WO2011059352A1 - Gyroscope vibrant - Google Patents

Gyroscope vibrant Download PDF

Info

Publication number
WO2011059352A1
WO2011059352A1 PCT/RU2009/000607 RU2009000607W WO2011059352A1 WO 2011059352 A1 WO2011059352 A1 WO 2011059352A1 RU 2009000607 W RU2009000607 W RU 2009000607W WO 2011059352 A1 WO2011059352 A1 WO 2011059352A1
Authority
WO
WIPO (PCT)
Prior art keywords
base
cover
rod
inertial mass
gyroscope
Prior art date
Application number
PCT/RU2009/000607
Other languages
English (en)
Russian (ru)
Inventor
Александр Павлович МЕЗЕНЦЕВ
Евгений Николаевич ФРОЛОВ
Михаил Юрьевич КЛИМКИН
Олег Александрович МЕЗЕНЦЕВ
Original Assignee
Общество С Ограниченной Ответственностью "Айсенс
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Общество С Ограниченной Ответственностью "Айсенс filed Critical Общество С Ограниченной Ответственностью "Айсенс
Priority to PCT/RU2009/000607 priority Critical patent/WO2011059352A1/fr
Publication of WO2011059352A1 publication Critical patent/WO2011059352A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5663—Manufacturing; Trimming; Mounting; Housings

Definitions

  • the present invention relates to measuring technique, in particular, to vibratory gyroscopic devices for measuring angular velocity.
  • Known gyroscope-accelerometer which consists of one silicon and two glass plates.
  • a base frame and two pendulum assemblies are formed by etching, which are connected to the frame using elastic jumpers.
  • Pendulums can elastically move along the axis of the normal plane of the plate (US patent J 25392650, class 73/517 A, 1995.).
  • the excitation system can cause oscillations of the pendulum nodes in antiphase in the plane of the plate, which, in essence, is equivalent to the rotation of the entire plate around an axis perpendicular to its plane.
  • its pendulums Under the influence of Coriolis forces will begin to oscillate with the excitation frequency.
  • the oscillation amplitudes of the pendulums depend on the angular velocity of rotation of the device (displacements of the pendulums due to the accelerated movement of the device are not considered here).
  • Two glass plates with electrodes are rigidly fixed to the base frame of the silicon wafer on both sides, which together with the silicon wafer, as a common electrode, form a pair of differential capacitive displacement sensors of the pendulums.
  • the main disadvantages of the considered accelerometer gyroscope are, firstly, the inability to manufacture a silicon wafer with identical pendulum nodes, which leads to an additional error of the device, and, secondly, in this design it is quite difficult to implement the mode of resonant tuning of the oscillations of the pendulum and pendulum nodes.
  • a vibration gyroscope which has a base with a vibrating ring assembly installed in it, also called a rotor assembly.
  • the rotor assembly is made of a single silicon single crystal plate and consists of a rotor in the form of an outer ring and an inner hub, which are connected to each other by elastic elements.
  • the hub is connected to the base also by elastic ties.
  • the rotor is the inertial (test) mass of the gyroscope and can perform angular oscillations around two mutually orthogonal axes (around the axis, the normal plane of the ring, and the axis located in the plane of the ring).
  • angular oscillations of the rotor around the axis normal to its plane can be electrostatically excited.
  • its rotor In the presence of rotation of the base of the gyroscope under the action of Coriolis forces, its rotor begins to oscillate around the second axis (output axis) with an amplitude that is proportional to the angular velocity of rotation.
  • a dielectric substrate is formed on the basis of the gyroscope
  • the gyroscope achieves the greatest sensitivity when the frequencies of the angular oscillations of the rotor around two orthogonal axes coincide (resonance mode).
  • the technological variation in the parameters of mainly elastic elements leads to the different frequencies of the two vibrational systems of the rotor assembly, which significantly affects the characteristics of the gyroscope.
  • the rotor site different frequencies due to the presence of several elastic elements and the complex configuration of the rotor cannot be reduced below a certain level, which limits the achievement of high accuracy of the gyroscope.
  • the rotor assembly in addition to the two main natural frequencies, has other natural frequencies of vibration, which can be interpreted as “spurious" frequencies.
  • the technical result of the present invention is to simplify the design, including the elastic suspension and the shape of the inertial mass (rotor) of the gyroscope, and thereby increase the accuracy of its measurement, as well as the manufacturability and reliability of the design.
  • the known vibration gyroscope containing the base, inertial mass, the cover, service electronics is made in the form of a flat package of three layers, the first of which is the base, contacting on the periphery of its circuit with the middle layer contour, covering the inertial mass and in contact with the second extreme layer, which is a cover with passage inputs for connection service electronics.
  • the base of the first layer can be a rectangular plate, on one side of which a protrusion closed along the entire perimeter and isolated internal protrusions of the same height are formed
  • the middle layer is made in the form of a frame closed along its contour, corresponding to the base protrusion closed along the entire perimeter, and racks corresponding to the isolated internal protrusions of the same height
  • one of the posts is a hub of inertial mass, made in the form of a rectilinear rod with curvilinear m section in the middle part, the middle of which is connected to the hub by a flat spring, the plane of which is perpendicular to the rod
  • the cover of the second extreme layer is installed on the frame around its perimeter, which is a rectangular plate with feedthroughs, while the connection between the closed protrusion of the base and the cover with the frame, isolated protrusions with corresponding struts are made rigid, and the hubs and racks with bushings are galvanic.
  • the racks can be located relative to the rod with a gap in pairs symmetrically.
  • the rectangular base plate, frame, pillars and cover can be made of single-crystal silicon.
  • the feedthroughs can be galvanically connected to insulated areas located on the inner side of the cover in pairs symmetrically and with a gap relative to the rod of inertial mass.
  • FIG. 1 shows a layout diagram of a vibratory gyroscope
  • FIG. 2 is a side view of a flat gyro package.
  • the service electronics are not shown in the figures.
  • the vibrating gyroscope contains the base of the first extreme layer in the form of a rectangular plate 1 of single-crystal silicon, on one side of which, by etching, a protrusion 2 closed around the entire perimeter and five isolated internal protrusions 3-7 of the same height are formed.
  • the protrusions through the insulating layers (silicon dioxide) are rigidly mounted middle layer 8 in the form of a rectangular plate of single-crystal silicon, repeating the contour of the first. Through the etching through slots are made in this plate.
  • a hub 9 is formed, a frame 10 closed on the contour of the plate, racks 11 - 14, an inertial mass made in the form of a rectilinear rod 15 with a curved section in the middle, a flat spring 16.
  • the hub 9 is rigidly connected to the protrusion 3, the frame 10 to the protrusion 2, each strut 11 - 14 - with a corresponding protrusion 4 - 7.
  • the rod 15 is connected to the hub 9 by a flat spring 16, the plane of which is perpendicular to the rod, while the center of mass of the inertial mass coincides with the midpoint of the spring 16.
  • the rod 15 is resiliently suspended to base 1 and can make angular oscillations around two orthogonal axes.
  • Racks 11, 14 and 12, 13 are located relative to the rod 15 with a gap pairwise symmetrical.
  • On the frame 10 is rigidly mounted cover 17 of the second extreme layer, which is a rectangular silicon plate with bushings 18 to 26.
  • Each of the bushings 18-26 is a part of a silicon wafer isolated from it throughout its thickness.
  • the bushing 18 to 22 are mechanically and galvanically connected to the hub 9 and uprights 1 1 to 14, and the bushing 23 to 26 are arranged in pairs symmetrically with a gap relative to the rod.
  • the inputs are electrically connected to the service electronics.
  • the elastic element - a flat spring 16 allows the rod 15 to perform angular oscillations around two orthogonal axes: around an axis perpendicular to the plane of the plates, and around the longitudinal axis of the spring 16.
  • the highest sensitivity is achieved when the eigenfrequencies of the angular oscillations of the rod 15 around these axes coincide.
  • this is subject to:
  • E, G - respectively, the modulus of elasticity of the material of the spring (silicon) of the first and second kind
  • a ⁇ , Ar - respectively, the moment of inertia of the rod around the longitudinal axis of the spring and around an axis perpendicular to the plane of the plates and passing through the center of mass of the rod
  • b, h - respectively, the width and height of the spring.
  • the moments of inertia of the rod A ⁇ , A 2 are almost equal.
  • the condition for the coincidence of the two vibration frequencies of the rod 15 can be simplified to the form: ⁇ _ Maschinen, 63 *.
  • the ratio is for different orientations
  • G plane of the spring 16 will be different. However, in doing so— ”-.
  • Vibration gyroscope works as follows. From the service electronics, a potential (t / 0 + U ⁇ $ m & t) is supplied to input 18 relative to input 20, and to input 22, (Uo - t / isincot), where is a constant potential, U ⁇ is the amplitude of a variable potential with frequency ⁇ . As a result of this, due to the action of electrostatic forces, an alternating mechanical moment arises with a frequency ⁇ applied to the rod 15 of the gyroscope around an axis perpendicular to the plane of the plates (axis ⁇ ). When the frequency ⁇ coincides with the natural frequency of the rod 15, its resonant angular oscillations around the same axis are excited. In the presence of rotation of the base 1 of the gyroscope around the X axis with an angular velocity ⁇ under the action of Coriolis forces
  • the design of the vibrating gyroscope in accordance with the present invention allows to simplify the elastic suspension of the rotor and thereby more accurately adjust the two natural frequencies of the rotor to each other and, accordingly, increase the accuracy of the gyroscope measurement and provide a technical result which is the simplification of the design, including the elastic suspension and the shape of the inertial mass (rotor) of the gyroscope, and due to this the accuracy of its measurement, as well as the manufacturability and reliability of the design.

Abstract

La présente invention se rapporte aux techniques de mesure et concerne notamment des instruments gyroscopiques vibrants destinés à mesurer une vitesse angulaire. Le gyroscope vibrant comprend une base, une masse inertielle, un couvercle et une électronique de service. Il se présente sous forme d'un ensemble plan de trois couches, parmi lesquelles la première couche d'extrémité constitue la base entrant en contact sur la périphérie de son pourtour avec le pourtour de la couche médiane, lequel entoure la masse inertielle et entre en contact avec la seconde couche d'extrémité constituant le couvercle et comprenant des entrées traversantes afin de connecter l'électronique de service. Le résultat technique consiste en une simplification de la structure, une augmentation de la précision des mesures, ainsi qu'une meilleure fabricabilité et une plus grande fiabilité du gyroscope.
PCT/RU2009/000607 2009-11-10 2009-11-10 Gyroscope vibrant WO2011059352A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/RU2009/000607 WO2011059352A1 (fr) 2009-11-10 2009-11-10 Gyroscope vibrant

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/RU2009/000607 WO2011059352A1 (fr) 2009-11-10 2009-11-10 Gyroscope vibrant

Publications (1)

Publication Number Publication Date
WO2011059352A1 true WO2011059352A1 (fr) 2011-05-19

Family

ID=43991818

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/RU2009/000607 WO2011059352A1 (fr) 2009-11-10 2009-11-10 Gyroscope vibrant

Country Status (1)

Country Link
WO (1) WO2011059352A1 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5555765A (en) * 1993-02-10 1996-09-17 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope
US20080148849A1 (en) * 2006-04-21 2008-06-26 Sony Corporation Motion sensor and method of manufacturing the same
RU2334197C1 (ru) * 2007-01-16 2008-09-20 Общество с ограниченной ответственностью "АЙСЕНС" Способ измерения угловой скорости и вибрационный гироскоп для его осуществления

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5555765A (en) * 1993-02-10 1996-09-17 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope
US20080148849A1 (en) * 2006-04-21 2008-06-26 Sony Corporation Motion sensor and method of manufacturing the same
RU2334197C1 (ru) * 2007-01-16 2008-09-20 Общество с ограниченной ответственностью "АЙСЕНС" Способ измерения угловой скорости и вибрационный гироскоп для его осуществления

Similar Documents

Publication Publication Date Title
RU2580879C2 (ru) Микроэлектромеханическая система для датчика угловой скорости
US9574879B2 (en) MEMS angular inertial sensor operating in tuning fork mode
KR101673887B1 (ko) 진동형 마이크로-기계식 각속도 센서
JP4290986B2 (ja) 回転レートセンサー
US9651376B2 (en) Microelectromechanical gyroscopes and related apparatus and methods
US6272925B1 (en) High Q angular rate sensing gyroscope
KR100594957B1 (ko) 각속도 센서
KR100476562B1 (ko) 수평형 및 튜닝 포크형 진동식 마이크로 자이로스코프
US7640803B1 (en) Micro-electromechanical system inertial sensor
US10032976B2 (en) Microelectromechanical gyroscopes and related apparatus and methods
US20140224016A1 (en) Micro-electromechanical gyro device
JP6514790B2 (ja) ジャイロスコープ
EP0574143B1 (fr) Capteur de vitesse angulaire et procédé pour sa production
US20190033075A1 (en) Gyroscope devices and methods for fabricating gyroscope devices
KR20190015992A (ko) 각속도 센서들
JP7269745B2 (ja) 振動構造の角速度センサ、およびその製造方法
RU2334197C1 (ru) Способ измерения угловой скорости и вибрационный гироскоп для его осуществления
WO2011059352A1 (fr) Gyroscope vibrant
US11215455B2 (en) Piezoelectric ring gyroscope
RU2453812C1 (ru) Интегральный чувствительный элемент вибрационного гироскопа
RU75475U1 (ru) Вибрационный гироскоп
RU2364836C1 (ru) Вибрационный гироскоп
CN105917193A (zh) 具有嵌套激振体质量块的惯性传感器和用于制造这样的传感器的方法
RU64787U1 (ru) Вибрационный гироскоп для измерения угловой скорости
KR100319920B1 (ko) 비대칭 내부 비틀림 짐벌을 가진 측면 구동 방식의 짐벌형 자이로스코프

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 09851314

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 09851314

Country of ref document: EP

Kind code of ref document: A1