WO2013027787A1 - Barrier laminate, gas barrier film, and device using barrier laminate or gas barrier film - Google Patents

Barrier laminate, gas barrier film, and device using barrier laminate or gas barrier film Download PDF

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WO2013027787A1
WO2013027787A1 PCT/JP2012/071253 JP2012071253W WO2013027787A1 WO 2013027787 A1 WO2013027787 A1 WO 2013027787A1 JP 2012071253 W JP2012071253 W JP 2012071253W WO 2013027787 A1 WO2013027787 A1 WO 2013027787A1
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group
general formula
organic layer
compound represented
inorganic layer
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PCT/JP2012/071253
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French (fr)
Japanese (ja)
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向井 厚史
青島 俊栄
塚原 次郎
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富士フイルム株式会社
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/30Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
    • B32B27/308Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers comprising acrylic (co)polymers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/80Constructional details
    • H10K30/88Passivation; Containers; Encapsulations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/70Other properties
    • B32B2307/724Permeability to gases, adsorption
    • B32B2307/7242Non-permeable
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2439/00Containers; Receptacles
    • B32B2439/70Food packaging
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2439/00Containers; Receptacles
    • B32B2439/80Medical packaging
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/12Photovoltaic modules
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/20Displays, e.g. liquid crystal displays, plasma displays
    • B32B2457/202LCD, i.e. liquid crystal displays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/84Passivation; Containers; Encapsulations
    • H10K50/844Encapsulations
    • H10K50/8445Encapsulations multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/549Organic PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the present invention relates to a barrier laminate, a gas barrier film, and a device using these.
  • a barrier film in which a metal oxide thin film such as aluminum oxide, magnesium oxide, oxidation, nitridation, and silicon oxynitride is formed on the surface of a plastic film is used for packaging articles that require blocking of various gases such as water vapor and oxygen.
  • a metal oxide thin film such as aluminum oxide, magnesium oxide, oxidation, nitridation, and silicon oxynitride is formed on the surface of a plastic film
  • it is widely used in packaging applications to prevent the deterioration of foods, industrial products and pharmaceuticals.
  • plastic film substrates have begun to be used instead of heavy and fragile glass substrates. Since the plastic film substrate can be applied to a roll-to-roll method, it is advantageous in terms of cost. However, there is a problem that the plastic film substrate is inferior in water vapor barrier property as compared with the glass substrate. For this reason, when a plastic film substrate is used for a liquid crystal display element, water vapor enters the liquid crystal cell and a display defect occurs.
  • Patent Document 1 discloses a technique for realizing a water vapor transmission rate of less than 0.005 g / m 2 / day by using an alternating laminate of an organic layer and an inorganic layer as a barrier layer. Is disclosed. According to the specification, when only one organic layer and one inorganic layer are laminated, the water vapor transmission rate is 0.011 g / m 2 / day, and the technical value of multilayer lamination is clearly It is shown.
  • Patent Document 1 since the multi-layer stacking of the organic layer and the inorganic layer reduces productivity, it is necessary to supply a large amount of gas barrier film. It becomes a big problem. In order to manufacture a gas barrier film in a large amount at a low cost, it is required to develop a high barrier property even with the smallest possible number of layers.
  • the organic layer, the set of the inorganic layer is 0.005g / m 2 / day following a set, barrier properties particularly for organic-inorganic laminate type capable of achieving a moisture vapor transmission rate of less than 0.001g / m 2 / day Development of a laminate, a gas barrier film having the barrier laminate, and an organic EL device using the gas barrier film is desired.
  • a gas barrier film used as a substrate for a device such as an organic EL element needs to have high resistance to a process temperature. For this reason, the organic layer is required to be firmly adhered to the base material or the inorganic layer, and further, the amount of gas generated from the organic layer needs to be kept small.
  • FIG. 1 shows the state, where 1 is an inorganic layer, 2 ′ is an organic layer formed using a silane coupling agent provided on the surface of the inorganic layer, and 3 is a surface of the organic layer.
  • the inorganic layer further provided in FIG. Alcohol 4 derived from the coupling agent remains in the conventional organic layer 2 ′.
  • the object of the present invention is to provide a gas barrier laminate having a high barrier property capable of improving the heat-resistant temperature.
  • ⁇ 1> An inorganic layer and an organic layer provided on the surface of the inorganic layer, wherein the organic layer is a polyfunctional (meth) acrylate, a compound represented by the general formula (I), and a general formula
  • a barrier laminate comprising a polymer obtained by polymerizing a polymerizable composition containing at least one compound represented by II-a) and a compound represented by formula (II-b).
  • R 1 to R 6 are each an alkyl group or an aryl group.
  • the alkyl group and the aryl group may have a substituent, provided that R 1 to R 6 At least one of them is a substituent containing a radically polymerizable carbon-carbon double bond.
  • Formula (II-a) (In the general formula (II-a), R 11 represents a hydrogen atom or a methyl group.
  • R 12 represents —CR 2 —, —O—, —CO—, —CR ⁇ CR—, an arylene group, or Represents a heteroarylene group or a divalent linking group in which two or more of these are connected, A represents —O— or —NR—, and each R represents a hydrogen atom or a substituent, and if possible, It may be bonded to form a ring.
  • Formula (II-b) (In the general formula (II-b), R 21 represents a hydrogen atom and a methyl group.
  • R 22 represents a single bond, an alkylene group, an arylene group, or two or more selected from these are an amide bond or This represents a linking group having a structure linked by an ester bond, having 2 to 82 atoms, and not having an aliphatic cyclic structure.
  • the alkylene group and aryl group have a substituent.
  • N2 represents an integer of 1 to 5.
  • ⁇ 3> At least a polyfunctional (meth) acrylate, a compound represented by the general formula (I), a compound represented by the general formula (II-a), and a compound represented by the general formula (II-b)
  • ⁇ 4> The barrier laminate according to any one of ⁇ 1> to ⁇ 3>, wherein the (meth) acrylate contained in the polymerizable composition is an aromatic (meth) acrylate.
  • ⁇ 5> The organic layer according to any one of ⁇ 1> to ⁇ 3>, wherein the organic layer is formed by applying a polymerizable composition containing an aromatic (meth) acrylate to the surface of the inorganic layer and curing it.
  • ⁇ 6> The barrier laminate according to any one of ⁇ 1> to ⁇ 5>, further comprising a second inorganic layer on the surface of the organic layer.
  • ⁇ 7> The barrier laminate according to any one of ⁇ 6>, further including a second organic layer on a surface of the second inorganic layer.
  • ⁇ 10> Any one of ⁇ 1> to ⁇ 9>, wherein the number of carboxy groups in the compound represented by the general formula (II-a) or the compound represented by the general formula (II-b) is one
  • the barrier laminate according to Item ⁇ 11> A gas barrier film in which the barrier laminate according to any one of ⁇ 1> to ⁇ 10> is provided on a support.
  • ⁇ 13> A device using the gas barrier film according to ⁇ 11> or ⁇ 12> as a substrate.
  • ⁇ 14> A device sealed with the barrier laminate according to any one of ⁇ 1> to ⁇ 10> or the gas barrier film according to ⁇ 11> or ⁇ 12>.
  • ⁇ 15> The device according to ⁇ 13> or ⁇ 14>, wherein the device is an organic EL element or a solar cell element.
  • ⁇ 16> A sealing bag using the barrier laminate according to any one of ⁇ 1> to ⁇ 10> or the gas barrier film according to ⁇ 11> or ⁇ 12>.
  • An inorganic layer and an organic layer provided on the surface of the inorganic layer are provided on the support, and the organic layer is a polyfunctional (meth) acrylate, a compound represented by the general formula (I), And applying a polymerizable composition containing at least one of the compound represented by the general formula (II-a) and the compound represented by the general formula (II-b) and heating at a temperature of 25 ° C. or higher.
  • the generation of outgas is less and it becomes possible to improve the adhesion between the inorganic layer and the organic layer. Furthermore, it has become possible to provide a barrier laminate having improved heat resistance.
  • the organic EL element in the present invention refers to an organic electroluminescence element.
  • (meth) acrylate is used in the meaning including both acrylate and methacrylate.
  • the barrier laminate of the present invention has an inorganic layer and an organic layer provided on the surface of the inorganic layer, and the organic layer is a polyfunctional (meth) acrylate, a compound represented by the general formula (I) And a polymerizable composition comprising at least one of a compound represented by general formula (II-a) and a compound represented by general formula (II-b) (hereinafter referred to as “polymerizable composition in the present invention”). It is characterized by containing a polymer obtained by polymerizing.
  • R 1 to R 6 are each an alkyl group or an aryl group.
  • the alkyl group and the aryl group may have a substituent, provided that R 1 to R 6 At least one of them is a substituent containing a radically polymerizable carbon-carbon double bond.
  • Formula (II-a) (In the general formula (II-a), R 11 represents a hydrogen atom or a methyl group.
  • R 12 represents —CR 2 —, —O—, —CO—, —CR ⁇ CR—, an arylene group, or Represents a heteroarylene group or a divalent linking group in which two or more of these are connected, A represents —O— or —NR—, and each R represents a hydrogen atom or a substituent, and if possible, It may be bonded to form a ring.
  • Formula (II-b) (In the general formula (II-b), R 21 represents a hydrogen atom and a methyl group.
  • R 22 represents a single bond, an alkylene group, an arylene group, or two or more selected from these are an amide bond or This represents a linking group having a structure linked by an ester bond, having 2 to 82 atoms, and not having an aliphatic cyclic structure.
  • the alkylene group and aryl group have a substituent.
  • N2 represents an integer of 1 to 5.
  • the barrier laminate of the present invention is preferably a barrier laminate having a second inorganic layer on the surface of the organic layer, and more preferably on the surface of the second inorganic layer. And a barrier laminate having a second organic layer.
  • FIG. 2 is a schematic cross-sectional view showing an example of the barrier laminate of the present invention, wherein 1 is a first inorganic layer, 2 is an organic layer, 3 is a second inorganic layer, and 10 is a barrier property. Each of the laminates is shown.
  • a composition containing a polymerizable composition and a silane coupling agent is applied on an inorganic layer and cured.
  • the barrier laminate of the present invention can maintain a high gas barrier property even at high temperature or in a vacuum process, and can secure adhesion between the organic layer and the inorganic layer.
  • the organic layer 2 is only one layer, but may further include a second organic layer.
  • one layer adjacent to the inorganic layer may be at least the organic layer. That is, in the present invention, a configuration in which at least two organic layers and at least two inorganic layers are alternately laminated is preferable.
  • the number of layers constituting the barrier laminate is not particularly limited, but typically 2 to 30 layers are preferable, and 3 to 20 layers are more preferable.
  • Organic layer At least one layer of the organic layers in the present invention contains a polymer obtained by polymerizing the polymerizable composition in the present invention.
  • the polyfunctional (meth) acrylate, the compound represented by the general formula (I), the compound represented by the general formula (II-a) and the compound represented by the general formula (II-b) At least one kind preferably has an aromatic group and may be an aromatic heterocyclic group, but more preferably has an aromatic hydrocarbon group.
  • the polyfunctional (meth) acrylate forms a heat-resistant three-dimensional network structure
  • the compound represented by the general formula (I) is represented by the compound represented by the general formula (II-a) or the general formula ( It is presumed that the effect of the present invention is achieved by the covalent bond with the surface of the inorganic layer by the catalytic effect of the compound carboxylic acid represented by II-b).
  • at least one of the compound represented by the general formula (I), the compound represented by the general formula (II-a), and the compound represented by the general formula (II-b) is polymerized by ethylene. Since these groups have groups, incorporation of these into the three-dimensional network structure also contributes to the effects of the present invention.
  • R 11 represents a hydrogen atom or a methyl group.
  • R 12 represents —CR 2 —, —O—, —CO—, —CR ⁇ CR—, an arylene group, or Represents a heteroarylene group or a divalent linking group in which two or more of these are connected,
  • A represents —O— or —NR—, and each R represents a hydrogen atom or a substituent, and if possible, It may be bonded to form a ring.
  • R 11 is preferably hydrogen.
  • R 12 is preferably a divalent linking group in which two or more of —CR 2 —, —O—, —CO—, an arylene group, and a heteroarylene group are linked, and —CR 2 —, —O— And a divalent linking group in which two or more of —CO— are linked, or a divalent linking group composed of a combination of these linking groups and an arylene group or heteroarylene group is more preferred, —CR 2 —, —O A divalent linking group composed of a combination of two or more of — and —CO— and an arylene group is more preferable.
  • the arylene group and heteroarylene group are preferably 6-membered rings.
  • R is a substituent
  • examples of the substituent R described later are exemplified, and an alkyl group (for example, a methyl group) or a group represented by —R 12 —COOH is preferable.
  • R 12 has the same meaning as R 12 described above, and the preferred range is also the same.
  • R 12 preferably has 5 to 10 atoms constituting the main skeleton of the linking group (the number of atoms constituting the chain portion linking A and COOH). From a structural viewpoint, R 12 is preferably a chain structure having an ester bond in the structure.
  • R 21 represents a hydrogen atom and a methyl group.
  • R 22 represents a single bond, an alkylene group, an arylene group, or two or more selected from these are an amide bond or This represents a linking group having a structure linked by an ester bond, having 2 to 82 atoms, and not having an aliphatic cyclic structure.
  • the alkylene group and aryl group have a substituent.
  • N2 represents an integer of 1 to 5.
  • R 21 is preferably a hydrogen atom.
  • R 22 has a structure in which a single bond, an alkylene group, an arylene group, or two or more selected from these are connected by an amide bond or an ester bond, It represents a linking group having 2 to 82 atoms and having no aliphatic cyclic structure.
  • the alkylene group and aryl group may have a substituent.
  • the linking group is an n-valent linking group, and n is an integer of 2 or more, preferably a divalent to pentavalent linking group, and more preferably a divalent linking group.
  • R 22 preferably has 5 to 10 atoms constituting the main skeleton of the linking group (the number of atoms constituting the longest chain portion linking the benzene ring and COOH).
  • R 22 is preferably a single bond or a chain structure having an ester bond in the structure.
  • R 22 is a single bond, —CR 2 —, —O—, —CO—, —CR ⁇ CR—, an arylene group, a heteroarylene group, or a divalent linking group in which two or more of these are linked. It is preferably a single bond or —CR 2 —, —O—, —CO—, —CR ⁇ CR—, or more preferably a divalent linking group in which two or more of these are linked.
  • R is a hydrogen atom or a substituent, and examples of the substituent include the following substituent R.
  • R is preferably a hydrogen atom.
  • Examples of the linking group for R 22 include alkylene groups (eg, 1,3-propylene group, 2,2-dimethyl-1,3-propylene group, 2-butyl-2-ethyl-1,3-propylene group, 1 , 6-hexylene group, 1,9-nonylene group, 1,12-dodecylene group, 1,16-hexadecylene group, etc.), arylene group (for example, phenylene group, naphthylene group), ether group, imino group, carbonyl group, And a divalent residue in which a plurality of these divalent groups are bonded in series.
  • These groups may have a substituent, and examples of the substituent that can be substituted include the substituent R described later.
  • Substituent R examples include an alkyl group (for example, methyl group, ethyl group, isopropyl group, tert-butyl group, n-octyl group, n-decyl group, n-hexadecyl group, cyclopropyl group, cyclopentyl group, cyclohexyl group, etc.
  • alkyl group for example, methyl group, ethyl group, isopropyl group, tert-butyl group, n-octyl group, n-decyl group, n-hexadecyl group, cyclopropyl group, cyclopentyl group, cyclohexyl group, etc.
  • Alkenyl groups eg, vinyl, allyl, 2-butenyl, 3-pentenyl, etc.
  • aryl groups eg, phenyl, p-methylphenyl, naphthyl, anthryl, phenanthryl, pyrenyl
  • halogen atoms eg, fluorine, chlorine, bromine, iodine
  • acyl groups eg, acetyl group, benzoyl group, formyl group, pivaloyl group, etc.
  • alkoxycarbonyl groups eg, methoxycarbonyl group, ethoxycarbonyl group, etc.
  • Aryloxycarbonyl group for example, phenyloxycarbonyl group, etc.
  • substituents may be further substituted. If possible, these substituents may be combined with each other or with a substituted hydrocarbon group to form a ring, and the substituent may be further substituted.
  • n2 represents an integer of 1 to 5, and is preferably 1.
  • the compound represented by the general formula (II-a) and the compound represented by the general formula (II-b) is more preferable.
  • a compound represented by the general formula (II-a) and having an aromatic group (further, an aromatic hydrocarbon group) is more preferable.
  • the above compound can be synthesized by the method described in Japanese Patent No. 4466821.
  • the total amount of the compound represented by the general formula (II-a) and the compound represented by the general formula (II-b) used in the present invention is 1 to 50% by mass in the polymerizable composition. It is preferably included in the range, more preferably 5 to 30% by mass, and still more preferably 5 to 15% by mass. By setting it as such a range, it exists in the tendency for the effect of this invention to be exhibited more effectively.
  • R 1 to R 6 are each an alkyl group or an aryl group.
  • the alkyl group and the aryl group may have a substituent, provided that R 1 to R 6 At least one of them is a substituent containing a radically polymerizable carbon-carbon double bond.
  • R 1 to R 6 are each a substituted or unsubstituted alkyl group or aryl group.
  • R 1 to R 6 are preferably an unsubstituted alkyl group or an unsubstituted aryl group, except in the case of a substituent containing a radically polymerizable carbon-carbon double bond.
  • the alkyl group an alkyl group having 1 to 6 carbon atoms is preferable, and a methyl group is more preferable.
  • aryl group a phenyl group is preferable.
  • R 1 to R 6 are particularly preferably a methyl group.
  • At least one of R 1 ⁇ R 6 is a radical polymerizable carbon - having a substituent containing a carbon double bond, two are radically polymerizable carbon of R 1 ⁇ R 6 - carbon double bonds A substituent is preferred. Further, among R 1 to R 3 , the number of those having a substituent containing a radically polymerizable carbon-carbon double bond is 1, and among R 4 to R 6 , the radically polymerizable carbon-carbon dioxygen is one. The number of those having a substituent containing a heavy bond is particularly preferably 1.
  • the substituents in which the silane coupling agent represented by the general formula (I) includes two or more radically polymerizable carbon-carbon double bonds may be the same or different. However, the same is preferable.
  • the substituent containing a radically polymerizable carbon-carbon double bond is preferably represented by —XY.
  • X is a single bond, an alkylene group having 1 to 6 carbon atoms, or an arylene group, preferably a single bond, a methylene group, an ethylene group, a propylene group, or a phenylene group.
  • Y is a radically polymerizable carbon-carbon double bond group, and is preferably an acryloyloxy group, a methacryloyloxy group, an acryloylamino group, a methacryloylamino group, a vinyl group, a propenyl group, a vinyloxy group, or a vinylsulfonyl group.
  • An acryloyloxy group is more preferred.
  • R 1 to R 6 may have a substituent other than a substituent containing a radical polymerizable carbon-carbon double bond.
  • substituents include alkyl groups (eg, methyl group, ethyl group, isopropyl group, tert-butyl group, n-octyl group, n-decyl group, n-hexadecyl group, cyclopropyl group, cyclopentyl group, cyclohexyl group).
  • aryl groups eg phenyl group, naphthyl group etc.
  • halogen atoms eg fluorine, chlorine, bromine, iodine
  • acyl groups eg acetyl group, benzoyl group, formyl group, pivaloyl group etc.
  • acyloxy Groups for example, acetoxy group, acryloyloxy group, methacryloyloxy group, etc.
  • alkoxycarbonyl groups for example, methoxycarbonyl group, ethoxycarbonyl group, etc.
  • aryloxycarbonyl groups for example, phenyloxycarbonyl group, etc.
  • sulfonyl groups For example, methanesulfonyl group, benzenesulfonate Group, etc.
  • the silane coupling agent used in the present invention is preferably contained in the polymerizable composition in the range of 1 to 30% by mass, more preferably 3 to 30% by mass, and further preferably 5 to 25% by mass. %. By setting it as such a range, it exists in the tendency for the effect of this invention to be exhibited more effectively. Moreover, it is preferable that the polymeric composition used by this invention does not contain silane coupling agents other than the silane coupling agent represented with general formula (I) substantially. “Substantially free” means, for example, 0.1% by mass or less of the total components of the polymerizable composition.
  • Polyfunctional (meth) acrylate The polymerizable composition in the present invention contains a polyfunctional (meth) acrylate.
  • the number of functional groups is preferably 3-6.
  • (meth) acrylate containing an aromatic group is more preferable, and (meth) acrylate having an aromatic hydrocarbon group is more preferable.
  • monofunctional (meth) acrylate in addition to polyfunctional (meth) acrylate.
  • the methacrylate type compound represented by General formula (3) can be employ
  • General formula (3) (In the general formula (3), R 1 represents a substituent and may be the same or different. N represents an integer of 0 to 5, and may be the same or different. Provided that at least one of R 1 contains a polymerizable group.)
  • R 1 As the substituent of R 1 , —CR 2 2 — (R 2 is a hydrogen atom or a substituent), —CO—, —O—, a phenylene group, —S—, —C ⁇ C—, —NR 3 — ( R 3 is a hydrogen atom or a substituent), and —CR 4 ⁇ CR 5 — (R 4 and R 5 are each a hydrogen atom or a substituent) and a polymerizable group.
  • a group consisting of a combination of one or more of —CR 2 2 — (wherein R 2 is a hydrogen atom or a substituent), —CO—, —O— and a phenylene group and a polymerizable group is preferable.
  • R 2 is a hydrogen atom or a substituent, and is preferably a hydrogen atom or a hydroxy group. It is preferable that at least one of R 1 includes a hydroxy group. By including a hydroxy group, the curing rate of the mechanical layer is improved.
  • the molecular weight of at least one R 1 is preferably 10 to 250, more preferably 70 to 150.
  • the position where R 1 is bonded is preferably bonded to at least the para position.
  • n represents an integer of 0 to 5, preferably an integer of 0 to 2, more preferably 0 or 1, and still more preferably 1.
  • the polymerizable group of the general formula (3) is preferably a (meth) acryloyl group or an epoxy group, and more preferably a (meth) acryloyl group.
  • the number of polymerizable groups that the general formula (3) has is preferably 2 or more, and more preferably 3 or more.
  • the upper limit is not particularly defined, but is preferably 8 or less, and more preferably 6 or less.
  • the molecular weight of the compound represented by the general formula (3) is preferably 600 to 1400, and more preferably 800 to 1200.
  • the compound represented by the general formula (3) can be obtained as a commercial product.
  • the said compound is also compoundable by a well-known method.
  • epoxy acrylate can be obtained by reaction of an epoxy compound and acrylic acid. These compounds usually generate bifunctional, trifunctional, pentafunctional and isomers thereof during the reaction. When it is desired to separate these isomers, they can be separated by column chromatography, but in the present invention, they can also be used as a mixture.
  • the blending amount of the polyfunctional (meth) acrylate in the polymerizable composition of the present invention is preferably 50 to 99% by mass, more preferably 85 to 95% by mass, based on the solid content excluding the solvent. .
  • 90% by mass or more of the total solid content is a polyfunctional (meth) acrylate, a compound represented by the general formula (I), a compound represented by the general formula (II-a), and It is preferably composed of a compound represented by the general formula (II-b).
  • the organic layer in the present invention is usually obtained by coating and curing a polymerizable composition.
  • an organic layer mainly composed of a polymer is formed by irradiating the polymerizable composition with heat or various energy rays for polymerization and crosslinking.
  • energy rays include ultraviolet rays, visible rays, infrared rays, electron beams, X-rays, and gamma rays.
  • a thermal polymerization initiator is used for polymerization with heat
  • a photopolymerization initiator is used for polymerization with ultraviolet light
  • a photopolymerization initiator and a sensitizer are used for polymerization with visible light.
  • photopolymerization initiator examples include Irgacure series (for example, Irgacure 651, Irgacure 754, Irgacure 184, Irgacure 2959, Irgacure 907, Irgacure 369, Irgacure 379, Irgacure, commercially available from Ciba Specialty Chemicals. 819), Darocure series (for example, Darocur TPO, Darocur 1173, etc.), Quantacure PDO, Esacure series (for example, Ezacure TZM, Ezacure, commercially available from Lamberti) TZT etc.).
  • Irgacure series for example, Irgacure 651, Irgacure 754, Irgacure 184, Irgacure 2959, Irgacure 907, Irgacure 369, Irgacure 379, Irgacure, commercially available from Ci
  • Formation method of organic layer As a method for layering the polymerizable composition, it is usually formed by applying the polymerizable composition on a support such as a base film or an inorganic layer. Application methods include dip coating, air knife coating, curtain coating, roller coating, wire bar coating, gravure coating, slide coating, or the hopper described in US Pat. No. 2,681,294. Extrusion coating methods used are exemplified, and among these, the coating method can be preferably employed.
  • the light to irradiate is usually ultraviolet light from a high pressure mercury lamp or a low pressure mercury lamp.
  • the radiation energy is preferably 0.1 J / cm 2 or more, 0.5 J / cm 2 or more is more preferable.
  • the polymerization is inhibited by oxygen in the air, and therefore it is preferable to reduce the oxygen concentration or oxygen partial pressure during polymerization.
  • the oxygen concentration during polymerization is lowered by the nitrogen substitution method, the oxygen concentration is preferably 2% or less, and more preferably 0.5% or less.
  • the oxygen partial pressure during polymerization is reduced by the decompression method, the total pressure is preferably 1000 Pa or less, and more preferably 100 Pa or less. Further, it is particularly preferable to perform ultraviolet polymerization by irradiating energy of 0.5 J / cm 2 or more under a reduced pressure condition of 100 Pa or less.
  • the organic layer in the present invention is preferably smooth and has high film hardness.
  • the smoothness of the organic layer is preferably less than 1 nm as average roughness (Ra value) of 1 ⁇ m square, and more preferably less than 0.5 nm.
  • the polymerization rate of the monomer is preferably 85% or more, more preferably 88% or more, further preferably 90% or more, and particularly preferably 92% or more.
  • the polymerization rate here means the ratio of the reacted polymerizable group among all the polymerizable groups (for example, acryloyl group and methacryloyl group) in the monomer mixture.
  • the polymerization rate can be quantified by an infrared absorption method.
  • the film thickness of the organic layer is not particularly limited, but if it is too thin, it is difficult to obtain film thickness uniformity, and if it is too thick, cracks are generated due to external force and the barrier property is lowered. From this viewpoint, the thickness of the organic layer is preferably 50 nm to 2000 nm, and more preferably 200 nm to 1500 nm.
  • the surface of the organic layer is required to be free of foreign matters such as particles and protrusions. For this reason, it is preferable that the organic layer is formed in a clean room.
  • the degree of cleanness is preferably class 10000 or less, more preferably class 1000 or less. It is preferable that the organic layer has a high hardness.
  • the hardness of the organic layer can be expressed as a microhardness based on the nanoindentation method.
  • the microhardness of the organic layer is preferably 100 N / mm or more, and more preferably 150 N / mm or more.
  • the inorganic layer is usually a thin film layer made of a metal compound.
  • a method for forming the inorganic layer any method can be used as long as it can form a target thin film.
  • PVD physical vapor deposition method
  • CVD chemical vapor deposition methods
  • a liquid phase growth method such as plating and a sol-gel method.
  • high barrier properties can be maintained even when the sputtering method is used.
  • the component contained in the inorganic layer is not particularly limited as long as it satisfies the above performance.
  • it is a metal oxide, a metal nitride, a metal oxynitride, or a metal carbide, such as Si, Al, In, Sn, Zn.
  • An oxide, nitride, carbide or oxynitride, oxynitride carbide, or the like containing one or more metals selected from Ti, Cu, Ce, Ta, or the like can be preferably used.
  • a metal oxide, nitride, or oxynitride selected from Si, Al, In, Sn, Zn, and Ti is preferable, and a metal oxide, nitride, or oxynitride of Si or Al is particularly preferable. These may contain other elements as secondary components.
  • a barrier laminate having a high barrier property can be obtained.
  • a mixed oxide of silicon nitride, silicon oxide, silicon nitride, silicon oxide, or silicon carbide is particularly preferable.
  • silicon nitride is desirable in that a dense film can be obtained and a barrier laminate having high barrier properties can be obtained.
  • the smoothness of the inorganic layer formed according to the present invention is preferably less than 1 nm, more preferably 0.5 nm or less, as an average roughness (Ra value) of 1 ⁇ m square. For this reason, it is preferable that the inorganic layer be formed in a clean room.
  • the degree of cleanness is preferably class 10000 or less, more preferably class 1000 or less.
  • the thickness of the inorganic layer is not particularly limited, but it is usually in the range of 5 to 500 nm, preferably 20 to 200 nm per layer.
  • Two or more inorganic layers may be laminated.
  • the adhesion between the layers can be improved, and the failure rate when used in an electronic device can be reduced.
  • each layer may have the same composition or a different composition.
  • stacking two or more layers it is desirable to design so that each inorganic layer may exist in said preferable range.
  • the interface with the organic layer is not clear, and the composition may include a layer whose composition changes continuously in the film thickness direction. .
  • the organic layer and the inorganic layer can be stacked by sequentially repeating the organic layer and the inorganic layer according to a desired layer configuration.
  • the organic layer is also preferably formed by a vacuum film formation method such as the flash vapor deposition method.
  • the present invention can exhibit high barrier properties when at least two organic layers and at least two inorganic layers are alternately laminated.
  • the higher Barrier property can be exhibited.
  • the present invention by providing an inorganic layer on the surface of the organic layer derived from the polymerizable aromatic silane coupling agent, the adhesion between the organic layer and the inorganic layer is improved, which is more preferable.
  • the device of the present invention may have a functional layer on the barrier laminate or at other positions.
  • the functional layer is described in detail in paragraph numbers 0036 to 0038 of JP-A-2006-289627.
  • Examples of functional layers other than these include matting agent layers, protective layers, antistatic layers, smoothing layers, adhesion improving layers, light shielding layers, antireflection layers, hard coat layers, stress relaxation layers, antifogging layers, and antifouling layers. , Printing layer, easy adhesion layer and the like.
  • the barrier laminate of the present invention is usually provided on a support, and can be used for various applications by selecting this support.
  • the support includes various devices, optical members, and the like.
  • the barrier laminate of the present invention can be used as a barrier layer of a gas barrier film.
  • the barrier laminate and gas barrier film of the present invention can be used for sealing devices that require barrier properties.
  • the barrier laminate and gas barrier film of the present invention can also be applied to optical members. Hereinafter, these will be described in detail.
  • the gas barrier film has a base film and a barrier laminate formed on the base film.
  • FIG. 3 shows an example of the configuration of the gas barrier film of the present invention, and shows a configuration in which organic layers and inorganic layers are alternately provided on the base film 5. Specifically, in order from the base film 5 side, the organic layer 6, the inorganic layer 1, the organic layer 2, and the inorganic layer 3 are provided so that their surfaces are adjacent to each other. The organic layer 6 is also called an undercoat layer and improves the adhesion between the base film 5 and the inorganic layer 13.
  • the organic layer 6 may be an organic layer containing a polymer obtained by polymerizing the polymerizable composition in the present invention, or may be another organic layer.
  • the adhesiveness of the base film 5 and an organic layer is improved by employ
  • the barrier laminate of the present invention may be provided only on one side of the base film, or may be provided on both sides.
  • the barrier laminate of the present invention may be laminated in the order of the inorganic layer and the organic layer from the base film side, or may be laminated in the order of the organic layer and the inorganic layer.
  • the uppermost layer of the barrier laminate of the present invention may be an inorganic layer or an organic layer.
  • a gas barrier film may have structural components (for example, functional layers, such as an easily bonding layer) other than a barriering laminated body and a base film.
  • the functional layer may be placed on the barrier laminate, between the barrier laminate and the base film, or on the side where the barrier laminate on the base film is not placed (back side).
  • the gas barrier film in the present invention usually uses a plastic film as the base film.
  • the plastic film to be used is not particularly limited in material, thickness and the like as long as it can hold a laminate such as an organic layer and an inorganic layer, and can be appropriately selected according to the purpose of use.
  • Specific examples of the plastic film include metal support (aluminum, copper, stainless steel, etc.) polyester resin, methacrylic resin, methacrylic acid-maleic acid copolymer, polystyrene resin, transparent fluororesin, polyimide, and fluorinated polyimide resin.
  • Polyamide resin Polyamide resin, polyamideimide resin, polyetherimide resin, cellulose acylate resin, polyurethane resin, polyetheretherketone resin, polycarbonate resin, alicyclic polyolefin resin, polyarylate resin, polyethersulfone resin, polysulfone resin, cycloolefin
  • thermoplastic resins such as filn copolymers, fluorene ring-modified polycarbonate resins, alicyclic ring-modified polycarbonate resins, fluorene ring-modified polyester resins, and acryloyl compounds.
  • the plastic film is preferably made of a material having heat resistance.
  • the glass transition temperature (Tg) is preferably 100 ° C. or higher and / or the linear thermal expansion coefficient is 40 ppm / ° C. or lower and is preferably made of a transparent material having high heat resistance. Tg and a linear expansion coefficient can be adjusted with an additive.
  • thermoplastic resins include polyethylene naphthalate (PEN: 120 ° C.), polycarbonate (PC: 140 ° C.), alicyclic polyolefin (for example, ZEONOR 1600: 160 ° C.
  • the gas barrier film of the present invention is used in combination with a polarizing plate, it is preferable that the gas barrier film is disposed so that the barrier laminate of the gas barrier film faces the inside of the cell and is located on the innermost side (adjacent to the element). At this time, since the gas barrier film is disposed inside the cell from the polarizing plate, the retardation value of the gas barrier film is important.
  • the usage form of the gas barrier film in such an embodiment includes a gas barrier film using a base film having a retardation value of 10 nm or less and a circularly polarizing plate (1/4 wavelength plate + (1/2 wavelength plate) + linearly polarizing plate. It is preferable to use a linear polarizing plate in combination with a gas barrier film using a base film having a retardation value of 100 nm to 180 nm, which can be used as a quarter wavelength plate.
  • cellulose triacetate As a base film having a retardation of 10 nm or less, cellulose triacetate (Fuji Film Co., Ltd .: Fuji Tac), polycarbonate (Teijin Chemicals Co., Ltd .: Pure Ace, Kaneka: Elmec Co., Ltd.), cycloolefin polymer (JSR Co., Ltd.) ): Arton, Nippon Zeon Co., Ltd .: Zeonoa), cycloolefin copolymer (Mitsui Chemicals Co., Ltd .: Appel (pellet), Polyplastic Co., Ltd .: Topas (pellet)) Polyarylate (Unitika Co., Ltd.): U100 (pellet) )), Transparent polyimide (Mitsubishi Gas Chemical Co., Ltd .: Neoprim) and the like.
  • stretching said film suitably can be used.
  • the plastic film is transparent, that is, the light transmittance is usually 80% or more, preferably 85% or more, more preferably 90% or more. It is.
  • the light transmittance is calculated by measuring the total light transmittance and the amount of scattered light using the method described in JIS-K7105, that is, an integrating sphere light transmittance measuring device, and subtracting the diffuse transmittance from the total light transmittance. be able to. Even when the gas barrier film of the present invention is used for display, transparency is not necessarily required when it is not installed on the observation side. Therefore, in such a case, an opaque material can be used as the plastic film.
  • the opaque material examples include polyimide, polyacrylonitrile, and known liquid crystal polymers.
  • the thickness of the plastic film used in the gas barrier film of the present invention is appropriately selected depending on the application and is not particularly limited, but is typically 1 to 800 ⁇ m, preferably 10 to 200 ⁇ m.
  • These plastic films may have functional layers such as a transparent conductive layer and a primer layer.
  • the functional layer is described in detail in paragraph numbers 0036 to 0038 of JP-A-2006-289627.
  • functional layers other than these include matting agent layers, protective layers, antistatic layers, smoothing layers, adhesion improving layers, light shielding layers, antireflection layers, hard coat layers, stress relaxation layers, antifogging layers, and antifouling layers. , Printing layer, easy adhesion layer and the like.
  • the barrier laminate and gas barrier film of the present invention can be preferably used for devices whose performance is deteriorated by chemical components in the air (oxygen, water, nitrogen oxide, sulfur oxide, ozone, etc.).
  • Examples of the device include electronic devices such as an organic EL element, a liquid crystal display element, a thin film transistor, a touch panel, electronic paper, and a solar cell, and are preferably used for the organic EL element.
  • the barrier laminate of the present invention can also be used for device film sealing. That is, it is a method of providing the barrier laminate of the present invention on the surface of the device itself as a support.
  • the device may be covered with a protective layer before providing the barrier laminate.
  • the gas barrier film of the present invention can also be used as a device substrate or a film for sealing by a solid sealing method.
  • the solid sealing method is a method in which after forming a protective layer on the device, an adhesive layer and a gas barrier film are stacked and cured.
  • an adhesive agent A thermosetting epoxy resin, a photocurable acrylate resin, etc. are illustrated.
  • the conventional barrier laminate and gas barrier film are incorporated in a device and heated at a temperature of 80 ° C. or higher in that state, the alcohol gas derived from the silane coupling agent is released and the device is damaged. It was.
  • the barrier laminate and the gas barrier film of the present invention do not release a large amount of alcohol gas even when heated at a temperature of 80 ° C. or higher (for example, 80 to 200 ° C.), it is effective to damage the device. Can be suppressed.
  • Organic EL device examples of organic EL elements using a gas barrier film are described in detail in JP-A-2007-30387. Since the manufacturing process of the organic EL device includes a drying process after the ITO etching process and a process under high humidity conditions, it is extremely advantageous to use the gas barrier film of the present invention.
  • the reflective liquid crystal display device has a configuration including a lower substrate, a reflective electrode, a lower alignment film, a liquid crystal layer, an upper alignment film, a transparent electrode, an upper substrate, a ⁇ / 4 plate, and a polarizing film in order from the bottom.
  • the gas barrier film in the present invention can be used as the transparent electrode substrate and the upper substrate. In the case of color display, it is preferable to further provide a color filter layer between the reflective electrode and the lower alignment film, or between the upper alignment film and the transparent electrode.
  • the transmissive liquid crystal display device includes a backlight, a polarizing plate, a ⁇ / 4 plate, a lower transparent electrode, a lower alignment film, a liquid crystal layer, an upper alignment film, an upper transparent electrode, an upper substrate, a ⁇ / 4 plate, and a polarization in order from the bottom It has a structure consisting of a film.
  • the substrate of the present invention can be used as the upper transparent electrode and the upper substrate.
  • the type of the liquid crystal cell is not particularly limited, but more preferably TN type (Twisted Nematic), STN type (Super Twisted Nematic), HAN type (Hybrid Aligned Nematic), VA type (Vertically Alignment), ECB type (Electrically Controlled Birefringence) OCB type (Optically Compensated Bend), CPA type (Continuous Pinwheel Alignment), and IPS type (In Plane Switching) are preferable.
  • TN type Transmission Nematic
  • STN type Super Twisted Nematic
  • HAN type Hybrid Aligned Nematic
  • VA type Very Alignment
  • ECB type Electro Mechanical Controlled Birefringence
  • OCB type Optically Compensated Bend
  • CPA type Continuous Pinwheel Alignment
  • IPS type In Plane Switching
  • the barrier laminate and gas barrier film of the present invention can also be used as a sealing film for solar cell elements.
  • the barrier laminate and the gas barrier film of the present invention are preferably sealed so that the adhesive layer is closer to the solar cell element.
  • the solar cell is required to withstand a certain amount of heat and humidity, but the barrier laminate and the gas barrier film of the present invention are suitable.
  • the solar cell element in which the barrier laminate and the gas barrier film of the present invention are preferably used is not particularly limited, and for example, a single crystal silicon solar cell element, a polycrystalline silicon solar cell element, a single junction type, or a tandem Amorphous silicon solar cell elements composed of structural types, III-V compound semiconductor solar cell elements such as gallium arsenide (GaAs) and indium phosphorus (InP), II-VI group compound semiconductors such as cadmium telluride (CdTe) Solar cell element, copper / indium / selenium system (so-called CIS system), copper / indium / gallium / selenium system (so-called CIGS system), copper / indium / gallium / selenium / sulfur system (so-called CIGS system), etc.
  • III-V compound semiconductor solar cell elements such as gallium arsenide (GaAs) and indium phosphorus (InP), II-VI group compound semiconductors such as cadmium telluride
  • the solar cell element is made of a copper / indium / selenium system (so-called CIS system), a copper / indium / gallium / selenium system (so-called CIGS system), copper / indium / gallium / selenium / sulfur.
  • CIS system copper / indium / selenium system
  • CIGS system copper / indium / gallium / selenium system
  • a group I-III-VI compound semiconductor solar cell element such as a system (so-called CIGSS system) is preferable.
  • the thin film transistor described in JP-T-10-512104 As other application examples, the thin film transistor described in JP-T-10-512104, the touch panel described in JP-A-5-127822, JP-A-2002-48913, etc., and described in JP-A-2000-98326 Electronic paper, solar cells described in JP-A-9-18042, and the like.
  • resin films such as a polyethylene film and a polypropylene film, and the barriering laminated body or gas barrier film of this invention can be laminated
  • descriptions in JP-A-2005-247409, JP-A-2005-335134, and the like can be referred to.
  • optical member using the gas barrier film of the present invention examples include a circularly polarizing plate.
  • a circularly polarizing plate can be produced by laminating a ⁇ / 4 plate and a polarizing plate using the gas barrier film of the present invention as a substrate. In this case, the lamination is performed so that the slow axis of the ⁇ / 4 plate and the absorption axis of the polarizing plate are 45 °.
  • a polarizing plate one that is stretched in a direction of 45 ° with respect to the longitudinal direction (MD) is preferably used.
  • those described in JP-A-2002-865554 can be suitably used. .
  • Example 1 Preparation of organic layer coating solution
  • the following (meth) acrylate, the following silane coupling agent, and the compounding amount of the compound corresponding to the following general formula (II-a) or (II-b) are blended at a ratio (weight ratio) shown in Table 1, 2 weight% of polymerization initiators were mix
  • the organic layer coating solution prepared as described above was prepared with methyl ethyl ketone so that the dry film thickness was 1000 nm. In an atmosphere of 100 ppm nitrogen, it was cured by irradiation with an ultraviolet irradiation amount of 0.5 J / cm 2 to prepare an organic layer. On the surface of the organic layer, SiN was formed by plasma CVD so that the film thickness was 40 nm. Furthermore, the same organic layer, inorganic layer, and organic layer were laminated
  • Silane coupling agent In the above formula, R represents CH 2 CHCOOCH 2 .
  • the silane coupling agent was synthesized in consideration of the method described in JP-A-2009-67778.
  • Adhesion test In order to evaluate the adhesion of the gas barrier film, a cross-cut test based on JIS K5400 was performed. The surface of the gas barrier film having the above layer structure was cut by 90 ° with respect to the film surface with a cutter knife at intervals of 1 mm, and 100 grids with intervals of 1 mm were produced. A 2 cm wide Mylar tape [manufactured by Nitto Denko, polyester tape (No. 31B)] was applied thereto, and the tape attached using a tape peeling tester was peeled off. Of the 100 grids on the laminated film, the number of cells remaining without peeling (n) was counted. The results are expressed in%.
  • the inorganic layer was changed to a 50 nm thick AlO film formed by sputtering, and the others were performed in the same manner.
  • the sample using the phosphoric acid monomer deteriorated the adhesion after wet heat, and in the present invention, the adhesion after wet heat was improved.
  • Example 2 Preparation of organic layer coating solution
  • the silane coupling agent KBM used in the comparative example is (manufactured by Shin-Etsu Chemical, KBM5103).
  • SiN was formed by a plasma CVD method so as to have a film thickness of 40 nm to form an inorganic layer.
  • the obtained gas barrier film has a configuration in which an organic layer is sandwiched between an inorganic layer and an inorganic layer.
  • the compound of the present invention was found to be excellent in barrier properties and adhesion.
  • An organic EL element was prepared using the gas barrier film obtained above. First, an ITO film (resistance: 30 ⁇ ) was formed on the gas barrier film by sputtering. The following compound layers were sequentially deposited on this substrate (anode) by vacuum deposition.
  • Copper phthalocyanine film thickness 10nm (Second hole transport layer) N, N′-diphenyl-N, N′-dinaphthylbenzidine: film thickness 40 nm (Light emitting layer and electron transport layer)
  • Tris (8-hydroxyquinolinato) aluminum film thickness 60nm (Electron injection layer)
  • Lithium fluoride film thickness 1nm
  • metal aluminum was deposited to a thickness of 100 nm to form a cathode, and a 3 ⁇ m thick silicon nitride film was formed thereon by a parallel plate CVD method to produce an organic EL device.
  • the barrier laminate is the organic EL element side on the prepared organic EL element and the gas barrier film prepared above.
  • the adhesive was cured by heating at 65 ° C. for 3 hours. A total of 10 organic EL elements sealed in this way were produced.
  • the gas barrier film of the comparative example was used, the gas barrier film used as the ITO film substrate was damaged and a good element could not be obtained.
  • the gas barrier film of the present invention was used, the gas barrier film used as the ITO film substrate was not damaged, and a good organic EL device was obtained.
  • a solar cell module was created using the gas barrier film created above. Specifically, a standard cure type ethylene-vinyl acetate copolymer was used as a filler for the solar cell module.
  • a solar cell module was prepared by sandwiching and filling amorphous silicon solar cells with an ethylene-vinyl acetate copolymer having a thickness of 450 ⁇ m on a 10 cm square tempered glass and further installing a gas barrier film thereon. As installation conditions, vacuuming was performed at 150 ° C. for 3 minutes, and then pressure bonding was performed for 9 minutes.
  • the solar cell module produced by this method operated well and exhibited good electrical output characteristics even in an environment of 85 ° C. and 85% relative humidity.
  • a sealing bag was created using the gas barrier film created above.
  • the base film side of the gas barrier film and a back (polyethylene bag) made of a resin film were fused by a heat seal method to create a sealing bag.
  • Cefazolin sodium manufactured by Otsuka Pharmaceutical Factory
  • Cefazolin sodium was encapsulated in the obtained sealing bag as a drug, stored for 6 months at 40 ° C. and 75% relative humidity, and evaluated for changes in color. It was hardly seen.
  • the gas barrier film of the present invention Since the gas barrier film of the present invention has a high barrier performance, it can be widely used in various devices that require barrier properties.
  • the smoothness of the organic layer can be improved, the inorganic layer can also be provided smoothly. As a result, the smoothness of the outermost surface can be improved, and the performance of the device formed on the gas barrier film can be improved.

Abstract

The present invention provides a barrier laminate which comprises an inorganic layer and an organic layer that is provided on the surface of the inorganic layer, said organic layer containing a polymer that is obtained by polymerizing a polymerizable composition which contains a multifunctional (meth)acrylate, a compound represented by general formula (I), and a compound represented by general formula (II-a) and/or a compound represented by general formula (II-b). The barrier laminate of the present invention has excellent adhesion properties and excellent heat resistance.

Description

バリア性積層体、ガスバリアフィルムおよびこれらを用いたデバイスBarrier laminate, gas barrier film and device using the same
 本発明は、バリア性積層体、ガスバリアフィルムおよびこれらを用いたデバイスに関する。 The present invention relates to a barrier laminate, a gas barrier film, and a device using these.
 従来、プラスチックフィルムの表面に、酸化アルミニウム、酸化マグネシウム、酸化、窒化、酸窒化珪素等の金属酸化物薄膜を形成したバリア性フィルムは、水蒸気や酸素など各種ガスの遮断を必要とする物品の包装や、食品、工業用品および医薬品等の変質を防止するための包装用途に広く用いられている。 Conventionally, a barrier film in which a metal oxide thin film such as aluminum oxide, magnesium oxide, oxidation, nitridation, and silicon oxynitride is formed on the surface of a plastic film is used for packaging articles that require blocking of various gases such as water vapor and oxygen. In addition, it is widely used in packaging applications to prevent the deterioration of foods, industrial products and pharmaceuticals.
 近年、液晶表示素子や有機EL素子等の分野においては、重くて割れやすいガラス基板に代わって、プラスチックフィルム基板が採用され始めている。プラスチックフィルム基板はロールトゥロール(Roll to Roll)方式に適用可能であることから、コストの点でも有利である。しかし、プラスチックフィルム基板はガラス基板と比較して水蒸気バリア性に劣るという問題がある。このため、プラスチックフィルム基板を液晶表示素子に用いると、水蒸気が液晶セル内に侵入し、表示欠陥が発生する。 In recent years, in the fields of liquid crystal display elements and organic EL elements, plastic film substrates have begun to be used instead of heavy and fragile glass substrates. Since the plastic film substrate can be applied to a roll-to-roll method, it is advantageous in terms of cost. However, there is a problem that the plastic film substrate is inferior in water vapor barrier property as compared with the glass substrate. For this reason, when a plastic film substrate is used for a liquid crystal display element, water vapor enters the liquid crystal cell and a display defect occurs.
 この問題を解決するために、特許文献1には有機層と無機層の複数層の交互積層体をバリア層とすることにより、水蒸気透過率として0.005g/m2/day未満を実現する技術が開示されている。該明細書によれば有機層と無機層がそれぞれ1層ずつしか積層されていない場合は、水蒸気透過率が0.011g/m2/dayであり、多層積層することの技術的価値が明確に示されている。 In order to solve this problem, Patent Document 1 discloses a technique for realizing a water vapor transmission rate of less than 0.005 g / m 2 / day by using an alternating laminate of an organic layer and an inorganic layer as a barrier layer. Is disclosed. According to the specification, when only one organic layer and one inorganic layer are laminated, the water vapor transmission rate is 0.011 g / m 2 / day, and the technical value of multilayer lamination is clearly It is shown.
米国特許第6,413,645号明細書US Pat. No. 6,413,645
 しかしながら、産業上の利用性を考慮すると、特許文献1に記載されるように有機層と無機層を多層積層することは生産性を低下させることになるため、ガスバリアフィルムを大量に供給する上で大きな問題となる。ガスバリアフィルムを低コストで大量に製造するには、できるだけ少ない積層数であっても高いバリア性を発現することが求められる。これらの背景から、有機層、無機層の組が1組で0.005g/m2/day以下、特に0.001g/m2/day未満の水蒸気透過率を達成できる有機無機積層型のバリア性積層体、該バリア性積層体を有するガスバリアフィルム、および前記ガスバリアフィルムを用いた有機EL素子の開発が望まれている。有機EL素子のようなデバイス用の基板として用いられるガスバリアフィルムは、プロセス温度に対して高い耐性を有する必要がある。このため、有機層は基材、あるいは無機層との強固な密着が求められ、さらに有機層からのガス発生量は少なく抑える必要がある。 However, in consideration of industrial applicability, as described in Patent Document 1, since the multi-layer stacking of the organic layer and the inorganic layer reduces productivity, it is necessary to supply a large amount of gas barrier film. It becomes a big problem. In order to manufacture a gas barrier film in a large amount at a low cost, it is required to develop a high barrier property even with the smallest possible number of layers. From these backgrounds, the organic layer, the set of the inorganic layer is 0.005g / m 2 / day following a set, barrier properties particularly for organic-inorganic laminate type capable of achieving a moisture vapor transmission rate of less than 0.001g / m 2 / day Development of a laminate, a gas barrier film having the barrier laminate, and an organic EL device using the gas barrier film is desired. A gas barrier film used as a substrate for a device such as an organic EL element needs to have high resistance to a process temperature. For this reason, the organic layer is required to be firmly adhered to the base material or the inorganic layer, and further, the amount of gas generated from the organic layer needs to be kept small.
 ここで、有機層と無機層の密着性を向上させる手段として、有機層にシランカップリング剤を数%添加する方法が知られている。しかしながら、本願発明者が検討を行ったところ、従来公知のシランカップリング剤は高温で熱分解し、メタノールなどの脱ガスを生じてしまうことが分かった。図1は、その状態を示したものであって、1は無機層を、2’は無機層の表面に設けられたシランカップリング剤を用いて形成した有機層を、3は有機層の表面にさらに設けられた無機層を示している。従来の有機層2’には、カップリング剤由来のアルコール4が残存しており、この状態で加熱や脱気が起こると、かかるアルコールガスが放出し、ガスバリア性を低下させてしまう。さらに、図1のような、有機層2’を無機層で挟んだ構成では、アルコール4由来のガスが隣接する無機層3を破壊してしまうこともあった。すなわち、かかるバリア性積層体を組み込んだデバイスを、高温プロセスに曝された際に、副生成物の残存による影響が顕著に現れる。
 本発明は、上記課題を解決することを目的としたものであって、耐熱温度を向上できる高いバリア性を有するガスバリア性積層体を提供することを目的とする。
Here, as a means for improving the adhesion between the organic layer and the inorganic layer, a method of adding several percent of a silane coupling agent to the organic layer is known. However, as a result of investigations by the present inventors, it has been found that conventionally known silane coupling agents are thermally decomposed at a high temperature to cause degassing such as methanol. FIG. 1 shows the state, where 1 is an inorganic layer, 2 ′ is an organic layer formed using a silane coupling agent provided on the surface of the inorganic layer, and 3 is a surface of the organic layer. The inorganic layer further provided in FIG. Alcohol 4 derived from the coupling agent remains in the conventional organic layer 2 ′. When heating or degassing occurs in this state, the alcohol gas is released and gas barrier properties are lowered. Furthermore, in the configuration in which the organic layer 2 ′ is sandwiched between inorganic layers as shown in FIG. 1, the gas derived from the alcohol 4 may destroy the adjacent inorganic layer 3. That is, when a device incorporating such a barrier laminate is exposed to a high-temperature process, the influence of residual byproducts appears significantly.
The object of the present invention is to provide a gas barrier laminate having a high barrier property capable of improving the heat-resistant temperature.
 上記課題のもと、発明者が鋭意検討を行った結果、以下のようなバリア性積層体を採用することにより、高温下においても破壊されることなく、高いバリア性を維持でき、上記課題を解決することを見出した。具体的には、下記<1>により達成された。さらに好ましくは、下記<2>~<17>により達成された。
<1>無機層と、該無機層の表面に設けられた有機層を有し、前記有機層は、多官能(メタ)アクリレート、一般式(I)で表される化合物、ならびに、一般式(II-a)で表される化合物および一般式(II-b)で表される化合物の少なくとも1種を含む重合性組成物を重合させてなるポリマーを含む、バリア性積層体。
一般式(I)
Figure JPOXMLDOC01-appb-C000004
(一般式(I)中、R1~R6は、それぞれ、アルキル基またはアリール基である。該アルキル基およびアリール基は置換基を有していてもよい。但し、R1~R6のうち少なくとも1つは、ラジカル重合性の炭素-炭素二重結合を含む置換基である。)
一般式(II-a)
Figure JPOXMLDOC01-appb-C000005
(一般式(II-a)中、R11は、水素原子またはメチル基を表す。R12は、-CR2-、-O-、-CO-、-CR=CR-、アリーレン基、もしくは、ヘテロアリーレン基、またはこれらの2以上が連結した2価の連結基を表す。Aは-O-または-NR-を表す。Rは、それぞれ、水素原子または置換基であり、可能な場合は互いに結合して環を形成していてもよい。)
一般式(II-b)
Figure JPOXMLDOC01-appb-C000006
(一般式(II-b)中、R21は、水素原子およびメチル基を表す。R22は、単結合、または、アルキレン基、アリーレン基、もしくは、これらから選択される2以上がアミド結合またはエステル結合により連結されてなる構造を有し、その原子数が2~82であり、かつ、脂肪族環状構造を有さない連結基を表す。該アルキレン基およびアリール基は置換基を有していてもよい。n2は1~5の整数を表す。)
<2>一般式(I)における、ラジカル重合性の炭素-炭素二重結合を含む置換基が、(メタ)アクリロイルオキシ基である、<1>に記載のバリア性積層体。
<3>多官能(メタ)アクリレート、一般式(I)で表される化合物、ならびに、一般式(II-a)で表される化合物および一般式(II-b)で表される化合物の少なくとも1種が、芳香族基を有する、<1>または<2>に記載のバリア性積層体。
<4>前記重合性組成物に含まれる(メタ)アクリレートが、芳香族(メタ)アクリレートである、<1>~<3>のいずれか1項に記載のバリア性積層体。
<5>前記有機層が、芳香族(メタ)アクリレートを含む重合性組成物を無機層の表面に適用して硬化させてなるものである、<1>~<3>のいずれか1項に記載のバリア性積層体。
<6>前記有機層の表面に、さらに、第2の無機層を有する、<1>~<5>のいずれか1項に記載のバリア性積層体。
<7>前記第2の無機層の表面に、さらに、第2の有機層を有する、<6>のいずれか1項に記載のバリア性積層体。
<8>前記無機層および/または第2の無機層が、SiもしくはAlの、酸化物、窒化物、もしくは、炭化物、または、その混合物を含む、<1>~<7>のいずれか1項に記載のバリア積層体。
<9>少なくとも、第1の無機層、第1の有機層、第2の無機層、第2の有機層、第3の無機層が、該順に互いに隣接して積層しており、第1の有機層および第2の有機層が前記重合性組成物を重合させてなるポリマーを含む、<1>~<8>のいずれか1項に記載のバリア性積層体。
<10>一般式(II-a)で表される化合物または一般式(II-b)で表される化合物におけるカルボキシ基の数が1つである、<1>~<9>のいずれか1項に記載のバリア性積層体。
<11>支持体上に、<1>~<10>のいずれか1項に記載のバリア性積層体を設けたガスバリアフィルム。
<12><11>において、さらに、支持体とバリア性積層体の間に有機層を有する、ガスバリアフィルム。
<13><11>または<12>に記載のガスバリアフィルムを基板に用いたデバイス。
<14><1>~<10>のいずれか1項に記載のバリア性積層体または<11>または<12>に記載のガスバリアフィルムを用いて封止したデバイス。
<15>前記デバイスが、有機EL素子または太陽電池素子である、<13>または<14>に記載のデバイス。
<16><1>~<10>のいずれか1項に記載のバリア性積層体または<11>または<12>に記載のガスバリアフィルムを用いた封止用袋。
<17>支持体上に、無機層と、該無機層の表面に設けられた有機層を有し、前記有機層は、多官能(メタ)アクリレート、一般式(I)で表される化合物、ならびに、一般式(II-a)で表される化合物および一般式(II-b)で表される化合物の少なくとも1種を含む重合性組成物を適用し、25℃以上の温度で加熱した後に、光線、電子線硬化、または熱線にて硬化させることを含む、<11>または<12>に記載のガスバリアフィルムの製造方法。
As a result of the inventor's earnest examination under the above problems, by adopting the following barrier laminate, high barrier properties can be maintained without being broken even at high temperatures, and the above problems are solved. I found out to solve it. Specifically, it was achieved by the following <1>. More preferably, it was achieved by the following <2> to <17>.
<1> An inorganic layer and an organic layer provided on the surface of the inorganic layer, wherein the organic layer is a polyfunctional (meth) acrylate, a compound represented by the general formula (I), and a general formula ( A barrier laminate comprising a polymer obtained by polymerizing a polymerizable composition containing at least one compound represented by II-a) and a compound represented by formula (II-b).
Formula (I)
Figure JPOXMLDOC01-appb-C000004
(In the general formula (I), R 1 to R 6 are each an alkyl group or an aryl group. The alkyl group and the aryl group may have a substituent, provided that R 1 to R 6 At least one of them is a substituent containing a radically polymerizable carbon-carbon double bond.)
Formula (II-a)
Figure JPOXMLDOC01-appb-C000005
(In the general formula (II-a), R 11 represents a hydrogen atom or a methyl group. R 12 represents —CR 2 —, —O—, —CO—, —CR═CR—, an arylene group, or Represents a heteroarylene group or a divalent linking group in which two or more of these are connected, A represents —O— or —NR—, and each R represents a hydrogen atom or a substituent, and if possible, It may be bonded to form a ring.)
Formula (II-b)
Figure JPOXMLDOC01-appb-C000006
(In the general formula (II-b), R 21 represents a hydrogen atom and a methyl group. R 22 represents a single bond, an alkylene group, an arylene group, or two or more selected from these are an amide bond or This represents a linking group having a structure linked by an ester bond, having 2 to 82 atoms, and not having an aliphatic cyclic structure.The alkylene group and aryl group have a substituent. N2 represents an integer of 1 to 5.)
<2> The barrier laminate according to <1>, wherein the substituent containing a radically polymerizable carbon-carbon double bond in the general formula (I) is a (meth) acryloyloxy group.
<3> At least a polyfunctional (meth) acrylate, a compound represented by the general formula (I), a compound represented by the general formula (II-a), and a compound represented by the general formula (II-b) The barrier laminate according to <1> or <2>, wherein one type has an aromatic group.
<4> The barrier laminate according to any one of <1> to <3>, wherein the (meth) acrylate contained in the polymerizable composition is an aromatic (meth) acrylate.
<5> The organic layer according to any one of <1> to <3>, wherein the organic layer is formed by applying a polymerizable composition containing an aromatic (meth) acrylate to the surface of the inorganic layer and curing it. The barrier laminate according to the description.
<6> The barrier laminate according to any one of <1> to <5>, further comprising a second inorganic layer on the surface of the organic layer.
<7> The barrier laminate according to any one of <6>, further including a second organic layer on a surface of the second inorganic layer.
<8> Any one of <1> to <7>, wherein the inorganic layer and / or the second inorganic layer includes an oxide, nitride, carbide, or mixture of Si or Al. The barrier laminate according to 1.
<9> At least the first inorganic layer, the first organic layer, the second inorganic layer, the second organic layer, and the third inorganic layer are stacked adjacent to each other in this order, The barrier laminate according to any one of <1> to <8>, wherein the organic layer and the second organic layer contain a polymer obtained by polymerizing the polymerizable composition.
<10> Any one of <1> to <9>, wherein the number of carboxy groups in the compound represented by the general formula (II-a) or the compound represented by the general formula (II-b) is one The barrier laminate according to Item.
<11> A gas barrier film in which the barrier laminate according to any one of <1> to <10> is provided on a support.
<12> A gas barrier film according to <11>, further comprising an organic layer between the support and the barrier laminate.
<13> A device using the gas barrier film according to <11> or <12> as a substrate.
<14> A device sealed with the barrier laminate according to any one of <1> to <10> or the gas barrier film according to <11> or <12>.
<15> The device according to <13> or <14>, wherein the device is an organic EL element or a solar cell element.
<16> A sealing bag using the barrier laminate according to any one of <1> to <10> or the gas barrier film according to <11> or <12>.
<17> An inorganic layer and an organic layer provided on the surface of the inorganic layer are provided on the support, and the organic layer is a polyfunctional (meth) acrylate, a compound represented by the general formula (I), And applying a polymerizable composition containing at least one of the compound represented by the general formula (II-a) and the compound represented by the general formula (II-b) and heating at a temperature of 25 ° C. or higher. The method for producing a gas barrier film according to <11> or <12>, comprising curing by light beam, electron beam curing, or heat ray.
 本発明における有機層を採用することにより、出ガスの発生が少なく、無機層と有機層の密着性を向上させることが可能になった。さらに、耐熱性能が向上したバリア性積層体を提供することが可能になった。 By adopting the organic layer in the present invention, the generation of outgas is less and it becomes possible to improve the adhesion between the inorganic layer and the organic layer. Furthermore, it has become possible to provide a barrier laminate having improved heat resistance.
従来のバリア性積層体からガスが放出する状態を示す断面概略図である。It is a cross-sectional schematic diagram which shows the state from which gas discharge | releases from the conventional barriering laminated body. 本発明のバリア性積層体の一例を示す断面概略図である。It is a cross-sectional schematic diagram which shows an example of the barriering laminated body of this invention. 本発明のガスバリアフィルムの構成の一例を示す断面概略図である。It is a section schematic diagram showing an example of composition of a gas barrier film of the present invention.
 以下において、本発明の内容について詳細に説明する。尚、本願明細書において「~」とはその前後に記載される数値を下限値および上限値として含む意味で使用される。また、本発明における有機EL素子とは、有機エレクトロルミネッセンス素子のことをいう。本明細書において、(メタ)アクリレートとは、アクリレートおよびメタクリレートの両方を含む意味で使用される。 Hereinafter, the contents of the present invention will be described in detail. In the present specification, “to” is used to mean that the numerical values described before and after it are included as a lower limit value and an upper limit value. The organic EL element in the present invention refers to an organic electroluminescence element. In this specification, (meth) acrylate is used in the meaning including both acrylate and methacrylate.
<バリア性積層体>
 本発明のバリア性積層体は、無機層と、該無機層の表面に設けられた有機層を有し、前記有機層は、多官能(メタ)アクリレート、一般式(I)で表される化合物、ならびに、一般式(II-a)で表される化合物および一般式(II-b)で表される化合物の少なくとも1種を含む重合性組成物(以下、「本発明における重合性組成物」ということがある)を重合させてなるポリマーを含むことを特徴とする。このような有機層を有するバリア性積層体とすることにより、有機層と無機層の密着性を向上させ、耐熱性能を向上することができる。
一般式(I)
Figure JPOXMLDOC01-appb-C000007
(一般式(I)中、R1~R6は、それぞれ、アルキル基またはアリール基である。該アルキル基およびアリール基は置換基を有していてもよい。但し、R1~R6のうち少なくとも1つは、ラジカル重合性の炭素-炭素二重結合を含む置換基である。)
一般式(II-a)
Figure JPOXMLDOC01-appb-C000008
(一般式(II-a)中、R11は、水素原子またはメチル基を表す。R12は、-CR2-、-O-、-CO-、-CR=CR-、アリーレン基、もしくは、ヘテロアリーレン基、またはこれらの2以上が連結した2価の連結基を表す。Aは-O-または-NR-を表す。Rは、それぞれ、水素原子または置換基であり、可能な場合は互いに結合して環を形成していてもよい。)
一般式(II-b)
Figure JPOXMLDOC01-appb-C000009
(一般式(II-b)中、R21は、水素原子およびメチル基を表す。R22は、単結合、または、アルキレン基、アリーレン基、もしくは、これらから選択される2以上がアミド結合またはエステル結合により連結されてなる構造を有し、その原子数が2~82であり、かつ、脂肪族環状構造を有さない連結基を表す。該アルキレン基およびアリール基は置換基を有していてもよい。n2は1~5の整数を表す。)
<Barrier laminate>
The barrier laminate of the present invention has an inorganic layer and an organic layer provided on the surface of the inorganic layer, and the organic layer is a polyfunctional (meth) acrylate, a compound represented by the general formula (I) And a polymerizable composition comprising at least one of a compound represented by general formula (II-a) and a compound represented by general formula (II-b) (hereinafter referred to as “polymerizable composition in the present invention”). It is characterized by containing a polymer obtained by polymerizing. By setting it as the barriering laminated body which has such an organic layer, the adhesiveness of an organic layer and an inorganic layer can be improved and heat resistance performance can be improved.
Formula (I)
Figure JPOXMLDOC01-appb-C000007
(In the general formula (I), R 1 to R 6 are each an alkyl group or an aryl group. The alkyl group and the aryl group may have a substituent, provided that R 1 to R 6 At least one of them is a substituent containing a radically polymerizable carbon-carbon double bond.)
Formula (II-a)
Figure JPOXMLDOC01-appb-C000008
(In the general formula (II-a), R 11 represents a hydrogen atom or a methyl group. R 12 represents —CR 2 —, —O—, —CO—, —CR═CR—, an arylene group, or Represents a heteroarylene group or a divalent linking group in which two or more of these are connected, A represents —O— or —NR—, and each R represents a hydrogen atom or a substituent, and if possible, It may be bonded to form a ring.)
Formula (II-b)
Figure JPOXMLDOC01-appb-C000009
(In the general formula (II-b), R 21 represents a hydrogen atom and a methyl group. R 22 represents a single bond, an alkylene group, an arylene group, or two or more selected from these are an amide bond or This represents a linking group having a structure linked by an ester bond, having 2 to 82 atoms, and not having an aliphatic cyclic structure.The alkylene group and aryl group have a substituent. N2 represents an integer of 1 to 5.)
 本発明のバリア性積層体は、好ましくは、前記有機層の表面に、さらに、第2の無機層を有するバリア性積層体であり、さらに好ましくは、前記第2の無機層の表面に、さらに、第2の有機層を有するバリア性積層体である。
 図2は、本発明のバリア性積層体の一例を示す断面概略図であって、1は第1の無機層を、2は有機層を、3は第2の無機層を、10はバリア性積層体をそれぞれ示している。
 有機層を形成する際、重合性組成物とシランカップリング剤を含む組成物を無機層の上に塗布して硬化させることが一般的に行われている。ここで、例えば、特開2001-125079号公報に記載のようなシランカップリング剤を使用した場合、加水分解の副生成物であるアルコール(メタノール、エタノール)が有機層に残存してしまう。そして、この残存するアルコールが、その後のプロセス、例えば、デバイスに組み込む段階になって、大量の出ガスを放出することが分かった。特に、図2に示す本実施形態のように、有機層が2つの無機層で挟まれている構成の場合には、シランカップリング剤由来のガスが無機層を破壊してしまっていた。これに対し、本願発明では、シランカップリング剤が加水分解しても、該シランカップリング剤がアンモニア以外の気体成分は実質的に産出しないことから、上記のような問題が起こらない。すなわち、本発明のバリア性積層体は、高いガスバリア性を高温や真空プロセス化でも維持でき、なおかつ、有機層と無機層の密着性を確保できる。
The barrier laminate of the present invention is preferably a barrier laminate having a second inorganic layer on the surface of the organic layer, and more preferably on the surface of the second inorganic layer. And a barrier laminate having a second organic layer.
FIG. 2 is a schematic cross-sectional view showing an example of the barrier laminate of the present invention, wherein 1 is a first inorganic layer, 2 is an organic layer, 3 is a second inorganic layer, and 10 is a barrier property. Each of the laminates is shown.
When forming an organic layer, it is generally performed that a composition containing a polymerizable composition and a silane coupling agent is applied on an inorganic layer and cured. Here, for example, when a silane coupling agent as described in JP-A-2001-125079 is used, alcohol (methanol, ethanol) as a by-product of hydrolysis remains in the organic layer. It has been found that this remaining alcohol releases a large amount of outgas at a later process, eg, at the stage of incorporation into the device. In particular, as in this embodiment shown in FIG. 2, in the case where the organic layer is sandwiched between two inorganic layers, the gas derived from the silane coupling agent has destroyed the inorganic layer. In contrast, in the present invention, even if the silane coupling agent is hydrolyzed, the silane coupling agent does not substantially produce gaseous components other than ammonia, and thus the above-described problem does not occur. That is, the barrier laminate of the present invention can maintain a high gas barrier property even at high temperature or in a vacuum process, and can secure adhesion between the organic layer and the inorganic layer.
 図2では、有機層2は1層のみであるが、さらに、第2の有機層を有していてもよい。2層以上の有機層を有する場合、そのうちの無機層に隣接する1層が少なくとも上記有機層であればよい。すなわち、本願発明では、少なくとも2層の有機層と少なくとも2層の無機層が交互に積層している構成が好ましい。さらに、バリア性積層体を構成する層数に関しては特に制限はないが、典型的には2層~30層が好ましく、3層~20層がさらに好ましい。 In FIG. 2, the organic layer 2 is only one layer, but may further include a second organic layer. In the case of having two or more organic layers, one layer adjacent to the inorganic layer may be at least the organic layer. That is, in the present invention, a configuration in which at least two organic layers and at least two inorganic layers are alternately laminated is preferable. Further, the number of layers constituting the barrier laminate is not particularly limited, but typically 2 to 30 layers are preferable, and 3 to 20 layers are more preferable.
(有機層)
 本発明における有機層のうち少なくとも1層は、本発明における重合性組成物を重合させてなるポリマーを含む。
 本発明では、多官能(メタ)アクリレート、一般式(I)で表される化合物、ならびに、一般式(II-a)で表される化合物および一般式(II-b)で表される化合物の少なくとも1種が、芳香族基を有することが好ましく、芳香族複素環基であってもよいが、芳香族炭化水素基を有することがより好ましい。
 本発明では、多官能(メタ)アクリレートが耐熱性の三次元網目構造を形成し、一般式(I)で表される化合物が、一般式(II-a)で表される化合物または一般式(II-b)で表される化合物カルボン酸の触媒効果によって無機層表面と共有結合することに起因することによって、本発明の効果を達成するものと推定される。このとき、一般式(I)で表される化合物、一般式(II-a)で表される化合物および一般式(II-b)で表される化合物の少なくとも1種がともにエチレン製の重合性基を有するため、これらが三次元網目構造に取り込まれることも、本発明の効果を発現する一因となっている。
(Organic layer)
At least one layer of the organic layers in the present invention contains a polymer obtained by polymerizing the polymerizable composition in the present invention.
In the present invention, the polyfunctional (meth) acrylate, the compound represented by the general formula (I), the compound represented by the general formula (II-a) and the compound represented by the general formula (II-b) At least one kind preferably has an aromatic group and may be an aromatic heterocyclic group, but more preferably has an aromatic hydrocarbon group.
In the present invention, the polyfunctional (meth) acrylate forms a heat-resistant three-dimensional network structure, and the compound represented by the general formula (I) is represented by the compound represented by the general formula (II-a) or the general formula ( It is presumed that the effect of the present invention is achieved by the covalent bond with the surface of the inorganic layer by the catalytic effect of the compound carboxylic acid represented by II-b). In this case, at least one of the compound represented by the general formula (I), the compound represented by the general formula (II-a), and the compound represented by the general formula (II-b) is polymerized by ethylene. Since these groups have groups, incorporation of these into the three-dimensional network structure also contributes to the effects of the present invention.
(一般式(II-a)で表される化合物および一般式(II-b)で表される化合物)
一般式(II-a)
Figure JPOXMLDOC01-appb-C000010
(一般式(II-a)中、R11は、水素原子またはメチル基を表す。R12は、-CR2-、-O-、-CO-、-CR=CR-、アリーレン基、もしくは、ヘテロアリーレン基、またはこれらの2以上が連結した2価の連結基を表す。Aは-O-または-NR-を表す。Rは、それぞれ、水素原子または置換基であり、可能な場合は互いに結合して環を形成していてもよい。)
 R11は、水素が好ましい。
 R12は、-CR2-、-O-、-CO-、アリーレン基、および、ヘテロアリーレン基の2以上が連結した2価の連結基であることが好ましく、-CR2-、-O-および-CO-の2以上が連結した2価の連結基であるか、これらの連結基とアリーレン基またはヘテロアリーレン基の組み合わせからなる2価の連結基がより好ましく、-CR2-、-O-および-CO-の2以上と、アリーレン基の組み合わせからなる2価の連結基がより好ましい。
 アリーレン基およびヘテロアリーレン基は、6員環が好ましい。
 Rが置換基の場合、後述の置換基Rが例示され、アルキル基(例えば、メチル基)または-R12-COOHで表される基であることが好ましい。この場合のR12は上記R12と同義であり好ましい範囲も同義である。
 R12は、連結基の主骨格を構成する原子数(AとCOOHを連結する鎖部分を構成する原子の数)が5~10のものが好ましい。また、構造的には、R12は、鎖状構造であって、その構造中にエステル結合を有するものが好ましい。
(Compound represented by general formula (II-a) and compound represented by general formula (II-b))
Formula (II-a)
Figure JPOXMLDOC01-appb-C000010
(In the general formula (II-a), R 11 represents a hydrogen atom or a methyl group. R 12 represents —CR 2 —, —O—, —CO—, —CR═CR—, an arylene group, or Represents a heteroarylene group or a divalent linking group in which two or more of these are connected, A represents —O— or —NR—, and each R represents a hydrogen atom or a substituent, and if possible, It may be bonded to form a ring.)
R 11 is preferably hydrogen.
R 12 is preferably a divalent linking group in which two or more of —CR 2 —, —O—, —CO—, an arylene group, and a heteroarylene group are linked, and —CR 2 —, —O— And a divalent linking group in which two or more of —CO— are linked, or a divalent linking group composed of a combination of these linking groups and an arylene group or heteroarylene group is more preferred, —CR 2 —, —O A divalent linking group composed of a combination of two or more of — and —CO— and an arylene group is more preferable.
The arylene group and heteroarylene group are preferably 6-membered rings.
When R is a substituent, examples of the substituent R described later are exemplified, and an alkyl group (for example, a methyl group) or a group represented by —R 12 —COOH is preferable. In this case, R 12 has the same meaning as R 12 described above, and the preferred range is also the same.
R 12 preferably has 5 to 10 atoms constituting the main skeleton of the linking group (the number of atoms constituting the chain portion linking A and COOH). From a structural viewpoint, R 12 is preferably a chain structure having an ester bond in the structure.
一般式(II-b)
Figure JPOXMLDOC01-appb-C000011
(一般式(II-b)中、R21は、水素原子およびメチル基を表す。R22は、単結合、または、アルキレン基、アリーレン基、もしくは、これらから選択される2以上がアミド結合またはエステル結合により連結されてなる構造を有し、その原子数が2~82であり、かつ、脂肪族環状構造を有さない連結基を表す。該アルキレン基およびアリール基は置換基を有していてもよい。n2は1~5の整数を表す。)
 R21は、水素原子が好ましい。
 一般式(II-b)中、R22は、単結合、アルキレン基、もしくは、アリーレン基、または、これらから選択される2以上がアミド結合またはエステル結合により連結されてなる構造を有し、その原子数が2~82であり、かつ、脂肪族環状構造を有さない連結基を表す。該アルキレン基およびアリール基は置換基を有していてもよい。連結基は、n価の連結基であって、nは2以上の整数であり、2~5価の連結基であることが好ましく、2価の連結基であることがより好ましい。
 R22は、連結基の主骨格を構成する原子数(ベンゼン環とCOOHを連結する最も長い鎖の鎖部分を構成する原子の数)が5~10のものが好ましい。また、構造的には、R22は、単結合または鎖状構造であって、その構造中にエステル結合を有するものが好ましい。R22は、単結合または、-CR2-、-O-、-CO-、-CR=CR-、アリーレン基、もしくは、ヘテロアリーレン基、またはこれらの2以上が連結した2価の連結基であることが好ましく、単結合または、-CR2-、-O-、-CO-、-CR=CR-、またはこれらの2以上が連結した2価の連結基であることがより好ましく、単結合または-CH2-および/または-O-と、エステル結合の組み合わせからなる2価の連結基がさらに好ましい。ここで、Rは水素原子または置換基であり、置換基としては、下記置換基Rが例示される。Rは水素原子が好ましい。
Formula (II-b)
Figure JPOXMLDOC01-appb-C000011
(In the general formula (II-b), R 21 represents a hydrogen atom and a methyl group. R 22 represents a single bond, an alkylene group, an arylene group, or two or more selected from these are an amide bond or This represents a linking group having a structure linked by an ester bond, having 2 to 82 atoms, and not having an aliphatic cyclic structure.The alkylene group and aryl group have a substituent. N2 represents an integer of 1 to 5.)
R 21 is preferably a hydrogen atom.
In the general formula (II-b), R 22 has a structure in which a single bond, an alkylene group, an arylene group, or two or more selected from these are connected by an amide bond or an ester bond, It represents a linking group having 2 to 82 atoms and having no aliphatic cyclic structure. The alkylene group and aryl group may have a substituent. The linking group is an n-valent linking group, and n is an integer of 2 or more, preferably a divalent to pentavalent linking group, and more preferably a divalent linking group.
R 22 preferably has 5 to 10 atoms constituting the main skeleton of the linking group (the number of atoms constituting the longest chain portion linking the benzene ring and COOH). Structurally, R 22 is preferably a single bond or a chain structure having an ester bond in the structure. R 22 is a single bond, —CR 2 —, —O—, —CO—, —CR═CR—, an arylene group, a heteroarylene group, or a divalent linking group in which two or more of these are linked. It is preferably a single bond or —CR 2 —, —O—, —CO—, —CR═CR—, or more preferably a divalent linking group in which two or more of these are linked. Or, a divalent linking group comprising a combination of —CH 2 — and / or —O— and an ester bond is more preferable. Here, R is a hydrogen atom or a substituent, and examples of the substituent include the following substituent R. R is preferably a hydrogen atom.
 R22の連結基の例として、アルキレン基(例えば、1,3-プロピレン基、2,2-ジメチル-1,3-プロピレン基、2-ブチル-2-エチル-1,3-プロピレン基、1,6-ヘキシレン基、1,9-ノニレン基、1,12-ドデシレン基、1,16-ヘキサデシレン基等)、アリーレン基(例えば、フェニレン基、ナフチレン基)、エーテル基、イミノ基、カルボニル基、およびこれらの2価基が複数個直列に結合した2価残基を挙げることができる。
 これらの基は置換基を有してもよく、置換することのできる置換基の例としては、後述の置換基Rが挙げられる。
Examples of the linking group for R 22 include alkylene groups (eg, 1,3-propylene group, 2,2-dimethyl-1,3-propylene group, 2-butyl-2-ethyl-1,3-propylene group, 1 , 6-hexylene group, 1,9-nonylene group, 1,12-dodecylene group, 1,16-hexadecylene group, etc.), arylene group (for example, phenylene group, naphthylene group), ether group, imino group, carbonyl group, And a divalent residue in which a plurality of these divalent groups are bonded in series.
These groups may have a substituent, and examples of the substituent that can be substituted include the substituent R described later.
置換基R
 置換基Rとしては、アルキル基(例えば、メチル基、エチル基、イソプロピル基、tert-ブチル基、n-オクチル基、n-デシル基、n-ヘキサデシル基、シクロプロピル基、シクロペンチル基、シクロヘキシル基等)、アルケニル基(例えば、ビニル基、アリル基、2-ブテニル基、3-ペンテニル基等)、アリール基(例えば、フェニル基、p-メチルフェニル基、ナフチル基、アンスリル基、フェナンスリル基、ピレニル基等)、ハロゲン原子(例えば、フッ素、塩素、臭素、ヨウ素)、アシル基(例えば、アセチル基、ベンゾイル基、ホルミル基、ピバロイル基等)、アルコキシカルボニル基(例えば、メトキシカルボニル基、エトキシカルボニル基等)、アリールオキシカルボニル基(例えば、フェニルオキシカルボニル基等)等が挙げられる。これらの置換基はさらに置換されていてもよい。これらの置換基は可能であるならば、置換基同士、または、置換している炭化水素基と結合して環を形成してもよく、置換基はさらに置換されていてもよい。
 n2は、1~5の整数を表し、好ましくは1である。
Substituent R
Examples of the substituent R include an alkyl group (for example, methyl group, ethyl group, isopropyl group, tert-butyl group, n-octyl group, n-decyl group, n-hexadecyl group, cyclopropyl group, cyclopentyl group, cyclohexyl group, etc. ), Alkenyl groups (eg, vinyl, allyl, 2-butenyl, 3-pentenyl, etc.), aryl groups (eg, phenyl, p-methylphenyl, naphthyl, anthryl, phenanthryl, pyrenyl) Etc.), halogen atoms (eg, fluorine, chlorine, bromine, iodine), acyl groups (eg, acetyl group, benzoyl group, formyl group, pivaloyl group, etc.), alkoxycarbonyl groups (eg, methoxycarbonyl group, ethoxycarbonyl group, etc.) ), Aryloxycarbonyl group (for example, phenyloxycarbonyl group, etc.) Etc. The. These substituents may be further substituted. If possible, these substituents may be combined with each other or with a substituted hydrocarbon group to form a ring, and the substituent may be further substituted.
n2 represents an integer of 1 to 5, and is preferably 1.
 本発明では、一般式(II-a)で表される化合物および一般式(II-b)で表される化合物のうち、一般式(II-a)で表される化合物の方がより好ましく、一般式(II-a)で表される化合物であって、芳香族基(さらには、芳香族炭化水素基)を有する化合物がより好ましい。 In the present invention, among the compound represented by the general formula (II-a) and the compound represented by the general formula (II-b), the compound represented by the general formula (II-a) is more preferable. A compound represented by the general formula (II-a) and having an aromatic group (further, an aromatic hydrocarbon group) is more preferable.
 以下に、一般式(II-a)で表される化合物または一般式(II-b)で表される化合物の好ましい具体例を示すが、本発明はこれらに限定されるものではない。 Hereinafter, preferred specific examples of the compound represented by the general formula (II-a) or the compound represented by the general formula (II-b) are shown, but the present invention is not limited thereto.
Figure JPOXMLDOC01-appb-C000012
Figure JPOXMLDOC01-appb-C000012
Figure JPOXMLDOC01-appb-C000013
Figure JPOXMLDOC01-appb-C000013
Figure JPOXMLDOC01-appb-C000014
Figure JPOXMLDOC01-appb-C000014
Figure JPOXMLDOC01-appb-C000015
Figure JPOXMLDOC01-appb-C000015
Figure JPOXMLDOC01-appb-C000016
Figure JPOXMLDOC01-appb-C000016
 上記化合物は、特許第4466821号等に記載の方法によって合成できる。 The above compound can be synthesized by the method described in Japanese Patent No. 4466821.
 本発明で用いられる一般式(II-a)で表される化合物および一般式(II-b)で表される化合物は、重合性組成物中に、これらの合計で、1~50質量%の範囲で含まれることが好ましく、より好ましくは5~30質量%であり、さらに好ましくは5~15質量%である。このような範囲とすることにより、本発明の効果がより効果的に発揮される傾向にある。 The total amount of the compound represented by the general formula (II-a) and the compound represented by the general formula (II-b) used in the present invention is 1 to 50% by mass in the polymerizable composition. It is preferably included in the range, more preferably 5 to 30% by mass, and still more preferably 5 to 15% by mass. By setting it as such a range, it exists in the tendency for the effect of this invention to be exhibited more effectively.
(一般式(I)で表される化合物)
一般式(I)
Figure JPOXMLDOC01-appb-C000017
(一般式(I)中、R1~R6は、それぞれ、アルキル基またはアリール基である。該アルキル基およびアリール基は置換基を有していてもよい。但し、R1~R6のうち少なくとも1つは、ラジカル重合性の炭素-炭素二重結合を含む置換基である。)
(Compound represented by formula (I))
Formula (I)
Figure JPOXMLDOC01-appb-C000017
(In the general formula (I), R 1 to R 6 are each an alkyl group or an aryl group. The alkyl group and the aryl group may have a substituent, provided that R 1 to R 6 At least one of them is a substituent containing a radically polymerizable carbon-carbon double bond.)
 R1~R6は、それぞれ置換もしくは無置換のアルキル基またはアリール基である。R1~R6は、ラジカル重合性の炭素-炭素二重結合を含む置換基である場合を除き、無置換のアルキル基または無置換のアリール基が好ましい。アルキル基としては炭素数1~6のアルキル基が好ましく、メチル基がより好ましい。アリール基としては、フェニル基が好ましい。R1~R6は、メチル基が特に好ましい。 R 1 to R 6 are each a substituted or unsubstituted alkyl group or aryl group. R 1 to R 6 are preferably an unsubstituted alkyl group or an unsubstituted aryl group, except in the case of a substituent containing a radically polymerizable carbon-carbon double bond. As the alkyl group, an alkyl group having 1 to 6 carbon atoms is preferable, and a methyl group is more preferable. As the aryl group, a phenyl group is preferable. R 1 to R 6 are particularly preferably a methyl group.
 R1~R6のうち少なくとも1つは、ラジカル重合性の炭素-炭素二重結合を含む置換基を有し、R1~R6の2つがラジカル重合性の炭素-炭素二重結合を含む置換基であることが好ましい。さらに、R1~R3のなかでラジカル重合性の炭素-炭素二重結合を含む置換基を有するものの数が1であって、R4~R6のなかでラジカル重合性の炭素-炭素二重結合を含む置換基を有するものの数が1であることが特に好ましい。
 一般式(I)で表されるシランカップリング剤が2つ以上のラジカル重合性の炭素-炭素二重結合を含む置換基は、それぞれの置換基は同じであってもよいし、異なっていてもよいが、同じであることが好ましい。
At least one of R 1 ~ R 6 is a radical polymerizable carbon - having a substituent containing a carbon double bond, two are radically polymerizable carbon of R 1 ~ R 6 - carbon double bonds A substituent is preferred. Further, among R 1 to R 3 , the number of those having a substituent containing a radically polymerizable carbon-carbon double bond is 1, and among R 4 to R 6 , the radically polymerizable carbon-carbon dioxygen is one. The number of those having a substituent containing a heavy bond is particularly preferably 1.
The substituents in which the silane coupling agent represented by the general formula (I) includes two or more radically polymerizable carbon-carbon double bonds may be the same or different. However, the same is preferable.
 ラジカル重合性の炭素-炭素二重結合を含む置換基は、-X-Yで表されることが好ましい。ここで、Xは、単結合、炭素数1~6のアルキレン基、アリーレン基であり、好ましくは、単結合、メチレン基、エチレン基、プロピレン基、フェニレン基である。Yは、ラジカル重合性の炭素-炭素二重結合基であり、アクリロイルオキシ基、メタクリロイルオキシ基、アクリロイルアミノ基、メタクリロイルアミノ基、ビニル基、プロペニル基、ビニルオキシ基、ビニルスルホニル基が好ましく、(メタ)アクリロイルオキシ基がより好ましい。 The substituent containing a radically polymerizable carbon-carbon double bond is preferably represented by —XY. Here, X is a single bond, an alkylene group having 1 to 6 carbon atoms, or an arylene group, preferably a single bond, a methylene group, an ethylene group, a propylene group, or a phenylene group. Y is a radically polymerizable carbon-carbon double bond group, and is preferably an acryloyloxy group, a methacryloyloxy group, an acryloylamino group, a methacryloylamino group, a vinyl group, a propenyl group, a vinyloxy group, or a vinylsulfonyl group. ) An acryloyloxy group is more preferred.
 また、R1~R6はラジカル重合性の炭素-炭素二重結合を含む置換基以外の置換基を有しても良い。置換基の例としては、アルキル基(例えば、メチル基、エチル基、イソプロピル基、tert-ブチル基、n-オクチル基、n-デシル基、n-ヘキサデシル基、シクロプロピル基、シクロペンチル基、シクロヘキシル基等)、アリール基(例えば、フェニル基、ナフチル基等)、ハロゲン原子(例えば、フッ素、塩素、臭素、ヨウ素)、アシル基(例えば、アセチル基、ベンゾイル基、ホルミル基、ピバロイル基等)、アシルオキシ基(例えば、アセトキシ基、アクリロイルオキシ基、メタクリロイルオキシ基等)、アルコキシカルボニル基(例えば、メトキシカルボニル基、エトキシカルボニル基等)、アリールオキシカルボニル基(例えば、フェニルオキシカルボニル基等)、スルホニル基(例えば、メタンスルホニル基、ベンゼンスルホニル基等)、等が挙げられる。 R 1 to R 6 may have a substituent other than a substituent containing a radical polymerizable carbon-carbon double bond. Examples of substituents include alkyl groups (eg, methyl group, ethyl group, isopropyl group, tert-butyl group, n-octyl group, n-decyl group, n-hexadecyl group, cyclopropyl group, cyclopentyl group, cyclohexyl group). Etc.), aryl groups (eg phenyl group, naphthyl group etc.), halogen atoms (eg fluorine, chlorine, bromine, iodine), acyl groups (eg acetyl group, benzoyl group, formyl group, pivaloyl group etc.), acyloxy Groups (for example, acetoxy group, acryloyloxy group, methacryloyloxy group, etc.), alkoxycarbonyl groups (for example, methoxycarbonyl group, ethoxycarbonyl group, etc.), aryloxycarbonyl groups (for example, phenyloxycarbonyl group, etc.), sulfonyl groups ( For example, methanesulfonyl group, benzenesulfonate Group, etc.).
 以下に、一般式(I)で表される化合物の具体例を示すが、本発明はこれらに限定されない。
Figure JPOXMLDOC01-appb-C000018
Figure JPOXMLDOC01-appb-C000019
Although the specific example of a compound represented by general formula (I) below is shown, this invention is not limited to these.
Figure JPOXMLDOC01-appb-C000018
Figure JPOXMLDOC01-appb-C000019
 本発明で用いられるシランカップリング剤は、重合性組成物中に、1~30質量%の範囲で含まれることが好ましく、より好ましくは3~30質量%であり、さらに好ましくは5~25質量%である。このような範囲とすることにより、本発明の効果がより効果的に発揮される傾向にある。
 また、本発明で用いる重合性組成物は、一般式(I)で表されるシランカップリング剤以外のシランカップリング剤を実質的に含まないことが好ましい。実質的に含まないとは、例えば、重合性組成物の全成分の0.1質量%以下であることをいう。
The silane coupling agent used in the present invention is preferably contained in the polymerizable composition in the range of 1 to 30% by mass, more preferably 3 to 30% by mass, and further preferably 5 to 25% by mass. %. By setting it as such a range, it exists in the tendency for the effect of this invention to be exhibited more effectively.
Moreover, it is preferable that the polymeric composition used by this invention does not contain silane coupling agents other than the silane coupling agent represented with general formula (I) substantially. “Substantially free” means, for example, 0.1% by mass or less of the total components of the polymerizable composition.
多官能(メタ)アクリレート
 本発明における重合性組成物は、多官能(メタ)アクリレートを含む。官能基の数は、3~6が好ましい。また、芳香族基を含有する(メタ)アクリレートがより好ましく、芳香族炭化水素基を有する(メタ)アクリレートがさらに好ましい。もちろん、多官能(メタ)アクリレートに加えて単官能(メタ)アクリレートを含んでいることを排除するものではない。
Polyfunctional (meth) acrylate The polymerizable composition in the present invention contains a polyfunctional (meth) acrylate. The number of functional groups is preferably 3-6. Moreover, (meth) acrylate containing an aromatic group is more preferable, and (meth) acrylate having an aromatic hydrocarbon group is more preferable. Of course, it does not exclude including monofunctional (meth) acrylate in addition to polyfunctional (meth) acrylate.
 以下に、(メタ)アクリレート系化合物の具体例を示すが、本発明はこれらに限定されるものではない。
Figure JPOXMLDOC01-appb-C000020
Although the specific example of a (meth) acrylate type compound is shown below, this invention is not limited to these.
Figure JPOXMLDOC01-appb-C000020
Figure JPOXMLDOC01-appb-C000021
Figure JPOXMLDOC01-appb-C000021
Figure JPOXMLDOC01-appb-C000022
Figure JPOXMLDOC01-appb-C000022
Figure JPOXMLDOC01-appb-C000023
Figure JPOXMLDOC01-appb-C000023
Figure JPOXMLDOC01-appb-C000024
Figure JPOXMLDOC01-appb-C000024
Figure JPOXMLDOC01-appb-C000025
Figure JPOXMLDOC01-appb-C000025
 さらに、本発明では、一般式(3)で表されるメタアクリレート系化合物が好ましく採用できる。
一般式(3)
Figure JPOXMLDOC01-appb-C000026
(一般式(3)中、R1は、置換基を表し、それぞれ同一であっても異なっていてもよい。nは、0~5の整数を示し、それぞれ同一であっても異なっていてもよい。但し、R1の少なくとも1つは重合性基を含む。)
Furthermore, in this invention, the methacrylate type compound represented by General formula (3) can be employ | adopted preferably.
General formula (3)
Figure JPOXMLDOC01-appb-C000026
(In the general formula (3), R 1 represents a substituent and may be the same or different. N represents an integer of 0 to 5, and may be the same or different. Provided that at least one of R 1 contains a polymerizable group.)
 R1の置換基としては、-CR2 2-(R2は水素原子または置換基)、-CO-、-O-、フェニレン基、-S-、-C≡C-、-NR3-(R3は水素原子または置換基)、-CR4=CR5-(R4、R5は、ぞれぞれ、水素原子または置換基)の1つ以上と、重合性基との組み合わせからなる基が挙げられ、-CR2 2-(R2は水素原子または置換基)、-CO-、-O-およびフェニレン基の1つ以上と、重合性基との組み合わせからなる基が好ましい。
 R2は、水素原子または置換基であるが、好ましくは、水素原子またはヒドロキシ基である。
 R1の少なくとも1つが、ヒドロキシ基を含むことが好ましい。ヒドロキシ基を含むことにより、機層の硬化率が向上する。
 R1の少なくとも1つの分子量が10~250であることが好ましく、70~150であることがより好ましい。
 R1が結合している位置としては、少なくともパラ位に結合していることが好ましい。
 nは、0~5の整数を示し、0~2の整数であることが好ましく、0または1であることがより好ましく、いずれも1であることがさらに好ましい。
As the substituent of R 1 , —CR 2 2 — (R 2 is a hydrogen atom or a substituent), —CO—, —O—, a phenylene group, —S—, —C≡C—, —NR 3 — ( R 3 is a hydrogen atom or a substituent), and —CR 4 ═CR 5 — (R 4 and R 5 are each a hydrogen atom or a substituent) and a polymerizable group. A group consisting of a combination of one or more of —CR 2 2 — (wherein R 2 is a hydrogen atom or a substituent), —CO—, —O— and a phenylene group and a polymerizable group is preferable.
R 2 is a hydrogen atom or a substituent, and is preferably a hydrogen atom or a hydroxy group.
It is preferable that at least one of R 1 includes a hydroxy group. By including a hydroxy group, the curing rate of the mechanical layer is improved.
The molecular weight of at least one R 1 is preferably 10 to 250, more preferably 70 to 150.
The position where R 1 is bonded is preferably bonded to at least the para position.
n represents an integer of 0 to 5, preferably an integer of 0 to 2, more preferably 0 or 1, and still more preferably 1.
 一般式(3)で表される化合物は、R1の少なくとも2つが同じ構造であることが好ましい。さらに、nは、いずれも1であり、4つのR1の少なくとも2つずつがそれぞれ同じ構造であることがより好ましく、nは、いずれも1であり、4つのR1が同じ構造であることがさらに好ましい。一般式(3)が有する重合性基は、(メタ)アクリロイル基またはエポキシ基であることが好ましく、(メタ)アクリロイル基であることがより好ましい。一般式(3)が有する重合性基の数は、2つ以上であることが好ましく、3つ以上であることがより好ましい。また、上限は特に定めるものではないが、8つ以下であることが好ましく、6つ以下であることがより好ましい。
 一般式(3)で表される化合物の分子量は、600~1400が好ましく、800~1200がより好ましい。
In the compound represented by the general formula (3), it is preferable that at least two of R 1 have the same structure. Furthermore, it is more preferable that n is 1, and at least two of the four R 1 s have the same structure, and n is 1, and the four R 1 s have the same structure. Is more preferable. The polymerizable group of the general formula (3) is preferably a (meth) acryloyl group or an epoxy group, and more preferably a (meth) acryloyl group. The number of polymerizable groups that the general formula (3) has is preferably 2 or more, and more preferably 3 or more. The upper limit is not particularly defined, but is preferably 8 or less, and more preferably 6 or less.
The molecular weight of the compound represented by the general formula (3) is preferably 600 to 1400, and more preferably 800 to 1200.
 本発明では、一般式(3)で表される化合物を1種類のみ含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含んでいる場合、例えば、同じ構造のR1を含み、かつ、該R1の数が異なる化合物およびそれらの異性体を含んでいる組成物が例示される。 In this invention, only 1 type of compounds represented by General formula (3) may be included, and 2 or more types may be included. When two or more types are contained, for example, a composition containing R 1 having the same structure and different number of R 1 and isomers thereof is exemplified.
 以下に、一般式(3)で表される化合物の具体例を示すが、これによって本発明が限定されることはない。また、下記化合物では、一般式(3)の4つのnがいずれも1の場合を例示しているが、一般式(3)の4つのnのうち、1つまたは2つまたは3つが0のもの(例えば、2官能や3官能化合物等)や、一般式(3)の4つのnのうち、1つまたは2つまたは3つ以上が2つ以上のもの(R1が1つの環に、2つ以上結合しているもの、例えば、5官能や6官能化合物等)も本発明の好ましい化合物として例示される。 Although the specific example of a compound represented by General formula (3) below is shown, this invention is not limited by this. Moreover, in the following compound, although four n of general formula (3) has illustrated the case where all are 1, 1 or 2 or 3 is 0 among four n of general formula (3). One (for example, bifunctional or trifunctional compound) or one in which two or more of three in the general formula (3) are two or more (R 1 is one ring, Those having two or more bonds, such as pentafunctional and hexafunctional compounds, are also exemplified as preferred compounds of the present invention.
Figure JPOXMLDOC01-appb-C000027
Figure JPOXMLDOC01-appb-C000027
Figure JPOXMLDOC01-appb-C000028
Figure JPOXMLDOC01-appb-C000028
Figure JPOXMLDOC01-appb-C000029
Figure JPOXMLDOC01-appb-C000029
Figure JPOXMLDOC01-appb-C000030
Figure JPOXMLDOC01-appb-C000030
Figure JPOXMLDOC01-appb-C000031
Figure JPOXMLDOC01-appb-C000031
 一般式(3)で表される化合物は、市販品として入手することができる。また、上記化合物は、公知の方法によって合成することもできる。例えば、エポキシアクリレートは、エポキシ化合物とアクリル酸との反応で得ることができる。これらの化合物は、通常、反応の際、2官能、3官能、5官能やその異性体なども生成する。これらの異性体を分離したい場合は、カラムクロマトグラフィによって分離できるが、本発明では、混合物として用いることも可能である。 The compound represented by the general formula (3) can be obtained as a commercial product. Moreover, the said compound is also compoundable by a well-known method. For example, epoxy acrylate can be obtained by reaction of an epoxy compound and acrylic acid. These compounds usually generate bifunctional, trifunctional, pentafunctional and isomers thereof during the reaction. When it is desired to separate these isomers, they can be separated by column chromatography, but in the present invention, they can also be used as a mixture.
 本発明における重合性組成物における、多官能(メタ)アクリレートの配合量は、溶媒を除く固形分に対し、50~99質量%であることが好ましく、85~95質量%であることがより好ましい。 The blending amount of the polyfunctional (meth) acrylate in the polymerizable composition of the present invention is preferably 50 to 99% by mass, more preferably 85 to 95% by mass, based on the solid content excluding the solvent. .
 本発明における重合性組成物は、全固形分の90質量%以上が、多官能(メタ)アクリレート、一般式(I)で表される化合物、一般式(II-a)で表される化合物および一般式(II-b)で表される化合物で構成されることが好ましい。 In the polymerizable composition of the present invention, 90% by mass or more of the total solid content is a polyfunctional (meth) acrylate, a compound represented by the general formula (I), a compound represented by the general formula (II-a), and It is preferably composed of a compound represented by the general formula (II-b).
(重合開始剤)
 本発明における有機層は、通常、重合性組成物を塗布硬化させて得られる。本発明では、前記重合性組成物に熱または各種のエネルギー線を照射して重合、架橋させることにより高分子を主成分とする有機層を形成する。エネルギー線の例としては紫外線、可視光線、赤外線、電子線、エックス線、ガンマ線等が挙げられる。このとき、熱で重合させる場合は熱重合開始剤を、紫外線で重合させる場合は光重合開始剤を、可視光線で重合させる場合は光重合開始剤と増感剤を用いる。以上の中では、光重合開始剤を含有する重合性化合物を紫外線で重合、架橋することが好ましい。
 光重合開始剤を用いる場合、その含量は、重合性化合物の合計量の0.1モル%以上であることが好ましく、0.5~2モル%であることがより好ましい。このような組成とすることにより、活性成分生成反応を経由する重合反応を適切に制御することができる。光重合開始剤の例としてはチバ・スペシャルティー・ケミカルズ社から市販されているイルガキュア(Irgacure)シリーズ(例えば、イルガキュア651、イルガキュア754、イルガキュア184、イルガキュア2959、イルガキュア907、イルガキュア369、イルガキュア379、イルガキュア819など)、ダロキュア(Darocure)シリーズ(例えば、ダロキュアTPO、ダロキュア1173など)、クオンタキュア(Quantacure)PDO、ランベルティ(Lamberti)社から市販されているエザキュア(Esacure)シリーズ(例えば、エザキュアTZM、エザキュアTZTなど)等が挙げられる。
(Polymerization initiator)
The organic layer in the present invention is usually obtained by coating and curing a polymerizable composition. In the present invention, an organic layer mainly composed of a polymer is formed by irradiating the polymerizable composition with heat or various energy rays for polymerization and crosslinking. Examples of energy rays include ultraviolet rays, visible rays, infrared rays, electron beams, X-rays, and gamma rays. At this time, a thermal polymerization initiator is used for polymerization with heat, a photopolymerization initiator is used for polymerization with ultraviolet light, and a photopolymerization initiator and a sensitizer are used for polymerization with visible light. In the above, it is preferable to superpose | polymerize and bridge | crosslink the polymeric compound containing a photoinitiator with an ultraviolet-ray.
When a photopolymerization initiator is used, its content is preferably 0.1 mol% or more, more preferably 0.5 to 2 mol% of the total amount of the polymerizable compounds. By setting it as such a composition, the polymerization reaction via an active component production | generation reaction can be controlled appropriately. Examples of the photopolymerization initiator include Irgacure series (for example, Irgacure 651, Irgacure 754, Irgacure 184, Irgacure 2959, Irgacure 907, Irgacure 369, Irgacure 379, Irgacure, commercially available from Ciba Specialty Chemicals. 819), Darocure series (for example, Darocur TPO, Darocur 1173, etc.), Quantacure PDO, Esacure series (for example, Ezacure TZM, Ezacure, commercially available from Lamberti) TZT etc.).
(有機層の形成方法)
 重合性組成物を層状にする方法としては、通常、基材フィルムまたは無機層等の支持体の上に、重合性組成物を適用して形成する。適用方法としては、ディップコート法、エアーナイフコート法、カーテンコート法、ローラーコート法、ワイヤーバーコート法、グラビアコート法、スライドコート法、或いは、米国特許第2681294号明細書に記載のホッパ-を使用するエクストル-ジョンコート法が例示され、この中でも塗布による方法が好ましく採用できる。
 照射する光は、通常、高圧水銀灯もしくは低圧水銀灯による紫外線である。照射エネルギーは0.1J/cm2以上が好ましく、0.5J/cm2以上がより好ましい。重合性化合物として、(メタ)アクリレート系化合物を採用する場合、空気中の酸素によって重合阻害を受けるため、重合時の酸素濃度もしくは酸素分圧を低くすることが好ましい。窒素置換法によって重合時の酸素濃度を低下させる場合、酸素濃度は2%以下が好ましく、0.5%以下がより好ましい。減圧法により重合時の酸素分圧を低下させる場合、全圧が1000Pa以下であることが好ましく、100Pa以下であることがより好ましい。また、100Pa以下の減圧条件下で0.5J/cm2以上のエネルギーを照射して紫外線重合を行うのが特に好ましい。
(Formation method of organic layer)
As a method for layering the polymerizable composition, it is usually formed by applying the polymerizable composition on a support such as a base film or an inorganic layer. Application methods include dip coating, air knife coating, curtain coating, roller coating, wire bar coating, gravure coating, slide coating, or the hopper described in US Pat. No. 2,681,294. Extrusion coating methods used are exemplified, and among these, the coating method can be preferably employed.
The light to irradiate is usually ultraviolet light from a high pressure mercury lamp or a low pressure mercury lamp. The radiation energy is preferably 0.1 J / cm 2 or more, 0.5 J / cm 2 or more is more preferable. When a (meth) acrylate compound is employed as the polymerizable compound, the polymerization is inhibited by oxygen in the air, and therefore it is preferable to reduce the oxygen concentration or oxygen partial pressure during polymerization. When the oxygen concentration during polymerization is lowered by the nitrogen substitution method, the oxygen concentration is preferably 2% or less, and more preferably 0.5% or less. When the oxygen partial pressure during polymerization is reduced by the decompression method, the total pressure is preferably 1000 Pa or less, and more preferably 100 Pa or less. Further, it is particularly preferable to perform ultraviolet polymerization by irradiating energy of 0.5 J / cm 2 or more under a reduced pressure condition of 100 Pa or less.
 本発明における有機層は、平滑で、膜硬度が高いことが好ましい。有機層の平滑性は1μm角の平均粗さ(Ra値)として1nm未満であることが好ましく、0.5nm未満であることがより好ましい。モノマーの重合率は85%以上であることが好ましく、88%以上であることがより好ましく、90%以上であることがさらに好ましく、92%以上であることが特に好ましい。ここでいう重合率とはモノマー混合物中の全ての重合性基(例えば、アクリロイル基およびメタクリロイル基)のうち、反応した重合性基の比率を意味する。重合率は赤外線吸収法によって定量することができる。 The organic layer in the present invention is preferably smooth and has high film hardness. The smoothness of the organic layer is preferably less than 1 nm as average roughness (Ra value) of 1 μm square, and more preferably less than 0.5 nm. The polymerization rate of the monomer is preferably 85% or more, more preferably 88% or more, further preferably 90% or more, and particularly preferably 92% or more. The polymerization rate here means the ratio of the reacted polymerizable group among all the polymerizable groups (for example, acryloyl group and methacryloyl group) in the monomer mixture. The polymerization rate can be quantified by an infrared absorption method.
 有機層の膜厚については特に限定はないが、薄すぎると膜厚の均一性を得ることが困難になるし、厚すぎると外力によりクラックを発生してバリア性が低下する。かかる観点から、有機層の厚みは50nm~2000nmが好ましく、200nm~1500nmがより好ましい。
 有機層の表面にはパーティクル等の異物、突起が無いことが要求される。このため、有機層の成膜はクリーンルーム内で行われることが好ましい。クリーン度はクラス10000以下が好ましく、クラス1000以下がより好ましい。
 有機層の硬度は高いほうが好ましい。有機層の硬度が高いと、無機層が平滑に成膜されその結果としてバリア能が向上することがわかっている。有機層の硬度はナノインデンテーション法に基づく微小硬度として表すことができる。有機層の微小硬度は100N/mm以上であることが好ましく、150N/mm以上であることがより好ましい。
The film thickness of the organic layer is not particularly limited, but if it is too thin, it is difficult to obtain film thickness uniformity, and if it is too thick, cracks are generated due to external force and the barrier property is lowered. From this viewpoint, the thickness of the organic layer is preferably 50 nm to 2000 nm, and more preferably 200 nm to 1500 nm.
The surface of the organic layer is required to be free of foreign matters such as particles and protrusions. For this reason, it is preferable that the organic layer is formed in a clean room. The degree of cleanness is preferably class 10000 or less, more preferably class 1000 or less.
It is preferable that the organic layer has a high hardness. It has been found that when the hardness of the organic layer is high, the inorganic layer is formed smoothly and as a result, the barrier ability is improved. The hardness of the organic layer can be expressed as a microhardness based on the nanoindentation method. The microhardness of the organic layer is preferably 100 N / mm or more, and more preferably 150 N / mm or more.
(無機層)
 無機層は、通常、金属化合物からなる薄膜の層である。無機層の形成方法は、目的の薄膜を形成できる方法であればいかなる方法でも用いることができる。例えば、蒸着法、スパッタリング法、イオンプレーティング法等の物理的気相成長法(PVD)、種々の化学的気相成長法(CVD)、めっきやゾルゲル法等の液相成長法がある。本発明では、スパッタリング法で作成した場合であっても、高いバリア性を維持することができる。無機層に含まれる成分は、上記性能を満たすものであれば特に限定されないが、例えば、金属酸化物、金属窒化物、金属酸窒化物または金属炭化物であり、Si、Al、In、Sn、Zn、Ti、Cu、Ce、またはTa等から選ばれる1種以上の金属を含む酸化物、窒化物、炭化物もしくは酸化窒化物、酸化窒化炭化物などを好ましく用いることができる。これらの中でも、Si、Al、In、Sn、Zn、Tiから選ばれる金属の酸化物、窒化物もしくは酸化窒化物が好ましく、特にSiまたはAlの金属酸化物、窒化物もしくは酸化窒化物が好ましい。これらは、副次的な成分として他の元素を含有してもよい。本発明では、無機層の材料として、金属酸化物を用い、プラズマプロセスにより成膜した場合であっても、高いバリア性を有するバリア性積層体が得られる点で、極めて有意である。本発明では特に、窒化珪素、酸化ケイ素もしくは窒素化珪素、酸化ケイ素、炭化珪素の混合酸化物が好ましい。これらの無機物を採用することにより、有機層と無機層の密着性がより向上する。さらに好ましくは、窒化珪素であることにより、緻密な膜が得られ高いバリア性を有するバリア積層体が得られる点で望ましい。
 本発明により形成される無機層の平滑性は、1μm角の平均粗さ(Ra値)として1nm未満であることが好ましく、0.5nm以下がより好ましい。このため、無機層の成膜はクリーンルーム内で行われることが好ましい。クリーン度はクラス10000以下が好ましく、クラス1000以下がより好ましい。
(Inorganic layer)
The inorganic layer is usually a thin film layer made of a metal compound. As a method for forming the inorganic layer, any method can be used as long as it can form a target thin film. For example, there are a physical vapor deposition method (PVD) such as a vapor deposition method, a sputtering method, and an ion plating method, various chemical vapor deposition methods (CVD), and a liquid phase growth method such as plating and a sol-gel method. In the present invention, high barrier properties can be maintained even when the sputtering method is used. The component contained in the inorganic layer is not particularly limited as long as it satisfies the above performance. For example, it is a metal oxide, a metal nitride, a metal oxynitride, or a metal carbide, such as Si, Al, In, Sn, Zn. An oxide, nitride, carbide or oxynitride, oxynitride carbide, or the like containing one or more metals selected from Ti, Cu, Ce, Ta, or the like can be preferably used. Among these, a metal oxide, nitride, or oxynitride selected from Si, Al, In, Sn, Zn, and Ti is preferable, and a metal oxide, nitride, or oxynitride of Si or Al is particularly preferable. These may contain other elements as secondary components. In the present invention, even when a metal oxide is used as a material for the inorganic layer and a film is formed by a plasma process, it is extremely significant in that a barrier laminate having a high barrier property can be obtained. In the present invention, a mixed oxide of silicon nitride, silicon oxide, silicon nitride, silicon oxide, or silicon carbide is particularly preferable. By adopting these inorganic substances, the adhesion between the organic layer and the inorganic layer is further improved. More preferably, silicon nitride is desirable in that a dense film can be obtained and a barrier laminate having high barrier properties can be obtained.
The smoothness of the inorganic layer formed according to the present invention is preferably less than 1 nm, more preferably 0.5 nm or less, as an average roughness (Ra value) of 1 μm square. For this reason, it is preferable that the inorganic layer be formed in a clean room. The degree of cleanness is preferably class 10000 or less, more preferably class 1000 or less.
 無機層の厚みに関しては特に限定されないが、1層に付き、通常、5~500nmの範囲内であり、好ましくは20~200nmである。無機層は2層以上積層してもよい。本発明では、無機層を2層以上設ける態様において、層間の密着性が向上し、かつ、電子デバイスに用いたときの故障率を低減することができる。また、2層以上設ける場合、各層が同じ組成であっても異なる組成であってもよい。また、2層以上積層する場合は、各々の無機層が上記の好ましい範囲内にあるように設計することが望ましい。また、上述したとおり、米国公開特許2004-46497号明細書に開示してあるように有機層との界面が明確で無く、組成が膜厚方向で連続的に変化する層を含んでいてもよい。 The thickness of the inorganic layer is not particularly limited, but it is usually in the range of 5 to 500 nm, preferably 20 to 200 nm per layer. Two or more inorganic layers may be laminated. In the present invention, in an embodiment in which two or more inorganic layers are provided, the adhesion between the layers can be improved, and the failure rate when used in an electronic device can be reduced. When two or more layers are provided, each layer may have the same composition or a different composition. Moreover, when laminating | stacking two or more layers, it is desirable to design so that each inorganic layer may exist in said preferable range. Further, as described above, as disclosed in US Patent Publication No. 2004-46497, the interface with the organic layer is not clear, and the composition may include a layer whose composition changes continuously in the film thickness direction. .
(有機層と無機層の積層)
 有機層と無機層の積層は、所望の層構成に応じて有機層と無機層を順次繰り返し成膜することにより行うことができる。無機層を、スパッタリング法、真空蒸着法、イオンプレーティング法、プラズマCVD法などの真空成膜法で形成する場合、有機層も前記フラッシュ蒸着法のような真空成膜法で形成することが好ましい。特に、本発明は、少なくとも2層の有機層と少なくとも2層の無機層を交互に積層した場合に、高いバリア性を発揮することができる。さらに、2層の無機層に挟まれた有機層が2層以上含まれる構成、例えば、無機層、有機層、無機層、有機層、無機層が該順に互いに隣接している構成では、さらに高いバリア性を発揮することができる。特に、本発明では、重合性芳香族シランカップリング剤由来の有機層の表面に無機層を設けることにより、該有機層と該無機層の密着性が向上し、より好ましい。
(Lamination of organic and inorganic layers)
The organic layer and the inorganic layer can be stacked by sequentially repeating the organic layer and the inorganic layer according to a desired layer configuration. When the inorganic layer is formed by a vacuum film formation method such as sputtering, vacuum vapor deposition, ion plating, or plasma CVD, the organic layer is also preferably formed by a vacuum film formation method such as the flash vapor deposition method. . In particular, the present invention can exhibit high barrier properties when at least two organic layers and at least two inorganic layers are alternately laminated. Furthermore, in a configuration in which two or more organic layers sandwiched between two inorganic layers are included, for example, in a configuration in which an inorganic layer, an organic layer, an inorganic layer, an organic layer, and an inorganic layer are adjacent to each other in that order, the higher Barrier property can be exhibited. In particular, in the present invention, by providing an inorganic layer on the surface of the organic layer derived from the polymerizable aromatic silane coupling agent, the adhesion between the organic layer and the inorganic layer is improved, which is more preferable.
(機能層)
 本発明のデバイスにおいては、バリア性積層体上、もしくはその他の位置に、機能層を有していても良い。機能層については、特開2006-289627号公報の段落番号0036~0038に詳しく記載されている。これら以外の機能層の例としてはマット剤層、保護層、帯電防止層、平滑化層、密着改良層、遮光層、反射防止層、ハードコート層、応力緩和層、防曇層、防汚層、被印刷層、易接着層等が挙げられる。
(Functional layer)
The device of the present invention may have a functional layer on the barrier laminate or at other positions. The functional layer is described in detail in paragraph numbers 0036 to 0038 of JP-A-2006-289627. Examples of functional layers other than these include matting agent layers, protective layers, antistatic layers, smoothing layers, adhesion improving layers, light shielding layers, antireflection layers, hard coat layers, stress relaxation layers, antifogging layers, and antifouling layers. , Printing layer, easy adhesion layer and the like.
バリア性積層体の用途
 本発明のバリア性積層体は、通常、支持体の上に設けるが、この支持体を選択することによって、様々な用途に用いることができる。支持体には、基材フィルムのほか、各種のデバイス、光学部材等が含まれる。具体的には、本発明のバリア性積層体はガスバリアフィルムのバリア層として用いることができる。また、本発明のバリア性積層体およびガスバリアフィルムは、バリア性を要求するデバイスの封止に用いることができる。本発明のバリア性積層体およびガスバリアフィルムは、光学部材にも適用することができる。以下、これらについて詳細に説明する。
Applications of Barrier Laminate The barrier laminate of the present invention is usually provided on a support, and can be used for various applications by selecting this support. In addition to the base film, the support includes various devices, optical members, and the like. Specifically, the barrier laminate of the present invention can be used as a barrier layer of a gas barrier film. The barrier laminate and gas barrier film of the present invention can be used for sealing devices that require barrier properties. The barrier laminate and gas barrier film of the present invention can also be applied to optical members. Hereinafter, these will be described in detail.
<ガスバリアフィルム>
 ガスバリアフィルムは、基材フィルムと、該基材フィルム上に形成されたバリア性積層体とを有する。図3は、本発明のガスバリアフィルムの構成の一例を示したものであって、基材フィルム5の上に、有機層と無機層が交互に設けられた構成を示している。具体的には、基材フィルム5の側から順に、有機層6、無機層1、有機層2、無機層3の順に、それぞれの面が互いに隣接するように設けられている。有機層6は、アンダーコート層とも呼ばれ、基材フィルム5と無機層13の密着性を向上させている。有機層6は、本発明における重合性組成物を重合させてなるポリマーを含む有機層であってもよいし、他の有機層であってもよい。本発明では、基材フィルム5に隣接する有機層に、本発明における重合性組成物を重合させてなるポリマーを含む有機層を採用することによって、基材フィルム5と有機層の密着性を向上させることができる。特に、基材フィルムがPET、PENの場合に効果的である。
 ガスバリアフィルムにおいて、本発明のバリア性積層体は、基材フィルムの片面にのみ設けられていてもよいし、両面に設けられていてもよい。本発明のバリア性積層体は、基材フィルム側から無機層、有機層の順に積層していてもよいし、有機層、無機層の順に積層していてもよい。本発明のバリア性積層体の最上層は無機層でも有機層でもよい。
 ガスバリアフィルムはバリア性積層体、基材フィルム以外の構成成分(例えば、易接着層等の機能性層)を有しても良い。機能性層はバリア性積層体の上、バリア性積層体と基材フィルムの間、基材フィルム上のバリア性積層体が設置されていない側(裏面)のいずれに設置してもよい。
<Gas barrier film>
The gas barrier film has a base film and a barrier laminate formed on the base film. FIG. 3 shows an example of the configuration of the gas barrier film of the present invention, and shows a configuration in which organic layers and inorganic layers are alternately provided on the base film 5. Specifically, in order from the base film 5 side, the organic layer 6, the inorganic layer 1, the organic layer 2, and the inorganic layer 3 are provided so that their surfaces are adjacent to each other. The organic layer 6 is also called an undercoat layer and improves the adhesion between the base film 5 and the inorganic layer 13. The organic layer 6 may be an organic layer containing a polymer obtained by polymerizing the polymerizable composition in the present invention, or may be another organic layer. In this invention, the adhesiveness of the base film 5 and an organic layer is improved by employ | adopting the organic layer containing the polymer which polymerizes the polymeric composition in this invention for the organic layer adjacent to the base film 5. Can be made. In particular, it is effective when the base film is PET or PEN.
In the gas barrier film, the barrier laminate of the present invention may be provided only on one side of the base film, or may be provided on both sides. The barrier laminate of the present invention may be laminated in the order of the inorganic layer and the organic layer from the base film side, or may be laminated in the order of the organic layer and the inorganic layer. The uppermost layer of the barrier laminate of the present invention may be an inorganic layer or an organic layer.
A gas barrier film may have structural components (for example, functional layers, such as an easily bonding layer) other than a barriering laminated body and a base film. The functional layer may be placed on the barrier laminate, between the barrier laminate and the base film, or on the side where the barrier laminate on the base film is not placed (back side).
(プラスチックフィルム)
 本発明におけるガスバリアフィルムは、通常、基材フィルムとして、プラスチックフィルムを用いる。用いられるプラスチックフィルムは、有機層、無機層等の積層体を保持できるフィルムであれば材質、厚み等に特に制限はなく、使用目的等に応じて適宜選択することができる。前記プラスチックフィルムとしては、具体的には、金属支持体(アルミニウム、銅、ステンレス等)ポリエステル樹脂、メタクリル樹脂、メタクリル酸-マレイン酸共重合体、ポリスチレン樹脂、透明フッ素樹脂、ポリイミド、フッ素化ポリイミド樹脂、ポリアミド樹脂、ポリアミドイミド樹脂、ポリエーテルイミド樹脂、セルロースアシレート樹脂、ポリウレタン樹脂、ポリエーテルエーテルケトン樹脂、ポリカーボネート樹脂、脂環式ポリオレフィン樹脂、ポリアリレート樹脂、ポリエーテルスルホン樹脂、ポリスルホン樹脂、シクロオレフィルンコポリマー、フルオレン環変性ポリカーボネート樹脂、脂環変性ポリカーボネート樹脂、フルオレン環変性ポリエステル樹脂、アクリロイル化合物などの熱可塑性樹脂が挙げられる。
(Plastic film)
The gas barrier film in the present invention usually uses a plastic film as the base film. The plastic film to be used is not particularly limited in material, thickness and the like as long as it can hold a laminate such as an organic layer and an inorganic layer, and can be appropriately selected according to the purpose of use. Specific examples of the plastic film include metal support (aluminum, copper, stainless steel, etc.) polyester resin, methacrylic resin, methacrylic acid-maleic acid copolymer, polystyrene resin, transparent fluororesin, polyimide, and fluorinated polyimide resin. , Polyamide resin, polyamideimide resin, polyetherimide resin, cellulose acylate resin, polyurethane resin, polyetheretherketone resin, polycarbonate resin, alicyclic polyolefin resin, polyarylate resin, polyethersulfone resin, polysulfone resin, cycloolefin Examples thereof include thermoplastic resins such as filn copolymers, fluorene ring-modified polycarbonate resins, alicyclic ring-modified polycarbonate resins, fluorene ring-modified polyester resins, and acryloyl compounds.
 本発明のガスバリアフィルムを後述する有機EL素子等のデバイスの基板として使用する場合は、プラスチックフィルムは耐熱性を有する素材からなることが好ましい。具体的には、ガラス転移温度(Tg)が100℃以上および/または線熱膨張係数が40ppm/℃以下で耐熱性の高い透明な素材からなることが好ましい。Tgや線膨張係数は、添加剤などによって調整することができる。このような熱可塑性樹脂として、例えば、ポリエチレンナフタレート(PEN:120℃)、ポリカーボネート(PC:140℃)、脂環式ポリオレフィン(例えば日本ゼオン(株)製 ゼオノア1600:160℃)、ポリアリレート(PAr:210℃)、ポリエーテルスルホン(PES:220℃)、ポリスルホン(PSF:190℃)、シクロオレフィンコポリマー(COC:特開2001-150584号公報の化合物:162℃)、ポリイミド(例えば三菱ガス化学(株)ネオプリム:260℃)、フルオレン環変性ポリカーボネート(BCF-PC:特開2000-227603号公報の化合物:225℃)、脂環変性ポリカーボネート(IP-PC:特開2000-227603号公報の化合物:205℃)、アクリロイル化合物(特開2002-80616号公報の化合物:300℃以上)が挙げられる(括弧内はTgを示す)。特に、透明性を求める場合には脂環式ポレオレフィン等を使用するのが好ましい。 When the gas barrier film of the present invention is used as a substrate of a device such as an organic EL element described later, the plastic film is preferably made of a material having heat resistance. Specifically, the glass transition temperature (Tg) is preferably 100 ° C. or higher and / or the linear thermal expansion coefficient is 40 ppm / ° C. or lower and is preferably made of a transparent material having high heat resistance. Tg and a linear expansion coefficient can be adjusted with an additive. Examples of such thermoplastic resins include polyethylene naphthalate (PEN: 120 ° C.), polycarbonate (PC: 140 ° C.), alicyclic polyolefin (for example, ZEONOR 1600: 160 ° C. manufactured by Nippon Zeon Co., Ltd.), polyarylate ( PAr: 210 ° C., polyethersulfone (PES: 220 ° C.), polysulfone (PSF: 190 ° C.), cycloolefin copolymer (COC: compound of JP 2001-150584 A: 162 ° C.), polyimide (for example, Mitsubishi Gas Chemical) Neoprim: 260 ° C.), fluorene ring-modified polycarbonate (BCF-PC: compound of JP 2000-227603 A: 225 ° C.), alicyclic modified polycarbonate (IP-PC: compound of JP 2000-227603 A) : 205 ° C), acryloyl compound (Compound disclosed in Japanese Patent Application Laid-Open No. 2002-80616: 300 ° C. or higher) (Tg is shown in parentheses). In particular, when transparency is required, it is preferable to use an alicyclic polyolefin or the like.
 本発明のガスバリアフィルムを偏光板と組み合わせて使用する場合、ガスバリアフィルムのバリア性積層体がセルの内側に向くようにし、最も内側に(素子に隣接して)配置することが好ましい。このとき偏光板よりセルの内側にガスバリアフィルムが配置されることになるため、ガスバリアフィルムのレターデーション値が重要になる。このような態様でのガスバリアフィルムの使用形態は、レターデーション値が10nm以下の基材フィルムを用いたガスバリアフィルムと円偏光板(1/4波長板+(1/2波長板)+直線偏光板)を積層して使用するか、あるいは1/4波長板として使用可能な、レターデーション値が100nm~180nmの基材フィルムを用いたガスバリアフィルムに直線偏光板を組み合わせて用いるのが好ましい。 When the gas barrier film of the present invention is used in combination with a polarizing plate, it is preferable that the gas barrier film is disposed so that the barrier laminate of the gas barrier film faces the inside of the cell and is located on the innermost side (adjacent to the element). At this time, since the gas barrier film is disposed inside the cell from the polarizing plate, the retardation value of the gas barrier film is important. The usage form of the gas barrier film in such an embodiment includes a gas barrier film using a base film having a retardation value of 10 nm or less and a circularly polarizing plate (1/4 wavelength plate + (1/2 wavelength plate) + linearly polarizing plate. It is preferable to use a linear polarizing plate in combination with a gas barrier film using a base film having a retardation value of 100 nm to 180 nm, which can be used as a quarter wavelength plate.
 レターデーションが10nm以下の基材フィルムとしてはセルローストリアセテート(富士フイルム(株):富士タック)、ポリカーボネート(帝人化成(株):ピュアエース、(株)カネカ:エルメック)、シクロオレフィンポリマー(JSR(株):アートン、日本ゼオン(株):ゼオノア)、シクロオレフィンコポリマー(三井化学(株):アペル(ペレット)、ポリプラスチック(株):トパス(ペレット))ポリアリレート(ユニチカ(株):U100(ペレット))、透明ポリイミド(三菱ガス化学(株):ネオプリム)等を挙げることができる。
 また1/4波長板としては、上記のフィルムを適宜延伸することで所望のレターデーション値に調整したフィルムを用いることができる。
As a base film having a retardation of 10 nm or less, cellulose triacetate (Fuji Film Co., Ltd .: Fuji Tac), polycarbonate (Teijin Chemicals Co., Ltd .: Pure Ace, Kaneka: Elmec Co., Ltd.), cycloolefin polymer (JSR Co., Ltd.) ): Arton, Nippon Zeon Co., Ltd .: Zeonoa), cycloolefin copolymer (Mitsui Chemicals Co., Ltd .: Appel (pellet), Polyplastic Co., Ltd .: Topas (pellet)) Polyarylate (Unitika Co., Ltd.): U100 (pellet) )), Transparent polyimide (Mitsubishi Gas Chemical Co., Ltd .: Neoprim) and the like.
Moreover, as a quarter wavelength plate, the film adjusted to the desired retardation value by extending | stretching said film suitably can be used.
 本発明のガスバリアフィルムは有機EL素子等のデバイスとして利用されることから、プラスチックフィルムは透明であること、すなわち、光線透過率が通常80%以上、好ましくは85%以上、さらに好ましくは90%以上である。光線透過率は、JIS-K7105に記載された方法、すなわち積分球式光線透過率測定装置を用いて全光線透過率および散乱光量を測定し、全光線透過率から拡散透過率を引いて算出することができる。
 本発明のガスバリアフィルムをディスプレイ用途に用いる場合であっても、観察側に設置しない場合などは必ずしも透明性が要求されない。したがって、このような場合は、プラスチックフィルムとして不透明な材料を用いることもできる。不透明な材料としては、例えば、ポリイミド、ポリアクリロニトリル、公知の液晶ポリマーなどが挙げられる。
 本発明のガスバリアフィルムに用いられるプラスチックフィルムの厚みは、用途によって適宜選択されるので特に制限がないが、典型的には1~800μmであり、好ましくは10~200μmである。これらのプラスチックフィルムは、透明導電層、プライマー層等の機能層を有していても良い。機能層については、特開2006-289627号公報の段落番号0036~0038に詳しく記載されている。これら以外の機能層の例としてはマット剤層、保護層、帯電防止層、平滑化層、密着改良層、遮光層、反射防止層、ハードコート層、応力緩和層、防曇層、防汚層、被印刷層、易接着層等が挙げられる。
Since the gas barrier film of the present invention is used as a device such as an organic EL element, the plastic film is transparent, that is, the light transmittance is usually 80% or more, preferably 85% or more, more preferably 90% or more. It is. The light transmittance is calculated by measuring the total light transmittance and the amount of scattered light using the method described in JIS-K7105, that is, an integrating sphere light transmittance measuring device, and subtracting the diffuse transmittance from the total light transmittance. be able to.
Even when the gas barrier film of the present invention is used for display, transparency is not necessarily required when it is not installed on the observation side. Therefore, in such a case, an opaque material can be used as the plastic film. Examples of the opaque material include polyimide, polyacrylonitrile, and known liquid crystal polymers.
The thickness of the plastic film used in the gas barrier film of the present invention is appropriately selected depending on the application and is not particularly limited, but is typically 1 to 800 μm, preferably 10 to 200 μm. These plastic films may have functional layers such as a transparent conductive layer and a primer layer. The functional layer is described in detail in paragraph numbers 0036 to 0038 of JP-A-2006-289627. Examples of functional layers other than these include matting agent layers, protective layers, antistatic layers, smoothing layers, adhesion improving layers, light shielding layers, antireflection layers, hard coat layers, stress relaxation layers, antifogging layers, and antifouling layers. , Printing layer, easy adhesion layer and the like.
<デバイス>
 本発明のバリア性積層体およびガスバリアフィルムは空気中の化学成分(酸素、水、窒素酸化物、硫黄酸化物、オゾン等)によって性能が劣化するデバイスに好ましく用いることができる。前記デバイスの例としては、例えば、有機EL素子、液晶表示素子、薄膜トランジスタ、タッチパネル、電子ペーパー、太陽電池等)等の電子デバイスを挙げることができ有機EL素子に好ましく用いられる。
<Device>
The barrier laminate and gas barrier film of the present invention can be preferably used for devices whose performance is deteriorated by chemical components in the air (oxygen, water, nitrogen oxide, sulfur oxide, ozone, etc.). Examples of the device include electronic devices such as an organic EL element, a liquid crystal display element, a thin film transistor, a touch panel, electronic paper, and a solar cell, and are preferably used for the organic EL element.
 本発明のバリア性積層体は、また、デバイスの膜封止に用いることができる。すなわち、デバイス自体を支持体として、その表面に本発明のバリア性積層体を設ける方法である。バリア性積層体を設ける前にデバイスを保護層で覆ってもよい。 The barrier laminate of the present invention can also be used for device film sealing. That is, it is a method of providing the barrier laminate of the present invention on the surface of the device itself as a support. The device may be covered with a protective layer before providing the barrier laminate.
 本発明のガスバリアフィルムは、デバイスの基板や固体封止法による封止のためのフィルムとしても用いることができる。固体封止法とはデバイスの上に保護層を形成した後、接着剤層、ガスバリアフィルムを重ねて硬化する方法である。接着剤は特に制限はないが、熱硬化性エポキシ樹脂、光硬化性アクリレート樹脂等が例示される。 The gas barrier film of the present invention can also be used as a device substrate or a film for sealing by a solid sealing method. The solid sealing method is a method in which after forming a protective layer on the device, an adhesive layer and a gas barrier film are stacked and cured. Although there is no restriction | limiting in particular in an adhesive agent, A thermosetting epoxy resin, a photocurable acrylate resin, etc. are illustrated.
 従来のバリア性積層体およびガスバリアフィルムは、これらをデバイスに組み込み、その状態で、80℃以上の温度で加熱したとき、シランカップリング剤由来のアルコールガスを放出し、デバイスにダメージを与えてしまっていた。しかしながら、本発明のバリア性積層体およびガスバリアフィルムは、80℃以上の温度(例えば、80~200℃)で加熱してもアルコールガスを大量に放出しないため、デバイスにダメージを与えることを効果的に抑制できる。 When the conventional barrier laminate and gas barrier film are incorporated in a device and heated at a temperature of 80 ° C. or higher in that state, the alcohol gas derived from the silane coupling agent is released and the device is damaged. It was. However, since the barrier laminate and the gas barrier film of the present invention do not release a large amount of alcohol gas even when heated at a temperature of 80 ° C. or higher (for example, 80 to 200 ° C.), it is effective to damage the device. Can be suppressed.
(有機EL素子)
 ガスバリアフィルム用いた有機EL素子の例は、特開2007-30387号公報に詳しく記載されている。有機EL素子の製造工程には、ITOのエッチング工程後の乾燥工程や湿度の高い条件下での工程があるため、本発明のガスバリアフィルムを用いることは極めて優位である。
(Organic EL device)
Examples of organic EL elements using a gas barrier film are described in detail in JP-A-2007-30387. Since the manufacturing process of the organic EL device includes a drying process after the ITO etching process and a process under high humidity conditions, it is extremely advantageous to use the gas barrier film of the present invention.
(液晶表示素子)
 反射型液晶表示装置は、下から順に、下基板、反射電極、下配向膜、液晶層、上配向膜、透明電極、上基板、λ/4板、そして偏光膜からなる構成を有する。本発明におけるガスバリアフィルムは、前記透明電極基板および上基板として使用することができる。カラー表示の場合には、さらにカラーフィルター層を反射電極と下配向膜との間、または上配向膜と透明電極との間に設けることが好ましい。透過型液晶表示装置は、下から順に、バックライト、偏光板、λ/4板、下透明電極、下配向膜、液晶層、上配向膜、上透明電極、上基板、λ/4板および偏光膜からなる構成を有する。このうち本発明の基板は、前記上透明電極および上基板として使用することができる。カラー表示の場合には、さらにカラーフィルター層を下透明電極と下配向膜との間、または上配向膜と透明電極との間に設けることが好ましい。液晶セルの種類は特に限定されないが、より好ましくはTN型(Twisted Nematic)、STN型(Super Twisted Nematic)またはHAN型(Hybrid Aligned Nematic)、VA型(Vertically Alignment)、ECB型(Electrically Controlled Birefringence)、OCB型(Optically Compensated Bend)、CPA型(Continuous Pinwheel Alignment)、IPS型(In Plane Switching)であることが好ましい。
(Liquid crystal display element)
The reflective liquid crystal display device has a configuration including a lower substrate, a reflective electrode, a lower alignment film, a liquid crystal layer, an upper alignment film, a transparent electrode, an upper substrate, a λ / 4 plate, and a polarizing film in order from the bottom. The gas barrier film in the present invention can be used as the transparent electrode substrate and the upper substrate. In the case of color display, it is preferable to further provide a color filter layer between the reflective electrode and the lower alignment film, or between the upper alignment film and the transparent electrode. The transmissive liquid crystal display device includes a backlight, a polarizing plate, a λ / 4 plate, a lower transparent electrode, a lower alignment film, a liquid crystal layer, an upper alignment film, an upper transparent electrode, an upper substrate, a λ / 4 plate, and a polarization in order from the bottom It has a structure consisting of a film. Of these, the substrate of the present invention can be used as the upper transparent electrode and the upper substrate. In the case of color display, it is preferable to further provide a color filter layer between the lower transparent electrode and the lower alignment film, or between the upper alignment film and the transparent electrode. The type of the liquid crystal cell is not particularly limited, but more preferably TN type (Twisted Nematic), STN type (Super Twisted Nematic), HAN type (Hybrid Aligned Nematic), VA type (Vertically Alignment), ECB type (Electrically Controlled Birefringence) OCB type (Optically Compensated Bend), CPA type (Continuous Pinwheel Alignment), and IPS type (In Plane Switching) are preferable.
(太陽電池)
 本発明のバリア性積層体およびガスバリアフィルムは、太陽電池素子の封止フィルムとしても用いることができる。ここで、本発明のバリア性積層体およびガスバリアフィルムは、接着層が太陽電池素子に近い側となるように封止することが好ましい。太陽電池は、ある程度の熱と湿度に耐えることが要求されるが、本発明のバリア性積層体およびガスバリアフィルムは好適である。本発明のバリア性積層体およびガスバリアフィルムが好ましく用いられる太陽電池素子としては、特に制限はないが、例えば、単結晶シリコン系太陽電池素子、多結晶シリコン系太陽電池素子、シングル接合型、またはタンデム構造型等で構成されるアモルファスシリコン系太陽電池素子、ガリウムヒ素(GaAs)やインジウム燐(InP)等のIII-V族化合物半導体太陽電池素子、カドミウムテルル(CdTe)等のII-VI族化合物半導体太陽電池素子、銅/インジウム/セレン系(いわゆる、CIS系)、銅/インジウム/ガリウム/セレン系(いわゆる、CIGS系)、銅/インジウム/ガリウム/セレン/硫黄系(いわゆる、CIGSS系)等のI-III-VI族化合物半導体太陽電池素子、色素増感型太陽電池素子、有機太陽電池素子等が挙げられる。中でも、本発明においては、上記太陽電池素子が、銅/インジウム/セレン系(いわゆる、CIS系)、銅/インジウム/ガリウム/セレン系(いわゆる、CIGS系)、銅/インジウム/ガリウム/セレン/硫黄系(いわゆる、CIGSS系)等のI-III-VI族化合物半導体太陽電池素子であることが好ましい。
(Solar cell)
The barrier laminate and gas barrier film of the present invention can also be used as a sealing film for solar cell elements. Here, the barrier laminate and the gas barrier film of the present invention are preferably sealed so that the adhesive layer is closer to the solar cell element. The solar cell is required to withstand a certain amount of heat and humidity, but the barrier laminate and the gas barrier film of the present invention are suitable. The solar cell element in which the barrier laminate and the gas barrier film of the present invention are preferably used is not particularly limited, and for example, a single crystal silicon solar cell element, a polycrystalline silicon solar cell element, a single junction type, or a tandem Amorphous silicon solar cell elements composed of structural types, III-V compound semiconductor solar cell elements such as gallium arsenide (GaAs) and indium phosphorus (InP), II-VI group compound semiconductors such as cadmium telluride (CdTe) Solar cell element, copper / indium / selenium system (so-called CIS system), copper / indium / gallium / selenium system (so-called CIGS system), copper / indium / gallium / selenium / sulfur system (so-called CIGS system), etc. Group I-III-VI compound semiconductor solar cell element, dye-sensitized solar cell element, organic solar cell Child, and the like. Among these, in the present invention, the solar cell element is made of a copper / indium / selenium system (so-called CIS system), a copper / indium / gallium / selenium system (so-called CIGS system), copper / indium / gallium / selenium / sulfur. A group I-III-VI compound semiconductor solar cell element such as a system (so-called CIGSS system) is preferable.
(その他)
 その他の適用例としては、特表平10-512104号公報に記載の薄膜トランジスタ、特開平5-127822号公報、特開2002-48913号公報等に記載のタッチパネル、特開2000-98326号公報に記載の電子ペーパー、特開平9-18042号公報に記載の太陽電池等が挙げられる。
 また、ポリエチレンフィルムやポリプロピレンフィルム等の樹脂フィルムと、本発明のバリア性積層体またはガスバリアフィルムを積層して封止用袋として用いることができる。これらの詳細については、特開2005-247409号公報、特開2005-335134号公報等の記載を参酌できる。
(Other)
As other application examples, the thin film transistor described in JP-T-10-512104, the touch panel described in JP-A-5-127822, JP-A-2002-48913, etc., and described in JP-A-2000-98326 Electronic paper, solar cells described in JP-A-9-18042, and the like.
Moreover, resin films, such as a polyethylene film and a polypropylene film, and the barriering laminated body or gas barrier film of this invention can be laminated | stacked, and it can use as a bag for sealing. For details of these, descriptions in JP-A-2005-247409, JP-A-2005-335134, and the like can be referred to.
<光学部材>
 本発明のガスバリアフィルムを用いる光学部材の例としては円偏光板等が挙げられる。
(円偏光板)
 本発明におけるガスバリアフィルムを基板としλ/4板と偏光板とを積層し、円偏光板を作製することができる。この場合、λ/4板の遅相軸と偏光板の吸収軸とが45°になるように積層する。このような偏光板は、長手方向(MD)に対し45°の方向に延伸されているものを用いることが好ましく、例えば、特開2002-865554号公報に記載のものを好適に用いることができる。
<Optical member>
Examples of the optical member using the gas barrier film of the present invention include a circularly polarizing plate.
(Circularly polarizing plate)
A circularly polarizing plate can be produced by laminating a λ / 4 plate and a polarizing plate using the gas barrier film of the present invention as a substrate. In this case, the lamination is performed so that the slow axis of the λ / 4 plate and the absorption axis of the polarizing plate are 45 °. As such a polarizing plate, one that is stretched in a direction of 45 ° with respect to the longitudinal direction (MD) is preferably used. For example, those described in JP-A-2002-865554 can be suitably used. .
 以下に実施例を挙げて本発明をさらに具体的に説明する。以下の実施例に示す材料、使用量、割合、処理内容、処理手順等は、本発明の趣旨を逸脱しない限り、適宜、変更することができる。従って、本発明の範囲は以下に示す具体例に限定されるものではない。 The present invention will be described more specifically with reference to the following examples. The materials, amounts used, ratios, processing details, processing procedures, and the like shown in the following examples can be changed as appropriate without departing from the spirit of the present invention. Therefore, the scope of the present invention is not limited to the specific examples shown below.
(実施例1)
有機層塗布溶液の調整
 下記(メタ)アクリレート、下記シランカップリング剤、および、下記一般式(II-a)または(II-b)に相当する化合物、および、重合開始剤(Lamberti社、Esacure KTO46)からなる組成物の40%メチルエチルケトン(MEK)溶液を調整した。
 下記(メタ)アクリレート、下記シランカップリング剤、および、下記一般式(II-a)または(II-b)に相当する化合物の配合量は、表1に示す割合(重量比)で配合し、これらの合計100重量部に対し、重合開始剤2重量%を配合した。
(Example 1)
Preparation of organic layer coating solution The following (meth) acrylate, the following silane coupling agent, a compound corresponding to the following general formula (II-a) or (II-b), and a polymerization initiator (Lamberti, Esacure KTO46) A 40% methyl ethyl ketone (MEK) solution of the composition consisting of
The following (meth) acrylate, the following silane coupling agent, and the compounding amount of the compound corresponding to the following general formula (II-a) or (II-b) are blended at a ratio (weight ratio) shown in Table 1, 2 weight% of polymerization initiators were mix | blended with respect to these 100 weight part in total.
ガスバリアフィルムの作製
 ポリエチレンナフタレートフィルム(帝人デュポン社製、テオネックスQ65FA、厚さ100μm)上に、上記で調整した有機層塗布溶液を乾燥膜厚が1000nmとなるようにメチルエチルケトンで調整して成膜し、窒素100ppm雰囲気下で紫外線照射量0.5J/cm2で照射して硬化させ、有機層を作製した。その有機層表面に、膜厚が40nmとなるようにSiNをプラズマCVD法で成膜した。さらに、同様の有機層、無機層、有機層を積層し、バリアフィルムを作製した。
 得られたガスバリアフィルムについて、下記手法により水蒸気透過率および密着性を測定した。
Preparation of Gas Barrier Film On the polyethylene naphthalate film (Teijin DuPont, Teonex Q65FA, thickness 100 μm), the organic layer coating solution prepared as described above was prepared with methyl ethyl ketone so that the dry film thickness was 1000 nm. In an atmosphere of 100 ppm nitrogen, it was cured by irradiation with an ultraviolet irradiation amount of 0.5 J / cm 2 to prepare an organic layer. On the surface of the organic layer, SiN was formed by plasma CVD so that the film thickness was 40 nm. Furthermore, the same organic layer, inorganic layer, and organic layer were laminated | stacked, and the barrier film was produced.
About the obtained gas barrier film, the water-vapor-permeation rate and adhesiveness were measured with the following method.
(メタ)アクリレート
Figure JPOXMLDOC01-appb-C000032
(Meth) acrylate
Figure JPOXMLDOC01-appb-C000032
シランカップリング剤
Figure JPOXMLDOC01-appb-C000033
上記式中、RはCH2CHCOOCH2を表す。
 上記シランカップリング剤は、特開2009-67778号公報に記載の方法を参酌して合成した。
Silane coupling agent
Figure JPOXMLDOC01-appb-C000033
In the above formula, R represents CH 2 CHCOOCH 2 .
The silane coupling agent was synthesized in consideration of the method described in JP-A-2009-67778.
一般式(II-a)または(II-b)に相当する化合物
(II-1)連結基の主骨格の構成する原子の数:8
Figure JPOXMLDOC01-appb-C000034
(II-2)連結基の主骨格の構成する原子の数:6
Figure JPOXMLDOC01-appb-C000035
(II-3)
Figure JPOXMLDOC01-appb-C000036
(II-4)
Figure JPOXMLDOC01-appb-C000037
(II-5)
Figure JPOXMLDOC01-appb-C000038
Number of atoms constituting the main skeleton of the compound (II-1) linking group corresponding to the general formula (II-a) or (II-b): 8
Figure JPOXMLDOC01-appb-C000034
(II-2) Number of atoms constituting the main skeleton of the linking group: 6
Figure JPOXMLDOC01-appb-C000035
(II-3)
Figure JPOXMLDOC01-appb-C000036
(II-4)
Figure JPOXMLDOC01-appb-C000037
(II-5)
Figure JPOXMLDOC01-appb-C000038
[バリア性能]
 G.NISATO、P.C.P.BOUTEN、P.J.SLIKKERVEERらSID Conference Record of the International Display Research Conference 1435-1438頁に記載の方法を用いて水蒸気透過率(g/m2/day)を測定した。このときの温度は40℃、相対湿度は90%とした。結果を下記表に示した。
[Barrier performance]
The water vapor transmission rate (g / m 2 / day) was measured using the method described in G. NISATO, PCPBOUTEN, PJSLIKKERVEER et al. SID Conference Record of the International Display Research Conference, pages 1435-1438. The temperature at this time was 40 ° C. and the relative humidity was 90%. The results are shown in the table below.
[密着性の試験]
 ガスバリアフィルムの密着性を評価する目的で、JIS K5400に準拠した碁盤目試験を行なった。上記層構成を有するガスバリアフィルムの表面にそれぞれカッターナイフで膜面に対して90°の切込みを1mm間隔で入れ、1mm間隔の碁盤目を100個作製した。この上に2cm幅のマイラーテープ[日東電工製、ポリエステルテープ(No.31B)]を貼り付け、テープ剥離試験機を使用して貼り付けたテープをはがした。積層フィルム上の100個の碁盤目のうち剥離せずに残存したマスの数(n)をカウントした。結果は、%で示した。
[Adhesion test]
In order to evaluate the adhesion of the gas barrier film, a cross-cut test based on JIS K5400 was performed. The surface of the gas barrier film having the above layer structure was cut by 90 ° with respect to the film surface with a cutter knife at intervals of 1 mm, and 100 grids with intervals of 1 mm were produced. A 2 cm wide Mylar tape [manufactured by Nitto Denko, polyester tape (No. 31B)] was applied thereto, and the tape attached using a tape peeling tester was peeled off. Of the 100 grids on the laminated film, the number of cells remaining without peeling (n) was counted. The results are expressed in%.
Figure JPOXMLDOC01-appb-T000039
Figure JPOXMLDOC01-appb-T000039
 上記試料No.1~4において、無機層を、スパッタ法によりAlOを50nm成膜したものに変え、他は同様に行った。
Figure JPOXMLDOC01-appb-T000040
Sample No. above. In 1 to 4, the inorganic layer was changed to a 50 nm thick AlO film formed by sputtering, and the others were performed in the same manner.
Figure JPOXMLDOC01-appb-T000040
 上記結果から明らかなとおり、無機層の材料を変えても、同様の効果を奏することが分かった。 As is clear from the above results, it was found that the same effect was obtained even if the material of the inorganic layer was changed.
 上記試料No.1~4において、有機層のアクリレートを同量の下記の化合物に変え、他は同様に行った。
(メタ)アクリレート
Figure JPOXMLDOC01-appb-C000041
Sample No. above. In 1-4, the acrylate of the organic layer was changed to the same amount of the following compound, and the others were performed in the same manner.
(Meth) acrylate
Figure JPOXMLDOC01-appb-C000041
Figure JPOXMLDOC01-appb-T000042
Figure JPOXMLDOC01-appb-T000042
 上記結果から明らかなとおり、有機層の材料を変えても、同様の効果を奏することが分かった。 As is clear from the above results, it was found that the same effect was obtained even if the material of the organic layer was changed.
 上記試料No.3において、一般式(II-a)または(II-b)に相当する化合物を、同量のリン酸モノマー(KAYAMER PM-21、日本化薬製)に変え、他は同様に行ってガスバリアフィルムを作成した。85℃、85%の雰囲気下に1000時間置き、密着性の評価を実施した。 Sample No. above 3, the compound corresponding to the general formula (II-a) or (II-b) was changed to the same amount of phosphoric acid monomer (KAYAMER PM-21, manufactured by Nippon Kayaku Co., Ltd.). It was created. The adhesiveness was evaluated by placing in an atmosphere of 85 ° C. and 85% for 1000 hours.
Figure JPOXMLDOC01-appb-T000043
Figure JPOXMLDOC01-appb-T000043
 リン酸モノマーを用いたサンプルは、湿熱後に密着性が劣化する結果となり、本発明においては、湿熱後の密着性が改善されていた。 The sample using the phosphoric acid monomer deteriorated the adhesion after wet heat, and in the present invention, the adhesion after wet heat was improved.
(実施例2)
有機層塗布液の調整
 実施例1と同様にして、但し、下記表に従って有機層塗布液を調整した。比較例で用いたシランカップリング剤KBMは、(信越化学製、KBM5103)である。
(Example 2)
Preparation of organic layer coating solution In the same manner as in Example 1, except that the organic layer coating solution was prepared according to the following table. The silane coupling agent KBM used in the comparative example is (manufactured by Shin-Etsu Chemical, KBM5103).
ガスバリアフィルムの作製
 ポリエチレンナフタレートフィルム(帝人デュポン社製、テオネックスQ65FA、厚さ100μm)上に、膜厚が40nmとなるようにSiNをプラズマCVD法で成膜し、無機層を形成した。無機層の上に、上記で調整した有機層塗布溶液を乾燥膜厚が1000nmとなるようにメチルエチルケトンで調整して成膜し、窒素100ppm雰囲気下で紫外線照射量0.5J/cm2で照射して硬化させ、有機層を作製した。その有機層表面に、膜厚が40nmとなるようにSiNをプラズマCVD法で成膜して無機層を形成した。得られたガスバリアフィルムは、無機層と無機層の間に有機層が挟まれた構成となる。
Preparation of Gas Barrier Film On a polyethylene naphthalate film (manufactured by Teijin DuPont, Teonex Q65FA, thickness 100 μm), SiN was formed by plasma CVD so as to have a film thickness of 40 nm, thereby forming an inorganic layer. On the inorganic layer, the organic layer coating solution adjusted as described above was formed with methyl ethyl ketone so that the dry film thickness was 1000 nm, and irradiated with an ultraviolet ray irradiation amount of 0.5 J / cm 2 in an atmosphere of 100 ppm nitrogen. And cured to produce an organic layer. On the surface of the organic layer, SiN was formed by a plasma CVD method so as to have a film thickness of 40 nm to form an inorganic layer. The obtained gas barrier film has a configuration in which an organic layer is sandwiched between an inorganic layer and an inorganic layer.
[耐熱性試験]
 ガスバリアフィルムの耐熱性を評価する目的で、200℃の恒温槽に上記ガスバリアフィルムを入れて、1時間保持した。10cm□を観察し、無機層と無機層に挟まれた有機層中でのガス発生による膨れ部の有無を評価した。膨れ部なしのものは、○で表し、膨れ部ありのものは×で表した。揮発ガスを多く含むシランカップリング剤KBM-5103(信越化学)を用いた場合を比較例とした。
[Heat resistance test]
For the purpose of evaluating the heat resistance of the gas barrier film, the gas barrier film was placed in a thermostat at 200 ° C. and held for 1 hour. 10 cm square was observed, and the presence or absence of a swollen portion due to gas generation in the organic layer sandwiched between the inorganic layer and the inorganic layer was evaluated. The thing without a swelling part was represented by (circle), and the thing with a swelling part was represented by x. A case where a silane coupling agent KBM-5103 (Shin-Etsu Chemical Co., Ltd.) containing a large amount of volatile gas was used was taken as a comparative example.
[密着性の試験]
 実施例1と同様にして、密着性を評価した。
[Adhesion test]
The adhesion was evaluated in the same manner as in Example 1.
Figure JPOXMLDOC01-appb-T000044
Figure JPOXMLDOC01-appb-T000044
 上記結果から明らかなとおり、本発明の化合物は、バリア性および密着性に優れていることが分かった。 As is clear from the above results, the compound of the present invention was found to be excellent in barrier properties and adhesion.
有機EL発光素子での評価
 上記で得られたガスバリアフィルムを用いて、有機EL素子を作成した。まず、ITO膜(抵抗:30Ω)を上記ガスバリアフィルムに上にスパッタで形成した。この基板(陽極)上に真空蒸着法にて以下の化合物層を順次蒸着した。
(第1正孔輸送層)
銅フタロシアニン:膜厚10nm
(第2正孔輸送層)
N,N’-ジフェニル-N,N’-ジナフチルベンジジン:膜厚40nm
(発光層兼電子輸送層)
トリス(8-ヒドロキシキノリナト)アルミニウム:膜厚60nm
(電子注入層)
フッ化リチウム:膜厚1nm
 この上に、金属アルミニウムを100nm蒸着して陰極とし、その上に厚さ3μm窒化珪素膜を平行平板CVD法によって付け、有機EL素子を作成した。
 次に、熱硬化型接着剤(エポテック310、ダイゾーニチモリ(株))を用いて、作成した有機EL素子上と、上記で作製したガスバリアフィルムを、バリア性積層体が有機EL素子の側となるように貼り合せ、65℃で3時間加熱して接着剤を硬化させた。このようにして封止された有機EL素子を計10素子作製した。
 この結果、比較例のガスバリアフィルムを用いた場合、ITO膜基板として用いたガスバリアフィルムがダメージを受けてしまい、良好な素子が得られなかった。一方、本発明のガスバリアフィルムを用いた場合、ITO膜基板として用いたガスバリアフィルムがダメージを受けずに、良好な有機EL素子が得られた。
Evaluation by Organic EL Light-Emitting Element An organic EL element was prepared using the gas barrier film obtained above. First, an ITO film (resistance: 30Ω) was formed on the gas barrier film by sputtering. The following compound layers were sequentially deposited on this substrate (anode) by vacuum deposition.
(First hole transport layer)
Copper phthalocyanine: film thickness 10nm
(Second hole transport layer)
N, N′-diphenyl-N, N′-dinaphthylbenzidine: film thickness 40 nm
(Light emitting layer and electron transport layer)
Tris (8-hydroxyquinolinato) aluminum: film thickness 60nm
(Electron injection layer)
Lithium fluoride: film thickness 1nm
On top of this, metal aluminum was deposited to a thickness of 100 nm to form a cathode, and a 3 μm thick silicon nitride film was formed thereon by a parallel plate CVD method to produce an organic EL device.
Next, using the thermosetting adhesive (Epotech 310, Daizonichimori Co., Ltd.), the barrier laminate is the organic EL element side on the prepared organic EL element and the gas barrier film prepared above. Then, the adhesive was cured by heating at 65 ° C. for 3 hours. A total of 10 organic EL elements sealed in this way were produced.
As a result, when the gas barrier film of the comparative example was used, the gas barrier film used as the ITO film substrate was damaged and a good element could not be obtained. On the other hand, when the gas barrier film of the present invention was used, the gas barrier film used as the ITO film substrate was not damaged, and a good organic EL device was obtained.
太陽電池の作成
 上記で作成したガスバリアフィルムを用いて、太陽電池モジュールを作成した。具体的には、太陽電池モジュールよう充填剤として、スタンダードキュアタイプのエチレン-酢酸ビニル共重合体を用いた。10cm角の強化ガラス上に厚さ450μmのエチレン-酢酸ビニル共重合体でアモルファス系のシリコン太陽電池セルを挟み込み充填し、さらにその上のガスバリアフィルムを設置することで太陽電池モジュールを作成した。設置条件は、150℃にて真空引き3分行ったあと、9分間圧着を行った。本方法で作成した太陽電池モジュールは、良好に作動し、85℃、85%相対湿度の環境下でも良好な電気出力特性を示した。
Creation of solar cell A solar cell module was created using the gas barrier film created above. Specifically, a standard cure type ethylene-vinyl acetate copolymer was used as a filler for the solar cell module. A solar cell module was prepared by sandwiching and filling amorphous silicon solar cells with an ethylene-vinyl acetate copolymer having a thickness of 450 μm on a 10 cm square tempered glass and further installing a gas barrier film thereon. As installation conditions, vacuuming was performed at 150 ° C. for 3 minutes, and then pressure bonding was performed for 9 minutes. The solar cell module produced by this method operated well and exhibited good electrical output characteristics even in an environment of 85 ° C. and 85% relative humidity.
封止用袋の作成
 上記で作成したガスバリアフィルムを用いて、封止用袋を作成した。ガスバリアフィルムの基材フィルム側と、樹脂フィルムからなるバック(ポリエチレン製のバッグ)をヒートシール法によって融着し、封止用袋を作成した。得られた封止用袋に、薬剤として、セファゾリンナトリウム(大塚製薬工場製)を封入し、40℃相対湿度75%の条件で6ヶ月保存して色調の変化を評価したところ、色調に変化はほとんど見られなかった。
Creation of a sealing bag A sealing bag was created using the gas barrier film created above. The base film side of the gas barrier film and a back (polyethylene bag) made of a resin film were fused by a heat seal method to create a sealing bag. Cefazolin sodium (manufactured by Otsuka Pharmaceutical Factory) was encapsulated in the obtained sealing bag as a drug, stored for 6 months at 40 ° C. and 75% relative humidity, and evaluated for changes in color. It was hardly seen.
 本発明のガスバリアフィルムは、高いバリア性能を有するため、バリア性が求められる各種素子に広く採用することができる。本発明のガスバリアフィルムにおいは、有機層の平滑性を向上させることができるため、無機層も平滑に設けることができる。この結果、最表面の平滑性も向上させることができ、該ガスバリアフィルム上に形成するデバイスの性能を向上させることができる。 Since the gas barrier film of the present invention has a high barrier performance, it can be widely used in various devices that require barrier properties. In the gas barrier film of the present invention, since the smoothness of the organic layer can be improved, the inorganic layer can also be provided smoothly. As a result, the smoothness of the outermost surface can be improved, and the performance of the device formed on the gas barrier film can be improved.
1   無機層
2   有機層
3   無機層
4   アルコール
5   基材フィルム
6   有機層
10  バリア性積層体
DESCRIPTION OF SYMBOLS 1 Inorganic layer 2 Organic layer 3 Inorganic layer 4 Alcohol 5 Base film 6 Organic layer 10 Barrier laminated body

Claims (17)

  1. 無機層と、該無機層の表面に設けられた有機層を有し、前記有機層は、多官能(メタ)アクリレート、一般式(I)で表される化合物、ならびに、一般式(II-a)で表される化合物および一般式(II-b)で表される化合物の少なくとも1種を含む重合性組成物を重合させてなるポリマーを含む、バリア性積層体。
    一般式(I)
    Figure JPOXMLDOC01-appb-C000001
    (一般式(I)中、R1~R6は、それぞれ、アルキル基またはアリール基である。該アルキル基およびアリール基は置換基を有していてもよい。但し、R1~R6のうち少なくとも1つは、ラジカル重合性の炭素-炭素二重結合を含む置換基である。)
    一般式(II-a)
    Figure JPOXMLDOC01-appb-C000002
    (一般式(II-a)中、R11は、水素原子またはメチル基を表す。R12は、-CR2-、-O-、-CO-、-CR=CR-、アリーレン基、もしくは、ヘテロアリーレン基、またはこれらの2以上が連結した2価の連結基を表す。Aは-O-または-NR-を表す。Rは、それぞれ、水素原子または置換基であり、可能な場合は互いに結合して環を形成していてもよい。)
    一般式(II-b)
    Figure JPOXMLDOC01-appb-C000003
    (一般式(II-b)中、R21は、水素原子およびメチル基を表す。R22は、単結合、または、アルキレン基、アリーレン基、もしくは、これらから選択される2以上がアミド結合またはエステル結合により連結されてなる構造を有し、その原子数が2~82であり、かつ、脂肪族環状構造を有さない連結基を表す。該アルキレン基およびアリール基は置換基を有していてもよい。n2は1~5の整数を表す。)
    An organic layer provided on the surface of the inorganic layer, the organic layer comprising a polyfunctional (meth) acrylate, a compound represented by the general formula (I), and a general formula (II-a And a polymer obtained by polymerizing a polymerizable composition containing at least one compound represented by general formula (II-b).
    Formula (I)
    Figure JPOXMLDOC01-appb-C000001
    (In the general formula (I), R 1 to R 6 are each an alkyl group or an aryl group. The alkyl group and the aryl group may have a substituent, provided that R 1 to R 6 At least one of them is a substituent containing a radically polymerizable carbon-carbon double bond.)
    Formula (II-a)
    Figure JPOXMLDOC01-appb-C000002
    (In the general formula (II-a), R 11 represents a hydrogen atom or a methyl group. R 12 represents —CR 2 —, —O—, —CO—, —CR═CR—, an arylene group, or Represents a heteroarylene group or a divalent linking group in which two or more of these are connected, A represents —O— or —NR—, and each R represents a hydrogen atom or a substituent, and if possible, It may be bonded to form a ring.)
    Formula (II-b)
    Figure JPOXMLDOC01-appb-C000003
    (In the general formula (II-b), R 21 represents a hydrogen atom and a methyl group. R 22 represents a single bond, an alkylene group, an arylene group, or two or more selected from these are an amide bond or This represents a linking group having a structure linked by an ester bond, having 2 to 82 atoms, and not having an aliphatic cyclic structure.The alkylene group and aryl group have a substituent. N2 represents an integer of 1 to 5.)
  2. 一般式(I)における、ラジカル重合性の炭素-炭素二重結合を含む置換基が、(メタ)アクリロイルオキシ基である、請求項1に記載のバリア性積層体。 The barrier laminate according to claim 1, wherein the substituent containing a radically polymerizable carbon-carbon double bond in the general formula (I) is a (meth) acryloyloxy group.
  3. 多官能(メタ)アクリレート、一般式(I)で表される化合物、ならびに、一般式(II-a)で表される化合物および一般式(II-b)で表される化合物の少なくとも1種が、芳香族基を有する、請求項1または2に記載のバリア性積層体。 At least one of a polyfunctional (meth) acrylate, a compound represented by the general formula (I), a compound represented by the general formula (II-a), and a compound represented by the general formula (II-b); The barrier laminate according to claim 1, which has an aromatic group.
  4. 前記重合性組成物に含まれる(メタ)アクリレートが、芳香族(メタ)アクリレートである、請求項1~3のいずれか1項に記載のバリア性積層体。 The barrier laminate according to any one of claims 1 to 3, wherein the (meth) acrylate contained in the polymerizable composition is an aromatic (meth) acrylate.
  5. 前記有機層が、芳香族(メタ)アクリレートを含む重合性組成物を無機層の表面に適用して硬化させてなるものである、請求項1~3のいずれか1項に記載のバリア性積層体。 The barrier laminate according to any one of claims 1 to 3, wherein the organic layer is obtained by applying a polymerizable composition containing an aromatic (meth) acrylate to the surface of the inorganic layer and curing the composition. body.
  6. 前記有機層の表面に、さらに、第2の無機層を有する、請求項1~5のいずれか1項に記載のバリア性積層体。 The barrier laminate according to any one of claims 1 to 5, further comprising a second inorganic layer on the surface of the organic layer.
  7. 前記第2の無機層の表面に、さらに、第2の有機層を有する、請求項6に記載のバリア性積層体。 The barrier laminate according to claim 6, further comprising a second organic layer on the surface of the second inorganic layer.
  8. 前記無機層および/または第2の無機層が、SiもしくはAlの、酸化物、窒化物、もしくは、炭化物、または、その混合物を含む、請求項1~7のいずれか1項に記載のバリア積層体。 The barrier laminate according to any one of claims 1 to 7, wherein the inorganic layer and / or the second inorganic layer includes an oxide, nitride, carbide, or mixture thereof of Si or Al. body.
  9. 少なくとも、第1の無機層、第1の有機層、第2の無機層、第2の有機層、第3の無機層が、該順に互いに隣接して積層しており、第1の有機層および第2の有機層が前記重合性組成物を重合させてなるポリマーを含む、請求項1~8のいずれか1項に記載のバリア性積層体。 At least a first inorganic layer, a first organic layer, a second inorganic layer, a second organic layer, and a third inorganic layer are stacked adjacent to each other in this order, and the first organic layer and The barrier laminate according to any one of claims 1 to 8, wherein the second organic layer contains a polymer obtained by polymerizing the polymerizable composition.
  10. 一般式(II-a)で表される化合物または一般式(II-b)で表される化合物におけるカルボキシ基の数が1つである、請求項1~9のいずれか1項に記載のバリア性積層体。 The barrier according to any one of claims 1 to 9, wherein the number of carboxy groups in the compound represented by the general formula (II-a) or the compound represented by the general formula (II-b) is one. Laminate.
  11. 支持体上に、請求項1~10のいずれか1項に記載のバリア性積層体を設けたガスバリアフィルム。 A gas barrier film provided with the barrier laminate according to any one of claims 1 to 10 on a support.
  12. 請求項11において、さらに、支持体とバリア性積層体の間に有機層を有する、ガスバリアフィルム。 The gas barrier film according to claim 11, further comprising an organic layer between the support and the barrier laminate.
  13. 請求項11または12に記載のガスバリアフィルムを基板に用いたデバイス。 A device using the gas barrier film according to claim 11 as a substrate.
  14. 請求項1~10のいずれか1項に記載のバリア性積層体または請求項11または12に記載のガスバリアフィルムを用いて封止したデバイス。 A device sealed with the barrier laminate according to any one of claims 1 to 10 or the gas barrier film according to claim 11 or 12.
  15. 前記デバイスが、有機EL素子または太陽電池素子である、請求項13または14に記載のデバイス。 The device according to claim 13 or 14, wherein the device is an organic EL element or a solar cell element.
  16. 請求項1~10のいずれか1項に記載のバリア性積層体または請求項11または12に記載のガスバリアフィルムを用いた封止用袋。 A sealing bag using the barrier laminate according to any one of claims 1 to 10 or the gas barrier film according to claim 11 or 12.
  17. 支持体上に、無機層と、該無機層の表面に設けられた有機層を有し、前記有機層は、多官能(メタ)アクリレート、一般式(I)で表される化合物、ならびに、一般式(II-a)で表される化合物および一般式(II-b)で表される化合物の少なくとも1種を含む重合性組成物を適用し、25℃以上の温度で加熱した後に、光線、電子線硬化、または熱線にて硬化させることを含む、請求項11または12に記載のガスバリアフィルムの製造方法。 An inorganic layer and an organic layer provided on the surface of the inorganic layer are provided on the support, and the organic layer is a polyfunctional (meth) acrylate, a compound represented by the general formula (I), and After applying a polymerizable composition comprising at least one compound represented by the formula (II-a) and the compound represented by the general formula (II-b), heating at a temperature of 25 ° C. or higher, The manufacturing method of the gas barrier film of Claim 11 or 12 including hardening by electron beam hardening or a heat ray.
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