WO2012153739A1 - Probe and measuring device provided with same - Google Patents

Probe and measuring device provided with same Download PDF

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Publication number
WO2012153739A1
WO2012153739A1 PCT/JP2012/061772 JP2012061772W WO2012153739A1 WO 2012153739 A1 WO2012153739 A1 WO 2012153739A1 JP 2012061772 W JP2012061772 W JP 2012061772W WO 2012153739 A1 WO2012153739 A1 WO 2012153739A1
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WO
WIPO (PCT)
Prior art keywords
vibrator
magnet
chip
measured
holder
Prior art date
Application number
PCT/JP2012/061772
Other languages
French (fr)
Japanese (ja)
Inventor
博次 荻
雅彦 平尾
侑仁 坂本
Original Assignee
インサイト株式会社
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Publication date
Application filed by インサイト株式会社 filed Critical インサイト株式会社
Priority to JP2013514018A priority Critical patent/JPWO2012153739A1/en
Publication of WO2012153739A1 publication Critical patent/WO2012153739A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0654—Imaging
    • G01N29/0681—Imaging by acoustic microscopy, e.g. scanning acoustic microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H13/00—Measuring resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/12—Analysing solids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/40—Investigating hardness or rebound hardness
    • G01N3/405—Investigating hardness or rebound hardness by determining the vibration frequency of a sensing element in contact with the specimen
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0058—Kind of property studied
    • G01N2203/0069—Fatigue, creep, strain-stress relations or elastic constants
    • G01N2203/0075—Strain-stress relations or elastic constants
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/023—Solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02827—Elastic parameters, strength or force

Definitions

  • the present invention relates to a probe and a measuring apparatus including the probe.
  • Patent Document 1 an elastic constant measuring apparatus for measuring an elastic constant of a sample by fixing a vibrator to a top plate with a spring is known.
  • the ball bearing is fixed to the end of the vibrator opposite to the top plate side.
  • a solenoid coil is wound around the case that houses the vibrator, and an electric field for vibrating the vibrator is applied to the vibrator by the solenoid coil.
  • the conventional elastic constant measuring device has a problem that it is difficult to ensure stable vibration of the vibrator because the vibrator is fixed to the top plate by a spring.
  • the conventional elastic constant measuring apparatus is configured to apply a bias force to the sample by gravity when the vibrator contacts the sample, the bias force is applied to the sample from a direction different from the direction of gravity. In some cases, it is difficult to accurately measure the elastic constant.
  • the present invention has been made to solve such problems, and its purpose is to ensure stable vibration of the vibrator and to measure the elastic constant by applying a bias force to the sample from any direction. Is to provide a simple probe.
  • Another object of the present invention is to provide a measuring apparatus provided with a probe capable of ensuring stable vibration of a vibrator and measuring an elastic constant by applying a bias force to a sample from an arbitrary direction. .
  • the probe includes a vibrator, a chip, a holder, first and second magnets, and first to third antennas.
  • the vibrator has a rod-like shape and is made of a piezoelectric body.
  • the chip is bonded to one end of the vibrator on the measured object side and has a hardness higher than that of the measured object.
  • the holder contacts the vibrator with a minimum contact area in the circumferential direction of the vibrator, and holds a part of the vibrator corresponding to a vibration node of the vibrator.
  • the first magnet is disposed on the other end side of the vibrator and is bonded to a support member that supports the holder.
  • the second magnet is disposed at a desired distance from the first magnet in the length direction of the vibrator, and has the same polarity as the first magnet.
  • the first antenna is connected to the ground potential.
  • the second antenna applies an excitation voltage for exciting the vibration of the vibrator to the vibrator in cooperation with the first antenna.
  • the third antenna receives an electric field generated in the vibrator due to the excitation voltage being applied to the vibrator as a voltage in cooperation with the first antenna.
  • the first to third antennas are arranged in the vicinity of a part of the vibrator, and the chip has an arc shape protruding in the direction from the vibrator toward the object to be measured.
  • the measuring device includes a probe, a voltage source, and a detector.
  • a probe consists of the probe of Claim 1.
  • the voltage source outputs an excitation voltage to the second antenna.
  • the detector detects the resonance frequency of the vibrator based on the received voltage received by the third antenna, and calculates the Young's modulus of the device under test based on the detected resonance frequency.
  • the measuring apparatus includes a probe, a voltage source, and a detector.
  • a probe consists of the probe of Claim 1.
  • the voltage source outputs an excitation voltage to the second antenna.
  • the detector detects a half width of a peak having a resonance frequency of the vibrator based on the received voltage received by the third antenna, or the vibrator attenuates based on the received voltage received by the third antenna. Detect the damping constant when
  • the measuring apparatus includes a probe, a voltage source, and a determiner.
  • a probe consists of the probe of Claim 1.
  • the voltage source outputs a voltage having a frequency obtained by multiplying the resonance frequency of the vibrator by n (n is an integer of 2 or more) or a frequency obtained by multiplying the resonance frequency of the vibrator by 1 / n as an excitation voltage to the second antenna.
  • the determiner determines whether the resonance frequency of the vibrator is detected based on the reception voltage received by the third antenna.
  • the vibrator is held by the holder with a minimum contact area at a position corresponding to the vibration node of the vibrator.
  • the vibrator applies a bias force to the object to be measured by the repulsive force generated by the first and second magnets having the same polarity.
  • the vibrator vibrates freely, and the bias force applied to the object to be measured is constant even if the object to be measured is arranged at an arbitrary angle with respect to the vertical direction.
  • FIG. 2 is a plan view of a vibrator, a holding member, and an antenna viewed from the magnet side shown in FIG. 1.
  • FIG. 2 is an enlarged view of a vibrator and a chip shown in FIG.
  • FIG. 2 is a perspective view of a vibrator, a chip, a holding member, a support member, a magnet, and a resin member shown in FIG. 1.
  • FIG. 6 is a second process diagram illustrating a manufacturing method for manufacturing the probe illustrated in FIG. 1.
  • FIG. 6 is a third process diagram illustrating a manufacturing method for manufacturing the probe illustrated in FIG. 1.
  • FIG. 8 is a fourth process diagram illustrating a manufacturing method for manufacturing the probe illustrated in FIG. 1. It is a conceptual diagram for demonstrating operation
  • FIG. 1 is a cross-sectional view showing a configuration of a probe according to an embodiment of the present invention.
  • a probe 10 according to an embodiment of the present invention includes a vibrator 1, a chip 2, a holding member 3, antennas 4 to 6, a support member 7, magnets 8 and 13, and a resin.
  • a member 9, cases 11 and 14, and a top plate 12 are provided.
  • the vibrator 1 has a quadrangular prism shape, and is made of, for example, a single crystal of langasite (La 3 Ga 5 SiO 14 ) or quartz. That is, the vibrator 1 is made of a piezoelectric body.
  • the vibrator 1 is held by the holding member 3, one end of which protrudes to the outside through the opening 111 of the case 11, and the other end side is disposed in the space 7 ⁇ / b> A in the support member 7. In this case, one end of the vibrator 1 protrudes outward from the bottom surface 11A of the case 11 by about 5 mm, for example.
  • the vibrator 1 has a size of 2.0 mm ⁇ 2.0 mm ⁇ 20.0 mm. Furthermore, when the vibrator 1 is made of Langasite, the [100] direction of the Langasite is the longitudinal direction of the vibrator 1.
  • the chip 2 is made of, for example, tungsten carbide, and is bonded to one end of the vibrator 1 with an adhesive.
  • the chip 2 is harder than the object to be measured.
  • the holding member 3 has a substantially circular planar shape, and holds a substantially central portion of the vibrator 1 in the length direction of the vibrator 1 by a method described later.
  • the substantially central portion of the vibrator 1 is a position where a node of a fundamental mode of vibration exists. Accordingly, the holding member 3 holds a part of the vibrator 1 corresponding to the vibration node of the vibrator 1.
  • the antenna 4 has one end wound around the holding member 3 and pulled out through the resin member 9 and the cases 11 and 14, and the other end connected to the ground potential.
  • the antenna 5 has one end disposed on one side of the antenna 4 in the length direction of the vibrator 1 and wound around the holding member 3. The antenna 5 is pulled out through the resin member 9 and the cases 11 and 14.
  • the one end side of the antenna 6 is disposed on the other side of the antenna 4 in the length direction of the vibrator 1 and is wound around the holding member 3.
  • the antenna 6 is pulled out through the resin member 9 and the cases 11 and 14.
  • each of the antennas 4 to 6 has a diameter of 1 mm, for example, and is wound around the holding member 3 only once.
  • the support member 7 has a hollow cylindrical shape, and is fixed to the magnet 8 and supports the holding member 3.
  • the magnet 8 is bonded to the support member 7.
  • the resin member 9 is made of acrylic, for example, and is disposed between the holding member 3, the supporting member 7 and the magnet 8 and the case 11, and covers the holding member 3, the antennas 4 to 6, the supporting member 7 and the magnet 8.
  • a space 15 is formed between the magnet 8 and the resin member 9 and the top plate 12, and the vibrator 1, the chip 2, the holding member 3, the antennas 4 to 6, the support member 7, the magnet 8 and the resin
  • the member 9 can move integrally in the length direction of the vibrator 1. In this case, portions of the antennas 4 to 6 arranged in the space 15 are actually formed in a spiral shape, and the vibrator 1, the chip 2, the holding member 3, the antennas 4 to 6, and the support member. 7, the magnet 8 and the resin member 9 are configured to be movable in the length direction of the vibrator 1.
  • a space 16 is formed below the holding member 3 between the vibrator 1 and the resin member 9, and the space 16 communicates with the opening 111 of the case 11.
  • the case 11 is made of a hollow cylindrical Teflon (registered trademark) and has an opening 111.
  • the case 11 is fixed to the top plate 12 on the side opposite to the opening 111.
  • the top plate 12 is made of acrylic, for example, and is fixed in the case 14.
  • the magnet 13 has the same polarity as the magnet 8.
  • the magnet 13 is fixed in the case 14 in contact with the top plate 12.
  • the case 14 is made of acrylic, for example, and covers a part of the case 11, the top plate 12 and the magnet 13.
  • FIG. 2 is a plan view of the vibrator 1, the holding member 3, and the antennas 4 to 6 viewed from the magnet 8 side shown in FIG.
  • the holding member 3 includes an O-ring 31 and a fixture 32.
  • the O-ring 31 is made of nitrile rubber, for example.
  • Nitrile rubber is a copolymer of acrylonitrile and 1,3-butadiene.
  • the vibrator 1 has a substantially square cross-sectional shape.
  • the O-ring 31 is arranged around the vibrator 1 so as to contact the four vertices of the square of the vibrator 1. As described above, the O-ring 31 contacts the vibrator 1 with a minimum contact area in the circumferential direction of the cross-sectional shape of the vibrator 1 when the vibrator 1 is cut in a direction orthogonal to the length direction of the vibrator 1. .
  • the vibrator 1 and the O-ring 31 may be in point contact at four vertices or may be in surface contact at four corners. The point contact or surface contact depends on the hardness of the O-ring 31. The harder the O-ring 31, the easier the vibrator 1 and the O-ring 31 are in point contact. The softer the transducer 1 and the O-ring 31 are in surface contact.
  • the fixture 32 has a donut-like planar shape and is made of, for example, acrylic resin.
  • the fixture 32 is arranged around the O-ring 31.
  • the antennas 4 to 6 are wound only once around the fixture 32.
  • FIG. 3 is an enlarged view of the vibrator 1 and the chip 2 shown in FIG.
  • chip 2 has a thin spherical piece cross-sectional shape.
  • the chip 2 has, for example, a diameter of 1 to 2 mm and a thickness of about 0.3 mm.
  • FIG. 4 is a perspective view of the vibrator 1, chip 2, holding member 3, support member 7, magnet 8 and resin member 9 shown in FIG. In FIG. 4, the antennas 4 to 6 are omitted.
  • the vibrator 1 is held by a holding member 3, and the holding member 3 is connected to a magnet 8 by a support member 7.
  • the resin member 9 is formed in a substantially cylindrical shape so as not to contact the vibrator 1 but to contact the holding member 3, the support member 7 and the magnet 8 and cover the holding member 3, the support member 7 and the magnet 8.
  • the resin member 9 has a bottom surface 9 ⁇ / b> A on the chip 2 side, and a space 16 between the resin member 9 and the vibrator 1.
  • the holding member 3, the support member 7, the magnet 8 and the resin member 9 constitute an integrated object
  • the vibrator 1 has an O-ring 31 (not shown in FIG. 4) in the integrated holding member 3. Is held only by.
  • the vibrator 1, the chip 2, the holding member 3, the support member 7, the magnet 8, and the resin member 9 can be moved integrally in the length direction of the vibrator 1.
  • FIGS. 5 to 8 are first to fourth process diagrams showing a manufacturing method for manufacturing the probe 10 shown in FIG. 1, respectively.
  • a langasite having a quadrangular prism shape is cut out from a lump of single crystal of langasite to produce the vibrator 1 (step (a)).
  • the langasite is cut out so that the length direction is the direction of [100].
  • the O-ring 31 is attached to the substantially central portion of the vibrator 1 (step (b)), and the fixture 32 having a donut shape is attached around the O-ring 31 (step (c)).
  • a chip 2 having a thin sphere piece (thickness of about 0.3 mm) is manufactured, and the manufactured chip 2 is bonded to one end of the vibrator 1 with an adhesive. Further, the other end side of the vibrator 1 is put into a support member 7 having a hollow cylindrical shape, and the holding member 3 (O-ring 31 and fixture 32) is bonded to the support member 7 with an adhesive. Further, the magnet 8 is bonded to the support member 7 with an adhesive (step (d)). In this way, the magnet 8 is bonded to the support member 7 that supports the O-ring 31.
  • the antennas 4 to 6 are wound only once around the fixture 32 (step (e)).
  • step (e) vibrator 1, chip 2, holding member 3, parts of antennas 4-6, support member 7 and magnet 8 are placed in container 20 (step (f )), A resin made of acrylic is filled into the container 20. Then, the filled resin is dried. As a result, the resin member 9 formed into a cylindrical shape in contact with the holding member 3, a part of the antennas 4 to 6, the support member 7 and the magnet 8 is produced (step (g)).
  • step (h) Thereafter, the vibrator 1, the chip 2, the holding member 3, the antennas 4 to 6, the support member 7, the magnet 8 and the resin member 9 are mounted in the case 11 (step (h)).
  • step (h) a hole is made in case 11, and antennas 4-6 are taken out of case 11 through antennas 4-6 in the opened hole (step (i)).
  • the top plate 12 is bonded to the case 11 with an adhesive (step (j)).
  • the case 14 is produced by injection molding (step (k)).
  • the case 14 has recesses 141 and 142.
  • the recess 141 has a substantially square planar shape
  • the recess 142 has a substantially circular planar shape.
  • step (k) magnet 13 is mounted in recess 141 of case 14 (step (l)).
  • the antennas 4 to 6 are passed through the holes, a part of the case 11 and the top plate 12 are placed in the recess 142, and a part of the case 11 and the top plate 12 are placed in the case 14 Attach to. Thereby, the probe 10 is completed (step (m)).
  • FIG. 9 is a conceptual diagram for explaining the operation of the probe 10 shown in FIG. With reference to (a) of FIG. 9, since the magnet 13 has the same polarity as the magnet 8, a repulsive force acts between the magnets 8 and 13. Since the probe 10 is not in contact with the device under test 30, the resin member 9 is pushed toward the opening 111 of the case 11 by the repulsive force RF that the magnet 8 receives from the magnet 13, and the bottom surface 9 ⁇ / b> A of the resin member 9. Is in contact with the case 11. Further, one end of the vibrator 1 and the chip 2 are out of the case 11.
  • the object to be measured 30 is pushed with the total force Fall of the gravity G and the repulsive force RF applied to the probe 10.
  • the repulsive force RF is sufficiently larger than the gravity G, the influence of gravity hardly affects the force Fall. Due to the force Fall, the vibrator 1, the chip 2, the holding member 3, the antennas 4 to 6, the support member 7, the magnet 8, and the resin member 9 generate a force Frev of the same magnitude as the force Fall from the object to be measured 30 as a repulsive force RF. Receive in the opposite direction.
  • the vibrator 1, the chip 2, the holding member 3, the antennas 4 to 6, the support member 7, the magnet 8, and the resin member 9 move by ⁇ in the direction opposite to the repulsive force RF (see FIG. 9B).
  • This moved distance ⁇ corresponds to the amount by which the vibrator 1 and the chip 2 are pushed.
  • FIG. 9 shows the case where the device under test 30 is arranged in a horizontal plane and the probe 10 is brought into contact with the upper surface 30A of the device under test 30.
  • the probe 10 is measured by the repulsive force RF until the bottom surface 11A of the case 11 contacts the device under test 30. It is pushed in the direction of 30. Since the gravity G is sufficiently smaller than the repulsive force RF, the chip 2 can be pushed into the device under test 30 with the same force in this case as well.
  • the magnet 13 is disposed at a position away from the magnet 8 by a desired distance at which the repulsive force RF acting on the magnet 8 is the same.
  • the vibrator 1, the chip 2, the holding member 3, the antennas 4 to 6, the support member 7, the magnet 8, and the resin member 9 move by ⁇ in the direction opposite to the repulsive force RF.
  • the vibrator 1 since the vibrator 1 is held by the O-ring 31, even if the probe 10 is pressed against the device under test 30, the vibrator 1 is not attached to the device under test 30.
  • the vibrator 1, the chip 2, the holding member 3, the antennas 4 to 6, the support member 7, the magnet 8, and the resin member 9 move by ⁇ in the direction opposite to the repulsive force RF without moving in the in-plane direction. Therefore, even if the device under test 30 is arranged so as to form an arbitrary angle with the vertical direction, the pushing amount can be kept constant.
  • the resonator 1 is made of langasite, which has a trigonal crystal structure and has six independent elastic constants C 11 , C 12 , C 13 , C 14 , C 33. , C 44 , two piezoelectric constants e 11 , e 14 , and two dielectric constants ⁇ 11 , ⁇ 33 .
  • Table 1 shows the elastic constants C 11 , C 12 , C 13 , C 14 , C 33 , C 44 , piezoelectric constants e 11 , e 14 , dielectric constants ⁇ 11 , ⁇ 33, and density ⁇ of Langasite.
  • the units of the elastic constants C 11 , C 12 , C 13 , C 14 , C 33 , C 44 are [GPa]
  • the units of the piezoelectric constants e 11 , e 14 are [C / m 2 ]
  • the units of dielectric constants ⁇ 11 and ⁇ 33 are [10 ⁇ 22 F / m 2 ]
  • the unit of density ⁇ is [kg / m 2 ].
  • 10 and 11 are first and second conceptual diagrams for modeling the vibration of the vibrator 1, respectively.
  • the vibrator 1 has an elongated structure that can be sufficiently assumed to be longitudinal vibration.
  • the longitudinal direction of the vibrator 1 is the Z-axis
  • the length of the vibrator 1 is L
  • the Young's modulus in the Z-axis direction is E
  • the vibrator 1 The cross-sectional area is A
  • the density of the vibrator 1 is ⁇
  • the motion equation of vibration of the vibrator 1 is expressed by the following formula.
  • ⁇ is the angular frequency of the vibrator 1
  • k is the wave number of vibration
  • C 1 and C 2 are constants.
  • the angular frequency and the wave number are expressed by the following equations using the frequency f and the speed of sound v.
  • Equation (3) ⁇ is the density of the vibrator 1, and E is the Young's elastic modulus of the vibrator 1.
  • the spring constant K represents the contact rigidity between the chip 2 and the device under test 30.
  • the contact stiffness K is expressed by the following equation according to Hertz's contact theory (see Non-Patent Documents 1 and 2).
  • Equation (6) F is the bias force, R is the radius of the tip 2, and E * is the effective Young's modulus.
  • the effective Young's modulus E * is expressed by the following equation.
  • E spe is the Young's modulus of the device under test 30
  • E tip is the Young's modulus of the chip 2
  • ⁇ spe is the Poisson's ratio of the device under test 30
  • ⁇ tip is It is the Poisson's ratio of chip 2.
  • the left side of the equation (5) includes the resonance frequency from the equation (3)
  • the right side of the equation (5) includes the Young's modulus E spe of the device under test 30 from the equations (6) and (7). Therefore, by measuring the resonance frequency f of the vibrator 1, the Young's modulus E spe of the device under test 30 can be obtained.
  • the resonance frequency f fosc by the method described later, the Young's modulus E spe of the device under test 30 can be calculated.
  • FIG. 12 is a block diagram of an elastic constant measuring apparatus according to an embodiment of the present invention.
  • elastic constant measuring apparatus 100 according to the embodiment of the present invention includes a probe 10, a voltage source 40, and a detector 50.
  • the probe 10 is as described above.
  • the voltage source 40 is connected to the other end of the antenna 5 of the probe 10.
  • the voltage source 40 is composed of, for example, a synthesizer (NF circuit design block, WF1974). Then, the voltage source 40 transmits a burst wave (about 10 ms) of the voltage Vv having a frequency component f (about 0.1 MHz) to vibrate the vibrator 1 to the antenna 5 and outputs a trigger signal to the detector 50.
  • the voltage Vv is, for example, a voltage whose difference between the maximum value and the minimum value is 50V.
  • the detector 50 is connected to the other end of the antenna 6 and includes, for example, a digitizer (National Instruments, NIUSB-5133).
  • the detector 50 receives a trigger signal from the voltage source 40.
  • the detector 50 receives from the antenna 6 a received signal of the polarization electric field generated when the vibrator 1 vibrates after a certain time (for example, 10 ⁇ s) from the rising edge of the trigger signal. Thereafter, the detector 50 performs a Fourier transform on the received signal, and obtains an amplitude A corresponding to the vibration frequency f.
  • the detector 50 obtains the resonance frequency fosc of the vibrator 1 based on the relationship between the vibration frequency f and the amplitude A when the vibration frequency f is changed, and calculates the resonance frequency fosc and the equations (3) and (5).
  • the Young's modulus E spe of the device under test 30 is calculated using (7).
  • the record length of the detector 50 is 2500 (Sampling), and the sample rate is 2.0 ⁇ 10 5 (Sampling / s).
  • the detector 50 creates digital data of trigonometric functions (cos (2 ⁇ f ⁇ t), sin (2 ⁇ f ⁇ t)) in accordance with the waveform of the received signal received from the antenna 6 and the frequency f, and the created data Perform a Fourier transform by accumulating trigonometric functions. More specifically, the detector 50 performs a Fourier transform by the following method.
  • the detector 50 integrates the trigonometric function according to the following equation.
  • the detector 50 integrates the trigonometric function according to the following equation to obtain I 1 and I 2 .
  • FIG. 13 is a timing chart of burst waves and trigger signals.
  • each of burst waves BW1 and BW2 has, for example, the number of 1000 cycles and a length of 10 ms.
  • the interval d between the burst wave BW1 and the burst wave BW2 is, for example, 10 ms.
  • the trigger signal TRG becomes L (logic low) level at timing t1 when the burst wave BW1 rises, and becomes H (logic high) level at timing t2 when the burst wave BW1 falls, and at the rise of the burst wave BW2. It becomes L level at a certain timing t3 and becomes H level at a timing t4 which is the falling edge of the burst wave BW2.
  • the detector 50 receives a reception signal from the antenna 6 from timing t2 to timing t3. Accordingly, the detector 50 starts to receive the received signal from the antenna 6 at a timing t2 that is a certain time after the timing t1 at which the burst wave BW1 is applied to the vibrator 1.
  • FIG. 14 is a flowchart for explaining a method of measuring Young's modulus.
  • a method for measuring the Young's modulus will be described on the assumption that the probe 10 is pressed against the device under test 30 and the tip 2 is in contact with the device under test 30.
  • the frequency measurement range, the frequency changing interval, the number of burst wave marks, and the burst wave interval are set in voltage source 40 (step S1). .
  • the voltage source 40 determines a frequency component to vibrate the vibrator 1 within the frequency measurement range, and a burst composed of the voltage Vv having the determined frequency component and the number of marks set in step S1. A wave is generated, and the generated burst wave is transmitted to the antenna 5 at the burst wave interval set in step S1. At the same time, the voltage source 40 outputs the trigger signal TRG to the detector 50 (step S2).
  • the antenna 5 cooperates with the antenna 4 to apply the voltage Vv to the vibrator 1, and an oscillating electric field is generated in the vibrator 1.
  • a piezoelectric phenomenon occurs in the vibrator 1 by the generated oscillating electric field, and the vibrator 1 vibrates (step S3).
  • the antenna 6 cooperates with the antenna 4 to detect the polarization electric field generated along with the vibration of the vibrator 1 as a voltage (step S4).
  • the detector 50 receives a received signal from the antenna 6 between timing t2 and timing t3 shown in FIG.
  • the detector 50 performs a Fourier transform on the received signal by the method described above to obtain an amplitude A with respect to the vibration frequency f (step S6).
  • the voltage source 40 determines whether or not the frequency f has been changed all within the measurement range (step S7).
  • step S7 When it is determined in step S7 that the frequency f has not been changed in all of the measurement range, the voltage source 40 changes the frequency f within the measurement range (step S8). In this case, the voltage source 40 changes the frequency f by adding the frequency change interval set in step S1 to the original frequency.
  • step S2 the series of operations returns to step S2, and step S2 to step S8 described above are repeatedly executed until it is determined in step S7 that the frequency f has been changed in all of the measurement range.
  • step S7 When it is determined in step S7 that the frequency f has been changed in all of the measurement range, the detector 50 plots the relationship between the frequency f and the amplitude A, and sets the frequency at which the amplitude A is maximum to the resonance frequency fosc. (Step S9).
  • the detector 50 calculates the Young's modulus E spe of the device under test 30 using the detected resonance frequency fosc and equations (3), (5) to (7) (step S10). This completes the measurement of Young's modulus.
  • FIG. 15 is a diagram showing the relationship between amplitude and frequency. 15A and 15B, the vertical axis represents amplitude, and the horizontal axis represents frequency.
  • a curve k1 shows the relationship between amplitude and frequency when the O-ring is attached to the transducer 1 of the probe 10 according to the embodiment of the present invention
  • a curve k2 shows the elastic constant measurement disclosed in Patent Document 1. The relationship between amplitude and frequency when an O-ring is attached to the vibrator of the apparatus is shown.
  • the curve k3 shows the relationship between the amplitude and the frequency when the O-ring is not attached to the transducer 1 of the probe 10 according to the embodiment of the present invention
  • the curve k4 shows the elastic constant measurement disclosed in Patent Document 1. The relationship between the amplitude and the frequency when the O-ring is not attached to the vibrator of the apparatus is shown.
  • the vibration of the transducer 1 of the probe 10 has a peak at one frequency whether the O-ring is attached to the transducer 1 or not (see curves k1 and k3).
  • the vibration of the vibrator disclosed in Patent Document 1 has peaks at a plurality of frequencies (see curves k2 and k4).
  • the vibration of the vibrator disclosed in Patent Document 1 has peaks at a plurality of frequencies centering on 0.111 (MHz) (see curve k2).
  • Table 2 shows the input voltage, integration interval length, and burst wave length when measuring the resonant frequency.
  • Table 3 shows the resonance frequency and the Q value.
  • the input voltage is 10 V (difference between the maximum value and the minimum value), the integration interval length is 12.5 ms, and the burst wave length is 10 ms.
  • the input voltage is 200 V (difference between the maximum value and the minimum value), the integration interval length is 0.4 ms, and the burst wave length is 0.2 ms. is there.
  • the integration interval length and the burst wave length are significantly longer than in the prior art, and the input voltage is significantly reduced.
  • the Q value is 1855 when the O-ring is not attached to the vibrator 1, and is 1587 when the O-ring is attached.
  • the Q value is 496.5 when the O-ring is not attached to the vibrator, and 283.3 when the O-ring is attached.
  • the length of the burst wave is as short as 0.2 ms, a sufficient resonance state cannot be created, and the signal intensity does not increase even when a large voltage ( ⁇ 200 V) is used. .
  • the vibrator 1 since the vibrator 1 is likely to vibrate, the length of the burst wave can be increased to 10 ms. Therefore, a high Q value can be obtained even at a low voltage (10 V).
  • the Young's modulus was calculated from the resonance frequency fosc obtained using the probe 10, and it was 113.51 GPa.
  • FIG. 16 is a diagram showing the relationship between the measured Young's modulus and the reported Young's modulus.
  • the radius of the chip 2 is 2 mm, and the bias force F is 0.455N.
  • the X-axis direction of the crystal coincides with the longitudinal direction, and the size is 2 mm ⁇ 2 mm ⁇ 20 mm.
  • the measured values are in good agreement with the reported values. Moreover, the straight line shown in FIG. 16 represents that the measured value has a one-to-one correspondence with the reported value.
  • the Young's modulus of the object to be measured 30 can be accurately obtained simply by touching the object to be measured 30 without using any fitting parameters.
  • the detector 50 detects the resonance frequency of the vibrator 1 and calculates the Young's modulus of the DUT 30 based on the detected resonance frequency.
  • the detector 50 is not limited to this, and the peak half-value width FWHM having the resonance frequency of the vibrator 1 may be detected. In this case, the detector 50 detects the half width FWHM of the peak indicated by the curves k1 and k3 in FIG.
  • the detector 50 may detect an attenuation constant ⁇ when the vibrator 1 is attenuated.
  • FIG. 17 is a diagram illustrating the attenuation characteristics of the vibrator 1.
  • the detector 50 receives a reception signal from the antenna 6 from timing t2 to timing t3 shown in FIG. Since the burst wave is not applied to the vibrator 1 from the timing t2 to the timing t3, the vibration of the vibrator 1 is attenuated as a vibration curve DCY shown in FIG.
  • the detector 50 detects the vibration curve DCY, and detects the envelope EVL of the detected vibration curve DCY.
  • the envelope EVL is usually expressed by e ⁇ t ( ⁇ : attenuation constant, t: time).
  • the detector 50 fits the detected envelope EVL with e ⁇ t to detect the attenuation constant ⁇ .
  • FIG. 18 is a cross-sectional view showing a specific example of the device under test 30.
  • the device under test 30 includes a main body portion 301 and a coating layer 302.
  • the coating layer 302 is disposed on the main body 301 so as to cover the surface 301 ⁇ / b> A of the main body 301. Then, peeling portions 303 and 304 are formed between the main body portion 301 and the coating layer 302.
  • the tip 2 of the probe 10 is brought into contact with the surface 302A of the coating layer 302 of the object to be measured 30 to detect the attenuation constant ⁇ h of the vibrator 1.
  • the attenuation constant of the vibrator 1 when the peeling portions 303 and 304 are not formed is ⁇ 0
  • the attenuation constant ⁇ h is larger than the attenuation constant ⁇ 0 . The reason is as follows.
  • the vibration of the vibrator 1 propagates to the coating layer 302 and the coating layer 302 also vibrates. Since 304 absorbs the vibration of the coating layer 302, the vibration of the coating layer 302 is easily attenuated. As a result, the vibration of the vibrator 1 is also easily attenuated, and the damping constant ⁇ h of the vibrator 1 when the peeling portions 303 and 304 are formed on the object to be measured 30 has the peeling portions 303 and 304 formed. This is because it becomes larger than the attenuation constant ⁇ 0 in the case of not being present.
  • the detector 50 measuring the attenuation constant ⁇ of the vibrator 1 by the method described above. In this case, if the detected attenuation constant ⁇ is larger than the attenuation constant ⁇ 0 , the detector 50 detects that the peeling portions 303 and 304 are formed, and the detected attenuation constant ⁇ is substantially equal to the attenuation constant ⁇ 0 . If they are equal, it is detected that the peeling portions 303 and 304 are not formed.
  • the peak half-value width FWHM h having the resonance frequency when the peeling portions 303 and 304 are formed is larger than the peak half-value width FWHM 0 having the resonance frequency when the peeling portions 303 and 304 are not formed. growing.
  • the reason is the same as the reason why the attenuation constant ⁇ h of the vibrator 1 when the peeling portions 303 and 304 are formed is larger than the attenuation constant ⁇ 0 when the peeling portions 303 and 304 are not formed. is there.
  • the detector 50 forms the peeling portions 303 and 304 if the detected half width FWHM is larger than the half width FWHM 0. If the detected half-value width FWHM is substantially equal to the half-value width FWHM 0 , it is detected that the peeling portions 303 and 304 are not formed.
  • the presence or absence of a defect in the device under test 30 can be detected by detecting the half-width FWHM of the peak having the resonance frequency or the attenuation constant ⁇ of the vibrator 1.
  • the detector 50 detects the attenuation constant ⁇ of a plurality of types of objects to be measured 30, the object to be measured 30 that matches the purpose can be selected by comparing the magnitudes of the attenuation constants ⁇ .
  • the device under test 30 having a larger attenuation constant ⁇ may be selected. Further, when selecting a material to be used for the resonant device of the mobile phone, it is only necessary to select the device under test 30 having a smaller attenuation constant ⁇ .
  • the device under test 30 breaks, there is a timing at which the damping constant ⁇ suddenly increases immediately before the break, so the change over time of the damping constant ⁇ of the device under test 30 is measured, and the damping constant ⁇ suddenly increases. If it becomes larger, it may be determined that the device under test 30 may be broken, and the device under test 30 may be replaced. For example, in an airplane, the load is most applied to the boundary between the wing and the main body, and the base of the wing is most likely to break. Therefore, the time-dependent change of the attenuation constant ⁇ at the base of the wing is measured using the probe 10 to attenuate If the constant ⁇ increases rapidly, it is determined that the blade is broken, and the blade is replaced.
  • the probe 10 can be used not only for measuring the Young's modulus of the object to be measured 30, but also for detecting defects of the object to be measured 30, material selection, non-destructive inspection, and the like.
  • FIG. 19 is a flowchart for explaining an operation when a defect is detected using a half width of a peak having a resonance frequency.
  • the detector 50 holds in advance a peak half-value width FWHM 0 having a resonance frequency when no defect (peeling portion 303, 304) is formed on the DUT 30.
  • An operation for detecting a defect will be described as a premise.
  • the flowchart shown in FIG. 19 is the same as the flowchart shown in FIG. 14 except that step S10 of the flowchart shown in FIG. 14 is replaced with steps S11 to S14.
  • step S9 the detector 50 detects the half-value width FWHM of the peak having the resonance frequency fosc (step S11).
  • the detector 50 determines whether or not the half width FWHM is larger than the half width FWHM 0 (step S12).
  • Step S12 when it is determined that the half-value width FWHM is larger than the half-value width FWHM 0 , the detector 50 detects that a defect is formed in the object to be measured 30 (Step S13).
  • step S12 when it is determined in step S12 that the half-value width FWHM is not larger than the half-value width FWHM 0 (that is, when the half-value width FWHM is determined to be substantially equal to the half-value width FWHM 0 ), the detector 50 It is detected that no defect is formed on the device under test 30 (step S14).
  • step S13 or step S14 the operation for detecting a defect ends.
  • FIG. 20 is a flowchart for explaining an operation when a defect is detected using an attenuation constant.
  • the detector 50 detects the defect on the assumption that the attenuation constant ⁇ 0 when the defect (the peeling portions 303 and 304) is not formed on the DUT 30 is held in advance. The operation will be described.
  • the flowchart shown in FIG. 20 is the same as the flowchart shown in FIG. 14 except that steps S6 to S10 in the flowchart shown in FIG. 14 are replaced with steps S15 to S19.
  • the detector 50 fits the detected envelope EVL with e ⁇ t to detect the attenuation constant ⁇ (step S16).
  • the detector 50 determines the attenuation constant alpha is whether greater than the attenuation constant alpha 0 (step S17).
  • step S17 when the attenuation constant alpha is determined to be greater than the attenuation constant alpha 0, the detector 50 detects that the defect is formed on the measured object 30 (Step S18).
  • step S17 when the attenuation constant alpha is not greater than the attenuation constant alpha 0 (i.e., when the attenuation constant alpha is determined to substantially equal to the attenuation constant alpha 0), the detector 50 may be It is detected that no defect is formed on the measurement object 30 (step S19).
  • step S18 or step S19 the operation for detecting a defect ends.
  • the voltage source 40 may transmit the burst wave BWh having a frequency half the resonance frequency to the antenna 5 as an excitation voltage.
  • the burst wave BWh is composed of, for example, a sin wave having a frequency of 50 kHz.
  • FIG. 21 is a conceptual diagram showing the burst wave BWh and the displacement of the defect when a defect is formed in the device under test 30.
  • FIG. 22 is a diagram showing the relationship between amplitude and frequency.
  • the voltage source 40 transmits a burst wave BWh composed of a sin wave to the antenna 5.
  • the component SS1 of the burst wave BWh is a component that moves the vibrator 1 to the measured object 30 side
  • the component SS2 is a component that moves the vibrator 1 to the opposite side of the measured object 30 side.
  • the vibrator 1 When the vibration of the vibrator 1 is excited by the burst wave BWh while the tip 2 of the probe 10 is in contact with the object to be measured 30, the vibrator 1 does not resonate but is forced to vibrate. Propagated to the object 30.
  • the detector 50 detects the resonance frequency fosc based on the reception voltage received by the antenna 6 (see FIG. 22).
  • the vibrator 1 does not resonate with the double wave.
  • the resonance frequency fosc is not detected.
  • the detector 50 detects the resonance frequency fosc when the vibration of the vibrator 1 is excited by the burst wave BWh having a half frequency of the resonance frequency fosc, the peeling portions 303 and 304 are attached to the object to be measured 30. If the formation is detected and the resonance frequency fosc is not detected, it is detected that the peeling portions 303 and 304 are not formed on the measurement object 30.
  • the frequency of the burst wave BWh is not limited to half the resonance frequency, and may be 1/3 times the resonance frequency, 1/4 times the resonance frequency, or the like.
  • the frequency may be 1 / n (n is an integer of 2 or more) times the resonance frequency.
  • the detector 50 detects the resonance frequency fosc, the detector 50 detects that the peeling portions 303 and 304 are formed on the object to be measured 30, and if not, detects the resonance frequency fosc. It is detected that the peeling portions 303 and 304 are not formed.
  • the frequency of the burst wave BWh may be a frequency that is twice the resonance frequency, a frequency that is three times the resonance frequency, or the like, and may generally be a frequency that is n times the resonance frequency.
  • the vibrator 1 resonates with a 1 / n harmonic by the mechanism described above. Accordingly, even when the vibration of the vibrator 1 is excited by the burst wave BWh having a frequency n times the resonance frequency, the detector 50 detects the resonance frequency fosc and causes the separation parts 303 and 304 to be measured on the object 30 to be measured. If the resonance frequency fosc is not detected, it is detected that the peeling portions 303 and 304 are not formed on the object to be measured 30.
  • the voltage source 40 when detecting whether or not a defect is formed in the device under test 30 by the harmonic wave, is a burst wave having a frequency n times the resonance frequency, or If a burst wave having a frequency 1 / n times the resonance frequency is transmitted as an excitation voltage to the antenna 5, and the detector 50 detects the resonance frequency fosc, peeling parts 303 and 304 are formed on the object to be measured 30. If the resonance frequency fosc is not detected, it is detected that the peeling portions 303 and 304 are not formed on the object to be measured 30.
  • FIG. 23 is a flowchart for explaining an operation of detecting a defect using a harmonic wave.
  • detector 50 detects resonance frequency fosc according to steps S1 to S9 shown in FIG. 14 (step S21).
  • the voltage source 40 transmits a burst wave BWh having a frequency n times the resonance frequency fosc of the vibrator 1 or a frequency 1 / n times the resonance frequency fosc of the vibrator 1 to the antenna 5, and a trigger signal is transmitted. Output to the detector 50 (step S22).
  • the detector 50 receives the received signal from the antenna 6 (step S23), Fourier-transforms the received received signal, and obtains an amplitude corresponding to the vibration frequency (step S24).
  • the detector 50 plots the relationship between the frequency f and the amplitude A (step S25).
  • the detector 50 determines whether or not there is a peak at the position of the resonance frequency (step S26).
  • step S26 When it is determined in step S26 that there is a peak at the position of the resonance frequency, the detector 50 detects that a defect is formed in the device under test 30 (step S27).
  • step S26 when it is determined in step S26 that there is no peak at the position of the resonance frequency, the detector 50 detects that no defect is formed in the device under test 30 (step S28).
  • FIG. 24 is a cross-sectional view of another vibrator according to the embodiment of the present invention.
  • the probe 10 according to the embodiment of the present invention may include a vibrator 21 instead of the vibrator 1 and a holding member 3 ⁇ / b> A instead of the holding member 3.
  • the vibrator 21 is made of langasite or crystal having a circular cross-sectional shape.
  • the vibrator 21 has a diameter of 3 mm, for example, and has the same length as the vibrator 1.
  • the holding member 3 ⁇ / b> A includes a holding tool 33 and a fixing tool 34.
  • the holder 33 includes holders 331 to 333, and each of the holders 331 to 333 includes, for example, nitrile rubber.
  • the holders 331 to 333 hold the vibrator 21 from a direction that forms an angle of 120 degrees with each other at a substantially central portion in the length direction of the vibrator 21. In this case, each of the holders 331 to 333 holds the vibrator 21 in point contact with the vibrator 21.
  • the fixture 34 is made of the same material as the fixture 32 and has a donut shape.
  • the fixing tool 34 is arranged around the holding tool 33 and bonded to the holding tool 33.
  • the resin member 9 contacts the outer periphery of the fixture 34.
  • the probe 10 may include a vibrator 22 instead of the vibrator 1 and a holding member 3B instead of the holding member 3.
  • the vibrator 22 is made of langasite or quartz having a regular triangular cross-sectional shape.
  • the length of one side of the equilateral triangle is, for example, 3 mm, and the vibrator 22 has the same length as the vibrator 1.
  • the holding member 3B includes an O-ring 35 and a fixture 36.
  • the O-ring 35 is made of, for example, nitrile rubber, and is in contact with the three apexes of the triangle of the vibrator 22 at approximately the center in the length direction of the vibrator 22 to hold the vibrator 22.
  • the fixture 36 is made of the same material as the fixture 32 and has a donut shape. The fixture 36 is disposed around the O-ring 35 and bonded to the O-ring 35.
  • the resin member 9 contacts the outer periphery of the fixture 36.
  • the vibrator 21 is held by the holder 33 in contact with the holder 33 with the minimum contact area
  • the vibrator 22 is held by the O-ring 35 in contact with the O-ring 35 with the minimum contact area.
  • the vibrator 21 or the vibrator 22 is held by three points, and thus vibrates more freely than the vibrator 1.
  • the Q value when the vibrator 21 or the vibrator 22 resonates is improved, and the Young's modulus of the device under test 30 can be measured more accurately.
  • the probe 10 is manufactured according to steps (a) to (m) shown in FIGS.
  • step (c) the holder 33 is attached to the vibrator 21 and the fixture 34 is attached to the holder 33, or the O-ring 35 is attached to the vibrator 22 and the fixture 36 is an O-ring. 35.
  • step (d) the support member 7 is attached to the fixture 34 or the fixture 36.
  • step (e) the antennas 4 to 6 are wound only once around the fixture 34 or the fixture 36.
  • the probe 10 includes the vibrator 21 or the vibrator 22, it is detected whether or not a defect is formed in the object to be measured 30 by detecting the half width FWHM of the peak having the resonance frequency or the attenuation constant ⁇ . May be.
  • the vibrator 21 (or the vibrator 22) is caused by the burst wave BWh having a frequency n times the resonance frequency or 1 / n times the resonance frequency. Whether or not a defect is formed in the object to be measured 30 may be detected based on whether or not the vibration frequency is excited and the resonance frequency fosc is detected.
  • the vibrators 21 and 22 are more likely to vibrate than the vibrator 1. It is possible to accurately determine whether or not the measurement object 30 is formed.
  • FIG. 25 is a cross-sectional view showing another method for mounting the antennas 4 to 6.
  • antennas 4 to 6 may be mounted between O-ring 31 and fixture 32.
  • the distance between the vibrator 1 and the antennas 4 to 6 is shortened, and the vibrator 1 receives a stronger voltage Vv from the antenna 5 than when the antennas 4 to 6 are mounted on the outer periphery of the fixture 32. It becomes easier to vibrate.
  • the antenna 6 receives the polarization electric field generated as the vibrator 1 vibrates as a stronger voltage. Accordingly, the Young's modulus of the device under test 30 can be measured more accurately. Further, it can be determined more accurately whether or not a defect is formed in the DUT 30.
  • the antennas 4 to 6 may be mounted between the holder 33 and the fixture 34.
  • the antennas 4 to 6 are The O-ring 35 and the fixture 36 may be mounted.
  • the Young's modulus of the object 30 can be measured more accurately. Further, it can be determined more accurately whether or not a defect is formed in the DUT 30.
  • FIG. 26 is a cross-sectional view showing a method for holding the vibrator 1.
  • the O-ring 31 when measuring the Young's modulus of the DUT 30 using the fundamental mode of vibration of the vibrator 1, the O-ring 31 is the length of the vibrator 1 having the length L. In the direction, the vibrator 1 is attached to the vibrator 1 at a position L / 2 from one end of the vibrator 1 (a position corresponding to a node portion in the fundamental mode of vibration of the vibrator 1). That is, the O-ring 31 is attached to a substantially central portion of the vibrator 1 in the length direction of the vibrator 1.
  • each of the O-rings 31A and 31B is made of nitrile rubber.
  • the O-ring 31A is located at a position L / 4 from the one end of the vibrator 1 in the length direction of the vibrator 1 having the length L (a position corresponding to a node in the secondary mode of vibration of the vibrator 1).
  • the O-ring 31B corresponds to a position of L / 4 from the other end of the vibrator 1 in the length direction of the vibrator 1 (corresponding to a node portion in the secondary mode of vibration of the vibrator 1). Is mounted on the vibrator 1 at a position where
  • the vibrator 21 or the vibrator 22 is located at a position substantially L / 4 from the center or the end in the length direction of the vibrator 21 or the vibrator 22. Retained.
  • the Young's modulus of the DUT 30 is measured using either the fundamental mode or the secondary mode of the vibration of the vibrators 1, 21, 22.
  • whether or not a defect is formed in the object to be measured 30 by the above-described method using either the fundamental mode or the secondary mode of the vibration of the vibrators 1, 2, and 22. Is detected.
  • FIG. 27 is a cross-sectional view showing another holding method of the vibrator 1.
  • the notch 101 has an arcuate cross-sectional shape.
  • the O-ring 31 When the vibrator 1 is held by the O-ring 31, the O-ring 31 is attached to the vibrator 1 so that the O-ring 31 is fitted into the notch 101 (see FIG. 27B).
  • notches are formed at the four corners of the vibrator 1 at a position L / 4 from one end of the vibrator 1 and a position L / 4 from the other end of the vibrator 1.
  • 101 is provided, and the O-rings 31A and 31B are attached to the vibrator 1 so that the O-rings 31A and 31B are fitted in the notch 101.
  • the vibrator 22 is supported by an O-ring.
  • FIG. 28 is a diagram showing the relationship between the measurement depth and the radius of the chip.
  • the vertical axis represents the measurement depth
  • the horizontal axis represents the radius of the chip.
  • the measurement depth is the depth of the measured object 30 to which the vibration is propagated when the chip 2 is brought into contact with the measured object 30 and the vibration of the vibrator 1 is excited by the burst waves BW1 and BW2 (or the burst wave BWh). It is.
  • the radius of the tip is the radius of the original sphere when a spherical tungsten carbide is polished to produce an arc-shaped tip.
  • the measurement depth of the object to be measured 30 is The radius of the chip is determined so as to be equal to or less than the thickness, and the chip 2 having the determined radius is manufactured and bonded to the end face of the vibrator 1.
  • the relationship between the measurement depth and the chip radius shown in FIG. 28 is illustrative only, and the measurement depth of the material other than acrylic resin and copper increases as the chip radius increases. Accordingly, if the relationship between the measurement depth and the tip radius is calculated in advance for various types of objects to be measured 30, an appropriate tip radius can be determined according to each object to be measured 30.
  • the radius of the tip is set in the range of 0.5 mm to 10 mm, and the tip radius appropriate for the object to be measured 30 is determined from the range of 0.5 mm to 10 mm. 2 is produced.
  • FIG. 29 is a cross-sectional view showing an example in which a plurality of chips are mounted on a vibrator.
  • each of chips 2A and 2B is made of the same material as chip 2 described above.
  • the radius of the chip 2A is larger than the radius of the chip 2B.
  • the chip 2A is bonded to the end face of one end of the vibrator 1, and the chip 2B is bonded to the end face of the other end of the vibrator 1.
  • the chip 2B can contact the object to be measured 30.
  • the vibrator 1 is held again by the holding member 3, and the Young's modulus of the device under test 30 is measured by bringing the chip 2 ⁇ / b> B into contact with the device under test 30.
  • the Young's modulus and the like of two objects to be measured 30 having different thicknesses can be measured using the same vibrator 1. Further, the distribution of Young's modulus in the depth direction of one object to be measured 30 can be measured using the same vibrator 1.
  • FIG. 30 is a cross-sectional view showing the configuration of another probe according to the embodiment of the present invention.
  • the probe according to the embodiment of the present invention may be a probe 10A shown in FIG.
  • probe 10 ⁇ / b> A is obtained by adding needle 17 to probe 10 shown in FIG. 1, and is otherwise the same as probe 10.
  • the needle 17 is fixed to the bottom surface 11A of the case 11. Three or more needles 17 are provided in the bottom surface 11 ⁇ / b> A of the case 11. This is because if at least three needles 17 are provided, the probe 10 ⁇ / b> A can be stably disposed on the object to be measured 30.
  • the diameter of the needle 17 is set to a diameter at which the needle 17 enters the device under test 30 when the probe 10A is placed on the device under test 30.
  • the length of the needle 17 is set to such a length that the bottom surface 11A of the case 11 of the probe 10A can contact the device under test 30 when the surface of the device under test 30 is a flat surface. Further, the length of the needle 17 is set to a length at which the tip of the needle 17 enters the device under test 30 when the device under test 30 has a spherical shape.
  • the tip 2 can stably come into contact with the object to be measured 30, and the Young's modulus of the object to be measured 30 can be accurately measured.
  • FIG. 31 is a conceptual diagram showing an application example of the probe 10 shown in FIG. Referring to FIG. 31, the mouse 60 of the personal computer incorporates a position measuring device 70. The probe 10 is mounted in the mouse 60.
  • the position measuring device 70 measures the position of the mouse 60 based on the principle of the laser mouse, and outputs the measured position to a CPU (Central Processing Unit) of the personal computer.
  • a CPU Central Processing Unit
  • the antenna 5 of the probe 10 is connected to a voltage source 40, and the antenna 6 is connected to a CPU of a personal computer.
  • the mouse 60 is arranged on the device under test 30 and moved to each position of the device under test 30. Then, the position measuring instrument 70 measures the position of the mouse 60 and outputs the measured position to the CPU of the personal computer. Further, the vibrator 1 of the probe 10 vibrates by the voltage Vv applied from the voltage source 40 via the antenna 5, and the antenna 6 receives as a voltage the polarization electric field generated when the vibrator 1 vibrates. The received voltage (reception signal) is output to the CPU of the personal computer.
  • the CPU of the personal computer calculates the Young's modulus of the device under test 30 by the method described above based on the received signal received from the antenna 6, and the mouse 60 receiving the calculated Young's modulus from the position measuring device 70. It is stored in the memory in association with the position.
  • the CPU of the personal computer stores the Young's modulus at each position of the DUT 30 in the memory in association with each position of the mouse 60.
  • the Young's modulus distribution of the device under test 30 can be measured.
  • the defect of the object to be measured 30 may be measured by the various methods described above, or the non-destructive inspection of the object to be measured 30 may be performed by the method described above. Good.
  • the vibrators 1, 2, 22 are held by the O-rings 31, 35 or the holder 33 with a minimum contact area at positions corresponding to the vibration nodes of the vibrators 1, 2, 22. Further, the vibrators 1, 2, and 22 apply a bias force to the object to be measured 30 by the repulsive force RF generated by the magnets 8 and 13 having the same polarity. As a result, the vibrators 1, 2, 22 freely vibrate, and even if the device under test 30 is arranged at an arbitrary angle with respect to the vertical direction, the bias applied to the device under test 30. The force becomes constant.
  • each of the O-rings 31 and 35 constitutes a “holding tool”.
  • magnet 8 constitutes a “first magnet”
  • magnet 13 constitutes a “second magnet”.
  • the antenna 4 constitutes a “first antenna”
  • the antenna 5 constitutes a “second antenna”
  • the antenna 6 constitutes a “third antenna”.
  • the detector 50 that determines whether or not the resonance frequency of the vibrator 1 is detected based on the received voltage received from the antenna 6 constitutes a “determination device”.
  • This invention is applied to a probe and a measuring apparatus equipped with the probe.

Abstract

An oscillator (1) contacts a retaining member (3) with a minimum area of contact, and is retained by the retaining member (3). A chip (2) is bonded to one end of the oscillator (1). The retaining member (3) is supported by a support member (7), and a magnet (8) is bonded to the support member (7). Antennas (4-6) are wound around the external periphery of the retaining member (3). A resin member (9) covers the retaining member (3), the antennas (4-6), the support member (7), and the magnet (8). The retaining member (3), the antennas (4-6), the support member (7), the magnet (8), and the support member (9) are arranged so that one end of the oscillator (1) protrudes outward from an opening (111) in a case (11) and can move integrally in the length direction of the oscillator (1). A top panel (12) is bonded to the case (11). A magnet (13) having the same polarity as the magnet (3) is provided adjacent to the top panel (12) in a case interior (14).

Description

プローブおよびそれを備えた測定装置Probe and measuring apparatus having the probe
　この発明は、プローブおよびそれを備えた測定装置に関するものである。 The present invention relates to a probe and a measuring apparatus including the probe.
　従来、振動子をバネによって天板に固定して試料の弾性定数を測定する弾性定数測定装置が知られている（特許文献１）。 Conventionally, an elastic constant measuring apparatus for measuring an elastic constant of a sample by fixing a vibrator to a top plate with a spring is known (Patent Document 1).
　この弾性定数測定装置においては、ボールベアリングが振動子の天板側と反対側の端部に固定されている。また、振動子を収納するケースの周囲には、ソレノイドコイルが巻かれており、ソレノイドコイルによって、振動子を振動させるための電場を振動子に印加する構造になっている。
特開２００５－２０１８１６号公報 Stephen R. Swanson, International Journal of Solids and Structures, 41, 1945(2004). J. R. Willis, J. Mech, Phys. Solids, 14, 163(1966). In this elastic constant measuring apparatus, the ball bearing is fixed to the end of the vibrator opposite to the top plate side. In addition, a solenoid coil is wound around the case that houses the vibrator, and an electric field for vibrating the vibrator is applied to the vibrator by the solenoid coil.
JP 2005-201816 A Stephen R. Swanson, International Journal of Solids and Structures, 41, 1945 (2004). J. R. Willis, J. Mech, Phys. Solids, 14, 163 (1966).
　しかし、従来の弾性定数測定装置においては、振動子がバネによって天板に固定されているために、振動子の安定した振動を確保することが困難であるという問題がある。 However, the conventional elastic constant measuring device has a problem that it is difficult to ensure stable vibration of the vibrator because the vibrator is fixed to the top plate by a spring.
　また、従来の弾性定数測定装置においては、振動子が試料に接触するときのバイアス力を重力によって試料に印加する構成になっているので、重力の方向と異なる方向からバイアス力を試料に印加する場合には、弾性定数を正確に測定することが困難であるという問題がある。 In addition, since the conventional elastic constant measuring apparatus is configured to apply a bias force to the sample by gravity when the vibrator contacts the sample, the bias force is applied to the sample from a direction different from the direction of gravity. In some cases, it is difficult to accurately measure the elastic constant.
　そこで、この発明は、かかる問題を解決するためになされたものであり、その目的は、振動子の安定した振動を確保し、バイアス力を任意の方向から試料に印加して弾性定数を測定可能なプローブを提供することである。 Therefore, the present invention has been made to solve such problems, and its purpose is to ensure stable vibration of the vibrator and to measure the elastic constant by applying a bias force to the sample from any direction. Is to provide a simple probe.
　また、この発明の別の目的は、振動子の安定した振動を確保し、バイアス力を任意の方向から試料に印加して弾性定数を測定可能なプローブを備えた測定装置を提供することである。 Another object of the present invention is to provide a measuring apparatus provided with a probe capable of ensuring stable vibration of a vibrator and measuring an elastic constant by applying a bias force to a sample from an arbitrary direction. .
　この発明の実施の形態によれば、プローブは、振動子と、チップと、保持具と、第１および第２の磁石と、第１から第３のアンテナとを備える。振動子は、棒状形状を有し、圧電体からなる。チップは、被測定物側における振動子の一方端に接着され、被測定物よりも硬度が大きい。保持具は、振動子の周方向において最小の接触面積で振動子と接触し、振動子の振動の節部に相当する振動子の一部分を保持する。第１の磁石は、振動子の他方端側に配置され、保持具を支持する支持部材に接着される。第２の磁石は、振動子の長さ方向において第１の磁石と所望の距離を隔てて配置され、第１の磁石と同じ極性を有する。第１のアンテナは、接地電位に接続される。第２のアンテナは、振動子の振動を励起するための励起電圧を第１のアンテナと協働して振動子に印加する。第３のアンテナは、励起電圧が振動子に印加されたことに起因して振動子に発生した電場を第１のアンテナと協働して電圧として受信する。そして、第１から第３のアンテナは、振動子の一部分の近傍に配置されており、チップは、振動子から被測定物へ向かう方向に突出した円弧状の形状を有する。 According to the embodiment of the present invention, the probe includes a vibrator, a chip, a holder, first and second magnets, and first to third antennas. The vibrator has a rod-like shape and is made of a piezoelectric body. The chip is bonded to one end of the vibrator on the measured object side and has a hardness higher than that of the measured object. The holder contacts the vibrator with a minimum contact area in the circumferential direction of the vibrator, and holds a part of the vibrator corresponding to a vibration node of the vibrator. The first magnet is disposed on the other end side of the vibrator and is bonded to a support member that supports the holder. The second magnet is disposed at a desired distance from the first magnet in the length direction of the vibrator, and has the same polarity as the first magnet. The first antenna is connected to the ground potential. The second antenna applies an excitation voltage for exciting the vibration of the vibrator to the vibrator in cooperation with the first antenna. The third antenna receives an electric field generated in the vibrator due to the excitation voltage being applied to the vibrator as a voltage in cooperation with the first antenna. The first to third antennas are arranged in the vicinity of a part of the vibrator, and the chip has an arc shape protruding in the direction from the vibrator toward the object to be measured.
　また、この発明の実施の形態による測定装置は、プローブと、電圧源と、検出器とを備える。プローブは、請求項１に記載のプローブからなる。電圧源は、励起電圧を第２のアンテナへ出力する。検出器は、第３のアンテナによって受信された受信電圧に基づいて振動子の共振周波数を検出し、その検出した共振周波数に基づいて被測定物のヤング率を算出する。 The measuring device according to the embodiment of the present invention includes a probe, a voltage source, and a detector. A probe consists of the probe of Claim 1. The voltage source outputs an excitation voltage to the second antenna. The detector detects the resonance frequency of the vibrator based on the received voltage received by the third antenna, and calculates the Young's modulus of the device under test based on the detected resonance frequency.
　更に、この発明の実施の形態による測定装置は、プローブと、電圧源と、検出器とを備える。プローブは、請求項１に記載のプローブからなる。電圧源は、励起電圧を第２のアンテナへ出力する。検出器は、第３のアンテナによって受信された受信電圧に基づいて振動子の共振周波数を有するピークの半値幅を検出し、または第３のアンテナによって受信された受信電圧に基づいて振動子が減衰するときの減衰定数を検出する。 Furthermore, the measuring apparatus according to the embodiment of the present invention includes a probe, a voltage source, and a detector. A probe consists of the probe of Claim 1. The voltage source outputs an excitation voltage to the second antenna. The detector detects a half width of a peak having a resonance frequency of the vibrator based on the received voltage received by the third antenna, or the vibrator attenuates based on the received voltage received by the third antenna. Detect the damping constant when
　更に、この発明の実施の形態による測定装置は、プローブと、電圧源と、判定器とを備える。プローブは、請求項１に記載のプローブからなる。電圧源は、振動子の共振周波数をｎ（ｎは２以上の整数）倍した周波数、または振動子の共振周波数を１／ｎ倍した周波数を有する電圧を励起電圧として第２のアンテナへ出力する。判定器は、第３のアンテナによって受信された受信電圧に基づいて振動子の共振周波数が検出されたか否かを判定する。 Furthermore, the measuring apparatus according to the embodiment of the present invention includes a probe, a voltage source, and a determiner. A probe consists of the probe of Claim 1. The voltage source outputs a voltage having a frequency obtained by multiplying the resonance frequency of the vibrator by n (n is an integer of 2 or more) or a frequency obtained by multiplying the resonance frequency of the vibrator by 1 / n as an excitation voltage to the second antenna. . The determiner determines whether the resonance frequency of the vibrator is detected based on the reception voltage received by the third antenna.
　この発明の実施の形態によるプローブにおいては、振動子は、振動子の振動の節部に相当する位置において最小の接触面積で保持具によって保持される。また、振動子は、同じ極性を有する第１および第２の磁石が発生する斥力によって被測定物にバイアス力を印加する。その結果、振動子は、自由に振動するとともに、被測定物が鉛直方向に対して任意の角度を成すように配置されていても、被測定物に印加されるバイアス力は、一定になる。 In the probe according to the embodiment of the present invention, the vibrator is held by the holder with a minimum contact area at a position corresponding to the vibration node of the vibrator. The vibrator applies a bias force to the object to be measured by the repulsive force generated by the first and second magnets having the same polarity. As a result, the vibrator vibrates freely, and the bias force applied to the object to be measured is constant even if the object to be measured is arranged at an arbitrary angle with respect to the vertical direction.
　従って、振動子の安定した振動を確保できるとともに、バイアス力を任意の方向から被測定物に印加して弾性定数を測定できる。 Therefore, stable vibration of the vibrator can be secured, and the elastic constant can be measured by applying a bias force to the object to be measured from an arbitrary direction.
この発明の実施の形態によるプローブの構成を示す断面図である。It is sectional drawing which shows the structure of the probe by embodiment of this invention. 図１に示す磁石側から見た振動子、保持部材およびアンテナの平面図である。FIG. 2 is a plan view of a vibrator, a holding member, and an antenna viewed from the magnet side shown in FIG. 1. 図１に示す振動子およびチップの拡大図である。FIG. 2 is an enlarged view of a vibrator and a chip shown in FIG. 図１に示す振動子、チップ、保持部材、支持部材、磁石および樹脂部材の斜視図である。FIG. 2 is a perspective view of a vibrator, a chip, a holding member, a support member, a magnet, and a resin member shown in FIG. 1. 図１に示すプローブを製造する製造方法を示す第１の工程図である。It is a 1st process drawing which shows the manufacturing method which manufactures the probe shown in FIG. 図１に示すプローブを製造する製造方法を示す第２の工程図である。FIG. 6 is a second process diagram illustrating a manufacturing method for manufacturing the probe illustrated in FIG. 1. 図１に示すプローブを製造する製造方法を示す第３の工程図である。FIG. 6 is a third process diagram illustrating a manufacturing method for manufacturing the probe illustrated in FIG. 1. 図１に示すプローブを製造する製造方法を示す第４の工程図である。FIG. 8 is a fourth process diagram illustrating a manufacturing method for manufacturing the probe illustrated in FIG. 1. 図１に示すプローブの動作を説明するための概念図である。It is a conceptual diagram for demonstrating operation | movement of the probe shown in FIG. 振動子の振動をモデル化するための第１の概念図である。It is a 1st conceptual diagram for modeling the vibration of a vibrator. 振動子の振動をモデル化するための第２の概念図である。It is a 2nd conceptual diagram for modeling the vibration of a vibrator. この発明の実施の形態による弾性定数測定装置の構成図である。It is a block diagram of the elastic constant measuring apparatus by embodiment of this invention. バースト波およびトリガー信号のタイミングチャートである。It is a timing chart of a burst wave and a trigger signal. ヤング率の測定方法を説明するためのフローチャートである。It is a flowchart for demonstrating the measuring method of a Young's modulus. 振幅と周波数との関係を示す図である。It is a figure which shows the relationship between an amplitude and a frequency. 測定されたヤング率と、報告されているヤング率との関係を示す図である。It is a figure which shows the relationship between the measured Young's modulus and the reported Young's modulus. 振動子の減衰特性を示す図である。It is a figure which shows the attenuation | damping characteristic of a vibrator | oscillator. 被測定物の具体例を示す断面図である。It is sectional drawing which shows the specific example of a to-be-measured object. 共振周波数を有するピークの半値幅を用いて欠陥を検出するときの動作を説明するためのフローチャートである。It is a flowchart for demonstrating operation | movement when a defect is detected using the half value width of the peak which has a resonant frequency. 減衰定数を用いて欠陥を検出するときの動作を説明するためのフローチャートである。It is a flowchart for demonstrating operation | movement when a defect is detected using an attenuation constant. 被測定物に欠陥が形成されている場合のバースト波および欠陥の変位を示す概念図である。It is a conceptual diagram which shows the displacement of the burst wave and defect when the defect is formed in the to-be-measured object. 振幅と周波数との関係を示す図である。It is a figure which shows the relationship between an amplitude and a frequency. 倍波を用いて欠陥を検出する動作を説明するためのフローチャートである。It is a flowchart for demonstrating the operation | movement which detects a defect using a harmonic. この発明の実施の形態における他の振動子の断面図である。It is sectional drawing of the other vibrator | oscillator in embodiment of this invention. アンテナの他の装着方法を示す断面図である。It is sectional drawing which shows the other mounting method of an antenna. 振動子の保持方法を示す断面図である。It is sectional drawing which shows the holding method of a vibrator | oscillator. 振動子の別の保持方法を示す断面図である。It is sectional drawing which shows another holding | maintenance method of a vibrator | oscillator. 測定深さとチップの半径との関係を示す図である。It is a figure which shows the relationship between a measurement depth and the radius of a chip | tip. 複数のチップを振動子に装着した例を示す断面図である。It is sectional drawing which shows the example which mounted | wore the vibrator | oscillator with the several chip | tip. この発明の実施の形態による別のプローブの構成を示す断面図である。It is sectional drawing which shows the structure of another probe by embodiment of this invention. 図１に示すプローブの応用例を示す概念図である。It is a conceptual diagram which shows the application example of the probe shown in FIG.
　本発明の実施の形態について図面を参照しながら詳細に説明する。なお、図中同一または相当部分には同一符号を付してその説明は繰返さない。 Embodiments of the present invention will be described in detail with reference to the drawings. In the drawings, the same or corresponding parts are denoted by the same reference numerals and description thereof will not be repeated.
　図１は、この発明の実施の形態によるプローブの構成を示す断面図である。図１を参照して、この発明の実施の形態によるプローブ１０は、振動子１と、チップ２と、保持部材３と、アンテナ４～６と、支持部材７と、磁石８，１３と、樹脂部材９と、ケース１１，１４と、天板１２とを備える。 FIG. 1 is a cross-sectional view showing a configuration of a probe according to an embodiment of the present invention. Referring to FIG. 1, a probe 10 according to an embodiment of the present invention includes a vibrator 1, a chip 2, a holding member 3, antennas 4 to 6, a support member 7, magnets 8 and 13, and a resin. A member 9, cases 11 and 14, and a top plate 12 are provided.
　振動子１は、四角柱の形状を有し、例えば、ランガサイト（Ｌａ３Ｇａ５ＳｉＯ１４）の単結晶、または水晶からなる。即ち、振動子１は、圧電体からなる。そして、振動子１は、保持部材３によって保持され、その一方端がケース１１の開口部１１１を介して外部へ突出し、その他方端側が支持部材７内の空間７Ａに配置されている。この場合、振動子１の一方端は、例えば、ケース１１の底面１１Ａから５ｍｍ程度、外部へ突出している。 The vibrator 1 has a quadrangular prism shape, and is made of, for example, a single crystal of langasite (La 3 Ga 5 SiO 14 ) or quartz. That is, the vibrator 1 is made of a piezoelectric body. The vibrator 1 is held by the holding member 3, one end of which protrudes to the outside through the opening 111 of the case 11, and the other end side is disposed in the space 7 </ b> A in the support member 7. In this case, one end of the vibrator 1 protrudes outward from the bottom surface 11A of the case 11 by about 5 mm, for example.
　また、振動子１は、２．０ｍｍ×２．０ｍｍ×２０．０ｍｍのサイズを有する。更に、振動子１がランガサイトからなる場合、ランガサイトの［１００］の方向が振動子１の長手方向になる。 The vibrator 1 has a size of 2.0 mm × 2.0 mm × 20.0 mm. Furthermore, when the vibrator 1 is made of Langasite, the [100] direction of the Langasite is the longitudinal direction of the vibrator 1.
　チップ２は、例えば、タングステンカーバイトからなり、振動子１の一方端に接着剤によって接着される。そして、チップ２は、被測定物よりも硬度が大きい。 The chip 2 is made of, for example, tungsten carbide, and is bonded to one end of the vibrator 1 with an adhesive. The chip 2 is harder than the object to be measured.
　保持部材３は、略円形の平面形状を有し、後述する方法によって、振動子１の長さ方向において振動子１の略中央部を保持する。この振動子１の略中央部は、振動の基本モードの節が存在する位置である。従って、保持部材３は、振動子１の振動の節部に相当する振動子１の一部分を保持する。 The holding member 3 has a substantially circular planar shape, and holds a substantially central portion of the vibrator 1 in the length direction of the vibrator 1 by a method described later. The substantially central portion of the vibrator 1 is a position where a node of a fundamental mode of vibration exists. Accordingly, the holding member 3 holds a part of the vibrator 1 corresponding to the vibration node of the vibrator 1.
　アンテナ４は、一方端側が保持部材３の周囲に巻回されるとともに、樹脂部材９およびケース１１，１４を介して外部へ引き出され、他方端が接地電位に接続される。 The antenna 4 has one end wound around the holding member 3 and pulled out through the resin member 9 and the cases 11 and 14, and the other end connected to the ground potential.
　アンテナ５は、一方端側が振動子１の長さ方向におけるアンテナ４の一方側に配置されるとともに保持部材３の周囲に巻回される。そして、アンテナ５は、樹脂部材９およびケース１１，１４を介して外部へ引き出される。 The antenna 5 has one end disposed on one side of the antenna 4 in the length direction of the vibrator 1 and wound around the holding member 3. The antenna 5 is pulled out through the resin member 9 and the cases 11 and 14.
　アンテナ６は、一方端側が振動子１の長さ方向におけるアンテナ４の他方側に配置されるとともに保持部材３の周囲に巻回される。そして、アンテナ６は、樹脂部材９およびケース１１，１４を介して外部へ引き出される。 The one end side of the antenna 6 is disposed on the other side of the antenna 4 in the length direction of the vibrator 1 and is wound around the holding member 3. The antenna 6 is pulled out through the resin member 9 and the cases 11 and 14.
　なお、アンテナ４～６の各々は、例えば、１ｍｍの直径を有し、１回だけ保持部材３の周囲に巻回される。 Note that each of the antennas 4 to 6 has a diameter of 1 mm, for example, and is wound around the holding member 3 only once.
　支持部材７は、中空の円柱形状を有し、磁石８に固定されるとともに保持部材３を支持する。磁石８は、支持部材７に接着される。 The support member 7 has a hollow cylindrical shape, and is fixed to the magnet 8 and supports the holding member 3. The magnet 8 is bonded to the support member 7.
　樹脂部材９は、例えば、アクリルからなり、保持部材３、支持部材７および磁石８とケース１１との間に配置され、保持部材３、アンテナ４～６、支持部材７および磁石８を覆う。そして、磁石８および樹脂部材９と天板１２との間には、空間１５が形成されており、振動子１、チップ２、保持部材３、アンテナ４～６、支持部材７、磁石８および樹脂部材９は、振動子１の長さ方向に一体的に移動可能である。この場合、アンテナ４～６のうち、空間１５内に配置された部分は、実際には、螺旋状に形成されており、振動子１、チップ２、保持部材３、アンテナ４～６、支持部材７、磁石８および樹脂部材９が振動子１の長さ方向に移動可能な構造になっている。 The resin member 9 is made of acrylic, for example, and is disposed between the holding member 3, the supporting member 7 and the magnet 8 and the case 11, and covers the holding member 3, the antennas 4 to 6, the supporting member 7 and the magnet 8. A space 15 is formed between the magnet 8 and the resin member 9 and the top plate 12, and the vibrator 1, the chip 2, the holding member 3, the antennas 4 to 6, the support member 7, the magnet 8 and the resin The member 9 can move integrally in the length direction of the vibrator 1. In this case, portions of the antennas 4 to 6 arranged in the space 15 are actually formed in a spiral shape, and the vibrator 1, the chip 2, the holding member 3, the antennas 4 to 6, and the support member. 7, the magnet 8 and the resin member 9 are configured to be movable in the length direction of the vibrator 1.
　また、保持部材３の下側において、振動子１と樹脂部材９との間には、空間１６が形成されており、空間１６は、ケース１１の開口部１１１に連通している。 Moreover, a space 16 is formed below the holding member 3 between the vibrator 1 and the resin member 9, and the space 16 communicates with the opening 111 of the case 11.
　ケース１１は、中空の円柱形状のテフロン（登録商標）からなり、開口部１１１を有する。そして、ケース１１は、開口部１１１と反対側が天板１２に固定される。 The case 11 is made of a hollow cylindrical Teflon (registered trademark) and has an opening 111. The case 11 is fixed to the top plate 12 on the side opposite to the opening 111.
　天板１２は、例えば、アクリルからなり、ケース１４内に固定される。磁石１３は、磁石８と同じ極性を有する。そして、磁石１３は、天板１２に接してケース１４内に固定される。 The top plate 12 is made of acrylic, for example, and is fixed in the case 14. The magnet 13 has the same polarity as the magnet 8. The magnet 13 is fixed in the case 14 in contact with the top plate 12.
　ケース１４は、例えば、アクリルからなり、ケース１１の一部、天板１２および磁石１３を覆う。 The case 14 is made of acrylic, for example, and covers a part of the case 11, the top plate 12 and the magnet 13.
　図２は、図１に示す磁石８側から見た振動子１、保持部材３およびアンテナ４～６の平面図である。 FIG. 2 is a plan view of the vibrator 1, the holding member 3, and the antennas 4 to 6 viewed from the magnet 8 side shown in FIG.
　図２を参照して、保持部材３は、Ｏリング３１と、固定具３２とからなる。Ｏリング３１は、例えば、ニトリルゴムからなる。ニトリルゴムは、アクリロニトリルと、１，３－ブタジエンとの共重合体である。 Referring to FIG. 2, the holding member 3 includes an O-ring 31 and a fixture 32. The O-ring 31 is made of nitrile rubber, for example. Nitrile rubber is a copolymer of acrylonitrile and 1,3-butadiene.
　振動子１は、略正方形の断面形状を有する。そして、Ｏリング３１は、振動子１の正方形の４個の頂点に接するように振動子１の周囲に配置される。このように、Ｏリング３１は、振動子１の長さ方向に直交する方向に振動子１を切断したときの振動子１の断面形状の周方向において最小の接触面積で振動子１に接触する。この場合、振動子１とＯリング３１とは、４個の頂点で点接触する場合もあれば、４隅で面接触する場合もある。そして、点接触するか面接触するかは、Ｏリング３１の硬さに依存し、Ｏリング３１が硬くなればなるほど、振動子１とＯリング３１とは、点接触し易く、Ｏリング３１が柔らかくなればなるほど、振動子１とＯリング３１とは、面接触し易い。 The vibrator 1 has a substantially square cross-sectional shape. The O-ring 31 is arranged around the vibrator 1 so as to contact the four vertices of the square of the vibrator 1. As described above, the O-ring 31 contacts the vibrator 1 with a minimum contact area in the circumferential direction of the cross-sectional shape of the vibrator 1 when the vibrator 1 is cut in a direction orthogonal to the length direction of the vibrator 1. . In this case, the vibrator 1 and the O-ring 31 may be in point contact at four vertices or may be in surface contact at four corners. The point contact or surface contact depends on the hardness of the O-ring 31. The harder the O-ring 31, the easier the vibrator 1 and the O-ring 31 are in point contact. The softer the transducer 1 and the O-ring 31 are in surface contact.
　固定具３２は、ドーナツ状の平面形状を有し、例えば、アクリル樹脂からなる。そして、固定具３２は、Ｏリング３１の周囲に配置される。 The fixture 32 has a donut-like planar shape and is made of, for example, acrylic resin. The fixture 32 is arranged around the O-ring 31.
　アンテナ４～６は、固定具３２の周囲に１回だけ巻回されている。 The antennas 4 to 6 are wound only once around the fixture 32.
　図３は、図１に示す振動子１およびチップ２の拡大図である。図３を参照して、チップ２は、薄い球片の断面形状を有する。そして、チップ２は、例えば、１～２ｍｍの直径および約０．３ｍｍの厚さを有する。 FIG. 3 is an enlarged view of the vibrator 1 and the chip 2 shown in FIG. Referring to FIG. 3, chip 2 has a thin spherical piece cross-sectional shape. The chip 2 has, for example, a diameter of 1 to 2 mm and a thickness of about 0.3 mm.
　図４は、図１に示す振動子１、チップ２、保持部材３、支持部材７、磁石８および樹脂部材９の斜視図である。なお、図４においては、アンテナ４～６が省略されている。 4 is a perspective view of the vibrator 1, chip 2, holding member 3, support member 7, magnet 8 and resin member 9 shown in FIG. In FIG. 4, the antennas 4 to 6 are omitted.
　図４を参照して、振動子１は、保持部材３によって保持されており、保持部材３は、支持部材７によって磁石８と連結されている。樹脂部材９は、振動子１に接せず、保持部材３、支持部材７および磁石８に接して保持部材３、支持部材７および磁石８を覆うように略円柱形状に成形されている。そして、樹脂部材９は、チップ２側に底面９Ａを有し、振動子１との間に空間１６を有する。その結果、保持部材３、支持部材７、磁石８および樹脂部材９は、一体物を構成し、振動子１は、その一体物の保持部材３中のＯリング３１（図４では図示せず）のみによって保持されている。 4, the vibrator 1 is held by a holding member 3, and the holding member 3 is connected to a magnet 8 by a support member 7. The resin member 9 is formed in a substantially cylindrical shape so as not to contact the vibrator 1 but to contact the holding member 3, the support member 7 and the magnet 8 and cover the holding member 3, the support member 7 and the magnet 8. The resin member 9 has a bottom surface 9 </ b> A on the chip 2 side, and a space 16 between the resin member 9 and the vibrator 1. As a result, the holding member 3, the support member 7, the magnet 8 and the resin member 9 constitute an integrated object, and the vibrator 1 has an O-ring 31 (not shown in FIG. 4) in the integrated holding member 3. Is held only by.
　従って、振動子１、チップ２、保持部材３、支持部材７、磁石８および樹脂部材９は、振動子１の長さ方向に一体的に移動可能である。 Therefore, the vibrator 1, the chip 2, the holding member 3, the support member 7, the magnet 8, and the resin member 9 can be moved integrally in the length direction of the vibrator 1.
　図５から図８は、それぞれ、図１に示すプローブ１０を製造する製造方法を示す第１から第４の工程図である。 FIGS. 5 to 8 are first to fourth process diagrams showing a manufacturing method for manufacturing the probe 10 shown in FIG. 1, respectively.
　図５を参照して、プローブ１０の製造が開始されると、ランガサイトの単結晶の塊から四角柱の形状を有するランガサイトを切り出し、振動子１を作製する（工程（ａ））。この場合、長さ方向が［１００］の方向になるようにランガサイトを切り出す。 Referring to FIG. 5, when the manufacture of the probe 10 is started, a langasite having a quadrangular prism shape is cut out from a lump of single crystal of langasite to produce the vibrator 1 (step (a)). In this case, the langasite is cut out so that the length direction is the direction of [100].
　そして、Ｏリング３１を振動子１の略中央部に装着し（工程（ｂ））、ドーナツ形状を有する固定具３２をＯリング３１の周囲に装着する（工程（ｃ））。 Then, the O-ring 31 is attached to the substantially central portion of the vibrator 1 (step (b)), and the fixture 32 having a donut shape is attached around the O-ring 31 (step (c)).
　その後、薄い球片（厚さ約０．３ｍｍ）のチップ２を作製し、その作製したチップ２を振動子１の一方端に接着剤によって接着する。また、振動子１の他方端側を中空の円柱形状からなる支持部材７の中へ入れ、保持部材３（Ｏリング３１および固定具３２）を接着剤によって支持部材７に接着する。更に、磁石８を接着剤によって支持部材７に接着する（工程（ｄ））。このように、磁石８は、Ｏリング３１を支持する支持部材７に接着される。 Thereafter, a chip 2 having a thin sphere piece (thickness of about 0.3 mm) is manufactured, and the manufactured chip 2 is bonded to one end of the vibrator 1 with an adhesive. Further, the other end side of the vibrator 1 is put into a support member 7 having a hollow cylindrical shape, and the holding member 3 (O-ring 31 and fixture 32) is bonded to the support member 7 with an adhesive. Further, the magnet 8 is bonded to the support member 7 with an adhesive (step (d)). In this way, the magnet 8 is bonded to the support member 7 that supports the O-ring 31.
　引き続いて、アンテナ４～６を固定具３２の周囲に１回だけ巻回する（工程（ｅ））。 Subsequently, the antennas 4 to 6 are wound only once around the fixture 32 (step (e)).
　図６を参照して、工程（ｅ）の後、振動子１、チップ２、保持部材３、アンテナ４～６の一部、支持部材７および磁石８を容器２０の中に入れ（工程（ｆ））、アクリルからなる樹脂を容器２０内に充填する。そして、充填した樹脂を乾燥する。これによって、保持部材３、アンテナ４～６の一部、支持部材７および磁石８に接して円柱形状に成形された樹脂部材９が作製される（工程（ｇ））。 Referring to FIG. 6, after step (e), vibrator 1, chip 2, holding member 3, parts of antennas 4-6, support member 7 and magnet 8 are placed in container 20 (step (f )), A resin made of acrylic is filled into the container 20. Then, the filled resin is dried. As a result, the resin member 9 formed into a cylindrical shape in contact with the holding member 3, a part of the antennas 4 to 6, the support member 7 and the magnet 8 is produced (step (g)).
　その後、振動子１、チップ２、保持部材３、アンテナ４～６、支持部材７、磁石８および樹脂部材９をケース１１内に装着する（工程（ｈ））。 Thereafter, the vibrator 1, the chip 2, the holding member 3, the antennas 4 to 6, the support member 7, the magnet 8 and the resin member 9 are mounted in the case 11 (step (h)).
　図７を参照して、工程（ｈ）の後、ケース１１に穴を開け、その開けた穴にアンテナ４～６を通してアンテナ４～６をケース１１外へ取り出す（工程（ｉ））。 Referring to FIG. 7, after step (h), a hole is made in case 11, and antennas 4-6 are taken out of case 11 through antennas 4-6 in the opened hole (step (i)).
　そして、天板１２を接着剤によってケース１１に接着する（工程（ｊ））。その後、射出形成によってケース１４を作製する（工程（ｋ））。ケース１４は、凹部１４１，１４２を有する。凹部１４１は、略正方形の平面形状を有し、凹部１４２は、略円形の平面形状を有する。 Then, the top plate 12 is bonded to the case 11 with an adhesive (step (j)). Thereafter, the case 14 is produced by injection molding (step (k)). The case 14 has recesses 141 and 142. The recess 141 has a substantially square planar shape, and the recess 142 has a substantially circular planar shape.
　図８を参照して、工程（ｋ）の後、磁石１３をケース１４の凹部１４１内に装着する（工程（ｌ））。 Referring to FIG. 8, after step (k), magnet 13 is mounted in recess 141 of case 14 (step (l)).
　そして、ケース１４に穴を開け、その開けた穴にアンテナ４～６を通すとともに、ケース１１の一部および天板１２を凹部１４２内に入れ、ケース１１の一部および天板１２をケース１４に装着する。これによって、プローブ１０が完成する（工程（ｍ））。 Then, a hole is made in the case 14, the antennas 4 to 6 are passed through the holes, a part of the case 11 and the top plate 12 are placed in the recess 142, and a part of the case 11 and the top plate 12 are placed in the case 14 Attach to. Thereby, the probe 10 is completed (step (m)).
　図９は、図１に示すプローブ１０の動作を説明するための概念図である。図９の（ａ）を参照して、磁石１３は、磁石８と同じ極性を有するため、磁石８，１３間には、斥力が作用する。そして、プローブ１０は、被測定物３０に接触していないので、樹脂部材９は、磁石８が磁石１３から受ける斥力ＲＦによってケース１１の開口部１１１の方向へ押され、樹脂部材９の底面９Ａは、ケース１１に接触している。また、振動子１の一方端およびチップ２は、ケース１１の外部へ出ている。 FIG. 9 is a conceptual diagram for explaining the operation of the probe 10 shown in FIG. With reference to (a) of FIG. 9, since the magnet 13 has the same polarity as the magnet 8, a repulsive force acts between the magnets 8 and 13. Since the probe 10 is not in contact with the device under test 30, the resin member 9 is pushed toward the opening 111 of the case 11 by the repulsive force RF that the magnet 8 receives from the magnet 13, and the bottom surface 9 </ b> A of the resin member 9. Is in contact with the case 11. Further, one end of the vibrator 1 and the chip 2 are out of the case 11.
　一方、プローブ１０を被測定物３０の上面３０Ａに接触させた場合、プローブ１０に印加される重力Ｇと斥力ＲＦとの合計の力Ｆａｌｌで被測定物３０を押すことになる。但し、斥力ＲＦは、重力Ｇよりも十分に大きいため、重力の影響は、殆ど、力Ｆａｌｌに関与しない。力Ｆａｌｌにより、振動子１、チップ２、保持部材３、アンテナ４～６、支持部材７、磁石８および樹脂部材９は、被測定物３０から力Ｆａｌｌと同じ大きさの力Ｆｒｅｖを斥力ＲＦと反対方向へ受ける。その結果、振動子１、チップ２、保持部材３、アンテナ４～６、支持部材７、磁石８および樹脂部材９は、斥力ＲＦと反対方向へδだけ移動する（図９の（ｂ）参照）。この移動した距離δは、振動子１およびチップ２を押し込む押し込み量に相当する。 On the other hand, when the probe 10 is brought into contact with the upper surface 30A of the object to be measured 30, the object to be measured 30 is pushed with the total force Fall of the gravity G and the repulsive force RF applied to the probe 10. However, since the repulsive force RF is sufficiently larger than the gravity G, the influence of gravity hardly affects the force Fall. Due to the force Fall, the vibrator 1, the chip 2, the holding member 3, the antennas 4 to 6, the support member 7, the magnet 8, and the resin member 9 generate a force Frev of the same magnitude as the force Fall from the object to be measured 30 as a repulsive force RF. Receive in the opposite direction. As a result, the vibrator 1, the chip 2, the holding member 3, the antennas 4 to 6, the support member 7, the magnet 8, and the resin member 9 move by δ in the direction opposite to the repulsive force RF (see FIG. 9B). . This moved distance δ corresponds to the amount by which the vibrator 1 and the chip 2 are pushed.
　図９においては、被測定物３０が水平面内に配置されており、プローブ１０を被測定物３０の上面３０Ａに接触させた場合について示した。しかし、被測定物３０が鉛直方向に対して任意の角度を有するように配置された場合においても、プローブ１０は、ケース１１の底面１１Ａが被測定物３０に接触するまで斥力ＲＦにより被測定物３０の方向へ押される。重力Ｇは、斥力ＲＦよりも十分に小さいため、この場合も、同じ力でチップ２を被測定物３０へ押し込むことができる。このように、磁石１３は、磁石８に作用する斥力ＲＦが同じになる所望の距離だけ磁石８から離れた位置に配置されている。その結果、振動子１、チップ２、保持部材３、アンテナ４～６、支持部材７、磁石８および樹脂部材９は、斥力ＲＦと反対方向へδだけ移動する。 FIG. 9 shows the case where the device under test 30 is arranged in a horizontal plane and the probe 10 is brought into contact with the upper surface 30A of the device under test 30. However, even in the case where the device under test 30 is arranged so as to have an arbitrary angle with respect to the vertical direction, the probe 10 is measured by the repulsive force RF until the bottom surface 11A of the case 11 contacts the device under test 30. It is pushed in the direction of 30. Since the gravity G is sufficiently smaller than the repulsive force RF, the chip 2 can be pushed into the device under test 30 with the same force in this case as well. Thus, the magnet 13 is disposed at a position away from the magnet 8 by a desired distance at which the repulsive force RF acting on the magnet 8 is the same. As a result, the vibrator 1, the chip 2, the holding member 3, the antennas 4 to 6, the support member 7, the magnet 8, and the resin member 9 move by δ in the direction opposite to the repulsive force RF.
　このように、この発明の実施の形態においては、振動子１がＯリング３１によって保持されているため、プローブ１０が被測定物３０に押し付けられても、振動子１は、被測定物３０の面内方向へ移動することはなく、振動子１、チップ２、保持部材３、アンテナ４～６、支持部材７、磁石８および樹脂部材９は、斥力ＲＦと反対方向へδだけ移動する。従って、被測定物３０が鉛直方向と任意の角度を成すように配置されていても、押し込み量を一定に保持できる。 As described above, in the embodiment of the present invention, since the vibrator 1 is held by the O-ring 31, even if the probe 10 is pressed against the device under test 30, the vibrator 1 is not attached to the device under test 30. The vibrator 1, the chip 2, the holding member 3, the antennas 4 to 6, the support member 7, the magnet 8, and the resin member 9 move by δ in the direction opposite to the repulsive force RF without moving in the in-plane direction. Therefore, even if the device under test 30 is arranged so as to form an arbitrary angle with the vertical direction, the pushing amount can be kept constant.
　プローブ１０を用いて被測定物３０のヤング率を測定する方法について説明する。 A method for measuring the Young's modulus of the DUT 30 using the probe 10 will be described.
　振動子１は、上述したように、ランガサイトからなり、ランガサイトは、三方晶系の結晶構造を有し、独立な６個の弾性定数Ｃ１１，Ｃ１２，Ｃ１３，Ｃ１４，Ｃ３３，Ｃ４４、２つの圧電定数ｅ１１，ｅ１４、および２つの誘電率ε１１，ε３３を有する。 As described above, the resonator 1 is made of langasite, which has a trigonal crystal structure and has six independent elastic constants C 11 , C 12 , C 13 , C 14 , C 33. , C 44 , two piezoelectric constants e 11 , e 14 , and two dielectric constants ε 11 , ε 33 .
　ランガサイトの弾性定数Ｃ１１，Ｃ１２，Ｃ１３，Ｃ１４，Ｃ３３，Ｃ４４、圧電定数ｅ１１，ｅ１４、誘電率ε１１，ε３３および密度ρを表１に示す。 Table 1 shows the elastic constants C 11 , C 12 , C 13 , C 14 , C 33 , C 44 , piezoelectric constants e 11 , e 14 , dielectric constants ε 11 , ε 33, and density ρ of Langasite.
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
　なお、表１において、弾性定数Ｃ１１，Ｃ１２，Ｃ１３，Ｃ１４，Ｃ３３，Ｃ４４の単位は、［ＧＰａ］であり、圧電定数ｅ１１，ｅ１４の単位は、［Ｃ／ｍ２］であり、誘電率ε１１，ε３３の単位は、［１０－２２Ｆ／ｍ２］であり、密度ρの単位は、［ｋｇ／ｍ２］である。 In Table 1, the units of the elastic constants C 11 , C 12 , C 13 , C 14 , C 33 , C 44 are [GPa], and the units of the piezoelectric constants e 11 , e 14 are [C / m 2 ], the units of dielectric constants ε 11 and ε 33 are [10 −22 F / m 2 ], and the unit of density ρ is [kg / m 2 ].
　図１０および図１１は、それぞれ、振動子１の振動をモデル化するための第１および第２の概念図である。 10 and 11 are first and second conceptual diagrams for modeling the vibration of the vibrator 1, respectively.
　振動の減衰がないものと仮定し、振動子１は、縦振動と十分に仮定できる程の細長い構造からなると仮定する。  Suppose that there is no vibration attenuation, and that the vibrator 1 has an elongated structure that can be sufficiently assumed to be longitudinal vibration.
　空間軸として、図１０の（ａ）に示すように、振動子１の長手方向をＺ軸とし、振動子１の長さをＬとし、Ｚ軸方向のヤング率をＥとし、振動子１の断面積をＡとし、振動子１の密度をρとし、位置Ｚ＝ＺにおけるＺ方向の変異をｕｚ＝ｕ（ｚ，ｔ）とする。この場合、振動子１の振動の運動方程式は、次式によって表される。 As the spatial axis, as shown in FIG. 10A, the longitudinal direction of the vibrator 1 is the Z-axis, the length of the vibrator 1 is L, the Young's modulus in the Z-axis direction is E, and the vibrator 1 The cross-sectional area is A, the density of the vibrator 1 is ρ, and the variation in the Z direction at the position Z = Z is u z = u (z, t). In this case, the motion equation of vibration of the vibrator 1 is expressed by the following formula.
Figure JPOXMLDOC01-appb-M000002
Figure JPOXMLDOC01-appb-M000002
　そして、式（１）の一般解は、次式によって表される。 And the general solution of equation (1) is expressed by the following equation.
Figure JPOXMLDOC01-appb-M000003
Figure JPOXMLDOC01-appb-M000003
　なお、式（２）において、ωは、振動子１の角振動数であり、ｋは、振動の波数であり、Ｃ１およびＣ２は、定数である。 In equation (2), ω is the angular frequency of the vibrator 1, k is the wave number of vibration, and C 1 and C 2 are constants.
　角振動数と波数とは、振動数ｆと音速ｖとを用いて次式によって表される。 The angular frequency and the wave number are expressed by the following equations using the frequency f and the speed of sound v.
Figure JPOXMLDOC01-appb-M000004
Figure JPOXMLDOC01-appb-M000004
　式（３）において、ρは、振動子１の密度であり、Ｅは、振動子１のヤングの弾性率である。 In Equation (3), ρ is the density of the vibrator 1, and E is the Young's elastic modulus of the vibrator 1.
　次に、図１０の（ｂ）に示すように、振動子１が被測定物３０に接触した状態を考える。ここで、バネ定数Ｋは、チップ２と被測定物３０との間の接触剛性を表す。この場合、境界条件は、Ｚ＝０でσ（０）＝０であり、一方、Ｚ＝Ｌでは、バネの復元力を考慮して、図１１に示すように、振動子１の内部に発生する圧縮応力σとバネの弾性力とがつり合う。これによって、Ｚ＝Ｌでは、Ａσ＋Ｋｕｚ＝０が成立する。これらの条件から次式が導かれる。 Next, let us consider a state in which the vibrator 1 is in contact with the device under test 30 as shown in FIG. Here, the spring constant K represents the contact rigidity between the chip 2 and the device under test 30. In this case, the boundary conditions are Z = 0 and σ (0) = 0. On the other hand, when Z = L, the restoring force of the spring is taken into consideration, as shown in FIG. The compressive stress σ and the elastic force of the spring balance. Thereby, when Z = L, Aσ + Ku z = 0 holds. From these conditions, the following equation is derived.
Figure JPOXMLDOC01-appb-M000005
Figure JPOXMLDOC01-appb-M000005
　以上を代入して計算すると、次式が得られる。  Substituting the above, the following formula is obtained.
Figure JPOXMLDOC01-appb-M000006
Figure JPOXMLDOC01-appb-M000006
　なお、式（５）において、Ｋｏｓｃは、振動子１の縦方向の静荷重におけるバネ定数に相当する。従って、式（５）の右辺は、振動子１の剛性と接触剛性との比を表し、プローブ１０の感度を上昇させるためには、右辺の値を大きく、即ち、Ｋｏｓｃ＝ＥＡ／Ｌを小さくすればよい。そのために、振動子１の長手方向のヤング率Ｅが小さくなるように結晶方位を決定する。 In Equation (5), K osc corresponds to the spring constant of the vibrator 1 in the static load in the vertical direction. Therefore, the right side of equation (5) represents the ratio of the stiffness of the vibrator 1 to the contact stiffness, and in order to increase the sensitivity of the probe 10, the value on the right side is increased, that is, K osc = EA / L. Just make it smaller. Therefore, the crystal orientation is determined so that the Young's modulus E in the longitudinal direction of the vibrator 1 becomes small.
　ここで、接触剛性Ｋは、Hertzの接触理論（非特許文献１，２参照）により、次式によって表される。 Here, the contact stiffness K is expressed by the following equation according to Hertz's contact theory (see Non-Patent Documents 1 and 2).
Figure JPOXMLDOC01-appb-M000007
Figure JPOXMLDOC01-appb-M000007
　式（６）において、Ｆは、バイアス力であり、Ｒは、チップ２の半径であり、Ｅ＊は、有効ヤング率である。 In Equation (6), F is the bias force, R is the radius of the tip 2, and E * is the effective Young's modulus.
　また、有効ヤング率Ｅ＊は、次式によって表される。 The effective Young's modulus E * is expressed by the following equation.
Figure JPOXMLDOC01-appb-M000008
Figure JPOXMLDOC01-appb-M000008
　式（７）において、Ｅｓｐｅは、被測定物３０のヤング率であり、Ｅｔｉｐは、チップ２のヤング率であり、νｓｐｅは、被測定物３０のポアソン比であり、νｔｉｐは、チップ２のポアソン比である。 In equation (7), E spe is the Young's modulus of the device under test 30, E tip is the Young's modulus of the chip 2, ν spe is the Poisson's ratio of the device under test 30, and ν tip is It is the Poisson's ratio of chip 2.
　従って、式（５）の左辺は、式（３）より共振周波数を含み、式（５）の右辺は、式（６），（７）より被測定物３０のヤング率Ｅｓｐｅを含む。よって、振動子１の共振周波数ｆを測定することによって、被測定物３０のヤング率Ｅｓｐｅを求めることができる。 Therefore, the left side of the equation (5) includes the resonance frequency from the equation (3), and the right side of the equation (5) includes the Young's modulus E spe of the device under test 30 from the equations (6) and (7). Therefore, by measuring the resonance frequency f of the vibrator 1, the Young's modulus E spe of the device under test 30 can be obtained.
　即ち、バイアス力Ｆ、チップ２の半径、振動子１の長さＬ、波数ｋ、被測定物３０のポアソン比νｓｐｅ、およびチップ２のポアソン比νｔｉｐは、既知であるので、共振周波数ｆ＝ｆｏｓｃを後述する方法によって求めることによって、被測定物３０のヤング率Ｅｓｐｅを算出できる。 That is, since the bias force F, the radius of the chip 2, the length L of the vibrator 1, the wave number k, the Poisson ratio ν spe of the device under test 30 and the Poisson ratio ν tip of the chip 2 are known, the resonance frequency f By calculating = fosc by the method described later, the Young's modulus E spe of the device under test 30 can be calculated.
　図１２は、この発明の実施の形態による弾性定数測定装置の構成図である。図１２を参照して、この発明の実施の形態による弾性定数測定装置１００は、プローブ１０と、電圧源４０と、検出器５０とを備える。 FIG. 12 is a block diagram of an elastic constant measuring apparatus according to an embodiment of the present invention. Referring to FIG. 12, elastic constant measuring apparatus 100 according to the embodiment of the present invention includes a probe 10, a voltage source 40, and a detector 50.
　プローブ１０については、上述したとおりである。電圧源４０は、プローブ１０のアンテナ５の他方端に接続される。また、電圧源４０は、例えば、シンセサイザー（ＮＦ回路設計ブロック、ＷＦ１９７４）からなる。そして、電圧源４０は、振動子１を振動させたい周波数成分ｆ（約０．１ＭＨｚ）を有する電圧Ｖｖのバースト波（約１０ｍｓ）をアンテナ５に送信するとともに、トリガー信号を検出器５０へ出力する。この場合、電圧Ｖｖは、例えば、最大値と最小値との差が５０Ｖである電圧からなる。 The probe 10 is as described above. The voltage source 40 is connected to the other end of the antenna 5 of the probe 10. The voltage source 40 is composed of, for example, a synthesizer (NF circuit design block, WF1974). Then, the voltage source 40 transmits a burst wave (about 10 ms) of the voltage Vv having a frequency component f (about 0.1 MHz) to vibrate the vibrator 1 to the antenna 5 and outputs a trigger signal to the detector 50. To do. In this case, the voltage Vv is, for example, a voltage whose difference between the maximum value and the minimum value is 50V.
　検出器５０は、アンテナ６の他方端に接続され、例えば、デジタイザー（National Instruments, NIUSB-5133）からなる。また、検出器５０は、電圧源４０からトリガー信号を受ける。そして、検出器５０は、トリガー信号の立ち上がりから一定後（例えば、１０μｓ）に、振動子１が振動したことに伴って発生した分極電場の受信信号をアンテナ６から受ける。その後、検出器５０は、その受けた受信信号をフーリエ変換し、振動周波数ｆに対応する振幅Ａを求める。 The detector 50 is connected to the other end of the antenna 6 and includes, for example, a digitizer (National Instruments, NIUSB-5133). The detector 50 receives a trigger signal from the voltage source 40. The detector 50 receives from the antenna 6 a received signal of the polarization electric field generated when the vibrator 1 vibrates after a certain time (for example, 10 μs) from the rising edge of the trigger signal. Thereafter, the detector 50 performs a Fourier transform on the received signal, and obtains an amplitude A corresponding to the vibration frequency f.
　検出器５０は、振動周波数ｆが変えられたときの振動周波数ｆと振幅Ａとの関係に基づいて、振動子１の共振周波数ｆｏｓｃを求め、共振周波数ｆｏｓｃ、および式（３），（５）～（７）を用いて被測定物３０のヤング率Ｅｓｐｅを算出する。 The detector 50 obtains the resonance frequency fosc of the vibrator 1 based on the relationship between the vibration frequency f and the amplitude A when the vibration frequency f is changed, and calculates the resonance frequency fosc and the equations (3) and (5). The Young's modulus E spe of the device under test 30 is calculated using (7).
　フーリエ変換の詳細は、次のとおりである。検出器５０のレコード長を２５００（Sampling）とし、サンプルレートを２．０×１０５（Sampling/s）とする。そして、検出器５０は、アンテナ６から受けた受信信号の波形と周波数ｆとに合わせて三角関数（ｃｏｓ（２πｆ・ｔ），ｓｉｎ（２πｆ・ｔ））のデジタルデータを作成し、その作成した三角関数を積算してフーリエ変換を行う。より具体的には、検出器５０は、次の方法によってフーリエ変換を行う。 Details of the Fourier transform are as follows. The record length of the detector 50 is 2500 (Sampling), and the sample rate is 2.0 × 10 5 (Sampling / s). The detector 50 creates digital data of trigonometric functions (cos (2πf · t), sin (2πf · t)) in accordance with the waveform of the received signal received from the antenna 6 and the frequency f, and the created data Perform a Fourier transform by accumulating trigonometric functions. More specifically, the detector 50 performs a Fourier transform by the following method.
　受信信号の波形をｆ（ｔ）とすると、検出器５０は、次式によって三角関数を積分する。 Suppose that the waveform of the received signal is f (t), the detector 50 integrates the trigonometric function according to the following equation.
Figure JPOXMLDOC01-appb-M000009
Figure JPOXMLDOC01-appb-M000009
　実際には、積算の区間は、有限区間であり、受信信号は、デジタル信号であるので、検出器５０は、次式によって三角関数を積分してＩ１とＩ２とを取得する。 Actually, since the integration interval is a finite interval and the received signal is a digital signal, the detector 50 integrates the trigonometric function according to the following equation to obtain I 1 and I 2 .
Figure JPOXMLDOC01-appb-M000010
Figure JPOXMLDOC01-appb-M000010
　そして、検出器５０は、次式によって振幅Ａを求める。 And the detector 50 calculates | requires the amplitude A by following Formula.
Figure JPOXMLDOC01-appb-M000011
Figure JPOXMLDOC01-appb-M000011
　図１３は、バースト波およびトリガー信号のタイミングチャートである。図１３を参照して、バースト波ＢＷ１，ＢＷ２の各々は、例えば、１０００サイクル数および１０ｍｓの長さを有する。また、バースト波ＢＷ１，ＢＷ２の各々は、最大値と最小値との差が５０Ｖであり、振動子１を振動させたい周波数ｆ（＝０．１ＭＨｚ）を有する。更に、バースト波ＢＷ１とバースト波ＢＷ２との間隔ｄは、例えば、１０ｍｓである。 FIG. 13 is a timing chart of burst waves and trigger signals. Referring to FIG. 13, each of burst waves BW1 and BW2 has, for example, the number of 1000 cycles and a length of 10 ms. Each of the burst waves BW1 and BW2 has a difference between the maximum value and the minimum value of 50V, and has a frequency f (= 0.1 MHz) at which the vibrator 1 is desired to vibrate. Furthermore, the interval d between the burst wave BW1 and the burst wave BW2 is, for example, 10 ms.
　トリガー信号ＴＲＧは、バースト波ＢＷ１の立上りであるタイミングｔ１でＬ（論理ロー）レベルになり、バースト波ＢＷ１の立下りであるタイミングｔ２でＨ（論理ハイ）レベルになり、バースト波ＢＷ２の立上りであるタイミングｔ３でＬレベルになり、バースト波ＢＷ２の立下りであるタイミングｔ４でＨレベルになる。そして、検出器５０は、タイミングｔ２からタイミングｔ３までの間にアンテナ６から受信信号を受ける。従って、検出器５０は、バースト波ＢＷ１が振動子１に印加されたタイミングｔ１から一定後のタイミングｔ２で受信信号をアンテナ６から受け始める。 The trigger signal TRG becomes L (logic low) level at timing t1 when the burst wave BW1 rises, and becomes H (logic high) level at timing t2 when the burst wave BW1 falls, and at the rise of the burst wave BW2. It becomes L level at a certain timing t3 and becomes H level at a timing t4 which is the falling edge of the burst wave BW2. The detector 50 receives a reception signal from the antenna 6 from timing t2 to timing t3. Accordingly, the detector 50 starts to receive the received signal from the antenna 6 at a timing t2 that is a certain time after the timing t1 at which the burst wave BW1 is applied to the vibrator 1.
　図１４は、ヤング率の測定方法を説明するためのフローチャートである。なお、以下においては、プローブ１０が被測定物３０に押し付けられ、チップ２が被測定物３０に接触していることを前提としてヤング率の測定方法を説明する。 FIG. 14 is a flowchart for explaining a method of measuring Young's modulus. In the following, a method for measuring the Young's modulus will be described on the assumption that the probe 10 is pressed against the device under test 30 and the tip 2 is in contact with the device under test 30.
　図１４を参照して、ヤング率の測定が開始されると、周波数の測定範囲、周波数を変える間隔、バースト波のマーク数、およびバースト波の間隔が電圧源４０に設定される（ステップＳ１）。 Referring to FIG. 14, when measurement of Young's modulus is started, the frequency measurement range, the frequency changing interval, the number of burst wave marks, and the burst wave interval are set in voltage source 40 (step S1). .
　そして、電圧源４０は、周波数の測定範囲内において、振動子１を振動させたい周波数成分を決定し、その決定した周波数成分と、ステップＳ１において設定されたマーク数とを有する電圧Ｖｖからなるバースト波を生成し、その生成したバースト波を、ステップＳ１において設定されたバースト波の間隔でアンテナ５へ送信する。また、電圧源４０は、同時に、トリガー信号ＴＲＧを検出器５０へ出力する（ステップＳ２）。 Then, the voltage source 40 determines a frequency component to vibrate the vibrator 1 within the frequency measurement range, and a burst composed of the voltage Vv having the determined frequency component and the number of marks set in step S1. A wave is generated, and the generated burst wave is transmitted to the antenna 5 at the burst wave interval set in step S1. At the same time, the voltage source 40 outputs the trigger signal TRG to the detector 50 (step S2).
　そうすると、アンテナ５は、アンテナ４と協働して電圧Ｖｖを振動子１に印加し、振動電場が振動子１に発生する。その結果、その発生した振動電場によって圧電現象が振動子１に起こり、振動子１が振動する（ステップＳ３）。 Then, the antenna 5 cooperates with the antenna 4 to apply the voltage Vv to the vibrator 1, and an oscillating electric field is generated in the vibrator 1. As a result, a piezoelectric phenomenon occurs in the vibrator 1 by the generated oscillating electric field, and the vibrator 1 vibrates (step S3).
　アンテナ６は、アンテナ４と協働して、振動子１の振動に伴って発生した分極電場を電圧として検出する（ステップＳ４）。 The antenna 6 cooperates with the antenna 4 to detect the polarization electric field generated along with the vibration of the vibrator 1 as a voltage (step S4).
　そして、検出器５０は、アンテナ６から受信信号（＝電圧）を受ける（ステップＳ５）。この場合、検出器５０は、図１３に示すタイミングｔ２からタイミングｔ３までの間で受信信号をアンテナ６から受ける。 And the detector 50 receives a received signal (= voltage) from the antenna 6 (step S5). In this case, the detector 50 receives a received signal from the antenna 6 between timing t2 and timing t3 shown in FIG.
　その後、検出器５０は、上述した方法によって、受信信号をフーリエ変換し、振動周波数ｆに対する振幅Ａを求める（ステップＳ６）。 Thereafter, the detector 50 performs a Fourier transform on the received signal by the method described above to obtain an amplitude A with respect to the vibration frequency f (step S6).
　そうすると、電圧源４０は、測定範囲内の全てで周波数ｆを変えたか否かを判定する（ステップＳ７）。 Then, the voltage source 40 determines whether or not the frequency f has been changed all within the measurement range (step S7).
　ステップＳ７において、測定範囲内の全てで周波数ｆを変えていないと判定されたとき、電圧源４０は、測定範囲内で周波数ｆを変更する（ステップＳ８）。この場合、電圧源４０は、ステップＳ１において設定された、周波数を変える間隔を元の周波数に加算することによって周波数ｆを変更する。 When it is determined in step S7 that the frequency f has not been changed in all of the measurement range, the voltage source 40 changes the frequency f within the measurement range (step S8). In this case, the voltage source 40 changes the frequency f by adding the frequency change interval set in step S1 to the original frequency.
　その後、一連の動作は、ステップＳ２へ戻り、ステップＳ７において、測定範囲内の全てで周波数ｆを変えたと判定されるまで、上述したステップＳ２～ステップＳ８が繰り返し実行される。 Thereafter, the series of operations returns to step S2, and step S2 to step S8 described above are repeatedly executed until it is determined in step S7 that the frequency f has been changed in all of the measurement range.
　そして、ステップＳ７において、測定範囲内の全てで周波数ｆを変えたと判定されると、検出器５０は、周波数ｆと振幅Ａとの関係をプロットし、振幅Ａが最大である周波数を共振周波数ｆｏｓｃとして検出する（ステップＳ９）。 When it is determined in step S7 that the frequency f has been changed in all of the measurement range, the detector 50 plots the relationship between the frequency f and the amplitude A, and sets the frequency at which the amplitude A is maximum to the resonance frequency fosc. (Step S9).
　その後、検出器５０は、その検出した共振周波数ｆｏｓｃおよび式（３），（５）～（７）を用いて被測定物３０のヤング率Ｅｓｐｅを算出する（ステップＳ１０）。これによって、ヤング率の測定が終了する。 Thereafter, the detector 50 calculates the Young's modulus E spe of the device under test 30 using the detected resonance frequency fosc and equations (3), (5) to (7) (step S10). This completes the measurement of Young's modulus.
　図１５は、振幅と周波数との関係を示す図である。図１５の（ａ），（ｂ）において、縦軸は、振幅を表し、横軸は、周波数を表す。 FIG. 15 is a diagram showing the relationship between amplitude and frequency. 15A and 15B, the vertical axis represents amplitude, and the horizontal axis represents frequency.
　また、曲線ｋ１は、この発明の実施の形態によるプローブ１０の振動子１にＯリングを装着した場合における振幅と周波数との関係を示し、曲線ｋ２は、特許文献１に開示された弾性定数測定装置の振動子にＯリングを装着した場合における振幅と周波数との関係を示す。 A curve k1 shows the relationship between amplitude and frequency when the O-ring is attached to the transducer 1 of the probe 10 according to the embodiment of the present invention, and a curve k2 shows the elastic constant measurement disclosed in Patent Document 1. The relationship between amplitude and frequency when an O-ring is attached to the vibrator of the apparatus is shown.
　更に、曲線ｋ３は、この発明の実施の形態によるプローブ１０の振動子１にＯリングを装着しない場合における振幅と周波数との関係を示し、曲線ｋ４は、特許文献１に開示された弾性定数測定装置の振動子にＯリングを装着しない場合における振幅と周波数との関係を示す。 Furthermore, the curve k3 shows the relationship between the amplitude and the frequency when the O-ring is not attached to the transducer 1 of the probe 10 according to the embodiment of the present invention, and the curve k4 shows the elastic constant measurement disclosed in Patent Document 1. The relationship between the amplitude and the frequency when the O-ring is not attached to the vibrator of the apparatus is shown.
　図１５を参照して、振動子１にＯリングを装着した場合も、装着しない場合も、プローブ１０の振動子１の振動は、１つの周波数においてピークを有する（曲線ｋ１，ｋ３参照）。これに対し、特許文献１に開示された振動子の振動は、複数の周波数においてピークを有する（曲線ｋ２，ｋ４参照）。特に、Ｏリングを装着した場合、特許文献１に開示された振動子の振動は、０．１１１（ＭＨｚ）を中心として複数の周波数においてピークを有する（曲線ｋ２参照）。 Referring to FIG. 15, the vibration of the transducer 1 of the probe 10 has a peak at one frequency whether the O-ring is attached to the transducer 1 or not (see curves k1 and k3). On the other hand, the vibration of the vibrator disclosed in Patent Document 1 has peaks at a plurality of frequencies (see curves k2 and k4). In particular, when an O-ring is attached, the vibration of the vibrator disclosed in Patent Document 1 has peaks at a plurality of frequencies centering on 0.111 (MHz) (see curve k2).
　共振周波数の測定時における入力電圧、積分区間長およびバースト波の長さを表２に示す。また、共振周波数およびＱ値を表３に示す。 Table 2 shows the input voltage, integration interval length, and burst wave length when measuring the resonant frequency. Table 3 shows the resonance frequency and the Q value.
Figure JPOXMLDOC01-appb-T000012
Figure JPOXMLDOC01-appb-T000012
Figure JPOXMLDOC01-appb-T000013
Figure JPOXMLDOC01-appb-T000013
　本発明においては、入力電圧は、１０Ｖ（最大値と最小値との差）であり、積分区間長が１２．５ｍｓであり、バースト波の長さが１０ｍｓである。一方、従来例（特許文献１）においては、入力電圧は、２００Ｖ（最大値と最小値との差）であり、積分区間長が０．４ｍｓであり、バースト波の長さが０．２ｍｓである。 In the present invention, the input voltage is 10 V (difference between the maximum value and the minimum value), the integration interval length is 12.5 ms, and the burst wave length is 10 ms. On the other hand, in the conventional example (Patent Document 1), the input voltage is 200 V (difference between the maximum value and the minimum value), the integration interval length is 0.4 ms, and the burst wave length is 0.2 ms. is there.
　このように、本発明では、積分区間長およびバースト波の長さを従来よりも大幅に長くし、入力電圧を大幅に小さくしている。 Thus, in the present invention, the integration interval length and the burst wave length are significantly longer than in the prior art, and the input voltage is significantly reduced.
　また、表３に示すように、本発明において、Ｑ値は、振動子１にＯリングを装着しない場合、１８５５であり、Ｏリングを装着した場合、１５８７である。一方、従来例（特許文献１）において、Ｑ値は、振動子にＯリングを装着しない場合、４９６．５であり、Ｏリングを装着した場合、２８３．３である。 Further, as shown in Table 3, in the present invention, the Q value is 1855 when the O-ring is not attached to the vibrator 1, and is 1587 when the O-ring is attached. On the other hand, in the conventional example (Patent Document 1), the Q value is 496.5 when the O-ring is not attached to the vibrator, and 283.3 when the O-ring is attached.
　このように、従来例においては、バースト波の長さが０．２ｍｓと短いため、十分に共振状態を作ることができず、大きな電圧（～２００Ｖ）を使用しても信号強度は、大きくならない。 Thus, in the conventional example, since the length of the burst wave is as short as 0.2 ms, a sufficient resonance state cannot be created, and the signal intensity does not increase even when a large voltage (˜200 V) is used. .
　一方、本発明においては、振動子１が振動し易いので、バースト波の長さを１０ｍｓと長くすることができるため、低い電圧（１０Ｖ）でも、高いＱ値を得ることができた。 On the other hand, in the present invention, since the vibrator 1 is likely to vibrate, the length of the burst wave can be increased to 10 ms. Therefore, a high Q value can be obtained even at a low voltage (10 V).
　ランガサイトからなる振動子の振動を単純な棒の一次元縦振動であると想定して、プローブ１０を用いて得られた共振周波数ｆｏｓｃからヤング率を算出すると、１１３．５１ＧＰａであった。 Assuming that the vibration of the vibrator composed of Langasite is a simple one-dimensional longitudinal vibration of a rod, the Young's modulus was calculated from the resonance frequency fosc obtained using the probe 10, and it was 113.51 GPa.
　ランガサイトの弾性定数から求めた［１００］方向のヤング率は、１１４．０３ＧＰａであり、実測値（＝１１３．５１ＧＰａ）との差は、０．４％程度であり、十分に小さい。従って、上述したヤング率を求める方法は、ヤング率の測定に好適である。 The Young's modulus in the [100] direction obtained from the elastic constant of Langasite is 114.03 GPa, and the difference from the measured value (= 113.51 GPa) is about 0.4%, which is sufficiently small. Therefore, the above-described method for obtaining the Young's modulus is suitable for measuring the Young's modulus.
　図１６は、測定されたヤング率と、報告されているヤング率との関係を示す図である。 FIG. 16 is a diagram showing the relationship between the measured Young's modulus and the reported Young's modulus.
　図１６において、縦軸は、上述した方法によって測定されたヤング率（＝測定値）を表し、横軸は、報告されているヤング率（＝報告値）を表す。また、チップ２の半径は、２ｍｍであり、バイアス力Ｆは、０．４５５Ｎである。更に、振動子１を構成するランガサイトは、結晶のＸ軸方向が長手方向に一致し、サイズは、２ｍｍ×２ｍｍ×２０ｍｍである。 In FIG. 16, the vertical axis represents the Young's modulus (= measured value) measured by the method described above, and the horizontal axis represents the reported Young's modulus (= reported value). Further, the radius of the chip 2 is 2 mm, and the bias force F is 0.455N. Furthermore, in the langasite constituting the vibrator 1, the X-axis direction of the crystal coincides with the longitudinal direction, and the size is 2 mm × 2 mm × 20 mm.
　図１６を参照して、測定値は、報告値と良い一致を示す。また、図１６に示す直線は、測定値が報告値と１対１に対応することを表す。 Referring to FIG. 16, the measured values are in good agreement with the reported values. Moreover, the straight line shown in FIG. 16 represents that the measured value has a one-to-one correspondence with the reported value.
　このように、この発明の実施の形態によるプローブ１０を用いることによって、被測定物３０のヤング率をフィッティングパラメータを一切用いずに被測定物３０に触れるだけで正確に求めることができる。 As described above, by using the probe 10 according to the embodiment of the present invention, the Young's modulus of the object to be measured 30 can be accurately obtained simply by touching the object to be measured 30 without using any fitting parameters.
　上記においては、検出器５０は、振動子１の共振周波数を検出し、その検出した共振周波数に基づいて被測定物３０のヤング率を算出すると説明したが、この発明の実施の形態においては、これに限らず、検出器５０は、振動子１の共振周波数を有するピークの半値幅ＦＷＨＭを検出してもよい。この場合、検出器５０は、図１５の曲線ｋ１，ｋ３によって示されるピークの半値幅ＦＷＨＭを検出する。 In the above description, it has been described that the detector 50 detects the resonance frequency of the vibrator 1 and calculates the Young's modulus of the DUT 30 based on the detected resonance frequency. In the embodiment of the present invention, The detector 50 is not limited to this, and the peak half-value width FWHM having the resonance frequency of the vibrator 1 may be detected. In this case, the detector 50 detects the half width FWHM of the peak indicated by the curves k1 and k3 in FIG.
　また、検出器５０は、振動子１が減衰するときの減衰定数αを検出してもよい。図１７は、振動子１の減衰特性を示す図である。検出器５０は、図１３に示すタイミングｔ２からタイミングｔ３までの間にアンテナ６から受信信号を受ける。タイミングｔ２からタイミングｔ３までの間、バースト波が振動子１に印加されていないため、振動子１の振動は、図１７に示す振動曲線ＤＣＹのように減衰する。 The detector 50 may detect an attenuation constant α when the vibrator 1 is attenuated. FIG. 17 is a diagram illustrating the attenuation characteristics of the vibrator 1. The detector 50 receives a reception signal from the antenna 6 from timing t2 to timing t3 shown in FIG. Since the burst wave is not applied to the vibrator 1 from the timing t2 to the timing t3, the vibration of the vibrator 1 is attenuated as a vibration curve DCY shown in FIG.
　そこで、検出器５０は、振動曲線ＤＣＹを検出し、その検出した振動曲線ＤＣＹの包絡線ＥＶＬを検出する。包絡線ＥＶＬは、通常、ｅ－αｔ（α：減衰定数、ｔ：時間）に表される。 Therefore, the detector 50 detects the vibration curve DCY, and detects the envelope EVL of the detected vibration curve DCY. The envelope EVL is usually expressed by e −αt (α: attenuation constant, t: time).
　従って、検出器５０は、包絡線ＥＶＬを検出すると、その検出した包絡線ＥＶＬをｅ－αｔによってフィッティングし、減衰定数αを検出する。 Therefore, when detecting the envelope EVL, the detector 50 fits the detected envelope EVL with e −αt to detect the attenuation constant α.
　図１８は、被測定物３０の具体例を示す断面図である。図１８を参照して、被測定物３０は、本体部３０１と、コーティング層３０２とを含む。コーティング層３０２は、本体部３０１の表面３０１Ａを覆うように本体部３０１上に配置されている。そして、剥離部３０３，３０４が本体部３０１とコーティング層３０２との間に形成されている。 FIG. 18 is a cross-sectional view showing a specific example of the device under test 30. Referring to FIG. 18, the device under test 30 includes a main body portion 301 and a coating layer 302. The coating layer 302 is disposed on the main body 301 so as to cover the surface 301 </ b> A of the main body 301. Then, peeling portions 303 and 304 are formed between the main body portion 301 and the coating layer 302.
　このような被測定物３０のコーティング層３０２の表面３０２Ａにプローブ１０のチップ２を接触させて振動子１の減衰定数αｈを検出する。ここで、剥離部３０３，３０４が形成されていないときの振動子１の減衰定数をα０とすると、減衰定数αｈは、減衰定数α０よりも大きくなる。その理由は、次のとおりである。 The tip 2 of the probe 10 is brought into contact with the surface 302A of the coating layer 302 of the object to be measured 30 to detect the attenuation constant α h of the vibrator 1. Here, if the attenuation constant of the vibrator 1 when the peeling portions 303 and 304 are not formed is α 0 , the attenuation constant α h is larger than the attenuation constant α 0 . The reason is as follows.
　プローブ１０のチップ２をコーティング層３０２の表面３０２Ａに接触させて振動子１を振動させた場合、振動子１の振動がコーティング層３０２に伝搬し、コーティング層３０２も振動するが、剥離部３０３，３０４は、コーティング層３０２の振動を吸収するので、コーティング層３０２の振動が減衰し易くなる。その結果、振動子１の振動も減衰し易くなり、被測定物３０に剥離部３０３，３０４が形成されている場合の振動子１の減衰定数αｈは、剥離部３０３，３０４が形成されていない場合の減衰定数α０よりも大きくなるからである。 When the tip 2 of the probe 10 is brought into contact with the surface 302A of the coating layer 302 and the vibrator 1 is vibrated, the vibration of the vibrator 1 propagates to the coating layer 302 and the coating layer 302 also vibrates. Since 304 absorbs the vibration of the coating layer 302, the vibration of the coating layer 302 is easily attenuated. As a result, the vibration of the vibrator 1 is also easily attenuated, and the damping constant α h of the vibrator 1 when the peeling portions 303 and 304 are formed on the object to be measured 30 has the peeling portions 303 and 304 formed. This is because it becomes larger than the attenuation constant α 0 in the case of not being present.
　従って、検出器５０が上述した方法によって振動子１の減衰定数αを測定することによって、被測定物３０に剥離部３０３，３０４（＝欠陥）が形成されているか否かを検出できる。この場合、検出器５０は、検出した減衰定数αが減衰定数α０よりも大きければ、剥離部３０３，３０４が形成されていることを検出し、検出した減衰定数αが減衰定数α０に略等しければ、剥離部３０３，３０４が形成されていないことを検出する。 Therefore, it is possible to detect whether or not the peeling portions 303 and 304 (= defects) are formed on the measurement object 30 by the detector 50 measuring the attenuation constant α of the vibrator 1 by the method described above. In this case, if the detected attenuation constant α is larger than the attenuation constant α 0 , the detector 50 detects that the peeling portions 303 and 304 are formed, and the detected attenuation constant α is substantially equal to the attenuation constant α 0 . If they are equal, it is detected that the peeling portions 303 and 304 are not formed.
　また、剥離部３０３，３０４が形成されている場合の共振周波数を有するピークの半値幅ＦＷＨＭｈは、剥離部３０３，３０４が形成されていない場合の共振周波数を有するピークの半値幅ＦＷＨＭ０よりも大きくなる。その理由は、剥離部３０３，３０４が形成されている場合の振動子１の減衰定数αｈが、剥離部３０３，３０４が形成されていない場合の減衰定数α０よりも大きくなる理由と同じである。 Further, the peak half-value width FWHM h having the resonance frequency when the peeling portions 303 and 304 are formed is larger than the peak half-value width FWHM 0 having the resonance frequency when the peeling portions 303 and 304 are not formed. growing. The reason is the same as the reason why the attenuation constant α h of the vibrator 1 when the peeling portions 303 and 304 are formed is larger than the attenuation constant α 0 when the peeling portions 303 and 304 are not formed. is there.
　従って、検出器５０が共振周波数を有するピークの半値幅ＦＷＨＭを検出することによっても、被測定物３０に剥離部３０３，３０４（＝欠陥）が形成されているか否かを検出できる。この場合、剥離部３０３，３０４が形成されていない場合の半値幅をＦＷＨＭ０とすると、検出器５０は、検出した半値幅ＦＷＨＭが半値幅ＦＷＨＭ０よりも大きければ、剥離部３０３，３０４が形成されていることを検出し、検出した半値幅ＦＷＨＭが半値幅ＦＷＨＭ０に略等しければ、剥離部３０３，３０４が形成されていないことを検出する。 Therefore, whether or not the peeling portions 303 and 304 (= defects) are formed on the object to be measured 30 can also be detected by detecting the peak half width FWHM having the resonance frequency by the detector 50. In this case, if the half width when the peeling portions 303 and 304 are not formed is FWHM 0 , the detector 50 forms the peeling portions 303 and 304 if the detected half width FWHM is larger than the half width FWHM 0. If the detected half-value width FWHM is substantially equal to the half-value width FWHM 0 , it is detected that the peeling portions 303 and 304 are not formed.
　このように、共振周波数を有するピークの半値幅ＦＷＨＭ、または振動子１の減衰定数αを検出することによって、被測定物３０における欠陥の有無を検出できる。 Thus, the presence or absence of a defect in the device under test 30 can be detected by detecting the half-width FWHM of the peak having the resonance frequency or the attenuation constant α of the vibrator 1.
　検出器５０が複数種類の被測定物３０の減衰定数αを検出する場合、減衰定数αの大小を比較することによって目的に適合する被測定物３０を選択することができる。 When the detector 50 detects the attenuation constant α of a plurality of types of objects to be measured 30, the object to be measured 30 that matches the purpose can be selected by comparing the magnitudes of the attenuation constants α.
　例えば、防振または防音を目的とする場合、減衰定数αがより大きい被測定物３０を選択すればよい。また、携帯電話機の共振デバイスに用いる材料を選択する場合、減衰定数αがより小さい被測定物３０を選択すればよい。 For example, when the purpose is to prevent vibration or sound, the device under test 30 having a larger attenuation constant α may be selected. Further, when selecting a material to be used for the resonant device of the mobile phone, it is only necessary to select the device under test 30 having a smaller attenuation constant α.
　また、被測定物３０が破断する場合、その破断の直前に減衰定数αが急激に大きくなるタイミングがあるので、被測定物３０の減衰定数αの経時変化を測定し、減衰定数αが急激に大きくなれば、被測定物３０が破断する虞があると判定し、その被測定物３０を交換するようにしてもよい。例えば、飛行機では、翼と本体との境界に最も荷重が印加され、翼の付け根が最も破断し易いので、翼の付け根の部分における減衰定数αの経時変化をプローブ１０を用いて測定し、減衰定数αが急激に大きくなれば、翼が破断すると判定し、翼を交換する。 In addition, when the device under test 30 breaks, there is a timing at which the damping constant α suddenly increases immediately before the break, so the change over time of the damping constant α of the device under test 30 is measured, and the damping constant α suddenly increases. If it becomes larger, it may be determined that the device under test 30 may be broken, and the device under test 30 may be replaced. For example, in an airplane, the load is most applied to the boundary between the wing and the main body, and the base of the wing is most likely to break. Therefore, the time-dependent change of the attenuation constant α at the base of the wing is measured using the probe 10 to attenuate If the constant α increases rapidly, it is determined that the blade is broken, and the blade is replaced.
　このように、プローブ１０は、被測定物３０のヤング率の計測のみならず、被測定物３０の欠陥の検出、材料選択および非破壊検査等に使用可能である。 As described above, the probe 10 can be used not only for measuring the Young's modulus of the object to be measured 30, but also for detecting defects of the object to be measured 30, material selection, non-destructive inspection, and the like.
　図１９は、共振周波数を有するピークの半値幅を用いて欠陥を検出するときの動作を説明するためのフローチャートである。なお、図１９においては、検出器５０は、欠陥（剥離部３０３，３０４）が被測定物３０に形成されていないときの共振周波数を有するピークの半値幅ＦＷＨＭ０を予め保持していることを前提として欠陥を検出する動作を説明する。 FIG. 19 is a flowchart for explaining an operation when a defect is detected using a half width of a peak having a resonance frequency. In FIG. 19, the detector 50 holds in advance a peak half-value width FWHM 0 having a resonance frequency when no defect (peeling portion 303, 304) is formed on the DUT 30. An operation for detecting a defect will be described as a premise.
　図１９に示すフローチャートは、図１４に示すフローチャートのステップＳ１０をステップＳ１１～ステップＳ１４に代えたものであり、その他は、図１４に示すフローチャートと同じである。 The flowchart shown in FIG. 19 is the same as the flowchart shown in FIG. 14 except that step S10 of the flowchart shown in FIG. 14 is replaced with steps S11 to S14.
　図１９を参照して、欠陥を検出する動作が開始されると、上述したステップＳ１～ステップＳ９が順次実行される。そして、ステップＳ９の後、検出器５０は、共振周波数ｆｏｓｃを有するピークの半値幅ＦＷＨＭを検出する（ステップＳ１１）。 Referring to FIG. 19, when the operation for detecting a defect is started, the above-described steps S1 to S9 are sequentially executed. After step S9, the detector 50 detects the half-value width FWHM of the peak having the resonance frequency fosc (step S11).
　その後、検出器５０は、半値幅ＦＷＨＭが半値幅ＦＷＨＭ０よりも大きいか否かを判定する（ステップＳ１２）。 Thereafter, the detector 50 determines whether or not the half width FWHM is larger than the half width FWHM 0 (step S12).
　ステップＳ１２において、半値幅ＦＷＨＭが半値幅ＦＷＨＭ０よりも大きいと判定されたとき、検出器５０は、被測定物３０に欠陥が形成されていることを検出する（ステップＳ１３）。 In Step S12, when it is determined that the half-value width FWHM is larger than the half-value width FWHM 0 , the detector 50 detects that a defect is formed in the object to be measured 30 (Step S13).
　一方、ステップＳ１２において、半値幅ＦＷＨＭが半値幅ＦＷＨＭ０よりも大きくないと判定されたたとき（即ち、半値幅ＦＷＨＭが半値幅ＦＷＨＭ０に略等しいと判定されたとき）、検出器５０は、被測定物３０に欠陥が形成されていないことを検出する（ステップＳ１４）。 On the other hand, when it is determined in step S12 that the half-value width FWHM is not larger than the half-value width FWHM 0 (that is, when the half-value width FWHM is determined to be substantially equal to the half-value width FWHM 0 ), the detector 50 It is detected that no defect is formed on the device under test 30 (step S14).
　そして、ステップＳ１３またはステップＳ１４の後、欠陥を検出する動作が終了する。 Then, after step S13 or step S14, the operation for detecting a defect ends.
　図２０は、減衰定数を用いて欠陥を検出するときの動作を説明するためのフローチャートである。なお、図２０においては、検出器５０は、欠陥（剥離部３０３，３０４）が被測定物３０に形成されていないときの減衰定数α０を予め保持していることを前提として欠陥を検出する動作を説明する。 FIG. 20 is a flowchart for explaining an operation when a defect is detected using an attenuation constant. In FIG. 20, the detector 50 detects the defect on the assumption that the attenuation constant α 0 when the defect (the peeling portions 303 and 304) is not formed on the DUT 30 is held in advance. The operation will be described.
　図２０に示すフローチャートは、図１４に示すフローチャートのステップＳ６～ステップＳ１０をステップＳ１５～ステップＳ１９に代えたものであり、その他は、図１４に示すフローチャートと同じである。 The flowchart shown in FIG. 20 is the same as the flowchart shown in FIG. 14 except that steps S6 to S10 in the flowchart shown in FIG. 14 are replaced with steps S15 to S19.
　図２０を参照して、欠陥を検出する動作が開始されると、上述したステップＳ１～ステップＳ５が順次実行される。そして、ステップＳ５の後、検出器５０は、アンテナ６から受けた受信信号（＝減衰曲線ＤＣＹ）の包絡線ＥＶＬを検出する（ステップＳ１５）。 Referring to FIG. 20, when an operation for detecting a defect is started, the above-described steps S1 to S5 are sequentially executed. After step S5, the detector 50 detects the envelope EVL of the received signal (= attenuation curve DCY) received from the antenna 6 (step S15).
　その後、検出器５０は、その検出した包絡線ＥＶＬをｅ－αｔによってフィッティングし、減衰定数αを検出する（ステップＳ１６）。 Thereafter, the detector 50 fits the detected envelope EVL with e −αt to detect the attenuation constant α (step S16).
　そして、検出器５０は、減衰定数αが減衰定数α０よりも大きいか否かを判定する（ステップＳ１７）。 Then, the detector 50 determines the attenuation constant alpha is whether greater than the attenuation constant alpha 0 (step S17).
　ステップＳ１７において、減衰定数αが減衰定数α０よりも大きいと判定されたとき、検出器５０は、被測定物３０に欠陥が形成されていることを検出する（ステップＳ１８）。 In step S17, when the attenuation constant alpha is determined to be greater than the attenuation constant alpha 0, the detector 50 detects that the defect is formed on the measured object 30 (Step S18).
　一方、ステップＳ１７において、減衰定数αが減衰定数α０よりも大きくないと判定されたとき（即ち、減衰定数αが減衰定数α０に略等しいと判定されたとき）、検出器５０は、被測定物３０に欠陥が形成されていないことを検出する（ステップＳ１９）。 On the other hand, in step S17, when the attenuation constant alpha is not greater than the attenuation constant alpha 0 (i.e., when the attenuation constant alpha is determined to substantially equal to the attenuation constant alpha 0), the detector 50 may be It is detected that no defect is formed on the measurement object 30 (step S19).
　そして、ステップＳ１８またはステップＳ１９の後、欠陥を検出する動作が終了する。 Then, after step S18 or step S19, the operation for detecting a defect ends.
　この発明の実施の形態においては、電圧源４０は、共振周波数の半分の周波数を有するバースト波ＢＷｈを励起電圧としてアンテナ５に送信してもよい。この場合、バースト波ＢＷｈは、例えば、５０ｋＨｚの周波数を有するｓｉｎ波からなる。 In the embodiment of the present invention, the voltage source 40 may transmit the burst wave BWh having a frequency half the resonance frequency to the antenna 5 as an excitation voltage. In this case, the burst wave BWh is composed of, for example, a sin wave having a frequency of 50 kHz.
　図２１は、被測定物３０に欠陥が形成されている場合のバースト波ＢＷｈおよび欠陥の変位を示す概念図である。また、図２２は、振幅と周波数との関係を示す図である。 FIG. 21 is a conceptual diagram showing the burst wave BWh and the displacement of the defect when a defect is formed in the device under test 30. FIG. 22 is a diagram showing the relationship between amplitude and frequency.
　図２１を参照して、電圧源４０は、ｓｉｎ波からなるバースト波ＢＷｈをアンテナ５に送信する。この場合、バースト波ＢＷｈの成分ＳＳ１は、振動子１を被測定物３０側へ移動させる成分であり、成分ＳＳ２は、振動子１を被測定物３０側と反対側へ移動させる成分である。 Referring to FIG. 21, the voltage source 40 transmits a burst wave BWh composed of a sin wave to the antenna 5. In this case, the component SS1 of the burst wave BWh is a component that moves the vibrator 1 to the measured object 30 side, and the component SS2 is a component that moves the vibrator 1 to the opposite side of the measured object 30 side.
　プローブ１０のチップ２を被測定物３０に接触させた状態でバースト波ＢＷｈによって振動子１の振動を励起した場合、振動子１は、共振しないが、強制振動するので、その強制振動が被測定物３０に伝搬される。そして、被測定物３０の剥離部３０３，３０４は、成分ＳＳ１がアンテナ５に送信される周期では、変位せず、成分ＳＳ２がアンテナ５に送信される周期で変位する。従って、剥離部３０３，３０４は、周期的に変位し、チップ２と被測定物３０との接触部から倍波（＝共振周波数を有する波）が発生する。そうすると、その発生した倍波が振動子１に伝搬され、振動子１は、倍波で共振する。 When the vibration of the vibrator 1 is excited by the burst wave BWh while the tip 2 of the probe 10 is in contact with the object to be measured 30, the vibrator 1 does not resonate but is forced to vibrate. Propagated to the object 30. The peeling portions 303 and 304 of the DUT 30 are not displaced in the period in which the component SS1 is transmitted to the antenna 5, but are displaced in the period in which the component SS2 is transmitted to the antenna 5. Accordingly, the peeling portions 303 and 304 are periodically displaced, and a harmonic wave (= wave having a resonance frequency) is generated from the contact portion between the chip 2 and the DUT 30. Then, the generated harmonic wave is propagated to the vibrator 1, and the vibrator 1 resonates with the harmonic wave.
　その結果、検出器５０は、アンテナ６によって受信された受信電圧に基づいて共振周波数ｆｏｓｃを検出する（図２２参照）。 As a result, the detector 50 detects the resonance frequency fosc based on the reception voltage received by the antenna 6 (see FIG. 22).
　剥離部３０３，３０４が被測定物３０に形成されていない場合に、バースト波ＢＷｈによって振動子１の振動を励起しても、振動子１は、倍波で共振しないので、検出器５０は、共振周波数ｆｏｓｃを検出しない。 If the peeling portions 303 and 304 are not formed on the DUT 30, even if the vibration of the vibrator 1 is excited by the burst wave BWh, the vibrator 1 does not resonate with the double wave. The resonance frequency fosc is not detected.
　従って、検出器５０は、共振周波数ｆｏｓｃの半分の周波数を有するバースト波ＢＷｈによって振動子１の振動を励起した場合に、共振周波数ｆｏｓｃを検出すれば、被測定物３０に剥離部３０３，３０４が形成されていることを検出し、共振周波数ｆｏｓｃを検出しなければ、被測定物３０に剥離部３０３，３０４が形成されていないことを検出する。 Therefore, when the detector 50 detects the resonance frequency fosc when the vibration of the vibrator 1 is excited by the burst wave BWh having a half frequency of the resonance frequency fosc, the peeling portions 303 and 304 are attached to the object to be measured 30. If the formation is detected and the resonance frequency fosc is not detected, it is detected that the peeling portions 303 and 304 are not formed on the measurement object 30.
　なお、バースト波ＢＷｈの周波数は、共振周波数の半分の周波数に限らず、共振周波数の１／３倍の周波数、および共振周波数の１／４倍の周波数等であってもよく、一般的には、共振周波数の１／ｎ（ｎは２以上の整数）倍の周波数であってもよい。この場合も、検出器５０は、共振周波数ｆｏｓｃを検出すれば、被測定物３０に剥離部３０３，３０４が形成されていることを検出し、共振周波数ｆｏｓｃを検出しなければ、被測定物３０に剥離部３０３，３０４が形成されていないことを検出する。 Note that the frequency of the burst wave BWh is not limited to half the resonance frequency, and may be 1/3 times the resonance frequency, 1/4 times the resonance frequency, or the like. The frequency may be 1 / n (n is an integer of 2 or more) times the resonance frequency. Also in this case, if the detector 50 detects the resonance frequency fosc, the detector 50 detects that the peeling portions 303 and 304 are formed on the object to be measured 30, and if not, detects the resonance frequency fosc. It is detected that the peeling portions 303 and 304 are not formed.
　また、バースト波ＢＷｈの周波数は、共振周波数の２倍の周波数、および共振周波数の３倍の周波数等であってもよく、一般的には、共振周波数のｎ倍の周波数であってもよい。この場合、振動子１は、上述した機構によって、１／ｎ倍波で共振する。従って、検出器５０は、振動子１の振動が共振周波数のｎ倍の周波数を有するバースト波ＢＷｈによって励起された場合も、共振周波数ｆｏｓｃを検出すれば、被測定物３０に剥離部３０３，３０４が形成されていることを検出し、共振周波数ｆｏｓｃを検出しなければ、被測定物３０に剥離部３０３，３０４が形成されていないことを検出する。 Further, the frequency of the burst wave BWh may be a frequency that is twice the resonance frequency, a frequency that is three times the resonance frequency, or the like, and may generally be a frequency that is n times the resonance frequency. In this case, the vibrator 1 resonates with a 1 / n harmonic by the mechanism described above. Accordingly, even when the vibration of the vibrator 1 is excited by the burst wave BWh having a frequency n times the resonance frequency, the detector 50 detects the resonance frequency fosc and causes the separation parts 303 and 304 to be measured on the object 30 to be measured. If the resonance frequency fosc is not detected, it is detected that the peeling portions 303 and 304 are not formed on the object to be measured 30.
　従って、この発明の実施の形態においては、倍波によって被測定物３０に欠陥が形成されているか否かを検出する場合、電圧源４０は、共振周波数のｎ倍の周波数を有するバースト波、または共振周波数の１／ｎ倍の周波数を有するバースト波を励起電圧としてアンテナ５に送信し、検出器５０は、共振周波数ｆｏｓｃを検出すれば、被測定物３０に剥離部３０３，３０４が形成されていることを検出し、共振周波数ｆｏｓｃを検出しなければ、被測定物３０に剥離部３０３，３０４が形成されていないことを検出する。 Therefore, in the embodiment of the present invention, when detecting whether or not a defect is formed in the device under test 30 by the harmonic wave, the voltage source 40 is a burst wave having a frequency n times the resonance frequency, or If a burst wave having a frequency 1 / n times the resonance frequency is transmitted as an excitation voltage to the antenna 5, and the detector 50 detects the resonance frequency fosc, peeling parts 303 and 304 are formed on the object to be measured 30. If the resonance frequency fosc is not detected, it is detected that the peeling portions 303 and 304 are not formed on the object to be measured 30.
　図２３は、倍波を用いて欠陥を検出する動作を説明するためのフローチャートである。図２３を参照して、欠陥を検出する動作が開始されると、検出器５０は、図１４に示すステップＳ１～ステップＳ９に従って共振周波数ｆｏｓｃを検出する（ステップＳ２１）。 FIG. 23 is a flowchart for explaining an operation of detecting a defect using a harmonic wave. Referring to FIG. 23, when the operation for detecting a defect is started, detector 50 detects resonance frequency fosc according to steps S1 to S9 shown in FIG. 14 (step S21).
　そして、電圧源４０は、振動子１の共振周波数ｆｏｓｃのｎ倍の周波数、または振動子１の共振周波数ｆｏｓｃの１／ｎ倍の周波数を有するバースト波ＢＷｈをアンテナ５に送信し、トリガー信号を検出器５０へ出力する（ステップＳ２２）。 The voltage source 40 transmits a burst wave BWh having a frequency n times the resonance frequency fosc of the vibrator 1 or a frequency 1 / n times the resonance frequency fosc of the vibrator 1 to the antenna 5, and a trigger signal is transmitted. Output to the detector 50 (step S22).
　その後、検出器５０は、アンテナ６から受信信号を受け（ステップＳ２３）、その受けた受信信号をフーリエ変換し、振動周波数に対応する振幅を求める（ステップＳ２４）。 Thereafter, the detector 50 receives the received signal from the antenna 6 (step S23), Fourier-transforms the received received signal, and obtains an amplitude corresponding to the vibration frequency (step S24).
　引き続いて、検出器５０は、周波数ｆと振幅Ａとの関係をプロットする（ステップＳ２５）。 Subsequently, the detector 50 plots the relationship between the frequency f and the amplitude A (step S25).
　そして、検出器５０は、共振周波数の位置にピークが有るか否かを判定する（ステップＳ２６）。 Then, the detector 50 determines whether or not there is a peak at the position of the resonance frequency (step S26).
　ステップＳ２６において、共振周波数の位置にピークが有ると判定されたとき、検出器５０は、被測定物３０に欠陥が形成されていることを検出する（ステップＳ２７）。 When it is determined in step S26 that there is a peak at the position of the resonance frequency, the detector 50 detects that a defect is formed in the device under test 30 (step S27).
　一方、ステップＳ２６において、共振周波数の位置にピークが無いと判定されたとき、検出器５０は、被測定物３０に欠陥が形成されていないことを検出する（ステップＳ２８）。 On the other hand, when it is determined in step S26 that there is no peak at the position of the resonance frequency, the detector 50 detects that no defect is formed in the device under test 30 (step S28).
　そして、ステップＳ２７またはステップＳ２８の後、欠陥を検出する動作が終了する。 And the operation | movement which detects a defect is complete | finished after step S27 or step S28.
　図２４は、この発明の実施の形態における他の振動子の断面図である。図２４の（ａ）を参照して、この発明の実施の形態によるプローブ１０は、振動子１に代えて振動子２１を備え、保持部材３に代えて保持部材３Ａを備えていてもよい。 FIG. 24 is a cross-sectional view of another vibrator according to the embodiment of the present invention. Referring to FIG. 24A, the probe 10 according to the embodiment of the present invention may include a vibrator 21 instead of the vibrator 1 and a holding member 3 </ b> A instead of the holding member 3.
　振動子２１は、円形の断面形状を有するランガサイトまたは水晶からなる。そして、振動子２１は、例えば、３ｍｍの直径を有し、振動子１と同じ長さを有する。また、振動子２１は、ランガサイトからなる場合、結晶のＸ軸方向（＝［１００］の方向）が長手方向に一致する。 The vibrator 21 is made of langasite or crystal having a circular cross-sectional shape. The vibrator 21 has a diameter of 3 mm, for example, and has the same length as the vibrator 1. When the vibrator 21 is made of langasite, the X-axis direction (= [100] direction) of the crystal coincides with the longitudinal direction.
　保持部材３Ａは、保持具３３と、固定具３４とからなる。保持具３３は、保持具３３１～３３３からなり、保持具３３１～３３３の各々は、例えば、ニトリルゴムからなる。そして、保持具３３１～３３３は、振動子２１の長さ方向の略中央部において、相互に１２０度の角度を成す方向から振動子２１を保持する。この場合、保持具３３１～３３３の各々は、振動子２１と点接触して振動子２１を保持する。固定具３４は、固定具３２と同じ材料からなり、ドーナツ形状を有する。そして、固定具３４は、保持具３３の周囲に配置され、保持具３３に接着される。 The holding member 3 </ b> A includes a holding tool 33 and a fixing tool 34. The holder 33 includes holders 331 to 333, and each of the holders 331 to 333 includes, for example, nitrile rubber. The holders 331 to 333 hold the vibrator 21 from a direction that forms an angle of 120 degrees with each other at a substantially central portion in the length direction of the vibrator 21. In this case, each of the holders 331 to 333 holds the vibrator 21 in point contact with the vibrator 21. The fixture 34 is made of the same material as the fixture 32 and has a donut shape. The fixing tool 34 is arranged around the holding tool 33 and bonded to the holding tool 33.
　なお、プローブ１０が振動子２１を備える場合、樹脂部材９は、固定具３４の外周に接する。 When the probe 10 includes the vibrator 21, the resin member 9 contacts the outer periphery of the fixture 34.
　図２４の（ｂ）を参照して、この発明の実施の形態によるプローブ１０は、振動子１に代えて振動子２２を備え、保持部材３に代えて保持部材３Ｂを備えていてもよい。 Referring to FIG. 24 (b), the probe 10 according to the embodiment of the present invention may include a vibrator 22 instead of the vibrator 1 and a holding member 3B instead of the holding member 3.
　振動子２２は、正三角形の断面形状を有するランガサイトまたは水晶からなる。そして、正三角形の一辺の長さは、例えば、３ｍｍであり、振動子２２は、振動子１と同じ長さを有する。また、振動子２２は、ランガサイトからなる場合、結晶のＸ軸方向（＝［１００］の方向）が長手方向に一致する。 The vibrator 22 is made of langasite or quartz having a regular triangular cross-sectional shape. The length of one side of the equilateral triangle is, for example, 3 mm, and the vibrator 22 has the same length as the vibrator 1. When the vibrator 22 is made of langasite, the X-axis direction (= [100] direction) of the crystal coincides with the longitudinal direction.
　保持部材３Ｂは、Ｏリング３５と、固定具３６とからなる。Ｏリング３５は、例えば、ニトリルゴムからなり、振動子２２の長さ方向の略中央部において、振動子２２の三角形の３個の頂点に接し、振動子２２を保持する。固定具３６は、固定具３２と同じ材料からなり、ドーナツ形状を有する。そして、固定具３６は、Ｏリング３５の周囲に配置され、Ｏリング３５に接着される。 The holding member 3B includes an O-ring 35 and a fixture 36. The O-ring 35 is made of, for example, nitrile rubber, and is in contact with the three apexes of the triangle of the vibrator 22 at approximately the center in the length direction of the vibrator 22 to hold the vibrator 22. The fixture 36 is made of the same material as the fixture 32 and has a donut shape. The fixture 36 is disposed around the O-ring 35 and bonded to the O-ring 35.
　なお、プローブ１０が振動子２２を備える場合、樹脂部材９は、固定具３６の外周に接する。 When the probe 10 includes the vibrator 22, the resin member 9 contacts the outer periphery of the fixture 36.
　このように、振動子２１は、最小の接触面積で保持具３３に接して保持具３３によって保持され、振動子２２は、最小の接触面積でＯリング３５に接してＯリング３５によって保持される。 In this way, the vibrator 21 is held by the holder 33 in contact with the holder 33 with the minimum contact area, and the vibrator 22 is held by the O-ring 35 in contact with the O-ring 35 with the minimum contact area. .
　プローブ１０が振動子２１または振動子２２を備える場合、振動子２１または振動子２２は、３点によって保持されるので、振動子１よりも自由に振動する。その結果、振動子２１または振動子２２が共振するときのＱ値が向上し、被測定物３０のヤング率を更に正確に測定できる。 When the probe 10 includes the vibrator 21 or the vibrator 22, the vibrator 21 or the vibrator 22 is held by three points, and thus vibrates more freely than the vibrator 1. As a result, the Q value when the vibrator 21 or the vibrator 22 resonates is improved, and the Young's modulus of the device under test 30 can be measured more accurately.
　プローブ１０が振動子２１または振動子２２を備える場合も、プローブ１０は、図５から図８に示す工程（ａ）～工程（ｍ）に従って製造される。そして、工程（ｃ）において、保持具３３が振動子２１に装着されるとともに固定具３４が保持具３３に装着され、またはＯリング３５が振動子２２に装着されるとともに固定具３６がＯリング３５に装着される。また、工程（ｄ）において、支持部材７が固定具３４または固定具３６に装着される。更に、工程（ｅ）において、アンテナ４～６が固定具３４または固定具３６の周囲に１回だけ巻回される。 Even when the probe 10 includes the vibrator 21 or the vibrator 22, the probe 10 is manufactured according to steps (a) to (m) shown in FIGS. In step (c), the holder 33 is attached to the vibrator 21 and the fixture 34 is attached to the holder 33, or the O-ring 35 is attached to the vibrator 22 and the fixture 36 is an O-ring. 35. In step (d), the support member 7 is attached to the fixture 34 or the fixture 36. Further, in the step (e), the antennas 4 to 6 are wound only once around the fixture 34 or the fixture 36.
　なお、プローブ１０が振動子２１または振動子２２を備える場合も、共振周波数を有するピークの半値幅ＦＷＨＭまたは減衰定数αを検出することによって被測定物３０に欠陥が形成されているか否かを検出してもよい。 Even when the probe 10 includes the vibrator 21 or the vibrator 22, it is detected whether or not a defect is formed in the object to be measured 30 by detecting the half width FWHM of the peak having the resonance frequency or the attenuation constant α. May be.
　また、プローブ１０が振動子２１または振動子２２を備える場合も、共振周波数のｎ倍の周波数または共振周波数の１／ｎ倍の周波数を有するバースト波ＢＷｈによって振動子２１（または振動子２２）の振動を励起し、共振周波数ｆｏｓｃを検出するか否かによって被測定物３０に欠陥が形成されているか否かを検出してもよい。 In addition, when the probe 10 includes the vibrator 21 or the vibrator 22, the vibrator 21 (or the vibrator 22) is caused by the burst wave BWh having a frequency n times the resonance frequency or 1 / n times the resonance frequency. Whether or not a defect is formed in the object to be measured 30 may be detected based on whether or not the vibration frequency is excited and the resonance frequency fosc is detected.
　振動子２１，２２を用いて上述した方法によって欠陥が被測定物３０に形成されているか否かを判定した場合、振動子２１，２２は、振動子１よりも振動し易いので、欠陥が被測定物３０に形成されているか否かを正確に判定できる。 When it is determined whether or not a defect is formed on the object to be measured 30 by the above-described method using the vibrators 21 and 22, the vibrators 21 and 22 are more likely to vibrate than the vibrator 1. It is possible to accurately determine whether or not the measurement object 30 is formed.
　図２５は、アンテナ４～６の他の装着方法を示す断面図である。図２５を参照して、アンテナ４～６は、Ｏリング３１と固定具３２との間に装着されてもよい。その結果、振動子１とアンテナ４～６との距離が短くなり、振動子１は、アンテナ４～６が固定具３２の外周に装着される場合よりも、より強い電圧Ｖｖをアンテナ５から受け、より振動し易くなる。また、アンテナ６は、振動子１が振動したことに伴って発生した分極電場を、より強い電圧として受信する。従って、被測定物３０のヤング率を更に正確に測定できる。また、欠陥が被測定物３０に形成されているか否かを更に正確に判定できる。 FIG. 25 is a cross-sectional view showing another method for mounting the antennas 4 to 6. Referring to FIG. 25, antennas 4 to 6 may be mounted between O-ring 31 and fixture 32. As a result, the distance between the vibrator 1 and the antennas 4 to 6 is shortened, and the vibrator 1 receives a stronger voltage Vv from the antenna 5 than when the antennas 4 to 6 are mounted on the outer periphery of the fixture 32. It becomes easier to vibrate. Further, the antenna 6 receives the polarization electric field generated as the vibrator 1 vibrates as a stronger voltage. Accordingly, the Young's modulus of the device under test 30 can be measured more accurately. Further, it can be determined more accurately whether or not a defect is formed in the DUT 30.
　なお、プローブ１０が振動子２１を備える場合、アンテナ４～６は、保持具３３と固定具３４との間に装着されてもよく、プローブ１０が振動子２２を備える場合、アンテナ４～６は、Ｏリング３５と固定具３６との間に装着されてもよい。その結果、振動子２１または振動子２２のより自由な振動を確保できるとともに、振動子２１または振動子２２が振動したことに伴って発生した分極電場を、より強い電圧として受信できるので、被測定物３０のヤング率を更に正確に測定できる。また、欠陥が被測定物３０に形成されているか否かを更に正確に判定できる。 When the probe 10 includes the vibrator 21, the antennas 4 to 6 may be mounted between the holder 33 and the fixture 34. When the probe 10 includes the vibrator 22, the antennas 4 to 6 are The O-ring 35 and the fixture 36 may be mounted. As a result, more free vibration of the vibrator 21 or the vibrator 22 can be secured, and the polarization electric field generated when the vibrator 21 or the vibrator 22 vibrates can be received as a stronger voltage. The Young's modulus of the object 30 can be measured more accurately. Further, it can be determined more accurately whether or not a defect is formed in the DUT 30.
　図２６は、振動子１の保持方法を示す断面図である。図２６の（ａ）を参照して、振動子１の振動の基本モードを用いて被測定物３０のヤング率を測定する場合、Ｏリング３１は、長さＬを有する振動子１の長さ方向において、振動子１の一方端からＬ／２の位置（振動子１の振動の基本モードにおける節部に相当する位置）で振動子１に装着される。即ち、Ｏリング３１は、振動子１の長さ方向において振動子１の略中央部に装着される。 FIG. 26 is a cross-sectional view showing a method for holding the vibrator 1. 26A, when measuring the Young's modulus of the DUT 30 using the fundamental mode of vibration of the vibrator 1, the O-ring 31 is the length of the vibrator 1 having the length L. In the direction, the vibrator 1 is attached to the vibrator 1 at a position L / 2 from one end of the vibrator 1 (a position corresponding to a node portion in the fundamental mode of vibration of the vibrator 1). That is, the O-ring 31 is attached to a substantially central portion of the vibrator 1 in the length direction of the vibrator 1.
　図２６の（ｂ）を参照して、振動子１の振動の二次モードを用いて被測定物３０のヤング率を測定する場合、２つのＯリング３１Ａ，３１Ｂが振動子１に装着される。Ｏリング３１Ａ，３１Ｂの各々は、二トリルゴムからなる。そして、Ｏリング３１Ａは、長さＬを有する振動子１の長さ方向において、振動子１の一方端からＬ／４の位置（振動子１の振動の二次モードにおける節部に相当する位置）で振動子１に装着され、Ｏリング３１Ｂは、振動子１の長さ方向において、振動子１の他方端からＬ／４の位置（振動子１の振動の二次モードにおける節部に相当する位置）で振動子１に装着される。 Referring to FIG. 26B, when measuring the Young's modulus of the DUT 30 using the secondary mode of vibration of the vibrator 1, two O-rings 31 </ b> A and 31 </ b> B are attached to the vibrator 1. . Each of the O- rings 31A and 31B is made of nitrile rubber. The O-ring 31A is located at a position L / 4 from the one end of the vibrator 1 in the length direction of the vibrator 1 having the length L (a position corresponding to a node in the secondary mode of vibration of the vibrator 1). ) And the O-ring 31B corresponds to a position of L / 4 from the other end of the vibrator 1 in the length direction of the vibrator 1 (corresponding to a node portion in the secondary mode of vibration of the vibrator 1). Is mounted on the vibrator 1 at a position where
　なお、振動子２１または振動子２２が用いられる場合も、振動子２１または振動子２２は、振動子２１または振動子２２の長さ方向において、略中央部、または端からＬ／４の位置で保持される。 Even when the vibrator 21 or the vibrator 22 is used, the vibrator 21 or the vibrator 22 is located at a position substantially L / 4 from the center or the end in the length direction of the vibrator 21 or the vibrator 22. Retained.
　このように、この発明の実施の形態においては、振動子１，２１，２２の振動の基本モードおよび二次モードのいずれかを用いて被測定物３０のヤング率が測定される。また、この発明の実施の形態においては、振動子１，２１，２２の振動の基本モードおよび二次モードのいずれかを用いて、上述した方法によって被測定物３０に欠陥が形成されているか否かが検出される。 As described above, in the embodiment of the present invention, the Young's modulus of the DUT 30 is measured using either the fundamental mode or the secondary mode of the vibration of the vibrators 1, 21, 22. In the embodiment of the present invention, whether or not a defect is formed in the object to be measured 30 by the above-described method using either the fundamental mode or the secondary mode of the vibration of the vibrators 1, 2, and 22. Is detected.
　図２７は、振動子１の別の保持方法を示す断面図である。図２７の（ａ）を参照して、振動子１の一方端からＬ／２の位置において、振動子１の長さ方向に直交する平面形状（＝正方形）の四隅に切欠部１０１を形成する。切欠部１０１は、円弧状の断面形状を有する。 FIG. 27 is a cross-sectional view showing another holding method of the vibrator 1. Referring to FIG. 27A, notches 101 are formed at four corners of a planar shape (= square) orthogonal to the length direction of the vibrator 1 at a position L / 2 from one end of the vibrator 1. . The notch 101 has an arcuate cross-sectional shape.
　そして、振動子１をＯリング３１によって保持する場合、Ｏリング３１が切欠部１０１に嵌合するようにＯリング３１を振動子１に装着する（図２７の（ｂ）参照）。 When the vibrator 1 is held by the O-ring 31, the O-ring 31 is attached to the vibrator 1 so that the O-ring 31 is fitted into the notch 101 (see FIG. 27B).
　振動子１をＯリング３１Ａ，３１Ｂによって支持する場合も、振動子１の一方端からＬ／４の位置、および振動子１の他方端からＬ／４の位置において振動子１の四隅に切欠部１０１を設け、Ｏリング３１Ａ，３１Ｂが切欠部１０１に嵌合するようにＯリング３１Ａ，３１Ｂを振動子１に装着する。振動子２２をＯリングによって支持する場合も同様である。 When the vibrator 1 is supported by the O- rings 31A and 31B, notches are formed at the four corners of the vibrator 1 at a position L / 4 from one end of the vibrator 1 and a position L / 4 from the other end of the vibrator 1. 101 is provided, and the O- rings 31A and 31B are attached to the vibrator 1 so that the O- rings 31A and 31B are fitted in the notch 101. The same applies when the vibrator 22 is supported by an O-ring.
　これによって、プローブ１０を用いて被測定物３０のヤング率を測定するとき、またはプローブ１０を用いて欠陥を検出するときの振動子１，２２の長さ方向への移動を正確に抑止できる。 Thereby, when the Young's modulus of the object to be measured 30 is measured using the probe 10, or when the defect is detected using the probe 10, the movement of the vibrators 1 and 22 in the length direction can be accurately suppressed.
　図２８は、測定深さとチップの半径との関係を示す図である。図２８において、縦軸は、測定深さを表し、横軸は、チップの半径を表す。測定深さは、チップ２を被測定物３０に接触させてバースト波ＢＷ１，ＢＷ２（またはバースト波ＢＷｈ）によって振動子１の振動を励起した場合に振動が伝搬される被測定物３０の深さである。また、チップの半径は、球形のタングステンカーバイトを研磨して円弧状のチップを作製するときの元の球の半径である。 FIG. 28 is a diagram showing the relationship between the measurement depth and the radius of the chip. In FIG. 28, the vertical axis represents the measurement depth, and the horizontal axis represents the radius of the chip. The measurement depth is the depth of the measured object 30 to which the vibration is propagated when the chip 2 is brought into contact with the measured object 30 and the vibration of the vibrator 1 is excited by the burst waves BW1 and BW2 (or the burst wave BWh). It is. The radius of the tip is the radius of the original sphere when a spherical tungsten carbide is polished to produce an arc-shaped tip.
　また、曲線ｋ５は、被測定物３０（＝アクリル樹脂）に印加するバイアス力が０．５Ｎであるときの測定深さとチップの半径との関係を示し、曲線ｋ６は、被測定物３０（＝銅）に印加するバイアス力が０．５Ｎであるときの測定深さとチップの半径との関係を示す。なお、曲線ｋ５，ｋ６によって示される測定深さとチップの半径との関係は、計算されたものである。 A curve k5 shows the relationship between the measurement depth and the tip radius when the bias force applied to the device under test 30 (= acrylic resin) is 0.5 N, and the curve k6 shows the device under test 30 (= The relationship between the measurement depth and the tip radius when the bias force applied to (copper) is 0.5 N is shown. Note that the relationship between the measurement depth indicated by the curves k5 and k6 and the radius of the tip is calculated.
　図２８を参照して、被測定物３０に印加されるバイアス力が一定である場合、測定深さは、チップの半径が大きくなるとともに深くなる（曲線ｋ５，ｋ６参照）。 Referring to FIG. 28, when the bias force applied to device under test 30 is constant, the measurement depth becomes deeper as the radius of the tip increases (see curves k5 and k6).
　従って、プローブ１０のチップ２を接触させる被測定物３０の表面と反対側に被測定物３０と異なる材質の物体が被測定物３０に接触している場合、測定深さが被測定物３０の厚み以下になるようにチップの半径を決定し、その決定した半径を有するチップ２を作製して振動子１の端面に接着する。 Therefore, when an object of a material different from the object to be measured 30 is in contact with the object to be measured 30 on the side opposite to the surface of the object to be measured 30 with which the tip 2 of the probe 10 is brought into contact, the measurement depth of the object to be measured 30 is The radius of the chip is determined so as to be equal to or less than the thickness, and the chip 2 having the determined radius is manufactured and bonded to the end face of the vibrator 1.
　これによって、被測定物３０に接触した物体の影響を排除して被測定物３０自体のヤング率を計測できる。また、被測定物３０に接触した物体の影響を排除して被測定物３０自体の欠陥を検出できる。更に、被測定物３０に接触した物体の影響を排除して被測定物３０自体の振動の減衰を検出できる。 Thereby, it is possible to measure the Young's modulus of the object to be measured 30 by eliminating the influence of the object in contact with the object to be measured 30. Further, it is possible to detect the defect of the object to be measured 30 by eliminating the influence of the object in contact with the object to be measured 30. Further, it is possible to detect the attenuation of vibration of the object to be measured 30 itself by eliminating the influence of the object in contact with the object to be measured 30.
　図２８に示す測定深さとチップの半径との関係は、例示であっても、アクリル樹脂および銅以外の材料についても、同様に、測定深さは、チップの半径が大きくなるに従って深くなる。従って、各種の被測定物３０について、測定深さとチップの半径との関係を予め計算しておけば、各被測定物３０に応じて適切なチップの半径を決定できる。 The relationship between the measurement depth and the chip radius shown in FIG. 28 is illustrative only, and the measurement depth of the material other than acrylic resin and copper increases as the chip radius increases. Accordingly, if the relationship between the measurement depth and the tip radius is calculated in advance for various types of objects to be measured 30, an appropriate tip radius can be determined according to each object to be measured 30.
　そして、この発明の実施の形態においては、チップの半径は、０．５ｍｍ～１０ｍｍの範囲に設定され、０．５ｍｍ～１０ｍｍの範囲から被測定物３０に適切なチップの半径を決定してチップ２を作製する。 In the embodiment of the present invention, the radius of the tip is set in the range of 0.5 mm to 10 mm, and the tip radius appropriate for the object to be measured 30 is determined from the range of 0.5 mm to 10 mm. 2 is produced.
　図２９は、複数のチップを振動子に装着した例を示す断面図である。図２９を参照して、チップ２Ａ，２Ｂの各々は、上述したチップ２と同じ材料からなる。そして、チップ２Ａの半径は、チップ２Ｂの半径よりも大きい。チップ２Ａは、振動子１の一方端の端面に接着され、チップ２Ｂは、振動子１の他方端の端面に接着される。 FIG. 29 is a cross-sectional view showing an example in which a plurality of chips are mounted on a vibrator. Referring to FIG. 29, each of chips 2A and 2B is made of the same material as chip 2 described above. The radius of the chip 2A is larger than the radius of the chip 2B. The chip 2A is bonded to the end face of one end of the vibrator 1, and the chip 2B is bonded to the end face of the other end of the vibrator 1.
　チップ２Ａ，２Ｂが接着された振動子１を用いる場合、チップ２Ａを被測定物３０に接触させて被測定物３０のヤング率等を測定した後、チップ２Ｂが被測定物３０に接触可能なように振動子１を保持部材３に保持し直し、チップ２Ｂを被測定物３０に接触させて被測定物３０のヤング率等を測定する。 When using the vibrator 1 to which the chips 2A and 2B are bonded, after the chip 2A is brought into contact with the object to be measured 30 and the Young's modulus of the object to be measured 30 is measured, the chip 2B can contact the object to be measured 30. In this manner, the vibrator 1 is held again by the holding member 3, and the Young's modulus of the device under test 30 is measured by bringing the chip 2 </ b> B into contact with the device under test 30.
　これによって、同じ振動子１を用いて厚みが異なる２つの被測定物３０のヤング率等を測定できる。また、同じ振動子１を用いて１つの被測定物３０の深さ方向におけるヤング率の分布を測定できる。 Thereby, the Young's modulus and the like of two objects to be measured 30 having different thicknesses can be measured using the same vibrator 1. Further, the distribution of Young's modulus in the depth direction of one object to be measured 30 can be measured using the same vibrator 1.
　図３０は、この発明の実施の形態による別のプローブの構成を示す断面図である。この発明の実施の形態によるプローブは、図３０に示すプローブ１０Ａであってもよい。 FIG. 30 is a cross-sectional view showing the configuration of another probe according to the embodiment of the present invention. The probe according to the embodiment of the present invention may be a probe 10A shown in FIG.
　図３０を参照して、プローブ１０Ａは、図１に示すプローブ１０に針１７を追加したものであり、その他は、プローブ１０と同じである。 Referring to FIG. 30, probe 10 </ b> A is obtained by adding needle 17 to probe 10 shown in FIG. 1, and is otherwise the same as probe 10.
　針１７は、ケース１１の底面１１Ａに固定される。針１７は、ケース１１の底面１１Ａ内において３個以上設けられる。少なくとも３個の針１７が設けられていれば、プローブ１０Ａを被測定物３０上に安定して配置できるからである。 The needle 17 is fixed to the bottom surface 11A of the case 11. Three or more needles 17 are provided in the bottom surface 11 </ b> A of the case 11. This is because if at least three needles 17 are provided, the probe 10 </ b> A can be stably disposed on the object to be measured 30.
　針１７の直径は、プローブ１０Ａを被測定物３０上に配置した場合に、針１７が被測定物３０中に進入する直径に設定される。 The diameter of the needle 17 is set to a diameter at which the needle 17 enters the device under test 30 when the probe 10A is placed on the device under test 30.
　針１７の長さは、被測定物３０の表面が平面である場合、プローブ１０Ａのケース１１の底面１１Ａが被測定物３０に接触可能な長さに設定される。また、針１７の長さは、被測定物３０が球形状である場合、針１７の先端が被測定物３０中に進入する長さに設定される。 The length of the needle 17 is set to such a length that the bottom surface 11A of the case 11 of the probe 10A can contact the device under test 30 when the surface of the device under test 30 is a flat surface. Further, the length of the needle 17 is set to a length at which the tip of the needle 17 enters the device under test 30 when the device under test 30 has a spherical shape.
　このように、プローブ１０Ａを用いれば、チップ２が安定して被測定物３０に接触し、被測定物３０のヤング率等を正確に計測できる。 As described above, when the probe 10A is used, the tip 2 can stably come into contact with the object to be measured 30, and the Young's modulus of the object to be measured 30 can be accurately measured.
　なお、プローブ１０Ａについてのその他の説明は、プローブ１０についての説明と同じである。 Note that the other description of the probe 10A is the same as the description of the probe 10.
　図３１は、図１に示すプローブ１０の応用例を示す概念図である。図３１を参照して、パーソナルコンピュータのマウス６０は、位置計測器７０を内蔵する。そして、プローブ１０は、マウス６０内に装着される。 FIG. 31 is a conceptual diagram showing an application example of the probe 10 shown in FIG. Referring to FIG. 31, the mouse 60 of the personal computer incorporates a position measuring device 70. The probe 10 is mounted in the mouse 60.
　位置計測器７０は、レーザマウスの原理によってマウス６０の位置を計測し、その計測した位置をパーソナルコンピュータのＣＰＵ（Ｃｅｎｔｒａｌ　Ｐｒｏｃｅｓｓｉｎｇ　Ｕｎｉｔ）へ出力する。 The position measuring device 70 measures the position of the mouse 60 based on the principle of the laser mouse, and outputs the measured position to a CPU (Central Processing Unit) of the personal computer.
　プローブ１０のアンテナ５は、電圧源４０に接続されており、アンテナ６は、パーソナルコンピュータのＣＰＵに接続されている。 The antenna 5 of the probe 10 is connected to a voltage source 40, and the antenna 6 is connected to a CPU of a personal computer.
　マウス６０は、被測定物３０上に配置され、被測定物３０の各位置へ移動される。そして、位置計測器７０は、マウス６０の位置を計測し、その計測した位置をパーソナルコンピュータのＣＰＵへ出力する。また、プローブ１０の振動子１は、電圧源４０からアンテナ５を介して印加された電圧Ｖｖによって振動し、アンテナ６は、振動子１が振動することに伴って発生した分極電場を電圧として受信し、その受信した電圧（受信信号）をパーソナルコンピュータのＣＰＵへ出力する。 The mouse 60 is arranged on the device under test 30 and moved to each position of the device under test 30. Then, the position measuring instrument 70 measures the position of the mouse 60 and outputs the measured position to the CPU of the personal computer. Further, the vibrator 1 of the probe 10 vibrates by the voltage Vv applied from the voltage source 40 via the antenna 5, and the antenna 6 receives as a voltage the polarization electric field generated when the vibrator 1 vibrates. The received voltage (reception signal) is output to the CPU of the personal computer.
　そうすると、パーソナルコンピュータのＣＰＵは、アンテナ６から受けた受信信号に基づいて、上述した方法によって被測定物３０のヤング率を算出し、その算出したヤング率を位置計測器７０から受けたマウス６０の位置に対応付けてメモリに記憶する。パーソナルコンピュータのＣＰＵは、被測定物３０の各位置におけるヤング率をマウス６０の各位置に対応付けてメモリに記憶する。 Then, the CPU of the personal computer calculates the Young's modulus of the device under test 30 by the method described above based on the received signal received from the antenna 6, and the mouse 60 receiving the calculated Young's modulus from the position measuring device 70. It is stored in the memory in association with the position. The CPU of the personal computer stores the Young's modulus at each position of the DUT 30 in the memory in association with each position of the mouse 60.
　従って、被測定物３０のヤング率の分布を測定できる。 Therefore, the Young's modulus distribution of the device under test 30 can be measured.
　なお、プローブ１０がマウス６０内に配置される場合も、上述した各種の方法によって被測定物３０の欠陥を測定してもよく、上述した方法によって被測定物３０の非破壊検査を行なってもよい。 Even when the probe 10 is placed in the mouse 60, the defect of the object to be measured 30 may be measured by the various methods described above, or the non-destructive inspection of the object to be measured 30 may be performed by the method described above. Good.
　上述したように、振動子１，２１，２２は、振動子１，２１，２２の振動の節部に相当する位置において最小の接触面積でＯリング３１，３５または保持具３３によって保持される。また、振動子１，２１，２２は、同じ極性を有する磁石８，１３が発生する斥力ＲＦによって被測定物３０にバイアス力を印加する。その結果、振動子１，２１，２２は、自由に振動するとともに、被測定物３０が鉛直方向に対して任意の角度を成すように配置されていても、被測定物３０に印加されるバイアス力は、一定になる。 As described above, the vibrators 1, 2, 22 are held by the O- rings 31, 35 or the holder 33 with a minimum contact area at positions corresponding to the vibration nodes of the vibrators 1, 2, 22. Further, the vibrators 1, 2, and 22 apply a bias force to the object to be measured 30 by the repulsive force RF generated by the magnets 8 and 13 having the same polarity. As a result, the vibrators 1, 2, 22 freely vibrate, and even if the device under test 30 is arranged at an arbitrary angle with respect to the vertical direction, the bias applied to the device under test 30. The force becomes constant.
　従って、振動子１，２１，２２の安定した振動を確保できるとともに、バイアス力を任意の方向から被測定物３０に印加して弾性定数を測定できる。 Therefore, stable vibrations of the vibrators 1, 2, 22 can be secured, and the elastic constant can be measured by applying a bias force to the device under test 30 from an arbitrary direction.
　なお、この発明の実施の形態においては、Ｏリング３１，３５の各々は、「保持具」を構成する。また、この発明の実施の形態においては、磁石８は、「第１の磁石」を構成し、磁石１３は、「第２の磁石」を構成する。更に、アンテナ４は、「第１のアンテナ」を構成し、アンテナ５は、「第２のアンテナ」を構成し、アンテナ６は、「第３のアンテナ」を構成する。更に、アンテナ６から受けた受信電圧に基づいて振動子１の共振周波数が検出されたか否かを判定する検出器５０は、「判定器」を構成する。 In the embodiment of the present invention, each of the O- rings 31 and 35 constitutes a “holding tool”. In the embodiment of the present invention, magnet 8 constitutes a “first magnet”, and magnet 13 constitutes a “second magnet”. Further, the antenna 4 constitutes a “first antenna”, the antenna 5 constitutes a “second antenna”, and the antenna 6 constitutes a “third antenna”. Furthermore, the detector 50 that determines whether or not the resonance frequency of the vibrator 1 is detected based on the received voltage received from the antenna 6 constitutes a “determination device”.
　今回開示された実施の形態はすべての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は、上記した実施の形態の説明ではなくて特許請求の範囲によって示され、特許請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。 The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is shown not by the above description of the embodiments but by the scope of claims for patent, and is intended to include meanings equivalent to the scope of claims for patent and all modifications within the scope.
　この発明は、プローブおよびそれを備えた測定装置に適用される。 This invention is applied to a probe and a measuring apparatus equipped with the probe.

Claims (11)

  1. 　棒状形状を有し、圧電体からなる振動子と、
    　被測定物側における前記振動子の一方端に接着され、前記被測定物よりも硬度が大きいチップと、
    　前記振動子の周方向において最小の接触面積で前記振動子と接触し、前記振動子の振動の節部に相当する前記振動子の一部分を保持する保持具と、
    　前記振動子の他方端側に配置され、前記保持具を支持する支持部材に接着された第１の磁石と、
    　前記振動子の長さ方向において前記第１の磁石と所望の距離を隔てて配置され、前記第１の磁石と同じ極性を有する第２の磁石と、
    　接地電位に接続された第１のアンテナと、
    　前記振動子の振動を励起するための励起電圧を前記第１のアンテナと協働して前記振動子に印加する第２のアンテナと、
    　前記励起電圧が振動子に印加されたことに起因して前記振動子に発生した電場を前記第１のアンテナと協働して電圧として受信する第３のアンテナとを備え、
    　前記第１から第３のアンテナは、前記振動子の一部分の近傍に配置されており、
    　前記チップは、前記振動子から前記被測定物へ向かう方向に突出した円弧状の形状を有する、プローブ。     A vibrator having a rod-like shape and made of a piezoelectric body;
    A chip bonded to one end of the vibrator on the measured object side and having a hardness higher than that of the measured object;
    A holder that contacts the vibrator with a minimum contact area in the circumferential direction of the vibrator and holds a part of the vibrator corresponding to a vibration node of the vibrator;
    A first magnet disposed on the other end side of the vibrator and bonded to a support member that supports the holder;
    A second magnet disposed at a desired distance from the first magnet in the longitudinal direction of the vibrator, and having the same polarity as the first magnet;
    A first antenna connected to ground potential;
    A second antenna for applying an excitation voltage for exciting vibration of the vibrator to the vibrator in cooperation with the first antenna;
    A third antenna that receives the electric field generated in the vibrator due to the excitation voltage being applied to the vibrator as a voltage in cooperation with the first antenna;
    The first to third antennas are arranged in the vicinity of a part of the vibrator,
    The probe has a circular arc shape protruding in a direction from the vibrator toward the object to be measured.
  2. 　前記振動子、前記チップ、前記第１の磁石および前記保持具を収容するケースと、
    　前記振動子、前記第１の磁石および前記保持具と前記ケースとの間に充填され、前記振動子、前記チップ、前記第１の磁石および前記保持具とともに前記振動子の長さ方向に移動可能である樹脂部材とを更に備え、
    　前記振動子の一方端および前記チップは、前記チップが前記被測定物に接触していないとき、前記ケースの開口部から外部へ突出しており、
    　前記振動子、前記チップ、前記第１の磁石、前記保持具および前記樹脂部材は、前記ケースの端部が前記被測定物に接触することに伴って、前記第１の磁石から前記第２の磁石の方向へ移動する、請求項１に記載のプローブ。     A case for housing the vibrator, the chip, the first magnet, and the holder;
    Filled between the vibrator, the first magnet and the holder and the case, and can be moved in the length direction of the vibrator together with the vibrator, the chip, the first magnet and the holder. And further comprising a resin member,
    The one end of the vibrator and the chip protrude outward from the opening of the case when the chip is not in contact with the object to be measured.
    The vibrator, the chip, the first magnet, the holder, and the resin member are moved from the first magnet to the second as the end of the case comes into contact with the object to be measured. The probe according to claim 1, which moves in the direction of the magnet.
  3. 　前記保持具は、リング状の二トリルゴムからなる、請求項１に記載のプローブ。 The probe according to claim 1, wherein the holder is made of a ring-shaped nitrile rubber.
  4. 　前記チップは、タングステンカーバイトからなる、請求項３に記載のプローブ。 The probe according to claim 3, wherein the tip is made of tungsten carbide.
  5. 　前記振動子、前記チップ、前記第１の磁石および前記保持具を収容するケースと、
    　前記振動子、前記第１の磁石および前記保持具と前記ケースとの間に充填され、前記振動子、前記チップ、前記第１の磁石および前記保持具とともに前記振動子の長さ方向に移動可能である樹脂部材とを更に備え、
    　前記振動子の一方端および前記チップは、前記チップが前記被測定物に接触していないとき、前記ケースの開口部から外部へ突出しており、
    　前記振動子、前記チップ、前記第１の磁石、前記保持具および前記樹脂部材は、前記ケースの端部が前記被測定物に接触することに伴って、前記第１の磁石から前記第２の磁石の方向へ移動する、請求項４に記載のプローブ。     A case for housing the vibrator, the chip, the first magnet, and the holder;
    Filled between the vibrator, the first magnet and the holder and the case, and can be moved in the length direction of the vibrator together with the vibrator, the chip, the first magnet and the holder. And further comprising a resin member,
    The one end of the vibrator and the chip protrude outward from the opening of the case when the chip is not in contact with the object to be measured.
    The vibrator, the chip, the first magnet, the holder, and the resin member are moved from the first magnet to the second as the end of the case comes into contact with the object to be measured. The probe according to claim 4, which moves in the direction of the magnet.
  6. 　前記振動子、前記チップ、前記第１の磁石および前記保持具を収容するケースと、
    　前記振動子、前記第１の磁石および前記保持具と前記ケースとの間に充填され、前記振動子、前記チップ、前記第１の磁石および前記保持具とともに前記振動子の長さ方向に移動可能である樹脂部材とを更に備え、
    　前記振動子の一方端および前記チップは、前記チップが前記被測定物に接触していないとき、前記ケースの開口部から外部へ突出しており、
    　前記振動子、前記チップ、前記第１の磁石、前記保持具および前記樹脂部材は、前記ケースの端部が前記被測定物に接触することに伴って、前記第１の磁石から前記第２の磁石の方向へ移動する、請求項３に記載のプローブ。     A case for housing the vibrator, the chip, the first magnet, and the holder;
    Filled between the vibrator, the first magnet and the holder and the case, and can be moved in the length direction of the vibrator together with the vibrator, the chip, the first magnet and the holder. And further comprising a resin member,
    The one end of the vibrator and the chip protrude outward from the opening of the case when the chip is not in contact with the object to be measured.
    The vibrator, the chip, the first magnet, the holder, and the resin member are moved from the first magnet to the second as the end of the case comes into contact with the object to be measured. The probe according to claim 3, which moves in the direction of the magnet.
  7. 　前記チップは、タングステンカーバイトからなる、請求項１に記載のプローブ。 The probe according to claim 1, wherein the tip is made of tungsten carbide.
  8. 　前記振動子、前記チップ、前記第１の磁石および前記保持具を収容するケースと、
    　前記振動子、前記第１の磁石および前記保持具と前記ケースとの間に充填され、前記振動子、前記チップ、前記第１の磁石および前記保持具とともに前記振動子の長さ方向に移動可能である樹脂部材とを更に備え、
    　前記振動子の一方端および前記チップは、前記チップが前記被測定物に接触していないとき、前記ケースの開口部から外部へ突出しており、
    　前記振動子、前記チップ、前記第１の磁石、前記保持具および前記樹脂部材は、前記ケースの端部が前記被測定物に接触することに伴って、前記第１の磁石から前記第２の磁石の方向へ移動する、請求項７に記載のプローブ。     A case for housing the vibrator, the chip, the first magnet, and the holder;
    Filled between the vibrator, the first magnet and the holder and the case, and can be moved in the length direction of the vibrator together with the vibrator, the chip, the first magnet and the holder. And further comprising a resin member,
    The one end of the vibrator and the chip protrude outward from the opening of the case when the chip is not in contact with the object to be measured.
    The vibrator, the chip, the first magnet, the holder, and the resin member are moved from the first magnet to the second as the end of the case comes into contact with the object to be measured. The probe according to claim 7, which moves in the direction of the magnet.
  9. 　請求項１に記載のプローブと、
    　前記励起電圧を前記第２のアンテナへ出力する電圧源と、
    　前記第３のアンテナによって受信された受信電圧に基づいて前記振動子の共振周波数を検出し、その検出した共振周波数に基づいて前記被測定物のヤング率を算出する検出器とを備える測定装置。     A probe according to claim 1;
    A voltage source for outputting the excitation voltage to the second antenna;
    And a detector that detects a resonance frequency of the vibrator based on the received voltage received by the third antenna and calculates a Young's modulus of the device to be measured based on the detected resonance frequency.
  10. 　請求項１に記載のプローブと、
    　前記励起電圧を前記第２のアンテナへ出力する電圧源と、
    　前記第３のアンテナによって受信された受信電圧に基づいて前記振動子の共振周波数を有するピークの半値幅を検出し、または前記第３のアンテナによって受信された受信電圧に基づいて前記振動子が減衰するときの減衰定数を検出する検出器とを備える測定装置。     A probe according to claim 1;
    A voltage source for outputting the excitation voltage to the second antenna;
    A half-width of a peak having a resonance frequency of the vibrator is detected based on a received voltage received by the third antenna, or the vibrator is attenuated based on a received voltage received by the third antenna. And a detector for detecting an attenuation constant when performing the measurement.
  11. 　請求項１に記載のプローブと、
    　前記振動子の共振周波数をｎ（ｎは２以上の整数）倍した周波数、または前記振動子の共振周波数を１／ｎ倍した周波数を有する電圧を前記励起電圧として前記第２のアンテナへ出力する電圧源と、
    　前記第３のアンテナによって受信された受信電圧に基づいて前記振動子の共振周波数が検出されたか否かを判定する判定器とを備える測定装置。     A probe according to claim 1;
    A voltage having a frequency obtained by multiplying the resonance frequency of the vibrator by n (n is an integer of 2 or more) or a frequency obtained by multiplying the resonance frequency of the vibrator by 1 / n is output as the excitation voltage to the second antenna. A voltage source;
    And a determination device that determines whether or not a resonance frequency of the vibrator is detected based on a reception voltage received by the third antenna.
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