WO2013108060A1 - Microscope optique en champ proche - Google Patents

Microscope optique en champ proche Download PDF

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Publication number
WO2013108060A1
WO2013108060A1 PCT/IB2012/000084 IB2012000084W WO2013108060A1 WO 2013108060 A1 WO2013108060 A1 WO 2013108060A1 IB 2012000084 W IB2012000084 W IB 2012000084W WO 2013108060 A1 WO2013108060 A1 WO 2013108060A1
Authority
WO
WIPO (PCT)
Prior art keywords
probe
microscope
luminous flux
wavelength
photoreceiver
Prior art date
Application number
PCT/IB2012/000084
Other languages
German (de)
English (en)
Inventor
Alexander POTEMKIN
Original Assignee
Potemkin Alexander
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Potemkin Alexander filed Critical Potemkin Alexander
Priority to PCT/IB2012/000084 priority Critical patent/WO2013108060A1/fr
Publication of WO2013108060A1 publication Critical patent/WO2013108060A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders

Definitions

  • the invention relates to the field of scanning microscopy and in particular to near-field microscopes.
  • a scanning probe microscope consisting of the stage of an inverted microscope and a measuring head, which includes the base with the support feet for installation on the stage, from an X, Y, Z-scanner block with a probe transmitter mounted thereon, a laser and a photoreceiver, from the optical components for aligning the laser beam to the probe transmitter and from the probe transmitter to the photoreceiver (RU 2008142258 [1]).
  • the microscope contains drive means which are designed to ensure relative movement between the probe and the object surface and capable of moving the object and probe so close together that the detectable interaction occurs between them
  • the microscope includes means for generating the relative oscillatory motion over the surface of the object, the probe or the object
  • the scanning mechanism of the probe is designed to measure at least one parameter characteristic of the intensity of the interaction between probe and object, but the feedback mechanism is designed so that the distance probe-object can be controlled by the probe Drive means are set in motion in response to d ie change of the mean value of one of the mentioned parameters compared to the setpoint.
  • the means for moving the object into vibration represents a normal generator with a stable frequency and the object connected thereto.
  • the process of scanning the object surface is accelerated, with the scan area being detected by an ordered array of scan lines, each of which resonates at the resonant frequency of the probe or object is recorded in the vicinity, so that the amplitude of the oscillation determines the maximum length of the scan line.
  • the probe and the object oscillate simultaneously, a two-dimensional scanning of the object image analogously to the scanning of the image in television receivers occurs.
  • a scanning probe microscope consisting of video viewing system, object holder, scanner, probe, probe holder and a system for moving the object holder (RU 2382389 [4]).
  • the microscope contains a fixed, but spatially alignable mounted a luminous flux source, a mirror element and an optical divider, which transmits part of the luminous flux coming from the source and the other reflected.
  • the object holder is located in the beam path of the luminous flux transmitted or reflected by the splitter, and the splitter itself in the beam path of the other luminous flux such that the beam path of the luminous flux reflected by the reflecting element and reflected by the surface of the object holder or the object mounted thereon coincides with the beam path the luminous flux falling on these elements coincides.
  • the closest is to the known scanning probe microscope consisting of a typical near-field optical light detection system comprising a laser light source, an optical probe with aperture and an optical divider which transmits part of the light coming from the source but reflects the other from a drive Movement of the object and a video viewing system for the obtained interference images (JP 2005283162 [5]).
  • the microscope is equipped with a vibrator attached to the probe holder for periodically changing the relative distance between the tip of the optical aperture probe and the surface of the object.
  • the proposed scanning probe microscope aims at increasing the sensitivity and improving the signal-to-noise ratio.
  • the stated objective is achieved by the scanning near-field probe microscope consisting of probe, photoreceptor and coherent radiation source, at the output of which means are arranged for dividing the luminous flux into two bundles, one of which is aligned directly with the photoreceptor and the other inside the probe.
  • the luminous flux released from the probe by the object being examined is directed onto the photoreceiver, and the slide with the object to be examined is connected to a source of mechanical vibrations necessary for the change in the relative distance between the probe and the probe Object surface provides.
  • the means used to direct the luminous flux from the coherent radiation source to the photoreceptor and the probe and from the probe to the photoreceiver are optical fibers.
  • the stated result is also achieved in that the means used to divide the luminous flux into beams is designed as a switch for optical fibers
  • the stated result is also achieved by designing the source of mechanical vibrations as a piezoelectric transducer or magnetostrictor connected to a generator of electrical vibrations.
  • the deflection of the one light beam from the coherent radiation source directly to the photoreceiver and the second to him after conduction through the probe and reflection from the object under investigation allows the generation of an interference image on the photoreceptor.
  • This type of signal processing and amplification is called heterodyne (superposition).
  • the power of the information-carrying signal as a result of the reflection by the examination object is proportional to the voltage of the optical radiation directed directly by the laser onto the photoreceiver.
  • E 2 ⁇ ⁇ ⁇ the power of the signal formed on the surface of the photoreceptor, which carries the information about the reflection from the object to be examined, greater than the power of the reflected signal from the object itself.
  • heterodyne reception occurs to amplify the signal, thereby improving the signal-to-noise ratio in the information reception and processing system.
  • the connection of the slide to the source of mechanical vibration which provides for the change in the relative distance between the probe and the surface of the object, provides a possibility for improving the sensitivity and the signal-to-noise ratio.
  • the modulation of the signal transmits its spectrum to the frequency of the modulation. Therefore, there is no need to amplify the signals near zero frequencies where there is a high noise flicker, which also leads to an improvement in the signal-to-noise ratio.
  • the change in the position of the object does not lead to a change in the position of the probe and does not give rise to additional interference in connection with the modulation of the power in the light guide of the probe spreading radiation.
  • the means for directing the luminous flux from the coherent radiation source to the photoreceiver and to the probe and from the probe to the photoreceiver are most conveniently carried out as optical fibers. This ensures:
  • the means for dividing the luminous flux into two bundles can be chosen from the known ones.
  • a semi-transparent mirror or a polarizing prism with a quarter-wave plate (RU 2279151 [6]) can be used.
  • a light divider a divider cube, a flat glass pane, a glass wedge o. ⁇ . [4].
  • the means for directing the luminous flux from the coherent radiation source to the photoreceiver and to the probe as well as from the probe to the photoreceiver are embodied as optical fibers, it is most advantageous to use a switch made of optical fibers as a means for dividing the luminous flux.
  • the scanning near-field probe microscope consists of the coherent radiation source 1, the means 2 for dividing the luminous flux, the photoreceptor 3, the probe 4, the stage with the object 5, the piezoelectric transducer or the magnetostrictor 6 and the generator 7 of the electrical vibrations.
  • any known may be chosen, for. B. semiconductor or gas laser. All assemblies mentioned above can be selected from the known.
  • the microscope includes functionally important components and components which are not shown in the drawing or belong to the known state of the art (see [1, 2, 3, 4, 5, 6]). This is the mechanism for the two- or three-dimensional movement of the slide with the object and its control, the probe holder u.
  • the Scanning Probe Microscope is to be used as follows. Place the object 5 to be examined on the spatially arranged object table. Turn on the coherent radiation source 1 (laser) and direct the luminous flux from the laser onto the means 2 for dividing the luminous flux into two bundles. One luminous flux is directed directly to the photoreceiver 3, the other to the probe 4. The luminous flux reflected by the examination object 5 is directed from the probe to the means 2 for luminous flux division and from there to the photoreceiver 3. At the same time turn on the generator 7, which is connected to the piezoelectric transducer or magnetostrictor 6, which puts the object 5 in oscillating motion. As a result, an interference pattern is formed on the surface of the photoreceptor 3. The change in the distance between the probe tip and the examination subject leads to a change in the interference pattern. The measurement of the parameters of the interference image and the comparison with the parameters before the displacement allows the calculation of the magnitude of the change in the distance between the probe tip and the examination subject.
  • a near-field microscope in which a probe with transparent dielectric interior with sharpened end (optical fiber) is used, the outer surface of the optical fiber is covered with a thin metallic film so that only the tip itself is free of this coating (EP 1160611) 1], US 2004169136 [2], US 6803558 [3]).
  • the film can be applied by vapor deposition of a metal in a vacuum and the tip can be removed by chemical etching. Disadvantage of the known probe is their relatively low resolution.
  • the proposed probe comes closest to a probe which is used in the near-field microscope known from EP 1408327 [5] or JP 2004163417 [6].
  • the probe is an optical fiber with a cylindrical or conical end. From the outside are Strips of a conductive material such as gold, silver, copper, aluminum, chromium, tungsten, platinum or other are applied to the optical fiber.
  • the conductive strips must be separated by a gap not more than about 100 nm wide.
  • the proposed probe aims to increase the resolution of the microscope in which it is used.
  • the stated aim is achieved by designing the probe of the near-field optical microscope as a tapered-end optical fiber having a stripe of conductive material applied to the surface of the optical fiber and a peaking quantum dot having a damping peak equal to that of FIG Wavelength of the used radiation is.
  • the stated goal is achieved by arranging in the vicinity of the quantum dot and symmetrically to it at least two elements which are made of a material having a negative refractive index for the wavelength of the radiation used in the microscope.
  • the stated objective is achieved by grouping the elements of material with a negative refractive index radiation used for the wavelength of the microscope used in the microscope to form a closed circle around the quantum dot.
  • the design of the pointed end probe is indispensable if one wants to increase the locality of the concentration of optical electromagnetic radiation and, correspondingly, the spatial resolution of the near field microscopes.
  • the coating of the optical fiber surface with conductive material strips converging toward the tip is capable of increasing the resolution of the microscope because the strips of conductive material form a multi-electrode waveguide.
  • This waveguide unlike a round waveguide, has no restrictions on minimum dimensions below which the waveguide transitions to a mode characterized by an exponential decrease in the power of the boundary radiation propagating around the waveguide axis.
  • the multi-electrode waveguide operates at arbitrary wavelengths from the direct current to the optical range.
  • the resolution of the microscope can be further increased. This can be explained by the fact that the absorption range is due to increased effective values for refractive and damping index distinguishes, which leads to the stronger local concentration of optical radiation.
  • the quantum dot and symmetrically to him at least two elements which are made of a material having a negative refractive index used for the wavelength of the radiation used in the microscope.
  • the degree of spatial concentration of the optical radiation is proportional to the difference in refractive and attenuation indices of the central portion of the optical fiber and its surroundings. An increase in the difference between the refractive and attenuation indices of the regions of the optical waveguide leads to a greater local concentration of the propagating radiation.
  • Fig. 3 is the functional diagram of the implementation of the probe with two elements made of a material having a negative refractive index used for the wavelength of the microscope used in the microscope.
  • Fig. 4 variants of the implementation with elements of a material with a wavelength of the microscope used in the negative refractive index radiation are shown (view of the probe tip).
  • the probe of the near-field optical microscope includes the light guide 8 with the pointed end 9, which may be made of any suitable dielectric material for this purpose.
  • optical fibers are usually made of polymers or quartz [6].
  • the term “sharpening” is relative in nature, as is the term “point.”
  • each peak has several final dimensions (ideally, a single atom.)
  • On the outer surface of the optical fiber are converging strips towards the tip conductive material 10. Their number is arbitrary, eg two (see Fig. 1) or six (see Fig. 2), etc.
  • the strips may be made of any suitable material, eg. From any of the materials enumerated in [6], using known technologies [2,3,4].
  • the quantum dot 11 with an attenuation peak equal to the wavelength of the radiation used.
  • This point represents a region consisting of the entirety of the atoms of the conductive or semiconductor material.
  • the distance between the allowed energetic levels in said range is equal to the quantum energy of the used optical radiation. Its typical size is a few nanometers.
  • elements 12 made of a material having a negative refractive index for the wavelength of the radiation used in the microscope and having an increased attenuation index may be present. It must be at least two, but it may also be four, six, or eight, or they may be in the form of a closed, continuous, or broken circle (see Fig. 3). Resonant devices based on meta- or quantum materials can serve as material for their production.
  • the elements 12 must be arranged so that there is no collision with the object during the movement of the probe against the examination object. The attachment of these elements to the housing of the probe can be done by spraying or local ion etching.
  • the probe is used in the near field microscope in the following manner.
  • the probe is introduced with its quantum dot 11 to the examination object.
  • the light beam from the source belonging to the microscope enters the tip 9 via the light guide 8 and bends the quantum dot 11.
  • the light from the Strip 10 thrown back.
  • the quantum dot 5 When passing through the quantum dot 5, the light is reflected from the region of negative refractive index and increased attenuation index 12.
  • the light reflected from the object returns via the quantum dot 11 and the photoconductive region 2 in the opposite sense to the running direction of the introduced light.

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

Microscope optique en champ proche comprenant une sonde, un photorécepteur et une source de rayonnement cohérente à la sortie de laquelle se trouve un moyen pour diviser le flux lumineux en faisceaux dont l'un est orienté directement sur le photorécepteur et l'autre sur l'intérieur de la sonde. Le flux lumineux qui est renvoyé par l'objet à analyser et sort de la sonde, est orienté sur le photorécepteur, et le porte-objet, avec l'objet à analyser qu'il porte, est relié à une source d'oscillations mécaniques qui assure la modification de la distance relative entre la sonde et la surface de l'objet.
PCT/IB2012/000084 2012-01-20 2012-01-20 Microscope optique en champ proche WO2013108060A1 (fr)

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PCT/IB2012/000084 WO2013108060A1 (fr) 2012-01-20 2012-01-20 Microscope optique en champ proche

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Application Number Priority Date Filing Date Title
PCT/IB2012/000084 WO2013108060A1 (fr) 2012-01-20 2012-01-20 Microscope optique en champ proche

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WO2013108060A1 true WO2013108060A1 (fr) 2013-07-25

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015001713A1 (de) * 2015-02-13 2016-08-18 Forschungszentrum Jülich GmbH Rastersondenmikroskop sowie Verfahren zur Messung lokaler elektrischer Potentialfelder
RU2643677C1 (ru) * 2016-12-08 2018-02-05 Владимир Александрович Жаботинский Способ исследования микрообъектов и ближнепольный оптический микроскоп для его реализации

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1160611A2 (fr) 2000-05-29 2001-12-05 Jasco Corporation Appareil de formation d'ouverture pour une sonde et microscope optique à champ rapproché l'utilisant
WO2004005844A2 (fr) 2002-07-04 2004-01-15 University Of Bristol Microscope a sonde a balayage
EP1408327A2 (fr) 2002-10-09 2004-04-14 Neocera, Inc. Sonde pour la mesure locale de la permittivité, qui comprend une ouverture, et procédé de fabrication
US20040169136A1 (en) 2001-08-22 2004-09-02 Jasco Corporation Probe opening fabricating apparatus, and near-field optical microscope using the same
JP2005283162A (ja) 2004-03-26 2005-10-13 Kanagawa Acad Of Sci & Technol 反射型近接場光検出光学系及び反射型近接場光学顕微鏡
RU2279151C1 (ru) 2004-11-12 2006-06-27 Зао "Нт-Мдт" Способ регистрации отклонения консоли зонда сканирующего микроскопа с оптическим объективом
RU2382389C2 (ru) 2008-04-28 2010-02-20 Общество с ограниченной ответственностью Научно-производственное предприятие "Центр перспективных технологий" Способ настройки сканирующего зондового микроскопа и сканирующий зондовый микроскоп для его осуществления
RU2008142258A (ru) 2008-10-27 2010-05-10 ЗАО "Нанотехнология МДТ" (RU) Сканирующий зондовый микроскоп для биологических применений

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Publication number Priority date Publication date Assignee Title
EP1160611A2 (fr) 2000-05-29 2001-12-05 Jasco Corporation Appareil de formation d'ouverture pour une sonde et microscope optique à champ rapproché l'utilisant
US20040169136A1 (en) 2001-08-22 2004-09-02 Jasco Corporation Probe opening fabricating apparatus, and near-field optical microscope using the same
US6803558B2 (en) 2001-08-22 2004-10-12 Jasco Corporation Probe opening fabricating apparatus, and near-field optical microscope using the same
WO2004005844A2 (fr) 2002-07-04 2004-01-15 University Of Bristol Microscope a sonde a balayage
RU2005102703A (ru) 2002-07-04 2005-08-20 Юниверсити Оф Бристоль (Gb) Сканирующий зондовый микроскоп
EP1408327A2 (fr) 2002-10-09 2004-04-14 Neocera, Inc. Sonde pour la mesure locale de la permittivité, qui comprend une ouverture, et procédé de fabrication
JP2004163417A (ja) 2002-10-09 2004-06-10 Neocera Inc 材料の複素誘電率の局部的測定用の開口プローブ及び製造方法
JP2005283162A (ja) 2004-03-26 2005-10-13 Kanagawa Acad Of Sci & Technol 反射型近接場光検出光学系及び反射型近接場光学顕微鏡
RU2279151C1 (ru) 2004-11-12 2006-06-27 Зао "Нт-Мдт" Способ регистрации отклонения консоли зонда сканирующего микроскопа с оптическим объективом
RU2382389C2 (ru) 2008-04-28 2010-02-20 Общество с ограниченной ответственностью Научно-производственное предприятие "Центр перспективных технологий" Способ настройки сканирующего зондового микроскопа и сканирующий зондовый микроскоп для его осуществления
RU2008142258A (ru) 2008-10-27 2010-05-10 ЗАО "Нанотехнология МДТ" (RU) Сканирующий зондовый микроскоп для биологических применений

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* Cited by examiner, † Cited by third party
Title
PILEVAR S ET AL: "REFLECTION NEAR-FIELD SCANNING OPTICAL MICROSCOPY: AN INTERFEROMETRIC APPROACH", ULTRAMICROSCOPY, ELSEVIER, AMSTERDAM, NL, vol. 61, no. 1/04, 1 December 1995 (1995-12-01), pages 233 - 236, XP000978294, ISSN: 0304-3991, DOI: 10.1016/0304-3991(95)00115-8 *
WANG GANG ET AL: "Reflection scanning near-field optical microscope", TSINGHUA SCIENCE AND TECHNOLOGY, TSINGHUA UNIVERSITY PRESS, BEIJING, CN, vol. 1, no. 3, 1 September 1996 (1996-09-01), pages 242 - 245, XP011376145, ISSN: 1007-0214, DOI: 10.1109/TST.1996.6077889 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015001713A1 (de) * 2015-02-13 2016-08-18 Forschungszentrum Jülich GmbH Rastersondenmikroskop sowie Verfahren zur Messung lokaler elektrischer Potentialfelder
US10585116B2 (en) 2015-02-13 2020-03-10 Forschungszentrum Juelich Gmbh Scanning probe microscope and method for measuring local electrical potential fields
DE102015001713B4 (de) 2015-02-13 2021-08-19 Forschungszentrum Jülich GmbH Verfahren zur Messung lokaler elektrischer Potentialfelder
RU2643677C1 (ru) * 2016-12-08 2018-02-05 Владимир Александрович Жаботинский Способ исследования микрообъектов и ближнепольный оптический микроскоп для его реализации

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