WO2011129029A1 - 流量測定装置及び流速測定装置 - Google Patents
流量測定装置及び流速測定装置 Download PDFInfo
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- WO2011129029A1 WO2011129029A1 PCT/JP2010/070832 JP2010070832W WO2011129029A1 WO 2011129029 A1 WO2011129029 A1 WO 2011129029A1 JP 2010070832 W JP2010070832 W JP 2010070832W WO 2011129029 A1 WO2011129029 A1 WO 2011129029A1
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/20—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
- G01F1/203—Jet stream flowmeters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/66—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
- G01F1/661—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters using light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/359—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using near infrared light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P13/00—Indicating or recording presence, absence, or direction, of movement
- G01P13/0006—Indicating or recording presence, absence, or direction, of movement of fluids or of granulous or powder-like substances
- G01P13/0066—Indicating or recording presence, absence, or direction, of movement of fluids or of granulous or powder-like substances by using differences of pressure in the fluid
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
Definitions
- the present invention relates to a flow rate measuring device that measures the flow rate of a fluid and a flow rate measuring device that measures the flow rate of a fluid.
- Patent Document 1 describes a differential pressure flow meter in which an orifice plate is disposed in a pipe and the flow rate of fluid flowing in the pipe is measured by the differential pressure in the pipe before and after the orifice plate.
- an ultrasonic transmitting element and a receiving element are installed to face each other at an angle in the fluid flow direction, and a different first method is used in an apparatus for measuring the fluid flow rate from the ultrasonic propagation time.
- a flow rate measuring device that includes means for calculating the propagation time of an ultrasonic wave from a phase difference and obtains a flow rate by calculating the flow velocity of the fluid from the propagation time of the ultrasonic wave.
- the present invention has been made in view of the above, and provides a flow rate measuring device and a flow velocity measuring device capable of measuring with high responsiveness and capable of measuring a fluid flow even in a severe environment. Let it be an issue.
- the present invention includes a main pipe that is open at both ends and can be connected to a flow path for flowing a fluid, a side connected to the main pipe, and a side connected to the main pipe.
- An incident tube having a window portion through which light can pass at the opposite end, and a window portion through which light can pass at the end opposite to the side connected to the main tube.
- a measurement cell configured by a first purge fluid supply pipe connected to the exit pipe and the incident pipe, a purge fluid supply unit for supplying a purge fluid to the first purge fluid supply pipe of the measurement cell, and A light emitting unit that makes a laser beam incident on an incident tube, and a light receiving unit that receives the laser beam incident from the incident tube, passes through the measurement cell, and is emitted from the emission tube, and outputs the received light amount as a light reception signal. And the light receiving signal output from the light receiving unit.
- a calculation unit that calculates the flow rate of the fluid flowing through the measurement cell, a flow direction detection unit that detects the flow direction of the fluid flowing through the measurement cell, and a control unit that controls the operation of each unit.
- the flow direction detection unit includes a differential pressure detection unit that detects a pressure difference from both directions parallel to the flow direction, and detects the flow direction based on the pressure difference detected by the differential pressure detection unit. It is preferable. Thereby, the flow direction of the fluid can be detected more appropriately.
- the flow direction detection unit has a deformation part that is exposed to the flow path and deforms due to a fluid flow, and detects the flow direction based on the deformation direction of the deformation part. Thereby, the flow direction of the fluid can be detected more appropriately.
- the light emitting unit, the light receiving unit, and the calculation unit have at least two measurement units, and the flow direction detection unit is based on a flow rate calculation value calculated by the measurement unit. It is preferable to detect the flow direction. Thereby, the flow direction of the fluid can be detected more appropriately.
- the flow direction detection unit includes an ultrasonic output unit that outputs an ultrasonic wave to the flow path, and an ultrasonic reception unit that receives an ultrasonic wave output from the ultrasonic output unit. It is preferable to detect the flow direction based on the frequency of the ultrasonic wave received by the receiving unit. Thereby, the flow direction of the fluid can be detected more appropriately.
- the calculation unit demodulates a light reception signal received by the light reception unit at one frequency and calculates the flow rate of the fluid based on the magnitude of fluctuation of the demodulated signal.
- the flow rate can be measured with a simple configuration.
- the calculation unit may demodulate the light reception signal received by the light reception unit at two different frequencies, and calculate the flow rate of the fluid based on the magnitude of signal fluctuation at the two demodulated frequencies. preferable. Thereby, the flow rate can be measured with higher accuracy.
- the calculating unit may demodulate the received light signal received by the light receiving unit at a plurality of different frequencies, and calculate the flow rate of the fluid based on the magnitude of signal fluctuation at the demodulated frequencies. preferable. Thereby, the flow rate can be measured with higher accuracy.
- the calculation unit stores a relationship between the fluctuation and the flow rate calculated in advance, and calculates the flow rate of the fluid based on the relationship and the magnitude of the fluctuation. Thereby, the flow rate can be measured more easily.
- the calculation unit stores a relationship between the fluctuation and the flow rate of the fluid for each flow rate of the purge fluid flowing through the incident pipe, and based on the flow rate of the purge fluid flowing through the incident pipe and the fluctuation. It is preferable to calculate the flow rate of the fluid. Thereby, the flow rate can be measured with higher accuracy.
- control unit calculates a flow rate of the purge fluid having a large variation amount in a region including the fluid flow rate calculated by the calculation unit, and based on a calculation result, the control unit calculates the purge fluid flow rate from the purge fluid supply unit. It is preferable to adjust the flow rate of the purge fluid supplied to the first purge fluid supply pipe. Thereby, the flow rate can be measured with higher accuracy.
- the calculation unit further includes a concentration of a substance to be measured of a waste fluid flowing through the measurement cell based on the intensity of the laser beam output from the light emitting unit and the intensity of the laser beam received by the light receiving unit. Is also preferably calculated. Thereby, more information can be acquired about the flowing fluid.
- the light receiving unit includes a plurality of light receiving elements arranged adjacent to each other, and outputs the amount of light received by each light receiving element as a light receiving signal, and the calculating unit receives a light receiving signal transmitted from each light receiving element. It is preferable to calculate the flow rate of the fluid based on the comparison of strength. Even with this method, the flow rate can be measured with high accuracy.
- the calculation unit calculates the arrival position of the laser beam based on a comparison of the intensity of the received light signal sent from each light receiving element, and based on the deviation between the arrival position and the reference position, It is preferable to calculate the flow rate. Thereby, the displacement of the laser beam can be detected, and the flow rate can be measured.
- the calculation unit is configured to determine a substance to be measured of the exhaust fluid flowing through the measurement cell based on the total amount of the received light signal transmitted from each light receiving element and the intensity of the laser light received by the light receiving unit. It is preferable to calculate the concentration. Thereby, more information can be acquired about the flowing fluid.
- the measurement cell generates turbulent flow that turbulently flows the air in the vicinity of the incident tube on the upstream side of the incident tube in the fluid flow direction and in the vicinity of the incident tube. It is preferable to have a part. Thereby, the change of the received light signal with respect to the change of the flow rate can be increased, and the flow rate can be measured with higher accuracy.
- a second purge fluid supply pipe connected to the emission pipe is provided, and the purge fluid supply unit supplies the purge fluid also to the second purge fluid supply pipe.
- the calculation unit further measures the flow velocity of the fluid flowing through the main pipe of the measurement cell based on the light reception signal output from the light reception unit. Thereby, more information on the fluid flowing through the measurement cell can be acquired.
- the fluid is preferably a gas.
- the present invention provides an incident tube in which one end portion is an opening facing a measurement region and a window portion through which light can pass is formed at the opposite end portion.
- One end is opposed to the incident tube and is an opening facing the measurement region, and is connected to the exit tube and the incident tube in which a window portion through which light can pass is formed at the opposite end.
- a measurement cell constituted by a first purge fluid supply pipe, a purge fluid supply part for supplying a purge fluid to the first purge fluid supply pipe of the measurement cell, and a light emitting part for causing laser light to enter the incident pipe
- a light receiving unit that receives the laser light that is incident from the incident tube, passes through the measurement region, and is emitted from the emitting tube, and outputs the received light amount as a light receiving signal; and a light receiving signal that is output from the light receiving unit Flow through the measurement area based on To a calculation unit for calculating the flow velocity of the body, and flow direction detector for detecting the flow direction of the fluid flowing through the measuring area, and a control unit for controlling the operation of each unit, characterized by having a.
- the flow direction detection unit includes a differential pressure detection unit that detects a pressure difference from both directions parallel to the flow direction, and detects the flow direction based on the pressure difference detected by the differential pressure detection unit. It is preferable. Thereby, the flow direction of the fluid can be detected more appropriately.
- the flow direction detection unit has a deformation part that is exposed to the measurement region and deforms due to a fluid flow, and detects the flow direction based on the deformation direction of the deformation part. Thereby, the flow direction of the fluid can be detected more appropriately.
- the measurement cell includes a main tube that is connected to one end of the incident tube and one end of the output tube and through which a fluid to be measured flows, and the measurement region is a part of the main tube. It is preferable that Thereby, the flow of a measuring object can be restrained and it can measure with higher precision.
- the fluid is preferably a gas.
- the flow rate measuring device and the flow velocity measuring device according to the present invention are capable of measuring with high responsiveness and exhibiting an effect that fluid flow can be measured even in a severe environment.
- FIG. 1 is a schematic diagram showing a schematic configuration of an embodiment of a flow rate measuring device of the present invention.
- FIG. 2 is an enlarged schematic view showing a part of the measurement cell of the flow rate measuring device shown in FIG. 1 in an enlarged manner.
- FIG. 3 is a schematic diagram showing a schematic configuration of the flow direction detecting means shown in FIG.
- FIG. 4 is an explanatory diagram for explaining the path of the laser beam.
- FIG. 5 is a graph showing the relationship between frequency and noise.
- FIG. 6 is a graph showing the relationship between the exhaust gas flow rate and noise.
- FIG. 7 is a graph showing the relationship between the exhaust gas flow rate and noise.
- FIG. 8 is a graph showing the relationship between frequency and noise.
- FIG. 5 is a graph showing the relationship between frequency and noise.
- FIG. 6 is a graph showing the relationship between the exhaust gas flow rate and noise.
- FIG. 7 is a graph showing the relationship between the exhaust gas flow rate and noise.
- FIG. 8 is a graph
- FIG. 9A is a schematic diagram showing a schematic configuration of another example of the flow direction detecting means.
- FIG. 9B is a schematic view of the flow direction detecting unit viewed from the Z direction of FIG. 9A.
- FIG. 10 is a schematic diagram showing a schematic configuration of another example of the flow direction detecting means.
- FIG. 11 is a schematic diagram showing a schematic configuration of another example of the flow direction detecting means.
- FIG. 12 is a schematic diagram showing a schematic configuration of another example of the flow direction detecting means.
- FIG. 13 is a schematic diagram showing a schematic configuration of another example of the flow direction detecting means.
- FIG. 14A is a schematic diagram illustrating a schematic configuration of a part of another embodiment of the flow rate measuring device. 14B is a partially enlarged view of FIG. 14A.
- FIG. 15A is a schematic diagram illustrating a schematic configuration of a light receiving unit of another embodiment of the flow rate measuring device.
- FIG. 15B is an explanatory diagram for explaining the operation of the flow rate measuring device shown in FIG. 15A.
- FIG. 15C is an explanatory diagram for explaining the operation of the flow rate measuring device illustrated in FIG. 15A.
- FIG. 16 is a schematic diagram illustrating a schematic configuration of another example of the light receiving unit.
- FIG. 17 is a schematic diagram showing a schematic configuration of an embodiment of the flow velocity measuring device of the present invention.
- FIG. 18A is an enlarged schematic view showing a part of the measurement cell of the flow velocity measuring device shown in FIG. 17 in an enlarged manner.
- FIG. 18B is a schematic view of the measurement cell of the flow velocity measuring device shown in FIG. 17 as viewed from a direction parallel to the flow direction of the exhaust gas.
- the flow rate measuring device can measure the flow rate and flow velocity of various gases (gas) and fluid such as liquid flowing in the flow path.
- gases gases
- fluid such as liquid flowing in the flow path.
- an exhaust gas purification device may be attached to a diesel engine, and the flow rate of exhaust gas discharged from the diesel engine may be measured.
- the engine that discharges exhaust gas that is, a device that discharges (supplies) the gas to be measured is not limited to this, and can be used for various internal combustion engines such as a gasoline engine and a gas turbine. Examples of the device having an internal combustion engine include various devices such as vehicles, ships, and generators.
- combustion equipment such as a garbage incinerator and boiler, and a high temperature and flow rate, a flow rate with fluctuations in flow velocity, a flow rate of exhaust gas discharged from a flow velocity measurement target, and a flow velocity can also be measured.
- combustion equipment such as a garbage incinerator and boiler, and a high temperature and flow rate
- a flow rate with fluctuations in flow velocity a flow rate of exhaust gas discharged from a flow velocity measurement target
- a flow velocity measurement target a flow velocity measurement target
- a flow velocity can also be measured.
- the flow velocity which flows through piping is also measurable with the apparatus structure of the flow volume measuring apparatus demonstrated by the following embodiment.
- FIG. 1 is a schematic diagram showing a schematic configuration of an embodiment of a flow rate measuring device of the present invention.
- FIG. 2 is an enlarged schematic view showing a part of the measurement cell of the flow rate measuring device shown in FIG.
- the flow rate measuring device 10 includes a measurement cell 12, a measurement unit 14, a purge gas supply unit 16, and a flow direction detection unit 18.
- the flow rate measuring device 10 is provided between the pipe 6 and the pipe 8 through which the exhaust gas A flows. Further, the exhaust gas A is supplied from the upstream side of the pipe 6, passes through the pipe 6, the flow rate measuring device 10, and the pipe 8, and is discharged to the downstream side of the pipe 8.
- An exhaust gas generator (supply device) is disposed upstream of the pipe 6.
- the measurement cell 12 basically has a main tube 20, an incident tube 22, and an exit tube 24.
- the incident tube 22 is provided with a window 26 and a purge gas supply tube 30, and the emission tube 24 is provided with a window 28 and a purge gas supply tube 32.
- the main pipe 20 is a tubular tubular member, and has one end connected to the pipe 6 and the other end connected to the pipe 8. That is, the main pipe 20 is disposed at a position that becomes a part of the flow path through which the exhaust gas A flows. Thereby, the exhaust gas A flows in the order of the pipe 6, the main pipe 20, and the pipe 8. Further, the exhaust gas A flowing through the pipe 6 basically flows through the main pipe 20.
- the incident tube 22 is a tubular member, and one end thereof is connected to the main tube 20. Further, in the main tube 20, the connection portion with the incident tube 22 is an opening having substantially the same shape as the opening (end opening) of the incident tube 22. That is, the incident tube 22 is connected to the main tube 20 in a state where air can flow.
- a window 26 is provided at the other end of the incident tube 22 and is sealed by the window 26.
- the window 26 is made of a member that transmits light, such as transparent glass or resin. Thereby, the incident tube 22 is in a state where the end portion where the window 26 is provided is in a state where air is not circulated and light can pass therethrough.
- the incident tube 22 has an area of an opening at the end of the window 26 (that is, an opening closed by the window 26) and an end of the main tube 20 (that is, the main tube).
- the area of the opening connected to 20 is substantially the same cylindrical shape.
- the shape of the incident tube 22 is not limited to a cylindrical shape, and may be a cylindrical shape that allows air and light to pass therethrough, and may be various shapes.
- the incident tube 22 may have a shape whose cross section is a square, a polygon, an ellipse, or an asymmetric curved surface.
- the incident tube 22 may have a cylindrical cross-sectional shape and a shape whose diameter changes depending on the position.
- it is preferable that the incident tube 22 has a shape in which a purge gas described later flows stably.
- a purge gas supply pipe 30 is further connected to the incident pipe 22. As shown in FIG. 2, the purge gas supply pipe 30 is disposed between an end portion where the window 26 is sealed and an end portion connected to the main pipe 20. The purge gas supply pipe 30 guides the purge gas supplied from the purge gas supply means 16 to the incident pipe 22. Further, the purge gas supply pipe 30 is inclined at a portion that becomes a purge gas ejection port toward the window 26 side.
- the exit tube 24 is a tubular member having substantially the same shape as the entrance tube 22, one end is connected to the main tube 20, and the other end of the exit tube 24 is provided with a window 28.
- the exit tube 24 is also in a state where air can flow through the main tube 20, and an end portion provided with the window 28 is in a state where air does not flow and light can pass therethrough.
- the emission tube 24 is disposed at a position where the central axis is substantially the same as the central axis of the incident tube 22. That is, the entrance tube 22 and the exit tube 24 are disposed at positions facing the main tube 20.
- the exit tube 24 also has an area of an opening at the end on the window 28 side (that is, an opening closed by the window 28) and an end portion on the main tube 20 side (that is, a portion connected to the main tube 20).
- the area of the opening) is substantially the same cylindrical shape.
- the shape of the emission tube 24 is not limited to a cylindrical shape, and may be any shape as long as it is a cylindrical shape that allows air and light to pass therethrough.
- the emission tube 24 may have a cross-sectional shape that is a square, a polygon, an ellipse, or an asymmetric curved surface.
- the emission tube 24 may have a cylindrical cross-sectional shape and a shape whose diameter changes depending on the position.
- it is preferable that the emission tube 24 also has a shape in which a purge gas described later flows stably.
- a purge gas supply pipe 32 is connected between the end of the emission pipe 24 where the window 28 is sealed and the end connected to the main pipe 20.
- the purge gas supply pipe 32 guides the purge gas supplied from the purge gas supply means 16 to the emission pipe 24.
- the purge gas supply pipe 32 also has a shape in which the outlet port faces the window 28 side. Note that a part of the flow direction detecting means 18 described later is disposed in the emission tube 24.
- the measuring unit 14 includes a light emitting unit 40, an optical fiber 42, a light receiving unit 44, a light source driver 46, a calculating unit 48, and a control unit 50.
- the light emitting unit 40 is a light emitting element that emits laser light having a predetermined wavelength.
- the optical fiber 42 guides the laser light output from the light emitting unit 40 and causes the laser light to enter the measurement cell 12 through the window 26.
- the light receiving unit 44 is a light receiving unit that receives the laser beam that has passed through the main tube 20 of the measurement cell 12 and that has been output from the window 28 of the emission tube 24.
- the light receiving unit 44 includes, for example, a photodetector such as a photodiode (PD), receives the laser beam by the photodetector, and detects the intensity of the light.
- the light receiving unit 44 sends the intensity (light quantity) of the received laser light as a light reception signal to the calculation unit 48.
- the light source driver 46 has a function of controlling the driving of the light emitting unit 40, and adjusts the wavelength and intensity of the laser light output from the light emitting unit 40 by adjusting the current and voltage supplied to the light emitting unit 40.
- the light source driver 46 is controlled by the control unit 50.
- the calculation unit 48 calculates the flow rate of the exhaust gas flowing through the measurement cell 12 based on the intensity signal (light reception signal) of the laser beam received by the light receiving unit 44. The calculation method will be described later.
- the control unit 50 has a control function for controlling the operation of each unit, and controls the operation of each unit as necessary. Note that the control unit 50 controls not only the control of the measuring means 14 but also the overall operation of the flow rate measuring device 10. That is, the control unit 50 is a control unit that controls the operation of the flow measurement device 10.
- the purge gas supply means 16 has a pipe 51, a pump 52, a dryer 54, and a flow meter 56, and supplies a predetermined flow rate of air to the purge gas supply pipes 30 and 32 of the measurement cell 12.
- air is supplied, but nitrogen or the like may be supplied as a purge gas using a cylinder or the like.
- the pipe 51 is connected to the purge gas supply pipes 30 and 32. Further, a pump 52, a dryer 54, and a flow meter 56 are disposed in the pipe 51 in order from the side farthest from the purge gas supply pipes 30 and 32 (upstream of the air flow).
- the pump 52 supplies air to the purge gas supply pipes 30 and 32 by supplying air to the pipe 51.
- the operation of the pump 52 is controlled by the control unit 50.
- the dryer 54 is a drying mechanism that dries the air flowing through the pipe 51.
- the drier 54 only needs to be able to reduce moisture contained in the air, and various moisture absorption mechanisms and moisture absorption materials can be used.
- the operation of the dryer 54 is controlled by the control unit 50.
- the flow meter 56 measures the amount of air flowing through the pipe 51, that is, the flow rate.
- the flow meter 56 sends information on the measured flow rate to the control unit 50.
- the air sent from the pump 52 basically passes through the pipe 51, the flow rate is stable. Therefore, various commonly used flow meters can be used.
- the purge gas supply means 16 controls the amount of air flowing through the pipe 51 by the control unit 50 controlling the flow rate of the purge gas based on the measurement result of the flow meter 56.
- the purge gas supply means 16 changes the amount and flow rate of air supplied from the purge gas supply tube 30 to the incident tube 22 and the amount and flow rate of air supplied from the purge gas supply tube 32 to the emission tube 24 by a predetermined amount and speed. It can be.
- the possibility of moisture adhering to the flow meter 56 can be reduced by drying the air with the dryer 54.
- the flow rate measuring device 10 is configured as described above.
- FIG. 3 is a schematic diagram showing a schematic configuration of the flow direction detecting means shown in FIG.
- the flow direction detection means 18 is detection means for detecting the flow direction of the exhaust gas A in the main pipe 20, and as shown in FIG. 3, a detection element 62, a detection element 64, and a differential pressure detector (differential pressure converter). 66.
- the detection element 62 is one of the directions parallel to the axial direction of the main pipe 20 (the direction parallel to the flow direction of the exhaust gas A) (in this embodiment, the direction from the outlet of the pipe 8 toward the exhaust gas generator, This is a Pitot tube for detecting the pressure of exhaust gas A in the basic flow direction (from downstream to upstream).
- the detection element 62 is U-shaped, and has one end portion exposed to the inside of the main pipe 20 and opening toward the outlet of the pipe 8.
- the detection element 64 is in the other direction (in this embodiment, from the exhaust gas generator toward the outlet of the pipe 8, in the basic flow direction, from upstream to downstream in the direction parallel to the axial direction of the main pipe 20.
- This is a Pitot tube for detecting the pressure of the exhaust gas A in the direction toward the head.
- the detection element 64 is U-shaped, and one end is exposed inside the main pipe 20 and opens toward the exhaust gas generator.
- the detection element 62 and the detection element 64 are arranged at the connection portion between the main pipe 20 and the emission pipe 24, respectively. Further, in the basic flow direction of the exhaust gas A, the detection element 62 is disposed downstream of the detection element 64, that is, on the outlet side of the pipe 8. Thus, the detection element 62 and the detection element 64 are disposed symmetrically with respect to a plane orthogonal to the flow direction of the exhaust gas A as a target plane.
- a Pitot tube is used as the detection elements 62 and 64.
- the detection element 62 and 64 is not limited to the Pitot tube as long as the pressure in the predetermined direction of the exhaust gas can be detected.
- the differential pressure detector 66 is a detector that receives a detection value detected by the detection element 62 and a detection value detected by the detection element 64, converts the detection value into a pressure value, and calculates a pressure difference.
- the differential pressure detector 66 further detects the flow direction of the exhaust gas A based on the detected pressure value.
- the flow direction detecting means 18 detects the pressure of the exhaust gas A from the outlet of the pipe 8 toward the exhaust gas generator with the detection element 62, and the pressure of the exhaust gas A toward the outlet of the pipe 8 from the exhaust gas generator. Is detected by the detection element 64.
- the differential pressure detector 66 calculates a pressure difference from the detected value (detected pressure), and calculates which of the pressure detected by the detection element 62 and the pressure detected by the detection element 64 is greater. Based on the detection result, the differential pressure detector 66 detects the flow direction of the exhaust gas detected by the detection element that has detected a larger pressure as the flow direction of the exhaust gas A. That is, when the pressure detected by the detection element 62 is large, the flow direction detection means 18 detects that the exhaust gas is flowing from the downstream to the upstream and from the outlet of the pipe 8 toward the exhaust gas generator, and the detection element 64 When the detected pressure is large, it is detected that the exhaust gas A flows from the upstream to the downstream and from the exhaust gas A generator toward the outlet of the pipe 8. The differential pressure detector 66 sends information on the detected flow direction of the exhaust gas A to the control unit 50. A part of the calculation performed by the differential pressure detector 66 may be performed by the control unit 50.
- the flow rate measuring apparatus 10 supplies the purge gas G from the purge gas supply pipe 30 to the incident pipe 22 and the purge gas G from the purge gas supply pipe 32 to the emission pipe 24 by the purge gas supply means 16. Thereby, it is possible to suppress the exhaust gas A from entering the entrance tube 22 and the exit tube 24, and to prevent the fine particles contained in the exhaust gas A from adhering to the windows 26 and 28.
- the purge gas G supplied by the purge gas supply means 16 and the exhaust gas A flowing through the main pipe 20 have different air properties, specifically, gas temperatures. Therefore, as shown in FIG. 2, a temperature boundary layer 80 is formed in a region where the purge gas G supplied from the purge gas supply means 16 and reaches the main pipe 20 through the incident pipe 22 and the exhaust gas A flowing through the main pipe 20 are mixed. The present inventors have found that this is done. Further, the temperature of the purge gas G and the exhaust gas A are different from each other with the temperature boundary layer 80 as a boundary, so that the refractive index becomes different.
- FIG. 4 is an explanatory diagram for explaining the path of the laser beam.
- the temperature boundary layer 80 when it can be assumed that the temperature boundary layer 80 is inclined by ⁇ 1 with respect to the traveling direction of the laser light L, the temperature boundary layer 80 can be passed through the temperature boundary layer 80.
- the angle formed is the laser light L with ⁇ 2.
- the traveling direction of the light changes by the difference between ⁇ 1 and ⁇ 2, and the arrival position changes.
- this temperature boundary layer 80 is unstable. Therefore, the angle of the layer that can be regarded as the temperature boundary layer 80 changes with time, and the arrival position of the laser beam L also changes with time.
- the arrival position changes in this way, the position at which the light receiving unit 44 receives the laser light L changes. In other words, the measurement condition changes.
- This change in the arrival position of the laser beam L appears as noise (signal fluctuation) in the result of demodulating the light reception signal of the light receiving unit 44.
- the fluctuation of the signal becomes noise when other physical property values are measured, but in the present invention, the fluctuation of the signal becomes a value to be measured for obtaining the flow rate. In the description of the present embodiment, signal fluctuation is referred to as noise for convenience.
- the flow rate measuring device 10 calculates the flow rate based on the relationship.
- the flow rate measuring method by the flow rate measuring device 10 will be described in detail with reference to FIGS. 5 and 6.
- the flow rate of the exhaust gas was changed to various values, and for each exhaust gas flow rate, the received light signal was demodulated at various frequencies, and the relationship between the demodulated frequency and the demodulated noise was measured. Further, in this measurement, when the flow rate of exhaust gas is 0 (that is, when exhaust gas is not flowed), when it is 61 m 3 / h, when it is 116 m 3 / h, when it is 160 m 3 / h, it is 199 m 3 / H, the relationship between demodulated frequency and noise was measured for the case of 258 m 3 / h.
- FIG. 5 is a graph showing the relationship between frequency and noise.
- the vertical axis represents noise (dB)
- the horizontal axis represents frequency (kHz).
- the frequency is a frequency obtained by demodulating the received light signal detected by the light receiving unit 44.
- the magnitude of the generated noise varies with the flow rate of the exhaust gas.
- the noise increases as the flow rate of the exhaust gas increases.
- FIG. 6 is a graph showing the relationship between the exhaust gas flow rate and noise.
- the vertical axis represents noise ( ⁇ (A) / I ( ⁇ 10 ⁇ 6 / m)), and the horizontal axis represents exhaust gas flow rate (Nm 3 / h).
- the magnitude of noise changes according to the flow rate of exhaust gas.
- the flow rate measuring device 10 calculates the flow rate from the magnitude of noise using the above relationship. Specifically, the relationship between the magnitude of noise and the flow rate of exhaust gas as shown in FIG. 6 is calculated in advance through experiments and measurements, and stored in the calculation unit 48.
- the calculation unit 48 demodulates the light reception signal transmitted from the light reception unit 44 at a frequency of 200 kHz, and detects the noise level of the demodulated result (signal). Thereafter, the flow rate of the exhaust gas is calculated based on the detected noise level and the relationship between the stored noise level and the exhaust gas flow rate.
- the flow rate measuring device 10 can calculate the flow rate of the pipe from the noise generated when demodulating the light reception signal of the light receiving unit 44 that has received the laser light L emitted from the light emitting unit 40.
- laser light is used for measurement, measurement can be performed in a short time. Specifically, by using light, the time from light emission to light reception can be made shorter than that of sound waves or the like. Also, the measurement time and calculation time necessary for calculating noise can be shortened. Thereby, responsiveness can be made high. Also, the flow rate can be calculated continuously.
- the received light signal is demodulated at 200 kHz as an example.
- the present invention is not limited to this, and an arbitrary frequency can be used as a frequency to be demodulated.
- various configurations can be used as a method for the calculation unit to demodulate the received light signal.
- a received light signal can be demodulated with a predetermined frequency component by extracting a target frequency component using a bandpass filter that passes only a specific frequency component.
- a band pass filter when a band pass filter is used, the apparatus configuration can be simplified and the apparatus can be made inexpensive. In addition, it is possible to reduce the calculation performed for the flow rate calculation.
- Decoding can also be performed by using an FFT (Fast Fourier Transform) arithmetic device or a spectrum analyzer.
- FFT Fast Fourier Transform
- the received light signal can be demodulated over a certain frequency region.
- the flow rate is calculated based on the noise of the received light signal demodulated at one frequency (200 kHz) (that is, one frequency component as a result of demodulating the received light signal). It is not limited to.
- the flow rate measuring device may calculate the flow rate based on the noise of the light reception signal demodulated at two different frequencies (that is, two frequency components resulting from demodulation of the light reception signal).
- the flow rate is calculated based on the noise of the received light signal demodulated at two different frequencies with reference to FIG.
- the relationship between the noise when demodulating the received light signal at 200 kHz and the flow rate of the exhaust gas, and the relationship between the noise when demodulating the received light signal at 20 kHz and the flow rate of the exhaust gas are used.
- FIG. 7 is a graph showing the relationship between the exhaust gas flow rate (exhaust gas flow rate) and noise.
- FIG. 7 shows noise ( ⁇ (A) / I ( ⁇ 10 ⁇ 6 / m)) when the vertical axis is decoded at 200 kHz, and noise (10 kHz ⁇ (A) / I ( ⁇ 10) when decoded at 20 kHz. ⁇ 6 / m)), and the horizontal axis is the exhaust gas flow rate (Nm 3 / h). Note that the relationship between the noise and the flow rate of the exhaust gas shown in FIG. 7 can also be calculated based on the measurement result shown in FIG.
- the flow measuring device 10 calculates the relationship between the magnitude of noise and the flow rate of exhaust gas as shown in FIG.
- the calculating unit 48 demodulates the received light signal transmitted from the light receiving unit 44 at a frequency of 200 kHz and a frequency of 20 kHz, and detects the magnitude of noise in the demodulated result (signal) for each frequency. Thereafter, the flow rate of the exhaust gas is calculated based on the detected two noise levels and the relationship between the stored noise level and the exhaust gas flow rate. In this way, the flow rate of exhaust gas can be measured using two frequency components.
- the flow rate at which the magnitude of noise changes greatly depends on the frequency to be demodulated. Specifically, when demodulated at a frequency of 200 kHz, the magnitude of noise does not change when the flow rate of exhaust gas is 40 Nm 3 / h or less, but the flow rate ranges from 50 Nm 3 / h to 90 Nm 3 / h. Then, the noise changes greatly. Also, if the demodulated at frequency 20 kHz, the flow rate of the exhaust gas, the following flow rate 60 Nm 3 / h, although the magnitude of noise varies greatly, ranging from the flow 60 Nm 3 / h of 100 Nm 3 / h, the noise magnitude There is almost no change.
- the range of the flow rate that is easy to detect differs depending on the frequency. Accordingly, the flow rate can be calculated with higher accuracy by demodulating at a plurality of frequencies and calculating the flow rate using the detection result.
- the flow rate measuring device 10 may switch the demodulation frequency for calculating the calculation result according to the flow rate of the exhaust gas.
- the priority is determined according to the magnitude of the flow rate,
- the measurement result with the highest priority is the exhaust gas flow rate.
- the calculated flow rate is 60 Nm 3 / h or less
- the flow rate calculated from the noise demodulated at 20 kHz is used
- the calculated flow rate is greater than 60 Nm 3 / h
- the calculated flow rate is 200 kHz.
- the flow rate calculated from the noise resulting from the demodulation is used.
- the average value may be the calculated value.
- the flow rate measuring device 10 can detect the flow direction of the exhaust gas A by the flow direction detection means 18. Thereby, even when the exhaust gas A pulsates, it is possible to accurately grasp in which direction the exhaust gas A is moving. Thereby, the flow measuring device 10 can calculate the flow direction of the exhaust gas A in addition to the flow rate of the exhaust gas A, and can more accurately determine the flow of the exhaust gas A in the main pipe 20.
- a part of the detection element 62 and a part of the detection element 64 are arranged in the tube of the emission tube 24, but the present invention is not limited to this.
- the detection element 62 and the detection element 64 are preferably arranged at positions different from the incident tube 22 and the emission tube 24 in the circumferential direction. As described above, by arranging the detection elements 62 and 64 at positions different from the incident tube 22 and the emission tube 24, the influence of the detection elements 62 and 64 on the measurement by the measurement unit 14 can be reduced.
- the detection elements 62 and 64 are preferably located at the same positions as the incident tube 22 and the output tube 24 in the axial direction of the main tube 20. Thereby, the measurement position of the flow direction detection means 18 can be made the same position as the measurement position of the measurement means 14.
- two band pass filters may be provided.
- the frequency to demodulate is not limited to two, and the number is not limited.
- the flow rate of the exhaust gas may be calculated based on the correlation of the measurement results. That is, in the case of demodulating at each frequency, the relationship between noise and flow rate is calculated in advance, and the flow rate of exhaust gas is calculated by relatively comparing a plurality of calculation results. Thus, by increasing the frequency to be demodulated, the exhaust gas flow rate can be calculated with higher accuracy.
- a bandpass filter may be provided for each frequency to be decoded. However, by analyzing the received light wavelength in a certain wavelength range using the above-described FFT converter or spectrum analyzer.
- the frequency to be demodulated can be switched (adjusted)
- the flow volume for determination may use the flow volume immediately before, and may use the flow volume calculated by rough calculation.
- the flow rate measuring device 10 further calculates the flow rate of the exhaust gas A based on the flow rate of the purge gas G flowing through the incident tube 22. Specifically, the relationship between the magnitude of the noise and the flow rate of the exhaust gas A is measured for each flow rate of the purge gas G, the measured relationship is stored, the flow rate of the purge gas G flowing through the incident tube 22 is measured, It is preferable to select the relationship between the magnitude of noise to be used and the flow rate of exhaust gas based on the measurement result.
- FIG. 8 is a graph showing the relationship between frequency and noise.
- the vertical axis represents noise (dB) and the horizontal axis represents frequency (kHz).
- the frequency is a frequency obtained by demodulating the light reception signal detected by the light receiving unit 44.
- FIG. 8 shows the results of measuring the relationship between frequency and noise when the purge flow rate is 1 l / min, 5 l / min, and 10 l / min. The measurement was performed under the same conditions except for the purge flow rate.
- the relationship between frequency and noise also changes. That is, even when demodulated at the same frequency, the magnitude of noise changes as the purge flow rate changes.
- the flow rate of the exhaust gas A can be measured with high accuracy. That is, it is possible to suppress an error in the measurement result of the flow rate of the exhaust gas A due to the change in the purge flow rate.
- measurement can be performed with high accuracy according to the flow rate of the purge gas G without switching the relationship between the amount of noise to be used and the flow rate of the exhaust gas A.
- the relationship between the magnitude of noise to be used and the flow rate of exhaust gas is selected according to the purge flow rate, but the present invention is not limited to this.
- the purge flow rate may be adjusted so that the detected noise falls within a predetermined range.
- the purge flow rate may be positively adjusted so that the noise is in a range in which measurement is easy. For example, when the exhaust gas flow rate is low (low flow rate), the measurement sensitivity can be increased by increasing the purge flow rate. Further, when the exhaust gas flow rate is high (high flow rate), the measurement sensitivity can be increased by reducing the purge flow rate.
- the flow direction detecting means 18 for detecting the pressure of the exhaust gas in the flow direction of the exhaust gas and calculating the flow direction of the exhaust gas based on the pressure difference is used, but the present invention is limited to this. Not. Hereinafter, another example of the flow direction detecting means will be described with reference to FIGS. 9A, 9B, and 10 to 13.
- FIG. 9A is a schematic diagram illustrating a schematic configuration of another example of the flow direction detection unit
- FIG. 9B is a schematic diagram of the flow direction detection unit viewed from the Z direction in FIG. 9A.
- the flow direction detection means 150 shown in FIG. 9A includes a thin film ring 152, four strain gauges 154, and a strain gauge amplifier 156.
- the thin film ring 152 is an annular ring having a larger outer diameter than the inner diameter of the main tube 20, that is, a ring-shaped member, and one surface is connected to the inner surfaces of the incident tube 22 and the emission tube 24 and the main tube 20.
- a part of the inner diameter side of the thin film ring 152 is smaller than the inner diameter of the main pipe 20, and a part is exposed to the inner diameter side of the main pipe 20.
- the thin film ring 152 is a thin plate-like member, and is deformed (flexed) when the exhaust gas flows through the main pipe 20.
- the strain gauge (strain gauge) 154 is disposed on the surface of the thin film ring 152, and detects deformation of the thin film ring 152 by being deformed together with the thin film ring 152.
- the strain gauge 154 detects deformation by a change in electric resistance.
- the strain gauges 154 are provided at four locations, but the number and arrangement positions of the strain gauges 154 are not particularly limited.
- the strain gauge 154 sends the detected deformation to the strain gauge amplifier 156 as an electrical signal.
- the strain gauge amplifier 156 amplifies the electric signal sent from the strain gauge 154 and detects it as a detection value. Further, the strain gauge amplifier 156 detects the deformation direction of the thin film ring 152 from the detection value of the strain gauge 154. That is, the strain gauge amplifier 156 detects whether the thin film ring 152 is deformed in a direction from the outlet of the pipe 8 toward the exhaust gas generator or in a direction from the exhaust gas generator to the outlet of the pipe 8. When the strain gauge amplifier 156 detects the deformation direction of the strain gauge 154 and the thin film ring 152, the strain gauge amplifier 156 detects the flow direction of the exhaust gas based on the directions.
- the strain gauge amplifier 156 when the thin film ring 152 is deformed in the direction from the outlet of the pipe 8 to the exhaust gas generator, the exhaust gas goes from the outlet of the pipe 8 to the exhaust gas generator. If the thin film ring 152 is deformed in the direction from the exhaust gas generator toward the outlet of the pipe 8, the exhaust gas flows in the direction from the exhaust gas generator toward the outlet of the pipe 8. Detects that
- the flow direction detecting means 150 is configured by combining the member (thin film ring 152) that deforms into the region where the exhaust gas flows through the main pipe 20 and the strain gauge 154 that detects the deformation and deformation direction of the deforming member. By doing so, the flow direction of the exhaust gas can be detected. Thus, by detecting the flow direction of the exhaust gas, the flow and flow rate of the exhaust gas in the main pipe 20 can be calculated more appropriately.
- the thin film ring 152 is provided on the entire circumference in the circumferential direction, but the present invention is not limited to this.
- the regions corresponding to the entrance tube 22 and the exit tube 24 may be notched.
- the member that deforms when the exhaust gas flows is not limited to a ring shape like the thin film ring 152.
- the member that deforms when the exhaust gas flows may have a shape that protrudes from the main pipe 20 only at the measurement position where the strain gauge 154 is disposed. As described above, by reducing the portion protruding into the main pipe 20, the influence of the flow direction detecting means 150 on the flow of the exhaust gas can be further reduced.
- FIG. 10 is a schematic diagram showing a schematic configuration of another example of the flow direction detecting means.
- the flow direction detecting means 160 shown in FIG. 10 includes two light emitting portions 162a and 162b arranged in the incident tube 22a, two light receiving portions 164a and 164b arranged in the emitting tube 24a, and two flow meters 166a and 166b. And a phase determination unit 168.
- the light emitting part 162a is disposed closer to the exhaust gas generator than the light emitting part 162b in the exhaust gas flow direction.
- the light receiving unit 164a is also disposed closer to the exhaust gas generation device than the light receiving unit 164b in the flow direction of the exhaust gas. That is, the light emitting unit 162a and the light receiving unit 164a are disposed closer to the exhaust gas generator than the light emitting unit 162b and the light receiving unit 164b, and the light emitting unit 162b and the light receiving unit 164b are connected to the pipe 8 from the light emitting unit 162a and the light receiving unit 164a.
- Located on the exit side. The light emitted from the light emitting unit 162a passes through the main tube 20 and enters the light receiving unit 164a.
- the light emitted from the light emitting unit 162b passes through the main tube 20 and enters the light receiving unit 164b.
- the flow meter 166a measures the flow rate of the exhaust gas flowing through the main pipe 20 based on the relationship between the light emitted from the light emitting unit 162a and the light received by the light receiving unit 164a.
- the flow meter 166b measures the flow rate of the exhaust gas flowing through the main pipe 20 based on the relationship between the light emitted from the light emitting unit 162b and the light received by the light receiving unit 164b.
- the light emitting unit 162a, the light receiving unit 164a, and the flow meter 166a are one measuring unit
- the light emitting unit 162b, the light receiving unit 164b, and the flow meter 166b are also one measuring unit. That is, the flow direction detecting means 160 includes two measuring means, and each measuring means measures the gas flow rate.
- the phase determination unit 168 determines the flow direction of the exhaust gas based on the change in the flow rate calculated by the flow meter 166a and the change in the flow rate calculated by the flow meter 166b.
- the light emitting unit 162a, the light receiving unit 164a, and the flow meter 166a, and the light emitting unit 162b, the light receiving unit 164b, and the flow meter 166b have different positions at which the exhaust gas flow rate is measured in the exhaust gas flow direction. It becomes. Therefore, when the flow rate changes, a certain time delay occurs. That is, a phase difference occurs in the flow rate to be measured.
- the phase discriminating unit 168 calculates the flow direction of the exhaust gas from the phase difference between the flow rates.
- the long pattern direction of the exhaust gas is detected based on the time delay of the measured value. Can do. Further, since the flow direction of the exhaust gas can be detected from the flow rate of the exhaust gas, it is possible to detect the flow direction of the exhaust gas only by providing a calculation function and without adding another configuration.
- the exhaust gas flow rate measuring means can also measure the concentration of a specific substance contained in the exhaust gas as described above.
- FIG. 11 is a schematic diagram showing a schematic configuration of another example of the flow direction detecting means.
- the flow direction detecting means 170 shown in FIG. 11 includes a light emitting unit 172a disposed in the incident tube 171a, a light emitting unit 172b disposed in the incident tube 171b, a light receiving unit 174a disposed in the exit tube 173a, and an exit tube 173b.
- the incident tube 171a and the emission tube 173a are each cylindrical and are arranged at positions where the cylindrical axes overlap. Thereby, the light emitted from the light emitting unit 172a arranged in the incident tube 171a passes through the main tube 20 and enters the light receiving unit 174a arranged in the emitting tube 173a.
- both the incident tube 171b and the emission tube 173b have a cylindrical shape, and are arranged at positions where the cylindrical axes overlap. Thereby, the light emitted from the light emitting unit 172b arranged in the incident tube 171b passes through the main tube 20 and enters the light receiving unit 174b arranged in the emission tube 173b.
- the incident tube 171a, the light emitting unit 172a, the emission tube 173a, and the light receiving unit 174a are arranged on the exhaust gas generator side of the incident tube 171b, the light emitting unit 172b, the emission tube 173b, and the light receiving unit 174b.
- the flow direction of the exhaust gas can be calculated by the same method as the flow direction detecting means 160.
- the means for measuring the flow rate (measurement light traveling direction) is arranged in a direction orthogonal to the flow direction of the exhaust gas, but it may be inclined at a predetermined angle.
- FIG. 12 is a schematic diagram showing a schematic configuration of another example of the flow direction detecting means.
- the flow direction detecting means 180 shown in FIG. 12 includes a light emitting unit 182a arranged in the incident tube 181a, a light emitting unit 182b arranged in the incident tube 181b, a light receiving unit 184a arranged in the emission tube 183a, and an emission tube 183b.
- the incident tube 181a and the emission tube 183a are each cylindrical and are arranged at positions where the cylindrical axes overlap. Thereby, the light emitted from the light emitting unit 182a arranged in the incident tube 181a passes through the main tube 20 and enters the light receiving unit 184a arranged in the emitting tube 183a.
- both the incident tube 181b and the emission tube 183b have a cylindrical shape, and are arranged at positions where the cylindrical axes overlap. Thereby, the light emitted from the light emitting unit 182b arranged in the incident tube 181b passes through the main tube 20 and enters the light receiving unit 184b arranged in the emitting tube 183b.
- the incident tube 181a is disposed closer to the exhaust gas generator than the incident tube 181b, and the exit tube 183a is disposed closer to the outlet side of the pipe 8 than the exit tube 183b.
- the traveling directions of the light output from the light emitting units 182a and 182b are inclined by a predetermined angle with respect to the direction orthogonal to the flow of the exhaust gas. Specifically, the light output from the light emitting unit 182a is emitted in a direction inclined toward the outlet side of the pipe 8 from the direction orthogonal to the flow of the exhaust gas.
- the light output from the light emitting unit 182b is emitted in a direction inclined toward the exhaust gas generator rather than the direction orthogonal to the flow of the exhaust gas.
- the path from the light emitting part 182a to the light receiving part 184a and the path from the light emitting part 182b to the light receiving part 184b have substantially the same length.
- the flow meter 186a measures the flow rate of the exhaust gas flowing through the main pipe 20 based on the relationship between the light emitted from the light emitting unit 182a and the light received by the light receiving unit 184a.
- the flow meter 186b measures the flow rate of the exhaust gas flowing through the main pipe 20 based on the relationship between the light emitted from the light emitting unit 182b and the light received by the light receiving unit 184b.
- the direction determination unit 188 detects the flow direction of the exhaust gas based on the flow rates detected by the flow meter 186a and the flow meter 186b, respectively. Specifically, the flow direction detector 180 increases the flow rate measured by either the flow meter 186a or the flow meter 186b depending on the flow direction of the exhaust gas. This is presumably because the formed temperature boundary layer changes due to the difference between the angles formed by the incident tubes 181a and 181b and the main tube 20. The direction determination unit 188 determines the difference between the detection values and which detection value is larger, and detects the flow direction of the exhaust gas based on the determination result.
- the flow direction of the exhaust gas can be detected more appropriately by using a configuration such as the flow direction detection means 180. It can also be determined which of the measuring means units can detect the flow rate of the exhaust gas more appropriately.
- FIG. 13 is a schematic diagram showing a schematic configuration of another example of the flow direction detecting means.
- the flow direction detection means 190 shown in FIG. 13 is a means for detecting the flow direction of exhaust gas using ultrasonic waves, and includes an incident tube 192, a transmitter 193, an output tube 194, a receiver 195, and a direction determiner. 196.
- the incident tube 192 and the exit tube 194 are each cylindrical and are arranged at positions where the cylinder axes overlap. Further, the incident tube 192 is disposed on the outlet side of the pipe 8 with respect to the emission tube 194. That is, the incident tube 192 and the exit tube 194 are inclined at a predetermined angle with respect to the direction orthogonal to the flow of exhaust gas.
- the transmission unit 193 is a transmission device that outputs ultrasonic waves, and outputs ultrasonic waves from the incident tube 192 toward the main tube 20.
- the receiving unit 195 is disposed in the emission tube 194, receives the ultrasonic wave that is output from the transmission unit 193, passes through the main tube 20 from the incident tube 192, and reaches the emission tube 194.
- the traveling direction of the ultrasonic waves is inclined at a predetermined angle with respect to the direction orthogonal to the flow of the exhaust gas. Specifically, the light output from the transmitter 193 is emitted in a direction inclined toward the exhaust gas generator rather than the direction orthogonal to the flow of the exhaust gas.
- the direction determination unit 196 detects the flow direction of the exhaust gas based on the frequency (wavelength) of the ultrasonic wave transmitted by the transmission unit 193 and the frequency (wavelength) of the ultrasonic wave received by the reception unit 195. Specifically, when the direction determination unit 196 determines that the frequency of the ultrasonic wave is larger than the reference value (the wavelength is shortened), the exhaust gas flows from the exhaust gas generator toward the outlet of the pipe 8. It is determined that If the direction determination unit 196 determines that the frequency of the ultrasonic wave is smaller than the reference value (the wavelength is longer), the direction determination unit 196 determines that the exhaust gas is flowing from the outlet of the pipe 8 toward the exhaust gas generator. To do.
- the flow direction of the exhaust gas can also be detected by using ultrasonic waves as in the flow direction detection means 190.
- the means for detecting the flow direction of the exhaust gas is not limited to the above embodiment, and various methods can be used.
- FIG. 14A is a schematic diagram showing a schematic configuration of a part of another embodiment of the flow rate measuring device, and FIG. 14B is a partially enlarged view of FIG. 14A.
- the measurement cell 90 shown in FIG. 14A has a protrusion 92 that becomes a turbulent flow generation part.
- the protrusion 92 is disposed upstream of the incident tube 22 in the exhaust gas flow direction of the main tube 20 and in the vicinity of the incident tube 22, that is, in the vicinity of the connection portion between the main tube 20 and the incident tube 22. .
- the protrusion 92 is convex on the upstream side of the exhaust gas flow, and generates turbulent flow downstream of the protrusion 92 as shown in FIG. 14B.
- Providing the protrusion 92 serving as a turbulent flow generation portion in this manner can generate turbulent flow (Kalman vortex, etc.) in the laser beam passage path, and is turbulent from the temperature boundary layer. Can do.
- turbulent flow Kalman vortex, etc.
- the flow rate can also be easily calculated.
- measurement can be performed with higher sensitivity.
- by providing a turbulent flow generation section it is possible to increase the change in the magnitude of noise (characteristics of the received light signal) with respect to the change in the flow rate of exhaust gas, thereby making it possible to measure the flow rate with higher accuracy. it can.
- the flow measuring device 10 may measure the concentration of a specific substance contained in the exhaust gas in addition to the flow rate of the exhaust gas.
- the flow measuring device 10 can measure a density
- the light emitting unit 40 is a light emitting element that emits laser light in the near infrared wavelength region absorbed by the substance to be measured.
- the light emitting unit 40 includes a light emitting element that emits laser light in the near-infrared wavelength region that absorbs nitric oxide.
- the measurement target is nitrogen dioxide
- the light emitting unit 40 includes a light emitting element that emits laser light in the near-infrared wavelength region that absorbs nitrogen dioxide.
- the measurement target is nitrous oxide
- the light emitting unit 40 includes a light emitting element that emits laser light in the near-infrared wavelength region that absorbs nitrous oxide.
- the light-emitting unit 40 may include a plurality of light-emitting elements that emit light in the wavelength ranges absorbed by the respective substances. Further, the light source driver 46 and the control unit 50 output information on the intensity of the laser beam output from the light emitting unit 40 to the calculation unit 48.
- the calculation unit 48 calculates the concentration of the substance to be measured based on the signal (light reception signal) sent from the light receiving unit 44 and the conditions for driving the light source driver 46 by the control unit 50. Specifically, the calculation unit 48 calculates the intensity of the laser light output from the light emitting unit 40 based on the condition that the light source driver 46 is driven by the control unit 50, and receives the light received from the light receiving unit 44. Based on the signal, the intensity of the received laser beam is calculated. The calculation unit 48 compares the intensity of the emitted laser light with the intensity of the received laser light, and calculates the concentration of the substance to be measured contained in the exhaust gas A.
- the near-infrared wavelength laser beam L output from the light emitting unit 40 is a predetermined path from the optical fiber 42 to the measurement cell 12, specifically, the window 26, the incident tube 22, the main tube 20, and the emission. After passing through the tube 24 and the window 28, the light reaches the light receiving unit 44. At this time, if the substance to be measured is contained in the exhaust gas A in the measurement cell 12, the laser light passing through the measurement cell 12 is absorbed. For this reason, the output of the laser light L reaching the light receiving unit 44 varies depending on the concentration of the substance to be measured in the exhaust gas A. The light receiving unit 44 converts the received laser light into a light reception signal and outputs it to the calculation unit 48.
- the control unit 50 and the light source driver 46 output the intensity of the laser light L output from the light emitting unit 40 to the calculation unit 48.
- the calculation unit 48 compares the intensity of the light output from the light emitting unit 40 with the intensity calculated from the received light signal, and calculates the concentration of the measurement object of the exhaust gas A flowing through the measurement cell 12 from the decrease rate.
- the measuring means 14 uses the so-called TDLAS method (Tunable Diode Laser Absorption Spectroscopy), and based on the intensity of the output laser light and the received light signal detected by the light receiving unit 44. It is possible to calculate and / or measure the concentration of the measurement target substance in the exhaust gas A passing through a predetermined position in the main pipe 20, that is, the measurement position. Moreover, the measurement means 14 can calculate and / or measure the concentration of the measurement target substance continuously.
- the flow measuring device 10 adjusts a device, specifically, adjusts the wavelength of the laser beam to output, and various substances Concentration can be measured.
- the measurement object include nitrogen oxides, sulfide oxides, carbon monoxide, carbon dioxide, ammonia and the like.
- the flow rate measuring device 10 can measure the flow rate of the exhaust gas and the concentration of the specific substance in the exhaust gas basically without increasing the device configuration.
- the concentration is measured by the TDLAS method.
- the present invention is not limited to this, and the laser beam that has passed through the main tube Various methods for measuring the concentration by receiving the light can be used.
- FIG. 15A is a schematic diagram illustrating a schematic configuration of a light receiving unit of another embodiment of the flow rate measuring device.
- 15B and 15C are explanatory diagrams for explaining the operation of the flow rate measuring device shown in FIG. 15A.
- 15A has the same configuration as that of the above-described flow rate measuring device 10 except for the shape of the light receiving unit.
- the light receiving unit 100 shown in FIG. 15A has four light receiving elements 102, 104, 106, and 108.
- each of the light receiving elements 102, 104, 106, and 108 is a photodetector such as a photodiode (PD), and sends the intensity (light quantity) of the received laser beam to the calculation unit 48 as a light reception signal.
- the four light receiving elements 102, 104, 106, and 108 have the same shape and are arranged adjacent to each other. Specifically, the light receiving element 102 has one side in contact with the light receiving element 104 and the other side in contact with the one side is in contact with the light receiving element 106.
- the light receiving element 104 has one side in contact with the light receiving element 102 and the other side in contact with the one side in contact with the light receiving element 108.
- the light receiving element 106 has one side in contact with the light receiving element 102 and the other side in contact with the one side in contact with the light receiving element 108.
- the light receiving element 108 has one side in contact with the light receiving element 106 and the other side in contact with the one side in contact with the light receiving element 104. That is, in the light receiving unit 100, assuming that the center is the origin and the boundary side of each element is the xy plane having the x axis and the y axis, the light receiving element 102 is arranged in the first quadrant and the light receiving element 106 is arranged in the second quadrant.
- the light receiving element 108 is arranged in the third quadrant, and the light receiving element 104 is arranged in the fourth quadrant.
- the light receiving unit 100 reaches the origin portion described above and the four light receiving elements 102, 104, and 106 as shown in FIG. 15B. , 108 reach the light evenly.
- the arrival position of the laser beam 110 moves to the light receiving element 104 side. Will not receive light.
- the light receiving unit 100 when the arrival position of the laser beam 110 is shifted, the light received by each light receiving element is increased or decreased, and the light reception signal is changed. Although the amount of light received by each light receiving element varies, the total amount of laser light 110 that has reached can be calculated by summing the intensities of the light received by the four light receiving elements 102, 104, 106, and 108. .
- the flow measuring device having the light receiving unit 100 can calculate the flow rate of the exhaust gas from the noise of the light receiving signal received by one light receiving element. Further, the exhaust gas concentration to be measured can be measured from the total amount of received light signals received by the four light receiving elements. As a result, even when the arrival position of the laser beam changes, all of the light that has arrived can be received and the concentration of the measurement object can be measured from the received intensity, so that the concentration of the measurement object can be measured with higher accuracy. .
- the flow rate is calculated by the above-described method based on the noise of the light reception signal detected by one light receiving element, but the present invention is not limited to this.
- the flow rate may be calculated by comparing the amount of light received by each light receiving element. That is, relative changes of the four light receiving elements 102, 104, 106, and 108 may be calculated as noise.
- the fluctuation, fluctuation, and movement amount of the laser light may be calculated from the increase / decrease in the received light amount, and the flow rate may be calculated from the result.
- the calculation unit 48 stores these relationships calculated in advance through experiments or the like, and stores the calculated results (the ratio of received light amount of each light receiving element, the frequency of change, etc.) and the stored relationship. From this, the flow rate is calculated.
- the calculation unit 48 calculates the arrival position of the laser beam 110 from the relative relationship between the four light receiving elements 102, 104, 106, and 108, and calculates the exhaust gas flow rate from the distance between the arrival position and the origin. It may be. That is, as described above, the maximum moving distance (displacement from the origin) of the laser light can be calculated from the relative relationship between the purge flow rate and the exhaust gas flow rate. Thereby, the flow rate of exhaust gas can also be calculated by calculating the moving distance of the laser beam.
- FIG. 16 is a schematic diagram illustrating a schematic configuration of another example of the light receiving unit.
- the light receiving elements 132 are arranged in a matrix. Specifically, 64 light receiving elements 132 are arranged in a matrix of 8 vertically and 8 horizontally. Each of the 64 light receiving elements 132 of the light receiving unit 130 sends a light reception signal to the calculation unit 48.
- the arrival position of the laser beam can be calculated based on the position of the received light receiving elements. For example, when the laser beam 140 reaches the center of 8 ⁇ 8, the four light receiving elements in the center detect the light. In this case, the center of the four light receiving elements may be the arrival position. In addition, when the laser beam moves and the arrival position of the laser beam reaches the position 142, the center of the four received light receiving elements may be set as the arrival position. Further, when the laser beam further moves and the arrival position of the laser beam reaches the position 144, the number of light receiving elements that receive the light is one. In this case, the position of the one light receiving element may be the arrival position.
- the arrival position of the laser light can be detected without detecting the balance of the amount of received light.
- the flow rate measuring device can calculate the flow rate from the information on the arrival position.
- the arrangement order of the light receiving elements is not limited to this embodiment.
- the light receiving element may be disposed in the light so as to become sparse as the distance from the center increases.
- the flow rate measuring device is not limited to the above embodiment.
- the flow measuring device uses various methods for calculating the flow rate of the exhaust gas based on the light reception signal of the light receiving unit by utilizing the change in the arrival position fluctuation of the laser beam depending on the relative relationship between the flow rate of the exhaust gas and the flow rate of the purge gas. Can be used. That is, the flow measurement device of the present invention calculates various characteristics (noise, fluctuation position, movement distance) of the arrival position fluctuation of the laser beam based on the light reception signal sent from the light receiving section, and is also necessary. Accordingly, the flow rate of the exhaust gas is calculated by taking the flow rate of the purge gas into consideration.
- the purge gas can be efficiently supplied around the windows 26 and 28. Can be reliably prevented from becoming dirty. For this reason, it is preferable to arrange the outlets of the purge gas supply pipes 30 and 32 toward the windows 26 and 28, but the present invention is not limited to this.
- the purge gas may be discharged in a direction perpendicular to the axes of the entrance tube and the exit tube.
- the incident tube and the output tube are provided on the same axis, but the present invention is not limited to this.
- an optical mirror may be provided in the measurement cell, and laser light incident from the window of the incident tube may be multiple-reflected by the optical mirror in the measurement cell before reaching the window of the emission tube.
- multiple regions of the measurement cell can be passed by multiple reflection of the laser light.
- the influence of the concentration distribution of exhaust gas flowing in the measurement cell (variation in exhaust gas flow rate and density, variation in concentration distribution in exhaust gas) can be reduced, and the concentration can be detected accurately.
- the main pipe of the measurement cell and the pipe through which the exhaust gas flows are separate members, but they may be integrated.
- the main pipe of the measurement cell may be directly connected to a device that discharges exhaust gas.
- the tube shape of the main tube of the measurement cell may be any tube as long as the laser beam can pass therethrough, and may be a tube having a circular cross section, a tube having a polygonal cross section, or a tube having an elliptical cross section.
- the cross section of the inner periphery and the outer periphery of the tube may have different shapes. Further, the shapes of the incident tube and the emitting tube are not limited as described above.
- the flow rate of the gas flowing through the pipe is measured, but the present invention is not limited to this, and the flow velocity can also be measured.
- the flow velocity can be calculated by using the relationship between the light reception signal and the flow rate described above and the relationship between the flow rate and the flow velocity. That is, since the pipe diameter is constant, the flow velocity can be calculated by dividing the calculated flow rate by the pipe diameter. Further, by calculating the relationship in advance like the relationship between the light reception signal and the flow rate, the flow velocity can be calculated from the measured value of the light reception signal. That is, the flow measurement device can be used as a flow velocity measurement device by changing the calculation method and calculation formula by the calculation unit. Further, the flow rate measuring device can have a flow velocity measuring function.
- the measurement can be performed with high responsiveness and in a severe environment. Further, when the flow rate of exhaust gas is measured in this way, the flow direction of exhaust gas can be detected together, so that the flow of exhaust gas can be detected more appropriately.
- measuring the flow velocity it is not limited to measuring the flow velocity of the gas (fluid) flowing in the pipe (flow path), and the measurement region is between the incident tube and the emission tube (passage path of the laser beam). And the flow velocity of the fluid flowing through the measurement region can be measured. That is, it is not limited to the fluid flowing through the closed flow path, and the flow velocity of the fluid flowing through the open measurement region can also be measured.
- FIG. 17 is a schematic diagram showing a schematic configuration of an embodiment of the flow velocity measuring apparatus of the present invention.
- 18A is an enlarged schematic view showing a part of the measurement cell of the flow velocity measuring device shown in FIG. 17 in an enlarged manner
- FIG. 18B is a drawing showing the measurement cell of the flow velocity measuring device shown in FIG. 17 parallel to the exhaust gas flow direction. It is the schematic diagram seen from various directions.
- the flow velocity measuring device 200 is the same as the flow measuring device 10 except for the relationship between the exhaust supply device that discharges exhaust gas and its piping, and the calculation method of the calculation unit 210. Therefore, portions of the flow velocity measuring apparatus 200 that have the same configuration as that of the flow measurement device 10 are denoted by the same reference numerals, description thereof will be omitted, and the configuration unique to the flow velocity measuring apparatus 200 will be described below. .
- the flow velocity measuring apparatus 200 includes a measurement cell 202, a measurement unit 204, and a purge gas supply unit 16, and the exhaust gas A discharged from the pipe 9 passes through a predetermined measurement region. Measure the flow rate. In the exhaust gas discharged from the pipe 9, a part of the exhaust gas A passes through the measurement region, and a part of the exhaust gas A ′ does not pass through the measurement region.
- the incident tube 22 is arranged at a position spaced apart from the pipe 9 by a certain distance on the downstream side of the end of the pipe 9 in the exhaust gas A discharge direction.
- the incident tube 22 has one end (the end from which the purge gas G is discharged) disposed inside the region surrounded by the extension line of the opening surface of the pipe 9. Yes.
- the emission pipe 24 is also arranged at a position spaced apart from the pipe 9 by a certain distance on the downstream side of the end of the pipe 9 in the discharge direction of the exhaust gas A.
- the exit pipe 24 has one end portion (the end portion from which the purge gas G is discharged) disposed inside the region surrounded by the extension line of the opening surface of the pipe 9. Yes.
- the emission tube 24 is disposed to face the incidence tube 22. Specifically, one end is disposed at a position facing one end of the incident tube 22 and at a position where the exhaust gas A flows between the incident tube 22 and the emission tube 24.
- the arrangement position of the incident tube 22 and the emission tube 24 can be fixed by an arbitrary support portion.
- the measurement cell 202 has such a configuration, and the laser light L incident on the incident tube 22 from the window 26 passes through a space (measurement region) between the incident tube 22 and the emission tube 24.
- the laser light L that has passed through the measurement region passes through the emission tube 24 and the window 28 and is received by the light receiving unit 44.
- the measuring unit 204 includes a light emitting unit 40, an optical fiber 42, a light receiving unit 44, a light source driver 46, a calculating unit 210, and a control unit 50.
- the light emission part 40, the optical fiber 42, the light-receiving part 44, the light source driver 46, and the control part 50 are the same as each part of the measurement means 14 mentioned above, description is abbreviate
- the calculation unit 210 stores the relationship between the light reception signal and the flow rate in advance, and calculates the flow rate of the exhaust gas A flowing through the measurement region based on the light reception signal sent from the light reception unit 44. The calculation will be described later.
- the flow velocity measuring device 200 supplies the purge gas G to the incident tube 22 and the emission tube 24 by the purge gas supply means 16. Further, the exhaust gas A discharged from the pipe 9 flows in the measurement region (that is, between the incident tube 22 and the emission tube 24). As a result, as shown in FIGS. 18A and 18B, a temperature boundary layer 220 formed by mixing the purge gas G and the exhaust gas A is formed at the outlet (one end portion) of the purge gas G of the incident tube 22. Thus, the formation of the temperature boundary layer 220 causes (noise) fluctuations in the light reception signal. Further, this variation varies depending on the relationship between the flow rate of the purge gas G and the flow rate of the exhaust gas A.
- the calculation unit 210 stores the relationship between the flow velocity and the fluctuation of the received light signal calculated in advance through experiments or the like, and calculates the flow velocity based on the received light signal during measurement. That is, although the calculation result is the flow rate from the flow rate, the flow rate is calculated basically in the same manner as described above.
- the flow velocity measuring device can calculate the flow velocity by supplying the purge gas to the incident tube and passing the laser beam through the measurement region and measuring the received light signal.
- the flow velocity measuring apparatus can perform measurement without providing a main pipe through which exhaust gas to be measured flows, as in this embodiment. For this reason, a measurement region can be set freely and the degree of freedom of measurement can be further increased.
- the flow velocity at each position can be measured by changing the distance between the entrance tube and the exit tube to various distances. Also. The distance from the exhaust gas discharge opening can also be various distances. Furthermore, for example, the flow velocity at an arbitrary position in the pipe can be measured.
- the flow direction detection means even when detecting the flow velocity of the fluid flowing in the area other than the piping in this way, the flow of the exhaust gas (flow in the measurement area) is detected by the flow direction detection means, so that the flow of the fluid to be measured is more appropriately detected. Can be detected.
- the various methods mentioned above can be used as a flow direction detection means.
- a flow velocity measuring device it is also possible to store more than one relationship between the received light signal and the flow velocity based on various other conditions, and to calculate more accurately by switching the relationship to be used based on the various conditions. it can.
- the measurement target is a gaseous gas.
- the flow rate and the flow velocity can be measured in the same manner. That is, it can be measured regardless of gas or liquid as long as it is a fluid.
- the flow rate measuring device and the flow velocity measuring device according to the present invention are useful for measuring the flow rate or flow velocity of a fluid.
- Flow measuring device 12 Measuring cell 14 Measuring means 16 Purge gas supplying means 18 Flow direction detecting means 20 Main pipe 22 Incident pipe 24 Emission pipe 26, 28 Window 30, 32 Purge gas supply pipe 40 Light emitting part 42 Optical fiber 44 Light receiving part 46 Light Source Driver 48 Calculation Unit 50 Control Unit 52 Pump 54 Dryer 56 Flowmeter 62, 64 Detection Element 66 Differential Pressure Detector 200 Flow Rate Measurement Device
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Abstract
Description
10 流量測定装置
12 計測セル
14 計測手段
16 パージガス供給手段
18 流れ方向検出手段
20 主管
22 入射管
24 出射管
26、28 窓
30、32 パージガス供給管
40 発光部
42 光ファイバ
44 受光部
46 光源ドライバ
48 算出部
50 制御部
52 ポンプ
54 ドライヤ
56 流量計
62、64 検出素子
66 差圧検出器
200 流速測定装置
Claims (24)
- 両端が開放され、それぞれ流体を流す流路と連結可能な主管、前記主管に連結し、前記主管と連結している側と反対側の端部に光が通過可能な窓部が形成された入射管、前記主管に連結し、前記主管と連結している側と反対側の端部に光が通過可能な窓部が形成された出射管及び前記入射管と連結された第1パージ流体供給管で構成された計測セルと、
前記計測セルの前記第1パージ流体供給管にパージ流体を供給するパージ流体供給部と、
前記入射管にレーザ光を入射させる発光部と、
前記入射管から入射され、前記計測セルを通過し、前記出射管から出射された前記レーザ光を受光し、受光した光量を受光信号として出力する受光部と、
前記受光部から出力される受光信号に基づいて、前記計測セルを流れる流体の流量を算出する算出部と、
前記計測セルを流れる流体の流れ方向を検出する流れ方向検出部と、
各部の動作を制御する制御部と、を有することを特徴とする流量測定装置。 - 前記流れ方向検出部は、流れ方向に平行な両方向からの圧力差を検出する差圧検出部を有し、前記差圧検出部で検出された圧力差に基づいて、流れ方向を検出することを特徴とする請求項1に記載の流量測定装置。
- 前記流れ方向検出部は、前記流路に露出し、流体の流れにより変形する変形部を有し、前記変形部の変形方向に基づいて、流れ方向を検出することを特徴とする請求項1に記載の流量測定装置。
- 前記発光部と、前記受光部と、前記算出部とで構成される測定ユニットを少なくとも2つ有し、
前記流れ方向検出部は、前記測定ユニットで算出される流量の算出値に基づいて、流れ方向を検出することを特徴とする請求項1に記載の流量測定装置。 - 前記流れ方向検出部は、前記流路に超音波を出力する超音波出力部と、前記超音波出力部から出力された超音波を受信する超音波受信部とを有し、
前記超音波受信部で受信した超音波の周波数に基づいて、流れ方向を検出することを特徴とする請求項1に記載の流量測定装置。 - 前記算出部は、前記受光部で受光した受光信号を1つの周波数で復調し、復調した信号の変動の大きさに基づいて、前記流体の流量を算出することを特徴とする請求項1から5のいずれか1項に記載の流量測定装置。
- 前記算出部は、前記受光部で受光した受光信号を異なる2つの周波数でそれぞれ復調し、復調した2つの周波数における信号の変動の大きさに基づいて、前記流体の流量を算出することを特徴とする請求項1から5のいずれか1項に記載の流量測定装置。
- 前記算出部は、前記受光部で受光した受光信号を複数の異なる周波数でそれぞれ復調し、復調した複数の周波数における信号の変動の大きさに基づいて、前記流体の流量を算出することを特徴とする請求項1から5のいずれか1項に記載の流量測定装置。
- 前記算出部は、予め算出した変動と流量との関係を記憶しており、前記関係と前記変動の大きさとに基づいて前記流体の流量を算出することを特徴とする請求項6から8のいずれか1項に記載の流量測定装置。
- 前記算出部は、前記入射管を流れるパージ流体の流量毎に、前記変動と前記流体の流量との関係を記憶しており、
前記入射管を流れるパージ流体の流量と前記変動に基づいて前記流体の流量を算出することを特徴とする請求項6から8のいずれか1項に記載の流量測定装置。 - 前記制御部は、前記算出部で算出した前記流体の流量を含む領域で変動の変化量の大きくなる前記パージ流体の流量を算出し、算出結果に基づいて、前記パージ流体供給部から前記第1パージ流体供給管に供給するパージ流体の流量を調整することを特徴とする請求項10に記載の流量測定装置。
- 前記算出部は、さらに、前記発光部から出力したレーザ光の強度と、前記受光部で受光したレーザ光の強度とに基づいて、前記計測セルを流れる排流体の測定対象の物質の濃度も算出することを特徴とする請求項1から11のいずれか1項に記載の流量測定装置。
- 前記受光部は、隣接して配置された複数の受光素子を有し、各受光素子で受光した光量を受光信号として出力し、
前記算出部は、各受光素子から送られた受光信号の強度の比較に基づいて、前記流体の流量を算出することを特徴とする請求項1から12のいずれか1項に記載の流量測定装置。 - 前記算出部は、各受光素子から送られた受光信号の強度の比較に基づいて、前記レーザ光の到達位置を算出し、前記到達位置と基準位置とのずれに基づいて、前記流体の流量を算出することを特徴とする請求項13に記載の流量測定装置。
- 前記算出部は、各受光素子から送られた受光信号の強度の総量と、前記受光部で受光したレーザ光の強度とに基づいて、前記計測セルを流れる排流体の測定対象の物質の濃度も算出することを特徴とする請求項13または14に記載の流量測定装置。
- 前記計測セルは、前記主管の、前記流体の流れ方向において前記入射管の上流側、かつ、前記入射管の近傍に、前記入射管の近傍の空気の流れを乱流にする乱流発生部を有することを特徴とする請求項1から15のいずれか1項に記載の流量測定装置。
- さらに、前記出射管と連結された第2パージ流体供給管を有し、
前記パージ流体供給部は、前記第2パージ流体供給管にもパージ流体を供給することを特徴とする請求項1から16のいずれか1項に記載の流量測定装置。 - 前記算出部は、さらに、前記受光部から出力される受光信号に基づいて、前記計測セルの前記主管を流れる流体の流速を計測することを特徴とする請求項1から17のいずれか1項に記載の流量測定装置。
- 前記流体は、気体であることを特徴とする請求項1から18のいずれか1項に記載の流量測定装置。
- 一方の端部が測定領域と向かい合う開口であり、反対側の端部に光が通過可能な窓部が形成された入射管、一方の端部が前記入射管と対向し、かつ、前記測定領域と向かい合う開口であり、反対側の端部に光が通過可能な窓部が形成された出射管及び前記入射管と連結された第1パージ流体供給管で構成された計測セルと、
前記計測セルの前記第1パージ流体供給管にパージ流体を供給するパージ流体供給部と、
前記入射管にレーザ光を入射させる発光部と、
前記入射管から入射され、前記測定領域を通過し、前記出射管から出射されたレーザ光を受光し、受光した光量を受光信号として出力する受光部と、
前記受光部から出力される受光信号に基づいて、前記測定領域を流れる流体の流速を算出する算出部と、
前記測定領域を流れる流体の流れ方向を検出する流れ方向検出部と、
各部の動作を制御する制御部と、を有すること特徴とする流速測定装置。 - 前記流れ方向検出部は、流れ方向に平行な両方向からの圧力差を検出する差圧検出部を有し、前記差圧検出部で検出された圧力差に基づいて、流れ方向を検出することを特徴とする請求項20に記載の流速測定装置。
- 前記流れ方向検出部は、前記測定領域に露出し、流体の流れにより変形する変形部を有し、前記変形部の変形方向に基づいて、流れ方向を検出することを特徴とする請求項20に記載の流速測定装置。
- 前記計測セルは、前記入射管の一方の端部及び前記出射管の一方の端部とそれぞれ連結され、測定対象の流体が流れる主管を有し、
前記測定領域は、前記主管の一部であることを特徴とする請求項20から22のいずれか1項に記載の流速測定装置。 - 前記流体は、気体であることを特徴とする請求項20から23のいずれか1項に記載の流速測定装置。
Priority Applications (4)
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US13/580,411 US9243939B2 (en) | 2010-04-13 | 2010-11-22 | Flow volume measurement device and flow velocity measurement device |
KR1020127021948A KR101414923B1 (ko) | 2010-04-13 | 2010-11-22 | 유량 측정 장치 및 유속 측정 장치 |
CN201080064976.5A CN102782460B (zh) | 2010-04-13 | 2010-11-22 | 流量测定装置及流速测定装置 |
EP10849865.0A EP2559973A4 (en) | 2010-04-13 | 2010-11-22 | FLOW MEASURING DEVICE AND FLOW SPEED MEASURING DEVICE |
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JP2010092574A JP5523908B2 (ja) | 2010-04-13 | 2010-04-13 | 流量測定装置及び流速測定装置 |
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US (1) | US9243939B2 (ja) |
EP (1) | EP2559973A4 (ja) |
JP (1) | JP5523908B2 (ja) |
KR (1) | KR101414923B1 (ja) |
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JP2011220943A (ja) | 2011-11-04 |
CN102782460A (zh) | 2012-11-14 |
JP5523908B2 (ja) | 2014-06-18 |
KR101414923B1 (ko) | 2014-07-07 |
EP2559973A1 (en) | 2013-02-20 |
US20120323502A1 (en) | 2012-12-20 |
KR20120108052A (ko) | 2012-10-04 |
EP2559973A4 (en) | 2015-01-28 |
US9243939B2 (en) | 2016-01-26 |
CN102782460B (zh) | 2014-09-17 |
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