WO2012124772A1

WO2012124772A1 - Mist supply device for filter inspection

Info

Publication number: WO2012124772A1
Application number: PCT/JP2012/056742
Authority: WO
Inventors: 幸人徳岡
Original assignee: 住友化学株式会社
Priority date: 2011-03-15
Filing date: 2012-03-15
Publication date: 2012-09-20
Also published as: JP2012208118A

Abstract

Provided is a mist supply device for filter inspection that can further increase the detection precision of filter defects while using liquid particles. The mist supply device (420) for filter inspection is provided with: a generation unit (20) that generates a gas flow containing a liquid particle group (P); and an elimination unit (52) that eliminates liquid particles (PL) having a relatively large particle size within the liquid particle group (P).

Description

Mist supply device for filter inspection

The present invention relates to a filter inspection mist supply device.

Conventionally, a defect inspection method for a honeycomb filter used as a diesel particulate filter is known. For example, in Patent Document 1, a gas flow containing liquid particles generated from a spray nozzle is provided on the inlet end face of a honeycomb filter, and the gas flow emitted from the outlet end face of the honeycomb filter is irradiated with light to illuminate the particles. Is disclosed.

JP 2009-503508 A

However, in the conventional method, the pores of the filter are clogged with liquid, and it may be difficult to perform inspection with sufficient accuracy.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a filter inspection mist supply device that can improve the detection accuracy of a filter defect while using liquid particles.

A filter inspection mist supply device according to the present invention includes a generation unit that generates a gas flow including a liquid particle group, and a removal unit that removes liquid particles having a relatively large particle size in the liquid particle group. .

According to the present invention, the liquid particles having a relatively large particle diameter among the liquid particles are selectively removed by the removing unit, so that the liquid particles having a small particle diameter can be selectively supplied to the filter. it can. Thereby, it is suppressed that the pores of the filter are blocked by liquid particles having a large particle diameter.

Here, it is preferable that the removal portion has a bent tube.

Small particles can bend inside the bent tube by riding on the gas flow, but large particles collide with the wall without being able to bend the bent part due to the large inertia, or after being supplied to the inside, gravity Therefore, the large particles can be selectively removed easily with a simple configuration.

At this time, it is preferable that the angle formed by the axis of the gas inlet side of the bent tube and the axis of the gas outlet side is 45 to 135 °. Thereby, the removal effect of a large liquid particle becomes high.

It is also preferable that the gas outlet side axis of the bent tube is arranged vertically upward. Thereby, the classification effect using gravity becomes high.

Moreover, it is also preferable that the removal unit has a cyclone. Small particles can ride on the gas flow and pass through the cyclone with the gas, but large particles collide with the wall of the cyclone and are removed due to the large centrifugal force.

The generator preferably has a two-fluid nozzle (a nozzle that mixes two fluids, gas and liquid, inside or outside the nozzle to generate a liquid particle group).

According to the present invention, filter defects can be detected with high accuracy.

FIG. 1A is a perspective view of a honeycomb filter 100 to be inspected, and FIG. 1B is a view taken along the arrow Ib-Ib in FIG. FIG. 2 is a schematic cross-sectional view of the defect inspection apparatus 400 for the honeycomb filter 100 according to the first embodiment. 3 is a view taken in the direction of arrows III-III in FIG. 4 is a top view around the honeycomb filter 100 of the device 400 of FIG. FIG. 4 is a schematic cross-sectional view of the defect inspection apparatus 400 for the honeycomb filter 100 according to the second embodiment.

Embodiments of the invention will be described with reference to the drawings. First, the honeycomb filter 100 to be inspected in the present embodiment will be described. The honeycomb filter 100 can be used as, for example, a diesel particulate filter.

As shown in FIGS. 1A and 1B, the target honeycomb filter 100 in the present embodiment includes partition walls 112 that form a plurality of flow paths 110 that extend in parallel to each other, and a plurality of flow paths 110. A cylinder having a sealing portion 114 that closes one end of the inside (the left end in FIG. 1B) and the other end of the remaining portion of the plurality of flow paths 110 (the right end in FIG. 1B). Is the body.

The length of the honeycomb filter 100 in the direction in which the flow path 110 extends is not particularly limited, but may be, for example, 40 to 350 mm. Further, the outer diameter of the honeycomb filter 100 is not particularly limited, but may be, for example, 100 to 320 mm. The size of the cross section of the channel 110 can be set to 0.8 to 2.5 mm on a side in the case of a square, for example. The thickness of the partition 112 can be 0.05 to 0.5 mm.

The material of the partition 112 of the honeycomb filter 100 is porous ceramics (fired body). The ceramic is not particularly limited, and examples thereof include alumina, silica, mullite, cordierite, glass, oxides such as aluminum titanate, silicon carbide, silicon nitride, and metal. The aluminum titanate can further contain magnesium and / or silicon.

As described above, the left end of a part of the plurality of channels 110 of the honeycomb filter 100 is sealed by the sealing part 114, and the right end of the remaining part of the plurality of channels 110 of the honeycomb filter 100 is sealed by the sealing part 114. Has been. As the material of the sealing portion 114, the same ceramic material as that of the honeycomb filter 100 can be used. The “part of the plurality of flow paths 110” and the “remaining part of the plurality of flow paths 110” described above are preferably arranged in a matrix when viewed from the end face side as shown in FIG. Of the plurality of flow paths arranged in the vertical direction and the horizontal direction in the horizontal direction.

The honeycomb filter 100 has porous partition walls 112. The pore diameter of the partition wall is not particularly limited, but can be, for example, about 11 to 30 μm. In FIG. 1B, the gas supplied from the left end of the flow path 110 passes through the partition wall 112, reaches the adjacent flow path 110, and is discharged from the right end of the flow path 110. At this time, particles in the inflowing gas are removed by the partition walls 112, and the honeycomb filter 100 functions as a filter.

Such a honeycomb filter 100 can be manufactured as follows, for example.

First, an inorganic compound source powder, an organic binder, a solvent, and additives to be added as necessary are prepared. These are mixed by a kneader or the like to obtain a raw material mixture. The obtained raw material mixture is extruded from an extruder having an outlet opening corresponding to the shape of the partition wall, cut to a desired length, and then dried by a known method. By doing so, a green honeycomb molded body is obtained. Then, the end of the flow path of the green honeycomb molded body is sealed with a sealing material by a known method and fired, or the green honeycomb molded body is fired and the end of the flow path is sealed by a known method. That's fine.

(First embodiment)
Next, an inspection apparatus for the honeycomb filter 100 according to the first embodiment will be described with reference to FIGS.

The inspection apparatus 400 includes a two-fluid nozzle (generator) 20 that generates a gas flow including liquid particles P (also referred to as mist), and a relatively large particle diameter in the liquid particles generated by the two-fluid nozzle 20. A bent tube (removal part) 50 that removes the liquid particles PL, and a gas mainly containing liquid particles PS having a relatively small particle diameter that exits from the bent tube 50 is one end of the plurality of channels 110 of the honeycomb filter 100 (the lower ends in FIG. 2). ), And a particle concentration detection unit 200. The two-fluid nozzle 20 and the bent tube 50 constitute a mist supply device 420. Here, the liquid particles mean liquid fine particles dispersed in a gas, and the two fluid nozzles 20 mix, collide, or scatter two fluids of gas and liquid inside or outside the nozzle. To be generated.

The two-fluid nozzle 20 receives the liquid supplied from the tank 10 through the line L1, and receives a gas, for example, air, supplied from the gas source 14 through the valve V1 and the line L2, and receives liquid particles (mist). ) Producing a gas stream containing P; The form of the two-fluid nozzle is not particularly limited. The diameter of the liquid particles (mist) P is not particularly limited, but usually has a wide distribution. For example, the distribution can be about 0.1 to 100 μm.

The liquid is preferably a volatile liquid in view of ease of removal after inspection, and water is particularly preferable. In addition, you may use glycol type alcohol (for example, propylene glycol) as a liquid.

The gas of the gas source 14 is not particularly limited, but air is preferable in terms of economy. Further, the gas temperature of the gas source 14 is preferably 0 to 50 ° C., more preferably 0 to 30 ° C.

The bent pipe 50 mainly has a gas inlet side part 50a whose axis extends in the horizontal direction and a gas outlet side part 50b which is connected to the gas inlet side part 50a and whose axis extends vertically upward. The angle θ formed by the shaft 50aa of the gas inlet side portion 50a and the shaft 50ba of the gas outlet side portion 50b is not particularly limited as long as it is other than 180 °, but is preferably 45 to 135 °, more preferably 45 to 90 °. In the present embodiment, the angle θ is 90 °.

The inlet end of the gas inlet side 50a is closed by a closed plate 51, and a plurality of two-fluid nozzles 20 are provided on the closed plate 51. Specifically, for example, as shown in FIG. 3, a plurality of two-fluid nozzles 20 can be provided in the horizontal direction and a plurality in the vertical direction and arranged in a matrix. Note that the closed plate 51 may have only one two-fluid nozzle 20 according to the required concentration of liquid particles.

The diameters of the gas inlet side portion 50a and the gas outlet side portion 50b are not particularly limited, but may be, for example, 50 to 200% with respect to the diameter of the end face of the honeycomb filter 100. The lengths of the gas

inlet side portions

50a and 50b are not particularly limited, but can be set to 10 to 2000 mm, respectively.
In the present embodiment, the shape of the connecting portion between the gas outlet side portion 50b and the gas inlet side portion 50a is formed so that the axial direction changes to an acute angle without rounding, but the rounded direction May be formed such that the angle θ changes.

The bent pipe 50 further has a drain pipe 50d extending downward in the vertical direction at the connecting portion between the gas inlet side portion 50a and the gas outlet side portion 50b. That is, the bent tube 50 includes a gas inlet side portion 50a extending upward in the vertical direction, a drain pipe 50d extending downward in the vertical direction and closed at the bottom, and a gas inlet side connected laterally to these connecting portions. It has a portion 50a and is generally T-shaped.

A drain line L3 having a valve V3 is connected to the drain pipe 50d, and the liquid collected in the drain pipe 50d can be discharged. The diameter of the drain pipe 50d is not particularly limited, and may be different from the diameter of the gas outlet side part 50b. For example, when it is smaller than the diameter of the gas outlet side portion 50b, the connecting portion between the gas inlet side portion 50a and the gas outlet side portion 50b may be rounded like a J shape instead of an L shape. .

The introduction part 52 includes a mounting ring 52a, a cylindrical part 52b, and a seal ring 52c.
The mounting ring 52a has an opening 52ai and is provided on the outlet end surface of the gas outlet side portion 50b. By supplying the outer peripheral portion of the lower end surface 110b of the honeycomb filter 100 on the mounting ring 52a, the gas containing the liquid particles P is supplied to each flow path 110 in the lower end surface 110b of the honeycomb filter 100. can do.

The cylindrical portion 52b is provided so as to rise from the outside of the mounting ring 52a, and surrounds the outer peripheral surface of the honeycomb filter 100.

The seal ring 52c is disposed between the inner surface of the cylindrical portion 52b and the outer peripheral surface of the honeycomb filter 100, and seals the gas containing the liquid particles P so as not to leak from the gap.

2 includes a laser light source 210 that generates a laser sheet LS, a camera 220 that captures the laser sheet LS, a computer 230 that analyzes an image acquired by the camera 220, and a field of view acquired by the camera 220.

Scales

260A and 260B are provided at the entry positions.

In the present embodiment, as shown in FIG. 2, the laser sheet LS is irradiated in parallel to an XY plane that is perpendicular to the Z direction in which the plurality of flow paths 110 of the honeycomb filter 100 extend, and the camera 220 is a laser sheet. A portion of the laser sheet LS facing the upper end surface 110t of the honeycomb filter 100 is photographed from a direction perpendicular to the LS (Z direction).

FIG. 4 shows a field of view FV of an image taken by the camera 220.

Scales

260A and 260B are disposed in the field of view FV. The

scales

260A and 260B extend in the Y direction and the X direction, respectively, and have marks 261 at positions corresponding to the central axes of the plurality of flow paths 110 of the honeycomb filter 100, respectively.

Referring back to FIG. 2, the computer 230 performs image analysis on the image taken by the camera 220 and detects a portion where particles are discharged. For example, a portion brighter than a predetermined threshold value may be extracted from the image, and this portion may be set as a place where particles are discharged. The computer acquires and outputs the coordinates of this part as necessary.

Subsequently, an inspection method of the honeycomb filter 100 using the above-described inspection apparatus 400 will be described.

Here, as an example, as shown in FIG. 2, the partition wall 112 of the honeycomb filter 100 has, as a defect, a hole h that communicates the flow path 110x with the upper end sealed and the flow path 110y with the lower end sealed. It shall be. Here, as shown in FIG. 4, the channel 110x is at the position of the leftmost mark 261 on the scale 260B and at the position of the third mark 261 from the bottom on the scale 260A. On the other hand, it is assumed that the flow path 110y is at the position of the second mark 261 from the left on the scale 260B, and is at the position of the third mark 261 from the bottom on the scale 260A.

Returning to FIG. 2, first, the introduction part 52 is attached to the lower part of the honeycomb filter 100. Then, the valve V1 is opened to supply the gas to the two-fluid nozzle 20 and the liquid is sucked up from the tank 10 via the line L1 to generate a gas flow including the liquid particle group (mist) P from the two-fluid nozzle 20. Let The generated gas flow including the liquid particle group P flows as indicated by an arrow A and is supplied to the honeycomb filter 100 via the bent pipe 50.
Here, the concentration of the liquid particles is preferably 0.0001 to 0.1 g / NL. Further, the flow rate of the gas supplied to the honeycomb filter 100 is not particularly limited, but may be, for example, 50 to 500 NL / min.

Here, the liquid particle group P included in the gas flow generated from the two-fluid nozzle 20 has a particle size distribution. Therefore, the liquid particle group P has relatively large liquid particles PL and relatively small liquid particles PS. Then, when this gas passes through the bent tube 50, the particles PL having a relatively large particle diameter are removed. Specifically, the inertia and gravity of the liquid particle P are proportional to the volume, that is, the cube of the particle diameter, while the force applied to the liquid particle by the gas flow is proportional to the area, that is, the second particle diameter. Therefore, the liquid particle PS having a small particle size is relatively influenced by the gas flow and the moving direction is easily changed as indicated by an arrow A, whereas the liquid particle PL having a large particle size is relatively influenced by the gas flow. The movement direction is difficult to change. Accordingly, when the liquid particle group P having a particle size distribution is passed through the bent tube 50 together with the gas, the particles PS having a relatively small particle size follow the direction of the flow following the bending of the gas flow as indicated by the arrow A. Although the particle PL can be changed, the relatively large particle PL cannot follow the gas flow as indicated by the arrow A, and collides with the tube wall, for example, the wall 50b0 of the gas outlet side portion 50b or falls to the drain tube 50d. To do. Thereby, the large particles can be selectively removed, and the small particles can be selectively supplied to the honeycomb filter 100 via the introduction part 52. The liquid particles colliding with the wall 50b0 form a liquid film and flow down along the wall and are stored in the drain pipe 50d. The stored liquid may be appropriately discharged to the outside through the valve V3 and the line L3.

The diameter of the large particles to be removed can be appropriately adjusted according to the angle θ, the linear velocity of the gas flowing through the bent tube 50, the concentration of the liquid particles, and the like. These factors are preferably set so that at least liquid particles having a particle diameter of 11 μm or more, preferably 5 μm or more can be removed.

In this way, the liquid particles PS having a relatively small particle size are supplied into the plurality of flow paths 110 of the honeycomb filter 100 together with the gas. Thereafter, the gas containing the liquid particles PS passes through the porous partition wall 112, and the gas containing the liquid particles PS flows out from the upper ends 110 t of the plurality of flow paths 110 of the honeycomb filter 100. At this time, in the vicinity of the upper ends 110t of the plurality of flow paths 110 of the honeycomb filter 100, it is preferable that the atmosphere gas hardly flow, for example, the flow rate is 1 m / s or less. In addition, the temperature of the atmospheric gas is preferably 0 to 30 ° C. for ease of experiment. The atmospheric gas is preferably air.

And when the hole h as shown in FIG. 2 exists between the flow paths 110, the flow path which connects the upper end 110t and the lower end 110b of the some flow path 110 by the flow path 110x, the hole h, and the flow path 110y. Therefore, as shown by the arrow G, the mixed gas containing the liquid particles (mist) PS is concentrated from the upper end of the defective flow path 110y at a higher flow rate and flow velocity than the other flow paths 110. leak. Similarly, when the sealing portion 114 is missing or when there is a defect such as a gap between the sealing portion 114 and the flow path 110, the mixed gas containing liquid particles flows out in a concentrated manner. Therefore, the concentration of the liquid particles PS is relatively higher above the flow path 110y as compared to other portions.

When the gas flowing out from the upper end of the honeycomb filter 100 has a non-uniform concentration of the liquid particles PS, the laser 220 is strongly scattered when the high concentration portion passes through the laser sheet LS, and the camera 220 takes an image. It appears as a relatively bright part in the image. The unevenness of the concentration of particles can be detected by the light intensity profile of the bright part.

Then, in the image field of view FV as shown in FIG. 4, for example, when a bright spot occurs on the third mark 261 from the bottom of the scale 260A and on the second mark 261 from the left of the scale 260B. Can obtain data of coordinates (3, 2), which makes it easy to identify the defect location.

If there is no defect such as communication between the flow paths 110, the liquid particles and the gas flow through the partition walls 112, which are porous bodies, and flow out from the upper end outlet, as indicated by an arrow H in FIG. At this time, the flow velocity and flow rate of the gas and liquid particles flowing out from the upper end of each flow path 110 are substantially uniform with each other, and therefore, the concentration of liquid particles on the upper end 110t of the flow path 110 is unlikely to occur.

According to the present invention, by detecting the concentration distribution of particles in the gas flowing out from the flow path 110, the presence or absence and location of the flow path can be easily detected.

In particular, in the present embodiment, liquid particles are supplied to the honeycomb filter 100 by the mist supply device 420 having the two-fluid nozzle 20 and the bent pipe 50. For this reason, since the gas containing liquid particles reaches the honeycomb filter 100 via the bent tube 50, the number of coarse liquid particles can be extremely reduced as compared to the case where the gas directly reaches the honeycomb filter 100 without using the bent tube 50. Liquid particles can be made finer. For this reason, problems as described below are reduced, and the presence or absence of a channel defect can be detected with high accuracy. That is, when coarse liquid particles are present, the liquid derived from the liquid particles may block the pores of the porous partition walls, thereby causing clogging. Once the eyes are closed, it is difficult to remove clogging unless drying is performed. In addition, if clogging occurs, gas hardly flows even in the porous partition walls, so that the concentration of liquid particles on the upper end 110t of the flow path 110 is uneven even in a place where there is no defect, and defect detection is not possible. May be possible.

Further, in the present embodiment, since the gas outlet side portion 50b is vertically upward, gravity acts greatly on relatively large particles, and large particles can be removed more efficiently.

In addition, since the gas containing liquid particles is discharged from this apparatus, it is preferable to provide an exhaust means for collecting the gas and exhausting it to the outside.

(Second Embodiment)
Next, an inspection apparatus 400 for the honeycomb filter 100 according to the second embodiment will be described with reference to FIG. The inspection apparatus 400 according to the present invention is different from the first embodiment in that a cyclone 60 is provided instead of the bent tube 50. Specifically, a closed plate 51 having a two-fluid nozzle 20 is provided at the end of the horizontal inlet pipe 60 a of the cyclone 60. Also, an introduction part 52 is provided at the upper end of the upper outlet pipe 60b of the cyclone 60, the lower end of the lower outlet pipe 60c of the cyclone 60 is closed to form a liquid reservoir 60c, and the line L3 and the valve V3 are connected. Yes. In the present embodiment, the two-fluid nozzle 20 and the cyclone 60 constitute a mist supply device 420.

According to such an inspection apparatus 400, when the gas flow including the liquid particles generated by the two-fluid nozzle 20 is swung in the cyclone 60 as indicated by the arrow B and then discharged from the upper outlet pipe 60b. The relatively large liquid particles PL collide with the peripheral wall by centrifugal force and are collected in the liquid reservoir 60c, while the relatively small liquid particles PS ride on the gas flow indicated by the arrow B and pass through the upper outlet pipe 60b. And supplied to the honeycomb filter 100.
Also according to this embodiment, the same effect as the first embodiment is produced.

The present invention is not limited to the above-described embodiment, and various modifications can be made.
For example, in the above-described embodiment, the two-fluid nozzle is adopted as the method for generating the liquid particle group, but the present invention is not limited to this. For example, another spray nozzle such as a one-fluid nozzle may be used. In addition, for example, a liquid particle group may be generated using a four-fluid nozzle or a nebulizer. The 4-fluid nozzle is a nozzle having two liquid flow paths and two gas flow paths, and causes the fluids coming out of the two liquid flow paths and the two gas flow paths to collide at the collision focus at the tip of the nozzle edge. Thus, the atomized liquid particle group is generated. By using a four-fluid nozzle, a large amount of liquid particles of several microns can be sprayed. In addition, although it does not specifically limit as a kind of edge nozzle (4 fluid nozzle), For example, a straight edge nozzle and a circle edge nozzle are mentioned. The type of the nebulizer is not particularly limited, and examples thereof include a jet type that generates liquid particle groups with compressed air, an ultrasonic type that generates liquid particle groups with ultrasonic waves, and a mesh type. Moreover, you may produce | generate a liquid particle group by mixing water and dry ice. When the one-fluid nozzle is used, a generator that generates a gas flow including a liquid particle group can be configured by appropriately adding a gas from a gas source.
A single fluid nozzle can also be used to supplement the gas. That is, a single fluid nozzle for generating a liquid particle group and a single fluid nozzle for supplying a gas can be used in combination. In this case, when the introduction pressure to the honeycomb body of the liquid particle group generated by one fluid nozzle is insufficient due to the pressure loss due to the honeycomb body, the liquid particle group is generated by the gas flow supplied from the other fluid nozzle. The indentation pressure into the honeycomb body can be increased, and the liquid particles can be smoothly introduced into the honeycomb body.

In the above-described embodiment, the bent tube 50 and the cyclone 60 are used as a removing unit that removes liquid particles having a large particle diameter, but the present invention is not limited to this. For example, as a wind classification method that can be classified by balancing the drag force acting on liquid particles by gas and the volume force acting on liquid particles by gravity, inertial force, centrifugal force, etc., gravity classifier, inertia classifier, centrifugal classifier Machine or a combination of these. Moreover, you may remove the liquid particle which exceeds the mesh opening of a mesh instead of an air classification, for example with a mesh.

Furthermore, it is also possible to connect the removing portions in a plurality of stages in series, such as connecting the bent tube 50 in two stages in series or connecting the cyclone 60 in two stages in series. In this case, by supplying the gas between the removal sections, increasing the gas flow rate and increasing the flow rate in the later stage can easily remove particles having a particle size that could not be removed in the previous stage, and further increase the particle size. Miniaturization becomes easy. It is also possible to further provide a two-fluid nozzle between the removal units and supply a mixture of droplets and gas obtained in the previous removal unit as a fluid to the two-fluid nozzle.

Further, in the first embodiment, the gas outlet side portion 50b of the bent tube 50 is arranged vertically upward, but can be implemented even if it is arranged in another direction.

In the first embodiment, the drain pipe 50d is provided in the bent pipe 50. However, the present invention can also be implemented in an aspect without a drain pipe.

Also, the direction of the laser sheet and the direction of the camera are not limited to the above embodiments. For example, you may image | photograph with the camera 220 from diagonal direction with respect to the laser sheet LS.

In the above-described embodiment, the scattered light generated by applying light to the particle is detected as a method for detecting the concentration distribution of the particle. However, the present invention is not limited to this. For example, reflection generated by applying ultrasonic waves to the particle. A wave or the like may be detected.

In the above embodiment, the atmospheric gas is air, but it goes without saying that other gases may be used as the atmospheric gas.

In the above embodiment, the flow path 110 of the honeycomb filter 100 is arranged in the vertical direction, but the present invention can be implemented in any direction such as a horizontal direction.

In the above-described embodiment, the cross-sectional shape of the flow path 110 is substantially square, but is not limited thereto, and may be rectangular, circular, elliptical, triangular, hexagonal, octagonal, or the like. Moreover, in the flow path 110, what has a different diameter and a different cross-sectional shape may be mixed. In addition, the arrangement of the flow paths is a square arrangement in FIG. 1, but is not limited to this. it can. Further, the outer shape of the honeycomb filter is not limited to a cylinder, and may be, for example, a triangular column, a quadrangular column, a hexagonal column, an octagonal column, or the like.

In the above-described embodiment, the honeycomb filter is an inspection target, but a normal plate filter or the like can also be an inspection target.

In the above embodiment, the presence / absence of particles is determined by the computer based on the image obtained by the camera 220. However, the presence / absence and position of a bright spot may be determined manually.

DESCRIPTION OF SYMBOLS 20 ... Two-fluid nozzle (generation | generation part), 50 ... Bending pipe | tube (removal part), 50a ... Gas inlet side part, 50b ... Gas outlet side part, 52 ... Introduction part, 60 ... Cyclone (removal part), 100 ... Honeycomb filter , 110 ... flow path, 110 t ... upper end (one end) of the flow path, 110 b ... lower end (other end) of the flow path, 112 ... partition wall, 114 ... sealing part, 200 ... detection part, 260A, B ... scale, 400 ... inspection Device: 420 ... Mist supply device, P ... Liquid particles, PL ... Relatively large liquid particles, PS ... Relatively small liquid particles.

Claims

A generating section for generating a gas flow including liquid particles, and
A filter inspection mist supply device comprising: a removal unit that removes liquid particles having a relatively large particle size in the liquid particle group.
The apparatus according to claim 1, wherein the removing unit has a bent tube.
3. An apparatus according to claim 2, wherein an angle formed by a gas inlet side axis and a gas outlet side axis of the bent pipe is 45 to 135 °.
The apparatus according to claim 2 or 3, wherein an axis of a gas outlet side portion of the bent pipe is arranged vertically upward.
The apparatus according to claim 1, wherein the removing unit has a cyclone.
The apparatus according to any one of claims 1 to 5, wherein the generating unit includes a two-fluid nozzle.