WO2013042489A1 - Device for changing pitch of stacked objects - Google Patents
Device for changing pitch of stacked objects Download PDFInfo
- Publication number
- WO2013042489A1 WO2013042489A1 PCT/JP2012/070635 JP2012070635W WO2013042489A1 WO 2013042489 A1 WO2013042489 A1 WO 2013042489A1 JP 2012070635 W JP2012070635 W JP 2012070635W WO 2013042489 A1 WO2013042489 A1 WO 2013042489A1
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- WIPO (PCT)
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- pitch
- changing device
- base plates
- laminate
- work
- Prior art date
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H39/00—Associating, collating, or gathering articles or webs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2801/00—Application field
- B65H2801/87—Photovoltaic element manufacture, e.g. solar panels
Definitions
- the present invention relates to an apparatus for changing the pitch between workpieces when a large number of thin workpieces are juxtaposed in a stack at a predetermined pitch.
- work when transferring a thin object to be transferred (hereinafter referred to as "work") called a cell such as a solar panel from one container to another, it is arranged in a stack form for reasons of production process. There are times when the pitch between work pieces is different.
- the present invention is an apparatus for changing only the stacking pitch while maintaining the stacking state of the work.
- the reference information is as follows.
- the present invention solves the above-mentioned drawbacks and changes the laminate laminated in one container with one pitch (for example, small pitch) to another pitch (for example, large pitch) to laminate in another container
- the purpose is to efficiently carry out the work of storing
- Another object of the present invention is to carry out the above-mentioned transfer work reliably, stably and smoothly.
- Another object is to detect whether or not the workpiece to be transferred is in an abnormal state.
- a laminate pitch changing device is a device for changing the pitch between a large number of thin work pieces juxtaposed in a stack at a predetermined pitch, and a movable movable holding portion And a drive unit for driving the movable holding unit, wherein the movable holding unit comprises a large number of base plates juxtaposed in a stack at a predetermined pitch, and an operating member for holding the work is provided on each of the base plates.
- the operating member is operated by drive power sent from the communication passage to hold the work individually and each base plate is provided with a rotatable variable spacer interlocked with the drive shaft of the drive unit.
- the rotation makes the pitch between the base plates variable, and when the work is held by the base plates, the movement between the base plates and the group of base plates
- the communication passage is formed by connecting an elastic packing which can extend and contract between the through holes of the adjacent base plates.
- the elastic packings move in conjunction with the base plates.
- the variable spacers move in conjunction with the base plates.
- the respective base plates are provided with springs for releasing the fixing of the pitch between the base plates.
- the elastic packing is formed in a bellows shape.
- the variable spacer is formed with portions having different thicknesses on the circumferential surface, and portions having different thicknesses by rotation are in contact with the base plate. Is characterized in that the pitch of.
- the spring causes the fixed base plate side spring force to be larger than the movable base plate side spring force by the force for restoring the base plate in the contracted state. It features.
- the spring force of the spring is made smaller stepwise toward the movable base plate side for every predetermined number of base plates.
- the spring force of the spring is linearly reduced toward the movable base plate side.
- the spring comprises a single spring.
- the spring is characterized in that a plurality of springs are stacked.
- a detection unit for detecting the state of the work such as cracking or chipping of the work is provided.
- the detection unit is provided at an inlet and an outlet of the communication passage for opening and closing the communication passage, and the opening and closing valve is provided at the opening and closing valve and communicates with a vacuum pressure detection passage.
- the operating member is characterized by comprising a suction pad for suctioning the work.
- the operating member is characterized by comprising a clamping member for clamping the work.
- the group of base plates is formed into one group for every predetermined number.
- the operation member holds the surface of the work in a direction orthogonal to the stacking direction.
- the operation member holds the surface of the work in a direction along the stacking direction.
- the suction device for a laminate pitch changing device is a means for holding a work, and an airtight and expandable communication passage is formed between the laminate pitch changing device and the base plate. Also provide a pad.
- the work to change only the lamination pitch while maintaining the lamination state of the work as the lamination. Therefore, the work (transfer) to change the laminates stacked in one container at one pitch (for example, small pitch) to another pitch (for example, large pitch) and store them in another container in the form of a stack Can be done efficiently.
- the above-mentioned transfer can be performed at once while maintaining the stacked state of the work as a stacked product. Therefore, the transfer work can be performed reliably, stably and smoothly.
- FIG. 1E is a cross-sectional view of FIG. 1E-F-G-H-I-J at a small pitch of the variable spacer
- B is an enlarged view of a portion B of (A)
- C is a large pitch of the variable spacer
- FIG. 1E is a cross-sectional view of FIG.
- FIG. 3 A is a front view showing a base plate and its attachment, (B) is a BB enlarged sectional view of (A).
- A) is a front view of the suction pad of FIG. 1, (B) is a bottom view of (A), (C) is a right side view of (A).
- A) is a front view of the variable spacer, (B) is a cross-sectional view taken along the line BB of (A), and (C) is an enlarged view of a portion C of (B).
- FIG. 2 shows the valve and the orifice for opening and closing the communication passage of the device of FIG.
- FIG. 6 is a diagram showing an operation flow of a laminate pitch changing device according to the present invention.
- A is a front view of another operation member
- B is a bottom view of (A)
- C is a right side view of (A).
- the laminate pitch changing device E comprises a movable adsorption unit 1 as a movable movable holding unit and a drive unit for driving the movable adsorption unit 1.
- the movable adsorption portion 1 is formed by arranging a large number of base plates 3 in a stacked manner at a predetermined pitch.
- a group of base plates 3 constituting the movable suction unit 1 is formed of square plate-like pieces of the same configuration.
- Each base plate 3 is provided with a pair of holes 5 in the center as shown in detail in FIG.
- the hole 5 has a bottom and is formed in a square hole 5a larger than the radius of the variable spacer 17 so that the large pitch portion 20 can escape when the variable spacer 17 is the small pitch portion 19.
- a semicircular notch 5b is provided outward in the central portion on the outer side of the square hole 5a to form a relief when the drive shaft 31 rotates.
- the notch 5b of the hole 5 since the notch 5b of the hole 5 has a bottom, it is desirable to prevent excessive entry of the large pitch portion 20 located in the notch 5b at a small pitch.
- Two circular recesses 7 are provided at the upper and lower ends of the left and right ends of each base plate 3. As shown in detail in FIGS.
- variable spacer 17 is disposed at the center of the notch 5b.
- the variable spacer 17 is inserted into a rotatable drive shaft 31 formed of a square bar.
- the variable spacer 17 is a disc as shown in FIG. 7, and a square central hole 18 through which the drive shaft 31 is inserted is provided at the central portion.
- the variable spacer 17 have different thickness of the circumferential surface, formed by providing the large pitch portion 20 having a small pitch portion 19 and the thick thickness d 2 which has a thin thickness d 1.
- the small pitch portion 19 and the large pitch portion 20 are continuous via the inclined portion 21.
- variable spacer 17 is disposed between the base plates 3 and is inserted into a rotatable drive shaft 31 formed of a square bar. As a result, the variable spacer 17 rotates in conjunction with the rotation of the drive shaft 31, and the working surface of the small pitch portion 19 or the large pitch portion 20 contacting the adjacent base plate 3 is changed. It moves horizontally along with the movement of the direction.
- the distribution plate 23 is integrally fixed to the base plate 3 so as to be exchangeable.
- a suction pad 25 as an operating member is replaceably attached to the lower end of the distribution plate 23.
- a passage 26 is provided in the distribution plate 23, and the passage 26 is in communication with a small passage 27 provided in the suction pad 25.
- An elastic communication passage 28 is formed by the elastic packing 15 attached to the through hole 13 of the base plate 3, the passage 26 provided in the distribution plate 23, and the small passage 27 provided in the suction pad 25. Be done.
- the communication passage 28 communicates with a suction port 29 provided in the suction pad 25.
- the suction port 29 is provided at the site of the suction pad 25 corresponding to the site of the work 51 where cracking and chipping occur frequently.
- each through hole 13 is a first through hole 13a for the first to tenth work piece 51, and a second through hole 13b is for the eleventh through twentieth work 51.
- the through hole 13c is configured to correspond to each of the 21st to 30th workpieces 51, and as shown by hatching in FIG.
- FIG. 8 the first communication passage 28a (FIG. 8A) and the second link, respectively.
- a passage 28b (FIG. 8B) and a third communication passage 28c (FIG. 8C) are formed.
- Reference numeral 27a denotes a constriction portion formed at the boundary between the small passage 27 and the suction port 29 (shown in FIGS. 5 and 6).
- the opening of the narrowed portion 27a is set to be larger than the opening of the orifice 46 described later in the ratio of the cross-sectional area.
- reference numeral 32 denotes a guide rod which communicates the release springs 9; 33, a stopper provided on the base 34 and abutting against the open end of the group of base plates 3; 35 on the open end side of the push plate 41.
- a slide bush to be provided, 36 is a forward and backward pitching cylinder which determines the pitch between the workpieces 51.
- 40a is a first joint for the first to tenth workpieces 51
- 40b is a second joint for the eleventh to twentieth workpieces 51
- 40c is for the 21st to 30th workpieces 51. It is the third joint.
- Each joint 40a, 40b, 40c is a first communication passage 28a for the first to tenth workpiece 51, a second communication passage 28b for the eleventh to twentieth workpiece 51, the 21st to 28th, respectively. It is connected to the third communication passage 28 c for the 30th workpiece 51.
- Each joint 40a, 40b, 40c is connected to a vacuum source (not shown), and transmits the drive power from the vacuum source to the communication passages 28a, 28b, 28c.
- 37 is a rotary actuator for driving the drive shaft
- 38 is a coupling for transmitting the driving force of the rotary actuator 37 to the drive shaft 31
- 39 is provided at both ends of the drive shaft 31.
- the bearings 41 are movable push plates provided at the open end of the group of base plates 3 and the fixed reference plates 43 provided at the base end of the group of base plates 3.
- arrow A indicates the pressing direction of the pitch determining cylinder 36
- arrow B indicates the direction of the restoring force of the release spring 9.
- the release spring 9 will be described in detail.
- the spring 9o constituting the release spring 9 has a hole formed in the central portion 9p, the peripheral portion 9q is inclined, and four sheets are stacked and mounted on the base plate 3 as described above.
- bottom surfaces 9r of two pairs of springs 9o facing each other at the central portion 9p are opposed to constitute one set of release springs 9.
- the spring force for restoring the base plate 3 in the contracted state is set such that the restoring force of the spring on the reference plate 43 side is larger than the restoring force of the spring on the push plate 41 side.
- the spring force of each set of release springs 9 is divided into three blocks 10A, 10B and 10C in the case of the embodiment of FIG.
- the spring force of the release springs 9 constituting the first block 10A to the third block 10C is increased by a predetermined ratio for each unit number (five in the illustrated example) of the work 51, As shown in FIG. 11C, the restoring force of the release spring 9 is increased stepwise. That is, the spring force of the release spring 9A of the first block 10A P 1> second blocks 10B of the release spring 9B or each spring force of the release spring 9C P 2> each spring release spring 9D to release spring 9J of the third block 10C It has become a force P 3.
- the release spring 9A of the first block 10A is configured such that the constituent spring 9a has high strength, the constituent spring 9b has medium strength, and the constituent springs 9c and 9d have small strength.
- the release spring 9B of the second block 10B is configured such that the configuration spring 9e has high strength, and the configuration springs 9f, 9g, and 9h have low strength.
- the spring force of the spring constituting the release spring 9C is similarly configured.
- the spring force of the release spring 9D to the release spring 9J of the third block 10C is configured by the spring force of each of the four constituent springs with a small strength.
- the number of base plates 3 shown in FIG. 11A does not exactly match the number of base plates 3 shown in FIGS. 2 to 4, but this is for convenience of explanation. .
- the X axis indicates the position of the release spring 9 at the small pitch
- the Y axis indicates the spring force of the release spring 9 at the small pitch.
- the communication passage 28 is provided in the vacuum supply chamber 44 of the chamber block 42, as shown in FIG. 12, and a valve 45 for opening and closing the vacuum supply chamber 44 is provided here.
- An orifice 46 is provided in the on-off valve 45.
- Reference numeral 47 denotes a vacuum pressure detection path provided in the chamber block 42. One end of the vacuum pressure detection path 47 is in communication with the orifice 46 through a passage 47a in communication with the vacuum supply chamber 44, and the other end is in communication with the other joint 40d and the vacuum pressure detection sensor 48 (shown in FIG. 11) Connected to).
- Reference numeral 49 denotes a cylinder for driving the on-off valve 45.
- the open / close valve 45, the orifice 46, the path 47a, the vacuum pressure detection path 47, and the vacuum pressure detection sensor 48 constitute a work state detection unit.
- the opening ratio of the orifice 46 to the suction pad 25 is important. That is, the opening area of the orifice 46 needs to be smaller than the opening area of the narrowed portion 27 a provided in the suction pad 25. In the present embodiment, the opening of the orifice 46 is about 1 ⁇ 6 of the narrowed portion 27a in cross-sectional area ratio.
- the laminate stored in the small container 52 in a stacked state at one pitch (for example, small pitch) is changed to another pitch (for example, large pitch) to be stacked in the large container 53.
- the operation in the case of storing in the state will be described.
- the dimension of the small pitch portion 19 of the variable spacer 17 is previously set to the pitch between the works 51 accommodated in the small container 52, and the dimension of the large pitch portion 20 of the variable spacer 17 is a workpiece accommodated in the large vessel 53. It is set to the pitch between 51.
- the pitch setting cylinder 36 is extended, and the base plate 3 is pressed to the reference plate 43 side by the push plate 41, and the pitch between the base plates 3 is the pitch between the workpieces 51 stored in the small container 52 A) It corresponds to the small pitch shown in (B) (FIG. 13 (A)).
- the movable adsorption portion 1 is vertically moved in the direction of the arrow C shown in FIG. 13A, and is inserted into the small-pitch small container 52.
- Each base plate 3 of the movable suction unit 1 inserts each suction pad 25 between each work 51 and sucks each work 51 onto each suction pad 25.
- Each suction pad 25 sucks the surface of the work in the direction orthogonal to the stacking direction, that is, the front surface 51a (shown by a dashed dotted line in FIG. 1) or the back of the work 51.
- the pressure in the communication passage 28 is reduced by a vacuum source (not shown), and each work 51 is adsorbed to the adsorption port 29 of each adsorption pad 25.
- the pressure reduction in the communication passage 28 simultaneously operates the first communication passage 28a, the second communication passage 28b, and the third communication passage 28c.
- FIGS. 13B and 13C show this process.
- FIG. 13C shows this state.
- FIG. 13D shows this state.
- the movable suction unit 1 is vertically moved in the direction of arrow D shown in FIG. 13D, and then suction of the suction pads 25 is released, and the work 51 is stored in the large container 53 with a large pitch in the stacked state. (FIG. 13 (D)). Also at the time of the adsorption release in this transfer, the pressure reduction of the communication passage 28 is released simultaneously with the first communication passage 28a, the second communication passage 28b, and the third communication passage 28c.
- FIG. 13F shows this state.
- Each communication passage 28 is communicated with the suction port 29 of each suction pad 25 via the elastic packing 15, and this elastic packing 15 moves its position in the horizontal direction in conjunction with the movement of the base plate 3.
- the expansion and contraction width of each elastic packing 15 is small for each one, but if each elastic packing 15 does not move, the movement amount of the elastic packing 15a adjacent to the reference plate 43 side and The movement amount of the elastic packing 15n adjacent to the push plate 41, which is the open end, is a large opening. For example, assuming that the elastic packing 15 does not move if the elastic width of each elastic packing 15 is 0.8 mm, the moving amount of the elastic packing 15 a is 0.8 mm, but the n th is 30 pieces.
- the suction pads 25 are provided as a pair on each base plate 3, for example, when the work 51 is held by suction, the arrangement of the release spring 9 becomes left-right symmetrical and vertically symmetrical with respect to the slide guide 11.
- the arrangement of the variable spacers 17 is symmetrical in the left-right direction so that balance can be easily achieved, and the apparatus can be further stabilized mechanically.
- the release spring 9 pushes the restoring force on the reference plate 43 side. It is considered to be larger than the restoring force on the plate 41 side. Therefore, when the pitch between the base plates 3 is changed, that is, when the release spring 9 presses the base plate 3 from the position of FIG. 13 (A) to the position of FIG. 13 (B). Since the entire base plate 3 is pressed in a well-balanced manner when pressed to the position of (1), the base plate 3 can be smoothly restored to the position before transfer. In this regard, if the strength of the release spring is kept uniform, the release spring may not operate.
- the release spring 9 having a difference in restoring force is provided on the base plate 3
- the release spring 9 of the base plate 3 is simultaneously expanded and restored, so the group of base plates 3 reduced in the block shape is equally It is expanded and can move to the next step.
- the vacuum pressure in the communication passage 28 changes, so that the change can be detected before the transfer. Therefore, the certainty of transfer is further improved.
- the laminate pitch changing device is not limited to the embodiment described above.
- the holding by the operation member may be holding of each work 51 not by suction by the suction pad 25 but by pinching by the pinching member 65 as shown in FIG. It can apply.
- the clamping member 65 is composed of a pair of openable and closable movable claws 65a and 65b connected by a spring 65c, and a passage 66 communicating with the communication passage 28 is provided at the base end.
- the spring 65c is always biased in the open state.
- the operation members such as the suction pad 25 and the sandwiching member 55 do not necessarily need to be in pairs, and may be one or three or more.
- the holding surface of the work by the operation member is optional, for example, as shown in FIG. 14A, even if the work 51 is sandwiched from the surface of the work in the direction along the stacking direction, that is, the both sides 51b of the work. Good.
- the number of communication paths 28 is arbitrary, and can be appropriately increased or decreased depending on the number of workpieces to be applied.
- the operation can also be operated sequentially. This is advantageous, for example, when the volume of the vacuum source is small.
- the elastic packing 15 is in the form of a bellows in the illustrated embodiment, but is not limited to this.
- an elastic rubber packing, an O-ring or the like may be used. In any case, it can be moved in conjunction with the movement of the base plate 3.
- the pitch portions formed on the circumferential surface of the variable spacer 17 can also be, for example, three or more large, medium, and small.
- each pitch portion is provided every 120 °, and in the case of a plurality of pitch portions being installed, the installation site of the pitch portions is appropriately changed.
- the installation ratio of the pitch portion does not necessarily have to be equally divided.
- the setting ratio of the large pitch portion may be 60%, and the setting ratio of the small pitch portion may be 40%.
- the setting ratio of the large pitch portion may be 40%, the setting ratio of the middle pitch portion may be 35%, and the setting ratio of the small pitch portion may be 25%.
- the time to change the pitch between the base plates 3 is arbitrary. As in the illustrated embodiment, it may be during conveyance of the work 51, but at the time of vertical movement of the movable holding portion to the small container 52 before conveyance, vertical movement of the movable holding portion to the large container 53 after conveyance Sometimes, the pitch between the base plates 3 may be changed.
- the moving direction of the movable holding portion is arbitrary. Although the case where the movable holding portion is moved in the horizontal direction has been described in the above embodiment, the movable holding portion may be moved in the vertical direction or may be moved in an oblique direction.
- the stacking direction of the base plate 3 constituting the movable holding portion is arbitrary.
- the shape of the base plate 3 is arbitrary.
- the base plate 3, the variable spacer 17, and the release spring 9 are desirably materials having high durability, for example, metal-based materials.
- the elastic packing 15 is preferably a material having a large elastic force, such as a plastic material or a rubber material.
- the suction pad 25 is desirably made of a material having a lightness, processability, chemical resistance and hardness smaller than that of a work, for example, an appropriate plastic material. From the viewpoint of lightness and processability, the distribution plate 23 is preferably, for example, an appropriate plastic material or light weight metal material.
- the driving power is optional, and not only by the vacuum source but also by, for example, a pressure source.
- the spring restoring force of the release spring 9 provided on the base plate 3 on the reference plate 43 side may be maximized and sequentially reduced linearly toward the release spring 9 on the push plate 41 side.
- the number of release springs 9 and the number of recesses 7 on which the release spring 9 is placed are also arbitrary, and can be appropriately increased or decreased depending on the size of the set pitch.
- the laminate pitch changing device according to the present invention is not limited to the embodiment described above.
- the opening and closing of the on-off valve 45 although the example which makes the on-off valve 45 "open” always at the above-mentioned embodiment and makes it "closing" at the time of inspection was described, it is not restricted only to this.
- the laminate pitch changing device is utilized for a device for changing the pitch between works when a large number of thin works are juxtaposed in a stack at a predetermined pitch, for example, for transferring solar panels. Can.
Abstract
Description
また、請求項1記載の積層物ピッチ変更装置において、上記連通路は隣接するベースプレートの通孔間に伸縮自在の弾性パッキングが連設されることにより形成されることを特徴とする。
また、請求項2記載の積層物ピッチ変更装置において、上記各弾性パッキングが上記各ベースプレートに連動して移動することを特徴とする。
また、請求項1記載の積層物ピッチ変更装置において、上記各可変スペーサが上記各ベースプレートに連動して移動することを特徴とする。
また、請求項1記載の積層物ピッチ変更装置において、上記各ベースプレートにベースプレート間のピッチの固定を解除するためのばねが設けられることを特徴とする。
また、請求項2記載の積層物ピッチ変更装置において、上記弾性パッキングは蛇腹状に形成されることを特徴とする。
また、請求項1記載の積層物ピッチ変更装置において、上記可変スペーサは円周面上において厚さの異なる部分が形成されており、回転により異なる厚さの部分が上記ベースプレートに接することによりベースプレート間のピッチを可変とすることを特徴とする。
また、請求項5記載の積層物ピッチ変更装置において、上記ばねは縮小された状態のベースプレートを復元させる力につき固定のベースプレート側のばね力を可動のベースプレート側のばね力より大に形成することを特徴とする。
また、請求項8記載の積層物ピッチ変更装置において、上記ばねのばね力をベースプレートの所定の個数毎に可動のベースプレート側に向かって段階状に小とすることを特徴とする。
また、請求項8記載の積層物ピッチ変更装置において、上記ばねのばね力を可動のベースプレート側に向かって直線状に小とすることを特徴とする。
また、請求項5記載の積層物ピッチ変更装置において、上記ばねが単一箇のばねからなることを特徴とする。
また、請求項5記載の積層物ピッチ変更装置において、上記ばねが複数箇のばねが重ねられてなることを特徴とする。
また、請求項1記載の積層物ピッチ変更装置において、上記ワークが吸着される際、ワークの割れ、欠け等ワークの状態を検出する検出部を設けることを特徴とする。
また、請求項13記載の積層物ピッチ変更装置において、上記検出部は上記連通路の出入口に上記連通路を開閉するために設けられる開閉バルブと、該開閉バルブに設けられ真空圧検出路に連通されるオリフィスと、該真空圧検出路に接続されるセンサとからなり、上記駆動パワーが上記連通路に入力され上記開閉バルブを閉じた後、連通路内の圧力変化を検出することを特徴とする。
また、請求項1記載の積層物ピッチ変更装置において、上記動作部材が上記ワークを吸着する吸着パッドからなることを特徴とする。
また、請求項1記載の積層物ピッチ変更装置において、上記動作部材が上記ワークを挟着する挟着部材からなることを特徴とする。
また、請求項1記載の積層物ピッチ変更装置において、一群のベースプレートは所定の個数毎に一のグループに形成されることを特徴とする。
また、請求項1記載の積層物ピッチ変更装置において、上記各ベースプレートに動作部材が一対設けられ、上記各ベースプレートには上記可変スペーサ及び該動作部材に連通する上記連通路が一対設けられることを特徴とする。
また、請求項1記載の積層物ピッチ変更装置において、上記動作部材は積層方向に直交する方向のワークの面を保持することを特徴とする。
また、請求項1記載の積層物ピッチ変更装置において、上記動作部材は積層方向に沿う方向のワークの面を保持することを特徴とする。
また本願発明は、上記積層物ピッチ変更装置において、ワークを保持する手段であり、上記ベースプレートとの間に気密で伸縮自在の連通路が形成されることを特徴とする積層物ピッチ変更装置用吸着パッドをも供する。 In order to achieve the above object, a laminate pitch changing device according to the present invention is a device for changing the pitch between a large number of thin work pieces juxtaposed in a stack at a predetermined pitch, and a movable movable holding portion And a drive unit for driving the movable holding unit, wherein the movable holding unit comprises a large number of base plates juxtaposed in a stack at a predetermined pitch, and an operating member for holding the work is provided on each of the base plates. The operating member is operated by drive power sent from the communication passage to hold the work individually and each base plate is provided with a rotatable variable spacer interlocked with the drive shaft of the drive unit. The rotation makes the pitch between the base plates variable, and when the work is held by the base plates, the movement between the base plates and the group of base plates Wherein the communication passage telescopic airtight communicating with the timber is formed.
Further, in the laminate pitch changing device according to
In the laminate pitch changing device according to claim 2, the elastic packings move in conjunction with the base plates.
In the laminate pitch changing device according to
In the laminate pitch changing device according to the first aspect of the invention, the respective base plates are provided with springs for releasing the fixing of the pitch between the base plates.
In the laminate pitch changing device according to claim 2, the elastic packing is formed in a bellows shape.
Further, in the laminate pitch changing device according to
Further, in the laminate pitch changing device according to
In the laminate pitch changing device according to the eighth aspect, the spring force of the spring is made smaller stepwise toward the movable base plate side for every predetermined number of base plates.
In the laminate pitch changing device according to the eighth aspect, the spring force of the spring is linearly reduced toward the movable base plate side.
In the laminate pitch changing device according to
Further, in the laminate pitch changing device according to
Further, in the laminate pitch changing device according to
In the laminate pitch changing device according to
Further, in the laminate pitch changing device according to
Further, in the laminate pitch changing device according to
Further, in the laminate pitch changing device according to
In the laminate pitch changing device according to
In the laminate pitch changing device according to
In the laminate pitch changing device according to
In the laminate pitch changing device according to the present invention, the suction device for a laminate pitch changing device is a means for holding a work, and an airtight and expandable communication passage is formed between the laminate pitch changing device and the base plate. Also provide a pad.
3 ベースプレート
5 孔部
5a 方形孔
5b 切欠
7 凹部
8 円孔
9 解除ばね
9o ばね
9p 中央部
9q 周縁部
9r 底面部
10A 第1ブロック
10B 第2ブロック
10C 第3ブロック
11 スライドガイド
13 通孔
13a 第1通孔
13b 第2通孔
13c 第3通孔
15 弾性パッキング
15a 第1弾性パッキング
15b 第2弾性パッキング
15c 第3弾性パッキング
17 可変スペーサ
18 中心孔
19 小ピッチ部
20 大ピッチ部
21 傾斜部
23 分配プレート
25 吸着パッド
26 通路
27 小通路
27a 狭窄部
28 連通路
28a 第1連通路
28b 第2連通路
28c 第3連通路
29 吸着口
31 駆動軸
32 ガイドロッド
33 ストッパ
34 台座
35 スライドブッシュ
36 ピッチ決めシリンダ
37 回転アクチュエータ
38 カップリング
39 軸受け
40a 第1継手
40b 第2継手
40c 第3継手
40d 他の継手
41 プッシュプレート
42 チャンバブロック
43 基準プレート
44 真空供給チャンバ
45 開閉バルブ
46 オリフィス
47 真空圧検出路
48 真空圧検出センサ
49 シリンダ
50 積層物
51 ワーク
52 小容器
53 大容器
65 挟着部材
65a 可動爪
65b 可動爪
65c ばね
66 通路 DESCRIPTION OF
Claims (21)
- 所定のピッチで積層状に並置された多数の薄い厚さのワーク間のピッチを変更する装置であって、
移動自在の可動保持部と、該可動保持部を駆動する駆動部とからなり、
上記可動保持部は多数のベースプレートが所定のピッチで積層状に並置されてなり、
上記各ベースプレートに上記ワークを保持する動作部材が設けられ、該動作部材は連通路から送られる駆動パワーにより作動されて上記ワークを各個別に保持し、
上記各ベースプレートに駆動部の駆動軸に連動する回転自在の可変スペーサが設けられ、該可変スペーサの回転によりベースプレート間のピッチが可変となり、
さらに上記各ベースプレートに上記ワークが保持される際、一群のベースプレートとの間に上記動作部材に連通する気密で伸縮自在の連通路が形成されることを特徴とする積層物ピッチ変更装置。 An apparatus for changing the pitch between a number of thin work pieces juxtaposed in a stack at a predetermined pitch,
The movable holding unit includes a movable holding unit and a driving unit that drives the movable holding unit.
In the movable holding portion, a large number of base plates are juxtaposed in a stack at a predetermined pitch,
Each of the base plates is provided with an operation member for holding the work, and the operation member is operated by a drive power sent from the communication passage to hold the work individually.
Each of the above base plates is provided with a rotatable variable spacer interlocking with the drive shaft of the drive unit, and the pitch between the base plates becomes variable by rotation of the variable spacer.
Furthermore, when the work is held on each of the base plates, an airtight and expandable communication path communicating with the operation member is formed between the group of base plates and the stack pitch changing device. - 請求項1記載の積層物ピッチ変更装置において、上記連通路は隣接するベースプレートの通孔間に伸縮自在の弾性パッキングが連設されることにより形成されることを特徴とする積層物ピッチ変更装置。 The laminate pitch changing device according to claim 1, wherein the communication passage is formed by connecting an elastic packing which can extend and contract between the through holes of the adjacent base plates.
- 請求項2記載の積層物ピッチ変更装置において、上記各弾性パッキングが上記各ベースプレートに連動して移動することを特徴とする積層物ピッチ変更装置。 The laminate pitch changing device according to claim 2, wherein the elastic packings move in conjunction with the base plates.
- 請求項1記載の積層物ピッチ変更装置において、上記各可変スペーサが上記各ベースプレートに連動して移動することを特徴とする積層物ピッチ変更装置。 The laminate pitch changing device according to claim 1, wherein the variable spacers move in conjunction with the base plates.
- 請求項1記載の積層物ピッチ変更装置において、上記各ベースプレートにベースプレート間のピッチの固定を解除するためのばねが設けられることを特徴とする積層物ピッチ変更装置。 The laminate pitch changing device according to claim 1, wherein each base plate is provided with a spring for releasing the fixed pitch between the base plates.
- 請求項2記載の積層物ピッチ変更装置において、上記弾性パッキングは蛇腹状に形成されることを特徴とする積層物ピッチ変更装置。 The laminate pitch changing device according to claim 2, wherein the elastic packing is formed in a bellows shape.
- 請求項1記載の積層物ピッチ変更装置において、上記可変スペーサは円周面上において厚さの異なる部分が形成されており、回転により異なる厚さの部分が上記ベースプレートに接することによりベースプレート間のピッチを可変とすることを特徴とする積層物ピッチ変更装置。 2. The laminate pitch changing device according to claim 1, wherein the variable spacer is formed with portions having different thicknesses on the circumferential surface, and the portions having different thicknesses by rotation are in contact with the base plate to thereby form the pitch between the base plates. A laminate pitch changing device characterized in that
- 請求項5記載の積層物ピッチ変更装置において、上記ばねは縮小された状態のベースプレートを復元させる力につき固定のベースプレート側のばね力を可動のベースプレート側のばね力より大に形成することを特徴とする積層物ピッチ変更装置。 6. The laminate pitch changing device according to claim 5, wherein the spring forms a fixed spring force on the base plate side greater than a spring force on the movable base plate side against a force for restoring the base plate in a contracted state. Stack pitch changer.
- 請求項8記載の積層物ピッチ変更装置において、上記ばねのばね力をベースプレートの所定の個数毎に可動のベースプレート側に向かって段階状に小とすることを特徴とする積層物ピッチ変更装置。 The laminate pitch changing device according to claim 8, wherein the spring force of the spring is reduced stepwise toward the movable base plate side for each predetermined number of the base plates.
- 請求項8記載の積層物ピッチ変更装置において、上記ばねのばね力を可動のベースプレート側に向かって直線状に小とすることを特徴とする積層物ピッチ変更装置。 9. A laminate pitch changing device according to claim 8, wherein the spring force of the spring is linearly reduced toward the movable base plate side.
- 請求項5記載の積層物ピッチ変更装置において、上記ばねが単一箇のばねからなることを特徴とする積層物ピッチ変更装置。 6. A device as claimed in claim 5, wherein the spring comprises a single spring.
- 請求項5記載の積層物ピッチ変更装置において、上記ばねが複数箇のばねが重ねられてなることを特徴とする積層物ピッチ変更装置。 6. A laminate pitch changing device according to claim 5, wherein a plurality of springs are stacked on said spring.
- 請求項1記載の積層物ピッチ変更装置において、上記ワークが吸着される際、ワークの割れ、欠け等ワークの状態を検出する検出部を設けることを特徴とする積層物ピッチ変更装置。 2. The laminate pitch changing device according to claim 1, further comprising a detection unit for detecting a state of the workpiece such as cracking or chipping of the workpiece when the workpiece is adsorbed.
- 請求項13記載の積層物ピッチ変更装置において、上記検出部は上記連通路の出入口に上記連通路を開閉するために設けられる開閉バルブと、該開閉バルブに設けられ真空圧検出路に連通されるオリフィスと、該真空圧検出路に接続されるセンサとからなり、上記駆動パワーが上記連通路に入力され上記開閉バルブを閉じた後、連通路内の圧力変化を検出することを特徴とする積層物ピッチ変更装置。 14. The laminate pitch changing device according to claim 13, wherein the detection unit is provided in an opening and closing port of the communication passage for opening and closing the communication passage, and the opening and closing valve is provided in the opening and closing valve and communicates with a vacuum pressure detection passage. A laminate comprising an orifice and a sensor connected to the vacuum pressure detection path, wherein the drive power is input to the communication path to close the on-off valve, and then a pressure change in the communication path is detected. Pitch change device.
- 請求項1記載の積層物ピッチ変更装置において、上記動作部材が上記ワークを吸着する吸着パッドからなることを特徴とする積層物ピッチ変更装置。 The laminate pitch changing device according to claim 1, wherein the operating member comprises a suction pad for sucking the work.
- 請求項1記載の積層物ピッチ変更装置において、上記動作部材が上記ワークを挟着する挟着部材からなることを特徴とする積層物ピッチ変更装置。 The laminate pitch changing device according to claim 1, wherein the operation member comprises a clamping member for clamping the work.
- 請求項1記載の積層物ピッチ変更装置において、一群のベースプレートは所定の個数毎に一のグループに形成されることを特徴とする積層物ピッチ変更装置。 The laminate pitch changing device according to claim 1, wherein a group of base plates is formed into one group every predetermined number.
- 請求項1記載の積層物ピッチ変更装置において、上記各ベースプレートに動作部材が一対設けられ、上記各ベースプレートには上記可変スペーサ及び該動作部材に連通する上記連通路が一対設けられることを特徴とする積層物ピッチ変更装置。 2. The laminate pitch changing device according to claim 1, wherein each of the base plates is provided with a pair of operation members, and each of the base plates is provided with a pair of the variable spacer and the communication passage communicating with the operation members. Laminate pitch changer.
- 請求項1記載の積層物ピッチ変更装置において、上記動作部材は積層方向に直交する方向のワークの面を保持することを特徴とする積層物ピッチ変更装置。 The laminate pitch changing device according to claim 1, wherein the operation member holds the surface of the work in a direction orthogonal to the stacking direction.
- 請求項1記載の積層物ピッチ変更装置において、上記動作部材は積層方向に沿う方向のワークの面を保持することを特徴とする積層物ピッチ変更装置。 The laminate pitch changing device according to claim 1, wherein the operation member holds the surface of the work in a direction along the stacking direction.
- 上記積層物ピッチ変更装置において、ワークを保持する手段であり、上記ベースプレートとの間に気密で伸縮自在の連通路が形成されることを特徴とする積層物ピッチ変更装置用吸着パッド。 A suction pad for a laminate pitch changing device, which is a means for holding a work in the laminate pitch changing device, and an airtight and stretchable communication path is formed between it and the base plate.
Priority Applications (4)
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DE112012003973.4T DE112012003973T5 (en) | 2011-09-22 | 2012-08-13 | Device for changing the distances in a stack |
KR1020147005758A KR20140077882A (en) | 2011-09-22 | 2012-08-13 | Device for changing pitch of stacked objects |
US14/346,319 US20140219767A1 (en) | 2011-09-22 | 2012-08-13 | Device for changing pitch of stack |
CN201280046134.6A CN103827005A (en) | 2011-09-22 | 2012-08-13 | Device for changing pitch of stacked objects |
Applications Claiming Priority (6)
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JP2011207989A JP5146707B1 (en) | 2011-09-22 | 2011-09-22 | Laminate pitch change device |
JP2011-207989 | 2011-09-22 | ||
JP2012162108A JP2014018935A (en) | 2012-07-20 | 2012-07-20 | Apparatus for changing pitch of stacked works |
JP2012162109A JP2014018936A (en) | 2012-07-20 | 2012-07-20 | Apparatus for changing pitch of stacked works |
JP2012-162109 | 2012-07-20 | ||
JP2012-162108 | 2012-07-20 |
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CN104476553A (en) * | 2014-11-13 | 2015-04-01 | 常州先进制造技术研究所 | Sucker type stacking manipulator capable of remaining gap |
WO2018141367A1 (en) * | 2017-01-31 | 2018-08-09 | Applied Materials, Inc. | Method of processing a substrate and substrate carrier for holding a substrate |
DE102018220452A1 (en) * | 2018-11-28 | 2020-05-28 | Robert Bosch Gmbh | Tilt segment bearings |
CN113353622A (en) * | 2021-04-30 | 2021-09-07 | 武汉华工激光工程有限责任公司 | Breadth-adjustable array manipulator |
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- 2012-08-13 KR KR1020147005758A patent/KR20140077882A/en not_active Application Discontinuation
- 2012-08-13 DE DE112012003973.4T patent/DE112012003973T5/en not_active Withdrawn
- 2012-08-13 US US14/346,319 patent/US20140219767A1/en not_active Abandoned
- 2012-08-13 WO PCT/JP2012/070635 patent/WO2013042489A1/en active Application Filing
- 2012-08-13 CN CN201280046134.6A patent/CN103827005A/en active Pending
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JPH05253877A (en) * | 1992-03-12 | 1993-10-05 | Sony Corp | Variable pitch mechanism |
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CN103827005A (en) | 2014-05-28 |
DE112012003973T5 (en) | 2014-07-10 |
WO2013042489A9 (en) | 2014-04-10 |
KR20140077882A (en) | 2014-06-24 |
US20140219767A1 (en) | 2014-08-07 |
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