JP5829542B2 - Electron beam irradiation apparatus and electron beam transmission unit - Google Patents

Description

  The present invention relates to an electron beam irradiation apparatus and an electron beam transmission unit used therefor.

  2. Description of the Related Art As a conventional electron beam irradiation apparatus, an apparatus including a chamber to be evacuated, an electron gun disposed in the chamber, and an electron beam transmission unit attached to the chamber is known. In such an electron beam irradiation apparatus, the electron beam generated by the electron gun passes through the window member of the electron beam transmission unit and exits from the chamber. Therefore, the electron beam transmission unit needs to be configured so that the window member can maintain strength (pressure resistance strength) for withstanding the pressure difference between the vacuum in the chamber and the outside.

  On the other hand, in the electron beam transmission unit as described above, the energy of the electrons that have not passed through the window member out of the electrons incident on the window member becomes heat energy and generates heat. For this reason, the window member is likely to deteriorate and have a short life.

  Therefore, various studies have been made on the window member together with its constituent materials and a support member for supporting the window member. For example, an example in which a structural foil having high thermal conductivity is provided between a diamond window member and a support member (see Patent Document 1), and an example in which a titanium window member is supported by a support member made of a carbon fiber bundle ( An example using a graphite sheet provided with an antioxidant film as a window member (see Patent Document 2) is known (see Patent Document 3).

Japanese Patent No. 4557279 JP-T-8-501651 JP 2008-78991 A

  However, each of the above examples has the following problems. That is, although the window member made of diamond described in Patent Document 1 has good heat dissipation of the window member itself, due to contact with the external atmosphere, the pressure resistance strength decreases because it reacts with oxygen at the time of electron emission and becomes thin, It may be damaged. In Patent Document 2, a titanium window member is supported by a support lattice made of a carbon fiber bundle that is a heat-dissipating material. However, the lattice structure using the carbon fiber bundle has low design freedom, and the heat of the carbon fiber bundle is low. Since conductivity is relatively inferior, it is difficult to achieve both pressure strength and heat dissipation. Furthermore, the window member made of the graphite sheet described in Patent Document 3 has good heat dissipation, but the side end face is not provided with an antioxidant film, and there is a possibility that a pinhole exists in the antioxidant film. Therefore, there is a possibility that it will react with oxygen at the time of electron emission to form a thin film, resulting in a decrease in pressure resistance. In addition, since there is no support member for supporting the graphite sheet, the pressure strength is low in the first place.

  As described above, in order to suppress the deterioration of the window member, in order to improve the heat dissipation (thermal conductivity) in the window member, it is necessary to form the window member with a film material mainly composed of carbon having good heat conductivity. Although it is conceivable, when the film material mainly composed of carbon is exposed to an external atmosphere containing oxygen in a state where electrons are emitted (heated state) as described above, the film material gradually becomes thin, and the pressure resistance strength is lowered to be finally obtained. May be damaged. On the other hand, when a metal film is used as the material of the window member, the stability to the external atmosphere is high, but the heat dissipation is usually poor as compared with the film material mainly composed of carbon.

  In order to suppress the deterioration of the window member, it is also conceivable to suppress the heat generation itself in the window member. In order to suppress the heat generation itself in the window member, it is preferable to increase the electron permeability in the window member. However, since the window member also requires pressure resistance, if the window member is simply made thin, it cannot withstand the pressure and may be broken.

  An object of this invention is to provide the electron beam irradiation apparatus and electron beam transmission unit which can suppress that a window member deteriorates, ensuring the pressure | voltage resistant strength of a window member.

  An electron beam irradiation apparatus according to the present invention includes an electron gun that generates an electron beam, a housing provided with an electron beam passage hole through which the electron beam generated by the electron gun passes, and an emission side opening of the electron beam passage hole. An electron beam transmission unit, the electron beam transmission unit comprising: a window frame attached to the emission side opening; a support member having a metal mesh portion arranged inside the window frame; and a metal A window member, which is a metal film that is supported on the mesh portion and transmits the electron beam that has passed through the electron beam passage hole, and a heat transfer member that is disposed between the metal mesh portion and the window member. The thermal member is a film made of a material containing carbon and has a vent hole.

  An electron beam transmission unit according to the present invention is an electron beam irradiation apparatus comprising: an electron gun that generates an electron beam; and a housing provided with an electron beam passage hole through which the electron beam generated by the electron gun passes. An electron beam transmission unit that is disposed in an emission side opening of a line passage hole and transmits an electron beam that has passed through the electron beam passage hole, and a window frame body that is attached to the emission side opening, and a window A support member having a metal mesh portion disposed inside the frame, a window member that is supported on the metal mesh portion and is a metal film that transmits an electron beam that has passed through an electron beam passage hole, a metal mesh portion, and a window; The heat transfer member is a film made of a material containing carbon and has a vent hole.

  In this electron beam irradiation apparatus and the electron beam transmission unit, since the window member is supported by the support member having the metal mesh portion, it is possible to obtain a sufficient pressure resistance and to reduce the thickness of the window member. Heat generation at the window member can be suppressed. Furthermore, since the heat transfer member disposed between the metal mesh portion and the window member is a film made of a material containing carbon, the thermal conductivity can be increased without being thinned by contact with the external atmosphere. In addition, since the heat transfer member has a vent hole, the window member is drawn toward the metal mesh portion in a state where the inside of the housing is evacuated at the time of electron beam irradiation, and the window member and the heat transfer member are formed on the metal mesh portion. It will be in close contact. As described above, since the window member comes into close contact with the heat transfer member having a high thermal conductivity during electron beam irradiation, the heat generated in the window member can be easily released. Moreover, since the window member is a metal film, the stability to the external atmosphere can be improved. Therefore, according to the electron beam irradiation apparatus and the electron beam transmission unit, it is possible to prevent the window member from deteriorating while ensuring the pressure resistance of the window member.

  The window frame may be made of a metal material. According to this structure, the heat generated in the window member can be released more easily.

  The heat transfer member may have a plurality of vent holes. According to this configuration, since the exhaust of the space between the window member and the heat transfer member is ensured at the time of evacuation in the housing at the time of electron beam irradiation, the adhesion between the window member and the heat transfer member is ensured. Can be further improved.

  A plurality of ventilation holes may face one opening of the metal mesh portion. According to this configuration, exhaust of the space between the window member and the heat transfer member can be further ensured, and the electron beam transmission efficiency in the electron beam transmission unit can be improved.

  The film thickness of the heat transfer member may be 500 μm or less. According to this configuration, heat generated in the window member can be released more easily while maintaining the electron beam transmission efficiency in the electron beam transmission unit.

  The window frame includes a frame-shaped fixing member fixed to the exit side opening of the electron beam passage hole, and a frame-shaped pressing member fixed to the fixing member in a state where at least the window member is pressed against the fixing member. The support member may further include a flat frame portion with a metal mesh portion stretched inside, and the fixing member and the pressing member may sandwich at least the window member in the frame portion. . According to this structure, the sealing of the clamping part by a fixing member and a press member can be ensured.

  ADVANTAGE OF THE INVENTION According to this invention, it becomes possible to provide the electron beam irradiation apparatus and electron beam transmission unit which can suppress that a window member deteriorates, ensuring the pressure | voltage resistant strength of a window member.

It is a longitudinal cross-sectional view of the electron beam irradiation apparatus of one Embodiment of this invention. FIG. 2 is an exploded cross-sectional view of an electron beam transmission unit of the electron beam irradiation apparatus of FIG. 1. It is a disassembled perspective view of the electron beam transmission unit of the electron beam irradiation apparatus of FIG. It is an exploded sectional view of the electron beam transmission unit of other embodiments of the present invention.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In addition, in each figure, the same code | symbol is attached | subjected to the same or an equivalent part, and the overlapping description is abbreviate | omitted.

  As shown in FIG. 1, the electron beam irradiation apparatus 1 is hermetically attached to the chamber 30 so as to close the chamber (housing) 30 that forms the electron beam passage hole 20 and the rear end 20 a of the electron beam passage hole 20. And an electron beam transmission unit 50 that is airtightly attached to the chamber 30 so as to close the front end 20b of the electron beam passage hole 20. The electron beam EB generated by the electron gun 40 travels forward in the Z-axis direction through the electron beam passage hole 20, passes through the electron beam transmission unit 50, and exits to the outside. Such an electron beam irradiation apparatus 1 is used for performing drying, sterilization, surface modification, etc. of the irradiation object by irradiation of the electron object EB to the irradiation object conveyed on the line. In addition, the side irradiated with the electron beam EB by the electron beam irradiation apparatus 1 is a front side, and the opposite side is a rear side.

  The chamber 30 has a housing 31 to which an electron gun 40 that generates an electron beam EB is attached. The housing 31 is formed in a cylindrical shape from metal. The cross section of the electron beam passage hole 21 which is a portion formed by the casing 31 in the electron beam passage hole 20 has a circular shape, and the electron beam passage hole 21 has a small diameter portion on the front side and a large diameter on the rear side. The part is connected to the shape.

  The electron gun 40 has a case 41 formed of a metal in a rectangular parallelepiped shape. The case 41 is airtightly fixed to the rear end portion of the housing 31. The front wall of the case 41 is provided with an opening 41 a that allows the inside of the case 41 and the inside of the housing 31 to communicate with each other. An opening 41 b for attaching the connector 43 is provided on the side wall of the case 41.

  In the case 41, an insulating block 42 made of an insulating material (for example, epoxy resin) is disposed. The insulating block 42 has a base portion 42a accommodated in the case 41, and a protruding portion 42b protruding from the base portion 42a to the front side in the Z-axis direction. The protruding part 42b protrudes from the base part 42a through the opening 41a into the large diameter part of the electron beam passage hole 21, and the front end part of the protruding part 42b is the rear end of the small diameter part of the electron beam passage hole 21 in the Z-axis direction. Opposite to. The base 42 a is in contact with the inner surface of the case 41 on the opening 41 a side and the opening 41 b side. A film 45 made of a conductive material is attached to a portion of the base 42 a that does not contact the inner surface of the case 41, and the film 45 is electrically connected to the case 41. Thereby, the surface potential of the insulating block 42 can be set to the ground potential, and the operation stability of the electron gun 40 can be improved.

  The connector 43 is for supplying a high voltage to the filament 44 which is a cathode from an external power supply device. The base end portion of the connector 43 protrudes to the outside through the opening 41 b on the side wall of the case 41, and the tip end portion of the connector 43 is embedded in the insulating block 42. A pair of internal wirings 46, 46 are connected to the tip of the connector 43. The pair of internal wirings 46, 46 extends to the front end portion of the protruding portion 42b, and is connected to the pair of power supply pins 47, 47, respectively. A filament 44 is stretched around the tip portions of the pair of power supply pins 47, 47. A grid electrode 48 is fixed to the protruding portion 42 b so as to surround the power supply pin 47 and the filament 44.

  The casing 31 is provided with the alignment coil 2 and the focusing coil 3 so as to be paired with the small diameter portion of the electron beam passage hole 21 therebetween. The electron beam EB emitted from the electron gun 40 and passing through the electron beam passage hole 21 is adjusted by the alignment coil 2 so that the center line of the electron beam EB coincides with the center line CL of the electron beam passage hole 20. The beam is focused on the electron beam transmission unit 50 by the focusing coil 3. The casing 31 is provided with the exhaust pipe 4 for connecting the electron beam passage hole 21 and the vacuum pump, and thereby the inside of the chamber 30 (that is, the electron beam passage hole 20) is evacuated.

  The chamber 30 also has a deflection tube (housing) 32 fixed to the front end surface of the housing 31. The deflection tube 32 is made of austenitic stainless steel (an alloy containing Fe / Ni / Cr) and has a quadrangular prism shape. The deflection tube 32 is provided with an incident side opening 32a for allowing the electron beam EB generated by the electron gun 40 to enter and an emission side opening 32b for emitting the electron beam EB. The cross section of the electron beam passage hole 22 which is a portion formed by the deflection tube 32 in the electron beam passage hole 20 has a rectangular shape whose longitudinal direction is the Y-axis direction. A deflection coil 5 that deflects the electron beam EB passing through the inside of the deflection tube 32 is attached to the outside of the deflection tube 32. The electron beam EB that is focused by the focusing coil 3 and passes through the electron beam passage hole 22 is deflected in the Y-axis direction by the deflection coil 5.

  Furthermore, the chamber 30 has a scanning tube (housing) 33 fixed to the front end face of the deflection tube 32. The scanning tube 33 is made of an aluminum alloy (a material containing aluminum), for example, an Al—Mg-based aluminum alloy, and has a quadrangular prism-shaped outer shape that widens toward the front side. The scanning tube 33 is provided with an incident side opening 33a for allowing the electron beam EB generated by the electron gun 40 to enter, and an emission side opening 33b for emitting the electron beam EB (the emission side opening of the electron beam passage hole 20). It has been. The cross section of the electron beam passage hole 23, which is a portion formed by the scanning tube 33 in the electron beam passage hole 20, has a rectangular shape whose longitudinal direction is the Y-axis direction. On the outer surface of the scanning tube 33 (surface exposed to the outside), a heat radiation film 34 having a higher heat emissivity than that of the inside of the scanning tube 33 is provided from the viewpoint of improving heat dissipation to the outside. The heat dissipation film 34 is an alumite layer formed by subjecting the outer surface of the scanning tube 33 to an alumite treatment.

  A flange 35 is provided at the rear end portion of the deflection tube 32, and a flange 36 is provided at the front end portion of the deflection tube 32. A flange 37 is provided at the rear end of the scanning tube 33, and a flange 38 is provided at the front end of the scanning tube 33. The deflection tube 32 and the scanning tube 33 are hermetically fixed by a plurality of bolts 7 in a state where the flange 36 and the flange 37 are in contact with each other via the O-ring 6. Thereby, the deflection tube 32 is connected to the incident side opening 33a of the scanning tube 33 so that the electron beam EB generated by the electron gun 40 passes inside. The electron beam irradiation apparatus 1 is attached to a predetermined location of the equipment to which it is applied via a flange 35 provided at the rear end of the deflection tube 32.

  The electron beam transmission unit 50 is disposed in the exit side opening 33 b of the scanning tube 33. The scanning tube 33 and the electron beam transmission unit 50 are hermetically fixed by a plurality of bolts 7 in a state where the flange 38 and the window frame 50 </ b> A are in contact via the O-ring 6. As shown in FIGS. 2 and 3, the electron beam transmission unit 50 has a window frame 50 </ b> A attached to the emission side opening 33 b of the scanning tube 33. A support member 52, a heat transfer member 59, and a window member 55 are disposed inside the window frame 50A (that is, within the window frame 50A when the window frame 50A is viewed from the front side). .

  The window frame 50 </ b> A includes a fixing member 51 fixed to the emission side opening 33 b of the scanning tube 33, and a fixing member using a plurality of bolts while pressing the window member 55 and the heat transfer member 59 against the fixing member 51. And a pressing member 57 fixed to 51. The fixing member 51 and the pressing member 57 are made of oxygen-free copper (a material containing copper) and have a rectangular frame-shaped outer shape with the Y-axis direction as the longitudinal direction. The fixing member 51 has an incident side opening 51a, and the pressing member 57 has an emission side opening 57a facing the incident side opening 51a in the Z-axis direction. On the outer surfaces (surfaces exposed to the outside) of the fixing member 51 and the pressing member 57, a heat radiation film 58 having a higher heat emissivity than the inside of the fixing member 51 and the pressing member 57 is provided from the viewpoint of improving heat dissipation to the outside. Is provided. The heat dissipation film 58 is a nickel layer formed by performing nickel plating on the fixing member 51 and the pressing member 57.

  The support member 52 has a flat frame portion 52a and a metal mesh portion 52b formed to be stretched inside the frame portion 52a. Note that the metal mesh portion 52b is not limited to a polygonal net shape, and may be a bar shape. The arrangement of the openings in the metal mesh portion 52b does not matter whether it is regular or not, but when the support member 52 is viewed in plan, the area occupied by the entire opening constitutes a mesh portion (divides the openings). It is important for improving the electron permeability that the area occupied by the metal portion is sufficiently larger, in other words, the width of the metal portion constituting the mesh portion is sufficiently smaller than the width of the opening. The support member 52 is made of austenitic stainless steel (a material containing iron). The frame portion 52a is fixed to the front surface of the fixing member 51 by brazing or the like with the metal mesh portion 52b facing the incident side opening 51a of the fixing member 51. A groove 51b extending so as to surround the incident side opening 51a is provided outside the region where the frame portion 52a is fixed on the front surface of the fixing member 51, and the groove 51b is hermetically sealed. An O-ring 53 as a member is arranged.

  The heat transfer member 59 is disposed between the metal mesh portion 52 b and the window member 55. More specifically, the heat transfer member 59 covers substantially the entire front surface of the metal mesh portion 52b, and is included in the region surrounded by the O-ring 53 that is an airtight sealing member, and the window portion and the metal mesh portion 52b. It arrange | positions between the members 55. FIG. Therefore, the heat transfer member 59 is not exposed to the external atmosphere during the operation of the electron beam irradiation apparatus 1 and is disposed in the vacuum region. The heat transfer member 59 is a film made of a material containing carbon and having a film thickness of 500 μm or less, and here, a graphite mesh having a film thickness of 7 μm is used. The thermal conductivity of the heat transfer member 59 is higher than the thermal conductivity of the window member 55, which is a metal film, which will be described later. For example, the graphite mesh is made of copper having a high thermal conductivity of 2 to 2. It has four times the thermal conductivity.

  The heat transfer member 59 has a plurality of minute through holes (not shown) whose arrangement is random over the entire surface when viewed from the thickness direction (front side and rear side). Functions as a pore. Thereby, the several ventilation hole of the heat-transfer member 59 will face one opening of the metal mesh part 52b. That is, one opening of the metal mesh portion 52 b and the plurality of vent holes of the heat transfer member 59 face each other when viewed from the thickness direction of the heat transfer member 59.

  The window member 55 is a metal film that transmits the electron beam EB, and is a sheet-like metal material made of, for example, titanium and having a thickness of about 1 to 10 μm. The window member 55 is disposed on the front surface of the fixing member 51 so as to cover the support member 52 and the O-ring 53. As a result, the window member 55 is supported on the metal mesh portion 52 b and transmits the electron beam EB that has passed through the inside of the scanning tube 33. Between the heat transfer member 59 and the frame portion 52a of the support member 52, a protective sheet 54 formed in a frame shape so as to surround the incident side opening 51a when viewed from the Z-axis direction is disposed. Between the member 55 and the pressing member 57, the protective sheet 56 formed in the shape substantially equivalent to the protective sheet 54 is arrange | positioned. The protective sheets 54 and 56 are thin-film members made of the same material (graphite) as the heat transfer member 59, and the frame member 52a and the pressing member 57 are in direct contact with the window member 55 and the heat transfer member 59 so as to be a window member. 55 and the heat transfer member 59 are prevented from being damaged. Moreover, since it consists of graphite with high heat conductivity, heat dissipation of the window member 55 is suppressed by suppressing heat accumulation in the protective sheets 54 and 56 or by transferring the heat of the window member 55 to the pressing member 57. Can also be improved.

  In the electron beam transmission unit 50, the pressing member 57 presses the window member 55 against the fixing member 51 via the frame portion 52 a of the support member 52 and the O-ring 53. In this state, the fixing member 51 and the pressing member 57 are inserted into a plurality of bolts (a plurality of through holes 57b provided in the pressing member 57 and into a plurality of screw holes 51d provided in the fixing member 51. It is airtightly fixed by bolts to be screwed together. Accordingly, the fixing member 51 and the pressing member 57 sandwich the window member 55 in the frame portion 52a of the support member 52. The fixing member 51 is provided with a plurality of through holes 51c through which the bolts 7 for fixing the electron beam transmission unit 50 to the flange 38 of the scanning tube 33 are inserted.

  The operation of the electron beam irradiation apparatus 1 configured as described above will be described. When the inside of the chamber 30 (that is, the electron beam passage hole 20) is evacuated by the vacuum pump through the exhaust pipe 4 and a high voltage is applied to the filament 44, electrons are emitted from the filament 44. The electrons emitted from the filament 44 are accelerated and focused by the electric field formed by the grid electrode 48, whereby the electron beam EB is emitted forward in the Z-axis direction.

  The electron beam EB emitted from the electron gun 40 and passing through the electron beam passage hole 21 is adjusted by the alignment coil 2 so that the center line of the electron beam EB coincides with the center line CL of the electron beam passage hole 20. The beam is focused on the electron beam transmission unit 50 by the focusing coil 3. The electron beam EB that is focused by the focusing coil 3 and passes through the electron beam passage hole 22 is deflected in the Y-axis direction by the deflection coil 5. That is, the center line of the electron beam EB passing through the electron beam passage hole 23 is repeatedly oscillated linearly along the Y-axis direction.

  The electron beam EB deflected in the Y-axis direction by the deflection coil 5 passes through the window member 55 of the electron beam transmission unit 50 and is emitted to the outside. The electron beam EB emitted to the outside is irradiated to the irradiation object conveyed on the line for drying, sterilization, surface modification, and the like of the irradiation object.

  As described above, in the electron beam irradiation apparatus 1 and the electron beam transmission unit 50, since the window member 55 is supported by the support member 52 having the metal mesh portion 52b, sufficient pressure resistance can be obtained. And since the thickness of the window member 55 can be made thin, the heat_generation | fever in the window member 55 can be suppressed. Further, the heat transfer member 59 disposed between the metal mesh portion 52 b and the window member 55 so as to be included in the region surrounded by the O-ring 53, which is an airtight sealing member, has a thermal conductivity higher than that of the window member 55. Since it is made of a high-quality graphite mesh, the thermal conductivity can be increased without being thinned by contact with the external atmosphere. In addition, since the heat transfer member 59 has a vent hole, the window member 55 is drawn toward the metal mesh portion 52b in a state where the inside of the casing is evacuated during the electron beam irradiation, and the window member 55 and the metal mesh portion 52b Since the heat transfer member 59 is in close contact, the heat generated in the window member 55 can be easily released while the window member 55 and the heat transfer member 59 are reliably supported by the support member 52. Further, since the window member 55 is made of a metal film, the stability to the external atmosphere can be improved. Therefore, according to the electron beam irradiation apparatus 1 and the electron beam transmission unit 50, it is possible to prevent the window member 55 from deteriorating while securing the pressure resistance strength of the window member 55. The metal mesh portion 52b of the support member 52 is made of austenitic stainless steel. Thereby, the strength, workability, and heat resistance of the metal mesh portion 52b can be improved. As a result, the diameter of the wire constituting the metal mesh portion 52b can be reduced, and the electron beam EB can be easily passed. .

  In order to further improve the adhesion between the window member 55 and the heat transfer member 59, it may be possible to directly form a metal film made of the material of the window member 55 on the heat transfer member 59, but on the surface of the graphite. Since there are fine irregularities, it is difficult to form a metal film without pinholes with a thickness with good electron permeability. In addition, the metal film may peel off due to the difference in thermal expansion coefficient between the metal material and graphite. On the other hand, the window member 55 is made of a sheet-like metal material, and the heat transfer member 59 is provided with a ventilation hole, thereby improving the vacuum holding ability of the window member 55 and the adhesion to the heat transfer member 59, that is, the window. Deterioration of the window member 55 can be suppressed while ensuring the pressure resistance of the member 55.

  The film thickness of the heat transfer member 59 is 500 μm or less, preferably 1 to 500 μm. More preferably, it is 3-100 micrometers, More preferably, it is 5-20 micrometers. According to such a film thickness, for example, in the electron beam irradiation apparatus 1 operating at a relatively low tube voltage up to about 200 kV, the electron transmission ability and thermal conductivity of the carbon material can be effectively utilized. While maintaining the transmission efficiency of the electron beam EB in the transmission unit 50, the heat generated in the window member 55 can be released more easily.

  Moreover, in the electron beam irradiation apparatus 1 and the electron beam transmission unit 50, since the window frame 50A is made of oxygen-free copper that is a metal material, heat generated in the window member 55 can be released more easily.

  Moreover, in the electron beam irradiation apparatus 1 and the electron beam transmission unit 50, since the heat transfer member 59 has a plurality of vent holes, the window member 55, the heat transfer member 59, and the Since the exhaust of the space between them is ensured, the adhesion between the window member 55 and the heat transfer member 59 is further improved. In addition, since a plurality of ventilation holes face one opening of the metal mesh portion 52b, the exhaust of the space between the support member 52 and the window member 55 can be further ensured, and the electron beam The transmission efficiency of the electron beam EB in the transmission unit can be improved.

  In the window frame body 50 </ b> A, the fixing member 51 and the pressing member 57 sandwich the window member 55 in the frame portion 52 a of the support member 52. Thereby, sealing of the clamping part by the fixing member 51 and the pressing member 57 can be ensured.

  As mentioned above, although embodiment of this invention was described, this invention is not limited to the said embodiment. For example, as for the material of the heat transfer member, in the above-described embodiment, an aspect in which a graphite mesh is applied as a film made of a material containing carbon is shown, but carbon nanotubes, graphene, diamond, or the like can also be applied.

  Moreover, about the ventilation hole which a heat-transfer member has, although the several ventilation hole was arrange | positioned at random in the said embodiment, the several ventilation hole may be arrange | positioned periodically. Further, there may be one vent hole. Furthermore, the shape of the air holes may be various shapes such as a circle and a rectangle. That is, in the heat transfer member, it is only necessary to have a breathable hole in at least one place when viewed from the thickness direction.

  Further, the protective sheets 54 and 56 may be made of a carbon material other than graphite, or may be made of a material other than the carbon material. If the strength of the sandwiched structure is sufficient, the protective sheet need not be provided.

  Furthermore, the support member 52 may be a laminate of a plurality of members instead of a single sheet (single layer). In this case, further improvement in pressure resistance can be expected. At this time, the plurality of support members may be formed of different metal materials, for example, two layers in which a first support member on the fixing member 51 side and a second support member on the heat transfer member 59 side are stacked. It is good also as a structure. In this case, the first support member that requires higher pressure strength is made of a metal material having a higher rigidity than the second support member, and the second support member is considered to be an auxiliary role. And by forming with a metal material with larger thermal conductivity than the 1st supporting member, pressure-resistant intensity | strength and heat dissipation can be improved. For example, the material of the first support member is austenitic stainless steel, and the material of the second support member is a combination of copper.

  Further, as shown in FIG. 4, the sheet-like sealing material 61 is disposed between the fixing member 51 and the pressing member 57, and the sealing member 61 and the pressing member 57 are sandwiched between the window member 55 and the sealing member 61. The fixing member 51 and the pressing member 57 may be airtightly fixed by melting and resolidifying the material 61. In this case, the O-ring 53 and the bolt for fixing the pressing member 57 to the fixing member 51 are not necessary. Further, the processing of the through hole 57b for inserting the bolt and the processing of the screw hole 51d for screwing the bolt become unnecessary.

  Further, as the shapes of the constituent members of the electron beam irradiation apparatus and the electron beam transmission unit, in the above embodiment, the shape of providing the line irradiation type electron beam irradiation apparatus and the electron beam transmission unit is shown. It is good also as a shape which provides an electron beam irradiation apparatus and an electron beam transmission unit.

  DESCRIPTION OF SYMBOLS 1 ... Electron beam irradiation apparatus, 20, 21, 22, 23 ... Electron beam passage hole, 30 ... Chamber (housing), 31 ... Housing, 32 ... Deflection tube (housing), 33 ... Scanning tube (housing) 33b: Emission side opening, 40 ... Electron gun, 50 ... Electron beam transmission unit, 50A ... Window frame, 51 ... Fixing member, 52 ... Supporting member, 52a ... Frame, 52b ... Metal mesh part, 55 ... Window Member 57 ... Pressing member 59 ... Heat transfer member EB ... Electron beam.

Claims (7)

An electron gun that generates an electron beam;
A housing provided with an electron beam passage hole through which the electron beam generated by the electron gun passes;
An electron beam transmission unit disposed at the exit side opening of the electron beam passage hole, and
The electron beam transmission unit is
A window frame attached to the exit side opening;
A support member having a metal mesh portion disposed inside the window frame,
A window member that is supported on the metal mesh part and is a metal film that transmits the electron beam that has passed through the electron beam passage hole;
A heat transfer member disposed between the metal mesh portion and the window member,
The heat transfer member is an electron beam irradiation apparatus that is a film made of a material containing carbon and has a vent hole.   The electron beam irradiation apparatus according to claim 1, wherein the window frame is made of a metal material.   The electron beam irradiation apparatus according to claim 1, wherein the heat transfer member includes a plurality of the air holes.   The electron beam irradiation apparatus according to any one of claims 1 to 3, wherein a plurality of the vent holes face one opening of the metal mesh portion.   The electron beam irradiation apparatus according to claim 1, wherein the heat transfer member has a film thickness of 500 μm or less. The window frame is fixed to the fixing member in a state in which at least the window member is pressed against the fixing member, and a frame-shaped fixing member fixed to the emission side opening of the electron beam passage hole. A frame-shaped pressing member,
The support member further includes a plate-like frame portion on which the metal mesh portion is stretched,
The electron beam irradiation apparatus according to claim 1, wherein the fixing member and the pressing member sandwich at least the window member in the frame portion. An electron beam irradiation apparatus comprising: an electron gun that generates an electron beam; and a housing provided with an electron beam passage hole through which the electron beam generated by the electron gun passes. An electron beam transmission unit disposed in the opening for transmitting the electron beam that has passed through the electron beam passage hole,
A window frame to be attached to the exit side opening,
A support member having a metal mesh portion disposed inside the window frame,
A window member which is a metal film supported on the metal mesh portion and transmits an electron beam which has passed through the electron beam passage hole;
A heat transfer member disposed between the metal mesh portion and the window member,
The heat transfer member is an electron beam transmission unit that is a film made of a material containing carbon and has a vent hole.

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