WO2012050524A1 - System and method for offloading ic units - Google Patents

System and method for offloading ic units Download PDF

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Publication number
WO2012050524A1
WO2012050524A1 PCT/SG2011/000267 SG2011000267W WO2012050524A1 WO 2012050524 A1 WO2012050524 A1 WO 2012050524A1 SG 2011000267 W SG2011000267 W SG 2011000267W WO 2012050524 A1 WO2012050524 A1 WO 2012050524A1
Authority
WO
WIPO (PCT)
Prior art keywords
shuttle table
cover
units
assembly
shuttle
Prior art date
Application number
PCT/SG2011/000267
Other languages
French (fr)
Inventor
Hae Choon Yang
Deok Chun Jang
Original Assignee
Rokko Ventures Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rokko Ventures Pte Ltd filed Critical Rokko Ventures Pte Ltd
Priority to EP11832846.7A priority Critical patent/EP2628175A4/en
Priority to JP2013533821A priority patent/JP2013541215A/en
Priority to CN2011800548167A priority patent/CN103270584A/en
Priority to US13/879,323 priority patent/US20130209205A1/en
Priority to KR1020137012305A priority patent/KR20140020830A/en
Publication of WO2012050524A1 publication Critical patent/WO2012050524A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67333—Trays for chips
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Definitions

  • the invention relates to the processing of singulated integrated circuit (IC) units.
  • the invention relates to the offloading of said units from a processing machine.
  • Integrated circuit units are formed in substrates of several IC units and subsequently singulated into individual units ready for assembly into a respective device.
  • the assembly of such a device requires batches of units to be delivered to the manufacturer in a way that can be incorporated into the assembly process.
  • One such way involves the integrated circuit units to be delivered in containers such as tubes which can be mounted to an assembly device ready for automatic installation.
  • the processing device must include a method of loading the singulated units into a tube such as having a table for receiving the units and a pusher to apply an axial force to a line of units on the table and subsequently pushed into the tube.
  • a problem with this process is that application of the axial force may cause buckling of the IC units, preventing insertion into the tube.
  • the invention provides a shuttle table assembly comprising a shuttle table for receiving a plurality of IC units at a first position and for offloading said units at a second position, said shuttle table movable from said first to second position; a cover assembly mounted to said shuttle table, the cover assembly having at least one cover movable from an open position to a closed position, said closed position covering said units on the shuttle table; wherein the cover assembly is coupled to a guide for closing the cover as the shuttle table moves from the first to the second position.
  • the invention process a method for delivering IC units, the method comprising the steps of: placing a plurality of IC units on a shuttle table at a first position; moving said shuttle table to a second position; during the moving step, closing a cover over the shuttle table, and then; offloading said units at a second position. Accordingly, by providing a guide to guide the cover assembly to close over the shuttle table, IC units placed on the shuttle table are constrained in the vertical direction, In a subsequent step, offloading the units may then be done through applying an axial load to the units without causing buckling to the units, preventing further movement.
  • Figure 1A is an elevation sectional view of a shuttle table assembly in a first position according to one embodiment of the present invention
  • Figure IB is an elevation sectional view of the shuttle table assembly of Figure 1A in a second position.
  • Figure 2A is a plan view of the shuttle table assembly according to Figure 1 A;
  • Figure 2B is a plan view of the shuttle table assembly according to Figure IB and
  • Figure 3 is a side elevation view of the shuttle table assembly of Figure IB.
  • FIGS 1A, I B, 2A, 2B and 3 show one embodiment of the present invention whereby a shuttle table assembly 5 is movable from a first position to a second position. In the first position, IC units 30 are delivered 35 to a receiving surface 20 on the shuttle table 10. Each IC unit 30 is delivered by a picker 25 having a vacuum engagement to engage the IC units 30 which is subsequently released in order to disengage the unit 30.
  • the receiving surface 20 may or may not have a vacuum source to engage the unit. Whilst a shuttle table according to the prior art may require a vacuum source, the introduction of the cover 15 makes the vacuum source unnecessary. Nevertheless, it will be appreciated that in some applications a vacuum source may still be useful for shuttle assembly according to the present invention.
  • the shuttle table assembly 5 includes a rotation assembly 40 including a rotatable pedestal 45 for rotating the shuttle table 10 about a vertical axis 50 from a first position as shown in Figure 1A to a second position shown in Figure IB. The first position shown in Figure 1A is intended to receive the IC units 30.
  • the second position shown in Figure IB is intended to offload the unit 30 using a pusher 105 to apply an axial load 1 10 to the line of IC units on the receiving surface 20.
  • the units 30 are then subsequently slid into a tube loader (not shown) or other means for containing multiple IC units for delivery to an end customer.
  • a problem of the prior art is the tendency for the IC units to buckle on application of the axial load applied by the pusher.
  • the vacuum source on the receiving surface holds the IC units, and so assists against buckling.
  • any marginal lifting of a single IC unit may be sufficient to induce buckling into the row of units and hence prevent pushing into the tube loader. Accordingly, whilst a vacuum source may exist in resisting buckling, it is incapable of preventing it.
  • the present invention therefore introduces the cover assembly 73 comprising a pair of covers 15 which are arranged to open in the first position exposing the receiving surface 20 and automatically close on the shuttle table on moving to the second position so as to constrain the units during the application of the axial load.
  • the cover assembly includes a pair of linkage assemblies 72 used to transfer the movement of the follower 55 as it moves with the shape of the cam 60.
  • the cam 60 in this case, is an annulus having a circular aperture to fit the shaft 45 with an elliptical peripheral shape.
  • the major axis of the ellipse corresponds to the first position, by pushing the follower outwards.
  • the linkage assembly then pushes the cover outwards to the open position, exposing the receiving surface of the shuttle table.
  • the minor axis of them ellipse corresponds to the second position, drawing the follower inwards, and so closing the cover over the receiving surface and shuttle table.
  • moving from the first position to the second position involves rotating the shuttle table 10 90° from the first position shown in Figures 1A and 2A to the second position shown in Figures IB and 2B.
  • the cam 60 is fixed relative to the shuttle table 10 and therefore does not rotate.
  • the cam 60 is engaged with followers 55 having rollers which roll around the peripheral edge of the cam 60.
  • the cover assembly includes the cover 15 which is pivotal around a hinge 75.
  • a spring 80 is included such that the cover 15 is biased to the closed position.
  • On an underside of the cover 15 is a recess 70 which corresponds to a roller projection 65.
  • the roller projection 65 fits into the recess 70 so as to permit the cover 15 to sit flat upon the shuttle table 10 in a closed position over the receiving surface 20.
  • the cam 60 pushes the followers 55 outwards and consequently pushing the cover assembly upwards through the linkage assembly. This causes the projection 65 to disengage from the recess 70 and so a combination of outward translation and rotation about hinge 75 causes the cover 15 to move away from the receiving surface 20.
  • the cover With the cover in place as shown in Figure 1 B at the second position, the gap between the IC unit on the receiving surface 20 and the cover is very small.
  • the cover may include a lip 17 which projects downward from the cover 15 toward the receiving surface 20.
  • the length of the lip may be designed to have a very low gap and so further prevent any chance of buckling of the line of IC units during the application of the axial load by the pusher 105.

Abstract

A shuttle table assembly comprising a shuttle table for receiving a plurality of IC units at a first position and for offloading said units at a second position, said shuttle table movable from said first to second position; a cover assembly mounted to said shuttle table, the cover assembly having at least one cover movable from an open position to a closed position, said closed position covering said units on the shuttle table; wherein the cover assembly is coupled to a guide for closing the cover as the shuttle table moves from the first to the second position.

Description

SYSTEM AND METHOD FOR OFFLOADING IC UNITS
Field of the invention
The invention relates to the processing of singulated integrated circuit (IC) units. In particular, the invention relates to the offloading of said units from a processing machine. Background
Integrated circuit units are formed in substrates of several IC units and subsequently singulated into individual units ready for assembly into a respective device. The assembly of such a device requires batches of units to be delivered to the manufacturer in a way that can be incorporated into the assembly process. One such way involves the integrated circuit units to be delivered in containers such as tubes which can be mounted to an assembly device ready for automatic installation. Accordingly, the processing device must include a method of loading the singulated units into a tube such as having a table for receiving the units and a pusher to apply an axial force to a line of units on the table and subsequently pushed into the tube. A problem with this process is that application of the axial force may cause buckling of the IC units, preventing insertion into the tube. One way of preventing this buckling is to constrain the units with an upper barrier, encasing the units. However, it is impractical for the barrier to be placed and then removed for delivery of units to the table. It would therefore be advantageous if a means of constraining the units could be used for a continuous or batch process. Summary of invention
In a first aspect the invention provides a shuttle table assembly comprising a shuttle table for receiving a plurality of IC units at a first position and for offloading said units at a second position, said shuttle table movable from said first to second position; a cover assembly mounted to said shuttle table, the cover assembly having at least one cover movable from an open position to a closed position, said closed position covering said units on the shuttle table; wherein the cover assembly is coupled to a guide for closing the cover as the shuttle table moves from the first to the second position. In a second aspect the invention process a method for delivering IC units, the method comprising the steps of: placing a plurality of IC units on a shuttle table at a first position; moving said shuttle table to a second position; during the moving step, closing a cover over the shuttle table, and then; offloading said units at a second position. Accordingly, by providing a guide to guide the cover assembly to close over the shuttle table, IC units placed on the shuttle table are constrained in the vertical direction, In a subsequent step, offloading the units may then be done through applying an axial load to the units without causing buckling to the units, preventing further movement. Brief Description of Drawings
It will be convenient to further describe the present invention with respect to the accompanying drawings that illustrate possible arrangements of the invention. Other arrangements of the invention are possible and consequently, the particularity of the accompanying drawings is not to be understood as superseding the generality of the preceding description of the invention. Figure 1A is an elevation sectional view of a shuttle table assembly in a first position according to one embodiment of the present invention;
Figure IB is an elevation sectional view of the shuttle table assembly of Figure 1A in a second position.
Figure 2A is a plan view of the shuttle table assembly according to Figure 1 A; Figure 2B is a plan view of the shuttle table assembly according to Figure IB and; Figure 3 is a side elevation view of the shuttle table assembly of Figure IB. Detailed Description
Figures 1A, I B, 2A, 2B and 3 show one embodiment of the present invention whereby a shuttle table assembly 5 is movable from a first position to a second position. In the first position, IC units 30 are delivered 35 to a receiving surface 20 on the shuttle table 10. Each IC unit 30 is delivered by a picker 25 having a vacuum engagement to engage the IC units 30 which is subsequently released in order to disengage the unit 30.
The receiving surface 20 may or may not have a vacuum source to engage the unit. Whilst a shuttle table according to the prior art may require a vacuum source, the introduction of the cover 15 makes the vacuum source unnecessary. Nevertheless, it will be appreciated that in some applications a vacuum source may still be useful for shuttle assembly according to the present invention. The shuttle table assembly 5 includes a rotation assembly 40 including a rotatable pedestal 45 for rotating the shuttle table 10 about a vertical axis 50 from a first position as shown in Figure 1A to a second position shown in Figure IB. The first position shown in Figure 1A is intended to receive the IC units 30. The second position shown in Figure IB is intended to offload the unit 30 using a pusher 105 to apply an axial load 1 10 to the line of IC units on the receiving surface 20. The units 30 are then subsequently slid into a tube loader (not shown) or other means for containing multiple IC units for delivery to an end customer. A problem of the prior art is the tendency for the IC units to buckle on application of the axial load applied by the pusher. Hence, the vacuum source on the receiving surface holds the IC units, and so assists against buckling. However, any marginal lifting of a single IC unit may be sufficient to induce buckling into the row of units and hence prevent pushing into the tube loader. Accordingly, whilst a vacuum source may exist in resisting buckling, it is incapable of preventing it.
The present invention therefore introduces the cover assembly 73 comprising a pair of covers 15 which are arranged to open in the first position exposing the receiving surface 20 and automatically close on the shuttle table on moving to the second position so as to constrain the units during the application of the axial load.
In this embodiment the cover assembly includes a pair of linkage assemblies 72 used to transfer the movement of the follower 55 as it moves with the shape of the cam 60. The cam 60, in this case, is an annulus having a circular aperture to fit the shaft 45 with an elliptical peripheral shape. The major axis of the ellipse corresponds to the first position, by pushing the follower outwards. The linkage assembly then pushes the cover outwards to the open position, exposing the receiving surface of the shuttle table. The minor axis of them ellipse corresponds to the second position, drawing the follower inwards, and so closing the cover over the receiving surface and shuttle table.
In this embodiment, moving from the first position to the second position involves rotating the shuttle table 10 90° from the first position shown in Figures 1A and 2A to the second position shown in Figures IB and 2B. The cam 60 is fixed relative to the shuttle table 10 and therefore does not rotate. The cam 60 is engaged with followers 55 having rollers which roll around the peripheral edge of the cam 60.
The cover assembly according to this embodiment includes the cover 15 which is pivotal around a hinge 75. A spring 80 is included such that the cover 15 is biased to the closed position. On an underside of the cover 15 is a recess 70 which corresponds to a roller projection 65. In the closed position, as shown in Figure IB, the roller projection 65 fits into the recess 70 so as to permit the cover 15 to sit flat upon the shuttle table 10 in a closed position over the receiving surface 20. As the shuttle table 10 rotates from the second position shown in Figure IB to the first position shown in 1A, the cam 60 pushes the followers 55 outwards and consequently pushing the cover assembly upwards through the linkage assembly. This causes the projection 65 to disengage from the recess 70 and so a combination of outward translation and rotation about hinge 75 causes the cover 15 to move away from the receiving surface 20.
With the cover in place as shown in Figure 1 B at the second position, the gap between the IC unit on the receiving surface 20 and the cover is very small. In a further embodiment, in the event of the designer wishing to further reduce the gap, the cover may include a lip 17 which projects downward from the cover 15 toward the receiving surface 20. Thus, the inclusion of the lip 17 reduces the gap even further. The length of the lip may be designed to have a very low gap and so further prevent any chance of buckling of the line of IC units during the application of the axial load by the pusher 105.

Claims

1. A shuttle table assembly comprising
a shuttle table for receiving a plurality of IC units at a first position and for offloading said units at a second position, said shuttle table movable from said first to second position;
a cover assembly mounted to said shuttle table, the cover assembly having at least one cover movable from an open position to a closed position, said closed position covering said units on the shuttle table;
wherein the cover assembly is coupled to a guide for closing the cover as the shuttle table moves from the first to the second position.
2. The shuttle table assembly according to claim 1 wherein the shuttle table is rotatable from the first to the second position.
3. The shuttle table assembly according to claim 1 or 2 wherein movement between the first and second positions is a 90° rotation of the shuttle table.
4. The shuttle table assembly according to any one of claims 1 to 3, wherein the guide is a cam and the cover assembly is coupled to the cam through at least one follower in contact with said cam.
5. The shuttle table assembly according to any one of claims 1 to 4, wherein the cover assembly includes a pair of covers, each for covering half of the shuttle table and a corresponding follower for each cover in contact with said cam.
6. The shuttle table assembly according to claim 5, wherein the cover assembly includes a pair of linkage assemblies, each intermediate the cover and follower.
7. The shuttle table assembly according to claim 6, wherein each linkage assembly includes a spring for biasing the cover to the closed position.
8. The shuttle table assembly according to any one of claims 1 to 7, wherein each cover includes a recess on a side contiguous with the shuttle table and the shuttle table includes a corresponding projection such that in the closed position the projection is arranged to engage the recess so as to permit the cover to lie flat on said shuttle table, and in moving from the open position said projection is arranged to disengage from the recess and bias the cover upwards.
9. The shuttle table assembly according to any one of claims 5 to 8, wherein each of said covers includes a lip projecting so as to be directed towards an IC unit receiving surface of said shuttle table when in the closed position.
10. The shuttle table assembly according to any one of claims 1 to 9, further
including a pusher for applying an axial load to IC units on the shuttle table so as to offload said units from the shuttle table.
1. A method for delivering IC units, the method comprising the steps of: placing a plurality of IC units on a shuttle table at a first position;
moving said shuttle table to a second position;
during the moving step, closing a cover over the shuttle table, and then; offloading said units at a second position.
PCT/SG2011/000267 2010-10-14 2011-07-26 System and method for offloading ic units WO2012050524A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP11832846.7A EP2628175A4 (en) 2010-10-14 2011-07-26 System and method for offloading ic units
JP2013533821A JP2013541215A (en) 2010-10-14 2011-07-26 System and method for unloading integrated circuit units
CN2011800548167A CN103270584A (en) 2010-10-14 2011-07-26 System and method for offloading IC units
US13/879,323 US20130209205A1 (en) 2010-10-14 2011-07-26 System and method for offloading ic units
KR1020137012305A KR20140020830A (en) 2010-10-14 2011-07-26 System and method for offloading ic units

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SG201007630-5 2010-10-14
SG2010076305A SG180034A1 (en) 2010-10-14 2010-10-14 System and method for offloading ic units

Publications (1)

Publication Number Publication Date
WO2012050524A1 true WO2012050524A1 (en) 2012-04-19

Family

ID=45938542

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/SG2011/000267 WO2012050524A1 (en) 2010-10-14 2011-07-26 System and method for offloading ic units

Country Status (8)

Country Link
US (1) US20130209205A1 (en)
EP (1) EP2628175A4 (en)
JP (1) JP2013541215A (en)
KR (1) KR20140020830A (en)
CN (1) CN103270584A (en)
SG (1) SG180034A1 (en)
TW (1) TW201219284A (en)
WO (1) WO2012050524A1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4534695A (en) * 1983-05-23 1985-08-13 Eaton Corporation Wafer transport system
JPH06244273A (en) * 1993-02-17 1994-09-02 Mitsubishi Materials Shilicon Corp Magazine stand
US20030129045A1 (en) * 2001-08-31 2003-07-10 Bonora Anthony C. Universal modular wafer transport system

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4907931A (en) * 1988-05-18 1990-03-13 Prometrix Corporation Apparatus for handling semiconductor wafers
US5848702A (en) * 1997-06-05 1998-12-15 Advanced Micro Devices, Inc. Tray with flippable cover
US20050011056A1 (en) * 2003-07-14 2005-01-20 Pylant James D. Bare die tray clip
JP2005116762A (en) * 2003-10-07 2005-04-28 Fujitsu Ltd Method for protecting semiconductor device, cover for semiconductor device, semiconductor device unit, and packaging structure of semiconductor device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4534695A (en) * 1983-05-23 1985-08-13 Eaton Corporation Wafer transport system
JPH06244273A (en) * 1993-02-17 1994-09-02 Mitsubishi Materials Shilicon Corp Magazine stand
US20030129045A1 (en) * 2001-08-31 2003-07-10 Bonora Anthony C. Universal modular wafer transport system

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2628175A4 *

Also Published As

Publication number Publication date
US20130209205A1 (en) 2013-08-15
SG180034A1 (en) 2012-05-30
JP2013541215A (en) 2013-11-07
EP2628175A4 (en) 2014-11-12
EP2628175A1 (en) 2013-08-21
CN103270584A (en) 2013-08-28
KR20140020830A (en) 2014-02-19
TW201219284A (en) 2012-05-16

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