WO2012115503A1 - An apparatus for mixing fluids, a method of mixing the fluids using the apparatus and a method of fabricating the apparatus - Google Patents

An apparatus for mixing fluids, a method of mixing the fluids using the apparatus and a method of fabricating the apparatus Download PDF

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Publication number
WO2012115503A1
WO2012115503A1 PCT/MY2012/000029 MY2012000029W WO2012115503A1 WO 2012115503 A1 WO2012115503 A1 WO 2012115503A1 MY 2012000029 W MY2012000029 W MY 2012000029W WO 2012115503 A1 WO2012115503 A1 WO 2012115503A1
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WIPO (PCT)
Prior art keywords
fluids
depositing
sacrificial oxide
patterning
teeth
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Ceased
Application number
PCT/MY2012/000029
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French (fr)
Inventor
Hing Wah Lee
Chia Sheng Daniel Bien
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Mimos Bhd
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Mimos Bhd
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/40—Mixing liquids with liquids; Emulsifying
    • B01F23/43—Mixing liquids with liquids; Emulsifying using driven stirrers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
    • B01F27/05—Stirrers
    • B01F27/07—Stirrers characterised by their mounting on the shaft
    • B01F27/072—Stirrers characterised by their mounting on the shaft characterised by the disposition of the stirrers with respect to the rotating axis
    • B01F27/0721—Stirrers characterised by their mounting on the shaft characterised by the disposition of the stirrers with respect to the rotating axis parallel with respect to the rotating axis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
    • B01F27/05—Stirrers
    • B01F27/07—Stirrers characterised by their mounting on the shaft
    • B01F27/072—Stirrers characterised by their mounting on the shaft characterised by the disposition of the stirrers with respect to the rotating axis
    • B01F27/0724—Stirrers characterised by their mounting on the shaft characterised by the disposition of the stirrers with respect to the rotating axis directly mounted on the rotating axis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
    • B01F27/05—Stirrers
    • B01F27/11—Stirrers characterised by the configuration of the stirrers
    • B01F27/112—Stirrers characterised by the configuration of the stirrers with arms, paddles, vanes or blades
    • B01F27/1121—Stirrers characterised by the configuration of the stirrers with arms, paddles, vanes or blades pin-shaped
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
    • B01F27/05—Stirrers
    • B01F27/11—Stirrers characterised by the configuration of the stirrers
    • B01F27/112—Stirrers characterised by the configuration of the stirrers with arms, paddles, vanes or blades
    • B01F27/1125—Stirrers characterised by the configuration of the stirrers with arms, paddles, vanes or blades with vanes or blades extending parallel or oblique to the stirrer axis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
    • B01F27/55—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers driven by the moving material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
    • B01F27/80—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis
    • B01F27/90—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis with paddles or arms 
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00—Other mixers; Mixing plants; Combinations of mixers
    • B01F33/30—Micromixers

Definitions

  • the present invention relates generally to an apparatus for mixing fluids, method for performing mixing of fluids and method of fabricating the apparatus.
  • samples or reagents are generally in the form of fluid.
  • a mixing device is essential. Most of the fluid flow is in the state of laminar which are steady and cannot mix naturally when comes into contact. Mixing of small volume of fluid flowing through narrow channels can be achieved by using a micromixer.
  • Micromixer is a necessary apparatus in a microfluidic system used in most biochemistry analysis, drug delivery, agriculture, environmental monitoring and sequencing or synthesis of nucleic acids.
  • micromixers there are two types of micromixers, which are passive and active micromixers. Passive micromixers do not require external energy wherein the mixing process relies entirely on diffusion or chaotic advection.
  • active micromixers use an external field for the mixing process. The structure of the active micromixer is more complicated due to the necessity of external power and the cost for building the mixer is also higher than building a passive micromixer.
  • an apparatus for mixing at least two fluids substantially homogenously includes:
  • a mixing chamber housing a rotary gear wherein the rotary gear includes:
  • the plurality of pillar attached to the plurality of teeth breaks the streamlines of the at least two fluids and enhances the diffusion rate of the at least two fluids thus mixing the at least two fluids;
  • an apparatus for mixing at least two fluids substantially homogenously includes:
  • At least one mixing chamber wherein the at least one mixing chamber houses a rotary gear wherein the rotary gear includes:
  • the plurality of pillar attached to the plurality of teeth breaks the streamlines of the at least two fluids and enhances the diffusion rate of the at least two fluids thus mixing the at least two fluids; wherein a substantially homogenously mixed fluid exits through the designated fluid exit point.
  • Also disclosed herein is a method of fabricating the apparatus as mentioned above, the method including the steps of:
  • Figure 1 illustrates the top view of a preferred embodiment of the invention.
  • Figure 2 illustrates the A-A cross sectional view of a preferred embodiment of the invention.
  • Figure 3 (a) through (j) show stages in fabrication process of a preferred embodiment of the invention.
  • Figure 4 (a) through (d) illustrates different configurations of plurality of teeth of a rotary gear.
  • FIG. 1 illustrates the top view of an embodiment of the invention.
  • the invention includes a fluid entry point (100) wherein at least two fluids flow to a rotary gear (107).
  • Rotary gear (107) is inclusive of a shaft (104) which is capable of rotating about a longitudinally extending, centerline axis of the shaft (104).
  • the rotary gear (107) also includes a rotor (110) that is fixedly connected and aligned to the shaft (104). When the shaft (104) rotates about its centreline axis, the rotor (110) also rotates about the shaft's (104) centreline axis.
  • the rotary gear (107) also includes plurality of teeth (102) attached to the rotor (1 10) and plurality of pillar (103) attached to the plurality of teeth (102).
  • the rotary gear (107) is placed in mixing chamber (105) wherein mixing process is performed. Fluid exits through the fluid exit point (101) after mixing process is done at the mixing chamber (105).
  • Figure 2 illustrates the A-A cross sectional view of a preferred embodiment of the invention.
  • At least two fluids flow simultaneously through the fluid entry point (100).
  • the at least two fluids flow to the mixing chamber (105) through a microfluidic channel (202).
  • the mixing chamber (105) houses the rotary gear (107).
  • Rotary gear (107) is inclusive of the shaft (104), a rotor (1 10), plurality of teeth (102) and plurality of pillar (103) attached to the teeth (102).
  • the at least two fluids comes in contact with the rotary gear (107) and the force provided by the at least two moving fluids causes the rotary gear (107) to move in a rotating motion.
  • the movement creates a swirling force thus disturbing the flow of the at least two fluids.
  • the swirling force may be clockwise or counter clockwise in direction.
  • a chaotic and high turbulence stream of fluid flow is generated and the mixing of the at least two fluids is performed through diffusion.
  • the plurality of pillar (103) attached to the teeth (102) breaks the streamlines of the at least two fluids and also enhances the diffusion rate of the at least two fluids during the mixing process.
  • FIG. 3 (a) through (j) there is shown stages in the fabrication process of a preferred embodiment of the invention, including the steps of: a) depositing a first insulating layer (700) onto top side of a substrate (40);
  • the insulating layers (700, 703, 705, 707, 709) are made of silicon nitride (Si 3 Ni 4 ) or polymide.
  • the insulating layers (700, 703, 705, 707, 709) can also be made of other alternative compounds that are of insulator material and able to withstand or etches very slowly in hydrofluoric acid.
  • the substrate (40) is a silicon or glass or quartz substrate.
  • the sacrificial oxide layers (701 , 704, 706, 708) are made of phosphosilicate glass (PSG). These sacrificial oxide layers (701 , 704, 706, 708) can also be made of silicon dioxide, spin on glass (SOG) and Tetraethly-orthosilicate (TEOS).
  • Figure 4 (a)-(d) illustrates different configuration of the plurality of teeth (102) of the rotary gear (107) with different arrangements of the plurality of pillar (103) attached to the teeth (102).
  • Figure 4 (a) illustrates serpentine configuration of the teeth (102).
  • Figure 4 (a) illustrates zig-zag configuration of the teeth (102). Curved zig-zag configuration of the teeth (102) is illustrated in Figure 4 (c) and
  • Figure 4 (d) illustrates slanted configuration of the teeth (102).

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

The present invention is an apparatus (109) for mixing fluids, methods for performing fluids mixing and also methods of fabricating the apparatus (109) for mixing fluids. The apparatus (109) breaks the streamlines and increase the diffusion rate of fluids during the mixing process to achieve improved mixing of fluids.

Description

AN APPARATUS FOR MIXING FLUIDS, A METHOD OF MIXING THE FLUIDS USING THE APPARATUS AND A METHOD OF FABRICATING THE APPARATUS FIELD OF THE INVENTION
The present invention relates generally to an apparatus for mixing fluids, method for performing mixing of fluids and method of fabricating the apparatus. BACKGROUND OF THE INVENTION
In most biological/chemical microanalyser systems, samples or reagents are generally in the form of fluid. In order to ensure successful completion or effectiveness of the biological/chemical reaction for a particular analyser system, a mixing device is essential. Most of the fluid flow is in the state of laminar which are steady and cannot mix naturally when comes into contact. Mixing of small volume of fluid flowing through narrow channels can be achieved by using a micromixer.
Micromixer is a necessary apparatus in a microfluidic system used in most biochemistry analysis, drug delivery, agriculture, environmental monitoring and sequencing or synthesis of nucleic acids. Generally, there are two types of micromixers, which are passive and active micromixers. Passive micromixers do not require external energy wherein the mixing process relies entirely on diffusion or chaotic advection. On the other hand, active micromixers use an external field for the mixing process. The structure of the active micromixer is more complicated due to the necessity of external power and the cost for building the mixer is also higher than building a passive micromixer.
There are continuous advances in the micromixer technology. However, there is still a need for efficient and reliable micromixer capable of enhancing the diffusion rate between the fluids for mixing purposes. SUMMARY OF THE INVENTION
It is disclosed herein, an apparatus for mixing at least two fluids substantially homogenously, the apparatus includes:
1.1. a fluid entry point;
1.2. a mixing chamber housing a rotary gear wherein the rotary gear includes:
1.2.1. a shaft wherein the shaft rotates about a longitudinal centerline axis of the shaft;
1.2.2. a rotor attached to the shaft;
1.2.3. plurality of teeth attached to the rotor;
1.2.4. plurality of pillar attached to the plurality of teeth;
1.3. a fluid exit point; wherein the at least two fluids flow simultaneously through the fluid entry point to the rotary gear provided in the mixing chamber;
wherein a force provided by the at least two moving fluids rotates the rotary gear;
wherein the plurality of pillar attached to the plurality of teeth breaks the streamlines of the at least two fluids and enhances the diffusion rate of the at least two fluids thus mixing the at least two fluids;
wherein a mixed fluid exits through the fluid exit point.
It is also disclosed herein, a method of mixing at least two fluids substantially homogenously by the apparatus mentioned above, the method including the steps of:
1.1. flowing of at least two fluids to the mixing chamber through the fluid entry point; 1.2. flowing of at least two fluids to the rotary gear;
1.3. rotating the plurality of teeth and the plurality of pillar attached to the plurality of teeth in circular motion by the force provided by the at least two moving fluids;
1.4. rotating the shaft and the rotor provided in the rotary gear in circular motion;
1.5. breaking the streamlines and enhancing the diffusion rate of the at least two fluids by the plurality of pillar attached to the plurality of teeth;
1.6. flowing of a substantially homogenously mixed fluid through the fluid exit point. Also disclosed herein is a method of fabricating the apparatus as mentioned, the method including the steps of:
1.1. depositing a first insulating layer onto top side of a substrate;
1.2. depositing a first sacrificial oxide layer onto top of the insulating layer and patterning the sacrificial oxide layer;
1.3. depositing a second insulating layer and performing back etching;
1.4. depositing a second sacrificial oxide layer onto top of the first sacrificial oxide layer and patterning the second sacrificial oxide layer;
1.5. depositing and patterning a third insulating layer;
1.6. depositing and patterning a third sacrificial oxide layer;
1.7. depositing and patterning a fourth insulating layer;
1.8. depositing and patterning fourth sacrificial oxide layer;
1.9. depositing and patterning a fifth insulating layer;
1.10. performing sacrificial release of the first, second, third and fourth sacrificial oxide layers.
Also disclosed herein, an apparatus for mixing at least two fluids substantially homogenously, the apparatus includes:
1.1. at least one fluid entry point;
1.2. at least one mixing chamber wherein the at least one mixing chamber houses a rotary gear wherein the rotary gear includes:
1.2.1. a shaft wherein the shaft rotates about a longitudinal centerline axis of the shaft;
1.2.2. a rotor attached to the shaft;
1.2.3. plurality of teeth attached to the rotor;
1.2.4. plurality of pillar attached to the plurality of teeth;
1.3. at least one fluid exit point; wherein at least two fluids flow through the designated fluid entry point to the designated mixing chamber and flows to the rotary gear included in the designated mixing chamber; wherein a force provided by the at least two moving fluids rotates the rotary gear;
wherein the plurality of pillar attached to the plurality of teeth breaks the streamlines of the at least two fluids and enhances the diffusion rate of the at least two fluids thus mixing the at least two fluids; wherein a substantially homogenously mixed fluid exits through the designated fluid exit point.
It is also disclosed herein, a method of mixing at least two fluids substantially homogenously by the apparatus mentioned above, the method including the steps of:
1.1. flowing of at least two fluids to the designated mixing chamber through the fluid entry point;
1.2. flowing of at least two fluids to the rotary gear provided in the designated mixing chamber;
1.3. rotating plurality of teeth and plurality of pillar attached to the plurality of teeth in circular motion by the force provided by the at least two moving fluids;
1.4. rotating the shaft and the rotor provided in the rotary gear in circular motion;
1.5. breaking the streamlines and enhancing the diffusion rate of the at least two fluids by the plurality of pillar attached to the plurality of teeth;
1.6. flowing of a substantially homogenously mixed fluid through the designated fluid exit point.
Also disclosed herein is a method of fabricating the apparatus as mentioned above, the method including the steps of:
1.1. depositing a first insulating layer onto top side of a substrate;
1.2. depositing a first sacrificial oxide layer onto top of the insulating layer and patterning the sacrificial oxide layer;
1.3. depositing a second insulating layer and performing back etching;
1.4. depositing a second sacrificial oxide layer onto top of the first sacrificial oxide layer and patterning the second sacrificial oxide layer;
1.5. depositing and patterning a third insulating layer;
1.6. depositing and patterning a third sacrificial oxide layer;
1.7. depositing and patterning a fourth insulating layer;
1.8. depositing and patterning fourth sacrificial oxide layer;
1.9. depositing and patterning a fifth insulating layer;
1.10. performing sacrificial release of the first, second, third and fourth sacrificial oxide layers. BRIEF DESCRIPTION OF THE DRAWINGS
Figure 1 illustrates the top view of a preferred embodiment of the invention.
Figure 2 illustrates the A-A cross sectional view of a preferred embodiment of the invention.
Figure 3 (a) through (j) show stages in fabrication process of a preferred embodiment of the invention.
Figure 4 (a) through (d) illustrates different configurations of plurality of teeth of a rotary gear.
DETAILED DESCRIPTION OF THE INVENTION
The invention and its various embodiments are better understood by reading the description along with the accompanying drawings which appear herein for purpose of illustration only and do not limit the invention in any way.
Figure 1 illustrates the top view of an embodiment of the invention. The invention includes a fluid entry point (100) wherein at least two fluids flow to a rotary gear (107). Rotary gear (107) is inclusive of a shaft (104) which is capable of rotating about a longitudinally extending, centerline axis of the shaft (104). The rotary gear (107) also includes a rotor (110) that is fixedly connected and aligned to the shaft (104). When the shaft (104) rotates about its centreline axis, the rotor (110) also rotates about the shaft's (104) centreline axis. The rotary gear (107) also includes plurality of teeth (102) attached to the rotor (1 10) and plurality of pillar (103) attached to the plurality of teeth (102). The rotary gear (107) is placed in mixing chamber (105) wherein mixing process is performed. Fluid exits through the fluid exit point (101) after mixing process is done at the mixing chamber (105).
Figure 2 illustrates the A-A cross sectional view of a preferred embodiment of the invention. At least two fluids flow simultaneously through the fluid entry point (100). The at least two fluids flow to the mixing chamber (105) through a microfluidic channel (202). The mixing chamber (105) houses the rotary gear (107). Rotary gear (107) is inclusive of the shaft (104), a rotor (1 10), plurality of teeth (102) and plurality of pillar (103) attached to the teeth (102). The at least two fluids comes in contact with the rotary gear (107) and the force provided by the at least two moving fluids causes the rotary gear (107) to move in a rotating motion. The movement creates a swirling force thus disturbing the flow of the at least two fluids. The swirling force may be clockwise or counter clockwise in direction. A chaotic and high turbulence stream of fluid flow is generated and the mixing of the at least two fluids is performed through diffusion. The plurality of pillar (103) attached to the teeth (102) breaks the streamlines of the at least two fluids and also enhances the diffusion rate of the at least two fluids during the mixing process. Once the mixing process is completed, a mixed fluid will flow through a microfluidic channel (204) and exits the microfluidic channel (204) through fluid exit point (101 ).
Referring to Figure 3 (a) through (j), there is shown stages in the fabrication process of a preferred embodiment of the invention, including the steps of: a) depositing a first insulating layer (700) onto top side of a substrate (40);
b) depositing a first sacrificial oxide layer (701 ) onto top of the insulating layer (700) and patterning the sacrificial oxide layer (701 );
c) depositing a second insulating layer (703) and performing back etching; Back etching is performed to planarize the layer;
d) depositing a second sacrificial oxide layer (704) onto top of the first sacrificial oxide layer (701) and patterning the second sacrificial oxide layer (704);
e) depositing and patterning a third insulating layer (705);
f) depositing and patterning a third sacrificial oxide layer (706);
g) depositing and patterning a fourth insulating layer (707);
h) depositing and patterning fourth sacrificial oxide layer (708);
i) depositing and patterning a fifth insulating layer (709);
j) performing sacrificial release of the first, second, third and fourth sacrificial oxide layers (701 , 704, 706, 708).
The insulating layers (700, 703, 705, 707, 709) are made of silicon nitride (Si3Ni4) or polymide. The insulating layers (700, 703, 705, 707, 709) can also be made of other alternative compounds that are of insulator material and able to withstand or etches very slowly in hydrofluoric acid. The substrate (40) is a silicon or glass or quartz substrate. The sacrificial oxide layers (701 , 704, 706, 708) are made of phosphosilicate glass (PSG). These sacrificial oxide layers (701 , 704, 706, 708) can also be made of silicon dioxide, spin on glass (SOG) and Tetraethly-orthosilicate (TEOS).
Figure 4 (a)-(d) illustrates different configuration of the plurality of teeth (102) of the rotary gear (107) with different arrangements of the plurality of pillar (103) attached to the teeth (102). Figure 4 (a) illustrates serpentine configuration of the teeth (102). Figure 4 (a) illustrates zig-zag configuration of the teeth (102). Curved zig-zag configuration of the teeth (102) is illustrated in Figure 4 (c) and Figure 4 (d) illustrates slanted configuration of the teeth (102).
While several particularly preferred embodiments of the present invention have been described and illustrated, it should now be apparent to those skilled in the art that various changes and modifications can be made without departing from the spirit and scope of the invention. Accordingly, the following claims are intended to embrace such changes, modifications, and areas of application that are within the spirit and scope of this invention.

Claims

1. An apparatus (109) for mixing at least two fluids substantially homogenously, the apparatus (109) includes:
1.1. a fluid entry point (100);
1.2. a mixing chamber (105) housing a rotary gear (107) wherein the rotary gear (107) includes:
1.2.1. a shaft (104) wherein the shaft (104) rotates about a longitudinal centerline axis of the shaft (104);
1.2.2. a rotor (110) attached to the shaft (104);
1.2.3. plurality of teeth (102) attached to the rotor (1 10);
1.2.4. plurality of pillar (103) attached to the plurality of teeth (102);
1.3. a fluid exit point (101); wherein the at least two fluids flow simultaneously through the fluid entry point (100) to the rotary gear (107) provided in the mixing chamber (105);
wherein a force provided by the at least two moving fluids rotates the rotary gear (107); wherein the plurality of pillar (103) attached to the plurality of teeth (102) breaks the streamlines of the at least two fluids and enhances the diffusion rate of the at least two fluids thus mixing the at least two fluids;
wherein a mixed fluid exits through the fluid exit point (101 ).
2. A method of mixing at least two fluids substantially homogenously by the apparatus (109) as claimed in claim 1 , the method including the steps of:
2.1. flowing of at least two fluids to the mixing chamber (105) through the fluid entry point (100);
2.2. flowing of at least two fluids to the rotary gear (107);
2.3. rotating the plurality of teeth (102) and the plurality of pillar (103) attached to the plurality of teeth (102) in circular motion by the force provided by the at least two moving fluids;
2.4. rotating the shaft (104) and the rotor (1 10) provided in the rotary gear (107) in circular motion;
2.5. breaking the streamlines and enhancing the diffusion rate of the at least two fluids by the plurality of pillar (103) attached to the plurality of teeth (102);
2.6. flowing of a substantially homogenously mixed fluid through the fluid exit point (101 ).
3. A method of fabricating an apparatus (109) as claimed in claim 1 , the method including the steps of:
3.1. depositing a first insulating layer (700) onto top side of a substrate (40);
3.2. depositing a first sacrificial oxide layer (701 ) onto top of the insulating layer (700) and patterning the sacrificial oxide layer (701 );
3.3. depositing a second insulating layer (703) and performing back etching;
3.4. depositing a second sacrificial oxide layer (704) onto top of the first sacrificial oxide layer (701 ) and patterning the second sacrificial oxide layer (704);
3.5. depositing and patterning a third insulating layer (705);
3.6. depositing and patterning a third sacrificial oxide layer (706);
3.7. depositing and patterning a fourth insulating layer (707);
3.8. depositing and patterning fourth sacrificial oxide layer (708);
3.9. depositing and patterning a fifth insulating layer (709);
3.10. performing sacrificial release of the first, second, third and fourth sacrificial oxide layers (701 , 704, 706, 708). 4. An apparatus (109) for mixing at least two fluids substantially homogenously, the apparatus (109) includes:
4.1. at least one fluid entry point (100);
4.2. at least one mixing chamber (105) wherein the at least one mixing chamber (105) houses a rotary gear (107) wherein the rotary gear (107) includes:
4.2.1. a shaft (104) wherein the shaft (104) rotates about a longitudinal centerline axis of the shaft (104);
4.2.2. a rotor (110) attached to the shaft (104);
4.2.3. plurality of teeth (102) attached to the rotor (110);
4.2.4. plurality of pillar (103) attached to the plurality of teeth (102);
4.3. at least one fluid exit point (101); wherein at least two fluids flow through the designated fluid entry point (100) to the designated mixing chamber (105) and flows to the rotary gear (107) included in the designated mixing chamber (105); wherein a force provided by the at least two moving fluids rotates the rotary gear (107); wherein the plurality of pillar (103) attached to the plurality of teeth (102) breaks the streamlines of the at least two fluids and enhances the diffusion rate of the at least two fluids thus mixing the at least two fluids;
wherein a substantially homogenously mixed fluid exits through the designated fluid exit point (101 ).
5. A method of mixing at least two fluids substantially homogenously by the apparatus (109) as claimed in claim 4, the method including the steps of:
5.1. flowing of at least two fluids to the designated mixing chamber (105) through the fluid entry point (100);
5.2. flowing of at least two fluids to the rotary gear (107) provided in the designated mixing chamber (105);
5.3. rotating plurality of teeth (102) and plurality of pillar (103) attached to the plurality of teeth (102) in circular motion by the force provided by the at least two moving fluids;
5.4. rotating the shaft (104) and the rotor (1 10) provided in the rotary gear (107) in circular motion;
5.5. breaking the streamlines and enhancing the diffusion rate of the at least two fluids by the plurality of pillar (103) attached to the plurality of teeth (102);
5.6. flowing of a substantially homogenously mixed fluid through the designated fluid exit point (101).
6. A method of fabricating an apparatus as claimed in claim 5, the method including the steps of:
6.1. depositing a first insulating layer (700) onto top side of a substrate (40);
6.2. depositing a first sacrificial oxide layer (701 ) onto top of the insulating layer (700) and patterning the sacrificial oxide layer (701 );
6.3. depositing a second insulating layer (703) and performing back etching;
6.4. depositing a second sacrificial oxide layer (704) onto top of the first sacrificial oxide layer (701 ) and patterning the second sacrificial oxide layer (704);
6.5. depositing and patterning a third insulating layer (705);
6.6. depositing and patterning a third sacrificial oxide layer (706);
6.7. depositing and patterning a fourth insulating layer (707);
6.8. depositing and patterning fourth sacrificial oxide layer (708);
6.9. depositing and patterning a fifth insulating layer (709);
6.10. performing sacrificial release of the first, second, third and fourth sacrificial oxide layers (701 , 704, 706, 708).
The method as claimed in claim 3 and claim 6 wherein the substrate (40) is a silicon or glass or quartz substrate.
The method as claimed in claim 3 and claim 6 wherein the first, second, third, fourth and fifth insulation layers (700, 703, 705, 707, 709) are silicon nitride (Si3Ni4) or polymide layers.
The method as claimed in claim 3 and claim 6 wherein the first, second, third and fourth sacrificial oxide layers (701 , 704, 706, 708) are phosphosilicate glass (PSG) layers or silicon dioxide or spin on glass (SOG) or Tetraethly-orthosilicate (TEOS) layers.
PCT/MY2012/000029 2011-02-23 2012-02-20 An apparatus for mixing fluids, a method of mixing the fluids using the apparatus and a method of fabricating the apparatus Ceased WO2012115503A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
MYPI2011000817 2011-02-23
MYPI2011000817A MY161928A (en) 2011-02-23 2011-02-23 An apparatus for mixing fluids, a method of mixing the fluids using the apparatus and a method of fabricating the apparatus

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9394160B2 (en) 2013-04-12 2016-07-19 Stmicroelectronics S.R.L. Microfluidic device with integrated stirring structure and manufacturing method thereof
CN106861501A (en) * 2017-03-20 2017-06-20 无锡科技职业学院 A kind of high-shear emulsifying dissolves mixing kettle
CN113877645A (en) * 2021-10-29 2022-01-04 深圳迈瑞动物医疗科技有限公司 Micro-fluidic chip
CN114451391A (en) * 2022-03-11 2022-05-10 江苏连万村农业科技有限公司 Automatic monitoring and identifying device for crop diseases and insect pests

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US4814376A (en) * 1986-11-13 1989-03-21 Shin-Etsu Chemical Co., Ltd. Process for preparing organopolysiloxane emulsion
US6105822A (en) * 1999-09-08 2000-08-22 Liquid Control Corporation Device and method for mixing and dispensing two flowable materials
US20040124296A1 (en) * 2002-12-31 2004-07-01 Precision Machinery Wet grinding and dispersion apparatus
US20050237854A1 (en) * 2002-06-07 2005-10-27 Christophe Navarro Method for continuously and dynamically mixing at least two fluids, and micromixer

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US4814376A (en) * 1986-11-13 1989-03-21 Shin-Etsu Chemical Co., Ltd. Process for preparing organopolysiloxane emulsion
US6105822A (en) * 1999-09-08 2000-08-22 Liquid Control Corporation Device and method for mixing and dispensing two flowable materials
US20050237854A1 (en) * 2002-06-07 2005-10-27 Christophe Navarro Method for continuously and dynamically mixing at least two fluids, and micromixer
US20040124296A1 (en) * 2002-12-31 2004-07-01 Precision Machinery Wet grinding and dispersion apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9394160B2 (en) 2013-04-12 2016-07-19 Stmicroelectronics S.R.L. Microfluidic device with integrated stirring structure and manufacturing method thereof
US9527726B2 (en) 2013-04-12 2016-12-27 Stmicroelectronics S.R.L. Microfluidic device with integrated stirring structure and manufacturing method thereof
CN106861501A (en) * 2017-03-20 2017-06-20 无锡科技职业学院 A kind of high-shear emulsifying dissolves mixing kettle
CN113877645A (en) * 2021-10-29 2022-01-04 深圳迈瑞动物医疗科技有限公司 Micro-fluidic chip
CN114451391A (en) * 2022-03-11 2022-05-10 江苏连万村农业科技有限公司 Automatic monitoring and identifying device for crop diseases and insect pests

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