WO2011162995A1 - Method and system for repositioning of a flexible substrate - Google Patents

Method and system for repositioning of a flexible substrate Download PDF

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Publication number
WO2011162995A1
WO2011162995A1 PCT/US2011/040133 US2011040133W WO2011162995A1 WO 2011162995 A1 WO2011162995 A1 WO 2011162995A1 US 2011040133 W US2011040133 W US 2011040133W WO 2011162995 A1 WO2011162995 A1 WO 2011162995A1
Authority
WO
WIPO (PCT)
Prior art keywords
gas source
flow
central region
gap
channel
Prior art date
Application number
PCT/US2011/040133
Other languages
French (fr)
Inventor
Christopher M. Sydorko
Craig Hafner
Original Assignee
J.L. Souser & Associates, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by J.L. Souser & Associates, Inc. filed Critical J.L. Souser & Associates, Inc.
Priority to EP11798625.7A priority Critical patent/EP2585393A4/en
Priority to US13/639,601 priority patent/US8714609B2/en
Priority to AU2011271288A priority patent/AU2011271288A1/en
Priority to CA2796801A priority patent/CA2796801A1/en
Publication of WO2011162995A1 publication Critical patent/WO2011162995A1/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H3/00Separating articles from piles
    • B65H3/08Separating articles from piles using pneumatic force
    • B65H3/0808Suction grippers
    • B65H3/0883Construction of suction grippers or their holding devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25BTOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005Vacuum work holders
    • B25B11/007Vacuum work holders portable, e.g. handheld
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00Gripping heads and other end effectors
    • B25J15/06Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • B65G47/91Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B66HOISTING; LIFTING; HAULING
    • B66CCRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C1/00Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles
    • B66C1/02Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles by suction means
    • B66C1/0212Circular shape
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B66HOISTING; LIFTING; HAULING
    • B66CCRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C1/00Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles
    • B66C1/02Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles by suction means
    • B66C1/0231Special lip configurations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B66HOISTING; LIFTING; HAULING
    • B66CCRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C1/00Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles
    • B66C1/02Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles by suction means
    • B66C1/0256Operating and control devices
    • B66C1/0268Venturi effect
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2406/00Means using fluid
    • B65H2406/30Suction means
    • B65H2406/36Means for producing, distributing or controlling suction
    • B65H2406/365Means for producing, distributing or controlling suction selectively blowing or sucking
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2406/00Means using fluid
    • B65H2406/30Suction means
    • B65H2406/36Means for producing, distributing or controlling suction
    • B65H2406/366Means for producing, distributing or controlling suction producing vacuum
    • B65H2406/3661Injectors

Definitions

  • the present disclosure relates generally to material handling systems and methods. More specifically, the present disclosure relates to materials handling systems and methods involving a Bernoulli air flow.
  • Known systems and methods utilize the Bernoulli principle for providing a differential pressure to lift an object in a materials handling system.
  • the differential pressure can be generated by transporting air through one or more passages to decrease pressure in a chamber.
  • the decreased pressure in the chamber can lift the object.
  • the object is lifted and suspended in air while an arm or other positioning device moves the object.
  • the object can be selectively lowered by decreasing the air flow in the passages, thereby decreasing the differential pressure.
  • the object does not contact any portion of the system. In other systems and methods, the object does contact a portion of the system.
  • wafer handling systems are thin, rigid objects that can be transferred through the use of tooling designed with the Bernoulli principles.
  • Pressurized air or gas is forced through a small gap between two plates at an angle to each other and at an angle to the wafer. As the air escapes, it creates a low area of pressure just above the wafer which allows for lift. When the air is removed, the pressure equalizes Avhich allows the wafers to drop or release from the tool.
  • These devices include frictionless contact since the product does not contact the surface of the tool, but rather the rushing air acts as a frictionless bearing surface. Stability can be maintained in these by using small contact surfaces around the face of the tooling.
  • the object can adhere to the system.
  • the object can be forced into the chamber and remain in place due to friction from sides of the chamber contacting the object.
  • This drawback is intensified with flexible objects.
  • a flexible object can deform, wrap around, and/or compress within the chamber or other protrusions of the system when the differential pressure lifts the object to abut the system.
  • releasing of the flexible object may be delayed, slowed, and/or otherwise made inconsistent (i.e., the equalization of pressure can be interrupted).
  • a material handling system includes a body including a first member and a second member.
  • the first member and the second member define a hollow cavity within the body, and a gap disposed between the first member and the second member.
  • the body is in flow communication with a first gas source to provide pressurized gas flow through the gap to generate a lifting force on an object placed adjacent to the body. The force is created by the Bernoulli effect of the differential pressure.
  • the body has channels disposed within a central region of the body in flow communication with a second gas source. The channels are arranged to controllably disengage the object from the body.
  • a Bernoulli disc includes a body attachable to a robotic arm.
  • the body includes a first member and a second member.
  • the first member and the second member define a hollow cavity within the body.
  • a gap is disposed between the first member and the second member.
  • the body is in flow communication with a first gas source to provide pressurized gas flow through the gap to generate a lifting force on an object placed adjacent to the body.
  • Channels are disposed in a central region of the body.
  • the channels are in flow communication with a second gas source.
  • the channels are arranged to controllably disengage the object.
  • a method for repositioning objects includes: providing a body attachable to a robotic arm, connecting the body to a first gas source introducing gas from the first gas source through a Bernoulli flow passage in the body, creating a differential pressure to lift an object into contact with the body; connecting a second gas source to a plurality of channels; introducing gas from the second gas source into the plurality of channels; directing a flow through the channels to a central region of the body; applying a substantially downward force to the object; and disengaging the object from contact with the body.
  • Another aspect of the present disclosure includes a system having a disc, e.g., a Bernoulli disc, including a port or flow path for applying a gas flow in a generally downward direction to force objects downward to reduce or eliminate instances of objects adhering to the disc.
  • a disc e.g., a Bernoulli disc
  • a port or flow path for applying a gas flow in a generally downward direction to force objects downward to reduce or eliminate instances of objects adhering to the disc.
  • Another aspect of the present disclosure includes a materials handling process using a Bernoulli disc.
  • a flexible material is lifted by a differential pressure, the flexible material contacts the Bernoulli disc, and a selectively applied gas flow forces the flexible material away from the Bernoulli disc.
  • One advantage of the present disclosure is that flexible objects, which may otherwise adhere to a Bernoulli disc, can be predictably released from the materials handling device at a precise position.
  • Another advantage of the present disclosure is that movement of an object can be achieved more quickly utilizing the Bernoulli disc.
  • FIG. 1 shows a perspective view of an exemplary system according to the disclosure.
  • FIG. 2 shows a top view of an exemplary system according to the disclosure.
  • FIG. 3 shows a cross-sectional view of the exemplary embodiment from FIG. 2 along line 3-3.
  • FIG. 4 shows a cross-sectional view of the exemplary embodiment from FIG. 2 along line 4-4.
  • FIG. 5 shows a bottom perspective view of an exemplary body of a system according to an exemplary embodiment.
  • FIG. 6 shows a flow diagram of an exemplary method of repositioning a flexible object.
  • the present disclosure describes a system and method for lifting an object by applying a differential pressure, wherein the object can be controllably removed.
  • Embodiments of the present disclosure permit the differential pressure to lift a flexible object, e.g., a food item such as a pancake or a tortilla, a Frisbee®, coaster, lid, placemat, or other similarly flexible product, that may adhere temporarily or permanently within a Bernoulli disc, and to more easily permit movement of an object by automated handling equipment more easily by utilizing the Bernoulli disc.
  • a flexible object e.g., a food item such as a pancake or a tortilla, a Frisbee®, coaster, lid, placemat, or other similarly flexible product
  • Bernoulli disc refers to a disc body having a concave or tapered profile with a cooperating nozzle or plate to define a gas flow, usually compressed air. The gas flow between the disc body and the object provides a differential pressure which applies a lifting force between the Bernoulli disc and the object, as described in greater detail below.
  • FIGS. 1 & 3 show a system 10 or assembly for controllably repositioning a flexible substrate or object 30.
  • system 10 can also be used for repositioning rigid substrates.
  • System 10 includes a body 12 arranged and disposed for directing a Bernoulli flow 32 in a direction that creates a differential pressure between body 12 and object 30.
  • Bernoulli flow 32 can be formed by any suitable gas, for example, air, nitrogen, argon, or other suitable gasses.
  • the differential pressure formed by the Bernoulli flow 32 permits an object 30, for example, a flexible object 30 to be lifted.
  • Body 12 can have a generally round or circular disc-like shape.
  • Body 12 can depend from a positioning apparatus 14 permitting the selective movement of object 30.
  • Positioning apparatus 14 can be manually or robotically controlled.
  • positioning apparatus 14 can be part of an apparatus configured for manipulation by a robotic system (not shown).
  • the robotic system may be any suitable system permitting selective movement of body 12.
  • FIG. 2 shows a top view of system 10.
  • Body 12 may be hingedly secured to positioning apparatus 14, thereby permitting system 10 to maintain object 30 at a substantially level orientation.
  • a spacer 1 1 can be positioned on body 12.
  • Spacer 1 1 secures a connector fitting 13 for providing air flow to apply a downdraft or flow for disengaging objects 30 in a manner as described below.
  • connector fitting 13 is an electroplated hard, wear resistant coating.
  • body 12 may include an upper body or member 31 (FIG. 3) which is mated to a lower body or member 33 (FIG. 3). Upper member 31 and lower member 33 define a cavity 46. Body 12 is removably secured to positioning apparatus 14 through any suitable fastening mechanism. Body 12 includes a gap 35 (FIG. 3) defined by upper member 31 and lower member 33, to allow gas to flow through cavity 46, between upper member 3 1 and lower member 33.
  • member 31 may be machined from plastic and member 33 may be machined from metal.
  • FIG. 3 shows a cross-sectional view of system 10 in FIG. 2 along line 3-3.
  • Object 30 is lifted by a pressurized air flow or a Bernoulli flow 32 flowing from positioning apparatus 14 through one or more gaps 35.
  • Bernoulli flow 32 flows away from body 12, a differential pressure is induced between body 12 and object 30.
  • a force indicated by arrows 49 is created by the differential pressure, which lifts object 30 towards a central region 36 of body 12.
  • contact between object 30 and body 12 may occur. In one embodiment, contact with body 12 occurs on the periphery of central region 36 defined by protrusion 38.
  • protrusion 38 may be a continuous wall or ring centered, or approximately centered, on lower member 33. In alternate embodiments, protrusion 38 may be projections or features depending from lower member 33 in central region 36. [0027]
  • the duration of momentary adherence to body 12 by object 30 can be decreased (as further described below with reference to FIG. 4), thereby permitting a higher process speed for handling of materials in a manufacturing setting. Permitting this momentary contact may, however, permit lifting of object 30 at a greater speed.
  • Differential pressure is generated or maintained by a pressurized gas manifold 37, additional channels or flow paths or conduit 39 for Bernoulli flow 32, and/or other suitable features for maintaining or adjusting pressure within body 12 and/or positioning apparatus 14.
  • FIG. 4 shows a cross-sectional view of system 10 in FIG. 2 along line 4-4.
  • a flow 42 e.g., a pressurized gas or air blow-off flow
  • Flow 42 can be at a pressure above atmospheric pressure, or any other suitable pressure, in a closed environment (for example, a pressure above Bernoulli flow 32).
  • Flow 42 passes through connector fitting 13 from an air hose or other gas source (not shown).
  • Flow 42 travels through one or more channels 44.
  • Flow 42 remains separate from Bernoulli flow 32 that lifts object 30.
  • Flow 42 can controllably release object 30 when object 30 is detained within the body by applying a downward force against object 30 in at least center region 36.
  • Flow 42 may also permit additional control of the process of lifting object 30.
  • Flow 42 may be applied in a downward (i.e., the direction of gravity) or substantially downward direction. To disengage object 30, flow 42 applies at least sufficient downward force, which in combination with gravity, is greater than the adhering force of object 30 with body 12.
  • FIG. 5 shows a bottom perspective view of body 12.
  • protrusions 38 define a ring within central region 36, which may be substantially circular.
  • Channels 44 (FIG. 4) may be a plurality of holes positioned within central region 36 inside the ring defined by protrusions 38.
  • Method 100 includes the steps of providing a body attachable to a robotic arm at step 102; connecting the body to a first gas source at step 104; introducing gas from the first gas source through a Bernoulli flow passage in the body step 106; creating a differential pressure to lift an object into contact with the body step 108; connecting a second gas source to a plurality of channels step 1 10; introducing gas from the second gas source into the plurality of channels step 1 12; directing a flow through the channels to a central region of the body step 1 14; applying a substantially downward force to the object at step 1 16; and disengaging the object from contact with the body at step 1 18.
  • the invention discloses a body attachable to a robotic arm, a Bernoulli flow passage connected to a gas source for creating a differential pressure, and a flow directed to a central region of the body, the flow being configured to provide a substantially downward force to counteract any forces preventing downward motion of an object lifted by the pressure differential.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)

Abstract

A material handling system includes a body including a first member and a second member. The first member and the second member define a hollow cavity within the body, and a gap disposed between the first member and the second member. The body is in flow communication with a first gas source to provide pressurized gas flow through the gap to generate a lifting force on an object placed adjacent to the body. The body has channels disposed within a central region of the body in flow communication with a second gas source. The channels are arranged to controllably disengage the object from the body.

Description

METHOD AND SYSTEM FOR REPOSITIONING OF A
FLEXIBLE SUBSTRATE
CROSS REFERENCE TO RELATED APPLICATIONS
[0001] This application claims the benefit of U.S. Provisional Application No. 61/357,208 filed June 22, 2010. The disclosure of the Provisional Application is hereby incorporated by reference.
BACKGROUND
[0002] The present disclosure relates generally to material handling systems and methods. More specifically, the present disclosure relates to materials handling systems and methods involving a Bernoulli air flow.
[0003] Known systems and methods utilize the Bernoulli principle for providing a differential pressure to lift an object in a materials handling system. The differential pressure can be generated by transporting air through one or more passages to decrease pressure in a chamber. The decreased pressure in the chamber can lift the object.
[0004] In some systems and methods, the object is lifted and suspended in air while an arm or other positioning device moves the object. The object can be selectively lowered by decreasing the air flow in the passages, thereby decreasing the differential pressure. In some systems and methods, the object does not contact any portion of the system. In other systems and methods, the object does contact a portion of the system.
[0005] For example, the semiconductor industry utilizes many different wafer handling systems or wafer transport mechanisms. These wafers are thin, rigid objects that can be transferred through the use of tooling designed with the Bernoulli principles. Pressurized air or gas is forced through a small gap between two plates at an angle to each other and at an angle to the wafer. As the air escapes, it creates a low area of pressure just above the wafer which allows for lift. When the air is removed, the pressure equalizes Avhich allows the wafers to drop or release from the tool. These devices include frictionless contact since the product does not contact the surface of the tool, but rather the rushing air acts as a frictionless bearing surface. Stability can be maintained in these by using small contact surfaces around the face of the tooling.
[0006] In the systems and methods in which the object contacts the system when it is lifted by the differential pressure, the object can adhere to the system. For example, the object can be forced into the chamber and remain in place due to friction from sides of the chamber contacting the object. This drawback is intensified with flexible objects. A flexible object can deform, wrap around, and/or compress within the chamber or other protrusions of the system when the differential pressure lifts the object to abut the system. When the flexible object adheres to the system, releasing of the flexible object may be delayed, slowed, and/or otherwise made inconsistent (i.e., the equalization of pressure can be interrupted).
[0007] What is needed is a system and method for lifting an object by applying a differential pressure, wherein the object can be controllably removed.
SUMMARY
[0008] In one aspect, a material handling system includes a body including a first member and a second member. The first member and the second member define a hollow cavity within the body, and a gap disposed between the first member and the second member. The body is in flow communication with a first gas source to provide pressurized gas flow through the gap to generate a lifting force on an object placed adjacent to the body. The force is created by the Bernoulli effect of the differential pressure. The body has channels disposed within a central region of the body in flow communication with a second gas source. The channels are arranged to controllably disengage the object from the body. [0009] In another aspect of the disclosure a Bernoulli disc includes a body attachable to a robotic arm. The body includes a first member and a second member. The first member and the second member define a hollow cavity within the body. A gap is disposed between the first member and the second member. The body is in flow communication with a first gas source to provide pressurized gas flow through the gap to generate a lifting force on an object placed adjacent to the body. Channels are disposed in a central region of the body. The channels are in flow communication with a second gas source. The channels are arranged to controllably disengage the object.
[0010] In yet another aspect, a method for repositioning objects includes: providing a body attachable to a robotic arm, connecting the body to a first gas source introducing gas from the first gas source through a Bernoulli flow passage in the body, creating a differential pressure to lift an object into contact with the body; connecting a second gas source to a plurality of channels; introducing gas from the second gas source into the plurality of channels; directing a flow through the channels to a central region of the body; applying a substantially downward force to the object; and disengaging the object from contact with the body.
[0011] Another aspect of the present disclosure includes a system having a disc, e.g., a Bernoulli disc, including a port or flow path for applying a gas flow in a generally downward direction to force objects downward to reduce or eliminate instances of objects adhering to the disc.
[0012] Another aspect of the present disclosure includes a materials handling process using a Bernoulli disc. In this aspect, a flexible material is lifted by a differential pressure, the flexible material contacts the Bernoulli disc, and a selectively applied gas flow forces the flexible material away from the Bernoulli disc. [0013] One advantage of the present disclosure is that flexible objects, which may otherwise adhere to a Bernoulli disc, can be predictably released from the materials handling device at a precise position.
[0014] Another advantage of the present disclosure is that movement of an object can be achieved more quickly utilizing the Bernoulli disc.
[0015] Other features and advantages of the present invention will be apparent from the following more detailed description of the preferred embodiment, taken in conjunction with the accompanying drawings which illustrate, by way of example, the principles of the invention.
BRIEF DESCRIPTION OF THE DRAWINGS
[0016] FIG. 1 shows a perspective view of an exemplary system according to the disclosure.
[0017] FIG. 2 shows a top view of an exemplary system according to the disclosure.
[0018] FIG. 3 shows a cross-sectional view of the exemplary embodiment from FIG. 2 along line 3-3.
[0019] FIG. 4 shows a cross-sectional view of the exemplary embodiment from FIG. 2 along line 4-4.
[0020] FIG. 5 shows a bottom perspective view of an exemplary body of a system according to an exemplary embodiment.
[0021] FIG. 6 shows a flow diagram of an exemplary method of repositioning a flexible object. DETAILED DESCRIPTION OF THE INVENTION
[0022] The present disclosure describes a system and method for lifting an object by applying a differential pressure, wherein the object can be controllably removed.
[0023] Embodiments of the present disclosure permit the differential pressure to lift a flexible object, e.g., a food item such as a pancake or a tortilla, a Frisbee®, coaster, lid, placemat, or other similarly flexible product, that may adhere temporarily or permanently within a Bernoulli disc, and to more easily permit movement of an object by automated handling equipment more easily by utilizing the Bernoulli disc. As used herein, Bernoulli disc refers to a disc body having a concave or tapered profile with a cooperating nozzle or plate to define a gas flow, usually compressed air. The gas flow between the disc body and the object provides a differential pressure which applies a lifting force between the Bernoulli disc and the object, as described in greater detail below.
[0024] FIGS. 1 & 3 show a system 10 or assembly for controllably repositioning a flexible substrate or object 30. As will be appreciated by persons skilled in the art, system 10 can also be used for repositioning rigid substrates. System 10 includes a body 12 arranged and disposed for directing a Bernoulli flow 32 in a direction that creates a differential pressure between body 12 and object 30. Bernoulli flow 32 can be formed by any suitable gas, for example, air, nitrogen, argon, or other suitable gasses. The differential pressure formed by the Bernoulli flow 32 permits an object 30, for example, a flexible object 30 to be lifted. Body 12 can have a generally round or circular disc-like shape. Body 12 can depend from a positioning apparatus 14 permitting the selective movement of object 30. Positioning apparatus 14 can be manually or robotically controlled. For example, positioning apparatus 14 can be part of an apparatus configured for manipulation by a robotic system (not shown). The robotic system may be any suitable system permitting selective movement of body 12. [0025] FIG. 2 shows a top view of system 10. Body 12 may be hingedly secured to positioning apparatus 14, thereby permitting system 10 to maintain object 30 at a substantially level orientation. A spacer 1 1 can be positioned on body 12. Spacer 1 1 secures a connector fitting 13 for providing air flow to apply a downdraft or flow for disengaging objects 30 in a manner as described below. In one embodiment, connector fitting 13 is an electroplated hard, wear resistant coating. In one embodiment, body 12 may include an upper body or member 31 (FIG. 3) which is mated to a lower body or member 33 (FIG. 3). Upper member 31 and lower member 33 define a cavity 46. Body 12 is removably secured to positioning apparatus 14 through any suitable fastening mechanism. Body 12 includes a gap 35 (FIG. 3) defined by upper member 31 and lower member 33, to allow gas to flow through cavity 46, between upper member 3 1 and lower member 33. In a preferred embodiment, member 31 may be machined from plastic and member 33 may be machined from metal.
[0026] FIG. 3 shows a cross-sectional view of system 10 in FIG. 2 along line 3-3. Object 30 is lifted by a pressurized air flow or a Bernoulli flow 32 flowing from positioning apparatus 14 through one or more gaps 35. When Bernoulli flow 32 flows away from body 12, a differential pressure is induced between body 12 and object 30. A force indicated by arrows 49 is created by the differential pressure, which lifts object 30 towards a central region 36 of body 12. When object 30 reaches body 12, contact between object 30 and body 12 may occur. In one embodiment, contact with body 12 occurs on the periphery of central region 36 defined by protrusion 38. When object 30 is a flexible substrate/product, the contact between object 30 and body 12 may result in object 30 adhering, momentarily or permanently, against protrusion 38, or another part of body 12. In one exemplary embodiment, protrusion 38 may be a continuous wall or ring centered, or approximately centered, on lower member 33. In alternate embodiments, protrusion 38 may be projections or features depending from lower member 33 in central region 36. [0027] The duration of momentary adherence to body 12 by object 30 can be decreased (as further described below with reference to FIG. 4), thereby permitting a higher process speed for handling of materials in a manufacturing setting. Permitting this momentary contact may, however, permit lifting of object 30 at a greater speed.
[0028] Differential pressure is generated or maintained by a pressurized gas manifold 37, additional channels or flow paths or conduit 39 for Bernoulli flow 32, and/or other suitable features for maintaining or adjusting pressure within body 12 and/or positioning apparatus 14.
[0029] FIG. 4 shows a cross-sectional view of system 10 in FIG. 2 along line 4-4. A flow 42, e.g., a pressurized gas or air blow-off flow, is directed to central region 36 of body 12. Flow 42 can be at a pressure above atmospheric pressure, or any other suitable pressure, in a closed environment (for example, a pressure above Bernoulli flow 32). Flow 42 passes through connector fitting 13 from an air hose or other gas source (not shown). Flow 42 travels through one or more channels 44. Flow 42 remains separate from Bernoulli flow 32 that lifts object 30. Flow 42 can controllably release object 30 when object 30 is detained within the body by applying a downward force against object 30 in at least center region 36. Flow 42 may also permit additional control of the process of lifting object 30. Flow 42 may be applied in a downward (i.e., the direction of gravity) or substantially downward direction. To disengage object 30, flow 42 applies at least sufficient downward force, which in combination with gravity, is greater than the adhering force of object 30 with body 12.
[0030] FIG. 5 shows a bottom perspective view of body 12. As shown in FIG. 5, protrusions 38 define a ring within central region 36, which may be substantially circular. Channels 44 (FIG. 4) may be a plurality of holes positioned within central region 36 inside the ring defined by protrusions 38.
[0031] Referring next to FIG. 6, a method 100 is described. Method 100 includes the steps of providing a body attachable to a robotic arm at step 102; connecting the body to a first gas source at step 104; introducing gas from the first gas source through a Bernoulli flow passage in the body step 106; creating a differential pressure to lift an object into contact with the body step 108; connecting a second gas source to a plurality of channels step 1 10; introducing gas from the second gas source into the plurality of channels step 1 12; directing a flow through the channels to a central region of the body step 1 14; applying a substantially downward force to the object at step 1 16; and disengaging the object from contact with the body at step 1 18.
[0032] The invention discloses a body attachable to a robotic arm, a Bernoulli flow passage connected to a gas source for creating a differential pressure, and a flow directed to a central region of the body, the flow being configured to provide a substantially downward force to counteract any forces preventing downward motion of an object lifted by the pressure differential.
[0033] While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted for elements thereof without departing from the scope of the invention. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the invention without departing from the essential scope thereof. Therefore, it is intended that the invention not be limited to the particular embodiment disclosed as the best mode contemplated for carrying out this invention, but that the invention will include all embodiments falling within the scope of the appended claims.

Claims

1. A material handling system, comprising: a body comprising a first member and a second member, the first member and second member defining a hollow cavity within the body, and a gap disposed between the first member and the second member; the body in flow communication with a first gas source to provide pressurized gas flow through the gap to generate a lifting force on an object placed adjacent the body;
at least one channel disposed in a central region of the body, the at least one channel in flow communication with a second gas source, the channel arranged to controllably disengage the object.
2. The system of claim 1, wherein the pressurized gas flow from the first gas source passes between the first gas source, the cavity and the gap for creating a differential pressure that generates the lifting force.
3. The system of claim 1 , wherein the first gas source and the second gas source operate mutually exclusively.
4. The system of claim 1 , wherein the body is arranged for directing a Bernoulli flow in a radially outward direction to create a differential pressure that generates the lifting force between the body and the object.
5. The system of claim 1 , wherein the body is characterized by a generally circular disc-like shape.
6. The system of claim 1, wherein the body depends from a positioning apparatus, the positioning apparatus providing selective movement of the object.
7. The system of claim 6, wherein the positioning apparatus further comprises a conduit for the first gas source pressurized gas flow.
8. The system of claim 6, wherein the body is secured by a hinge to the positioning apparatus, the hinge arranged to maintain the body or the object at a substantially level orientation.
9. The system of claim 8, the positioning apparatus further comprising a connector fitting for attaching an air hose to the second gas source.
10. The system of claim 1 , wherein the lifting force lifts the object towards the central region of the body wherein contact between the object and the body occurs on a periphery of the central region, the central region defined by at least one protrusion defining the periphery of the central region.
1 1. The system of claim 1, wherein the at least one protrusion comprises a continuous wall approximately centered on the lower member.
12. The system of claim 1, wherein the at least one protrusion comprises a substantially circular ring within the central region.
13. The system of claim 1 , wherein the positioning apparatus further includes a manifold in flow communication with the first gas source and the body, and the differential pressure is generated or maintained by pressurizing gas from the first gas source in the manifold.
14. The system of claim 1 , wherein the at least one channel directs the second pressurized gas source to the central region of the body, and wherein the second pressurized gas source comprises a pressure greater than a pressure of the Bernoulli flow.
15. The system of claim 1, wherein the second pressurized gas source applies a downward force against the object in at least central region 36 to disengage the object, the downward force being greater than the adhering force of the object with the body.
16. The system of claim 1 , wherein the at least one channel comprises a plurality of holes positioned within the central region defined by the protrusion.
17. A method, comprising: providing a body attachable to a robotic arm;
connecting the body to a first gas source;
introducing gas from the first gas source through a Bernoulli flow passage in the body;
creating a differential pressure to lift an object into contact with the body;
connecting a second gas source to a plurality of channels;
introducing gas from the second gas source into the plurality of channels;
directing a flow through the channels to a central region of the body; applying a substantially downward force to the object; and
disengaging the object from contact with the body.
18. An article, comprising: a body attachable to a robotic arm, the body comprising a first member and a second member, the first member and second member defining a hollow cavity within the body, and a gap disposed between the first member and the second member; the body in flow communication with a first gas source to provide pressurized gas flow through the gap to generate a lifting force on an object placed adjacent the body; and at least one channel disposed in a central region of the body, the at least one channel in flow communication with a second gas source, the channel arranged to controllably disengage the object.
19. The article of claim 18, wherein the pressurized gas flow through the gap generates a Bernoulli effect in the gap to lift the object.
20. The article of claim 18, wherein the article is configured for providing a substantially downward force to counteract the object from adhering to the body.
PCT/US2011/040133 2010-06-22 2011-06-13 Method and system for repositioning of a flexible substrate WO2011162995A1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP11798625.7A EP2585393A4 (en) 2010-06-22 2011-06-13 Method and system for repositioning of a flexible substrate
US13/639,601 US8714609B2 (en) 2010-06-22 2011-06-13 Method and system for repositioning of a flexible substrate
AU2011271288A AU2011271288A1 (en) 2010-06-22 2011-06-13 Method and system for repositioning of a flexible substrate
CA2796801A CA2796801A1 (en) 2010-06-22 2011-06-13 Method and system for repositioning of a flexible substrate

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US35720810P 2010-06-22 2010-06-22
US61/357,208 2010-06-22

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EP (1) EP2585393A4 (en)
AU (1) AU2011271288A1 (en)
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103192402A (en) * 2013-04-14 2013-07-10 苏州科技学院 Piezoelectric ultrasonic vibration absorption picker
GB2539179A (en) * 2015-05-29 2016-12-14 Frito Lay Trading Co Gmbh Manufacture of snack foods
CN109968449A (en) * 2019-04-29 2019-07-05 石狮添荃机械科技有限责任公司 A kind of casting mould bottom plate tapping hole perforating device

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2997031B1 (en) * 2012-10-23 2016-07-01 Bel Fromageries DEVICE FOR PREVENTING AT LEAST ONE DEFORMABLE PRODUCT.
EP2926956B1 (en) * 2014-04-01 2017-05-03 J. Schmalz GmbH Gripping device
TWI524012B (en) * 2014-07-31 2016-03-01 Gison Machinery Co Ltd Sucker
TWI712389B (en) * 2014-08-12 2020-12-11 吉生機械股份有限公司 Pneumatic tools
US9676102B2 (en) * 2014-10-24 2017-06-13 Gison Machinery Co., Ltd. Sucker
JP6744630B2 (en) * 2016-12-16 2020-08-19 株式会社ハーモテック Baffle
CA3048681A1 (en) * 2016-12-29 2018-07-05 Ensyn Renewables, Inc. Demetallization of liquid biomass
US10453711B2 (en) * 2017-05-31 2019-10-22 Facebook Technologies, Llc Fluidic pick-up head for small semiconductor devices
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JP7075814B2 (en) * 2018-05-21 2022-05-26 株式会社荏原製作所 Manufacturing method of substrate holding device, substrate polishing device, elastic member and substrate holding device
EP3578323B1 (en) * 2018-06-05 2020-08-12 C.R.F. Società Consortile per Azioni A suction-type gripping device
JP7219426B2 (en) * 2020-02-19 2023-02-08 Smc株式会社 Non-contact transfer device
CN112938557A (en) * 2021-04-23 2021-06-11 青岛前丰国际帽艺股份有限公司 A feeding agencies for on automatic production line equipment of system cap
CN114505802B (en) * 2022-03-30 2024-03-22 湖北广盛建筑产业化科技有限公司 Transverse member positioning tool

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020067585A1 (en) * 2000-06-02 2002-06-06 Nikon Corporation Electrostatic wafer chucks and charged-particle-beam exposure apparatus comprising same
US20050151282A1 (en) * 2004-01-13 2005-07-14 Harper Bruce M. Workpiece handler and alignment assembly
US20100052345A1 (en) * 2008-08-28 2010-03-04 Chester Hann Huei Chang Non-Contact Manipulating Devices and Methods

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5169196A (en) * 1991-06-17 1992-12-08 Safabakhsh Ali R Non-contact pick-up head
US6427991B1 (en) * 2000-08-04 2002-08-06 Tru-Si Technologies, Inc. Non-contact workpiece holder using vortex chuck with central gas flow
JP4491340B2 (en) * 2004-12-28 2010-06-30 株式会社コガネイ Transport device
US7398735B1 (en) * 2005-12-16 2008-07-15 Sunderland Howard F Bernoulli type, non-contact air-activated lifting and tamping device
DE202007007721U1 (en) * 2007-05-31 2007-08-09 Jonas & Redmann Automationstechnik Gmbh Bernoulli gripper for contactless admission of e.g. silicon-based wafer, has damper running about gripper, and trace for wafer to be gripped forming damping resistance, so that wafer comes to contact surface of support ring

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020067585A1 (en) * 2000-06-02 2002-06-06 Nikon Corporation Electrostatic wafer chucks and charged-particle-beam exposure apparatus comprising same
US20050151282A1 (en) * 2004-01-13 2005-07-14 Harper Bruce M. Workpiece handler and alignment assembly
US20100052345A1 (en) * 2008-08-28 2010-03-04 Chester Hann Huei Chang Non-Contact Manipulating Devices and Methods

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2585393A4 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103192402A (en) * 2013-04-14 2013-07-10 苏州科技学院 Piezoelectric ultrasonic vibration absorption picker
GB2539179A (en) * 2015-05-29 2016-12-14 Frito Lay Trading Co Gmbh Manufacture of snack foods
GB2539179B (en) * 2015-05-29 2019-09-18 Frito Lay Trading Co Gmbh Manufacture of snack foods
CN109968449A (en) * 2019-04-29 2019-07-05 石狮添荃机械科技有限责任公司 A kind of casting mould bottom plate tapping hole perforating device

Also Published As

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EP2585393A1 (en) 2013-05-01
AU2011271288A1 (en) 2013-01-31
CA2796801A1 (en) 2011-12-29
US20130026775A1 (en) 2013-01-31
US8714609B2 (en) 2014-05-06
EP2585393A4 (en) 2015-06-24

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