WO2013010713A1 - Tête laser - Google Patents

Tête laser Download PDF

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Publication number
WO2013010713A1
WO2013010713A1 PCT/EP2012/060535 EP2012060535W WO2013010713A1 WO 2013010713 A1 WO2013010713 A1 WO 2013010713A1 EP 2012060535 W EP2012060535 W EP 2012060535W WO 2013010713 A1 WO2013010713 A1 WO 2013010713A1
Authority
WO
WIPO (PCT)
Prior art keywords
liquid
nozzle
laser beam
workpiece
workpiece surface
Prior art date
Application number
PCT/EP2012/060535
Other languages
German (de)
English (en)
Inventor
Armin TRAEGER
Paul PHILIPP
Andreas LOESEL
Daniel Kray
Sven Kleinschmidt
Original Assignee
Rena Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rena Gmbh filed Critical Rena Gmbh
Publication of WO2013010713A1 publication Critical patent/WO2013010713A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046—Automatically focusing the laser beam
    • B23K26/048—Automatically focusing the laser beam by controlling the distance between laser head and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/146—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing a liquid

Definitions

  • the invention relates to an apparatus and a method for the laser and liquid-based processing of materials.
  • the invention relates to a method and apparatus in which the laser beam is directed to the workpiece within a fluid jet and to an apparatus and method for protecting the fluid jet.
  • the processing of materials by means of laser radiation has long been state of the art in many areas of material processing.
  • the energy needed to process the material is provided by a high energy, focused and coherent light radiation of a particular wavelength on the workpiece, where it causes a strong superficial heating.
  • the heat treatment may consist of a surface modification or a melt of material to be ablated.
  • liquid-based liquid-based.
  • the liquid can only serve to cool the immediate environment of the site of action.
  • the laser can only heat up supportive, whereas the actual process takes place due to a heat-induced chemical reaction.
  • the heat energy can then lead to a localized chemical reaction of the material with a treatment liquid, for example in the context of laser-assisted chemical treatment (LCP, Laser Chemical Processing).
  • Another object of the liquid may be to guide the laser beam, similar to an optical fiber. From the prior art, various devices for Processing of materials by means of a liquid-guided laser beam known.
  • the guiding of a focused laser beam through a liquid jet is shown for example in document EP 0 762 947 B1.
  • the liquid serves as a medium for guiding the laser beam, which allows the processing of a workpiece due to its high energy.
  • the liquid jet must be laminar according to the teaching of this document in order to obtain a good treatment result. Otherwise, the laser beam to disturbances of the outer shell, where locally and temporarily no total reflection occurs, leave the same radially.
  • the pressure and thus the flow velocity of the jet is set high. Due to the high speed, however, the beam sucks perturbations such as e.g. at the outlet forming droplets or particles, downright. This in turn has a negative effect on the uniformity of the outer shell.
  • the document DE 10 2006 003606 and the document DE 10 2006 003607 which is based on the same applicant, disclose a device suitable for chemical treatment and a method in which a laser beam is guided by means of a laminar flowing liquid jet.
  • the laser is coupled through a window into the liquid.
  • the liquid includes a process medium, for example an etching liquid or a dopant dissolved in liquid. Due to the total reflection, the laser beam does not leave the liquid jet and heats it up at the site of action, that is to say the surface of the substrate, so that the desired chemical reaction can either take place at all or accelerate at any rate.
  • This solution also has the disadvantage that the liquid jet is "free", ie laterally adjacent to the ambient air.
  • Droplets that form when the liquid exits the nozzle can affect its shape when recombined with the jet. Inhomogeneities in the beam, as can be caused by particles or concentration fluctuations of the etching medium, also have an unfavorable effect on the beam shape. This results in energy losses due to an early exit of the laser light from the liquid jet, so that at the site of action only insufficient energy for the process is available for a short time.
  • the European publication EP 1 657 020 proposes the additional use of an "admission gas" which surrounds the liquid flow on the shell side and thus protects it against environmental influences.
  • the gas accompanies the liquid jet on a dependent of the gas pressure route.
  • a protective gas such as helium is used as the gas.
  • Investigations have shown, however, that the surrounding of the liquid jet with a gas jacket solves the above-described problems only inadequately.
  • the pressure in the gas supply must not be too high, otherwise the gas flow disturbs the liquid jet. A lower pressure leads to a short reach of the gas mantle, which is thus limited in both directions.
  • the object of the present invention is therefore to avoid the problems known from the prior art.
  • the invention is intended to ensure that a liquid jet which encloses a laser beam is insensitive to external disturbances, such as, for example, droplet formation when leaving the liquid from the nozzle or against particles of ambient air entering the surface of the liquid jet.
  • High costs due to the use of a protective gas should be avoided.
  • the flow velocity of the liquid jet should be largely independent of its beam quality.
  • the size of the site of action on the surface of the workpiece should be as independent as possible of the size, in particular the cross section, of the liquid jet.
  • the method according to the invention serves for the laser-based and liquid-based heat treatment of a workpiece with a tool head which is arranged at a machining distance from the workpiece surface. For this it includes the following steps:
  • the irradiation of the laser beam preferably takes place through a transparent separating layer which separates the dry area from the wet area.
  • the axis of the laser beam runs parallel, and particularly preferably collinear with the axis of the liquid ⁇ beam and with the longitudinal axis of the nozzle.
  • the machining distance is further adjusted such that a machining gap is formed between the nozzle end face and the workpiece surface, which is filled with a liquid film at least in the area of the at least one laser beam, so that the liquid jet is surrounded and protected on its remaining portion by this liquid film is, wherein the machining distance (3) on the pressure of the liquid (F) is regulated.
  • the gap is completely filled with a liquid film. In other words, there is no free jet of liquid between the nozzle end face and the surface of the workpiece, but the liquid jet is completely guided to and surrounded by the nozzle until immediately before the site of action.
  • the liquid film according to the invention typically has an extension in the beam direction that is significantly smaller than perpendicular to the beam direction.
  • a "free jet" has a On the outer surface, which is more or less precisely defined, whereas the film has no clearly defined lateral surface.
  • the invention thus also relates to a method for protecting a liquid jet from environmental influences in the context of the laser and liquid-based treatment of the workpiece surface of a workpiece with at least one focused laser beam.
  • This is passed through a nozzle of a tool head as described above in the direction of the workpiece surface through the liquid jet.
  • the term “directed” must be delimited from the term “led”.
  • the laser beam uses the walls of the liquid jet, where it is reflected by total reflection.
  • the laser beam passes through the liquid column of the liquid jet, without its walls to interact. Accordingly, the quality of the walls, unlike in the prior art, also irrelevant to the treatment result, if the laser beam is always surrounded on all sides by liquid. Therefore, it is envisaged that the protection in the area of the tool head is provided by the walls of the nozzle, and beyond the tool head by the liquid film surrounding the liquid jet.
  • the protection is thus initially achieved by a nozzle which is so long that it comes as close as possible to the workpiece surface. Thus, no "free jet” is formed, as known from the prior art. An influence of the protected by the nozzle walls lateral surface of the liquid ⁇ jet by splashes is excluded.
  • the protection outside the nozzle is provided by the liquid jet itself.
  • the outflowing liquid in the machining gap forms a liquid film which encloses the laser beam on all sides in the area of the action location, ie on the workpiece surface.
  • a gas to protect the lateral surface of the liquid jet is obsolete, since the exact geometry of the lateral surface of the liquid film is irrelevant.
  • the protection is provided beyond the nozzle solely by liquid which has flowed through the nozzle, more preferably by the treatment liquid itself.
  • the method according to the invention has the following steps:
  • the focal plane of the laser beam is adjusted so that the laser beam passes directly to the action surface lying on the workpiece surface without reflection on the liquid jet.
  • the cross-section of the active site is independent of the cross-section of the liquid jet.
  • the quality of the guided laser beam in the liquid jet does not depend on the quality of the lateral surface of the liquid ⁇ beam, as it no longer interacts with this.
  • the focal plane of the laser beam is adjusted so that it lies on the workpiece surface.
  • the laser beam and the liquid jet are independent in their cross-section, as long as the former is not larger (wider) than the latter.
  • a galvo head is preferably to be used.
  • the adjustment of the laser energy, and in particular of the energy which the laser unfolds at the site of action by means of variation of the pulse length of the laser beam.
  • a setting is particularly easy to implement.
  • the setting can also be effected by means of a change in the focal plane, a weakening of the beam path, or an adaptation of the electrical power generated by the laser beam generating laser.
  • the invention can be implemented particularly advantageously if the following dimensions are maintained: width of the machining gap between 0.01 and 5 mm, preferably between 0.1 and 0.5 mm, particularly preferably 0.2 mm; or width of the machining gap between 5% and 500%, preferably between 20% and 100%, particularly preferably 50% of the smallest nozzle cross-sectional dimension, measured at the nozzle outlet.
  • width of the machining gap between 0.01 and 5 mm, preferably between 0.1 and 0.5 mm, particularly preferably 0.2 mm; or width of the machining gap between 5% and 500%, preferably between 20% and 100%, particularly preferably 50% of the smallest nozzle cross-sectional dimension, measured at the nozzle outlet.
  • This is for the case of a round nozzle the diameter, and in the case of a slit-shaped nozzle, the shorter of the two sides, which form the rectangle of the cross section.
  • the invention can also be realized with other values. It is only essential that the above-mentioned, at least partially filled with liquid machining gap can
  • the machining distance automatically adjusts, for example when an uneven surface is processed.
  • the density of the liquid is regulated by the pressure of the liquid. This means that as the pressure increases, the machining distance increases and decreases with decreasing pressure. As the machining distance changes, so will the backpressure with which the tool head seeks to repel the workpiece surface. If the tool head is suspended, for example, by means of springs, it will automatically approach the workpiece surface as far as it will go or be removed from it until counter-pressure and spring pressure hold the balance.
  • the tool head moves during the treatment along the Maschinen Swissoberflä ⁇ che.
  • the liquid is an etching liquid.
  • the method can be used particularly advantageously for structuring a surface comprising silicon.
  • the method is for example advantageous for microstructuring of thin silicon nitride layers, which serve as an antireflection coating in commercial solar cells used.
  • layers which can be processed, for example, with phosphoric acid are preferably processable by the process according to the invention.
  • the corresponding substrate may for example consist of silicon, glass, metal, ceramic or plastic and optionally be provided with a wet-processable layer.
  • the liquid contains at least one dopant, and the method according to the invention is used for doping a surface comprising silicon.
  • the surface of the substrate can thus be doped locally in a simple manner.
  • a metal-containing liquid By using a metal-containing liquid, a thin metal layer on the workpiece upper surface ⁇ can be generated which for example can serve as a seed layer for subsequent electroplating.
  • the invention further discloses a tool head for carrying out the method according to the invention for the laser and liquid-based treatment of a workpiece according to the above embodiments.
  • a tool head for carrying out the method according to the invention for the laser and liquid-based treatment of a workpiece according to the above embodiments.
  • the invention provides a liquid jet which encloses a laser beam, the liquid jet being insensitive to external disturbances, such as droplet formation upon exiting the liquid from the nozzle. High costs due to the use of an inert gas are effectively avoided because a corresponding gas is not needed.
  • the flow rate of the liquid jet is largely independent of its jet quality, that is, the flow rate can be varied within wide limits without affecting the quality of the liquid jet.
  • the size of the site of action on the surface of the workpiece is practically independent of the size, in particular the cross section, of the liquid jet.
  • the tool head 1 serves for the laser and liquid-based treatment of a workpiece 2. It is clear that the workpiece 2 itself is not part of the device. Typically, it is arranged on a transport device in a transport plane (not shown in each case). This transport device is not a mandatory part of the invention, this but possibly assigned functionally. Optionally, this transport device provides a transport direction into which the workpiece 2 can be transported. As transporting means are in particular tapes, belts, holders or even based on air or liquid flow fluid cushion into consideration.
  • the beam axis of the laser beam L and thus typically the liquid jet is perpendicular to the workpiece surface 2 '.
  • the beam axes are thus also perpendicular to the transport plane.
  • the tool head 1 is arranged at a machining distance 3 from the workpiece surface 2 '. Furthermore, it is divided into a wet area 4 lying in the picture below and a dry area 5 lying in the picture above.
  • liquid F indicated in the picture by a wavy hatching, by a diesstechnikszu melt 6 with a liquid chamber 10 can be entered. This is shown open on both sides in the figure, it being understood that the openings are only the inflow of liquid F.
  • the exact arrangement of the liquid chamber is irrelevant; Thus, according to an embodiment not shown, it can also be arranged directly at the end of the nozzle 7 and / or formed from a plurality of smaller chambers or channels.
  • the liquid F leaves the wet area 4 again by a likewise arranged in the wet area 4 nozzle 7 in the direction of the workpiece surface 2 '. In cases not shown, more than one nozzle may be present in the tool head 1.
  • At least one focused laser beam L can be introduced into the nozzle 7.
  • the irradiation preferably takes place through a transparent separating layer 8 separating the drying area 5 from the wet area 4.
  • the separating layer 8 consists of air or another gas (mixture).
  • An arrangement of the laser source within the wet area 4 is conceivable.
  • the contour of the laser beam L is indicated in the figure by the dashed line.
  • the axis of the laser beam runs parallel, and particularly preferably collinear with the axis of the liquid jet and with the longitudinal axis of the nozzle.
  • the contour of the laser beam L should be adapted to the cross section of the nozzle 7. Accordingly, in the case of a round nozzle 7, the laser beam may be round or fan-shaped in the case of a slot-shaped nozzle, with a galvo head preferably being used to form a linear laser beam L. In the case of a slot-shaped nozzle, the same can preferably also transmit through a plurality of laser beams L (not shown) standing parallel to one another, for example.
  • the transparent material of the separating layer 8 is indicated by the dotted hatching. It is clear that the separating layer 8 does not have to be horizontally formed horizontally but, as shown, can be incorporated into the beam path as an insert in a non-transparent frame.
  • the focusing takes place in the illustrated embodiment by means of a lens 9. This can be part of the tool head 1, or this only be assigned functionally. It is clear that in addition corresponding holding devices must be present to the lens 9 to fix, which are not shown for reasons of clarity.
  • liquid F flows through the nozzle 7, a liquid jet can be formed therewith, by means of which the laser beam L can be enclosed within the nozzle 7.
  • the length of the nozzle 7 is dimensioned such that the liquid jet is enclosed on a first portion of its entire length by the nozzle 7, so that it can extend largely in its interior.
  • the laser beam L does not leave the liquid inside the nozzle 7 at any time, nor does it come into contact with the surface of the liquid jet.
  • the invention provides that at machining distance 3 between nozzle end face 7 'and workpiece surface 2', a machining gap 3 'is formed, which is completely filled during operation of the tool head 1 of a liquid film F', so that the liquid jet on its remaining portion of this liquid film 'F' is umbaren and protectable.
  • the machining distance 3 is adjustable by means of variation of the liquid pulse, which results from the liquid F flowing out of the nozzle 7.
  • the vertical height of the machining gap 3 'to be measured in the image corresponds to the machining distance 3.
  • the liquid film F' typically extends, as indicated, beyond the width of the tool head 1 or at least the nozzle end face 7 '. However, it can also be smaller than the nozzle end face 7 ', as long as it is ensured that there is a sufficient, overall minimum distance between the laser beam (s) and the lateral edge of the liquid film.
  • a gas jet which encloses the liquid jet, in particular in the remaining section, ie beyond the nozzle end face 7 ', is neither necessary nor provided. This eliminates both the additional design effort and the media costs.
  • the flow velocity of the liquid jet no longer plays a significant role in the quality of the jet. In particular, even low flow velocities are possible, which would result in a "free jet", ie a liquid jet extending at least partially outside, to no stable or very easily disturbing jet. At the same time, unnecessarily high media consumption or throughput is avoided.
  • the device additionally has a workpiece support.
  • the workpiece support serves to receive the workpiece 2.
  • the workpiece 2 can be positioned such that the liquid film F 'can form in the machining gap 3' between its workpiece surface 2 'and the nozzle end face 7'.
  • the support distance between the nozzle end face 7 'and workpiece support is preferably adjustable. The support distance is therefore, at least for a flat, flat workpiece 2, the sum of the workpiece thickness and thickness of the liquid film F 'or machining gap 3'.
  • the nozzle 7 is dimensioned according to the preferred embodiment shown in the figure such that it can be irradiated by the laser beam L in a direct way and thus without reflection thereof on its inner wall.
  • Size means that the geometry of the nozzle, ie its length and cross section, and the geometry of the symbolized by the dashed thin line laser beam L are coordinated so that the "lateral surface" of the laser beam L in the nozzle 7 not with the lateral surface of the liquid jet interacts. It is clear that this can be done both by adjusting the nozzle geometry and the beam geometry. The exact configuration depends on the respective desired parameters such as flow velocity, viscosity, flow rate, cross section in the focal point, etc. It must therefore be adapted by the expert, but this will not pose any problems.
  • the nozzle 7 is dimensioned such that the focal plane, ie the plane in which the "focal spot" of the laser beam L lies, is positioned on the workpiece surface 2 '.
  • the focal plane ie the plane in which the "focal spot" of the laser beam L lies
  • the laser beam L leads to a maximum heat development at the site of action.
  • the term "measured” also refers here to a tuning of the nozzle geometry and laser beam, as already described above.
  • the nozzle 7 is round or slit-shaped, and / or it has a plate-shaped end face 7 '.
  • the alternative slot-shaped configuration has an elongated channel with a rectangular cross-section, which has a short and a long side.
  • the optional plate-shaped configuration of the end face 7 'of the nozzle 7, the formation of the homogeneous liquid film F' is supported.
  • a (not shown) slit-shaped configuration of the nozzle 7 it is preferred that not only a single, but that a plurality of laser beams L are coupled into the nozzle 7. These can fan out, similar to the tines of a rake, from a common location, which is located at the beginning of the nozzle 7, or which is arranged in the region of the lens 9 or a more complex optical unit. Alternatively, however, the laser beams L can also run parallel to one another through the nozzle 7, similar to the tines of a comb. In this way, it is possible to generate a line pattern in one operation and / or to achieve a surface treatment. By coupling the individual laser beams L with galvo heads (not shown), both non-linear line patterns can be generated in a simple manner, as can surfaces of variable width on the workpiece surface 2 '.
  • the wet area 4 comprises a disk-shaped liquid chamber 10. It is preferably fed by a supply line (not shown) which surrounds this in a circular manner, via which the liquid F can flow symmetrically out of the liquid feed region 6 into the nozzle 7 beginning in the center of the liquid chamber 10 under the same pressure. In this way, a uniform, laminar as possible flow of the liquid jet can be achieved.
  • the machining distance 3 is adjustable by means of variation of the liquid pulse, which results from the liquid F flowing out of the nozzle 7 and impinging on the workpiece surface 2 '.
  • the hydrodynamic paradox known as the "Bernoulli effect” may occur. After this effect will be below a minimum distance streamed body in the direction of him flowing nozzle moves. However, if desired, this effect can be used just to stabilize the machining distance 3. It is readily possible for the person skilled in the art to set the geometry and pressure conditions in such a way that the invention can be realized in the manner described, for which reason a detailed description of the corresponding possibilities is dispensed with.
  • the tool head 1 comprises a spring 11 shown symbolically in the figure above the separating layer 8 or an equivalent means which is fixed to an abutment (also not shown) likewise shown symbolically.
  • On the spring 11 of the tool head is resiliently mounted. In this way it is particularly easy to realize the adjustability of the machining distance 3 described in the preceding paragraph.
  • FIG. 1 also shows schematically a preferred lens 9 which is used to focus the laser beam L. It is clear that, if necessary, corresponding holders are necessary, and that in addition to a simple lens 9, even more complex optical units can be part of the tool head 1. Alternatively, the optical components can be assigned functionally to the tool head 1 and coupled to it.

Abstract

L'invention concerne un procédé et un dispositif pour traiter une pièce d'œuvre par application de chaleur et de liquide. Le procédé comprend les étapes suivantes : introduction de liquide (F) par une zone de distribution de liquide (6) disposée dans une zone humide (4); production d'un jet de liquide en direction de la surface (2') de la pièce d'œuvre, par éjection de liquide (F) à travers une buse (7) également disposée dans la zone humide (4); émission d'un rayon laser focalisé (L) en direction de la surface (2') de la pièce d'œuvre, à partir d'une zone sèche (5), à travers une couche de séparation transparente (8) séparant la zone sèche (5) de la zone humide (4) et à travers la buse (7); ajustement de la distance d'usinage (3) entre la tête d'outil (1) et la surface (2') de la pièce d'œuvre. Dans un premier segment de sa longueur totale, le jet de liquide est entièrement entouré par la buse (7) et la distance d'usinage (3) est ajustée de manière à former entre la face frontale (7') de la buse et la surface (2') de la pièce d'œuvre un intervalle d'usinage (3') qui est rempli, au moins dans la zone du ou des rayons laser (L), par un film de liquide (F'), de sorte que, sur son segment restant, le jet de liquide est entouré et protégé par ce film de liquide (F'), le procédé étant caractérisé en ce que la distance d'usinage (3) est réglée par la pression du liquide (F).
PCT/EP2012/060535 2011-07-20 2012-06-04 Tête laser WO2013010713A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011107982A DE102011107982A1 (de) 2011-07-20 2011-07-20 Werkzeugkopf (LCP-Kopf)
DE102011107982.7 2011-07-20

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WO2013010713A1 true WO2013010713A1 (fr) 2013-01-24

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TW (1) TW201313373A (fr)
WO (1) WO2013010713A1 (fr)

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JP6965094B2 (ja) * 2017-10-17 2021-11-10 株式会社ディスコ レーザー加工装置
JP6907091B2 (ja) * 2017-10-19 2021-07-21 株式会社ディスコ レーザー加工装置
JP6998178B2 (ja) * 2017-11-07 2022-01-18 株式会社ディスコ レーザー加工装置
JP7201343B2 (ja) * 2018-06-19 2023-01-10 株式会社ディスコ レーザー加工装置

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EP0762947B1 (fr) 1994-05-30 2003-03-26 Synova S.A. Dispositif pour l'usinage d'un materiau au laser
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EP1657020A1 (fr) 2004-11-10 2006-05-17 Synova S.A. Méthode et dispositif pour optimiser la cohérence d'un jet de fluide utilisé pour le travail de matériaux et buse pour un tel dispositif
DE102006003606A1 (de) 2006-01-25 2007-07-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Strukturieren einer Oberflächenschicht
DE102006003607A1 (de) 2006-01-25 2007-08-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zur lokalen Dotierung von Festkörpern sowie dessen Verwendung
EP1940579B1 (fr) 2005-05-17 2010-06-23 Technikus Ag Procede d'usinage de materiau au moyen d'un laser guide par jet d'eau et dispositif pour mettre ledit procede en oeuvre
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Publication number Priority date Publication date Assignee Title
EP0762947B1 (fr) 1994-05-30 2003-03-26 Synova S.A. Dispositif pour l'usinage d'un materiau au laser
WO2005120763A2 (fr) * 2004-06-11 2005-12-22 Exitech Limited Processus et appareil d'ablation
EP1657020A1 (fr) 2004-11-10 2006-05-17 Synova S.A. Méthode et dispositif pour optimiser la cohérence d'un jet de fluide utilisé pour le travail de matériaux et buse pour un tel dispositif
EP1940579B1 (fr) 2005-05-17 2010-06-23 Technikus Ag Procede d'usinage de materiau au moyen d'un laser guide par jet d'eau et dispositif pour mettre ledit procede en oeuvre
DE102006003606A1 (de) 2006-01-25 2007-07-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Strukturieren einer Oberflächenschicht
DE102006003607A1 (de) 2006-01-25 2007-08-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zur lokalen Dotierung von Festkörpern sowie dessen Verwendung
WO2011004437A1 (fr) * 2009-07-10 2011-01-13 三菱電機株式会社 Procédé et appareil de traitement au laser
US20120074105A1 (en) * 2009-07-10 2012-03-29 Mitsubishi Electric Corporation Laser machining method and apparatus

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TW201313373A (zh) 2013-04-01

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