WO2011035888A1 - Tête d'usinage par laser munie d'une unité d'ajustement de la position du foyer, et système et procédé pour ajuster la position du foyer d'un faisceau laser - Google Patents

Tête d'usinage par laser munie d'une unité d'ajustement de la position du foyer, et système et procédé pour ajuster la position du foyer d'un faisceau laser Download PDF

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Publication number
WO2011035888A1
WO2011035888A1 PCT/EP2010/005780 EP2010005780W WO2011035888A1 WO 2011035888 A1 WO2011035888 A1 WO 2011035888A1 EP 2010005780 W EP2010005780 W EP 2010005780W WO 2011035888 A1 WO2011035888 A1 WO 2011035888A1
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WO
WIPO (PCT)
Prior art keywords
scattered light
nozzle
laser beam
housing
processing head
Prior art date
Application number
PCT/EP2010/005780
Other languages
German (de)
English (en)
Inventor
Bert Schürmann
Georg Spörl
Original Assignee
Precitec Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Precitec Kg filed Critical Precitec Kg
Priority to DE112010003743.4T priority Critical patent/DE112010003743B4/de
Priority to CH00388/12A priority patent/CH703957B1/de
Publication of WO2011035888A1 publication Critical patent/WO2011035888A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B23K26/705—Beam measuring device
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B23K26/707—Auxiliary equipment for monitoring laser beam transmission optics

Definitions

  • the invention relates to a laser processing head for machining a workpiece by means of a laser beam, which has a focus position adjustment unit, and to a system and a method for adjusting a focal position of a laser beam.
  • a workpiece can be machined using a laser beam, whereby, for example, welding or cutting work can be carried out.
  • a process gas is passed through a nozzle on the workpiece, which blows the molten by the laser beam material of a workpiece to be machined down from the kerf.
  • the opening of the cutting nozzle is closed with a piece of partially transparent adhesive tape.
  • a small hole is burned into the adhesive tape by means of a laser pulse.
  • the hole burned by the laser beam and the contour of the nozzle opening can then be determined by means of a microscope or a magnifying glass, since the contour of the nozzle opening is pressed into the adhesive tape.
  • the displacement and the displacement direction of a focusing lens which focuses the laser beam on the workpiece, can be measured.
  • the laser beam can be adjusted centrally to the nozzle opening.
  • the reading accuracy is low and the adjustment process must be repeated manually several times until the laser beam is centered through the nozzle opening.
  • the laser beam is moved perpendicular to the laser beam axis so that it sweeps over the edges of the nozzle opening, wherein during the movement of the laser beam, a photoacoustic signal generated by the laser beam is recorded.
  • a center point of the nozzle opening can be determined and the laser beam can thus be centered.
  • DE 10 2007 063 627 A1 describes a method for determining the focus position and a method for determining the position of a laser beam relative to an opening of a laser processing nozzle. In this method, a sheet into which a rectangular recess is cut is used to determine the position of a laser beam guided through a processing nozzle in the nozzle opening.
  • the nozzle is moved within the recess of the sheet to the respective edges of the sheet, recorded the respective position of these points, and then determines the points at which the laser beam touches the corresponding points of the edges.
  • the relative position of the laser beam within the nozzle can be determined.
  • a lagenjustierech for a laser processing head which determines by determining a high intensity blue plasma light, which is generated by the laser beam at an optimal focus position, whether the laser beam is optimally focused on the workpiece.
  • the control of an optimum focus point is achieved by adjusting the distance between the focusing optics of the laser processing head and the workpiece.
  • WO 03/061 895 it is known, by means of an imaging device which is arranged opposite the nozzle opening of a laser processing head, to image the focused laser beam within the nozzle opening in order thus to determine the position of the laser beam. Beam relative to the nozzle opening to determine. In order to avoid destruction of the imaging surface due to the high laser beam intensity, a large part of the laser beam intensity is coupled out via a beam splitter and projected onto a beam trap, which dissipates the laser beam power by cooling. From DE 101 30 875 AI a changing device for a lens holder of a connection head for machining a workpiece by means of a laser beam and a method for controlling a focusing optics for the laser processing is known.
  • a camera which observes a Strahlaustritt structure lying object.
  • the light coming from the observed object can be recorded and evaluated in order to investigate a property of the focusing optics, in particular contamination.
  • the invention has for its object to provide a laser processing head with a lagenjustageong, and to provide a system and a method for adjusting a focus position of a laser beam, by which a laser beam can be reliably and with little time in a nozzle opening of a laser processing head centered.
  • a laser processing head for machining a workpiece by means of a laser beam is provided with a housing through which a beam path for the laser beam is passed and which has a focusing optics for focusing the laser beam through a nozzle on the workpiece to be machined, an actuator, which with the focusing optics is connected to adjust the focusing optics in the beam direction and in a plane perpendicular to the beam path, at least a scattered light sensor which is mounted in the housing to scattered light, which is generated by scattering or reflection of the laser beam on parts of the housing or the nozzle , and a focus position adjusting unit associated with the at least one Stray light sensor is connected to receive a scattered light intensity signal, wherein the focus position adjusting unit is adapted to control the actuator for the focusing optics so that the received light from the at least one scattered light sensor intensity is minimal.
  • a laser processing head in which by means of a lagenjustageong a laser beam through an opening of a nozzle, in particular a cutting nozzle, is coupled.
  • a laser beam through an opening of a nozzle, in particular a cutting nozzle.
  • scattered light which is reflected back into the laser processing head is measured in order to find the position of the laser beam relative to the nozzle opening by minimizing the scattered light intensity at which the laser beam passes without contact through the nozzle opening.
  • the determination of this optimum point can be done by tracing a path of the laser beam perpendicular to its beam direction and determining a point with minimized scattered light intensity, but it is also possible by using multiple scattered light sensors within the housing, the laser beam depending on the determined scattered light intensities of the scattered light sensors used targeted to lead due to a determined gradient of the scattered light intensity in a center of the nozzle opening, in which the adjustment direction for the laser beam is dependent on the determined gradient.
  • the focus position adjustment unit is designed to control the actuator during an adjustment process of the laser beam so that the focusing optics passes through a predetermined path while the scattered light intensity signal of the at least one scattered light sensor is recorded and further developed is to determine the point on the predetermined path of the focusing optics, in which the average scattered light intensity is minimal in order to approach this determined point for an adjustment of the laser beam.
  • the focus position adjustment unit is designed to control the actuator in such a way that the focusing optics in the plane perpendicular to the beam path direction in FIG a first direction is driven back and forth along a first path, while the averaged scattered light intensity signal of the at least one scattered light sensor is recorded and the focus position adjusting unit is further configured to detect the point of the recorded first distance of minimum averaged scattered light intensity, to approach that point and to reciprocate the focusing optics in a second direction along a second path which lies in the plane perpendicular to the beam path direction and contains the first point of the first path to approach this second point after determining a second point of the second path with minimum average scattered light intensity.
  • the first direction is perpendicular to the second direction.
  • the at least one scattered light sensor comprises at least three optical sensors arranged in the beam direction within the laser beam Housing at the same height circumferentially equally spaced.
  • the focus position adjustment unit is designed to evaluate the scattered light intensity signals of the at least three scattered light sensors independently of one another at predetermined time intervals in order to determine a scattered light intensity gradient and is further configured to control the actuator so that the focusing optics move in the direction of Scattered light intensity gradient is moved.
  • the lagenjustage nie is adapted to evaluate the scattered light intensity signals of the at least three scattered light sensors independently to determine the scattering light sensor with the lowest scattered light intensity, and is further adapted to the actuator so to control that the focusing optics is moved in the direction of the scattered light sensor with the lowest scattered light intensity.
  • the focusing optics is a focusing lens.
  • a system for adjusting a focus position of a laser beam which comprises the laser processing head according to the invention and further comprises a jet trap, which can penetrate a housing with a housing opening into which the focused laser beam in an adjustment process, wherein the dimension of the housing opening is adapted to the focal diameter of the laser beam, and comprises an optical beamfall sensor which measures the intensity of the focused laser beam entering the beam trap, wherein the focal position adjusting unit of the laser processing head is adapted to receive the intensity signal of the beamfall sensor, and the focusing optics depending on the intensity signal the beamfall sensor to control so that the intensity of the beamfall sensor is maximum.
  • the diameter of the housing opening is equal to the focus diameter.
  • the jet trap has a nozzle counterpart having a surface with a shape that corresponds to the shape of the end face of the nozzle, wherein the opening of the nozzle and the housing opening in the nozzle counterpart in the aligned state opposite each other.
  • the laser processing head comprises an alignment unit, which is formed, by means of a capacitive coupling of the nozzle and the nozzle counterpart to determine an aligned state between the nozzle and nozzle counterpart.
  • the distance of the surface of the nozzle counterpart of the jet trap from the end face of the nozzle is about 1 mm.
  • the beam trap sensor is a photodiode.
  • a method of adjusting a focus position of a laser beam comprising the steps of turning on a laser beam passing through a housing of a laser processing head and measuring the lens light intensity which is reflected back into the housing of the laser processing head to determine if the laser beam is part of the housing or a nozzle of the laser processing head, and adjusting a focusing optics, by which the laser beam is focused through the nozzle until the scattered light intensity is minimal.
  • the nozzle of the laser processing head is positioned over a jet trap such that an opening of the nozzle and a housing opening of the jet trap are centrally opposed, and the focusing optics is adjusted in the beam direction until the measured intensity of the focused through the housing opening of the jet trap focused Laser beam is maximum.
  • the diameter of the housing opening of the jet trap corresponds to the focus diameter of the laser beam and the focal position to be set lies in the plane of the housing opening of the jet trap in the beam direction.
  • a particularly effective positioning of the nozzle above the jet trap is effected according to the invention by means of a measurement of the capacitance between the nozzle and a nozzle counterpart adapted in its shape to the nozzle on the jet trap.
  • FIG. 2 shows the arrangement of scattered light sensors in a housing interior of the laser machining head according to the invention according to a further exemplary embodiment of the invention
  • FIG. 3 shows the arrangement of scattered light sensors within a housing interior of the laser machining head according to the invention, according to a further exemplary embodiment of the invention
  • FIG. 4A shows a greatly simplified sectional view of a system according to the invention comprising a laser processing head and a beam trap in the case of an unadjusted laser beam,
  • FIG. 4B shows a greatly simplified sectional view of a laser processing head and beam trap system according to the invention in the case of an adjusted laser beam
  • FIG. 5 shows a block diagram of the scattered-light sensors used, a beam-trap sensor, a focus-position adjustment unit and an actuator according to the invention
  • FIG. 6 shows an illustration of a method according to the invention for adjusting a focal position of a laser beam
  • FIG. 7 shows an illustration of a further method according to the invention for adjusting a focal position of a laser beam.
  • FIG. 1 there is shown a greatly simplified view of a system 10 for adjusting a focus position of a laser beam 12 having a laser processing head 14 as used with laser processing machines or equipment.
  • the laser processing machine coming from the laser processing machine beitslaserstrahl 12 through a housing 16 of the laser processing head 14 passes through a workpiece (not shown) and focused by means of focusing optics 18 on the workpiece.
  • the working laser beam 12, when supplied to the laser processing head 14 by means of an optical fiber, may be expanded by collimator optics (not shown) due to the outcoupling of the laser beam 12 from the optical fiber.
  • a cutting nozzle 20 is provided on the underside of the housing 16 of the laser processing head 14, which is provided to blow out the melted workpiece material from the area to be cut in a cutting operation.
  • the laser beam 12 is usually focused by means of the focusing optics 18 through the cutting nozzle 20 onto a workpiece.
  • the system 10 for adjusting a focal position of the laser beam 12 comprises the laser processing head 14 and furthermore a beam trap 24.
  • the laser processing head 14 has an actuator 26 which is connected to the focusing optics 18 in order to adjust the focusing optics 18 in the beam direction and in a plane perpendicular to the beam path of the laser beam 12.
  • the laser processing head 14 further has inside the housing 16 at least one scattered light sensor 28, which is mounted in the housing 16 in the beam direction in front of the focusing optics 18, to scattered light, which generates by scattering or reflection on parts of the housing 16 or the nozzle 20 is to detect, as indicated by the dashed arrows A. In the case shown in FIG.
  • the at least one scattered light sensor 28 is connected via a signal line 30 to a focus position adjustment unit 32 in order to transmit a scattered light intensity signal which contains information about the scattered light intensity received by one of the at least one scattered light sensor 28.
  • the transmitted scattered light intensity signal is such that it is directly proportional to the measured scattered light intensity in terms of its signal strength, that is, for example, corresponds to a simple voltage signal on the signal line 30.
  • the focus position adjustment unit 32 is connected via a control line 34 to the actuator 26 to control the actuator 26 so that the focusing optics 18 both in the beam direction or z-direction or in a plane perpendicular to the beam direction, ie in the x / y direction is adjusted.
  • the actuator 26 may in this case be any mechanical actuator which allows a precise adjustment of the focusing lens 18, that is, for example, an array of stepper motors, each adjusting screws move in the appropriate directions or a piezo-mechanical actuator, which moves the focusing optics 18 in different directions.
  • the beam trap 24 is intended to be located below the opening 22 of the nozzle 20 and to measure the intensity of the focused laser beam 12 which passes through a housing opening 36 of the beam trap 24 by means of a beam trap sensor 38.
  • the beam trap sensor 38 is connected to the focus position adjusting unit 32 via a beam trap signal line 40 to transmit an intensity signal to the focus position adjusting unit 32.
  • the intensity signal of the beamfall sensor 38 contains information about the laser beam intensity measured in the beam trap 24 by the beamfall sensor 38, wherein the intensity signal can be a digital data signal or in the simplest case can be directly proportional to the laser beam intensity measured by the beamfall sensor 38 in terms of its signal strength.
  • the use of the beam trap 24 is not absolutely necessary for an adjustment of the laser beam 12 through the nozzle opening 22 of the cutting nozzle 20.
  • the focus position adjustment unit 32 can also perform an adjustment process of the focusing optics 18 by the actuator 26 only on the basis of scattered light intensity signals of the at least one scattered light sensor 28.
  • the jet trap signal line 40 can be detachably connected to the focus position adjustment unit 32, wherein a simple plug-in device is conceivable.
  • FIG. 1 shows only a scattered light sensor 28 in the interior of the housing 16 of the laser processing head 14.
  • the invention is not limited to the use of only a scattered light sensor 28, so several scattered light sensors 28 may be mounted inside the housing 16 of the laser processing head 14, as in Figures 2 and 3, which are schematic plan views of the housing 16 of the laser processing head 14 , is shown. So it is conceivable, for example, in a cylindrical housing 16 of the laser processing head 14 three scattered light sensors 28 circumferentially equally spaced at the same height in the laser beam direction, whereby the scattered light sensors 28 are arranged at corresponding edges of an equilateral triangle.
  • the focus position adjustment it is also possible, with the use of three scattered light sensors 28, to mount them in other arrangements in the interior of the housing 16, it is only important that the three scattered light sensors 28 are not arranged within a straight line connecting them in order to be able to clearly detect a direction from which scattered light with a particularly high intensity falls on the inner walls of the housing 16.
  • the use of three scattered light sensors 28 is not limited to that the housing 16 of the laser processing head 14 is cylindrical, it is also conceivable to arrange the scattered light sensors within a box-shaped housing 16 in the manner described above.
  • FIG. 3 shows a further exemplary embodiment of an arrangement of scattered-light sensors 28, the housing 16 of the laser-machining head 14 being square in plan view is shown.
  • four stray light sensors 28 are mounted on opposite sides of the housing 16, whereby the scattered light sensors 28 are arranged in the present case at edges of a square.
  • the scattered light sensors 28 it is also conceivable to arrange the scattered light sensors 28 on edges of a rectangle.
  • the scattered light sensors 28 in FIG. 3 advantageously again lie at the same height in the direction of the laser beam within the housing 16 of the laser processing head 14.
  • the sensor surfaces of the scattered light sensors 28 shown in FIG. 2 and FIG Shown in FIGS. 4A and 4B are schematic sectional views of the system 10 for adjusting a focus position of the laser beam 12, with respect to the laser processing head 14, only the cutting nozzle 20 being shown.
  • the jet trap 24 has a housing 42 with the housing opening 36, the jet trap sensor 38 being arranged in a lateral region in the interior of the housing 42 of the jet trap 24.
  • the beam trap 24 may be formed as a hollow body, wherein the interior of the housing 42 is such that a laser beam entering the housing is no longer reflected by the inner walls of the housing 42, so that the incoming light no longer pass through the housing opening 36 to the outside can. In the design of the beam trap 24, customary techniques for realizing a beam trap can be used.
  • the jet trap 24 further has, on its side facing the laser processing head 14 and the cutting nozzle 20, a nozzle counterpart 44 which has a surface 48 opposite an end face 46 of the cutting nozzle 20.
  • the nozzle counterpart 44 may be formed integrally with the housing 42 of the jet trap 24, but it is also conceivable to attach the nozzle counterpart 40 separately to the housing 42 of the jet trap 24.
  • the housing opening 36 may be tapered again on the surface 48 within the nozzle counterpart 44, that is to say have a smaller diameter in the case of a bore.
  • the nozzle counterpart 44 is provided to align the nozzle 20 with its opening 22 on the housing opening 36 of the beam trap 24 in a particularly simple manner, as described below.
  • the alignment of the nozzle 20 on the jet trap 24 according to the invention by means of a capacitive coupling between the nozzle 20 and nozzle counterpart 44, wherein both the nozzle 20 and the nozzle counterpart 44 must be made of a conductive material, preferably a metal.
  • an alignment of the nozzle 20 on the Nozzle counterpart 44 can be achieved by means of an alignment unit (not shown) in that the shape of the nozzle counter piece 44 is adapted to the shape of the end face 46 of the nozzle 20, whereby the capacity becomes maximum at an optimal alignment.
  • the surface 48 of the nozzle counterpart 44 and the end face 46 of the nozzle 20 have a circular diameter of the same diameter (in Figs. 4A and 4B, the respective diameters are shown differently, but equal diameter surfaces are preferred), thereby providing accurate alignment due to the optimum overlap of the surfaces 48 and 46, the capacity in the aligned case is highest.
  • the distance between the end face 46 of the nozzle 20 and the surface 48 of the nozzle counterpart 44 is preferably 1 mm.
  • the surface 48 of the nozzle counterpart 44 opposite the cutting nozzle 20 is thus adapted to the end face 46 of the nozzle electrode of the nozzle 20 in such a way that the capacitive distance signal can be evaluated so that the cutting nozzle 20 is aligned centrally with the nozzle opening 44 over the nozzle opening 36 can.
  • a laser beam 12 is turned on.
  • the laser beam 12 strikes an inner wall the passage through the nozzle 20 and is backscattered in the direction of the housing 16 or reflected back, as indicated for example in Figure 1 by the dashed arrow A.
  • the scattered light intensity signal of the scattered light sensor 28 (when using multiple scattered light sensors 28, the average scattered light intensity signal) is large and the intensity signal of the beamfall sensor 38 is small.
  • the focusing optics 18 are adjusted by the actuator 26 by means of the focus adjustment unit 32 until the laser beam 12 passes through the opening 22 of the cutting nozzle 22, whereby the scattered light intensity signal of the at least one scattered light sensor 28 is small and the intensity signal of the beamfall sensor 38 is large.
  • both a centric alignment of the laser beam 12 within the opening 22 of the nozzle 20 and a predetermined distance of the focus of the laser beam 12 from the end face 46 of the nozzle 20 can be achieved.
  • the intensity of the scattered light reflected in the housing 16 of the laser processing head 14 is measured independently of a scattering direction by means of a single scattered light sensor 28 or by means of a plurality of scattered light sensors 28, wherein the measured scattered light intensities are averaged in the measurement by means of a plurality of scattered light sensors 28 .
  • An inventive method for adjusting the laser beam 12 within the nozzle opening 22 of the nozzle 20 by means of only a scattered light intensity is shown in Figures 5 and 6.
  • the focus position adjustment unit 32 which receives scattered light intensity signals of at least one scattered light sensor 28 via signal lines 38.
  • the focus position adjustment unit 32 averages in the case of multiple scattered light sensors 28, the received signal and controls the control line 34, the actuator 26, which adjusts the focusing optics 18 in the x- / y-direction.
  • the focus position adjustment unit 32 further receives the intensity signal from the beamfall sensor 38 via the beamfall signal line 40, which signal is useful for the adjustment process as shown in FIG. 6 (by simultaneously comparing the intensity signal of the beamfall sensor 38 and the scattered light sensor 28), but not essential borrowed.
  • the laser beam 12 (indicated by the dashed circle) is moved back and forth in a first direction along a first path B, wherein the scattered light intensity signal of the scattered light sensor 28 is recorded by the focus position adjusting unit 32. After the first path B has been traveled, the point C is determined on the recorded path of the first path B at which the scattered light intensity is minimal.
  • this point C is approached by adjusting the focusing optics 18 and the focusing optics 18 in a second direction along a second path D and moved back, during the process again the scattered light intensity within the housing 16 of the laser processing head 14 is recorded.
  • a point E is determined at which the scattered light intensity measured by the scattered light sensor 28 is minimal and this point E on the recorded travel of the second path D is approached by adjusting the focusing optics 18. This adjustment procedure can be repeated several times until the scattered light intensity has reached an absolute minimum.
  • the first direction of the first path B and the second direction of the second path D are preferably in the x- / y-direction perpendicular to the beam axis of the laser beam 12 and perpendicular to each other.
  • the laser beam can be guided line by line over the nozzle 20 and the scattered light intensity can be recorded during the scanning process by means of the laser beam 12, whereby the point with the lowest scattered light intensity can be determined immediately after the scanning process without an iterative process ,
  • the adjustment of the laser beam 12 is performed by evaluating the scattered light intensity signals of at least 3 scattered light sensors 28 (the adjustment method shown in FIG. 7 is applicable to those shown in FIG. 2 and FIG Arrangements of scattered light sensors 28). Due to the independent evaluation of the scattered light intensity signals of the four scattered light sensors 28, it is possible, due to a determination of the direction of the scattered light, to guide the laser beam 12 stepwise into the region of the opening 22 of the nozzle 20.
  • the focus position adjustment unit 32 evaluates the scattered light intensity signals which are transmitted by the scattered light sensors 28 via the signal lines 30 (FIG. 5) at predetermined time intervals and determines a scattered light intensity gradient, which from the point of view of the scattered light sensors, by weighting the different positions of the scattered light sensors 28 with their corresponding scattered light intensities
  • Fig. 28 illustrates a preferred direction of scattered light scattered or reflected by the nozzle member.
  • the preferred direction of the scattered light may point to an opposite side of the housing 16 to an inner wall of the nozzle 20, which is hit by the laser beam 12, but it is also possible that after reflection on the housing wall the preferred direction of the Stray light is reversed accordingly, as shown in Figure 1.
  • the focus position adjustment unit 32 may have special means for evaluating the plurality of scattered light intensity signals of the plurality of scattered light sensors 28 in order to determine the basis of the scattered light intensity profile of the different scattered light sensors 28. Toward the direction of stray light to evaluate the direction in which the laser beam 12 must be adjusted in an adjustment step to move the laser beam 12 in the direction of the opening 22 of the nozzle 20.
  • the constellation of scattered light sensors shown in FIG. 7 is to be used, wherein a rectangular housing 16, as indicated in FIG. 1, is to be assumed with the corresponding reflection shown in FIG.
  • the scattered light intensity signals of the four scattered light sensors 28 are evaluated at predetermined time intervals and the scattered light sensor 28 is determined, which measures the lowest scattered light intensity.
  • the focusing optics 18 is adjusted so that the laser beam 12 is moved in the direction of the scattered light sensor with the lowest detected scattered light intensity.
  • the scattered light intensity signals of the four scattered light sensors 28 are evaluated again and again the scattered light sensor 28 is determined with the lowest scattered light intensity.
  • the laser beam 12 can be moved stepwise into the area within the opening 22 of the nozzle 20. In the example shown in FIG. 7, however, it is also possible to move the laser beam 12 in the direction of the gradient on the basis of the determined scattered light intensity gradient, as a result of which the adjustment process is shortened even further in terms of time.
  • the intensity signal of the beamfall sensor 38 can also be used to contribute to the adjustment of the laser beam 12 in the x / y direction, in addition to the scattered light intensity signals read in by the scattered light sensors 28, wherein the focus position adjusting unit 32 optimizes the position of the laser beam 12 so that the intensity signal of the beam trap sensor 38 becomes maximum.
  • the focus position of the laser beam 12 can be adjusted in a simple and accurate manner such that the focused laser beam 12 passes centrally through an aperture 22 of the laser beam 12 Nozzle 20 passes through and the focal position of the laser beam 12 in the beam direction has a predetermined distance from the opening 22 of the nozzle 20.
  • the focus position of a laser beam is optimized by comparing optical signals in the cutting head 14 and in a beam trap 24, wherein only the focusing optics 18 is adjusted, otherwise no mechanical processes are required.
  • the focus position of the laser beam can be optimized in a dormant mechanics.
  • the entry aperture 36 of the beam trap 24 is adapted to the laser beam focus diameter.

Abstract

L'invention concerne une tête d'usinage par laser (14) utilisée pour usiner une pièce avec un faisceau laser (12), qui comprend un boîtier (16) à travers lequel est guidée une trajectoire pour le faisceau laser (12) et qui présente une optique de focalisation (18) pour focaliser le faisceau laser (12) à travers un ajutage (20) sur la pièce à usiner et qui comprend également un élément de réglage (26) relié à l'optique de focalisation (18), pour déplacer l'optique de focalisation (18) dans la direction du faisceau et dans un plan perpendiculaire à la trajectoire du faisceau, au moins un détecteur de lumière diffuse (28), monté dans le boîtier (16) et servant à détecter la lumière diffuse produite par dispersion ou réflexion du faisceau laser (12) sur des parties du boîtier (16) ou de l'ajutage (20), ainsi qu'une unité d'ajustement de la position du foyer (32) reliée au détecteur de lumière diffuse (28) et servant à recevoir un signal d'intensité de lumière diffuse, ladite unité d'ajustement de position du foyer (32) étant conçue de manière à réguler l'élément de réglage (26) de l'optique de focalisation (28) afin que l'intensité de lumière diffuse reçue par le détecteur de lumière diffuse (28) soit minimale.
PCT/EP2010/005780 2009-09-22 2010-09-21 Tête d'usinage par laser munie d'une unité d'ajustement de la position du foyer, et système et procédé pour ajuster la position du foyer d'un faisceau laser WO2011035888A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE112010003743.4T DE112010003743B4 (de) 2009-09-22 2010-09-21 System und Verfahren zum Justieren einer Fokuslage eines Laserstrahls
CH00388/12A CH703957B1 (de) 2009-09-22 2010-09-21 Laserbearbeitungskopf mit einer Fokuslagenjustageeinheit sowie ein System und ein Verfahren zum Justieren einer Fokuslage eines Laserstrahls.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009042529.2 2009-09-22
DE102009042529A DE102009042529A1 (de) 2009-09-22 2009-09-22 Laserbearbeitungskopf mit einer Fokuslagenjustageeinheit sowie ein System und ein Verfahren zum Justieren einer Fokuslage eines Laserstrahls

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Publication Number Publication Date
WO2011035888A1 true WO2011035888A1 (fr) 2011-03-31

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CH (1) CH703957B1 (fr)
DE (2) DE102009042529A1 (fr)
WO (1) WO2011035888A1 (fr)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103212788A (zh) * 2012-01-19 2013-07-24 昆山思拓机器有限公司 激光切割折转光路与聚焦镜自准直系统
EP2687317A1 (fr) * 2012-07-20 2014-01-22 Bystronic Laser AG Machine de traitement au laser, en particulier machine de coupe au laser, ainsi que le procédé d'ajustage d'un faisceau laser focalisé
US9289852B2 (en) 2011-01-27 2016-03-22 Bystronic Laser Ag Laser processing machine, laser cutting machine, and method for adjusting a focused laser beam
US9296067B2 (en) 2011-01-27 2016-03-29 Bystronic Laser Ag Laser processing machine, in particular laser cutting machine, and method for centering a laser beam, in particular a focused laser beam
US9839975B2 (en) 2013-12-12 2017-12-12 Bystronic Laser Ag Method for configuring a laser machining machine
US9937590B2 (en) 2010-07-22 2018-04-10 Bystronic Laser Ag Laser processing machine
WO2019115449A1 (fr) * 2017-12-13 2019-06-20 Messer Cutting Systems Gmbh Procédé et unité d'ajustement servant à ajuster de manière automatisée un rayon laser d'un machine d'usinage par laser, ainsi que machine d'usinage par laser comprenant l'unité d'ajustement
US10712151B2 (en) 2017-05-15 2020-07-14 Precitec Gmbh & Co. Kg Sensor device for determining alignment/misalignment of a laser beam relative to a gas nozzle of a laser machining head
CN112935530A (zh) * 2021-04-25 2021-06-11 山东大学深圳研究院 一种确定脉冲激光焦点位置的方法及装置
WO2022150722A3 (fr) * 2021-01-11 2022-09-01 Nlight, Inc. Ensemble optique pour modifier l'ouverture numérique d'un faisceau laser

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017213511A1 (de) * 2017-08-03 2019-02-07 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Verfahren zur Lasermaterialbearbeitung und Lasermaschine
JP6546229B2 (ja) * 2017-08-23 2019-07-17 ファナック株式会社 レーザ加工前に外部光学系の汚染の種類及びレベルに応じて焦点シフトを調整するレーザ加工方法
US10953492B2 (en) 2017-09-19 2021-03-23 Raytheon Technologies Corporation Method and apparatus for auto-aligning of a process gas jet nozzle and laser machining beam
DE102019120398B3 (de) 2018-08-17 2020-01-30 Precitec Gmbh & Co. Kg Laserbearbeitungssystem und Verfahren für eine zentrische Ausrichtung eines Laserstrahls in einem Bearbeitungskopf eines Laserbearbeitungssystems
DE102018131889B4 (de) 2018-09-27 2021-08-12 Scansonic Mi Gmbh Laserstrahljustiervorrichtung

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0597771A1 (fr) * 1992-11-13 1994-05-18 Commissariat A L'energie Atomique Dispositif de contrôle du centrage d'un faisceau lumineux, application à l'introduction de ce faisceau dans une fibre optique
DE10130875A1 (de) 2001-06-27 2003-01-23 Precitec Kg Wechseleinrichtung für einen Linsenhalter eines Anschlußkopfes zur Bearbeitung eines Werkstücks mittels eines Laserstrahls und Verfahren zur Kontrolle einer Fokussieroptik für die Laserbearbeitung
WO2003061895A1 (fr) 2002-01-21 2003-07-31 Permanova Lasersystem Ab Unite destinee a visualiser un faisceau laser dans un systeme d'usinage laser
EP1561538A1 (fr) * 2004-02-05 2005-08-10 Messer Cutting & Welding GmbH Dispositif d'ajustement du centrage et de la focalisation d'un faisceau laser dans une machine d'usinage par laser
EP1600241A2 (fr) 2004-05-26 2005-11-30 Yamazaki Mazak Corporation Dispositif ajusteur focalisation pour une machine à faisceau laser
DE102007029787B3 (de) 2007-06-27 2008-09-11 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Verfahren zum Ermitteln eines Berührungspunkts eines Laserstrahls an einer Kante eines Körpers und Laserbearbeitungsmaschine
DE102007013623A1 (de) * 2007-03-21 2008-10-02 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Verfahren und Vorrichtung zum Ausrichten eines Laserstrahls
DE102007048471A1 (de) * 2007-10-09 2009-04-23 Trumpf Laser- Und Systemtechnik Gmbh Verfahren zum Bestimmen der Lage eines Laserstrahls relativ zu einer Düsenöffnung, Laserbearbeitungsdüse und Laserbearbeitungskopf
DE102007063627A1 (de) 2007-10-02 2009-04-23 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Verfahren zur Fokuslagenbestimmung und Verfahren zur Bestimmung der Lage eines Laserstrahls relativ zu einer Öffnung, sowie Laserbearbeitungsdüse

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60223688A (ja) * 1984-04-20 1985-11-08 アマダ　エンジニアリング　アンド　サ−ビス　カンパニ−　インコ−ポレ−テツド レ−ザ光軸調整方法
JPS63177990A (ja) * 1987-01-19 1988-07-22 Mitsubishi Electric Corp ノズル光軸ずれ検出装置
DE3933057A1 (de) * 1989-10-04 1991-04-18 Doerries Scharmann Gmbh Verfahren und vorrichtung zur bestimmung der position und des durchmessers des brennflecks (fokus) eines laserstrahls, insbesondere zur verwendung fuer die werkstoffbearbeitung mit einem hochleistungslaserstrahl

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0597771A1 (fr) * 1992-11-13 1994-05-18 Commissariat A L'energie Atomique Dispositif de contrôle du centrage d'un faisceau lumineux, application à l'introduction de ce faisceau dans une fibre optique
DE10130875A1 (de) 2001-06-27 2003-01-23 Precitec Kg Wechseleinrichtung für einen Linsenhalter eines Anschlußkopfes zur Bearbeitung eines Werkstücks mittels eines Laserstrahls und Verfahren zur Kontrolle einer Fokussieroptik für die Laserbearbeitung
WO2003061895A1 (fr) 2002-01-21 2003-07-31 Permanova Lasersystem Ab Unite destinee a visualiser un faisceau laser dans un systeme d'usinage laser
EP1561538A1 (fr) * 2004-02-05 2005-08-10 Messer Cutting & Welding GmbH Dispositif d'ajustement du centrage et de la focalisation d'un faisceau laser dans une machine d'usinage par laser
EP1600241A2 (fr) 2004-05-26 2005-11-30 Yamazaki Mazak Corporation Dispositif ajusteur focalisation pour une machine à faisceau laser
DE102007013623A1 (de) * 2007-03-21 2008-10-02 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Verfahren und Vorrichtung zum Ausrichten eines Laserstrahls
DE102007029787B3 (de) 2007-06-27 2008-09-11 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Verfahren zum Ermitteln eines Berührungspunkts eines Laserstrahls an einer Kante eines Körpers und Laserbearbeitungsmaschine
DE102007063627A1 (de) 2007-10-02 2009-04-23 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Verfahren zur Fokuslagenbestimmung und Verfahren zur Bestimmung der Lage eines Laserstrahls relativ zu einer Öffnung, sowie Laserbearbeitungsdüse
DE102007048471A1 (de) * 2007-10-09 2009-04-23 Trumpf Laser- Und Systemtechnik Gmbh Verfahren zum Bestimmen der Lage eines Laserstrahls relativ zu einer Düsenöffnung, Laserbearbeitungsdüse und Laserbearbeitungskopf

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9937590B2 (en) 2010-07-22 2018-04-10 Bystronic Laser Ag Laser processing machine
US9289852B2 (en) 2011-01-27 2016-03-22 Bystronic Laser Ag Laser processing machine, laser cutting machine, and method for adjusting a focused laser beam
US9296067B2 (en) 2011-01-27 2016-03-29 Bystronic Laser Ag Laser processing machine, in particular laser cutting machine, and method for centering a laser beam, in particular a focused laser beam
CN103212788A (zh) * 2012-01-19 2013-07-24 昆山思拓机器有限公司 激光切割折转光路与聚焦镜自准直系统
EP2687317A1 (fr) * 2012-07-20 2014-01-22 Bystronic Laser AG Machine de traitement au laser, en particulier machine de coupe au laser, ainsi que le procédé d'ajustage d'un faisceau laser focalisé
US9839975B2 (en) 2013-12-12 2017-12-12 Bystronic Laser Ag Method for configuring a laser machining machine
US10712151B2 (en) 2017-05-15 2020-07-14 Precitec Gmbh & Co. Kg Sensor device for determining alignment/misalignment of a laser beam relative to a gas nozzle of a laser machining head
WO2019115449A1 (fr) * 2017-12-13 2019-06-20 Messer Cutting Systems Gmbh Procédé et unité d'ajustement servant à ajuster de manière automatisée un rayon laser d'un machine d'usinage par laser, ainsi que machine d'usinage par laser comprenant l'unité d'ajustement
WO2022150722A3 (fr) * 2021-01-11 2022-09-01 Nlight, Inc. Ensemble optique pour modifier l'ouverture numérique d'un faisceau laser
CN112935530A (zh) * 2021-04-25 2021-06-11 山东大学深圳研究院 一种确定脉冲激光焦点位置的方法及装置
CN112935530B (zh) * 2021-04-25 2022-12-13 山东大学深圳研究院 一种确定脉冲激光焦点位置的方法及装置

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