WO2012035172A3 - Assembly and method for influencing the kinetics of chemical reactions by means of acoustic surface waves - Google Patents

Assembly and method for influencing the kinetics of chemical reactions by means of acoustic surface waves Download PDF

Info

Publication number
WO2012035172A3
WO2012035172A3 PCT/EP2011/066251 EP2011066251W WO2012035172A3 WO 2012035172 A3 WO2012035172 A3 WO 2012035172A3 EP 2011066251 W EP2011066251 W EP 2011066251W WO 2012035172 A3 WO2012035172 A3 WO 2012035172A3
Authority
WO
WIPO (PCT)
Prior art keywords
waves
kinetics
influencing
surface waves
assembly
Prior art date
Application number
PCT/EP2011/066251
Other languages
German (de)
French (fr)
Other versions
WO2012035172A2 (en
Inventor
Gerhard Lindner
Sandro Krempel
Katrin Schmidt
Original Assignee
Hochschule Für Angewandte Wissenschaften Fachhochschule Coburg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hochschule Für Angewandte Wissenschaften Fachhochschule Coburg filed Critical Hochschule Für Angewandte Wissenschaften Fachhochschule Coburg
Priority to EP11771050.9A priority Critical patent/EP2616572B1/en
Publication of WO2012035172A2 publication Critical patent/WO2012035172A2/en
Publication of WO2012035172A3 publication Critical patent/WO2012035172A3/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/20—Electroplating using ultrasonics, vibrations
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/10—Agitating of electrolytes; Moving of racks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

The invention relates to an assembly for carrying out a chemical reaction, comprising a reaction vessel (8) in which at least one active surface (11) is arranged, which is in contact with a fluid (31) at least in some sections, means (4) for generating acoustic surface waves (6) in the at least one active surface (11), wherein at least some of the surface waves (6) excited in the at least one active surface (11) are converted into volume sound waves (7) within the fluid (31) such that a chemical reaction taking place at the at least one active surface (11), or a preceding physical event, is influenced, in particular accelerated, by the surface waves (6) in the at least one active surface (11) and/or by the volume sound waves (7) in the fluid (31). The invention further relates to methods for influencing the kinetics of chemical reactions by means of acoustic surface waves.
PCT/EP2011/066251 2010-09-17 2011-09-19 Assembly and method for influencing the kinetics of chemical reactions by means of acoustic surface waves WO2012035172A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP11771050.9A EP2616572B1 (en) 2010-09-17 2011-09-19 Assembly and method for influencing the kinetics of chemical reactions by means of acoustic surface waves

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010040996 2010-09-17
DE102010040996.0 2010-09-17

Publications (2)

Publication Number Publication Date
WO2012035172A2 WO2012035172A2 (en) 2012-03-22
WO2012035172A3 true WO2012035172A3 (en) 2012-12-27

Family

ID=44897705

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2011/066251 WO2012035172A2 (en) 2010-09-17 2011-09-19 Assembly and method for influencing the kinetics of chemical reactions by means of acoustic surface waves

Country Status (2)

Country Link
EP (1) EP2616572B1 (en)
WO (1) WO2012035172A2 (en)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0890658A2 (en) * 1997-06-11 1999-01-13 Reynolds Tech Fabricators, Incorporated Megasonic plating system
US6368482B1 (en) * 2000-09-19 2002-04-09 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration, Washington, Dc (Us) Plating processes utilizing high intensity acoustic beams
US20030064586A1 (en) * 2001-09-28 2003-04-03 Merchant Sailesh Mansinh Method and apparatus for controlling contamination during the electroplating deposition of metals onto a semiconductor wafer surface
US20040022957A1 (en) * 2000-07-13 2004-02-05 Thompson G Alan Process for deposition of metal on a surface
US20040168706A1 (en) * 2003-02-28 2004-09-02 Lam Research Corporation Method and apparatus for megasonic cleaning with reflected acoustic waves
US20050227488A1 (en) * 2004-03-31 2005-10-13 O'brien Kevin P Capping of copper structures in hydrophobic ILD using aqueous electro-less bath
DE102007043563A1 (en) * 2007-09-13 2009-03-19 Bell, Guido, Dr. Etching, galvanizing, cleaning and photoresist developing of a substrate with megasonic support, comprise carrying out megasonic excitation by standard megasonic-oscillation of cool bar- and atomizer application
RU2353713C1 (en) * 2008-02-21 2009-04-27 Федеральное государственное унитарное предприятие "Всероссийский научно-исследовательский институт авиационных материалов" (ФГУП "ВИАМ") Cadmium-plating electrolyte and method of cadmic coatings plating on metal products

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0890658A2 (en) * 1997-06-11 1999-01-13 Reynolds Tech Fabricators, Incorporated Megasonic plating system
US20040022957A1 (en) * 2000-07-13 2004-02-05 Thompson G Alan Process for deposition of metal on a surface
US6368482B1 (en) * 2000-09-19 2002-04-09 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration, Washington, Dc (Us) Plating processes utilizing high intensity acoustic beams
US20030064586A1 (en) * 2001-09-28 2003-04-03 Merchant Sailesh Mansinh Method and apparatus for controlling contamination during the electroplating deposition of metals onto a semiconductor wafer surface
US20040168706A1 (en) * 2003-02-28 2004-09-02 Lam Research Corporation Method and apparatus for megasonic cleaning with reflected acoustic waves
US20050227488A1 (en) * 2004-03-31 2005-10-13 O'brien Kevin P Capping of copper structures in hydrophobic ILD using aqueous electro-less bath
DE102007043563A1 (en) * 2007-09-13 2009-03-19 Bell, Guido, Dr. Etching, galvanizing, cleaning and photoresist developing of a substrate with megasonic support, comprise carrying out megasonic excitation by standard megasonic-oscillation of cool bar- and atomizer application
RU2353713C1 (en) * 2008-02-21 2009-04-27 Федеральное государственное унитарное предприятие "Всероссийский научно-исследовательский институт авиационных материалов" (ФГУП "ВИАМ") Cadmium-plating electrolyte and method of cadmic coatings plating on metal products

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JENS GEORG KAUFMANN ET AL: "Megasonic agitation for enhanced electrodeposition of copper", MICROSYSTEM TECHNOLOGIES ; MICRO AND NANOSYSTEMS INFORMATION STORAGE AND PROCESSING SYSTEMS, SPRINGER, BERLIN, DE, vol. 15, no. 8, 2 June 2009 (2009-06-02), pages 1245 - 1254, XP019719778, ISSN: 1432-1858 *

Also Published As

Publication number Publication date
EP2616572A2 (en) 2013-07-24
EP2616572B1 (en) 2019-07-10
WO2012035172A2 (en) 2012-03-22

Similar Documents

Publication Publication Date Title
WO2010083349A3 (en) Isomerization of 1,1,3,3-tetrafluoropropene
WO2006113122A3 (en) Aqueous catalytic process for the preparation of thiocarboxylate silane
SG152151A1 (en) Membrane, water treatment system, and associated method
MY155399A (en) METHOD FOR PRODUCING ?,ß-UNSATURATED C10-ALDEHYDES
MY160244A (en) Device and method for generating a beam of a acoustic energy from a borehole, and applications thereof
IN2014DN09796A (en)
WO2014058744A3 (en) In vivo and in vitro olefin cyclopropanation catalyzed by heme enzymes
EP2985079A8 (en) Production process of a core/shell structured solid support metal catalyst
WO2008098198A3 (en) Alkane oxidation by modified hydroxylases
GB0612094D0 (en) Electrode, method of manufacture and use thereof
WO2012050392A3 (en) Container in which biofilm formation-inhibiting microorganisms are immobilized, and water treatment apparatus using membrane using same
WO2013068569A3 (en) Assembly for transferring structure-borne sound waves to a body
WO2006105082A3 (en) Alkane oxidation by modified hydroxylases
WO2012141666A3 (en) A method for microfabrication of a capacitive micromachined ultrasonic transducer comprising a diamond membrane and a transducer thereof
WO2011100752A3 (en) Methods and materials for assessing rna expression
WO2012156517A3 (en) Ultrasonic sensor and method for producing same
EP2826782A3 (en) Processes for producing organohalohydrosilanes
WO2012035172A3 (en) Assembly and method for influencing the kinetics of chemical reactions by means of acoustic surface waves
WO2017176334A3 (en) Exothermic reaction analysis by pre-reaction sample retention
WO2007144064A3 (en) Ultrasound sensor and method for producing an ultrasound sensor
WO2010002944A3 (en) Method for acceleration of cumene oxidation
WO2012154436A3 (en) Polynuclear metal clusters, methods of making, and methods of use thereof
WO2012079944A3 (en) Flange for pressure measuring cells or for chemical seal devices and method for producing such flanges
WO2011149517A3 (en) Methods for recycling carbonate byproducts in a hydrogen producing reaction
WO2012009058A3 (en) Process for producing olefin oxide

Legal Events

Date Code Title Description
NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 2011771050

Country of ref document: EP

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 11771050

Country of ref document: EP

Kind code of ref document: A2