WO2011145802A3 - Ultrasonic atomic force microscope device - Google Patents

Ultrasonic atomic force microscope device Download PDF

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Publication number
WO2011145802A3
WO2011145802A3 PCT/KR2011/002048 KR2011002048W WO2011145802A3 WO 2011145802 A3 WO2011145802 A3 WO 2011145802A3 KR 2011002048 W KR2011002048 W KR 2011002048W WO 2011145802 A3 WO2011145802 A3 WO 2011145802A3
Authority
WO
WIPO (PCT)
Prior art keywords
cantilever
unit
displacement
sample piece
atomic force
Prior art date
Application number
PCT/KR2011/002048
Other languages
French (fr)
Korean (ko)
Other versions
WO2011145802A2 (en
Inventor
박익근
박태성
곽동열
Original Assignee
서울과학기술대학교 산학협력단
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 서울과학기술대학교 산학협력단 filed Critical 서울과학기술대학교 산학협력단
Publication of WO2011145802A2 publication Critical patent/WO2011145802A2/en
Publication of WO2011145802A3 publication Critical patent/WO2011145802A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/044—Internal reflections (echoes), e.g. on walls or defects

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

The present invention relates to an ultrasonic atomic force microscope device. The ultrasonic atomic force microscope device according to the present invention has a contact-type cantilever for emitting ultrasonic waves onto a sample piece after receiving a resonant frequency signal, and includes: a control driving unit including a function generating unit vibrating the cantilever by applying the resonant frequency signal to the cantilever, and a lock-in amplifier unit obtaining and amplifying a vibration signal of the cantilever; a displacement measuring device including a cantilever head unit measuring displacement information of the cantilever by detecting a laser beam reflected onto the sample piece after being projected from a laser aligned on the surface of the cantilever by means of displacement sensors arranged so as to be divided into a plurality of areas, and a cantilever driving unit maintaining the contacting force exerted on the sample piece of the cantilever; and a microcomputer controlling the operations of the control driving unit and the displacement measuring unit and generating a nanoscale sample piece image and elastic property image using the displacement information detected through the vibration signal amplified by the lock-in amplifier unit and the displacement information detected by the displacement measuring unit.
PCT/KR2011/002048 2010-05-17 2011-03-25 Ultrasonic atomic force microscope device WO2011145802A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2010-0045982 2010-05-17
KR1020100045982A KR101112505B1 (en) 2010-05-17 2010-05-17 Ultrasonic atomic force microscopy apparatus

Publications (2)

Publication Number Publication Date
WO2011145802A2 WO2011145802A2 (en) 2011-11-24
WO2011145802A3 true WO2011145802A3 (en) 2012-02-23

Family

ID=44992156

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/002048 WO2011145802A2 (en) 2010-05-17 2011-03-25 Ultrasonic atomic force microscope device

Country Status (2)

Country Link
KR (1) KR101112505B1 (en)
WO (1) WO2011145802A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101410221B1 (en) * 2012-05-23 2014-06-20 서울과학기술대학교 산학협력단 Ultrasonic atomic force microscopy apparatus
KR101656185B1 (en) * 2015-06-02 2016-09-09 서울과학기술대학교 산학협력단 A signal analyzing method of a acoustic microscope
EP3349019A1 (en) * 2017-01-13 2018-07-18 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Method of and system for performing detection on or characterization of a sample
KR102093989B1 (en) 2018-10-05 2020-03-26 동의대학교 산학협력단 Apparatus for measuring physical properties of thin films at high frequencies
CN111337710A (en) * 2020-02-20 2020-06-26 罗浩维 Piezoelectric force microscope data reading and measuring system, device and method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08233837A (en) * 1995-02-24 1996-09-13 Hitachi Ltd Proximity ultrasonic microscope
US20060075807A1 (en) * 2002-12-18 2006-04-13 Palo Alto Research Center Incorporated Alignment-tolerant lens structures for acoustic force actuation of cantilevers
US7584653B2 (en) * 2003-08-11 2009-09-08 Veeco Instruments, Inc. System for wide frequency dynamic nanomechanical analysis

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08233837A (en) * 1995-02-24 1996-09-13 Hitachi Ltd Proximity ultrasonic microscope
US20060075807A1 (en) * 2002-12-18 2006-04-13 Palo Alto Research Center Incorporated Alignment-tolerant lens structures for acoustic force actuation of cantilevers
US7584653B2 (en) * 2003-08-11 2009-09-08 Veeco Instruments, Inc. System for wide frequency dynamic nanomechanical analysis

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PARK, TAE SEONG ET AL.: "Vibro-Contact Analysis of Ultrasonic Atomic Force Microscopy Tip", JOURNAL OF NONDESTRUCTIVE TEST, vol. 30, no. 2, April 2010 (2010-04-01), pages 132 - 138 *

Also Published As

Publication number Publication date
KR101112505B1 (en) 2012-02-14
KR20110126344A (en) 2011-11-23
WO2011145802A2 (en) 2011-11-24

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