WO2013051924A1 - A microfluidic mixer - Google Patents
A microfluidic mixer Download PDFInfo
- Publication number
- WO2013051924A1 WO2013051924A1 PCT/MY2012/000178 MY2012000178W WO2013051924A1 WO 2013051924 A1 WO2013051924 A1 WO 2013051924A1 MY 2012000178 W MY2012000178 W MY 2012000178W WO 2013051924 A1 WO2013051924 A1 WO 2013051924A1
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- WIPO (PCT)
- Prior art keywords
- projection
- microfluidic mixer
- fluids
- microfluidic
- mixer
- Prior art date
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F33/00—Other mixers; Mixing plants; Combinations of mixers
- B01F33/30—Micromixers
- B01F33/3038—Micromixers using ciliary stirrers to move or stir the fluids
Definitions
- the present invention relates to a microfluidic device and the control of fluid flow within the device for mixing purposes.
- This device is useful in various biological and chemical systems, as well as in combination with other liquid-distribution devices.
- microfluidic systems have attracted increasing interests due to their diverse and widespread potential applications. For example, using very small volumes of samples, microfluidic systems could carry out complicated biochemical reactions to acquire important chemical and biological information. Among other advantages, microfluidic systems reduce the required amount of samples and reagents, shorten the response time of reactions, and decrease the amount of biohazard waste for disposal.
- microfluidic mixing devices have been constructed in substantially planar microfluidic systems where the fluids are allowed to mix through diffusion. In these systems, the fluids only mix at the interface of the fluids, which is commonly small relative to the overall volume of the fluids. Thus, very little mixing occurs. There is, thus, a need for a robust mixing device capable of thoroughly mixing a wide variety of fluids in a microfluidic environment in a controlled manner at a relatively high speed.
- the present invention overcomes these and other deficiencies of the above-mentioned drawbacks by providing a microfluidic mixer and the control of fluid flow within the device for mixing purposes.
- the invention provides a considerable reduction of materials with even greater efficiency and economically during operation.
- the present invention provides a microfluidic mixer comprising an inlet port for receiving a plurality of input fluids to be mixed, an outlet port for providing a mixture of input fluids to be exited from the microfluidic mixer and a mixing chamber is formed from at least two walls in juxtaposition adjacent to the inlet port and the outlet port, each wall having at least one projection extends transversely to a direction of flow of the input fluids.
- each wall of the mixing chamber is formed from at least two layers in a vertical arrangement.
- each layer of the wall having at least one projection.
- the projection in each layer is arranged in a same direction and an opposite direction.
- the projection is an active cantilever and the active cantilever operated in an electrostatic condition to generate an oscillatory vibration movement for disturbing and mixing the flowing fluids in the mixing chamber.
- the fluids are selected from conductive fluid and non-conductive fluid.
- the input fluids are mixed in a perpendicular direction to the projection extends.
- a method of operating a microfluidic mixer comprising injecting each input fluid into an inlet port of a mixing chamber of the microfluidic mixer, actuating a projection in each layer of a wall in the mixing chamber and interfering the input fluids when the projection in each layer of the wall is actuated with a movement to form a mixture of predetermined fluids.
- the projection is an active cantilever.
- an electrostatic condition is provided to actuate the projection of each layer of the wall in the mixing chamber.
- Figure 1 illustrates a microfluidic mixer with multilevel active cantilever structures (a) isometric view and (b) a cross-sectional view in accordance of an embodiment of the present invention.
- Figure 2 illustrates a displacement of the two layers of active cantilever structures in: (a) same direction (b) opposite direction to each other in accordance of an embodiment of the present invention.
- Figure 3 illustrates a mixing of fluid flowing in directions: (a) through (perpendicular) (b) planar (along) and through in accordance of an embodiment of the present invention.
- Figure 4 illustrates a working principle of the microfluidic mixer: (a) Upon injection of different fluids (sample and reagents) (b) upon activation of cantilever structures (c) disturbance of fluid flow started (d) chaotic and higher turbulence of fluid flow with the increase of cantilever actuations in accordance of an embodiment of the present invention.
- channel as used herein is to be interpreted in a broad sense. Thus, it is not intended to be restricted to elongated configurations where the transverse or longitudinal dimension greatly exceeds the diameter or cross-sectional dimension. Rather, such terms are meant to comprise cavities or tunnels of any desired shape or configuration through which liquids may be directed.
- a fluid cavity may, for example, comprise a flow-through cell where fluid is to be continually passed or, alternatively, a chamber for holding a specified, discrete amount of fluid for a specified amount of time.
- microfluidic as used herein is to be understood, without any restriction thereto, to refer to structures or devices through which fluid (s) are capable of being passed or directed, wherein one or more of the dimensions is less than 500 microns.
- flow in the context of the present invention especially means and/ or includes that at least one component of the fluid is characterized by a velocity (or is moving) with a substantial component in the direction of said channel.
- actuation means is capable of changing at least one of the physical properties of at least one of the plurality of active flow controlling means via applying an electrical potential.
- FIG. 1 illustrates a microfluidic mixer (110) with multilevel active cantilever (114) structures in accordance of an embodiment of the present invention.
- the microfluidic mixer (110) of the present invention comprising an inlet port (112) for receiving a plurality of input fluids to be mixed, an outlet port (112) for providing a mixture of input fluids to be exited from the microfluidic mixer (110) and a mixing chamber (113) is formed from at least two walls (115) in juxtaposition adjacent to the inlet port and the outlet port, each wall (115) having at least one projection (114) also known as active cantilever extends transversely to a direction (116) of flow of the input fluids.
- Each wall (115) of the mixing chamber (113) is formed from at least two layers in a vertical arrangement as illustrated in Figure 1(a) to form a microfluidic mixer with multilevel active cantilevers.
- Each layer of the wall has at least one projection (114).
- the mixing chamber (1 3) is positioned on top of a base substrate ( 8).
- Figure 1(b) illustrates a cross sectional view a microfluidic mixer with multilevel active cantilever structures.
- Each wall (115) having at least one projection (114) also known as active cantilever is made from a conducting material (122) such as doped polysilicon, metals or conductive polymers. Between the each layer of the wall (115), an insulation layer (120) is provided.
- the insulation layer (124) used in the present invention is a silicon nitride (Si 3 N 4 ).
- a glass material or any equivalent materials such as silicon, polymers such as polydimethylsiloxane (PDMS), poly-methyl- metha-crylate (PMMA) or polyimide (126) is provided for forming a flow channel and to seal the mixing chamber (113).
- Figure 2 illustrates a displacement of the two layers of active cantilever structures in: (a) same direction (b) opposite direction to each other in accordance of an embodiment of the present invention.
- There are at least two layers of active cantilever structures which operated electrostatically to generate oscillatory vibration movement to create disturbance to the flow the fluids.
- the two layers of active cantilever structures are displaced in either the same direction or in direction perpendicular to each other.
- Figure 3 illustrates a mixing of fluid flowing in directions: (a) through (perpendicular) (b) planar (along) and through in accordance of an embodiment of the present invention.
- the fluids that are mixed in the microfluidic mixer of the present invention are those selected from conductive fluid and non-conductive fluid.
- the active cantilevers on the base substrate and insulation layer are operated to move in different plane by means of either actuating the active cantilever structures of the microfluidic mixer on the base substrate towards the base substrate in vertical direction and actuating the active cantilever structures of the microfluidic mixer on the insulation layer planarly to move sideways in horizontal direction.
- the actuation principle of the present invention is an electrostatic-type where upon application of voltage on the cantilever, the cantilever is displaced towards metallic layers (or silicon wafers) which are grounded (0V). Since the present invention requires application of voltage for actuation, therefore it is classified as an active micromixer which utilises the disturbance generated by the movement of the cantilever structures for fluid mixing process.
- Figure 4 illustrates a working principle of the microfluidic mixer: (a) Upon injection of different fluids (sample and reagents) (b) upon activation of cantilever structures (c) disturbance of fluid flow started (d) chaotic and higher turbulence of fluid flow with the increase of cantilever actuations in accordance of an embodiment of the present invention.
- a method of operating a microfluidic mixer of the present invention comprising firstly upon injection of different and predetermined fluids (sample and reagents) for mixing purposes at the inlet port, the fluid is directed towards the microfluidic mixer as shown in Figure 4(a). When the all the fluids reach towards the mixing area, the active cantilevers of the microfluidic mixer at the different layers of the substrates are actuated.
- ⁇ 0 permittivity of free space (8.854x10 '12 F/m)
- s r relative static permittivity
- A overlap area between cantilever structure and bottom metallic layer
- microfluidic mixer to present invention provides a control of fluid flow within the device for mixing purposes.
- Another advantage of the present invention is that a robust microfluidic mixer is formed that is capable of thoroughly mixing a wide variety of fluids in a microfluidic environment in a controlled manner at a relatively high speed.
- the active microfluidic mixer of the present invention is developed using micromachining technique and microfabricated for miniaturization purposes and the different substrates involved in the fabrication is anodically bonded. This microfluidic mixer can be applied typically in the areas of biochemistry analysis, drug delivery, agriculture, environmental monitoring and microanalyser systems.
Abstract
The present invention relates to a microfluidic device (110) and the control of fluid flow within the device for mixing purposes. This device is useful in various biological and chemical systems, as well as in combination with other liquid-distribution devices. The microfluidic mixer (110) comprises an inlet port (112), an outlet port (112) and a mixing chamber (113) formed from at least two walls (115), each wall having at least one projection (114), also known as active cantilever, extending transversely to a direction (116) of flow of the input fluids. In accordance with an embodiment of the present invention the microfluidic mixer (110) has multilevel active cantilever structures.
Description
A MICROFLUIDIC MIXER
FIELD OF THE INVENTION
The present invention relates to a microfluidic device and the control of fluid flow within the device for mixing purposes. This device is useful in various biological and chemical systems, as well as in combination with other liquid-distribution devices. BACKGROUND OF THE INVENTION
In recent years, microfluidic systems have attracted increasing interests due to their diverse and widespread potential applications. For example, using very small volumes of samples, microfluidic systems could carry out complicated biochemical reactions to acquire important chemical and biological information. Among other advantages, microfluidic systems reduce the required amount of samples and reagents, shorten the response time of reactions, and decrease the amount of biohazard waste for disposal.
Generally, the mixing of fluids in a microfluidic system is problematic, since the fluid flow within these devices is not turbulent. Some microfluidic mixing devices have been constructed in substantially planar microfluidic systems where the fluids are allowed to mix through diffusion. In these systems, the fluids only mix at the interface of the fluids, which is commonly small relative to the overall volume of the fluids. Thus, very little mixing occurs. There is, thus, a need for a robust mixing device capable of thoroughly mixing a wide variety of fluids in a microfluidic environment in a controlled manner at a relatively high speed.
The present invention overcomes these and other deficiencies of the above-mentioned drawbacks by providing a microfluidic mixer and the control of fluid flow within the device for mixing purposes. The invention provides a considerable reduction of materials with even greater efficiency and economically during operation.
SUMMARY OF THE INVENTION
The present invention provides a microfluidic mixer comprising an inlet port for receiving a plurality of input fluids to be mixed, an outlet port for providing a mixture of input fluids to be exited from the microfluidic mixer and a mixing chamber is formed from at least two walls in juxtaposition adjacent to the inlet port and the outlet port, each wall having at least one projection extends transversely to a direction of flow of the input fluids.
In one embodiment of the present invention, each wall of the mixing chamber is formed from at least two layers in a vertical arrangement.
In yet another embodiment of the present invention each layer of the wall having at least one projection. In one embodiment of the present invention, the projection in each layer is arranged in a same direction and an opposite direction.
In yet another embodiment of the present invention, the projection is an active cantilever and the active cantilever operated in an electrostatic condition to generate an oscillatory vibration movement for disturbing and mixing the flowing fluids in the mixing chamber.
In one embodiment of the present invention the fluids are selected from conductive fluid and non-conductive fluid. In yet another embodiment of the present invention the input fluids are mixed in a perpendicular direction to the projection extends.
A method of operating a microfluidic mixer comprising injecting each input fluid into an inlet port of a mixing chamber of the microfluidic mixer, actuating a projection in each layer of a wall in the mixing chamber and interfering the input fluids when the projection in each layer of the wall is actuated with a movement to form a mixture of predetermined fluids.
In one embodiment of the present invention the projection is an active cantilever.
In yet another embodiment of the present invention an electrostatic condition is provided to actuate the projection of each layer of the wall in the mixing chamber.
BRIEF DESCRIPTION OF THE DRAWINGS
The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.
Figure 1 illustrates a microfluidic mixer with multilevel active cantilever structures (a) isometric view and (b) a cross-sectional view in accordance of an embodiment of the present invention.
Figure 2 illustrates a displacement of the two layers of active cantilever structures in: (a) same direction (b) opposite direction to each other in accordance of an embodiment of the present invention. Figure 3 illustrates a mixing of fluid flowing in directions: (a) through (perpendicular) (b) planar (along) and through in accordance of an embodiment of the present invention.
Figure 4 illustrates a working principle of the microfluidic mixer: (a) Upon injection of different fluids (sample and reagents) (b) upon activation of cantilever structures (c) disturbance of fluid flow started (d) chaotic and higher turbulence of fluid flow with the increase of cantilever actuations in accordance of an embodiment of the present invention.
DETAILED DESCRIPTIONS OF THE INVENTION
The present invention will now be described in detail in connection with specific embodiments with reference to the accompanying drawings. Unless the context requires otherwise, throughout the specification and claims which follow, the word "comprise" and variations thereof, such as, "comprises" and "comprising" are to be construed in an open,
inclusive sense that is as "including, but not limited to". Reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure or characteristic described in connection with the embodiment is included in at least one embodiment. Thus, the appearances of the phrases "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. With respect to the use of substantially any plural and/or singular terms herein, those having skill in the art can translate from the plural to the singular and/or from the singular to the plural as is appropriate to the context and/or application. The various singular/plural permutations may be expressly set forth herein for sake of clarity. Furthermore, in those instances where a convention analogous to "at least one of A, B and C," etc. is used, in general such a construction is intended in the sense one having skill in the art would understand the convention (e.g., "a system having at least one of A, B and C" would include but not be limited to systems that have A alone, B alone, C alone, A and B together, A and C together, B and C together, and/or A, B and C together, etc.). In those instances where a convention analogous to "at least one of A, B or C, etc." is used, in general such a construction is intended in the sense one having skill in the art would understand the convention (e.g., "a system having at least one of A, B, or C" would include but not be limited to systems that have A alone, B alone, C alone, A and B together, A and C together, B and C together, and/or A, B and C together, etc.). It will be further understood by those within the art that virtually any disjunctive word and/or phrase presenting two or more alternative terms, whether in the description, claims, or drawings, should be understood to contemplate the possibilities of including one of the terms, either of the terms, or both terms. For example, the phrase "A or B" will be understood to include the possibilities of "A" or "B" or "A and B."
The term "channel" as used herein is to be interpreted in a broad sense. Thus, it is not intended to be restricted to elongated configurations where the transverse or longitudinal dimension greatly exceeds the diameter or cross-sectional dimension. Rather, such terms are meant to comprise cavities or tunnels of any desired shape or configuration through which liquids may be directed. Such a fluid cavity may, for example, comprise a flow-through cell where fluid is to be continually passed or, alternatively, a chamber for holding a specified, discrete amount of fluid for a specified amount of time.
The term "microfluidic" as used herein is to be understood, without any restriction thereto, to refer to structures or devices through which fluid (s) are capable of being passed or directed, wherein one or more of the dimensions is less than 500 microns. The term "flow" in the context of the present invention especially means and/ or includes that at least one component of the fluid is characterized by a velocity (or is moving) with a substantial component in the direction of said channel.
The term "actuation" means is capable of changing at least one of the physical properties of at least one of the plurality of active flow controlling means via applying an electrical potential.
Figure 1 illustrates a microfluidic mixer (110) with multilevel active cantilever (114) structures in accordance of an embodiment of the present invention. The microfluidic mixer (110) of the present invention comprising an inlet port (112) for receiving a plurality of input fluids to be mixed, an outlet port (112) for providing a mixture of input fluids to be exited from the microfluidic mixer (110) and a mixing chamber (113) is formed from at least two walls (115) in juxtaposition adjacent to the inlet port and the outlet port, each wall (115) having at least one projection (114) also known as active cantilever extends transversely to a direction (116) of flow of the input fluids.
Each wall (115) of the mixing chamber (113) is formed from at least two layers in a vertical arrangement as illustrated in Figure 1(a) to form a microfluidic mixer with multilevel active cantilevers. Each layer of the wall has at least one projection (114). The mixing chamber (1 3) is positioned on top of a base substrate ( 8). Figure 1(b) illustrates a cross sectional view a microfluidic mixer with multilevel active cantilever structures. Each wall (115) having at least one projection (114) also known as active cantilever is made from a conducting material (122) such as doped polysilicon, metals or conductive polymers. Between the each layer of the wall (115), an insulation layer (120) is provided. The insulation layer (124) used in the present invention is a silicon nitride (Si3N4). A glass material or any equivalent materials such as silicon, polymers such as polydimethylsiloxane (PDMS), poly-methyl- metha-crylate (PMMA) or polyimide (126) is provided for forming a flow channel and to seal the mixing chamber (113).
Figure 2 illustrates a displacement of the two layers of active cantilever structures in: (a) same direction (b) opposite direction to each other in accordance of an embodiment of the present invention. There are at least two layers of active cantilever structures which operated electrostatically to generate oscillatory vibration movement to create disturbance to the flow the fluids. The two layers of active cantilever structures are displaced in either the same direction or in direction perpendicular to each other.
Figure 3 illustrates a mixing of fluid flowing in directions: (a) through (perpendicular) (b) planar (along) and through in accordance of an embodiment of the present invention. Among the fluids that are mixed in the microfluidic mixer of the present invention, are those selected from conductive fluid and non-conductive fluid. The active cantilevers on the base substrate and insulation layer are operated to move in different plane by means of either actuating the active cantilever structures of the microfluidic mixer on the base substrate towards the base substrate in vertical direction and actuating the active cantilever structures of the microfluidic mixer on the insulation layer planarly to move sideways in horizontal direction. The actuation principle of the present invention is an electrostatic-type where upon application of voltage on the cantilever, the cantilever is displaced towards metallic layers (or silicon wafers) which are grounded (0V). Since the present invention requires application of voltage for actuation, therefore it is classified as an active micromixer which utilises the disturbance generated by the movement of the cantilever structures for fluid mixing process.
Figure 4 illustrates a working principle of the microfluidic mixer: (a) Upon injection of different fluids (sample and reagents) (b) upon activation of cantilever structures (c) disturbance of fluid flow started (d) chaotic and higher turbulence of fluid flow with the increase of cantilever actuations in accordance of an embodiment of the present invention. A method of operating a microfluidic mixer of the present invention comprising firstly upon injection of different and predetermined fluids (sample and reagents) for mixing purposes at the inlet port, the fluid is directed towards the microfluidic mixer as shown in Figure 4(a). When the all the fluids reach towards the mixing area, the active cantilevers of the microfluidic mixer at the different layers of the substrates are actuated. The actuation principle of the present invention is an electrostatic-type and the displacement of the cantilever is governed by Equation 1 to as follows:
Capacitance, C = ^ (1 )
d
Where,
ε0 = permittivity of free space (8.854x10'12 F/m) sr = relative static permittivity A = overlap area between cantilever structure and bottom metallic layer
d = separation between the cantilever structure and bottom metallic layer
Where upon application of voltage on the conducting cantilevers, it is displaced towards the other metallic layer (or silicon wafer) which is grounded (OV) as shown in Figure 4(b). The movement of the cantilevers interfere with the fluid causing disturbance in the fluid flow as shown in Figure 4(c). As the cantilevers are displaced rapidly or in direction opposite to each other, the fluids flow inside the mixing chamber is in a chaotic and high turbulence of flow which shows in Figure 4(d). This provides a vigorous mixing of fluids with a greater efficiency and uniformly.
One of the advantages of the microfluidic mixer to present invention is to provide a control of fluid flow within the device for mixing purposes. Another advantage of the present invention is that a robust microfluidic mixer is formed that is capable of thoroughly mixing a wide variety of fluids in a microfluidic environment in a controlled manner at a relatively high speed. The active microfluidic mixer of the present invention is developed using micromachining technique and microfabricated for miniaturization purposes and the different substrates involved in the fabrication is anodically bonded. This microfluidic mixer can be applied typically in the areas of biochemistry analysis, drug delivery, agriculture, environmental monitoring and microanalyser systems.
The foregoing embodiment and advantages are merely exemplary and are not to be construed as limiting the present invention. The description of the embodiments of the present invention is intended to be illustrative and not to limit the scope of the claims and many alternatives, modifications and variations will be apparent to those skilled in the art.
Claims
1. A microfluidic mixer comprising an inlet port for receiving a plurality of input fluids to be mixed;
an outlet port for providing a mixture of input fluids to be exited from the microfluidic mixer; and
a mixing chamber is formed from at least two walls in juxtaposition adjacent to the inlet port and the outlet port, each wall having at least one projection extends transversely to a direction of flow of the input fluids.
2. The microfluidic mixer as claimed in Claim 1 wherein each wall of the mixing chamber is formed from at least two layers in a vertical arrangement.
3. The microfluidic mixer as claimed in Claim 2 wherein each layer of the wall having at least one projection.
4. The microfluidic mixer as claimed in Claim 3 wherein the projection in each layer is arranged in a same direction.
5. The microfluidic mixer as claimed in Claim 3 wherein the projection in each layer is arranged in an opposite direction.
6. The microfluidic mixer as claimed in Claim 1 wherein the projection is an active cantilever.
7. The microfluidic mixer as claimed in Claim 6 wherein the active cantilever operated in an electrostatic condition to generate an oscillatory vibration movement for disturbing and mixing the flowing fluids in the mixing chamber.
8. The microfluidic mixer as claimed in Claim 1 wherein the fluids are selected from conductive fluid and non-conductive fluid.
9. The microfluidic mixer as claimed in Claim 1 wherein the input fluids are mixed in a perpendicular direction to the projection extends.
10. A method of operating a microfiuidic mixer comprising injecting each input fluid into an inlet port of a mixing chamber of the microfiuidic mixer; actuating a projection in each layer of a wall in the mixing chamber; and interfering the input fluids when the projection in each layer of the wall is actuated with a movement to form a mixture of predetermined fluids.
11. The method as claimed in Claim 10 wherein the projection is an active cantilever.
12. The method as claimed in Claim 10 wherein an electrostatic condition is provided to actuate the projection of each layer of the wall in the mixing chamber.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MYPI2011004766 | 2011-10-05 | ||
| MYPI2011004766 | 2011-10-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2013051924A1 true WO2013051924A1 (en) | 2013-04-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/MY2012/000178 WO2013051924A1 (en) | 2011-10-05 | 2012-06-29 | A microfluidic mixer |
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| WO (1) | WO2013051924A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9394160B2 (en) | 2013-04-12 | 2016-07-19 | Stmicroelectronics S.R.L. | Microfluidic device with integrated stirring structure and manufacturing method thereof |
| CN108404698A (en) * | 2018-05-09 | 2018-08-17 | 苏州倍丰激光科技有限公司 | Flow mixer and guiding device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060285433A1 (en) * | 2005-06-20 | 2006-12-21 | Jing-Tang Yang | Fluidic mixer of serpentine channel incorporated with staggered sudden-expansion and convergent cross sections |
| WO2008018036A2 (en) * | 2006-08-09 | 2008-02-14 | Koninklijke Philips Electronics N.V. | Micro-fluidic system |
| WO2012044154A1 (en) * | 2010-09-28 | 2012-04-05 | Mimos Berhad | Micromixing device and method of fabrication for miniturization |
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2012
- 2012-06-29 WO PCT/MY2012/000178 patent/WO2013051924A1/en active Application Filing
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060285433A1 (en) * | 2005-06-20 | 2006-12-21 | Jing-Tang Yang | Fluidic mixer of serpentine channel incorporated with staggered sudden-expansion and convergent cross sections |
| WO2008018036A2 (en) * | 2006-08-09 | 2008-02-14 | Koninklijke Philips Electronics N.V. | Micro-fluidic system |
| WO2012044154A1 (en) * | 2010-09-28 | 2012-04-05 | Mimos Berhad | Micromixing device and method of fabrication for miniturization |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9394160B2 (en) | 2013-04-12 | 2016-07-19 | Stmicroelectronics S.R.L. | Microfluidic device with integrated stirring structure and manufacturing method thereof |
| US9527726B2 (en) | 2013-04-12 | 2016-12-27 | Stmicroelectronics S.R.L. | Microfluidic device with integrated stirring structure and manufacturing method thereof |
| CN108404698A (en) * | 2018-05-09 | 2018-08-17 | 苏州倍丰激光科技有限公司 | Flow mixer and guiding device |
| CN108404698B (en) * | 2018-05-09 | 2024-02-23 | 苏州倍丰智能科技有限公司 | Fluid mixer and flow guiding device |
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