WO2013000222A1 - Artificial microstructure and artificial electromagnetic material applying same - Google Patents

Artificial microstructure and artificial electromagnetic material applying same Download PDF

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Publication number
WO2013000222A1
WO2013000222A1 PCT/CN2011/081391 CN2011081391W WO2013000222A1 WO 2013000222 A1 WO2013000222 A1 WO 2013000222A1 CN 2011081391 W CN2011081391 W CN 2011081391W WO 2013000222 A1 WO2013000222 A1 WO 2013000222A1
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Prior art keywords
artificial
substrate
artificial microstructure
microstructure
electromagnetic material
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PCT/CN2011/081391
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French (fr)
Chinese (zh)
Inventor
刘若鹏
栾琳
寇超锋
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深圳光启高等理工研究院
深圳光启创新技术有限公司
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Publication of WO2013000222A1 publication Critical patent/WO2013000222A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H01Q15/02—Refracting or diffracting devices, e.g. lens, prism

Definitions

  • the present invention relates to an artificial electromagnetic material, and more particularly to an artificial microstructure and an artificial electromagnetic material for use thereof. Background technique
  • Artificial electromagnetic materials are a new type of synthetic material that responds to electromagnetic waves, consisting of a substrate and an artificial microstructure attached to the substrate.
  • An artificial microstructure is a planar or three-dimensional structure composed of metal wires having a certain geometric pattern, such as a metal wire forming a circular ring shape and an I-shape.
  • the present invention provides an artificial microstructure comprising an open annular structure and a portion of an I-shaped structure nested inside the open annular structure.
  • the artificial microstructure further comprises at least one line segment connected to the intermediate connecting line of the I-shaped structure.
  • the line segments are equally divided by the intermediate connection line of the I-shape.
  • At least one of the line segments is located outside of the open annular structure.
  • the open annular structure is polygonal.
  • the bent portion of the open annular structure is curved.
  • the open annular structure is circular or elliptical.
  • the artificial microstructure is made of metal.
  • the artificial microstructure includes a plurality of the line segments, and the plurality of the line segments are equal.
  • the artificial microstructure includes a plurality of the line segments, and the lengths of the plurality of the line segments are sequentially increased along the intermediate connecting line of the I-shape.
  • embodiments of the present invention also provide an artificial electromagnetic material comprising at least one sheet of material, the sheet of material comprising a substrate and the artificial microstructure attached to the substrate.
  • the artificial microstructures are arranged in an array on the substrate.
  • the substrate is divided into a plurality of arrays of identical rectangular parallelepiped substrate units, and one of the artificial microstructures is attached to each of the substrate units.
  • the artificial microstructure is attached to the substrate by any of etching, plating, drilling, photolithography, electron engraving or ion etching.
  • the substrate is made of a ceramic material.
  • the substrate is selected from one of tetrafluoroethylene, a ferroelectric material, a ferrite material, and a ferromagnetic material.
  • the artificial electromagnetic material includes a plurality of layers of material that are superimposed.
  • the plurality of material sheets are filled with a liquid substrate material that can connect the two.
  • the plurality of material sheets are packaged as one unit by one of welding, riveting and bonding.
  • the wide-band artificial electromagnetic material embodying the invention has the following beneficial effects: the refractive index is large and the change is relatively stable in a wide frequency band, and the dielectric constant is gradually increased from zero in a certain frequency band, which can meet the requirements of special occasions. , such as semiconductor manufacturing and antenna manufacturing. BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings, which are incorporated in the claims Other drawings may also be obtained from these drawings without the inventive labor.
  • FIG. 1 is a schematic view of an artificial electromagnetic material according to a first embodiment of the present invention
  • FIG. 2 is a schematic view of an artificial microstructure of the artificial electromagnetic material of FIG. 1;
  • FIG. 3 to 7 are schematic views showing the deformation of the artificial microstructure of FIG. 2;
  • Figure 8 is a graph showing the refractive index characteristics of the artificial electromagnetic material shown in Figure 1;
  • Fig. 9 is a graph showing the dielectric constant characteristics of the artificial electromagnetic material shown in Fig. 1.
  • the embodiment provides an artificial electromagnetic material 100 comprising at least one material layer 1 .
  • the material layers are perpendicular to the surface thereof. The directions are stacked together.
  • the artificial electromagnetic material 100 includes three material layers 1 each of which is equal in thickness, and the plurality of material sheets 1 are sequentially stacked in a direction perpendicular to the plane of the substrate (z-axis direction), and each of the two pieces of material is stacked.
  • the layers 1 are integrally formed by a certain packaging process such as soldering, riveting, bonding, or the like, or by filling a substance capable of connecting them, such as a liquid substrate material, which bonds the existing two material sheets 1 after curing. Thereby, the plurality of material sheets 1 constitute a whole.
  • Each material sheet layer 1 includes a substrate and an artificial microstructure 3 attached to the substrate, and the substrate is virtually divided into a plurality of identical columnar substrate units next to each other, the substrate units being aligned in the X-axis direction, The y-axis direction perpendicular to the column is arranged in an array in order.
  • the substrate unit and the artificial microstructures 3 on the substrate unit together constitute one material unit 2.
  • the material of this embodiment can be regarded as being arranged by array of a plurality of material units 2 in three directions of x, y, and z, wherein the artificial microstructure can be etched, plated, drilled, photolithographically, electronically engraved or Ion etching or the like is attached to the substrate.
  • the material of the artificial microstructure 3 is a metal wire.
  • a copper wire having a rectangular cross section is used.
  • other metal wires such as a silver wire may be used for the metal wire.
  • the cross section of the metal wire may also be cylindrical, flat or other shapes.
  • the artificial microstructure 3 includes an open rectangular structure 3a and a part of the I-shaped structure 3b nested inside the open annular structure 3a.
  • the artificial microstructure 3 further includes a plurality of line segments 3c halved by the intermediate connecting line of the I-shaped structure 3b, the line segments 3c being located inside the open rectangular structure 3a, as shown in FIG. Certainly, a part of the line segment 3c may also be located outside the open annular structure 3a. As shown in FIG.
  • the length of the line segment 3c may be equal or not equal, as shown in FIG. 5 along the intermediate connecting line of the I-shaped.
  • the bent portion of the open annular structure 3a may be curved as shown in FIG. 6, and the open annular structure 3a may be circular, elliptical or polygonal as shown in FIGS. 3 and 4.
  • 8 is a refractive index characteristic curve when electromagnetic waves pass through the artificial electromagnetic material
  • FIG. 9 is a dielectric constant characteristic curve. It can be seen from FIG. 8 that the refractive index is relatively stable in a wide frequency band (1 GHz to 6 GHz) and both are greater than 6, Corresponding dotted lines show that the loss is very low in this frequency band. It can be seen from Fig. 9 that the artificial electromagnetic material of the structure gradually increases from zero in a certain frequency range (7.6 GHz to 9.5 GHz).

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  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)

Abstract

Provided in the present invention is an artificial microstructure comprising a snap ring structure and an H-shaped structure partially embedded within the snap ring structure. Also provided in the present invention is an artificial electromagnetic material comprising the artificial microstructure. The artificial electromagnetic material having the structure is provided, in a broad range of frequency bands, with great refractive index and smooth changes, and with a dielectric constant that gradually increases from zero within a certain frequency band, thus meeting requirements of particular scenarios, such as the fields of semiconductor manufacturing and antenna manufacturing, and having broad application prospects.

Description

一种人造微结构及其应用的人工电磁材料  Artificial microstructure and artificial electromagnetic material thereof
本申请要求于 2011年 6月 29日提交中国专利局、申请号为 201110179708.4, 发明名称为 "一种宽频人工电磁材料" 的中国专利申请的优先权， 其全部内容 通过引用结合在本申请中。 技术领域  The present application claims priority to Chinese Patent Application No. 2011-1017 970, filed on Jun. 29, 2011, the entire disclosure of which is incorporated herein by reference. Technical field
本发明涉及一种人工电磁材料， 特别是涉及一种人造微结构及其应用的人 工电磁材料。 背景技术  The present invention relates to an artificial electromagnetic material, and more particularly to an artificial microstructure and an artificial electromagnetic material for use thereof. Background technique
人工电磁材料， 俗称超材料， 是一种能够对电磁波产生响应的新型人工合 成材料， 由基板和附着在基板上的人造微结构组成。 人造微结构是由金属线组 成的具有一定几何图案的平面或立体结构， 例如组成圓环形、 工字形的金属线 等。 人工电磁材料能够对电磁波产生响应， 从而使人工电磁材料整体体现出不 同于基板的电磁特性，例如介电常数 ε和磁导率 μ不同，根据折射率公式 η = ^ 可知， 折射率 η也不同。 Artificial electromagnetic materials, commonly known as metamaterials, are a new type of synthetic material that responds to electromagnetic waves, consisting of a substrate and an artificial microstructure attached to the substrate. An artificial microstructure is a planar or three-dimensional structure composed of metal wires having a certain geometric pattern, such as a metal wire forming a circular ring shape and an I-shape. The artificial electromagnetic material can respond to the electromagnetic wave, so that the artificial electromagnetic material as a whole exhibits electromagnetic characteristics different from the substrate, for example, the dielectric constant ε and the magnetic permeability μ are different. According to the refractive index formula η = ^, the refractive index η is different. .
现有的人工电磁材料， 其人造微结构通常为工字形、 具有这种结构的人工 电磁材料， 只能实现比较小的折射率。 发明内容  Existing artificial electromagnetic materials, whose artificial microstructures are usually in the shape of an I-shaped, artificial electromagnetic material having such a structure, can only achieve a relatively small refractive index. Summary of the invention
本发明提供一种人造微结构， 所述人造微结构包括一开口环形结构和一部 分嵌套在开口环形结构内部的工字形结构。  The present invention provides an artificial microstructure comprising an open annular structure and a portion of an I-shaped structure nested inside the open annular structure.
其中， 所述人造微结构还包括至少一根与所述工字形结构的中间连接线相 连接的线段。  Wherein, the artificial microstructure further comprises at least one line segment connected to the intermediate connecting line of the I-shaped structure.
所述线段被所述工字形的中间连接线平分。  The line segments are equally divided by the intermediate connection line of the I-shape.
所述线段中至少有一条线段位于开口环形结构的外面。  At least one of the line segments is located outside of the open annular structure.
所述开口环形结构为多边形。  The open annular structure is polygonal.
所述开口环形结构的弯折部为弧形。  The bent portion of the open annular structure is curved.
所述开口环形结构为圓形或者橢圓形。  The open annular structure is circular or elliptical.
所述人造微结构采用金属制成。 所述人造微结构包括多根所述线段， 多根所述线段相等。 The artificial microstructure is made of metal. The artificial microstructure includes a plurality of the line segments, and the plurality of the line segments are equal.
所述人造微结构包括多根所述线段， 多根所述线段的长度沿所述工字形的 中间连接线依次递增。  The artificial microstructure includes a plurality of the line segments, and the lengths of the plurality of the line segments are sequentially increased along the intermediate connecting line of the I-shape.
相应地， 本发明实施例还提供了一种人工电磁材料， 其包括至少一个材料 片层， 所述材料片层包括基板和附着在所述基板上的所述人造微结构。  Accordingly, embodiments of the present invention also provide an artificial electromagnetic material comprising at least one sheet of material, the sheet of material comprising a substrate and the artificial microstructure attached to the substrate.
其中， 所述人造微结构在所述基板上成阵列排布。  Wherein, the artificial microstructures are arranged in an array on the substrate.
所述基板划分为多个阵列排布的相同的长方体基板单元， 每个基板单元上 附着有一个所述人造微结构。  The substrate is divided into a plurality of arrays of identical rectangular parallelepiped substrate units, and one of the artificial microstructures is attached to each of the substrate units.
所述人造微结构通过蚀刻、 电镀、 钻刻、 光刻、 电子刻或离子刻中的任一 种方式附着于所述基板上。  The artificial microstructure is attached to the substrate by any of etching, plating, drilling, photolithography, electron engraving or ion etching.
所述基板为陶瓷材料制成。  The substrate is made of a ceramic material.
所述基板选聚四氟乙烯、 铁电材料、 铁氧材料及铁磁材料中的一种。  The substrate is selected from one of tetrafluoroethylene, a ferroelectric material, a ferrite material, and a ferromagnetic material.
所述人工电磁材料包括叠加的多个材料片层。  The artificial electromagnetic material includes a plurality of layers of material that are superimposed.
所述多个材料片层之间填充可连接二者的液态基板原料。  The plurality of material sheets are filled with a liquid substrate material that can connect the two.
所述多个材料片层之间通过焊接、 铆接及粘接中的一种方式封装为一个整 体。  The plurality of material sheets are packaged as one unit by one of welding, riveting and bonding.
实施本发明的宽频人工电磁材料， 具有以下有益效果： 在较宽的频带范围 内折射率较大且变化较平稳， 而且在一定的频段内介电常数由零逐渐增加， 可 以满足特殊场合的需求， 比如半导体制造以及天线制造等领域。 附图说明 例或现有技术描述中所需要使用的附图作筒单地介绍， 显而易见地， 下面描述 中的附图仅仅是本发明的一些实施例， 对于本领域普通技术人员来讲， 在不付 出创造性劳动性的前提下， 还可以根据这些附图获得其他的附图。  The wide-band artificial electromagnetic material embodying the invention has the following beneficial effects: the refractive index is large and the change is relatively stable in a wide frequency band, and the dielectric constant is gradually increased from zero in a certain frequency band, which can meet the requirements of special occasions. , such as semiconductor manufacturing and antenna manufacturing. BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings, which are incorporated in the claims Other drawings may also be obtained from these drawings without the inventive labor.
图 1为本发明第一实施例的人工电磁材料的示意图；  1 is a schematic view of an artificial electromagnetic material according to a first embodiment of the present invention;
图 2为图 1的人工电磁材料的人造微结构的示意图；  2 is a schematic view of an artificial microstructure of the artificial electromagnetic material of FIG. 1;
图 3至图 7为图 2的人造微结构的变形示意图；  3 to 7 are schematic views showing the deformation of the artificial microstructure of FIG. 2;
图 8为图 1所示人工电磁材料的折射率特性曲线图； 图 9为图 1所示人工电磁材料的介电常数特性曲线图。 Figure 8 is a graph showing the refractive index characteristics of the artificial electromagnetic material shown in Figure 1; Fig. 9 is a graph showing the dielectric constant characteristics of the artificial electromagnetic material shown in Fig. 1.
具体实施方式 detailed description
请一并参阅图 1及图 2, 本实施例提供一种人工电磁材料 100, 其包括至少 一个材料片层 1 , 当具有多个材料片层 1时， 这些材料片层沿垂直于其表面的方 向堆叠到一起。  Referring to FIG. 1 and FIG. 2 together, the embodiment provides an artificial electromagnetic material 100 comprising at least one material layer 1 . When having a plurality of material layers 1 , the material layers are perpendicular to the surface thereof. The directions are stacked together.
本实施例中， 所述人工电磁材料 100包括 3块均勾等厚的材料片层 1 , 多块 材料片层 1沿垂直于基板平面的方向 （z轴方向）依次堆叠， 每两块材料片层 1 之间通过一定的封装工艺例如焊接、 铆接、 粘接等方式成为一个整体或者通过 填充可连接二者的物质例如液态基板原料， 其在固化后将已有的两材料片层 1 粘合， 从而使多块材料片层 1构成一个整体。  In this embodiment, the artificial electromagnetic material 100 includes three material layers 1 each of which is equal in thickness, and the plurality of material sheets 1 are sequentially stacked in a direction perpendicular to the plane of the substrate (z-axis direction), and each of the two pieces of material is stacked. The layers 1 are integrally formed by a certain packaging process such as soldering, riveting, bonding, or the like, or by filling a substance capable of connecting them, such as a liquid substrate material, which bonds the existing two material sheets 1 after curing. Thereby, the plurality of material sheets 1 constitute a whole.
每个材料片层 1包括基板和附着在基板上的人造微结构 3 ,将基板虚拟地划 分成多个完全相同的相互紧挨着的柱状基板单元， 这些基板单元以 X轴方向为 行、 以与之垂直的 y轴方向为列依次阵列排布。 基板单元和基板单元上的人造 微结构 3共同构成一个材料单元 2。 本实施例的材料可看作是由多个材料单元 2 沿 x、 y、 z三个方向阵列排布而成， 其中， 人造微结构可以通过蚀刻、 电镀、 钻刻、 光刻、 电子刻或离子刻等方式附着于所述基板上。 人造微结构 3 的材质 为金属线， 这里使用横截面为矩形的铜线， 当然金属线也可以使用银线等其他 金属线， 金属线的横截面也可以为圓柱状、 扁平状或者其他形状。 在本实施例 中人造微结构 3包括一开口矩形结构 3a和一部分嵌套在开口环形结构 3a内部的 工字形结构 3b。所述人造微结构 3还包括多条被工字形结构 3b的中间连接线平 分的线段 3c, 所述线段 3c位于开口矩形结构 3a的内部， 如图 5所示。 当然所 述线段 3c的一部分也可以位于开口环形结构 3a的外部，如图 7所示，所述线段 3c的长度可以相等也可以不相等如图 5所示沿所述工字形的中间连接线依次递 增， 所述开口环形结构 3a的弯折部可以为弧形如图 6所示， 开口环形结构 3a 可以为圓形、 橢圓形或者多边形如图 3和图 4所示。 图 8是电磁波通过该人工 电磁材料时的折射率特性曲线， 图 9是介电常数特性曲线， 由图 8可知折射率 在较宽的频段内 （lGHz~6GHz ) 比较稳定且都大于 6, 由对应的虚线可以知在 该频段内损耗很低； 由图 9 可知该结构的人工电磁材料在一定的频段范围内 ( 7.6GHz~9.5GHz )介电常数由零逐渐增大。  Each material sheet layer 1 includes a substrate and an artificial microstructure 3 attached to the substrate, and the substrate is virtually divided into a plurality of identical columnar substrate units next to each other, the substrate units being aligned in the X-axis direction, The y-axis direction perpendicular to the column is arranged in an array in order. The substrate unit and the artificial microstructures 3 on the substrate unit together constitute one material unit 2. The material of this embodiment can be regarded as being arranged by array of a plurality of material units 2 in three directions of x, y, and z, wherein the artificial microstructure can be etched, plated, drilled, photolithographically, electronically engraved or Ion etching or the like is attached to the substrate. The material of the artificial microstructure 3 is a metal wire. Here, a copper wire having a rectangular cross section is used. Of course, other metal wires such as a silver wire may be used for the metal wire. The cross section of the metal wire may also be cylindrical, flat or other shapes. In the present embodiment, the artificial microstructure 3 includes an open rectangular structure 3a and a part of the I-shaped structure 3b nested inside the open annular structure 3a. The artificial microstructure 3 further includes a plurality of line segments 3c halved by the intermediate connecting line of the I-shaped structure 3b, the line segments 3c being located inside the open rectangular structure 3a, as shown in FIG. Certainly, a part of the line segment 3c may also be located outside the open annular structure 3a. As shown in FIG. 7, the length of the line segment 3c may be equal or not equal, as shown in FIG. 5 along the intermediate connecting line of the I-shaped. Incrementally, the bent portion of the open annular structure 3a may be curved as shown in FIG. 6, and the open annular structure 3a may be circular, elliptical or polygonal as shown in FIGS. 3 and 4. 8 is a refractive index characteristic curve when electromagnetic waves pass through the artificial electromagnetic material, and FIG. 9 is a dielectric constant characteristic curve. It can be seen from FIG. 8 that the refractive index is relatively stable in a wide frequency band (1 GHz to 6 GHz) and both are greater than 6, Corresponding dotted lines show that the loss is very low in this frequency band. It can be seen from Fig. 9 that the artificial electromagnetic material of the structure gradually increases from zero in a certain frequency range (7.6 GHz to 9.5 GHz).
当我们需要在不同频段内用到宽频特性或者低介电常数特性时， 可以通过 改变人造微结构的尺寸来实现。 When we need to use broadband characteristics or low dielectric constant characteristics in different frequency bands, we can pass This is achieved by changing the size of the artificial microstructure.
以上所揭露的仅为本发明一种较佳实施例而已， 当然不能以此来限定本发 明之权利范围， 因此依本发明权利要求所作的等同变化， 仍属本发明所涵盖的 范围。  The above description is only a preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, and the equivalent changes made by the claims of the present invention are still within the scope of the present invention.

Claims

权 利 要 求 Rights request
1. 一种人造微结构， 其特征在于， 所述人造微结构包括一开口环形结构和 一部分嵌套在开口环形结构内部的工字形结构。 An artificial microstructure characterized in that the artificial microstructure comprises an open annular structure and an I-shaped structure partially nested inside the open annular structure.
2. 如权利要求 1所述的人造微结构， 其特征在于， 所述人造微结构还包括 至少一根与所述工字形结构的中间连接线相连接的线段。  2. The artificial microstructure according to claim 1, wherein the artificial microstructure further comprises at least one line segment connected to an intermediate connection line of the I-shaped structure.
3. 如权利要求 2所述的人造微结构， 其特征在于， 所述线段被所述工字形 的中间连接线平分。  3. The artificial microstructure according to claim 2, wherein the line segment is equally divided by the intermediate connection line of the I-shape.
4. 如权利要求 3所述的人造微结构， 其特征在于， 所述线段中至少有一条 线段位于开口环形结构的外面。  4. The artificial microstructure of claim 3, wherein at least one of the line segments is outside of the open annular structure.
5. 如权利要求 1至 4项中任一项所述的人造微结构， 其特征在于， 所述开 口环形结构为多边形。  The artificial microstructure according to any one of claims 1 to 4, wherein the open annular structure is a polygon.
6. 如权利要求 1至 4项中任一项所述的人造微结构， 其特征在于， 所述开 口环形结构的弯折部为弧形。  The artificial microstructure according to any one of claims 1 to 4, wherein the bent portion of the open annular structure is curved.
7. 如权利要求 1至 4项中任一项所述的人造微结构， 其特征在于， 所述开 口环形结构为圓形或者橢圓形。  The artificial microstructure according to any one of claims 1 to 4, wherein the open annular structure is circular or elliptical.
8. 如权利要求 1至 4所述的人造微结构， 其特征在于， 所述人造微结构采 用金属制成。  The artificial microstructure according to any one of claims 1 to 4, wherein the artificial microstructure is made of metal.
9. 如权利要求 8所述的人造微结构， 其特征在于， 所述人造微结构采用铜 线或银线制成。  9. The artificial microstructure according to claim 8, wherein the artificial microstructure is made of copper wire or silver wire.
10. 如权利要求 2所述的人造微结构， 其特征在于， 所述人造微结构包括多 根所述线段， 多根所述线段相等。  10. The artificial microstructure according to claim 2, wherein the artificial microstructure comprises a plurality of the line segments, and the plurality of the line segments are equal.
11. 如权利要求 2所述的人造微结构， 其特征在于， 所述人造微结构包括多 根所述线段， 多根所述线段的长度沿所述工字形的中间连接线依次递增。  11. The artificial microstructure according to claim 2, wherein the artificial microstructure comprises a plurality of the line segments, and the lengths of the plurality of line segments are sequentially increased along the intermediate connecting line of the I-shape.
12. 一种人工电磁材料， 其包括至少一个材料片层， 所述材料片层包括基板 和附着在所述基板上的如权利要求 1-11任一项所述的人造微结构。  12. An artificial electromagnetic material comprising at least one sheet of material, the sheet of material comprising a substrate and the artificial microstructure of any of claims 1-11 attached to the substrate.
13. 如权利要求 12所述的人工电磁材料， 其特征在于， 所述人造微结构在 所述基板上成阵列排布。  13. The artificial electromagnetic material according to claim 12, wherein the artificial microstructures are arranged in an array on the substrate.
14. 如权利要求 13所述的人工电磁材料， 其特征在于， 所述基板划分为多 个阵列排布的相同的长方体基板单元， 每个基板单元上附着有一个所述人造微 结构。 The artificial electromagnetic material according to claim 13, wherein the substrate is divided into a plurality of identical rectangular parallelepiped substrate units arranged in an array, and one of the artificial micro-cells is attached to each of the substrate units Structure.
15. 如权利要求 12所述的人工电磁材料， 其特征在于， 所述人造微结构通 过蚀刻、 电镀、 钻刻、 光刻、 电子刻或离子刻中的任一种方式附着于所述基板 上。  15. The artificial electromagnetic material according to claim 12, wherein the artificial microstructure is attached to the substrate by any one of etching, plating, drilling, photolithography, electron engraving or ion etching. .
16. 如权利要求 12所述的人工电磁材料， 其特征在于， 所述基板为陶瓷材 料制成。  16. The artificial electromagnetic material according to claim 12, wherein the substrate is made of a ceramic material.
17. 如权利要求 12所述的人工电磁材料， 其特征在于， 所述基板选自聚四 氟乙烯、 铁电材料、 铁氧材料及铁磁材料中的一种。  The artificial electromagnetic material according to claim 12, wherein the substrate is one selected from the group consisting of polytetrafluoroethylene, a ferroelectric material, a ferrite material, and a ferromagnetic material.
18. 如权利要求 12所述的人工电磁材料， 其特征在于， 所述人工电磁材料 包括叠加的多个材料片层。  18. The artificial electromagnetic material of claim 12, wherein the artificial electromagnetic material comprises a plurality of layers of material that are superimposed.
19. 如权利要求 18所述的人工电磁材料， 其特征在于， 所述多个材料片层 之间填充可连接二者的液态基板原料。  19. The artificial electromagnetic material according to claim 18, wherein the plurality of material sheets are filled with a liquid substrate material that can connect the two.
20. 如权利要求 18所述的人工电磁材料， 其特征在于， 所述多个材料片层 之间通过焊接、 铆接及粘接中的一种方式封装为一个整体。  20. The artificial electromagnetic material according to claim 18, wherein the plurality of material sheets are integrally packaged by one of welding, riveting, and bonding.
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