WO2012177040A3 - 나노구조 패턴이 형성된 투명전극 및 그 제조방법 - Google Patents

나노구조 패턴이 형성된 투명전극 및 그 제조방법 Download PDF

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Publication number
WO2012177040A3
WO2012177040A3 PCT/KR2012/004863 KR2012004863W WO2012177040A3 WO 2012177040 A3 WO2012177040 A3 WO 2012177040A3 KR 2012004863 W KR2012004863 W KR 2012004863W WO 2012177040 A3 WO2012177040 A3 WO 2012177040A3
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WO
WIPO (PCT)
Prior art keywords
transparent electrode
nano
structure patterns
manufacturing
liquid crystals
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PCT/KR2012/004863
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English (en)
French (fr)
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WO2012177040A2 (ko
Inventor
정희태
정현수
전환진
김윤호
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한국과학기술원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 한국과학기술원 filed Critical 한국과학기술원
Publication of WO2012177040A2 publication Critical patent/WO2012177040A2/ko
Publication of WO2012177040A3 publication Critical patent/WO2012177040A3/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/36—Micro- or nanomaterials

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Liquid Crystal (AREA)

Abstract

본 발명은 나노구조 패턴이 형성된 투명전극 및 그 제조방법에 관한 것으로, 보다 상세하게는, 물리적 이온 식각공정을 통한 이온 봄바드먼트(ion bombardment) 현상을 이용하여 투명전극상에 고 분해능(high resolution)과 고 종횡비(high aspcet ratio)를 가지는 나노구조 패턴을 형성시킴으로써, 투명전극의 전도성 및 광투과성의 저하 없이 우수한 액정 배향특성을 나타내는 나노구조 패턴이 형성된 투명전극 및 그 제조방법에 관한 것이다. 본 발명에 따른 나노구조 패턴이 형성된 투명전극의 제조방법은 물리적 이온 식각을 통한 이온 봄바드먼트 현상을 적용하여 제조됨으로써 간단한 공정과 저렴한 비용으로 높은 다양한 종횡비와 균일성을 가지는 액정의 프리틸트가 형성된 투명전극을 제조할 수 있고, 투명전극으로 직접 액정을 배향시킴으로써 광 투과성이 높을 뿐만 아니라, 저항값 또한 낮아 액정 배향 특성 및 안정성을 향상시켜 제품 성능을 개선할 수 있을 뿐만 아니라, 본 발명에 따른 투명전극이 형성된 두 개의 기판의 배열로 액정의 배향을 원하는 방향으로 정밀하게 조절할 수 있어 다양한 디스플레이 소자에 응용할 수 있다.
PCT/KR2012/004863 2011-06-20 2012-06-20 나노구조 패턴이 형성된 투명전극 및 그 제조방법 WO2012177040A2 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020110059506A KR101231898B1 (ko) 2011-06-20 2011-06-20 나노구조 패턴이 형성된 투명전극 및 그 제조방법
KR10-2011-0059506 2011-06-20

Publications (2)

Publication Number Publication Date
WO2012177040A2 WO2012177040A2 (ko) 2012-12-27
WO2012177040A3 true WO2012177040A3 (ko) 2013-04-04

Family

ID=47423074

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2012/004863 WO2012177040A2 (ko) 2011-06-20 2012-06-20 나노구조 패턴이 형성된 투명전극 및 그 제조방법

Country Status (2)

Country Link
KR (1) KR101231898B1 (ko)
WO (1) WO2012177040A2 (ko)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102164961B1 (ko) 2014-05-20 2020-10-14 삼성디스플레이 주식회사 액정 표시패널 제조방법
WO2016129782A1 (ko) * 2015-02-12 2016-08-18 한국과학기술원 매크로 프리패턴을 이용한 투명전극 및 수직 배향형 액정표시소자의 제조방법
KR102362199B1 (ko) * 2015-02-12 2022-02-15 한국과학기술원 매크로 프리패턴을 이용한 투명전극 및 수직 배향형 액정표시소자의 제조방법
KR102288729B1 (ko) * 2015-11-11 2021-08-10 동우 화인켐 주식회사 스마트 윈도우 및 이의 제조 방법
KR20170055239A (ko) * 2015-11-11 2017-05-19 동우 화인켐 주식회사 유기발광소자용 투명 전극 및 이의 제조 방법
KR102105881B1 (ko) * 2018-01-19 2020-04-29 한국과학기술원 나노패턴의 분해능 제어를 위한 용액기반의 전기화학적 미세제어 증착 방법
KR102037957B1 (ko) * 2018-03-13 2019-10-30 한국과학기술원 소프트리소그래피를 이용한 액정 배향제어 광학 구조체의 제조방법 및 상기 방법에 의해 제조된 액정 배향제어 광학 구조체
KR20210007074A (ko) 2019-07-09 2021-01-20 삼성디스플레이 주식회사 표시 장치
CN114879390B (zh) * 2022-06-06 2023-09-12 南京信息工程大学 一种纳米线结构色彩色显示屏及其制作方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040100239A (ko) * 2003-05-22 2004-12-02 한국과학기술원 나노미터 또는 그 이하 사이즈의 패턴 형성방법
KR20060091115A (ko) * 2005-02-14 2006-08-18 한국표준과학연구원 나노판을 이용한 나노부품, 그 제조방법 및 나노기계의 제작방법
KR20110007724A (ko) * 2009-07-17 2011-01-25 한국전자통신연구원 반사방지 나노구조물 및 그의 제조 방법

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040100239A (ko) * 2003-05-22 2004-12-02 한국과학기술원 나노미터 또는 그 이하 사이즈의 패턴 형성방법
KR20060091115A (ko) * 2005-02-14 2006-08-18 한국표준과학연구원 나노판을 이용한 나노부품, 그 제조방법 및 나노기계의 제작방법
KR20110007724A (ko) * 2009-07-17 2011-01-25 한국전자통신연구원 반사방지 나노구조물 및 그의 제조 방법

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Publication number Publication date
WO2012177040A2 (ko) 2012-12-27
KR101231898B1 (ko) 2013-02-08
KR20120139948A (ko) 2012-12-28

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