WO2012016230A3 - Electrical resistance heater and heater assemblies - Google Patents

Electrical resistance heater and heater assemblies Download PDF

Info

Publication number
WO2012016230A3
WO2012016230A3 PCT/US2011/046058 US2011046058W WO2012016230A3 WO 2012016230 A3 WO2012016230 A3 WO 2012016230A3 US 2011046058 W US2011046058 W US 2011046058W WO 2012016230 A3 WO2012016230 A3 WO 2012016230A3
Authority
WO
WIPO (PCT)
Prior art keywords
heater
electrical resistance
assemblies
heating element
resistance heater
Prior art date
Application number
PCT/US2011/046058
Other languages
French (fr)
Other versions
WO2012016230A2 (en
Inventor
Ronald L. Colvin
Sr. Dennis Goodwin
Jeff Mittendorf
Charles J. Moretti
John W. Rose
Earl Blake Samuel
Original Assignee
Lawrence Advanced Semiconductor Technologies, Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lawrence Advanced Semiconductor Technologies, Llc filed Critical Lawrence Advanced Semiconductor Technologies, Llc
Publication of WO2012016230A2 publication Critical patent/WO2012016230A2/en
Publication of WO2012016230A3 publication Critical patent/WO2012016230A3/en

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
    • H05B3/143—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds applied to semiconductors, e.g. wafers heating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/002—Heaters using a particular layout for the resistive material or resistive elements
    • H05B2203/003—Heaters using a particular layout for the resistive material or resistive elements using serpentine layout
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/013—Heaters using resistive films or coatings

Abstract

Electrical resistance heater and heater assemblies are described. According to one embodiment, the heater comprises a sinusoidal heating element that provides substantially constant heating. According to another embodiment, the heater comprises a heating element and one or more press-fit coupled electrical adapters. Methods and systems are also disclosed.
PCT/US2011/046058 2010-07-30 2011-07-30 Electrical resistance heater and heater assemblies WO2012016230A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US36907710P 2010-07-30 2010-07-30
US61/369,077 2010-07-30

Publications (2)

Publication Number Publication Date
WO2012016230A2 WO2012016230A2 (en) 2012-02-02
WO2012016230A3 true WO2012016230A3 (en) 2012-05-03

Family

ID=45530765

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2011/046058 WO2012016230A2 (en) 2010-07-30 2011-07-30 Electrical resistance heater and heater assemblies

Country Status (2)

Country Link
TW (1) TW201244523A (en)
WO (1) WO2012016230A2 (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06105634B2 (en) * 1990-08-14 1994-12-21 日本碍子株式会社 Semiconductor wafer heating device
KR100197201B1 (en) * 1995-05-11 1999-06-15 모리노리오 Sheet-like heating material
US5970214A (en) * 1998-05-14 1999-10-19 Ag Associates Heating device for semiconductor wafers
JP2002373846A (en) * 2001-06-14 2002-12-26 Ibiden Co Ltd Ceramic heater and hot plate unit for semiconductor manufacturing and inspection apparatus
JP2005032933A (en) * 2003-07-10 2005-02-03 Hitachi Kokusai Electric Inc Substrate processor
EP1121836B1 (en) * 1999-08-13 2007-02-28 Strix Limited Thick film heater

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06105634B2 (en) * 1990-08-14 1994-12-21 日本碍子株式会社 Semiconductor wafer heating device
KR100197201B1 (en) * 1995-05-11 1999-06-15 모리노리오 Sheet-like heating material
US5970214A (en) * 1998-05-14 1999-10-19 Ag Associates Heating device for semiconductor wafers
EP1121836B1 (en) * 1999-08-13 2007-02-28 Strix Limited Thick film heater
JP2002373846A (en) * 2001-06-14 2002-12-26 Ibiden Co Ltd Ceramic heater and hot plate unit for semiconductor manufacturing and inspection apparatus
JP2005032933A (en) * 2003-07-10 2005-02-03 Hitachi Kokusai Electric Inc Substrate processor

Also Published As

Publication number Publication date
TW201244523A (en) 2012-11-01
WO2012016230A2 (en) 2012-02-02

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