WO2012055605A3 - Druckmesswandler - Google Patents

Druckmesswandler Download PDF

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Publication number
WO2012055605A3
WO2012055605A3 PCT/EP2011/064666 EP2011064666W WO2012055605A3 WO 2012055605 A3 WO2012055605 A3 WO 2012055605A3 EP 2011064666 W EP2011064666 W EP 2011064666W WO 2012055605 A3 WO2012055605 A3 WO 2012055605A3
Authority
WO
WIPO (PCT)
Prior art keywords
transducer
pressure
channel
elastic body
pressure transducer
Prior art date
Application number
PCT/EP2011/064666
Other languages
English (en)
French (fr)
Other versions
WO2012055605A2 (de
Inventor
Anh Tuan Tham
Rafael Teipen
Dieter Stolze
Original Assignee
Endress+Hauser Gmbh+Co.Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress+Hauser Gmbh+Co.Kg filed Critical Endress+Hauser Gmbh+Co.Kg
Publication of WO2012055605A2 publication Critical patent/WO2012055605A2/de
Publication of WO2012055605A3 publication Critical patent/WO2012055605A3/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G01L13/026—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms involving double diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

Ein Druckmesswandler, umfasst: ein Gehäuse 10 mit einer Wandlerkammer 12, welche erste und zweite Anschlagflächen 14, 16 aufweist, die einander gegenüberliegen; und einen Wandlerkern 30, wobei zumindest in der ersten Anschlagfläche 14 ein erster Kanal 18 mündet, wobei in der Wandlerkammer zumindest ein zweiter Kanal 20 mündet, wobei durch die Kanäle ein erster und zweiter Druck in die Wandlerkammer einleitbar sind, wobei der Wandlerkern 30 zwischen einem ersten elastischen Körper 22 und einem zweiten elastischen Körper 24 eingespannt ist, wobei die elastischen Körper 22, 24 jeweils zwischen einer Oberfläche 32, 34 des Wandlerkerns und der beiden Anschlagflächen 14, 16 angeordnet ist, wobei zumindest der erste elastische Körper 22 eine Öffnung aufweist, welche mit dem zumindest einem Kanal 18 fluchtet, über welchen der Wandlerkern 30 mit einem ersten Druck beaufschlagbar ist.
PCT/EP2011/064666 2010-10-28 2011-08-25 Druckmesswandler WO2012055605A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE201010043043 DE102010043043A1 (de) 2010-10-28 2010-10-28 Druckmesswandler
DE102010043043.9 2010-10-28

Publications (2)

Publication Number Publication Date
WO2012055605A2 WO2012055605A2 (de) 2012-05-03
WO2012055605A3 true WO2012055605A3 (de) 2012-11-29

Family

ID=44511010

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2011/064666 WO2012055605A2 (de) 2010-10-28 2011-08-25 Druckmesswandler

Country Status (2)

Country Link
DE (1) DE102010043043A1 (de)
WO (1) WO2012055605A2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011006517A1 (de) 2011-03-31 2012-10-04 Endress + Hauser Gmbh + Co. Kg Druckfest gekapselter Differenzdrucksensor
DE102013113171A1 (de) 2013-11-28 2015-05-28 Endress + Hauser Gmbh + Co. Kg Piezoresistive Silizium-Differenzdruckmesszelle und Verfahren zu ihrer Herstellung
DE102013113843A1 (de) 2013-12-11 2015-06-11 Endress + Hauser Gmbh + Co. Kg Drucksensor
DE102014109491A1 (de) 2014-07-08 2016-02-11 Endress + Hauser Gmbh + Co. Kg Differenzdruckmesszelle
DE102016107236A1 (de) * 2016-04-19 2017-10-19 Endress + Hauser Gmbh + Co. Kg Verfahren zum Fügen einer Differenzdruckmesszelle und Differenzdruckmesszelle
CN113432778B (zh) * 2021-05-25 2023-09-29 歌尔微电子股份有限公司 Mems差压传感器及其制造方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2999385A (en) * 1956-09-17 1961-09-12 Trans Sonics Inc Pressure sensing instrument
DE2125663A1 (de) * 1970-05-25 1971-12-09 Medicor Muevek Kapazitiver Druckwandler
JPH03150437A (ja) * 1989-07-21 1991-06-26 Fuji Electric Co Ltd 差圧検出装置
US5155653A (en) * 1991-08-14 1992-10-13 Maclean-Fogg Company Capacitive pressure sensor
US6076409A (en) * 1997-12-22 2000-06-20 Rosemount Aerospace, Inc. Media compatible packages for pressure sensing devices
DE10318660A1 (de) * 2002-04-24 2003-11-06 Denso Corp Drucksensor mit einer korrosionsbeständigen Membran
DE10227479A1 (de) * 2002-06-19 2004-01-08 Endress + Hauser Gmbh + Co. Kg Druckmeßgerät
EP1494004A1 (de) * 2003-07-03 2005-01-05 Grundfos A/S Differenzdrucksensor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5214470A (en) * 1975-07-24 1977-02-03 Fuji Electric Co Ltd Pressure measuring equipment
DE8233072U1 (de) * 1982-11-25 1984-07-19 Schoppe & Faeser Gmbh, 4950 Minden Messkapsel fuer einen differenzdruck-messumformer
US4670733A (en) * 1985-07-01 1987-06-02 Bell Microsensors, Inc. Differential pressure transducer
US5134887A (en) * 1989-09-22 1992-08-04 Bell Robert L Pressure sensors
FR2775075B1 (fr) * 1998-02-18 2000-05-05 Theobald Sa A Capteur de pression differentielle
DE10117142A1 (de) * 2001-04-05 2002-10-10 Endress & Hauser Gmbh & Co Kg Kapazitiver Differenz-Drucksensor

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2999385A (en) * 1956-09-17 1961-09-12 Trans Sonics Inc Pressure sensing instrument
DE2125663A1 (de) * 1970-05-25 1971-12-09 Medicor Muevek Kapazitiver Druckwandler
JPH03150437A (ja) * 1989-07-21 1991-06-26 Fuji Electric Co Ltd 差圧検出装置
US5155653A (en) * 1991-08-14 1992-10-13 Maclean-Fogg Company Capacitive pressure sensor
US6076409A (en) * 1997-12-22 2000-06-20 Rosemount Aerospace, Inc. Media compatible packages for pressure sensing devices
DE10318660A1 (de) * 2002-04-24 2003-11-06 Denso Corp Drucksensor mit einer korrosionsbeständigen Membran
DE10227479A1 (de) * 2002-06-19 2004-01-08 Endress + Hauser Gmbh + Co. Kg Druckmeßgerät
EP1494004A1 (de) * 2003-07-03 2005-01-05 Grundfos A/S Differenzdrucksensor

Also Published As

Publication number Publication date
WO2012055605A2 (de) 2012-05-03
DE102010043043A1 (de) 2012-05-03

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