WO2013012246A3 - Power generating apparatus using effluent gases exhausted from process chamber - Google Patents

Power generating apparatus using effluent gases exhausted from process chamber Download PDF

Info

Publication number
WO2013012246A3
WO2013012246A3 PCT/KR2012/005724 KR2012005724W WO2013012246A3 WO 2013012246 A3 WO2013012246 A3 WO 2013012246A3 KR 2012005724 W KR2012005724 W KR 2012005724W WO 2013012246 A3 WO2013012246 A3 WO 2013012246A3
Authority
WO
WIPO (PCT)
Prior art keywords
effluent gases
process chamber
power generating
generating apparatus
oxygen
Prior art date
Application number
PCT/KR2012/005724
Other languages
French (fr)
Other versions
WO2013012246A2 (en
Inventor
Sung-Yul Park
Original Assignee
Tes Co., Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020120071771A external-priority patent/KR20130010433A/en
Application filed by Tes Co., Ltd filed Critical Tes Co., Ltd
Publication of WO2013012246A2 publication Critical patent/WO2013012246A2/en
Publication of WO2013012246A3 publication Critical patent/WO2013012246A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/06—Combination of fuel cells with means for production of reactants or for treatment of residues
    • H01M8/0606—Combination of fuel cells with means for production of reactants or for treatment of residues with means for production of gaseous reactants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/8605—Porous electrodes
    • H01M4/8621—Porous electrodes containing only metallic or ceramic material, e.g. made by sintering or sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/002—Shape, form of a fuel cell
    • H01M8/004—Cylindrical, tubular or wound
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
    • H01M8/04082—Arrangements for control of reactant parameters, e.g. pressure or concentration
    • H01M8/04089—Arrangements for control of reactant parameters, e.g. pressure or concentration of gaseous reactants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
    • H01M8/04082—Arrangements for control of reactant parameters, e.g. pressure or concentration
    • H01M8/04201—Reactant storage and supply, e.g. means for feeding, pipes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • H01M8/1213—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the electrode/electrolyte combination or the supporting material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • H01M8/124—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the process of manufacturing or by the material of the electrolyte
    • H01M8/1246—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the process of manufacturing or by the material of the electrolyte the electrolyte consisting of oxides
    • H01M8/126—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the process of manufacturing or by the material of the electrolyte the electrolyte consisting of oxides the electrolyte containing cerium oxide
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Ceramic Engineering (AREA)
  • Fuel Cell (AREA)
  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)

Abstract

A power generating apparatus using effluent gases exhausted from a process chamber is provided. A mixer mixes moisture into effluent gases exhausted from a process chamber to adjust an oxygen partial pressure of the effluent gases, A moisture supplier supplies the moisture to the mixer. A fuel cell includes a fuel electrode, an electrolyte, and an oxygen electrode and converts chemical energy of the effluent gases into electric energy on the basis of a difference in oxygen partial pressure between the effluent gases supplied form the mixer to the fuel electrode and oxygen gas supplied to the oxygen electrode.
PCT/KR2012/005724 2011-07-18 2012-07-18 Power generating apparatus using effluent gases exhausted from process chamber WO2013012246A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR20110071017 2011-07-18
KR10-2011-0071017 2011-07-18
KR10-2012-0071771 2012-07-02
KR1020120071771A KR20130010433A (en) 2011-07-18 2012-07-02 Apparatus for generating power using effluent gas from a process chamber

Publications (2)

Publication Number Publication Date
WO2013012246A2 WO2013012246A2 (en) 2013-01-24
WO2013012246A3 true WO2013012246A3 (en) 2013-04-11

Family

ID=47558609

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2012/005724 WO2013012246A2 (en) 2011-07-18 2012-07-18 Power generating apparatus using effluent gases exhausted from process chamber

Country Status (1)

Country Link
WO (1) WO2013012246A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118202448A (en) * 2021-11-12 2024-06-14 东京毅力科创株式会社 Substrate processing apparatus and substrate processing method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000340243A (en) * 1999-05-25 2000-12-08 Osaka Gas Co Ltd Fuel cell power generating system
JP2001185182A (en) * 1999-12-28 2001-07-06 Matsushita Electric Ind Co Ltd Power generating device for fuel cell and its operating method
KR20030044824A (en) * 2001-11-30 2003-06-09 마쯔시다덴기산교 가부시키가이샤 System and method of fuel cell power generation
JP2007103014A (en) * 2005-09-30 2007-04-19 Mitsubishi Heavy Ind Ltd Fuel cell power generation system
KR20110037316A (en) * 2009-10-06 2011-04-13 한밭대학교 산학협력단 Fuel cell combined power system comprising carbon steam reformer

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000340243A (en) * 1999-05-25 2000-12-08 Osaka Gas Co Ltd Fuel cell power generating system
JP2001185182A (en) * 1999-12-28 2001-07-06 Matsushita Electric Ind Co Ltd Power generating device for fuel cell and its operating method
KR20030044824A (en) * 2001-11-30 2003-06-09 마쯔시다덴기산교 가부시키가이샤 System and method of fuel cell power generation
JP2007103014A (en) * 2005-09-30 2007-04-19 Mitsubishi Heavy Ind Ltd Fuel cell power generation system
KR20110037316A (en) * 2009-10-06 2011-04-13 한밭대학교 산학협력단 Fuel cell combined power system comprising carbon steam reformer

Also Published As

Publication number Publication date
WO2013012246A2 (en) 2013-01-24

Similar Documents

Publication Publication Date Title
GB201221013D0 (en) Fuel cell vehicle heating device
MY199061A (en) Electrochemical hydroxide systems and methods using metal oxidation
MX2013013723A (en) Combustible fuel and apparatus and process for creating same.
GB201103045D0 (en) Product
GB2567572A8 (en) Hypoxia training device
WO2012044603A3 (en) Thick electrode direct reaction fuel cells utilizing cross-flows and taylor vortex flows
EA201290340A1 (en) METHOD AND DEVICE FOR SIMULTANEOUS ENERGY PRODUCTION IN ELECTRICITY, HEAT AND GASEOUS HYDROGEN FORMS
EA201170984A1 (en) METHOD, DEVICE AND FUEL FOR PRODUCTION OF HYDROGEN
WO2014004531A3 (en) Metal/oxygen battery with electrochemical oxygen compression
WO2010090692A3 (en) Fuel cell system having a hydrogen separation member
CA3005639C (en) Energy storage using an rep with an engine
EP2172419A4 (en) Hydrogen producing apparatus, method of operating hydrogen producing apparatus and fuel cell power generating system
WO2012091406A3 (en) Apparatus for processing exhaust fluid
MX2017016367A (en) Water treatment system using alkaline water electrolysis device and alkaline fuel cell.
WO2010032038A3 (en) Power generation
MY169023A (en) Cell for depolarised electrodialysis of salt solutions
IN2014KN02892A (en)
TW200740015A (en) Fuel cell type power generation device, electronic apparatus and treatment method of fuel
WO2012120314A3 (en) Microbial fuel cell
WO2009075491A3 (en) Method of operating fuel cell with high power and high power fuel cell system
GB2486001B (en) A solid oxide fuel cell system and a method of operating a solid oxide fuel cell system
EA202092175A1 (en) REACTOR ON FUEL CELLS AND METHOD FOR DIRECT CONVERSION OF HYDROCARBON-CONTAINING GAS INTO HIGHER HYDROCARBON PRODUCT
WO2009078269A1 (en) Fuel cell system
CA3009375C (en) Electrolytic cell for internal combustion engine
WO2013012246A3 (en) Power generating apparatus using effluent gases exhausted from process chamber

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 12815295

Country of ref document: EP

Kind code of ref document: A2

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 12815295

Country of ref document: EP

Kind code of ref document: A2