WO2012116933A1 - Dispositif de mesure du champ magnétique - Google Patents

Dispositif de mesure du champ magnétique Download PDF

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Publication number
WO2012116933A1
WO2012116933A1 PCT/EP2012/053186 EP2012053186W WO2012116933A1 WO 2012116933 A1 WO2012116933 A1 WO 2012116933A1 EP 2012053186 W EP2012053186 W EP 2012053186W WO 2012116933 A1 WO2012116933 A1 WO 2012116933A1
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WO
WIPO (PCT)
Prior art keywords
magnetic field
magnetic flux
flux concentrators
magnetic
measuring
Prior art date
Application number
PCT/EP2012/053186
Other languages
German (de)
English (en)
Inventor
Stefan Hansen
Marc Christopher WURZ
Jue CHEN
Lutz Rissing
Original Assignee
Gottfried Wilhelm Leibniz Universität Hannover
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by Gottfried Wilhelm Leibniz Universität Hannover filed Critical Gottfried Wilhelm Leibniz Universität Hannover
Publication of WO2012116933A1 publication Critical patent/WO2012116933A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0005—Geometrical arrangement of magnetic sensor elements; Apparatus combining different magnetic sensor types
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0011—Arrangements or instruments for measuring magnetic variables comprising means, e.g. flux concentrators, flux guides, for guiding or concentrating the magnetic flux, e.g. to the magnetic sensor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/0206—Three-component magnetometers

Definitions

  • Magnetic field measuring arrangement with a plurality of magnetic field sensors and with a plurality of magnetic flux concentrators coupled to the magnetic field sensors.
  • the detection of magnetic fields in the air gap of an electric motor provides information about the field distribution which is required for optimally controlled activation of the electric motor.
  • the detection of the field distribution and the return of these measurement results in the control of an electric motor thus allows an increase in efficiency during operation. This is z.
  • DE 10 2008 041 859 A1 discloses a magnetic field sensor arrangement for measuring spatial components of a magnetic field, in which magnetic field sensors utilizing a xMR effect in a magnetoresistive layer structure detect a further component of the magnetic field to be detected which is perpendicular or not parallel to the layer structure. This is at least one
  • Flux concentrator arranged above the layer structure such that the magnetic field lines in the edge regions of the flux concentrator are deflected so that here the field lines form a horizontal component of the magnetic field.
  • JP 2004 4012156 A discloses a three-dimensional magnetic field sensor with three anisotropic magnetoresistive elements for three detection axes.
  • JP 2009-216390 A discloses a magnetic field sensor for measuring three-dimensional magnetic fields.
  • DE 10 2006 022 336 A1 describes a magnetic field sensor having a first sensor for detecting a magnetic field acting in a first plane and a second sensor for detecting a component of the magnetic field perpendicular to the first plane of the first sensor. It proposes xMR or Hall sensors that can be interconnected to form a Wheatstone bridge.
  • Flow concentrator arrangement can be accommodated.
  • DE 10 2009 022 821 A1 discloses a method and systems for magnetic field detection, wherein the sensor detects two magnets with a respective surface and a difference detection element.
  • the differential detection element extends along the two surfaces of the two magnets.
  • a layer of ferromagnetic or paramagnetic material extends between the first and second magnets and spaces the first and second magnets apart.
  • DE 10 2009 008 265 A1 describes an arrangement for measuring at least one component of a magnetic field with a surface area of soft magnetic material applied in the chip level, which is separated by a gap into two partial areas.
  • the gap is composed of gap sections of different longitudinal directions and magnetically sensitive elements are accommodated in one or more parallel gap sections.
  • a universal sensor chip is known, are arranged in the sensor elements in the form of a three-dimensional grid.
  • the sensor elements consist of full bridges such. B. a Wheatstone bridge.
  • the sensor grid can be equipped with soft-magnetic, flux-conducting structures, so-called flux concentrators, which selectively supply the magnetic flux to the magnetic-field-sensitive areas and redirect the direction of the flux such that the magnetic flux matches the sensitivity direction of the sensor elements better.
  • the flux concentrators are made by depositing ferromagnetic material on the substrate.
  • GB 2 030 779 A describes a process for the production of flexible printed circuits.
  • US 5,972,152 A discloses a method for fixing a flexible circuit substrate and its processing.
  • the object is achieved with the magnetic field measuring arrangement having the features of claim 1.
  • the magnetic field measuring arrangement of the type mentioned above is characterized by two elongated magnetic flux concentrators formed with a greater length than width and height, which are spaced apart from one another by a gap, the gap being limited by the end faces of the first end section of the respective magnetic flux concentrators is, the end faces are aligned parallel to each other and at least one magnetic field sensor is disposed in the gap.
  • the magnetic flux concentrators undergo a change in their direction of extension along the longitudinal axis of the elongate magnetic flux concentrators along the length from the first end portion to the opposite end portion so that the opposite end portions of a pair of magnetic flux concentrators arranged in series face in opposite directions.
  • At least one end face At least one further magnetic field sensor is arranged on the surface of the end sections opposite the first end sections, ie a further magnetic field sensor is coupled to the at least one end face.
  • the magnetic flux is completely deflected by 180 °.
  • the magnetic field sensors are then arranged with the end faces on the end portions of the Magnet Wegkonzentratoren and thus aligned in a common main plane. With a magnetic flux directed perpendicular to this main plane, all magnetic field sensors are equally affected.
  • the magnetic flux is at an angle or perpendicular to this main plane, the magnetic field sensors arranged at the different end faces are differently influenced so that the magnitude and direction of the magnetic field can be detected with high accuracy.
  • the magnetic field measuring arrangement thus utilizes that an external magnetic field to be measured magnetizes the magnetic flux concentrators so that the field to be measured generates a magnetic flux along the neutral fiber of the magnetic flux concentrators. At the end of a magnetic flux concentrator, this magnetic flux vertically penetrates the magnetic field sensor as a field and, if necessary, re-enters the adjacent further magnetic flux concentrator. This effect is also called concentration.
  • each case at least two magnetic flux concentrators, which are spaced apart from each other by a gap, together with the end faces of the
  • Magnetic flux concentrators coupled magnetic field sensors a spatial direction measurement group.
  • three spatial direction measuring groups are arranged side by side in different spatial directions X, Y, Z, respectively. This makes it possible to detect with great precision the size (i.e., amount) and direction of a magnetic field or flux in three-dimensional space.
  • the main extension direction of the spatial direction measuring groups which is defined by the common plane of the magnetic field sensors of a spatial direction measuring group, are perpendicular to each other.
  • the measurement is made in the Cartesian coordinate system, which leads to a well-controlled design and consequently a simple production of the sensor arrangement and to easily evaluated measurement results.
  • At least one further magnetic flux concentrator adjoins a group of two magnetic flux concentrators arranged at a distance from each other through a gap.
  • This at least one further magnetic flux concentrator adjoins an associated free second end section of a magnetic flux concentrator of the (basic) group, so that the successive magnetic flux concentrators are spaced apart by a gap.
  • a magnetic field sensor is arranged in the respective gap.
  • the magnetic field is better concentrated with the aid of the succession of intermediate gap flux concentrators.
  • the magnetic flux concentrators may be curved or angled. Preferably, they are curved, in particular semicircularly curved, which leads to a continuous deflection of the magnetic flux.
  • magnetic flux concentrators can also z. L-shaped angled, which possibly brings advantages in manufacturing and for special installation conditions with it.
  • magnetic flux concentrators can also be angled Rj-förrnig that they have two spaced parallel straight end portions and a straight crosspiece, wherein the transverse web, the ends of the straight end portions, which are opposite to the free, magnetic field sensors adjacent end faces together.
  • the magnetic field measuring arrangement is preferably applied to a substrate together with a measured value logic for simple and inexpensive production.
  • the magnetic flux concentrators are preferably formed from a soft magnetic material.
  • the magnetic field sensors may comprise any magnetically sensitive sensors, such as e.g. Anisotropic magneto-resistive (AMR) sensors, giant magnetoresistive (GMR) sensors, tunnel magnetoresistive (TMR) sensors, or Hall sensors.
  • AMR Anisotropic magneto-resistive
  • GMR giant magnetoresistive
  • TMR tunnel magnetoresistive
  • the object of the present invention is furthermore to provide a method for producing a magnetic field measuring arrangement described above.
  • the preparation of a magnetic field measuring arrangement described above with its three-dimensional structure could be done by a sputtering process.
  • layer by layer magnetoresistive material and possibly also the magnetic field sensors are deposited on the surface of the substrate.
  • the three-dimensionality is achieved by generating the measuring arrangement layer by layer on a substrate.
  • the sputtering process is still too expensive and requires special equipment.
  • the method according to the invention to separate the first substrate extending on one level along a dividing line between the first and second regions while maintaining a flexible connecting layer and the two separate ones Substrate areas then fold against each other.
  • the first region in the main plane and the second region are oriented in the Z-plane perpendicular thereto at a defined angle, preferably in the Cartesian coordinate system.
  • the three-dimensionality of the thus prepared, preferably already equipped substrate is then achieved by the step of separating and folding in a simple and inexpensive manner.
  • the folded and provided with components structured substrate can then z. B. be cast in resin to obtain a compact and stable magnetic field measuring device.
  • Figure 1 Schematic view of a magnetic field measuring arrangement with aligned in three spatial directions spatial magnetic field detection groups
  • FIG. 2 shows a sketch of a pair of magnetic flux concentrators with magnetic field sensors arranged on the end faces and their interconnection in a Wheatstone bridge;
  • FIG. 3 shows a sketch of a spatial direction magnetic detection group with two curved magnetic flux concentrators arranged one after the other and in each case two further magnetic flux concentrators at the free ends and a Wheatstone bridge at a magnetic flux directed perpendicular to the main plane of the magnetic field sensors;
  • Figure 4 Sketch of a spatial direction magnetic detection group with two successively arranged, curved Magnet Wegnecktratoren and two other Magnet Wegnecktratoren at the free ends and a Wheatstone bridge at a directed parallel to the main plane of the magnetic field sensors magnetic flux;
  • FIG. 5 shows a sketch of two L-shaped angled magnetic flux concentrators
  • FIG. 7 shows a sketch of the sequence of steps for producing a magnetic field measuring arrangement.
  • FIG. 1 shows a sketch of a magnetic field measuring arrangement, in which three
  • Space direction measuring groups la, lb, lc for detecting the magnetic field M in the three main axes X, Y and Z of the three-dimensional space are provided.
  • the three spatial direction measuring groups 1a, 1b, 1c are in each case perpendicular to one another with their main axes and are aligned with a respective spatial axis X, Y, Z.
  • the main axis of the respective spatial direction measuring groups la, lb, lc is determined by the
  • Main plane formed by the end faces S of the pair of magnetic flux concentrators 2a, 2b are formed.
  • the magnetic flux concentrators are formed of a soft magnetic material in a conventional manner.
  • You can z. B be arranged on a substrate or preferably sputtered on. In such a sputtering process, layer by layer magnetoresistive material or Hall sensor elements is deposited on the surface of the substrate, so that a precise and cost-effective production with a few manufacturing steps is possible.
  • Magnetic field sensors Adjacent to the end faces S, at least in the gap between the two adjacent magnetic flux concentrators 2a and 2b, and at at least one free end of one of the magnetic flux concentrators 2a, 2b magnetic field sensors are mounted.
  • These magnetic field sensors may be known xMR sensors in the form of magnetically sensitive resistors.
  • the term "x" stands for any technology such.
  • AMR sensors anisotropic magneto-resistive sensors
  • GMR gigantic magneto-resistive sensors
  • TMR tunnel magneto-resistive sensors
  • Hall sensors can also be used, although the xMR sensors are preferred due to their cheaper production, easy evaluation and possibly higher sensitivity.
  • each spatial direction measuring group 1 a, 1 b, 1 c each has a pair of successively arranged and spaced apart by a gap
  • Magnetic flux concentrators 2a, 2b has. With the aid of these magnetic flux concentrators 2a, 2b of soft magnetic material, the magnetic flux of the magnetic field M is deflected in a direction perpendicular to the plane of the end faces S and the magnetic field sensors adjacent thereto. As a result, the magnetic flux passes through the end faces S of the magnetic flux concentrators 2a, 2b vertically. In the magnetic field sensors arranged in the gap, the magnetic field re-enters the second, adjacent magnetic flux concentrators 2a, 2b, which leads to a concentration of the magnetic field to be measured. An external magnetic field M to be measured magnetizes the magnetic flux concentrators 2a, 2b. This causes the
  • Magnetic flux concentrators 2a, 2b along the neutral fiber of the magnetic flux concentrators 2a, 2b generate a magnetic flux.
  • the illustrated curvature of the magnetic flux concentrators 2a, 2b ensures that the magnetic field is completely in relation to the two free end faces S of a magnetic field concentrator located at the opposite end sections 2a, 2b is deflected in each case by 180 ° to each other.
  • the magnetic fields are directed so that they can be selected with respect to their direction.
  • the magnetic flux concentrators 2 a, 2 b are the smallest magnetic fields through the
  • Magnetic flux concentrators also bundled or concentrated and thereby reinforced, so that they are measurable.
  • the magnetic flux concentrators shown in the figure 1 together with the magnetic field sensors, not shown, z. B. be housed in a substrate 3.
  • z. B. Epoxy or Polymid or other non-magnetic and the Magnet Wegkonzentratoren 2a, 2b supporting material.
  • FIG. 2 shows a sketch of a spatial direction measuring group 1 which has at least two magnetic flux concentrators 2 a, 2 b. These magnetic flux concentrators 2a, 2b are elongated and extend one behind the other. Each first end sections 4 of the two magnetic flux concentrators 2 a, 2 b are disposed adjacent to one another, leaving a gap 5. The gap 5 is bounded by mutually facing and parallel to each other aligned end faces S of the first end portions 4.
  • the magnetic flux concentrators 2a, 2b change their direction of extension in the longitudinal direction, starting from the first end portion 4 to the opposite free end portion 6.
  • the elongated magnetic field concentrators 2a, 2b are curved semicircular. It is essential that the opposite end portions 6 have an extension direction such that the end faces S at the first and second end portions 4, 6 are aligned parallel to each other and span a common principal plane.
  • the magnetic field is through the Magnetic flux concentrators 2a, 2b thus deflected so that the magnetic flux completely, d .h. is deflected by 180 °.
  • magnetic field sensors Ri and R 4 are respectively provided at the two end faces S of the second end portions 6. In principle, it is conceivable that only at one end face S, a magnetic field sensor is present.
  • the measurement of the magnetic field by means of a Wheatstone bridge which is sketched in Figure 2. It is clear that the magnetic field sensors Ri and R 2 and the magnetic field sensors R 3 and R 4 in each case in series with each other and the two pairs Ri and R 2 and R 3 and R 4 are connected in parallel.
  • the bridge voltage U B in the connection between the series-connected magnetic field sensors Ri, R 2 and R 3 and R 4 is measured and represents a measure of the size and direction of the magnetic field.
  • a voltage potential is applied at the outer terminals Ui , U 2 . The result is the measurement voltage U B -
  • FIG. 3 shows an embodiment of a spatial direction measuring group 1 in which, in addition to the pair of magnetic flux concentrators 2a, 2b adjacent to the second end sections 6 of the magnetic flux concentrators 2a, 2b, another magnetic flux concentrators 2c, 2d are respectively disposed leaving a gap 5.
  • a spatial direction measuring group 1 thus consists of four magnetic flux concentrators 2a, 2b, 2c, 2d and each with magnetic field sensors Ri, R 2 , R 3 , R 4 in the limited by the end faces S gap. 5
  • the spatial-direction measurement group 1 at the free ends final magnetic flux 2c, 2d of the magnetic flux is concentrated in the area of the second end portions 6 and coupled thereto magnetic field sensors Ri and R 4 are better than in the embodiment example in FIG. 2
  • the sensitivity of the magnetic field measuring device can be further increased. It becomes clear in the example from FIG. 3 that the magnetic flux M runs perpendicular to the main plane, which is spanned by the end faces S and the planes of the magnetic field sensors Ri, R 2 , R 3 and R 4 .
  • the magnetic field sensors Ri, R 2 , R 3 and R 4 all equally detect a magnetic field acting perpendicularly to these magnetic field sensors Ri, R 2 , R 3 and R 4. This is illustrated by the block diagram of the Wheatstone bridge circuit of the magnetic field sensors Ri , R 2 , R 3 and R 4 shown arrows. This results in that the bridging voltage U B is equal to zero.
  • FIG. 4 shows the same arrangement of a spatial direction measuring group 1 comparable to FIG. 3.
  • the magnetic flux is directed parallel to the main plane, which is spanned by the end faces S and the plane of the magnetic field sensors Ri, R 2 , R 3 , R 4 .
  • This has the consequence that due to the complete deflection of the magnetic field by the curved magnetic flux concentrators 2a, 2b, the magnetic field sensors in the gap 5 between the main pair of Magnet Wegkonzentratoren 2a, 2b due to the deflection of the magnetic flux in the Magnet Wegkonzentratoren 2a, 2b a perpendicular to the right to the actual magnetic Detect flux directed magnetic field.
  • the bridge voltage U B is thus a measure of the direction of the magnetic flux M and also the size of the magnetic flux M.
  • the magnitude of the magnetic field IMI can be calculated in the Cartesian coordinate system according to the formula: are calculated, with ⁇ , ⁇ and Mz each as a function of the corresponding bridge voltage Ux, Uy, Uz for the spatial directions X, Y, Z result (eg.
  • FIG. 5 shows a sketch of an alternative embodiment of two elongated magnetic flux concentrators 2 a, 2 b with magnetic field sensors R 1, R 4 adjoining the end faces S at the second end sections 6. It is clear that the first end sections 4 of the two elongated magnetic nut concentrators 2 a, 2 b are again spaced apart by a gap 5. In the gap 5, two magnetic field sensors R 2 , R 3 are introduced, which are coupled to the end faces S of the first end portions 4.
  • the magnetic flux concentrators 2a, 2b are each aligned in an L-shape. Again, the magnetic flux concentrators 2a, 2b experience a change in their direction of extension along the longitudinal axis of the elongated magnetic flux concentrators 2a, 2b over the length from the first end portion to the opposite second end portion 6, resulting in complete deflection of the magnetic field M.
  • FIG. 6 shows another embodiment of a magnetic field measuring arrangement in which two elongated magnetic flux concentrators 2 a, 2 b are angled in a U shape.
  • the two first and second end portions 4, 6 are each rectilinear and parallel to each other.
  • the free end faces S opposite ends of the two parallel end portions 4, 6 are connected to each other via a transverse web 7, which extends perpendicular to the extension direction of the end portions 4, 6.
  • a gap can be spaced apart from the free second end sections 6 and the adjacent magnetic field sensors Ri, R 4
  • the cross section of the magnetic flux concentrators 2a, 2b, 2c, 2d can be arbitrary.
  • the cross section is round, but may also be semicircular, semi-elliptical or rectangular, in particular square.
  • the extension direction of the magnetic flux concentrators 2a, 2b, 2c, 2d changes along the longitudinal axis of the elongated magnetic flux concentrators 2a, 2b, 2c, 2d extending from the first to the second end section 4, 6. So can the
  • Magnetic flux concentrators 2a, 2b, 2c, 2d for example, continuously curved, in particular semicircular curved, or angled at least at one point and otherwise be straight in particular in the region of the end sections 4, 6. Combinations of curved and angled magnetic flux concentrators 2a, 2b, 2c, 2d are also conceivable and may be advantageous for special installation and measuring situations.
  • FIG. 7 shows a sketch of the sequence of steps for producing a magnetic field measuring arrangement.
  • step al is initially in a conventional manner z. B.
  • a wiring pattern is made of a metal layer of a planar metal-coated substrate 8.
  • the substrate 8 may for example be laminated with a copper alloy.
  • the strip conductor structure 9 is used, for example, in the known photolithography process with the steps of exposing a photosensitive layer on the metal layer and then etching the metal layer with an etchant.
  • the metal-coated substrate 8 which is still flat in step al) is provided with a conductor track structure 9 such that a first region 10a for two magnetic field sensors Ri, R 2 , R arranged in a main plane HE for measuring the magnetic field in two spatial directions X, Y perpendicular to each other 3 , R 4 with associated
  • Magnetic flux concentrators 2a, 2b and a second region 10b for a perpendicular to the main plane HE standing Z-plane ZE for measuring the magnetic field in a direction perpendicular to the main plane HE main direction Z arranged magnetic field sensors Ri, R 2 , R 3 , R 4 with associated Magnet Wegkonzentratoren 2a , 2b is provided.
  • step a2) the placement of the still planar structured substrate 1 with components 11 takes place, which comprise the magnetic field sensors Ri, R 2 , R 3 , R 4 and the associated magnetic flux concentrators 2 a , 2 b.
  • step b) the substrate 8 is then separated along a dividing line T between the first region 10a and the second region 10b, the interconnect structure 9 being maintained as a connection between the first and second regions 10b.
  • step c) the substrate 8 is then folded over at the dividing line T such that the first region 10a is perpendicular to the second region 10b and the first and second regions 10a, 10b remain electrically conductive and mechanically in communication with each other via the retained interconnect structure.
  • step d) z. B. with resin to create a position-stable unit as a magnetic field measuring arrangement, in which the first portion 10a and second portion 10b for measuring the X and Y magnetic field components and the perpendicular thereto Z component are perpendicular to each other.
  • a connection cable (not shown) for the electronics arranged on the substrate can then be led out of the casting block consisting of electrically insulating material.
  • the production method thus uses a substrate 8 which is laminated with a conductive structurable layer and which is structured in accordance with the desired measuring arrangement, optionally a further flexible layer can be provided on this substrate 8.
  • a layer of polymide is provided here.
  • the measuring elements are connected to one another in an electrically conductive manner.
  • different regions 10a, 10b of the substrate 8 are created.
  • the first region 10a is provided for measuring the X and Y component and the second region 10b for measuring the Z component.
  • an angle of exactly 90 ° is set during the folding.
  • the production method described has the advantage that it is accessible to simple and time-saving mass production. is lent. While the third dimension must be generated layer by layer during sputtering, in the present method only two, optionally when using the polyimide layer, three layers are to be produced. The rest of the component is created by a simple separation, folding and casting process. Due to the possibility of the conductor track structuring and equipping initially on a plane of the substrate 8, adjacent sensors can be made identical. It is only necessary that the components 11 be arranged so that the components for detecting the Z component of the magnetic field are arranged separately from the components for detecting the X and Y component of the magnetic field in a separate second region 10b.

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Magnetic Variables (AREA)

Abstract

L'invention concerne un dispositif de mesure du champ magnétique, comportant une pluralité de capteurs de champ magnétique (R1, R2, R3, R4) et une pluralité de concentrateurs de champ magnétique (2a, 2b) couplés aux capteurs de champ magnétique (R1, R2, R3, R4). Deux concentrateurs de champ magnétique (2a, 2b), de forme allongée et de longueur supérieure à la largeur et à la hauteur, éloignés l'un de l'autre par un entrefer (5), sont disposés l'un derrière l'autre, l'entrefer (5) étant délimité par les surfaces frontales (S) des premières sections finales (4) des concentrateurs de champ magnétique (2a, 2b) respectifs, les surfaces frontales (S) étant parallèles entre elles et au moins un capteur de champ magnétique (R2, R3) étant placé dans l'entrefer (5). Les concentrateurs de champ magnétique (2a, 2b) présentent sur la longueur entre la première section finale (4) et la deuxième section finale (6) située à l'opposé, une modification du sens de leur étendue le long de l'axe longitudinal des concentrateurs de champ magnétique de forme allongée (2a, 2b) de sorte que les deuxièmes sections finales (6) d'un couple de concentrateurs de champ magnétique (2a, 2b) placés l'un derrière l'autre sont orientées dans des sens opposés, et au moins un autre capteur de champ magnétique (R1, R4) étant disposé sur au moins une surface frontale (S) des deuxièmes sections finales (6) situées à l'opposé des premières sections finales (4).
PCT/EP2012/053186 2011-02-28 2012-02-24 Dispositif de mesure du champ magnétique WO2012116933A1 (fr)

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DE102011012659.7 2011-02-28
DE102011012659 2011-02-28

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015011052A1 (fr) * 2013-07-22 2015-01-29 Sensitec Gmbh Capteur de champs magnétiques à plusieurs composantes
EP2878966A4 (fr) * 2013-03-26 2016-04-20 Asahi Kasei Microdevices Corp Capteur magnétique et procédé pour détecter son magnétisme
CH712525A1 (de) * 2016-06-06 2017-12-15 Melexis Tech Sa Magnetfeldsensor mit integrierten Magnetfeldkonzentratoren.
WO2018136988A1 (fr) * 2017-01-27 2018-08-02 Hirtenberger Engineered Surfaces Gmbh Capteur de force magnétique et sa fabrication
WO2019002334A1 (fr) * 2017-06-28 2019-01-03 Centre National De La Recherche Scientifique Dispositif de mesure de champs magnetiques faibles
EP3309571A4 (fr) * 2015-06-09 2019-03-13 Multidimension Technology Co., Ltd. Capteur magnétorésistif à axe x du type push-pull

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DE102006037003A1 (de) * 2006-08-08 2008-02-14 Conti Temic Microelectronic Gmbh Filterdrossel
DE102009008265A1 (de) * 2009-02-10 2010-08-19 Sensitec Gmbh Anordnung zur Messung mindestens einer Komponente eines Magnetfeldes

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006037003A1 (de) * 2006-08-08 2008-02-14 Conti Temic Microelectronic Gmbh Filterdrossel
DE102009008265A1 (de) * 2009-02-10 2010-08-19 Sensitec Gmbh Anordnung zur Messung mindestens einer Komponente eines Magnetfeldes

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2878966A4 (fr) * 2013-03-26 2016-04-20 Asahi Kasei Microdevices Corp Capteur magnétique et procédé pour détecter son magnétisme
CN105929345A (zh) * 2013-03-26 2016-09-07 旭化成微电子株式会社 磁传感器及其磁检测方法
US9453890B2 (en) 2013-03-26 2016-09-27 Asahi Kasei Microdevices Corporation Magnetic sensor and magnetic detecting method of the same
WO2015011052A1 (fr) * 2013-07-22 2015-01-29 Sensitec Gmbh Capteur de champs magnétiques à plusieurs composantes
US9714989B2 (en) 2013-07-22 2017-07-25 Sensitec Gmbh Multicomponent magnetic field sensor
EP3309571A4 (fr) * 2015-06-09 2019-03-13 Multidimension Technology Co., Ltd. Capteur magnétorésistif à axe x du type push-pull
BE1024822B1 (de) * 2016-06-06 2018-07-13 Melexis Technologies Sa Magnetfeldsensor mit integrierten Magnetfeldkonzentratoren
US10224478B2 (en) 2016-06-06 2019-03-05 Interglass Technology Ag Magnetic field sensor with integrated field concentrators
CH712525A1 (de) * 2016-06-06 2017-12-15 Melexis Tech Sa Magnetfeldsensor mit integrierten Magnetfeldkonzentratoren.
US10497859B2 (en) 2016-06-06 2019-12-03 Melexis Technologies Sa Two-dimensional magnetic field sensor with a single integrated magnetic field concentrator
WO2018136988A1 (fr) * 2017-01-27 2018-08-02 Hirtenberger Engineered Surfaces Gmbh Capteur de force magnétique et sa fabrication
US11060925B2 (en) 2017-01-27 2021-07-13 Hirtenberger Engineered Surfaces Gmbh Magnetic force sensor and production thereof
WO2019002334A1 (fr) * 2017-06-28 2019-01-03 Centre National De La Recherche Scientifique Dispositif de mesure de champs magnetiques faibles
FR3068476A1 (fr) * 2017-06-28 2019-01-04 Centre National De La Recherche Scientifique Dispositif de mesure de champs magnetiques faibles

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