WO2013042489A1 - Device for changing pitch of stacked objects - Google Patents

Device for changing pitch of stacked objects Download PDF

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Publication number
WO2013042489A1
WO2013042489A1 PCT/JP2012/070635 JP2012070635W WO2013042489A1 WO 2013042489 A1 WO2013042489 A1 WO 2013042489A1 JP 2012070635 W JP2012070635 W JP 2012070635W WO 2013042489 A1 WO2013042489 A1 WO 2013042489A1
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WO
WIPO (PCT)
Prior art keywords
pitch
changing device
base plates
laminate
work
Prior art date
Application number
PCT/JP2012/070635
Other languages
French (fr)
Japanese (ja)
Other versions
WO2013042489A9 (en
Inventor
政公 加藤
星羅 加藤
Original Assignee
プラス精機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2011207989A external-priority patent/JP5146707B1/en
Priority claimed from JP2012162108A external-priority patent/JP2014018935A/en
Priority claimed from JP2012162109A external-priority patent/JP2014018936A/en
Application filed by プラス精機株式会社 filed Critical プラス精機株式会社
Priority to DE112012003973.4T priority Critical patent/DE112012003973T5/en
Priority to KR1020147005758A priority patent/KR20140077882A/en
Priority to US14/346,319 priority patent/US20140219767A1/en
Priority to CN201280046134.6A priority patent/CN103827005A/en
Publication of WO2013042489A1 publication Critical patent/WO2013042489A1/en
Publication of WO2013042489A9 publication Critical patent/WO2013042489A9/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706Mechanical details, e.g. roller, belt
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H39/00Associating, collating, or gathering articles or webs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781Batch transfer of wafers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2801/00Application field
    • B65H2801/87Photovoltaic element manufacture, e.g. solar panels

Definitions

  • the present invention relates to an apparatus for changing the pitch between workpieces when a large number of thin workpieces are juxtaposed in a stack at a predetermined pitch.
  • work when transferring a thin object to be transferred (hereinafter referred to as "work") called a cell such as a solar panel from one container to another, it is arranged in a stack form for reasons of production process. There are times when the pitch between work pieces is different.
  • the present invention is an apparatus for changing only the stacking pitch while maintaining the stacking state of the work.
  • the reference information is as follows.
  • the present invention solves the above-mentioned drawbacks and changes the laminate laminated in one container with one pitch (for example, small pitch) to another pitch (for example, large pitch) to laminate in another container
  • the purpose is to efficiently carry out the work of storing
  • Another object of the present invention is to carry out the above-mentioned transfer work reliably, stably and smoothly.
  • Another object is to detect whether or not the workpiece to be transferred is in an abnormal state.
  • a laminate pitch changing device is a device for changing the pitch between a large number of thin work pieces juxtaposed in a stack at a predetermined pitch, and a movable movable holding portion And a drive unit for driving the movable holding unit, wherein the movable holding unit comprises a large number of base plates juxtaposed in a stack at a predetermined pitch, and an operating member for holding the work is provided on each of the base plates.
  • the operating member is operated by drive power sent from the communication passage to hold the work individually and each base plate is provided with a rotatable variable spacer interlocked with the drive shaft of the drive unit.
  • the rotation makes the pitch between the base plates variable, and when the work is held by the base plates, the movement between the base plates and the group of base plates
  • the communication passage is formed by connecting an elastic packing which can extend and contract between the through holes of the adjacent base plates.
  • the elastic packings move in conjunction with the base plates.
  • the variable spacers move in conjunction with the base plates.
  • the respective base plates are provided with springs for releasing the fixing of the pitch between the base plates.
  • the elastic packing is formed in a bellows shape.
  • the variable spacer is formed with portions having different thicknesses on the circumferential surface, and portions having different thicknesses by rotation are in contact with the base plate. Is characterized in that the pitch of.
  • the spring causes the fixed base plate side spring force to be larger than the movable base plate side spring force by the force for restoring the base plate in the contracted state. It features.
  • the spring force of the spring is made smaller stepwise toward the movable base plate side for every predetermined number of base plates.
  • the spring force of the spring is linearly reduced toward the movable base plate side.
  • the spring comprises a single spring.
  • the spring is characterized in that a plurality of springs are stacked.
  • a detection unit for detecting the state of the work such as cracking or chipping of the work is provided.
  • the detection unit is provided at an inlet and an outlet of the communication passage for opening and closing the communication passage, and the opening and closing valve is provided at the opening and closing valve and communicates with a vacuum pressure detection passage.
  • the operating member is characterized by comprising a suction pad for suctioning the work.
  • the operating member is characterized by comprising a clamping member for clamping the work.
  • the group of base plates is formed into one group for every predetermined number.
  • the operation member holds the surface of the work in a direction orthogonal to the stacking direction.
  • the operation member holds the surface of the work in a direction along the stacking direction.
  • the suction device for a laminate pitch changing device is a means for holding a work, and an airtight and expandable communication passage is formed between the laminate pitch changing device and the base plate. Also provide a pad.
  • the work to change only the lamination pitch while maintaining the lamination state of the work as the lamination. Therefore, the work (transfer) to change the laminates stacked in one container at one pitch (for example, small pitch) to another pitch (for example, large pitch) and store them in another container in the form of a stack Can be done efficiently.
  • the above-mentioned transfer can be performed at once while maintaining the stacked state of the work as a stacked product. Therefore, the transfer work can be performed reliably, stably and smoothly.
  • FIG. 1E is a cross-sectional view of FIG. 1E-F-G-H-I-J at a small pitch of the variable spacer
  • B is an enlarged view of a portion B of (A)
  • C is a large pitch of the variable spacer
  • FIG. 1E is a cross-sectional view of FIG.
  • FIG. 3 A is a front view showing a base plate and its attachment, (B) is a BB enlarged sectional view of (A).
  • A) is a front view of the suction pad of FIG. 1, (B) is a bottom view of (A), (C) is a right side view of (A).
  • A) is a front view of the variable spacer, (B) is a cross-sectional view taken along the line BB of (A), and (C) is an enlarged view of a portion C of (B).
  • FIG. 2 shows the valve and the orifice for opening and closing the communication passage of the device of FIG.
  • FIG. 6 is a diagram showing an operation flow of a laminate pitch changing device according to the present invention.
  • A is a front view of another operation member
  • B is a bottom view of (A)
  • C is a right side view of (A).
  • the laminate pitch changing device E comprises a movable adsorption unit 1 as a movable movable holding unit and a drive unit for driving the movable adsorption unit 1.
  • the movable adsorption portion 1 is formed by arranging a large number of base plates 3 in a stacked manner at a predetermined pitch.
  • a group of base plates 3 constituting the movable suction unit 1 is formed of square plate-like pieces of the same configuration.
  • Each base plate 3 is provided with a pair of holes 5 in the center as shown in detail in FIG.
  • the hole 5 has a bottom and is formed in a square hole 5a larger than the radius of the variable spacer 17 so that the large pitch portion 20 can escape when the variable spacer 17 is the small pitch portion 19.
  • a semicircular notch 5b is provided outward in the central portion on the outer side of the square hole 5a to form a relief when the drive shaft 31 rotates.
  • the notch 5b of the hole 5 since the notch 5b of the hole 5 has a bottom, it is desirable to prevent excessive entry of the large pitch portion 20 located in the notch 5b at a small pitch.
  • Two circular recesses 7 are provided at the upper and lower ends of the left and right ends of each base plate 3. As shown in detail in FIGS.
  • variable spacer 17 is disposed at the center of the notch 5b.
  • the variable spacer 17 is inserted into a rotatable drive shaft 31 formed of a square bar.
  • the variable spacer 17 is a disc as shown in FIG. 7, and a square central hole 18 through which the drive shaft 31 is inserted is provided at the central portion.
  • the variable spacer 17 have different thickness of the circumferential surface, formed by providing the large pitch portion 20 having a small pitch portion 19 and the thick thickness d 2 which has a thin thickness d 1.
  • the small pitch portion 19 and the large pitch portion 20 are continuous via the inclined portion 21.
  • variable spacer 17 is disposed between the base plates 3 and is inserted into a rotatable drive shaft 31 formed of a square bar. As a result, the variable spacer 17 rotates in conjunction with the rotation of the drive shaft 31, and the working surface of the small pitch portion 19 or the large pitch portion 20 contacting the adjacent base plate 3 is changed. It moves horizontally along with the movement of the direction.
  • the distribution plate 23 is integrally fixed to the base plate 3 so as to be exchangeable.
  • a suction pad 25 as an operating member is replaceably attached to the lower end of the distribution plate 23.
  • a passage 26 is provided in the distribution plate 23, and the passage 26 is in communication with a small passage 27 provided in the suction pad 25.
  • An elastic communication passage 28 is formed by the elastic packing 15 attached to the through hole 13 of the base plate 3, the passage 26 provided in the distribution plate 23, and the small passage 27 provided in the suction pad 25. Be done.
  • the communication passage 28 communicates with a suction port 29 provided in the suction pad 25.
  • the suction port 29 is provided at the site of the suction pad 25 corresponding to the site of the work 51 where cracking and chipping occur frequently.
  • each through hole 13 is a first through hole 13a for the first to tenth work piece 51, and a second through hole 13b is for the eleventh through twentieth work 51.
  • the through hole 13c is configured to correspond to each of the 21st to 30th workpieces 51, and as shown by hatching in FIG.
  • FIG. 8 the first communication passage 28a (FIG. 8A) and the second link, respectively.
  • a passage 28b (FIG. 8B) and a third communication passage 28c (FIG. 8C) are formed.
  • Reference numeral 27a denotes a constriction portion formed at the boundary between the small passage 27 and the suction port 29 (shown in FIGS. 5 and 6).
  • the opening of the narrowed portion 27a is set to be larger than the opening of the orifice 46 described later in the ratio of the cross-sectional area.
  • reference numeral 32 denotes a guide rod which communicates the release springs 9; 33, a stopper provided on the base 34 and abutting against the open end of the group of base plates 3; 35 on the open end side of the push plate 41.
  • a slide bush to be provided, 36 is a forward and backward pitching cylinder which determines the pitch between the workpieces 51.
  • 40a is a first joint for the first to tenth workpieces 51
  • 40b is a second joint for the eleventh to twentieth workpieces 51
  • 40c is for the 21st to 30th workpieces 51. It is the third joint.
  • Each joint 40a, 40b, 40c is a first communication passage 28a for the first to tenth workpiece 51, a second communication passage 28b for the eleventh to twentieth workpiece 51, the 21st to 28th, respectively. It is connected to the third communication passage 28 c for the 30th workpiece 51.
  • Each joint 40a, 40b, 40c is connected to a vacuum source (not shown), and transmits the drive power from the vacuum source to the communication passages 28a, 28b, 28c.
  • 37 is a rotary actuator for driving the drive shaft
  • 38 is a coupling for transmitting the driving force of the rotary actuator 37 to the drive shaft 31
  • 39 is provided at both ends of the drive shaft 31.
  • the bearings 41 are movable push plates provided at the open end of the group of base plates 3 and the fixed reference plates 43 provided at the base end of the group of base plates 3.
  • arrow A indicates the pressing direction of the pitch determining cylinder 36
  • arrow B indicates the direction of the restoring force of the release spring 9.
  • the release spring 9 will be described in detail.
  • the spring 9o constituting the release spring 9 has a hole formed in the central portion 9p, the peripheral portion 9q is inclined, and four sheets are stacked and mounted on the base plate 3 as described above.
  • bottom surfaces 9r of two pairs of springs 9o facing each other at the central portion 9p are opposed to constitute one set of release springs 9.
  • the spring force for restoring the base plate 3 in the contracted state is set such that the restoring force of the spring on the reference plate 43 side is larger than the restoring force of the spring on the push plate 41 side.
  • the spring force of each set of release springs 9 is divided into three blocks 10A, 10B and 10C in the case of the embodiment of FIG.
  • the spring force of the release springs 9 constituting the first block 10A to the third block 10C is increased by a predetermined ratio for each unit number (five in the illustrated example) of the work 51, As shown in FIG. 11C, the restoring force of the release spring 9 is increased stepwise. That is, the spring force of the release spring 9A of the first block 10A P 1> second blocks 10B of the release spring 9B or each spring force of the release spring 9C P 2> each spring release spring 9D to release spring 9J of the third block 10C It has become a force P 3.
  • the release spring 9A of the first block 10A is configured such that the constituent spring 9a has high strength, the constituent spring 9b has medium strength, and the constituent springs 9c and 9d have small strength.
  • the release spring 9B of the second block 10B is configured such that the configuration spring 9e has high strength, and the configuration springs 9f, 9g, and 9h have low strength.
  • the spring force of the spring constituting the release spring 9C is similarly configured.
  • the spring force of the release spring 9D to the release spring 9J of the third block 10C is configured by the spring force of each of the four constituent springs with a small strength.
  • the number of base plates 3 shown in FIG. 11A does not exactly match the number of base plates 3 shown in FIGS. 2 to 4, but this is for convenience of explanation. .
  • the X axis indicates the position of the release spring 9 at the small pitch
  • the Y axis indicates the spring force of the release spring 9 at the small pitch.
  • the communication passage 28 is provided in the vacuum supply chamber 44 of the chamber block 42, as shown in FIG. 12, and a valve 45 for opening and closing the vacuum supply chamber 44 is provided here.
  • An orifice 46 is provided in the on-off valve 45.
  • Reference numeral 47 denotes a vacuum pressure detection path provided in the chamber block 42. One end of the vacuum pressure detection path 47 is in communication with the orifice 46 through a passage 47a in communication with the vacuum supply chamber 44, and the other end is in communication with the other joint 40d and the vacuum pressure detection sensor 48 (shown in FIG. 11) Connected to).
  • Reference numeral 49 denotes a cylinder for driving the on-off valve 45.
  • the open / close valve 45, the orifice 46, the path 47a, the vacuum pressure detection path 47, and the vacuum pressure detection sensor 48 constitute a work state detection unit.
  • the opening ratio of the orifice 46 to the suction pad 25 is important. That is, the opening area of the orifice 46 needs to be smaller than the opening area of the narrowed portion 27 a provided in the suction pad 25. In the present embodiment, the opening of the orifice 46 is about 1 ⁇ 6 of the narrowed portion 27a in cross-sectional area ratio.
  • the laminate stored in the small container 52 in a stacked state at one pitch (for example, small pitch) is changed to another pitch (for example, large pitch) to be stacked in the large container 53.
  • the operation in the case of storing in the state will be described.
  • the dimension of the small pitch portion 19 of the variable spacer 17 is previously set to the pitch between the works 51 accommodated in the small container 52, and the dimension of the large pitch portion 20 of the variable spacer 17 is a workpiece accommodated in the large vessel 53. It is set to the pitch between 51.
  • the pitch setting cylinder 36 is extended, and the base plate 3 is pressed to the reference plate 43 side by the push plate 41, and the pitch between the base plates 3 is the pitch between the workpieces 51 stored in the small container 52 A) It corresponds to the small pitch shown in (B) (FIG. 13 (A)).
  • the movable adsorption portion 1 is vertically moved in the direction of the arrow C shown in FIG. 13A, and is inserted into the small-pitch small container 52.
  • Each base plate 3 of the movable suction unit 1 inserts each suction pad 25 between each work 51 and sucks each work 51 onto each suction pad 25.
  • Each suction pad 25 sucks the surface of the work in the direction orthogonal to the stacking direction, that is, the front surface 51a (shown by a dashed dotted line in FIG. 1) or the back of the work 51.
  • the pressure in the communication passage 28 is reduced by a vacuum source (not shown), and each work 51 is adsorbed to the adsorption port 29 of each adsorption pad 25.
  • the pressure reduction in the communication passage 28 simultaneously operates the first communication passage 28a, the second communication passage 28b, and the third communication passage 28c.
  • FIGS. 13B and 13C show this process.
  • FIG. 13C shows this state.
  • FIG. 13D shows this state.
  • the movable suction unit 1 is vertically moved in the direction of arrow D shown in FIG. 13D, and then suction of the suction pads 25 is released, and the work 51 is stored in the large container 53 with a large pitch in the stacked state. (FIG. 13 (D)). Also at the time of the adsorption release in this transfer, the pressure reduction of the communication passage 28 is released simultaneously with the first communication passage 28a, the second communication passage 28b, and the third communication passage 28c.
  • FIG. 13F shows this state.
  • Each communication passage 28 is communicated with the suction port 29 of each suction pad 25 via the elastic packing 15, and this elastic packing 15 moves its position in the horizontal direction in conjunction with the movement of the base plate 3.
  • the expansion and contraction width of each elastic packing 15 is small for each one, but if each elastic packing 15 does not move, the movement amount of the elastic packing 15a adjacent to the reference plate 43 side and The movement amount of the elastic packing 15n adjacent to the push plate 41, which is the open end, is a large opening. For example, assuming that the elastic packing 15 does not move if the elastic width of each elastic packing 15 is 0.8 mm, the moving amount of the elastic packing 15 a is 0.8 mm, but the n th is 30 pieces.
  • the suction pads 25 are provided as a pair on each base plate 3, for example, when the work 51 is held by suction, the arrangement of the release spring 9 becomes left-right symmetrical and vertically symmetrical with respect to the slide guide 11.
  • the arrangement of the variable spacers 17 is symmetrical in the left-right direction so that balance can be easily achieved, and the apparatus can be further stabilized mechanically.
  • the release spring 9 pushes the restoring force on the reference plate 43 side. It is considered to be larger than the restoring force on the plate 41 side. Therefore, when the pitch between the base plates 3 is changed, that is, when the release spring 9 presses the base plate 3 from the position of FIG. 13 (A) to the position of FIG. 13 (B). Since the entire base plate 3 is pressed in a well-balanced manner when pressed to the position of (1), the base plate 3 can be smoothly restored to the position before transfer. In this regard, if the strength of the release spring is kept uniform, the release spring may not operate.
  • the release spring 9 having a difference in restoring force is provided on the base plate 3
  • the release spring 9 of the base plate 3 is simultaneously expanded and restored, so the group of base plates 3 reduced in the block shape is equally It is expanded and can move to the next step.
  • the vacuum pressure in the communication passage 28 changes, so that the change can be detected before the transfer. Therefore, the certainty of transfer is further improved.
  • the laminate pitch changing device is not limited to the embodiment described above.
  • the holding by the operation member may be holding of each work 51 not by suction by the suction pad 25 but by pinching by the pinching member 65 as shown in FIG. It can apply.
  • the clamping member 65 is composed of a pair of openable and closable movable claws 65a and 65b connected by a spring 65c, and a passage 66 communicating with the communication passage 28 is provided at the base end.
  • the spring 65c is always biased in the open state.
  • the operation members such as the suction pad 25 and the sandwiching member 55 do not necessarily need to be in pairs, and may be one or three or more.
  • the holding surface of the work by the operation member is optional, for example, as shown in FIG. 14A, even if the work 51 is sandwiched from the surface of the work in the direction along the stacking direction, that is, the both sides 51b of the work. Good.
  • the number of communication paths 28 is arbitrary, and can be appropriately increased or decreased depending on the number of workpieces to be applied.
  • the operation can also be operated sequentially. This is advantageous, for example, when the volume of the vacuum source is small.
  • the elastic packing 15 is in the form of a bellows in the illustrated embodiment, but is not limited to this.
  • an elastic rubber packing, an O-ring or the like may be used. In any case, it can be moved in conjunction with the movement of the base plate 3.
  • the pitch portions formed on the circumferential surface of the variable spacer 17 can also be, for example, three or more large, medium, and small.
  • each pitch portion is provided every 120 °, and in the case of a plurality of pitch portions being installed, the installation site of the pitch portions is appropriately changed.
  • the installation ratio of the pitch portion does not necessarily have to be equally divided.
  • the setting ratio of the large pitch portion may be 60%, and the setting ratio of the small pitch portion may be 40%.
  • the setting ratio of the large pitch portion may be 40%, the setting ratio of the middle pitch portion may be 35%, and the setting ratio of the small pitch portion may be 25%.
  • the time to change the pitch between the base plates 3 is arbitrary. As in the illustrated embodiment, it may be during conveyance of the work 51, but at the time of vertical movement of the movable holding portion to the small container 52 before conveyance, vertical movement of the movable holding portion to the large container 53 after conveyance Sometimes, the pitch between the base plates 3 may be changed.
  • the moving direction of the movable holding portion is arbitrary. Although the case where the movable holding portion is moved in the horizontal direction has been described in the above embodiment, the movable holding portion may be moved in the vertical direction or may be moved in an oblique direction.
  • the stacking direction of the base plate 3 constituting the movable holding portion is arbitrary.
  • the shape of the base plate 3 is arbitrary.
  • the base plate 3, the variable spacer 17, and the release spring 9 are desirably materials having high durability, for example, metal-based materials.
  • the elastic packing 15 is preferably a material having a large elastic force, such as a plastic material or a rubber material.
  • the suction pad 25 is desirably made of a material having a lightness, processability, chemical resistance and hardness smaller than that of a work, for example, an appropriate plastic material. From the viewpoint of lightness and processability, the distribution plate 23 is preferably, for example, an appropriate plastic material or light weight metal material.
  • the driving power is optional, and not only by the vacuum source but also by, for example, a pressure source.
  • the spring restoring force of the release spring 9 provided on the base plate 3 on the reference plate 43 side may be maximized and sequentially reduced linearly toward the release spring 9 on the push plate 41 side.
  • the number of release springs 9 and the number of recesses 7 on which the release spring 9 is placed are also arbitrary, and can be appropriately increased or decreased depending on the size of the set pitch.
  • the laminate pitch changing device according to the present invention is not limited to the embodiment described above.
  • the opening and closing of the on-off valve 45 although the example which makes the on-off valve 45 "open” always at the above-mentioned embodiment and makes it "closing" at the time of inspection was described, it is not restricted only to this.
  • the laminate pitch changing device is utilized for a device for changing the pitch between works when a large number of thin works are juxtaposed in a stack at a predetermined pitch, for example, for transferring solar panels. Can.

Abstract

The purpose of the invention is to efficiently perform the work of changing stacked objects, which are stacked in one container with one pitch, to another pitch and storing same in the stacked form in another container. Multiple workpieces (51) are juxtaposed in a stacked form with a prescribed pitch and attachment pads (25) for attaching the workpieces are provided on base plates (3). The pitch between the base plates can be varied by rotating variable spacers (17), which work in concert with a drive shaft (31). An airtight communicating channel (28), which communicates with the attachment pads, is formed within a group of base plates. The communicating channel (28) is formed by the consecutive installation of an expandable elastic packing (15) between the through holes of adjacent base plates. The elastic packing and the variable spacers move in concert with the base plates. The base plates are provided with springs (9) for releasing the fixing of an inter-base plate pitch. Areas of differing thickness are formed on the circumferential surface of the variable spacers (17).

Description

積層物ピッチ変更装置Laminate pitch changer
 本願発明は、多数の薄い厚さのワークが所定のピッチで積層状に並置されている場合のワーク間のピッチを変更する装置に関する。 The present invention relates to an apparatus for changing the pitch between workpieces when a large number of thin workpieces are juxtaposed in a stack at a predetermined pitch.
 例えば、ソーラパネルのようなセルと呼ばれる薄い厚さの移送対象物(以下、「ワーク」という)を一の容器から他の容器に移し変える場合、生産工程上の理由から、積層状に並べ置かれるワーク間のピッチが異なるときがある。 For example, when transferring a thin object to be transferred (hereinafter referred to as "work") called a cell such as a solar panel from one container to another, it is arranged in a stack form for reasons of production process. There are times when the pitch between work pieces is different.
 このような場合、従来は人手により一枚々々異なるピッチの容器に移し変えを行っていた。しかしながら、このような対応では甚だ効率が悪い。そればかりでなく、例えば、ソーラパネルのような薄い厚さのワークにあっては、斜め方向に不測の外力がかかるとワークが容易に損傷するという難があった。 In such a case, conventionally, it has been manually transferred to containers of different pitches manually. However, such an approach is far from efficient. Not only that, for example, in the case of a thin work such as a solar panel, there has been a problem that the work is easily damaged if an unexpected external force is applied in the oblique direction.
 またロボットにより上記移し変えをする場合にはこのような不測の力がかかるのを防止することができるが、やはり一枚々々移し変えるので効率を上げることができない。 In the case of carrying out the above-mentioned transfer by the robot, such an unexpected force can be prevented from being applied, but since the transfer is also made one by one, the efficiency can not be increased.
 本願発明は、上記ワークの積層状態を維持したまま積層ピッチのみ変更する装置である。このような装置に関し、国際特許分類「B65H 3/00」において「ピッチ」「吸着」「可変」に関する技術を調査してみたが、有意情報を発見することができなかった。なお、参考情報は次の通りである。 The present invention is an apparatus for changing only the stacking pitch while maintaining the stacking state of the work. With regard to such a device, when the technology related to "pitch", "adsorption" and "variable" was investigated in the international patent classification "B65H 3/00", no significant information could be found. The reference information is as follows.
特開平5-253877号公報Japanese Patent Application Laid-Open No. 5-253877
 本願発明は、上記欠点を解消し、一のピッチ(例えば、小ピッチ)で一の容器に積層されている積層物を、他のピッチ(例えば、大ピッチ)に変更して他の容器に積層状に収納する作業を効率的に行なうことを目的とする。 The present invention solves the above-mentioned drawbacks and changes the laminate laminated in one container with one pitch (for example, small pitch) to another pitch (for example, large pitch) to laminate in another container The purpose is to efficiently carry out the work of storing
 また上記移し変え作業を確実、安定的、円滑的に行なうことを目的とする。 Another object of the present invention is to carry out the above-mentioned transfer work reliably, stably and smoothly.
 さらには、移し変えされるワークが異常状態にあるか否かを検出することをも目的とする。 Another object is to detect whether or not the workpiece to be transferred is in an abnormal state.
 上記目的達成のため、本願発明による積層物ピッチ変更装置は、所定のピッチで積層状に並置された多数の薄い厚さのワーク間のピッチを変更する装置であって、移動自在の可動保持部と、該可動保持部を駆動する駆動部とからなり、上記可動保持部は多数のベースプレートが所定のピッチで積層状に並置されてなり、上記各ベースプレートに上記ワークを保持する動作部材が設けられ、該動作部材は連通路から送られる駆動パワーにより作動されて上記ワークを各個別に保持し、上記各ベースプレートに駆動部の駆動軸に連動する回転自在の可変スペーサが設けられ、該可変スペーサの回転によりベースプレート間のピッチが可変となり、さらに上記各ベースプレートに上記ワークが保持される際、一群のベースプレートとの間に上記動作部材に連通する気密で伸縮自在の連通路が形成されることを特徴とする。
 また、請求項1記載の積層物ピッチ変更装置において、上記連通路は隣接するベースプレートの通孔間に伸縮自在の弾性パッキングが連設されることにより形成されることを特徴とする。
 また、請求項2記載の積層物ピッチ変更装置において、上記各弾性パッキングが上記各ベースプレートに連動して移動することを特徴とする。
 また、請求項1記載の積層物ピッチ変更装置において、上記各可変スペーサが上記各ベースプレートに連動して移動することを特徴とする。
 また、請求項1記載の積層物ピッチ変更装置において、上記各ベースプレートにベースプレート間のピッチの固定を解除するためのばねが設けられることを特徴とする。
 また、請求項2記載の積層物ピッチ変更装置において、上記弾性パッキングは蛇腹状に形成されることを特徴とする。
 また、請求項1記載の積層物ピッチ変更装置において、上記可変スペーサは円周面上において厚さの異なる部分が形成されており、回転により異なる厚さの部分が上記ベースプレートに接することによりベースプレート間のピッチを可変とすることを特徴とする。
 また、請求項5記載の積層物ピッチ変更装置において、上記ばねは縮小された状態のベースプレートを復元させる力につき固定のベースプレート側のばね力を可動のベースプレート側のばね力より大に形成することを特徴とする。
 また、請求項8記載の積層物ピッチ変更装置において、上記ばねのばね力をベースプレートの所定の個数毎に可動のベースプレート側に向かって段階状に小とすることを特徴とする。
 また、請求項8記載の積層物ピッチ変更装置において、上記ばねのばね力を可動のベースプレート側に向かって直線状に小とすることを特徴とする。
 また、請求項5記載の積層物ピッチ変更装置において、上記ばねが単一箇のばねからなることを特徴とする。
 また、請求項5記載の積層物ピッチ変更装置において、上記ばねが複数箇のばねが重ねられてなることを特徴とする。
 また、請求項1記載の積層物ピッチ変更装置において、上記ワークが吸着される際、ワークの割れ、欠け等ワークの状態を検出する検出部を設けることを特徴とする。
 また、請求項13記載の積層物ピッチ変更装置において、上記検出部は上記連通路の出入口に上記連通路を開閉するために設けられる開閉バルブと、該開閉バルブに設けられ真空圧検出路に連通されるオリフィスと、該真空圧検出路に接続されるセンサとからなり、上記駆動パワーが上記連通路に入力され上記開閉バルブを閉じた後、連通路内の圧力変化を検出することを特徴とする。
 また、請求項1記載の積層物ピッチ変更装置において、上記動作部材が上記ワークを吸着する吸着パッドからなることを特徴とする。
 また、請求項1記載の積層物ピッチ変更装置において、上記動作部材が上記ワークを挟着する挟着部材からなることを特徴とする。
 また、請求項1記載の積層物ピッチ変更装置において、一群のベースプレートは所定の個数毎に一のグループに形成されることを特徴とする。
 また、請求項1記載の積層物ピッチ変更装置において、上記各ベースプレートに動作部材が一対設けられ、上記各ベースプレートには上記可変スペーサ及び該動作部材に連通する上記連通路が一対設けられることを特徴とする。
 また、請求項1記載の積層物ピッチ変更装置において、上記動作部材は積層方向に直交する方向のワークの面を保持することを特徴とする。
 また、請求項1記載の積層物ピッチ変更装置において、上記動作部材は積層方向に沿う方向のワークの面を保持することを特徴とする。
 また本願発明は、上記積層物ピッチ変更装置において、ワークを保持する手段であり、上記ベースプレートとの間に気密で伸縮自在の連通路が形成されることを特徴とする積層物ピッチ変更装置用吸着パッドをも供する。
In order to achieve the above object, a laminate pitch changing device according to the present invention is a device for changing the pitch between a large number of thin work pieces juxtaposed in a stack at a predetermined pitch, and a movable movable holding portion And a drive unit for driving the movable holding unit, wherein the movable holding unit comprises a large number of base plates juxtaposed in a stack at a predetermined pitch, and an operating member for holding the work is provided on each of the base plates. The operating member is operated by drive power sent from the communication passage to hold the work individually and each base plate is provided with a rotatable variable spacer interlocked with the drive shaft of the drive unit. The rotation makes the pitch between the base plates variable, and when the work is held by the base plates, the movement between the base plates and the group of base plates Wherein the communication passage telescopic airtight communicating with the timber is formed.
Further, in the laminate pitch changing device according to claim 1, the communication passage is formed by connecting an elastic packing which can extend and contract between the through holes of the adjacent base plates.
In the laminate pitch changing device according to claim 2, the elastic packings move in conjunction with the base plates.
In the laminate pitch changing device according to claim 1, the variable spacers move in conjunction with the base plates.
In the laminate pitch changing device according to the first aspect of the invention, the respective base plates are provided with springs for releasing the fixing of the pitch between the base plates.
In the laminate pitch changing device according to claim 2, the elastic packing is formed in a bellows shape.
Further, in the laminate pitch changing device according to claim 1, the variable spacer is formed with portions having different thicknesses on the circumferential surface, and portions having different thicknesses by rotation are in contact with the base plate. Is characterized in that the pitch of.
Further, in the laminate pitch changing device according to claim 5, the spring causes the fixed base plate side spring force to be larger than the movable base plate side spring force by the force for restoring the base plate in the contracted state. It features.
In the laminate pitch changing device according to the eighth aspect, the spring force of the spring is made smaller stepwise toward the movable base plate side for every predetermined number of base plates.
In the laminate pitch changing device according to the eighth aspect, the spring force of the spring is linearly reduced toward the movable base plate side.
In the laminate pitch changing device according to claim 5, the spring comprises a single spring.
Further, in the laminate pitch changing device according to claim 5, the spring is characterized in that a plurality of springs are stacked.
Further, in the laminate pitch changing device according to claim 1, when the work is adsorbed, a detection unit for detecting the state of the work such as cracking or chipping of the work is provided.
In the laminate pitch changing device according to claim 13, the detection unit is provided at an inlet and an outlet of the communication passage for opening and closing the communication passage, and the opening and closing valve is provided at the opening and closing valve and communicates with a vacuum pressure detection passage. And a sensor connected to the vacuum pressure detection path, and the drive power is input to the communication path to close the on-off valve, and then a pressure change in the communication path is detected. Do.
Further, in the laminate pitch changing device according to claim 1, the operating member is characterized by comprising a suction pad for suctioning the work.
Further, in the laminate pitch changing device according to claim 1, the operating member is characterized by comprising a clamping member for clamping the work.
Further, in the laminate pitch changing device according to claim 1, the group of base plates is formed into one group for every predetermined number.
In the laminate pitch changing device according to claim 1, a pair of operation members is provided on each of the base plates, and a pair of the communication path communicating with the variable spacer and the operation members is provided on each of the base plates. I assume.
In the laminate pitch changing device according to claim 1, the operation member holds the surface of the work in a direction orthogonal to the stacking direction.
In the laminate pitch changing device according to claim 1, the operation member holds the surface of the work in a direction along the stacking direction.
In the laminate pitch changing device according to the present invention, the suction device for a laminate pitch changing device is a means for holding a work, and an airtight and expandable communication passage is formed between the laminate pitch changing device and the base plate. Also provide a pad.
 本願発明によれば、積層物たるワークの積層状態を維持したまま積層ピッチのみ変更することができる。よって一のピッチ(例えば、小ピッチ)で一の容器に積層されている積層物を、他のピッチ(例えば、大ピッチ)に変更して他の容器に積層状に収納する作業(移し変え)を効率的に行なうことができる。 According to the present invention, it is possible to change only the lamination pitch while maintaining the lamination state of the work as the lamination. Therefore, the work (transfer) to change the laminates stacked in one container at one pitch (for example, small pitch) to another pitch (for example, large pitch) and store them in another container in the form of a stack Can be done efficiently.
 上記移し変えは、積層物たるワークの積層状態を維持したまま、一気に行なうことができる。よって移し変え作業を確実、安定的、円滑的に行なうことができる。 The above-mentioned transfer can be performed at once while maintaining the stacked state of the work as a stacked product. Therefore, the transfer work can be performed reliably, stably and smoothly.
本願発明による積層物ピッチ変更装置の実施の形態を示す一部省略要部切欠正面図である。It is a partially omitted principal part notch front view showing an embodiment of a laminate pitch changing device according to the present invention. (A)はばねの縮小時における図1A-B-C-Dの断面図、(B)は(A)のB部拡大図、(C)はばねの拡張時における図1A-B-C-Dの断面図、(D)は(C)のD部拡大図である。(A) is a cross-sectional view of FIG. 1A-B-C-D at the time of contraction of the spring, (B) is an enlarged view of a portion B of (A), and (C) is FIG. Sectional drawing of D, (D) is the D section enlarged view of (C). (A)は可変スペーサの小ピッチ時における図1E-F-G-H-I-Jの断面図、(B)は(A)のB部拡大図、(C)は可変スペーサの大ピッチ時における図1E-F-G-H-I-Jの断面図、(D)は(C)のD部拡大図である。(A) is a cross-sectional view of FIG. 1E-F-G-H-I-J at a small pitch of the variable spacer, (B) is an enlarged view of a portion B of (A), (C) is a large pitch of the variable spacer FIG. 1E is a cross-sectional view of FIG. 1E-F-G-H-I-J in FIG. 図3(A)の平面図である。It is a top view of FIG. 3 (A). (A)はベースプレート及びその装着物を示す正面図、(B)は(A)のB-B拡大断面図である。(A) is a front view showing a base plate and its attachment, (B) is a BB enlarged sectional view of (A). (A)は図1の吸着パッドの正面図、(B)は(A)の底面図、(C)は(A)の右側面図である。(A) is a front view of the suction pad of FIG. 1, (B) is a bottom view of (A), (C) is a right side view of (A). (A)は可変スペーサの正面図、(B)は(A)のB-B断面図、(C)は(B)のC部拡大図である。(A) is a front view of the variable spacer, (B) is a cross-sectional view taken along the line BB of (A), and (C) is an enlarged view of a portion C of (B). (A)は連通路の位置を示す図、(B)は連通路の他の位置を示す図、(C)は連通路のさらに他の位置を示す図である。(A) is a figure which shows the position of a communicating channel, (B) is a figure which shows the other position of a communicating channel, (C) is a figure which shows the further another position of a communicating channel. 連通路の位置を示す平面図である。It is a top view which shows the position of a communicating path. 図1の積層物ピッチ変更装置に使用する解除ばねを示す一部断面正面図である。It is a partially sectioned front view which shows the release spring used for the laminated body pitch change apparatus of FIG. (A)は図1の右側面図、(B)は(A)の解除ばねのブロック毎の組合せを示す図、(C)は解除ばねの復元力を模式的に示したグラフである。(A) is a right side view of FIG. 1, (B) is a view showing a combination of the release spring of (A) for each block, and (C) is a graph schematically showing a restoring force of the release spring. 図1の装置の連通路を開閉するバルブ及びオリフィスを示し、(A)はバルブが開状態のとき、(B)はバルブが閉状態のときを示す図である。FIG. 2 shows the valve and the orifice for opening and closing the communication passage of the device of FIG. 1, (A) shows when the valve is in the open state, and (B) shows when the valve is in the closed state. 本願発明による積層物ピッチ変更装置の動作フローを示す図である。FIG. 6 is a diagram showing an operation flow of a laminate pitch changing device according to the present invention. (A)は他の動作部材の正面図、(B)は(A)の底面図、(C)は(A)の右側面図である。(A) is a front view of another operation member, (B) is a bottom view of (A), (C) is a right side view of (A).
 次に、実施の形態を示す図面に基づき本願発明による積層物ピッチ変更装置をさらに詳しく説明する。なお、便宜上同一の機能を奏する部分には同一の符号を付してその説明を省略する。 Next, a laminate pitch changing device according to the present invention will be described in more detail based on the drawings showing the embodiments. For the sake of convenience, the same reference numerals are given to parts that perform the same function, and the descriptions thereof will be omitted.
 図1乃至図4に示すように、本願発明による積層物ピッチ変更装置Eは、移動自在の可動保持部としての可動吸着部1と、該可動吸着部1を駆動する駆動部とからなる。上記可動吸着部1は、多数のベースプレート3が所定のピッチで積層状に並置されてなる。上記可動吸着部1を構成する一群のベースプレート3は夫々同一構成の方形の板状片からなる。各ベースプレート3は図5に詳しく示すように中央部に一対の孔部5を設ける。該孔部5は底を有し、可変スペーサ17を小ピッチ部19にしたとき、大ピッチ部20が逃げられるように可変スペーサ17の半径より大の方形状の孔5aに形成される。該方形状の孔5aの外辺側の中央部には外方に向かって半円状の切欠5bが設けられ、駆動軸31が回転するときの逃げを形成する。図示実施例では、孔部5の切欠5bは底を有しているので、小ピッチ時に切欠5bに位置する大ピッチ部20の過度の入り込みを防止することができるので望ましい。各ベースプレート3の左右の両端部には上下に2個の円形の凹部7を設ける。該凹部7には、図2(B)、(D)に詳しく示すように皿状のばね9oが4枚重ねとなり、蛇腹状の解除ばね9として装着される。該凹部7の間には円孔8が設けられ、該円孔8に丸棒からなるスライドガイド11が挿通される。各ベースプレート3の下端部には円形状の通孔13a、13b、13cが3個ずつ一対に設けられ、ここに伸縮自在の柔軟性素材からなる弾性パッキング15a、15b、15c(総称するときは「弾性パッキング15」という)を取り付ける。また上記通孔13a、13b、13cには、図2(A)乃至(D)に詳しく示すように、各々、貫通孔を有する継手40a、40b、40c(総称するときは「継手40」という)が空気の出入れ自在に連結される。 As shown in FIGS. 1 to 4, the laminate pitch changing device E according to the present invention comprises a movable adsorption unit 1 as a movable movable holding unit and a drive unit for driving the movable adsorption unit 1. The movable adsorption portion 1 is formed by arranging a large number of base plates 3 in a stacked manner at a predetermined pitch. A group of base plates 3 constituting the movable suction unit 1 is formed of square plate-like pieces of the same configuration. Each base plate 3 is provided with a pair of holes 5 in the center as shown in detail in FIG. The hole 5 has a bottom and is formed in a square hole 5a larger than the radius of the variable spacer 17 so that the large pitch portion 20 can escape when the variable spacer 17 is the small pitch portion 19. A semicircular notch 5b is provided outward in the central portion on the outer side of the square hole 5a to form a relief when the drive shaft 31 rotates. In the illustrated embodiment, since the notch 5b of the hole 5 has a bottom, it is desirable to prevent excessive entry of the large pitch portion 20 located in the notch 5b at a small pitch. Two circular recesses 7 are provided at the upper and lower ends of the left and right ends of each base plate 3. As shown in detail in FIGS. 2 (B) and 2 (D), four disc-shaped springs 9o are stacked in the recess 7 and mounted as a bellows-shaped release spring 9. A circular hole 8 is provided between the recesses 7, and a slide guide 11 made of a round bar is inserted into the circular hole 8. Three circular through holes 13a, 13b, 13c are provided in pairs at the lower end of each base plate 3, and elastic packings 15a, 15b, 15c made of an elastic flexible material there (herein collectively Attach the elastic packing 15 "). Further, as shown in detail in FIGS. 2A to 2D, the through holes 13a, 13b and 13c respectively have joints 40a, 40b and 40c having through holes (referred to collectively as "joint 40"). Are connected freely to the air.
 各ベースプレート3には上記切欠5bの中心に可変スペーサ17が配置される。該可変スペーサ17は角棒からなる回転可能の駆動軸31に挿通される。該可変スペーサ17は図7に示すように円板からなり、中央部に上記駆動軸31を挿通する正方形の中心孔18が設けられる。該可変スペーサ17は円周面の厚さが異なり、薄手の厚さd1を有する小ピッチ部19と厚手の厚さd2を有する大ピッチ部20を設けてなる。上記小ピッチ部19と上記大ピッチ部20とは傾斜部21を介して連続される。 In each of the base plates 3, a variable spacer 17 is disposed at the center of the notch 5b. The variable spacer 17 is inserted into a rotatable drive shaft 31 formed of a square bar. The variable spacer 17 is a disc as shown in FIG. 7, and a square central hole 18 through which the drive shaft 31 is inserted is provided at the central portion. The variable spacer 17 have different thickness of the circumferential surface, formed by providing the large pitch portion 20 having a small pitch portion 19 and the thick thickness d 2 which has a thin thickness d 1. The small pitch portion 19 and the large pitch portion 20 are continuous via the inclined portion 21.
 上記可変スペーサ17は各ベースプレート3間に配置され、角棒からなる回転可能の駆動軸31に挿通される。これにより、上記可変スペーサ17は駆動軸31の回転に連動して回転し、隣接するベースプレート3に当接する小ピッチ部19又は大ピッチ部20の作用面が変更されるとともに、上記ベースプレート3の水平方向の移動に連動して水平方向に移動される。 The variable spacer 17 is disposed between the base plates 3 and is inserted into a rotatable drive shaft 31 formed of a square bar. As a result, the variable spacer 17 rotates in conjunction with the rotation of the drive shaft 31, and the working surface of the small pitch portion 19 or the large pitch portion 20 contacting the adjacent base plate 3 is changed. It moves horizontally along with the movement of the direction.
 上記通孔13a、13b、13c(総称するときは「通孔13」という)のさらに下端部には、分配プレート23を上記ベースプレート3と一体に交換可能に固着する。該分配プレート23の下端部には動作部材としての吸着パッド25を交換可能に取り付ける。上記分配プレート23には通路26が内設され、該通路26が上記吸着パッド25に内設される小通路27に連通される。 At the lower end of the through holes 13a, 13b and 13c (collectively referred to as "through holes 13"), the distribution plate 23 is integrally fixed to the base plate 3 so as to be exchangeable. A suction pad 25 as an operating member is replaceably attached to the lower end of the distribution plate 23. A passage 26 is provided in the distribution plate 23, and the passage 26 is in communication with a small passage 27 provided in the suction pad 25.
 上記ベースプレート3の通孔13に取り付けられる弾性パッキング15と、上記分配プレート23に内設される通路26と、上記吸着パッド25に内設される小通路27により、伸縮自在の連通路28が形成される。該連通路28は上記吸着パッド25に設けられる吸着口29に連通する。該吸着口29は、経験上割れ、欠けが多く生じるワーク51の部位に対応する吸着パッド25の部位に設けるのが望ましい。本実施例の場合、各通孔13は第1通孔13aが1枚目乃至10枚目のワーク51に、第2通孔13bが同11枚目乃至20枚目のワーク51に、第3通孔13cが同21枚目乃至30枚目のワーク51に各対応するよう構成され、図8に斜線で示すように、夫々、第1連通路28a(図8(A))、第2連通路28b(図8(B))、第3連通路28c(図8(C))を形成する。27aは上記小通路27と上記吸着口29との境界に形成される狭窄部である(図5及び図6に示す)。該狭窄部27aの開口は、断面積の比で後記するオリフィス46の開口より大に設定される。 An elastic communication passage 28 is formed by the elastic packing 15 attached to the through hole 13 of the base plate 3, the passage 26 provided in the distribution plate 23, and the small passage 27 provided in the suction pad 25. Be done. The communication passage 28 communicates with a suction port 29 provided in the suction pad 25. Desirably, the suction port 29 is provided at the site of the suction pad 25 corresponding to the site of the work 51 where cracking and chipping occur frequently. In the case of the present embodiment, each through hole 13 is a first through hole 13a for the first to tenth work piece 51, and a second through hole 13b is for the eleventh through twentieth work 51. The through hole 13c is configured to correspond to each of the 21st to 30th workpieces 51, and as shown by hatching in FIG. 8, the first communication passage 28a (FIG. 8A) and the second link, respectively. A passage 28b (FIG. 8B) and a third communication passage 28c (FIG. 8C) are formed. Reference numeral 27a denotes a constriction portion formed at the boundary between the small passage 27 and the suction port 29 (shown in FIGS. 5 and 6). The opening of the narrowed portion 27a is set to be larger than the opening of the orifice 46 described later in the ratio of the cross-sectional area.
 図2及び図9において、32は上記各解除ばね9を連通するガイドロッド、33は台座34に設けられ一群のベースプレート3の開き端に当接するストッパ、35は上記プッシュプレート41の開端部側に設けられるスライドブッシュ、36はワーク51間のピッチを決める進退自在のピッチ決めシリンダである。40aは1枚目乃至10枚目のワーク51用の第1継手、40bは11枚目乃至20枚目のワーク51用の第2継手、40cは21枚目乃至30枚目のワーク51用の第3継手である。各継手40a、40b、40cは、各々1枚目乃至10枚目のワーク51用の第1連通路28a、11枚目乃至20枚目のワーク51用の第2連通路28b、21枚目乃至30枚目のワーク51用の第3連通路28cに連結される。また各継手40a、40b、40cは、図示しない真空源に連結され、真空源からの駆動パワーを上記各連通路28a、28b、28cに伝える。図3及び図4において、37は上記駆動軸31を駆動せしめる回転アクチュエータ、38は該回転アクチュエータ37の駆動力を上記駆動軸31に伝達するカップリング、39は上記駆動軸31の両端部に設けられる軸受け、41は一群のベースプレート3の開端部に設けられる進退自在のプッシュプレート、43は一群のベースプレート3の基端部に設けられる固定の基準プレートである。図中、矢印Aは上記ピッチ決めシリンダ36の押圧方向を、矢印Bは上記解除ばね9の復元力の方向を各示す。 In FIG. 2 and FIG. 9, reference numeral 32 denotes a guide rod which communicates the release springs 9; 33, a stopper provided on the base 34 and abutting against the open end of the group of base plates 3; 35 on the open end side of the push plate 41. A slide bush to be provided, 36 is a forward and backward pitching cylinder which determines the pitch between the workpieces 51. 40a is a first joint for the first to tenth workpieces 51, 40b is a second joint for the eleventh to twentieth workpieces 51, and 40c is for the 21st to 30th workpieces 51. It is the third joint. Each joint 40a, 40b, 40c is a first communication passage 28a for the first to tenth workpiece 51, a second communication passage 28b for the eleventh to twentieth workpiece 51, the 21st to 28th, respectively. It is connected to the third communication passage 28 c for the 30th workpiece 51. Each joint 40a, 40b, 40c is connected to a vacuum source (not shown), and transmits the drive power from the vacuum source to the communication passages 28a, 28b, 28c. In FIG. 3 and FIG. 4, 37 is a rotary actuator for driving the drive shaft 31, 38 is a coupling for transmitting the driving force of the rotary actuator 37 to the drive shaft 31, and 39 is provided at both ends of the drive shaft 31. The bearings 41 are movable push plates provided at the open end of the group of base plates 3 and the fixed reference plates 43 provided at the base end of the group of base plates 3. In the figure, arrow A indicates the pressing direction of the pitch determining cylinder 36, and arrow B indicates the direction of the restoring force of the release spring 9.
 ここで解除ばね9について詳しく述べる。解除ばね9を構成するばね9oは、図10に示すように、中央部9pに孔が形成され、周縁部9qが傾斜してなり、上記したように4枚重ねにしてベースプレート3に装着される。図11(A)及び図11(B)に示すように、中央部9pを対向させた2対のばね9oの底面部9rを対向させて1組の解除ばね9を構成する。縮小された状態のベースプレート3を復元させるためのばね力は、基準プレート43側のばねの復元力をプッシュプレート41側のばねの復元力より大に設定される。各組の解除ばね9のばね力は、図11実施例の場合、3箇のブロック10A、10B、10Cに分けて設定されている。第1ブロック10A乃至第3ブロック10Cを構成する各解除ばね9のばね力の関係についてみると、ワーク51の単位箇数(図示例は5枚)毎に所定の割合づつばね力を増強させ、図11(C)に示すように、段階状に解除ばね9の復元力を増強させてある。即ち、第1ブロック10Aの解除ばね9Aのばね力P1>第2ブロック10Bの解除ばね9B又は解除ばね9Cの各ばね力P2>第3ブロック10Cの解除ばね9D乃至解除ばね9Jの各ばね力P3となっている。また第1ブロック10Aの解除ばね9Aは、構成ばね9aを大強度、構成ばね9bを中強度、構成ばね9c、9dを小強度のばね力に構成される。第2ブロック10Bの解除ばね9Bは、構成ばね9eを大強度、構成ばね9f、9g、9hを小強度に構成される。解除ばね9Cを構成するばねのばね力もまた同様に構成される。第3ブロック10Cの解除ばね9D乃至解除ばね9Jのばね力は、4箇の各構成ばねをいずれも小強度のばね力から構成される。なお、図11(A)に示すベースプレート3の箇数は、図2乃至図4に示すベースプレート3の箇数と正確に一致していないが、これは説明の都合上便宜的に示したためである。図11(C)において、X軸は小ピッチ時における解除ばね9の位置を示し、Y軸は小ピッチ時における解除ばね9のばね力を示す。 Here, the release spring 9 will be described in detail. As shown in FIG. 10, the spring 9o constituting the release spring 9 has a hole formed in the central portion 9p, the peripheral portion 9q is inclined, and four sheets are stacked and mounted on the base plate 3 as described above. . As shown in FIGS. 11A and 11B, bottom surfaces 9r of two pairs of springs 9o facing each other at the central portion 9p are opposed to constitute one set of release springs 9. The spring force for restoring the base plate 3 in the contracted state is set such that the restoring force of the spring on the reference plate 43 side is larger than the restoring force of the spring on the push plate 41 side. The spring force of each set of release springs 9 is divided into three blocks 10A, 10B and 10C in the case of the embodiment of FIG. Looking at the relationship of the spring force of the release springs 9 constituting the first block 10A to the third block 10C, the spring force is increased by a predetermined ratio for each unit number (five in the illustrated example) of the work 51, As shown in FIG. 11C, the restoring force of the release spring 9 is increased stepwise. That is, the spring force of the release spring 9A of the first block 10A P 1> second blocks 10B of the release spring 9B or each spring force of the release spring 9C P 2> each spring release spring 9D to release spring 9J of the third block 10C It has become a force P 3. Further, the release spring 9A of the first block 10A is configured such that the constituent spring 9a has high strength, the constituent spring 9b has medium strength, and the constituent springs 9c and 9d have small strength. The release spring 9B of the second block 10B is configured such that the configuration spring 9e has high strength, and the configuration springs 9f, 9g, and 9h have low strength. The spring force of the spring constituting the release spring 9C is similarly configured. The spring force of the release spring 9D to the release spring 9J of the third block 10C is configured by the spring force of each of the four constituent springs with a small strength. Note that the number of base plates 3 shown in FIG. 11A does not exactly match the number of base plates 3 shown in FIGS. 2 to 4, but this is for convenience of explanation. . In FIG. 11C, the X axis indicates the position of the release spring 9 at the small pitch, and the Y axis indicates the spring force of the release spring 9 at the small pitch.
 上記連通路28は、図12に示すように、チャンバブロック42の真空供給チャンバ44に設けられ、ここに該真空供給チャンバ44を開閉するバルブ45が設けられる。46は該開閉バルブ45に内設されるオリフィスである。47はチャンバブロック42に設けられた真空圧検出路である。該真空圧検出路47の一端部は上記真空供給チャンバ44に連通する小路47aを経て、上記オリフィス46に連通され、他端部は他の継手40dを経て真空圧検出センサ48(図11に示す)に接続される。49は上記開閉バルブ45を駆動させるシリンダである。上記開閉バルブ45、上記オリフィス46、上記小路47a、上記真空圧検出路47及び真空圧検出センサ48によりワーク状態検出部を構成する。 The communication passage 28 is provided in the vacuum supply chamber 44 of the chamber block 42, as shown in FIG. 12, and a valve 45 for opening and closing the vacuum supply chamber 44 is provided here. An orifice 46 is provided in the on-off valve 45. Reference numeral 47 denotes a vacuum pressure detection path provided in the chamber block 42. One end of the vacuum pressure detection path 47 is in communication with the orifice 46 through a passage 47a in communication with the vacuum supply chamber 44, and the other end is in communication with the other joint 40d and the vacuum pressure detection sensor 48 (shown in FIG. 11) Connected to). Reference numeral 49 denotes a cylinder for driving the on-off valve 45. The open / close valve 45, the orifice 46, the path 47a, the vacuum pressure detection path 47, and the vacuum pressure detection sensor 48 constitute a work state detection unit.
 ところで、上記オリフィス46は上記吸着パッド25との開口比が重要である。即ち、上記オリフィス46の開口面積は上記吸着パッド25に設けた上記狭窄部27aの開口面積より小であることを要する。本実施例ではオリフィス46の開口は断面積比で狭窄部27aに対し約1/6となっている。 Incidentally, the opening ratio of the orifice 46 to the suction pad 25 is important. That is, the opening area of the orifice 46 needs to be smaller than the opening area of the narrowed portion 27 a provided in the suction pad 25. In the present embodiment, the opening of the orifice 46 is about 1⁄6 of the narrowed portion 27a in cross-sectional area ratio.
 次に、図13に基づいて、一のピッチ(例えば小ピッチ)で小容器52に積層状態で収納されている積層物を、他のピッチ(例えば大ピッチ)に変更して大容器53に積層状態で収納する場合の動作について説明する。なお、予め可変スペーサ17の小ピッチ部19の寸法は小容器52に収納されるワーク51間のピッチに設定され、また可変スペーサ17の大ピッチ部20の寸法は大容器53に収納されるワーク51間のピッチに設定されている。 Next, based on FIG. 13, the laminate stored in the small container 52 in a stacked state at one pitch (for example, small pitch) is changed to another pitch (for example, large pitch) to be stacked in the large container 53. The operation in the case of storing in the state will be described. The dimension of the small pitch portion 19 of the variable spacer 17 is previously set to the pitch between the works 51 accommodated in the small container 52, and the dimension of the large pitch portion 20 of the variable spacer 17 is a workpiece accommodated in the large vessel 53. It is set to the pitch between 51.
 まずピッチ決めシリンダ36を伸長させ、プッシュプレート41によりベースプレート3を基準プレート43側に押圧し、ベースプレート3間のピッチを小容器52に積層状態で収納されているワーク51間のピッチ(図3(A)(B)に示す小ピッチ)に対応させる(図13(A))。 First, the pitch setting cylinder 36 is extended, and the base plate 3 is pressed to the reference plate 43 side by the push plate 41, and the pitch between the base plates 3 is the pitch between the workpieces 51 stored in the small container 52 A) It corresponds to the small pitch shown in (B) (FIG. 13 (A)).
 次いで、可動吸着部1を図13(A)に示す矢印C方向に垂直移動させ、小ピッチの小容器52内に挿入する。可動吸着部1の各ベースプレート3は、各吸着パッド25を各ワーク51間に挿入し、各吸着パッド25に各ワーク51を吸着する。各吸着パッド25は積層方向に直交する方向のワークの面、即ち、ワーク51の正面51a(図1に一点鎖線で示す)又は背面を吸着する。 Next, the movable adsorption portion 1 is vertically moved in the direction of the arrow C shown in FIG. 13A, and is inserted into the small-pitch small container 52. Each base plate 3 of the movable suction unit 1 inserts each suction pad 25 between each work 51 and sucks each work 51 onto each suction pad 25. Each suction pad 25 sucks the surface of the work in the direction orthogonal to the stacking direction, that is, the front surface 51a (shown by a dashed dotted line in FIG. 1) or the back of the work 51.
 この吸着は、図示しない真空源により連通路28内を減圧し、各ワーク51を各吸着パッド25の吸着口29に吸着させる。このとき連通路28内の減圧は第1連通路28a、第2連通路28b、第3連通路28cを同時に作動させる。これにより、小容器52に積層状態で収納されている積層物50の可動吸着部1へのセットが完了する。 In this adsorption, the pressure in the communication passage 28 is reduced by a vacuum source (not shown), and each work 51 is adsorbed to the adsorption port 29 of each adsorption pad 25. At this time, the pressure reduction in the communication passage 28 simultaneously operates the first communication passage 28a, the second communication passage 28b, and the third communication passage 28c. Thereby, the setting to the movable adsorption | suction part 1 of the laminated material 50 accommodated in the small container 52 in the lamination | stacking state is completed.
 次いで可動吸着部1を反矢印C方向に垂直移動させて小容器52から積層物50を出した後、可動吸着部1を水平方向に移動し、可動吸着部1をワーク51間のピッチが異なる大容器53まで移動する。 Next, after moving the movable suction unit 1 vertically in the direction of the reverse arrow C to take out the stack 50 from the small container 52, move the movable suction unit 1 in the horizontal direction, and the pitch between the work 51 and the movable suction unit 1 is different. Move to the large container 53.
 この大容器53への移動中において、ベースプレート3間のピッチを図3(C)(D)に示す大ピッチに変更する。この過程を示すのが図13(B)(C)である。 During the movement to the large container 53, the pitch between the base plates 3 is changed to the large pitch shown in FIGS. 3 (C) and 3 (D). FIGS. 13B and 13C show this process.
 まず、各ベースプレート3は、各々、セットされている解除ばね9の復元力によりプッシュプレート41側に押圧されるので、可動吸着部1は縮小状態から開き端まで拡張する。図13(B)はこの状態を示す。このとき解除ばね9は基準プレート43側のばねの復元力をプッシュプレート41側のばねの復元力より大に設定されているため、可動吸着部1の拡張が円滑となる。 First, since each base plate 3 is pressed toward the push plate 41 by the restoring force of the release spring 9 being set, the movable adsorption portion 1 expands from the contracted state to the open end. FIG. 13B shows this state. At this time, since the releasing spring 9 is set to have a restoring force of the spring on the reference plate 43 side larger than that of the spring on the push plate 41 side, the expansion of the movable adsorption portion 1 becomes smooth.
 次いで回転アクチュエータ37を回転させる。すると回転アクチュエータ37に挿通されている各可変スペーサ17が回転し、大ピッチ部20がベースプレート3に当接する。図13(C)はこの状態を示す。 Then, the rotary actuator 37 is rotated. Then, each variable spacer 17 inserted in the rotary actuator 37 is rotated, and the large pitch portion 20 abuts on the base plate 3. FIG. 13C shows this state.
 次いでピッチ決めシリンダ36を伸長させ、各ベースプレート3に当接する各可変スペーサ17の作用面を図7(B)に示す大ピッチd2に固定する。図13(D)はこの状態を示す。 Then is extended pitch decided cylinder 36, to secure the working surface of each variable spacer 17 abutting on the base plate 3 to the large pitch d 2 of shown in Figure 7 (B). FIG. 13D shows this state.
 この状態で可動吸着部1を図13(D)に示す矢印D方向に垂直移動させ、次いで各吸着パッド25の吸着を解除し、ワーク51を積層状態のまま大ピッチの大容器53に収納する(図13(D))。この移し変えにおける吸着解除のときも、連通路28の減圧の解除は第1連通路28a、第2連通路28b、第3連通路28cを同時に行なう。 In this state, the movable suction unit 1 is vertically moved in the direction of arrow D shown in FIG. 13D, and then suction of the suction pads 25 is released, and the work 51 is stored in the large container 53 with a large pitch in the stacked state. (FIG. 13 (D)). Also at the time of the adsorption release in this transfer, the pressure reduction of the communication passage 28 is released simultaneously with the first communication passage 28a, the second communication passage 28b, and the third communication passage 28c.
 次いで、可動吸着部1を図13(D)に示す反矢印D方向に垂直移動させた後、ピッチ決めシリンダ36を縮小させると、各ベースプレート3は各々セットされている解除ばね9の復元力によりプッシュプレート41側に押圧されるので、可動吸着部1は開き端まで拡張する。これにより各ベースプレート3に当接されていた各可変スペーサ17の固定が解除される。図13(E)はこの状態を示す。このときも解除ばね9は基準プレート43側のばねの復元力がプッシュプレート41側のばねの復元力よりも大に設定されているため、可動吸着部1の拡張が円滑となる。 Next, after moving the movable suction portion 1 vertically in the direction of the reverse arrow D shown in FIG. 13D, when the pitch determining cylinder 36 is reduced, the base plate 3 is restored by the restoring force of the release spring 9 set. The movable suction unit 1 is expanded to the open end because it is pressed to the push plate 41 side. As a result, the fixing of each variable spacer 17 that has been in contact with each base plate 3 is released. FIG. 13E shows this state. Also at this time, since the restoring force of the spring on the reference plate 43 side is set larger than the restoring force of the spring on the push plate 41 side, expansion of the movable adsorption portion 1 becomes smooth.
 次いで回転アクチュエータ37を回転させる。すると回転アクチュエータ37に挿通されている各可変スペーサ17が回転し、小ピッチ部19がベースプレート3に当接する。図13(F)はこの状態を示す。 Then, the rotary actuator 37 is rotated. Then, each variable spacer 17 inserted in the rotary actuator 37 is rotated, and the small pitch portion 19 abuts on the base plate 3. FIG. 13F shows this state.
 次いでピッチ決めシリンダ36を伸長させ、各ベースプレート3に当接する各可変スペーサ17の作用面を図7(B)に示す小ピッチd1に固定する。これにより図13(A)に示す最初の状態に戻ったことになる。 Then is extended pitch decided cylinder 36, fixed to the small pitch d 1 shown in FIG. 7 (B) the working surface of each variable spacer 17 abutting on each base plate 3. As a result, the initial state shown in FIG. 13A is restored.
 容器内に収納されたワーク数が多いときは、移し変え作業が終了するまで上記ステップを繰り返す。 When the number of works stored in the container is large, the above steps are repeated until the transfer work is completed.
 大ピッチに設定された容器53から小ピッチに設定された容器52への移し変えについても前記と同様であり、このときは図13(D)の状態からスタートし、図13(E)、図13(F)、図13(A)、図13(B)、図13(C)のように、上記したステップを経て図13(D)の状態に戻る。 The same applies to the transfer from the container 53 set to the large pitch to the container 52 set to the small pitch, and in this case, starting from the state of FIG. 13 (D), FIG. 13 (E), FIG. 13 (F), FIG. 13 (A), FIG. 13 (B), and FIG. 13 (C), it returns to the state of FIG. 13 (D) through the above-mentioned step.
 各吸着パッド25による各ワーク51の吸着は、各ベースプレート3の通孔13に伸縮自在の弾性パッキング15が取り付けられ、これにより構成された連通路28を介して上記動作が行われている。よって連通路28の気密性が保障されるので、一群の積層物50の移し変えをワーク51の積層状態を維持したまま行なうことができる。よって積層物50のピッチを変更した移し変えを円滑、迅速、効率的に行なうことができる。 In the suction of each work 51 by each suction pad 25, the elastic packing 15 which can be expanded and contracted is attached to the through hole 13 of each base plate 3, and the above operation is performed via the communication passage 28 configured by this. Thus, the airtightness of the communication passage 28 is ensured, so that the transfer of the group of stacks 50 can be performed with the stacked state of the work 51 maintained. Therefore, the transfer in which the pitch of the laminate 50 is changed can be carried out smoothly, rapidly and efficiently.
 この点をさらに詳しく説明する。各連通路28は弾性パッキング15を介して各吸着パッド25の吸着口29まで連通されているところ、この弾性パッキング15はベースプレート3の移動に連動して水平方向にその位置を移動する。各弾性パッキング15の伸縮幅は、1個々々については僅小なものであるが、仮に各弾性パッキング15が移動しないとした場合には、基準プレート43側に隣接する弾性パッキング15aの移動量と開端部となるプッシュプレート41に隣接する弾性パッキング15nの移動量とでは大なる開きとなる。例えば各弾性パッキング15の伸縮幅を0.8mmとした場合、仮に各弾性パッキング15が移動しないとした場合には、弾性パッキング15aの移動量は0.8mmであるが、n個目が30個目のときの弾性パッキング15nの移動量は、本実施例においては、「0.8mm×(30-1)=23.2mm」の大なる移動量となる。よって、各弾性パッキング15が移動自在でない場合は、基準プレート43側から離れたところの弾性パッキング15を構成要素とする連通路28の減圧真空は破綻することになり、ワーク51の吸着が困難となる。しかしながら、本願発明においては、各弾性パッキング15はベースプレート3の移動に連動して水平方向に移動自在であるため、この程度(0.8mm)の伸縮幅は伸縮自在の弾性パッキング15が吸収する。よって、弾性パッキング15a(図2に示す(A)(C)に示す)の伸縮幅乃至弾性パッキング15n(図2に示す(A)(C)に示す)の伸縮幅はいずれの場合も一定(本実施例においては0.8mm)であって、弾性パッキング15の設置部位によって移動量が変更することはなく、常に連通路28の気密性が保障される。しかもこの連通路28の気密性の保障は弾性パッキング15の個数に影響されない。 This point will be described in more detail. Each communication passage 28 is communicated with the suction port 29 of each suction pad 25 via the elastic packing 15, and this elastic packing 15 moves its position in the horizontal direction in conjunction with the movement of the base plate 3. The expansion and contraction width of each elastic packing 15 is small for each one, but if each elastic packing 15 does not move, the movement amount of the elastic packing 15a adjacent to the reference plate 43 side and The movement amount of the elastic packing 15n adjacent to the push plate 41, which is the open end, is a large opening. For example, assuming that the elastic packing 15 does not move if the elastic width of each elastic packing 15 is 0.8 mm, the moving amount of the elastic packing 15 a is 0.8 mm, but the n th is 30 pieces. The amount of movement of the elastic packing 15n at the time of the eye is a large amount of movement of “0.8 mm × (30−1) = 23.2 mm” in this embodiment. Therefore, when the elastic packings 15 are not movable, the reduced pressure vacuum of the communication passage 28 having the elastic packings 15 apart from the reference plate 43 as a component breaks down, and adsorption of the work 51 is difficult. Become. However, in the present invention, since each elastic packing 15 is movable in the horizontal direction in conjunction with the movement of the base plate 3, the expansion and contraction width of this degree (0.8 mm) is absorbed by the elastic packing 15. Therefore, the expansion and contraction width of the elastic packing 15a (shown in (A) and (C) shown in FIG. 2) to the expansion and contraction width of the elastic packing 15n (shown in (A) and (C) shown in FIG. In this embodiment, it is 0.8 mm), and the amount of movement does not change depending on the installation site of the elastic packing 15, and the airtightness of the communication passage 28 is always ensured. Furthermore, the airtightness of the communication passage 28 is not affected by the number of elastic packings 15.
 また上記実施の形態によれば、各ベースプレート3に吸着パッド25が一対設けられているため、ワーク51を吸着保持する際、例えば解除ばね9の配置が左右対称かつスライドガイド11に対し上下対称となり、また可変スペーサ17の配置が左右対称となってバランスがとり易く、装置が機械的に一層安定する効果がある。 Further, according to the above embodiment, since the suction pads 25 are provided as a pair on each base plate 3, for example, when the work 51 is held by suction, the arrangement of the release spring 9 becomes left-right symmetrical and vertically symmetrical with respect to the slide guide 11. In addition, the arrangement of the variable spacers 17 is symmetrical in the left-right direction so that balance can be easily achieved, and the apparatus can be further stabilized mechanically.
 また上記実施の形態では、積層物たるワークの積層状態を維持したまま30枚のワーク51の移し変えを一気に行なうことができる。よって、移し変え作業を確実、安定的に行うことができる。 Further, in the above-described embodiment, it is possible to carry out the transfer of 30 pieces of work 51 at a stretch while maintaining the stacked state of the work as the laminated body. Therefore, the transfer work can be performed reliably and stably.
 また上記実施の形態では一群のワーク51をグループ毎に3個の連通路28の管轄により処理するので、一のグループ例えば第1連通路28aに所属するベースプレート3に何らかの異常が生じた場合でも、他のグループに所属する第2連通路28b及び第3連通路28cの作動を継続することができる。よって、この点からも移し変え作業の効率化を図ることができる。またグループ毎に移し変え作業の内容を変更することも可能である。 Further, in the above embodiment, since a group of work 51 is processed under the control of three communication paths 28 for each group, even if some abnormality occurs in the base plate 3 belonging to one group, for example, the first communication path 28a, The operation of the second communication passage 28 b and the third communication passage 28 c belonging to the other group can be continued. Therefore, the transfer work can be made more efficient from this point as well. Moreover, it is also possible to change the content of transfer work for each group.
 さらに上記実施の形態では、基準プレート43側の解除ばね9にかかる負荷は常にプッシュプレート41側の解除ばね9にかかる負荷より大となるので、解除ばね9は基準プレート43側の復元力がプッシュプレート41側の復元力より大としてある。よって、ベースプレート3間のピッチの変更時、即ち、解除ばね9によりベースプレート3が図13(A)から図13(B)の位置に押圧されるとき、また図13(D)から図13(E)の位置に押圧されるとき、ベースプレート3全体がバランスよく押圧されるので、移し変え前の位置へのベースプレート3の復元を円滑に行なうことができる。この点に関し、解除ばねの強度を均一にしておくと、解除ばねが作動しないことがある。 Furthermore, in the above embodiment, since the load applied to the release spring 9 on the reference plate 43 side is always greater than the load applied to the release spring 9 on the push plate 41 side, the release spring 9 pushes the restoring force on the reference plate 43 side. It is considered to be larger than the restoring force on the plate 41 side. Therefore, when the pitch between the base plates 3 is changed, that is, when the release spring 9 presses the base plate 3 from the position of FIG. 13 (A) to the position of FIG. 13 (B). Since the entire base plate 3 is pressed in a well-balanced manner when pressed to the position of (1), the base plate 3 can be smoothly restored to the position before transfer. In this regard, if the strength of the release spring is kept uniform, the release spring may not operate.
 図11の実施例の場合、基準プレート43側の第1ブロック10Aの解除ばね9Aの押圧力P1は190kg、第2ブロック10Bの解除ばね9B、9Cの押圧力P2は170kg、第3ブロック10Cの解除ばね9D~9Jの押圧力P3は150kgとしてある。このように復元力に差をつけた解除ばね9をベースプレート3に設ければ、ベースプレート3の解除ばね9が同時に拡張復元していくため、ブロック状に縮小されていた一群のベースプレート3が均等に拡張され、次なるステップに移行することができる。 For the embodiment of FIG. 11, the pressing force P 1 of the release spring 9A of the first block 10A of the reference plate 43 side 190 kg, release spring 9B of the second block 10B, the pressing force P 2 of 9C is 170 kg, the third block the pressing force P 3 of 10C release spring 9D ~ 9J is a 150 kg. Thus, if the release spring 9 having a difference in restoring force is provided on the base plate 3, the release spring 9 of the base plate 3 is simultaneously expanded and restored, so the group of base plates 3 reduced in the block shape is equally It is expanded and can move to the next step.
 ところで、吸着パッド25によるワーク51の吸着ステップにおいてワーク51に割れ、欠け等の異常状態があると、その割れ、欠けからエアが侵入してくる。この場合において、図12に示すワーク状態検出部を備えているときは、割れ、欠けから流入するエアにより連通路28内の圧力が上昇するので、真空圧検出センサ48はこのエアの圧力を感知し、異常信号を発する。この異常信号は図示しない表示器にデジタル表示されてもよいし、されなくともよい。なお、ワーク51が正常のときは、オリフィス46から流出しているエアの流出量は僅少であるため、吸着パッド25によるワーク51の吸着保持には影響がない。 By the way, if there is an abnormal state such as cracking or chipping in the workpiece 51 in the suction step of the workpiece 51 by the suction pad 25, air will intrude from the cracking or chipping. In this case, when the work state detection unit shown in FIG. 12 is provided, the pressure in the communication passage 28 is increased by the air flowing from the crack or chip, so the vacuum pressure detection sensor 48 senses the pressure of the air. And emits an abnormal signal. The abnormal signal may or may not be displayed digitally on a display (not shown). When the work 51 is normal, the amount of air flowing out from the orifice 46 is small, so there is no influence on the suction and holding of the work 51 by the suction pad 25.
 また、ワーク51に割れ、欠け等の異常状態がある場合、連通路28内の真空圧が変化するので、移し変え前にこの変化を検出することができる。よって移し変えの確実性が一層向上する。 Further, when the work 51 has an abnormal state such as a crack or a chip, the vacuum pressure in the communication passage 28 changes, so that the change can be detected before the transfer. Therefore, the certainty of transfer is further improved.
 本願発明による積層物ピッチ変更装置は上記した実施の形態に制限されない。例えば、動作部材による保持は、吸着パッド25による吸着ではなく、図14に示すように挟着部材65による挟着により各ワーク51を保持するものであってもよく、かかる場合にも本願発明を適用することができる。図14の場合、挟着部材65はばね65cにより連結された一対の開閉自在の可動爪65a、65bからなり、基端部に上記連通路28に連通する通路66が設けられる。上記ばね65cは常時において開状態に付勢されている。上記連通路28内が真空源により減圧さればね65cの付勢力に打ち勝つと、可動爪65a、65bが「閉」となり、図14(A)、図14(B)に一点鎖線で示すように、可動爪65a、65bワーク51の側面51bを挟持する。 The laminate pitch changing device according to the present invention is not limited to the embodiment described above. For example, the holding by the operation member may be holding of each work 51 not by suction by the suction pad 25 but by pinching by the pinching member 65 as shown in FIG. It can apply. In the case of FIG. 14, the clamping member 65 is composed of a pair of openable and closable movable claws 65a and 65b connected by a spring 65c, and a passage 66 communicating with the communication passage 28 is provided at the base end. The spring 65c is always biased in the open state. When the inside of the communication passage 28 is depressurized by a vacuum source and overcomes the biasing force of the spring 65c, the movable claws 65a and 65b become "closed", and as shown by dashed dotted lines in FIGS. 14 (A) and 14 (B). The movable claws 65 a and 65 b clamp the side surface 51 b of the work 51.
 また、吸着パッド25、挟着部材55の如き動作部材は必ずしも一対を要するものではなく、1個であってもよく、また3個以上であってもよい。動作部材によるワークの被保持面は任意であり、例えば、図14(A)に示すように積層方向に沿う方向のワークの面、即ち、ワークの両側面51bからワーク51を挟着してもよい。 In addition, the operation members such as the suction pad 25 and the sandwiching member 55 do not necessarily need to be in pairs, and may be one or three or more. The holding surface of the work by the operation member is optional, for example, as shown in FIG. 14A, even if the work 51 is sandwiched from the surface of the work in the direction along the stacking direction, that is, the both sides 51b of the work. Good.
 連通路28の個数は任意であり、適用されるワークの枚数により適宜増減可能である。 The number of communication paths 28 is arbitrary, and can be appropriately increased or decreased depending on the number of workpieces to be applied.
 連通路28を複数設ける場合、その作動は順次に動作させることもできる。これは例えば真空源の容量が小の場合に有利である。 When a plurality of communication paths 28 are provided, the operation can also be operated sequentially. This is advantageous, for example, when the volume of the vacuum source is small.
 弾性パッキング15は、図示実施の形態では蛇腹状のものを示したが、これに限定されず、例えば弾性力のあるゴムパッキング、オーリング等を用いることもできる。いずれにしてもベースプレート3の移動に連動して移動自在とされる。 The elastic packing 15 is in the form of a bellows in the illustrated embodiment, but is not limited to this. For example, an elastic rubber packing, an O-ring or the like may be used. In any case, it can be moved in conjunction with the movement of the base plate 3.
 可変スペーサ17の円周面に形成されるピッチ部も例えば大中小の3個以上とすることができる。例えばピッチ部を3個とする場合には、各ピッチ部は120°毎に設けるというように、ピッチ部の複数設置の場合にはピッチ部の設置部位を適宜に変更する。 The pitch portions formed on the circumferential surface of the variable spacer 17 can also be, for example, three or more large, medium, and small. For example, in the case where three pitch portions are provided, each pitch portion is provided every 120 °, and in the case of a plurality of pitch portions being installed, the installation site of the pitch portions is appropriately changed.
 またピッチ部の設置割合は必ずしも等分にする必要はない。例えば、大小のピッチ部とする場合、大ピッチ部の設置割合を60%、小ピッチ部の設置割合を40%の如くとすることもできる。また大中小のピッチ部とする場合、大ピッチ部の設置割合を40%、中ピッチ部の設置割合を35%、小ピッチ部の設置割合を25%の如くとすることもできる。 Further, the installation ratio of the pitch portion does not necessarily have to be equally divided. For example, in the case of forming the large and small pitch portions, the setting ratio of the large pitch portion may be 60%, and the setting ratio of the small pitch portion may be 40%. Further, in the case of using large, medium, and small pitch portions, the setting ratio of the large pitch portion may be 40%, the setting ratio of the middle pitch portion may be 35%, and the setting ratio of the small pitch portion may be 25%.
 ベースプレート3間のピッチを変更する時期は任意である。図示実施の形態のようにワーク51の搬送中であってもよいが、搬送前の小容器52への可動保持部の垂直移動時に、また搬送後の大容器53への可動保持部の垂直移動時に、ベースプレート3間のピッチを変更してもよい。 The time to change the pitch between the base plates 3 is arbitrary. As in the illustrated embodiment, it may be during conveyance of the work 51, but at the time of vertical movement of the movable holding portion to the small container 52 before conveyance, vertical movement of the movable holding portion to the large container 53 after conveyance Sometimes, the pitch between the base plates 3 may be changed.
 また可動保持部の移動方向は任意である。上記実施の形態では可動保持部を水平方向に移動する場合を述べたが、可動保持部を垂直方向に移動してもよいし、斜め方向に移動してもよい。 Further, the moving direction of the movable holding portion is arbitrary. Although the case where the movable holding portion is moved in the horizontal direction has been described in the above embodiment, the movable holding portion may be moved in the vertical direction or may be moved in an oblique direction.
 可動保持部を構成するベースプレート3の積層方向は任意である。 The stacking direction of the base plate 3 constituting the movable holding portion is arbitrary.
 またベースプレート3の形状は任意である。 The shape of the base plate 3 is arbitrary.
 各部の素材は任意であるが、ベースプレート3、可変スペーサ17、解除ばね9は、耐久性の大なる素材、例えば金属系素材が望ましい。また弾性パッキング15は弾性力の大なる素材、例えばプラスチック素材、ゴム素材が望ましい。吸着パッド25は軽量性、加工性、耐薬品性の点及びワークよりも硬度が小なる素材、例えば適宜のプラスチック素材が望ましい。分配プレート23は、軽量性、加工性の点より、例えば適宜のプラスチック素材、軽量金属素材が望ましい。 Although the material of each part is arbitrary, the base plate 3, the variable spacer 17, and the release spring 9 are desirably materials having high durability, for example, metal-based materials. The elastic packing 15 is preferably a material having a large elastic force, such as a plastic material or a rubber material. The suction pad 25 is desirably made of a material having a lightness, processability, chemical resistance and hardness smaller than that of a work, for example, an appropriate plastic material. From the viewpoint of lightness and processability, the distribution plate 23 is preferably, for example, an appropriate plastic material or light weight metal material.
 さらに、駆動パワーは任意であり、真空源によるだけでなく、例えば加圧源であってもよい。 Furthermore, the driving power is optional, and not only by the vacuum source but also by, for example, a pressure source.
 また、解除ばね9のばね力に関し、基準プレート43側のベースプレート3に設ける解除ばね9のばね復元力を最大とし、プッシュプレート41側の解除ばね9に向かって順次直線状に小とすることが望ましいのであるが、上述のように、ベースプレート3の所定の個数(単位数)毎にプッシュプレート41側に向かって段階状に小とする場合でも足りることが実証された。 Further, with regard to the spring force of the release spring 9, the spring restoring force of the release spring 9 provided on the base plate 3 on the reference plate 43 side may be maximized and sequentially reduced linearly toward the release spring 9 on the push plate 41 side. Although it is desirable, as described above, it has been proved to be sufficient even when the predetermined number (unit number) of the base plates 3 is made smaller toward the push plate 41 side in a stepwise manner.
 また解除ばね9の個数及びこれを載置する凹部7の個数も任意であり、設定されるピッチの寸法により適宜に増減可能である。 Further, the number of release springs 9 and the number of recesses 7 on which the release spring 9 is placed are also arbitrary, and can be appropriately increased or decreased depending on the size of the set pitch.
 さらにまた本願発明による積層物ピッチ変更装置は上記した実施の形態に制限されない。例えば、開閉バルブ45の開閉に関し、上記実施の形態では開閉バルブ45を常時「開」とし、検査時に「閉」とする例を述べたが、これのみに限られない。 Furthermore, the laminate pitch changing device according to the present invention is not limited to the embodiment described above. For example, regarding the opening and closing of the on-off valve 45, although the example which makes the on-off valve 45 "open" always at the above-mentioned embodiment and makes it "closing" at the time of inspection was described, it is not restricted only to this.
 本願発明による積層物ピッチ変更装置は多数の薄い厚さのワークが所定のピッチで積層状に並置されている場合のワーク間のピッチを変更する装置、例えば、ソーラパネルの移し変えに活用することができる。 The laminate pitch changing device according to the present invention is utilized for a device for changing the pitch between works when a large number of thin works are juxtaposed in a stack at a predetermined pitch, for example, for transferring solar panels. Can.
 1   可動吸着部
 3   ベースプレート
 5   孔部
 5a  方形孔
 5b  切欠
 7   凹部
 8   円孔
 9   解除ばね
 9o  ばね
 9p  中央部
 9q  周縁部
 9r  底面部
 10A 第1ブロック
 10B 第2ブロック
 10C 第3ブロック
 11  スライドガイド
 13  通孔
 13a 第1通孔
 13b 第2通孔
 13c 第3通孔
 15  弾性パッキング
 15a 第1弾性パッキング
 15b 第2弾性パッキング
 15c 第3弾性パッキング
 17  可変スペーサ
 18  中心孔
 19  小ピッチ部
 20  大ピッチ部
 21  傾斜部
 23  分配プレート
 25  吸着パッド
 26  通路
 27  小通路
 27a 狭窄部
 28  連通路
 28a 第1連通路
 28b 第2連通路
 28c 第3連通路
 29  吸着口
 31  駆動軸
 32  ガイドロッド
 33  ストッパ
 34  台座
 35  スライドブッシュ
 36  ピッチ決めシリンダ
 37  回転アクチュエータ
 38  カップリング
 39  軸受け
 40a 第1継手
 40b 第2継手
 40c 第3継手
 40d 他の継手
 41  プッシュプレート
 42  チャンバブロック
 43  基準プレート
 44  真空供給チャンバ
 45  開閉バルブ
 46  オリフィス
 47  真空圧検出路
 48  真空圧検出センサ
 49  シリンダ
 50  積層物
 51  ワーク
 52  小容器
 53  大容器
 65  挟着部材
 65a 可動爪
 65b 可動爪
 65c ばね
 66  通路
DESCRIPTION OF SYMBOLS 1 movable adsorption part 3 base plate 5 hole 5a square hole 5b notch 7 recessed part 8 circular hole 9 release spring 9o spring 9p central part 9q peripheral part 9r bottom part 10A first block 10B second block 10C third block 11 slide guide 13 Hole 13a First through hole 13b Second through hole 13c Third through hole 15 Elastic packing 15a First elastic packing 15b Second elastic packing 15c Third elastic packing 17 Variable spacer 18 Center hole 19 Small pitch part 20 Large pitch part 21 Inclination Part 23 distribution plate 25 suction pad 26 passage 27 small passage 27a narrowed portion 28 communication passage 28a first communication passage 28b second communication passage 28c third communication passage 29 suction opening 31 drive shaft 32 guide rod 33 stopper 34 pedestal 35 slide bush 6 pitch setting cylinder 37 rotary actuator 38 coupling 39 bearing 40a first joint 40b second joint 40c third joint 40d other joint 41 push plate 42 chamber block 43 reference plate 44 vacuum supply chamber 45 opening / closing valve 46 orifice 47 vacuum pressure detection Path 48 Vacuum pressure detection sensor 49 Cylinder 50 Laminate 51 Work 52 Small container 53 Large container 65 Clamping member 65a Movable claw 65b Movable claw 65c Spring 66 Passage

Claims (21)

  1.  所定のピッチで積層状に並置された多数の薄い厚さのワーク間のピッチを変更する装置であって、
     移動自在の可動保持部と、該可動保持部を駆動する駆動部とからなり、
     上記可動保持部は多数のベースプレートが所定のピッチで積層状に並置されてなり、
     上記各ベースプレートに上記ワークを保持する動作部材が設けられ、該動作部材は連通路から送られる駆動パワーにより作動されて上記ワークを各個別に保持し、
     上記各ベースプレートに駆動部の駆動軸に連動する回転自在の可変スペーサが設けられ、該可変スペーサの回転によりベースプレート間のピッチが可変となり、
     さらに上記各ベースプレートに上記ワークが保持される際、一群のベースプレートとの間に上記動作部材に連通する気密で伸縮自在の連通路が形成されることを特徴とする積層物ピッチ変更装置。
    An apparatus for changing the pitch between a number of thin work pieces juxtaposed in a stack at a predetermined pitch,
    The movable holding unit includes a movable holding unit and a driving unit that drives the movable holding unit.
    In the movable holding portion, a large number of base plates are juxtaposed in a stack at a predetermined pitch,
    Each of the base plates is provided with an operation member for holding the work, and the operation member is operated by a drive power sent from the communication passage to hold the work individually.
    Each of the above base plates is provided with a rotatable variable spacer interlocking with the drive shaft of the drive unit, and the pitch between the base plates becomes variable by rotation of the variable spacer.
    Furthermore, when the work is held on each of the base plates, an airtight and expandable communication path communicating with the operation member is formed between the group of base plates and the stack pitch changing device.
  2.  請求項1記載の積層物ピッチ変更装置において、上記連通路は隣接するベースプレートの通孔間に伸縮自在の弾性パッキングが連設されることにより形成されることを特徴とする積層物ピッチ変更装置。 The laminate pitch changing device according to claim 1, wherein the communication passage is formed by connecting an elastic packing which can extend and contract between the through holes of the adjacent base plates.
  3.  請求項2記載の積層物ピッチ変更装置において、上記各弾性パッキングが上記各ベースプレートに連動して移動することを特徴とする積層物ピッチ変更装置。 The laminate pitch changing device according to claim 2, wherein the elastic packings move in conjunction with the base plates.
  4.  請求項1記載の積層物ピッチ変更装置において、上記各可変スペーサが上記各ベースプレートに連動して移動することを特徴とする積層物ピッチ変更装置。 The laminate pitch changing device according to claim 1, wherein the variable spacers move in conjunction with the base plates.
  5.  請求項1記載の積層物ピッチ変更装置において、上記各ベースプレートにベースプレート間のピッチの固定を解除するためのばねが設けられることを特徴とする積層物ピッチ変更装置。 The laminate pitch changing device according to claim 1, wherein each base plate is provided with a spring for releasing the fixed pitch between the base plates.
  6.  請求項2記載の積層物ピッチ変更装置において、上記弾性パッキングは蛇腹状に形成されることを特徴とする積層物ピッチ変更装置。 The laminate pitch changing device according to claim 2, wherein the elastic packing is formed in a bellows shape.
  7.  請求項1記載の積層物ピッチ変更装置において、上記可変スペーサは円周面上において厚さの異なる部分が形成されており、回転により異なる厚さの部分が上記ベースプレートに接することによりベースプレート間のピッチを可変とすることを特徴とする積層物ピッチ変更装置。 2. The laminate pitch changing device according to claim 1, wherein the variable spacer is formed with portions having different thicknesses on the circumferential surface, and the portions having different thicknesses by rotation are in contact with the base plate to thereby form the pitch between the base plates. A laminate pitch changing device characterized in that
  8.  請求項5記載の積層物ピッチ変更装置において、上記ばねは縮小された状態のベースプレートを復元させる力につき固定のベースプレート側のばね力を可動のベースプレート側のばね力より大に形成することを特徴とする積層物ピッチ変更装置。 6. The laminate pitch changing device according to claim 5, wherein the spring forms a fixed spring force on the base plate side greater than a spring force on the movable base plate side against a force for restoring the base plate in a contracted state. Stack pitch changer.
  9.  請求項8記載の積層物ピッチ変更装置において、上記ばねのばね力をベースプレートの所定の個数毎に可動のベースプレート側に向かって段階状に小とすることを特徴とする積層物ピッチ変更装置。 The laminate pitch changing device according to claim 8, wherein the spring force of the spring is reduced stepwise toward the movable base plate side for each predetermined number of the base plates.
  10.  請求項8記載の積層物ピッチ変更装置において、上記ばねのばね力を可動のベースプレート側に向かって直線状に小とすることを特徴とする積層物ピッチ変更装置。 9. A laminate pitch changing device according to claim 8, wherein the spring force of the spring is linearly reduced toward the movable base plate side.
  11.  請求項5記載の積層物ピッチ変更装置において、上記ばねが単一箇のばねからなることを特徴とする積層物ピッチ変更装置。 6. A device as claimed in claim 5, wherein the spring comprises a single spring.
  12.  請求項5記載の積層物ピッチ変更装置において、上記ばねが複数箇のばねが重ねられてなることを特徴とする積層物ピッチ変更装置。 6. A laminate pitch changing device according to claim 5, wherein a plurality of springs are stacked on said spring.
  13.  請求項1記載の積層物ピッチ変更装置において、上記ワークが吸着される際、ワークの割れ、欠け等ワークの状態を検出する検出部を設けることを特徴とする積層物ピッチ変更装置。 2. The laminate pitch changing device according to claim 1, further comprising a detection unit for detecting a state of the workpiece such as cracking or chipping of the workpiece when the workpiece is adsorbed.
  14.  請求項13記載の積層物ピッチ変更装置において、上記検出部は上記連通路の出入口に上記連通路を開閉するために設けられる開閉バルブと、該開閉バルブに設けられ真空圧検出路に連通されるオリフィスと、該真空圧検出路に接続されるセンサとからなり、上記駆動パワーが上記連通路に入力され上記開閉バルブを閉じた後、連通路内の圧力変化を検出することを特徴とする積層物ピッチ変更装置。 14. The laminate pitch changing device according to claim 13, wherein the detection unit is provided in an opening and closing port of the communication passage for opening and closing the communication passage, and the opening and closing valve is provided in the opening and closing valve and communicates with a vacuum pressure detection passage. A laminate comprising an orifice and a sensor connected to the vacuum pressure detection path, wherein the drive power is input to the communication path to close the on-off valve, and then a pressure change in the communication path is detected. Pitch change device.
  15.  請求項1記載の積層物ピッチ変更装置において、上記動作部材が上記ワークを吸着する吸着パッドからなることを特徴とする積層物ピッチ変更装置。 The laminate pitch changing device according to claim 1, wherein the operating member comprises a suction pad for sucking the work.
  16.  請求項1記載の積層物ピッチ変更装置において、上記動作部材が上記ワークを挟着する挟着部材からなることを特徴とする積層物ピッチ変更装置。 The laminate pitch changing device according to claim 1, wherein the operation member comprises a clamping member for clamping the work.
  17.  請求項1記載の積層物ピッチ変更装置において、一群のベースプレートは所定の個数毎に一のグループに形成されることを特徴とする積層物ピッチ変更装置。 The laminate pitch changing device according to claim 1, wherein a group of base plates is formed into one group every predetermined number.
  18.  請求項1記載の積層物ピッチ変更装置において、上記各ベースプレートに動作部材が一対設けられ、上記各ベースプレートには上記可変スペーサ及び該動作部材に連通する上記連通路が一対設けられることを特徴とする積層物ピッチ変更装置。 2. The laminate pitch changing device according to claim 1, wherein each of the base plates is provided with a pair of operation members, and each of the base plates is provided with a pair of the variable spacer and the communication passage communicating with the operation members. Laminate pitch changer.
  19.  請求項1記載の積層物ピッチ変更装置において、上記動作部材は積層方向に直交する方向のワークの面を保持することを特徴とする積層物ピッチ変更装置。 The laminate pitch changing device according to claim 1, wherein the operation member holds the surface of the work in a direction orthogonal to the stacking direction.
  20.  請求項1記載の積層物ピッチ変更装置において、上記動作部材は積層方向に沿う方向のワークの面を保持することを特徴とする積層物ピッチ変更装置。 The laminate pitch changing device according to claim 1, wherein the operation member holds the surface of the work in a direction along the stacking direction.
  21.  上記積層物ピッチ変更装置において、ワークを保持する手段であり、上記ベースプレートとの間に気密で伸縮自在の連通路が形成されることを特徴とする積層物ピッチ変更装置用吸着パッド。 A suction pad for a laminate pitch changing device, which is a means for holding a work in the laminate pitch changing device, and an airtight and stretchable communication path is formed between it and the base plate.
PCT/JP2012/070635 2011-09-22 2012-08-13 Device for changing pitch of stacked objects WO2013042489A1 (en)

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DE112012003973.4T DE112012003973T5 (en) 2011-09-22 2012-08-13 Device for changing the distances in a stack
KR1020147005758A KR20140077882A (en) 2011-09-22 2012-08-13 Device for changing pitch of stacked objects
US14/346,319 US20140219767A1 (en) 2011-09-22 2012-08-13 Device for changing pitch of stack
CN201280046134.6A CN103827005A (en) 2011-09-22 2012-08-13 Device for changing pitch of stacked objects

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JP2011207989A JP5146707B1 (en) 2011-09-22 2011-09-22 Laminate pitch change device
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JP2012162108A JP2014018935A (en) 2012-07-20 2012-07-20 Apparatus for changing pitch of stacked works
JP2012162109A JP2014018936A (en) 2012-07-20 2012-07-20 Apparatus for changing pitch of stacked works
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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104476553A (en) * 2014-11-13 2015-04-01 常州先进制造技术研究所 Sucker type stacking manipulator capable of remaining gap
WO2018141367A1 (en) * 2017-01-31 2018-08-09 Applied Materials, Inc. Method of processing a substrate and substrate carrier for holding a substrate
DE102018220452A1 (en) * 2018-11-28 2020-05-28 Robert Bosch Gmbh Tilt segment bearings
CN113353622A (en) * 2021-04-30 2021-09-07 武汉华工激光工程有限责任公司 Breadth-adjustable array manipulator

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05253877A (en) * 1992-03-12 1993-10-05 Sony Corp Variable pitch mechanism
JPH06304833A (en) * 1993-04-23 1994-11-01 Sony Corp Clamp device
JP2007157953A (en) * 2005-12-05 2007-06-21 Lintec Corp Substrate housing cassette

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1007918A1 (en) * 1982-01-25 1983-03-30 Севастопольский Приборостроительный Институт Accumulation magazine
US5423503A (en) * 1990-10-31 1995-06-13 Tokyo Electron Sagami Limited Plate-like member conveying apparatus
US5954472A (en) * 1996-07-15 1999-09-21 Brooks Automation, Inc. Batch loader arm
DE10239578A1 (en) * 2002-08-28 2004-03-18 Mattson Wet Products Gmbh Device and method for treating substrates
US6854815B1 (en) * 2002-12-30 2005-02-15 John T. Smith Carousel shelving unit
JP4041767B2 (en) * 2003-05-13 2008-01-30 松下電器産業株式会社 Electronic component feeder
JP4546857B2 (en) * 2005-03-16 2010-09-22 富士機械製造株式会社 Electronic component holding device and electronic component mounting system
WO2008044240A1 (en) * 2006-10-12 2008-04-17 Jitendra Ishwarbhai Mevada Automatic grinding/buffing machine for rubber cot arbors
MY150953A (en) * 2008-11-05 2014-03-31 Esec Ag Die-ejector
US8556315B2 (en) * 2009-03-31 2013-10-15 Ats Automation Tooling Systems Inc. Vacuum gripper assembly
JP5592710B2 (en) * 2010-06-17 2014-09-17 セイコーインスツル株式会社 Pitch converter

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05253877A (en) * 1992-03-12 1993-10-05 Sony Corp Variable pitch mechanism
JPH06304833A (en) * 1993-04-23 1994-11-01 Sony Corp Clamp device
JP2007157953A (en) * 2005-12-05 2007-06-21 Lintec Corp Substrate housing cassette

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