WO2012029667A1 - Method of adjusting moisture content of plastic film, method of manufacturing color filter, and device for adjusting moisture content of plastic film - Google Patents

Method of adjusting moisture content of plastic film, method of manufacturing color filter, and device for adjusting moisture content of plastic film Download PDF

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Publication number
WO2012029667A1
WO2012029667A1 PCT/JP2011/069332 JP2011069332W WO2012029667A1 WO 2012029667 A1 WO2012029667 A1 WO 2012029667A1 JP 2011069332 W JP2011069332 W JP 2011069332W WO 2012029667 A1 WO2012029667 A1 WO 2012029667A1
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Prior art keywords
plastic film
gas
humidity
moisture content
gap layer
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PCT/JP2011/069332
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French (fr)
Japanese (ja)
Inventor
雅規 梅谷
勇樹 熊谷
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大日本印刷株式会社
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Publication of WO2012029667A1 publication Critical patent/WO2012029667A1/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters

Definitions

  • the present invention relates to a method for adjusting the moisture content of a plastic film for adjusting the moisture content of a strip-shaped plastic film, a method for producing a color filter including this method, and a moisture content adjusting device for a plastic film, and in particular, the moisture content of a plastic film.
  • the present invention relates to a method for adjusting the moisture content of a plastic film, a method for producing a color filter, and a moisture content adjusting device for a plastic film.
  • a roll-shaped plastic film usually has a different moisture content depending on the film position (outside winding, inside winding, width direction).
  • the moisture content refers to the ratio (weight ratio) of the amount of water absorbed in the plastic film to the saturated water absorption amount of the plastic film at the temperature and humidity of the atmosphere.
  • the time required to reach an equilibrium state differs between the inner part and the inner part.
  • the moisture content of the plastic film differs between the outer part and the inner part.
  • plastic films immediately after being manufactured by a film manufacturer are often in a dry state due to the characteristics of the manufacturing method. For this reason, the portion inside the roll of the roll-shaped plastic film is in a state where the moisture content is extremely lowered, and the portion outside the roll is in a state where the moisture content is increased by exposure to outside air.
  • the moisture content of the plastic film is maintained uniformly. It is difficult to do.
  • the moisture content of the plastic film may fluctuate.
  • the manufacturing process of a display member using a roll-shaped plastic film there are many factors that cause the moisture content to be non-uniform.
  • storage curing
  • a lot of time is spent to manufacture the display member.
  • the moisture content of the plastic film in the display member and the dimensional change of each of the plurality of patterns formed on the plastic film will be described.
  • the long dimension here is, for example, the size of the display size of the display, and it is necessary that the pixels are regularly arranged from end to end of the screen and the length from the end to the end is also determined. Therefore, when the moisture content of the plastic film on which the pattern is formed is changed and the plastic film is expanded and contracted, the dimension of the pattern is deviated from the design dimension and cannot be commercialized as a display member.
  • a so-called printing is a plate
  • a photolithography is a photomask
  • a direct drawing ink-jet printing is a design program.
  • the drawing operation determines the position and dimensions of the pattern. In these, when the pattern is formed, the dimension of the pattern is closest to the design dimension.
  • Patent Document 1 proposes a method of storing a plastic film in a high-temperature and high-humidity environment so that the moisture content and dimensions of the plastic film are within ⁇ 10% of the equilibrium moisture content at a predetermined temperature and humidity. ing.
  • the time required to reach the predetermined moisture content differs between the inner part and the outer part of the roll-shaped plastic film. For this reason, much time is spent in order to make the moisture content of a plastic film uniform.
  • Patent Document 2 a predetermined dimension is accurately reproduced by managing the time until the exposure after the plastic film is heated and dehydrated.
  • precise time management is required, and there is a problem that the time required to reach a predetermined moisture content differs between the inner part and the outer part of the roll-shaped plastic film. .
  • the present invention has been made in consideration of such points, and a method for adjusting the moisture content of a plastic film capable of making the moisture content of the plastic film uniform in a short time, and a method for producing a color filter including this method
  • an object of the present invention is to provide an apparatus for adjusting the moisture content of a plastic film.
  • the present invention includes a step of winding a belt-shaped plastic film through a support member between the plastic films, and forming a wound body of the plastic film such that a gap layer is interposed between the plastic films by the support member; And a step of supplying a gas having a predetermined temperature and humidity to the void layer.
  • a method for adjusting the moisture content of a plastic film is provided.
  • the gas in the step of supplying a gas having a predetermined temperature and humidity to the gap layer, the gas is fed into the gap layer from one end face of the plastic film winding body. May be.
  • the gas in the step of supplying a gas having a predetermined temperature and humidity to the gap layer, the gas is alternately supplied to the gap layer from both end faces of the plastic film winding body. It may be sent in.
  • a gas having a predetermined temperature and humidity may be sent to the void layer through a foreign matter removing filter that removes foreign matter.
  • the gas having a predetermined temperature and humidity may be sent to the gap layer after the temperature and humidity are adjusted.
  • the temperature and humidity of the gas fed into the void layer are the same as the temperature and humidity of the outside air when forming a pattern made of metal or resin that is subsequently formed on the plastic film. You may make it adjust so that it may become.
  • the wound body of the plastic film in the step of supplying a gas having a predetermined temperature and humidity to the gap layer, the wound body of the plastic film is accommodated in the chamber, and the gas is sucked from the chamber and the temperature is increased.
  • the humidity may be adjusted, and the adjusted gas may be sent into the gap layer.
  • the gas in the gap layer is sucked from one end face of the plastic film winding body, A gas having a predetermined temperature and humidity may be sucked into the gap layer from the other end face.
  • the gas in the gap layer is alternately sucked from both end faces of the plastic film winding body. Then, at the time of suction, a gas having a predetermined temperature and humidity may be sucked into the gap layer from the end face opposite to the end face to be sucked.
  • the step of supplying a gas having a predetermined temperature and humidity to the gap layer sucks the gas in the gap layer from one end face of the plastic film winding body, A step of sucking a gas having a predetermined temperature and humidity into the gap layer from the other end face, and a step of feeding the gas having a predetermined temperature and humidity into the gap layer from the one end face of the plastic film winding body.
  • the plastic film winding body is Water absorption treatment may be performed.
  • the plastic film winding body after the step of forming the plastic film winding body, before the step of supplying a gas having a predetermined temperature and humidity to the gap layer, the plastic film winding body is You may make it dry-process.
  • the present invention includes a step of adjusting the moisture content of the plastic film by executing the above-described method for adjusting the moisture content of the plastic film, and a step of forming a pattern having functionality for a color filter on the plastic film.
  • a method for producing a color filter characterized in that a color filter is obtained.
  • a belt-shaped plastic film is wound between plastic films via a support member, and the support member holds a plastic film winding body formed such that a gap layer is interposed between the plastic films.
  • a gas supply unit for supplying a gas having a predetermined temperature and humidity to the void layer of the wound body of the plastic film held by the holding member.
  • the gas supply unit has a blower unit that sends a gas having a predetermined temperature and humidity from one end face of the plastic film winding body to the gap layer. Also good.
  • the blower unit may be provided with a foreign matter removing filter for removing foreign matters from the gas fed into the gap layer.
  • the air blowing unit may be provided with an air conditioning unit for adjusting the temperature and humidity of the gas sent to the gap layer.
  • the apparatus further includes a chamber for accommodating a wound body of the plastic film, and the gas supply unit further includes a suction unit that sucks the gas in the chamber and sends it to the air conditioning unit. You may be allowed to.
  • the holding member, the gas supply unit, and the air conditioning unit may be accommodated in a chamber.
  • the gas supply unit sucks the gas in the gap layer from one end face of the plastic film winding body, and passes the predetermined temperature into the gap layer from the other end face. You may make it have the suction unit which sucks in the gas of humidity.
  • the gas supply unit includes a blowing function for sending a gas having a predetermined temperature and humidity from one end face of the plastic film winding body to the gap layer, and a gap from the one end face.
  • the plastic film is wound up with a gap layer formed between the plastic films by the support member to form a wound body of the plastic film, and the predetermined temperature and humidity are formed in the gap layer. Gas is supplied. Thereby, the whole plastic film can be in contact with a gas having a predetermined temperature and humidity. For this reason, the moisture content of a plastic film can be made uniform in a short time.
  • the present invention it is possible to form a pattern made of metal or resin and having functionality for a color filter on a plastic film having a uniform moisture content. For this reason, the dimensional accuracy of the pattern can be improved, and the accuracy of the display image of the color filter can be improved.
  • FIG. 1 is a perspective view showing a water content adjusting device for a plastic film in a first embodiment of the present invention.
  • FIG. 2 is a cross-sectional view showing a state in which a plastic film winding body is held in the plastic film moisture content adjusting device according to the first embodiment of the present invention.
  • FIG. 3 is a perspective view showing a plastic film winding body according to the first embodiment of the present invention.
  • Fig.4 (a) is a top view which shows an example of arrangement
  • FIG. 4B is a side view of FIG.
  • FIG.4 (c) is a top view which shows the other example of arrangement
  • FIG.4 (d) is a side view of FIG.4 (c).
  • FIG.4 (e) is a top view which shows the further another example of arrangement
  • FIG. 4F is a side view of FIG.
  • FIG. 5 is a view showing a flowchart of a method for adjusting the moisture content of a plastic film according to the first embodiment of the present invention.
  • FIG. 6 is a view showing a gas flow in the plastic film moisture content adjusting method according to the first embodiment of the present invention.
  • FIG. 7: is a perspective view which shows the moisture content adjusting device of the plastic film in the 2nd Embodiment of this invention.
  • FIG. 8 is a perspective view which shows the moisture content adjusting device of the plastic film in the 3rd Embodiment of this invention.
  • FIG. 9 is a perspective view which shows the moisture content adjusting device of the plastic film in the 4th Embodiment of this invention.
  • FIG. 10 is a perspective view which shows the modification of the moisture content adjusting device of the plastic film in the 4th Embodiment of this invention.
  • FIGS. 1 to 6 are diagrams showing a plastic film moisture content adjusting method, a color filter manufacturing method including the method, and a plastic film moisture content adjusting device according to the first embodiment of the present invention. is there.
  • the moisture content adjusting device 10 for the plastic film 1 in the present embodiment will be described with reference to FIGS. 1 and 2.
  • the moisture content adjusting device 10 of the plastic film 1 is for adjusting (curing) the moisture content of the plastic film 1 used as a base material of a display member (not shown) by the color filter 7 or the like, for example. Is.
  • the moisture content adjusting device 10 for a plastic film 1 includes a belt-shaped plastic film 1 wound around a plastic film 1 via a support member 2, and the plastic film 1 is supported by the support member 2.
  • the plastic film 1 is wound around a cylindrical core 5, and a closing member 12 is attached to the hollow portion 5 a of the core 5, so that the core 5
  • the hollow portion 5a is closed.
  • the closing member 12 is formed of a columnar member, and is fitted into the hollow portion 5a of the core 5 so as to be attached to the core 5.
  • any structure can be used as long as it is possible to prevent the gas sent from the blower unit 21 described later from flowing into the hollow portion 5 a of the core 5.
  • a gap layer 3 is formed between the plastic films 1 by the support member 2.
  • positioning of the supporting member 2 is demonstrated using FIG.
  • the support member 2 is arranged to extend in the axial direction of the core 5 (direction perpendicular to the longitudinal direction of the plastic film 1).
  • the supporting members 2 are arranged so as to be shifted from each other in the circumferential direction. Thereby, the gas of predetermined temperature and humidity can contact the whole plastic film 1 uniformly.
  • the support member 2 extends in the direction perpendicular to the axial direction of the core 5 (longitudinal direction of the plastic film 1). It is arrange
  • the support member 2 is preferably made of a porous sheet as will be described later so as to supply a gas having a predetermined temperature and humidity to the gap layer 3.
  • FIGS. 4E and 4F unevenness is formed on the contact surface of the support member 2 arranged in the same manner as the arrangement example shown in FIGS. 4C and 4D with the plastic film 1. Yes.
  • a gas having a predetermined temperature and humidity can be supplied to the gap layer 3 through the recess 2 a of the support member 2.
  • the support member 2 includes a pattern 6 made of a metal or a resin already formed on the plastic film 1 in the plastic film 1 or a pattern 6 formed in a process after the moisture content adjustment of the plastic film 1 is completed. It is preferable to arrange
  • the pattern 6 formed on the plastic film 1 is made of metal or resin and has a desired functionality for the color filter 7 and is appropriately selected according to the use of the plastic film 1 and the like. is there. Specific examples of such a pattern include, for example, a black matrix for the color filter 7 and pixels of a plurality of colors (red, green, and blue), a metal pattern of a TFT array, or a conductive / insulating pattern on a circuit board. Can be mentioned.
  • the holding member 11 is fitted to the outer peripheral surface of the winding body 4 of the plastic film 1 to hold the winding body 4.
  • the holding member 11 is fitted to the outer peripheral surface of the winding body 4, and the closing member 12 is fitted into the hollow portion 5 a of the core 5. It is prevented from leaking into the hollow portion 5a of the core 5 or the core 5, and is reliably fed into the gap layer 3.
  • the gas supply unit 20 in the present embodiment is from a blower unit 21 that sends (supply) a gas having a predetermined temperature and humidity from one end face (first end face 4a) of the winding body 4 of the plastic film 1 to the gap layer 3. It has become. That is, the blower unit 21 has a blower port 22, and the gas is sent from the blower port 22 to the gap layer 3, and the fed gas passes through the gap layer 3 and the other end surface ( The second end face 4b) is discharged.
  • the gas fed into the gap layer 3 is composed of outside air having a predetermined temperature and humidity (for example, 25 degrees, 40% RH).
  • the plastic film 1 applicable in the present embodiment may be flexible enough to be wound up in a roll shape.
  • PEN polyethylene naphthalate
  • PET polyethylene terephthalate
  • PC polycarbonate
  • PI polyimide
  • PEEK polyether ether ketone
  • PE polyethylene
  • PP polypropylene
  • PPS polyphenylene sulfide
  • PI polyetherimide
  • CTA cellulose triacetate
  • COP cyclic polyolefin
  • PMMA polymethyl methacrylate
  • PSF polyamideimide
  • PAI polyamideimide
  • PAI norbornene resin
  • PEN and PET are preferable.
  • the thickness of the plastic film 1 is preferably in the range of 1 ⁇ m to 1000 ⁇ m, more preferably in the range of 10 ⁇ m to 500 ⁇ m, and further preferably in the range of 50 ⁇ m to 250 ⁇ m. This is because if the thickness of the plastic film 1 is excessively larger than the above range, the flexibility is impaired, the plastic film 1 is easily broken, and it becomes difficult to form the wound body 4 of the roll-shaped plastic film 1. On the other hand, when it is thinner than the above range, there is no strain and handling in each step becomes difficult.
  • the width of the plastic film 1 is not particularly limited, but is preferably in the range of 100 mm to 1000 mm, and more preferably in the range of 150 mm to 600 mm.
  • the plastic film 1 may have a single layer structure or a structure in which a plurality of layers are laminated.
  • the support member 2 used in the present embodiment is a member for forming the void layer 3 between the plastic films 1 wound around the core 5.
  • the supporting member 2 is not particularly limited as long as it has flexibility, high air permeability and moisture permeability, and high releasability.
  • a moisture permeable film such as a porous sheet can be suitably used.
  • Specific examples of the porous sheet include polyethylene porous sheets (Sunmap manufactured by Nitto Denko), microvoided biaxially stretched polypropylene (YUPO manufactured by YUPO Corporation), and nonwoven fabrics.
  • the surface roughness (Ra) of the porous sheet is preferably 1 ⁇ m or more, more preferably 2 ⁇ m or more, and further preferably 5 ⁇ m or more. preferable. This is because when Ra is smaller than the above range, the support member 2 has less voids, and the air permeability and moisture permeability deteriorate. In addition, Ra of a porous sheet is 10 micrometers or less normally.
  • the “surface roughness (Ra)” here is “arithmetic average surface roughness” and is measured in accordance with JIS-B0601.
  • an embossed film on which irregularities are formed can be used.
  • Such an embossed film has, for example, relatively large irregularities such that the contact area with the plastic film 1 is about 0.01 mm 2 to 100 mm 2, and the interval between the irregularities is, for example, about 0.1 mm to 10 mm. Therefore, it is suitable for imparting air permeability to the gap layer 3.
  • the embossed film may be, for example, a carrier tape that is used for general purposes, or a member in which an arbitrary uneven shape is formed by embossing or the like.
  • the thickness of the support member 2 is preferably in the range of 20 to 2000 ⁇ m, more preferably in the range of 50 to 1000 ⁇ m, and still more preferably in the range of 100 to 700 ⁇ m. If the thickness of the support member 2 is too thin than the above range, the gap layer 3 tends to be crushed when the plastic film 1 is wound, and if it is too thick, the plastic film 1 is difficult to wind up. Because it becomes.
  • the support member 2 can be partially disposed on the plastic film 1 so that the moisture content inside and outside the roll when the plastic film 1 is wound is uniform. It is not particularly limited as long as it is a wide width, and is appropriately selected depending on the width of the plastic film 1 and the size of the region where the pattern 6 is formed.
  • the contact area between the support member 2 and the plastic film 1 is sufficiently small. By doing so, it becomes possible to make the moisture content of the plastic film 1 uniform.
  • a belt-shaped plastic film 1, a support member 2, and a core 5 are prepared (step S1).
  • the belt-shaped plastic film 1 is wound around the core 5 via the support member 2 between the plastic films 1, and the gap film 3 is interposed between the plastic films 1 by the support member 2.
  • 1 winding body 4 is formed (step S2).
  • the supporting member 2 is arranged in a region other than the pattern 6 made of metal or resin already formed on the plastic film 1 (or a region other than the pattern 6 formed thereafter) in the plastic film 1.
  • the method for winding the plastic film 1 is not particularly limited as long as it can be wound with low tension without crushing the gaps of the support member 2, and the gap layer 3 can be formed.
  • a general winder (not shown) can be used.
  • it is preferable that the number of windings of the plastic film 1 is appropriately selected according to the application.
  • the closing member 12 is attached to the core 5 on which the wound body 4 of the plastic film 1 is formed (step S3).
  • the columnar blocking member 12 is fitted into the hollow portion 5 a of the core 5.
  • step S4 the wound body 4 of the plastic film 1 is held by the holding member 11 (step S4).
  • the inner peripheral surface of the holding member 11 is fitted to the outer peripheral surface of the winding body 4 to hold the winding body 4.
  • a gas having a predetermined temperature and humidity is supplied to the gap layer 3 for a predetermined time (step S5).
  • a gas (outside air) having a predetermined temperature and humidity is taken in by the blower unit 21, passes through the inside of the holding member 11 from the blower port 22, and the second of the winding body 4 of the plastic film 1. It is continuously fed into the gap layer 3 from the one end face 4a for a predetermined time. During this time, as shown in FIG. 6, the gas passes through the gap layer 3 from the first end face 4 a of the winding body 4 of the plastic film 1 and is discharged from the second end face 4 b.
  • the plastic film 1 can be continuously in contact with a gas having a predetermined temperature and humidity.
  • the removed wound body 4 of the plastic film 1 is set in a color filter manufacturing apparatus (not shown), and the plastic film 1 is fed out.
  • the plastic film 1 is made of metal or resin, and has a functionality for the color filter 7.
  • a pattern 6 (for example, a black matrix for the color filter 7 and pixels of a plurality of colors) is formed.
  • a specific pattern forming method is not particularly limited as long as the desired pattern 6 can be formed with high accuracy. For example, a generally known method such as a photolithography method or an inkjet method is used. Can do. In this way, the color filter 7 is obtained (see FIG. 4).
  • the plastic film 1 is wound up with the gap layer 3 formed by the support member 2 interposed therebetween, so that the wound body 4 of the plastic film 1 is formed.
  • the gas is continuously fed. Thereby, the whole plastic film 1 can be in contact with a gas having a predetermined temperature and humidity. For this reason, the moisture content of the plastic film 1 can be made uniform in a short time.
  • the pattern 6 made of metal or resin and having functionality for the color filter 7 can be formed on the plastic film 1 having a uniform moisture content. For this reason, the dimensional accuracy of the pattern 6 can be improved, and the accuracy of the display image of the color filter 7 can be improved.
  • the present invention is not limited to this, and the gas may be alternately fed into the gap layer 3 from both end faces 4 a and 4 b of the winding body 4 of the plastic film 1.
  • the gas is fed from the first end surface 4a of the winding body 4 to the gap layer 3 for a predetermined time
  • the winding is performed so that the second end surface 4b of the winding body 4 is disposed on the blower unit 21 side.
  • the orientation of the capturing body 4 may be changed, and gas may be sent from the second end surface 4b to the gap layer 3 for a predetermined time.
  • the moisture content can be made more uniform over the entire plastic film 1.
  • the gas supply unit 20 includes the blower unit 21 that sends gas into the gap layer 3
  • the present invention is not limited to this, and the gas supply unit 20 sucks the gas in the gap layer 3 from the first end face 4a of the winding body 4 of the plastic film 1, and the inside of the gap layer from the second end face 4b.
  • It may be composed of a suction unit 23 (see FIG. 1) for sucking gas into.
  • a gas (outside air) having a predetermined temperature and humidity is discharged from the second end surface 4b.
  • the whole plastic film 1 can be in contact with a gas having a predetermined temperature and humidity, and the moisture content of the plastic film 1 can be made uniform in a short time. Further, the gas in the gap layer 3 is alternately sucked from both end faces of the winding body 4 of the plastic film 1, and at the time of suction, the gas on the side opposite to the end face of the winding body 4 is sucked. A gas (outside air) having a predetermined temperature and humidity may be sucked from the end face.
  • the second end surface 4b of the winding body 4 is arranged on the suction unit 23 side.
  • the direction of the winding body 4 may be changed, and the gas in the gap layer 3 may be sucked from the second end face 4b for a predetermined time.
  • the moisture content can be made more uniform over the entire plastic film 1.
  • the gas supply unit 20 includes the blower unit 21 that sends gas into the gap layer 3
  • the present invention is not limited to this, and the air supply function as a blower unit in which the gas supply unit 20 sends gas from the first end surface 4a of the winder 4 of the plastic film 1 to the gap layer 3 and the winder 4
  • a suction function as a suction unit that sucks the gas in the gap layer 3 from the first end face 4a and sucks the gas from the second end face 4b may be provided.
  • the gas in the gap layer 3 is sucked from the first end face 4a of the winding body 4 of the plastic film 1 for a predetermined time, and the gas having a predetermined temperature and humidity is drawn from the second end face 4b to the gap layer 3.
  • Outside air is sucked, and then a gas (outside air) having a predetermined temperature and humidity is fed into the gap layer 3 from the first end face 4a of the winding body 4 of the plastic film 1.
  • the winding body 4 of the plastic film 1 may be subjected to water absorption treatment after step S2 and before step S3. good.
  • the moisture content of the plastic film 1 can be raised in a short time to the moisture content in an equilibrium state with a gas having a predetermined temperature and humidity.
  • water absorption treatment water may be jetted or immersed in the winding body 4 of the plastic film 1, or a method of exposing to a high temperature and high humidity atmosphere may be used.
  • the winding body 4 of the plastic film 1 may be dried after step S2 and before step S3. good. Thereby, the moisture content of the plastic film 1 can be lowered in a short time to the moisture content in an equilibrium state with a gas having a predetermined temperature and humidity.
  • the method etc. which heat the winding body 4 of the plastic film 1 are mentioned.
  • the air unit is mainly provided with a foreign substance removal filter for removing foreign substances from the gas fed into the gap layer, and the other configuration is shown in FIGS.
  • FIGS. This is substantially the same as the first embodiment shown in FIG.
  • the same parts as those of the first embodiment shown in FIGS. 1 to 6 are denoted by the same reference numerals, and detailed description thereof is omitted.
  • the blower unit 21 is provided with a foreign matter removal filter 30 that removes foreign matters such as dust from the gas (outside air) fed into the gap layer 3.
  • the gas from which foreign matters such as dust are removed can be fed into the gap layer 3. For this reason, it is possible to prevent foreign matters such as dust from adhering to the surface of the plastic film 1.
  • the third embodiment shown in FIG. 8 is mainly different in that an air conditioning unit that adjusts the temperature and humidity of the gas fed into the air gap layer is provided in the blower unit.
  • This is substantially the same as the first embodiment shown in FIG.
  • the same parts as those of the first embodiment shown in FIGS. 1 to 6 are denoted by the same reference numerals, and detailed description thereof is omitted.
  • an air conditioning unit 40 that adjusts the temperature and humidity of the gas fed into the gap layer 3 is provided in the blower unit 21.
  • This air conditioning unit 40 takes in the outside air and changes the temperature and humidity of the taken in outside air into the plastic film 1, which is made of a metal or resin, and forms a pattern 6 having functionality for the color filter 7. Adjust so that it is the same as the temperature and humidity of the outside air. Or you may make it the air-conditioning unit 40 adjust the temperature / humidity of the taken-out outside air so that it may become the same as the temperature / humidity of the outside air in the arbitrary processes which the plastic film 1 exposes after this.
  • the air conditioning unit 40 preferably adjusts the temperature and humidity of the outside air to 25 degrees and 40% RH. Thereby, the dimensional accuracy of the pattern 6 when the display panel is completed can be further improved.
  • the air conditioning unit 40 is provided with a foreign matter removing filter 30 that removes foreign matters such as dust contained in the outside air sent to the air gap layer 3. That is, the foreign matter removing filter 30 removes foreign matters such as dust from the outside air taken into the air conditioning unit 40.
  • the outside air is made of a metal or resin formed on the plastic film 1 and has the same temperature and humidity as the outside air when forming the pattern 6 having the functionality for the color filter 7. It adjusts so that it may become and it is sent to the space
  • the entire plastic film 1 can be in contact with the outside air having the temperature and humidity when the pattern 6 is formed. For this reason, the moisture content can be made uniform over the entire plastic film 1 to the moisture content in an equilibrium state with the outside air when the pattern 6 is formed.
  • the temperature and humidity of the gas supplied to the gap layer 3 can be arbitrarily adjusted. For this reason, the moisture content of the plastic film 1 can be made into the moisture content in an equilibrium state with the gas of arbitrary temperature and humidity.
  • the outside air from which foreign matters such as dust are removed can be fed into the gap layer 3. For this reason, it is possible to prevent foreign matters such as dust from adhering to the surface of the plastic film 1.
  • the fourth embodiment shown in FIG. 9 is mainly different in that a plastic film winding body is accommodated in the chamber, and the other configuration is the first embodiment shown in FIGS. Is almost the same.
  • FIG. 9 the same parts as those of the first embodiment shown in FIGS. 1 to 6 are denoted by the same reference numerals, and detailed description thereof is omitted.
  • the wound body 4 of the plastic film 1 is accommodated in a chamber 50.
  • the gas supply unit 20 is provided with an air conditioning unit 40 that adjusts the temperature and humidity of the gas supplied to the gap layer 3.
  • this air conditioning unit 40 adjusts the temperature and humidity of gas similarly to 3rd Embodiment.
  • the gas supply unit 20 includes a blower unit 21 that sends gas into the gap layer 3 and a suction unit 51 that sucks the gas in the chamber 50. That is, the gas supply unit 20 sucks the gas in the chamber 50 and sends it to the air conditioning unit 40, and the gas whose temperature and humidity are adjusted by the air conditioning unit 40 is sent to the first end face 4 a of the winding body 4 of the plastic film 1. To the gap layer 3.
  • the gas in the chamber 50 is sucked, the temperature and humidity are adjusted by the air conditioning unit 40, and the gap layer 3 is formed from the first end face 4 a of the winding body 4 of the plastic film 1.
  • the gas fed into the gap layer 3 passes through the gap layer 3 and is discharged into the chamber 50 from the second end face 4 b of the winding body 4.
  • the entire plastic fill can come into contact with a gas having a predetermined temperature and humidity. For this reason, a moisture content can be made into the moisture content in an equilibrium state with the gas of predetermined temperature and humidity over the whole plastic film 1.
  • the temperature and humidity of the gas supplied to the gap layer 3 can be arbitrarily adjusted. For this reason, the moisture content of the plastic film 1 can be made into the moisture content in an equilibrium state with the gas of arbitrary temperature and humidity.
  • the wound body 4 of the plastic film 1 is accommodated in the chamber 50, a gas having a predetermined temperature and humidity fed into the gap layer 3 can be circulated. Thereby, the temperature and humidity of the gas fed into the gap layer 3 can be adjusted efficiently.
  • the chamber 50 may accommodate the holding member 11, the gas supply unit 20, and the air conditioning unit 40.
  • Example 1 The moisture content of each part of the plastic film 1 whose moisture content was adjusted by the moisture content adjusting method of the plastic film 1 of the present invention was measured.
  • a PET film (Cosmo Shine A4100, Toyobo Co., Ltd., Cosmo Shine A4100, 125 ⁇ m thickness) having a width of 300 mm and a length of 30 m is prepared as the plastic film 1, and a 30 mm wide porous film (Nitto Denko Sun) is prepared as the support member 2. Map, 200 ⁇ m thickness).
  • This porous film is disposed on both edges (both edges along the longitudinal direction) of the PET film, wound around a cylindrical core (inner diameter 3 inches) 5, and a gap layer 3 having a thickness of 200 ⁇ m between the PET films.
  • a wound body 4 of PET film with intervening film was formed.
  • the moisture content of the PET film was 0.11% to 0.12% over the whole (see Table 1).
  • the moisture content can be measured using a microwave on-line moisture meter (manufactured by Markham), an electric resistance moisture meter (manufactured by Yamazaki Seiki Laboratory Co., Ltd.) or the like, or according to JIS-K7209. You can also.
  • the closing member 12 was fitted into the hollow portion 5 a of the core 5, and the holding member 11 was fitted to the outer peripheral surface of the PET film winding body 4.
  • the gas supply unit 20 sucks the gas in the gap layer 3 from the first end face 4a of the PET film winding body 4 at a flow rate of 0.1 kPa and 700 m 3 / s for 48 hours, A gas having a predetermined temperature and humidity was sucked into the gap layer 3 from the end face 4b. In this example, 25 degrees and 40% RH of outside air was sucked into the gap layer 3.
  • Example 2 Using the PET film cured in Example 1, 100 patterns of 200 mm ⁇ 200 mm pattern 6 were formed. The temperature and humidity of the outside air during pattern formation was 25 degrees and 40% RH. As a pattern forming method, general photolithography was used.
  • the dimensional uniformity of the pattern 6 formed on each PET film was evaluated. That is, in the pattern 6 of the comparative example 2, the dimensional variation in the 100 patterns from the outer winding portion to the inner winding portion showed a difference of 40 ⁇ m with respect to the design dimension of 100 mm. In Pattern 6, the difference was within 10 ⁇ m. Thereby, the uniformity of the dimension of the pattern 6 was able to be confirmed.
  • the evaluation of the uniformity of dimensions can be performed as follows.
  • the design dimension of the pattern 6 is known, the degree of deviation of the measured dimension of each pattern 6 is evaluated with reference to the design dimension as described above. If the design dimension is unknown, an average dimension is obtained from the dimensions measured in any of the plurality of patterns 6, and how much the measured dimension of each pattern 6 is deviated from this average dimension as a reference. Evaluate whether Further, it is generally preferable to use a length measuring device for measuring the dimensions.
  • a precise length measuring machine capable of measuring dimensions to the micrometer unit is more preferable.
  • an ultra-precision automatic two-dimensional coordinate measuring machine manufactured by SOKKIA or a CNC image measuring system manufactured by Nikon Instruments Company can be used.

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Abstract

In the disclosed method of adjusting moisture content of plastic film, first, strip-shape plastic films (1) are wound with support members (2) between the plastic films (1), forming a roll body (4) of the plastic films (1) such that gap layers (3) exist between the plastic films (1) due to the support bodies (2). Next, a gas of a prescribed temperature and humidity level is supplied in the gap layers (3).

Description

プラスチックフィルムの含水率調整方法、カラーフィルターの製造方法、およびプラスチックフィルムの含水率調整装置Moisture content adjusting method for plastic film, method for producing color filter, and moisture content adjusting device for plastic film
　本発明は、帯状のプラスチックフィルムの含水率を調整するプラスチックフィルムの含水率調整方法、この方法を含むカラーフィルターの製造方法、およびプラスチックフィルムの含水率調整装置に係り、とりわけ、プラスチックフィルムの含水率を短時間で均一にすることができるプラスチックフィルムの含水率調整方法、カラーフィルターの製造方法、およびプラスチックフィルムの含水率調整装置に関する。 The present invention relates to a method for adjusting the moisture content of a plastic film for adjusting the moisture content of a strip-shaped plastic film, a method for producing a color filter including this method, and a moisture content adjusting device for a plastic film, and in particular, the moisture content of a plastic film. The present invention relates to a method for adjusting the moisture content of a plastic film, a method for producing a color filter, and a moisture content adjusting device for a plastic film.
　近年、カラーフィルターやＴＦＴアレイを構成するディスプレイ部材において、金属または樹脂からなり所定の機能性を有するパターンを形成するための基材として、フレキシブル性を有するロール状のプラスチックフィルムを用いることが研究されている。このように、基材をプラスチック製とすることにより、カラーフィルターやＴＦＴアレイを薄型化、低コスト化するとともに、基材が割れることを防止することができる。 In recent years, it has been studied to use a roll-shaped plastic film having flexibility as a base material for forming a pattern made of metal or resin and having a predetermined functionality in a display member constituting a color filter or a TFT array. ing. Thus, by making the base material made of plastic, it is possible to reduce the thickness and cost of the color filter and the TFT array and to prevent the base material from cracking.
　しかしながら、ディスプレイ部材の基材としてプラスチックフィルムを用いる場合、プラスチックフィルム上に所定の精度でブラックマトリクス、着色層、柱状構造部、ＴＦＴアレイを形成することが困難であるという問題があった。すなわち、プラスチックフィルム上に所定のパターンを形成するプロセスにおいて、フォトリソグラフィまたはインクジェット法等の微細加工手段が用いられるが、そのプロセスにおいては、プラスチックフィルムに加わる熱や、プラスチックフィルムが含有する水分量等によって、プラスチックフィルムの寸法が変化し、パターンの精度が損なわれる。 However, when a plastic film is used as the base material of the display member, there is a problem that it is difficult to form a black matrix, a colored layer, a columnar structure, and a TFT array on the plastic film with a predetermined accuracy. That is, in the process of forming a predetermined pattern on the plastic film, fine processing means such as photolithography or an ink jet method is used. In the process, heat applied to the plastic film, moisture content contained in the plastic film, etc. As a result, the dimensions of the plastic film change, and the accuracy of the pattern is impaired.
　このことに対処するために、例えば、特許文献１および２に示すような方法が開示されている。 In order to deal with this, for example, methods as disclosed in Patent Documents 1 and 2 are disclosed.
特開２００３－６６４２３号公報JP 2003-66423 A 特開２００３－１７７５５１号公報JP 2003-177551 A
　ところで、ロール状のプラスチックフィルムは、通常、フィルムの位置（巻外、巻内、幅方向）によって、含水率が異なる。ここで含水率とは、雰囲気の温湿度におけるプラスチックフィルムの飽和吸水量に対して、プラスチックフィルム内に吸収されている水分量の割合（重量比）をいう。プラスチックフィルムは、その含水率が外気との平衡状態の含水率より低い場合には、外気中の水分を吸収するが、平衡状態の含水率より高い場合には、プラスチックフィルム内の水分を放出する。プラスチックフィルムをロール状に巻いた場合、巻外側の部分は、巻内側の部分に比べて水分の移動が速いが、巻内側の部分は、水分の移動が極めて遅いため、巻外側の部分と巻内側の部分とで、平衡状態に達するまでの時間が異なる。その結果、プラスチックフィルムは、巻外側の部分と巻内側の部分とにおいて含水率が異なる。プラスチックフィルムの幅方向についても同様であり、プラスチックフィルムの幅方向の中心部分は、幅方向の端部に比べて水分の移動が遅くなり、中心部分と端部とにおいて含水率が異なる。このようなことから、プラスチックフィルムの含水率を均一にするためには、数週間から長くて数ヶ月の期間が必要となる。 Incidentally, a roll-shaped plastic film usually has a different moisture content depending on the film position (outside winding, inside winding, width direction). Here, the moisture content refers to the ratio (weight ratio) of the amount of water absorbed in the plastic film to the saturated water absorption amount of the plastic film at the temperature and humidity of the atmosphere. When the moisture content of the plastic film is lower than the moisture content in an equilibrium state with the outside air, the plastic film absorbs moisture in the outside air, but when the moisture content is higher than the moisture content in the equilibrium state, the plastic film releases moisture in the plastic film. . When a plastic film is wound into a roll, the movement of moisture is faster in the outer part than in the inner part, but the movement of moisture is extremely slow in the inner part. The time required to reach an equilibrium state differs between the inner part and the inner part. As a result, the moisture content of the plastic film differs between the outer part and the inner part. The same applies to the width direction of the plastic film. In the central portion in the width direction of the plastic film, the movement of moisture is slower than in the end portion in the width direction, and the moisture content is different between the center portion and the end portion. For this reason, in order to make the moisture content of the plastic film uniform, a period of several weeks to several months is required.
　また、フィルム製造メーカにおいて製造された直後のプラスチックフィルムは、その製造方法の特性から、乾燥状態であることが多い。このため、ロール状のプラスチックフィルムの巻内側の部分は、極度に含水率が低下した状態になっており、巻外側の部分は、外気にふれて含水率が上昇した状態になっている。ここで、製造直後に外気と遮断して乾燥状態を維持した場合であっても、ディスプレイ部材を製造する工程において、各プロセスで外気と触れるため、プラスチックフィルムの含水率を均一に維持して加工することは困難である。 Also, plastic films immediately after being manufactured by a film manufacturer are often in a dry state due to the characteristics of the manufacturing method. For this reason, the portion inside the roll of the roll-shaped plastic film is in a state where the moisture content is extremely lowered, and the portion outside the roll is in a state where the moisture content is increased by exposure to outside air. Here, even if it is a case where it is cut off from the outside air and maintained in a dry state immediately after production, in the process of manufacturing the display member, since it is in contact with the outside air in each process, the moisture content of the plastic film is maintained uniformly. It is difficult to do.
　また、ディスプレイ部材の製造工程では、加熱工程や、水と接触する工程などがあり、プラスチックフィルムの含水率が変動する場合もある。このように、ロール状のプラスチックフィルムを用いたディスプレイ部材の製造工程においては、その含水率が不均一となる要因が多く存在する。一方で、プロセス毎に、数週間から数ヶ月に亘って含水率を調整するために保管（養生）することが必要となれば、ディスプレイ部材を製造するために多くの時間が費やされる。 Also, in the manufacturing process of the display member, there are a heating process, a process of contacting with water, etc., and the moisture content of the plastic film may fluctuate. Thus, in the manufacturing process of a display member using a roll-shaped plastic film, there are many factors that cause the moisture content to be non-uniform. On the other hand, if storage (curing) is required for adjusting the moisture content over several weeks to several months for each process, a lot of time is spent to manufacture the display member.
　次に、ディスプレイ部材におけるプラスチックフィルムの含水率とプラスチックフィルムに形成される複数のパターンの各々の寸法変化について説明する。ディスプレイ部材は、数ミクロから数百ミクロンの微細なパターンが長寸法にわたって正確な位置に配列されている必要がある。ここでいう長寸法とは、例えば、ディスプレイの表示サイズの大きさであり、画面の端から端まで規則正しく画素が配列され、その端から端までの長さも決められた寸法である必要がある。したがって、パターンが形成されたプラスチックフィルムの含水率が変化してプラスチックフィルムが伸縮すると、パターンの寸法が設計寸法からずれることになり、ディスプレイ部材として製品化することができない。 Next, the moisture content of the plastic film in the display member and the dimensional change of each of the plurality of patterns formed on the plastic film will be described. In the display member, it is necessary that fine patterns of several micron to several hundreds of micron are arranged at accurate positions over a long dimension. The long dimension here is, for example, the size of the display size of the display, and it is necessary that the pixels are regularly arranged from end to end of the screen and the length from the end to the end is also determined. Therefore, when the moisture content of the plastic film on which the pattern is formed is changed and the plastic film is expanded and contracted, the dimension of the pattern is deviated from the design dimension and cannot be commercialized as a display member.
　ディスプレイ部材を製造するにあたり、所定の機能性を有するパターンを形成する方法はいくつかあるが、一般的な、いわゆる印刷では版、フォトリソグラフィではフォトマスク、直描のインクジェット印刷では、その設計プログラムによる描画動作が、パターンの位置および寸法を決定する。これらは、パターンが形成された際のそのパターンの寸法が、最も設計寸法に近くなっている。 In manufacturing a display member, there are several methods for forming a pattern having a predetermined functionality. In general, a so-called printing is a plate, a photolithography is a photomask, and a direct drawing ink-jet printing is a design program. The drawing operation determines the position and dimensions of the pattern. In these, when the pattern is formed, the dimension of the pattern is closest to the design dimension.
　ここで、含水率が各部分において異なるプラスチックフィルムにパターンを形成し、その後に、外気環境下で含水率が平衡状態になった場合、プラスチックフィルムの伸縮挙動がその各部で均一でないことから、形成されたパターンの寸法が異なるという問題がある。このため、パターンを形成する際には、ロール状のプラスチックフィルムの全体に亘って、含水率が均一であり、さらには、所定の外気の状態に対して、含水率が平衡状態になっていることが必要である。 Here, when a pattern is formed on a plastic film with different moisture content in each part, and then the moisture content is in an equilibrium state in the outside air environment, the stretch behavior of the plastic film is not uniform in each part. There is a problem that the dimensions of the formed patterns are different. For this reason, when forming a pattern, the moisture content is uniform throughout the roll-shaped plastic film, and the moisture content is in an equilibrium state with respect to a predetermined outside air state. It is necessary.
　ところで、特許文献１においては、プラスチックフィルムの含水率および寸法を、所定の温湿度における平衡含水率の±１０％以内にするために、プラスチックフィルムを高温高湿環境下で保管する方法が提案されている。しかしながら、この場合、上述したように、ロール状のプラスチックフィルムの巻内側の部分と巻外側の部分とにおいて、所定の含水率に達するまでの時間が異なる。このため、プラスチックフィルムの含水率を均一にするためには、多くの時間が費やされる。 By the way, Patent Document 1 proposes a method of storing a plastic film in a high-temperature and high-humidity environment so that the moisture content and dimensions of the plastic film are within ± 10% of the equilibrium moisture content at a predetermined temperature and humidity. ing. However, in this case, as described above, the time required to reach the predetermined moisture content differs between the inner part and the outer part of the roll-shaped plastic film. For this reason, much time is spent in order to make the moisture content of a plastic film uniform.
　また、特許文献２においては、プラスチックフィルムを加熱脱水処理した後、露光するまでの時間を管理することにより、所定の寸法を精度良く再現している。しかしながら、この場合、精密な時間管理が必要であり、また、ロール状のプラスチックフィルムの巻内側の部分と巻外側の部分とにおいて、所定の含水率に達するまでの時間が異なるという問題があった。 Also, in Patent Document 2, a predetermined dimension is accurately reproduced by managing the time until the exposure after the plastic film is heated and dehydrated. However, in this case, precise time management is required, and there is a problem that the time required to reach a predetermined moisture content differs between the inner part and the outer part of the roll-shaped plastic film. .
　本発明は、このような点を考慮してなされたものであり、プラスチックフィルムの含水率を短時間で均一にすることができるプラスチックフィルムの含水率調整方法、この方法を含むカラーフィルターの製造方法、およびプラスチックフィルムの含水率調整装置を提供することを目的とする。 The present invention has been made in consideration of such points, and a method for adjusting the moisture content of a plastic film capable of making the moisture content of the plastic film uniform in a short time, and a method for producing a color filter including this method And an object of the present invention is to provide an apparatus for adjusting the moisture content of a plastic film.
　本発明は、帯状のプラスチックフィルムを、プラスチックフィルム間に支持部材を介して巻き取り、当該支持部材によってプラスチックフィルム間に空隙層が介在されるように、プラスチックフィルムの巻取体を形成する工程と、空隙層に所定の温湿度の気体を供給する工程と、を備えたことを特徴とするプラスチックフィルムの含水率調整方法を提供する。 The present invention includes a step of winding a belt-shaped plastic film through a support member between the plastic films, and forming a wound body of the plastic film such that a gap layer is interposed between the plastic films by the support member; And a step of supplying a gas having a predetermined temperature and humidity to the void layer. A method for adjusting the moisture content of a plastic film is provided.
　なお、上述したプラスチックフィルムの含水率調整方法において、空隙層に所定の温湿度の気体を供給する工程において、当該気体は、プラスチックフィルムの巻取体の一方の端面から空隙層に送り込まれるようにしてもよい。 In the above-described method for adjusting the moisture content of a plastic film, in the step of supplying a gas having a predetermined temperature and humidity to the gap layer, the gas is fed into the gap layer from one end face of the plastic film winding body. May be.
　また、上述したプラスチックフィルムの含水率調整方法において、空隙層に所定の温湿度の気体を供給する工程において、当該気体は、プラスチックフィルムの巻取体の両方の端面から、交互に、空隙層に送り込まれるようにしてもよい。 In the above-described method for adjusting the moisture content of the plastic film, in the step of supplying a gas having a predetermined temperature and humidity to the gap layer, the gas is alternately supplied to the gap layer from both end faces of the plastic film winding body. It may be sent in.
　また、上述したプラスチックフィルムの含水率調整方法において、所定の温湿度の気体は、異物を除去する異物除去フィルターを通って空隙層に送り込まれるようにしてもよい。 Further, in the above-described method for adjusting the moisture content of the plastic film, a gas having a predetermined temperature and humidity may be sent to the void layer through a foreign matter removing filter that removes foreign matter.
　また、上述したプラスチックフィルムの含水率調整方法において、所定の温湿度の気体は、その温湿度が調整されて空隙層に送り込まれるようにしてもよい。 In the above-described method for adjusting the moisture content of the plastic film, the gas having a predetermined temperature and humidity may be sent to the gap layer after the temperature and humidity are adjusted.
　また、上述したプラスチックフィルムの含水率調整方法において、空隙層に送り込まれる気体の温湿度は、この後にプラスチックフィルムに形成される金属または樹脂からなるパターンを形成する際の外気の温湿度と同一となるように調整されるようにしてもよい。 In the above-described method for adjusting the moisture content of the plastic film, the temperature and humidity of the gas fed into the void layer are the same as the temperature and humidity of the outside air when forming a pattern made of metal or resin that is subsequently formed on the plastic film. You may make it adjust so that it may become.
　また、上述したプラスチックフィルムの含水率調整方法において、空隙層に所定の温湿度の気体を供給する工程において、プラスチックフィルムの巻取体はチャンバに収容され、チャンバ内から気体が吸引されてその温湿度が調整され、調整された気体が空隙層に送り込まれるようにしてもよい。 Further, in the above-described method for adjusting the moisture content of the plastic film, in the step of supplying a gas having a predetermined temperature and humidity to the gap layer, the wound body of the plastic film is accommodated in the chamber, and the gas is sucked from the chamber and the temperature is increased. The humidity may be adjusted, and the adjusted gas may be sent into the gap layer.
　また、上述したプラスチックフィルムの含水率調整方法において、空隙層に所定の温湿度の気体を供給する工程において、空隙層内の気体は、プラスチックフィルムの巻取体の一方の端面から吸引されて、他方の端面から空隙層に所定の温湿度の気体が吸い込まれるようにしてもよい。 Further, in the above-described method for adjusting the moisture content of the plastic film, in the step of supplying a gas having a predetermined temperature and humidity to the gap layer, the gas in the gap layer is sucked from one end face of the plastic film winding body, A gas having a predetermined temperature and humidity may be sucked into the gap layer from the other end face.
　また、上述したプラスチックフィルムの含水率調整方法において、空隙層に所定の温湿度の気体を供給する工程において、空隙層内の気体は、プラスチックフィルムの巻取体の両方の端面から、交互に吸引されて、吸引時に、吸引される側の端面とは反対側の端面から、空隙層に所定の温湿度の気体が吸い込まれるようにしてもよい。 In the method for adjusting the moisture content of the plastic film described above, in the step of supplying a gas having a predetermined temperature and humidity to the gap layer, the gas in the gap layer is alternately sucked from both end faces of the plastic film winding body. Then, at the time of suction, a gas having a predetermined temperature and humidity may be sucked into the gap layer from the end face opposite to the end face to be sucked.
　また、上述したプラスチックフィルムの含水率調整方法において、空隙層に所定の温湿度の気体を供給する工程は、空隙層内の気体を、プラスチックフィルムの巻取体の一方の端面から吸引して、他方の端面から空隙層に所定の温湿度の気体を吸い込む工程と、所定の温湿度の気体を、プラスチックフィルムの巻取体の当該一方の端面から空隙層に送り込む工程とを有するようにしてもよい。 Moreover, in the moisture content adjustment method of the plastic film described above, the step of supplying a gas having a predetermined temperature and humidity to the gap layer sucks the gas in the gap layer from one end face of the plastic film winding body, A step of sucking a gas having a predetermined temperature and humidity into the gap layer from the other end face, and a step of feeding the gas having a predetermined temperature and humidity into the gap layer from the one end face of the plastic film winding body. Good.
　また、上述したプラスチックフィルムの含水率調整方法において、プラスチックフィルムの巻取体を形成する工程の後、空隙層に所定の温湿度の気体を供給する工程の前に、プラスチックフィルムの巻取体が吸水処理されるようにしてもよい。 Further, in the above-described method for adjusting the moisture content of a plastic film, after the step of forming the plastic film winding body, before the step of supplying a gas having a predetermined temperature and humidity to the gap layer, the plastic film winding body is Water absorption treatment may be performed.
　また、上述したプラスチックフィルムの含水率調整方法において、プラスチックフィルムの巻取体を形成する工程の後、空隙層に所定の温湿度の気体を供給する工程の前に、プラスチックフィルムの巻取体が乾燥処理されるようにしてもよい。 Further, in the above-described method for adjusting the moisture content of a plastic film, after the step of forming the plastic film winding body, before the step of supplying a gas having a predetermined temperature and humidity to the gap layer, the plastic film winding body is You may make it dry-process.
　本発明は、上述のプラスチックフィルムの含水率調整方法を実行することにより、プラスチックフィルムの含水率を調整する工程と、プラスチックフィルムに、カラーフィルター用の機能性を有するパターンを形成する工程と、を備え、カラーフィルターを得ることを特徴とするカラーフィルターの製造方法を提供する。 The present invention includes a step of adjusting the moisture content of the plastic film by executing the above-described method for adjusting the moisture content of the plastic film, and a step of forming a pattern having functionality for a color filter on the plastic film. Provided is a method for producing a color filter, characterized in that a color filter is obtained.
　本発明は、帯状のプラスチックフィルムが、プラスチックフィルム間に支持部材を介して巻き取られ、当該支持部材によってプラスチックフィルム間に空隙層が介在されるように形成されたプラスチックフィルムの巻取体を保持する保持部材と、保持部材に保持されたプラスチックフィルムの巻取体の空隙層に所定の温湿度の気体を供給する気体供給ユニットと、を備えたことを特徴とするプラスチックフィルムの含水率調整装置を提供する。 In the present invention, a belt-shaped plastic film is wound between plastic films via a support member, and the support member holds a plastic film winding body formed such that a gap layer is interposed between the plastic films. And a gas supply unit for supplying a gas having a predetermined temperature and humidity to the void layer of the wound body of the plastic film held by the holding member. I will provide a.
　なお、上述したプラスチックフィルムの含水率調整装置において、気体供給ユニットは、プラスチックフィルムの巻取体の一方の端面から空隙層に所定の温湿度の気体を送り込む送風ユニットを有しているようにしてもよい。 In the above-described apparatus for adjusting the moisture content of the plastic film, the gas supply unit has a blower unit that sends a gas having a predetermined temperature and humidity from one end face of the plastic film winding body to the gap layer. Also good.
　また、上述したプラスチックフィルムの含水率調整装置において、送風ユニットに、空隙層に送り込む気体から異物を除去する異物除去フィルターが設けられているようにしてもよい。 Further, in the above-described apparatus for adjusting the moisture content of the plastic film, the blower unit may be provided with a foreign matter removing filter for removing foreign matters from the gas fed into the gap layer.
　また、上述したプラスチックフィルムの含水率調整装置において、送風ユニットに、空隙層に送り込む気体の温湿度を調整する空調ユニットが設けられているようにしてもよい。 Further, in the above-described moisture content adjusting device for a plastic film, the air blowing unit may be provided with an air conditioning unit for adjusting the temperature and humidity of the gas sent to the gap layer.
　また、上述したプラスチックフィルムの含水率調整装置において、プラスチックフィルムの巻取体を収容するチャンバを更に備え、気体供給ユニットは、チャンバ内の気体を吸引して空調ユニットに送る吸引ユニットを更に有しているようにしてもよい。 Further, in the above-described apparatus for adjusting the moisture content of a plastic film, the apparatus further includes a chamber for accommodating a wound body of the plastic film, and the gas supply unit further includes a suction unit that sucks the gas in the chamber and sends it to the air conditioning unit. You may be allowed to.
　また、上述したプラスチックフィルムの含水率調整装置において、保持部材、気体供給ユニット、および空調ユニットは、チャンバに収容されるようにしてもよい。 Further, in the above-described plastic film moisture content adjusting device, the holding member, the gas supply unit, and the air conditioning unit may be accommodated in a chamber.
　また、上述したプラスチックフィルムの含水率調整装置において、気体供給ユニットは、プラスチックフィルムの巻取体の一方の端面から空隙層内の気体を吸引して、他方の端面から空隙層内に所定の温湿度の気体を吸い込ませる吸引ユニットを有しているようにしてもよい。 In the above-described apparatus for adjusting the moisture content of a plastic film, the gas supply unit sucks the gas in the gap layer from one end face of the plastic film winding body, and passes the predetermined temperature into the gap layer from the other end face. You may make it have the suction unit which sucks in the gas of humidity.
　また、上述したプラスチックフィルムの含水率調整装置において、気体供給ユニットは、プラスチックフィルムの巻取体の一方の端面から空隙層に所定の温湿度の気体を送り込む送風機能と、当該一方の端面から空隙層内の気体を吸引して、他方の端面から空隙層内に所定の温湿度の気体を吸い込ませる吸引機能とを有しているようにしてもよい。 In the above-described apparatus for adjusting the moisture content of a plastic film, the gas supply unit includes a blowing function for sending a gas having a predetermined temperature and humidity from one end face of the plastic film winding body to the gap layer, and a gap from the one end face. You may make it have the attraction | suction function which attracts | sucks the gas in a layer and inhales the gas of predetermined temperature / humidity in a space | gap layer from the other end surface.
　本発明によれば、プラスチックフィルムが、支持部材によってプラスチックフィルム間に形成される空隙層を介在させて巻き取られて、プラスチックフィルムの巻取体が形成され、その空隙層に、所定の温湿度の気体が供給される。このことにより、プラスチックフィルムの全体が、所定の温湿度の気体に接することができる。このため、プラスチックフィルムの含水率を短時間で均一にすることができる。 According to the present invention, the plastic film is wound up with a gap layer formed between the plastic films by the support member to form a wound body of the plastic film, and the predetermined temperature and humidity are formed in the gap layer. Gas is supplied. Thereby, the whole plastic film can be in contact with a gas having a predetermined temperature and humidity. For this reason, the moisture content of a plastic film can be made uniform in a short time.
　また、本発明によれば、含水率が均一になったプラスチックフィルムに、金属または樹脂からなり、カラーフィルター用の機能性を有するパターンを形成することができる。このため、パターンの寸法精度を向上させて、カラーフィルターの表示画像の精度を向上させることができる。 Further, according to the present invention, it is possible to form a pattern made of metal or resin and having functionality for a color filter on a plastic film having a uniform moisture content. For this reason, the dimensional accuracy of the pattern can be improved, and the accuracy of the display image of the color filter can be improved.
図１は、本発明の第１の実施の形態におけるプラスチックフィルムの含水率調整装置を示す斜視図。FIG. 1 is a perspective view showing a water content adjusting device for a plastic film in a first embodiment of the present invention. 図２は、本発明の第１の実施の形態におけるプラスチックフィルムの含水率調整装置にプラスチックフィルムの巻取体を保持した状態を示す断面図。FIG. 2 is a cross-sectional view showing a state in which a plastic film winding body is held in the plastic film moisture content adjusting device according to the first embodiment of the present invention. 図３は、本発明の第１の実施の形態におけるプラスチックフィルムの巻取体を示す斜視図。FIG. 3 is a perspective view showing a plastic film winding body according to the first embodiment of the present invention. 図４（ａ）は、本発明の第１の実施の形態において、支持部材の配置の一例を示す平面図。図４（ｂ）は、図４（ａ）の側面図。図４（ｃ）は、支持部材の配置の他の例を示す平面図。図４（ｄ）は、図４（ｃ）の側面図。図４（ｅ）は、支持部材の配置の更なる他の例を示す平面図。図４（ｆ）は、図４（ｅ）の側面図。Fig.4 (a) is a top view which shows an example of arrangement | positioning of a supporting member in the 1st Embodiment of this invention. FIG. 4B is a side view of FIG. FIG.4 (c) is a top view which shows the other example of arrangement | positioning of a supporting member. FIG.4 (d) is a side view of FIG.4 (c). FIG.4 (e) is a top view which shows the further another example of arrangement | positioning of a supporting member. FIG. 4F is a side view of FIG. 図５は、本発明の第１の実施の形態におけるプラスチックフィルムの含水率調整方法のフローチャートを示す図。FIG. 5 is a view showing a flowchart of a method for adjusting the moisture content of a plastic film according to the first embodiment of the present invention. 図６は、本発明の第１の実施の形態におけるプラスチックフィルムの含水率調整方法において、気体の流れを示す図。FIG. 6 is a view showing a gas flow in the plastic film moisture content adjusting method according to the first embodiment of the present invention. 図７は、本発明の第２の実施の形態におけるプラスチックフィルムの含水率調整装置を示す斜視図。FIG. 7: is a perspective view which shows the moisture content adjusting device of the plastic film in the 2nd Embodiment of this invention. 図８は、本発明の第３の実施の形態におけるプラスチックフィルムの含水率調整装置を示す斜視図。FIG. 8: is a perspective view which shows the moisture content adjusting device of the plastic film in the 3rd Embodiment of this invention. 図９は、本発明の第４の実施の形態におけるプラスチックフィルムの含水率調整装置を示す斜視図。FIG. 9: is a perspective view which shows the moisture content adjusting device of the plastic film in the 4th Embodiment of this invention. 図１０は、本発明の第４の実施の形態におけるプラスチックフィルムの含水率調整装置の変形例を示す斜視図。FIG. 10: is a perspective view which shows the modification of the moisture content adjusting device of the plastic film in the 4th Embodiment of this invention.
　第１の実施の形態
　以下、図面を参照して、本発明の実施の形態について説明する。ここで、図１乃至図６は、本発明の第１の実施の形態におけるプラスチックフィルムの含水率調整方法、この方法を含むカラーフィルターの製造方法、およびプラスチックフィルムの含水率調整装置を示す図である。 DESCRIPTION OF EXEMPLARY EMBODIMENTS First Embodiment Hereinafter, an embodiment of the invention will be described with reference to the drawings. 1 to 6 are diagrams showing a plastic film moisture content adjusting method, a color filter manufacturing method including the method, and a plastic film moisture content adjusting device according to the first embodiment of the present invention. is there.
　まず、図１および図２により、本実施の形態におけるプラスチックフィルム１の含水率調整装置１０について説明する。ここで、プラスチックフィルム１の含水率調整装置１０は、例えば、カラーフィルター７などでディスプレイ部材（図示せず）の基材として使用されるプラスチックフィルム１の含水率を調整する（養生する）ためのものである。 First, the moisture content adjusting device 10 for the plastic film 1 in the present embodiment will be described with reference to FIGS. 1 and 2. Here, the moisture content adjusting device 10 of the plastic film 1 is for adjusting (curing) the moisture content of the plastic film 1 used as a base material of a display member (not shown) by the color filter 7 or the like, for example. Is.
　図１および図２に示すように、プラスチックフィルム１の含水率調整装置１０は、帯状のプラスチックフィルム１が、プラスチックフィルム１間に支持部材２を介して巻き取られ、当該支持部材２によってプラスチックフィルム１間に空隙層３が介在されるように形成されたプラスチックフィルム１の巻取体４を保持する保持部材１１と、保持部材１１に保持されたプラスチックフィルム１の巻取体４の空隙層３に所定の温湿度の気体を供給する気体供給ユニット２０とを備えている。 As shown in FIG. 1 and FIG. 2, the moisture content adjusting device 10 for a plastic film 1 includes a belt-shaped plastic film 1 wound around a plastic film 1 via a support member 2, and the plastic film 1 is supported by the support member 2. A holding member 11 for holding a wound body 4 of the plastic film 1 formed so that a gap layer 3 is interposed between the gaps 1, and a gap layer 3 of the wound body 4 of the plastic film 1 held by the holding member 11 And a gas supply unit 20 for supplying a gas having a predetermined temperature and humidity.
　ここで、プラスチックフィルム１は、図２および図３に示すように、円筒状のコア５に巻き取られており、このコア５の中空部５ａに、閉塞部材１２が取り付けられて、コア５の中空部５ａが閉塞されるようになっている。なお、本実施の形態においては、閉塞部材１２は、円柱状の部材からなっており、コア５の中空部５ａに嵌入して、コア５に取り付けられるようになっているが、このことに限られることはなく、後述する送風ユニット２１から送られる気体が、コア５の中空部５ａに流れることを防止可能であれば、任意の構造とすることができる。 Here, as shown in FIG. 2 and FIG. 3, the plastic film 1 is wound around a cylindrical core 5, and a closing member 12 is attached to the hollow portion 5 a of the core 5, so that the core 5 The hollow portion 5a is closed. In the present embodiment, the closing member 12 is formed of a columnar member, and is fitted into the hollow portion 5a of the core 5 so as to be attached to the core 5. However, any structure can be used as long as it is possible to prevent the gas sent from the blower unit 21 described later from flowing into the hollow portion 5 a of the core 5.
　プラスチックフィルム１の巻取体４には、支持部材２によってプラスチックフィルム１間に空隙層３が形成されている。ここで、図４を用いて、支持部材２の配置例について説明する。図４（ａ）、（ｂ）に示す配置例においては、支持部材２は、コア５の軸線方向（プラスチックフィルム１の長手方向に直交する方向）に延びるように配置されている。この場合、各支持部材２は周方向に互いにずらして配置されることが好ましい。このことにより、プラスチックフィルム１の全体に、均一に、所定の温湿度の気体が接することができる。また、図４（ｃ）、（ｄ）に示す配置例においては、支持部材２は、コア５の軸線方向に直交する方向（プラスチックフィルム１の長手方向）に延びるように、プラスチックフィルム１の長手方向に沿う両縁部に配置されている。この場合、空隙層３に所定の温湿度の気体を供給するように、支持部材２は、後述するような多孔質シートからなっていることが好ましい。さらに、図４（ｅ）、（ｆ）では、図４（ｃ）、（ｄ）に示す配置例と同様に配置された支持部材２のプラスチックフィルム１との接触面に、凹凸が形成されている。この場合、支持部材２の凹部２ａを介して、空隙層３に所定の温湿度の気体を供給することができるようになっている。 In the wound body 4 of the plastic film 1, a gap layer 3 is formed between the plastic films 1 by the support member 2. Here, the example of arrangement | positioning of the supporting member 2 is demonstrated using FIG. In the arrangement example shown in FIGS. 4A and 4B, the support member 2 is arranged to extend in the axial direction of the core 5 (direction perpendicular to the longitudinal direction of the plastic film 1). In this case, it is preferable that the supporting members 2 are arranged so as to be shifted from each other in the circumferential direction. Thereby, the gas of predetermined temperature and humidity can contact the whole plastic film 1 uniformly. Further, in the arrangement examples shown in FIGS. 4C and 4D, the support member 2 extends in the direction perpendicular to the axial direction of the core 5 (longitudinal direction of the plastic film 1). It is arrange | positioned at the both edges along a direction. In this case, the support member 2 is preferably made of a porous sheet as will be described later so as to supply a gas having a predetermined temperature and humidity to the gap layer 3. Further, in FIGS. 4E and 4F, unevenness is formed on the contact surface of the support member 2 arranged in the same manner as the arrangement example shown in FIGS. 4C and 4D with the plastic film 1. Yes. In this case, a gas having a predetermined temperature and humidity can be supplied to the gap layer 3 through the recess 2 a of the support member 2.
　また、支持部材２は、プラスチックフィルム１のうち、プラスチックフィルム１に既に形成された金属または樹脂からなるパターン６、またはプラスチックフィルム１の含水率調整が終了した後の工程で形成されるパターン６、以外の領域に配置されることが好ましい。このことにより、パターン６が損傷することを防止することができる。なお、プラスチックフィルム１に形成されるパターン６は、金属または樹脂からなり、カラーフィルター７用の所望の機能性を有するものであり、プラスチックフィルム１の用途等に応じて、適宜選択されるものである。このようなパターンの具体例としては、例えば、カラーフィルター７用のブラックマトリックス、および複数色（赤色、緑色、青色）の画素、ＴＦＴアレイの金属パターン、あるいは、回路基板における導電／絶縁パターン等を挙げることができる。 Further, the support member 2 includes a pattern 6 made of a metal or a resin already formed on the plastic film 1 in the plastic film 1 or a pattern 6 formed in a process after the moisture content adjustment of the plastic film 1 is completed. It is preferable to arrange | position in area | regions other than. This can prevent the pattern 6 from being damaged. The pattern 6 formed on the plastic film 1 is made of metal or resin and has a desired functionality for the color filter 7 and is appropriately selected according to the use of the plastic film 1 and the like. is there. Specific examples of such a pattern include, for example, a black matrix for the color filter 7 and pixels of a plurality of colors (red, green, and blue), a metal pattern of a TFT array, or a conductive / insulating pattern on a circuit board. Can be mentioned.
　保持部材１１は、図２に示すように、プラスチックフィルム１の巻取体４の外周面に嵌合して、当該巻取体４を保持するようになっている。このように、巻取体４の外周面に保持部材１１を嵌合させると共に、コア５の中空部５ａに、閉塞部材１２を嵌入させることにより、後述の送風ユニット２１から送られる気体が、外方またはコア５の中空部５ａに漏れることを防止し、空隙層３に確実に送り込まれるようになっている。 As shown in FIG. 2, the holding member 11 is fitted to the outer peripheral surface of the winding body 4 of the plastic film 1 to hold the winding body 4. As described above, the holding member 11 is fitted to the outer peripheral surface of the winding body 4, and the closing member 12 is fitted into the hollow portion 5 a of the core 5. It is prevented from leaking into the hollow portion 5a of the core 5 or the core 5, and is reliably fed into the gap layer 3.
　本実施の形態における気体供給ユニット２０は、プラスチックフィルム１の巻取体４の一方の端面（第１端面４ａ）から空隙層３に所定の温湿度の気体を送り込む（供給する）送風ユニット２１からなっている。すなわち、送風ユニット２１は、送風口２２を有し、この送風口２２から空隙層３に上記気体を送り込み、送り込まれた気体は、空隙層３を通って、巻取体４の他方の端面（第２端面４ｂ）から排出されるようになっている。なお、本実施の形態においては、空隙層３に送り込まれる気体としては、所定の温湿度（例えば、２５度、４０％ＲＨ）を有する外気からなっている。 The gas supply unit 20 in the present embodiment is from a blower unit 21 that sends (supply) a gas having a predetermined temperature and humidity from one end face (first end face 4a) of the winding body 4 of the plastic film 1 to the gap layer 3. It has become. That is, the blower unit 21 has a blower port 22, and the gas is sent from the blower port 22 to the gap layer 3, and the fed gas passes through the gap layer 3 and the other end surface ( The second end face 4b) is discharged. In the present embodiment, the gas fed into the gap layer 3 is composed of outside air having a predetermined temperature and humidity (for example, 25 degrees, 40% RH).
　次に、プラスチックフィルム１の材料について説明する。本実施の形態において適用可能なプラスチックフィルム１は、ロール状に巻き取り可能な程度に可撓性を有していればよい。例えば、ポリエチレンナフタレート（ＰＥＮ）、ポリエチレンテレフタレート（ＰＥＴ）、ポリカーボネート（ＰＣ）、ポリイミド（ＰＩ）、ポリエーテルエーテルケトン（ＰＥＥＫ）、ポリエチレン（ＰＥ）、ポリプロピレン（ＰＰ）、ポリフェニレンサルファイド（ＰＰＳ）、ポリエーテルイミド（ＰＥＩ）、セルローストリアセテート（ＣＴＡ）、環状ポリオレフィン（ＣＯＰ）、ポリメチルメタクリレート（ＰＭＭＡ）、ポリサルフォン（ＰＳＦ）、ポリアミドイミド（ＰＡＩ）、ノルボルネン系樹脂、アリルエステル樹脂等の合成樹脂を挙げることができ、とりわけ、ＰＥＮ、ＰＥＴが好ましい。 Next, the material of the plastic film 1 will be described. The plastic film 1 applicable in the present embodiment may be flexible enough to be wound up in a roll shape. For example, polyethylene naphthalate (PEN), polyethylene terephthalate (PET), polycarbonate (PC), polyimide (PI), polyether ether ketone (PEEK), polyethylene (PE), polypropylene (PP), polyphenylene sulfide (PPS), poly List synthetic resins such as etherimide (PEI), cellulose triacetate (CTA), cyclic polyolefin (COP), polymethyl methacrylate (PMMA), polysulfone (PSF), polyamideimide (PAI), norbornene resin, allyl ester resin In particular, PEN and PET are preferable.
　また、プラスチックフィルム１の厚さとしては、１μｍ～１０００μｍの範囲内であることが好ましく、１０μｍ～５００μｍの範囲内であることがより好ましく、５０μｍ～２５０μｍの範囲内であることがさらに好ましい。プラスチックフィルム１の厚さが上記範囲よりも厚すぎると、フレキシブル性が損なわれ、折れやすくなり、ロール状のプラスチックフィルム１の巻取体４を形成することが困難になるからである。一方、上記範囲よりも薄すぎると、こしが無くなり、各工程における取り扱いが困難になるからである。 The thickness of the plastic film 1 is preferably in the range of 1 μm to 1000 μm, more preferably in the range of 10 μm to 500 μm, and further preferably in the range of 50 μm to 250 μm. This is because if the thickness of the plastic film 1 is excessively larger than the above range, the flexibility is impaired, the plastic film 1 is easily broken, and it becomes difficult to form the wound body 4 of the roll-shaped plastic film 1. On the other hand, when it is thinner than the above range, there is no strain and handling in each step becomes difficult.
　プラスチックフィルム１の幅としては、特に限定されるものではないが、例えば、１００ｍｍ～１０００ｍｍの範囲内であることが好ましく、１５０ｍｍ～６００ｍｍの範囲内であることがより好ましい。 The width of the plastic film 1 is not particularly limited, but is preferably in the range of 100 mm to 1000 mm, and more preferably in the range of 150 mm to 600 mm.
　なお、プラスチックフィルム１は、単一層からなる構成であっても良く、あるいは、複数の層が積層された構成を有するものであっても良い。 The plastic film 1 may have a single layer structure or a structure in which a plurality of layers are laminated.
　次に、支持部材２について説明する。本実施の形態に用いられる支持部材２は、コア５に巻き取られたプラスチックフィルム１の間に空隙層３を形成するための部材である。このような支持部材２としては、可撓性を有し、通気性および透湿性が高く、かつ、離型性が高いものであれば、特に限定されるものではなく、例えば、入手性、通気性および透湿性を考慮し、多孔質シートなどの透湿フィルムを好適に用いることができる。多孔質シートとしては、具体的には、ポリエチレン多孔質シート（日東電工製サンマップ）、ミクロボイド二軸延伸ポリプロピレン（ユポ・コーポレーション製ユポ）、不織布等を挙げることができる。 Next, the support member 2 will be described. The support member 2 used in the present embodiment is a member for forming the void layer 3 between the plastic films 1 wound around the core 5. The supporting member 2 is not particularly limited as long as it has flexibility, high air permeability and moisture permeability, and high releasability. For example, availability, ventilation In consideration of the property and moisture permeability, a moisture permeable film such as a porous sheet can be suitably used. Specific examples of the porous sheet include polyethylene porous sheets (Sunmap manufactured by Nitto Denko), microvoided biaxially stretched polypropylene (YUPO manufactured by YUPO Corporation), and nonwoven fabrics.
　支持部材２に、多孔質シートを用いる場合には、多孔質シートの表面粗さ（Ｒａ）は、１μｍ以上であることが好ましく、２μｍ以上であることがより好ましく、５μｍ以上であることがさらに好ましい。Ｒａが上記範囲より小さいと、支持部材２が有する空隙が少なくなり、通気性および透湿性が低下するからである。なお、多孔質シートのＲａは、通常、１０μｍ以下である。また、ここでの「表面粗さ（Ｒａ）」は、「算術平均表面粗さ」であり、ＪＩＳ－Ｂ０６０１に準拠して測定される。 When a porous sheet is used for the support member 2, the surface roughness (Ra) of the porous sheet is preferably 1 μm or more, more preferably 2 μm or more, and further preferably 5 μm or more. preferable. This is because when Ra is smaller than the above range, the support member 2 has less voids, and the air permeability and moisture permeability deteriorate. In addition, Ra of a porous sheet is 10 micrometers or less normally. The “surface roughness (Ra)” here is “arithmetic average surface roughness” and is measured in accordance with JIS-B0601.
　支持部材の他の例としては、凹凸が形成されたエンボスフィルムなどを用いることができる。このようなエンボスフィルムは、例えば、プラスチックフィルム１との接触面積が０．０１ｍｍ２～１００ｍｍ２程度となるような比較的大きな凹凸を有し、凹凸の間隔が、例えば、０．１ｍｍ～１０ｍｍ程度と比較的大きな間隔となっているため、空隙層３に通気性を付与するためには好適である。また、エンボスフィルムは、例えば、汎用的に用いられるキャリアテープなどでも良いが、型押し加工などにより任意の凹凸形状が形成された部材を用いても良い。 As another example of the supporting member, an embossed film on which irregularities are formed can be used. Such an embossed film has, for example, relatively large irregularities such that the contact area with the plastic film 1 is about 0.01 mm 2 to 100 mm 2, and the interval between the irregularities is, for example, about 0.1 mm to 10 mm. Therefore, it is suitable for imparting air permeability to the gap layer 3. The embossed film may be, for example, a carrier tape that is used for general purposes, or a member in which an arbitrary uneven shape is formed by embossing or the like.
　支持部材２の厚さとしては、２０～２０００μｍの範囲内であることが好ましく、５０～１０００μｍの範囲内であることがより好ましく、１００～７００μｍの範囲内であることがさらに好ましい。支持部材２の厚さが上記範囲よりも薄すぎると、プラスチックフィルム１を巻き取ったときに空隙層３がつぶれやすくなり、上記範囲よりも厚すぎると、プラスチックフィルム１を巻き取ることが困難になるからである。 The thickness of the support member 2 is preferably in the range of 20 to 2000 μm, more preferably in the range of 50 to 1000 μm, and still more preferably in the range of 100 to 700 μm. If the thickness of the support member 2 is too thin than the above range, the gap layer 3 tends to be crushed when the plastic film 1 is wound, and if it is too thick, the plastic film 1 is difficult to wind up. Because it becomes.
　また、支持部材２の幅としては、プラスチックフィルム１を巻き取ったときの巻内および巻外の含水率が均一となるように支持部材２をプラスチックフィルム１上に部分的に配置することが可能な幅であれば特に限定されるものではなく、プラスチックフィルム１の幅、パターン６が形成される領域の大きさなどにより適宜選択されるものである。 Moreover, as for the width of the support member 2, the support member 2 can be partially disposed on the plastic film 1 so that the moisture content inside and outside the roll when the plastic film 1 is wound is uniform. It is not particularly limited as long as it is a wide width, and is appropriately selected depending on the width of the plastic film 1 and the size of the region where the pattern 6 is formed.
　なお、支持部材２が介在されることにより、プラスチックフィルム１の表面全体が、空隙層３に接する状態にすることは困難であるが、支持部材２とプラスチックフィルム１との接触面積を十分に小さくすることにより、プラスチックフィルム１の含水率を均一にすることが可能になる。 Although it is difficult for the entire surface of the plastic film 1 to be in contact with the gap layer 3 by interposing the support member 2, the contact area between the support member 2 and the plastic film 1 is sufficiently small. By doing so, it becomes possible to make the moisture content of the plastic film 1 uniform.
　次に、このような構成からなる本実施の形態の作用、すなわち本実施の形態によるプラスチックフィルム１の含水率調整方法およびこの方法を含むカラーフィルターの製造方法について、図５および図６を用いて説明する。 Next, the operation of the present embodiment having such a configuration, that is, the method for adjusting the moisture content of the plastic film 1 according to the present embodiment and the method for manufacturing a color filter including this method will be described with reference to FIGS. explain.
　まず、図５に示すように、帯状のプラスチックフィルム１、支持部材２、およびコア５を準備する（ステップＳ１）。 First, as shown in FIG. 5, a belt-shaped plastic film 1, a support member 2, and a core 5 are prepared (step S1).
　続いて、帯状のプラスチックフィルム１が、プラスチックフィルム１間に支持部材２を介してコア５に巻き取られ、当該支持部材２によってプラスチックフィルム１間に空隙層３が介在されるように、プラスチックフィルム１の巻取体４が形成される（ステップＳ２）。この場合、支持部材２は、プラスチックフィルム１のうち、プラスチックフィルム１に既に形成された金属または樹脂からなるパターン６以外の領域（またはこの後形成されるパターン６以外の領域）に配置されることが好ましい。なお、プラスチックフィルム１を巻き取る方法としては、支持部材２の空隙をつぶすことなく、低テンションで巻き取ることができる方法であれば、特に限定されることはなく、空隙層３を形成可能なように、一般的な巻取機（図示せず）を用いることができる。また、プラスチックフィルム１の巻回数は、用途等に応じて、適宜選択されることが好ましい。 Subsequently, the belt-shaped plastic film 1 is wound around the core 5 via the support member 2 between the plastic films 1, and the gap film 3 is interposed between the plastic films 1 by the support member 2. 1 winding body 4 is formed (step S2). In this case, the supporting member 2 is arranged in a region other than the pattern 6 made of metal or resin already formed on the plastic film 1 (or a region other than the pattern 6 formed thereafter) in the plastic film 1. Is preferred. The method for winding the plastic film 1 is not particularly limited as long as it can be wound with low tension without crushing the gaps of the support member 2, and the gap layer 3 can be formed. Thus, a general winder (not shown) can be used. Moreover, it is preferable that the number of windings of the plastic film 1 is appropriately selected according to the application.
　次に、プラスチックフィルム１の巻取体４が形成されたコア５に、閉塞部材１２が取り付けられる（ステップＳ３）。本実施の形態においては、円柱状の閉塞部材１２が、コア５の中空部５ａに嵌入される。 Next, the closing member 12 is attached to the core 5 on which the wound body 4 of the plastic film 1 is formed (step S3). In the present embodiment, the columnar blocking member 12 is fitted into the hollow portion 5 a of the core 5.
　次に、プラスチックフィルム１の巻取体４が、保持部材１１に保持される（ステップＳ４）。ここでは、巻取体４の外周面に、保持部材１１の内周面が嵌合されて、巻取体４が保持される。 Next, the wound body 4 of the plastic film 1 is held by the holding member 11 (step S4). Here, the inner peripheral surface of the holding member 11 is fitted to the outer peripheral surface of the winding body 4 to hold the winding body 4.
　巻取体４を保持した後、空隙層３に、所定の温湿度の気体が、所定時間、供給される（ステップＳ５）。本実施の形態においては、送風ユニット２１により、所定の温湿度の気体（外気）が取り込まれて、送風口２２から、保持部材１１の内部を通って、プラスチックフィルム１の巻取体４の第１端面４ａから空隙層３に、所定時間、連続的に、送り込まれる。この間、図６に示すように、気体は、プラスチックフィルム１の巻取体４の第１端面４ａから空隙層３を通って、第２端面４ｂから排出され、空隙層３において、気体とプラスチックフィルム１との間で水分の移動が行われるが、この水分の移動により湿度が増減した気体は、プラスチックフィルム１の巻取体４の第２端面４ｂから排出され、新たに気体が送り込まれる。このことにより、プラスチックフィルム１は、連続して所定の温湿度を有する気体に接することができる。 After holding the winding body 4, a gas having a predetermined temperature and humidity is supplied to the gap layer 3 for a predetermined time (step S5). In the present embodiment, a gas (outside air) having a predetermined temperature and humidity is taken in by the blower unit 21, passes through the inside of the holding member 11 from the blower port 22, and the second of the winding body 4 of the plastic film 1. It is continuously fed into the gap layer 3 from the one end face 4a for a predetermined time. During this time, as shown in FIG. 6, the gas passes through the gap layer 3 from the first end face 4 a of the winding body 4 of the plastic film 1 and is discharged from the second end face 4 b. Moisture is transferred to and from 1, but the gas whose humidity is increased or decreased by the movement of the moisture is discharged from the second end face 4b of the winding body 4 of the plastic film 1, and a new gas is sent in. Thereby, the plastic film 1 can be continuously in contact with a gas having a predetermined temperature and humidity.
　その後、送風ユニット２１を停止し、プラスチックフィルム１の巻取体４が、保持部材１１から取り外される（ステップＳ６）。 Thereafter, the blower unit 21 is stopped, and the wound body 4 of the plastic film 1 is removed from the holding member 11 (step S6).
　取り外されたプラスチックフィルム１の巻取体４は、図示しないカラーフィルターの製造装置にセットされて、プラスチックフィルム１が繰り出され、プラスチックフィルム１に、金属または樹脂からなり、カラーフィルター７用の機能性を有するパターン６（例えば、カラーフィルター７用のブラックマトリックスおよび複数色の画素）が形成される。具体的なパターン形成方法としては、所望のパターン６が精度良く形成することができれば、特に限定されることはなく、例えば、フォトリソグラフィ法、インクジェット法等、一般的に知られた方法を用いることができる。このようにして、カラーフィルター７が得られる（図４参照）。 The removed wound body 4 of the plastic film 1 is set in a color filter manufacturing apparatus (not shown), and the plastic film 1 is fed out. The plastic film 1 is made of metal or resin, and has a functionality for the color filter 7. A pattern 6 (for example, a black matrix for the color filter 7 and pixels of a plurality of colors) is formed. A specific pattern forming method is not particularly limited as long as the desired pattern 6 can be formed with high accuracy. For example, a generally known method such as a photolithography method or an inkjet method is used. Can do. In this way, the color filter 7 is obtained (see FIG. 4).
　このように本実施の形態によれば、プラスチックフィルム１が支持部材２によって形成される空隙層３を介在させて巻き取られてプラスチックフィルム１の巻取体４が形成され、その空隙層３に、気体が連続的に送り込まれる。このことにより、プラスチックフィルム１の全体が、所定の温湿度の気体に接することができる。このため、プラスチックフィルム１の含水率を短時間で均一にすることができる。 As described above, according to the present embodiment, the plastic film 1 is wound up with the gap layer 3 formed by the support member 2 interposed therebetween, so that the wound body 4 of the plastic film 1 is formed. The gas is continuously fed. Thereby, the whole plastic film 1 can be in contact with a gas having a predetermined temperature and humidity. For this reason, the moisture content of the plastic film 1 can be made uniform in a short time.
　また、本実施の形態によれば、含水率が均一になったプラスチックフィルム１に、金属または樹脂からなり、カラーフィルター７用の機能性を有するパターン６を形成することができる。このため、パターン６の寸法精度を向上させることができ、カラーフィルター７の表示画像の精度を向上させることができる。 Further, according to the present embodiment, the pattern 6 made of metal or resin and having functionality for the color filter 7 can be formed on the plastic film 1 having a uniform moisture content. For this reason, the dimensional accuracy of the pattern 6 can be improved, and the accuracy of the display image of the color filter 7 can be improved.
　なお、本実施の形態においては、プラスチックフィルム１の巻取体４の第１端面４ａから空隙層３に気体が送り込まれる例について説明した。しかしながら、このことに限られることはなく、気体が、プラスチックフィルム１の巻取体４の両方の端面４ａ、４ｂから、交互に、空隙層３に送り込まれるようにしても良い。この場合、例えば、巻取体４の第１端面４ａから空隙層３に気体を、所定時間、送り込んだ後、巻取体４の第２端面４ｂが送風ユニット２１側に配置されるように巻取体４の向きを入れ替えて、当該第２端面４ｂから空隙層３に、所定時間、気体を送り込むようにしても良い。このことにより、プラスチックフィルム１の全体に亘って、含水率をより一層均一にすることができる。 In addition, in this Embodiment, the example in which gas was sent into the space | gap layer 3 from the 1st end surface 4a of the winding body 4 of the plastic film 1 was demonstrated. However, the present invention is not limited to this, and the gas may be alternately fed into the gap layer 3 from both end faces 4 a and 4 b of the winding body 4 of the plastic film 1. In this case, for example, after the gas is fed from the first end surface 4a of the winding body 4 to the gap layer 3 for a predetermined time, the winding is performed so that the second end surface 4b of the winding body 4 is disposed on the blower unit 21 side. The orientation of the capturing body 4 may be changed, and gas may be sent from the second end surface 4b to the gap layer 3 for a predetermined time. As a result, the moisture content can be made more uniform over the entire plastic film 1.
　また、本実施の形態においては、気体供給ユニット２０が、空隙層３に気体を送り込む送風ユニット２１からなる例について説明した。しかしながら、このことに限られることはなく、気体供給ユニット２０が、プラスチックフィルム１の巻取体４の第１端面４ａから空隙層３内の気体を吸引して、第２端面４ｂから空隙層内に気体を吸い込ませる吸引ユニット２３（図１参照）からなっていても良い。この場合、吸引ユニット２３によりプラスチックフィルム１の巻取体４の第１端面４ａから空隙層３内の気体が吸引されている間、第２端面４ｂから、所定の温湿度の気体（外気）が、空隙層３内に吸い込まれる（供給される）。このことにより、プラスチックフィルム１の全体が、所定の温湿度の気体に接することができ、プラスチックフィルム１の含水率を短時間で均一にすることができる。さらに、空隙層３内の気体が、プラスチックフィルム１の巻取体４の両方の端面から、交互に、吸引されて、吸引時に、巻取体４の吸引される側の端面とは反対側の端面から所定の温湿度の気体（外気）が吸い込まれるようにしても良い。この場合、例えば、巻取体４の第１端面４ａから空隙層３内の気体を、所定時間、吸引した後、巻取体４の第２端面４ｂが吸引ユニット２３側に配置されるように巻取体４の向きを入れ替えて、当該第２端面４ｂから空隙層３内の気体を、所定時間、吸引するようにしても良い。このことにより、プラスチックフィルム１の全体に亘って、含水率をより一層均一にすることができる。 Further, in the present embodiment, the example in which the gas supply unit 20 includes the blower unit 21 that sends gas into the gap layer 3 has been described. However, the present invention is not limited to this, and the gas supply unit 20 sucks the gas in the gap layer 3 from the first end face 4a of the winding body 4 of the plastic film 1, and the inside of the gap layer from the second end face 4b. It may be composed of a suction unit 23 (see FIG. 1) for sucking gas into. In this case, while the gas in the gap layer 3 is sucked from the first end surface 4a of the winding body 4 of the plastic film 1 by the suction unit 23, a gas (outside air) having a predetermined temperature and humidity is discharged from the second end surface 4b. Inhaled (supplied) into the void layer 3. Thereby, the whole plastic film 1 can be in contact with a gas having a predetermined temperature and humidity, and the moisture content of the plastic film 1 can be made uniform in a short time. Further, the gas in the gap layer 3 is alternately sucked from both end faces of the winding body 4 of the plastic film 1, and at the time of suction, the gas on the side opposite to the end face of the winding body 4 is sucked. A gas (outside air) having a predetermined temperature and humidity may be sucked from the end face. In this case, for example, after the gas in the gap layer 3 is sucked from the first end surface 4a of the winding body 4 for a predetermined time, the second end surface 4b of the winding body 4 is arranged on the suction unit 23 side. The direction of the winding body 4 may be changed, and the gas in the gap layer 3 may be sucked from the second end face 4b for a predetermined time. As a result, the moisture content can be made more uniform over the entire plastic film 1.
　また、本実施の形態においては、気体供給ユニット２０が、空隙層３に気体を送り込む送風ユニット２１からなる例について説明した。しかしながら、このことに限られることはなく、気体供給ユニット２０が、プラスチックフィルム１の巻取体４の第１端面４ａから空隙層３に気体を送り込む送風ユニットとしての送風機能と、巻取体４の第１端面４ａから空隙層３内の気体を吸引して、第２端面４ｂから気体を吸い込ませる吸引ユニットとしての吸引機能とを有するようにしても良い。この場合、まず、空隙層３内の気体が、プラスチックフィルム１の巻取体４の第１端面４ａから、所定時間、吸引されて、第２端面４ｂから空隙層３に所定の温湿度の気体（外気）が吸い込まれ、その後、プラスチックフィルム１の巻取体４の当該第１端面４ａから空隙層３に所定の温湿度の気体（外気）が送り込まれる。このことにより、プラスチックフィルム１の全体に亘って、含水率をより一層均一にすることができる。 Further, in the present embodiment, the example in which the gas supply unit 20 includes the blower unit 21 that sends gas into the gap layer 3 has been described. However, the present invention is not limited to this, and the air supply function as a blower unit in which the gas supply unit 20 sends gas from the first end surface 4a of the winder 4 of the plastic film 1 to the gap layer 3 and the winder 4 A suction function as a suction unit that sucks the gas in the gap layer 3 from the first end face 4a and sucks the gas from the second end face 4b may be provided. In this case, first, the gas in the gap layer 3 is sucked from the first end face 4a of the winding body 4 of the plastic film 1 for a predetermined time, and the gas having a predetermined temperature and humidity is drawn from the second end face 4b to the gap layer 3. (Outside air) is sucked, and then a gas (outside air) having a predetermined temperature and humidity is fed into the gap layer 3 from the first end face 4a of the winding body 4 of the plastic film 1. As a result, the moisture content can be made more uniform over the entire plastic film 1.
　また、本実施の形態において、プラスチックフィルム１の含水率が極度に低い場合には、ステップＳ２の後、ステップＳ３の前に、プラスチックフィルム１の巻取体４が吸水処理されるようにしても良い。このことにより、プラスチックフィルム１の含水率を、所定の温湿度の気体との平衡状態における含水率に、短時間で上昇させることができる。なお、吸水処理としては、プラスチックフィルム１の巻取体４に水を噴射させる、若しくは水に浸漬させるようにしても良く、または、高温高湿の雰囲気に曝す方法等が挙げられる。 Further, in the present embodiment, when the water content of the plastic film 1 is extremely low, the winding body 4 of the plastic film 1 may be subjected to water absorption treatment after step S2 and before step S3. good. Thereby, the moisture content of the plastic film 1 can be raised in a short time to the moisture content in an equilibrium state with a gas having a predetermined temperature and humidity. As the water absorption treatment, water may be jetted or immersed in the winding body 4 of the plastic film 1, or a method of exposing to a high temperature and high humidity atmosphere may be used.
　さらに、本実施の形態において、プラスチックフィルム１の含水率が極度に高い場合には、ステップＳ２の後、ステップＳ３の前に、プラスチックフィルム１の巻取体４が乾燥処理されるようにしても良い。このことにより、プラスチックフィルム１の含水率を、所定の温湿度の気体との平衡状態における含水率に、短時間で下降させることができる。なお、乾燥処理としては、プラスチックフィルム１の巻取体４を加熱する方法等が挙げられる。 Furthermore, in this embodiment, when the moisture content of the plastic film 1 is extremely high, the winding body 4 of the plastic film 1 may be dried after step S2 and before step S3. good. Thereby, the moisture content of the plastic film 1 can be lowered in a short time to the moisture content in an equilibrium state with a gas having a predetermined temperature and humidity. In addition, as a drying process, the method etc. which heat the winding body 4 of the plastic film 1 are mentioned.
　第２の実施の形態
　次に、図７により、本発明の第２の実施の形態におけるプラスチックフィルムの含水率調整方法、カラーフィルターの製造方法、およびプラスチックフィルムの含水率調整装置について説明する。 Second Embodiment Next, a plastic film moisture content adjusting method, a color filter manufacturing method, and a plastic film moisture content adjusting device according to a second embodiment of the present invention will be described with reference to FIG.
　図７に示す第２の実施の形態においては、送風ユニットに、空隙層に送り込む気体から異物を除去する異物除去フィルターが設けられている点が主に異なり、他の構成は、図１乃至図６に示す第１の実施の形態と略同一である。なお、図７において、図１乃至図６に示す第１の実施の形態と同一部分には同一符号を付して詳細な説明は省略する。 In the second embodiment shown in FIG. 7, the air unit is mainly provided with a foreign substance removal filter for removing foreign substances from the gas fed into the gap layer, and the other configuration is shown in FIGS. This is substantially the same as the first embodiment shown in FIG. In FIG. 7, the same parts as those of the first embodiment shown in FIGS. 1 to 6 are denoted by the same reference numerals, and detailed description thereof is omitted.
　図７に示すように、送風ユニット２１に、空隙層３に送り込む気体（外気）から塵埃等の異物を除去する異物除去フィルター３０が設けられている。 As shown in FIG. 7, the blower unit 21 is provided with a foreign matter removal filter 30 that removes foreign matters such as dust from the gas (outside air) fed into the gap layer 3.
　このように本実施の形態によれば、塵埃等の異物が除去された気体を空隙層３に送り込むことができる。このため、プラスチックフィルム１の表面に、塵埃等の異物が付着することを防止することができる。 Thus, according to the present embodiment, the gas from which foreign matters such as dust are removed can be fed into the gap layer 3. For this reason, it is possible to prevent foreign matters such as dust from adhering to the surface of the plastic film 1.
　第３の実施の形態
　次に、図８により、本発明の第３の実施の形態におけるプラスチックフィルムの含水率調整方法、カラーフィルターの製造方法、およびプラスチックフィルムの含水率調整装置について説明する。 Third Embodiment Next, a plastic film moisture content adjusting method, a color filter manufacturing method, and a plastic film moisture content adjusting device according to a third embodiment of the present invention will be described with reference to FIG.
　図８に示す第３の実施の形態においては、送風ユニットに、空隙層に送り込む気体の温湿度を調整する空調ユニットが設けられている点が主に異なり、他の構成は、図１乃至図６に示す第１の実施の形態と略同一である。なお、図８において、図１乃至図６に示す第１の実施の形態と同一部分には同一符号を付して詳細な説明は省略する。 The third embodiment shown in FIG. 8 is mainly different in that an air conditioning unit that adjusts the temperature and humidity of the gas fed into the air gap layer is provided in the blower unit. This is substantially the same as the first embodiment shown in FIG. In FIG. 8, the same parts as those of the first embodiment shown in FIGS. 1 to 6 are denoted by the same reference numerals, and detailed description thereof is omitted.
　図８に示すように、送風ユニット２１に、空隙層３に送り込む気体の温湿度を調整する空調ユニット４０が設けられている。この空調ユニット４０は、外気を取り込み、取り込んだ外気の温湿度を、この後に、プラスチックフィルム１に形成される金属または樹脂からなり、カラーフィルター７用の機能性を有するパターン６を形成する際の外気の温湿度と同一となるように調整する。あるいは、空調ユニット４０は、プラスチックフィルム１がこの後曝される任意の工程における外気の温湿度と同一となるように、取り込んだ外気の温湿度を調整するようにしても良い。例えば、プラスチックフィルム１を用いたディスプレイ部材を含むディスプレイパネル（いずれも図示せず）が完成した状態において、温度２５度、相対湿度４０％ＲＨの状態におけるパターン６の寸法が規定されている場合には、空調ユニット４０は、外気の温湿度を、２５度、４０％ＲＨに調整することが好ましい。このことにより、ディスプレイパネル完成時のパターン６の寸法精度をより一層向上させることができる。 As shown in FIG. 8, an air conditioning unit 40 that adjusts the temperature and humidity of the gas fed into the gap layer 3 is provided in the blower unit 21. This air conditioning unit 40 takes in the outside air and changes the temperature and humidity of the taken in outside air into the plastic film 1, which is made of a metal or resin, and forms a pattern 6 having functionality for the color filter 7. Adjust so that it is the same as the temperature and humidity of the outside air. Or you may make it the air-conditioning unit 40 adjust the temperature / humidity of the taken-out outside air so that it may become the same as the temperature / humidity of the outside air in the arbitrary processes which the plastic film 1 exposes after this. For example, when the dimensions of the pattern 6 in a state of a temperature of 25 degrees and a relative humidity of 40% RH are defined in a state where a display panel (not shown) including a display member using the plastic film 1 is completed. The air conditioning unit 40 preferably adjusts the temperature and humidity of the outside air to 25 degrees and 40% RH. Thereby, the dimensional accuracy of the pattern 6 when the display panel is completed can be further improved.
　また、空調ユニット４０に、空隙層３に送り込む外気に含まれる塵埃等の異物を除去する異物除去フィルター３０が設けられている。すなわち、異物除去フィルター３０は、空調ユニット４０に取り込まれる外気から塵埃等の異物を除去するようになっている。 In addition, the air conditioning unit 40 is provided with a foreign matter removing filter 30 that removes foreign matters such as dust contained in the outside air sent to the air gap layer 3. That is, the foreign matter removing filter 30 removes foreign matters such as dust from the outside air taken into the air conditioning unit 40.
　このように本実施の形態によれば、外気が、プラスチックフィルム１に形成される金属または樹脂からなり、カラーフィルター７用の機能性を有するパターン６を形成する際の外気の温湿度と同一となるように調整されて、空隙層３に送り込まれる。このことにより、プラスチックフィルム１の全体が、パターン６を形成する際の温湿度を有する外気に接することができる。このため、プラスチックフィルム１の全体に亘って、含水率を、パターン６を形成する際の外気と平衡状態における含水率に均一にすることができる。 Thus, according to the present embodiment, the outside air is made of a metal or resin formed on the plastic film 1 and has the same temperature and humidity as the outside air when forming the pattern 6 having the functionality for the color filter 7. It adjusts so that it may become and it is sent to the space | gap layer 3. Thus, the entire plastic film 1 can be in contact with the outside air having the temperature and humidity when the pattern 6 is formed. For this reason, the moisture content can be made uniform over the entire plastic film 1 to the moisture content in an equilibrium state with the outside air when the pattern 6 is formed.
　また、本実施の形態によれば、空隙層３に供給する気体の温湿度を任意に調整することができる。このため、プラスチックフィルム１の含水率を、任意の温湿度の気体と平衡状態における含水率にすることができる。 Further, according to the present embodiment, the temperature and humidity of the gas supplied to the gap layer 3 can be arbitrarily adjusted. For this reason, the moisture content of the plastic film 1 can be made into the moisture content in an equilibrium state with the gas of arbitrary temperature and humidity.
　さらに、本実施の形態によれば、塵埃等の異物が除去された外気を空隙層３に送り込むことができる。このため、プラスチックフィルム１の表面に、塵埃等の異物が付着することを防止することができる。 Furthermore, according to the present embodiment, the outside air from which foreign matters such as dust are removed can be fed into the gap layer 3. For this reason, it is possible to prevent foreign matters such as dust from adhering to the surface of the plastic film 1.
　第４の実施の形態
　次に、図９により、本発明の第４の実施の形態におけるプラスチックフィルムの含水率調整方法、カラーフィルターの製造方法、およびプラスチックフィルムの含水率調整装置について説明する。 Fourth Embodiment Next, a plastic film moisture content adjusting method, a color filter manufacturing method, and a plastic film moisture content adjusting apparatus according to a fourth embodiment of the present invention will be described with reference to FIG.
　図９に示す第４の実施の形態においては、プラスチックフィルムの巻取体がチャンバに収容されている点が主に異なり、他の構成は、図１乃至図６に示す第１の実施の形態と略同一である。なお、図９において、図１乃至図６に示す第１の実施の形態と同一部分には同一符号を付して詳細な説明は省略する。 The fourth embodiment shown in FIG. 9 is mainly different in that a plastic film winding body is accommodated in the chamber, and the other configuration is the first embodiment shown in FIGS. Is almost the same. In FIG. 9, the same parts as those of the first embodiment shown in FIGS. 1 to 6 are denoted by the same reference numerals, and detailed description thereof is omitted.
　図９に示すように、プラスチックフィルム１の巻取体４は、チャンバ５０に収容されている。 As shown in FIG. 9, the wound body 4 of the plastic film 1 is accommodated in a chamber 50.
　また、気体供給ユニット２０に、空隙層３に供給される気体の温湿度を調整する空調ユニット４０が設けられている。なお、この空調ユニット４０は、第３の実施の形態と同様に、気体の温湿度を調整するようになっている。 The gas supply unit 20 is provided with an air conditioning unit 40 that adjusts the temperature and humidity of the gas supplied to the gap layer 3. In addition, this air conditioning unit 40 adjusts the temperature and humidity of gas similarly to 3rd Embodiment.
　気体供給ユニット２０は、空隙層３に気体を送り込む送風ユニット２１と、チャンバ５０内の気体を吸引する吸引ユニット５１とを有している。すなわち、気体供給ユニット２０は、チャンバ５０内の気体を吸引して空調ユニット４０に送ると共に、空調ユニット４０により温湿度が調整された気体を、プラスチックフィルム１の巻取体４の第１端面４ａから空隙層３に送り込むように構成されている。 The gas supply unit 20 includes a blower unit 21 that sends gas into the gap layer 3 and a suction unit 51 that sucks the gas in the chamber 50. That is, the gas supply unit 20 sucks the gas in the chamber 50 and sends it to the air conditioning unit 40, and the gas whose temperature and humidity are adjusted by the air conditioning unit 40 is sent to the first end face 4 a of the winding body 4 of the plastic film 1. To the gap layer 3.
　このように本実施の形態によれば、チャンバ５０内の気体が吸引されて、空調ユニット４０により、その温湿度が調整され、プラスチックフィルム１の巻取体４の第１端面４ａから空隙層３に送り込まれる。空隙層３に送り込まれた気体は、空隙層３内を通って、巻取体４の第２端面４ｂからチャンバ５０内に排出される。このことにより、プラスチックフィルの全体が、所定の温湿度を有する気体に接することができる。このため、プラスチックフィルム１の全体に亘って、含水率を、所定の温湿度の気体と平衡状態における含水率にすることができる。 Thus, according to the present embodiment, the gas in the chamber 50 is sucked, the temperature and humidity are adjusted by the air conditioning unit 40, and the gap layer 3 is formed from the first end face 4 a of the winding body 4 of the plastic film 1. Is sent to. The gas fed into the gap layer 3 passes through the gap layer 3 and is discharged into the chamber 50 from the second end face 4 b of the winding body 4. Thus, the entire plastic fill can come into contact with a gas having a predetermined temperature and humidity. For this reason, a moisture content can be made into the moisture content in an equilibrium state with the gas of predetermined temperature and humidity over the whole plastic film 1. FIG.
　また、本実施の形態によれば、空隙層３に供給する気体の温湿度を任意に調整することができる。このため、プラスチックフィルム１の含水率を、任意の温湿度の気体と平衡状態における含水率にすることができる。 Further, according to the present embodiment, the temperature and humidity of the gas supplied to the gap layer 3 can be arbitrarily adjusted. For this reason, the moisture content of the plastic film 1 can be made into the moisture content in an equilibrium state with the gas of arbitrary temperature and humidity.
　さらに、本実施の形態によれば、プラスチックフィルム１の巻取体４がチャンバ５０に収容されているため、空隙層３に送り込まれる所定の温湿度を有する気体を循環させることができる。このことにより、空隙層３に送り込まれる気体の温湿度を、効率良く調整することができる。 Furthermore, according to the present embodiment, since the wound body 4 of the plastic film 1 is accommodated in the chamber 50, a gas having a predetermined temperature and humidity fed into the gap layer 3 can be circulated. Thereby, the temperature and humidity of the gas fed into the gap layer 3 can be adjusted efficiently.
　なお、本実施の形態においては、図１０に示すように、チャンバ５０を、保持部材１１、気体供給ユニット２０、および空調ユニット４０を収容するようにしてもよい。 In the present embodiment, as shown in FIG. 10, the chamber 50 may accommodate the holding member 11, the gas supply unit 20, and the air conditioning unit 40.
　以上、本発明による実施の形態について説明してきたが、当然のことながら、本発明の要旨の範囲内で、これらの実施の形態を、部分的に、適宜組み合わせることも可能である。また、これらの本実施の形態においては、本発明の要旨の範囲内で、種々の変形も可能である。 Although the embodiments according to the present invention have been described above, it is needless to say that these embodiments can be partially combined as appropriate within the scope of the present invention. Further, in the present embodiment, various modifications are possible within the scope of the gist of the present invention.
　実施例１
　本発明のプラスチックフィルム１の含水率調整方法により含水率が調整されたプラスチックフィルム１の各部の含水率を測定した。 Example 1
The moisture content of each part of the plastic film 1 whose moisture content was adjusted by the moisture content adjusting method of the plastic film 1 of the present invention was measured.
　まず、プラスチックフィルム１として、３００ｍｍ幅で３０ｍ長さのＰＥＴフィルム（東洋紡績株式会社製コスモシャインＡ４１００、１２５μｍ厚さ）を準備し、支持部材２として、３０ｍｍ幅の多孔質フィルム（日東電工製サンマップ、２００μｍ厚さ）を準備した。この多孔質フィルムをＰＥＴフィルムの両縁部（長手方向に沿った両縁部）に配置し、円筒状のコア（内径３インチ）５に巻き取り、ＰＥＴフィルム間に厚さ２００μｍの空隙層３が介在されたＰＥＴフィルムの巻取体４を形成した。このとき、ＰＥＴフィルムの含水率は、全体に亘って、０．１１％～０．１２％であった（表１参照）。なお、含水率の測定は、マイクロ波オンライン水分計（マルカム製）、電気抵抗式水分計（（株）山崎精機研究所製）などを用いて行うこともでき、あるいは、ＪＩＳ－Ｋ７２０９にしたがって行うこともできる。 First, a PET film (Cosmo Shine A4100, Toyobo Co., Ltd., Cosmo Shine A4100, 125 μm thickness) having a width of 300 mm and a length of 30 m is prepared as the plastic film 1, and a 30 mm wide porous film (Nitto Denko Sun) is prepared as the support member 2. Map, 200 μm thickness). This porous film is disposed on both edges (both edges along the longitudinal direction) of the PET film, wound around a cylindrical core (inner diameter 3 inches) 5, and a gap layer 3 having a thickness of 200 μm between the PET films. A wound body 4 of PET film with intervening film was formed. At this time, the moisture content of the PET film was 0.11% to 0.12% over the whole (see Table 1). The moisture content can be measured using a microwave on-line moisture meter (manufactured by Markham), an electric resistance moisture meter (manufactured by Yamazaki Seiki Laboratory Co., Ltd.) or the like, or according to JIS-K7209. You can also.
　次に、コア５の中空部５ａに、閉塞部材１２を嵌入させて、ＰＥＴフィルムの巻取体４の外周面に、保持部材１１を嵌合させた。 Next, the closing member 12 was fitted into the hollow portion 5 a of the core 5, and the holding member 11 was fitted to the outer peripheral surface of the PET film winding body 4.
　その後、気体供給ユニット２０により、空隙層３内の気体を、ＰＥＴフィルムの巻取体４の第１端面４ａから、０．１ｋＰａ、７００ｍ３／ｓの流量で、４８時間吸引して、第２端面４ｂから、空隙層３に所定の温湿度の気体を吸い込ませた。なお、本実施例においては、２５度、４０％ＲＨの外気を空隙層３に吸い込ませた。 After that, the gas supply unit 20 sucks the gas in the gap layer 3 from the first end face 4a of the PET film winding body 4 at a flow rate of 0.1 kPa and 700 m 3 / s for 48 hours, A gas having a predetermined temperature and humidity was sucked into the gap layer 3 from the end face 4b. In this example, 25 degrees and 40% RH of outside air was sucked into the gap layer 3.
　比較例１として、上記と同等のＰＥＴフィルムを、支持部材２を用いることなく（空隙層３を介在させることなく）、コア５に巻き取り、２５度、４０％ＲＨの外気のもとで、４８時間、静置させた。 As Comparative Example 1, a PET film equivalent to the above was wound around the core 5 without using the support member 2 (without interposing the void layer 3), and under an outside air of 25 degrees and 40% RH, Allowed to stand for 48 hours.
　４８時間経過後に、それぞれのＰＥＴフィルムの含水率を測定した。その結果を、表１に示す。なお、表1に示す含水率の単位は％である。 After 48 hours, the water content of each PET film was measured. The results are shown in Table 1. The unit of moisture content shown in Table 1 is%.
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
　比較例１のＰＥＴフィルムでは、巻外側以外の部分では、ほとんど吸水しておらず、養生が進んでいないことが確認できた。また、含水率の均一性も得られなかった。これに対して実施例１のＰＥＴフィルムでは、全ての測定ポイントで、養生環境の２５度４０％ＲＨの飽和吸水率である０．３３％とほぼ同等の含水率に達し、全体に亘って、含水率が均一になり、養生が完了したことが確認できた。なお、本実施例においては、巻取体４の一方の端面から空隙層３内の気体を吸引して、他方の端面から外気を吸い込ませた例について説明したが、巻取体４の一方の端面から空隙層３に気体を送風ユニット２１等により送り込むようにした場合についても、同様の効果が得られるものと考えられる。 In the PET film of Comparative Example 1, almost no water was absorbed in the portions other than the outer side of the roll, and it was confirmed that curing was not progressing. Moreover, the uniformity of the moisture content was not obtained. On the other hand, in the PET film of Example 1, the moisture content reached almost the same as 0.33% which is the saturated water absorption rate of 25 ° C. and 40% RH in the curing environment at all measurement points. It was confirmed that the moisture content became uniform and the curing was completed. In addition, in the present Example, although the gas in the space | gap layer 3 was attracted | sucked from one end surface of the winding body 4, and the external air was suck | inhaled from the other end surface, one example of the winding body 4 was demonstrated. It is considered that the same effect can be obtained when the gas is sent from the end face to the gap layer 3 by the blower unit 21 or the like.
　実施例２
　上記実施例１によって養生されたＰＥＴフィルムを用いて、２００ｍｍ×２００ｍｍのパターン６を１００パターン形成した。パターン形成時の外気の温湿度は、２５度、４０％ＲＨであった。パターン形成方法としては、一般的なフォトリソグラフィを用いた。 Example 2
Using the PET film cured in Example 1, 100 patterns of 200 mm × 200 mm pattern 6 were formed. The temperature and humidity of the outside air during pattern formation was 25 degrees and 40% RH. As a pattern forming method, general photolithography was used.
　比較例２として、上記比較例１によって得られたＰＥＴフィルムを用いて、上記と同様にパターン６を形成した。 As Comparative Example 2, a pattern 6 was formed in the same manner as described above using the PET film obtained in Comparative Example 1 above.
　それぞれのＰＥＴフィルムに形成されたパターン６の寸法の均一性を評価した。すなわち、比較例２のパターン６は、巻外側の部分から巻内側の部分までの１００パターンにおける寸法のばらつきは、設計寸法である１００ｍｍに対して４０μｍの差が見られたが、本実施例のパターン６は、その差が１０μｍに収まっていた。このことにより、パターン６の寸法の均一性を確認することができた。 The dimensional uniformity of the pattern 6 formed on each PET film was evaluated. That is, in the pattern 6 of the comparative example 2, the dimensional variation in the 100 patterns from the outer winding portion to the inner winding portion showed a difference of 40 μm with respect to the design dimension of 100 mm. In Pattern 6, the difference was within 10 μm. Thereby, the uniformity of the dimension of the pattern 6 was able to be confirmed.
　なお、寸法の均一性の評価については、具体的には、以下のように行うことができる。パターン６の設計寸法がわかっている場合には、上述のように設計寸法を基準として、測定された各パターン６の寸法が、どの程度ずれているかを評価する。また、設計寸法が不明である場合には、任意の複数のパターン６において測定された寸法から平均寸法を求め、この平均寸法を基準として、測定された各パターン６の寸法が、どの程度ずれているかを評価する。また、寸法の測定には、一般に測長機を用いることが好ましい。とりわけ、マイクロメートル単位まで寸法を測定することができる精密な測長機がより好ましい。例えば、ＳＯＫＫＩＡ製の超精密自動２次元座標測定機や、ニコンインストルメンツカンパニー製のＣＮＣ画像測定システムなどを使用することができる。 In addition, about the evaluation of the uniformity of dimensions, specifically, it can be performed as follows. When the design dimension of the pattern 6 is known, the degree of deviation of the measured dimension of each pattern 6 is evaluated with reference to the design dimension as described above. If the design dimension is unknown, an average dimension is obtained from the dimensions measured in any of the plurality of patterns 6, and how much the measured dimension of each pattern 6 is deviated from this average dimension as a reference. Evaluate whether Further, it is generally preferable to use a length measuring device for measuring the dimensions. In particular, a precise length measuring machine capable of measuring dimensions to the micrometer unit is more preferable. For example, an ultra-precision automatic two-dimensional coordinate measuring machine manufactured by SOKKIA or a CNC image measuring system manufactured by Nikon Instruments Company can be used.

Claims (21)

  1. 　帯状のプラスチックフィルムを、プラスチックフィルム間に支持部材を介して巻き取り、当該支持部材によってプラスチックフィルム間に空隙層が介在されるように、プラスチックフィルムの巻取体を形成する工程と、
    　空隙層に所定の温湿度の気体を供給する工程と、を備えたことを特徴とするプラスチックフィルムの含水率調整方法。     Winding a belt-shaped plastic film via a support member between the plastic films, and forming a plastic film winding body so that a void layer is interposed between the plastic films by the support member;
    And a step of supplying a gas having a predetermined temperature and humidity to the gap layer.
  2. 　空隙層に所定の温湿度の気体を供給する工程において、当該気体は、プラスチックフィルムの巻取体の一方の端面から空隙層に送り込まれることを特徴とする請求項１に記載のプラスチックフィルムの含水率調整方法。 2. The water content of a plastic film according to claim 1, wherein in the step of supplying a gas having a predetermined temperature and humidity to the gap layer, the gas is fed into the gap layer from one end face of the plastic film winding body. Rate adjustment method.
  3. 　空隙層に所定の温湿度の気体を供給する工程において、当該気体は、プラスチックフィルムの巻取体の両方の端面から、交互に、空隙層に送り込まれることを特徴とする請求項１に記載のプラスチックフィルムの含水率調整方法。 The step of supplying a gas having a predetermined temperature and humidity to the gap layer is alternately fed into the gap layer from both end faces of the plastic film winding body. A method for adjusting the moisture content of a plastic film.
  4. 　所定の温湿度の気体は、異物を除去する異物除去フィルターを通って空隙層に送り込まれることを特徴とする請求項２または３に記載のプラスチックフィルムの含水率調整方法。 The method for adjusting the moisture content of a plastic film according to claim 2 or 3, wherein the gas having a predetermined temperature and humidity is fed into the void layer through a foreign matter removing filter for removing foreign matter.
  5. 　所定の温湿度の気体は、その温湿度が調整されて空隙層に送り込まれることを特徴とする請求項２乃至４のいずれかに記載のプラスチックフィルムの含水率調整方法。 The method for adjusting the moisture content of a plastic film according to any one of claims 2 to 4, wherein the gas having a predetermined temperature and humidity is fed into the void layer after the temperature and humidity are adjusted.
  6. 　空隙層に送り込まれる気体の温湿度は、この後にプラスチックフィルムに形成される金属または樹脂からなるパターンを形成する際の外気の温湿度と同一となるように調整されることを特徴とする請求項５に記載のプラスチックフィルムの含水率調整方法。 The temperature and humidity of the gas fed into the gap layer is adjusted so as to be the same as the temperature and humidity of the outside air when forming a pattern made of metal or resin that is subsequently formed on the plastic film. 5. A method for adjusting the moisture content of a plastic film according to 5.
  7. 　空隙層に所定の温湿度の気体を供給する工程において、プラスチックフィルムの巻取体はチャンバに収容され、チャンバ内から気体が吸引されてその温湿度が調整され、調整された気体が空隙層に送り込まれることを特徴とする請求項５または６に記載のプラスチックフィルムの含水率調整方法。 In the step of supplying a gas having a predetermined temperature and humidity to the gap layer, the wound body of the plastic film is accommodated in the chamber, the gas is sucked from the chamber to adjust the temperature and humidity, and the adjusted gas is supplied to the gap layer. The method for adjusting the moisture content of a plastic film according to claim 5 or 6, wherein the moisture content is fed.
  8. 　空隙層に所定の温湿度の気体を供給する工程において、空隙層内の気体は、プラスチックフィルムの巻取体の一方の端面から吸引されて、他方の端面から空隙層に所定の温湿度の気体が吸い込まれることを特徴とする請求項１に記載のプラスチックフィルムの含水率調整方法。 In the step of supplying a gas having a predetermined temperature and humidity to the air gap layer, the gas in the air gap layer is sucked from one end face of the plastic film winding body, and the gas having the predetermined temperature and humidity is supplied from the other end face to the air gap layer. The method for adjusting the moisture content of a plastic film according to claim 1, wherein
  9. 　空隙層に所定の温湿度の気体を供給する工程において、空隙層内の気体は、プラスチックフィルムの巻取体の両方の端面から、交互に吸引されて、吸引時に、吸引される側の端面とは反対側の端面から、空隙層に所定の温湿度の気体が吸い込まれることを特徴とする請求項１に記載のプラスチックフィルムの含水率調整方法。 In the step of supplying a gas of a predetermined temperature and humidity to the gap layer, the gas in the gap layer is alternately sucked from both end faces of the plastic film winding body, and at the time of suction, the end face on the suction side The method for adjusting the moisture content of a plastic film according to claim 1, wherein a gas having a predetermined temperature and humidity is sucked into the void layer from the end face on the opposite side.
  10. 　空隙層に所定の温湿度の気体を供給する工程は、空隙層内の気体を、プラスチックフィルムの巻取体の一方の端面から吸引して、他方の端面から空隙層に所定の温湿度の気体を吸い込む工程と、所定の温湿度の気体を、プラスチックフィルムの巻取体の当該一方の端面から空隙層に送り込む工程とを有することを特徴とする請求項１に記載のプラスチックフィルムの含水率調整方法。 The step of supplying a gas having a predetermined temperature and humidity to the air gap layer is to suck the gas in the air gap layer from one end face of the plastic film winding body and to the air gap layer from the other end face. 2. The moisture content adjustment of the plastic film according to claim 1, further comprising: a step of sucking a gas, and a step of feeding a gas having a predetermined temperature and humidity into the gap layer from the one end face of the plastic film winding body. Method.
  11. 　プラスチックフィルムの巻取体を形成する工程の後、空隙層に所定の温湿度の気体を供給する工程の前に、プラスチックフィルムの巻取体が吸水処理されることを特徴とする請求項１乃至１０のいずれかに記載のプラスチックフィルムの含水率調整方法。 The plastic film winding body is subjected to water absorption treatment after the step of forming the plastic film winding body and before the step of supplying a gas having a predetermined temperature and humidity to the void layer. The water content adjustment method of the plastic film in any one of 10.
  12. 　プラスチックフィルムの巻取体を形成する工程の後、空隙層に所定の温湿度の気体を供給する工程の前に、プラスチックフィルムの巻取体が乾燥処理されることを特徴とする請求項１乃至１０のいずれかに記載のプラスチックフィルムの含水率調整方法。 The plastic film winding body is dried after the step of forming the plastic film winding body and before the step of supplying a gas having a predetermined temperature and humidity to the void layer. The water content adjustment method of the plastic film in any one of 10.
  13. 　請求項１乃至１２のいずれかに記載のプラスチックフィルムの含水率調整方法を実行することにより、プラスチックフィルムの含水率を調整する工程と、
    　プラスチックフィルムに、カラーフィルター用の機能性を有するパターンを形成する工程と、を備え、
    　カラーフィルターを得ることを特徴とするカラーフィルターの製造方法。     A step of adjusting the moisture content of the plastic film by executing the method of adjusting the moisture content of the plastic film according to any one of claims 1 to 12,
    Forming a pattern having functionality for a color filter on a plastic film,
    A method for producing a color filter, comprising obtaining a color filter.
  14. 　帯状のプラスチックフィルムが、プラスチックフィルム間に支持部材を介して巻き取られ、当該支持部材によってプラスチックフィルム間に空隙層が介在されるように形成されたプラスチックフィルムの巻取体を保持する保持部材と、
    　保持部材に保持されたプラスチックフィルムの巻取体の空隙層に所定の温湿度の気体を供給する気体供給ユニットと、を備えたことを特徴とするプラスチックフィルムの含水率調整装置。     A holding member for holding a plastic film winding body in which a belt-like plastic film is wound between plastic films via a support member, and the support member is formed such that a gap layer is interposed between the plastic films; ,
    And a gas supply unit for supplying a gas having a predetermined temperature and humidity to the void layer of the wound body of the plastic film held by the holding member.
  15. 　気体供給ユニットは、プラスチックフィルムの巻取体の一方の端面から空隙層に所定の温湿度の気体を送り込む送風ユニットを有していることを特徴とする請求項１４に記載のプラスチックフィルムの含水率調整装置。 The moisture content of the plastic film according to claim 14, wherein the gas supply unit has a blower unit that sends a gas having a predetermined temperature and humidity from one end face of the wound body of the plastic film into the gap layer. Adjustment device.
  16. 　送風ユニットに、空隙層に送り込む気体から異物を除去する異物除去フィルターが設けられていることを特徴とする請求項１５に記載のプラスチックフィルムの含水率調整装置。 16. The plastic film moisture content adjusting device according to claim 15, wherein the blower unit is provided with a foreign matter removing filter for removing foreign matter from the gas fed into the void layer.
  17. 　送風ユニットに、空隙層に送り込む気体の温湿度を調整する空調ユニットが設けられていることを特徴とする請求項１５または１６に記載のプラスチックフィルムの含水率調整装置。 17. The plastic film moisture content adjusting device according to claim 15, wherein the air blowing unit is provided with an air conditioning unit for adjusting a temperature and humidity of the gas fed into the void layer.
  18. 　プラスチックフィルムの巻取体を収容するチャンバを更に備え、
    　気体供給ユニットは、チャンバ内の気体を吸引して空調ユニットに送る吸引ユニットを更に有していることを特徴とする請求項１７に記載のプラスチックフィルムの含水率調整装置。     Further comprising a chamber for accommodating a plastic film winder,
    The apparatus for adjusting a moisture content of a plastic film according to claim 17, wherein the gas supply unit further includes a suction unit that sucks the gas in the chamber and sends it to the air conditioning unit.
  19. 　保持部材、気体供給ユニット、および空調ユニットは、チャンバに収容されることを特徴とする請求項１８に記載のプラスチックフィルムの含水率調整装置。 The apparatus for adjusting a moisture content of a plastic film according to claim 18, wherein the holding member, the gas supply unit, and the air conditioning unit are accommodated in a chamber.
  20. 　気体供給ユニットは、プラスチックフィルムの巻取体の一方の端面から空隙層内の気体を吸引して、他方の端面から空隙層内に所定の温湿度の気体を吸い込ませる吸引ユニットを有していることを特徴とする請求項１４に記載のプラスチックフィルムの含水率調整装置。 The gas supply unit has a suction unit that sucks the gas in the gap layer from one end face of the winding body of the plastic film and sucks the gas of a predetermined temperature and humidity into the gap layer from the other end face. The moisture content adjusting device for a plastic film according to claim 14.
  21. 　気体供給ユニットは、プラスチックフィルムの巻取体の一方の端面から空隙層に所定の温湿度の気体を送り込む送風機能と、当該一方の端面から空隙層内の気体を吸引して、他方の端面から空隙層内に所定の温湿度の気体を吸い込ませる吸引機能とを有していることを特徴とする請求項１４に記載のプラスチックフィルムの含水率調整装置。 The gas supply unit has a function of sending a gas having a predetermined temperature and humidity from one end face of the plastic film winding body to the gap layer, and sucks the gas in the gap layer from the one end face, and from the other end face 15. The water content adjusting device for a plastic film according to claim 14, further comprising a suction function for sucking a gas having a predetermined temperature and humidity into the void layer.
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