WO2012034551A3 - Linear drive - Google Patents

Linear drive Download PDF

Info

Publication number
WO2012034551A3
WO2012034551A3 PCT/DE2011/001636 DE2011001636W WO2012034551A3 WO 2012034551 A3 WO2012034551 A3 WO 2012034551A3 DE 2011001636 W DE2011001636 W DE 2011001636W WO 2012034551 A3 WO2012034551 A3 WO 2012034551A3
Authority
WO
WIPO (PCT)
Prior art keywords
housing
piston
interior
substantially cylindrical
widened portion
Prior art date
Application number
PCT/DE2011/001636
Other languages
German (de)
French (fr)
Other versions
WO2012034551A2 (en
Inventor
Yuri Krasikov
Olaf Neubauer
David Antonio Castano Bardawil
Original Assignee
Forschungszentrum Jülich GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungszentrum Jülich GmbH filed Critical Forschungszentrum Jülich GmbH
Priority to EP11797180.4A priority Critical patent/EP2616692B1/en
Priority to ES11797180.4T priority patent/ES2549921T3/en
Publication of WO2012034551A2 publication Critical patent/WO2012034551A2/en
Publication of WO2012034551A3 publication Critical patent/WO2012034551A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/08—Characterised by the construction of the motor unit
    • F15B15/10—Characterised by the construction of the motor unit the motor being of diaphragm type

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Actuator (AREA)
  • Fluid-Pressure Circuits (AREA)

Abstract

The invention relates to a linear drive having a housing (1) with an end plate (EP) and with a front plate (SP), and having a piston (2) which is movably arranged in the interior of the housing and which is connected to a piston rod (KS). The front plate, which is fixedly connected to the housing, has an opening for leading the piston rod out of the housing, wherein the front surface is sealed off with respect to the movable piston by a first bellows system (7). The piston in the interior of the housing has a substantially cylindrical widened portion which is arranged around the central supply. The actuator is characterized in that at least one flexible element (6) connects the substantially cylindrical widened portion of the piston and the central supply line, and in that a second bellows system (3) is arranged between the substantially cylindrical widened portion of the piston and the end plate or the housing in such a way that two cavities separated from one another in a gas-tight manner are thereby formed in the interior of the actuator, wherein the means for supplying and discharging the first fluid medium (M1) are connected to the first cavity (5), and the means for supplying and discharging the second fluid medium (M2) are connected to the second cavity (4).
PCT/DE2011/001636 2010-09-15 2011-08-18 Linear drive WO2012034551A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP11797180.4A EP2616692B1 (en) 2010-09-15 2011-08-18 Linear actuator
ES11797180.4T ES2549921T3 (en) 2010-09-15 2011-08-18 Linear drive

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE201010045437 DE102010045437A1 (en) 2010-09-15 2010-09-15 linear actuator
DE102010045437.0 2010-09-15

Publications (2)

Publication Number Publication Date
WO2012034551A2 WO2012034551A2 (en) 2012-03-22
WO2012034551A3 true WO2012034551A3 (en) 2012-06-07

Family

ID=45350574

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2011/001636 WO2012034551A2 (en) 2010-09-15 2011-08-18 Linear drive

Country Status (4)

Country Link
EP (1) EP2616692B1 (en)
DE (1) DE102010045437A1 (en)
ES (1) ES2549921T3 (en)
WO (1) WO2012034551A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013209141A1 (en) 2013-05-16 2014-06-18 Carl Zeiss Laser Optics Gmbh Actuator for optical assembly used for inspecting semiconductor wafer manufacturing process, has actuating object that is partially encased in bellows made of elastomer, in gastight manner
WO2024079111A1 (en) 2022-10-12 2024-04-18 Vacom Vakuum Komponenten & Messtechnik Gmbh Device for holding, positioning and/or moving an object in a vacuum
DE102022130959B3 (en) 2022-10-12 2023-08-24 Vacom Vakuum Komponenten & Messtechnik Gmbh Device for holding, positioning and/or moving an object in a vacuum

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62220767A (en) * 1986-03-18 1987-09-28 Kiyousan Denki Kk Bellows
GB2258498A (en) * 1991-08-05 1993-02-10 Nat Oilwell An actuator
EP1532872A1 (en) * 2003-11-22 2005-05-25 Hauni Primary GmbH Device and method for pressing tobacco, ribs or the like

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT385572B (en) * 1984-12-21 1988-04-25 Andritz Ag Maschf ADJUSTMENT CONTROL DEVICE

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62220767A (en) * 1986-03-18 1987-09-28 Kiyousan Denki Kk Bellows
GB2258498A (en) * 1991-08-05 1993-02-10 Nat Oilwell An actuator
EP1532872A1 (en) * 2003-11-22 2005-05-25 Hauni Primary GmbH Device and method for pressing tobacco, ribs or the like

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
SADAKOV S ET AL: "Conceptual design of the ITER upper port plug for charge exchange diagnostic", FUSION ENGINEERING AND DESIGN, ELSEVIER SCIENCE PUBLISHERS, AMSTERDAM, NL, vol. 84, no. 7-11, 1 June 2009 (2009-06-01), pages 1671 - 1675, XP026171772, ISSN: 0920-3796, [retrieved on 20090610], DOI: 10.1016/J.FUSENGDES.2008.12.056 *

Also Published As

Publication number Publication date
EP2616692A2 (en) 2013-07-24
ES2549921T3 (en) 2015-11-03
DE102010045437A1 (en) 2012-03-15
WO2012034551A2 (en) 2012-03-22
EP2616692B1 (en) 2015-07-29

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