposed in an emission side opening of a line passage hole and transmits an electron beam that has passed through the electron beam passage hole, and a window frame body that is attached to the emission side opening, and a window A support member having a metal mesh portion disposed inside the frame, a window member that is supported on the metal mesh portion and is a metal film that transmits an electron beam that has passed through an electron beam passage hole, a metal mesh portion, and a window; The heat transfer member is a film made of a material containing carbon and has a vent hole.
　この電子線照射装置及び電子線透過ユニットでは、窓部材が金属メッシュ部を有する支持部材によって支持されているために、十分な耐圧強度を得ることができるとともに、窓部材の厚さを薄くできるので、窓部材での発熱を抑制することができる。更に、金属メッシュ部と窓部材との間に配置された伝熱部材が炭素を含む材料からなる膜であるため、外部雰囲気との接触によって薄膜化することなく熱伝導率を高めることができる。しかも、伝熱部材が通気孔を有するため、電子線照射時に筐体内が真空引きされた状態では窓部材が金属メッシュ部側に引き寄せられて、金属メッシュ部上で窓部材と伝熱部材とが密着することになる。このように電子線照射時には熱伝導率が高い伝熱部材に窓部材が密着することになるので、窓部材で発生する熱を容易に逃がすことができる。また、窓部材が金属膜であるため、外部雰囲気に対する安定性も向上させることができる。よって、この電子線照射装置及び電子線透過ユニットによれば、窓部材の耐圧強度を確保しながら、窓部材が劣化するのを抑制することが可能となる。 In this electron beam irradiation apparatus and the electron beam transmission unit, since the window member is supported by the support member having the metal mesh portion, it is possible to obtain a sufficient pressure resistance and to reduce the thickness of the window member. Heat generation at the window member can be suppressed. Furthermore, since the heat transfer member disposed between the metal mesh portion and the window member is a film made of a material containing carbon, the thermal conductivity can be increased without being thinned by contact with the external atmosphere. In addition, since the heat transfer member has a vent hole, the window member is drawn toward the metal mesh portion in a state where the inside of the housing is evacuated at the time of electron beam irradiation, and the window member and the heat transfer member are formed on the metal mesh portion. It will be in close contact. As described above, since the window member comes into close contact with the heat transfer member having a high thermal conductivity during electron beam irradiation, the heat generated in the window member can be easily released. Moreover, since the window member is a metal film, the stability to the external atmosphere can be improved. Therefore, according to the electron beam irradiation apparatus and the electron beam transmission unit, it is possible to prevent the window member from deteriorating while ensuring the pressure resistance of the window member.
　窓枠体は、金属材料からなっていてもよい。この構成によれば、窓部材で発生する熱をより容易に逃がすことができる。 The window frame may be made of a metal material. According to this structure, the heat generated in the window member can be released more easily.
　伝熱部材は、通気孔を複数有していてもよい。この構成によれば、電子線照射時における筐体内の真空引きの際に、窓部材と伝熱部材との間の空間の排気が確実化されるため、窓部材と伝熱部材との密着性をより一層向上させることができる。 The heat transfer member may have a plurality of ventilation holes. According to this configuration, since the exhaust of the space between the window member and the heat transfer member is ensured at the time of evacuation in the housing at the time of electron beam irradiation, the adhesion between the window member and the heat transfer member is ensured. Can be further improved.
　金属メッシュ部の一つの開口には、複数の通気孔が臨んでいてもよい。この構成によれば、窓部材と伝熱部材との間の空間の排気をより確実化することができると共に、電子線透過ユニットにおける電子線の透過効率を向上させることができる。 A plurality of ventilation holes may face one opening of the metal mesh part. According to this configuration, exhaust of the space between the window member and the heat transfer member can be further ensured, and the electron beam transmission efficiency in the electron beam transmission unit can be improved.
　伝熱部材の膜厚は５００μｍ以下であってもよい。この構成によれば、電子線透過ユニットにおける電子線の透過効率を維持しつつ、窓部材で発生する熱をより容易に逃がすことができる。 The film thickness of the heat transfer member may be 500 μm or less. According to this configuration, heat generated in the window member can be released more easily while maintaining the electron beam transmission efficiency in the electron beam transmission unit.
　また、窓枠体は、電子線通過孔の出射側開口部に固定された枠状の固定部材と、固定部材に対して少なくとも窓部材を押圧した状態で固定部材に固定された枠状の押圧部材と、を有し、支持部材は、内側に金属メッシュ部が張られた平板状の枠部を更に有し、固定部材及び押圧部材は、枠部において少なくとも窓部材を挟持していてもよい。この構成によれば、固定部材及び押圧部材による挟持部分の封止を確実化することができる。 The window frame includes a frame-shaped fixing member fixed to the exit side opening of the electron beam passage hole, and a frame-shaped pressing member fixed to the fixing member in a state where at least the window member is pressed against the fixing member. The support member may further include a flat frame portion with a metal mesh portion stretched inside, and the fixing member and the pressing member may sandwich at least the window member in the frame portion. . According to this structure, the sealing of the clamping part by a fixing member and a press member can be ensured.
　本発明によれば、窓部材の耐圧強度を確保しながら、窓部材が劣化するのを抑制し得る電子線照射装置及び電子線透過ユニットを提供することが可能となる。 According to the present invention, it is possible to provide an electron beam irradiation apparatus and an electron beam transmission unit that can suppress deterioration of the window member while ensuring the pressure resistance of the window member.
本発明の一実施形態の電子線照射装置の縦断面図である。It is a longitudinal cross-sectional view of the electron beam irradiation apparatus of one Embodiment of this invention. 図１の電子線照射装置の電子線透過ユニットの分解断面図である。FIG. 2 is an exploded cross-sectional view of an electron beam transmission unit of the electron beam irradiation apparatus of FIG. 1. 図１の電子線照射装置の電子線透過ユニットの分解斜視図である。It is a disassembled perspective view of the electron beam transmission unit of the electron beam irradiation apparatus of FIG. 本発明の他の実施形態の電子線透過ユニットの分解断面図である。It is an exploded sectional view of the electron beam transmission unit of other embodiments of the present invention.
　以下、本発明の好適な実施形態について、図面を参照して詳細に説明する。なお、各図において同一又は相当部分には同一符号を付し、重複する説明を省略する。 Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In addition, in each figure, the same code | symbol is attached | subjected to the same or an equivalent part, and the overlapping description is abbreviate | omitted.
　図１に示されるように、電子線照射装置１は、電子線通過孔２０を形成するチャンバ（筐体）３０と、電子線通過孔２０の後端２０ａを塞ぐようにチャンバ３０に気密に取り付けられた電子銃４０と、電子線通過孔２０の前端２０ｂを塞ぐようにチャンバ３０に気密に取り付けられた電子線透過ユニット５０と、を備えている。電子銃４０が発生した電子線ＥＢは、電子線通過孔２０をＺ軸方向前側に進行し、電子線透過ユニット５０を透過して外部に出射する。このような電子線照射装置１は、ライン上を搬送される照射対象物への電子線ＥＢの照射によって、当該照射対象物の乾燥、殺菌、表面改質等を行うために使用される。なお、電子線照射装置１によって電子線ＥＢが照射される側を前側、その反対側を後側とする。 As shown in FIG. 1, the electron beam irradiation apparatus 1 is hermetically attached to the chamber 30 so as to close the chamber (housing) 30 that forms the electron beam passage hole 20 and the rear end 20 a of the electron beam passage hole 20. And an electron beam transmission unit 50 that is airtightly attached to the chamber 30 so as to close the front end 20b of the electron beam passage hole 20. The electron beam EB generated by the electron gun 40 travels forward in the Z-axis direction through the electron beam passage hole 20, passes through the electron beam transmission unit 50, and exits to the outside. Such an electron beam irradiation apparatus 1 is used for performing drying, sterilization, surface modification, etc. of the irradiation object by irradiation of the electron object EB to the irradiation object conveyed on the line. In addition, the side irradiated with the electron beam EB by the electron beam irradiation apparatus 1 is a front side, and the opposite side is a rear side.
　チャンバ３０は、電子線ＥＢを発生する電子銃４０が取り付けられた筐体３１を有している。筐体３１は、金属により円柱状に形成されている。電子線通過孔２０のうち筐体３１によって形成される部分である電子線通過孔２１の断面は、円形状となっており、電子線通過孔２１は、前側の小径部と後側の大径部とが接続された形状となっている。 The chamber 30 has a housing 31 to which an electron gun 40 that generates an electron beam EB is attached. The housing 31 is formed in a cylindrical shape from metal. The cross section of the electron beam passage hole 21 which is a portion formed by the casing 31 in the electron beam passage hole 20 has a circular shape, and the electron beam passage hole 21 has a small diameter portion on the front side and a large diameter on the rear side. The part is connected to the shape.
　電子銃４０は、金属により直方体状に形成されたケース４１を有している。ケース４１は、筐体３１の後端部に気密に固定されている。ケース４１の前壁には、ケース４１内と筐体３１内とを連通させる開口４１ａが設けられている。ケース４１の側壁には、コネクタ４３を取り付けるための開口４１ｂが設けられている。 The electron gun 40 has a case 41 formed of metal in a rectangular parallelepiped shape. The case 41 is airtightly fixed to the rear end portion of the housing 31. The front wall of the case 41 is provided with an opening 41 a that allows the inside of the case 41 and the inside of the housing 31 to communicate with each other. An opening 41 b for attaching the connector 43 is provided on the side wall of the case 41.
　ケース４１内には、絶縁性材料（例えば、エポキシ樹脂等）からなる絶縁ブロック４２が配置されている。絶縁ブロック４２は、ケース４１内に収容された基部４２ａと、基部４２ａからＺ軸方向前側に突出する突出部４２ｂと、を有している。突出部４２ｂは、基部４２ａから開口４１ａを介して電子線通過孔２１の大径部内に突出しており、突出部４２ｂの前端部は、Ｚ軸方向において電子線通過孔２１の小径部の後端に対向している。基部４２ａは、ケース４１の開口４１ａ側及び開口４１ｂ側の内面と接触している。基部４２ａにおいてケース４１の内面と接触しない部分には、導電性材料からなるフィルム４５が貼り付けられており、フィルム４５は、ケース４１と電気的に接続されている。これにより、絶縁ブロック４２の表面電位を接地電位として、電子銃４０の動作の安定性を向上させることができる。 In the case 41, an insulating block 42 made of an insulating material (for example, epoxy resin) is disposed. The insulating block 42 has a base portion 42a accommodated in the case 41, and a protruding portion 42b protruding from the base portion 42a to the front side in the Z-axis direction. The protruding part 42b protrudes from the base part 42a through the opening 41a into the large diameter part of the electron beam passage hole 21, and the front end part of the protruding part 42b is the rear end of the small diameter part of the electron beam passage hole 21 in the Z-axis direction. Opposite to. The base 42 a is in contact with the inner surface of the case 41 on the opening 41 a side and the opening 41 b side. A film 45 made of a conductive material is attached to a portion of the base 42 a that does not contact the inner surface of the case 41, and the film 45 is electrically connected to the case 41. Thereby, the surface potential of the insulating block 42 can be set to the ground potential, and the operation stability of the electron gun 40 can be improved.
　コネクタ４３は、外部の電源装置から、カソードであるフィラメント４４に高電圧を供給するためのものである。コネクタ４３の基端部は、ケース４１の側壁の開口４１ｂを介して外部に突出しており、コネクタ４３の先端部は、絶縁ブロック４２に埋設されている。コネクタ４３の先端部には、一対の内部配線４６，４６が接続されている。一対の内部配線４６，４６は、突出部４２ｂの前端部まで延在しており、一対の給電用ピン４７，４７にそれぞれ接続されている。一対の給電用ピン４７，４７の先端部には、フィラメント４４が掛け渡されている。突出部４２ｂには、給電用ピン４７及びフィラメント４４を包囲するように、グリッド電極４８が固定されている。 The connector 43 is for supplying a high voltage to the filament 44 which is a cathode from an external power supply device. The base end portion of the connector 43 protrudes to the outside through the opening 41 b on the side wall of the case 41, and the tip end portion of the connector 43 is embedded in the insulating block 42. A pair of internal wirings 46, 46 are connected to the tip of the connector 43. The pair of internal wirings 46, 46 extends to the front end portion of the protruding portion 42b, and is connected to the pair of power supply pins 47, 47, respectively. A filament 44 is stretched around the tip portions of the pair of power supply pins 47, 47. A grid electrode 48 is fixed to the protruding portion 42 b so as to surround the power supply pin 47 and the filament 44.
　筐体３１には、電子線通過孔２１の小径部を挟んで対になるようにアライメントコイル２及び集束コイル３が設けられている。電子銃４０から出射して電子線通過孔２１を通過する電子線ＥＢは、アライメントコイル２によって、電子線ＥＢの中心線が電子線通過孔２０の中心線ＣＬに一致するように調整された後、集束コイル３によって、電子線透過ユニット５０に集束される。なお、筐体３１には、電子線通過孔２１と真空ポンプとを接続する排気管４が設けられており、これにより、チャンバ３０内（すなわち、電子線通過孔２０）が真空引きされる。 The casing 31 is provided with an alignment coil 2 and a focusing coil 3 so as to be paired with a small diameter portion of the electron beam passage hole 21 interposed therebetween. The electron beam EB emitted from the electron gun 40 and passing through the electron beam passage hole 21 is adjusted by the alignment coil 2 so that the center line of the electron beam EB coincides with the center line CL of the electron beam passage hole 20. The beam is focused on the electron beam transmission unit 50 by the focusing coil 3. The casing 31 is provided with the exhaust pipe 4 for connecting the electron beam passage hole 21 and the vacuum pump, and thereby the inside of the chamber 30 (that is, the electron beam passage hole 20) is evacuated.
　また、チャンバ３０は、筐体３１の前端面に固定された偏向管（筐体）３２を有している。偏向管３２は、オーステナイト系ステンレス（Ｆｅ／Ｎｉ／Ｃｒを含む合金）からなり、四角柱状の外形を有している。偏向管３２には、電子銃４０が発生した電子線ＥＢを入射させる入射側開口部３２ａ、及び電子線ＥＢを出射させる出射側開口部３２ｂが設けられている。電子線通過孔２０のうち偏向管３２によって形成される部分である電子線通過孔２２の断面は、Ｙ軸方向を長手方向とする長方形状となっている。偏向管３２の外側には、偏向管３２の内側を通過する電子線ＥＢを偏向する偏向コイル５が取り付けられている。集束コイル３によって集束されて電子線通過孔２２を通過する電子線ＥＢは、偏向コイル５によってＹ軸方向に偏向される。 The chamber 30 has a deflection tube (housing) 32 fixed to the front end surface of the housing 31. The deflection tube 32 is made of austenitic stainless steel (an alloy containing Fe / Ni / Cr) and has a quadrangular prism shape. The deflection tube 32 is provided with an incident side opening 32a for allowing the electron beam EB generated by the electron gun 40 to enter and an emission side opening 32b for emitting the electron beam EB. The cross section of the electron beam passage hole 22 which is a portion formed by the deflection tube 32 in the electron beam passage hole 20 has a rectangular shape whose longitudinal direction is the Y-axis direction. A deflection coil 5 that deflects the electron beam EB passing through the inside of the deflection tube 32 is attached to the outside of the deflection tube 32. The electron beam EB that is focused by the focusing coil 3 and passes through the electron beam passage hole 22 is deflected in the Y-axis direction by the deflection coil 5.
　更に、チャンバ３０は、偏向管３２の前端面に固定された走査管（筐体）３３を有している。走査管３３は、アルミニウム合金（アルミニウムを含む材料）、例えばＡｌ－Ｍｇ系アルミニウム合金からなり、前側に向かって末広がりの四角柱状の外形を有している。走査管３３には、電子銃４０が発生した電子線ＥＢを入射させる入射側開口部３３ａ、及び電子線ＥＢを出射させる出射側開口部３３ｂ（電子線通過孔２０の出射側開口部）が設けられている。電子線通過孔２０のうち走査管３３によって形成される部分である電子線通過孔２３の断面は、Ｙ軸方向を長手方向とする長方形状となっている。走査管３３の外表面（外部に露出する表面）には、外部への放熱性を高める観点から、走査管３３の内部よりも熱放射率の高い放熱膜３４が設けられている。放熱膜３４は、走査管３３の外表面にアルマイト処理を施すことにより形成されたアルマイト層である。 Furthermore, the chamber 30 has a scanning tube (housing) 33 fixed to the front end face of the deflection tube 32. The scanning tube 33 is made of an aluminum alloy (a material containing aluminum), for example, an Al—Mg-based aluminum alloy, and has a quadrangular prism-shaped outer shape that widens toward the front side. The scanning tube 33 is provided with an incident side opening 33a for allowing the electron beam EB generated by the electron gun 40 to enter, and an emission side opening 33b for emitting the electron beam EB (the emission side opening of the electron beam passage hole 20). It has been. The cross section of the electron beam passage hole 23, which is a portion formed by the scanning tube 33 in the electron beam passage hole 20, has a rectangular shape whose longitudinal direction is the Y-axis direction. On the outer surface of the scanning tube 33 (surface exposed to the outside), a heat radiation film 34 having a higher heat emissivity than that of the inside of the scanning tube 33 is provided from the viewpoint of improving heat dissipation to the outside. The heat dissipation film 34 is an alumite layer formed by subjecting the outer surface of the scanning tube 33 to an alumite treatment.
　なお、偏向管３２の後端部には、フランジ３５が設けられており、偏向管３２の前端部には、フランジ３６が設けられている。また、走査管３３の後端部には、フランジ３７が設けられており、走査管３３の前端部には、フランジ３８が設けられている。偏向管３２と走査管３３とは、フランジ３６とフランジ３７とがＯリング６を介して接触した状態で、複数のボルト７により気密に固定されている。これにより、偏向管３２は、電子銃４０が発生した電子線ＥＢが内側を通過するように、走査管３３の入射側開口部３３ａに接続されることになる。電子線照射装置１は、偏向管３２の後端部に設けられたフランジ３５を介して、適用先の設備の所定箇所に取り付けられる。 A flange 35 is provided at the rear end of the deflection tube 32, and a flange 36 is provided at the front end of the deflection tube 32. A flange 37 is provided at the rear end of the scanning tube 33, and a flange 38 is provided at the front end of the scanning tube 33. The deflection tube 32 and the scanning tube 33 are hermetically fixed by a plurality of bolts 7 in a state where the flange 36 and the flange 37 are in contact with each other via the O-ring 6. Thereby, the deflection tube 32 is connected to the incident side opening 33a of the scanning tube 33 so that the electron beam EB generated by the electron gun 40 passes inside. The electron beam irradiation apparatus 1 is attached to a predetermined location of the equipment to which it is applied via a flange 35 provided at the rear end of the deflection tube 32.
　電子線透過ユニット５０は、走査管３３の出射側開口部３３ｂに配置されている。走査管３３と電子線透過ユニット５０とは、フランジ３８と窓枠体５０ＡとがＯリング６を介して接触した状態で、複数のボルト７により気密に固定されている。図２及び図３に示されるように、電子線透過ユニット５０は、走査管３３の出射側開口部３３ｂに取り付けられた窓枠体５０Ａを有している。窓枠体５０Ａの内側には（つまり、窓枠体５０Ａを前側から見た場合に窓枠体５０Ａ内に収まるように）、支持部材５２、伝熱部材５９及び窓部材５５が配置されている。 The electron beam transmission unit 50 is disposed in the emission side opening 33 b of the scanning tube 33. The scanning tube 33 and the electron beam transmission unit 50 are hermetically fixed by a plurality of bolts 7 in a state where the flange 38 and the window frame 50 </ b> A are in contact via the O-ring 6. As shown in FIGS. 2 and 3, the electron beam transmission unit 50 has a window frame 50 </ b> A attached to the emission side opening 33 b of the scanning tube 33. A support member 52, a heat transfer member 59, and a window member 55 are disposed inside the window frame 50A (that is, within the window frame 50A when the window frame 50A is viewed from the front side). .
　窓枠体５０Ａは、走査管３３の出射側開口部３３ｂに固定された固定部材５１と、固定部材５１に対して窓部材５５及び伝熱部材５９を押圧した状態で、複数のボルトにより固定部材５１に固定された押圧部材５７と、を有している。固定部材５１及び押圧部材５７は、無酸素銅（銅を含む材料）からなり、Ｙ軸方向を長手方向とする長方形枠状の外形を有している。固定部材５１は、入射側開口５１ａを有しており、押圧部材５７は、Ｚ軸方向において入射側開口５１ａと対向する出射側開口５７ａを有している。固定部材５１及び押圧部材５７の外表面（外側に露出する表面）には、外部への放熱性を高める観点から、固定部材５１及び押圧部材５７の内部よりも熱放射率の高い放熱膜５８が設けられている。放熱膜５８は、固定部材５１及び押圧部材５７にニッケルめっきを施すことにより形成されたニッケル層である。 The window frame 50 </ b> A includes a fixing member 51 fixed to the emission side opening 33 b of the scanning tube 33, and a fixing member using a plurality of bolts while pressing the window member 55 and the heat transfer member 59 against the fixing member 51. And a pressing member 57 fixed to 51. The fixing member 51 and the pressing member 57 are made of oxygen-free copper (a material containing copper) and have a rectangular frame-shaped outer shape with the Y-axis direction as the longitudinal direction. The fixing member 51 has an incident side opening 51a, and the pressing member 57 has an emission side opening 57a facing the incident side opening 51a in the Z-axis direction. On the outer surfaces (surfaces exposed to the outside) of the fixing member 51 and the pressing member 57, a heat radiation film 58 having a higher heat emissivity than the inside of the fixing member 51 and the pressing member 57 is provided from the viewpoint of improving heat dissipation to the outside. Is provided. The heat dissipation film 58 is a nickel layer formed by performing nickel plating on the fixing member 51 and the pressing member 57.
　支持部材５２は、平板状の枠部５２ａと、枠部５２ａの内側に張られるように形成された金属メッシュ部５２ｂと、を有している。なお、金属メッシュ部５２ｂは、多角形状の網状に限らず、桟状にしてもよい。金属メッシュ部５２ｂにおける開口の配列は、規則的であるか否かを問わないが、支持部材５２を平面視したときに、開口全体が占める面積が、網状部を構成する（開口を区画する）金属部が占める面積よりも十分に大きいこと、換言すれば網状部を構成する金属部の幅が、開口部の幅よりも十分に小さいことが、電子透過性の向上のために重要である。支持部材５２は、オーステナイト系ステンレス（鉄を含む材料）からなる。枠部５２ａは、金属メッシュ部５２ｂが固定部材５１の入射側開口５１ａに臨んだ状態で、ロウ付け等により固定部材５１の前面に固定されている。なお、固定部材５１の前面において枠部５２ａが固定される領域の外側には、入射側開口５１ａを包囲するように延在する溝５１ｂが設けられており、溝５１ｂ内には、気密封止部材であるＯリング５３が配置されている。 The support member 52 includes a flat frame portion 52a and a metal mesh portion 52b formed to be stretched inside the frame portion 52a. Note that the metal mesh portion 52b is not limited to a polygonal net shape, and may be a bar shape. The arrangement of the openings in the metal mesh portion 52b does not matter whether it is regular or not, but when the support member 52 is viewed in plan, the area occupied by the entire opening constitutes a mesh portion (divides the openings). It is important for improving the electron permeability that the area occupied by the metal portion is sufficiently larger, in other words, the width of the metal portion constituting the mesh portion is sufficiently smaller than the width of the opening. The support member 52 is made of austenitic stainless steel (a material containing iron). The frame portion 52a is fixed to the front surface of the fixing member 51 by brazing or the like with the metal mesh portion 52b facing the incident side opening 51a of the fixing member 51. A groove 51b extending so as to surround the incident side opening 51a is provided outside the region where the frame portion 52a is fixed on the front surface of the fixing member 51, and the groove 51b is hermetically sealed. An O-ring 53 as a member is arranged.
　伝熱部材５９は、金属メッシュ部５２ｂと窓部材５５との間に配置される。より詳細には、伝熱部材５９は、金属メッシュ部５２ｂの前面の略全面を覆うとともに、気密封止部材であるＯリング５３に囲まれる領域内に含まれるように、金属メッシュ部５２ｂと窓部材５５との間に配置される。そのため、伝熱部材５９は、電子線照射装置１の動作時には外部雰囲気に晒されず、真空領域内に配置されることとなる。伝熱部材５９は、炭素を含む材料からなる５００μｍ以下の膜厚を有する膜であり、ここでは、膜厚７μｍのグラファイト製のメッシュが用いられている。伝熱部材５９の熱伝導率は、後述する金属膜である窓部材５５の熱伝導率よりも高くなっており、例えば、グラファイト製のメッシュは、熱伝導率の高い金属である銅の２～４倍の熱伝導率を有している。 The heat transfer member 59 is disposed between the metal mesh portion 52 b and the window member 55. More specifically, the heat transfer member 59 covers substantially the entire front surface of the metal mesh portion 52b, and is included in the region surrounded by the O-ring 53 that is an airtight sealing member, and the window portion and the metal mesh portion 52b. It arrange | positions between the members 55. FIG. Therefore, the heat transfer member 59 is not exposed to the external atmosphere during the operation of the electron beam irradiation apparatus 1 and is disposed in the vacuum region. The heat transfer member 59 is a film made of a material containing carbon and having a film thickness of 500 μm or less, and here, a graphite mesh having a film thickness of 7 μm is used. The thermal conductivity of the heat transfer member 59 is higher than the thermal conductivity of the window member 55 which is a metal film, which will be described later. For example, a graphite mesh is made of 2 to 2 of copper, which is a metal with high thermal conductivity. It has four times the thermal conductivity.
　伝熱部材５９は、その厚さ方向（前側および後ろ側）から見た場合に、その全面にわたって、配置がランダムな複数の微小な貫通孔（図示せず）を有しており、これらは通気孔として機能する。これにより、金属メッシュ部５２ｂの一つの開口に、伝熱部材５９の複数の通気孔が臨むことになる。つまり、金属メッシュ部５２ｂの一つの開口と伝熱部材５９の複数の通気孔とが、伝熱部材５９の厚さ方向から見た場合に対向することになる。 The heat transfer member 59 has a plurality of minute through holes (not shown) whose arrangement is random over the entire surface when viewed from the thickness direction (front side and rear side). Functions as a pore. Thereby, the several ventilation hole of the heat-transfer member 59 will face one opening of the metal mesh part 52b. That is, one opening of the metal mesh portion 52 b and the plurality of vent holes of the heat transfer member 59 face each other when viewed from the thickness direction of the heat transfer member 59.
　窓部材５５は、電子線ＥＢを透過させる金属膜であって、例えばチタンからなる、１～１０μｍ程度の厚さを持ったシート状の金属材である。窓部材５５は、支持部材５２及びＯリング５３を覆うように、固定部材５１の前面に配置されている。これにより、窓部材５５は、金属メッシュ部５２ｂ上に支持され、走査管３３の内側を通過した電子線ＥＢを透過させることになる。なお、伝熱部材５９と支持部材５２の枠部５２ａとの間には、Ｚ軸方向から見て入射側開口５１ａを包囲するように枠状に形成された保護シート５４が配置されおり、窓部材５５と押圧部材５７との間には、保護シート５４と略同等の形状に形成された保護シート５６が配置されている。保護シート５４，５６は、伝熱部材５９と同一の材料（グラファイト）からなる薄膜状の部材であり、枠部５２ａや押圧部材５７が窓部材５５や伝熱部材５９に直接接触して窓部材５５や伝熱部材５９が損傷するのを防止するものである。また、熱伝導率の高いグラファイトからなるために、保護シート５４，５６に熱が溜まることを抑制したり、窓部材５５の熱を押圧部材５７に伝えたりすることで、窓部材５５の放熱性を向上することもできる。 The window member 55 is a metal film that transmits the electron beam EB, and is a sheet-like metal material made of, for example, titanium and having a thickness of about 1 to 10 μm. The window member 55 is disposed on the front surface of the fixing member 51 so as to cover the support member 52 and the O-ring 53. As a result, the window member 55 is supported on the metal mesh portion 52 b and transmits the electron beam EB that has passed through the inside of the scanning tube 33. Between the heat transfer member 59 and the frame portion 52a of the support member 52, a protective sheet 54 formed in a frame shape so as to surround the incident side opening 51a when viewed from the Z-axis direction is disposed. Between the member 55 and the pressing member 57, the protective sheet 56 formed in the shape substantially equivalent to the protective sheet 54 is arrange | positioned. The protective sheets 54 and 56 are thin-film members made of the same material (graphite) as the heat transfer member 59, and the frame member 52a and the pressing member 57 are in direct contact with the window member 55 and the heat transfer member 59 so as to be a window member. 55 and the heat transfer member 59 are prevented from being damaged. Moreover, since it consists of graphite with high heat conductivity, heat dissipation of the window member 55 is suppressed by suppressing heat accumulation in the protective sheets 54 and 56 or by transferring the heat of the window member 55 to the pressing member 57. Can also be improved.
　電子線透過ユニット５０においては、押圧部材５７が、支持部材５２の枠部５２ａ及びＯリング５３を介して、固定部材５１に窓部材５５を押圧している。そして、この状態で、固定部材５１と押圧部材５７とが、複数のボルト（押圧部材５７に設けられた複数の貫通孔５７ｂに挿通されて、固定部材５１に設けられた複数のねじ孔５１ｄに螺合されるボルト）により気密に固定されている。これにより、固定部材５１及び押圧部材５７は、支持部材５２の枠部５２ａにおいて窓部材５５を挟持することになる。なお、固定部材５１には、電子線透過ユニット５０を走査管３３のフランジ３８に固定するためのボルト７が挿通される複数の貫通孔５１ｃが設けられている。 In the electron beam transmission unit 50, the pressing member 57 presses the window member 55 against the fixing member 51 via the frame portion 52a of the support member 52 and the O-ring 53. In this state, the fixing member 51 and the pressing member 57 are inserted into a plurality of bolts (a plurality of through holes 57b provided in the pressing member 57 and into a plurality of screw holes 51d provided in the fixing member 51. It is airtightly fixed by bolts to be screwed together. Accordingly, the fixing member 51 and the pressing member 57 sandwich the window member 55 in the frame portion 52a of the support member 52. The fixing member 51 is provided with a plurality of through holes 51c through which the bolts 7 for fixing the electron beam transmission unit 50 to the flange 38 of the scanning tube 33 are inserted.
　以上のように構成された電子線照射装置１の動作について説明する。排気管４を介して真空ポンプによってチャンバ３０内（すなわち、電子線通過孔２０）が真空引きされ、フィラメント４４に高電圧が印加されると、フィラメント４４から電子が放出される。フィラメント４４から放出された電子は、グリッド電極４８によって形成された電界により加速及び集束され、これにより、電子線ＥＢがＺ軸方向前側に出射する。 The operation of the electron beam irradiation apparatus 1 configured as described above will be described. When the inside of the chamber 30 (that is, the electron beam passage hole 20) is evacuated by the vacuum pump through the exhaust pipe 4 and a high voltage is applied to the filament 44, electrons are emitted from the filament 44. The electrons emitted from the filament 44 are accelerated and focused by the electric field formed by the grid electrode 48, whereby the electron beam EB is emitted forward in the Z-axis direction.
　電子銃４０から出射して電子線通過孔２１を通過する電子線ＥＢは、アライメントコイル２によって、電子線ＥＢの中心線が電子線通過孔２０の中心線ＣＬに一致するように調整された後、集束コイル３によって、電子線透過ユニット５０に集束される。集束コイル３によって集束されて電子線通過孔２２を通過する電子線ＥＢは、偏向コイル５によってＹ軸方向に偏向される。つまり、電子線通過孔２３を通過する電子線ＥＢの中心線がＹ軸方向に沿って線状に繰り返し振られる。 The electron beam EB emitted from the electron gun 40 and passing through the electron beam passage hole 21 is adjusted by the alignment coil 2 so that the center line of the electron beam EB coincides with the center line CL of the electron beam passage hole 20. The beam is focused on the electron beam transmission unit 50 by the focusing coil 3. The electron beam EB that is focused by the focusing coil 3 and passes through the electron beam passage hole 22 is deflected in the Y-axis direction by the deflection coil 5. That is, the center line of the electron beam EB passing through the electron beam passage hole 23 is repeatedly oscillated linearly along the Y-axis direction.
　偏向コイル５によってＹ軸方向に偏向された電子線ＥＢは、電子線透過ユニット５０の窓部材５５を透過して外部に出射する。外部に出射した電子線ＥＢは、照射対象物の乾燥、殺菌、表面改質等のために、ライン上を搬送される当該照射対象物に照射される。 The electron beam EB deflected in the Y-axis direction by the deflection coil 5 passes through the window member 55 of the electron beam transmission unit 50 and exits to the outside. The electron beam EB emitted to the outside is irradiated to the irradiation object conveyed on the line for drying, sterilization, surface modification, and the like of the irradiation object.
　以上説明したように、電子線照射装置１及び電子線透過ユニット５０では、窓部材５５が金属メッシュ部５２ｂを有する支持部材５２によって支持されているために、十分な耐圧強度を得ることができるとともに、窓部材５５の厚さを薄くできるので、窓部材５５での発熱を抑制することができる。更に、金属メッシュ部５２ｂと窓部材５５との間において、気密封止部材であるＯリング５３に囲まれる領域内に含まれるように配置された伝熱部材５９が窓部材５５よりも熱伝導率の高いグラファイト製のメッシュからなっているため、外部雰囲気との接触によって薄膜化することなく熱伝導率を高めることができる。しかも、伝熱部材５９が通気孔を有するため、電子線照射時に筐体内が真空引きされた状態では窓部材５５が金属メッシュ部５２ｂ側に引き寄せられて、金属メッシュ部５２ｂ上で窓部材５５と伝熱部材５９とが密着することになるので、窓部材５５と伝熱部材５９とを支持部材５２で確実に支持しつつ、窓部材５５で発生する熱を容易に逃がすことができる。また、窓部材５５が金属膜からなっているため、外部雰囲気に対する安定性を向上させることができる。よって、電子線照射装置１及び電子線透過ユニット５０によれば、窓部材５５の耐圧強度を確保しながら、窓部材５５が劣化するのを抑制することができる。また、支持部材５２の金属メッシュ部５２ｂがオーステナイト系ステンレスからなっている。これにより、金属メッシュ部５２ｂの強度や加工性、耐熱性を向上させることができ、その結果、金属メッシュ部５２ｂを構成する線材の小径化を図り、電子線ＥＢを通過させ易くすることができる。 As described above, in the electron beam irradiation apparatus 1 and the electron beam transmission unit 50, since the window member 55 is supported by the support member 52 having the metal mesh portion 52b, sufficient pressure resistance can be obtained. And since the thickness of the window member 55 can be made thin, the heat_generation | fever in the window member 55 can be suppressed. Further, the heat transfer member 59 disposed between the metal mesh portion 52 b and the window member 55 so as to be included in the region surrounded by the O-ring 53, which is an airtight sealing member, has a thermal conductivity higher than that of the window member 55. Since it is made of a high-quality graphite mesh, the thermal conductivity can be increased without being thinned by contact with the external atmosphere. In addition, since the heat transfer member 59 has a vent hole, the window member 55 is drawn toward the metal mesh portion 52b in a state where the inside of the casing is evacuated during the electron beam irradiation, and the window member 55 and the metal mesh portion 52b Since the heat transfer member 59 is in close contact, the heat generated in the window member 55 can be easily released while the window member 55 and the heat transfer member 59 are reliably supported by the support member 52. Further, since the window member 55 is made of a metal film, the stability to the external atmosphere can be improved. Therefore, according to the electron beam irradiation apparatus 1 and the electron beam transmission unit 50, it is possible to prevent the window member 55 from deteriorating while securing the pressure resistance strength of the window member 55. The metal mesh portion 52b of the support member 52 is made of austenitic stainless steel. Thereby, the strength, workability, and heat resistance of the metal mesh portion 52b can be improved. As a result, the diameter of the wire constituting the metal mesh portion 52b can be reduced, and the electron beam EB can be easily passed. .
　なお、窓部材５５と伝熱部材５９との密着性をより高めるためには、伝熱部材５９上に窓部材５５の材料からなる金属膜を直接形成することも考えられるが、グラファイトの表面には微細な凹凸があるために、電子透過性の良好な厚さでもってピンホールなく金属膜を形成するのは困難である。また、金属材料とグラファイトの熱膨張率の違いから、金属膜が剥離してしまう可能性もある。対して、窓部材５５をシート状の金属材で構成し、かつ伝熱部材５９に通気孔を設けることで、窓部材５５の真空保持能と伝熱部材５９への密着性の向上、つまり窓部材５５の耐圧強度を確保しながら、窓部材５５が劣化するのを抑制することができる。 In order to further improve the adhesion between the window member 55 and the heat transfer member 59, it may be possible to directly form a metal film made of the material of the window member 55 on the heat transfer member 59, but on the surface of the graphite. Since there are fine irregularities, it is difficult to form a metal film without pinholes with a thickness with good electron permeability. In addition, the metal film may peel off due to the difference in thermal expansion coefficient between the metal material and graphite. On the other hand, the window member 55 is made of a sheet-like metal material, and the heat transfer member 59 is provided with a ventilation hole, thereby improving the vacuum holding ability of the window member 55 and the adhesion to the heat transfer member 59, that is, the window. Deterioration of the window member 55 can be suppressed while ensuring the pressure resistance of the member 55.
　伝熱部材５９の膜厚は、５００μｍ以下であり、好ましくは１～５００μｍである。より好ましくは３～１００μｍ、更に好ましくは５～２０μｍである。このような膜厚によれば、例えば２００ｋＶ程度までの比較的低い管電圧で動作する電子線照射装置１において、炭素材料の持つ電子透過能と熱伝導性を有効に生かすことができ、電子線透過ユニット５０における電子線ＥＢの透過効率を維持しつつ、窓部材５５で発生する熱をより容易に逃がすことができる。 The film thickness of the heat transfer member 59 is 500 μm or less, preferably 1 to 500 μm. More preferably, it is 3 to 100 μm, and further preferably 5 to 20 μm. According to such a film thickness, for example, in the electron beam irradiation apparatus 1 operating at a relatively low tube voltage up to about 200 kV, the electron transmission ability and thermal conductivity of the carbon material can be effectively utilized. While maintaining the transmission efficiency of the electron beam EB in the transmission unit 50, the heat generated in the window member 55 can be released more easily.
　また、電子線照射装置１及び電子線透過ユニット５０では、窓枠体５０Ａが金属材料である無酸素銅からなっているため、窓部材５５で発生する熱をより容易に逃がすことができる。 Moreover, in the electron beam irradiation apparatus 1 and the electron beam transmission unit 50, since the window frame 50A is made of oxygen-free copper which is a metal material, heat generated in the window member 55 can be released more easily.
　また、電子線照射装置１及び電子線透過ユニット５０では、伝熱部材５９が通気孔を複数有するため、電子線照射時における筐体内の真空引きの際に、窓部材５５と伝熱部材５９との間の空間の排気が確実化されるため、窓部材５５と伝熱部材５９との密着性がより一層向上する。また、金属メッシュ部５２ｂの一つの開口には、複数の通気孔が臨んでいることから、支持部材５２と窓部材５５との間の空間の排気をより確実化することができると共に、電子線透過ユニットにおける電子線ＥＢの透過効率を向上させることができる。 Moreover, in the electron beam irradiation apparatus 1 and the electron beam transmission unit 50, since the heat transfer member 59 has a plurality of vent holes, the window member 55, the heat transfer member 59, and the Since the exhaust of the space between them is ensured, the adhesion between the window member 55 and the heat transfer member 59 is further improved. In addition, since a plurality of ventilation holes face one opening of the metal mesh portion 52b, the exhaust of the space between the support member 52 and the window member 55 can be further ensured, and the electron beam The transmission efficiency of the electron beam EB in the transmission unit can be improved.
　また、窓枠体５０Ａでは、固定部材５１及び押圧部材５７が支持部材５２の枠部５２ａにおいて窓部材５５を挟持している。これにより、固定部材５１及び押圧部材５７による挟持部分の封止を確実化することができる。 Further, in the window frame body 50 </ b> A, the fixing member 51 and the pressing member 57 sandwich the window member 55 in the frame portion 52 a of the support member 52. Thereby, sealing of the clamping part by the fixing member 51 and the pressing member 57 can be ensured.
　以上、本発明の実施形態について説明したが、本発明は、上記実施形態に限定されるものではない。例えば、伝熱部材の材質について、上記実施形態では、炭素を含む材料からなる膜としてグラファイト製のメッシュを適用した態様を示したが、カーボンナノチューブ、グラフェン、ダイヤモンド等を適用することもできる。 As mentioned above, although embodiment of this invention was described, this invention is not limited to the said embodiment. For example, as for the material of the heat transfer member, in the above-described embodiment, an aspect in which a graphite mesh is applied as a film made of a material containing carbon is shown, but carbon nanotubes, graphene, diamond, or the like can also be applied.
　また、伝熱部材が有する通気孔について、上記実施形態では、複数の通気孔がランダムに配置された態様を示したが、複数の通気孔が周期的に配置されていてもよい。また、通気孔は一つであってもよい。更に、通気孔の形状は、円形、四角形等、様々な形状であってもよい。つまり、伝熱部材においては、その厚さ方向から見た場合に、少なくとも一箇所に通気性のある孔が存在すればよい。 In addition, regarding the vent holes of the heat transfer member, the embodiment described the mode in which the plurality of vent holes are randomly arranged, but the plurality of vent holes may be periodically arranged. Further, there may be one vent hole. Furthermore, the shape of the air holes may be various shapes such as a circle and a rectangle. That is, in the heat transfer member, it is only necessary to have a breathable hole in at least one place when viewed from the thickness direction.
　また、保護シート５４，５６もグラファイト以外の炭素材料でもよく、炭素材料以外の材料でもよいし、挟持される構成物の強度が十分ならば、保護シートを設けなくてもよい。 Also, the protective sheets 54 and 56 may be made of a carbon material other than graphite, or may be made of a material other than the carbon material, or the protective sheet may not be provided if the sandwiched structure has sufficient strength.
　さらに、支持部材５２は、一枚（単層）ではなく、複数の部材を積層してもよい。この場合、さらなる耐圧強度の向上が期待できる。この際、複数の支持部材がそれぞれ異なる金属材料から形成されていてもよく、例えば固定部材５１側の第1の支持部材と、伝熱部材５９側の第２の支持部材とを積層した２層構造としてもよい。この場合、より耐圧強度の必要な第1の支持部材においては、第２の支持部材よりも剛性の大きな金属材料からなり、第２の支持部材に関しては、補助的な役割であることを考慮して、第１の支持部材よりも熱伝導率の大きな金属材料で形成することで、耐圧強度と放熱性を向上させることができる。例えば、第1の支持部材の材料としてはオーステナイト系ステンレスが、第２の支持部材の材料としては銅の組み合わせが挙げられる。 Furthermore, the support member 52 may be a single member (single layer), and a plurality of members may be laminated. In this case, further improvement in pressure resistance can be expected. At this time, the plurality of support members may be formed of different metal materials, for example, two layers in which a first support member on the fixing member 51 side and a second support member on the heat transfer member 59 side are stacked. It is good also as a structure. In this case, the first support member that requires higher pressure strength is made of a metal material having a higher rigidity than the second support member, and the second support member is considered to be an auxiliary role. And by forming with a metal material with larger thermal conductivity than the 1st supporting member, pressure-resistant intensity | strength and heat dissipation can be improved. For example, the material of the first support member is austenitic stainless steel, and the material of the second support member is a combination of copper.
　また、図４に示されるように、固定部材５１と押圧部材５７との間にシート状のシール材６１を配置し、固定部材５１及び押圧部材５７に窓部材５５を挟持させた状態で、シール材６１を溶融・再固化させることにより、固定部材５１と押圧部材５７とを気密に固定してもよい。この場合、上述したＯリング５３や、固定部材５１に押圧部材５７を固定するためのボルトが不要となる。更に、当該ボルトを挿通するための貫通孔５７ｂの加工や、当該ボルトを螺合するためのねじ孔５１ｄの加工も不要となる。 Further, as shown in FIG. 4, the sheet-like sealing material 61 is disposed between the fixing member 51 and the pressing member 57, and the sealing member 61 and the pressing member 57 are sandwiched between the window member 55 and the sealing member 61. The fixing member 51 and the pressing member 57 may be airtightly fixed by melting and resolidifying the material 61. In this case, the O-ring 53 and the bolt for fixing the pressing member 57 to the fixing member 51 are not necessary. Further, the processing of the through hole 57b for inserting the bolt and the processing of the screw hole 51d for screwing the bolt become unnecessary.
　また、電子線照射装置及び電子線透過ユニットの各構成部材の形状として、上記実施形態では、ライン照射型の電子線照射装置及び電子線透過ユニットを提供する形状を示したが、スポット照射型の電子線照射装置及び電子線透過ユニットを提供する形状としてもよい。 Further, as the shapes of the constituent members of the electron beam irradiation apparatus and the electron beam transmission unit, in the above embodiment, the shape of providing the line irradiation type electron beam irradiation apparatus and the electron beam transmission unit is shown. It is good also as a shape which provides an electron beam irradiation apparatus and an electron beam transmission unit.
　１…電子線照射装置、２０，２１，２２，２３…電子線通過孔、３０…チャンバ（筐体）、３１…筐体、３２…偏向管（筐体）、３３…走査管（筐体）、３３ｂ…出射側開口部、４０…電子銃、５０…電子線透過ユニット、５０Ａ…窓枠体、５１…固定部材、５２…支持部材、５２ａ…枠部、５２ｂ…金属メッシュ部、５５…窓部材、５７…押圧部材、５９…伝熱部材、ＥＢ…電子線。 DESCRIPTION OF SYMBOLS 1 ... Electron beam irradiation apparatus, 20, 21, 22, 23 ... Electron beam passage hole, 30 ... Chamber (housing), 31 ... Housing, 32 ... Deflection tube (housing), 33 ... Scanning tube (housing) 33b: Emission side opening, 40 ... Electron gun, 50 ... Electron beam transmission unit, 50A ... Window frame, 51 ... Fixing member, 52 ... Supporting member, 52a ... Frame, 52b ... Metal mesh part, 55 ... Window Member 57 ... Pressing member 59 ... Heat transfer member EB ... Electron beam.

Claims (7)

  1. 　電子線を発生する電子銃と、
    　前記電子銃が発生した前記電子線を通過させる電子線通過孔が設けられた筐体と、
    　前記電子線通過孔の出射側開口部に配置された電子線透過ユニットと、を備え、
    　前記電子線透過ユニットは、
    　前記出射側開口部に取り付けられた窓枠体と、
    　前記窓枠体の内側に配置された金属メッシュ部を有する支持部材と、
    　前記金属メッシュ部上に支持され、前記電子線通過孔を通過した前記電子線を透過させる金属膜である窓部材と、
    　前記金属メッシュ部と前記窓部材との間に配置された伝熱部材と、を有し、
    　前記伝熱部材は、炭素を含む材料からなる膜であり、通気孔を有する、電子線照射装置。     An electron gun that generates an electron beam;
    A housing provided with an electron beam passage hole through which the electron beam generated by the electron gun passes;
    An electron beam transmission unit disposed at the exit side opening of the electron beam passage hole, and
    The electron beam transmission unit is
    A window frame attached to the exit side opening;
    A support member having a metal mesh portion disposed inside the window frame,
    A window member that is supported on the metal mesh part and is a metal film that transmits the electron beam that has passed through the electron beam passage hole;
    A heat transfer member disposed between the metal mesh portion and the window member,
    The heat transfer member is an electron beam irradiation apparatus that is a film made of a material containing carbon and has a vent hole.
  2. 　前記窓枠体は、金属材料からなる、請求項１記載の電子線照射装置。 The electron beam irradiation apparatus according to claim 1, wherein the window frame is made of a metal material.
  3. 　前記伝熱部材は、前記通気孔を複数有する、請求項１又は２記載の電子線照射装置。 The electron beam irradiation apparatus according to claim 1 or 2, wherein the heat transfer member has a plurality of the vent holes.
  4. 　前記金属メッシュ部の一つの開口には、複数の前記通気孔が臨んでいる、請求項１～３のいずれか一項記載の電子線照射装置。 The electron beam irradiation apparatus according to any one of claims 1 to 3, wherein a plurality of the vent holes face one opening of the metal mesh portion.
  5. 　前記伝熱部材の膜厚は５００μｍ以下である、請求項１～４のいずれか一項記載の電子線照射装置。 The electron beam irradiation apparatus according to any one of claims 1 to 4, wherein a film thickness of the heat transfer member is 500 μm or less.
  6. 　前記窓枠体は、前記電子線通過孔の前記出射側開口部に固定された枠状の固定部材と、前記固定部材に対して少なくとも前記窓部材を押圧した状態で前記固定部材に固定された枠状の押圧部材と、を有し、
    　前記支持部材は、内側に前記金属メッシュ部が張られた平板状の枠部を更に有し、
    　前記固定部材及び前記押圧部材は、前記枠部において少なくとも前記窓部材を挟持している、請求項１～５のいずれか一項記載の電子線照射装置。     The window frame is fixed to the fixing member in a state where at least the window member is pressed against the fixing member, and a frame-shaped fixing member fixed to the emission side opening of the electron beam passage hole. A frame-shaped pressing member,
    The support member further includes a plate-like frame portion on which the metal mesh portion is stretched,
    The electron beam irradiation apparatus according to any one of claims 1 to 5, wherein the fixing member and the pressing member sandwich at least the window member in the frame portion.
  7. 　電子線を発生する電子銃と、前記電子銃が発生した前記電子線を通過させる電子線通過孔が設けられた筐体と、を具備する電子線照射装置において、前記電子線通過孔の出射側開口部に配置されて、前記電子線通過孔を通過した前記電子線を透過させるための電子線透過ユニットであって、
    　前記出射側開口部に取り付けられるための窓枠体と、
    　前記窓枠体の内側に配置された金属メッシュ部を有する支持部材と、
    　前記金属メッシュ部上に支持され、前記電子線通過孔を通過した電子線を透過させる金属膜である窓部材と、
    　前記金属メッシュ部と前記窓部材との間に配置された伝熱部材と、を備え、
    　前記伝熱部材は、炭素を含む材料からなる膜であり、通気孔を有する、電子線透過ユニット。     An electron beam irradiation apparatus comprising: an electron gun that generates an electron beam; and a housing provided with an electron beam passage hole through which the electron beam generated by the electron gun passes. An electron beam transmission unit disposed in the opening for transmitting the electron beam that has passed through the electron beam passage hole,
    A window frame to be attached to the exit side opening,
    A support member having a metal mesh portion disposed inside the window frame,
    A window member that is supported on the metal mesh portion and is a metal film that transmits the electron beam that has passed through the electron beam passage hole;
    A heat transfer member disposed between the metal mesh portion and the window member,
    The heat transfer member is an electron beam transmission unit that is a film made of a material containing carbon and has a vent hole.
PCT/JP2012/082827 2012-02-08 2012-12-18 Electron beam radiation apparatus and electron beam transmission unit WO2013118393A1 (en)

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JP6068693B1 (en) 2016-01-08 2017-01-25 浜松ホトニクス株式会社 Electron beam irradiation device
JP6731328B2 (en) 2016-11-09 2020-07-29 日立造船株式会社 Electron beam irradiation device
JP6139771B1 (en) * 2016-12-22 2017-05-31 浜松ホトニクス株式会社 Electron beam irradiation device
JP2021189038A (en) * 2020-05-29 2021-12-13 浜松ホトニクス株式会社 Electron beam irradiation apparatus and method for manufacturing electron beam irradiation apparatus

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WO2002078039A1 (en) * 2001-03-21 2002-10-03 Advanced Electron Beams, Inc. Exit window for electron beam emitter
JP2006162535A (en) * 2004-12-10 2006-06-22 Ushio Inc Electron beam tube
JP2008079891A (en) * 2006-09-28 2008-04-10 Japan Ae Power Systems Corp Electron beam irradiation apparatus
JP2008128977A (en) * 2006-11-24 2008-06-05 Hamamatsu Photonics Kk Electron beam irradiation equipment

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002078039A1 (en) * 2001-03-21 2002-10-03 Advanced Electron Beams, Inc. Exit window for electron beam emitter
JP2006162535A (en) * 2004-12-10 2006-06-22 Ushio Inc Electron beam tube
JP2008079891A (en) * 2006-09-28 2008-04-10 Japan Ae Power Systems Corp Electron beam irradiation apparatus
JP2008128977A (en) * 2006-11-24 2008-06-05 Hamamatsu Photonics Kk Electron beam irradiation equipment

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