WO2011052972A9 - Source de rayons x présentant un fil de nanotubes de carbone (cnt), système de génération de rayons x et procédé de fabrication associé - Google Patents

Source de rayons x présentant un fil de nanotubes de carbone (cnt), système de génération de rayons x et procédé de fabrication associé Download PDF

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Publication number
WO2011052972A9
WO2011052972A9 PCT/KR2010/007381 KR2010007381W WO2011052972A9 WO 2011052972 A9 WO2011052972 A9 WO 2011052972A9 KR 2010007381 W KR2010007381 W KR 2010007381W WO 2011052972 A9 WO2011052972 A9 WO 2011052972A9
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WO
WIPO (PCT)
Prior art keywords
carbon nanotube
ray source
protective layer
insulating protective
ray
Prior art date
Application number
PCT/KR2010/007381
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English (en)
Korean (ko)
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WO2011052972A3 (fr
WO2011052972A2 (fr
Inventor
이충훈
김현숙
공병윤
Original Assignee
원광대학교산학협력단
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Publication of WO2011052972A2 publication Critical patent/WO2011052972A2/fr
Publication of WO2011052972A9 publication Critical patent/WO2011052972A9/fr
Publication of WO2011052972A3 publication Critical patent/WO2011052972A3/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/065—Field emission, photo emission or secondary emission cathodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/08—Electrical details
    • H05G1/26—Measuring, controlling or protecting
    • H05G1/54—Protecting or lifetime prediction
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/02—Constructional details

Definitions

  • the present invention relates to an X-ray generating technology, and more particularly, X-ray source, the X-ray formed with a protective layer on the outer peripheral surface of the carbon nanotube yarn to suppress the damage of the outer peripheral surface of the carbon nanotube (CNT) yarn A generator and a method of manufacturing the same.
  • a typical X-ray generator is a ceramic stem (also referred to as a vacuum tube) in which a pin of a cathode is vertically installed, and an exit window in which a target metal is deposited on a lower surface thereof is supported by a ceramic valve and soldered to each other. It arrange
  • the x-ray generating apparatus needs to have a different characteristic of the lead used on both sides of the stem side and the exit window side, which complicates the work process, resulting in poor productivity.
  • the soldering process of the exit window side and the valve made of a ceramic is later than the process of providing a tungsten coil (cathode filament) to a cathode pin.
  • the tungsten coil and the negative electrode pin fixing the tungsten coil are exposed to high temperature, and there is a problem in that the fixing portions of the tungsten pin and the negative electrode pin are heated. As a result, the fixing of the tungsten coil and the negative electrode pin is loosened, which is a problem of deterioration of the characteristics and life of the filament, there is a risk of lack of reliability.
  • a bipolar structure (diode structure) of a cathode and an anode is generally adopted.
  • a high voltage is applied to the anode to accelerate the electrons, thereby making it difficult to focus and control electrons.
  • the hot electron emission in the filament appears to be omnidirectional emission, the efficiency of the amount of electrons reaching the positive electrode is inevitably reduced.
  • an object of the present invention is to provide an X-ray source, an X-ray generating apparatus and a manufacturing method including a carbon nanotube seal having an insulating protective layer.
  • Another object of the present invention is to provide an X-ray source, an X-ray generating apparatus, and a method of manufacturing the same, in which a protective layer capable of suppressing damage to the outer circumferential surface of the carbon nanotube seal is formed.
  • the X-ray source according to the present invention comprises a carbon nanotube seal and an insulating protective layer.
  • the carbon nanotube seal has an outer circumferential surface.
  • the insulating protective layer is formed on an outer circumferential surface of the carbon nanotube seal.
  • the insulating protective layer may include at least one of SiO 2 , MgO, BN, HfO 2 and AlN.
  • the insulating protective layer may be formed to a thickness of several nm to several hundred nm.
  • both ends of the carbon nanotube seal may be exposed outside the insulating protective layer.
  • the present invention also provides a preparation step of preparing a carbon nanotube seal having an outer circumferential surface, a forming step of forming an insulating protective layer on an outer circumferential surface of the carbon nanotube seal, and the carbon nanotube seal having the insulating protective layer formed to a predetermined length. It provides a method for producing an x-ray source having a carbon nanotube seal comprising a separation step of cutting to separate into an x-ray source.
  • the forming step may form the insulating protective layer by physical vapor deposition or chemical vapor deposition.
  • the carbon nanotube yarn may be formed by drawing and yarning the yarn from carbon nanotubes synthesized perpendicular to the substrate.
  • the present invention provides an x-ray generating apparatus including a cathode portion and an anode portion.
  • the cathode part includes an X-ray source as a cathode.
  • the anode portion is disposed on the X-ray source, and electrons emitted from the X-ray source collide to generate X-rays.
  • the cathode part includes the X-ray source and the contact part.
  • the X-ray source has a carbon nanotube seal having an outer circumferential surface and an insulating protective layer formed on an outer circumferential surface of the carbon nanotube seal.
  • the contact portion is coupled to an outer circumferential surface of the other end of the X-ray source, penetrates through the insulating protective layer, and mechanically contacts the carbon nanotube seal to apply a potential HV ⁇ .
  • the X-ray generating apparatus may further include a lens disposed between the X-ray source and the anode part to induce electron emission through the X-ray source to accelerate the electron beam to focus on the anode part.
  • the X-ray source according to the present invention has a structure in which an insulating protective layer is formed on the outer circumferential surface of the carbon nanotube seal, stress such as high current or arcing acting on the carbon nanotube seal during X-ray generation The occurrence of un-twisted can be suppressed.
  • the X-ray source since the X-ray source has a structure in which an insulating protective layer is formed on the outer circumferential surface of the carbon nanotube seal, the X-ray source can improve the field emission effect of the carbon nanotube seal and relate the service life.
  • FIG. 1 is a perspective view showing an x-ray source having a carbon nanotube seal according to an embodiment of the present invention.
  • FIG. 2 is a flowchart according to a method of manufacturing the x-ray source of FIG. 1.
  • 3 and 4 are schematic views illustrating an x-ray generating apparatus using the x-ray source of FIG. 1.
  • FIG. 5 is a photograph showing a state in which un-twisted is generated in the carbon nanotube yarn.
  • FIG. 1 is a perspective view showing an x-ray source 10 having a carbon nanotube seal 12 according to an embodiment of the present invention.
  • an x-ray source 10 includes a carbon nanotube seal 12 and an insulating protective layer 14.
  • the carbon nanotube seal 12 has an outer circumferential surface and has a length that can be used as the x-ray source 10. An electric potential HV- is applied to one end of the carbon nanotube chamber 12, and electrons necessary for X-ray generation are emitted to the other end.
  • the carbon nanotube yarn 12 may be formed by drawing and yarning the yarn from carbon nanotubes synthesized perpendicular to the substrate.
  • the reason for using the carbon nanotube seal 12 as the X-ray source 10 is as follows.
  • the carbon nanotube seal 12 is an emitter using the field emission principle in which electrons are emitted when an electric field is applied to a conductive emitter having a sharp tip in a vacuum. Because it provides.
  • the insulating protective layer 14 is formed on the outer circumferential surface of the carbon nanotube seal 12.
  • the insulating protective layer 14 is not formed on both end surfaces of the carbon nanotube seal 12.
  • the insulating protective layer 14 suppresses damage to the outer circumferential surface generated in the process of using the carbon nanotube seal 12 as the X-ray source 10. For example, in the X-ray generation process, the other end of the carbon nanotube seal 12 is exposed for a long time by an emission current of 2 mA or more, and thus un-twisted may be generated as a result of high temperature deterioration. That is, due to arcing due to a high electric field or an overcurrent, un-twisted may be generated at the other end of the carbon nanotube seal 12.
  • the insulating protective layer 14 on the outer circumferential surface of the carbon nanotube seal 12, it is possible to suppress the occurrence of un-twisted in the X-ray source 10. That is, in the case of the carbon nanotube seal 12 bonded by van der Waals forces, un-twisted may occur due to the characteristic that the carbon nanotube seal 12 tries to align in the direction of the electric field when a high voltage potential is applied. Can be. However, in this embodiment, since the insulating protective layer 14 is physically bonded to the outer circumferential surface of the carbon nanotube seal 12 to maintain the twisted state of the carbon nanotube seal 12, the carbon nanotube seal 12 has a high pressure. Even if the potential of is applied, un-twisted does not occur.
  • the insulating protective layer 14 can suppress the emission of electrons to the outer circumferential surface of the carbon nanotube seal 12 and can induce electron emission to the other end of the carbon nanotube seal 12.
  • WBGM Wide Band Gap Material
  • SiO 2, MgO, BN, HfO 2, or AlN may be used as the material of the insulating protective layer 14.
  • WBGM is a NEA (Negative Electron Affinity) material, which extends the service life of the carbon nanotube seal 10 and induces easy electron emission even at a low electric field, thereby improving the field emission effect.
  • the insulating protective layer 14 is formed in several nm to several hundred nm. It is desirable to. If the thickness of the insulating protective layer 14 is too thin, it may not function properly as a protective layer. If the insulating protective layer 14 is too thick, the insulating protective layer 14 may be deformed due to the difference in thermal expansion coefficient between the insulating protective layer 14 and the carbon nanotube seal 12. This is because problems can arise.
  • FIGS. 1 and 2 are flowchart according to the manufacturing method of the X-ray source 10 of FIG.
  • the insulating protective layer 14 may be formed by a method such as physical vapor deposition or chemical vapor deposition.
  • the insulating protective layer 14 may be formed by a method such as sputtering, e-beam and thermal evaporation, and PECVD.
  • the carbon nanotube seal 12 in which the insulating protective layer 14 is formed is cut to a predetermined length and separated into the X-ray source 10.
  • FIGS. 1, 3, and 4 are schematic views illustrating the X-ray generating apparatus 100 using the X-ray source 10 of FIG. 1.
  • the x-ray generator 100 using the x-ray source 10 includes a cathode part and an anode part 40.
  • the cathode part includes the X-ray source 10 as a cathode, and one end of the X-ray source 10 is disposed toward the anode part 40.
  • the potential HV- is applied to the other end of the X-ray source 10.
  • the X-ray source 10 may be a carbon nanotube seal 12 in which an insulating protective layer 14 is formed at a predetermined thickness on an outer circumferential surface thereof.
  • the contact portion 70 for applying the potential HV ⁇ to the other end of the X-ray source 10 is coupled to the outer circumferential surface of the X-ray source 10.
  • the contact portion 70 is formed with a plurality of contact points with sharp ends on the surface facing the outer circumferential surface of the X-ray source 10.
  • the contact end of the contact portion 70 penetrates through the insulating protective layer 14 when the contact portion 70 is in close contact with the outer circumferential surface of the X-ray source 10 and mechanically contacts the carbon nanotube seal 12 so that the potential HV ⁇ ) Is applied.
  • the contact part 70 is divided into two types around the X-ray source 10.
  • the contact part 70 is not limited thereto and may be implemented in various forms.
  • the contact portion may have a contact end inside the tubular shape.
  • the contact portion may be formed in a pair of pieces, a pair of tubular parts divided into half, and the like.
  • a contact end is formed inside the contact portion to penetrate the insulating protective layer.
  • the lens 30 is disposed on the carbon nanotube chamber 12 and induces electron emission through the carbon nanotube chamber 12 to accelerate and focus the electron beam 80.
  • the anode part 40 is disposed above the X-ray source 10.
  • the anode part 40 generates the X-ray 90 due to the collision of the electron beam 80 emitted from one end of the X-ray source 10 while the DC voltage HV + is applied.
  • the anode part 40 discloses an example in which a reflective anode is used, a transparent anode may be used.
  • the tip portion of the X-ray source 10 is unused in the process of generating the X-ray 90. You can suppress the occurrence of -twisted.
  • the triode type having the lens 30 is illustrated as the X-ray generating apparatus 100 according to the present exemplary embodiment, the present disclosure is not limited thereto.
  • the X-ray generator may be implemented as a diode type without a lens.
  • Carbon nanotube wires in which nanotubes are formed may also be used.
  • the carbon nanotube wire may be formed on the outer circumferential surface of the metal wire by synthesizing the carbon nanotubes by a chemical vapor deposition method after depositing the catalytic metal on the metal wire by a physical vapor deposition method.

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  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • X-Ray Techniques (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

La présente invention concerne une source de rayons X présentant un fil de nanotubes de carbone (CNT), un système de génération de rayons X et un procédé de fabrication associé. La présente invention vise à limiter les dommages sur le fil de nanotubes de carbone liés à la contrainte agissant sur le fil de nanotubes de carbone lors du procédé de génération d'un rayon X. La source de rayons X selon la présente invention comprend: un fil de nanotubes de carbone présentant une surface périphérique extérieure; et une couche de protection isolante formée sur la surface périphérique extérieure du fil de nanotubes de carbone. Par formation d'une telle couche de protection isolante sur le fil de nanotubes de carbone, il est possible de limiter les dommages tels que des parties détorsadées dues à un courant élevé, à la formation d'arc ou à une contrainte agissant sur le fil de nanotubes de carbone au cours du procédé de génération d'un rayon X, d'améliorer l'effet d'émission de champ du fil de nanotubes de carbone, et d'étendre sa durée de vie.
PCT/KR2010/007381 2009-10-28 2010-10-26 Source de rayons x présentant un fil de nanotubes de carbone (cnt), système de génération de rayons x et procédé de fabrication associé WO2011052972A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2009-0102698 2009-10-28
KR1020090102698A KR101212983B1 (ko) 2009-10-28 2009-10-28 탄소나노튜브 실을 갖는 엑스레이 발생 장치

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WO2011052972A2 WO2011052972A2 (fr) 2011-05-05
WO2011052972A9 true WO2011052972A9 (fr) 2011-07-07
WO2011052972A3 WO2011052972A3 (fr) 2011-09-15

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WO (1) WO2011052972A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111489858A (zh) * 2019-01-25 2020-08-04 清华大学 耐高温导线及应用该耐高温导线的探测器

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130100630A (ko) 2012-03-02 2013-09-11 삼성전자주식회사 전자 방출 소자 및 이를 포함한 엑스선 발생 장치
KR101675470B1 (ko) * 2015-01-14 2016-11-22 원광대학교산학협력단 근접 방사선 치료용으로 사용할 수 있는 탄소나노튜브 실을 포함한 엑스레이 소스 및 이를 이용한 엑스레이 발생장치
KR101631668B1 (ko) * 2015-01-14 2016-06-17 원광대학교산학협력단 여과된 아크 증착을 적용한 탄소나노튜브 실을 포함한 엑스레이 소스 및 이를 이용한 엑스레이 발생장치
KR101615337B1 (ko) * 2015-01-14 2016-04-25 원광대학교산학협력단 탄소나노튜브 실을 포함한 엑스레이 소스 및 이를 이용한 엑스레이 발생장치
US10580612B2 (en) 2017-01-03 2020-03-03 Electronics And Telecommunications Research Institute Electron emission source and X-ray generator using the same
KR102158776B1 (ko) * 2017-01-03 2020-09-23 한국전자통신연구원 전자 방출원 및 이를 이용한 엑스선 발생 장치
KR101956540B1 (ko) * 2017-04-06 2019-03-11 원광대학교산학협력단 탄소나노튜브 실을 포함한 초소형 엑스레이 소스 및 이를 이용한 엑스레이 발생장치
KR102027407B1 (ko) * 2018-05-16 2019-11-04 원광대학교산학협력단 탄소나노튜브 실을 이용한 필드 에미터 및 냉음극 구조

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EP1612187A1 (fr) * 2004-06-30 2006-01-04 E.I. du Pont de Nemours and Company Microfibres de nanotubes de carbone
US20100297441A1 (en) * 2004-10-18 2010-11-25 The Regents Of The University Of California Preparation of fibers from a supported array of nanotubes
KR101458846B1 (ko) * 2004-11-09 2014-11-07 더 보드 오브 리전츠 오브 더 유니버시티 오브 텍사스 시스템 나노섬유 리본과 시트 및 트위스팅 및 논-트위스팅 나노섬유 방적사의 제조 및 애플리케이션
KR100867172B1 (ko) * 2006-12-18 2008-11-06 한국전기연구원 탄소나노튜브 기반의 ｘ-선관 구조

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111489858A (zh) * 2019-01-25 2020-08-04 清华大学 耐高温导线及应用该耐高温导线的探测器

Also Published As

Publication number Publication date
WO2011052972A3 (fr) 2011-09-15
KR101212983B1 (ko) 2012-12-17
KR20110045938A (ko) 2011-05-04
WO2011052972A2 (fr) 2011-05-05

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