WO2012074292A3 - 입자 빔 칼럼에서 입자 빔을 블랭킹하는 방법 - Google Patents

입자 빔 칼럼에서 입자 빔을 블랭킹하는 방법 Download PDF

Info

Publication number
WO2012074292A3
WO2012074292A3 PCT/KR2011/009218 KR2011009218W WO2012074292A3 WO 2012074292 A3 WO2012074292 A3 WO 2012074292A3 KR 2011009218 W KR2011009218 W KR 2011009218W WO 2012074292 A3 WO2012074292 A3 WO 2012074292A3
Authority
WO
WIPO (PCT)
Prior art keywords
particle beam
blanking
column
beam column
present
Prior art date
Application number
PCT/KR2011/009218
Other languages
English (en)
French (fr)
Other versions
WO2012074292A2 (ko
Inventor
김호섭
Original Assignee
전자빔기술센터 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 전자빔기술센터 주식회사 filed Critical 전자빔기술센터 주식회사
Publication of WO2012074292A2 publication Critical patent/WO2012074292A2/ko
Publication of WO2012074292A3 publication Critical patent/WO2012074292A3/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/045—Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/10—Lenses
    • H01J2237/12—Lenses electrostatic
    • H01J2237/1205—Microlenses

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)

Abstract

본 발명은 입자 빔 칼럼에서 입자 빔을 블랭킹 하는 방법에 대한 것으로, 보다 구체적으로는 입자 빔 칼럼에서 입자 빔이 시료를 향해 주사되는 것을 막는 방법에 관한 것이다. 본 발명은 기존의 입자 빔 칼럼에서 정전위 전자렌즈의 전극에 블랭킹 전압을 인가해서 빔 블랭킹을 수행 하는 것으로, 저에너지 초소형 입자 빔 칼럼에서 가장 잘 활용될 수 있다.
PCT/KR2011/009218 2010-11-30 2011-11-30 입자 빔 칼럼에서 입자 빔을 블랭킹하는 방법 WO2012074292A2 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020100121005A KR101761227B1 (ko) 2010-11-30 2010-11-30 입자 빔 칼럼에서 입자 빔을 블랭킹하는 방법
KR10-2010-0121005 2010-11-30

Publications (2)

Publication Number Publication Date
WO2012074292A2 WO2012074292A2 (ko) 2012-06-07
WO2012074292A3 true WO2012074292A3 (ko) 2012-07-26

Family

ID=46172399

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/009218 WO2012074292A2 (ko) 2010-11-30 2011-11-30 입자 빔 칼럼에서 입자 빔을 블랭킹하는 방법

Country Status (2)

Country Link
KR (1) KR101761227B1 (ko)
WO (1) WO2012074292A2 (ko)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020077885A (ko) * 2000-11-20 2002-10-14 코닌클리케 필립스 일렉트로닉스 엔.브이. 디스플레이 디바이스와 음극선관
JP2006059513A (ja) * 2004-07-22 2006-03-02 Kuresutetsuku:Kk 電子ビーム照射装置および描画装置
KR20060049861A (ko) * 2004-07-05 2006-05-19 전자빔기술센터 주식회사 멀티 마이크로칼럼에서 전자빔을 제어하는 방법 및 이방법을 이용한 멀티 마이크로칼럼

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020077885A (ko) * 2000-11-20 2002-10-14 코닌클리케 필립스 일렉트로닉스 엔.브이. 디스플레이 디바이스와 음극선관
KR20060049861A (ko) * 2004-07-05 2006-05-19 전자빔기술센터 주식회사 멀티 마이크로칼럼에서 전자빔을 제어하는 방법 및 이방법을 이용한 멀티 마이크로칼럼
JP2006059513A (ja) * 2004-07-22 2006-03-02 Kuresutetsuku:Kk 電子ビーム照射装置および描画装置

Also Published As

Publication number Publication date
WO2012074292A2 (ko) 2012-06-07
KR101761227B1 (ko) 2017-07-26
KR20120059321A (ko) 2012-06-08

Similar Documents

Publication Publication Date Title
WO2013093482A3 (en) An imaging mass spectrometer and a method of mass spectrometry
IL261978A (en) Method for treating lignocellulosic material by irradiating with an electron beam
EP3931853A4 (en) AUTOMATED APPLICATION OF DRIFT CORRECTION TO A SAMPLE STUDIED UNDER AN ELECTRONIC MICROSCOPE
MX2014007905A (es) Metodo y aparato para la mejora de la radiacion de la llama.
GB2547120A (en) A multi-reflecting time-of-flight analyzer
EP3061118A4 (en) System and method for compressive scanning electron microscopy
WO2012083095A3 (en) Generation of model-of-composition of petroleum by high resolution mass spectrometry and associated analytics
WO2012146647A3 (en) Method and apparatus for processing a substrate with a focussed particle beam
GB201118536D0 (en) Asymmetric field ion mobility in a linear geometry ion trap
WO2012091908A3 (en) Method and apparatus for controlling an electrostatic lens about a central ray trajectory of an ion beam
EP2658479A4 (en) Devices and methods for dynamic focusing movement
EP2970787A4 (en) Process for producing distillate fuels and anode grade coke from vacuum resid
WO2011048060A3 (en) Detection apparatus for detecting charged particles, methods for detecting charged particles and mass spectrometer
EP2997612A4 (en) Actinic and electron beam radiation curable water based electrode binders and electrodes incorporating same
GB201204024D0 (en) Dynamic resolution correction of quadrupole mass analyser
WO2011062810A3 (en) High-sensitivity and high-throughput electron beam inspection column enabled by adjustable beam-limiting aperture
EP2772930A3 (en) Focused ion beam low kv enhancement
WO2011035260A3 (en) Distributed ion source acceleration column
EP3928356A4 (en) STRUCTURES FOR REDUCING ELECTRON CONCENTRATION AND METHOD FOR REDUCING ELECTRON CONCENTRATION
EP3111239A4 (en) Method and apparatus to compensate for deflection artifacts in an atomic force microscope
ZA201502681B (en) Composition for an organic gel and the pyrolysate thereof, production method thereof, electrode formed by the pyrolysate and supercapacitor containing same
EA201201376A1 (ru) Ускоритель заряженных частиц и способ ускорения заряженных частиц
EP3582307A4 (en) STAINLESS STEEL PLATE SUBSTRATE OF A STEEL PLATE FOR FUEL CELL SEPARATOR AND METHOD FOR PRODUCING THE SAME
EP3321327A4 (en) Liquid composition, method for producing same and method for producing membrane electrode assembly
WO2013140127A3 (en) Improved time of flight quantitation using alternative characteristic ions

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 11845752

Country of ref document: EP

Kind code of ref document: A2

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 11845752

Country of ref document: EP

Kind code of ref document: A2