WO2012115149A1

WO2012115149A1 - Signal processing device and laser measurement device

Info

Publication number: WO2012115149A1
Application number: PCT/JP2012/054276
Authority: WO
Inventors: 明生近藤; 小林　靖之; 義直高桑; 建二茂木
Original assignee: 三菱重工業株式会社; 株式会社ローラン
Priority date: 2011-02-25
Filing date: 2012-02-22
Publication date: 2012-08-30
Also published as: JP2012177612A

Abstract

A signal processing device and a laser measurement device that include a filter processing unit and a spectroscopic signal extraction unit. The filter processing unit has: a signal supply unit that supplies a digital signal including a set frequency component; a digital filter that extracts the set frequency component from the signal supply unit and is capable of changing filter characteristics; a D/A converter that converts a signal processed by the digital filter; a subtraction processing unit that subtracts the signal output by the D/A converter from a light reception signal and subtracts the set frequency component from the light reception signal; an A/D converter that converts the signal output by the subtraction processing unit and outputs the converted signal to the spectroscopic signal extraction unit; and a parameter adjustment unit that obtains the signal output from the A/D converter to the spectroscopic signal extraction unit and adjusts the parameters for the digital filter in a prescribed time response on the basis of the set frequency component included in said signal.

Description

Signal processing apparatus and laser measuring apparatus

The present invention relates to a signal processing device and a laser measuring device used for laser measurement for calculating a physical quantity of a gas to be measured by laser absorption spectroscopy.

There is a method of using laser light as measurement light as a method of analyzing gas (gas) flowing in the pipe. For example, Patent Document 1 discloses a laser that oscillates a laser beam that is modulated by a current having a first alternating current component superimposed on a constant current and changes in wavelength according to temperature, and a laser beam that has passed through a detection atmosphere. Current voltage converter (light intensity voltage converter) for converting intensity into voltage, two phase sensitive detectors for phase sensitive detection of the output voltage of the current voltage converter, and 1 obtained from one phase sensitive detector There is described a gas detection device that detects the concentration of a detection atmosphere based on a next phase sensitive detection signal and a secondary phase sensitive detection signal obtained from the other phase sensitive detector.

Patent Document 2 discloses a laser element that emits laser light, a frequency modulation unit that modulates the frequency of the laser light with a fundamental wave, a light detection unit that detects the frequency-modulated laser light, and a light detection unit. A fundamental wave component detection unit that detects a fundamental wave component from the detected laser beam, a second harmonic component detection unit that detects a second harmonic component from the laser beam detected by the light detection unit, and a light detection unit A gas concentration measuring device having a gas concentration calculating unit that calculates the concentration of a measurement target gas based on an amplitude ratio between a detected fundamental wave component and a second harmonic component is described. The gas concentration measuring apparatus is based on an amplitude ratio calculation unit that calculates an amplitude ratio between a fundamental wave component and a second harmonic component detected from laser light, and an amplitude ratio between the fundamental wave component and the second harmonic component. The temperature setting unit for setting the temperature of the laser element, and the amplitude ratio between the fundamental wave component and the second harmonic wave component when the wavelength modulation is performed based on the wavelength shifted from the absorption peak wavelength. A drive current control unit that controls the drive current.

Japanese Patent No. 2796649 JP 2008-147557 A

As described in Patent Document 1 and Patent Document 2, by using the laser light output while performing wavelength modulation as the measurement light, and measuring the absorption of the laser light, the physical quantity such as the concentration of the measurement target substance is obtained. It can be measured. The gas concentration can be measured with high responsiveness by measuring the gas concentration using laser light.

The light receiving signal generated by the light receiving unit receiving the laser light includes various noises. Therefore, various signal processes are performed to remove noise from the received light signal and extract a necessary component (for example, a signal component corresponding to a modulation frequency for performing wavelength modulation). As this signal processing, there is a method of extracting a specific spectrum signal by performing lock-in processing and low-pass processing with a lock-in amplifier. However, since the signal to be detected has a small output against noise, when performing highly accurate detection, an FIR filter, a bandpass filter, etc. are provided before processing by the lock-in amplifier, The frequency component is extracted, that is, the frequency component other than the frequency component to be processed by the lock-in amplifier is reduced.

Here, in the process using the FIR filter or the band pass filter, there are cases where the noise cannot be sufficiently reduced, and it is necessary to perform many calculations in order to sufficiently reduce the noise.

The present invention has been made in view of the above, and an object of the present invention is to provide a signal processing device and a laser measurement device capable of detecting a desired signal component from a light reception signal with high accuracy.

In order to solve the above-described problems and achieve the object, the present invention includes a measurement cell including an incident part and an emission part, and a laser having a wavelength region including an absorption wavelength unique to a gas to be measured. A light emitting unit that modulates a wavelength with a modulation frequency and outputs the light, and enters the measurement cell; and receives the laser light that is incident from the incident unit, passes through the measurement cell, and is emitted from the emission unit. And a light receiving unit that outputs a received light amount as a light receiving signal, and is applied to a laser measuring device that calculates a physical quantity of a measurement target gas flowing through the measurement cell based on the light receiving signal, and the light receiving unit receives light A signal processing device that processes the received light signal and outputs a spectrum signal used to calculate a physical quantity of a gas to be measured flowing through the measurement cell, and outputs a set frequency that is greater than a specified frequency A filter processing unit for reducing, and a spectrum signal extractor for performing a spectrum signal extraction process on the signal processed by the filter processing unit and extracting the spectrum signal, wherein the filter processing unit is a component of the set frequency A signal supply unit that supplies a digital signal including a digital filter that can change a filter characteristic that extracts a component of the set frequency from the signal supply unit, and a signal that is processed by the digital filter is converted from digital to analog From the D / A converter, the subtraction processing unit that subtracts the signal output from the D / A converter from the light reception signal, and subtracts the frequency component set from the light reception signal, and the subtraction processing unit An A / D converter that converts the output signal from analog to digital and outputs the converted signal to the spectral signal extractor; A parameter adjusting unit that obtains a signal to be output from the A / D converter to the spectral signal extractor, and adjusts a parameter of the digital filter with a predetermined time response based on a component of the set frequency included in the signal; It is characterized by having.

Here, the signal supply unit is preferably a light reception signal A / D converter that converts the light reception signal from analog to digital and supplies the converted digital signal to the digital filter.

In addition, it is preferable that the signal supply unit is a signal generation unit that generates a digital signal including a set frequency component other than the designated frequency component.

The set frequency is preferably the modulation frequency.

The digital filter is preferably an FIR filter.

Further, it is preferable that the parameter adjusting unit processes the set frequency component included in the signal with an LMS algorithm and adjusts the parameter based on a processing result.

Further, a characteristic estimation unit that estimates a path characteristic from the light reception signal, and an initial parameter setting unit that calculates an initial parameter based on the path characteristic detected by the characteristic estimation unit, the parameter adjustment unit, It is preferable to adjust the parameters of the digital filter based on the initial parameters calculated by the initial parameter setting unit.

Further, it is preferable that the characteristic estimation unit estimates a path characteristic by processing a signal obtained by converting the received light signal into a digital signal.

Further, the specified frequency is preferably a frequency obtained by multiplying the modulation frequency by an integer.

In order to solve the above-described problems and achieve the object, the present invention is a laser measurement device, wherein the signal processing device according to any one of the above, a main pipe that can be connected to a flow path for fluid, and the main pipe A measuring cell including an incident part connected to and formed with a window part through which light can pass, an emission part connected to the main pipe and formed with a window part through which light can pass; A laser beam in a wavelength region including an absorption wavelength is output while modulating the wavelength at a modulation frequency, and a light emitting unit that is incident on the incident unit, incident from the incident unit, passes through the measurement cell, and is output from the output unit A light receiving unit that receives the laser beam and outputs the received light amount as a light reception signal, a physical quantity calculation unit that calculates a physical quantity of a measurement target gas flowing through the measurement cell based on the spectrum signal, A control unit for controlling the operation; Characterized in that it has.

The physical quantity calculated by the physical quantity calculator is preferably the concentration of the gas to be measured.

Further, it is preferable that the physical quantity calculation unit calculates the concentration of the substance to be measured based on the intensity of the laser beam output from the light emitting unit and the intensity of the laser beam received by the light receiving unit.

The signal processing device and the laser measuring device according to the present invention have an effect that a desired signal component can be detected from the received light signal with high accuracy.

FIG. 1 is a schematic diagram showing a schematic configuration of an embodiment of a laser measuring apparatus having a signal processing apparatus of the present invention. FIG. 2 is a block diagram illustrating a schematic configuration of a signal processing unit of the laser measurement apparatus illustrated in FIG. 1. FIG. 3 is a graph showing the output distribution of the received light signal. FIG. 4 is an explanatory diagram for explaining the processing of the signal processing unit. FIG. 5 is an explanatory diagram for explaining the processing of the signal processing unit. FIG. 6 is an explanatory diagram for explaining processing of the signal processing unit. FIG. 7 is an explanatory diagram for explaining the processing of the signal processing unit. FIG. 8 is an explanatory diagram for explaining the processing of the signal processing unit. FIG. 9 is an explanatory diagram for explaining processing of the signal processing unit.

Hereinafter, an embodiment of a signal processing device and a laser measurement device according to the present invention will be described in detail with reference to the drawings. In addition, this invention is not limited by this embodiment. Note that the laser measurement device can measure physical quantities (concentrations, quantities) of substances (gases, specific components) to be measured contained in fluids such as various gases (gases) flowing through the flow path. For example, the laser measuring device may be attached to a diesel engine and measure the concentration of nitrogen oxides, sulfide oxides, carbon monoxide, carbon dioxide, ammonia, etc. contained in the exhaust gas discharged from the diesel engine. The device for discharging (supplying) the substance (gas) to be measured is not limited to this, and can be used for various internal combustion engines such as a gasoline engine and a gas turbine. Examples of the device having an internal combustion engine include various devices such as vehicles, ships, and generators. Further, the laser measuring device can also measure the concentration of the substance to be measured contained in the exhaust gas discharged from combustion equipment such as a garbage incinerator and boiler. In the following embodiments, the case where the concentration of the measurement substance contained in the exhaust gas flowing through the pipe is measured will be described.

FIG. 1 is a schematic diagram showing a schematic configuration of an embodiment of a laser measuring device having a signal processing device of the present invention. As shown in FIG. 1, the laser measurement device 10 includes a measurement cell 12 and measurement means 14. Here, the laser measuring device 10 is provided between the pipe 6 and the pipe 8 through which the exhaust gas A flows. Further, the exhaust gas A is supplied from the upstream side of the pipe 6, passes through the pipe 6, the laser measuring device 10, and the pipe 8, and is discharged to the downstream side of the pipe 8. Note that an exhaust gas A generator (supply device) is disposed upstream of the pipe 6.

The measurement cell 12 basically has a main tube 20, an incident tube 22, and an exit tube 24. Further, the incident tube 22 is provided with a window 26, and the exit tube 24 is provided with a window 28. The main pipe 20 is a tubular tubular member, and has one end connected to the pipe 6 and the other end connected to the pipe 8. That is, the main pipe 20 is disposed at a position that becomes a part of the flow path through which the exhaust gas A flows. Thereby, the exhaust gas A flows in the order of the pipe 6, the main pipe 20, and the pipe 8. Further, the exhaust gas A flowing through the pipe 6 basically flows through the main pipe 20.

The incident tube 22 is a tubular member, and one end thereof is connected to the main tube 20. Further, in the main tube 20, the connection portion with the incident tube 22 is an opening having substantially the same shape as the opening (end opening) of the incident tube 22. That is, the incident tube 22 is connected to the main tube 20 in a state where air can flow. A window 26 is provided at the other end of the incident tube 22 and is sealed by the window 26. The window 26 is made of a light transmitting member such as transparent glass or resin. Thereby, the incident tube 22 is in a state where the end portion where the window 26 is provided is in a state where air is not circulated and light can pass therethrough.

As shown in FIG. 1, the incident tube 22 is connected to the area of the opening at the end on the window 26 side (that is, the opening closed by the window 26) and the end on the main tube 20 side (that is, connected to the main tube 20). The area of the opening) is substantially the same cylindrical shape. The shape of the incident tube 22 is not limited to a cylindrical shape, and may be any shape as long as it is a cylindrical shape that allows air and light to pass therethrough. For example, the cross section may be a square, a polygon, an ellipse, or an asymmetric curved surface. Moreover, the shape of the cross section of a cylindrical shape and the shape where a diameter changes with positions may be sufficient.

The exit tube 24 is a tubular member having substantially the same shape as the entrance tube 22, one end is connected to the main tube 20, and the other end of the exit tube 24 is provided with a window 28. The exit tube 24 is also in a state where air can flow through the main tube 20, and an end portion provided with the window 28 is in a state where air does not flow and light can pass therethrough. Further, the emission tube 24 is disposed at a position where the central axis is substantially the same as the central axis of the incident tube 22. That is, the entrance tube 22 and the exit tube 24 are disposed at positions facing the main tube 20.

The exit tube 24 also has an area of an opening at the end on the window 28 side (that is, an opening closed by the window 28) and an end portion on the main tube 20 side (that is, a portion connected to the main tube 20). The area of the opening) is substantially the same cylindrical shape. The shape of the emission tube 24 is not limited to a cylindrical shape, and may be any shape as long as it has a cylindrical shape that allows air and light to pass therethrough. For example, the cross section may be a square, a polygon, an ellipse, or an asymmetric curved surface. Moreover, the shape of the cross section of a cylindrical shape and the shape from which a diameter changes with positions may be sufficient. In addition, it is preferable that the emission tube 24 also has a shape in which a purge gas described later flows stably.

Next, the measuring unit 14 includes a light emitting unit 40, an optical fiber 42, a light receiving unit 44, a light source driver 46, a signal processing unit (signal processing device) 47, a physical quantity calculating unit 48, a control unit 50, Have In the present embodiment, the signal processing unit 47 and the physical quantity calculation unit 48 are provided separately, but may be provided integrally (as one processing unit). In addition, the light source driver 46, the signal processing unit 47, the physical quantity calculation unit 48, and the control unit 50 may be provided integrally (as one processing unit).

The light emitting unit 40 includes a light emitting element that outputs (emits) laser light having a predetermined wavelength. The light emitting element of the light emitting unit 40 is a light emitting element that can change the output wavelength (frequency) of the laser beam to be output with a predetermined wavelength width (frequency width). As the light emitting element, a tunable semiconductor laser element (LD: Laser Diode) can be used. The light emitting unit 40 outputs laser light in a wavelength region including a near infrared wavelength region that is absorbed by the substance to be measured. For example, when the measurement target is nitric oxide, the light emitting unit 40 outputs laser light in a wavelength range including a near infrared wavelength range that absorbs nitric oxide. When the measurement target is nitrogen dioxide, the light emitting unit 40 outputs laser light in a wavelength region including a near infrared wavelength region that absorbs nitrogen dioxide. When the measurement target is nitrous oxide, the light emitting unit 40 outputs laser light in a wavelength range including a near-infrared wavelength range that absorbs nitrous oxide. When the measurement target is a plurality of substances, the light emitting unit 40 may include a plurality of light emitting elements that emit light in the wavelength ranges absorbed by the respective substances, and output light in the respective wavelength ranges. . The optical fiber 42 guides the laser light output from the light emitting unit 40 and causes the laser light to enter the measurement cell 12 through the window 26.

The light receiving unit 44 is a light receiving unit that receives the laser beam that has passed through the main tube 20 of the measurement cell 12 and that has been output from the window 28 of the emission tube 24. The light receiving unit 44 includes, for example, a photodetector such as a photodiode (PD), receives the laser beam by the photodetector, and detects the intensity of the light. The light receiving unit 44 sends the intensity (light quantity) of the received laser beam as a light reception signal to the signal processing unit 47.

The light source driver 46 has a function of driving the light emitting unit 40 and adjusts the wavelength and intensity of the laser light output from the light emitting unit 40 by adjusting the current and voltage supplied to the light emitting unit 40. The light source driver 46 is an oscillator, and outputs laser light whose wavelength changes with time by supplying current and voltage to the light emitting unit 40 in a predetermined waveform. The light source driver 46 of the present embodiment oscillates the wavelength of the laser beam at a set modulation frequency (for example, 100 kHz, 150 kHz), and the laser beam at a sweep frequency (0.1 kHz, 1 kHz) that is lower than the modulation frequency. Sweep the wavelength. Note that the vibration width of the laser light wavelength based on the modulation frequency is smaller than the change width of the laser light wavelength based on the sweep frequency. Thereby, the laser beam output from the light emitting unit 40 becomes a laser beam in which the center of vibration oscillating at the modulation frequency changes based on the sweep frequency. The light source driver 46 outputs information on the intensity of the laser beam output from the light emitting unit 40 to the physical quantity calculating unit 48 via the control unit 50.

The signal processing unit 47 processes a signal (light reception signal) generated when the light receiving unit 44 receives laser light. Specifically, the signal processing unit 47 removes a noise component included in the light reception signal, and extracts a component of the laser light output from the light emitting unit 40 and reaching the light receiving unit 44. A signal generated by extraction is hereinafter referred to as a spectrum signal. The processing of the signal processing unit 47 will be described later.

The physical quantity calculation unit 48 calculates the concentration of the exhaust gas flowing through the measurement cell 12 based on the spectrum signal output from the signal processing unit 47. The physical quantity calculation unit 48 calculates the concentration of the substance to be measured based on the spectrum signal output from the signal processing unit 47 and the conditions under which the light source driver 46 is driven by the control unit 50. Specifically, the physical quantity calculation unit 48 calculates the intensity of the laser light output from the light emitting unit 40 based on the condition that the light source driver 46 is driven by the control unit 50, and is generated by the signal processing unit 47. The intensity of the received laser beam is calculated based on the spectrum signal. The physical quantity calculator 48 compares the intensity of the emitted laser light with the intensity of the received laser light, and calculates the concentration of the substance to be measured contained in the exhaust gas A.

Specifically, the near-infrared wavelength laser beam L output from the light emitting unit 40 is a predetermined path from the optical fiber 42 to the measurement cell 12, specifically, the window 26, the incident tube 22, the main tube 20, After passing through the emission tube 24 and the window 28, the light reaches the light receiving unit 44. At this time, if the substance to be measured is contained in the exhaust gas A in the measurement cell 12, the laser light L passing through the measurement cell 12 is absorbed. Therefore, the output of the laser beam L reaching the light receiving unit 44 varies depending on the concentration of the substance to be measured in the exhaust gas A. The light receiving unit 44 converts the received laser light into a light reception signal. The received light signal generated by the light receiving unit 44 is processed by the signal processing unit 47 and input to the physical quantity calculation unit 48 as a spectrum signal. In addition, the control unit 50 and the light source driver 46 output the intensity of the laser light L output from the light emitting unit 40 to the physical quantity calculation unit 48. The physical quantity calculation unit 48 compares the intensity of the light output from the light emitting unit 40 with the intensity calculated from the spectrum signal, and calculates the concentration of the measurement target substance of the exhaust gas A flowing in the measurement cell 12 from the decrease rate. To do. In this way, the measuring means 14 uses the so-called TDLAS method (Tunable Diode Laser Absorption Spectroscopy) based on the intensity of the output laser light and the received light signal detected by the light receiving unit 44. The concentration of the substance to be measured in the exhaust gas A passing through the predetermined position in the main pipe 20, that is, the measurement position, can be calculated and / or measured. Moreover, the measurement means 14 can calculate and / or measure the concentration of the substance to be measured continuously. The laser measuring device 10 may calculate the concentration of the substance to be measured included in the exhaust gas A based on only the spectrum signal, with the intensity of the laser light output from the light emitting unit 40 being constant.

The control unit 50 has a control function for controlling the operation of each unit, and controls the operation of each unit as necessary. The control unit 50 controls not only the control of the measuring means 14 but also the overall operation of the laser measuring device 10. That is, the control unit 50 is a control unit that controls the operation of the laser measurement apparatus 10.

Next, the configuration of the signal processing unit 47 of the laser measurement apparatus 10 will be described, and the processing of the received light signal by the signal processing unit 47 will be described. Here, FIG. 2 is a block diagram showing a schematic configuration of a signal processing unit of the laser measuring apparatus shown in FIG. As shown in FIG. 2, the signal processing unit 47 processes the light reception signal sent from the light receiving unit 44 to generate a spectrum signal, and sends the generated spectrum signal to the physical quantity calculation unit 48. The signal processing unit 47 is a filter processing unit 62 that reduces the output of a set frequency that is larger than the specified frequency, and a spectrum signal that extracts a spectrum signal by performing a spectrum signal extraction process on the signal processed by the filter processing unit 62 And an extractor 64. Here, the designated frequency is a frequency to be extracted by the spectrum signal extractor 64 and includes a component of an absorption spectrum that is a detection target. As the designated frequency, a frequency that is an integer multiple of twice or more the modulation frequency is used. The set frequency is a frequency whose output is larger than the specified frequency among the frequency components included in the received light signal. That is, the set frequency is a frequency component (interference wave) whose output is larger than the specified frequency when the received light signal is Fourier-transformed. Here, the set frequency includes a modulation frequency.

The filter processing unit 62 includes an A / D converter 70, an FIR filter 72, a D / A converter 74,

coil couplings

76 and 78, a subtraction processing unit 80, an amplifier 82, and an A / D converter. 84, a path characteristic estimation unit 86, an initial parameter setting unit 88, and a parameter adjustment unit 90. The light receiving signal input from the light receiving unit 44 to the filter processing unit 62 is input to the branched A / D converter 70 and the coil coupling 76. Further, the reception signal input to the coil coupling 76 passes through the coil coupling 76 and is input to the subtraction processing unit 80.

The A / D (analog-digital) converter 70 is a converter that converts an analog signal into a digital signal, and converts a received signal from an analog signal into a digital signal. The A / D converter 70 sends (that is, outputs) the converted signal to the FIR filter 72 and the path characteristic estimation unit 86.

The FIR (Finite Impulse Response) filter 72 is a digital filter that selectively passes predetermined frequency components and removes and reduces frequency components other than the predetermined frequency. The FIR filter 72 is a filter capable of changing parameters (filter coefficients and the like). The FIR filter 72 sends the processed signal to the D / A converter 74.

The D / A (digital analog) converter 74 is a converter that converts a digital signal into an analog signal, and converts the signal sent from the FIR filter 72 from a digital signal into an analog signal. The D / A converter 74 sends the converted signal to the coil coupling 78.

The

coil couplings

76 and 78 are devices that match the circuit constants of the subtraction processing unit 80 and the input unit, and are arranged in a matching unit between the subtraction processing unit 80 and other components. The coil coupling 76 is composed of a pair of coils, one coil is connected to the light receiving unit 44, and the other coil is connected to the subtraction processing unit 80. The coil coupling 76 has a pair of coils facing each other, transmits a signal sent from the light receiving unit 44 from one coil to the other coil, and sends the signal to the subtraction processing unit 80. The coil coupling 78 is constituted by a pair of coils, one coil is connected to the D / A converter 74 and the other coil is connected to the subtraction processing unit 80. The coil coupling 78 has a pair of coils facing each other, transmits a signal sent from the D / A converter 74 from one coil to the other coil, and sends it to the subtraction processing unit 80. The

coil couplings

76 and 78 can suppress thermal noise generated in the matching portion by transmitting a signal through a pair of coils.

The subtraction processing unit 80 receives a predetermined signal from a light reception signal sent from the light receiving unit 44 and passed through the coil coupling 76, and a signal sent from the D / A converter 74 and passed through the coil coupling 78, that is, a light reception signal. Are selectively passed through, the frequency components other than the predetermined frequency are removed, and the reduced components are subtracted. Thereby, the subtraction processing unit 80 removes and reduces a predetermined frequency component from the received light signal by the subtraction processing. The subtraction processing unit 80 removes a predetermined frequency component from the received light signal and sends the reduced signal to the amplifier 82.

The amplifier 82 amplifies the signal (a signal obtained by removing and reducing a predetermined frequency component from the light reception signal) sent from the subtraction processing unit 80. The amplifier 82 sends the amplified signal to the A / D converter 84.

The A / D converter 84 is a converter that converts an analog signal into a digital signal, and converts the signal amplified by the amplifier 82 from an analog signal into a digital signal. The A / D converter 84 sends the converted signal to the spectrum signal extractor 64 and the parameter adjustment unit 90.

The path characteristic estimation unit 86 processes a signal (a signal obtained by converting a light reception signal into a digital signal) sent from the A / D converter 70, performs system identification, and estimates the path characteristic from the round transfer control. The route characteristic estimation unit 86 sends the estimated route characteristic to the initial parameter setting unit 88.

The initial parameter setting unit 88 calculates an initial parameter of the FIR filter 72 based on the path characteristic estimated by the path characteristic estimation unit 86. The initial parameter setting unit 88 sends the calculated initial parameter to the parameter adjustment unit 90.

The parameter adjustment unit 90 adjusts the parameters (filter coefficients, etc.) of the FIR filter 72 based on the signal sent from the A / D converter 84 and the initial parameters sent from the initial parameter setting unit 88. Here, the parameter adjustment unit 90 of the present embodiment analyzes the signal sent from the A / D converter 84 using an LMS (Least Mean Squares) algorithm and updates (corrects) the parameters of the FIR filter 72. Specifically, the parameter adjustment unit 90 adjusts the parameters such that the set frequency component included in the signal transmitted from the A / D converter 84 is minimized. That is, the parameter adjustment unit 90 adjusts the parameters so that the output obtained by subtracting the signal processed by the FIR filter 72 from the received light signal is minimized. In this embodiment, the convergence coefficient μ of the LMS algorithm is set to 0.1 as a standard. Here, the signal processed by the FIR filter 72 is basically only the set frequency (most of the output is the output of the set frequency). Therefore, the parameter adjustment unit 90 performs processing for reducing the set frequency component included in the light reception signal by adjusting the parameter so that the output obtained by subtracting the signal processed by the FIR filter 72 from the light reception signal is minimized. It will be. In addition, the parameter adjustment unit 90 adjusts the parameters in consideration of the influence of signal processing in the spectrum signal extractor 64 by the initial parameters when updating the parameters. The LMS algorithm is an algorithm described in, for example, “Adaptive Signal Processing Algorithm” published by Yoji Iiguni in 2000. Further, the parameter adjustment unit 90 executes parameter update (correction) at a predetermined time response (time interval). The predetermined time response can be an arbitrary time response, and can be a set time response or a time response that changes according to conditions.

Next, the spectrum signal extractor 64 performs, for example, a lock-in process on the received light signal, which is processed by the filter processing unit 62 and has a reduced set frequency component, using the designated frequency as a reference frequency. As a result, a spectrum signal having a designated frequency is generated from the received light signal in which the set frequency component is reduced. The spectrum signal extractor 64 sends the detected spectrum signal to the physical quantity calculator 48. The signal processing unit 47 generates and / or extracts a spectrum signal from the received light signal as described above.

Hereinafter, the processing of the signal processing unit 47 will be described with reference to FIGS. Here, FIG. 3 is a graph showing the output distribution of the received light signal. FIG. 3 shows the relationship between the frequency of the received light signal and the voltage (intensity). In FIG. 3, the vertical axis represents voltage (intensity) [dBV], and the horizontal axis represents frequency [MHz]. 4 to 9 are explanatory diagrams for explaining the processing of the signal processing unit, respectively. 4 to 9 schematically show signal intensities at the respective positions. In each of FIGS. 4 to 9, the vertical axis is intensity, and the horizontal axis is time.

First, in the following example, a case will be described where the signal shown in FIG. 3 is used as the light reception signal and the set frequency is 100 kHz. The light reception signal shown in FIG. 3 is a light reception signal detected by the light receiving unit 44 when a laser beam having a modulation frequency of 100 kHz is output from the light emitting unit 40. The laser measuring apparatus 10 of this embodiment uses 200 kHz as the designated frequency. Here, in FIG. 3, the output of the set frequency 100 kHz is -10.93 dBV, and the output of the specified frequency 200 kHz is -53.16 dBV. Therefore, the output difference is −42.23 dBV.

The signal processing unit 47 receives a signal shown in FIG. 4 as a light reception signal (input signal). An output 101 of a designated frequency that is an output of a frequency to be measured and an output 102 other than the designated frequency that is a noise component are superimposed on the received light signal. The output 101 is an output having a smaller intensity than the output 102. This is because the output 102 includes an output of a set frequency that is dramatically higher in intensity than other frequency components. In FIG. 4, the output 101 and the output 102 are shown as separate waveforms for explanation, but the actual received light signal is an output obtained by adding the output 101 and the output 102. The received light signal is sent to the A / D converter 70 and the subtraction processing unit 80.

The FIR filter 72 processes the signal (digital light reception signal) digitally converted by the A / D converter 70 and extracts a set frequency component from the digital light reception signal. At this time, the filter characteristics of the FIR filter 72 are adjusted by the parameter adjustment unit 90. As a result, the FIR filter 72 extracts the set frequency component from the received light signal adjusted to the output corresponding to the set frequency component included in the received light signal processed by the subtraction processing unit 80. Here, the component of the set frequency extracted from the light reception signal by the FIR filter 72 is the output 104 shown in FIG. Here, the set frequency (100 kHz) of the present embodiment is a modulation frequency. Therefore, as shown in FIG. 3, the set frequency occupies most of the intensity ratio of the received light signal. For this reason, most of the noise components are output at the set frequency. For this reason, the output 102 in FIG. 4 and the output 104 obtained by extracting the component of the set frequency are substantially the same output.

Next, the subtraction processing unit 80 subtracts the signal of the output 104 generated by the FIR filter 72 from the light reception signal that is a signal in which the output 101 and the output 102 shown in FIG. 4 are superimposed. Thereby, the signal generated by the subtraction processing unit 80 is a signal obtained by subtracting the output 104 from the light reception signal. Thereby, as shown in FIG. 6, the signal generated by the subtraction processing unit 80 includes an output 101 of a designated frequency that is an output of a frequency to be measured and an output 106 of a frequency other than the designated frequency and the set frequency. Composed. The output 106 is a noise component. Here, the output 106 of the noise component has a small output because the component of the set frequency is removed or subtracted from the output 102, and the output difference from the output 101 is also small.

Next, the amplifier 82 amplifies the signal generated by the subtraction processing unit 80. As a result, the signal amplified by the amplifier 82 is, as shown in FIG. 7, 101a obtained by amplifying the output 101 of the designated frequency and an output 106a obtained by amplifying the output 106 of a frequency other than the designated frequency and the set frequency. Composed. Since the amplifier 82 amplifies the output at a constant rate, the relationship between the output 101 and the output 106 and the relationship between the output 101a and the output 106a are similar.

Next, the spectrum signal extractor 64 uses, for example, a lock-in process, which is one method of spectrum extraction, for the signal amplified by the amplifier 82 and then converted into digital data. Specifically, as shown in FIG. 8, the signal composed of the output 101a and the output 106a is multiplied by the signal of the output 108. Here, the signal of the output 108 is an output of the reference frequency. The reference frequency is a frequency extracted by the lock-in process, and is a designated frequency in this embodiment. The spectrum signal extractor 64 performs a lock-in process as in this case, thereby generating a spectrum signal composed of an output 110 of a designated frequency as shown in FIG.

As described above, the signal processing unit 47 of the laser measurement device 10 generates a signal including the set frequency by the FIR filter 72 while adjusting the parameters of the FIR filter 72 by the parameter adjustment unit 90, and uses the generated signal as a light reception signal. By subtracting, noise can be efficiently removed or reduced from the received light signal. In addition, the signal processing unit 47 of the laser measuring device 10 can specify the set frequency to be processed and efficiently remove noise, so that the case where an existing filter (bandpass filter, parameter fixed FIR filter) is used is used. The configuration of the filter processing unit 62 can be simplified.

In addition, noise can be efficiently removed or reduced from the received light signal, and the difference between the output of the specified frequency component and the output of the noise component is reduced, so that the signal before noise extraction after noise removal can be further amplified. In addition, the output of the component of the designated frequency can be further amplified before the spectrum extraction. Here, the amplifier 82 sets the amplification ratio based on the signal size when the signal is amplified to a size applicable to the detection range of the spectrum signal extractor 64. Therefore, the difference between the output of the specified frequency component and the output of the noise component is reduced, so that the output of the specified frequency component is more than the case where the output of the noise component is a certain amount larger than the output of the specified frequency component. It can be greatly amplified. That is, even if the signal is amplified further, the output can be suppressed to a size applicable to the detection range of the spectrum signal extractor 64. Thereby, the output of the component of the designated frequency can be detected with higher accuracy.

Furthermore, since the noise can be suitably reduced, the output 101 of the designated frequency can be suitably detected even when the detection range of the spectrum signal extractor 64 is small. Thereby, the spectral signal extractor 64 can be made inexpensive while maintaining the performance, and the laser measuring device can also be made inexpensive.

Further, the filter processing unit 62 of the signal processing unit 47 uses the path characteristic estimation unit 86 and the initial parameter setting unit 88 to respond to a round-trip transmission control (specifically, a circuit on the input side from the spectrum signal extractor 64). By estimating the characteristic (the error characteristic of the circuit) with the LMS algorithm, it is possible not only to remove or reduce the noise component but also to obtain higher performance. Specifically, it is possible to grasp the state of the present system from the response characteristics (circuit error characteristics) and to improve the performance by performing automatic calibration and maintenance of the measuring instrument.

In addition, it is preferable that the parameter adjustment unit 90 adjusts the parameters using the LMS algorithm. By using the LMS algorithm, stable processing can be performed. The parameter adjustment unit 90 can also use an algorithm other than the LMS algorithm as an algorithm used for parameter adjustment. The parameter adjustment unit 90 can use various algorithms as algorithms for determining parameters by analyzing the signal output from the spectrum signal extractor 64. The algorithm (processing rule) may be any algorithm that sets parameters so that the set frequency component included in the signal output from the spectrum signal extractor 64 is reduced. The parameter adjustment unit 90 can also use an RLS (Recursive Least Square) method that solves the Yule-Walker equation indicating a minimum error state from a least squares method using simultaneous linear equations. When the RLS method is used, the response speed can be further improved although the stability is lower than when the LMS algorithm is used.

Also, as the set frequency, which is a frequency component for reducing the output by the FIR filter 72, it is preferable to use a modulation frequency as in this embodiment. Since the modulation frequency is a signal component included in the laser light, the signal component increases and often accounts for a large proportion of the output of the received light signal. For this reason, by reducing and removing the modulation frequency component by the filter processing unit 62, the component of the designated frequency can be further amplified, and the spectrum signal can be made a more accurate signal. Although the amount of noise reduction decreases, a frequency different from the modulation frequency can be used as the set frequency. In this case as well, unnecessary specific frequencies can be removed or reduced, and the component of the designated frequency can be detected more efficiently.

Also, as described above, the designated frequency can be various values that are integer multiples of the modulation frequency. Even when a frequency that is four times the modulation frequency is used as the designated frequency, a change in the absorption spectrum (detection target spectrum) included in the modulation frequency can be detected. If analysis is performed using a frequency that is four times the modulation frequency as the designated frequency, a fourth-order differential waveform of the spectrum is detected. By using a frequency other than twice the modulation frequency in this way, a change in the absorption spectrum (detection target spectrum) can be detected even when there is a noise component at a frequency twice the modulation frequency.

Here, as the filter for extracting the output of the set frequency, it is preferable to use the FIR filter 72 as in the present embodiment. By using the FIR filter, the set frequency component can be extracted with high accuracy. In addition to the FIR filter, various digital filters whose parameters can be changed can be used as a filter for extracting the output of the set frequency.

The FIR filter 72 processes the light reception signal to generate a signal having a set frequency component used for the subtraction processing, that is, the signal is set from the signal detected by the light receiving unit 44 and converted by the A / D converter 70. By adopting a configuration that generates a frequency component signal, it is possible to generate a signal including a set frequency component used for the subtraction process without increasing the device configuration. The signal input to the FIR filter 72 is not limited to the light reception signal, and a signal having a set frequency component is also possible. That is, as the signal supply unit that inputs a signal to the FIR filter 72, various mechanisms that can supply a signal having a set frequency component can be used. For example, a signal generation unit (oscillator) may be used.

6, 8 Piping 10 Laser measuring device 12 Measuring cell 14 Measuring means 20 Main tube 22 Incident tube 24

Emission tube

26, 28 Window 40 Light emitting unit 42 Optical fiber 44 Light receiving unit 46 Light source driver 47 Signal processing unit 48 Physical quantity calculating unit 50 Control unit 62 Filter processing unit 64 Spectral signal extractor 70, 84 A / D converter 72 FIR filter 74 D /

A converter

76, 78 Coil coupling 80 Subtraction processing unit 82 Amplifier 86 Path characteristic estimation unit 88 Initial parameter setting unit 90 Parameter adjustment Part

Claims

A measurement cell that includes an incident part and an emission part, and in which a fluid flows, and outputs laser light in a wavelength region that includes an absorption wavelength specific to the gas to be measured while modulating the wavelength with the modulation frequency, and enters the measurement cell A light emitting unit to be received, and a light receiving unit that is incident from the incident unit, passes through the measurement cell, receives the laser light emitted from the emitting unit, and outputs the received light amount as a light reception signal, Applied to a laser measuring device that calculates a physical quantity of a gas to be measured flowing through the measurement cell based on the received light signal,
A signal processing device that processes a light reception signal received by the light receiving unit and outputs a spectrum signal used to calculate a physical quantity of a gas to be measured flowing through the measurement cell;
A filter processing unit that reduces output of a set frequency whose output is greater than the specified frequency, and a spectrum signal extractor that performs spectrum signal extraction processing on the signal processed by the filter processing unit and extracts the spectrum signal. Including
The filter processing unit
A signal supply unit for supplying a digital signal including the component of the set frequency;
A digital filter capable of changing a filter characteristic for extracting a component of the set frequency from the signal supply unit;
A D / A converter for converting the signal processed by the digital filter from digital to analog;
A subtraction processing unit that subtracts a signal output from the D / A converter from the light reception signal and subtracts a frequency component set from the light reception signal;
An A / D converter that converts the signal output from the subtraction processing unit from analog to digital, and outputs the converted signal to the spectral signal extractor;
A parameter adjustment unit that obtains a signal to be output from the A / D converter to the spectral signal extractor, and adjusts a parameter of the digital filter with a predetermined time response based on a component of the set frequency included in the signal; And a signal processing device.
2. The signal according to claim 1, wherein the signal supply unit is a light reception signal A / D converter that converts the light reception signal from analog to digital and supplies the converted digital signal to the digital filter. Processing equipment.
2. The signal processing apparatus according to claim 1, wherein the signal supply unit is a signal generation unit that generates a digital signal including a component of a set frequency other than the designated frequency component.
4. The signal processing device according to claim 1, wherein the set frequency is the modulation frequency.
The signal processing apparatus according to any one of claims 1 to 4, wherein the digital filter is an FIR filter.
The said parameter adjustment part processes the component of the said setting frequency contained in the said signal with a LMS algorithm, and adjusts the said parameter based on a processing result, It is any one of Claim 1 to 5 characterized by the above-mentioned. Signal processing equipment.
A characteristic estimation unit for estimating a path characteristic from the received light signal;
An initial parameter setting unit that calculates an initial parameter based on the path characteristic detected by the characteristic estimation unit;
The signal processing apparatus according to claim 1, wherein the parameter adjustment unit adjusts a parameter of the digital filter based on an initial parameter calculated by the initial parameter setting unit.
The signal processing apparatus according to claim 7, wherein the characteristic estimation unit estimates a path characteristic by processing a signal obtained by converting the received light signal into a digital signal.
The signal processing apparatus according to any one of claims 1 to 8, wherein the designated frequency is a frequency obtained by multiplying the modulation frequency by an integer.
A signal processing device according to any one of claims 1 to 9,
A main pipe connectable to a flow path for fluid, an incident part connected to the main pipe and formed with a window part through which light can pass, an emission part connected to the main pipe and formed with a window part through which light can pass; A measuring cell including
A light emitting unit that outputs laser light in a wavelength region including an absorption wavelength unique to a gas to be measured while modulating the wavelength at a modulation frequency, and that is incident on the incident unit;
A light receiving portion that is incident from the incident portion, passes through the measurement cell, receives the laser light emitted from the emission portion, and outputs the received light amount as a light reception signal;
A physical quantity calculation unit that calculates a physical quantity of a gas to be measured flowing through the measurement cell based on the spectrum signal;
And a control unit that controls the operation of each unit.
The laser measurement apparatus according to claim 10, wherein the physical quantity calculated by the physical quantity calculation unit is a concentration of the measurement target gas.
The physical quantity calculation unit calculates the concentration of the gas to be measured based on the intensity of the laser beam output from the light emitting unit and the intensity of the laser beam received by the light receiving unit. 11. The laser measuring device according to 11.