WO2011074806A3 - 기판 검사 장치 및 이를 이용한 기판 검사 방법 - Google Patents

기판 검사 장치 및 이를 이용한 기판 검사 방법 Download PDF

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Publication number
WO2011074806A3
WO2011074806A3 PCT/KR2010/008575 KR2010008575W WO2011074806A3 WO 2011074806 A3 WO2011074806 A3 WO 2011074806A3 KR 2010008575 W KR2010008575 W KR 2010008575W WO 2011074806 A3 WO2011074806 A3 WO 2011074806A3
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
optical sensor
substrate inspection
inspection apparatus
same
Prior art date
Application number
PCT/KR2010/008575
Other languages
English (en)
French (fr)
Other versions
WO2011074806A2 (ko
Inventor
김찬식
주진규
최석
Original Assignee
주식회사 이테크넷
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020090127313A external-priority patent/KR100975645B1/ko
Priority claimed from KR1020100109861A external-priority patent/KR101046566B1/ko
Application filed by 주식회사 이테크넷 filed Critical 주식회사 이테크넷
Publication of WO2011074806A2 publication Critical patent/WO2011074806A2/ko
Publication of WO2011074806A3 publication Critical patent/WO2011074806A3/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

본 발명은 하나의 기판에 대해 하나의 광학 센서 또는 적은 수의 광학 센서를 사용하여 그 기판의 크랙을 검사하는 것으로서, 본 발명의 한 실시예에 따른 기판 검사 장치는 기판의 반송 방향과 평행한 수평 모서리와 상기 기판의 반송 방향과 수직인 수직 모서리를 가지는 상기 기판의 수직 모서리를 검사하는 적어도 하나의 광학 센서, 광학 센서를 이동시키는 광학 센서 이동부를 포함하고, 광학 센서는 기판의 수평 모서리의 연장선과 소정 각도를 이루며 이동하고, 광학 센서는 기판의 반송 시 기판의 수직 모서리를 따라 이동한다.
PCT/KR2010/008575 2009-12-18 2010-12-02 기판 검사 장치 및 이를 이용한 기판 검사 방법 WO2011074806A2 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR10-2009-0127313 2009-12-18
KR1020090127313A KR100975645B1 (ko) 2009-12-18 2009-12-18 기판 검사 장치 및 이를 이용한 기판 검사 방법
KR1020100109861A KR101046566B1 (ko) 2010-11-05 2010-11-05 기판 검사 장치 및 이를 이용한 기판 검사 방법
KR10-2010-0109861 2010-11-05

Publications (2)

Publication Number Publication Date
WO2011074806A2 WO2011074806A2 (ko) 2011-06-23
WO2011074806A3 true WO2011074806A3 (ko) 2011-11-03

Family

ID=44167820

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2010/008575 WO2011074806A2 (ko) 2009-12-18 2010-12-02 기판 검사 장치 및 이를 이용한 기판 검사 방법

Country Status (2)

Country Link
TW (1) TW201140041A (ko)
WO (1) WO2011074806A2 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106405895B (zh) * 2016-11-25 2019-09-17 深圳市华星光电技术有限公司 一次点灯破片检测装置及其使用方法
CN108519390B (zh) * 2018-04-09 2021-02-02 芜湖立普德机械科技有限公司 一种玻璃基板检测装置
KR102215123B1 (ko) * 2018-11-26 2021-02-16 주식회사 탑 엔지니어링 기판 검사 장치 및 기판 검사 방법

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0126401B1 (ko) * 1987-12-25 1997-12-24 나까지마 다쯔지 유리판의 절단에지의 결점검출장치
JP2001272306A (ja) * 2000-03-24 2001-10-05 Canon Inc カラーフィルタの検査方法
JP2006201152A (ja) * 2005-01-18 2006-08-03 Optimax Technology Corp 偏光板測定装置及び測定方法
KR20090072312A (ko) * 2007-12-28 2009-07-02 주식회사 디엠에스 기판의 건조장치 및 그 장치를 이용한 기판의 건조 방법

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0126401B1 (ko) * 1987-12-25 1997-12-24 나까지마 다쯔지 유리판의 절단에지의 결점검출장치
JP2001272306A (ja) * 2000-03-24 2001-10-05 Canon Inc カラーフィルタの検査方法
JP2006201152A (ja) * 2005-01-18 2006-08-03 Optimax Technology Corp 偏光板測定装置及び測定方法
KR20090072312A (ko) * 2007-12-28 2009-07-02 주식회사 디엠에스 기판의 건조장치 및 그 장치를 이용한 기판의 건조 방법

Also Published As

Publication number Publication date
WO2011074806A2 (ko) 2011-06-23
TW201140041A (en) 2011-11-16

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