WO2013009087A2

WO2013009087A2 - Non-contact thin plate transfer device

Info

Publication number: WO2013009087A2
Application number: PCT/KR2012/005488
Authority: WO
Inventors: 김영식
Original assignee: 단국대학교 산학협력단
Priority date: 2011-07-12
Filing date: 2012-07-11
Publication date: 2013-01-17
Also published as: KR101322435B1; KR20130008365A; WO2013009087A3

Abstract

One example of the present invention relates to a non-contact thin plate transfer device which comprises a plurality of transfer rollers arranged along a transfer direction of the thin plate to be transferred on both sides of the thin plate to be transferred. A rotation shaft of the plurality of transfer rollers is tilted from the transfer direction of the thin plate to be transferred.

Description

Contactless sheet conveying device

The present application relates to a contactless sheet conveying apparatus, and more particularly to a non-distortion sheetless conveying system.

The thin plate transfer system applied to the package for semiconductor transfers the thin plate using the driving force of the transfer roller. In addition, the thin plate must be dried in a non-contact state in order to maintain the cleanliness of the surface after a high cleaning process. For the non-contact drying of the thin plate, the thin plate is dried by injecting clean air or high purity gas while conveying the thin plate. At this time, the thin plate may be deformed or distorted due to the pressure of the air injected from the upper or lower portion of the thin plate, such that a portion of the thin plate is inflated during the transfer. You may not be able to proceed. If it is necessary to transfer the thin film in a precise arrangement, it is necessary to prevent the transfer system from being disturbed by deformation or distortion of the thin plate.

Korean Patent Application No. 1996-0041022 discloses a sheet conveying apparatus having a top and a day roller and a power transmission means technology to enable position alignment for precise pitch conveying continuously between manufacturing processes of thin sheets such as semiconductor lead frames. have.

The technical problem to be achieved by the present application is to provide a contactless sheet conveying apparatus to prevent deformation or distortion during conveyance of the sheet.

The technical problem to be achieved by the present application is to provide a contactless sheet conveying apparatus for preventing the sheet from being separated from the conveying direction during conveyance of the sheet.

Disclosed is a contactless thin plate conveying apparatus according to an aspect of the present application for achieving the above technical problem. The contactless thin plate conveying apparatus includes a plurality of conveying rollers disposed along the conveying direction of the conveying thin plate at both sides of the thin sheet to be conveyed. The rotating shafts of the plurality of feed rollers are arranged to be inclined from the conveying direction of the sheet to be conveyed.

According to one embodiment, the plurality of feed rollers may be arranged in a plurality of upper and lower surfaces of both sides of the sheet to be conveyed along the conveying direction of the sheet to be conveyed.

According to another embodiment, the rotation axis of the plurality of conveying rollers may be arranged to be inclined at the same angle from the conveying direction of the conveying thin plate to the outer portion of the thin conveying object.

According to another embodiment, the plurality of feed rollers to convey the sheet to be conveyed by pressing and rotating the sheet to be transported from the upper and lower surfaces, the tensile force component in the direction perpendicular to the conveying direction of the sheet to be transported Can be generated.

According to another embodiment, the thin plate conveying apparatus is disposed on the side of the plurality of conveying rollers monitoring unit for monitoring whether the conveying thin plate is separated from the conveying direction; A control unit for generating a control signal for adjusting the rotational force of the plurality of feed rollers based on the monitoring result of the monitoring unit; And a motor unit configured to convey the plurality of feed rollers according to a control signal of the control system.

According to another embodiment, the monitoring unit is disposed on both sides of the conveying roller and the light emitting device for irradiating light along the conveying direction of the thin sheet to be transferred; And a light receiver disposed at both sides of the transfer roller and converging the light irradiated by the light emitting device.

According to another embodiment, when the control system receives a departure from the conveying direction of the conveying thin plate from the monitoring system, the control system increases the rotational force of the plurality of conveying rollers disposed in the disengaged direction, or It can be adjusted to reduce the rotational force of the plurality of feed rollers disposed on the opposite side of the direction.

According to one embodiment of the present application, the plurality of conveying rollers may apply a tensile force in the outer direction with respect to the conveying direction of the thin plate. Thereby, deformation or distortion which occur in the said thin plate by the drying air pressure applied with respect to the said thin plate during conveyance can be prevented. By preventing deformation or distortion during transfer of the thin plate, the transfer device may function to operate smoothly.

According to another embodiment of the present application, the contactless thin plate conveying apparatus may include a monitoring unit and a control unit. By controlling the rotational force of the plurality of feed rollers based on the monitoring result of the monitoring unit, it is possible to effectively prevent the thin plate from being separated from the conveying direction during conveyance.

1 is a plan view schematically showing a thin plate conveying apparatus according to a comparative example of the present application.

2 is a plan view schematically showing a contactless sheet conveying apparatus according to an embodiment of the present application.

3 is a view schematically showing a contactless sheet conveying apparatus according to another embodiment of the present application.

4 is a view schematically showing a contactless sheet conveying apparatus according to another embodiment of the present application.

Hereinafter, exemplary embodiments of the present application will be described in detail with reference to the accompanying drawings. However, the technology disclosed in the present application is not limited to the embodiments described herein and may be embodied in other forms. However, the embodiments introduced herein are provided to ensure that the disclosed contents are thorough and complete, and that the spirit of the present application is sufficiently conveyed to those skilled in the art. In the drawings, the width, thickness, and the like of the components are enlarged in order to clearly express the components of each device. When described in the drawings as a whole, at the point of view of the observer, when one element is referred to as being positioned on top of another, this means that one element may be placed directly on top of another or that additional elements may be interposed between them. Include. In addition, one of ordinary skill in the art may implement the spirit of the present application in various other forms without departing from the technical spirit of the present application. In addition, in the drawings, the same reference numerals refer to substantially the same elements.

On the other hand, the meaning of the terms described in the present application should be understood as follows. Singular expressions are to be understood to include plural expressions unless the context clearly indicates otherwise, and the terms “comprise” or “having” are intended to refer to the features, numbers, steps, operations, components, parts or parts described. It is to be understood that the combination is intended to be present, but not to exclude in advance the possibility of the presence or addition of one or more other features or numbers, steps, operations, components, parts or combinations thereof.

The contactless sheet conveying apparatus used in the present application refers to a device for conveying the sheet while contactless drying in order to maintain the clean state of the surface of the sheet in the process of conveying the thin plate after the cleaning process. The contactless drying may be accomplished by injecting clean air or high purity gas.

1 is a plan view schematically showing a thin plate conveying apparatus according to a comparative example of the present application. One comparative example described above with reference to FIG. 1 is a structure in which deformation or distortion of a thin plate may occur during transfer, compared to a thin plate transfer apparatus according to an embodiment of the present application. Referring to the drawings, the thin plate conveying apparatus 100 includes a plurality of driving rollers 120. The thin plate 110 is conveyed in the conveying direction (Y direction) by the rotation of the plurality of drive rollers 120. The plurality of driving rollers 120 are respectively arranged to correspond to both sides of the thin plate 110 to be transferred. Although not shown, the plurality of driving rollers 120 are disposed in pairs on the upper and lower portions of the thin plate 110. Although not shown, a pressure injection nozzle may be present on the upper or lower portion of the thin plate 110, and high pressure air is discharged from the pressure injection nozzle to dry the thin plate 110 during the transfer of the thin plate 110. It can be injected into. In this case, deformation or distortion may occur locally in the thin plate 110 being transported by the high pressure air. Deformation or distortion of the thin plate 110 may prevent the driving force from being transmitted from the plurality of driving rollers 120 to the thin plate 110. As an example, when conveyed by a plurality of drive rollers 120 disposed on both sides of the thin plate 110, the vicinity of the centerline 115 of the thin plate 110 is deformed such as bending of the thin plate during transfer compared to both sides. Or distortion is relatively easy to occur. In particular, when high pressure air is injected from the upper or lower portion of the thin plate 110, the center line 115 of the thin plate 110 may have a relatively high degree of warpage.

2 is a plan view schematically showing a contactless sheet conveying apparatus according to an embodiment of the present application. Referring to FIG. 2, the non-contact thin plate conveying apparatus 200 includes a plurality of conveying rollers 220 disposed along the conveying direction Y of the thin sheet to be conveyed 210 at both sides of the thin sheet to be conveyed 210. do. The plurality of feed rollers 220 may be arranged in a plurality of upper and lower surfaces of both sides of the sheet to be transported 210 along the transport direction Y of the sheet to be transported 210. The plurality of conveying rollers 220 may convey the conveying object thin plate 210 by pressing and rotating the conveying object thin plate 210 on the upper and lower surfaces.

The rotation shaft 250 of the plurality of feed rollers 220 is disposed such that a direction 252 perpendicular to the rotation shaft 250 is inclined from the transport direction 254. According to one embodiment, the rotating shaft 250 of the plurality of conveying rollers 220 has a direction 252 perpendicular to the rotation axis 250 from the conveying direction 254 of the thin object 210 to be conveyed. It may be arranged to be inclined at the same angle (θ) to the outer portion of the. As shown, the plurality of conveying rollers 220 arranged on the left side of one side of the thin plate 210 to be transferred may be arranged such that the rotation shaft 250 is inclined at the same inclination angle. The plurality of conveying rollers 220 arranged on the right side of the thin plate 210 to be transferred may also be disposed such that the rotation shaft 250 is inclined at the same inclination angle.

When both sides of the thin plate 210 to be transferred are transferred by the plurality of transfer rollers 220, the tensile force component may be generated in the thin plate 210 to be transferred in a direction perpendicular to the transfer direction 254 (X direction). . That is, the rotating shaft 250 is disposed such that the direction 252 perpendicular to the rotating shaft 250 is inclined from the conveying direction 254 of the thin sheet to be conveyed 210 to the outer portion of the thin sheet to be conveyed 210. 220 may apply a tensile force to the transfer target thin plate 210 in the outward direction during rotation. Here, the outer direction means a direction away from the center line 215 of the thin plate 210 to be transferred. As an example, the tensile force may serve to offset the bending phenomenon of the thin plate 210 to be transferred near the center line 215 of the thin plate 210 to be transferred.

As a result, deformation or distortion occurring in the transfer target thin plate 210 by the drying air pressure applied to the transfer target thin plate 210 during the conventional transfer may be prevented. By preventing deformation or distortion during transfer of the thin plate 210 to be transferred, the transfer device may function to operate smoothly.

3 is a view schematically showing a contactless sheet conveying apparatus according to another embodiment of the present application. Referring to FIG. 3, the non-contact thin plate conveying apparatus 300 includes a plurality of conveying rollers 220 disposed along the conveying direction (Y direction) of the thin plate 210 to be transferred at both sides of the thin plate 210 to be transferred. The rotation shaft 250 of the plurality of feed rollers 220 is disposed such that a direction 252 (see FIG. 2) perpendicular to the rotation shaft 250 is inclined from the transport direction 254 (see FIG. 2). The contactless thin plate conveying apparatus 300 includes a monitoring unit 340 disposed on the side of the plurality of feed rollers 220, a controller 350 for generating a control signal for adjusting the rotational force of the plurality of feed rollers 220, and a plurality of the plurality of feed rollers 220. It may include a motor unit 360 for driving the feed roller 220. The thin film transfer apparatus 300 is substantially the same as the thin film transfer apparatus 200 described above with reference to FIG. 2 except for the monitoring unit 340, the control unit 350, and the motor unit 360. Therefore, in order to avoid duplicate description, detailed description is abbreviate | omitted.

The monitoring unit 340 is disposed at both sides of the plurality of feed rollers 220 and emits light along the feed direction (Y direction) of the thin plate 215 to be transferred and the plurality of feed rollers 220. It may include a light receiver 344 disposed on both sides of the) and to converge the light irradiated by the light emitting device 342. As an example, the light emitting device 342 may apply a laser. By applying the phenomenon that the light irradiated from the light emitting device 342 converges to the light receiver 344, it is possible to monitor whether the thin plate 215 to be transferred is separated from the conveying direction (Y direction) during the conveyance. As an example, if the transfer target thin plate 215 is separated from the left side of the drawing during transfer, the light irradiated from the light emitting device 342 disposed on the left side is obstructed by the transfer target thin plate 215. Accordingly, the light irradiated from the light emitting device 342 is not received by the optical receiver 344 disposed on the left side along the transport direction (Y direction). Similarly, if the transfer target thin plate 215 is separated from the right side of the drawing during transfer, no light is received from the optical receiver 344 disposed on the right side along the transfer direction (Y direction). In this manner, the monitoring unit 340 may serve to monitor whether the transfer target thin plate 215 transferred through the plurality of transfer rollers 220 from the transfer direction.

The control unit 350 may generate a control signal for adjusting the rotational force of the plurality of feed rollers 220 based on the monitoring result of the monitoring unit 340. In one embodiment, when receiving the signal from the monitoring unit 340 that the transfer target thin plate 210 is separated from the conveying direction (Y direction), the control unit 350 is a plurality of conveying rollers ( It may be adjusted to increase the rotational force of 220, or to reduce the rotational force of the plurality of feed rollers disposed on the opposite side of the direction of the separation. As an example, referring to FIG. 3, when the transfer target thin plate 210 receives a signal from the monitoring unit 340 that the transfer target thin plate 210 is displaced in a left direction with respect to the transfer direction, the control unit 350 transfers the thin target 210 to the transfer target. It may generate a control signal for increasing the rotational force of the plurality of feed rollers 220 disposed on the left side of the. Alternatively, the controller 350 may generate a control signal for reducing the rotational force of the plurality of feed rollers 220 disposed on the right side of the sheet to be transported 210. As another example, when receiving the signal from the monitoring unit 340 that the transfer target thin plate 210 has moved away in the right direction with respect to the transfer direction, the control unit 350 is similarly disposed on the right side of the transfer target thin plate 210. It can generate a control signal for increasing the rotational force of the plurality of feed rollers 220 to be. Alternatively, the controller 350 may generate a control signal for reducing the rotational force of the plurality of feed rollers 220 disposed on the left side of the sheet to be transported 210.

The motor unit 360 may receive the control signal from the controller 350 and drive the plurality of feed rollers 340. In one embodiment, the motor unit 360 may drive the plurality of feed rollers 220 arranged on one side of the thin plate 210 to be transferred with the same driving force. As an example, referring to FIG. 3, the motor unit 360 may drive the plurality of feed rollers 220 disposed at the left side of the thin plate 210 to be transferred with the same driving force. Similarly, the plurality of feed rollers 220 disposed on the right side of the sheet to be transported 210 can be driven with the same driving force. Then, the driving force may be separately transmitted to the plurality of feed rollers 220 disposed on the left side and the right side of the thin plate 210 to be transferred.

Thus, the contactless sheet conveying apparatus according to an embodiment of the present application can effectively prevent the sheet from being separated from the conveying direction during conveyance by controlling the rotational force of the plurality of conveying rollers based on the monitoring result of the monitoring unit. .

4 is a view schematically showing a contactless sheet conveying apparatus according to another embodiment of the present application. The contactless thin film conveying apparatus 400 illustrated in FIG. 4A has the contactless contact of FIG. 3 except for a configuration in which a plurality of mirrors 450 are disposed between the light emitting device 342 and the light receiver 344. It is substantially the same as the thin plate conveying apparatus 300. Referring to FIG. 4B, light emitted from the light emitting device 342 may be reflected using the plurality of mirrors 450 and propagated to the light receiver 344. The light receiver 344 may check whether the light to be transferred from the light emitting device 342 reaches the thin plate 210 to be transferred.

Although described above with reference to the drawings and embodiments, those skilled in the art various modifications and changes to the embodiments disclosed in the present application without departing from the spirit of the present application described in the claims below I can understand that you can.

Claims

It includes a plurality of conveying rollers disposed along the conveying direction of the conveying thin plate on both sides of the conveying thin plate,

And the rotation shafts of the plurality of feed rollers are disposed such that a direction perpendicular to the rotation axis is inclined from a conveying direction of the sheet to be conveyed.
The method of claim 1,

And a plurality of the conveying rollers are arranged in a plurality of upper and lower surfaces of both sides of the conveying thin plate along the conveying direction of the conveying thin plate.
The method of claim 1,

And the rotating shafts of the plurality of feed rollers are disposed such that a direction perpendicular to the rotation axis is inclined at the same angle from the transfer direction of the transfer target thin plate to the outer portion of the transfer target thin plate.
The method of claim 1,

And the plurality of transfer rollers apply a tension force in an outward direction to the transfer target thin plate while the transfer target thin plate is transferred.
The method of claim 1,

A monitoring unit disposed at the side of the plurality of feed rollers and monitoring whether the sheet to be transported is separated from the transport direction;

A control unit for generating a control signal for adjusting the rotational force of the plurality of feed rollers based on the monitoring result of the monitoring unit; And

Further comprising a motor for driving the plurality of feed rollers in accordance with the control signal of the controller.

Contactless sheet conveying device.
The method of claim 5,

The monitoring unit

Light emitting devices disposed on both sides of the conveying roller for irradiating light along the conveying direction of the conveying thin plate; And

Is disposed on both sides of the transfer roller, including a light receiver for converging the light irradiated by the light emitting device,

A plurality of mirrors are disposed between the light emitting device and the optical receiver to reflect the light irradiated from the light emitting device and to transmit the light to the optical receiver.

Contactless sheet conveying device.
The method of claim 6,

The control unit increases the rotational force of the plurality of conveying rollers disposed in the disengaging direction when receiving the detachment from the conveying direction of the thin sheet to be conveyed from the monitoring unit, or is disposed opposite to the disengaging direction. Contactless sheet conveying device for adjusting to reduce the rotational force of the plurality of feed rollers.