WO2012145279A3 - Energy harvesting device including mems composite transducer - Google Patents

Energy harvesting device including mems composite transducer Download PDF

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Publication number
WO2012145279A3
WO2012145279A3 PCT/US2012/033866 US2012033866W WO2012145279A3 WO 2012145279 A3 WO2012145279 A3 WO 2012145279A3 US 2012033866 W US2012033866 W US 2012033866W WO 2012145279 A3 WO2012145279 A3 WO 2012145279A3
Authority
WO
WIPO (PCT)
Prior art keywords
energy harvesting
harvesting device
composite transducer
substrate
mems
Prior art date
Application number
PCT/US2012/033866
Other languages
French (fr)
Other versions
WO2012145279A2 (en
Inventor
James D. Huffman
Gary A. Kneezel
Original Assignee
Eastman Kodak Company
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US13/089,507 external-priority patent/US8759990B2/en
Priority claimed from US13/089,500 external-priority patent/US8680695B2/en
Application filed by Eastman Kodak Company filed Critical Eastman Kodak Company
Publication of WO2012145279A2 publication Critical patent/WO2012145279A2/en
Publication of WO2012145279A3 publication Critical patent/WO2012145279A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
    • H02N2/186—Vibration harvesters
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/308—Membrane type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function

Abstract

An energy harvesting device includes a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A MEMS transducing member includes a beam having a first end and a second end. The first end is anchored to the substrate and the second end cantilevers over the cavity. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate. The compliant member is configured to be set into oscillation by excitations produced externally relative to the energy harvesting device.
PCT/US2012/033866 2011-04-19 2012-04-17 Energy harvesting device including mems composite transducer WO2012145279A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US13/089,507 2011-04-19
US13/089,507 US8759990B2 (en) 2011-04-19 2011-04-19 Energy harvesting device including MEMS composite transducer
US13/089,500 2011-04-19
US13/089,500 US8680695B2 (en) 2011-04-19 2011-04-19 Energy harvesting using MEMS composite transducer

Publications (2)

Publication Number Publication Date
WO2012145279A2 WO2012145279A2 (en) 2012-10-26
WO2012145279A3 true WO2012145279A3 (en) 2013-04-04

Family

ID=46147012

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2012/033866 WO2012145279A2 (en) 2011-04-19 2012-04-17 Energy harvesting device including mems composite transducer

Country Status (1)

Country Link
WO (1) WO2012145279A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019033631A (en) * 2017-08-09 2019-02-28 国立大学法人静岡大学 Mems vibration element and manufacturing method therefor, and vibration power generation element
CN108390590B (en) * 2018-05-02 2024-03-15 南京邮电大学 Multi-degree-of-freedom arc piezoelectric energy collector
IT201900012564A1 (en) * 2019-07-22 2021-01-22 Sens In S R L ENERGY COLLECTION SYSTEM, FIXING ELEMENT, USE AND METHOD FOR THE TRANSFORMATION OF KINETIC ENERGY IN ELECTRICAL ENERGY

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090167114A1 (en) * 2007-12-12 2009-07-02 Irvine Sensors Corporation Forced vibration piezo generator and piezo actuator
DE102009043214A1 (en) * 2009-07-27 2011-02-17 Siemens Aktiengesellschaft A piezoelectric energy converter for converting mechanical energy into electrical energy by means of pressure fluctuations, method of converting mechanical energy into electrical energy using the energy converter and use of the method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090167114A1 (en) * 2007-12-12 2009-07-02 Irvine Sensors Corporation Forced vibration piezo generator and piezo actuator
DE102009043214A1 (en) * 2009-07-27 2011-02-17 Siemens Aktiengesellschaft A piezoelectric energy converter for converting mechanical energy into electrical energy by means of pressure fluctuations, method of converting mechanical energy into electrical energy using the energy converter and use of the method

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
BOR-SHUN LEE ET AL: "MEMS Power Receiver using Piezoelectric Cantilever Beams and Interdigitated Electrodes", 2006 IEEE CONFERENCE ON SYSTEMS, MAN, AND CYBERNETICS, 8-11 OCT. 2006, TAIPEI, TAIWAN, IEEE, PISCATAWAY, NJ, USA, 1 October 2006 (2006-10-01), pages 3227 - 3232, XP031117444, ISBN: 978-1-4244-0099-7 *
HYUN-UK KIM ET AL: "Piezoelectric Microgenerators-Current Status and Challenges", IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS AND FREQUENCY CONTROL, IEEE, US, vol. 56, no. 8, 1 August 2009 (2009-08-01), pages 1555 - 1568, XP011271276, ISSN: 0885-3010, DOI: 10.1109/TUFFC.2009.1220 *

Also Published As

Publication number Publication date
WO2012145279A2 (en) 2012-10-26

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