WO2012077718A1

WO2012077718A1 - Glass welding device and glass welding method

Info

Publication number: WO2012077718A1
Application number: PCT/JP2011/078319
Authority: WO
Inventors: 敏光和久田; 松本　聡
Original assignee: 浜松ホトニクス株式会社
Priority date: 2010-12-08
Filing date: 2011-12-07
Publication date: 2012-06-14
Also published as: TW201228763A

Abstract

A glass welding device (11) is provided with: a support stage (12) for supporting glass members (4, 5); a laser head (13) for applying a laser beam (L) to a glass layer (3) between the glass members (4, 5); and a control unit (14). The glass layer (3) is disposed so as to lie along a line (10). The laser head (13) has: a cylindrical lens (17) for shaping the laser beam (L) so that the longitudinal direction of the application region (IR) of the laser beam (L) is aligned with a direction (D1); and a rotation stage (18) for rotating the lens (17). The control unit (14) controls the support stage (12) so that the application region (IR) moves along the line (10), and also controls the rotation stage (18) so that the direction (D1) coincides with the direction parallel to each of the rectilinear sections (10a, 10b) of the line (10) and also with the direction parallel to a line tangent to each of the curved line sections (10c) of the line (10).

Description

Glass welding apparatus and glass welding method

The present invention relates to a glass welding apparatus and a glass welding method for welding glass members together.

In a processing technique using laser light, a long shape may be adopted as the shape of the laser light irradiation region. For example, Patent Document 1 describes a technique for welding glass substrates together by irradiating a glass layer disposed between glass substrates with laser light and moving a linear irradiation region along the longitudinal direction thereof. Has been. Further, in Patent Document 2, a plate-like workpiece is irradiated with laser light, and an elongated elliptical irradiation region is positioned on the workpiece along a predetermined line. Techniques for bending workpieces are described.

JP 2009-104841 A International Publication No. 2004/050292

By the way, when glass members are welded along a predetermined line, if the line includes not only a straight line part but also a curved part, the moving speed of the laser light irradiation area along the line is slow at the curved part. Therefore, there is a possibility that damage such as cracks may occur in the glass layer or the glass member due to excessive heat input in the curved portion.

Further, in order to obtain a glass welded body in which glass members are welded along the planned welding region, a plurality of planned welding regions are set in a matrix between the stacked glass substrates, and glass is formed along each planned welding region. After the substrates are welded together, the glass substrate may be cut for each planned welding region. In such a case, if the area to be welded includes an intersecting portion where the extending portions intersect with each other, excessive heat input may occur at the intersecting portion, and damage such as cracks may occur in the glass layer or the glass substrate. There is.

Therefore, the present invention provides a glass welding apparatus capable of welding glass members along the line while preventing damage to the glass layer and the glass member even if the predetermined line includes a curved portion. And it aims at providing the glass welding method.

In addition, the present invention prevents the glass layer and the glass member from being damaged while the planned welding region includes an intersecting portion where the extending portions intersect with each other, and the glass member along the planned welding region. It aims at providing the glass welding apparatus and the glass welding method which can weld each other.

The glass welding apparatus of the 1st viewpoint of this invention is a glass welding apparatus which welds the 1st glass member and the 2nd glass member along a predetermined line, Comprising: A 1st glass member and a 2nd glass member A glass member support portion that supports the first glass member and the second glass member in a state in which a glass layer including a laser light absorbing material is disposed between the glass member and the glass member, and the glass member. A shaping optical system that shapes the laser beam so that the width in the first direction is larger than the width in the second direction perpendicular to the first direction in the glass layer on the support, and the laser beam With a rotary drive that rotates the shaping optical system around the optical axis of the laser, and a laser beam irradiation unit that irradiates the glass layer on the glass member support unit with a laser beam, and the irradiation area relatively moves along the line Glass member support The first direction coincides with the direction parallel to the straight line portion in the straight line portion of the line, and the first direction in the direction parallel to the tangent line of the curved portion. And a control unit that controls the rotary drive body so that the directions of the first and second directions coincide with each other.

In this glass welding apparatus, laser light shaped so as to be an elongated irradiation region by a shaping optical system is irradiated onto a glass layer disposed between glass members, and the irradiation region of the laser light is a predetermined line. Is moved relatively. At this time, the glass layer is arranged along the line. And, by a simple configuration in which the rotational driving body rotates the shaping optical system, the longitudinal direction of the irradiation region is made to coincide with the direction parallel to the straight line part in the straight line part of the line, and the tangent line of the curved part in the curved part of the line The longitudinal direction of the irradiation region is matched with the parallel direction. As a result, glass members are welded to each other while the temperature rise and fall of the glass layer is moderated not only in the linear part of the line but also in the curved part of the line, compared with the case where the irradiation region of the laser beam is spot-like. A sufficient amount of heat can be applied to the glass layer. Therefore, according to this glass welding apparatus, even if the predetermined line includes a curved portion, it is possible to weld the glass members along the line while preventing the glass layer and the glass member from being damaged. It becomes possible.

Here, the shaping optical system shapes the laser beam so that the width of the irradiation region in the first direction is 1.5 to 4 when the width of the irradiation region in the second direction is 1. Also good. According to this, it can prevent more reliably that damage arises in a glass layer or a glass member.

Further, the control unit is configured so that the width of the irradiation region in the first direction is constant between the straight portion and the curved portion, and the width of the irradiation region in the second direction is larger at the curved portion than the straight portion. You may control a light irradiation part. According to this, the light intensity per unit area of the irradiation region can be lowered in the curved portion as compared with the straight portion. Therefore, even if the speed of moving the irradiation region of the laser light relatively along the line is slower in the curved portion than in the straight portion, the curved portion becomes overheated and the glass layer or the glass member Damage can be prevented more reliably.

The glass welding method of the first aspect of the present invention is a glass welding method for manufacturing a glass welded body by welding a first glass member and a second glass member along a predetermined line, A first step of disposing a glass layer containing a laser light absorbing material along the line between the first glass member and the second glass member; irradiating the glass layer with laser light; A second step of welding the first glass member and the second glass member along the line by relatively moving the irradiation region along the line, and in the second step In the straight part of the line, the laser beam is shaped so that the width of the irradiation region in the direction parallel to the straight part is larger than the width of the irradiation region in the direction perpendicular to the straight part. Irradiation area in a direction parallel to the tangent line Width to shape the laser beam to be larger than the width of the irradiation region in a direction perpendicular to the tangent.

In this glass welding method, laser light is irradiated onto a glass layer disposed between glass members, and the irradiation region of the laser light is relatively moved along a predetermined line. At this time, the glass layer is arranged along the line. Then, the laser beam is shaped so as to be an elongated irradiation region whose longitudinal direction is parallel to the straight line portion in the straight line portion of the line, and in the curved line portion of the line, the direction parallel to the tangent line of the curved portion is set. The laser beam is shaped so as to be a long irradiation region in the longitudinal direction. Therefore, for the same reason as the glass welding apparatus described above, according to this glass welding method, even if the predetermined line includes a curved portion, the line is prevented while the glass layer and the glass member are prevented from being damaged. It becomes possible to weld glass members along.

The glass welding apparatus according to the second aspect of the present invention includes a first glass member and a second glass member along a planned welding region including a crossing portion where the first extending portion and the second extending portion intersect. A glass welding apparatus for welding a glass member, wherein the first glass substrate including a plurality of first glass members and a second glass substrate including a plurality of second glass members are parallel to each other. A plurality of first extensions along each of the plurality of first lines, and a plurality of second extensions on each of the plurality of second lines parallel to each other intersecting the first line. A glass substrate support unit that supports the first glass substrate and the second glass substrate in a state in which a glass layer including a laser light absorbing material is disposed along each of the plurality of welding planned regions set to be along And in the first direction on the glass layer on the glass substrate support. Has a shaping optical system that shapes the laser beam so that the width is larger than the width in the second direction perpendicular to the first direction, and irradiates the glass layer on the glass substrate support with the laser beam And controlling at least one of the glass substrate support unit and the laser beam irradiation unit so that the irradiation region relatively moves along each of the first line and the second line. The glass substrate support portion is arranged so that the first direction matches the direction parallel to the first line in the first line and the first direction matches the direction parallel to the second line in the second line. And a control unit that controls at least one of the laser beam irradiation unit.

In this glass welding apparatus, the laser light shaped so as to be an elongated irradiation region by the shaping optical system is irradiated to the glass layer disposed between the glass substrates, and the irradiation region of the laser light is the first region. And the second line are moved relative to each other. At this time, a plurality of planned welding areas are set so that the first extending part is along the first line and the second extending part is along the second line, and the glass is formed along each welding planned area. Layers are arranged. In the first line, the longitudinal direction of the irradiation region is made to coincide with the direction parallel to the first line, and in the second line, the longitudinal direction of the irradiation region is made to coincide with the direction parallel to the second line. Thereby, in each of the first line and the second line, the glass members are welded to each other while the temperature of the glass layer is moderately increased / decreased compared to the case where the laser light irradiation area is spot-like. A sufficient amount of heat can be applied to the glass layer. In addition, at the intersection where the extending portions intersect in the planned welding region, stress is likely to be concentrated at the time of laser light irradiation, but the generated stress can be relaxed for the following reason. In other words, the laser beam is irradiated twice at the intersection of the planned welding region. When the glass layer crystallizes at the first laser beam irradiation, for example, when the glass layer is crystallized at the intersection, the light absorption of the crystallized portion is performed. The rate drops. Therefore, at the intersection, the temperature of the glass layer is less likely to rise during the second laser light irradiation than during the first laser light irradiation. The stress relaxation process is important at the intersection, but when the temperature of the glass layer is difficult to rise, for example, if the laser light irradiation area is spot-like, the stress is relaxed at the second laser light irradiation. I don't have enough time to On the other hand, if the laser light irradiation area is long, the glass layer is heated even around the intersection (that is, the amount of heat applied increases), and stress is applied during the second laser light irradiation. Sufficient time can be taken to relax. As described above, according to this glass welding apparatus, even if the planned welding region includes an intersecting portion where the extending portions intersect with each other, it is possible to prevent the glass layer or the glass member from being damaged while the planned welding region. It becomes possible to weld glass members along.

In addition, a 1st extension part and a 2nd extension part are the parts arrange | positioned along each of two lines which cross | intersect among a welding planned area | region, and a crossing part is a welding plan. This is a portion of the region located on the intersection of the two lines. The first line and the second line include not only a straight line but also a curved line. When the first line and the second line are curved lines, the plurality of lines parallel to each other means that the interval between adjacent lines is substantially constant, and the direction parallel to the line means the line It means the direction parallel to the tangent line.

Here, the control unit controls at least one of the glass substrate support unit and the laser beam irradiation unit so that the irradiation region relatively moves along each of the first lines, and then the irradiation region is the second region. You may control at least one of a glass substrate support part and a laser beam irradiation part so that it may move relatively along each of these lines. According to this, since the number of times of changing the longitudinal direction of the irradiation region from the direction parallel to the first line to the direction parallel to the second line is only one, the tact time can be shortened.

In addition, the laser beam irradiation unit further includes a rotation driving body that rotates the shaping optical system around the optical axis of the laser beam, and the control unit includes a first line in a direction parallel to the first line in the first line. The rotation driving body may be controlled so that the first direction coincides with the direction parallel to the second line in the second line. According to this, the longitudinal direction of the irradiation region is made to coincide with each of the direction parallel to the first line and the direction parallel to the second line by a simple configuration in which the rotary driving body rotates the shaping optical system. Can do.

In addition, the control unit controlled at least one of the glass substrate support unit and the laser beam irradiation unit so that the moving speed of the irradiation region relatively along each of the first line and the second line increases. In this case, the laser beam irradiation unit may be controlled so that the ratio of the width of the irradiation region in the first direction with respect to the width of the irradiation region in the second direction is increased. According to this, it can suppress that the time which a laser beam irradiates with respect to the predetermined part of a glass layer can be shortened, and can give a glass layer sufficient calorie | heat amount for welding glass members. It becomes possible.

Moreover, the glass welding method of the 2nd viewpoint of this invention is a 1st glass member and 2nd along a welding plan area | region including the cross | intersection part which a 1st extension part and a 2nd extension part cross | intersect. A glass welding method for producing a glass welded body by welding two glass members, and a second glass member including a plurality of first glass members and a second glass member. A plurality of first extending portions extend along each of the plurality of first lines parallel to each other between the glass substrate and each of the plurality of second lines parallel to each other intersecting the first line. A first step of arranging a glass layer including a laser light absorbing material along each of a plurality of planned welding regions set so that a plurality of second extending portions are along, and irradiating the glass layer with laser light The laser light irradiation area is set on each of the first line and the second line. The second step of welding the first glass member and the second glass member along the planned welding region, and welding the first glass substrate and the second glass substrate. A third step of obtaining a plurality of glass weldments by cutting each predetermined region, and in the second step, the width of the irradiation region in the direction parallel to the first line is the first line. The laser light is shaped so as to be larger than the width of the irradiation region in the direction perpendicular to the first line, and in the second line, the width of the irradiation region in the direction parallel to the second line is the second line. The laser beam is shaped so as to be larger than the width of the irradiation region in the vertical direction.

In this glass welding method, a laser beam shaped so as to be an elongated irradiation region is irradiated onto a glass layer disposed between the glass substrates, and the irradiation region of the laser light includes the first line and the first line. Relatively moved along each of the two lines. At this time, a plurality of planned welding areas are set so that the first extending part is along the first line and the second extending part is along the second line, and the glass is formed along each welding planned area. Layers are arranged. In the first line, the longitudinal direction of the irradiation region is made to coincide with the direction parallel to the first line, and in the second line, the longitudinal direction of the irradiation region is made to coincide with the direction parallel to the second line. Therefore, for the same reason as the glass welding apparatus described above, according to this glass welding method, the glass layer and the glass member are damaged even if the planned welding region includes an intersection where the extending portions intersect each other. It is possible to weld the glass members along the planned welding region while preventing this.

According to the present invention, even if a predetermined line includes a curved portion, it is possible to weld glass members along the line while preventing damage to the glass layer and the glass member.

Further, according to the present invention, even if the planned welding region includes an intersection where the extending portions intersect, the glass layer and the glass member are prevented from being damaged, and along the planned welding region. Glass members can be welded together.

It is a perspective view of the glass welded body manufactured by the glass welding method of the 1st Embodiment of this invention. It is a perspective view of the glass welding apparatus of the 1st Embodiment of this invention. It is a perspective view for demonstrating the glass welding method of the 1st Embodiment of this invention. It is a perspective view for demonstrating the glass welding method of the 1st Embodiment of this invention. It is a perspective view for demonstrating the glass welding method of the 1st Embodiment of this invention. It is a top view which shows the relationship between the line and laser beam irradiation area | region in the glass welding method of the 1st Embodiment of this invention. It is a perspective view for demonstrating the glass welding method of the 1st Embodiment of this invention. It is a graph which shows the temperature of the glass layer in each of the case where the irradiation area | region of a laser beam is a spot shape, and a long shape. It is a perspective view of the other glass welding apparatus of the 1st Embodiment of this invention. It is a perspective view of the other glass welding apparatus of the 1st Embodiment of this invention. It is a top view which shows the relationship between the line and laser beam irradiation area | region in the other glass welding method of the 1st Embodiment of this invention. It is a perspective view of the glass welded body manufactured by the glass welding method of the 2nd Embodiment of this invention. It is a perspective view of the glass welding apparatus of the 2nd Embodiment of this invention. It is a perspective view for demonstrating the glass welding method of the 2nd Embodiment of this invention. It is a perspective view for demonstrating the glass welding method of the 2nd Embodiment of this invention. It is a perspective view for demonstrating the glass welding method of the 2nd Embodiment of this invention. It is a perspective view for demonstrating the glass welding method of the 2nd Embodiment of this invention. It is a graph which shows the temperature of the glass layer in each of the case where the irradiation area | region of a laser beam is a spot shape, and a long shape. It is a perspective view of the other glass welding apparatus of the 2nd Embodiment of this invention. It is a perspective view of the other glass welding apparatus of the 2nd Embodiment of this invention.

DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In addition, in each figure, the same code | symbol is attached | subjected to the same or equivalent part, and the overlapping description is abbreviate | omitted.
[First Embodiment]

FIG. 1 is a perspective view of a glass welded body manufactured by the glass welding method of the first embodiment of the present invention. As shown in FIG. 1, the glass welded body 1 is formed by welding a glass member 4 and a glass member 5 through a glass layer 3 arranged along a predetermined line 10. The glass welded body 1 is, for example, an organic EL display, and the light emitting element region formed inside the line 10 is sealed from the external atmosphere by the

glass members

4 and 5 and the glass layer 3.

The

glass members

4 and 5 are rectangular plate-shaped members having a thickness of 0.7 mm made of non-alkali glass, for example. The line 10 is set in a rectangular ring shape along the outer edges of the

glass members

4 and 5, and the corners of the line 10 are rounded. The line 10 includes a straight line portion 10a corresponding to the long side, a straight line portion 10b corresponding to the short side, and a curved line portion 10c corresponding to the corner portion. The glass layer 3 is a layer made of, for example, low-melting glass (vanadium phosphate glass, lead borate glass, etc.). The glass layer 3 is disposed between the

glass members

4 and 5 so as to be positioned on the line 10 along the line 10. In addition, as a shape of the

glass members

4 and 5, it is not limited to rectangular plate shape, Various shapes can be applied. Moreover, the shape of the line 10 is not limited to a rectangular ring shape, and various shapes can be applied.

FIG. 2 is a perspective view of the glass welding apparatus according to the first embodiment of the present invention. As shown in FIG. 2, the glass welding apparatus 11 includes a support stage (glass member support unit) 12, a laser head (laser light irradiation unit) 13, and a control unit 14. The glass welding apparatus 11 is an apparatus for welding the glass member 4 and the glass member 5 along the line 10.

The support stage 12 is a mounting table on which the

glass members

4 and 5 are mounted, and supports the

glass members

4 and 5 in a state where the glass layer 3 is disposed between the

glass members

4 and 5. The glass layer 3 contains a laser light absorbing pigment (laser light absorbing material) and is disposed along the line 10.

The laser head 13 irradiates the glass layer 3 on the support stage 12 with the laser light L. The laser head 13 includes a laser beam emitting unit 15, a collimating lens 16, a cylindrical lens (shaping optical system) 17, and a rotating stage (rotating drive body) 18. The laser beam emitting unit 15, the collimating lens 16, and the cylindrical lens 17 are disposed on the optical axis OA of the laser beam L.

The laser beam emitting unit 15 emits the laser beam L toward the glass layer 3 on the support stage 12. The collimating lens 16 collimates the laser light L emitted from the laser light emitting unit 15. The cylindrical lens 17 shapes the laser light L collimated by the collimating lens 16 so that the irradiation region IR in the glass layer 3 on the support stage 12 has an elliptical shape. The rotary stage 18 is a cylindrical driving body that holds the cylindrical lens 17 inside, and rotates the cylindrical lens 17 around the optical axis OA of the laser light L.

More specifically, the cylindrical lens 17 in the glass layer 3 on the support stage 12 has an irradiation region IR whose width in the first direction D1 is larger than the width in the second direction D2 perpendicular to the first direction D1. The laser beam L is shaped so that Here, the light incident surface 17a of the cylindrical lens 17 is a convex surface (for example, a focal length of 100 mm) for converging the laser light L only in the second direction D2, and the light emitting surface 17b of the cylindrical lens 17 is the first surface. This is a convex surface (for example, a focal length of 300 mm) for converging the laser light L only in the direction D1.

The control unit 14 controls the support stage 12 so that the irradiation region IR relatively moves along the line 10. Further, the control unit 14 matches the first direction D1 in the direction parallel to the

straight line portions

10a and 10b in the

straight line portions

10a and 10b of the line 10 and the curved line portions 10c in the curved line portions 10c of the line 10. The rotary stage 18 is controlled so that the first direction D1 coincides with the direction parallel to the tangent line. Note that the control unit 14 may control the laser head 13 so that the irradiation region IR relatively moves along the line 10, or may control both the support stage 12 and the laser head 13. .

Next, a glass welding method for manufacturing the glass welded body 1 using the glass welding apparatus 11 will be described. First, as shown in FIG. 3, a glass substrate 40 including a plurality of glass members 4 arranged in a matrix (here, 3 rows and 5 columns) is prepared. A line 10 is set for each glass member 4.

Subsequently, the paste layer 6 is disposed on the surface 40a of the glass substrate 40 along the line 10 for each glass member 4 by applying a frit paste by a dispenser, screen printing or the like. The frit paste is, for example, a powdery glass frit (glass powder) 2 made of low melting glass, a laser light absorbing pigment (laser light absorbing material) that is an inorganic pigment such as iron oxide, an organic solvent such as amyl acetate, In addition, a binder which is a resin component such as acrylic is kneaded. Subsequently, the paste layer 6 is dried to remove the organic solvent, and the paste layer 6 is heated to remove the binder, thereby fixing the glass layer 3 to the surface 40 a of the glass substrate 40. Further, the glass layer 3 containing the laser light-absorbing pigment is fixed on the surface 40 a of the glass substrate 40 by heating the glass layer 3 to melt and resolidify the glass frit 2.

Subsequently, as shown in FIG. 4, a glass substrate 50 including a plurality of glass members 5 arranged in a matrix (here, 3 rows and 5 columns) is prepared. Then, the glass substrate 40 and the glass substrate 50 are overlapped so that each of the glass members 4 and each of the glass members 5 are opposed to each other with the glass layer 3 interposed therebetween. Placed on the support stage 12. Thereby, between the glass member 4 and the glass member 5, the glass layer 3 containing a laser beam absorptive pigment is arrange | positioned along the line 10 (1st process). In the glass substrate 50, a light emitting element region is formed for each glass member 5 on the surface 50 a facing the surface 40 a of the glass substrate 40.

Subsequently, the laser beam L is output to the laser head 13 and the support stage 12 is driven to irradiate the glass layer 3 with the laser beam L for each of the opposing

glass members

4 and 5 as shown in FIG. Then, the irradiation region IR of the laser beam L is relatively moved along the line 10. Thereby, the glass layer 3 and its peripheral part (

surface

40a, 50a part of the glass substrates 40 and 50) fuse | melt and resolidify, and the glass member 4 and the glass member 5 are welded along the line 10 (2nd Process). In the welding, the glass layer 3 may melt and at least one of the

glass substrates

40 and 50 may not melt.

At this time, by rotating the cylindrical lens 17 on the rotary stage 18, as shown in FIG. 6, the linear portion 10a of the line 10 has a longitudinal direction of the irradiation region IR in a direction parallel to the linear portion 10a. 1 direction D1 is made to coincide, and in the straight portion 10b of the line 10, the first direction D1 that is the longitudinal direction of the irradiation region IR is made to coincide with the direction parallel to the straight portion 10b. That is, in each

straight line part

10a, 10b of the line 10, the width of the irradiation area IR in the direction parallel to each

straight line part

10a, 10b is larger than the width of the irradiation area IR in the direction perpendicular to each

straight line part

10a, 10b. Thus, the laser beam L is shaped. In each

straight line portion

10a, 10b of the line 10, the width of the irradiation region IR in the direction perpendicular to each

straight line portion

10a, 10b is larger than the width of the glass layer 3 in the direction perpendicular to each

straight line portion

10a, 10b. Thus, the laser beam L is shaped.

Similarly, by rotating the cylindrical lens 17 on the rotary stage 18, as shown in FIG. 6, in the curved portion 10c of the line 10, the longitudinal direction of the irradiation region IR is parallel to the tangent line T of the curved portion 10c. The first direction D1 is matched. That is, in each curved portion 10c of the line 10, the width of the irradiation region IR in the direction parallel to the tangent T of each curved portion 10c is larger than the width of the irradiation region IR in the direction perpendicular to the tangent T of each curved portion 10c. Thus, the laser beam L is shaped. In each curved portion 10c of the line 10, the width of the irradiation region IR in the direction perpendicular to the tangent T of each curved portion 10c is larger than the width of the glass layer 3 in the direction perpendicular to the tangent T of each curved portion 10c. Thus, the laser beam L is shaped.

Subsequently, as shown in FIG. 7, the welded

glass members

4 and 5 are cut out from the

glass substrates

40 and 50 to obtain a plurality (here, 15 sets) of glass welded bodies 1.

As described above, in the glass welding apparatus 11 and the glass welding method using the same, the laser light L shaped by the cylindrical lens 17 so as to be the elongated irradiation region IR is the

glass members

4 and 5. The glass layer 3 disposed therebetween is irradiated, and the irradiation region IR of the laser light L is relatively moved along the line 10. At this time, the glass layer 3 is disposed along the line 10. Then, with a simple configuration in which the rotary stage 18 rotates the cylindrical lens 17, the longitudinal direction of the irradiation region IR (that is, the first direction) is parallel to the

straight portions

10a and 10b in the

straight portions

10a and 10b of the line 10. Direction D1), and in each curved portion 10c of the line 10, the longitudinal direction of the irradiation region IR is made to coincide with the direction parallel to the tangent line T of each curved portion 10c. As a result, not only in the

straight line portions

10a and 10b of the line 10 but also in the curved line portions 10c of the line 10, the irradiation region IR of the laser light L is in a spot shape such as a circular shape. A sufficient amount of heat can be applied to the glass layer 3 to weld the

glass members

4 and 5 to each other while gradually increasing and decreasing the temperature. Therefore, according to the glass welding apparatus 11 and the glass welding method using the same, even if the line 10 includes the curved portion 10c, the glass layer 3 and the

glass members

4 and 5 are prevented from being damaged such as cracks. However, the

glass members

4 and 5 can be welded along the line 10.

In particular, in each curved portion 10c of the line 10, the speed of moving the irradiation region IR of the laser light L along the line 10 is slower than that of the

straight portions

10a and 10b of the line 10, and excessive heat input is caused. The glass layer 3 and the

glass members

4 and 5 are easily damaged, such as cracks. However, in the glass welding apparatus 11 and the glass welding method using the same, the irradiation stage IR is in a direction parallel to the tangent line T of each curved portion 10c by a simple configuration in which the rotary stage 18 rotates the cylindrical lens 17. Longitudinal directions are made to coincide with each other accurately, thereby reliably preventing damage such as cracks in the glass layer 3 and the

glass members

4 and 5 at each curved portion 10c.

Further, when the width of the irradiation region IR in the second direction D2 is 1, the cylindrical lens 17 emits the laser light L so that the width of the irradiation region IR in the first direction D1 is 1.5 to 4. If it shapes, it can prevent more reliably that damage, such as a crack, arises in the glass layer 3 or the

glass members

4 and 5. FIG.

FIG. 8 is a graph showing the temperature of the glass layer in each of the case where the irradiation region of the laser beam has a spot shape and a long shape. As shown in FIG. 8, when the irradiation region IR of the laser beam L is spot-shaped (for example, a perfect circle having a diameter of 1.6 mm), the temperature of the glass layer 3 (for example, 0.8 mm in width) rises and falls. Since it becomes abrupt, the glass layer 3 is rapidly heated and cooled rapidly. Moreover, since the irradiation time of the laser beam L is shortened, the amount of heat sufficient to weld the

glass members

4 and 5 to each other (corresponding to the hatched area in FIG. 8) unless the maximum temperature reached by the glass layer 3 is increased. ) Cannot be applied to the glass layer 3. As a result, when the irradiation region IR of the laser beam L is spot-like, damage such as cracks is likely to occur in the glass layer 3 and the

glass members

4 and 5.

On the other hand, if the irradiation region IR of the laser beam L has a long shape (for example, an ellipse having a long diameter of 6 mm and a short diameter of 1.6 mm), the temperature of the glass layer 3 (for example, width 0.8 mm) rises and falls slowly. Therefore, it is possible to prevent the glass layer 3 from being rapidly heated or rapidly cooled. In addition, since the irradiation time of the laser beam L becomes longer, the amount of heat sufficient to weld the

glass members

4 and 5 to each other without increasing the maximum temperature reached by the glass layer 3 (in the dot hatching region in FIG. 8). Can be applied to the glass layer 3. As a result, when the irradiation region IR of the laser beam L has a long shape, it is possible to prevent the glass layer 3 and the

glass members

4 and 5 from being damaged such as cracks. Furthermore, since the irradiation time of the laser beam L is longer than that in the case where the irradiation region IR of the laser beam L is spot-like, the speed at which the irradiation region IR is relatively moved along the line 10 can be increased. In that case, the tact time can be shortened.

As mentioned above, although 1st Embodiment of this invention was described, this invention is not limited to the said 1st Embodiment. For example, as shown in FIG. 9, the laser head 13 may include a laser light emitting unit 15, a collimating lens 16, a condenser lens 21, a cylindrical lens (shaping optical system) 22, and a rotary stage 18. . Here, the light incident surface 22a of the cylindrical lens 22 is a flat surface, and the light emitting surface 22b of the cylindrical lens 22 is a concave surface that converges the laser light L only in the second direction D2. Thereby, the laser light L collimated by the collimating lens 16 is condensed by the condensing lens 21, and then the cylindrical lens 22 makes the irradiation region IR in the glass layer 3 on the support stage 12 have an elliptical shape. It is shaped.

Further, as shown in FIG. 10, the laser head 13 may include a laser beam emitting unit 15, a collimating lens 16, a condenser lens 21, an axicon lens (shaping optical system) 23, and a rotary stage 18. Good. Here, the light incident surface 23a of the axicon lens 23 is a flat surface, and the light exit surface 23b of the axicon lens 23 is a flat surface that is mountain-folded so that the peak extends in the first direction D1. It has become. Thereby, after the laser beam L collimated by the collimating lens 16 is collected by the condenser lens 21, the irradiation region IR in the glass layer 3 on the support stage 12 has a long shape (a shape composed of an arc and a string). Is shaped by the axicon lens 23 so that the arc and the string are in contact with each other.

Further, as shown in FIG. 11, the control unit 14 makes the width of the irradiation region IR in the first direction D1 constant between the

straight portions

10a and 10b and the curved portions 10c, and in the second direction D2. The laser head 13 may be controlled so that the width of the irradiation region IR is larger at each curved portion 10c than at each

straight portion

10a, 10b. According to this, it is possible to reduce the light intensity per unit area of the irradiation region IR in each of the curved portions 10c as compared to the

straight portions

10a and 10b. Therefore, even if the speed of moving the irradiation region IR of the laser beam L relatively along the line 10 is slower in each curved portion 10c than in the

straight portions

10a and 10b, excessive heat input is caused in each curved portion 10c. It is possible to more reliably prevent the glass layer 3 and the

glass members

4 and 5 from being damaged such as cracks. For example, the adjustment of the shape of the irradiation region IR may be performed by changing the distance between the condensing lens 21 and the cylindrical lens 22 in the laser head 13 of FIG. 9 or by adjusting the condensing lens 21 in the laser head 13 of FIG. This can be realized by changing the distance between the lens and the axicon lens 23.

In the first embodiment, the glass layer 3 containing the laser light-absorbing pigment is fixed to the surface 40a of the glass substrate 40 by heating the glass layer 3 to melt and resolidify the glass frit 2. However, the arrangement of the glass layer 3 with respect to the glass substrate 40 is not limited to this. As an example, the glass layer 3 is disposed on the glass substrate 40 by drying the paste layer 6 to remove the organic solvent, and heating the paste layer 6 to remove the binder, thereby removing the glass layer on the surface 40a of the glass substrate 40. 3 may be fixed. Further, the laser beam L may be irradiated from the glass substrate 40 side.
[Second Embodiment]

FIG. 12 is a perspective view of a glass welded body manufactured by the glass welding method of the second embodiment of the present invention. As shown in FIG. 12, the glass welded body 1 is formed by welding a glass member 4 and a glass member 5 through a glass layer 3 disposed along the planned welding region R. The glass welded body 1 is, for example, an organic EL display, and the light emitting element region formed inside the planned welding region R is sealed from the outside atmosphere by the

glass members

4 and 5 and the glass layer 3.

The

glass members

4 and 5 are rectangular plate-shaped members having a thickness of 0.7 mm made of non-alkali glass, for example. The welding planned region R is set in a rectangular ring shape along the outer edges of the

glass members

4 and 5. The planned welding region R extends with an extending portion (first extending portion) Ra corresponding to the long side, an extending portion (second extending portion) Rb corresponding to the short side, and the extending portion Ra. The intersection part Rc where the part Rb intersects is included. The glass layer 3 is a layer made of, for example, low-melting glass (vanadium phosphate glass, lead borate glass, etc.). In addition, as a shape of the

glass members

4 and 5, it is not limited to rectangular plate shape, Various shapes can be applied. In addition, the shape of the planned welding region R is not limited to a rectangular ring shape, and various shapes can be applied.

FIG. 13 is a perspective view of a glass welding apparatus according to the second embodiment of the present invention. As shown in FIG. 13, the glass welding apparatus 11 includes a support stage (glass substrate support unit) 12, a laser head (laser light irradiation unit) 13, and a control unit 14. The glass welding apparatus 11 is an apparatus for welding the glass member 4 and the glass member 5 along the planned welding region R.

The support stage 12 is a mounting table on which a glass substrate 40 including a plurality of glass members 4 and a glass substrate 50 including a plurality of glass members 5 are mounted, and the glass layer 3 is disposed between the

glass substrates

40 and 50. In this state, the

glass substrates

40 and 50 are supported. The glass layer 3 includes a laser light absorbing pigment (laser light absorbing material), and is disposed along the planned welding region R for each of the opposing

glass members

4 and 5.

The control unit 14 has a line (first line) 10A along which the extended portion Ra of the planned welding region R is along and a line (second line) 10B along which the extended portion Rb of the planned welding region R is along, respectively. The support stage 12 is controlled so that the irradiation region IR moves relatively. In addition, the control unit 14 rotates the rotation stage so that the first direction D1 coincides with the direction parallel to the line 10A in the line 10A and the first direction D1 coincides with the direction parallel to the line 10B in the line 10B. 18 is controlled. The control unit 14 may control the laser head 13 so that the irradiation region IR relatively moves along the

lines

10A and 10B, or controls both the support stage 12 and the laser head 13. May be. Further, the control unit 14 may control the support stage 12 so that the first direction D1 coincides with the direction parallel to the

lines

10A and 10B, or controls both the support stage 12 and the laser head 13. May be.

Next, a glass welding method for manufacturing the glass welded body 1 using the glass welding apparatus 11 will be described. First, as shown in FIG. 14, a glass substrate 40 including a plurality of glass members 4 arranged in a matrix (here, 3 rows and 5 columns) is prepared. And the welding plan area | region R is set for every glass member 4. FIG. In other words, the welding planned region R includes a plurality of (here, three) extending portions Ra along each of a plurality (here, ten) of lines 10A that are parallel to each other and a plurality of parallel ( Here, a plurality (15 in this case) are set so that a plurality (here, 5) of extending portions Rb are along each of the 6 lines 10B.

Subsequently, the paste layer 6 is disposed on the surface 40a of the glass substrate 40 along the planned welding region R for each glass member 4 by applying a frit paste by a dispenser, screen printing, or the like. The frit paste is, for example, a powdery glass frit (glass powder) 2 made of low melting glass, a laser light absorbing pigment (laser light absorbing material) that is an inorganic pigment such as iron oxide, an organic solvent such as amyl acetate, In addition, a binder which is a resin component such as acrylic is kneaded. Subsequently, the paste layer 6 is dried to remove the organic solvent, and the paste layer 6 is heated to remove the binder, thereby fixing the glass layer 3 to the surface 40 a of the glass substrate 40. Further, the glass layer 3 containing the laser light-absorbing pigment is fixed on the surface 40 a of the glass substrate 40 by heating the glass layer 3 to melt and resolidify the glass frit 2.

Subsequently, as shown in FIG. 15, a glass substrate 50 including a plurality of glass members 5 arranged in a matrix (here, 3 rows and 5 columns) is prepared. Then, the glass substrate 40 and the glass substrate 50 are overlapped so that each of the glass members 4 and each of the glass members 5 are opposed to each other with the glass layer 3 interposed therebetween. Placed on the support stage 12. Accordingly, the plurality of extending portions Ra are set along each of the plurality of parallel lines 10A, and the plurality of extending portions Rb are set along each of the plurality of parallel lines 10B intersecting with the line 10A. In addition, the glass layer 3 containing the laser light absorbing pigment is disposed between the glass substrate 40 and the glass substrate 50 along each of the plurality of welding planned regions R (first step). In the glass substrate 50, a light emitting element region is formed for each glass member 5 on the surface 50 a facing the surface 40 a of the glass substrate 40.

Subsequently, the laser beam L is output to the laser head 13 and the support stage 12 is driven to irradiate the glass layer 3 with the laser beam L as shown in FIG. It moves relatively along each line 10A. At this time, the first direction D1, which is the longitudinal direction of the irradiation region IR, is matched with the direction parallel to the line 10A. That is, in each line 10A, the laser beam L is shaped so that the width of the irradiation region IR in the direction parallel to the line 10A is larger than the width of the irradiation region IR in the direction perpendicular to the line 10A. In each line 10A, the laser beam L is shaped so that the width of the irradiation region IR in the direction perpendicular to the line 10A is larger than the width of the glass layer 3 in the direction perpendicular to the line 10A. Thereby, the glass layer 3 and its peripheral part (

surface

40a, 50a part of the glass substrates 40 and 50) fuse | melt and resolidify, and the glass member 4 and the glass member 5 along the extension part Ra of the welding plan area | region R Are welded (second step). In the welding, the glass layer 3 may melt and at least one of the

glass substrates

40 and 50 may not melt.

Subsequently, the laser light L is output to the laser head 13 and the support stage 12 is driven to irradiate the glass layer 3 with the laser light L, and the irradiation region IR of the laser light L is relatively set along each line 10B. Move to. At this time, the first direction D1, which is the longitudinal direction of the irradiation region IR, is matched with the direction parallel to the line 10B. That is, in each line 10B, the laser beam L is shaped so that the width of the irradiation region IR in the direction parallel to the line 10B is larger than the width of the irradiation region IR in the direction perpendicular to the line 10B. In each line 10B, the laser beam L is shaped so that the width of the irradiation region IR in the direction perpendicular to the line 10B is larger than the width of the glass layer 3 in the direction perpendicular to the line 10B. Thereby, the glass layer 3 and its peripheral part (

surface

40a, 50a part of the glass substrates 40 and 50) fuse | melt and resolidify, and the glass member 4 and the glass member 5 along the extension part Rb of the welding plan area | region R Are welded (second step). In the welding, the glass layer 3 may melt and at least one of the

glass substrates

40 and 50 may not melt.

In this way, the control unit 14 controls the support stage 12 so that the irradiation region IR moves in a zigzag manner along each line 10A, and then the irradiation region IR moves in a zigzag manner along each line 10B. Thus, the support stage 12 is controlled. And the control part 14 remove | deviates from

glass substrate

40,50 between the zigzag movement of the irradiation area | region IR along each line 10A, and the zigzag movement of the irradiation area | region IR along each line 10B. In this position, the rotary stage 18 is controlled so that the first direction D1 coincides with the direction parallel to the line 10B from the state where the first direction D1 coincides with the direction parallel to the line 10A.

Subsequently, as shown in FIG. 17, the

glass members

4 and 5 that have been welded are cut out from the glass substrates 40 and 50 (that is, the

glass substrates

40 and 50 are cut for each region to be welded R), and a plurality (here Then, 15 sets) of glass welded bodies 1 are obtained (third step).

glass substrates

40, 50. The glass layer 3 disposed therebetween is irradiated, and the irradiation region IR of the laser light L is relatively moved along the

lines

10A and 10B. At this time, a plurality of planned welding regions R are set so that a plurality of extending portions Ra are along each line 10A and a plurality of extending portions Rb are along each line 10B, and a glass is formed along each planned welding region R. Layer 3 is arranged. In each line 10A, the longitudinal direction of the irradiation region IR (that is, the first direction D1) is made to coincide with the direction parallel to the line 10A, and in each line 10B, the longitudinal direction of the irradiation region is parallel to the line 10B. Matched. Thereby, in each

line

10A, 10B, compared with the case where the irradiation region IR of the laser beam L is a spot shape such as a circular shape, the

glass members

4 and 5 are connected to each other while the temperature of the glass layer 3 is moderately increased and decreased. A sufficient amount of heat can be applied to the glass layer 3 for welding.

Moreover, at the intersection Rc where the extending portions Ra and Rb intersect in the planned welding region R, stress is likely to be concentrated when irradiated with the laser beam L, but the generated stress can be relaxed for the following reason. That is, the laser beam L is irradiated twice on the intersection Rc of the planned welding region R. When the glass layer 3 is crystallized at the intersection Rc, for example, at the first irradiation with the laser beam L, the crystal The light absorptivity of the converted part is lowered. Therefore, at the intersection Rc, the temperature of the glass layer 3 is less likely to rise when the second laser beam L is irradiated than when the first laser beam L is irradiated. Although the stress relaxation process is important at the intersection Rc, if the irradiation region IR of the laser beam L is spot-like, for example, in a situation where the temperature of the glass layer 3 is difficult to rise, the second laser beam L is irradiated. Cannot take enough time to relieve stress. On the other hand, if the irradiation region IR of the laser beam L has a long shape, the glass layer 3 is heated even around the intersection Rc (that is, the amount of heat applied increases), and the second laser beam L The generated stress can be relieved by taking a sufficient time to relieve the stress during irradiation.

According to the above, according to the glass welding apparatus 11 and the glass welding method using the same, even if the welding planned region R includes the intersection Rc where the extending portions Ra and Rb intersect each other, the glass layer 3 and the glass It becomes possible to weld the

glass members

4 and 5 along the planned welding region R while preventing the

members

4 and 5 from being damaged such as cracks.

In addition, the control unit 14 controls the support stage 12 so that the irradiation region IR relatively moves along each line 10A, and then the irradiation region IR relatively moves along each line 10B. The support stage 12 is controlled. Thereby, since the number of times of changing the longitudinal direction of the irradiation region IR from the direction parallel to the line 10A to the direction parallel to the line 10B is only one, the tact time can be shortened.

In addition, the control unit 14 causes the first direction D1 to coincide with the direction parallel to the line 10A in each line 10A, and the first direction D1 to coincide with the direction parallel to the line 10B in each line 10B. The rotary stage 18 is controlled. Thereby, with the simple configuration in which the rotary stage 18 rotates the cylindrical lens 17, the longitudinal direction of the irradiation region IR can be made to coincide with the direction parallel to the line 10A and the direction parallel to the line 10B.

When the width of the irradiation region IR in the second direction D2 is 1, the cylindrical lens 17 emits the laser light L so that the width of the irradiation region IR in the first direction D1 is 1.5 to 4. If it shapes, it can prevent more reliably that damage, such as a crack, arises in the glass layer 3 or the

glass members

4 and 5. FIG.

FIG. 18 is a graph showing the temperature of the glass layer in each of the case where the laser light irradiation region has a spot shape and a long shape. As shown in FIG. 18, when the irradiation region IR of the laser beam L is spot-like (for example, a perfect circle having a diameter of 1.6 mm), the temperature of the glass layer 3 (for example, 0.8 mm in width) rises and falls. Since it becomes abrupt, the glass layer 3 is rapidly heated and cooled rapidly. Moreover, since the irradiation time of the laser beam L is shortened, the amount of heat sufficient to weld the

glass members

4 and 5 to each other (corresponding to the hatched area in FIG. 18) unless the maximum temperature reached by the glass layer 3 is increased. ) Cannot be applied to the glass layer 3. As a result, when the irradiation region IR of the laser beam L is spot-like, damage such as cracks is likely to occur in the glass layer 3 and the

glass members

4 and 5.

glass members

4 and 5 to each other without increasing the maximum temperature reached by the glass layer 3 (in the dot hatching region in FIG. 18). Can be applied to the glass layer 3. As a result, when the irradiation region IR of the laser beam L has a long shape, it is possible to prevent the glass layer 3 and the

glass members

Although the second embodiment of the present invention has been described above, the present invention is not limited to the second embodiment. For example, as shown in FIG. 19, the laser head 13 may include a laser light emitting unit 15, a collimating lens 16, a condenser lens 21, a cylindrical lens (shaping optical system) 22, and a rotary stage 18. . Here, the light incident surface 22a of the cylindrical lens 22 is a flat surface, and the light emitting surface 22b of the cylindrical lens 22 is a concave surface that converges the laser light L only in the second direction D2. Thereby, the laser light L collimated by the collimating lens 16 is condensed by the condensing lens 21, and then the cylindrical lens 22 makes the irradiation region IR in the glass layer 3 on the support stage 12 have an elliptical shape. It is shaped.

Further, as shown in FIG. 20, the laser head 13 may include a laser beam emitting portion 15, a collimating lens 16, a condenser lens 21, an axicon lens (shaping optical system) 23, and a rotary stage 18. Good. Here, the light incident surface 23a of the axicon lens 23 is a flat surface, and the light exit surface 23b of the axicon lens 23 is a flat surface that is mountain-folded so that the peak extends in the first direction D1. It has become. Thereby, after the laser beam L collimated by the collimating lens 16 is collected by the condenser lens 21, the irradiation region IR in the glass layer 3 on the support stage 12 has a long shape (a shape composed of an arc and a string). Is shaped by the axicon lens 23 so that the arc and the string are in contact with each other.

Further, the control unit 14 controls the first stage when at least one of the support stage 12 and the laser head 13 is controlled so that the speed at which the irradiation region IR relatively moves along the

lines

10A and 10B is increased. The laser head 13 may be controlled so that the ratio of the width of the irradiation region IR in the direction D1 with respect to the width of the irradiation region IR in the second direction D2 is increased. For example, when the control unit 14 controls at least one of the support stage 12 and the laser head 13 so as to increase the speed at which the irradiation region IR relatively moves along the

lines

10A and 10B, The laser head 13 may be controlled so that the width of the irradiation region IR in the first direction D1 is increased while the width of the irradiation region IR in the direction D2 is constant. According to this, the amount of heat sufficient to weld the

glass members

4 and 5 to each other is suppressed while suppressing the time during which the laser beam L is applied to a predetermined portion of the glass layer 3 from being shortened. Can be given to. For example, the adjustment of the shape of the irradiation region IR may be performed by changing the distance between the condensing lens 21 and the cylindrical lens 22 in the laser head 13 of FIG. 19 or by the condensing lens 21 in the laser head 13 of FIG. This can be realized by changing the distance between the lens and the axicon lens 23.

Further, the line 10A and the line 10B are not limited to being orthogonal to each other, but include a case where they intersect at an angle other than 90 °. Further, the

lines

10A and 10B are not limited to a straight line, but include a case of a curved line. When the line 10A is a curved line, the longitudinal direction of the irradiation region IR may be made to coincide with the direction parallel to the tangent to the line 10A. Similarly, when the line 10B is a curve, the longitudinal direction of the irradiation region IR may be made to coincide with the direction parallel to the tangent to the line 10B.

In the second embodiment, the glass layer 3 containing the laser light-absorbing pigment is fixed to the surface 40a of the glass substrate 40 by heating the glass layer 3 to melt and resolidify the glass frit 2. However, the arrangement of the glass layer 3 with respect to the glass substrate 40 is not limited to this. As an example, the glass layer 3 is disposed on the glass substrate 40 by drying the paste layer 6 to remove the organic solvent, and heating the paste layer 6 to remove the binder, thereby removing the glass layer on the surface 40a of the glass substrate 40. 3 may be fixed. Further, the laser beam L may be irradiated from the glass substrate 40 side.

DESCRIPTION OF SYMBOLS 1 ... Glass welded body, 3 ... Glass layer, 4 ... Glass member (1st glass member), 5 ... Glass member (2nd glass member), 10 ... Line, 10a, 10b ... Linear part, 10c ... Curve part DESCRIPTION OF SYMBOLS 11 ... Glass welding apparatus, 12 ... Support stage (glass member support part), 13 ... Laser head (laser beam irradiation part), 14 ... Control part, 17, 22 ... Cylindrical lens (shaping optical system), 18 ... Rotation stage (Rotary drive), 23 ... axicon lens (shaping optical system), 10A ... line (first line), 10B ... line (second line), 40 ... glass substrate (first glass substrate), 50 ... glass substrate (second glass substrate), R ... planned welding region, Ra ... extension part (first extension part), Rb ... extension part (second extension part), Rc ... intersection part, L: Laser light, IR: Irradiation area.

Claims

A glass welding apparatus for welding a first glass member and a second glass member along a predetermined line,
Between the first glass member and the second glass member, the first glass member and the second glass member are disposed in a state where a glass layer including a laser light absorbing material is disposed along the line. A glass member support part for supporting the glass member;
Shaping optics for shaping the laser light so that the glass layer on the glass member supporting portion has an irradiation region whose width in the first direction is larger than the width in the second direction perpendicular to the first direction. A laser driving unit for rotating the shaping optical system around the optical axis of the system and the laser beam, and irradiating the glass layer on the glass member support unit with the laser beam;
At least one of the glass member support part and the laser light irradiation part is controlled so that the irradiation area relatively moves along the line, and the linear part of the line is in a direction parallel to the linear part. A control unit that controls the rotary drive body so that the first direction is coincident and the first direction coincides with a direction parallel to a tangent to the curvilinear part in the curved portion of the line. , Glass welding equipment.
The shaping optical system emits the laser beam so that the width of the irradiation region in the first direction is 1.5 to 4 when the width of the irradiation region in the second direction is 1. The glass welding apparatus according to claim 1, wherein the glass welding apparatus is shaped.
The control unit is configured such that the width of the irradiation region in the first direction is constant between the linear portion and the curved portion, and the width of the irradiation region in the second direction is the curved portion compared to the linear portion. The glass welding apparatus according to claim 1, wherein the laser beam irradiation unit is controlled to be large.
A glass welding method for producing a glass welded body by welding a first glass member and a second glass member along a predetermined line,
Between the first glass member and the second glass member, a first step of arranging a glass layer containing a laser light absorbing material along the line;
By irradiating the glass layer with laser light and relatively moving the irradiation region of the laser light along the line, the first glass member and the second glass member are moved along the line. A second step of welding,
In the second step, in the straight line portion of the line, the laser is set such that the width of the irradiation region in a direction parallel to the straight line portion is larger than the width of the irradiation region in a direction perpendicular to the straight line portion. The laser beam is shaped so that the width of the irradiation region in the direction parallel to the tangent of the curve portion is larger than the width of the irradiation region in the direction perpendicular to the tangent at the curved portion of the line. Glass welding method to shape.
A glass welding apparatus that welds the first glass member and the second glass member along a planned welding region including an intersection where the first extending portion and the second extending portion intersect,
A plurality of first lines parallel to each other between a first glass substrate including a plurality of first glass members and a second glass substrate including a plurality of second glass members. A plurality of second extending portions are set along each of a plurality of second lines parallel to each other along the first extending portion and intersecting the first line. A glass substrate support part that supports the first glass substrate and the second glass substrate in a state in which a glass layer containing a laser light absorbing material is disposed along each of the planned welding regions,
Shaping optics for shaping the laser light so that the glass layer on the glass substrate support part has an irradiation region whose width in the first direction is larger than the width in the second direction perpendicular to the first direction. A laser beam irradiating unit for irradiating the glass layer on the glass substrate supporting unit with the laser beam,
At least one of the glass substrate support part and the laser light irradiation part is controlled so that the irradiation area relatively moves along each of the first line and the second line, and the first In the line, the first direction coincides with a direction parallel to the first line, and in the second line, the first direction coincides with a direction parallel to the second line, A glass welding apparatus comprising: a control unit that controls at least one of the glass substrate support unit and the laser beam irradiation unit.
The control unit controls at least one of the glass substrate support unit and the laser beam irradiation unit so that the irradiation region relatively moves along each of the first lines, and then the irradiation region. The glass welding apparatus according to claim 5, wherein at least one of the glass substrate support part and the laser beam irradiation part is controlled so that the relative movement moves along each of the second lines.
The laser beam irradiation unit further includes a rotation driving body that rotates the shaping optical system around the optical axis of the laser beam,
In the first line, the control unit matches the first direction in a direction parallel to the first line, and in the second line, the first direction is parallel to the second line. The glass welding apparatus according to claim 5, wherein the rotary driving body is controlled so that the directions of the two coincide with each other.
The control unit includes at least the glass substrate support unit and the laser beam irradiation unit so that a speed at which the irradiation region relatively moves along each of the first line and the second line is increased. When one is controlled, the laser light irradiation unit is controlled so that a ratio of the width of the irradiation region in the first direction with respect to the width of the irradiation region in the second direction is increased. The glass welding apparatus according to any one of claims 5 to 7.
A first glass member and a second glass member are welded along a planned welding region including an intersecting portion where the first extending portion and the second extending portion intersect to produce a glass welded body. A glass welding method,
A plurality of first lines parallel to each other between a first glass substrate including a plurality of first glass members and a second glass substrate including a plurality of second glass members. A plurality of second extending portions are set along each of a plurality of second lines parallel to each other along the first extending portion and intersecting the first line. A first step of disposing a glass layer containing a laser light absorbing material along each of the planned welding regions;
The glass layer is irradiated with a laser beam, and the irradiation region of the laser beam is relatively moved along each of the first line and the second line, so that the first layer is formed along the planned welding region. A second step of welding the first glass member and the second glass member;
Cutting the first glass substrate and the second glass substrate for each of the planned welding regions, and obtaining a plurality of the glass welded bodies, and a third step,
In the second step, in the first line, the width of the irradiation region in a direction parallel to the first line is larger than the width of the irradiation region in a direction perpendicular to the first line. In the second line, the width of the irradiation region in the direction parallel to the second line is larger than the width of the irradiation region in the direction perpendicular to the second line. A glass welding method for shaping the laser beam so as to be.